CN105531086A - Industrial robot - Google Patents

Industrial robot Download PDF

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Publication number
CN105531086A
CN105531086A CN201480050154.XA CN201480050154A CN105531086A CN 105531086 A CN105531086 A CN 105531086A CN 201480050154 A CN201480050154 A CN 201480050154A CN 105531086 A CN105531086 A CN 105531086A
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CN
China
Prior art keywords
arm
end side
hand
industrial robot
temperature sensor
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
CN201480050154.XA
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Chinese (zh)
Other versions
CN105531086B (en
Inventor
矢泽隆之
增泽佳久
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Nidec Sankyo Corp
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Nidec Sankyo Corp
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Filing date
Publication date
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Publication of CN105531086A publication Critical patent/CN105531086A/en
Application granted granted Critical
Publication of CN105531086B publication Critical patent/CN105531086B/en
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Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
    • B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
    • B25J19/00—Accessories fitted to manipulators, e.g. for monitoring, for viewing; Safety devices combined with or specially adapted for use in connection with manipulators
    • B25J19/0054—Cooling means
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
    • B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
    • B25J9/00—Programme-controlled manipulators
    • B25J9/02—Programme-controlled manipulators characterised by movement of the arms, e.g. cartesian coordinate type
    • B25J9/04—Programme-controlled manipulators characterised by movement of the arms, e.g. cartesian coordinate type by rotating at least one arm, excluding the head movement itself, e.g. cylindrical coordinate type or polar coordinate type
    • B25J9/041—Cylindrical coordinate type
    • B25J9/042—Cylindrical coordinate type comprising an articulated arm
    • B25J9/043—Cylindrical coordinate type comprising an articulated arm double selective compliance articulated robot arms [SCARA]
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67739—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations into and out of processing chamber
    • H01L21/67742—Mechanical parts of transfer devices
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G49/00—Conveying systems characterised by their application for specified purposes not otherwise provided for
    • B65G49/05—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles
    • B65G49/06—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles for fragile sheets, e.g. glass
    • B65G49/067—Sheet handling, means, e.g. manipulators, devices for turning or tilting sheet glass

Abstract

Provided is an industrial robot that enables a hand to be properly operated when conveying a high-temperature object to be conveyed in a vacuum even when the arm comprises multiple arm sections that are connected together in a rotatable manner relative to each other. This industrial robot is equipped with a cooling mechanism for cooling the inside of a hollow arm (6). A hand (4) and the arm (6) are arranged in a vacuum. The arm (6) is equipped with arm sections (20, 21) that are connected together in a rotatable manner relative to each other, and the pressure inside the arm sections (20, 21) is equal to the atmospheric pressure. A temperature sensor (80) for measuring the internal temperature of each arm section (20, 21) is installed inside each arm section (20, 21). The cooling mechanism is capable of individually cooling the inside of the respective arm sections (20, 21) and individually cools the inside of the respective arm sections (20, 21) on the basis of the detection results of the temperature sensors (80).

Description

Industrial robot
Technical field
The present invention relates to a kind of in a vacuum to the industrial robot that conveying object is carried.
Background technology
In the past, known a kind of industrial robot (such as with reference to patent document 1) being arranged on moving glass substrate etc. in a vacuum in vacuum chamber.The main part that the base end side that industrial robot described in patent document 1 has the arm and arm that the hand, the hand that load glass substrate etc. can be connected to end side rotatably can connect rotatably.Arm is made up of first arm that can connect rotatably each other and the second arm.The motor holding room that the base end side that main part has arm can connect rotatably and be the base station that can rotate by the supporting of motor holding room.The motor that hand, the second arm and the first arm are rotated is configured with in the inside of motor holding room.
Further, in the industrial robot described in patent document 1, hand is connected to the end side of the second arm.The base end side of the second arm is connected to the end side of the first arm, and the base end side of the first arm can be connected to motor holding room rotatably.Hand, the second arm, the first arm, motor holding room and base station sequentially configure in the vertical direction from upside.Second arm, the first arm and the configuration of motor holding room are in a vacuum.Further, motor holding room is formed as hollow form.In motor holding room, guarantee air-tightness, the inside of motor holding room becomes atmospheric pressure.
At first technical literature
Patent document
Patent document 1: Japanese Unexamined Patent Publication 2008-6535 publication
Summary of the invention
The problem solved is wanted in invention
In recent years, market exists the demand to the industrial robot that can the conveying object such as glass substrate be carried at high operating temperatures in a vacuum.When using the industrial robot described in patent document 1 to carry the conveying object of high temperature in a vacuum, the temperature of the first arm and the second arm rises thus arm produces thermal expansion, therefore, the track of this coupling part when causing the track of the reality of the coupling part of arm and hand and arm not to produce thermal expansion because of the thermal expansion of this arm produces and offsets.
In the industrial robot described in patent document 1, the hand loading conveying object is connected to the end side of the second arm, the base end side of the second arm is connected to the first arm, and hand is configured in the position than the second top side of arm, and the first arm is configured in than the second arm position on the lower.Therefore, if utilize this industrial robot to carry the conveying object of high temperature, then exist and to worry as follows: the coupling part that the temperature of the first arm and the temperature of the second arm produce deviation and arm and hand offsets to generation position, irregular direction.Therefore, if utilize this industrial robot to carry the conveying object of high temperature, then there is following worry: the change of the side-play amount of the track of this coupling part when track of the reality of the coupling part of arm and hand and arm do not produce thermal expansion becomes greatly, and can not make hand action rightly.
And, when using the industrial robot described in patent document 1 to carry the conveying object of high temperature in a vacuum, the temperature of arm because of from conveying object radiant heat or come self-configuring industrial robot vacuum chamber wall radiant heat etc. impact and rise.In the industrial robot described in patent document 1, position than the first arm and the top side of the second arm is configured in owing to loading the hand of conveying object, if therefore use this industrial robot to carry the conveying object of high temperature, then the temperature of the upper surface side part of the first arm and the second arm becomes the temperature of the lower face side part higher than the first arm and the second arm.That is, the temperature of the upper surface side part of arm is higher than the temperature of the lower face side part of arm.
Further, in industrial robot, also have than the first top side of arm and than the situation of the second arm position configuration hand on the lower.In this industrial robot, position than the first top side of arm is configured in owing to loading the hand of conveying object, if therefore use this industrial robot to carry the conveying object of high temperature, then the temperature of the upper surface side part of the first arm can become the temperature of the lower face side part higher than the first arm.And, in this industrial robot, hand is configured in than the second arm position on the lower, the conveying object being loaded into hand is also configured in than the second arm position on the lower, but the research of the inventor according to the application, when using the conveying object of this industrial robot carrying high temperature, the temperature of the upper surface side part of the second arm also becomes the temperature of the lower face side part higher than the second arm.That is, in this industrial robot, the temperature of the upper surface side part of arm is also higher than the temperature of the lower face side part of arm.In addition, infer that the phenomenon that the temperature of the upper surface side part of the second arm becomes the temperature of the lower face side part higher than the second arm produces because of the photothermal impact of the wall from vacuum chamber.
When carrying the conveying object of high temperature, if the temperature of the upper surface side part of arm is higher than the temperature of the lower face side part of arm, then the heat distortion amount of the upper surface side part of arm is greater than the heat distortion amount of lower face side part.Therefore, there is worry as follows: the mode that arm declines with the end side of arm produces thermal deformation, and hand can not be utilized to carry conveying object rightly.
Therefore, problem of the present invention is to provide a kind of industrial robot, and it is carried conveying object in a vacuum, even if when carrying the conveying object of high temperature, also can be carried conveying object rightly by hand.
The technological means of dealing with problems
In order to solve above-mentioned problem, the feature of industrial robot of the present invention is, it has: hand, and it loads conveying object; Arm, it is formed as hollow form and connects hand at end side; And cooling body, it is for the internal cooling by arm, hand and arm configuration are in a vacuum, arm has and is formed as hollow form and multiple arms that can connect with the relative rotation each other, the inside of multiple arm becomes atmospheric pressure, is configured with the temperature sensor of the temperature of the inside for detecting arm in multiple arm inside separately, and multiple arm inside separately can individually cool by cooling body, according to the testing result of temperature sensor gained, multiple arm inside separately is individually cooled.
In industrial robot of the present invention, the inside being formed as multiple arms of hollow form becomes atmospheric pressure, is configured with the temperature sensor of the temperature of the inside for detecting arm in multiple arm inside separately.Further, in the present invention, multiple arm inside separately can individually cool by cooling body, according to the testing result of temperature sensor gained, is individually cooled multiple arm inside separately.Therefore, in the present invention, according to the testing result of temperature sensor gained, multiple arm temperature separately can be managed.Therefore, in the present invention, even if cause the generation position, coupling part of arm and hand to offset because of the thermal expansion of arm, the direction that the position of this coupling part also can be made to offset is the direction of rule.Consequently, in the present invention, even if arm is made up of multiple arm, the change of the side-play amount of the track of this coupling part when track of the reality of the coupling part of arm when carrying the conveying object of high temperature and hand and arm also can be suppressed not to produce thermal expansion.Therefore, in the present invention, hand action rightly can be made.
