WO2015037701A1 - Industrial robot - Google Patents
Industrial robot Download PDFInfo
- Publication number
- WO2015037701A1 WO2015037701A1 PCT/JP2014/074203 JP2014074203W WO2015037701A1 WO 2015037701 A1 WO2015037701 A1 WO 2015037701A1 JP 2014074203 W JP2014074203 W JP 2014074203W WO 2015037701 A1 WO2015037701 A1 WO 2015037701A1
- Authority
- WO
- WIPO (PCT)
- Prior art keywords
- arm
- portions
- industrial robot
- disposed
- hand
- Prior art date
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Classifications
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
- B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
- B25J19/00—Accessories fitted to manipulators, e.g. for monitoring, for viewing; Safety devices combined with or specially adapted for use in connection with manipulators
- B25J19/0054—Cooling means
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
- B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
- B25J9/00—Programme-controlled manipulators
- B25J9/02—Programme-controlled manipulators characterised by movement of the arms, e.g. cartesian coordinate type
- B25J9/04—Programme-controlled manipulators characterised by movement of the arms, e.g. cartesian coordinate type by rotating at least one arm, excluding the head movement itself, e.g. cylindrical coordinate type or polar coordinate type
- B25J9/041—Cylindrical coordinate type
- B25J9/042—Cylindrical coordinate type comprising an articulated arm
- B25J9/043—Cylindrical coordinate type comprising an articulated arm double selective compliance articulated robot arms [SCARA]
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
- H01L21/67739—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations into and out of processing chamber
- H01L21/67742—Mechanical parts of transfer devices
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G49/00—Conveying systems characterised by their application for specified purposes not otherwise provided for
- B65G49/05—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles
- B65G49/06—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles for fragile sheets, e.g. glass
- B65G49/067—Sheet handling, means, e.g. manipulators, devices for turning or tilting sheet glass
Definitions
- the present invention relates to an industrial robot that transports an object to be transported in a vacuum.
- Patent Document 1 an industrial robot that is installed in a vacuum chamber and transports a glass substrate or the like in a vacuum is known (for example, see Patent Document 1).
- the industrial robot described in Patent Document 1 includes a hand on which a glass substrate or the like is mounted, an arm that is rotatably connected to the distal end side, and a main body portion that is rotatably connected to the base end side of the arm. And.
- the arm is composed of a first arm portion and a second arm portion that are rotatably connected to each other.
- the main body includes a motor storage chamber in which the base end side of the arm is rotatably connected, and a base that rotatably supports the motor storage chamber.
- a motor for rotating the hand, the second arm portion, and the first arm portion is disposed inside the motor storage chamber.
- the hand is connected to the distal end side of the second arm portion.
- the proximal end side of the second arm portion is connected to the distal end side of the first arm portion, and the proximal end side of the first arm portion is rotatably connected to the motor storage chamber.
- the hand, the second arm part, the first arm part, the motor storage chamber and the base are arranged in this order from the upper side in the vertical direction.
- the second arm part, the first arm part, and the motor storage chamber are disposed in a vacuum.
- the motor storage chamber is formed in a hollow shape. In the motor storage chamber, airtightness is ensured, and the inside of the motor storage chamber is at atmospheric pressure.
- the hand on which the object to be transported is connected to the distal end side of the second arm portion, the proximal end side of the second arm portion is connected to the first arm portion, and the hand Is disposed above the second arm portion, and the first arm portion is disposed below the second arm portion. Therefore, when a high-temperature transfer object is transferred by this industrial robot, the temperature of the first arm portion and the temperature of the second arm portion vary, and the connecting portion between the arm and the hand is displaced in an irregular direction. There is a risk of it happening.
- some industrial robots have hands arranged above the first arm and below the second arm.
- the hand on which the object to be transported is arranged above the first arm part, when the industrial object is used to transport a high-temperature object to be transported, the first arm part The temperature of the upper surface portion of the first arm portion becomes higher than the temperature of the lower surface portion of the first arm portion.
- the hand is disposed below the second arm part, and the object to be transported mounted on the hand is also disposed below the second arm part. According to the study, even when a high-temperature transfer object is transferred using this industrial robot, the temperature of the upper surface portion of the second arm portion becomes higher than the temperature of the lower surface portion of the second arm portion.
- the temperature of the upper surface portion of the arm is higher than the temperature of the lower surface portion of the arm.
- the phenomenon that the temperature of the upper surface portion of the second arm portion becomes higher than the temperature of the lower surface portion of the second arm portion is caused by the influence of radiant heat from the wall surface of the vacuum chamber.
- the amount of thermal deformation of the upper surface portion of the arm is greater than the amount of thermal deformation of the lower surface portion. growing. Therefore, there is a possibility that the arm is thermally deformed so that the tip end side of the arm is lowered, and it is impossible to appropriately convey the object to be conveyed by the hand.
- the problem of the present invention is that an industrial robot that transports a transport target object in a vacuum can appropriately transport the transport target object with a hand even when transporting a high-temperature transport target object. It is to provide an industrial robot.
- the industrial robot of the present invention cools the inside of the arm, the hand on which the object to be transported is mounted, the arm that is formed in a hollow shape and the hand is connected to the tip side, and A hand and an arm are arranged in a vacuum, and the arm includes a plurality of arm portions that are formed in a hollow shape and connected to each other so as to be rotatable relative to each other.
- the cooling mechanism individually has the inside of each of the plurality of arm portions. The interior of each of the plurality of arm portions is individually cooled based on the detection result of the temperature sensor.
- the inside of the plurality of arm portions formed in a hollow shape is at atmospheric pressure, and the temperature for measuring the temperature inside the arm portion inside each of the plurality of arm portions.
- a sensor is arranged.
- the cooling mechanism can individually cool each of the plurality of arm portions, and individually cools each of the plurality of arm portions based on the detection result of the temperature sensor. is doing. Therefore, in this invention, it becomes possible to manage each temperature of a several arm part based on the detection result in a temperature sensor. Therefore, in the present invention, even if a position shift occurs in the connection portion between the arm and the hand due to the thermal expansion of the arm, the direction of the position shift of the connection portion can be a regular direction.
- the hand can be appropriately operated.
- the cooling mechanism individually cools the insides of the plurality of arm portions based on the detection result of the temperature sensor so that the internal temperatures of the plurality of arm portions become substantially equal.
- the cooling mechanism includes, for example, a cooling air supply port disposed in each of the plurality of arm portions, and the cooling air is supplied from the supply port based on the detection result of the temperature sensor.
- the cooling air is supplied from the supply port based on the detection result of the temperature sensor.
- the main body portion that rotatably supports the plurality of arm portions is disposed in the atmosphere and the inside thereof is at atmospheric pressure, and the inside of the plurality of arm portions each formed in a hollow shape,
- the atmospheric pressure is maintained by communicating with the inside of the main body through the openings provided in the plurality of arms, and the cooling mechanism is provided from the inside of the main body to the inside of each of the plurality of arms.
- the cooling air can be supplied to the inside of each of the plurality of arm portions via the air piping.
- the plurality of arm portions are connected to the first arm portion rotatably connected to the main body portion side, and are rotatably connected to the distal end side of the first arm portion, and the hand is connected to the distal end side.
- a reduction gear is provided, and the inside of the second arm portion communicates with the inside of the first arm portion through the through hole, and the air pipe is routed from the inside of the first arm portion to the inside of the second arm portion.
- the joint portion may be configured to be provided with a seal portion that prevents outflow of air from the connecting portion between the first arm portion and the second arm portion to the vacuum region.
- the temperature sensor is disposed in the vicinity of the joint portion connecting the arm portions and in the vicinity of the joint portion connecting the arm and the hand. If comprised in this way, it will become possible to estimate the temperature of the bearing arrange
- the industrial robot preferably includes a motor that rotates at least one of the plurality of arm portions and the hand, and the temperature sensor is preferably disposed in the vicinity of the motor. If comprised in this way, it will become possible to detect abnormality of a motor based on the detection result in a temperature sensor, and as a result, it becomes possible to prevent damage to a motor.
- a plurality of temperature sensors having different detection temperatures are arranged inside each of the plurality of arm portions. If comprised in this way, it will become possible to raise the detection accuracy of the internal temperature of an arm part. Therefore, it becomes possible to manage each temperature of a plurality of arm parts with sufficient accuracy.
- the industrial robot of the present invention includes a hand on which an object to be transported is mounted and an arm to which the hand is connected to the tip side, and the hand and the arm are arranged in a vacuum.
- the arm is formed in a hollow shape, the inside of the arm is at atmospheric pressure, and a fan for sending air upward is arranged inside the arm.
- a fan for sending air upward is arranged inside the arm. Therefore, in the present invention, when transporting a high-temperature transport object, it becomes possible to cool the upper surface side portion of the arm to suppress the temperature rise of the upper surface side portion of the arm, and to control the temperature of the upper surface side portion of the arm. Can be brought closer to the temperature of the lower surface side portion of the arm. Therefore, in the present invention, it is possible to bring the amount of thermal deformation of the upper surface side portion of the arm closer to the amount of thermal deformation of the lower surface side portion, and it is possible to suppress the thermal deformation of the arm whose tip side is lowered.
- the conveyance object can be appropriately conveyed by the hand. Further, in the present invention, since the inside of the arm can be cooled using a fan, the amount of thermal deformation of the arm can be suppressed.
- the arm preferably includes a plurality of arm portions that are connected to each other so as to be relatively rotatable, and a fan is preferably disposed in each of the plurality of arm portions. If comprised in this way, even if it is a case where an arm is constituted by a plurality of arm parts, the upper surface side part of an arm can be cooled so that the whole temperature of the upper surface side part of the arm may become substantially equal. It becomes possible.
