CN220804145U - Clamp for gluing mask plate with extremely small size - Google Patents
Clamp for gluing mask plate with extremely small size Download PDFInfo
- Publication number
- CN220804145U CN220804145U CN202322250257.XU CN202322250257U CN220804145U CN 220804145 U CN220804145 U CN 220804145U CN 202322250257 U CN202322250257 U CN 202322250257U CN 220804145 U CN220804145 U CN 220804145U
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- mask plate
- glued
- minimum size
- mask
- size
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- 238000004026 adhesive bonding Methods 0.000 title claims abstract description 44
- 238000007789 sealing Methods 0.000 claims abstract description 49
- 238000003892 spreading Methods 0.000 claims description 12
- 239000011248 coating agent Substances 0.000 claims description 8
- 238000000576 coating method Methods 0.000 claims description 8
- 239000000463 material Substances 0.000 claims description 4
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 claims description 3
- 229910052782 aluminium Inorganic materials 0.000 claims description 3
- 239000003292 glue Substances 0.000 abstract description 13
- 238000000034 method Methods 0.000 abstract description 5
- 238000010073 coating (rubber) Methods 0.000 description 10
- 238000004519 manufacturing process Methods 0.000 description 8
- 238000003860 storage Methods 0.000 description 8
- 230000006978 adaptation Effects 0.000 description 5
- 230000004308 accommodation Effects 0.000 description 2
- 238000011161 development Methods 0.000 description 2
- 210000001503 joint Anatomy 0.000 description 2
- 229910000838 Al alloy Inorganic materials 0.000 description 1
- 206010013082 Discomfort Diseases 0.000 description 1
- 239000000956 alloy Substances 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 238000005336 cracking Methods 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000012827 research and development Methods 0.000 description 1
- 239000000758 substrate Substances 0.000 description 1
Landscapes
- Preparing Plates And Mask In Photomechanical Process (AREA)
Abstract
The utility model discloses a clamp for gluing a mask plate with an extremely small size, which comprises a placing base, wherein the outer diameter size of the placing base is matched with the size of any mask plate produced in a large scale; the method comprises the steps that a containing groove is formed in a placing base, the center of the containing groove is located right above the center of the placing base, a mask plate with the minimum size to be glued is placed in the containing groove, a vacuumizing hole, a plurality of support columns and a sealing ring are formed in the bottom surface of the containing groove, the vacuumizing hole and all the support columns are located on the inner side of the sealing ring, and the outer diameter of the sealing ring is smaller than the outer diameter of the mask plate with the minimum size to be glued; all the support columns form a support surface for supporting the mask plate with the minimum size to be glued, and before the mask plate with the minimum size to be glued is placed in the accommodating groove, the top surface of the sealing ring is higher than the support surface of the support columns; the clamp for gluing solves the problem that in the prior art, matched mask gluing equipment cannot glue a mask with extremely small size due to frame limitation.
Description
Technical Field
The utility model belongs to the field of mask gluing, and particularly relates to a clamp for gluing a mask with a very small size.
Background
In the mask plate production process, mask plate gluing is an indispensable link. The number of mask gluing devices of each mask manufacturer is limited by controlling the production cost, and the mask gluing devices of each manufacturer are suitable for mass production of masks due to the frame limitation of the device and the cost control. If the minimum size of the gluing photomask which can be produced by our department is 800 multiplied by 920mm, the gluing of the smaller size photomask cannot be performed, so that the diversity of our department in producing the photomask is limited, and the capacity in producing the photomask is reduced. Meanwhile, in the research and development of the mask performance, a large number of small-size and very small-size masks are required to be produced, so that the existing gluing matched equipment is difficult to carry out gluing operation on the small-size and very small-size masks, and the development and updating of the masks are affected. The mask plate with the extremely small size refers to a mask plate with the size smaller than the minimum size which can be produced in mass production.
Disclosure of utility model
The utility model aims to provide a clamp for coating a mask plate with an extremely small size, which solves the problem that matched mask plate coating equipment in the prior art cannot coat the mask plate with the extremely small size due to the limitation of a frame.
