KR20160054464A - Industrial robot - Google Patents

Abstract

Provided is an industrial robot capable of appropriately operating a hand when conveying a high temperature conveying object in vacuum even if the arm is constituted by a plurality of arm portions which are rotatably connected to each other. This industrial robot has a cooling mechanism for cooling the inside of the arm 6 formed in a hollow shape, and the hand 4 and the arm 6 are disposed in vacuum. The arm 6 is provided with arm portions 20 and 21 which are rotatably connected to each other. The inside of the arm portions 20 and 21 is atmospheric pressure. Inside each of the arm portions 20 and 21, a temperature sensor 80 for measuring the internal temperature of the arm portions 20 and 21 is disposed. The cooling mechanism is capable of individually cooling the interior of each of the arm portions 20 and 21 so that the inside of each of the arm portions 20 and 21 can be individually cooled based on the detection result of the temperature sensor 80 Cool.

Description

INDUSTRIAL ROBOT

The present invention relates to an industrial robot that carries a carrying object in vacuum.

BACKGROUND ART [0002] Conventionally, an industrial robot installed in a vacuum chamber for transporting a glass substrate or the like in vacuum is known (see, for example, Patent Document 1). The industrial robot disclosed in Patent Document 1 has a hand on which a glass substrate or the like is mounted, an arm rotatably connected to the tip of the hand, and a body portion to which the proximal end side of the arm is rotatably connected. The arm is constituted by a first arm portion and a second arm portion which are rotatably connected to each other. The main body has a motor housing chamber to which the proximal end side of the arm is rotatably connected, and a base rotatably supporting the motor housing chamber. Inside the motor housing chamber, a motor for rotating the hand, the second arm portion, and the first arm portion is disposed.

Further, in the industrial robot disclosed in Patent Document 1, the hand is connected to the distal end side of the second arm portion. The proximal end side of the second arm portion is connected to the distal end side of the first arm portion and the proximal end side of the first arm portion is rotatably connected to the motor housing chamber. The hand, the second arm portion, the first arm portion, the motor housing chamber, and the base are arranged in this order from the upper side in the vertical direction. The second arm portion, the first arm portion, and the motor housing chamber are arranged in vacuum. The motor housing chamber is formed in a hollow shape. In the motor housing chamber, airtightness is ensured, and the interior of the motor housing chamber is atmospheric pressure.

Japanese Patent Laid-Open No. 2008-6535

In recent years, there is a demand for an industrial robot capable of transporting objects to be transported, such as glass substrates, in a vacuum state in a high temperature state. In the case of transporting a high-temperature conveyance object in vacuum using the industrial robot described in Patent Document 1, since the temperature of the first arm portion and the second arm portion is increased and the arm thermally expands, The actual trajectory of the connecting portion of the hand and the trajectory of the connecting portion when the arm is not thermally expanded occur.

In the industrial robot disclosed in Patent Document 1, the hand on which the carrying object is mounted is connected to the distal end side of the second arm portion, the proximal end side of the second arm portion is connected to the first arm portion, And the first arm portion is disposed below the second arm portion. Therefore, when the object to be conveyed is conveyed by the industrial robot, the temperature of the first arm portion and the temperature of the second arm portion may fluctuate, which may cause the connecting portion of the arm and the hand to deviate from each other in the irregular direction. Therefore, when the high-temperature carrying object is transported by the industrial robot, the displacement of the actual locus of the connecting portion between the arm and the hand and the locus of the connecting portion when the arm is not thermally expanded becomes large, There is a possibility that it can not be operated.

In the case of transporting a high-temperature conveying object in vacuum using the industrial robot described in Patent Document 1, the temperature of the arm due to the influence of radiant heat from the object to be conveyed, radiant heat from the wall surface of the vacuum chamber in which the industrial robot is disposed, . In the industrial robot disclosed in Patent Document 1, the hand on which the object to be transported is mounted is disposed above the first arm portion and the second arm portion. Therefore, when the high-temperature transport object is transported using the industrial robot, The temperature of the upper surface side portion of the arm portion and the second arm portion becomes higher than the temperature of the lower side portion of the first arm portion and the second arm portion. That is, the temperature of the upper surface side portion of the arm becomes higher than the temperature of the lower surface side portion of the arm.

In some industrial robots, a hand may be arranged on the upper side of the first arm portion and on the lower side of the second arm portion. In this industrial robot, a hand on which a carrying object is mounted is disposed on the upper side of the first arm portion. Therefore, when the high-temperature carrying object is transferred using the industrial robot, the temperature of the upper- Becomes higher than the temperature of the lower surface side portion. In this industrial robot, the hand is disposed below the second arm portion, and the object to be carried on the hand is also disposed below the second arm portion. However, according to the study of the inventors of the present application, , The temperature of the upper surface side portion of the second arm portion becomes higher than the temperature of the lower surface side portion of the second arm portion, even when the object to be transported at a high temperature is transported. That is, in this industrial robot, the temperature of the upper surface side portion of the arm becomes higher than the temperature of the lower surface side portion of the arm. The phenomenon that the temperature of the upper surface side portion of the second arm portion becomes higher than the temperature of the lower side portion of the second arm portion is presumed to be caused by the influence of radiant heat from the wall surface of the vacuum chamber.

When the temperature of the upper surface side portion of the arm becomes higher than the temperature of the lower surface side portion of the arm, the amount of thermal deformation of the upper surface side portion of the arm becomes larger than the thermal deformation amount of the lower surface side portion. As a result, there is a fear that the arm is thermally deformed with the leading end side of the arm being lowered, so that the carrying object can not be properly transported by the hand.

SUMMARY OF THE INVENTION Accordingly, an object of the present invention is to provide an industrial robot that transports objects to be carried in vacuum, even when a high-temperature object to be transported is transported by a hand.

According to an aspect of the present invention, there is provided an industrial robot including a hand on which a carrying object is mounted, an arm formed in a hollow shape and connected to a distal end side of the hand, and a cooling mechanism for cooling the interior of the arm Wherein the arms and the arms are arranged in a vacuum, and the arms are formed in a hollow shape and have a plurality of arms which are connected to each other so as to be pivotally rotatable relative to each other, wherein the inside of the plurality of arms is atmospheric pressure, A temperature sensor for measuring the internal temperature of the arm portion is disposed, and the cooling mechanism is capable of individually cooling the inside of each of the plurality of arm portions, and based on the detection result of the temperature sensor, And the inside is cooled individually.

In the industrial robot of the present invention, the inside of the plurality of hollow arms is at atmospheric pressure, and a temperature sensor for measuring the internal temperature of the arm is disposed in each of the plurality of arms. Further, in the present invention, the cooling mechanism is capable of individually cooling the inside of each of the plurality of arm portions, and the inside of each of the plurality of arm portions is individually cooled based on the detection result by the temperature sensor. Therefore, according to the present invention, it is possible to manage the temperature of each of the plurality of arm portions based on the detection result of the temperature sensor. Therefore, in the present invention, even if a positional deviation occurs in the connection portion between the arm and the hand due to the thermal expansion of the arm, the direction of the displacement of the connection portion can be made to be a regular direction. As a result, in the present invention, even if the arm is constituted by a plurality of arm portions, the actual locus of the connecting portion of the arm and the hand when the high-temperature carrying object is carried and the actual locus of the connecting portion It is possible to suppress a change in the amount of deviation from the locus of the vehicle. Therefore, in the present invention, it is possible to properly operate the hand.

In the present invention, it is preferable that the cooling mechanism individually cool the inside of each of the plurality of arm portions so that the internal temperatures of the plurality of arm portions are substantially equal, based on the detection result of the temperature sensor. With this configuration, since the expansion amounts per unit length of the plurality of arm portions are substantially equal, it is possible to make the direction of the positional deviation when the positional deviation occurs at the connecting portion between the arm and the hand to be more regular. Therefore, it is possible to effectively suppress the change in the amount of displacement between the actual locus of the connecting portion of the arm and the hand when the high-temperature carrying object is carried and the locus of the connecting portion when the arm is not thermally expanded, It is possible to operate the resulting hand more appropriately.

In the present invention, the cooling mechanism includes, for example, a supply port for cooling air disposed inside each of the plurality of arm portions, and based on the detection result from the temperature sensor, By adjusting the supply amount, the inside of each of the plurality of arm portions is individually cooled. In this case, the temperature of each of the plurality of arm portions can be managed with a relatively simple configuration. In this case, the main body portion rotatably supporting the plurality of arm portions is disposed in the atmosphere, and the inside thereof is at atmospheric pressure, and the inside of the plurality of arm portions, each of which is formed in a hollow shape, passes through the openings provided in the plurality of arm portions And the cooling mechanism is provided with an air piping extending from the inside of the main body to the inside of each of the plurality of arm portions, and the air piping is connected to the inside of each of the plurality of arm portions through the air piping So that the cooling air can be supplied. Specifically, the plurality of arms have a first arm portion rotatably connected to the body portion side, a second arm portion rotatably connected to the distal end side of the first arm portion and a hand connected to the distal end side, A hollow gear reducer having a through hole formed at its center is provided at a joint portion connected to the first arm portion and the second arm portion through the opening portion. The inside of the second arm portion through the through hole is connected to the inside of the first arm portion The air piping is arranged in the first arm portion to the inside of the second arm portion together with the communication port and the seal portion for preventing air outflow from the connection portion between the first arm portion and the second arm portion to the vacuum region is installed in the joint portion Can be configured.