- the main body portion that rotatably supports the plurality of arm portions is disposed in the atmosphere and the inside thereof is at atmospheric pressure, and the inside of the plurality of arm portions each formed in a hollow shape is It can be made to be maintained at atmospheric pressure by being connected through the openings of each other and also being connected to the inside of the main body.
- a cooling mechanism for cooling the inside of the arm is provided, the cooling mechanism includes an air pipe routed from the inside of the main body part to each of the plurality of arm parts, and the air pipe includes a plurality of air pipes. If the cooling air is supplied to the inside of each of the plurality of arm portions arranged in the arm portion, the inside of the arm portion can be reliably cooled.
- a heat-radiating fin is formed on the upper surface inside the arm. If comprised in this way, since it becomes possible to apply the cooling air sent from a fan to the fin for heat radiation, it becomes possible to cool the upper surface side part of an arm effectively. Therefore, it is possible to effectively suppress the temperature rise of the upper surface side portion of the arm.
- the arm includes a flat upper surface portion that constitutes a part of the upper surface of the arm, the upper surface portion is formed with an opening penetrating in the vertical direction, and the arm is further fixed to the upper surface portion. It is preferable that a lid member that closes the opening from above is provided, and the fin is formed on the lower surface of the lid member. If comprised in this way, even if it is a case where a fin is formed in the upper surface inside the arm formed in a hollow shape, it becomes possible to form a fin easily.
- the lid member is formed in a disc shape, and a plurality of annular fins having different diameters are formed concentrically on the lid member.
- the industrial robot preferably includes a cover member that covers substantially the entire arm, and the thermal conductivity of the cover member is preferably lower than the thermal conductivity of the arm. If comprised in this way, it will become possible to suppress effectively the transmission of the radiant heat from a conveyance target object and the radiant heat from the wall surface of the vacuum chamber in which an industrial robot is arrange
- the fan that sends air upward is arranged inside the arm, if the cover member covers almost the entire arm, the temperature of the upper surface side portion of the arm While eliminating the difference from the temperature of the lower surface side portion of the arm, it is possible to effectively suppress the transmission of radiant heat from the conveyance object or the like to the arm.
- the transport target object can be transported appropriately with a hand.
- the arm to which the hand is connected to the tip side is constituted by a plurality of arm portions that are connected to each other so as to be relatively rotatable, the hand can be appropriately operated when transferring a high-temperature transfer object. Is possible.
- FIG. 5 It is a top view of the industrial robot concerning an embodiment of the invention. It is sectional drawing of the base end side part and arm support part of an arm which are shown in FIG. It is sectional drawing of the arm shown in FIG. It is sectional drawing of the arm shown in FIG. It is an enlarged view of the E section of FIG. It is an enlarged view of the F section of FIG. (A) is a cross-sectional view of the lid member shown in FIG. 5, and (B) is a diagram showing the lid member from the GG direction of (A). It is an enlarged view of the H section of FIG. It is an enlarged view of the J section of FIG. It is a top view of the industrial robot concerning other embodiment of this invention. It is a figure of the industrial robot concerning other embodiment of this invention, (A) is a top view, (B) is a side view.
- FIG. 1 is a plan view of an industrial robot 1 according to an embodiment of the present invention.
- 2 is a cross-sectional view of the base end side portions of the arms 6 and 7 and the arm support portion 8 shown in FIG.
- FIG. 3 is a cross-sectional view of the arm 6 shown in FIG. 4 is a cross-sectional view of the arm 7 shown in FIG.
- the industrial robot 1 of this embodiment (hereinafter referred to as “robot 1”) is, for example, a glass substrate 2 (hereinafter referred to as “substrate 2”) for an organic EL (organic electroluminescence) display, which is an object to be transported. ).
- This robot 1 is used by being incorporated in an organic EL display manufacturing system (not shown), and conveys a high-temperature substrate 2.
- the robot 1 includes two hands 4 and 5 on which a substrate 2 is mounted, an arm 6 to which the hand 4 is pivotably connected to the distal end, and a hand 5 that rotates to the distal end.
- An arm 7 that is movably connected, an arm support portion 8 to which the base ends of the arms 6 and 7 are fixed, and a main body portion 9 to which the arm support portion 8 is rotatably connected are provided.
- the hands 4 and 5, the arms 6 and 7, and the arm support portion 8 are arranged on the upper side of the main body portion 9.
- the upper ends of the hands 4 and 5, the arms 6 and 7, the arm support portion 8 and the main body portion 9 are disposed inside a vacuum chamber constituting an organic EL display manufacturing system. That is, the upper ends of the hands 4 and 5, the arms 6 and 7, the arm support 8 and the main body 9 are arranged in the vacuum region VR (in vacuum), and the portion excluding the upper end of the main body 9 is Arranged in the atmospheric region AR (in the atmosphere) (see FIG. 2), the robot 1 transports the substrate 2 mounted on the hands 4 and 5 in a vacuum.
- the hands 4 and 5 include a base portion 11 connected to the arms 6 and 7 and two fork portions 12 on which the substrate 2 is mounted.
- the fork portion 12 is formed in a straight line shape. Further, the two fork portions 12 are arranged in parallel with a predetermined distance therebetween.
- the main body portion 9 includes a case body 13 formed in a hollow shape, and a hollow rotation shaft 14 fixed to the lower surface of the arm support portion 8 and formed to communicate with the inside of the arm support portion 8. Yes.
- the rotating shaft 14 is formed in an elongated cylindrical shape whose axial direction is the vertical direction.
- the upper end of the rotating shaft 14 is fixed to the lower surface of the arm support portion 8.
- the upper end portion of the rotating shaft 14 protrudes upward from the upper end surface of the case body 13, and the portion of the rotating shaft 14 excluding the upper end portion is accommodated inside the case body 13.
- a motor for rotating the arm support portion 8 with respect to the case body 13 is arranged.
- the lower end side of the rotating shaft 14 is connected to the motor via a pulley, a belt, and a speed reducer.
- an elevating mechanism (not shown) that elevates and lowers the rotating shaft 14 and the like is disposed inside the case body 13.
- the upper end portion of the case body 13 is disposed in the vacuum region VR, and the portion of the case body 13 excluding the upper end portion is disposed in the atmospheric region AR.
- the inside of the case body 13 and the rotating shaft 14 is at atmospheric pressure, and a magnetic fluid seal and a bellows (not shown) for preventing the outflow of air to the vacuum region VR are disposed on the outer peripheral side of the rotating shaft 14.
- the arm support portion 8 is formed in a hollow shape and includes a support portion main body 15 and three lid members 16.
- the lid member 16 is made of an aluminum alloy.
- the lid member 16 is formed in a disc shape.
- the support body 15 is formed of an aluminum alloy.
- the support body 15 includes an upper surface 15a that constitutes the upper surface of the support body 15 and a lower surface that constitutes the lower surface of the support body 15 and is opposed to the upper surface 15a in a substantially parallel manner with a predetermined gap. It is comprised from the part 15b and the side part 15c which connects the outer peripheral end of the upper surface part 15a, and the outer peripheral end of the lower surface part 15b.
- the upper surface portion 15a and the lower surface portion 15b are formed in an elongated and substantially oval flat plate shape, and face each other in the vertical direction.
- the side surface portion 15c is formed in a cylindrical shape having an elongated oval shape when viewed from the vertical direction.
- the upper surface portion 15a is formed with three circular openings 15d and 15e penetrating in the vertical direction. Of the three openings 15d and 15e, one opening 15d is formed at the center of the upper surface 15a, and the remaining two openings 15e are the longitudinal sides of the upper surface 15a formed in a substantially oval shape. It is formed on both ends in the direction.
- the lower surface portion 15b is also formed with three circular openings 15f and 15g penetrating in the vertical direction. Of the three openings 15f and 15g, one opening 15f is formed at the center of the lower surface 15b, and the remaining two openings 15g are the longitudinal length of the lower surface 15b formed in a substantially oval shape. It is formed on both ends in the direction.
- the upper end of the rotating shaft 14 is fixed to the lower surface of the lower surface portion 15b.
- the rotation shaft 14 is fixed to the lower surface of the lower surface portion 15b so as to surround the opening 15f, and the inner peripheral side of the rotation shaft 14 and the inside of the arm support portion 8 communicate with each other. That is, the inside of the arm support portion 8 communicates with the inside of the case body 13 that is the main body portion 9 through the opening 15f, and the inside of the arm support portion 8 is at atmospheric pressure.
- the opening 15 d is closed from the upper side by the lid member 16, and the two openings 15 g are closed from the lower side by the lid member 16.
- annular seal member (illustration omitted) which prevents the outflow of the air to the vacuum area
- the arm 6 is composed of two arm parts, a first arm part 20 and a second arm part 21, which are connected to each other so as to be relatively rotatable.
- the first arm part 20 and the second arm part 21 are formed in a hollow shape. That is, the entire arm 6 is formed in a hollow shape.
- the proximal end side of the first arm portion 20 is fixed to the arm support portion 8.
- the proximal end side of the second arm portion 21 is rotatably connected to the distal end side of the first arm portion 20.
- the hand 4 is rotatably connected to the distal end side of the second arm portion 21.
- the connecting portion between the first arm portion 20 and the second arm portion 21 is a joint portion 22.
- a connecting portion between the arm 6 and the hand 4 (that is, a connecting portion between the second arm portion 21 and the hand 4) is a joint portion 23.