In the present invention, preferred cooling body, according to the testing result of temperature sensor gained, becomes roughly the same mode with the internal temperature of multiple arm, is individually cooled multiple arm inside separately.Form if so, then the swell increment of the per unit length of multiple arm becomes roughly the same, therefore, it is possible to make the coupling part of arm and hand produce, direction that position when position offsets offsets becomes more regular direction.Therefore, it is possible to the change of the side-play amount of the track of this coupling part when the track of reality of the coupling part of arm when effectively suppressing the conveying object of carrying high temperature and hand and arm do not produce thermal expansion, consequently, hand action more rightly can be made.
In the present invention, cooling body has the supply port of the tempering air being such as configured at multiple arm inside separately, according to the testing result of temperature sensor gained, adjust the quantity delivered of the tempering air from supply port, thus multiple arm inside separately is individually cooled.In this case, can with fairly simple structure management multiple arms temperature separately.In this case, the main part supported by multiple arm as rotating configures in an atmosphere and its inside becomes atmospheric pressure, the inside being formed as the multiple described arm of hollow form is separately communicated with the inside of described main part via the opening portion being arranged at multiple described arm, remain atmospheric pressure thus, cooling body can be configured to have the winding air line to multiple arm inside separately in the inside of main body, and supplies described tempering air via this air line to the respective inside of multiple arm.Specifically, multiple arm can be configured to be had: the first arm, and it can be connected to main part side rotatably; And second arm, it can be connected to the end side of the first arm rotatably and connect hand at end side, via the joint portion being arranged at described first arm respectively and being connected with the described opening portion of described second arm, the center of being arranged on is formed with the hollow reducer of through hole, via through hole, the inside of the second arm is communicated with the inside of the first arm, and air line from the inside of the first arm by the winding inside to the second arm, be provided with the sealing preventing air from flowing out to vacuum area from the coupling part of the first arm and the second arm at joint portion.
In the present invention, preferable temperature sensor is configured in the vicinity of the joint portion that arm is connected with each other and makes near arm and palmistry joint portion even.Form if so, then according to the testing result of temperature sensor gained, the temperature being configured at the bearing of joint portion can be inferred.Therefore, it is possible to infer the life-span of the bearing being configured at joint portion rightly according to the temperature inferred, consequently, bearing can be changed in appropriate period.
In the present invention, preferred industrial robot has at least any one motor rotated made in multiple arm and hand, and temperature sensor is configured near motor.Form if so, then according to the testing result of temperature sensor gained, the exception of motor can be detected, consequently, the damage of motor can be prevented.
In the present invention, preferably the different multiple temperature sensors of detected temperatures are configured with in groups in multiple arm inside separately.Form if so, then can improve the accuracy of detection of the internal temperature of arm.Therefore, it is possible to manage multiple arm temperature separately accurately.
Further, in order to solve above-mentioned problem, the feature of industrial robot of the present invention is: it has: hand, and it loads conveying object; And arm, it connects hand at end side, and in a vacuum, arm is formed as hollow form, and the inside of arm becomes atmospheric pressure for hand and arm configuration, is configured with towards the fan of upside conveying air in the inside of arm.
In industrial robot of the present invention, be configured with in the inside of arm towards the fan of upside conveying air.Therefore, in the present invention, when carrying the conveying object of high temperature, can the temperature of the upper surface side part of arm be suppressed to rise the cooling of the upper surface side part of arm, thus the temperature of the upper surface side part of arm can be made close to the temperature of the lower face side part of arm.Therefore, in the present invention, the heat distortion amount of heat distortion amount close to lower face side part of the upper surface side part of arm can be made, thus the thermal deformation of the arm that end side can be suppressed to decline.Consequently, in the present invention, even if when carrying the conveying object of high temperature, also can be carried conveying object rightly by hand.Further, in the present invention, due to fan can be used the internal cooling of arm, therefore, it is possible to suppress the heat distortion amount of arm.
In the present invention, preferred arm has multiple arms that can connect with the relative rotation each other, and is configured with fan respectively in the inside of multiple arm.Form if so, even if then when arm is made up of multiple arm, also can become roughly uniform mode with the temperature of the whole upper surface side part of arm and the upper surface side part of arm is cooled.
In the present invention, the main part supported by multiple arm as rotating configures in an atmosphere and its inside becomes atmospheric pressure, and the inside being formed as multiple arms of hollow form separately connects via mutual opening portion, and is also connected with the inside of main part, thereby, it is possible to remain atmospheric pressure.And, have for the inner colded cooling body by arm, this cooling body has the winding air line to multiple described arm inside separately from the inside of described main part, air line is configured in multiple described arm, as long as and to multiple arm separately inside supply tempering air, just can reliably cool in arm.
In the present invention, the fin of heat transmission is preferably formed at the upper surface of the inside of arm.Form if so, then the fin of tempering air and the heat transmission sent here from fan can be made to contact, therefore, it is possible to effectively the upper surface side part of arm is cooled.Therefore, it is possible to effectively suppress the temperature of the upper surface side part of arm to rise.
In the present invention, preferred arm has the flat upper surface part of a part for the upper surface forming arm, and be formed with opening portion through in the vertical direction in upper surface part, arm also has and is fixed on upper surface part and from the cover of upside closed peristome, fin is formed at the lower surface of cover.Form if so, even if then under the upper surface of inside of the arm being formed as hollow form forms gelled situation, also easily fin can be formed.
In the present invention, such as, cover is formed as discoideus, and at cover in being formed with the different circular multiple fin of diameter with heart shaped.
In the present invention, preferred industrial robot has the cover member of the roughly whole arm of covering, and the thermal conductivity of cover member is lower than the thermal conductivity of arm.Form if so, then can effectively suppress from conveying object radiant heat or carry out self-configuring industrial robot the radiant heat of wall of vacuum chamber to arm transmission.
In addition, when not being configured at the inside of arm towards the fan of upside conveying air, in order to the difference of the temperature of the lower face side part of the temperature and arm of eliminating the upper surface side part of arm, thus eliminate the heat distortion amount of upper surface side part of arm and the difference of the heat distortion amount of lower face side part, the upper surface side of arm is preferably only covered with cover member.On the other hand, in this case, because the lower face side of arm is not covered by cover member, therefore can not effectively suppress radiant heat from conveying object etc. to arm transmission.On the other hand, in the present invention, because the fan arrangement towards upside conveying air is in the inside of arm, if therefore cover roughly whole arm by cover member, then can eliminate the difference of the temperature of the temperature of the upper surface side part of arm and the lower face side part of arm, and can effectively suppress radiant heat from conveying object etc. to arm transmission.
Invention effect
As mentioned above, in the present invention, in the industrial robot carried conveying object in a vacuum, even if when carrying the conveying object of high temperature, also can be carried conveying object rightly by hand.Further, even if there are multiple arms that can connect with the relative rotation each other at the arm of end side connection hand, when carrying the conveying object of high temperature, hand action rightly can also be made.
Accompanying drawing explanation
Fig. 1 is the top view of the industrial robot involved by embodiments of the present invention.
Fig. 2 is the base end side part of the arm shown in Fig. 1 and the sectional view of arm support.
Fig. 3 is the sectional view of the arm shown in Fig. 1.
Fig. 4 is the sectional view of the arm shown in Fig. 1.
Fig. 5 is the enlarged drawing in the E portion of Fig. 3.
Fig. 6 is the enlarged drawing in the F portion of Fig. 3.
Fig. 7 (A) is the sectional view of the cover shown in Fig. 5, and (B) is the figure that cover is shown from the G-G direction of (A).
Fig. 8 is the enlarged drawing in the H portion of Fig. 4.
Fig. 9 is the enlarged drawing in the J portion of Fig. 4.
Figure 10 is the top view of the industrial robot involved by other embodiments of the present invention.
Figure 11 is the figure of the industrial robot involved by other embodiments of the present invention, and (A) is top view, and (B) is side view.
Detailed description of the invention
Referring to accompanying drawing, embodiments of the present invention are described.
(schematic construction of industrial robot)
Fig. 1 is the top view of the industrial robot 1 involved by embodiments of the present invention.Fig. 2 is the base end side part of arm 6,7 shown in Fig. 1 and the sectional view of arm support 8.Fig. 3 is the sectional view of the arm 6 shown in Fig. 1.Fig. 4 is the sectional view of the arm 7 shown in Fig. 1.
