JPWO2015037701A1 - Industrial robot - Google Patents

Abstract

An industrial robot that can operate a hand appropriately when a high-temperature transfer object is transferred in a vacuum even if the arm is constituted by a plurality of arm portions that are connected to each other so as to be rotatable relative to each other. I will provide a. This industrial robot includes a cooling mechanism for cooling the inside of the arm (6) formed in a hollow shape, and the hand (4) and the arm (6) are arranged in a vacuum. The arm (6) includes arm portions (20, 21) connected to each other so as to be relatively rotatable, and the inside of the arm portions (20, 21) is at atmospheric pressure. A temperature sensor 80 for measuring the temperature inside the arm portion (20, 21) is disposed inside each of the arm portions (20, 21). The cooling mechanism can individually cool the inside of each of the arm portions (20, 21). Based on the detection result of the temperature sensor (80), the inside of each of the arm portions (20, 21) can be cooled. Cool individually.

Description

  The present invention relates to an industrial robot that transports an object to be transported in a vacuum.

  Conventionally, an industrial robot that is installed in a vacuum chamber and transports a glass substrate or the like in a vacuum is known (for example, see Patent Document 1). The industrial robot described in Patent Document 1 includes a hand on which a glass substrate or the like is mounted, an arm that is rotatably connected to the distal end side, and a main body portion that is rotatably connected to the base end side of the arm. And. The arm is composed of a first arm portion and a second arm portion that are rotatably connected to each other. The main body includes a motor storage chamber in which the base end side of the arm is rotatably connected, and a base that rotatably supports the motor storage chamber. A motor for rotating the hand, the second arm portion, and the first arm portion is disposed inside the motor storage chamber.

  Further, in the industrial robot described in Patent Document 1, the hand is connected to the distal end side of the second arm portion. The proximal end side of the second arm portion is connected to the distal end side of the first arm portion, and the proximal end side of the first arm portion is rotatably connected to the motor storage chamber. The hand, the second arm part, the first arm part, the motor storage chamber and the base are arranged in this order from the upper side in the vertical direction. The second arm part, the first arm part, and the motor storage chamber are disposed in a vacuum. The motor storage chamber is formed in a hollow shape. In the motor storage chamber, airtightness is ensured, and the inside of the motor storage chamber is at atmospheric pressure.

JP 2008-6535 A

  In recent years, there is a need in the market for an industrial robot that can transport an object to be transported such as a glass substrate in a vacuum at a high temperature. When an industrial robot described in Patent Document 1 is used to transfer a high-temperature transfer object in a vacuum, the temperature of the first arm unit and the second arm unit rises and the arm thermally expands. Due to the thermal expansion, a deviation occurs between the actual trajectory of the connecting portion between the arm and the hand and the trajectory of the connecting portion when the arm is not thermally expanded.

  In the industrial robot described in Patent Document 1, the hand on which the object to be transported is connected to the distal end side of the second arm portion, the proximal end side of the second arm portion is connected to the first arm portion, and the hand Is disposed above the second arm portion, and the first arm portion is disposed below the second arm portion. Therefore, when a high-temperature transfer object is transferred by this industrial robot, the temperature of the first arm portion and the temperature of the second arm portion vary, and the connecting portion between the arm and the hand is displaced in an irregular direction. There is a risk of it happening. Therefore, when a high-temperature transfer object is transported by this industrial robot, there is a change in the deviation amount between the actual locus of the connecting portion between the arm and the hand and the locus of this connecting portion when the arm is not thermally expanded. There is a risk that the hand will not be able to operate properly due to an increase in size.

  In addition, when an industrial robot described in Patent Document 1 is used to transport a high-temperature transport object in a vacuum, radiant heat from the transport object or radiant heat from the wall of a vacuum chamber in which the industrial robot is disposed. The temperature of the arm rises due to the influence of etc. In the industrial robot described in Patent Document 1, since the hand on which the object to be transported is disposed above the first arm part and the second arm part, using this industrial robot, When the conveyance object is conveyed, the temperature of the upper surface side portions of the first arm portion and the second arm portion becomes higher than the temperature of the lower surface side portions of the first arm portion and the second arm portion. That is, the temperature of the upper surface side portion of the arm is higher than the temperature of the lower surface side portion of the arm.

  In some industrial robots, the hand is arranged above the first arm and below the second arm. In this industrial robot, since the hand on which the object to be transported is arranged above the first arm part, when the industrial object is used to transport a high-temperature object to be transported, the first arm part The temperature of the upper surface portion of the first arm portion becomes higher than the temperature of the lower surface portion of the first arm portion. Further, in this industrial robot, the hand is disposed below the second arm part, and the object to be transported mounted on the hand is also disposed below the second arm part. According to the study, even when a high-temperature transfer object is transferred using this industrial robot, the temperature of the upper surface portion of the second arm portion becomes higher than the temperature of the lower surface portion of the second arm portion. That is, even in this industrial robot, the temperature of the upper surface portion of the arm is higher than the temperature of the lower surface portion of the arm. In addition, it is estimated that the phenomenon that the temperature of the upper surface portion of the second arm portion becomes higher than the temperature of the lower surface portion of the second arm portion is caused by the influence of radiant heat from the wall surface of the vacuum chamber.

  When transporting a high-temperature object to be transported, if the temperature of the upper surface portion of the arm is higher than the temperature of the lower surface portion of the arm, the amount of thermal deformation of the upper surface portion of the arm is greater than the amount of thermal deformation of the lower surface portion. growing. Therefore, there is a possibility that the arm is thermally deformed so that the tip end side of the arm is lowered, and it is impossible to appropriately convey the object to be conveyed by the hand.

  Therefore, the problem of the present invention is that an industrial robot that transports a transport target object in a vacuum can appropriately transport the transport target object with a hand even when transporting a high-temperature transport target object. It is to provide an industrial robot.

  In order to solve the above problems, the industrial robot of the present invention cools the inside of the arm, the hand on which the object to be transported is mounted, the arm that is formed in a hollow shape and the hand is connected to the tip side, and A hand and an arm are arranged in a vacuum, and the arm includes a plurality of arm portions that are formed in a hollow shape and connected to each other so as to be rotatable relative to each other. In each of the plurality of arm portions, a temperature sensor for measuring the temperature inside the arm portion is disposed, and the cooling mechanism individually has the inside of each of the plurality of arm portions. The interior of each of the plurality of arm portions is individually cooled based on the detection result of the temperature sensor.

  In the industrial robot of the present invention, the inside of the plurality of arm portions formed in a hollow shape is at atmospheric pressure, and the temperature for measuring the temperature inside the arm portion inside each of the plurality of arm portions. A sensor is arranged. In the present invention, the cooling mechanism can individually cool each of the plurality of arm portions, and individually cools each of the plurality of arm portions based on the detection result of the temperature sensor. doing. Therefore, in this invention, it becomes possible to manage each temperature of a several arm part based on the detection result in a temperature sensor. Therefore, in the present invention, even if a position shift occurs in the connection portion between the arm and the hand due to the thermal expansion of the arm, the direction of the position shift of the connection portion can be a regular direction. As a result, in the present invention, even if the arm is constituted by a plurality of arm portions, the actual trajectory of the connecting portion between the arm and the hand when the high-temperature transfer object is transferred, and the arm is not thermally expanded. It is possible to suppress a change in the amount of deviation from the trajectory of this connecting portion. Therefore, in the present invention, the hand can be appropriately operated.

  In the present invention, it is preferable that the cooling mechanism individually cools the insides of the plurality of arm portions so that the internal temperatures of the plurality of arm portions become substantially equal based on the detection result of the temperature sensor. With this configuration, since the expansion amounts per unit length of the plurality of arm portions are substantially equal, the displacement direction when the displacement occurs in the connecting portion between the arm and the hand is a more regular direction. It becomes possible to do. Therefore, it is possible to effectively suppress a change in the deviation amount between the actual locus of the connection portion between the arm and the hand when the high-temperature conveyance object is conveyed and the locus of this connection portion when the arm is not thermally expanded. As a result, the hand can be operated more appropriately.

  In the present invention, the cooling mechanism includes, for example, a cooling air supply port disposed in each of the plurality of arm portions, and the cooling air is supplied from the supply port based on the detection result of the temperature sensor. By adjusting the amount, the inside of each of the plurality of arm portions is individually cooled. In this case, it is possible to manage the temperatures of the plurality of arm portions with a relatively simple configuration. In this case, the main body portion that rotatably supports the plurality of arm portions is disposed in the atmosphere and the inside thereof is at atmospheric pressure, and the inside of the plurality of arm portions each formed in a hollow shape, The atmospheric pressure is maintained by communicating with the inside of the main body through the openings provided in the plurality of arms, and the cooling mechanism is provided from the inside of the main body to the inside of each of the plurality of arms. The cooling air can be supplied to the inside of each of the plurality of arm portions via the air piping. Specifically, the plurality of arm portions are connected to the first arm portion rotatably connected to the main body portion side, and are rotatably connected to the distal end side of the first arm portion, and the hand is connected to the distal end side. A hollow portion having a through-hole formed in the center of the joint portion connected through the opening provided in each of the first arm portion and the second arm portion. A reduction gear is provided, and the inside of the second arm portion communicates with the inside of the first arm portion through the through hole, and the air pipe is routed from the inside of the first arm portion to the inside of the second arm portion. The joint portion may be configured to be provided with a seal portion that prevents outflow of air from the connecting portion between the first arm portion and the second arm portion to the vacuum region.