- the second arm portion 21 is disposed above the first arm portion 20, and the hand 4 is disposed above the second arm portion 21.
- the arm 7 is composed of two arm portions, a first arm portion 25 and a second arm portion 26, which are connected to each other so as to be relatively rotatable.
- the first arm part 25 and the second arm part 26 are formed in a hollow shape. That is, the entire arm 7 is formed in a hollow shape.
- the proximal end side of the first arm portion 25 is fixed to the arm support portion 8.
- the proximal end side of the second arm portion 26 is rotatably connected to the distal end side of the first arm portion 25.
- the hand 5 is rotatably connected to the distal end side of the second arm portion 26.
- the connecting portion between the first arm portion 25 and the second arm portion 26 is a joint portion 27.
- a connecting portion between the arm 7 and the hand 5 (that is, a connecting portion between the second arm portion 26 and the hand 5) is a joint portion 28.
- the second arm portion 26 is disposed above the first arm portion 25.
- the hand 5 is disposed below the second arm portion 26 and above the first arm portion 25.
- FIG. 5 is an enlarged view of a portion E in FIG.
- FIG. 6 is an enlarged view of a portion F in FIG. 7A is a cross-sectional view of the lid member 32 shown in FIG. 5, and
- FIG. 7B is a diagram showing the lid member 32 from the GG direction of FIG. 7A.
- FIG. 8 is an enlarged view of a portion H in FIG.
- FIG. 9 is an enlarged view of a portion J in FIG.
- the first arm unit 20 includes an arm unit main body 31, three lid members 32, and one lid member 33.
- the arm part body 31 is formed of an aluminum alloy.
- the arm unit body 31 includes an upper surface part 31a constituting the upper surface of the arm part body 31 and a lower surface constituting the lower surface of the arm part body 31 and facing the upper surface part 31a in a substantially parallel manner with a predetermined gap. It is comprised from the part 31b and the side part 31c which connects the outer periphery end of the upper surface part 31a, and the outer periphery end of the lower surface part 31b.
- the upper surface portion 31a and the lower surface portion 31b are formed in an elongated and substantially oval flat plate shape, and face each other in the vertical direction.
- the upper surface part 31 a constitutes a part of the upper surface of the first arm part 20, and the lower surface part 31 b constitutes a part of the lower surface of the first arm part 20.
- the side surface portion 31c is formed in a cylindrical shape having an elongated oval shape when viewed from the vertical direction.
- the upper surface portion 31a is formed with four circular openings 31d and 31e penetrating in the vertical direction. That is, openings 31 d and 31 e communicating with the inside of the first arm portion 20 are formed in the upper surface portion 31 a.
- the four openings 31d and 31e are formed at a predetermined interval in the longitudinal direction of the upper surface portion 31a formed in a substantially oval shape.
- the opening 31e is formed on the most distal end side of the upper surface portion 31a, and the remaining three openings 31d are formed on the proximal end side of the upper surface portion 31a with respect to the opening 31e.
- the lower surface portion 31b is also formed with two circular openings 31f and 31g penetrating in the vertical direction.
- openings 31 f and 31 g communicating with the inside of the first arm portion 20 are formed in the lower surface portion 31 b.
- the opening 31f is formed on the distal end side of the lower surface portion 31b
- the opening 31g is formed on the proximal end side of the lower surface portion 31b.
- the second arm portion 21 includes an arm portion main body 34, two lid members 32, and two lid members 33.
- the arm part main body 34 is formed of an aluminum alloy.
- the arm portion main body 34 includes an upper surface portion 34a that constitutes the upper surface of the arm portion main body 34, and a lower surface that constitutes the lower surface of the arm portion main body 34 and is opposed to the upper surface portion 34a substantially in parallel through a predetermined gap. It is comprised from the part 34b and the side part 34c which connects the outer peripheral end of the upper surface part 34a, and the outer peripheral end of the lower surface part 34b.
- the upper surface portion 34a and the lower surface portion 34b are formed in an elongated, substantially oval flat plate shape, and face each other in the vertical direction.
- the upper surface part 34 a constitutes a part of the upper surface of the second arm part 21, and the lower surface part 34 b constitutes a part of the lower surface of the second arm part 21.
- the side surface portion 34c is formed in a cylindrical shape having an elongated oval shape when viewed from the vertical direction.
- the upper surface portion 34a is formed with four circular openings 34d, 34e, 34f penetrating in the vertical direction. That is, openings 34d to 34f communicating with the inside of the second arm portion 21 are formed in the upper surface portion 34a.
- the four openings 34d to 34f are formed at predetermined intervals in the longitudinal direction of the upper surface portion 34a formed in a substantially oval shape.
- an opening 34e is formed on the most distal end side of the upper surface portion 34a
- an opening 34f is formed on the most proximal side of the upper surface portion 34a
- the remaining two openings 34d are the opening 34e and the opening portion. 34f.
- the lower surface portion 34b is also formed with two circular openings 34g and 34h penetrating in the vertical direction.
- openings 34g and 34h that lead to the inside of the second arm portion 21 are formed in the lower surface portion 34b.
- the opening 34g is formed on the distal end side of the lower surface portion 34b
- the opening 34h is formed on the proximal end side of the lower surface portion 34b.
- the base end side of the first arm portion 20 is fixed to the arm support portion 8. Specifically, the base end side of the first arm portion 20 is fixed to the arm support portion 8 in a state where the lower surface of the lower surface portion 31b of the arm portion main body 31 is in close contact with the upper surface of the upper surface portion 15a of the support portion main body 15. . Further, when viewed from the vertical direction, the base end side of the first arm portion 20 is the arm support portion 8 so that the center of the opening portion 15e of the upper surface portion 15a substantially coincides with the center of the opening portion 31g of the lower surface portion 31b. It is fixed to.
- the inside of the first arm portion 20 communicates with the inside of the arm support portion 8 via the opening portion 15e and the opening portion 31g, and the inside of the first arm portion 20 is at atmospheric pressure.
- An annular seal member (not shown) that prevents the outflow of air to the vacuum region VR is disposed between the support body 15 and the arm body 31.
- the second arm portion 21 is rotated with respect to the first arm portion 20 and the hand 4 is moved with respect to the second arm portion 21 inside the proximal end side of the first arm portion 20 and the inside of the arm support portion 8.
- a motor 35 that rotates is disposed.
- the central portion of the motor 35 in the vertical direction is disposed in the opening 15e and the opening 31g.
- the upper end side of the motor 35 is disposed inside the base end side of the first arm portion 20 and the lower end side of the motor 35.
- the output shaft of the motor 35 protrudes upward, and a pulley 36 is fixed to the output shaft.
- the joint portion 22 includes a speed reducer 37 that decelerates the rotation of the motor 35 and transmits it to the second arm portion 21.
- the speed reducer 37 is a hollow speed reducer in which a through hole is formed at the center in the radial direction. Therefore, the inside of the second arm portion 21 communicates with the inside of the first arm portion 20 through the through hole of the hollow speed reducer, and the inside of the second arm portion 21 is at atmospheric pressure. That is, in this embodiment, the inside of the arm 6 is at atmospheric pressure.
- the joint unit 23 includes a speed reducer 38 that decelerates and transmits the rotation of the motor 35 to the hand 4.
- the speed reducer 38 is a hollow speed reducer in which a through hole is formed at the center in the radial direction.
- the joint portion 22 includes a magnetic fluid seal 39 that prevents air from flowing out from the connecting portion between the first arm portion 20 and the second arm portion 21 to the vacuum region VR.
- the magnetic fluid seal 39 includes a substantially cylindrical case body 40 constituting an outer peripheral side portion thereof, and a substantially cylindrical inner peripheral side member 41 that is rotatably held on the inner peripheral side of the case body 40. . Between the case body 40 and the inner peripheral member 41 in the radial direction, a bearing seal portion 42 having a bearing, a permanent magnet, and a magnetic fluid is disposed.
- the joint portion 23 includes a magnetic fluid seal 43 that prevents the outflow of air from the connection portion between the second arm portion 21 and the hand 4 to the vacuum region VR.
- the magnetic fluid seal 43 is configured similarly to the magnetic fluid seal 39, and includes a case body 44, an inner peripheral side member 45, and a bearing seal portion 46.
- a pulley 49 is fixed to the lower end side of the input shaft of the speed reducer 37.
- the pulley 49 is disposed inside the distal end side of the first arm unit 20.
- a belt 50 is stretched between the pulley 36 and the pulley 49.
- a pulley 51 is fixed to the upper end side of the input shaft of the speed reducer 37.
- the pulley 51 is disposed inside the base end side of the second arm portion 21.
- a pulley 52 is rotatably mounted inside the second arm portion 21.
- a belt 53 is stretched between the pulley 51 and the pulley 52.
- the distal end side of the first arm portion 20 is fixed to the output shaft of the speed reducer 37. Specifically, the distal end side of the first arm portion 20 is fixed to the output shaft of the speed reducer 37 via the inner peripheral side member 41 of the magnetic fluid seal 39.
- the output shaft of the speed reducer 37 is fixed to the inner peripheral side of the inner peripheral member 41.
- the inner peripheral side member 41 is located on the distal end side of the first arm portion 20 so that a part of the outer peripheral surface thereof is in contact with the inner peripheral surface of the opening 31e and a part thereof is in contact with the upper surface of the upper surface portion 31a. It is fixed.
- An annular seal member (not shown) that prevents air from flowing out into the vacuum region VR is disposed between the upper surface portion 31a and the inner peripheral side member 41.
- the base end side of the second arm portion 21 is fixed to the case body of the speed reducer 37. Specifically, the base end side of the second arm portion 21 is fixed to the case body of the speed reducer 37 via the case body 40 of the magnetic fluid seal 39.