The industrial robot 1 (hereinafter referred to as " robot 1 ") of present embodiment is for carrying such as the robot of the glass substrate 2 (hereinafter referred to as " substrate 2 ") of organic EL (OrganicElectro-Luminescence: the organic electroluminescent) display of conveying object.This robot 1 is installed on and omits illustrated organic el display System manufacturing system and use, the substrate 2 of carrying high temperature.
As shown in Figure 1, robot 1 has: two hands 4,5, its mounting substrate 2; Arm 6, it can connect hand 4 rotatably at end side; Arm 7, it can connect hand 5 rotatably at end side; Arm support 8, the base end side of its fixed arm 6,7; And main part 9, it can linking arm support 8 rotatably.Hand 4,5, arm 6,7 and arm support 8 be configured in the upside of main part 9.
Hand 4,5, arm 6,7, the upper end side of arm support 8 and main part 9 is configured at the inside forming organic EL and show the vacuum chamber of the System manufacturing system showing device.Namely, hand 4,5, arm 6,7, the upper end side of arm support 8 and main part 9 is configured in (in vacuum) in vacuum area VR, main part 9 except upper end side, be partly arranged at (in air) in atmosphere zone AR (with reference to Fig. 2), the substrate 2 being loaded into hand 4,5 carried in a vacuum by robot 1.
Hand 4,5 has two crotch portions 12 of the base portion 11 and mounting substrate 2 being connected to arm 6,7.Crotch portion 12 is formed as linearity.Further, two crotch portions 12 be the states parallel at the interval being spaced from each other regulation configure.
Main part 9 has: housing 13, and it is formed as hollow form; And the rotating shaft 14 of hollow form, it is fixed on the lower surface of arm support 8, and is formed as being communicated with the inside of arm support 8.Rotating shaft 14 is formed as the elongated cylindrical shape using above-below direction as axis.The lower surface of arm support 8 is fixed in the upper end of rotating shaft 14.The upper end side part of rotating shaft 14 is more upwardly projecting than the upper surface of housing 13, and the inside being partially accommodated in housing 13 except upper end side part of rotating shaft 14.
The motor (omitting diagram) for making arm support 8 rotate relative to housing 13 is configured with in the inside of housing 13.Such as connect the lower end side of rotating shaft 14 via belt wheel, driving-belt and reductor at this motor.Further, the elevating mechanism (omitting diagram) that rotating shaft 14 grade is elevated is configured with in the inside of housing 13.The upper end side of housing 13 is partly arranged in vacuum area VR, being partly arranged in atmosphere zone AR except upper end side part of housing 13.The inside of housing 13 and rotating shaft 14 becomes atmospheric pressure, is configured with magnetic fluid seal for preventing air from flowing out to vacuum area VR and bellows (omitting diagram) at the outer circumferential side of rotating shaft 14.
Arm support 8 is formed as hollow form, and has support main body 15 and three covers 16.Cover 16 is formed by aluminium alloy.Further, cover 16 is formed as discoideus.Support main body 15 is formed by aluminium alloy.Further, support main body 15 has: upper surface part 15a, and it forms the upper surface of support main body 15; Lower surface portion 15b, it forms the lower surface of support main body 15 and configures in opposite directions substantially in parallel across the gap specified and upper surface part 15a; And side surface part 15c, it makes the outer circumference end of upper surface part 15a be connected with the outer circumference end of lower surface portion 15b.Upper surface part 15a and lower surface portion 15b is formed as the tabular of elongated substantially elliptical, and in the vertical direction in opposite directions.The side surface part 15c shape be formed as when above-below direction is observed is the tubular of elongated generally elliptical shape.
At upper surface part 15a, be formed with three opening portions 15d, 15e of toroidal in mode through in the vertical direction.An opening portion 15d in three opening portions 15d, 15e is formed at the center of upper surface part 15a, and all the other two opening portion 15e are formed at the both end sides on the length direction of the upper surface part 15a being formed as substantially elliptical.At lower surface portion 15b, be also formed with three opening portions 15f, 15g of toroidal in mode through in the vertical direction.An opening portion 15f in three opening portions 15f, 15g is formed at the center of lower surface portion 15b, and all the other two opening portion 15g are formed at the both end sides on the length direction of the lower surface portion 15b being formed as substantially elliptical.
The upper end of rotating shaft 14 is fixed at the lower surface of lower surface portion 15b.Rotating shaft 14 is fixed on the lower surface of lower surface portion 15b in the mode of surrounding opening portion 15f, and the inner circumferential side of rotating shaft 14 is communicated with the inside of arm support 8.That is, the inside of arm support 8 is communicated with the inside of the housing 13 of main part 9 via opening portion 15f, thus the inside of arm support 8 becomes atmospheric pressure.As shown in Figure 2, opening portion 15d tegmentum parts 16 are closed from upside, and two opening portion 15g tegmentum parts 16 are closed from downside.The seal member (omit and illustrate) of the ring-type preventing air from flowing out to vacuum area VR is configured with between support main body 15 and cover 16.
Arm 6 is made up of first arm 20 that can connect with the relative rotation each other and these two arms of the second arm 21.First arm 20 and the second arm 21 are formed as hollow form.That is, whole arm 6 is formed as hollow form.The base end side of the first arm 20 is fixed on arm support 8.The base end side of the second arm 21 can be connected rotatably at the end side of the first arm 20.Hand 4 can be connected rotatably at the end side of the second arm 21.
The connecting portion of the first arm 20 and the second arm 21 becomes joint portion 22.Arm 6 becomes joint portion 23 with the connecting portion (that is, the connecting portion of the second arm 21 and hand 4) of hand 4.Second arm 21 is configured in the position than the first top side of arm 20, and hand 4 is configured in the position than the second top side of arm 21.
Arm 7 is made up of first arm 25 that can connect with the relative rotation each other and these two arms of the second arm 26.First arm 25 and the second arm 26 are formed as hollow form.That is, whole arm 7 is formed as hollow form.The base end side of the first arm 25 is fixed on arm support 8.The base end side of the second arm 26 can be connected rotatably at the end side of the first arm 25.Hand 5 can be connected rotatably at the end side of the second arm 26.
The connecting portion of the first arm 25 and the second arm 26 becomes joint portion 27.Arm 7 becomes joint portion 28 with the connecting portion (that is, the connecting portion of the second arm 26 and hand 5) of hand 5.Second arm 26 is configured in the position than the first top side of arm 25.Hand 5 is configured in than the second arm 26 on the lower and than the position of the first top side of arm 25.
(structure of the structure of arm, the internal structure of arm and joint portion)
Fig. 5 is the enlarged drawing in the E portion of Fig. 3.Fig. 6 is the enlarged drawing in the F portion of Fig. 3.Fig. 7 (A) is the sectional view of the cover 32 shown in Fig. 5, and Fig. 7 (B) is the figure that cover 32 is shown from the G-G direction of Fig. 7 (A).Fig. 8 is the enlarged drawing in the H portion of Fig. 4.Fig. 9 is the enlarged drawing in the J portion of Fig. 4.
First arm 20 has arm body 31, three covers 32 and a cover 33.Arm body 31 is formed by aluminium alloy.Further, arm body 31 has: upper surface part 31a, and it forms the upper surface of arm body 31; Lower surface portion 31b, it forms the lower surface of arm body 31 and configures in opposite directions substantially in parallel across the gap specified and upper surface part 31a; And side surface part 31c, it makes the outer circumference end of upper surface part 31a be connected with the outer circumference end of lower surface portion 31b.Upper surface part 31a and lower surface portion 31b is formed as the tabular of elongated substantially elliptical, and in the vertical direction in opposite directions.Upper surface part 31a forms a part for the upper surface of the first arm 20, and lower surface portion 31b forms a part for the lower surface of the first arm 20.The side surface part 31c shape be formed as when above-below direction is observed is the tubular of elongated generally elliptical shape.
At upper surface part 31a, be formed with four opening portions 31d, 31e of toroidal in mode through in the vertical direction.That is, opening portion 31d, 31e of the inside leading to the first arm 20 is formed at upper surface part 31a.Four opening portions 31d, 31e on the length direction of upper surface part 31a being formed as substantially elliptical with the gap-forming of regulation.In the present embodiment, at formation opening portion, the most end side 31e of upper surface part 31a, its excess-three opening portion 31d is formed at the position of the base end side of surface element 31a more top than opening portion 31e.At lower surface portion 31b, be also formed with two opening portions 31f, 31g of toroidal in mode through in the vertical direction.That is, opening portion 31f, 31g of the inside leading to the first arm 20 is formed at lower surface portion 31b.Opening portion 31f is formed at the end side of lower surface portion 31b, and opening portion 31g is formed at the base end side of lower surface portion 31b.