  In this invention, it is preferable that the temperature sensor is arrange | positioned in the vicinity of the joint part which connects arm parts, and the vicinity of the joint part which connects an arm and a hand. If comprised in this way, it will become possible to estimate the temperature of the bearing arrange | positioned in a joint part based on the detection result in a temperature sensor. Therefore, it is possible to appropriately estimate the life of the bearing disposed at the joint based on the estimated temperature, and as a result, it is possible to replace the bearing at an appropriate time.

  In the present invention, the industrial robot preferably includes a motor that rotates at least one of the plurality of arm portions and the hand, and the temperature sensor is preferably disposed in the vicinity of the motor. If comprised in this way, it will become possible to detect abnormality of a motor based on the detection result in a temperature sensor, and as a result, it becomes possible to prevent damage to a motor.

  In the present invention, it is preferable that a plurality of temperature sensors having different detection temperatures are arranged inside each of the plurality of arm portions. If comprised in this way, it will become possible to raise the detection accuracy of the internal temperature of an arm part. Therefore, it becomes possible to manage each temperature of a plurality of arm parts with sufficient accuracy.

  In order to solve the above problems, the industrial robot of the present invention includes a hand on which an object to be transported is mounted and an arm to which the hand is connected to the tip side, and the hand and the arm are arranged in a vacuum. The arm is formed in a hollow shape, the inside of the arm is at atmospheric pressure, and a fan for sending air upward is arranged inside the arm.

  In the industrial robot of the present invention, a fan for sending air upward is arranged inside the arm. Therefore, in the present invention, when transporting a high-temperature transport object, it becomes possible to cool the upper surface side portion of the arm to suppress the temperature rise of the upper surface side portion of the arm, and to control the temperature of the upper surface side portion of the arm. Can be brought closer to the temperature of the lower surface side portion of the arm. Therefore, in the present invention, it is possible to bring the amount of thermal deformation of the upper surface side portion of the arm closer to the amount of thermal deformation of the lower surface side portion, and it is possible to suppress the thermal deformation of the arm whose tip side is lowered. As a result, in the present invention, even when a high-temperature conveyance object is conveyed, the conveyance object can be appropriately conveyed by the hand. Further, in the present invention, since the inside of the arm can be cooled using a fan, the amount of thermal deformation of the arm can be suppressed.

  In the present invention, the arm preferably includes a plurality of arm portions that are connected to each other so as to be relatively rotatable, and a fan is preferably disposed in each of the plurality of arm portions. If comprised in this way, even if it is a case where an arm is constituted by a plurality of arm parts, the upper surface side part of an arm can be cooled so that the whole temperature of the upper surface side part of the arm may become substantially equal. It becomes possible.

In the present invention, the main body portion that rotatably supports the plurality of arm portions is disposed in the atmosphere and the inside thereof is at atmospheric pressure, and the inside of the plurality of arm portions each formed in a hollow shape is It can be made to be maintained at atmospheric pressure by being connected through the openings of each other and also being connected to the inside of the main body. In addition, a cooling mechanism for cooling the inside of the arm is provided, the cooling mechanism includes an air pipe routed from the inside of the main body part to each of the plurality of arm parts, and the air pipe includes a plurality of air pipes. If the cooling air is supplied to the inside of each of the plurality of arm portions arranged in the arm portion, the inside of the arm portion can be reliably cooled.

  In the present invention, it is preferable that a fin for heat dissipation is formed on the upper surface inside the arm. If comprised in this way, since it becomes possible to apply the cooling air sent from a fan to the fin for heat radiation, it becomes possible to cool the upper surface side part of an arm effectively. Therefore, it is possible to effectively suppress the temperature rise of the upper surface side portion of the arm.

  In the present invention, the arm includes a flat upper surface portion that constitutes a part of the upper surface of the arm, the upper surface portion is formed with an opening penetrating in the vertical direction, and the arm is further fixed to the upper surface portion. It is preferable that a lid member that closes the opening from above is provided, and the fin is formed on the lower surface of the lid member. If comprised in this way, even if it is a case where a fin is formed in the upper surface inside the arm formed in a hollow shape, it becomes possible to form a fin easily.

  In the present invention, for example, the lid member is formed in a disc shape, and a plurality of annular fins having different diameters are formed concentrically on the lid member.

  In the present invention, the industrial robot preferably includes a cover member that covers substantially the entire arm, and the thermal conductivity of the cover member is preferably lower than the thermal conductivity of the arm. If comprised in this way, it will become possible to suppress effectively the transmission of the radiant heat from a conveyance target object and the radiant heat from the wall surface of the vacuum chamber in which an industrial robot is arrange | positioned to an arm.

  If a fan that sends air upward is not arranged inside the arm, the difference between the temperature of the upper surface portion of the arm and the temperature of the lower surface portion of the arm is eliminated, and the upper surface side of the arm In order to eliminate the difference between the thermal deformation amount of the portion and the thermal deformation amount of the lower surface side portion, it is preferable to cover only the upper surface side of the arm with the cover member. On the other hand, in this case, since the lower surface side of the arm is not covered with the cover member, the transmission of radiant heat from the conveyance object or the like to the arm cannot be effectively suppressed. On the other hand, in the present invention, since the fan that sends air upward is arranged inside the arm, if the cover member covers almost the entire arm, the temperature of the upper surface side portion of the arm While eliminating the difference from the temperature of the lower surface side portion of the arm, it is possible to effectively suppress the transmission of radiant heat from the conveyance object or the like to the arm.

  As described above, according to the present invention, in an industrial robot that transports a transport target object in a vacuum, even if a high-temperature transport target object is transported, the transport target object can be transported appropriately with a hand. become. In addition, even when the arm to which the hand is connected to the tip side is constituted by a plurality of arm portions that are connected to each other so as to be relatively rotatable, the hand can be appropriately operated when transferring a high-temperature transfer object. Is possible.

It is a top view of the industrial robot concerning an embodiment of the invention. It is sectional drawing of the base end side part and arm support part of an arm which are shown in FIG. It is sectional drawing of the arm shown in FIG. It is sectional drawing of the arm shown in FIG. It is an enlarged view of the E section of FIG. It is an enlarged view of the F section of FIG. (A) is sectional drawing of the cover member shown in FIG. 5, (B) is a figure which shows a cover member from the GG direction of (A). It is an enlarged view of the H section of FIG. It is an enlarged view of the J section of FIG. It is a top view of the industrial robot concerning other embodiment of this invention. It is a figure of the industrial robot concerning other embodiment of this invention, (A) is a top view, (B) is a side view.

  Hereinafter, embodiments of the present invention will be described with reference to the drawings.

(Schematic configuration of industrial robot)
FIG. 1 is a plan view of an industrial robot 1 according to an embodiment of the present invention. 2 is a cross-sectional view of the base end side portions of the arms 6 and 7 and the arm support portion 8 shown in FIG. FIG. 3 is a cross-sectional view of the arm 6 shown in FIG. 4 is a cross-sectional view of the arm 7 shown in FIG.

  The industrial robot 1 of this embodiment (hereinafter referred to as “robot 1”) is, for example, a glass substrate 2 (hereinafter referred to as “substrate 2”) for an organic EL (organic electroluminescence) display, which is an object to be transported. ). This robot 1 is used by being incorporated in an organic EL display manufacturing system (not shown), and conveys a high-temperature substrate 2.

  As shown in FIG. 1, the robot 1 includes two hands 4 and 5 on which a substrate 2 is mounted, an arm 6 to which the hand 4 is pivotably connected to the distal end, and a hand 5 that rotates to the distal end. An arm 7 that is movably connected, an arm support portion 8 to which the base ends of the arms 6 and 7 are fixed, and a main body portion 9 to which the arm support portion 8 is rotatably connected are provided. The hands 4 and 5, the arms 6 and 7, and the arm support portion 8 are arranged on the upper side of the main body portion 9.

  The upper ends of the hands 4 and 5, the arms 6 and 7, the arm support portion 8, and the main body portion 9 are arranged inside a vacuum chamber constituting an organic EL display manufacturing system. That is, the upper ends of the hands 4 and 5, the arms 6 and 7, the arm support 8 and the main body 9 are arranged in the vacuum region VR (in vacuum), and the portion excluding the upper end of the main body 9 is Arranged in the atmospheric region AR (in the atmosphere) (see FIG. 2), the robot 1 transports the substrate 2 mounted on the hands 4 and 5 in a vacuum.

  The hands 4 and 5 include a base portion 11 connected to the arms 6 and 7 and two fork portions 12 on which the substrate 2 is mounted. The fork portion 12 is formed in a straight line shape. Further, the two fork portions 12 are arranged in parallel with a predetermined distance therebetween.