The technical scheme of the utility model relates to a clamp for gluing a mask plate with an extremely small size, which comprises a placing base, wherein the outer diameter of the placing base is matched with the size of any mask plate produced in a large scale; the device comprises a placing base, a placing groove, a vacuum hole, a plurality of support columns and a sealing ring, wherein the placing groove is arranged on the placing base, the center of the placing groove is positioned right above the center of the placing base, a mask plate with the minimum size to be glued is placed in the placing groove, the bottom surface of the placing groove is provided with the vacuum hole, the support columns and the sealing ring, the vacuum hole and the support columns are positioned on the inner side of the sealing ring, and the outer diameter of the sealing ring is smaller than the outer diameter of the mask plate with the minimum size to be glued; all the support columns form a support surface for supporting the mask plate with the minimum size to be glued, and before the mask plate with the minimum size to be glued is placed in the accommodating groove, the top surface of the sealing ring is higher than the support surface of the support columns.
Preferably, the depth of the accommodating groove is larger than the thickness of the mask plate with the extremely small size to be glued; the distance from the supporting surface to the upper surface of the placement base is adapted to the thickness of the mask plate with the minimum size to be glued, the mask plate with the minimum size to be glued is placed in the accommodating groove, and after vacuumizing is carried out in the sealing area of the sealing ring at the bottom of the mask plate with the minimum size to be glued, the top surface of the mask plate with the minimum size to be glued is flush with the bottom surface of the placement base.
Preferably, the vacuumizing hole is formed in the central position of the accommodating groove, a plurality of mounting holes are formed in the accommodating groove, the support columns are mounted in the mounting holes, four support columns are arranged and symmetrically arranged around the center of the vacuumizing hole, and the distance between the support columns and the vacuumizing hole is matched with the distance between the support columns and the side surfaces of the nearer sealing rings.
Preferably, the accommodating groove is rectangular, the size of the accommodating groove is matched with that of the mask plate with the minimum size to be glued, the four vertex angle positions of the accommodating groove with the rectangular shape are arranged to be open-type convex rounded corners, and the vertex angle of the mask plate with the minimum size to be glued is positioned inside the open-type convex rounded corners.
Preferably, the radius of the open-type convex fillet is not smaller than 15mm, and the position of the bottom surface in the accommodating groove at the position of the open-type convex fillet is lower than the position of the bottom surface in the accommodating groove of the coverage area of the mask plate with the minimum size to be glued.
Preferably, an annular clamping groove is formed in the inner bottom surface of the accommodating groove, the annular clamping groove is matched with the shape of the sealing ring, and the sealing ring is clamped in the annular clamping groove.
Preferably, the placement base is made of an aluminum material.
The technical scheme of the utility model has the beneficial effects that the clamp for coating the mask with the extremely small size is as follows:
1. Through adopting the external diameter size to place the base with arbitrary mass production's mask size phase adaptation to and set up the storage tank on placing the base, will wait the minimum size mask of rubber coating and place the storage tank in, then will place the base and place the rubber coating position of spreading machine in, utilize to place base and spreading machine size phase adaptation, solve the problem of minimum size mask and spreading machine adaptation, realize that the spreading machine carries out the rubber coating operation to the minimum size mask of uncomfortableness.
2. The mask plate with the minimum size is fixed by arranging the support columns, so that the problem that the mask plate deforms when being fixed in vacuum is avoided.
Drawings
Fig. 1 is a schematic structural diagram, that is, a top view, of a clamp for coating a mask plate with a very small size according to the scheme.
Fig. 2 is an enlarged view of a portion a in fig. 1, that is, a schematic view of placing a mask plate with a very small size in the accommodating groove.
Fig. 3 is a cross-sectional view of a clamp for coating a mask with a very small size according to the present technical scheme.
Fig. 4 is an enlarged view of fig. 3B, i.e., a cross-sectional view of a very small-sized reticle after being placed in a receiving slot.
Detailed Description
In order to facilitate the understanding of the technical scheme of the present utility model by those skilled in the art, the technical scheme of the present utility model will be further described with reference to specific embodiments and drawings attached to the specification.