In the present invention, it is preferable that the temperature sensor is disposed in the vicinity of the joint portion connecting the arm portions and in the vicinity of the joint portion connecting the arm and the hand. According to this configuration, it is possible to estimate the temperature of the bearing disposed in the joint part based on the detection result of the temperature sensor. Therefore, it is possible to appropriately estimate the service life of the bearing disposed at the joint portion based on the estimated temperature, and as a result, it becomes possible to replace the bearing at an appropriate time.

In the present invention, the industrial robot preferably includes a motor for rotating at least one of the plurality of arms and the hand, and the temperature sensor is preferably disposed in the vicinity of the motor. With this configuration, it is possible to detect an abnormality of the motor based on the detection result of the temperature sensor, and as a result, damage to the motor can be prevented.

In the present invention, it is preferable that a plurality of temperature sensors having different detection temperatures are arranged in a set in each of the plurality of arm portions. With this configuration, it is possible to increase the detection accuracy of the internal temperature of the arm portion. Therefore, it is possible to control the temperature of each of the plurality of arm portions with high accuracy.

In order to solve the problems described above, the industrial robot of the present invention has a hand on which a carrying object is mounted and an arm to which a hand is connected to the tip end, the hand and the arm are arranged in vacuum, The inside of the arm is at atmospheric pressure, and the fan is arranged inside the arm to send air toward the upper side.

In the industrial robot of the present invention, a fan for directing the air toward the upper side is disposed inside the arm. Therefore, according to the present invention, when conveying a high temperature conveyance object, it is possible to cool the upper surface side portion of the arm to suppress the temperature rise of the upper surface side portion of the arm, and the temperature of the arm- The temperature of the side portion can be brought close to the temperature of the side portion. Therefore, in the present invention, it is possible to bring the amount of thermal deformation of the upper surface side portion of the arm closer to the amount of thermal deformation of the lower surface side portion, and to suppress the thermal deformation of the arm whose tip side is lowered. As a result, in the present invention, even when a high-temperature conveying object is conveyed, the conveying object can be conveyed appropriately by the hand. Further, in the present invention, since the inside of the arm can be cooled by using a fan, it is possible to suppress the thermal deformation amount of the arm.

In the present invention, it is preferable that the arm has a plurality of arms which are rotatably connected to each other, and a fan is disposed in each of the plurality of arm portions. With this configuration, even when the arm is constituted by a plurality of arm portions, it is possible to cool the upper surface side portion of the arm so that the total temperature of the upper surface side portion of the arm becomes substantially equal.

In the present invention, the main body portion that rotatably supports the plurality of arm portions is disposed in the atmosphere, and the inside thereof is at atmospheric pressure. The inside of the plurality of hollow portions, each of which is formed in a hollow shape, And is also connected to the inside of the part so that it can be maintained at atmospheric pressure. And a cooling mechanism for cooling the inside of the arm, wherein the cooling mechanism includes an air piping extending from the inside of the main body into each of the plurality of arm portions, and the air piping is disposed in the plurality of arms And cooling air is supplied to the inside of each of the plurality of arm portions, it is possible to reliably cool the inside of the arm portions.

In the present invention, it is preferable that a heat dissipating fin is formed on the inner upper surface of the arm. With this configuration, the cooling air fed from the fan can be brought into contact with the heat-dissipating fin, so that it is possible to effectively cool the upper surface side portion of the arm. Therefore, it is possible to effectively suppress the temperature rise of the upper surface side portion of the arm.

In the present invention, the arm is provided with a flat plate-like upper surface portion constituting a part of the upper surface of the arm, and an opening portion penetrating in the vertical direction is formed in the upper surface portion, and the arm is also fixed to the upper surface portion, And the fins are preferably formed on the lower surface of the lid member. With this configuration, even when the pin is formed on the inner upper surface of the arm formed in a hollow shape, it is possible to easily form the fin.

In the present invention, for example, the lid member is formed in a disk shape, and a plurality of circular fins having different diameters are formed concentrically in the lid member.

In the present invention, it is preferable that the industrial robot has a cover member covering substantially the whole of the arm, and the thermal conductivity of the cover member is lower than the thermal conductivity of the arm. With this configuration, it is possible to effectively suppress the transfer of radiant heat from the object to be transferred and the radiant heat from the wall surface of the vacuum chamber in which the industrial robot is disposed to the arm.

When the fan for blowing air toward the upper side is not disposed inside the arm, the difference between the temperature on the upper surface side portion of the arm and the temperature on the lower surface side portion of the arm is eliminated and the heat of the upper surface side portion It is preferable to cover only the upper surface side of the arm with the cover member in order to solve the difference between the deformation amount and the heat deformation amount of the lower side portion. On the other hand, in this case, since the lower surface of the arm is not covered with the cover member, the transfer of radiant heat from the object to be conveyed to the arm can not be effectively suppressed. On the other hand, according to the present invention, since the fan for blowing air toward the upper side is disposed inside the arm, when the cover substantially covers the arm, the temperature of the upper side portion of the arm and the temperature It is possible to effectively suppress the transfer of the radiant heat from the object to be conveyed to the arm.

Industrial Applicability As described above, according to the present invention, in the industrial robot that carries the object to be transported in vacuum, it is possible to carry the object to be transported appropriately by the hand even in the case of transporting the object to be transported at a high temperature. Further, even when the arms to which the hand is connected to the tip end are constituted by a plurality of arm portions which are rotatably connected to each other, it is possible to properly operate the hands when carrying a high temperature conveying object.

1 is a plan view of an industrial robot according to an embodiment of the present invention.
Fig. 2 is a cross-sectional view of the arm-side portion and the arm-supporting portion of the arm shown in Fig.
3 is a cross-sectional view of the arm shown in Fig.
4 is a cross-sectional view of the arm shown in Fig.
5 is an enlarged view of part E of Fig.
Fig. 6 is an enlarged view of part F in Fig. 3;
Fig. 7A is a cross-sectional view of the lid member shown in Fig. 5, and Fig. 7B is a view showing the lid member from the GG direction of Fig.
8 is an enlarged view of a portion H in Fig.
9 is an enlarged view of a portion J in Fig.
10 is a plan view of an industrial robot according to another embodiment of the present invention.
11 is a view of an industrial robot according to another embodiment of the present invention, wherein (A) is a plan view and (B) is a side view.

Hereinafter, embodiments of the present invention will be described with reference to the drawings.

(Rough configuration of industrial robot)

1 is a plan view of an industrial robot 1 according to an embodiment of the present invention. Fig. 2 is a cross-sectional view of the base end side portion of the arms 6 and 7 and the arm supporting portion 8 shown in Fig. 3 is a sectional view of the arm 6 shown in Fig. 4 is a cross-sectional view of the arm 7 shown in Fig.

The industrial robot 1 (hereinafter referred to as " robot 1 ") of the present embodiment includes a glass substrate 2 for an organic EL (organic electro luminescence) (2) "). The robot 1 is embedded in a manufacturing system of an organic EL display (not shown), and transports the substrate 2 at a high temperature.

1, the robot 1 includes two hands 4, 5 on which a substrate 2 is mounted, an arm 6 rotatably connected to the tip side of the hand 4, An arm support portion 8 to which the proximal end side of the arms 6 and 7 is fixed and an arm support portion 8 to which the arm support portion 8 is rotatably connected, (9). The hands 4 and 5, the arms 6 and 7, and the arm support 8 are disposed on the upper side of the main body 9.

The upper ends of the hands 4 and 5, the arms 6 and 7, the arm supporter 8 and the main body 9 are disposed inside a vacuum chamber constituting the manufacturing system of the organic EL display. That is, the upper ends of the hands 4 and 5, the arms 6 and 7, the arm supporting portion 8 and the main body portion 9 are arranged in the vacuum region VR (in vacuum) 2), the robot 1 moves the substrate 2 mounted on the hands 4, 5 in a vacuum state (see Fig. 2) do.

The hands 4 and 5 are provided with a base 11 connected to the arms 6 and 7 and two forks 12 on which the substrate 2 is mounted. The fork portion 12 is formed in a linear shape. Further, the two fork portions 12 are arranged parallel to each other with a predetermined gap therebetween.