- the case body of the speed reducer 37 is fixed to the inner peripheral side of the case body 40.
- the case body 40 is fixed to the proximal end side of the second arm portion 21 such that a part of the outer peripheral surface thereof is in contact with the inner peripheral surface of the opening 34h and a part thereof is in contact with the lower surface of the lower surface portion 34b.
- An annular seal member (not shown) that prevents the outflow of air to the vacuum region VR is disposed between the lower surface portion 34b and the case body 40.
- a pulley 56 is fixed to the lower end side of the input shaft of the speed reducer 38.
- the pulley 56 is disposed inside the distal end side of the second arm portion 21.
- a belt 57 is stretched between the pulley 56 and the pulley 52.
- the belt 53 and the belt 57 are engaged with the pulley 52 in a state shifted in the vertical direction, and the belt 57 is disposed below the belt 53.
- the base 11 of the hand 4 is fixed to the output shaft of the speed reducer 38. Specifically, the base 11 of the hand 4 is fixed to the output shaft of the speed reducer 38 via the inner peripheral side member 45 of the magnetic fluid seal 43.
- the output shaft of the speed reducer 38 is fixed to the inner peripheral side of the inner peripheral side member 45.
- the inner circumferential side member 45 is fixed to the base 11 of the hand 4.
- An annular seal member (not shown) that prevents the outflow of air to the vacuum region VR is disposed between the base 11 of the hand 4 and the inner peripheral member 45
- the distal end side of the second arm portion 21 is fixed to the case body of the speed reducer 38. Specifically, the distal end side of the second arm portion 21 is fixed to the case body of the speed reducer 38 via the case body 44 of the magnetic fluid seal 43.
- the case body of the speed reducer 38 is fixed to the inner peripheral side of the case body 44.
- the case body 44 is fixed to the distal end side of the second arm portion 21 so that a part of the outer peripheral surface thereof is in contact with the inner peripheral surface of the opening 34e and a part thereof is in contact with the upper surface of the upper surface portion 34a.
- An annular seal member (not shown) that prevents air from flowing out to the vacuum region VR is disposed between the upper surface portion 34a and the case body 44.
- the lid members 32 and 33 are made of an aluminum alloy.
- the lid members 32 and 33 are formed in a disc shape. Both surfaces of the lid member 33 are formed in a planar shape.
- fins 32a for heat dissipation are formed on one surface of the lid member 32.
- a plurality of annular fins 32a having different diameters are formed on one surface of the lid member 32, and the plurality of fins 32a are arranged concentrically.
- a plurality of annular recesses that are recessed from one surface of the lid member 32 toward the other surface are formed, so that the plurality of fins 32a are formed. Is formed.
- the plurality of fins 32 a may be configured by convex portions protruding from one surface of the lid member 32.
- the opening 31 f of the first arm portion 20 is closed from below by the lid member 33.
- the opening 34 f of the second arm portion 21 is closed from above by the lid member 33, and the opening 34 g of the second arm portion 21 is closed from below by the lid member 33.
- the opening 31 d of the first arm part 20 and the opening 34 d of the second arm part 21 are closed from above by the lid member 32.
- the lid member 32 is fixed so that the surface on which the fins 32a are formed faces downward. That is, the fin 32 a is formed on the lower surface of the lid member 32, and the heat radiating fin 32 a is formed on the upper surface inside the arm 6.
- An annular seal member (not shown) that prevents the outflow of air to the vacuum region VR is disposed between the arm main bodies 31 and 34 and the lid members 32 and 33.
- the first arm portion 25 is configured similarly to the first arm portion 20, and includes an arm portion main body 31, three lid members 32, and one lid member 33.
- the second arm portion 26 is configured in the same manner as the second arm portion 21, and includes an arm portion main body 34, two lid members 32, and two lid members 33. ing. Therefore, detailed description of the configuration of the first arm portion 25 and the configuration of the second arm portion 26 is omitted.
- the base end side of the first arm portion 25 is fixed to the support portion main body 15 of the arm support portion 8 in the same manner as the base end side of the first arm portion 20.
- the inside of the first arm portion 25 communicates with the inside of the arm support portion 8 through the opening portion 15e and the opening portion 31g, and the inside of the first arm portion 25 is at atmospheric pressure.
- the second arm portion 26 is rotated with respect to the first arm portion 25 and the hand 5 is moved with respect to the second arm portion 26 inside the base end side of the first arm portion 25 and the inside of the arm support portion 8.
- a motor 65 that rotates is disposed.
- the motor 65 is disposed in the same manner as the motor 35 disposed inside the base end side of the first arm portion 20 and inside the arm support portion 8.
- the output shaft of the motor 65 protrudes upward, and a pulley 66 is fixed to the output shaft.
- the joint portion 27 includes a speed reducer 67 that decelerates the rotation of the motor 65 and transmits it to the second arm portion 26. Similar to the speed reducer 37, the speed reducer 67 is a hollow speed reducer in which a through hole is formed at the center in the radial direction. Therefore, the inside of the second arm portion 26 communicates with the inside of the first arm portion 25 through the through hole of the hollow speed reducer, and the inside of the second arm portion 26 is at atmospheric pressure. That is, in this embodiment, the inside of the arm 7 is at atmospheric pressure.
- the joint portion 28 includes a speed reducer 68 that decelerates and transmits the rotation of the motor 65 to the hand 5.
- the reducer 68 is a hollow reducer in which a through hole is formed at the center in the radial direction, like the reducer 38.
- the joint portion 27 includes a magnetic fluid seal 39 that prevents outflow of air from the connecting portion between the first arm portion 25 and the second arm portion 26 to the vacuum region VR.
- the joint portion 28 includes a magnetic fluid seal 43 that prevents air from flowing out from the connecting portion of the second arm portion 26 and the hand 5 to the vacuum region VR.
- the upper end of a rotating shaft 69 formed in a cylindrical shape is fixed to the lower end of the input shaft of the speed reducer 67.
- a pulley 70 is fixed to the lower end side of the rotating shaft 69.
- the pulley 70 is disposed inside the distal end side of the first arm portion 25.
- a belt 71 is bridged between the pulley 66 and the pulley 70.
- a pulley 72 is fixed to the upper end side of the input shaft of the speed reducer 67.
- the pulley 72 is disposed inside the proximal end side of the second arm portion 26.
- the distal end side of the first arm portion 25 is fixed to the output shaft of the speed reducer 67. Specifically, the distal end side of the first arm portion 25 is fixed to the output shaft of the speed reducer 67 via the inner peripheral side member 41 of the magnetic fluid seal 39 and the spacer 73.
- the spacer 73 is formed in a substantially cylindrical shape. The spacer 73 is disposed so as to cover the outer peripheral side of the rotation shaft 69.
- the output shaft of the speed reducer 67 is fixed to the inner peripheral side of the inner peripheral member 41.
- the inner peripheral side member 41 is fixed to the upper end of the spacer 73 such that a part of the outer peripheral surface thereof contacts the inner peripheral surface of the spacer 73 and a part thereof contacts the upper end surface of the spacer 73.
- the lower end of the spacer 73 is fixed to the distal end side of the first arm portion 25 so as to contact the upper surface of the upper surface portion 31a.
- a bearing holding member 74 is fixed to the lower end side of the spacer 73.
- the bearing holding member 74 is fixed to the lower end side of the spacer 73 so that a part of the outer peripheral surface thereof contacts the inner peripheral surface of the spacer 73 and a part thereof contacts the lower end surface of the spacer 73. Further, a part of the bearing holding member 74 is disposed on the inner peripheral side of the opening 31e.
- a bearing 75 that rotatably supports the rotating shaft 69 is fixed to the bearing holding member 74.
- An annular seal member (not shown) is provided between the inner peripheral member 41 and the upper end of the spacer 73 and between the upper surface portion 31a and the lower end of the spacer 73 to prevent outflow of air to the vacuum region VR. ) Is arranged.
- the base end side of the second arm portion 26 is fixed to the case body of the speed reducer 67.
- the base end side of the second arm portion 26 is fixed to the case body of the speed reducer 67 in the same manner as the base end side of the second arm portion 21 is fixed to the case body of the speed reducer 37. That is, the base end side of the second arm portion 26 is fixed to the case body of the speed reducer 67 via the case body 40 of the magnetic fluid seal 39.
- a pulley 76 is fixed to the upper end side of the input shaft of the speed reducer 68.
- the pulley 76 is disposed inside the distal end side of the second arm portion 26.
- a belt 77 is stretched between the pulley 72 and the pulley 76.
- the base 11 of the hand 5 is fixed to the output shaft of the speed reducer 68.
- the base 11 of the hand 5 is fixed to the output shaft of the speed reducer 68 in the same manner as the base 11 of the hand 4 is fixed to the output shaft of the speed reducer 38. That is, the base 11 of the hand 5 is fixed to the output shaft of the speed reducer 68 via the inner peripheral side member 45 of the magnetic fluid seal 43.
- the distal end side of the second arm portion 26 is fixed to the case body of the speed reducer 68. Specifically, the distal end side of the second arm portion 26 is fixed to the case body of the speed reducer 68 via the case body 44 of the magnetic fluid seal 43.
- the case body of the speed reducer 68 is fixed to the inner peripheral side of the case body 44.
- the case body 44 is fixed to the distal end side of the second arm portion 26 so that a part of the outer peripheral surface thereof contacts the inner peripheral surface of the opening 34g and a part thereof contacts the lower surface of the lower surface 34b.