  The main body portion 9 includes a case body 13 formed in a hollow shape, and a hollow rotation shaft 14 fixed to the lower surface of the arm support portion 8 and formed to communicate with the inside of the arm support portion 8. Yes. The rotating shaft 14 is formed in an elongated cylindrical shape whose axial direction is the vertical direction. The upper end of the rotating shaft 14 is fixed to the lower surface of the arm support portion 8. The upper end portion of the rotating shaft 14 protrudes upward from the upper end surface of the case body 13, and the portion of the rotating shaft 14 excluding the upper end portion is accommodated inside the case body 13.

  A motor (not shown) for rotating the arm support portion 8 with respect to the case body 13 is disposed inside the case body 13. For example, the lower end side of the rotating shaft 14 is connected to the motor via a pulley, a belt, and a speed reducer. Further, an elevating mechanism (not shown) that elevates and lowers the rotating shaft 14 and the like is disposed inside the case body 13. The upper end portion of the case body 13 is disposed in the vacuum region VR, and the portion of the case body 13 excluding the upper end portion is disposed in the atmospheric region AR. The inside of the case body 13 and the rotating shaft 14 is at atmospheric pressure, and a magnetic fluid seal and a bellows (not shown) for preventing the outflow of air to the vacuum region VR are disposed on the outer peripheral side of the rotating shaft 14. Has been.

  The arm support portion 8 is formed in a hollow shape, and includes a support portion main body 15 and three lid members 16. The lid member 16 is made of an aluminum alloy. The lid member 16 is formed in a disc shape. The support body 15 is formed of an aluminum alloy. The support body 15 includes an upper surface 15a that constitutes the upper surface of the support body 15 and a lower surface that constitutes the lower surface of the support body 15 and is opposed to the upper surface 15a in a substantially parallel manner with a predetermined gap. It is comprised from the part 15b and the side part 15c which connects the outer peripheral end of the upper surface part 15a, and the outer peripheral end of the lower surface part 15b. The upper surface portion 15a and the lower surface portion 15b are formed in an elongated and substantially oval flat plate shape, and face each other in the vertical direction. The side surface portion 15c is formed in a cylindrical shape having an elongated oval shape when viewed from the vertical direction.

  Three circular openings 15d and 15e are formed in the upper surface portion 15a so as to penetrate in the vertical direction. Of the three openings 15d and 15e, one opening 15d is formed at the center of the upper surface 15a, and the remaining two openings 15e are the longitudinal sides of the upper surface 15a formed in a substantially oval shape. It is formed on both ends in the direction. The lower surface portion 15b is also formed with three circular openings 15f and 15g penetrating in the vertical direction. Of the three openings 15f and 15g, one opening 15f is formed at the center of the lower surface 15b, and the remaining two openings 15g are the longitudinal length of the lower surface 15b formed in a substantially oval shape. It is formed on both ends in the direction.

  The upper end of the rotating shaft 14 is fixed to the lower surface of the lower surface portion 15b. The rotation shaft 14 is fixed to the lower surface of the lower surface portion 15b so as to surround the opening 15f, and the inner peripheral side of the rotation shaft 14 and the inside of the arm support portion 8 communicate with each other. That is, the inside of the arm support portion 8 communicates with the inside of the case body 13 that is the main body portion 9 through the opening 15f, and the inside of the arm support portion 8 is at atmospheric pressure. As shown in FIG. 2, the opening 15 d is closed from the upper side by the lid member 16, and the two openings 15 g are closed from the lower side by the lid member 16. Between the support part main body 15 and the cover member 16, the cyclic | annular seal member (illustration omitted) which prevents the outflow of the air to the vacuum area | region VR is arrange | positioned.

  The arm 6 is composed of two arm parts, a first arm part 20 and a second arm part 21, which are connected to each other so as to be relatively rotatable. The first arm part 20 and the second arm part 21 are formed in a hollow shape. That is, the entire arm 6 is formed in a hollow shape. The proximal end side of the first arm portion 20 is fixed to the arm support portion 8. The proximal end side of the second arm portion 21 is rotatably connected to the distal end side of the first arm portion 20. The hand 4 is rotatably connected to the distal end side of the second arm portion 21.

  A connecting portion between the first arm portion 20 and the second arm portion 21 is a joint portion 22. A connecting portion between the arm 6 and the hand 4 (that is, a connecting portion between the second arm portion 21 and the hand 4) is a joint portion 23. The second arm portion 21 is disposed above the first arm portion 20, and the hand 4 is disposed above the second arm portion 21.

  The arm 7 is composed of two arm portions, a first arm portion 25 and a second arm portion 26, which are connected to each other so as to be relatively rotatable. The first arm part 25 and the second arm part 26 are formed in a hollow shape. That is, the entire arm 7 is formed in a hollow shape. The proximal end side of the first arm portion 25 is fixed to the arm support portion 8. The proximal end side of the second arm portion 26 is rotatably connected to the distal end side of the first arm portion 25. The hand 5 is rotatably connected to the distal end side of the second arm portion 26.

  A connecting portion between the first arm portion 25 and the second arm portion 26 is a joint portion 27. A connecting portion between the arm 7 and the hand 5 (that is, a connecting portion between the second arm portion 26 and the hand 5) is a joint portion 28. The second arm portion 26 is disposed above the first arm portion 25. The hand 5 is disposed below the second arm portion 26 and above the first arm portion 25.

(Arm configuration, arm internal configuration and joint configuration)
FIG. 5 is an enlarged view of a portion E in FIG. FIG. 6 is an enlarged view of a portion F in FIG. 7A is a cross-sectional view of the lid member 32 shown in FIG. 5, and FIG. 7B is a diagram showing the lid member 32 from the GG direction of FIG. 7A. FIG. 8 is an enlarged view of a portion H in FIG. FIG. 9 is an enlarged view of a portion J in FIG.

  The first arm unit 20 includes an arm unit main body 31, three lid members 32, and one lid member 33. The arm part body 31 is formed of an aluminum alloy. The arm unit body 31 includes an upper surface part 31a constituting the upper surface of the arm part body 31 and a lower surface constituting the lower surface of the arm part body 31 and facing the upper surface part 31a in a substantially parallel manner with a predetermined gap. It is comprised from the part 31b and the side part 31c which connects the outer periphery end of the upper surface part 31a, and the outer periphery end of the lower surface part 31b. The upper surface portion 31a and the lower surface portion 31b are formed in an elongated and substantially oval flat plate shape, and face each other in the vertical direction. The upper surface part 31 a constitutes a part of the upper surface of the first arm part 20, and the lower surface part 31 b constitutes a part of the lower surface of the first arm part 20. The side surface portion 31c is formed in a cylindrical shape having an elongated oval shape when viewed from the vertical direction.

  In the upper surface portion 31a, four circular openings 31d and 31e are formed so as to penetrate in the vertical direction. That is, openings 31 d and 31 e communicating with the inside of the first arm portion 20 are formed in the upper surface portion 31 a. The four openings 31d and 31e are formed at a predetermined interval in the longitudinal direction of the upper surface portion 31a formed in a substantially oval shape. In this embodiment, the opening 31e is formed on the most distal end side of the upper surface portion 31a, and the remaining three openings 31d are formed on the proximal end side of the upper surface portion 31a with respect to the opening 31e. The lower surface portion 31b is also formed with two circular openings 31f and 31g penetrating in the vertical direction. That is, openings 31 f and 31 g communicating with the inside of the first arm portion 20 are formed in the lower surface portion 31 b. The opening 31f is formed on the distal end side of the lower surface portion 31b, and the opening 31g is formed on the proximal end side of the lower surface portion 31b.

  The second arm portion 21 includes an arm portion main body 34, two lid members 32, and two lid members 33. The arm part main body 34 is formed of an aluminum alloy. The arm portion main body 34 includes an upper surface portion 34a that constitutes the upper surface of the arm portion main body 34, and a lower surface that constitutes the lower surface of the arm portion main body 34 and is opposed to the upper surface portion 34a substantially in parallel through a predetermined gap. It is comprised from the part 34b and the side part 34c which connects the outer peripheral end of the upper surface part 34a, and the outer peripheral end of the lower surface part 34b. The upper surface portion 34a and the lower surface portion 34b are formed in an elongated, substantially oval flat plate shape, and face each other in the vertical direction. The upper surface part 34 a constitutes a part of the upper surface of the second arm part 21, and the lower surface part 34 b constitutes a part of the lower surface of the second arm part 21. The side surface portion 34c is formed in a cylindrical shape having an elongated oval shape when viewed from the vertical direction.

  In the upper surface portion 34a, four circular openings 34d, 34e, 34f are formed so as to penetrate in the vertical direction. In other words, openings 34d to 34f communicating with the inside of the second arm portion 21 are formed in the upper surface portion 34a. The four openings 34d to 34f are formed at a predetermined interval in the longitudinal direction of the upper surface 34a formed in a substantially oval shape. In this embodiment, an opening 34e is formed on the most distal end side of the upper surface portion 34a, an opening 34f is formed on the most proximal side of the upper surface portion 34a, and the remaining two openings 34d are the opening 34e and the opening portion. 34f. The lower surface portion 34b is also formed with two circular openings 34g and 34h penetrating in the vertical direction. That is, openings 34g and 34h that lead to the inside of the second arm portion 21 are formed in the lower surface portion 34b. The opening 34g is formed on the distal end side of the lower surface portion 34b, and the opening 34h is formed on the proximal end side of the lower surface portion 34b.

