WO2015023803A1 - Actionneur en élastomère diélectrique - Google Patents

Actionneur en élastomère diélectrique Download PDF

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Publication number
WO2015023803A1
WO2015023803A1 PCT/US2014/050971 US2014050971W WO2015023803A1 WO 2015023803 A1 WO2015023803 A1 WO 2015023803A1 US 2014050971 W US2014050971 W US 2014050971W WO 2015023803 A1 WO2015023803 A1 WO 2015023803A1
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WO
WIPO (PCT)
Prior art keywords
layer
dielectric
actuator
electrode
electrode layer
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Application number
PCT/US2014/050971
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English (en)
Inventor
Stacy PIERS HUNT
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Ingenious Ventures, Llc
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Publication of WO2015023803A1 publication Critical patent/WO2015023803A1/fr

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Classifications

    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/20—Piezoelectric or electrostrictive devices with electrical input and mechanical output, e.g. functioning as actuators or vibrators
    • H10N30/206—Piezoelectric or electrostrictive devices with electrical input and mechanical output, e.g. functioning as actuators or vibrators using only longitudinal or thickness displacement, e.g. d33 or d31 type devices
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/80—Constructional details
    • H10N30/85—Piezoelectric or electrostrictive active materials
    • H10N30/857—Macromolecular compositions
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/50—Piezoelectric or electrostrictive devices having a stacked or multilayer structure
    • H10N30/503—Piezoelectric or electrostrictive devices having a stacked or multilayer structure with non-rectangular cross-section orthogonal to the stacking direction, e.g. polygonal, circular
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/50—Piezoelectric or electrostrictive devices having a stacked or multilayer structure
    • H10N30/506—Piezoelectric or electrostrictive devices having a stacked or multilayer structure of cylindrical shape with stacking in radial direction, e.g. coaxial or spiral type rolls