- An annular seal member (not shown) that prevents air from flowing out to the vacuum region VR is disposed between the lower surface portion 34b and the case body 44.
- the opening 31 f of the first arm portion 25 is closed from below by the lid member 33.
- the openings 34 e and 34 f of the second arm portion 26 are closed from above by the lid member 33.
- the opening 31 d of the first arm portion 25 and the opening 34 d of the second arm portion 26 are closed from above by the lid member 32.
- the lid member 32 is fixed so that the surface on which the fins 32a are formed faces downward. That is, the fin 32 a is formed on the lower surface of the lid member 32, and the heat radiating fin 32 a is formed on the upper surface inside the arm 7.
- the robot 1 transports the high-temperature substrate 2. Therefore, the temperature of the arms 6 and 7 rises due to radiant heat from the substrate 2, radiant heat from the wall surface of the vacuum chamber where the robot 1 is installed, and the like.
- the robot 1 of this embodiment includes a cooling mechanism for cooling the inside of the arms 6 and 7 whose temperature rises. The robot 1 also suppresses the transmission of radiant heat to the temperature sensor 80 for measuring the internal temperatures of the first arm portions 20 and 25 and the second arm portions 21 and 26 and the arms 6 and 7 and the arm support portion 8. Cover members 81 to 85 are provided.
- the robot 1 includes an air pipe 87 for cooling the motor 35 and supplying cooling air to the inside of the first arm unit 20 as a cooling mechanism for cooling the inside of the arms 6 and 7,
- An air pipe 90 for supplying cooling air to the inside of the section 26 and a plurality of fans (blowers) 91 disposed inside the arms 6 and 7 are provided.
- the air pipes 87 to 90 are metal pipes formed of a metal such as an aluminum alloy or a copper alloy, for example. Or piping formed with a fluorine tube etc. may be sufficient.
- the base ends of the air pipes 87 to 90 are connected to an electromagnetic valve (not shown) disposed inside the case body 13 of the main body 9.
- an electromagnetic valve not shown
- four solenoid valves to which the base ends of the air pipes 87 to 90 are connected are arranged inside the case body 13, and the supply amount of the cooling air is adjusted for each of the air pipes 87 to 90. It is possible to do.
- the four solenoid valves are connected to a compressed air supply device (not shown) disposed inside or outside the case body 13 via a predetermined pipe.
- the air pipes 87 and 88 are routed from the inside of the case body 13 toward the arm 6 so as to pass through the inner peripheral side of the rotating shaft 14 and the opening 15f.
- the front end side of the air pipe 87 is wound around the outer peripheral surface of the motor 35.
- the distal end of the air pipe 87 serving as a cooling air supply port is disposed inside the base end side of the first arm portion 20 and is used for cooling from the air pipe 87 to the inside of the base end side of the first arm portion 20.
- Air is supplied.
- the air pipe 88 is routed around the insides of the first arm part 20 and the second arm part 21 so as to pass through the openings 15e and 31g and a through hole formed at the shaft center of the speed reducer 37.
- the front end of the air pipe 88 that serves as a cooling air supply port is disposed inside the front end side of the second arm portion 21, and cooling air flows from the air pipe 88 into the front end side of the second arm portion 21. Supplied.
- the air pipes 89 and 90 are routed from the inside of the case body 13 toward the arm 7 so as to pass through the inner peripheral side of the rotating shaft 14 and the opening 15f.
- the front end side of the air pipe 89 is wound around the outer peripheral surface of the motor 65.
- the front end of the air pipe 89 serving as a cooling air supply port is disposed inside the base end side of the first arm portion 25, and is used for cooling from the air pipe 89 to the base end side inside the first arm portion 25.
- Air is supplied.
- the air pipe 90 is arranged inside the first arm portion 25 and the second arm portion 26 so as to pass through the openings 15e and 31g, the through hole formed in the inner peripheral side of the rotating shaft 69 and the shaft center of the speed reducer 67. Has been routed around.
- the front end of the air pipe 90 that serves as a cooling air supply port is disposed inside the front end side of the second arm portion 26, and cooling air flows from the air pipe 90 into the front end side of the second arm portion 26. Supplied.
- the temperature sensor 80 is disposed inside each of the first arm parts 20 and 25 and the second arm parts 21 and 26.
- a plurality of temperature sensors 80 having different detection temperatures are arranged as a set and are arranged inside the first arm portions 20 and 25 and the second arm portions 21 and 26, respectively.
- three temperature sensors 80 having different detection temperatures are arranged as a set and are arranged inside the first arm portions 20 and 25 and the second arm portions 21 and 26, respectively.
- one set of temperature sensors 80 is disposed in the vicinity of the motor 35 and in the vicinity of the joint portion 22. That is, in the first arm unit 20, one set of temperature sensors 80 is disposed on the proximal end side and the distal end side of the first arm unit 20. A temperature sensor 80 disposed in the vicinity of the motor 35 is attached to the upper end side of the motor 35. The temperature sensor 80 arranged in the vicinity of the joint portion 22 is attached to the upper surface of the lower surface portion 31b. Inside the second arm portion 21, one set of temperature sensors 80 is disposed in the vicinity of the joint portion 23. That is, one set of temperature sensors 80 is disposed on the distal end side of the second arm portion 21 inside the second arm portion 21. The temperature sensor 80 is attached to the upper surface of the lower surface portion 34b.
- one set of temperature sensors 80 is disposed in the vicinity of the motor 65 and in the vicinity of the joint portion 27. That is, one set of temperature sensors 80 is disposed on the proximal end side and the distal end side of the first arm portion 25 inside the first arm portion 25.
- the temperature sensor 80 disposed in the vicinity of the motor 65 is attached to the upper end side of the motor 65.
- the temperature sensor 80 disposed in the vicinity of the joint portion 27 is attached to the upper surface of the lower surface portion 31b.
- one set of temperature sensors 80 is arranged in the vicinity of the joint portion 28. That is, one set of temperature sensors 80 is disposed on the distal end side of the second arm portion 26 inside the second arm portion 26.
- the temperature sensor 80 is attached to the upper surface of the lower surface portion 34b.
- the supply amount of the cooling air can be adjusted for each of the air pipes 87 to 90, and the first arm parts 20 and 25 and the second arm parts 21 and 26 can be adjusted.
- Each interior can be individually cooled.
- the interiors of the first arm portions 20 and 25 and the second arm portions 21 and 26 are individually cooled based on the detection result of the temperature sensor 80.
- the first arm portions 20 and 25 and the second arm portions 25 and 25 are adjusted by adjusting the amount of cooling air supplied from each of the air pipes 87 to 90 based on the detection result of the temperature sensor 80.
- the inside of each of the arm portions 21 and 26 is individually cooled.
- the inside of the first arm unit 20 based on the detection results of the temperature sensor 80 disposed inside the first arm unit 20 and the temperature sensor 80 disposed inside the second arm unit 21, the inside of the first arm unit 20.
- the first arm unit 20 and the second arm are adjusted by adjusting the amount of cooling air supplied from each of the air pipes 87 and 88 so that the temperature and the temperature inside the second arm unit 21 are substantially equal.
- the inside of each part 21 is individually cooled.
- the temperature inside the first arm unit 25 and the first The amount of cooling air supplied from each of the air pipes 89 and 90 is adjusted so that the temperature inside the two arm portion 26 is substantially equal, and the first arm portion 25 and the second arm portion 26 Each interior is individually cooled.
- each of the first arm portions 20 and 25 and the second arm portions 21 and 26 is individually adjusted by adjusting the amount of cooling air supplied from each of the air pipes 87 to 90.
- the inside of each of the first arm parts 20 and 25 and the second arm parts 21 and 26 is individually cooled by stopping the supply of cooling air from the air pipes 87 to 90. You may do it.
- the fan 91 is disposed inside each of the first arm portions 20 and 25 and the second arm portions 21 and 26.
- the two fans 91 are arranged inside the first arm portions 20 and 25 and the second arm portions 21 and 26 with a predetermined interval therebetween.
- the fan 91 is arranged so as to send cooling air upward.
- the fan 91 is arranged so as to send cooling air toward directly above.
- the fan 91 is disposed below the lid member 32 and is disposed so as to send cooling air toward the plurality of fins 32 a formed on the lid member 32.
- the fan 91 rotates or stops based on the detection result of the temperature sensor 80, for example.
- the fan 91 may be disposed so as to send cooling air obliquely upward.
- the cover members 81 to 85 are made of a material having a lower thermal conductivity than the support portion main body 15, the arm portion main bodies 31 and 34 and the lid members 16, 32 and 33.
- the cover members 81 to 85 are made of a material having a high radiant heat reflectivity.
- the cover members 81 to 85 are formed of thin stainless steel plates.
- the cover member 81 covers substantially the entire upper surface, lower surface and side surfaces of the first arm portion 20 except for the portion overlapping the arm support portion 8.
- the cover member 82 covers substantially the entire upper surface, lower surface, and side surface of the second arm portion 21.
- the cover member 83 covers substantially the entire upper surface, lower surface, and side surfaces of the portion of the first arm portion 25 excluding the portion overlapping the arm support portion 8.
- the cover member 84 covers substantially the entire upper surface, lower surface, and side surfaces of the second arm portion 26.
- the cover member 85 covers portions of the first arm portions 20 and 25 that overlap the arm support portion 8 and substantially the entire upper surface, lower surface, and side surfaces of the arm support portion 8. In this way, substantially the entire arms 6 and 7 and the arm support portion 8 are covered by the cover members 81 to 85.
- the temperature sensor 80 is disposed inside each of the first arm portions 20 and 25 and the second arm portions 21 and 26.