  As described above, the base end side of the first arm portion 20 is fixed to the arm support portion 8. Specifically, the base end side of the first arm portion 20 is fixed to the arm support portion 8 in a state where the lower surface of the lower surface portion 31b of the arm portion main body 31 is in close contact with the upper surface of the upper surface portion 15a of the support portion main body 15. . Further, when viewed from the vertical direction, the base end side of the first arm portion 20 is the arm support portion 8 so that the center of the opening portion 15e of the upper surface portion 15a substantially coincides with the center of the opening portion 31g of the lower surface portion 31b. It is fixed to. Therefore, the inside of the first arm portion 20 communicates with the inside of the arm support portion 8 via the opening portion 15e and the opening portion 31g, and the inside of the first arm portion 20 is at atmospheric pressure. An annular seal member (not shown) that prevents the outflow of air to the vacuum region VR is disposed between the support body 15 and the arm body 31.

  The second arm portion 21 is rotated with respect to the first arm portion 20 and the hand 4 is moved with respect to the second arm portion 21 inside the proximal end side of the first arm portion 20 and the inside of the arm support portion 8. A motor 35 that rotates is disposed. The central portion of the motor 35 in the vertical direction is disposed in the opening 15e and the opening 31g. The upper end side of the motor 35 is disposed inside the base end side of the first arm portion 20 and the lower end side of the motor 35. Is arranged inside the arm support 8. The output shaft of the motor 35 protrudes upward, and a pulley 36 is fixed to the output shaft.

  The joint portion 22 includes a speed reducer 37 that decelerates the rotation of the motor 35 and transmits it to the second arm portion 21. The speed reducer 37 is a hollow speed reducer in which a through hole is formed at the center in the radial direction. Therefore, the inside of the second arm portion 21 communicates with the inside of the first arm portion 20 through the through hole of the hollow speed reducer, and the inside of the second arm portion 21 is at atmospheric pressure. That is, in this embodiment, the inside of the arm 6 is at atmospheric pressure. The joint unit 23 includes a speed reducer 38 that decelerates and transmits the rotation of the motor 35 to the hand 4. The speed reducer 38 is a hollow speed reducer in which a through hole is formed at the center in the radial direction.

  In addition, the joint portion 22 includes a magnetic fluid seal 39 that prevents air from flowing out from the connection portion between the first arm portion 20 and the second arm portion 21 to the vacuum region VR. The magnetic fluid seal 39 includes a substantially cylindrical case body 40 constituting an outer peripheral side portion thereof, and a substantially cylindrical inner peripheral side member 41 that is rotatably held on the inner peripheral side of the case body 40. . Between the case body 40 and the inner peripheral member 41 in the radial direction, a bearing seal portion 42 having a bearing, a permanent magnet, and a magnetic fluid is disposed. Similarly, the joint portion 23 includes a magnetic fluid seal 43 that prevents the outflow of air from the connection portion between the second arm portion 21 and the hand 4 to the vacuum region VR. The magnetic fluid seal 43 is configured similarly to the magnetic fluid seal 39, and includes a case body 44, an inner peripheral side member 45, and a bearing seal portion 46.

  A pulley 49 is fixed to the lower end side of the input shaft of the speed reducer 37. The pulley 49 is disposed inside the distal end side of the first arm unit 20. A belt 50 is stretched between the pulley 36 and the pulley 49. A pulley 51 is fixed to the upper end side of the input shaft of the speed reducer 37. The pulley 51 is disposed inside the base end side of the second arm portion 21. A pulley 52 is rotatably mounted inside the second arm portion 21. A belt 53 is stretched between the pulley 51 and the pulley 52.

  The distal end side of the first arm portion 20 is fixed to the output shaft of the speed reducer 37. Specifically, the distal end side of the first arm portion 20 is fixed to the output shaft of the speed reducer 37 via the inner peripheral side member 41 of the magnetic fluid seal 39. The output shaft of the speed reducer 37 is fixed to the inner peripheral side of the inner peripheral member 41. The inner peripheral side member 41 is located on the distal end side of the first arm portion 20 so that a part of the outer peripheral surface thereof is in contact with the inner peripheral surface of the opening 31e and a part thereof is in contact with the upper surface of the upper surface portion 31a. It is fixed. An annular seal member (not shown) that prevents air from flowing out into the vacuum region VR is disposed between the upper surface portion 31a and the inner peripheral side member 41.

  The base end side of the second arm portion 21 is fixed to the case body of the speed reducer 37. Specifically, the base end side of the second arm portion 21 is fixed to the case body of the speed reducer 37 via the case body 40 of the magnetic fluid seal 39. The case body of the speed reducer 37 is fixed to the inner peripheral side of the case body 40. The case body 40 is fixed to the proximal end side of the second arm portion 21 such that a part of the outer peripheral surface thereof is in contact with the inner peripheral surface of the opening 34h and a part thereof is in contact with the lower surface of the lower surface portion 34b. Has been. An annular seal member (not shown) that prevents the outflow of air to the vacuum region VR is disposed between the lower surface portion 34b and the case body 40.

  A pulley 56 is fixed to the lower end side of the input shaft of the speed reducer 38. The pulley 56 is disposed inside the distal end side of the second arm portion 21. A belt 57 is stretched between the pulley 56 and the pulley 52. The belt 53 and the belt 57 are engaged with the pulley 52 in a state shifted in the vertical direction, and the belt 57 is disposed below the belt 53. The base 11 of the hand 4 is fixed to the output shaft of the speed reducer 38. Specifically, the base 11 of the hand 4 is fixed to the output shaft of the speed reducer 38 via the inner peripheral side member 45 of the magnetic fluid seal 43. The output shaft of the speed reducer 38 is fixed to the inner peripheral side of the inner peripheral side member 45. The inner circumferential side member 45 is fixed to the base 11 of the hand 4. An annular seal member (not shown) that prevents the outflow of air to the vacuum region VR is disposed between the base 11 of the hand 4 and the inner peripheral member 45.

  The distal end side of the second arm portion 21 is fixed to the case body of the speed reducer 38. Specifically, the distal end side of the second arm portion 21 is fixed to the case body of the speed reducer 38 via the case body 44 of the magnetic fluid seal 43. The case body of the speed reducer 38 is fixed to the inner peripheral side of the case body 44. The case body 44 is fixed to the distal end side of the second arm portion 21 so that a part of the outer peripheral surface thereof is in contact with the inner peripheral surface of the opening 34e and a part thereof is in contact with the upper surface of the upper surface portion 34a. ing. An annular seal member (not shown) that prevents air from flowing out to the vacuum region VR is disposed between the upper surface portion 34a and the case body 44.

  The lid members 32 and 33 are made of an aluminum alloy. The lid members 32 and 33 are formed in a disc shape. Both surfaces of the lid member 33 are formed in a planar shape. On the other hand, on one surface of the lid member 32, as shown in FIG. 7, fins 32a for heat dissipation are formed. In this embodiment, a plurality of annular fins 32a having different diameters are formed on one surface of the lid member 32, and the plurality of fins 32a are arranged concentrically. Further, in this embodiment, as shown in FIG. 7A, a plurality of annular recesses that are recessed from one surface of the lid member 32 toward the other surface are formed, so that the plurality of fins 32a are formed. Is formed. Note that the plurality of fins 32 a may be configured by convex portions protruding from one surface of the lid member 32.

  The opening 31 f of the first arm portion 20 is closed from below by the lid member 33. The opening 34 f of the second arm portion 21 is closed from above by the lid member 33, and the opening 34 g of the second arm portion 21 is closed from below by the lid member 33. The opening 31 d of the first arm part 20 and the opening 34 d of the second arm part 21 are closed from above by the lid member 32. The lid member 32 is fixed so that the surface on which the fins 32a are formed faces downward. That is, the fin 32 a is formed on the lower surface of the lid member 32, and the heat radiating fin 32 a is formed on the upper surface inside the arm 6. An annular seal member (not shown) that prevents the outflow of air to the vacuum region VR is disposed between the arm main bodies 31 and 34 and the lid members 32 and 33.

  As shown in FIG. 8, the first arm portion 25 is configured similarly to the first arm portion 20, and includes an arm portion main body 31, three lid members 32, and one lid member 33. . As shown in FIG. 9, the second arm portion 26 is configured in the same manner as the second arm portion 21, and includes an arm portion main body 34, two lid members 32, and two lid members 33. ing. Therefore, detailed description of the configuration of the first arm portion 25 and the configuration of the second arm portion 26 is omitted.