Second arm 21 has arm body 34, two covers 32 and two covers 33.Arm body 34 is formed by aluminium alloy.Further, arm body 34 has: upper surface part 34a, and it forms the upper surface of arm body 34; Lower surface portion 34b, it forms the lower surface of arm body 34 and configures in opposite directions substantially in parallel across the gap specified and upper surface part 34a; And side surface part 34c, it makes the outer circumference end of upper surface part 34a be connected with the outer circumference end of lower surface portion 34b.Upper surface part 34a and lower surface portion 34b is formed as the tabular of elongated substantially elliptical, and in the vertical direction in opposite directions.Upper surface part 34a forms a part for the upper surface of the second arm 21, and lower surface portion 34b forms a part for the lower surface of the second arm 21.The side surface part 34c shape be formed as when above-below direction is observed is the tubular of elongated generally elliptical shape.
At upper surface part 34a, be formed with four opening portions 34d, 34e, 34f of toroidal in mode through in the vertical direction.That is, the opening portion 34d ~ 34f of the inside leading to the second arm 21 is formed at upper surface part 34a.Four opening portion 34d ~ 34f on the length direction of upper surface part 34a being formed as substantially elliptical with the gap-forming of regulation.In the present embodiment, be formed with opening portion 34e in the most end side of upper surface part 34a, be formed with opening portion 34f at the most base end side of upper surface part 34a, all the other two opening portion 34d are formed between opening portion 34e and opening portion 34f.At lower surface portion 34b, be also formed with two opening portions 34g, 34h of toroidal in mode through in the vertical direction.That is, opening portion 34g, 34h of the inside leading to the second arm 21 is formed at lower surface portion 34b.Opening portion 34g is formed at the end side of lower surface portion 34b, and opening portion 34h is formed at the base end side of lower surface portion 34b.
As mentioned above, the base end side of the first arm 20 is fixed on arm support 8.Specifically, the state that the base end side of the first arm 20 is close to the upper surface of the upper surface part 15a of support main body 15 with the lower surface of the lower surface portion 31b of arm body 31 is fixed on arm support 8.Further, the base end side of the first arm 20 is fixed on arm support 8 in such a way: when observing from above-below direction, and the center of the opening portion 15e of upper surface part 15a is roughly consistent with the center of the opening portion 31g of lower surface portion 31b.Therefore, the inside of the first arm 20 is communicated with the inside of arm support 8 via opening portion 15e and opening portion 31g, thus the inside of the first arm 20 becomes atmospheric pressure.In addition, between support main body 15 and arm body 31, be configured with the seal member (omit and illustrate) of the ring-type preventing air from flowing out to vacuum area VR.
Be configured with motor 35 in the inside of the base end side of the first arm 20 and the inside of arm support 8, this motor 35 makes the second arm 21 rotate relative to the first arm 20 and hand 4 is rotated relative to the second arm 21.Core on the above-below direction of motor 35 is configured at opening portion 15e and opening portion 31g, and the upper end side of motor 35 is configured at the inside of the base end side of the first arm 20, and the lower end side of motor 35 is configured at the inside of arm support 8.The output shaft of motor 35 is upwardly projecting, and is fixed with belt wheel 36 at this output shaft.
Joint portion 22 has to be made the rotation of motor 35 slow down and is passed to the reductor 37 of the second arm 21.Reductor 37 is the hollow reducer being formed with through hole at the center of its radial direction.Therefore, the inside of the second arm 21 is communicated with the inside of the first arm 20 via the through hole of hollow reducer, thus the inside of the second arm 21 becomes atmospheric pressure.That is, in the present embodiment, the inside of arm 6 becomes atmospheric pressure.Joint portion 23 has to be made the rotation of motor 35 slow down and is passed to the reductor 38 of hand 4.Reductor 38 is the hollow reducer being formed with through hole at the center of its radial direction.
Further, joint portion 22 has the magnetic fluid seal 39 preventing air from flowing out to vacuum area VR from the coupling part of the first arm 20 and the second arm 21.Magnetic fluid seal 39 has the roughly cylindric housing 40 forming its outer circumferential side part and the roughly cylindric inner circumferential side parts 41 that can be held in the inner circumferential side of housing 40 rotatably.Between housing 40 diametrically and inner circumferential side parts 41, be configured with the bearing seal portion 42 with bearing, permanent magnet and magnetic fluid.Equally, joint portion 23 has the magnetic fluid seal 43 preventing air from flowing out to vacuum area VR with the coupling part of hand 4 from the second arm 21.Magnetic fluid seal 43 is formed in the same manner as magnetic fluid seal 39, and has housing 44, inner circumferential side parts 45 and bearing seal portion 46.
Belt wheel 49 is fixed with in the lower end side of the power shaft of reductor 37.Belt wheel 49 is configured at the inside of the end side of the first arm 20.Driving-belt 50 is set up at belt wheel 36 and belt wheel 49.Further, belt wheel 51 is fixed with in the upper end side of the power shaft of reductor 37.Belt wheel 51 is configured at the inside of the base end side of the second arm 21.Belt wheel 52 can be installed rotatably in the inside of the second arm 21.Driving-belt 53 is set up at belt wheel 51 and belt wheel 52.
The end side of the first arm 20 is fixed with at the output shaft of reductor 37.Specifically, at the output shaft of reductor 37, be fixed with the end side of the first arm 20 across the inner circumferential side parts 41 of magnetic fluid seal 39.The output shaft of reductor 37 is fixed on the inner circumferential side of inner circumferential side parts 41.Inner circumferential side parts 41 are fixed on the end side of the first arm 20 in such a way: a part for its outer peripheral face contacts with the inner peripheral surface of opening portion 31e, and its part contacts with the upper surface of upper surface part 31a.In addition, between upper surface part 31a and inner circumferential side parts 41, be configured with the seal member (omit and illustrate) of the ring-type preventing air from flowing out to vacuum area VR.
The base end side of the second arm 21 is fixed with at the housing of reductor 37.Specifically, at the housing of reductor 37, be fixed with the base end side of the second arm 21 across the housing 40 of magnetic fluid seal 39.The housing of reductor 37 is fixed on the inner circumferential side of housing 40.Housing 40 is fixed on the base end side of the second arm 21 in such a way: a part for its outer peripheral face contacts with the inner peripheral surface of opening portion 34h, and its part contacts with the lower surface of lower surface portion 34b.In addition, between lower surface portion 34b and housing 40, be configured with the seal member (omit and illustrate) of the ring-type preventing air from flowing out to vacuum area VR.
Belt wheel 56 is fixed with in the lower end side of the power shaft of reductor 38.Belt wheel 56 is configured at the inside of the end side of the second arm 21.Driving-belt 57 is set up at belt wheel 56 and belt wheel 52.Driving-belt 53 and driving-belt 57 are sticked in belt wheel 52 with the state staggered in the vertical direction, and driving-belt 57 is configured in than driving-belt 53 position on the lower.The base portion 11 of hand 4 is fixed with at the output shaft of reductor 38.Specifically, at the output shaft of reductor 38, be fixed with the base portion 11 of hand 4 across the inner circumferential side parts 45 of magnetic fluid seal 43.The output shaft of reductor 38 is fixed on the inner circumferential side of inner circumferential side parts 45.Inner circumferential side parts 45 are fixed on the base portion 11 of hand 4.In addition, between the base portion 11 and inner circumferential side parts 45 of hand 4, be configured with the seal member (omit and illustrate) of the ring-type preventing air from flowing out to vacuum area VR.
The end side of the second arm 21 is fixed with at the housing of reductor 38.Specifically, at the housing of reductor 38, be fixed with the end side of the second arm 21 across the housing 44 of magnetic fluid seal 43.The housing of reductor 38 is fixed on the inner circumferential side of housing 44.Housing 44 is fixed on the end side of the second arm 21 in such a way: a part for its outer peripheral face contacts with the inner peripheral surface of opening portion 34e and its part contacts with the upper surface of upper surface part 34a.In addition, between upper surface part 34a and housing 44, be configured with the seal member (omit and illustrate) of the ring-type preventing air from flowing out to vacuum area VR.
Cover 32,33 is formed by aluminium alloy.Further, cover 32,33 is formed as discoideus.The two sides of cover 33 is formed as plane.On the other hand, in the face of the side of cover 32, as shown in Figure 7, the fin 32a of heat transmission is formed.In the present embodiment, be formed with circular multiple fin 32a that diameter is different in the face of the side of cover 32, multiple fin 32a configures concentrically.Further, in the present embodiment, as shown in Fig. 7 (A), by forming the circular multiple recesses caved in from the face towards opposite side of the side of cover 32, and multiple fin 32a is formed.In addition, also multiple fin 32a can be formed by the protuberance that the face of the side from cover 32 is outstanding.
