WO2015033239A1 - Lampe à décharge, procédé de production d'une lampe à décharge et électrode pour une lampe à décharge - Google Patents

Lampe à décharge, procédé de production d'une lampe à décharge et électrode pour une lampe à décharge Download PDF

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Publication number
WO2015033239A1
WO2015033239A1 PCT/IB2014/062847 IB2014062847W WO2015033239A1 WO 2015033239 A1 WO2015033239 A1 WO 2015033239A1 IB 2014062847 W IB2014062847 W IB 2014062847W WO 2015033239 A1 WO2015033239 A1 WO 2015033239A1
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WO
WIPO (PCT)
Prior art keywords
end side
groove
side member
discharge lamp
rear end
Prior art date
Application number
PCT/IB2014/062847
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English (en)
Japanese (ja)
Inventor
細木裕介
早川壮則
芹澤和泉
小平宏
Original Assignee
株式会社オーク製作所
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 株式会社オーク製作所 filed Critical 株式会社オーク製作所
Priority to KR1020157036298A priority Critical patent/KR102206779B1/ko
Priority to JP2015535169A priority patent/JP6483020B2/ja
Priority to CN201480041336.0A priority patent/CN105431922B/zh
Publication of WO2015033239A1 publication Critical patent/WO2015033239A1/fr

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    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J61/00—Gas-discharge or vapour-discharge lamps
    • H01J61/02—Details
    • H01J61/04—Electrodes; Screens; Shields
    • H01J61/06—Main electrodes
    • H01J61/073—Main electrodes for high-pressure discharge lamps
    • H01J61/0732—Main electrodes for high-pressure discharge lamps characterised by the construction of the electrode
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J61/00—Gas-discharge or vapour-discharge lamps
    • H01J61/84—Lamps with discharge constricted by high pressure
    • H01J61/86—Lamps with discharge constricted by high pressure with discharge additionally constricted by close spacing of electrodes, e.g. for optical projection
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J9/00—Apparatus or processes specially adapted for the manufacture, installation, removal, maintenance of electric discharge tubes, discharge lamps, or parts thereof; Recovery of material from discharge tubes or lamps
    • H01J9/02—Manufacture of electrodes or electrode systems
    • H01J9/04—Manufacture of electrodes or electrode systems of thermionic cathodes