As shown in fig. 1 to fig. 4, the technical scheme of the utility model provides a clamp for gluing a mask plate with a very small size, wherein the very small size mask plate is smaller than the size of the mask plate with the smallest size which can be produced in mass by a user, the clamp for gluing comprises a placing base 1, the outer diameter size of the placing base 1 is suitable for the size of any mask plate which can be produced in mass, for example, the smallest size of a gluing photomask plate which can be produced by the user is 800×920mm, the outer diameter size of the placing base 1 is 800×920mm, on one hand, the placing base 1 is matched with gluing equipment, on the other hand, the use of materials of the placing base 1 is reduced, the cost is reduced, the weight of the placing base 1 is reduced, and the taking is convenient. Of course, the outer diameter of the placing base 1 can also be matched with the mask sizes of other sizes of mass production of the substrate, and the placing base 1 is only required to be matched with the existing glue spreader.
According to the technical scheme, the accommodating groove 2 is formed in the accommodating base 1, the center of the accommodating groove 2 is located right above the center of the accommodating base 1, the vacuumizing device and the gluing operation device on the gluing equipment are convenient to adapt to the mask plate 10 with the minimum size to be glued, gluing is achieved, the positions and the structures of all parts of the original gluing equipment are not changed, and the working mode and the control process of the gluing equipment are not changed.
In this scheme, wait that minimum size mask 10 of rubber coating is arranged in holding tank 2, is provided with a evacuation hole 4, a plurality of support column 5 and a sealing ring 3 on the bottom surface of holding tank 2, evacuation hole and former rubber coating equipment go up evacuating device butt joint, evacuation hole 4 and all support columns 5 all are located sealing ring 3 inboard, and sealing ring 3 external diameter is less than the minimum size mask 10 external diameter of waiting the rubber coating. After the mask plate 10 with the minimum size to be glued is placed in the accommodating groove 2, the vacuumizing device on the original gluing equipment vacuumizes through the vacuumizing hole, so that the mask plate 10 with the minimum size to be glued is fixed in the accommodating groove 2, namely, fixed on the placing base 1, and the mask plate 10 with the minimum size to be glued is fixed in the gluing equipment, and gluing operation is realized. The method realizes the gluing operation of the original gluing equipment on the mask plate with the small size which is not adapted, promotes the development and updating of the mask plate of the present department, enriches the diversity of the production size of the mask plate of the present department, improves the productivity of the mask plate of the present department and the like.
In the clamp for gluing, all support columns 5 form a support surface 51 for supporting the mask plate 10 with the minimum size to be glued, and before the mask plate 10 with the minimum size to be glued is placed in the accommodating groove 2, the top surface position of the sealing ring 3 is higher than the support surface 51 of the support column 5. The sealing surface of the sealing ring 3 is higher than the supporting surface 51, so that when vacuumizing is performed, the mask plate with the minimum size can downwards press the sealing ring, the sealing performance is deformed, the sealing surface is completely attached to the bottom surface of the mask plate with the minimum size, the sealing effect is improved, and the sealing performance of the sealing ring to the mask plate with the minimum size in the accommodating groove is ensured.
To sum up, in this scheme, through adopting external diameter size and arbitrary mass production's mask size to adapt to and place the base to and set up the storage tank on placing the base, place the minimum size mask that will wait to glue in the storage tank, then will place the base and place the spreading position of spreading machine, utilize to place base and spreading machine size looks adaptation, solve the problem of minimum size mask and spreading machine adaptation, realize that the spreading machine carries out the spreading operation to the minimum size mask of discomforts.
In the technical scheme, the depth of the accommodating groove 2 is larger than the thickness of the mask plate 10 with the minimum size to be glued. The distance from the supporting surface 51 to the upper surface of the placement base 1 is adapted to the thickness of the mask 10 with the smallest size to be glued. After the extremely small-sized mask plate 10 to be glued is placed in the accommodating groove 2 and the sealing area of the sealing ring 3 at the bottom of the extremely small-sized mask plate 10 to be glued is vacuumized, the bottom surface of the extremely small-sized mask plate 10 to be glued is in full contact with the supporting surface 51 formed by the supporting columns 5, and at the moment, the top surface of the extremely small-sized mask plate 10 to be glued is flush with the bottom surface of the placing base 1. The top surface of the mask plate 10 with the minimum size to be glued is flush with the upper surface of the placement base 1, so that a gluing device on gluing equipment can conveniently carry out gluing operation, and the problem of interference or uneven gluing can not occur. In the same way, the matching degree of the mask plate 10 with the minimum size to be glued and the gluing clamp is guaranteed on the premise of not affecting the gluing process, so that the gluing clamp and the mask plate 10 with the minimum size to be glued can guarantee the safety of the gluing clamp and the mask plate 10 in high-speed rotation of the gluing equipment.