The main body portion 9 has a case 13 formed in a hollow shape and a hollow rotary shaft 14 fixed to the lower surface of the arm supporting portion 8 and communicating with the inside of the arm supporting portion 8 have. The rotary shaft 14 is formed into an elongated cylindrical shape having an up-and-down direction as an axial direction. The upper end of the rotary shaft 14 is fixed to the lower surface of the arm supporting portion 8. The upper end portion of the rotating shaft 14 protrudes upward from the upper end surface of the case body 13 and the portion of the rotating shaft 14 excluding the upper end portion is accommodated in the case body 13.

A motor (not shown) for rotating the arm supporting portion 8 with respect to the case body 13 is disposed inside the case body 13. The lower end side of the rotary shaft 14 is connected to the motor through, for example, a pulley, a belt, and a speed reducer. An elevating mechanism (not shown) for elevating the rotating shaft 14 or the like is disposed inside the housing 13. The upper end side portion of the case body 13 is disposed in the vacuum region VR and the portion of the case body 13 excluding the upper end side portion is disposed in the waiting region AR. A magnetic fluid seal and a bellows (not shown) for preventing the outflow of air to the vacuum region VR are disposed on the outer circumferential side of the rotating shaft 14 in the case body 13 and the rotating shaft 14 at atmospheric pressure .

The arm support portion 8 is formed in a hollow shape and includes a support body 15 and three lid members 16. The lid member 16 is formed of an aluminum alloy. The lid member 16 is formed in a disk shape. The support body 15 is made of an aluminum alloy. The support body 15 has an upper surface portion 15a constituting the upper surface of the support body 15 and a lower surface of the support body 15 and is arranged substantially parallel to the upper surface portion 15a, And a side surface portion 15c connecting the outer peripheral end portion of the upper surface portion 15a and the outer peripheral end portion of the lower surface portion 15b. The upper surface portion 15a and the lower surface portion 15b are formed into a thin, elongated flat plate shape, and are opposed to each other in the vertical direction. The side surface portion 15c is formed into a tubular shape having a generally elliptical shape that is elongated in shape when viewed from the top and bottom.

In the upper surface portion 15a, three circular openings 15d and 15e are formed so as to pass through in the vertical direction. One opening 15d of the three openings 15d and 15e is formed at the center of the upper face portion 15a and the other two openings 15e are formed in a substantially elliptical shape in the longitudinal direction of the upper face portion 15a As shown in Fig. Three circular openings 15f and 15g are formed in the lower surface portion 15b so as to penetrate in the vertical direction. One opening 15f of the three openings 15f and 15g is formed at the center of the bottom portion 15b and the other two openings 15g are formed in a substantially elliptical shape in the longitudinal direction of the bottom portion 15b As shown in Fig.

And the upper end of the rotary shaft 14 is fixed to the lower surface of the lower surface portion 15b. The rotating shaft 14 is fixed to the lower surface of the lower surface portion 15b so as to surround the opening 15f and the inner circumferential side of the rotating shaft 14 and the inside of the arm supporting portion 8 are connected. That is, the inside of the arm supporting portion 8 is connected to the inside of the case body 13 which is the main body portion 9 through the opening 15f, and the inside of the arm supporting portion 8 is at atmospheric pressure. 2, the opening 15d is closed by the lid member 16 from above and the two openings 15g are closed from the lower side by the lid member 16. A ring-shaped seal member (not shown) is arranged between the support body 15 and the lid member 16 to prevent air from flowing out into the vacuum region VR.

The arm 6 is constituted by two arm portions, a first arm portion 20 and a second arm portion 21, which are rotatably connected to each other. The first arm portion 20 and the second arm portion 21 are formed in a hollow shape. That is, the entire arm 6 is formed in a hollow shape. The proximal end side of the first arm portion 20 is fixed to the arm supporting portion 8. The proximal end side of the second arm portion 21 is rotatably connected to the distal end side of the first arm portion 20. A hand 4 is rotatably connected to the distal end side of the second arm 21.

The joint portion between the first arm portion 20 and the second arm portion 21 is a joint portion 22. [ The connecting portion between the arm 6 and the hand 4 (that is, the connecting portion between the second arm 21 and the hand 4) is the joint portion 23. The second arm portion 21 is disposed on the upper side of the first arm portion 20 and the hand 4 is disposed on the upper side of the second arm portion 21. [

The arm 7 is constituted by two arm portions, i.e., a first arm portion 25 and a second arm portion 26, which are rotatably connected to each other. The first arm portion 25 and the second arm portion 26 are formed in a hollow shape. That is, the entire arm 7 is formed in a hollow shape. The proximal end side of the first arm portion 25 is fixed to the arm supporting portion 8. The proximal end side of the second arm portion 26 is rotatably connected to the distal end side of the first arm portion 25. A hand 5 is rotatably connected to the distal end side of the second arm portion 26.

The connecting portion between the first arm portion 25 and the second arm portion 26 is a joint portion 27. The connecting portion between the arm 7 and the hand 5 (that is, the connecting portion between the second arm portion 26 and the hand 5) is the joint portion 28. The second arm portion (26) is disposed above the first arm portion (25). The hand 5 is disposed below the second arm portion 26 and above the first arm portion 25. [

(The configuration of the arm, the internal configuration of the arm, and the configuration of the joint)

5 is an enlarged view of part E of Fig. Fig. 6 is an enlarged view of part F in Fig. 3; 7A is a sectional view of the lid member 32 shown in Fig. 5, and Fig. 7B is a view showing the lid member 32 from the GG direction of Fig. 7A . 8 is an enlarged view of a portion H in Fig. 9 is an enlarged view of a portion J in Fig.

The first arm portion 20 includes an arm body 31, three lid members 32, and one lid member 33. The arm main body 31 is formed of an aluminum alloy. The arm main body 31 has an upper surface portion 31a constituting the upper surface of the arm main body 31 and a lower surface of the arm main body 31. The upper surface portion 31a has a predetermined gap And a side surface portion 31c connecting the outer peripheral end portion of the upper surface portion 31a and the outer peripheral end portion of the lower surface portion 31b. The upper surface portion 31a and the lower surface portion 31b are formed into a flat and generally elliptical shape having an elongated shape, and are vertically opposed to each other. The upper surface portion 31a constitutes a part of the upper surface of the first arm portion 20 and the lower surface portion 31b constitutes a part of the lower surface of the first arm portion 20. [ The side surface portion 31c is formed into a tubular shape having an elongated shape that is elongated when viewed from the top and bottom.

In the upper surface portion 31a, four circular openings 31d and 31e are formed to penetrate in the vertical direction. That is, the upper surface portion 31a is formed with openings 31d and 31e which are connected to the inside of the first arm portion 20. The four openings 31d and 31e are formed at predetermined intervals in the longitudinal direction of the upper surface portion 31a formed in a substantially elliptical shape. In this embodiment, an opening 31e is formed on the uppermost end of the upper face portion 31a and the remaining three openings 31d are formed on the base end side of the upper face portion 31a, rather than the opening 31e. Two circular openings 31f and 31g are formed in the lower surface portion 31b so as to penetrate in the vertical direction. That is, openings 31f and 31g connected to the inside of the first arm portion 20 are formed in the lower surface portion 31b. The opening 31f is formed at the tip end side of the lower surface portion 31b and the opening 31g is formed at the base end side of the lower surface portion 31b.

The second arm portion 21 includes an arm body 34, two lid members 32, and two lid members 33. The arm main body 34 is formed of an aluminum alloy. The arm main body 34 constitutes the upper surface portion 34a constituting the upper surface of the arm main body 34 and the lower surface of the arm main body 34 and forms a predetermined gap with the upper surface portion 34a And a side surface portion 34c connecting the outer peripheral end portion of the upper surface portion 34a and the outer peripheral end portion of the lower surface portion 34b. The upper surface portion 34a and the lower surface portion 34b are formed in the shape of an elongated substantially elliptical flat plate and are opposed to each other in the vertical direction. The upper surface portion 34a constitutes a part of the upper surface of the second arm portion 21 and the lower surface portion 34b constitutes a part of the lower surface of the second arm portion 21. [ The side surface portion 34c is formed into a tubular shape having an elongated shape that is elongated when viewed from the top and bottom.

Four circular openings 34d, 34e, and 34f are formed in the upper surface portion 34a so as to pass through in the vertical direction. That is, the upper surface portion 34a is formed with openings 34d to 34f connected to the inside of the second arm portion 21. [ The four openings 34d to 34f are formed at predetermined intervals in the longitudinal direction of the top surface portion 34a which is formed in a substantially elliptical shape. In this embodiment, an opening 34e is formed at the tip end of the upper surface portion 34a, an opening 34f is formed at the proximal end side of the upper surface portion 34a, and the remaining two opening portions 34d are formed at the opening 34e and the opening 34f. Two circular openings 34g and 34h are formed in the lower surface portion 34b so as to penetrate in the vertical direction. That is, the lower surface portion 34b is formed with openings 34g and 34h which are connected to the inside of the second arm portion 21. [ The opening 34g is formed at the tip end side of the lower surface portion 34b and the opening 34h is formed at the base end side of the lower surface portion 34b.