Definitions

  • the present invention relates to a discharge lamp used in an exposure apparatus or the like, and more particularly to an electrode structure in which a plurality of metal members are joined.
  • the conventional single metal electrode structure affects the electron emission, heat emission, durability, and the like.
  • the weight of the electrode increases, the load on the electrode support rod and the like is large.
  • an electrode by joining a plurality of metals.
  • an electrode is formed by solid-phase joining a tip portion of an electrode made of tritium tungsten containing thorium or the like and a rear body portion made of pure tungsten or the like (see Patent Documents 1 and 2).
  • a gap is likely to be generated near the outer edge of the bonded surface as the temperature increases or decreases during bonding due to differences in thermal expansion coefficient. If the electrode becomes hot when the lamp is lit, the gap may be enlarged and the electrode may be damaged. In addition, a wedge-shaped gap is formed in the vicinity of the bonding surface even in an electrode in which the same metal member is solid-phase bonded.
  • the discharge lamp of the present invention includes a discharge tube and a pair of electrodes disposed in the discharge tube, and at least one of the electrodes is constituted by an electrode obtained by solid-phase bonding a front end side member and a rear end side member.
  • the front end side member is in a position close to the electrode front end surface side, that is, the other electrode side, and the rear end side member is in a position close to the electrode support bar.
  • the rear end side member is higher / larger than the front end side member.
  • the front end side member and the rear end side member can be configured by metal members.
  • the front end side member can be constituted by triated tungsten
  • the rear end side member can be constituted by molybdenum having relatively high extensibility.
  • the groove portion is formed on the side surface of the electrode so as to straddle the joint surface between the front end side member and the rear end side member, that is, the joint surface is interposed therebetween.
  • the “electrode side surface” includes both the tapered surface formed on the electrode tip side and the side surface (outer peripheral surface) of the body portion.
  • the groove formed for improving the bonding strength has a groove pitch and a groove depth smaller than the pitch and depth of the heat radiation groove on the order of millimeters. For example, it is possible to form grooves having a pitch and depth of 100 ⁇ m or less. By forming such a fine groove, the vicinity of the outer edge of the joining surface of the rear end side member having high spreadability is deformed relatively deeply.
  • the groove including such a joining surface may have a surface roughness Ra of the rear end side surface of 1.2 ⁇ m or more. Further, the surface roughness Ra of the side surface of the tip side member may be 0.7 ⁇ m or less. Furthermore, what is necessary is just to form a groove part so that the reflectance of a rear end side member side surface may become smaller than the reflectance of a front end side member side surface. By satisfying such numerical values, the joint surface strength can be improved.
  • the vicinity of the wedge can be deformed by forming a rough groove compared to the tip side member.
  • the groove may be formed on the side surface of the rear end side member so that “gouge or burr” occurs. That is, the groove is preferably formed so as to be partially torn off or peeled off.
  • the groove is preferably formed by cutting after the solid phase bonding of the electrode.
  • a wide groove having a larger pitch and depth than the fine groove can be formed across the joint surface.
  • a method for manufacturing a discharge lamp in which a front end side member and a rear end side member having higher extensibility than the front end side member are solid-phase bonded, and a side surface of the electrode member subjected to solid phase bonding is cut
  • the groove is formed on the side surface of the electrode member so as to straddle the joint surface between the front end side member and the rear end side member.
  • fine grooves due to peeling may be formed on the side surface of the rear end side member.
  • An electrode for a discharge lamp includes a front end side member and a rear end side member solid-phase bonded to the front end side member, and the groove portion serves as a bonding surface between the front end side member and the rear end side member. It is formed on the electrode side face across. It is also possible to perform solid-phase bonding of the members having the same spreadability.