In the technical scheme, the vacuumizing hole 4 is arranged at the center of the accommodating groove 2, so that the vacuumizing hole is conveniently in butt joint with a vacuumizing device of the gluing equipment. A plurality of mounting holes 52 are formed in the accommodating groove 2, the support columns 5 are mounted in the mounting holes 52, the number of the support columns 5 is four, the support columns are symmetrically arranged around the center of the vacuumizing holes 4, and the distance from the support columns 5 to the vacuumizing holes 4 is matched with the distance from the support columns 5 to the side face of the nearer sealing ring 3. The four support columns 5 are arranged, a support surface is formed between the vacuumizing hole 4 and the sealing ring 3, and the mask 10 with the minimum size to be glued is supported. Because the thickness of the extremely small-size mask plate 10 to be glued is thinner, the outer diameter of the opposite extremely small-size mask plate 10 to be glued is larger, namely the outer diameter of the sealing ring 3 is larger, if the extremely small-size mask plate 10 to be glued is supported only by the sealing ring 3, the extremely small-size mask plate 10 to be glued in the inner area of the sealing ring is deformed due to insufficient supporting force, so that a small supporting surface is formed near the middle area between the vacuumizing hole and the sealing ring, the extremely small-size mask plate 10 to be glued is supported, the extremely small-size mask plate 10 to be glued is prevented from deforming or even cracking, and the quality of the extremely small-size mask plate 10 to be glued is ensured.
In this technical scheme, accommodation groove 2 is the rectangle, and the size suits with the minimum size mask version 10 of waiting to glue, and four apex angle positions in accommodation groove 2 that are the rectangle set up to open-type evagination fillet 21, and the apex angle of minimum size mask version 10 of waiting to glue is located inside open-type evagination fillet 21. Through setting up open-type evagination fillet 21 for the apex angle of the minimum size mask version 10 that waits to glue can not the storage tank medial surface contact, in the minimum size mask version 10 that waits to glue put into, take out, the evacuation is fixed, the rotatory scheduling process of gluing, wait that the minimum size mask version 10 apex angle of gluing can not touch with the storage tank medial surface, avoid waiting to glue minimum size mask version 10 to cause the damage, ensure wait that the completion of minimum size mask version 10 of gluing. Meanwhile, the arrangement of the opening type convex fillets 21 improves the operation position for putting in and taking out the mask plate 10 with the minimum size to be glued, and facilitates putting in and taking out the mask plate 10 with the minimum size to be glued.
In this technical scheme, open-type evagination fillet 21 radius is not less than 15mm, and the bottom surface position is less than the minimum size mask 10 coverage area's that waits to glue in the storage tank 2 of setting open-type evagination fillet 21 position storage tank 2 bottom surface position, this scheme one is for the four edges and corners of minimum size mask 10 that wait to glue do not with the rubber coating anchor clamps direct contact, circular space reserves sufficient space for waiting between minimum size mask 10 edges and the rubber coating anchor clamps that wait to glue, is the edge and corner that wait to glue minimum size mask 10 of rubber coating anchor clamps under the circumstances of high-speed rotation in the spreading machine also can not contact with anchor clamps, so greatly reduced the damage of minimum size mask 10 that the rubber coating anchor clamps wait to glue. In order to reserve enough space for taking and placing the minimum-size mask plate 10 to be glued, the scheme II avoids that personnel are in contact with the film surface of the minimum-size mask plate 10 to be glued and cause pollution because of insufficient space when taking and placing the minimum-size mask plate 10 to be glued.
The operation position and the avoiding space are improved for putting in and taking out the mask plate 10 with the minimum size to be glued, so that the mask plate 10 with the minimum size to be glued can be put in and taken out conveniently.