As described above, the proximal end side of the first arm portion 20 is fixed to the arm supporting portion 8. Specifically, in the state in which the lower surface of the lower surface portion 31b of the arm body 31 is in close contact with the upper surface of the upper surface portion 15a of the support body 15, the proximal end side of the first arm portion 20, And is fixed to the support portion 8. The proximal end side of the first arm portion 20 is connected to the distal end of the arm 15 so that the center of the opening 15e of the upper surface portion 15a and the center of the opening 31g of the lower surface portion 31b substantially coincide, And is fixed to the support portion 8. The inside of the first arm portion 20 is connected to the inside of the arm support portion 8 through the opening portion 15e and the opening portion 31g and the inside of the first arm portion 20 is at atmospheric pressure . A ring-shaped seal member (not shown) is arranged between the support body 15 and the arm body 31 to prevent air from flowing out to the vacuum region VR.

The second arm portion 21 is pivoted to the first arm portion 20 and the second arm portion 21 is pivoted to the inside of the base end portion of the first arm portion 20 and the inside of the arm supporting portion 8 A motor 35 for rotating the hand 4 is disposed. The center portion of the motor 35 in the vertical direction is disposed in the opening 15e and the opening 31g and the upper end side of the motor 35 is disposed inside the base end side of the first arm portion 20, The lower end side of the motor 35 is disposed inside the arm supporting portion 8. The output shaft of the motor 35 projects upward, and a pulley 36 is fixed to the output shaft.

The joint portion 22 is provided with a speed reducer 37 that decelerates the rotation of the motor 35 and transfers the rotation to the second arm portion 21. [ The speed reducer (37) is a hollow speed reducer having a through hole at the center in the radial direction. Therefore, the inside of the second arm portion 21 is connected to the inside of the first arm portion 20 through the through hole of the hollow decelerator, and the inside of the second arm portion 21 is at atmospheric pressure. That is, in this embodiment, the inside of the arm 6 is at atmospheric pressure. The joint part 23 is provided with a speed reducer 38 that transmits the rotation of the motor 35 to the hand 4 at a reduced speed. The speed reducer (38) is a hollow speed reducer having a through hole at the center in the radial direction.

The joint portion 22 is provided with a magnetic fluid seal 39 for preventing air from flowing out from the connection portion between the first arm portion 20 and the second arm portion 21 to the vacuum region VR. The magnetic fluid seal 39 includes a substantially cylindrical case body 40 constituting an outer peripheral side portion thereof and a substantially cylindrical inner peripheral side member 41 rotatably held on the inner peripheral side of the case body 40, . A bearing seal portion 42 having a bearing, a permanent magnet and a magnetic fluid is disposed between the case body 40 and the inner peripheral side member 41 in the radial direction. Similarly, the joint portion 23 is provided with a magnetic fluid seal 43 for preventing air from flowing out from the connection portion between the second arm 21 and the hand 4 to the vacuum region VR. The magnetic fluid seal 43 is constructed in the same manner as the magnetic fluid seal 39 and has a housing 44, an inner peripheral member 45, and a bearing seal portion 46.

A pulley 49 is fixed to the lower end of the input shaft of the speed reducer 37. The pulley 49 is disposed inside the tip end side of the first arm portion 20. A belt 50 is wound around the pulley 36 and the pulley 49. A pulley 51 is fixed to the upper end side of the input shaft of the speed reducer 37. The pulley 51 is disposed inside the proximal end side of the second arm portion 21. A pulley 52 is rotatably mounted in the second arm 21. A belt 53 is wound around the pulley 51 and the pulley 52.

The tip end side of the first arm portion 20 is fixed to the output shaft of the speed reducer 37. Specifically, the leading end side of the first arm portion 20 is fixed to the output shaft of the speed reducer 37 through the inner peripheral side member 41 of the magnetic fluid seal 39. The output shaft of the speed reducer (37) is fixed to the inner peripheral side of the inner peripheral side member (41). The inner circumferential side member 41 is provided on the leading end side of the first arm portion 20 so that a part of the outer circumferential surface thereof contacts the inner circumferential surface of the opening portion 31e and a part thereof comes into contact with the upper surface of the upper surface portion 31a Is fixed. A ring-shaped seal member (not shown) is arranged between the upper surface portion 31a and the inner peripheral side member 41 to prevent air from flowing out to the vacuum region VR.

The base body side of the second arm portion 21 is fixed to the case body of the speed reducer 37. [ Specifically, the base body side of the second arm portion 21 is fixed to the casing of the speed reducer 37 through the case body 40 of the magnetic fluid seal 39. The case body of the speed reducer 37 is fixed to the inner peripheral side of the case body 40. The case body 40 is fixed to the proximal end side of the second arm portion 21 so that a part of the outer circumferential surface of the case body 40 contacts the inner circumferential surface of the opening portion 34h and a part thereof comes into contact with the lower surface of the lower surface portion 34b. . Further, a ring-shaped sealing member (not shown) for preventing the outflow of air to the vacuum region VR is disposed between the lower surface portion 34b and the case body 40.

A pulley 56 is fixed to the lower end of the input shaft of the speed reducer 38. The pulley (56) is disposed inside the tip end side of the second arm portion (21). A belt 57 is wound around the pulley 56 and the pulley 52. The belt 53 and the belt 57 are coupled to the pulley 52 in a state of being displaced in the vertical direction and the belt 57 is disposed below the belt 53. The base 11 of the hand 4 is fixed to the output shaft of the speed reducer 38. Specifically, the base 11 of the hand 4 is fixed to the output shaft of the speed reducer 38 via the inner peripheral side member 45 of the magnetic fluid seal 43. The output shaft of the speed reducer 38 is fixed to the inner peripheral side of the inner peripheral side member 45. The inner peripheral side member 45 is fixed to the base 11 of the hand 4. A ring-shaped sealing member (not shown) is arranged between the base 11 of the hand 4 and the inner peripheral side member 45 to prevent air from flowing out to the vacuum region VR.

The tip end side of the second arm portion 21 is fixed to the case body of the speed reducer 38. Specifically, the distal end side of the second arm portion 21 is fixed to the case body of the speed reducer 38 through the case body 44 of the magnetic fluid seal 43. The case body of the speed reducer 38 is fixed to the inner peripheral side of the case body 44. The case body 44 is fixed to the tip end side of the second arm portion 21 so that a part of the outer circumferential surface thereof contacts the inner circumferential surface of the opening portion 34e and a part thereof contacts the upper surface of the upper surface portion 34a . A ring-shaped seal member (not shown) is arranged between the upper surface portion 34a and the case body 44 to prevent air from flowing out to the vacuum region VR.

The cover members 32 and 33 are formed of an aluminum alloy. The lid members 32 and 33 are formed in a disk shape. Both surfaces of the lid member 33 are formed in a planar shape. On one side of the lid member 32, a heat-dissipating fin 32a is formed as shown in Fig. In this embodiment, a plurality of circular fins 32a having different diameters are formed on one surface of the lid member 32, and the plurality of fins 32a are arranged concentrically. In this embodiment, as shown in Fig. 7 (A), a plurality of circular concave portions recessed from one surface of the lid member 32 toward the other surface are formed, so that a plurality of pins 32a Is formed. A plurality of fins 32a may be formed by convex portions protruding from one surface of the lid member 32. [

The opening 31f of the first arm portion 20 is closed from the lower side by the lid member 33. [ The opening 34f of the second arm 21 is closed from above by the lid member 33 and the opening 34g of the second arm 21 is closed from below by the lid 33 . The opening 31d of the first arm portion 20 and the opening 34d of the second arm portion 21 are closed from above by the lid member 32. [ The cover member 32 is fixed so that the surface on which the pin 32a is formed faces downward. That is, a pin 32a is formed on the lower surface of the lid member 32, and a heat dissipation fin 32a is formed on the upper surface of the arm 6. [ A ring-shaped seal member (not shown) is arranged between the arm main bodies 31, 34 and the lid members 32, 33 to prevent air from flowing out to the vacuum region VR.

8, the first arm portion 25 is configured similarly to the first arm portion 20 and includes an arm body 31, three lid members 32, and one lid member 33). 9, the second arm portion 26 is constructed in the same manner as the second arm portion 21. The second arm portion 26 includes an arm body 34, two lid members 32, And a member (33). Therefore, detailed description of the configuration of the first arm portion 25 and the configuration of the second arm portion 26 will be omitted.