The opening portion 31f tegmentum parts 33 of the first arm 20 are closed from downside.The opening portion 34f tegmentum parts 33 of the second arm 21 are closed from upside, and the opening portion 34g of the second arm 21 is closed from downside by cover 33.The opening portion 31d of the first arm 20 and the opening portion 34d tegmentum parts 32 of the second arm 21 are closed from upside.Cover 32 is fixed in the mode facing to downside being formed with fin 32a.That is, be formed with fin 32a at the lower surface of cover 32, be formed with the fin 32a of heat transmission at the upper surface of the inside of arm 6.In addition, between arm body 31,34 and cover 32,33, be configured with the seal member (omit and illustrate) of the ring-type preventing air from flowing out to vacuum area VR.
As shown in Figure 8, the first arm 25 is formed in the same manner as the first arm 20, has arm body 31, three covers 32 and a cover 33.Further, as shown in Figure 9, the second arm 26 is formed in the same manner as the second arm 21, has arm body 34, two covers 32 and two covers 33.Therefore, the detailed description of the structure of the first arm 25 and the structure of the second arm 26 is omitted.
The base end side of the first arm 25 is fixed on the support main body 15 of arm support 8 in the same manner as the base end side of the first arm 20.The inside of the first arm 25 is communicated with the inside of arm support 8 via opening portion 15e and opening portion 31g, thus the inside of the first arm 25 becomes atmospheric pressure.Be configured with motor 65 in the inside of the base end side of the first arm 25 and the inside of arm support 8, this motor 65 makes the second arm 26 rotate relative to the first arm 25, and hand 5 is rotated relative to the second arm 26.Motor 65 to configure in the same manner as the motor 35 of the inside of base end side and the inside of arm support 8 that are configured at the first arm 20.The output shaft of motor 65 is upwardly projecting, is fixed with belt wheel 66 at this output shaft.
Joint portion 27 has to be made the rotation of motor 65 slow down and is passed to the reductor 67 of the second arm 26.Reductor 67 is same with reductor 37 is the hollow reducer being formed with through hole at the center of its radial direction.Therefore, the inside of the second arm 26 is communicated with the inside of the first arm 25 via the through hole of hollow reducer, thus the inside of the second arm 26 becomes atmospheric pressure.That is, in the present embodiment, the inside of arm 7 becomes atmospheric pressure.Joint portion 28 has to be made the rotation of motor 65 slow down and is passed to the reductor 68 of hand 5.Reductor 68 is same with reductor 38 is the hollow reducer being formed with through hole at the center of its radial direction.
Further, joint portion 27 is same with joint portion 22 has the magnetic fluid seal 39 preventing air from flowing out to vacuum area VR from the coupling part of the first arm 25 and the second arm 26.Joint portion 28 is same with joint portion 23 has the magnetic fluid seal 43 preventing air from flowing out to vacuum area VR with the coupling part of hand 5 from the second arm 26.
The upper end of the rotating shaft 69 being formed as cylindric is fixed with in the lower end of the power shaft of reductor 67.Belt wheel 70 is fixed with in the lower end side of rotating shaft 69.Belt wheel 70 is configured in the inside of the end side of the first arm 25.Driving-belt 71 is set up at belt wheel 66 and belt wheel 70.Further, belt wheel 72 is fixed with in the upper end side of the power shaft of reductor 67.Belt wheel 72 is configured in the inside of the base end side of the second arm 26.
The end side of the first arm 25 is fixed with at the output shaft of reductor 67.Specifically, at the output shaft of reductor 67, be fixed with the end side of the first arm 25 across the inner circumferential side parts 41 of magnetic fluid seal 39 and distance member 73.Distance member 73 is formed as roughly cylindric.This distance member 73 configures in the mode of the outer circumferential side covering rotating shaft 69.
The output shaft of reductor 67 is fixed on the inner circumferential side of inner circumferential side parts 41.These inner circumferential side parts 41 are fixed on the upper end of distance member 73 as follows: a part for its outer peripheral face contacts with the inner peripheral surface of distance member 73, and its part contacts with the upper surface of distance member 73.The end side of the first arm 25 is fixed in the lower end of distance member 73 in the mode contacted with the upper surface of upper surface part 31a.Bearing cage part 74 is fixed with in the lower end side of distance member 73.Bearing cage part 74 is fixed on the lower end side of distance member 73 in such a way: a part for its outer peripheral face contacts with the inner peripheral surface of distance member 73 and its part contacts with the lower surface of distance member 73.Further, a part for bearing cage part 74 is configured at the inner circumferential side of opening portion 31e.The bearing 75 supported by rotating shaft 69 as rotating is fixed with at bearing cage part 74.In addition, the seal member (omit and illustrate) of the ring-type preventing air from flowing out to vacuum area VR is configured with between inner circumferential side parts 41 and the upper end of distance member 73 and between the lower end of upper surface part 31a and distance member 73.
The base end side of the second arm 26 is fixed with at the housing of reductor 67.The base end side of the second arm 26 is same with the housing that the base end side of the second arm 21 is fixed on reductor 37, is fixed on the housing of reductor 67.That is, at the housing of reductor 67, the base end side of the second arm 26 is fixed with across the housing 40 of magnetic fluid seal 39.
Belt wheel 76 is fixed with in the upper end side of the power shaft of reductor 68.Belt wheel 76 is configured at the inside of the end side of the second arm 26.Driving-belt 77 is set up at belt wheel 72 and belt wheel 76.The base portion 11 of hand 5 is fixed with at the output shaft of reductor 68.The base portion 11 of hand 5 is same with the output shaft that the base portion 11 of hand 4 is fixed on reductor 38, is fixed on the output shaft of reductor 68.That is, at the output shaft of reductor 68, the base portion 11 of hand 5 is fixed with across the inner circumferential side parts 45 of magnetic fluid seal 43.
The end side of the second arm 26 is fixed with at the housing of reductor 68.Specifically, at the housing of reductor 68, be fixed with the end side of the second arm 26 across the housing 44 of magnetic fluid seal 43.The housing of reductor 68 is fixed on the inner circumferential side of housing 44.Housing 44 is fixed on the end side of the second arm 26 in such a way: a part for its outer peripheral face contacts with the inner peripheral surface of opening portion 34g and its part contacts with the lower surface of lower surface portion 34b.In addition, between lower surface portion 34b and housing 44, be configured with the seal member (omit and illustrate) of the ring-type preventing air from flowing out to vacuum area VR.
The opening portion 31f tegmentum parts 33 of the first arm 25 are closed from downside.Opening portion 34e, 34f tegmentum parts 33 of the second arm 26 are closed from upside.The opening portion 31d of the first arm 25 and the opening portion 34d tegmentum parts 32 of the second arm 26 are closed from upside.Cover 32 is fixed in the mode facing to downside being formed with fin 32a.That is, be formed with fin 32a at the lower surface of cover 32, be formed with the fin 32a of heat transmission at the upper surface of the inside of arm 7.
(structure of the structure of cooling body, the structure of temperature sensor and cover member)
As mentioned above, the substrate 2 of high temperature is carried by robot 1.Therefore, arm 6,7 temperature because of from substrate 2 radiant heat or from arrange robot 1 vacuum chamber wall radiant heat etc. and rise.The robot 1 of present embodiment has the inner colded cooling body of the arm 6,7 for temperature being risen.Further, robot 1 has: temperature sensor 80, and it is for detecting the internal temperature of the first arm 20,25 and second arm 21,26; And cover member 81 ~ 85, it transmits to arm 6,7 and arm support 8 for suppressing radiant heat.
The robot 1 of present embodiment has if lower component is as the inner colded cooling body by arm 6,7: air line 87, and it is for cool motor 35 and to the inside supply tempering air of the first arm 20; Air line 88, it is for the inside supply tempering air to the second arm 21; Air line 89, its for motor 65 is cooled and to the first arm 25 inside supply tempering air; Air line 90, it is for the inside supply tempering air to the second arm 26; And multiple fan (pressure fan) 91, it is configured at the inside of arm 6,7.
Air line 87 ~ 90 is the metal tubes such as formed by the metal such as aluminium alloy or copper alloy.Or also can be the pipe arrangement formed by fluorine pipe etc.The cardinal extremity of air line 87 ~ 90 is connected to the magnetic valve (omitting diagram) of the inside of the housing 13 being configured in main part 9.In the present embodiment, four magnetic valves connecting the respective cardinal extremity of air line 87 ~ 90 are configured at the inside of housing 13, can carry out the adjustment of the quantity delivered of tempering air according to each air line in air line 87 ~ 90.Four magnetic valves are connected to the compressed-air actuated feedway (omitting diagram) of inside or the outside being configured in housing 13 via the pipe arrangement of regulation.