- the inside of each of the first arm portions 20 and 25 and the second arm portions 21 and 26 is individually cooled by adjusting the supply amount of the cooling air for each of the air pipes 87 to 90. Based on the detection result of the temperature sensor 80, the insides of the first arm portions 20 and 25 and the second arm portions 21 and 26 are individually cooled.
- the hand 4 can be appropriately operated.
- the arm 7 is constituted by the first arm portion 25 and the second arm portion 26, the actual locus of the joint portion 28 when the high-temperature substrate 2 is conveyed and the arm 7 are heated. It is possible to suppress a change in the amount of deviation from the trajectory of the joint portion 28 when it is not expanded, and as a result, it is possible to operate the hand 5 appropriately.
- the inside of the first arm unit 20 based on the detection results of the temperature sensor 80 arranged inside the first arm unit 20 and the temperature sensor 80 arranged inside the second arm unit 21, the inside of the first arm unit 20. Since the inside of each of the first arm part 20 and the second arm part 21 is individually cooled so that the temperature and the temperature inside the second arm part 21 are substantially equal, the unit of the first arm part 20 The expansion amount per length and the expansion amount per unit length of the second arm portion 21 are substantially equal. Therefore, in this embodiment, it becomes possible to make the direction of the positional shift when the positional shift occurs in the joint portion 23 to be a more regular direction, and the actual position of the joint portion 23 when the high-temperature substrate 2 is transported. It is possible to effectively suppress a change in the amount of deviation between the locus and the locus of the joint portion 23 when the arm 6 is not thermally expanded. As a result, in this embodiment, the hand 4 can be operated more appropriately.
- the first arm unit 25 Since the insides of the first arm part 25 and the second arm part 26 are individually cooled so that the internal temperature and the internal temperature of the second arm part 26 are substantially equal, the first arm part 25
- the amount of expansion per unit length is substantially equal to the amount of expansion per unit length of the second arm portion 26. Therefore, in this embodiment, it becomes possible to make the direction of the positional deviation when the positional deviation occurs in the joint portion 28 to be a more regular direction, and the actual portion of the joint portion 28 when the high-temperature substrate 2 is transported. It is possible to effectively suppress a change in the deviation amount between the locus and the locus of the joint portion 28 when the arm 7 is not thermally expanded. As a result, in this embodiment, the hand 5 can be operated more appropriately.
- the first arm portions 20 and 25 and the second arm portion are adjusted by adjusting the amount of cooling air supplied from each of the air pipes 87 to 90 based on the detection result of the temperature sensor 80.
- the interior of each of 21 and 26 is individually cooled. Therefore, in this embodiment, it is possible to manage the temperatures of the first arm portions 20 and 25 and the second arm portions 21 and 26 with a relatively simple configuration.
- the temperature sensor 80 is disposed in the vicinity of the joint portions 22, 23, 27, and 28. Therefore, in this embodiment, based on the detection result of the temperature sensor 80, the temperature of the bearings of the speed reducers 37, 38, 67, 68 that constitute a part of the joint portions 22, 23, 27, 28 can be estimated. It becomes possible. Therefore, in this embodiment, it is possible to appropriately estimate the life of the bearings of the reduction gears 37, 38, 67, and 68 based on the estimated temperature, and as a result, the bearing is replaced at an appropriate time. It becomes possible.
- the temperature sensor 80 is disposed in the vicinity of the motors 35 and 65, it is possible to detect an abnormality in the motors 35 and 65 based on the detection result of the temperature sensor 80. As a result, it becomes possible to prevent the motors 35 and 65 from being damaged.
- three temperature sensors 80 having different detection temperatures are arranged as a set and are arranged inside the first arm portions 20 and 25 and the second arm portions 21 and 26, respectively. Therefore, in this embodiment, it becomes possible to improve the detection accuracy of the internal temperatures of the first arm parts 20 and 25 and the second arm parts 21 and 26. Therefore, in this embodiment, it becomes possible to manage each temperature of the 1st arm parts 20 and 25 and the 2nd arm parts 21 and 26 with sufficient accuracy.
- a fan 91 that sends air upward is disposed inside the arms 6 and 7. Therefore, in this embodiment, when the high-temperature substrate 2 is transported, the upper surface side portions of the arms 6 and 7 can be cooled to suppress the temperature rise of the upper surface side portions of the arms 6 and 7. , 7 can be brought close to the temperature of the lower surface side portions of the arms 6, 7. Therefore, in this embodiment, it is possible to bring the amount of thermal deformation of the upper surface side portions of the arms 6 and 7 closer to the amount of thermal deformation of the lower surface side portion, and it is possible to suppress the thermal deformation of the arms 6 and 7 whose tip side is lowered. become.
- the substrate 2 can be appropriately transferred by the hands 4 and 5. Moreover, in this embodiment, since the inside of the arms 6 and 7 can be cooled using the fan 91, the amount of thermal deformation of the arms 6 and 7 can be suppressed.
- the fan 91 is disposed inside each of the first arm portions 20 and 25 and the second arm portions 21 and 26. Therefore, in this embodiment, even if the arms 6 and 7 are constituted by the two arm portions of the first arm portions 20 and 25 and the second arm portions 21 and 26, the entire upper surface side portion of the arms 6 and 7 is used. It becomes possible to cool the upper surface side portions of the arms 6 and 7 so that the temperatures of the arms 6 and 7 become substantially equal.
- the arms 6 and 7 Since the two fans 91 are arranged inside the first arm portions 20 and 25 and the second arm portions 21 and 26 with a predetermined interval therebetween, the arms 6 and 7 It becomes possible to cool the upper surface side portions of the arms 6 and 7 so that the temperature of the entire upper surface side portion of the arms 6 and 7 becomes more uniform.
- the fins 32a for heat radiation are formed on the upper surfaces inside the arms 6 and 7, and the fan 91 sends cooling air toward the fins 32a. Therefore, in this embodiment, it is possible to effectively cool the upper surface side portions of the arms 6 and 7, and it is possible to effectively suppress the temperature rise of the upper surface side portions of the arms 6 and 7.
- the fin 32a is formed on the lower surface of the lid member 32 that closes the opening 31d of the first arm portions 20 and 25 and the opening 34d of the second arm portions 21 and 26 from above. Therefore, in this embodiment, even when the fins 32a are formed on the upper surfaces of the arms 6 and 7 formed in a hollow shape, the fins 32a can be easily formed.
- substantially the entire arms 6 and 7 and the arm support 8 are covered with cover members 81 to 85 formed of a material having lower thermal conductivity than the arms 6 and 7 and the arm support 8. Therefore, in this embodiment, it is possible to effectively suppress transmission of radiant heat from the substrate 2 and radiant heat from the wall surface of the vacuum chamber in which the robot 1 is disposed to the arms 6 and 7 and the arm support portion 8. .
- the base end sides of the first arm portions 20 and 25 formed separately are fixed to the arm support portion 8.
- the first arm part 20, the first arm part 25, and the arm support part 8 may be integrally formed.
- each of the proximal end side of the first arm portion 20 and the proximal end side of the first arm portion 25 may be rotatably connected to the main body portion 9.
- the motor 35 is arranged inside the first arm unit 20, and the motor 65 is arranged inside the first arm unit 25.
- the robot 1 includes the two arms 6 and 7.
- the robot 1 may include only one arm 6 as illustrated in FIG.
- the base end side of the first arm portion 20 is rotatably connected to the main body portion 9. 10 and 11, the same reference numerals are given to the configurations that are common to the configurations of the above-described embodiments.
- the first arm parts 20 and 25 and the second arm part 21 are adjusted by adjusting the amount of cooling air supplied for each of the air pipes 87 to 90 based on the detection result of the temperature sensor 80.
- the interior of each of the 26 is individually cooled.
- the fans 91 arranged inside the first arm parts 20, 25 and the second arm parts 21, 26 are individually rotated or stopped.
- the insides of the first arm portions 20 and 25 and the second arm portions 21 and 26 may be individually cooled.
- the temperature inside the first arm portion 20 and the temperature inside the second arm portion 21 are substantially equal, and the temperature inside the first arm portion 25 and the temperature inside the second arm portion 26 are Are individually cooled so that the interiors of the first arm portions 20 and 25 and the second arm portions 21 and 26 are individually equal.
- the temperature inside the first arm portion 20 and the temperature inside the second arm portion 21 are different, and the temperature inside the first arm portion 25 and the temperature inside the second arm portion 26 are different.
- the first arm parts 20 and 25 and the second arm parts 21 and 26 so that the temperature inside each of the first arm parts 20 and 25 and the second arm parts 21 and 26 becomes a predetermined temperature.
- Each of the interiors may be individually cooled.
- a plurality of temperature sensors 80 having different detection temperatures are set and arranged in the vicinity of the motors 35 and 65 and the joint portions 22, 23, 27, and 28.
- one temperature sensor 80 may be disposed in the vicinity of the motors 35 and 65 and the joint portions 22, 23, 27, and 28.
- the temperature sensor 80 is disposed in the vicinity of the motors 35 and 65 and the joint portions 22, 23, 27, and 28.
- the first arm portions 20 and 25 and the second arm portions 21 and 26 The temperature sensor 80 may be arranged at an arbitrary position inside each.
- the arms 6 and 7 are constituted by two arm parts, ie, the first arm parts 20 and 25 and the second arm parts 21 and 26.
- the arms 6 and 7 have three or more arm parts. You may comprise by an arm part.
- the temperature sensor 80 is disposed inside each of the arm portions, and a supply port of an air pipe that supplies cooling air is disposed inside each of the arm portions. Further, in this case, for example, the fans 91 are arranged inside all the arm portions.