The proximal end side of the first arm portion 25 is fixed to the support body 15 of the arm support portion 8 like the proximal end side of the first arm portion 20. The inside of the first arm portion 25 is connected to the inside of the arm supporting portion 8 through the opening 15e and the opening 31g and the inside of the first arm portion 25 is at atmospheric pressure. The second arm portion 26 is pivoted with respect to the first arm portion 25 and the second arm portion 26 is pivoted to the inside of the base end side of the first arm portion 25 and the inside of the arm supporting portion 8, And a motor 65 for rotating the hand 5 is disposed. The motor 65 is disposed in the same manner as the motor 35 disposed inside the base end portion of the first arm portion 20 and inside the arm support portion 8. [ The output shaft of the motor 65 protrudes upward, and a pulley 66 is fixed to the output shaft.

The joint portion 27 is provided with a speed reducer 67 for reducing the rotation of the motor 65 and transmitting it to the second arm portion 26. [ The decelerator 67 is a hollow decelerator having a through hole formed at the center in the radial direction thereof, like the decelerator 37. Therefore, the inside of the second arm portion 26 is connected to the inside of the first arm portion 25 through the through hole of the hollow decelerator, and the inside of the second arm portion 26 is at atmospheric pressure. That is, in this embodiment, the inside of the arm 7 is at atmospheric pressure. The joint part 28 is provided with a speed reducer 68 which transmits the rotation of the motor 65 to the hand 5 at a reduced speed. The decelerator 68 is a hollow decelerator having a through hole at the center in the radial direction thereof, like the decelerator 38.

The joint portion 27 is provided with a magnetic fluid seal 39 for preventing air from flowing out from the connection portion of the first arm portion 25 and the second arm portion 26 to the vacuum region VR . The joint 28 has a magnetic fluid seal 43 for preventing air from flowing out from the connection portion between the second arm 26 and the hand 5 to the vacuum region VR similarly to the joint 23 .

At the lower end of the input shaft of the speed reducer 67, the upper end of a rotary shaft 69 formed in a cylindrical shape is fixed. A pulley 70 is fixed to the lower end of the rotary shaft 69. The pulley (70) is disposed inside the tip end side of the first arm portion (25). The pulley (66) and the pulley (70) are covered with a belt (71). A pulley 72 is fixed to the upper end side of the input shaft of the speed reducer 67. The pulley 72 is disposed inside the proximal end side of the second arm portion 26.

The front end side of the first arm portion 25 is fixed to the output shaft of the speed reducer 67. Specifically, the tip end side of the first arm portion 25 is fixed to the output shaft of the speed reducer 67 through the inner peripheral side member 41 of the magnetic fluid seal 39 and the spacer 73. The spacer 73 is formed into a substantially cylindrical shape. The spacer 73 is disposed so as to cover the outer circumferential side of the rotary shaft 69.

The output shaft of the speed reducer 67 is fixed to the inner peripheral side of the inner peripheral side member 41. The inner peripheral side member 41 is fixed to the upper end of the spacer 73 such that a part of the outer peripheral surface of the inner peripheral side member 41 contacts the inner peripheral surface of the spacer 73 and a part thereof contacts the upper end surface of the spacer 73 . The lower end of the spacer 73 is fixed to the tip end side of the first arm portion 25 so as to be in contact with the upper surface of the upper surface portion 31a. A bearing holding member 74 is fixed to the lower end of the spacer 73. The bearing holding member 74 is fixed to the lower end side of the spacer 73 such that a part of the outer peripheral surface of the bearing holding member 74 contacts the inner peripheral surface of the spacer 73 and a part of the bearing holding member 74 comes into contact with the lower end surface of the spacer 73 have. A part of the bearing holding member 74 is disposed on the inner peripheral side of the opening 31e. A bearing 75 for rotatably supporting the rotary shaft 69 is fixed to the bearing holding member 74. A ring shape (not shown) is provided between the inner peripheral side member 41 and the upper end of the spacer 73 and between the upper surface portion 31a and the lower end of the spacer 73 to prevent air from flowing into the vacuum region VR A seal member (not shown) is disposed.

On the case body of the speed reducer 67, the proximal end side of the second arm portion 26 is fixed. The proximal end side of the second arm portion 26 is fixed to the case body of the speed reducer 67 in the same manner as the proximal end side of the second arm portion 21 is fixed to the case body of the speed reducer 37. That is, the base body side of the second arm portion 26 is fixed to the case body of the speed reducer 67 through the case body 40 of the magnetic fluid seal 39.

A pulley 76 is fixed to the upper end side of the input shaft of the speed reducer 68. The pulley 76 is disposed inside the tip end side of the second arm portion 26. A belt 77 is wound around the pulley 72 and the pulley 76. The base 11 of the hand 5 is fixed to the output shaft of the speed reducer 68. [ The base 11 of the hand 5 is fixed to the output shaft of the speed reducer 68 just as the base 11 of the hand 4 is fixed to the output shaft of the speed reducer 38. [ The base 11 of the hand 5 is fixed to the output shaft of the speed reducer 68 via the inner peripheral side member 45 of the magnetic fluid seal 43. [

The tip end side of the second arm portion 26 is fixed to the housing of the speed reducer 68. Specifically, the tip end side of the second arm portion 26 is fixed to the case body of the speed reducer 68 through the case body 44 of the magnetic fluid seal 43. The case body of the speed reducer 68 is fixed to the inner peripheral side of the case body 44. The case body 44 is fixed to the distal end side of the second arm portion 26 so that a part of the outer circumferential surface thereof contacts the inner circumferential surface of the opening portion 34g and a part thereof comes into contact with the lower surface of the lower surface portion 34b . A ring-shaped seal member (not shown) is arranged between the lower surface portion 34b and the case body 44 to prevent air from flowing out to the vacuum region VR.

The opening 31f of the first arm portion 25 is closed from the lower side by the lid member 33. [ The opening portions 34e and 34f of the second arm portion 26 are closed from the upper side by the lid member 33. [ The opening 31d of the first arm portion 25 and the opening 34d of the second arm portion 26 are closed from above by the lid member 32. [ The cover member 32 is fixed so that the surface on which the pin 32a is formed faces downward. That is, a pin 32a is formed on the lower surface of the lid member 32, and a heat dissipating fin 32a is formed on the upper surface of the arm 7.

(Configuration of the cooling mechanism, configuration of the temperature sensor, and configuration of the cover member)

As described above, the robot 1 carries the substrate 2 of high temperature. The temperature of the arms 6 and 7 rises due to radiant heat from the substrate 2 and radiant heat from the wall surface of the vacuum chamber where the robot 1 is installed. The robot 1 of this embodiment is provided with a cooling mechanism for cooling the inside of the arms 6 and 7 whose temperature rises. The robot 1 further includes a temperature sensor 80 for measuring the internal temperatures of the first and second arm portions 20 and 25 and the second arm portions 21 and 26 and a temperature sensor 80 for measuring the internal temperatures of the arms 6 and 7 and the arm support portion 8 for preventing the transmission of radiant heat to the outside.

The robot 1 according to this embodiment is a cooling mechanism for cooling the inside of the arms 6 and 7 so as to cool the motor 35 and supply cooling air to the interior of the first arm 20 An air pipe 88 for supplying air for cooling to the inside of the second arm 21 and an air pipe 88 for cooling the inside of the first arm portion 25 An air pipe 90 for supplying air for cooling to the inside of the second arm 26 and an air pipe 90 for supplying cooling air to the inside of the arms 6 and 7 And a plurality of fans (blowers) 91 are provided.

The air pipes 87 to 90 are metal pipes formed of metal such as aluminum alloy or copper alloy, for example. Or a pipe formed by a fluorine tube or the like. The base ends of the air pipes 87 to 90 are connected to an electromagnetic valve (not shown) disposed inside the case body 13 of the main body portion 9. [ In this embodiment, four electromagnetic valves to which the base ends of the air pipes 87 to 90 are connected are arranged inside the case body 13, and the adjustment of the supply amount of the cooling air for each of the air pipes 87 to 90 Can be performed. The four electromagnetic valves are connected to a compressed air supply device (not shown) disposed inside or outside the case body 13 through a predetermined pipe.

The air pipes 87 and 88 are laid from the inside of the case body 13 toward the arm 6 so as to pass through the inner circumferential side of the rotating shaft 14 and the opening 15f. The tip end side of the air pipe 87 is wound around the outer peripheral surface of the motor 35. The front end of the air pipe 87 serving as a supply port for the cooling air is disposed inside the base end side of the first arm portion 20 and is connected to the base end side of the first arm portion 20 from the air pipe 87 The air for cooling is supplied. The air piping 88 is laid inside the first arm portion 20 and the second arm portion 21 so as to pass through the through holes formed at the axes of the openings 15e and 31g and the reducer 37. [ The tip end of the air pipe 88 serving as a supply port for the cooling air is disposed inside the tip end side of the second arm portion 21 and extends from the air pipe 88 to the tip end side inside of the second arm portion 21 The air for cooling is supplied.