Air line 87,88 is with by the inner circumferential side of rotating shaft 14 and the mode of opening portion 15f, winding to arm 6 from the inside of housing 13.The end side of air line 87 is wound in the outer peripheral face of motor 35.The end becoming the air line 87 of the supply port of tempering air is configured at the inside of the base end side of the first arm 20, from air line 87 to the inside supply tempering air of the base end side of the first arm 20.Air line 88 is with by opening portion 15e, 31g and the mode of through hole at axle center being formed at reductor 37, winding in the inside of the first arm 20 and the second arm 21.The end becoming the air line 88 of the supply port of tempering air is configured at the inside of the end side of the second arm 21, from air line 88 to the inside supply tempering air of the end side of the second arm 21.
Air line 89,90 is with by the inner circumferential side of rotating shaft 14 and the mode of opening portion 15f, winding to arm 7 from the inside of housing 13.The end side of air line 89 is wound in the outer peripheral face of motor 65.The end becoming the air line 89 of the supply port of tempering air is configured at the inside of the base end side of the first arm 25, from air line 89 to the inside supply tempering air of the base end side of the first arm 25.Air line 90 is with by the inner circumferential side of opening portion 15e, 31g, rotating shaft 69 and the mode of through hole at axle center being formed at reductor 67, winding in the inside of the first arm 25 and the second arm 26.The end becoming the air line 90 of the supply port of tempering air is configured at the inside of the end side of the second arm 26, from air line 90 to the inside supply tempering air of the end side of the second arm 26.
Temperature sensor 80 is configured at the first arm 20,25 and second arm 21,26 respective inside.In the present embodiment, multiple temperature sensors 80 that detected temperatures is different are configured at the first arm 20,25 and second arm 21,26 respective inside in groups.Specifically, three temperature sensors 80 that detected temperatures is different are configured at the first arm 20,25 and second arm 21,26 respective inside in groups.
In the inside of the first arm 20, near the vicinity that one group of temperature sensor 80 is configured at motor 35 and joint portion 22.That is, in the inside of the first arm 20, one group of temperature sensor 80 is configured at base end side and the end side of the first arm 20.The temperature sensor 80 being configured in the vicinity of motor 35 is installed on the upper end side of motor 35.The temperature sensor 80 being configured at the vicinity of joint portion 22 is installed on the upper surface of lower surface portion 31b.In the inside of the second arm 21, one group of temperature sensor 80 is configured near joint portion 23.That is, in the inside of the second arm 21, one group of temperature sensor 80 is configured at the end side of the second arm 21.This temperature sensor 80 is installed on the upper surface of lower surface portion 34b.
In the inside of the first arm 25, near the vicinity that one group of temperature sensor 80 is configured at motor 65 and joint portion 27.That is, in the inside of the first arm 25, one group of temperature sensor 80 is configured at base end side and the end side of the first arm 25.The temperature sensor 80 being configured at the vicinity of motor 65 is installed on the upper end side of motor 65.The temperature sensor 80 being configured at the vicinity of joint portion 27 is installed on the upper surface of lower surface portion 31b.In the inside of the second arm 26, one group of temperature sensor 80 is configured near joint portion 28.That is, in the inside of the second arm 26, one group of temperature sensor 80 is configured in the end side of the second arm 26.This temperature sensor 80 is installed on the upper surface of lower surface portion 34b.
As mentioned above, in the present embodiment, the adjustment of the quantity delivered of tempering air can be carried out according to each air line in air line 87 ~ 90, thus the first arm 20,25 and second arm 21,26 respective inside individually can be cooled.Further, in the present embodiment, according to the testing result of temperature sensor 80 gained, the first arm 20,25 and second arm 21,26 respective inside are individually cooled.That is, in the present embodiment, according to the testing result of temperature sensor 80 gained, adjust the quantity delivered from the respective tempering air of supply of air line 87 ~ 90, thus, the first arm 20,25 and second arm 21,26 respective inside are individually cooled.
Specifically, according to be configured at the first arm 20 inside temperature sensor 80 and be configured at the testing result of temperature sensor 80 gained of inside of the second arm 21, roughly the same mode is become with the temperature of the inside of the second arm 21 with the temperature of the inside of the first arm 20, adjust the quantity delivered from the respective tempering air of supply of air line 87,88, and the first arm 20 and the respective inside of the second arm 21 are individually cooled.And, according to be configured at the first arm 25 inside temperature sensor 80 and be configured at the testing result of temperature sensor 80 gained of inside of the second arm 26, roughly the same mode is become with the temperature of the inside of the second arm 26 with the temperature of the inside of the first arm 25, adjust the quantity delivered from the respective tempering air of supply of air line 89,90, and the first arm 25 and the respective inside of the second arm 26 are individually cooled.
In addition, in the present embodiment, the quantity delivered of the tempering air supplied separately from air line 87 ~ 90 by adjustment, and the first arm 20,25 and second arm 21,26 respective inside are individually cooled, but also can be stopped by the supply carried out from the respective tempering air of air line 87 ~ 90, and the first arm 20,25 and second arm 21,26 respective inside are individually cooled.
Fan 91 is configured at the first arm 20,25 and second arm 21,26 respective inside.In the present embodiment, two fans 91 are configured at the first arm 20,25 and second arm 21,26 respective inside with the state at the interval separating regulation.Further, fan 91 is to configure to the mode of upside conveying tempering air.In the present embodiment, fan 91 with to directly over carry the mode of tempering air to configure.Specifically, fan 91 is configured in the downside of cover 32, configures to carry the mode of tempering air to the multiple fin 32a being formed at cover 32.Further, fan 91 such as rotates according to the testing result of temperature sensor 80 gained or stops.In addition, fan 91 also can to carry the mode of tempering air to configure on the upside of tiltedly.
Cover member 81 ~ 85 by thermal conductivity ratio support main body 15, arm body 31,34 and cover 16,32,33 low materials are formed.Further, cover member 81 ~ 85 is formed by the material that photothermal reflectivity is higher.Such as, cover member 81 ~ 85 is formed by thinner corrosion resistant plate.
Cover member 81 covers the roughly whole upper surface of the part except the part overlapping with arm support 8 of the first arm 20, lower surface and side.Cover member 82 covers the roughly whole upper surface of the second arm 21, lower surface and side.Cover member 83 covers the roughly whole upper surface of the part except the part overlapping with arm support 8 of the first arm 25, lower surface and side.Cover member 84 covers the roughly whole upper surface of the second arm 26, lower surface and side.Cover member 85 covers the upper surface of the part overlapping with arm support 8 of the first arm 20,25 and roughly whole arm support 8, lower surface and side.So, roughly whole arm 6,7 and arm support 8 is covered by cover member 81 ~ 85.
(main efficacy results of present embodiment)
The explanation done as above, in the present embodiment, is configured with temperature sensor 80 in the first arm 20,25 and second arm 21,26 respective inside.And, in the present embodiment, can by carrying out the adjustment of the quantity delivered of tempering air according to each air line in air line 87 ~ 90, and the first arm 20,25 and second arm 21,26 respective inside are individually cooled, according to the testing result of temperature sensor 80 gained, the first arm 20,25 and second arm 21,26 respective inside are individually cooled.
Therefore, in the present embodiment, can according to the testing result of temperature sensor 80 gained, manage the first arm 20,25 and second arm 21,26 respective temperature.Therefore, in the present embodiment, even if cause joint portion 23,28 to produce position skew because of the thermal expansion of arm 6,7, the direction that the position of joint portion 23,28 also can be made to offset is the direction of rule.Consequently, in the present embodiment, even if arm 6 is made up of the first arm 20 and the second arm 21, the change of the side-play amount of the track of the joint portion 23 when the track of the reality of the joint portion 23 when carrying the substrate 2 of high temperature and arm 6 also can be suppressed not to produce thermal expansion.Therefore, in the present embodiment, hand 4 action rightly can be made.And, in the present embodiment, even if arm 7 is made up of the first arm 25 and the second arm 26, the change of the side-play amount of the track of the joint portion 28 when the track of the reality of the joint portion 28 when carrying the substrate 2 of high temperature and arm 7 also can be suppressed not to produce thermal expansion, consequently, hand 5 action rightly can be made.
Especially in the present embodiment, according to be configured at the first arm 20 inside temperature sensor 80 and be configured at the testing result of temperature sensor 80 gained of inside of the second arm 21, roughly the same mode is become with the temperature of the inside of the second arm 21 with the temperature of the inside of the first arm 20, first arm 20 and the respective inside of the second arm 21 are individually cooled, therefore, the swell increment of the per unit length of the first arm 20 is roughly the same with the swell increment of the per unit length of the second arm 21.Therefore, in the present embodiment, the direction of position skew when joint portion 23 can be made to produce position skew is more regular direction, thus the change of the side-play amount of the track of joint portion 23 when can effectively suppress the track of the reality of the joint portion 23 when carrying the substrate 2 of high temperature and arm 6 not to produce thermal expansion.Consequently, in the present embodiment, hand 4 action more rightly can be made.