Definitions

  • one or more embodiments relate to an enhanced dielectric structure, an enhanced electrode structure, and an enhanced dielectric elastomer actuator.
  • An actuator can include a pair of electrodes separated by a compliant dielectric. Such an actuator can be called a dielectric elastomer actuator. A voltage applied to the electrodes draws the electrodes together by electrostatic force. As a result, the actuator can contract or expand perpendicular to the electrode plane. The dielectric may breakdown for various reasons, including an electrical short between the electrodes. The electrical short can breach the dielectric and cause an irreversible failure of the actuator.
  • the invention in general, in one aspect, relates to an actuator.
  • the actuator can include: a first electrode layer including a first surface; a second electrode layer including a second surface; and a dielectric layer coupled with the first surface and the second surface, where: the dielectric layer includes a compliant structure operable to compress or expand in response to a voltage applied to the first electrode layer and the second electrode layer, and the compliant structure includes a fluid material operable to flow into a breach of the compliant structure.
  • the invention in general, in one aspect, relates to a method for making an actuator.
  • the method can include: providing a layer of dielectric material including a compliant structure and containing a fluid material operable to flow within the compliant structure and into a breach of the compliant structure, providing a first electrode layer and a second electrode layer each operable to slide over a respective surface of the layer of dielectric material, and forming the layer of dielectric material and the first and second electrode layers into an actuator.
  • the invention in general, in one aspect, relates to an actuator that can include: a first electrode and a second electrode, where each electrode includes an electrically conductive layer at least partially enclosed by an electrically insulating layer, and a dielectric layer disposed between the first electrode layer and the second electrode layer, where the dielectric layer includes a compliant structure operable to compress or expand in response to a voltage applied to the first electrode layer and the second electrode layer.
  • FIGS. 1A-1C show an assembly and operation of an actuator.
  • FIG. 2A shows a dielectric layer having compliant structural regions and fluid-filled regions in accordance with one or more embodiments.
  • FIG. 2B shows an assembly of an actuator with electrodes and a dielectric layer having compliant structural regions and fluid-filled regions in accordance with one or more embodiments.
  • FIGS. 3A-3C show self-healing operability in an actuator with a dielectric layer having compliant structural regions and fluid-filled regions in accordance with one or more embodiments.
  • FIGS. 4A-4C show self-healing operability in an actuator with a dielectric layer including of a dielectric gel in accordance with one or more embodiments.
  • FIGS. 5A-5C show structures of an electrode layer in accordance with one or more embodiments.
  • FIGS. 6A-6B show actuators structured to maximize actuator active surface area in minimal volumes in accordance with one or more embodiments.
  • FIGS. 7-8 show flowcharts of methods for making an actuator in accordance with one or more embodiments.
  • FIG. 1A is an exploded perspective view of an actuator 10 with a self- healing dielectric structure and composition.
  • the actuator 10 includes a dielectric layer 16 with a first (upper) surface 13 and a second (lower) surface 15 and includes a pair of (first and second) electrode layers 12 and 14.
  • the dielectric layer 16 provides a compliant structure operable to compress or expand in response to a voltage applied to the electrode layers 12 and 14.
  • the dielectric layer 16 can be cut from a large thin sheet of dielectric material into any desired shape.
  • the electrode layers 12 and 14 can each be cut from a large sheet of electrode material into any desired shape.
  • the electrode layers 12 and 14 can be formed onto the first surface 13 and the second surface 15, respectively, so that the electrode layers 12 and 14 are separable from and slide over the dielectric layer 16.
  • the electrode layers 12 and 14 can be formed onto the first surface 13 and the second surface 15, respectively, so that the electrode layers 12 and 14 can stretch in concert with the dielectric layer 16.
  • the electrode layers 12 and 14 can be formed onto the first surface 13 and the second surface 15, respectively, and then the layers can be cut into any desired shape.
  • FIG. IB shows a voltage Vi of substantially zero volts applied across the electrode layers 12 and 14. No voltage applied yields no compression or stretching of the dielectric layer 16 which has a thickness of di and a surface area of ai when no voltage is applied. A voltage may be applied by peeling back and separating an edge of the electrode layer 12 and an edge of the electrode layer 14 and attaching power leads thereto.
  • FIG. 1C shows a high voltage V 2 applied across the electrode layers 12 and 14.
  • the high voltage V 2 can be a large voltage (e.g., 4,000 Volts).
  • the high voltage V 2 causes a buildup of positive charge in the electrode layer 12 and negative charge in the electrode layer 14.
  • the accumulated charge creates an electrostatic force that pulls the electrode layers 12 and 14 together and compresses the dielectric layer 16.
  • the compression of the dielectric layer 16 broadens its surface area to &2 such that the surface area &2 is greater than the original surface area ai.
  • the compression of the dielectric layer 16 thins the dielectric layer 16 to a thickness of d2 such that the thickness d2 is less than the original thickness di.
  • FIG. 2 A is a perspective view of a dielectric layer 26 that includes compliant structural regions, represented by a region 27, and fluid-filled regions, represented by a region 29 (illustrated as cross-hatched).
  • the compliant structural regions in the dielectric layer 26 are operable to compress or expand in response to an external compressive force.
  • the fluid-filled regions in the dielectric layer 26 provide a fluid material operable to flow into a breach that may form in the dielectric layer 26.
  • a fluid is not limited to liquids, but may include gels, viscoelastic elastomers, viscoelastic substances, high viscosity substances, etc.
  • the compliant structural regions in the dielectric layer 26 enable the dielectric layer 26 to return, or substantially return, to its original shape after deformation. The ability of the dielectric layer 26 to return to its original shape may be regarded as dimensional stability.
  • the fluid-filled regions in the dielectric layer 26 enable self-healing of the dielectric layer 26.