The air pipes 89 and 90 are laid from the inside of the case body 13 toward the arm 7 so as to pass through the inner peripheral side of the rotating shaft 14 and the opening 15f. The tip end side of the air pipe 89 is wound around the outer peripheral surface of the motor 65. The front end of the air pipe 89 serving as a supply port for the cooling air is disposed inside the base end side of the first arm portion 25 and extends from the air pipe 89 to the base end side of the first arm portion 25 The air for cooling is supplied. The air piping 90 is connected to the first arm portion 25 and the second arm portion 25 so as to pass through the openings 15e and 31g, the inner circumferential side of the rotating shaft 69, 26). The tip end of the air pipe 90 serving as a supply port for the cooling air is disposed inside the tip end side of the second arm portion 26 and extends from the air piping 90 to the tip end side inside of the second arm portion 26 The air for cooling is supplied.

The temperature sensor 80 is disposed inside each of the first arm portions 20, 25 and the second arm portions 21, 26. In this embodiment, a plurality of temperature sensors 80 having different detection temperatures are set and disposed inside the first arm portions 20, 25 and the second arm portions 21, 26, respectively. Specifically, three temperature sensors 80 having different detection temperatures are disposed as a set inside the first arm portions 20, 25 and the second arm portions 21, 26, respectively.

In the interior of the first arm portion 20, a set of temperature sensors 80 are disposed in the vicinity of the motor 35 and in the vicinity of the joint 22. That is, in the first arm portion 20, a set of temperature sensors 80 are disposed on the base end side and the tip end side of the first arm portion 20. The temperature sensor 80 disposed in the vicinity of the motor 35 is provided on the upper end side of the motor 35. The temperature sensor 80 disposed in the vicinity of the joint portion 22 is provided on the upper surface of the lower surface portion 31b. In the interior of the second arm 21, a set of temperature sensors 80 is disposed in the vicinity of the joint 23. That is, in the interior of the second arm 21, a set of temperature sensors 80 is disposed at the tip end side of the second arm 21. The temperature sensor 80 is provided on the upper surface of the lower surface portion 34b.

In the interior of the first arm portion 25, a set of temperature sensors 80 are disposed in the vicinity of the motor 65 and in the vicinity of the joint portion 27. That is, in the first arm portion 25, a set of temperature sensors 80 are disposed on the base end side and the tip end side of the first arm portion 25. The temperature sensor 80 disposed in the vicinity of the motor 65 is provided on the upper end side of the motor 65. The temperature sensor 80 disposed in the vicinity of the joint portion 27 is provided on the upper surface of the lower surface portion 31b. In the interior of the second arm portion 26, a set of temperature sensors 80 is disposed in the vicinity of the joint portion 28. That is, in the interior of the second arm 26, a set of temperature sensors 80 is disposed on the distal end side of the second arm 26. The temperature sensor 80 is provided on the upper surface of the lower surface portion 34b.

As described above, in this embodiment, the supply amount of the cooling air can be adjusted for each of the air pipes 87 to 90, and the first arm portions 20, 25 and the second arm portions 21, 26 ) Can be individually cooled. In this embodiment, the inside of each of the first arm portions 20, 25 and the second arm portions 21, 26 is individually cooled based on the detection result of the temperature sensor 80. [ That is, in this embodiment, by adjusting the supply amount of the cooling air supplied from each of the air pipes 87 to 90 based on the detection result of the temperature sensor 80, the first and second arm portions 20 and 25 and And the inside of each of the second arm portions 21 and 26 is individually cooled.

Specifically, based on the detection results of the temperature sensor 80 disposed inside the first arm portion 20 and the temperature sensor 80 disposed inside the second arm portion 21, The supply amount of the cooling air supplied from each of the air pipes 87 and 88 is adjusted so that the internal temperature of the arm 20 and the internal temperature of the second arm 21 are substantially equal to each other, 20 and the second arm portion 21 are individually cooled. Based on the detection results of the temperature sensor 80 disposed inside the first arm portion 25 and the temperature sensor 80 disposed inside the second arm portion 26, The supply amount of the cooling air supplied from each of the air pipes 89 and 90 is adjusted so that the internal temperature of the first arm portion 25 is substantially equal to the internal temperature of the second arm portion 26, And the second arm portion 26 are individually cooled.

In this embodiment, the amount of cooling air supplied from each of the air pipes 87 to 90 is adjusted so that the inside of each of the first arm portions 20, 25 and the second arm portions 21, The supply of the cooling air from each of the air pipes 87 to 90 is stopped so that the inside of each of the first arm portions 20 and 25 and the second arm portions 21 and 26 is individually .

The fan 91 is disposed inside the first arm portions 20 and 25 and the second arm portions 21 and 26, respectively. In this embodiment, two fans 91 are disposed inside the first arm portions 20, 25 and the second arm portions 21, 26, respectively, with a predetermined gap therebetween. Further, the fan 91 is arranged so as to send cooling air toward the upper side. In this embodiment, the fan 91 is disposed so as to direct cooling air directly upward. Specifically, the fan 91 is disposed on the lower side of the lid member 32, and is arranged to send cooling air toward the plurality of fins 32a formed on the lid member 32. [ Further, the fan 91 rotates or stops based on the result of detection by the temperature sensor 80, for example. Further, the fan 91 may be arranged so as to send cooling air toward the upper side obliquely.

The cover members 81 to 85 are formed of a material having a thermal conductivity lower than that of the support body 15, the arm portions 31 and 34 and the cover members 16, 32 and 33. The cover members 81 to 85 are formed of a material having high reflectance of radiant heat. For example, the cover members 81 to 85 are formed of a thin stainless steel plate.

The cover member 81 covers substantially the entire upper surface, lower surface and side surface of the portion of the first arm portion 20 excluding the portion overlapping with the arm supporting portion 8. The cover member 82 covers substantially the entire upper surface, lower surface, and side surfaces of the second arm portion 21. The cover member 83 covers substantially the entire upper surface, lower surface and side surface of the portion of the first arm portion 25 excluding the portion overlapping the arm supporting portion 8. The cover member 84 covers substantially the entire upper surface, lower surface, and side surfaces of the second arm portion 26. The cover member 85 covers a portion of the first arm portions 20 and 25 which overlaps the arm support portion 8 and a substantially entire portion of the upper surface, the lower surface and the side surfaces of the arm support portion 8. As described above, the arms 6, 7 and the arm supporting portion 8 are substantially entirely covered by the cover members 81 to 85. [

(Main effect of this embodiment)

As described above, in this embodiment, the temperature sensors 80 are disposed inside the first arm portions 20, 25 and the second arm portions 21, 26, respectively. In this embodiment, the supply amount of the cooling air is adjusted for each of the air pipes 87 to 90 so that the inside of each of the first arm portions 20, 25 and the second arm portions 21, And the inside of each of the first arm portions 20 and 25 and the second arm portions 21 and 26 is individually cooled based on the detection result of the temperature sensor 80 have.

Therefore, in this embodiment, it is possible to manage the temperatures of the first and second arm portions 20 and 25 and the second arm portions 21 and 26, respectively, based on the detection result of the temperature sensor 80. Therefore, in this embodiment, even if a positional deviation occurs in the joint portions 23 and 28 due to the thermal expansion of the arms 6 and 7, the direction of displacement of the joint portions 23 and 28 can be made regular It becomes. As a result, in the present embodiment, even if the arm 6 is constituted by the first arm portion 20 and the second arm portion 21, It is possible to suppress a change in the amount of displacement between the actual trajectory and the locus of the joint portion 23 when the arm 6 is not thermally expanded. Therefore, in this embodiment, the hand 4 can be appropriately operated. In the present embodiment, even if the arm 7 is constituted by the first arm portion 25 and the second arm portion 26, the actual locus of the joint portion 28 when the high-temperature substrate 2 is transported It is possible to suppress the change in the displacement of the arm 7 with the locus of the joint part 28 when the arm 7 is not thermally expanded. As a result, it is possible to properly operate the hand 5.

Particularly, in this embodiment, based on the detection results of the temperature sensor 80 disposed inside the first arm portion 20 and the temperature sensor 80 disposed inside the second arm portion 21, The inside of each of the first arm portion 20 and the second arm portion 21 is individually cooled so that the internal temperature of the arm portion 20 and the internal temperature of the second arm portion 21 become substantially equal , The expansion amount per unit length of the first arm portion 20 and the expansion amount per unit length of the second arm portion 21 become substantially equal. Therefore, in the present embodiment, it is possible to make the direction of displacement of the position when the positional deviation occurs in the joint part 23 to be more regular direction, and the direction of the positional deviation of the joint part 23 when the high temperature substrate 2 is carried It is possible to effectively suppress the change in the displacement of the locus and the locus of the joint portion 23 when the arm 6 is not thermally expanded. As a result, in this embodiment, the hand 4 can be operated more appropriately.