  • an electrode having a high bonding strength can be configured in an electrode in which a plurality of members are solid-phase bonded.
  • FIG. 1 is a plan view schematically showing a short arc type discharge lamp according to the first embodiment.
  • the short arc type discharge lamp 10 is a discharge lamp that can be used as a light source of an exposure apparatus (not shown) for forming a pattern, and includes a discharge tube (light emitting tube) 12 made of transparent quartz glass. A cathode 20 and an anode 30 are opposed to the discharge tube 12 with a predetermined interval.
  • quartz glass sealing tubes 13A and 13B are provided integrally with the discharge tube 12 so as to face each other, and both ends of the sealing tubes 13A and 13B are formed by caps 19A and 19B. It is blocked.
  • the discharge lamp 10 is arranged along the vertical direction so that the anode 30 is on the upper side and the cathode 20 is on the lower side.
  • sealing tubes 13A and 13B Inside the sealing tubes 13A and 13B, conductive electrode support rods 17A and 17B for supporting the metallic cathode 20 and the anode 30 are disposed, a metal ring (not shown), and a metal foil 16A such as molybdenum. , 16B to the conductive lead rods 15A, 15B, respectively.
  • the sealing tubes 13A and 13B are welded to glass tubes (not shown) provided in the sealing tubes 13A and 13B, thereby sealing the discharge space DS in which mercury and a rare gas are sealed.
  • the lead rods 15A and 15B are connected to an external power source (not shown), and are connected between the cathode 20 and the anode 30 via the lead rods 15A and 15B, the metal foils 16A and 16B, and the electrode support rods 17A and 17B. A voltage is applied to. When electric power is supplied to the discharge lamp 10, arc discharge occurs between the electrodes, and a bright line (ultraviolet light) due to mercury is emitted.
  • FIG. 2 is a schematic side view of the anode and the cathode.
  • the cathode 20 includes a metal member (front end side member) 20A having an electrode front end surface 20S perpendicular to the electrode axis E, and a metal member (rear end side member) 20B joined to the metal member 20A behind the metal member 20A.
  • the metal member 20B supported by the electrode support rod 17A includes a columnar portion 23B and a truncated cone-shaped portion 23A, and the truncated cone-shaped metal member 20A is joined to the truncated cone-shaped portion 23A of the metal member 20B.
  • the anode 30 includes a metal member (front end side member) 30A having an electrode front end surface 30S perpendicular to the electrode axis E and a metal member (rear end side member) 30B joined to the metal member 30A.
  • the metal member 30A includes a truncated cone portion 33A and a columnar portion 33B, and the columnar metal member 30B is joined to the columnar portion 33B of the metal member 30A.
  • the tip-side metal member 20A is made of an alloy mainly composed of tungsten such as triated tungsten or a high melting point metal such as pure tungsten (W).
  • the metal member 20B on the rear end side is made of a metal having higher extensibility than the metal member 20A or an alloy containing the metal as a main component.
  • the metal member 20B is made of molybdenum (Mo).
  • the metal members 30A and 30B of the anode 30 are made of pure tungsten (W) and molybdenum (Mo), respectively.
  • FIG. 3 is a partial side view of the cathode.
  • FIG. 4 is an enlarged view of the vicinity of the metal member bonding surface in the cathode. The groove formed on the side surface of the cathode will be described with reference to FIGS.
  • the cathode 20 is manufactured by solid-phase joining the materials to be the metal members 20A and 20B obtained by sintering and solidifying a metal powder according to a discharge plasma sintering (SPS sintering) method, and then cutting with a lathe. Is done.
  • SPS sintering discharge plasma sintering
  • the tapered surface (reduced diameter surface) 20Q of the cathode 20 is formed by the cutting process.
  • the metal members 20A and 20B are cut along the direction perpendicular to the electrode axis E, that is, along the circumferential direction.
  • cutting is performed at an angle ⁇ of ⁇ 10 ° or less with respect to the bonding surface S1.
  • the groove R is simultaneously formed.
  • the groove portion R is formed across the joining surface S1, and is formed of a fine groove (hereinafter referred to as a fine groove).