  The base end side of the first arm portion 25 is fixed to the support portion main body 15 of the arm support portion 8 in the same manner as the base end side of the first arm portion 20. The inside of the first arm portion 25 communicates with the inside of the arm support portion 8 through the opening portion 15e and the opening portion 31g, and the inside of the first arm portion 25 is at atmospheric pressure. The second arm portion 26 is rotated with respect to the first arm portion 25 and the hand 5 is moved with respect to the second arm portion 26 inside the base end side of the first arm portion 25 and the inside of the arm support portion 8. A motor 65 that rotates is disposed. The motor 65 is disposed in the same manner as the motor 35 disposed inside the base end side of the first arm portion 20 and inside the arm support portion 8. The output shaft of the motor 65 protrudes upward, and a pulley 66 is fixed to the output shaft.

  The joint portion 27 includes a speed reducer 67 that decelerates the rotation of the motor 65 and transmits it to the second arm portion 26. Similar to the speed reducer 37, the speed reducer 67 is a hollow speed reducer in which a through hole is formed at the center in the radial direction. Therefore, the inside of the second arm portion 26 communicates with the inside of the first arm portion 25 through the through hole of the hollow speed reducer, and the inside of the second arm portion 26 is at atmospheric pressure. That is, in this embodiment, the inside of the arm 7 is at atmospheric pressure. The joint portion 28 includes a speed reducer 68 that decelerates and transmits the rotation of the motor 65 to the hand 5. The reducer 68 is a hollow reducer in which a through hole is formed at the center in the radial direction, like the reducer 38.

  Similarly to the joint portion 22, the joint portion 27 includes a magnetic fluid seal 39 that prevents air from flowing out from the connection portion between the first arm portion 25 and the second arm portion 26 to the vacuum region VR. Similar to the joint portion 23, the joint portion 28 includes a magnetic fluid seal 43 that prevents air from flowing out from the connecting portion of the second arm portion 26 and the hand 5 to the vacuum region VR.

  The upper end of a rotating shaft 69 formed in a cylindrical shape is fixed to the lower end of the input shaft of the speed reducer 67. A pulley 70 is fixed to the lower end side of the rotating shaft 69. The pulley 70 is disposed inside the distal end side of the first arm portion 25. A belt 71 is bridged between the pulley 66 and the pulley 70. A pulley 72 is fixed to the upper end side of the input shaft of the speed reducer 67. The pulley 72 is disposed inside the proximal end side of the second arm portion 26.

  The distal end side of the first arm portion 25 is fixed to the output shaft of the speed reducer 67. Specifically, the distal end side of the first arm portion 25 is fixed to the output shaft of the speed reducer 67 via the inner peripheral side member 41 of the magnetic fluid seal 39 and the spacer 73. The spacer 73 is formed in a substantially cylindrical shape. The spacer 73 is disposed so as to cover the outer peripheral side of the rotation shaft 69.

  The output shaft of the speed reducer 67 is fixed to the inner peripheral side of the inner peripheral member 41. The inner peripheral side member 41 is fixed to the upper end of the spacer 73 such that a part of the outer peripheral surface thereof contacts the inner peripheral surface of the spacer 73 and a part thereof contacts the upper end surface of the spacer 73. . The lower end of the spacer 73 is fixed to the distal end side of the first arm portion 25 so as to contact the upper surface of the upper surface portion 31a. A bearing holding member 74 is fixed to the lower end side of the spacer 73. The bearing holding member 74 is fixed to the lower end side of the spacer 73 so that a part of the outer peripheral surface thereof contacts the inner peripheral surface of the spacer 73 and a part thereof contacts the lower end surface of the spacer 73. Further, a part of the bearing holding member 74 is disposed on the inner peripheral side of the opening 31e. A bearing 75 that rotatably supports the rotating shaft 69 is fixed to the bearing holding member 74. An annular seal member (not shown) is provided between the inner peripheral member 41 and the upper end of the spacer 73 and between the upper surface portion 31a and the lower end of the spacer 73 to prevent outflow of air to the vacuum region VR. ) Is arranged.

  The base end side of the second arm portion 26 is fixed to the case body of the speed reducer 67. The base end side of the second arm portion 26 is fixed to the case body of the speed reducer 67 in the same manner as the base end side of the second arm portion 21 is fixed to the case body of the speed reducer 37. That is, the base end side of the second arm portion 26 is fixed to the case body of the speed reducer 67 via the case body 40 of the magnetic fluid seal 39.

  A pulley 76 is fixed to the upper end side of the input shaft of the speed reducer 68. The pulley 76 is disposed inside the distal end side of the second arm portion 26. A belt 77 is stretched between the pulley 72 and the pulley 76. The base 11 of the hand 5 is fixed to the output shaft of the speed reducer 68. The base 11 of the hand 5 is fixed to the output shaft of the speed reducer 68 in the same manner as the base 11 of the hand 4 is fixed to the output shaft of the speed reducer 38. That is, the base 11 of the hand 5 is fixed to the output shaft of the speed reducer 68 via the inner peripheral side member 45 of the magnetic fluid seal 43.

  The distal end side of the second arm portion 26 is fixed to the case body of the speed reducer 68. Specifically, the distal end side of the second arm portion 26 is fixed to the case body of the speed reducer 68 via the case body 44 of the magnetic fluid seal 43. The case body of the speed reducer 68 is fixed to the inner peripheral side of the case body 44. The case body 44 is fixed to the distal end side of the second arm portion 26 so that a part of the outer peripheral surface thereof contacts the inner peripheral surface of the opening 34g and a part thereof contacts the lower surface of the lower surface 34b. ing. An annular seal member (not shown) that prevents air from flowing out to the vacuum region VR is disposed between the lower surface portion 34b and the case body 44.

  The opening 31 f of the first arm portion 25 is closed from below by the lid member 33. The openings 34 e and 34 f of the second arm portion 26 are closed from above by the lid member 33. The opening 31 d of the first arm portion 25 and the opening 34 d of the second arm portion 26 are closed from above by the lid member 32. The lid member 32 is fixed so that the surface on which the fins 32a are formed faces downward. That is, the fin 32 a is formed on the lower surface of the lid member 32, and the heat radiating fin 32 a is formed on the upper surface inside the arm 7.

(Configuration of cooling mechanism, configuration of temperature sensor and configuration of cover member)
As described above, the robot 1 transports the high-temperature substrate 2. Therefore, the temperature of the arms 6 and 7 rises due to radiant heat from the substrate 2, radiant heat from the wall surface of the vacuum chamber in which the robot 1 is installed, and the like. The robot 1 of this embodiment includes a cooling mechanism for cooling the inside of the arms 6 and 7 whose temperature rises. The robot 1 also suppresses the transmission of radiant heat to the temperature sensor 80 for measuring the internal temperatures of the first arm portions 20 and 25 and the second arm portions 21 and 26 and the arms 6 and 7 and the arm support portion 8. Cover members 81 to 85 are provided.

  The robot 1 according to the present embodiment includes an air pipe 87 for cooling the motor 35 and supplying cooling air to the inside of the first arm unit 20 as a cooling mechanism for cooling the inside of the arms 6 and 7, An air pipe 88 for supplying cooling air to the inside of the two-arm part 21, an air pipe 89 for cooling the motor 65 and supplying cooling air to the inside of the first arm part 25, and a second arm An air pipe 90 for supplying cooling air to the inside of the section 26 and a plurality of fans (blowers) 91 disposed inside the arms 6 and 7 are provided.

  The air pipes 87 to 90 are metal pipes formed of a metal such as an aluminum alloy or a copper alloy, for example. Or piping formed with a fluorine tube etc. may be sufficient. The base ends of the air pipes 87 to 90 are connected to an electromagnetic valve (not shown) disposed inside the case body 13 of the main body 9. In this embodiment, four solenoid valves to which the respective base ends of the air pipes 87 to 90 are connected are arranged inside the case body 13, and the supply amount of cooling air is adjusted for each of the air pipes 87 to 90. It is possible to do. The four solenoid valves are connected to a compressed air supply device (not shown) disposed inside or outside the case body 13 via a predetermined pipe.

  The air pipes 87 and 88 are routed from the inside of the case body 13 toward the arm 6 so as to pass through the inner peripheral side of the rotating shaft 14 and the opening 15f. The front end side of the air pipe 87 is wound around the outer peripheral surface of the motor 35. The distal end of the air pipe 87 serving as a cooling air supply port is disposed inside the base end side of the first arm portion 20 and is used for cooling from the air pipe 87 to the inside of the base end side of the first arm portion 20. Air is supplied. The air pipe 88 is routed around the insides of the first arm part 20 and the second arm part 21 so as to pass through the openings 15e and 31g and a through hole formed at the shaft center of the speed reducer 37. The front end of the air pipe 88 that serves as a cooling air supply port is disposed inside the front end side of the second arm portion 21, and cooling air flows from the air pipe 88 into the front end side of the second arm portion 21. Supplied.