Likewise, in this embodiment, based on the detection results of the temperature sensor 80 disposed inside the first arm portion 25 and the temperature sensor 80 disposed inside the second arm portion 26, The inside of each of the first arm portion 25 and the second arm portion 26 is individually cooled so that the internal temperature of the first arm portion 25 and the internal temperature of the second arm portion 26 become substantially equal The amount of expansion per unit length of the first arm portion 25 and the amount of expansion per unit length of the second arm portion 26 are substantially equal to each other. Therefore, in the present embodiment, it is possible to make the direction of displacement of the position when the positional deviation occurs in the joint part 28 more regular, and it is possible to make the position of the joint part 28 when the high temperature substrate 2 is transported It is possible to effectively suppress the change in the amount of displacement between the locus and the locus of the joint portion 28 when the arm 7 is not thermally expanded. As a result, in this embodiment, it becomes possible to operate the hand 5 more appropriately.

In this embodiment, the supply amount of the cooling air supplied from each of the air pipes 87 to 90 is adjusted on the basis of the detection result of the temperature sensor 80 so that the first arm portions 20, 25 and the second And the inside of each of the arm portions 21 and 26 is cooled individually. Therefore, in this embodiment, it is possible to manage the temperatures of the first arm portions 20, 25 and the second arm portions 21, 26 with a relatively simple structure.

In this embodiment, a temperature sensor 80 is disposed in the vicinity of the joint portions 22, 23, 27, and 28. Therefore, in this embodiment, the bearing temperature of the speed reducers 37, 38, 67, 68 constituting a part of the joint portions 22, 23, 27, 28 is estimated based on the detection result of the temperature sensor 80 . Therefore, in the present embodiment, it is possible to appropriately estimate the bearing life of the speed reducers 37, 38, 67, and 68 based on the estimated temperature, and as a result, it becomes possible to replace the bearings at an appropriate time. In this embodiment, since the temperature sensor 80 is disposed in the vicinity of the motors 35 and 65, it is possible to detect abnormality of the motors 35 and 65 based on the detection result of the temperature sensor 80 As a result, damage to the motors 35 and 65 can be prevented.

In this embodiment, three temperature sensors 80 having different detection temperatures are arranged as a set inside the first arm portions 20, 25 and the second arm portions 21, 26, respectively. Therefore, in this embodiment, the detection accuracy of the internal temperatures of the first arm portions 20, 25 and the second arm portions 21, 26 can be improved. Therefore, in this embodiment, the temperatures of the first arm portions 20, 25 and the second arm portions 21, 26 can be controlled with high accuracy.

In this embodiment, a fan 91 for blowing air upward is disposed inside the arms 6 and 7. Therefore, in the present embodiment, when the high-temperature substrate 2 is transported, it is possible to cool the upper surface side portion of the arms 6 and 7 to suppress the temperature rise of the upper surface side portions of the arms 6 and 7 , It becomes possible to bring the temperature of the upper surface side portion of the arms 6, 7 close to the temperature of the lower side portion of the arms 6, 7. Therefore, in this embodiment, it is possible to bring the amount of thermal deformation of the upper side portion of the arms 6 and 7 closer to the amount of thermal deformation of the lower side portion, and to suppress the thermal deformation of the arms 6 and 7, Lt; / RTI > As a result, in this embodiment, even when the substrate 2 with a high temperature is transported, it is possible to transport the substrate 2 appropriately by the hands 4, 5. Further, in this embodiment, since the inside of the arms 6 and 7 can be cooled by using the fan 91, it is possible to suppress the amount of thermal deformation of the arms 6 and 7.

In this embodiment, the fan 91 is disposed inside the first arm portions 20 and 25 and the second arm portions 21 and 26, respectively. Therefore, in this embodiment, even if the arms 6 and 7 are constituted by the two arm portions of the first arm portions 20 and 25 and the second arm portions 21 and 26, It is possible to cool the upper surface side portion of the arms 6 and 7 so that the total temperature of the upper surface side portion of the arms 6 and 7 becomes substantially equal. Particularly, in the present embodiment, since the two fans 91 are disposed inside the first arm portions 20 and 25 and the second arm portions 21 and 26 with a predetermined gap therebetween, 7 can be cooled so that the total temperature of the upper surface side portions of the arms 6, 7 becomes more uniform.

In this embodiment, a heat dissipation fin 32a is formed on the inner upper surface of the arms 6 and 7, and the fan 91 sends cooling air toward the fin 32a. Therefore, in the present embodiment, the upper surface side portion of the arms 6 and 7 can be effectively cooled, and the temperature rise of the upper surface side portion of the arms 6 and 7 can be effectively suppressed.

In this embodiment, the pin 32a is provided on the lower surface of the lid member 32 for covering the opening 31d of the first arm portions 20 and 25 and the opening 34d of the second arm portions 21 and 26 from above Respectively. Therefore, in this embodiment, even when the pin 32a is formed on the inner upper surface of the hollow arms 6 and 7, it is possible to easily form the pin 32a.

In the present embodiment, the cover members 81 to 85 formed of a material having a thermal conductivity lower than that of the arms 6 and 7 and the arm support portion 8 are used to cover the arms 6 and 7 and the arm support portion 8, Is covered. Therefore, in this embodiment, the radiation heat from the substrate 2 and the radiation heat from the wall surface of the vacuum chamber in which the robot 1 is disposed are effectively suppressed from being transmitted to the arms 6, 7 and the arm supporting portion 8 It becomes possible.

(Other Embodiments)

Although the present invention has been described in connection with certain preferred embodiments, it is to be understood that the invention is not limited to the disclosed embodiments, but, on the contrary, is intended to cover various modifications and similarities.

In the above-described embodiment, the proximal end side portions of the first arm portions 20, 25 formed separately are fixed to the arm supporting portion 8. In addition, for example, the first arm portion 20, the first arm portion 25, and the arm support portion 8 may be integrally formed. 10, the proximal end side of the first arm portion 20 and the proximal end side of the first arm portion 25 may be rotatably connected to the main body portion 9, as shown in Fig. In this case, the motor 35 is disposed inside the first arm portion 20, and the motor 65 is disposed inside the first arm portion 25. In the above embodiment, the robot 1 is provided with two arms 6 and 7. However, the robot 1 may be provided with only one arm 6 as shown in Fig. In this case, the proximal end side of the first arm portion 20 is rotatably connected to the main body portion 9. In Figs. 10 and 11, the same reference numerals are given to components common to those of the above-described embodiments.

In the above-described embodiment, the supply amount of the cooling air is adjusted for each of the air pipes 87 to 90 based on the detection result of the temperature sensor 80 so that the first arm portion 20, And the inside of each of the arm portions 21 and 26 is cooled individually. In addition, based on the detection result of the temperature sensor 80, for example, the fans 91 disposed inside the first arm portions 20, 25 and the second arm portions 21, 26, respectively, The inside of each of the first arm portions 20 and 25 and the second arm portions 21 and 26 may be individually cooled.

The internal temperature of the first arm portion 20 and the internal temperature of the second arm portion 21 are substantially equal to each other and the internal temperature of the first arm portion 25 and the internal temperature of the second arm portion 26 The inside of each of the first arm portions 20, 25 and the second arm portions 21, 26 is individually cooled so that the internal temperatures become substantially equal. In addition, for example, if the internal temperature of the first arm portion 20 is different from the internal temperature of the second arm portion 21, and the internal temperature of the first arm portion 25 and the internal temperature of the second arm portion 26 The first and second arm portions 20 and 25 and the second arm portion 21 and 26 are set so that the internal temperature of each of the first arm portions 20 and 25 and the second arm portions 21 and 26 becomes a predetermined temperature, The inside of each of the arm portions 21 and 26 may be individually cooled.

A plurality of temperature sensors 80 having different detection temperatures are arranged in the vicinity of the motors 35 and 65 and the joint portions 22 and 23 and 27 and 28 in a set. In addition, for example, one temperature sensor 80 may be disposed in the vicinity of the motors 35, 65 and the joint portions 22, 23, 27, 28. In the above embodiment, the temperature sensor 80 is disposed in the vicinity of the motors 35, 65 and the joint portions 22, 23, 27, 28. However, the first and second arm portions 20, The temperature sensor 80 may be disposed at an arbitrary position inside each of the arm portions 21,

In the above-described embodiment, the arms 6 and 7 are composed of the first arm portions 20 and 25 and the second arm portions 21 and 26, Or more arm portions. In this case, a temperature sensor 80 is disposed in each of the arm portions, and a supply port of an air pipe for supplying cooling air is disposed in each of the arms. In this case, for example, a fan 91 is disposed in each of the arms. Also, the arms 6 and 7 may be constituted by one arm portion.

The robot 1 rotates the second arm 21 with respect to the first arm 20 and the second arm 21 with respect to the second arm 21 by one motor 35 The hand 4 is rotated. In addition, for example, even if a motor that rotates the second arm 21 with respect to the first arm 20 and a motor that rotates the hand 4 with respect to the second arm 21 are separately provided do. Likewise, in the above-described embodiment, one motor 65 rotates the second arm portion 26 with respect to the first arm portion 25, and the second arm portion 26 rotates with respect to the second arm portion 26 with respect to the hand 5, A motor that rotates the second arm portion 26 with respect to the first arm portion 25 and a motor that rotates the hand 5 with respect to the second arm portion 26 may be separately provided .