  • the fine grooves r are grooves formed at a predetermined pitch interval P1 at the same time as the cutting process, and the pitch interval P1 is set in a range of 1 ⁇ m to 5 ⁇ m. This is sufficiently smaller than the heat radiation groove formed in the conventional discharge lamp.
  • the fine groove formed in the metal member 20A is represented as “r1A”
  • the fine groove formed in the metal member 20B is represented as “r1B”.
  • the fine groove r1B formed in the metal member 20B on the rear end side is a peeled groove, and the groove depth d reaches a position deeper than the tool cutting edge ridge position.
  • the groove depth d is shown here as the distance from the line connecting the groove peak points to the bottom.
  • a fine groove r1A that does not peel or hardly occurs is formed in the metal member 20A having relatively low spreadability.
  • the groove depth d is smaller (shallow) on the metal member 20A side than on the metal member 20B side.
  • the groove depth d in the metal member 20B is relatively uneven because it is a groove due to peeling, but the cutting depth of the blade is adjusted so that the depth is 5 ⁇ m or more. On the other hand, the cut amount and the like are adjusted so as to prevent the metal member 20A from being peeled.
  • the reflectance of light is larger in molybdenum than in tungsten.
  • the reflectance on the metal member 20B side in the groove portion R is the same as that on the metal member 20A side. It becomes smaller than the reflectance.
  • the surface roughness Ra of the metal member 20B is 1.2 ⁇ m or more and the surface roughness Ra of the metal member 20A is 0.7 ⁇ m or less by cutting.
  • the metal member 20B made of molybdenum (Mo) on the rear end side has higher spreadability than the metal member 20A made of tungsten (W) on the front end side, and is easily deformed. Therefore, when the metal members 20A and 20B are solid-phase bonded, a wedge W tends to be generated near the outer edge of the bonding surface S1, as shown in FIG. The wedge W often occurs at the micro order level.
  • the fine groove r is formed in the vicinity of the joint surface S1, in the metal member 20B having relatively high extensibility, the fine groove r1B is formed so as to cause peeling, so that the vicinity of the outer edge of the joint surface S1. In this case, plastic deformation occurs. This is brought about by adjusting the force applied to the metal member 20B at the time of cutting and performing the cutting along the joining surface S1 (within 10 °). As a guideline for forming such a fine groove r1A, cutting may be performed so that the above-described surface roughness Ra is 1.2 ⁇ m or more.
  • the shape of the wedge W also changes and becomes the same size as the fine groove r formed in the vicinity of the joint surface S1.
  • the wedge W generated on the joint surface S1 changes in shape from a state of being deeply cut to the electrode center side, and in some cases, the wedge W is in a crushed state. This prevents the joint from being damaged starting from the wedge due to the difference in thermal expansion in the vicinity of the joint surface S1 during lamp operation.
  • the taper surface 20Q has a high current density, and thermal stress due to the difference in thermal expansion coefficient acts greatly from the metal member 20B toward the metal member 20A.
  • the bonding strength is high, high thermal conductivity and electrical conductivity are achieved. Can be maintained. Thereby, the thorium content in the tip side metal member 20A can be kept to the minimum necessary.
  • the minute groove r1A in the metal member 20A on the front end side, when a thermal stress is applied from the metal member 20B to the metal member 20A during lamp lighting, the thermal stress is released by the minute groove r1A. It is possible to prevent chipping in the vicinity of the joint surface S1.
  • the fine groove r1A may be formed so that the surface roughness Ra is 0.7 ⁇ m or less.
  • a fine groove r1B that bites into the electrode center side is formed in the vicinity of the joint surface S1 of the metal member 20B, and the joint near the outer edge of the joint surface S1.
  • the metal member 20B is formed of pure molybdenum, peeling easily occurs and the surface roughness Ra is easily increased.
  • the groove portion R formed on the tapered surface 20Q of the cathode 20 has been described, but the same groove portion as that of the cathode 20 is formed also in the anode 30.
  • a groove is formed in the metal member 30A made of tungsten and the metal member 30B made of molybdenum with the joining surface S2 interposed therebetween, and a fine groove with a peeling is formed in the metal member 30B.