- the arms 6 and 7 may be comprised by one arm part.
- the robot 1 rotates the second arm unit 21 with respect to the first arm unit 20 and rotates the hand 4 with respect to the second arm unit 21 by one motor 35.
- a motor that rotates the second arm portion 21 with respect to the first arm portion 20 and a motor that rotates the hand 4 with respect to the second arm portion 21 may be provided separately.
- the single arm 65 rotates the second arm portion 26 with respect to the first arm portion 25 and the hand 5 with respect to the second arm portion 26.
- a motor that rotates the second arm portion 26 with respect to the first arm portion 25 and a motor that rotates the hand 5 with respect to the second arm portion 26 may be provided separately.
- the fan 91 is disposed inside each of the first arm portions 20 and 25 and the second arm portions 21 and 26, but the fan 91 may not be disposed.
- the fin 32 a is formed on the lid member 32, but the fin 32 a may not be formed on the lid member 32.
- the transport object to be transported by the robot 1 is the organic EL display substrate 2, but the transport object to be transported by the robot 1 may be a glass substrate for a liquid crystal display. However, it may be a semiconductor wafer or the like.
- the two fans 91 are disposed inside the first arm portions 20 and 25 and the second arm portions 21 and 26, respectively, but the first arm portions 20 and 25 and the second arm portions are arranged.
- the number of fans 91 arranged inside each of 21 and 26 may be one, or may be three or more.
- the fan 91 is disposed inside each of the first arm part 20 and the second arm part 21, but only one of the inside of the first arm part 20 or the inside of the second arm part 21.
- the fan 91 may be disposed in the middle.
- the fan 91 may be disposed only in one of the first arm portion 25 and the second arm portion 26.
- the fan 91 rotates or stops based on the detection result of the temperature sensor 80.
- the fan 91 may be continuously rotated while the robot 1 is being driven, or at a predetermined operation timing of the robot 1. May be rotated.
- the fan 91 is disposed below the lid member 32 and sends cooling air toward the plurality of fins 32a formed on the lid member 32.
- the fan 91 may be disposed at a position deviated from the lower side of the lid member 32 and send cooling air toward the lower surfaces of the upper surface portions 31a and 34a.
- the fin 32a may be formed in the cover member 32, the fin 32a may be formed in the lower surface of upper surface part 31a, 34a. In the embodiment described above, the fin 32 a is formed on the lid member 32, but the fin 32 a may not be formed on the lid member 32.
- the hand 4 is disposed above the second arm portion 21, but the hand 4 may be disposed below the second arm portion 21.
- the hand 5 is disposed below the second arm portion 26, but the hand 5 may be disposed above the second arm portion 26.
- the cover members 81 to 85 cover substantially the entire arms 6 and 7 and the arm support portion 8, but the cover members 81 to 85 are only on the upper end sides of the arms 6 and 7 and the arm support portion 8. May be covered.
- the robot 1 includes the cover members 81 to 85, but the robot 1 may not include the cover members 81 to 85.
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Abstract
Description
図1は、本発明の実施の形態にかかる産業用ロボット1の平面図である。図2は、図1に示すアーム6、7の基端側部分およびアーム支持部8の断面図である。図3は、図1に示すアーム6の断面図である。図4は、図1に示すアーム7の断面図である。 (Schematic configuration of industrial robot)
FIG. 1 is a plan view of an industrial robot 1 according to an embodiment of the present invention. 2 is a cross-sectional view of the base end side portions of the
図5は、図3のE部の拡大図である。図6は、図3のF部の拡大図である。図7(A)は、図5に示す蓋部材32の断面図であり、図7(B)は、図7(A)のG-G方向から蓋部材32を示す図である。図8は、図4のH部の拡大図である。図9は、図4のJ部の拡大図である。 (Arm configuration, arm internal configuration and joint configuration)
FIG. 5 is an enlarged view of a portion E in FIG. FIG. 6 is an enlarged view of a portion F in FIG. 7A is a cross-sectional view of the
上述のように、ロボット1は、高温の基板2を搬送する。そのため、基板2からの輻射熱や、ロボット1が設置される真空チャンバーの壁面からの輻射熱等によって、アーム6、7の温度が上昇する。本形態のロボット1は、温度が上昇するアーム6、7の内部を冷却するための冷却機構を備えている。また、ロボット1は、第1アーム部20、25および第2アーム部21、26の内部温度を測定するための温度センサ80と、アーム6、7およびアーム支持部8への輻射熱の伝達を抑制するためのカバー部材81~85とを備えている。 (Configuration of cooling mechanism, configuration of temperature sensor and configuration of cover member)
As described above, the robot 1 transports the high-
以上説明したように、本形態では、第1アーム部20、25および第2アーム部21、26のそれぞれの内部に温度センサ80が配置されている。また、本形態では、エア配管87~90ごとに冷却用空気の供給量の調整を行うことで、第1アーム部20、25および第2アーム部21、26のそれぞれの内部を個別に冷却することが可能となっており、温度センサ80での検出結果に基づいて、第1アーム部20、25および第2アーム部21、26のそれぞれの内部を個別に冷却している。 (Main effects of this form)
As described above, in the present embodiment, the
上述した形態は、本発明の好適な形態の一例ではあるが、これに限定されるものではなく本発明の要旨を変更しない範囲において種々変形実施が可能である。 (Other embodiments)
The above-described embodiment is an example of a preferred embodiment of the present invention, but is not limited to this, and various modifications can be made without departing from the scope of the present invention.
2 基板(ガラス基板、搬送対象物)
4、5 ハンド
6、7 アーム
20、25 第1アーム部(アーム部)
21、26 第2アーム部(アーム部)
22、23、27、28 関節部
31a、34a 上面部
31d、34d 開口部
32 蓋部材
32a フィン
35、65 モータ
80 温度センサ
81~85 カバー部材
87~90 エア配管(冷却機構の一部)
91 ファン(冷却機構の一部) 1 Robot (industrial robot)
2 Substrate (glass substrate, transport object)
4, 5
21, 26 Second arm part (arm part)
22, 23, 27, 28
91 Fan (part of cooling mechanism)
Claims (18)
- 搬送対象物が搭載されるハンドと、中空状に形成されるとともに前記ハンドが先端側に連結されるアームと、前記アームの内部を冷却するための冷却機構とを備え、
前記ハンドおよび前記アームは、真空中に配置され、
前記アームは、中空状に形成され互いに相対回動可能に連結される複数のアーム部を備え、
複数の前記アーム部の内部は、大気圧となっており、
複数の前記アーム部のそれぞれの内部には、前記アーム部の内部の温度を測定するための温度センサが配置され、
前記冷却機構は、複数の前記アーム部のそれぞれの内部を個別に冷却可能となっており、前記温度センサでの検出結果に基づいて、複数の前記アーム部のそれぞれの内部を個別に冷却することを特徴とする産業用ロボット。 A hand on which an object to be transported is mounted; an arm that is formed in a hollow shape and connected to the distal end side; and a cooling mechanism for cooling the inside of the arm,
The hand and the arm are placed in a vacuum;
The arm includes a plurality of arm portions formed in a hollow shape and connected to each other so as to be relatively rotatable,
The insides of the plurality of arms are at atmospheric pressure,
Inside each of the plurality of arm portions, a temperature sensor for measuring the temperature inside the arm portion is disposed,
The cooling mechanism can individually cool the insides of the plurality of arm portions, and individually cools the insides of the plurality of arm portions based on the detection result of the temperature sensor. Industrial robot characterized by - 前記冷却機構は、複数の前記アーム部のそれぞれの内部に配置される冷却用空気の供給口を備え、前記温度センサでの検出結果に基づいて、前記供給口からの冷却用空気の供給量を調整することで、複数の前記アーム部のそれぞれの内部を個別に冷却することを特徴とする請求項1記載の産業用ロボット。 The cooling mechanism includes a cooling air supply port disposed inside each of the plurality of arm portions, and the amount of cooling air supplied from the supply port is determined based on a detection result of the temperature sensor. The industrial robot according to claim 1, wherein the interior of each of the plurality of arm portions is individually cooled by adjustment.