The fan 91 is disposed in each of the first arm portions 20 and 25 and the second arm portions 21 and 26 but the fan 91 may not be disposed. In the above-described embodiment, the lid member 32 is provided with the pin 32a, but the lid member 32 may not be provided with the pin 32a. In the above embodiment, the object to be transported by the robot 1 is the substrate 2 for the organic EL display. However, the object to be transported by the robot 1 may be a glass substrate for a liquid crystal display, A semiconductor wafer or the like.

In the above-described embodiment, the two fans 91 are disposed inside the first arm portions 20 and 25 and the second arm portions 21 and 26, respectively. However, the first and second arm portions 20 and 25, The number of the fans 91 disposed in each of the second arm portions 21, 26 may be one or three or more. In the above embodiment, the fan 91 is disposed inside each of the first arm 20 and the second arm 21. However, the fan 91 may be disposed inside the first arm 20 or the second arm 21 21 may be disposed on only one side of the fan 91. [ Similarly, the fan 91 may be disposed only inside the first arm portion 25 or only inside the second arm portion 26.

In the above-described embodiment, the fan 91 is rotated or stopped based on the detection result of the temperature sensor 80. In addition, the fan 91 may be continuously rotated while the robot 1 is driven, for example, irrespective of the detection result of the temperature sensor 80, and at a predetermined operation timing of the robot 1, The fan 91 may be rotated.

The fan 91 is disposed below the lid member 32 and sends cooling air toward the plurality of fins 32a formed in the lid member 32. In this embodiment, In addition, for example, the fan 91 is disposed at a position deviated from the lower side of the lid member 32 and may send air for cooling toward the lower surface of the upper surface portions 31a, 34a. In the above-described embodiment, the lid member 32 is provided with the pin 32a, but the pin 32a may be formed on the lower surface of the upper surface portions 31a and 34a. In the above-described embodiment, the lid member 32 is provided with the pin 32a, but the lid member 32 may not be provided with the pin 32a.

In the above-described embodiment, the hand 4 is disposed above the second arm 21, but the hand 4 may be disposed below the second arm 21. In the above-described embodiment, the hand 5 is disposed below the second arm 26, but the hand 5 may be disposed above the second arm 26. [

The cover members 81 to 85 cover the arms 6 and 7 and the arm support portion 8 while the cover members 81 to 85 cover substantially the entirety of the arms 6 and 7 and the arm support portion 8 8 may be covered only on the upper end side. In the above-described embodiment, the robot 1 is provided with the cover members 81 to 85, but the robot 1 does not need to include the cover members 81 to 85.

1: Robot (industrial robot)
2: substrate (glass substrate, transport object)
4, 5: Hand
6, 7: arm
20, 25: first arm portion (arm portion)
21, 26: second arm portion (arm portion)
22, 23, 27, 28: joints
31a, 34a:
31d, 34d:
32: lid member
32a: pin
35, 65: motor
80: Temperature sensor
81 to 85:
87 to 90: Air piping (part of the cooling mechanism)
91: Fan (part of the cooling mechanism)

Claims (18)

And a cooling mechanism for cooling the inside of the arm, wherein the arm is formed in a hollow shape and connected to the distal end side of the hand,
Wherein the hand and the arm are disposed in a vacuum,
The arm includes a plurality of arms formed in a hollow shape and connected to each other to be relatively rotatable,
The inside of the plurality of arm portions is at atmospheric pressure,
A temperature sensor for measuring the internal temperature of the arm portion is disposed in each of the plurality of arm portions,
Characterized in that the cooling mechanism is capable of individually cooling the inside of each of the plurality of the arm portions and cooling the inside of each of the plurality of the arm portions individually on the basis of a result of detection by the temperature sensor , Industrial robots. The cooling apparatus according to claim 1, wherein the cooling mechanism includes a supply port for cooling air which is disposed in each of the plurality of arm portions, and for cooling from the supply port And the inside of each of the plurality of arm portions is individually cooled by adjusting the supply amount of air. The internal combustion engine according to claim 2, wherein a main body portion rotatably supporting the plurality of arm portions is disposed in the atmosphere, the interior of the main body portion is at atmospheric pressure, and the inside of the plurality of arm portions, And is maintained at atmospheric pressure by being in communication with the inside of the main body through the opened opening,
The cooling mechanism includes an air piping extending from the inside of the main body to each of the plurality of the arm portions and supplying the cooling air to each of the plurality of the arm portions through the air piping Industrial robots. The hand unit according to claim 3, wherein the plurality of arms have a first arm portion rotatably connected to the body portion side, a second arm portion rotatably connected to a distal end side of the first arm portion, And an arm portion,
Wherein a hollow gear reducer having a through hole at its center is provided in a joint portion connected to the first arm portion and the second arm portion through the opening portion and the inside of the second arm portion is inserted through the through hole, 1, and the air pipe extends from the inside of the first arm to the inside of the second arm,
Wherein the joint portion is provided with a seal portion for preventing air from flowing out from the connection portion between the first arm portion and the second arm portion to the vacuum region. The cooling device according to any one of claims 1 to 4, wherein the cooling mechanism is configured to cool the plurality of arm portions, respectively, so that internal temperatures of the plurality of arm portions are substantially equal, And the inside of the robot is individually cooled. The temperature sensor according to any one of claims 1 to 4, wherein the temperature sensor is disposed in the vicinity of a joint portion connecting the arm portions and in the vicinity of a joint portion connecting the arm and the hand , Industrial robots. The motorcycle according to any one of claims 1 to 4, further comprising a motor for rotating at least one of the plurality of arms and the hand,
And the temperature sensor is disposed in the vicinity of the motor. The industrial robot according to any one of claims 1 to 4, wherein a plurality of temperature sensors having different detection temperatures are arranged in a set in each of the plurality of arm portions. A hand on which the object to be transported is mounted, and an arm to which the hand is connected to the distal end side,
Wherein the hand and the arm are disposed in a vacuum,
Wherein the arm is formed in a hollow shape, the inside of the arm is at atmospheric pressure,
And an air is fed to the inside of the arm toward the upper side. The industrial robot according to claim 9, wherein a heat-dissipating fin is formed on an inner upper surface of the arm. 11. The apparatus according to claim 10, wherein the arm has a flat top surface portion constituting a part of an upper surface of the arm,
Wherein the upper surface portion is formed with an opening penetrating in the vertical direction,
The arm further includes a cover member fixed to the upper surface portion and covering the opening portion from the upper side,
And the fin is formed on a lower surface of the lid member. 12. The apparatus according to claim 11, wherein the lid member is formed in a disk shape,
Wherein the lid member is formed in a concentric shape with a plurality of circular fins having different diameters. 13. The apparatus according to any one of claims 9 to 12, wherein the arm has a plurality of arms which are rotatably connected to each other,
Wherein the fan is disposed in each of the inside of the plurality of arm portions. 13. The apparatus according to any one of claims 9 to 12, further comprising: a cover member covering substantially the whole of the arm,
And the thermal conductivity of the cover member is lower than the thermal conductivity of the arm. 13. The airbag apparatus according to any one of claims 9 to 12, wherein a body portion for rotatably supporting the plurality of arm portions is disposed in the atmosphere, the inside of the plurality of arm portions is at atmospheric pressure, Is held at atmospheric pressure by being in communication with the inside of the main body through a communication opening provided in the plurality of arm portions. 16. The air conditioner according to claim 15, further comprising a cooling mechanism for cooling the inside of the arm, wherein the cooling mechanism includes an air pipe extending from the inside of the main body into each of the plurality of arm portions, And the cooling air is supplied to the inside of each of the plurality of the arm portions by being disposed in the plurality of the arm portions. The hand unit according to claim 16, wherein the plurality of arms have a first arm portion rotatably connected to the body portion side, a second arm portion rotatably connected to a distal end side of the first arm portion, And an arm portion,
Wherein a hollow gear reducer having a through hole at its center is provided in a joint portion connected to the first arm portion and the second arm portion through the opening portion and the inside of the second arm portion is inserted through the through hole, 1, and the air pipe extends from the inside of the first arm to the inside of the second arm,
And a seal portion for preventing air from flowing out from the connection portion between the first arm portion and the second arm portion to the vacuum region is provided in the joint portion. 18. The apparatus according to claim 17, wherein a temperature sensor for measuring the internal temperature of the arm portion is disposed in each of the plurality of arm portions,
Wherein the cooling mechanism individually cools the interior of each of the plurality of arm portions based on the detection result of the temperature sensor and the fan rotates or stops based on the detection result of the temperature sensor, Wherein the robot is a robot.

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