  • the cathode 20 composed of the metal member 20A on the front end side and the metal member 20B on the rear end side is formed by solid phase bonding and cutting.
  • a groove portion R in which fine grooves r are formed is formed on the tapered surface 20Q of the cathode 20 formed at the time of cutting. At this time, cutting is performed so that peeling occurs in the metal member 20B but does not occur in the metal member 20A.
  • a short arc type discharge lamp according to a second embodiment will be described with reference to FIG.
  • a heat radiating groove is further formed.
  • FIG. 5 is a side view of the cathode in the second embodiment.
  • the cathode 200 includes a front end side metal member 200A including a front end surface 200S and a rear end side metal member 200B. And the groove part 100R which consists of a fine groove is formed at the time of the cutting which forms the taper surface 200Q.
  • a groove rr having a large pitch (hereinafter referred to as a wide groove) is formed by laser irradiation.
  • the wide groove rr has a pitch P2 and a depth d '(not shown) that are sufficiently larger (millimeter order level) than the fine groove.
  • the pitch P2 is set in a range of 0.1 mm to 1.0 mm, and the depth d 'is set in a range of 0.1 to 0.5 mm.
  • the pitch P2 is preferably set to 0.2 mm to 0.5 mm, and the depth d 'is set to 0.2 mm to 0.5 mm.
  • the wide groove rr formed in the groove portion R by laser irradiation after the cutting process enhances the electrode heat dissipation effect and further increases the bonding strength when the metal portion melted by the laser irradiation is buried in the wedge W.
  • the fine groove is formed by a method other than the cutting process, and it is also possible to form a fine groove / uneven surface that does not depend on peeling. What is necessary is just to form the groove
  • the fine grooves may be formed at a pitch of 100 ⁇ m or less, and the fine groove may be cut to a depth of 100 ⁇ m or less with respect to the rear end side metal member. This is because the wedge W often occurs at the micro-order level, so that the wedge W cannot be sufficiently filled with a groove larger than the above.
  • the formation range of the groove only a part near the joint surface may be used, or it may be performed over the entire tapered surface 20Q. Furthermore, wide grooves with a large pitch may be formed by a method other than laser irradiation (cutting or the like), or only fine grooves or wide grooves may be formed.
  • the metal member 20B is selected so as to have relatively higher extensibility than the metal member 20A.
  • the metal member 20B can be composed of tantalum / molybdenum or an alloy mainly composed of tantalum / molybdenum.
  • you may comprise an electrode with three or more metal members, respectively.
  • only one of the electrodes may have a groove formed in the vicinity of the bonding surface, and the groove can be formed on the bonding surface formed on either the tapered surface or the cylindrical surface.
  • members other than metal members may be solid-phase bonded, and can be applied to discharge lamps other than short arc type discharge lamps.
  • different metal members are solid-phase bonded, but the same kind of metal members can also be solid-phase bonded. Even if the spreadability of the metal member is the same, a minute wedge is likely to be formed on the joint surface, and the formation of the minute groove can prevent the wedge from expanding.
  • the cathode of a short arc type discharge lamp with a rated power of 5 kW is formed into a cathode shape by solid-phase joining a metal member made of tritated tungsten and a metal member made of molybdenum according to the SPS sintering method, and then cutting.
  • the anode is obtained by solid-phase bonding and cutting a front end side metal member made of tungsten and a rear end side metal member made of molybdenum.
  • the cathode has a total length of 20 mm, a distance from the cathode tip surface to the joining surface of 5 mm, and a joining surface diameter of 16 mm.
  • FIG. 6 is a view showing a photograph of the cathode near the joint surface.
  • FIG. 7 is a diagram showing an enlarged photograph of FIG.
  • FIG. 8 is a view showing a photograph of the vicinity of the joint surface by an electron microscope.
  • the groove is formed in the direction along the joint surface S1, and is formed in the front end side member 20A and the rear end side member 20B across the joint surface S1. Further, as is apparent from FIGS. 7 and 8, the rear end side member 20B has peeling.