Equally, in the present embodiment, according to be configured at the first arm 25 inside temperature sensor 80 and be configured at the testing result of temperature sensor 80 gained of inside of the second arm 26, roughly the same mode is become with the temperature of the inside of the second arm 26 with the temperature of the inside of the first arm 25, first arm 25 and the respective inside of the second arm 26 are individually cooled, therefore, the swell increment of the per unit length of the first arm 25 is roughly the same with the swell increment of the per unit length of the second arm 26.Therefore, in the present embodiment, the direction of position skew when joint portion 28 can be made to produce position skew is more regular direction, thus the change of the side-play amount of the track of joint portion 28 when can effectively suppress the track of the reality of the joint portion 28 when carrying the substrate 2 of high temperature and arm 7 not to produce thermal expansion.Consequently, in the present embodiment, hand 5 action more rightly can be made.
In the present embodiment, according to the testing result of temperature sensor 80 gained, adjust the quantity delivered from the respective tempering air of supply of air line 87 ~ 90, thus the first arm 20,25 and second arm 21,26 respective inside are individually cooled.Therefore, in the present embodiment, can with fairly simple structure management first arm 20,25 and second arm 21,26 respective temperature.
In the present embodiment, near joint portion 22,23,27,28, temperature sensor 80 is configured with.Therefore, in the present embodiment, according to the testing result of temperature sensor 80 gained, the temperature of the bearing of the reductor 37,38,67,68 of the part forming joint portion 22,23,27,28 can be inferred.Therefore, in the present embodiment, according to the temperature inferred, the life-span of the bearing of reductor 37,38,67,68 can be inferred rightly, consequently, this bearing can be changed in appropriate period.Further, in the present embodiment, owing to being configured with temperature sensor 80 near motor 35,65, therefore, it is possible to according to the testing result of temperature sensor 80 gained, detecting the exception of motor 35,65, consequently, the damage of motor 35,65 can be prevented.
In the present embodiment, different for detected temperatures three temperature sensors 80 are configured in groups the first arm 20,25 and second arm 21,26 respective inside.Therefore, in the present embodiment, the accuracy of detection of the internal temperature of the first arm 20,25 and second arm 21,26 can be improved.Therefore, in the present embodiment, the first arm 20,25 and second arm 21,26 respective temperature can be managed accurately.
Further, in the present embodiment, the fan 91 to upside conveying air is configured with in the inside of arm 6,7.Therefore, in the present embodiment, when carrying the substrate 2 of high temperature, can the temperature of the upper surface side part of arm 6,7 be suppressed to rise the cooling of the upper surface side part of arm 6,7, thus the temperature of the upper surface side part of arm 6,7 can be made close to the temperature of the lower face side part of arm 6,7.Therefore, in the present embodiment, the heat distortion amount of heat distortion amount close to lower face side part of the upper surface side part of arm 6,7 can be made, and the thermal deformation of the arm 6,7 that end side can be suppressed to decline.Consequently, in the present embodiment, even if when carrying substrate 2 of high temperature, also can hand 4,5 carrying substrate 2 be rightly passed through.Further, in the present embodiment, fan 91 can be used the internal cooling of arm 6,7, therefore, it is possible to suppress the heat distortion amount of arm 6,7.
In the present embodiment, fan 91 is configured at the first arm 20,25 and second arm 21,26 respective inside.Therefore, in the present embodiment, even if arm 6,7 is made up of first these two arms of arm 20,25 and second arm 21,26, also can becomes roughly uniform mode with the temperature of the whole upper surface side part of arm 6,7, the upper surface side part of arm 6,7 is cooled.Especially in the present embodiment, due to two fans 91 are configured at the first arm 20,25 and second arm 21,26 respective inside with the state at the interval separating regulation, therefore, it is possible to become with the temperature of the whole upper surface side part of arm 6,7 evenly mode the upper surface side part of arm 6,7 is cooled.
In the present embodiment, be formed with the fin 32a of heat transmission at the upper surface of the inside of arm 6,7, fan 91 carries tempering air to fin 32a.Therefore, in the present embodiment, effectively the upper surface side part of arm 6,7 can be cooled, thus can effectively suppress the temperature of the upper surface side part of arm 6,7 to rise.
In the present embodiment, fin 32a is formed at the lower surface of the cover 32 of the opening portion 34d of opening portion 31d and the second arm 21,26 closing the first arm 20,25 from upside.Therefore, in the present embodiment, even if when the upper surface of inside of the arm 6,7 being formed as hollow form is formed with fin 32a, also can easily form fin 32a.
In the present embodiment, the cover member 81 ~ 85 formed by thermal conductivity ratio arm 6,7 and the low material of arm support 8 is utilized to cover roughly whole arm 6,7 and arm support 8.Therefore, in the present embodiment, can effectively suppress from substrate 2 radiant heat or confess that the radiant heat of wall of vacuum chamber of configuration of robotic 1 transmits to arm 6,7 and arm support 8.
(other embodiments)
Above-mentioned embodiment is an example of the preferred embodiment of the present invention, but is not limited to this, can implement various change in the scope not changing purport of the present invention.
In the above-described embodiment, the base end side of the first arm 20,25 of split ground formation is fixed on arm support 8.In addition, such as, the first arm 20, first arm 25 and arm support 8 also can form.Further, also as shown in Figure 10, the base end side of the base end side of the first arm 20 and the first arm 25 can be connected to main part 9 respectively rotatably.In this case, at the inside of the first arm 20 configuration motor 35, at the inside of the first arm 25 configuration motor 65.Further, in the above-described embodiment, robot 1 has two arms 6,7, but robot 1 also can only have one arm 6 as shown in figure 11.In this case, the base end side of the first arm 20 can be connected to main part 9 rotatably.In addition, at Figure 10, Tu11Zhong, identical symbol is marked to the structure common with the structure of above-mentioned embodiment.
In the above-described embodiment, based on the testing result of temperature sensor 80 gained, carry out the adjustment of the quantity delivered of tempering air according to each air line in air line 87 ~ 90, thus the first arm 20,25 and second arm 21,26 respective inside are individually cooled.In addition, such as, also can according to the testing result of temperature sensor 80 gained, make to be configured at the first arm 20,25 and second arm 21, the fan 91 of 26 respective inside individually rotates or stop, thus the first arm 20,25 and second arm 21,26 respective inside individually being cooled.
In the above-described embodiment, in such a way the first arm 20,25 and second arm 21,26 respective inside are individually cooled: the temperature of the inside of the first arm 20 becomes roughly the same with the temperature of the inside of the second arm 21, and the temperature of the inside of the first arm 25 becomes roughly the same with the temperature of the inside of the second arm 26.In addition, such as also can as follows the first arm 20,25 and second arm 21,26 respective inside individually be cooled: the temperature of the inside of the first arm 20 is different from the temperature of the inside of the second arm 21, and the temperature of the inside of the first arm 25 is different from the temperature of the inside of the second arm 26, and the temperature of the first arm 20,25 and second arm 21,26 respective inside becomes the temperature of regulation.
In the above-described embodiment, multiple temperature sensors 80 different for detected temperatures are configured near motor 35,65 and joint portion 22,23,27,28 in groups.In addition, such as also a temperature sensor 80 can be configured near motor 35,65 and joint portion 22,23,27,28.And, in the above-described embodiment, temperature sensor 80 is configured near motor 35,65 and joint portion 22,23,27,28, but also can at the optional position configuration temperature sensor 80 of the first arm 20,25 and second arm 21,26 respective inside.
In the above-described embodiment, arm 6,7 is made up of first these two arms of arm 20,25 and second arm 21,26, but arm 6,7 also can be made up of the arm of more than three.In this case, configure temperature sensor 80 respectively in the inside of all arms, configure the supply port of the air line of supply tempering air in the inside of all arms respectively.Further, in this case, such as fan 91 is configured respectively in the inside of all arms.Further, arm 6,7 also can be made up of an arm.
In the above-described embodiment, robot 1 makes the second arm 21 rotate relative to the first arm 20 by 1 motor 35, and hand 4 is rotated relative to the second arm 21.In addition, such as also individually can arrange and make the motor that the second arm 21 rotates relative to the first arm 20 and the motor that hand 4 is rotated relative to the second arm 21.Equally, in the above-described embodiment, by 1 motor 65, second arm 26 is rotated relative to the first arm 25, and hand 5 is rotated relative to the second arm 26, but also individually can arrange and make the motor that the second arm 26 rotates relative to the first arm 25 and the motor that hand 5 is rotated relative to the second arm 26.