- 複数の前記アーム部を回動可能に支持する本体部は大気中に配置されてその内部は大気圧となっており、それぞれが中空状に形成された複数の前記アーム部の内部は、複数の前記アーム部に設けた開口部を介して前記本体部の内部と連通していることにより大気圧に保たれており、
前記冷却機構は、前記本体部の内部から複数の前記アーム部のそれぞれの内部に引き回されたエア配管を備え、該エア配管を介して複数の前記アーム部のそれぞれの内部に前記冷却用空気を供給することを特徴とする請求項2記載の産業用ロボット。 The main body portion that rotatably supports the plurality of arm portions is disposed in the atmosphere, and the inside thereof is at atmospheric pressure, and the inside of the plurality of arm portions each formed in a hollow shape includes a plurality of It is maintained at atmospheric pressure by communicating with the inside of the main body through an opening provided in the arm,
The cooling mechanism includes an air pipe routed from the inside of the main body part to each of the plurality of arm parts, and the cooling air is introduced into each of the plurality of arm parts via the air pipe. The industrial robot according to claim 2, wherein: - 複数の前記アーム部は、前記本体部側に回動可能に連結された第1アーム部と、該第1アーム部の先端側に回動可能に連結されるとともに前記ハンドが先端側に連結される第2アーム部とを備え、
前記第1アーム部と前記第2アーム部とのそれぞれに設けた前記開口部を介して連結される関節部には、中心に貫通孔が形成された中空減速機が設けられ、前記貫通孔を介して前記第2アーム部の内部は前記第1アーム部の内部と連通するとともに前記エア配管が前記第1アーム部の内部から前記第2アーム部の内部に引き回されており、
前記関節部には、前記第1アーム部と前記第2アーム部との連結部分から真空領域への空気の流出を防ぐシール部が設けられていることを特徴とする請求項3記載の産業用ロボット。 The plurality of arm portions are connected to a first arm portion rotatably connected to the main body portion side, and are rotatably connected to a distal end side of the first arm portion, and the hand is connected to the distal end side. A second arm part,
A hollow speed reducer having a through-hole formed in the center is provided at a joint portion connected through the opening provided in each of the first arm portion and the second arm portion, and the through-hole is provided in the joint portion. The inside of the second arm part communicates with the inside of the first arm part and the air pipe is routed from the inside of the first arm part to the inside of the second arm part,
The industrial part according to claim 3, wherein the joint part is provided with a seal part for preventing air from flowing out from a connecting part between the first arm part and the second arm part to a vacuum region. robot. - 前記冷却機構は、前記温度センサでの検出結果に基づいて、複数の前記アーム部の内部温度が略等しくなるように、複数の前記アーム部のそれぞれの内部を個別に冷却することを特徴とする請求項1から4のいずれかに記載の産業用ロボット。 The cooling mechanism individually cools the insides of the plurality of arm portions so that the internal temperatures of the plurality of arm portions are substantially equal based on the detection result of the temperature sensor. The industrial robot according to any one of claims 1 to 4.
- 前記温度センサは、前記アーム部同士を繋ぐ関節部の近傍、および、前記アームと前記ハンドとを繋ぐ関節部の近傍に配置されていることを特徴とする請求項1から4のいずれかに記載の産業用ロボット。 The temperature sensor is arranged in the vicinity of a joint part that connects the arm parts to each other and in the vicinity of a joint part that connects the arm and the hand. Industrial robots.
- 複数の前記アーム部および前記ハンドの少なくともいずれか1つを回動させるモータを備え、
前記温度センサは、前記モータの近傍に配置されていることを特徴とする請求項1から4のいずれかに記載の産業用ロボット。 A motor for rotating at least one of the plurality of arm portions and the hand;
The industrial robot according to claim 1, wherein the temperature sensor is disposed in the vicinity of the motor. - 複数の前記アーム部のそれぞれの内部には、検出温度の異なる複数の前記温度センサがセットで配置されていることを特徴とする請求項1から4のいずれかに記載の産業用ロボット。 The industrial robot according to any one of claims 1 to 4, wherein a plurality of the temperature sensors having different detection temperatures are arranged inside each of the plurality of arm portions.
- 搬送対象物が搭載されるハンドと、前記ハンドが先端側に連結されるアームとを備え、
前記ハンドおよび前記アームは、真空中に配置され、
前記アームは、中空状に形成されるとともに、前記アームの内部は、大気圧となっており、
前記アームの内部には、上側に向かって空気を送るファンが配置されていることを特徴とする産業用ロボット。 A hand on which the object to be transported is mounted, and an arm to which the hand is connected to the tip side,
The hand and the arm are placed in a vacuum;
The arm is formed in a hollow shape, and the inside of the arm is at atmospheric pressure,
An industrial robot characterized in that a fan for sending air upward is disposed inside the arm. - 前記アームの内部の上面には、放熱用のフィンが形成されていることを特徴とする請求項9記載の産業用ロボット。 10. The industrial robot according to claim 9, wherein a fin for heat radiation is formed on an upper surface inside the arm.
- 前記アームは、前記アームの上面の一部を構成する平板状の上面部を備え、
前記上面部には、上下方向に貫通する開口部が形成され、
前記アームは、さらに、前記上面部に固定され上側から前記開口部を塞ぐ蓋部材を備え、
前記フィンは、前記蓋部材の下面に形成されていることを特徴とする請求項10記載の産業用ロボット。 The arm includes a flat upper surface portion that constitutes a part of the upper surface of the arm,
An opening that penetrates in the vertical direction is formed in the upper surface portion,
The arm further includes a lid member that is fixed to the upper surface portion and closes the opening portion from above.
The industrial robot according to claim 10, wherein the fin is formed on a lower surface of the lid member. - 前記蓋部材は、円板状に形成され、
前記蓋部材には、径の異なる円環状の複数の前記フィンが同心状に形成されていることを特徴とする請求項11記載の産業用ロボット。 The lid member is formed in a disc shape,
12. The industrial robot according to claim 11, wherein a plurality of annular fins having different diameters are formed concentrically on the lid member. - 前記アームは、互いに相対回動可能に連結される複数のアーム部を備え、
複数の前記アーム部の内部のそれぞれに、前記ファンが配置されていることを特徴とする請求項9から12のいずれかに記載の産業用ロボット。 The arm includes a plurality of arm portions connected to each other so as to be relatively rotatable.
The industrial robot according to claim 9, wherein the fan is disposed in each of the plurality of arm portions. - 前記アームの略全体を覆うカバー部材を備え、
前記カバー部材の熱伝導率は、前記アームの熱伝導率よりも低くなっていることを特徴とする請求項9から12のいずれかに記載の産業用ロボット。 A cover member covering substantially the entire arm;
The industrial robot according to claim 9, wherein a thermal conductivity of the cover member is lower than a thermal conductivity of the arm. - 複数の前記アーム部を回動可能に支持する本体部は大気中に配置されてその内部は大気圧となっており、それぞれが中空状に形成された複数の前記アーム部の内部は、複数の前記アーム部に設けた連通開口部を介して前記本体部の内部と連通していることにより大気圧に保たれていることを特徴とする請求項9から請求項12のいずれかに記載の産業用ロボット。 The main body portion that rotatably supports the plurality of arm portions is disposed in the atmosphere, and the inside thereof is at atmospheric pressure, and the inside of the plurality of arm portions each formed in a hollow shape includes a plurality of The industry according to any one of claims 9 to 12, wherein the atmospheric pressure is maintained by communicating with the inside of the main body through a communication opening provided in the arm. Robot.
- 前記アームの内部を冷却するための冷却機構を備え、該冷却機構は、前記本体部の内部から複数の前記アーム部のそれぞれの内部に引き回されたエア配管を備え、前記エア配管は複数の前記アーム部内に配置されて、複数の前記アーム部のそれぞれの内部に前記冷却用空気を供給することを特徴とする請求項15記載の産業用ロボット。 A cooling mechanism for cooling the inside of the arm, and the cooling mechanism includes an air pipe routed from the inside of the main body part to each of the plurality of arm parts, and the air pipe includes a plurality of air pipes. The industrial robot according to claim 15, wherein the industrial robot is disposed in the arm portion and supplies the cooling air into each of the plurality of arm portions.
- 複数の前記アーム部は、前記本体部側に回動可能に連結された第1アーム部と、該第1アーム部の先端側に回動可能に連結されるとともに前記ハンドが先端側に連結される第2アーム部とを備え、
前記第1アーム部と前記第2アーム部とのそれぞれに設けた前記開口部を介して連結される関節部には、中心に貫通孔が形成された中空減速機が設けられ、前記貫通孔を介して前記第2アーム部の内部は前記第1アーム部の内部と連通するとともに前記エア配管が前記第1アーム部の内部から前記第2アーム部の内部に引き回されており、
前記関節部には、前記第1アーム部と前記第2アーム部との連結部分から真空領域への空気の流出を防ぐシール部が設けられていることを特徴とする請求項16記載の産業用ロボット。 The plurality of arm portions are connected to a first arm portion rotatably connected to the main body portion side, and are rotatably connected to a distal end side of the first arm portion, and the hand is connected to the distal end side. A second arm part,
A hollow speed reducer having a through-hole formed in the center is provided at a joint portion connected through the opening provided in each of the first arm portion and the second arm portion, and the through-hole is provided in the joint portion. The inside of the second arm part communicates with the inside of the first arm part and the air pipe is routed from the inside of the first arm part to the inside of the second arm part,
The industrial joint according to claim 16, wherein the joint portion is provided with a seal portion for preventing air from flowing out from a connecting portion between the first arm portion and the second arm portion to a vacuum region. robot. - 複数の前記アーム部のそれぞれの内部には、前記アーム部の内部の温度を測定するための温度センサが配置され、
前記冷却機構は、前記温度センサでの検出結果に基づいて、複数の前記アーム部のそれぞれの内部を個別に冷却するとともに、前記ファンは、前記温度センサでの検出結果に基づいて、回転または停止することを特徴とする請求項17記載の産業用ロボット。 Inside each of the plurality of arm portions, a temperature sensor for measuring the temperature inside the arm portion is disposed,
The cooling mechanism individually cools the inside of each of the plurality of arm portions based on the detection result of the temperature sensor, and the fan rotates or stops based on the detection result of the temperature sensor. The industrial robot according to claim 17, wherein:
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- 2014-09-12 CN CN201480050154.XA patent/CN105531086B/en active Active
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Also Published As
Publication number | Publication date |
---|---|
CN105531086A (en) | 2016-04-27 |
JP6449762B2 (en) | 2019-01-09 |
TWI543855B (en) | 2016-08-01 |
KR20160054464A (en) | 2016-05-16 |
TWI597141B (en) | 2017-09-01 |
CN105531086B (en) | 2017-09-05 |
JPWO2015037701A1 (en) | 2017-03-02 |
TW201615367A (en) | 2016-05-01 |
KR102236151B1 (en) | 2021-04-05 |
TW201529255A (en) | 2015-08-01 |
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