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  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Discharge Lamp (AREA)
  • Physics & Mathematics (AREA)
  • Plasma & Fusion (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)

Abstract

La présente invention a pour objectif de former des électrodes ayant une résistance de liaison améliorée dans les électrodes qui sont formées par une liaison en phase solide d'une pluralité d'éléments. Une cathode (20) comprenant un élément métallique sur le côté extrémité distale (20A) et un élément métallique côté extrémité arrière (20B) est formée par une liaison en phase solide et par usinage. Sur la surface effilée (20Q) de la cathode formée pendant l'usinage, une partie rainurée (R) comprenant de fines rainures (r) et de larges rainures formées par irradiation laser est formée de manière à chevaucher la surface de liaison (S1). À ce moment-là, l'usinage est effectué de manière à ce que les entailles apparaissent dans l'élément métallique (20B) mais pas dans l'élément métallique (20A).
PCT/IB2014/062847 2013-07-22 2014-07-04 Lampe à décharge, procédé de production d'une lampe à décharge et électrode pour une lampe à décharge WO2015033239A1 (fr)

Priority Applications (3)

Application Number Priority Date Filing Date Title
KR1020157036298A KR102206779B1 (ko) 2013-07-22 2014-07-04 방전 램프, 방전 램프의 제조 방법, 및 방전 램프용 전극
JP2015535169A JP6483020B2 (ja) 2013-07-22 2014-07-04 放電ランプ、放電ランプの製造方法、及び、放電ランプ用電極
CN201480041336.0A CN105431922B (zh) 2013-07-22 2014-07-04 放电灯、放电灯的制造方法以及放电灯用电极

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2013151647 2013-07-22
JP2013-151647 2013-07-22

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WO2015033239A1 true WO2015033239A1 (fr) 2015-03-12

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PCT/IB2014/062847 WO2015033239A1 (fr) 2013-07-22 2014-07-04 Lampe à décharge, procédé de production d'une lampe à décharge et électrode pour une lampe à décharge

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JP (1) JP6483020B2 (fr)
KR (1) KR102206779B1 (fr)
CN (1) CN105431922B (fr)
TW (1) TWI621151B (fr)
WO (1) WO2015033239A1 (fr)

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KR20160117190A (ko) * 2015-03-31 2016-10-10 가부시키가이샤 오크세이사쿠쇼 방전 램프

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Publication number Priority date Publication date Assignee Title
JP1673314S (fr) 2020-02-20 2020-11-24

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JP2007287705A (ja) * 2000-08-03 2007-11-01 Ushio Inc ショートアーク型高圧放電ランプ
JP2010086855A (ja) * 2008-10-01 2010-04-15 Ushio Inc ショートアーク型放電ランプ
JP2011216442A (ja) * 2010-04-02 2011-10-27 Ushio Inc ショートアーク型放電ランプ

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JP4512968B2 (ja) * 2000-08-03 2010-07-28 ウシオ電機株式会社 ショートアーク型高圧放電ランプ
TW523780B (en) * 2000-08-03 2003-03-11 Ushio Electric Inc Short-arc high-pressure discharge lamp
JP4484958B1 (ja) 2009-09-24 2010-06-16 株式会社オーク製作所 放電ランプ
JP5365799B2 (ja) * 2009-10-23 2013-12-11 ウシオ電機株式会社 高圧放電ランプおよび高圧放電ランプの製造方法
JP5316436B2 (ja) * 2010-01-28 2013-10-16 ウシオ電機株式会社 放電ランプ
JP5580136B2 (ja) * 2010-08-11 2014-08-27 株式会社オーク製作所 放電ランプ

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JP2007287705A (ja) * 2000-08-03 2007-11-01 Ushio Inc ショートアーク型高圧放電ランプ
JP2010086855A (ja) * 2008-10-01 2010-04-15 Ushio Inc ショートアーク型放電ランプ
JP2011216442A (ja) * 2010-04-02 2011-10-27 Ushio Inc ショートアーク型放電ランプ

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR20160117190A (ko) * 2015-03-31 2016-10-10 가부시키가이샤 오크세이사쿠쇼 방전 램프
CN106024577A (zh) * 2015-03-31 2016-10-12 株式会社Orc制作所 放电灯
JP2016192325A (ja) * 2015-03-31 2016-11-10 株式会社オーク製作所 放電ランプ
CN106024577B (zh) * 2015-03-31 2019-07-09 株式会社Orc制作所 放电灯
TWI697937B (zh) * 2015-03-31 2020-07-01 日商奧克製作所股份有限公司 放電燈管
KR102469050B1 (ko) * 2015-03-31 2022-11-22 가부시키가이샤 오크세이사쿠쇼 방전 램프

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JPWO2015033239A1 (ja) 2017-03-02
KR20160033663A (ko) 2016-03-28
CN105431922A (zh) 2016-03-23
TWI621151B (zh) 2018-04-11
CN105431922B (zh) 2017-07-14
KR102206779B1 (ko) 2021-01-22
TW201511080A (zh) 2015-03-16
JP6483020B2 (ja) 2019-03-13

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