In this technical scheme, be provided with annular draw-in groove 31 on the internal bottom surface of holding groove 2, annular draw-in groove 31 suits with sealing ring 3 shape, and sealing ring 3 card is in as for annular draw-in groove 31, realizes sealing ring 3's fixed, avoids the sealing ring to appear squinting scheduling problem, ensures sealing performance.
In the technical scheme, the placement base 1 is made of aluminum materials. The plate taking and placing device is made of an aluminum alloy material, and has the characteristics of certain stability and plasticity, small deformation and stable structure, and is light in weight, so that an operator can conveniently take and place the plate.
While the present utility model has been described above by way of example with reference to the embodiments and the accompanying drawings, it is apparent that the specific implementation of the present utility model is not limited by the foregoing, and it is within the scope of the present utility model to apply the inventive concept and technical solution to other situations without any substantial improvement or improvement.
Claims (5)
1. The clamp for gluing the mask with the extremely small size is characterized by comprising a placing base, wherein the outer diameter of the placing base is matched with the size of any mask produced in a large scale; the device comprises a placing base, a placing groove, a vacuum hole, a plurality of support columns and a sealing ring, wherein the placing groove is arranged on the placing base, the center of the placing groove is positioned right above the center of the placing base, a mask plate with the minimum size to be glued is placed in the placing groove, the bottom surface of the placing groove is provided with the vacuum hole, the support columns and the sealing ring, the vacuum hole and the support columns are positioned on the inner side of the sealing ring, and the outer diameter of the sealing ring is smaller than the outer diameter of the mask plate with the minimum size to be glued; all the support columns form a support surface for supporting the mask plate with the minimum size to be glued, and before the mask plate with the minimum size to be glued is placed in the accommodating groove, the top surface of the sealing ring is higher than the support surface of the support columns;
the accommodating groove is rectangular, the size of the accommodating groove is matched with that of the mask plate with the minimum size to be glued, the four vertex angle positions of the accommodating groove with the rectangular shape are set to be open-type convex fillets, and the vertex angle of the mask plate with the minimum size to be glued is positioned in the open-type convex fillets;
The radius of the open type convex fillet is not less than 15mm, and the position of the bottom surface in the accommodating groove at the position of the open type convex fillet is lower than the position of the bottom surface in the accommodating groove of the coverage area of the mask plate with the minimum size to be coated.
2. The jig for coating a very small-sized mask according to claim 1, wherein the depth of the receiving groove is larger than the thickness of the very small-sized mask to be coated; the distance from the supporting surface to the upper surface of the placement base is adapted to the thickness of the mask plate with the minimum size to be glued, the mask plate with the minimum size to be glued is placed in the accommodating groove, and after vacuumizing is carried out in the sealing area of the sealing ring at the bottom of the mask plate with the minimum size to be glued, the top surface of the mask plate with the minimum size to be glued is flush with the bottom surface of the placement base.
3. The clamp for coating the mask with the extremely small size according to claim 1, wherein the vacuumizing holes are formed in the central position of the accommodating groove, a plurality of mounting holes are formed in the accommodating groove, the support columns are mounted in the mounting holes, four support columns are symmetrically arranged around the centers of the vacuumizing holes, and the distance from the support columns to the vacuumizing holes is adapted to the distance from the support columns to the side surfaces of the nearer sealing rings.
4. The clamp for coating the mask with the extremely small size according to claim 1, wherein an annular clamping groove is formed in the inner bottom surface of the accommodating groove, the annular clamping groove is adapted to the shape of the sealing ring, and the sealing ring is clamped in the annular clamping groove.
5. The very small-sized reticle spreading jig according to claim 1, wherein the placement base is made of an aluminum material.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202322250257.XU CN220804145U (en) | 2023-08-22 | 2023-08-22 | Clamp for gluing mask plate with extremely small size |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202322250257.XU CN220804145U (en) | 2023-08-22 | 2023-08-22 | Clamp for gluing mask plate with extremely small size |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN220804145U true CN220804145U (en) | 2024-04-19 |
Family
ID=90678088
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202322250257.XU Active CN220804145U (en) | 2023-08-22 | 2023-08-22 | Clamp for gluing mask plate with extremely small size |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN220804145U (en) |
-
2023
- 2023-08-22 CN CN202322250257.XU patent/CN220804145U/en active Active
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