  The air pipes 89 and 90 are routed from the inside of the case body 13 toward the arm 7 so as to pass through the inner peripheral side of the rotating shaft 14 and the opening 15f. The front end side of the air pipe 89 is wound around the outer peripheral surface of the motor 65. The front end of the air pipe 89 serving as a cooling air supply port is disposed inside the base end side of the first arm portion 25, and is used for cooling from the air pipe 89 to the base end side inside the first arm portion 25. Air is supplied. The air pipe 90 is arranged inside the first arm portion 25 and the second arm portion 26 so as to pass through the openings 15e and 31g, the through hole formed in the inner peripheral side of the rotating shaft 69 and the shaft center of the speed reducer 67. Has been routed around. The front end of the air pipe 90 that serves as a cooling air supply port is disposed inside the front end side of the second arm portion 26, and cooling air flows from the air pipe 90 into the front end side of the second arm portion 26. Supplied.

  The temperature sensor 80 is disposed inside each of the first arm portions 20 and 25 and the second arm portions 21 and 26. In the present embodiment, a plurality of temperature sensors 80 having different detection temperatures are arranged as a set and are arranged inside the first arm portions 20 and 25 and the second arm portions 21 and 26, respectively. Specifically, three temperature sensors 80 having different detection temperatures are arranged as a set and are arranged inside the first arm portions 20 and 25 and the second arm portions 21 and 26, respectively.

  Inside the first arm unit 20, one set of temperature sensors 80 is disposed in the vicinity of the motor 35 and in the vicinity of the joint unit 22. That is, in the first arm unit 20, one set of temperature sensors 80 is disposed on the proximal end side and the distal end side of the first arm unit 20. A temperature sensor 80 disposed in the vicinity of the motor 35 is attached to the upper end side of the motor 35. The temperature sensor 80 arranged in the vicinity of the joint portion 22 is attached to the upper surface of the lower surface portion 31b. Inside the second arm portion 21, one set of temperature sensors 80 is disposed in the vicinity of the joint portion 23. That is, one set of temperature sensors 80 is disposed on the distal end side of the second arm portion 21 inside the second arm portion 21. The temperature sensor 80 is attached to the upper surface of the lower surface portion 34b.

  Inside the first arm portion 25, one set of temperature sensors 80 is disposed in the vicinity of the motor 65 and in the vicinity of the joint portion 27. That is, one set of temperature sensors 80 is disposed on the proximal end side and the distal end side of the first arm portion 25 inside the first arm portion 25. The temperature sensor 80 disposed in the vicinity of the motor 65 is attached to the upper end side of the motor 65. The temperature sensor 80 disposed in the vicinity of the joint portion 27 is attached to the upper surface of the lower surface portion 31b. Inside the second arm portion 26, one set of temperature sensors 80 is arranged in the vicinity of the joint portion 28. That is, one set of temperature sensors 80 is disposed on the distal end side of the second arm portion 26 inside the second arm portion 26. The temperature sensor 80 is attached to the upper surface of the lower surface portion 34b.

  As described above, in the present embodiment, the supply amount of the cooling air can be adjusted for each of the air pipes 87 to 90, and the first arm portions 20 and 25 and the second arm portions 21 and 26 can be adjusted. Each interior can be individually cooled. In the present embodiment, the interiors of the first arm portions 20 and 25 and the second arm portions 21 and 26 are individually cooled based on the detection result of the temperature sensor 80. In other words, in the present embodiment, the first arm portions 20 and 25 and the second arm portions 25 and 2 are adjusted by adjusting the amount of cooling air supplied from each of the air pipes 87 to 90 based on the detection result of the temperature sensor 80. The inside of each of the arm portions 21 and 26 is individually cooled.

  Specifically, based on the detection results of the temperature sensor 80 disposed inside the first arm unit 20 and the temperature sensor 80 disposed inside the second arm unit 21, the inside of the first arm unit 20. The first arm unit 20 and the second arm are adjusted by adjusting the amount of cooling air supplied from each of the air pipes 87 and 88 so that the temperature and the temperature inside the second arm unit 21 are substantially equal. The inside of each part 21 is individually cooled. Further, based on the detection results of the temperature sensor 80 arranged inside the first arm unit 25 and the temperature sensor 80 arranged inside the second arm unit 26, the temperature inside the first arm unit 25 and the first The amount of cooling air supplied from each of the air pipes 89 and 90 is adjusted so that the temperature inside the two arm portion 26 is substantially equal, and the first arm portion 25 and the second arm portion 26 Each interior is individually cooled.

  In this embodiment, the inside of each of the first arm parts 20 and 25 and the second arm parts 21 and 26 is individually adjusted by adjusting the amount of cooling air supplied from each of the air pipes 87 to 90. However, the inside of each of the first arm parts 20 and 25 and the second arm parts 21 and 26 is individually cooled by stopping the supply of cooling air from each of the air pipes 87 to 90. You may do it.

  The fan 91 is disposed inside each of the first arm portions 20 and 25 and the second arm portions 21 and 26. In this embodiment, the two fans 91 are arranged inside the first arm portions 20 and 25 and the second arm portions 21 and 26 with a predetermined interval therebetween. The fan 91 is arranged so as to send cooling air upward. In this embodiment, the fan 91 is arranged so as to send cooling air toward directly above. Specifically, the fan 91 is disposed below the lid member 32 and is disposed so as to send cooling air toward the plurality of fins 32 a formed on the lid member 32. Further, the fan 91 rotates or stops based on the detection result of the temperature sensor 80, for example. Note that the fan 91 may be disposed so as to send cooling air obliquely upward.

  The cover members 81 to 85 are made of a material having a lower thermal conductivity than the support portion main body 15, the arm portion main bodies 31 and 34 and the lid members 16, 32 and 33. Further, the cover members 81 to 85 are made of a material having a high radiant heat reflectivity. For example, cover members 81-85 are formed of a thin stainless steel plate.

  The cover member 81 covers substantially the entire upper surface, lower surface and side surfaces of the first arm portion 20 except for the portion overlapping the arm support portion 8. The cover member 82 covers substantially the entire upper surface, lower surface, and side surface of the second arm portion 21. The cover member 83 covers substantially the entire upper surface, lower surface, and side surfaces of the portion of the first arm portion 25 excluding the portion overlapping the arm support portion 8. The cover member 84 covers substantially the entire upper surface, lower surface, and side surfaces of the second arm portion 26. The cover member 85 covers portions of the first arm portions 20 and 25 that overlap the arm support portion 8 and substantially the entire upper surface, lower surface, and side surfaces of the arm support portion 8. As described above, substantially the entire arms 6 and 7 and the arm support portion 8 are covered by the cover members 81 to 85.

(Main effects of this form)
As described above, in the present embodiment, the temperature sensor 80 is disposed inside each of the first arm portions 20 and 25 and the second arm portions 21 and 26. In this embodiment, the inside of each of the first arm parts 20 and 25 and the second arm parts 21 and 26 is individually cooled by adjusting the supply amount of the cooling air for each of the air pipes 87 to 90. Based on the detection result of the temperature sensor 80, the insides of the first arm portions 20 and 25 and the second arm portions 21 and 26 are individually cooled.

  Therefore, in this embodiment, it is possible to manage the temperatures of the first arm parts 20 and 25 and the second arm parts 21 and 26 based on the detection result of the temperature sensor 80. Therefore, in this embodiment, even when the joint portions 23 and 28 are displaced due to the thermal expansion of the arms 6 and 7, the direction of the displacement of the joint portions 23 and 28 can be a regular direction. become. As a result, in this embodiment, even if the arm 6 is configured by the first arm portion 20 and the second arm portion 21, the actual locus of the joint portion 23 when the high-temperature substrate 2 is transported, and the arm 6 It is possible to suppress a change in the amount of deviation from the trajectory of the joint portion 23 when is not thermally expanded. Therefore, in this embodiment, the hand 4 can be appropriately operated. In this embodiment, even if the arm 7 is constituted by the first arm portion 25 and the second arm portion 26, the actual locus of the joint portion 28 when the high-temperature substrate 2 is conveyed and the arm 7 are heated. It is possible to suppress a change in the amount of deviation from the trajectory of the joint portion 28 when it is not expanded, and as a result, it is possible to operate the hand 5 appropriately.

  In particular, in the present embodiment, based on the detection results of the temperature sensor 80 arranged inside the first arm unit 20 and the temperature sensor 80 arranged inside the second arm unit 21, the inside of the first arm unit 20. Since the inside of each of the first arm part 20 and the second arm part 21 is individually cooled so that the temperature and the temperature inside the second arm part 21 are substantially equal, the unit of the first arm part 20 The expansion amount per length and the expansion amount per unit length of the second arm portion 21 are substantially equal. Therefore, in this embodiment, it becomes possible to make the direction of the positional shift when the positional shift occurs in the joint portion 23 to be a more regular direction, and the actual position of the joint portion 23 when the high-temperature substrate 2 is transported. It is possible to effectively suppress a change in the amount of deviation between the locus and the locus of the joint portion 23 when the arm 6 is not thermally expanded. As a result, in this embodiment, the hand 4 can be operated more appropriately.