In the above-described embodiment, at the first arm 20,25 and second arm 21,26 respective inside configuration fans 91, but also fan 91 can not be configured.Further, in the above-described embodiment, form fin 32a at cover 32, but also can not form fin 32a at cover 32.Further, in the above-described embodiment, the conveying object of being carried by robot 1 is the substrate 2 of organic el display, but the conveying object of being carried by robot 1 both can be the glass substrate of liquid crystal display, also can be semiconductor crystal wafer etc.
In the above-described embodiment, two fans 91 are configured in the first arm 20,25 and second arm 21,26 respective inside, but be configured in the first arm 20,25 and second arm 21, the quantity of fan 91 of 26 respective inside both can be one, also can be more than three.Further, in the above-described embodiment, at the first arm 20 and the respective inside configuration fan 91 of the second arm 21, but also can only at the inside of the inside of the first arm 20 or the second arm 21 configuration fan 91.Equally, also only fan 91 can be configured in the inside of the inside of the first arm 25 or the second arm 26.
In the above-described embodiment, fan 91 is testing result according to temperature sensor 80 gained and rotates or stop.In addition, such as both can have nothing to do with the testing result of temperature sensor 80 gained, and make when robot 1 drives fan 91 rotate continuously, also fan 91 can be rotated in the action moment of the regulation of robot 1.
In the above-described embodiment, fan 91 is configured in the downside of cover 32, carries tempering air to the multiple fin 32a being formed at cover 32.In addition, such as fan 91 also can be configured in the position of departing from from the downside of cover 32, and carries tempering air to the lower surface of upper surface part 31a, 34a.Further, in the above-described embodiment, form fin 32a at cover 32, but also can form fin 32a at the lower surface of upper surface part 31a, 34a.Further, in the above-described embodiment, form fin 32a at cover 32, but also can not form fin 32a at cover 32.
In the above-described embodiment, hand 4 is configured in the position than the second top side of arm 21, but hand 4 also can be configured in than the second arm 21 position on the lower.Further, in the above-described embodiment, hand 5 is configured in than the second arm 26 position on the lower, but hand 5 also can be configured in the position than the second top side of arm 26.
In the above-described embodiment, cover member 81 ~ 85 covers roughly whole arm 6,7 and arm support 8, but cover member 81 ~ 85 also only can cover the upper end side of arm 6,7 and arm support 8.Further, in the above-described embodiment, robot 1 has cover member 81 ~ 85, but robot 1 also can not have cover member 81 ~ 85.
Symbol description
1 robot (industrial robot);
2 substrates (glass substrate, conveying object);
4,5 hands;
6,7 arms;
20,25 first arms (arm);
21,26 second arms (arm);
22,23,27,28 joint portions;
31a, 34a upper surface part;
31d, 34d opening portion;
32 covers;
32a fin;
35,65 motors;
80 temperature sensors;
81 ~ 85 cover members;
87 ~ 90 air line (part for cooling body);
91 fans (part for cooling body).

Claims (18)

1. an industrial robot, is characterized in that, it has:
Hand, it loads conveying object;
Arm, it is formed as hollow form and connects described hand at end side; And
Cooling body, it is for the internal cooling by described arm,
Described hand and described arm configure in a vacuum,
Described arm has and is formed as hollow form and multiple arms that can connect with the relative rotation each other,
The inside of multiple described arm becomes atmospheric pressure,
The temperature sensor of the temperature of the inside for detecting described arm is configured with in multiple described arm inside separately,
Multiple described arm inside separately can individually cool by described cooling body, according to the testing result of described temperature sensor gained, is individually cooled multiple described arm inside separately.
2. industrial robot according to claim 1, is characterized in that,
Described cooling body has the supply port of the tempering air being configured in multiple described arm inside separately, according to the testing result of described temperature sensor gained, adjust the quantity delivered from the tempering air of described supply port, thus multiple described arm inside separately is individually cooled.
3. industrial robot according to claim 2, is characterized in that,
Multiple described arm main part supported as rotating is configured in an atmosphere and its inside becomes atmospheric pressure, the inside being formed as the multiple described arm of hollow form is separately communicated with the inside of described main part via the opening portion being arranged at multiple described arm, remain atmospheric pressure thus
Described cooling body has the winding air line to multiple described arm inside separately from the inside of described main part, supplies described tempering air via described air line to multiple described arm inside separately.
4. industrial robot according to claim 3, is characterized in that,
Multiple described arm has: the first arm, and it can be connected to described main part side rotatably; And second arm, it can be connected to the end side of described first arm rotatably, and connects described hand at end side,
Via the joint portion being arranged at described first arm respectively and being connected with the described opening portion of described second arm, the center of being arranged on is formed with the hollow reducer of through hole, via described through hole, the inside of described second arm is communicated with the inside of described first arm, and described air line from the inside of described first arm by the winding inside to described second arm
The sealing preventing air from flowing out to vacuum area from the coupling part of described first arm and described second arm is provided with at described joint portion.
5. industrial robot according to any one of claim 1 to 4, is characterized in that,
Described cooling body, according to the testing result of described temperature sensor gained, becomes roughly the same mode with the internal temperature of multiple described arm, is individually cooled multiple described arm inside separately.
6. industrial robot according to any one of claim 1 to 4, is characterized in that,
Described temperature sensor is configured in the vicinity of the joint portion that described arm is connected with each other and makes near described arm and described palmistry joint portion even.
7. industrial robot according to any one of claim 1 to 4, is characterized in that,
Described industrial robot has at least any one motor rotated made in multiple described arm and described hand,
Described temperature sensor is configured near described motor.
8. industrial robot according to any one of claim 1 to 4, is characterized in that,
In multiple described arm inside separately, be configured with the multiple described temperature sensor that detected temperatures is different in groups.
9. an industrial robot, is characterized in that, it has:
Hand, it loads conveying object; And arm, it connects described hand at end side,
Described hand and described arm configure in a vacuum,
Described arm is formed as hollow form, and the inside of described arm becomes atmospheric pressure,
Be configured with in the inside of described arm towards the fan of upside conveying air.
10. industrial robot according to claim 9, is characterized in that,
The fin of heat transmission is formed at the upper surface of the inside of described arm.
11. industrial robots according to claim 10, is characterized in that,
Described arm has the flat upper surface part of a part for the upper surface forming described arm,
Opening portion through is in the vertical direction formed in described upper surface part,
Described arm also has and is fixed on described upper surface part and the cover closing described opening portion from upside,
Described fin is formed at the lower surface of described cover.
12. industrial robots according to claim 11, is characterized in that,
Described cover is formed as discoideus,
At described cover, in being formed with the different circular multiple described fin of diameter with heart shaped.
13. industrial robots according to any one of claim 9 to 12, is characterized in that,
Described arm has multiple arms that can connect with the relative rotation each other,
Described fan is configured with respectively in the inside of multiple described arm.
14. industrial robots according to any one of claim 9 to 12, is characterized in that,
Described industrial robot has the cover member of the roughly whole described arm of covering,
The thermal conductivity of described cover member is lower than the thermal conductivity of described arm.
15. industrial robots according to any one of claim 9 to 12, is characterized in that,
Multiple described arm main part supported as rotating is configured in an atmosphere and its inside becomes atmospheric pressure, the inside being formed as the multiple described arm of hollow form is separately communicated with the inside of described main part via the open communication portion being arranged at multiple described arm, remains atmospheric pressure thus.
16. industrial robots according to claim 15, is characterized in that,
Described industrial robot has for the inner colded cooling body by described arm, described cooling body has the winding air line to multiple described arm inside separately from the inside of described main part, and described air line is configured in multiple described arm, supply described tempering air to multiple described arm inside separately.
17. industrial robots according to claim 16, is characterized in that,
Multiple described arm has: the first arm, and it can be connected to described main part side rotatably; And second arm, it can be connected to the end side of described first arm rotatably and connect described hand at end side,
Via the joint portion being arranged at described first arm respectively and being connected with the described opening portion of described second arm, the center of being arranged on is formed with the hollow reducer of through hole, via described through hole, the inside of described second arm is communicated with the inside of described first arm, and described air line from the inside of described first arm by the winding inside to described second arm
The sealing preventing air from flowing out to vacuum area from the coupling part of described first arm and described second arm is provided with at described joint portion.
18. industrial robots according to claim 17, is characterized in that,
In multiple described arm inside separately, be configured with the temperature sensor of the temperature of the inside for detecting described arm,
Described cooling body, according to the testing result of described temperature sensor gained, individually cooled multiple described arm inside separately, and described fan rotates according to the testing result of described temperature sensor gained or stops.
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