  Similarly, in the present embodiment, based on the detection results of the temperature sensor 80 arranged inside the first arm unit 25 and the temperature sensor 80 arranged inside the second arm unit 26, the first arm unit 25 Since the insides of the first arm part 25 and the second arm part 26 are individually cooled so that the internal temperature and the internal temperature of the second arm part 26 are substantially equal, the first arm part 25 The amount of expansion per unit length is substantially equal to the amount of expansion per unit length of the second arm portion 26. Therefore, in this embodiment, it becomes possible to make the direction of the positional deviation when the positional deviation occurs in the joint portion 28 to be a more regular direction, and the actual portion of the joint portion 28 when the high-temperature substrate 2 is transported. It is possible to effectively suppress a change in the deviation amount between the locus and the locus of the joint portion 28 when the arm 7 is not thermally expanded. As a result, in this embodiment, the hand 5 can be operated more appropriately.

  In the present embodiment, the first arm portions 20 and 25 and the second arm portion are adjusted by adjusting the amount of cooling air supplied from each of the air pipes 87 to 90 based on the detection result of the temperature sensor 80. The interior of each of 21 and 26 is individually cooled. Therefore, in this embodiment, it is possible to manage the temperatures of the first arm portions 20 and 25 and the second arm portions 21 and 26 with a relatively simple configuration.

  In this embodiment, a temperature sensor 80 is disposed in the vicinity of the joint portions 22, 23, 27, and 28. Therefore, in this embodiment, based on the detection result of the temperature sensor 80, the temperature of the bearings of the speed reducers 37, 38, 67, 68 that constitute a part of the joint portions 22, 23, 27, 28 can be estimated. It becomes possible. Therefore, in this embodiment, it is possible to appropriately estimate the life of the bearings of the reduction gears 37, 38, 67, and 68 based on the estimated temperature, and as a result, the bearing is replaced at an appropriate time. It becomes possible. Further, in this embodiment, since the temperature sensor 80 is disposed in the vicinity of the motors 35 and 65, it is possible to detect an abnormality in the motors 35 and 65 based on the detection result of the temperature sensor 80. As a result, it becomes possible to prevent the motors 35 and 65 from being damaged.

  In the present embodiment, three temperature sensors 80 having different detection temperatures are arranged as a set and are arranged inside the first arm portions 20 and 25 and the second arm portions 21 and 26, respectively. Therefore, in this embodiment, it becomes possible to improve the detection accuracy of the internal temperatures of the first arm parts 20 and 25 and the second arm parts 21 and 26. Therefore, in this embodiment, it becomes possible to manage each temperature of the 1st arm parts 20 and 25 and the 2nd arm parts 21 and 26 with sufficient accuracy.

  In this embodiment, a fan 91 that sends air upward is disposed inside the arms 6 and 7. Therefore, in this embodiment, when the high-temperature substrate 2 is transported, the upper surface side portions of the arms 6 and 7 can be cooled to suppress the temperature rise of the upper surface side portions of the arms 6 and 7. , 7 can be brought close to the temperature of the lower surface side portions of the arms 6, 7. Therefore, in this embodiment, it is possible to bring the amount of thermal deformation of the upper surface side portions of the arms 6 and 7 closer to the amount of thermal deformation of the lower surface side portion, and it is possible to suppress the thermal deformation of the arms 6 and 7 whose tip side is lowered. become. As a result, in this embodiment, even when the high-temperature substrate 2 is transferred, the substrate 2 can be appropriately transferred by the hands 4 and 5. Moreover, in this embodiment, since the inside of the arms 6 and 7 can be cooled using the fan 91, the amount of thermal deformation of the arms 6 and 7 can be suppressed.

  In this embodiment, the fan 91 is disposed inside each of the first arm portions 20 and 25 and the second arm portions 21 and 26. Therefore, in this embodiment, even if the arms 6 and 7 are constituted by the two arm portions of the first arm portions 20 and 25 and the second arm portions 21 and 26, the entire upper surface side portion of the arms 6 and 7 is used. It becomes possible to cool the upper surface side portions of the arms 6 and 7 so that the temperatures of the arms 6 and 7 become substantially equal. In particular, in this embodiment, since the two fans 91 are arranged inside the first arm portions 20 and 25 and the second arm portions 21 and 26 with a predetermined interval therebetween, the arms 6 and 7 It becomes possible to cool the upper surface side portions of the arms 6 and 7 so that the temperature of the entire upper surface side portion of the arms 6 and 7 becomes more uniform.

  In this embodiment, the heat dissipating fins 32a are formed on the upper surfaces of the arms 6 and 7, and the fan 91 sends cooling air toward the fins 32a. Therefore, in this embodiment, it is possible to effectively cool the upper surface side portions of the arms 6 and 7, and it is possible to effectively suppress the temperature rise of the upper surface side portions of the arms 6 and 7.

  In this embodiment, the fins 32a are formed on the lower surface of the lid member 32 that closes the openings 31d of the first arm portions 20 and 25 and the openings 34d of the second arm portions 21 and 26 from above. Therefore, in this embodiment, even when the fins 32a are formed on the upper surfaces of the arms 6 and 7 formed in a hollow shape, the fins 32a can be easily formed.

  In this embodiment, substantially the entire arms 6 and 7 and the arm support portion 8 are covered with cover members 81 to 85 formed of a material having a lower thermal conductivity than the arms 6 and 7 and the arm support portion 8. Therefore, in this embodiment, it is possible to effectively suppress transmission of radiant heat from the substrate 2 and radiant heat from the wall surface of the vacuum chamber in which the robot 1 is disposed to the arms 6 and 7 and the arm support portion 8. .

(Other embodiments)
The above-described embodiment is an example of a preferred embodiment of the present invention, but is not limited to this, and various modifications can be made without departing from the scope of the present invention.

  In the embodiment described above, the base end sides of the first arm portions 20 and 25 formed separately are fixed to the arm support portion 8. In addition, for example, the first arm part 20, the first arm part 25, and the arm support part 8 may be integrally formed. Further, as shown in FIG. 10, each of the proximal end side of the first arm portion 20 and the proximal end side of the first arm portion 25 may be rotatably connected to the main body portion 9. In this case, the motor 35 is arranged inside the first arm unit 20, and the motor 65 is arranged inside the first arm unit 25. In the above-described form, the robot 1 includes the two arms 6 and 7. However, the robot 1 may include only one arm 6 as illustrated in FIG. In this case, the base end side of the first arm portion 20 is rotatably connected to the main body portion 9. 10 and 11, the same reference numerals are given to the configurations that are common to the configurations of the above-described embodiments.

  In the embodiment described above, the first arm parts 20 and 25 and the second arm part 21 are adjusted by adjusting the amount of cooling air supplied for each of the air pipes 87 to 90 based on the detection result of the temperature sensor 80. The interior of each of the 26 is individually cooled. In addition to this, for example, based on the detection result of the temperature sensor 80, the fans 91 arranged inside the first arm parts 20, 25 and the second arm parts 21, 26 are individually rotated or stopped. Thus, the insides of the first arm portions 20 and 25 and the second arm portions 21 and 26 may be individually cooled.

  In the embodiment described above, the temperature inside the first arm portion 20 and the temperature inside the second arm portion 21 are substantially equal, and the temperature inside the first arm portion 25 and the temperature inside the second arm portion 26 are Are individually cooled so that the interiors of the first arm portions 20 and 25 and the second arm portions 21 and 26 are individually equal. In addition to this, for example, the temperature inside the first arm portion 20 and the temperature inside the second arm portion 21 are different, and the temperature inside the first arm portion 25 and the temperature inside the second arm portion 26 are different. And the first arm parts 20 and 25 and the second arm parts 21 and 26 so that the temperature inside each of the first arm parts 20 and 25 and the second arm parts 21 and 26 becomes a predetermined temperature. Each of the interiors may be individually cooled.

  In the embodiment described above, a plurality of temperature sensors 80 having different detection temperatures are set and arranged in the vicinity of the motors 35 and 65 and the joint portions 22, 23, 27 and 28. In addition, for example, one temperature sensor 80 may be disposed in the vicinity of the motors 35 and 65 and the joint portions 22, 23, 27, and 28. In the above-described embodiment, the temperature sensor 80 is disposed in the vicinity of the motors 35 and 65 and the joint portions 22, 23, 27, and 28. However, the first arm portions 20 and 25 and the second arm portions 21 and 26 The temperature sensor 80 may be arranged at an arbitrary position inside each.

  In the above-described form, the arms 6 and 7 are constituted by two arm parts, ie, the first arm parts 20 and 25 and the second arm parts 21 and 26. However, the arms 6 and 7 have three or more arm parts. You may comprise by an arm part. In this case, the temperature sensor 80 is disposed inside each of the arm portions, and a supply port of an air pipe that supplies cooling air is disposed inside each of the arm portions. Further, in this case, for example, the fans 91 are arranged inside all the arm portions. Moreover, the arms 6 and 7 may be comprised by one arm part.

  In the form described above, the robot 1 rotates the second arm unit 21 with respect to the first arm unit 20 and rotates the hand 4 with respect to the second arm unit 21 by one motor 35. ing. In addition, for example, a motor that rotates the second arm portion 21 with respect to the first arm portion 20 and a motor that rotates the hand 4 with respect to the second arm portion 21 may be provided separately. . Similarly, in the embodiment described above, the single arm 65 rotates the second arm portion 26 with respect to the first arm portion 25 and the hand 5 with respect to the second arm portion 26. However, a motor that rotates the second arm portion 26 with respect to the first arm portion 25 and a motor that rotates the hand 5 with respect to the second arm portion 26 may be provided separately.

  In the embodiment described above, the fan 91 is disposed inside each of the first arm portions 20 and 25 and the second arm portions 21 and 26, but the fan 91 may not be disposed. In the embodiment described above, the fin 32 a is formed on the lid member 32, but the fin 32 a may not be formed on the lid member 32. Further, in the above-described embodiment, the transport object to be transported by the robot 1 is the organic EL display substrate 2, but the transport object to be transported by the robot 1 may be a glass substrate for a liquid crystal display. However, it may be a semiconductor wafer or the like.

  In the embodiment described above, the two fans 91 are disposed inside the first arm portions 20 and 25 and the second arm portions 21 and 26, respectively, but the first arm portions 20 and 25 and the second arm portions are arranged. The number of fans 91 arranged inside each of 21 and 26 may be one, or may be three or more. In the above-described embodiment, the fan 91 is disposed inside each of the first arm part 20 and the second arm part 21, but only one of the inside of the first arm part 20 or the inside of the second arm part 21. The fan 91 may be disposed in the middle. Similarly, the fan 91 may be disposed only in one of the first arm portion 25 and the second arm portion 26.

  In the form described above, the fan 91 rotates or stops based on the detection result of the temperature sensor 80. In addition to this, for example, regardless of the detection result of the temperature sensor 80, the fan 91 may be continuously rotated while the robot 1 is being driven, or at a predetermined operation timing of the robot 1. May be rotated.

  In the embodiment described above, the fan 91 is disposed below the lid member 32 and sends cooling air toward the plurality of fins 32 a formed on the lid member 32. In addition, for example, the fan 91 may be disposed at a position deviated from the lower side of the lid member 32 and send cooling air toward the lower surfaces of the upper surface portions 31a and 34a. Moreover, in the form mentioned above, although the fin 32a is formed in the cover member 32, the fin 32a may be formed in the lower surface of upper surface part 31a, 34a. In the embodiment described above, the fin 32 a is formed on the lid member 32, but the fin 32 a may not be formed on the lid member 32.

  In the embodiment described above, the hand 4 is disposed above the second arm portion 21, but the hand 4 may be disposed below the second arm portion 21. In the embodiment described above, the hand 5 is disposed below the second arm portion 26, but the hand 5 may be disposed above the second arm portion 26.

  In the embodiment described above, the cover members 81 to 85 cover substantially the entire arms 6 and 7 and the arm support portion 8, but the cover members 81 to 85 are only on the upper end sides of the arms 6 and 7 and the arm support portion 8. May be covered. Moreover, in the form mentioned above, although the robot 1 is provided with the cover members 81-85, the robot 1 does not need to be provided with the cover members 81-85.

1 Robot (industrial robot)
2 Substrate (glass substrate, transport object)
4, 5 Hand 6, 7 Arm 20, 25 First arm part (arm part)
21, 26 Second arm part (arm part)
22, 23, 27, 28 Joint portion 31a, 34a Upper surface portion 31d, 34d Opening portion 32 Cover member 32a Fin 35, 65 Motor 80 Temperature sensor 81-85 Cover member 87-90 Air piping (part of cooling mechanism)
91 Fan (part of cooling mechanism)

Claims (18)

A hand on which an object to be transported is mounted; an arm that is formed in a hollow shape and connected to the distal end side; and a cooling mechanism for cooling the inside of the arm,
The hand and the arm are placed in a vacuum;
The arm includes a plurality of arm portions formed in a hollow shape and connected to each other so as to be relatively rotatable,
The insides of the plurality of arms are at atmospheric pressure,
Inside each of the plurality of arm portions, a temperature sensor for measuring the temperature inside the arm portion is disposed,
The cooling mechanism can individually cool the insides of the plurality of arm portions, and individually cools the insides of the plurality of arm portions based on the detection result of the temperature sensor. Industrial robot characterized by   The cooling mechanism includes a cooling air supply port disposed inside each of the plurality of arm portions, and the amount of cooling air supplied from the supply port is determined based on a detection result of the temperature sensor. The industrial robot according to claim 1, wherein the interior of each of the plurality of arm portions is individually cooled by adjustment. The main body portion that rotatably supports the plurality of arm portions is disposed in the atmosphere, and the inside thereof is at atmospheric pressure, and the inside of the plurality of arm portions each formed in a hollow shape includes a plurality of It is maintained at atmospheric pressure by communicating with the inside of the main body through an opening provided in the arm,
The cooling mechanism includes an air pipe routed from the inside of the main body part to each of the plurality of arm parts, and the cooling air is introduced into each of the plurality of arm parts via the air pipe. The industrial robot according to claim 2, wherein: The plurality of arm portions are connected to a first arm portion rotatably connected to the main body portion side, and are rotatably connected to a distal end side of the first arm portion, and the hand is connected to the distal end side. A second arm part,
A hollow speed reducer having a through-hole formed in the center is provided at a joint portion connected through the opening provided in each of the first arm portion and the second arm portion, and the through-hole is provided in the joint portion. The inside of the second arm part communicates with the inside of the first arm part and the air pipe is routed from the inside of the first arm part to the inside of the second arm part,
The industrial part according to claim 3, wherein the joint part is provided with a seal part for preventing air from flowing out from a connecting part between the first arm part and the second arm part to a vacuum region. robot.   The cooling mechanism individually cools the insides of the plurality of arm portions so that the internal temperatures of the plurality of arm portions are substantially equal based on the detection result of the temperature sensor. The industrial robot according to any one of claims 1 to 4.   The temperature sensor is arranged in the vicinity of a joint part that connects the arm parts to each other and in the vicinity of a joint part that connects the arm and the hand. Industrial robots. A motor for rotating at least one of the plurality of arm portions and the hand;
The industrial robot according to claim 1, wherein the temperature sensor is disposed in the vicinity of the motor.   The industrial robot according to any one of claims 1 to 4, wherein a plurality of the temperature sensors having different detection temperatures are arranged inside each of the plurality of arm portions. A hand on which the object to be transported is mounted;
The hand and the arm are placed in a vacuum;
The arm is formed in a hollow shape, and the inside of the arm is at atmospheric pressure,
An industrial robot characterized in that a fan for sending air upward is disposed inside the arm.   The industrial robot according to claim 9, wherein a fin for heat radiation is formed on an upper surface inside the arm. The arm includes a flat upper surface portion that constitutes a part of the upper surface of the arm,
An opening that penetrates in the vertical direction is formed in the upper surface portion,
The arm further includes a lid member that is fixed to the upper surface portion and closes the opening portion from above.
The industrial robot according to claim 10, wherein the fin is formed on a lower surface of the lid member. The lid member is formed in a disc shape,
12. The industrial robot according to claim 11, wherein a plurality of annular fins having different diameters are formed concentrically on the lid member. The arm includes a plurality of arm portions connected to each other so as to be relatively rotatable.
The industrial robot according to claim 9, wherein the fan is disposed in each of the plurality of arm portions. A cover member covering substantially the entire arm;
The industrial robot according to claim 9, wherein a thermal conductivity of the cover member is lower than a thermal conductivity of the arm. The main body portion that rotatably supports the plurality of arm portions is disposed in the atmosphere, and the inside thereof is at atmospheric pressure, and the inside of the plurality of arm portions each formed in a hollow shape includes a plurality of The industry according to any one of claims 9 to 12, wherein the atmospheric pressure is maintained by communicating with the inside of the main body through a communication opening provided in the arm. Robot. A cooling mechanism for cooling the inside of the arm, and the cooling mechanism includes an air pipe routed from the inside of the main body part to each of the plurality of arm parts, and the air pipe includes a plurality of air pipes. The industrial robot according to claim 15, wherein the industrial robot is disposed in the arm portion and supplies the cooling air into each of the plurality of arm portions. The plurality of arm portions are connected to a first arm portion rotatably connected to the main body portion side, and are rotatably connected to a distal end side of the first arm portion, and the hand is connected to the distal end side. A second arm part,
A hollow speed reducer having a through-hole formed in the center is provided at a joint portion connected through the opening provided in each of the first arm portion and the second arm portion, and the through-hole is provided in the joint portion. The inside of the second arm part communicates with the inside of the first arm part and the air pipe is routed from the inside of the first arm part to the inside of the second arm part,
The industrial joint according to claim 16, wherein the joint portion is provided with a seal portion for preventing air from flowing out from a connecting portion between the first arm portion and the second arm portion to a vacuum region. robot. Inside each of the plurality of arm portions, a temperature sensor for measuring the temperature inside the arm portion is disposed,
The cooling mechanism individually cools the inside of each of the plurality of arm portions based on the detection result of the temperature sensor, and the fan rotates or stops based on the detection result of the temperature sensor. The industrial robot according to claim 17, wherein:

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