  • the compliant structural regions in the dielectric layer 26 can be a lattice made from a compliant material with a high dielectric strength constructed in a thin layer.
  • the compliant structural regions in the dielectric layer 26 can be a dielectric sponge material, a porous dielectric material, and/or an open-celled material.
  • the compliant structural regions in the dielectric layer 26 can be an insulating material (e.g., plastic material) that can be made softer by soaking it with a dielectric fluid.
  • the fluid-filled regions in the dielectric layer 26 can be occupied by a dielectric fluid, a dielectric liquid, a dielectric gel, a dielectric viscoelastic substance, a silicone oil, a silicone gel, etc.
  • the dielectric layer 26 can be a thin dielectric sponge saturated with silicone oil.
  • the dielectric layer 26 can be saturated with an insulating inert material (e.g. vegetable oil).
  • the probability of a short circuit in the dielectric layer 26 can be reduced by forming the structures so that the electrode layers 12 and 14 can slide over the corresponding surfaces of the dielectric layer 26.
  • the electrode layers 12 and 14 can be made softer than the dielectric layer 26 and the electrode layers 12 and 14 can be decoupled and separable from the dielectric layer 26 to allow movement.
  • the softer electrode layers 12 and 14 can expand and slide over the slippery oily surface of the dielectric layer 26 which can decrease the probability of structural deformations forming, and therefore decrease the probability of a short circuit.
  • Strain may be regarded as a measure of the deformation of the actuator 10 in response to an application of a voltage to the electrode layers 12 and 14. The higher the strain, the more actuator motion and the more work that can be done by the actuator 10.
  • FIG. 2B is an exploded perspective view of the actuator 10 implemented with the dielectric layer 26 and the electrode layers 12 and 14.
  • the electrode layers 12 and 14 can be formed so that each is separable from the dielectric layer 26, which can yield a sliding movement that can increase strain.
  • the electrode layers 12 and 14 can be formed onto the respective upper and lower surfaces of the dielectric layer 26 so that they can stretch along with the dielectric layer 26.
  • the electrode layers 12 and 14 and the dielectric layer 26 can be cut into any desired shape and form factor for the actuator 10.
  • the electrode layers 12 and 14 can float on the dielectric layer 26 and can expand and contract independently (differentially) from the dielectric layer 26 because of a low friction provided by the fluid in the dielectric layer 26.
  • FIG. 3A is a cross sectional view that shows an electrical short circuit 25 between the electrode layers 12 and 14 and through the dielectric layer 26.
  • FIG. 3B is a cross sectional view that shows a breach 25A formed in the dielectric layer 26 as a result of the short circuit 25.
  • FIG. 3C is a cross sectional view that shows a healed breach 25B after dielectric material flows from the fluid-filled regions in the dielectric layer 26 into the breach 25A.
  • the electrical short circuit 25 can be caused by electrical stress when a voltage applied to the actuator 10 exceeds a breakdown limit of the dielectric layer 26. Breaches caused by mechanical stress when the dielectric layer 26 is damaged by an external force can be healed by the flow of dielectric material from the fluid-filled regions in the dielectric layer 26. Breaches caused by a pre-existing imperfection in the material that makes up the dielectric layer 26 can also be healed by the flow of dielectric material from the fluid- filled regions in the dielectric layer 26.
  • FIG. 4A is a cross sectional view that shows a dielectric layer 46 which includes a dielectric gel that is operable to provide self-healing of the dielectric layer 46 and return, or substantially return, to its original shape after deformation.
  • the dielectric gel in the dielectric layer 46 can be fluid enough to enable the dielectric gel to flow into and heal a breach through the dielectric layer 46 but firm enough to at least substantially return to the original shape of the dielectric layer 46.
  • the dielectric gel in the dielectric layer 46 may be a silicone gel.
  • the electrode layers 12 and 14 can be formed onto respective upper and lower surfaces of the dielectric layer 46 so that the electrode layers 12 and 14 are separable from the dielectric layer 46.
  • the electrode layers 12 and 14 can be formed onto respective upper and lower surfaces of the dielectric layer 46 so that the electrode layers 12 and 14 stretch in concert with the dielectric layer 46.
  • the electrode layers 12 and 14 and the dielectric layer 46 can be cut into any desired shape.
  • FIG. 4B is a cross sectional view that shows a breach 45A formed in the dielectric layer 46.
  • the breach 45A can be caused by an electrical short circuit, mechanical stress in the dielectric layer 46, a manufacturing defect in the dielectric layer, a laceration of the dielectric layer (e.g., a cut or a tear), etc.
  • FIG. 4C is a cross sectional view that shows a healed breach 45B after the dielectric gel of the dielectric layer 46 flows into and heals the breach 45A.
  • FIGS. 5A-5C show structures that can make the electrode layer 12 softer and separable from a self-healing dielectric layer and able to slide over a self-healing dielectric layer.
  • the electrode layer 14 can be made with similar structures.
  • FIG. 5A is a cross sectional view that shows a sandwich structure in an embodiment of the electrode layer 12.
  • the electrode layer 12 includes an electrically conductive layer 50 enclosed in an electrically insulating layer 52. Both the conductive layer 50 and the insulating layer 52 may be a compliant, flexible, pliable, and/or elastic material.
  • the conductive material in the electrode layer 12 may be a carbon-based material (e.g. carbon powder or carbon paste) and the insulating layer 52 may be a silicone -based material.
  • the electrode layer 12 can be formed by forming an insulating layer (e.g., silicone), applying a conductive layer (e.g., carbon paste) onto the insulating layer, applying another insulating layer over the conductive layer, and sealing the sandwich structure.
  • the entire electrode layer 12 may be elastic due to the elasticity of the layers that make up the electrode layer 12. Accordingly, the shape of the electrode layer 12 may be manipulated to conform to changes in the shapes of adjacent structures (e.g., a dielectric layer). Further, due to the properties of the layers of the electrode layer 12, a laceration (e.g., a cut or a tear) of the electrode layer 12 may not affect the functioning of the electrode layer 12 as an electrode. Accordingly, an actuator formed by the electrode layers 12 and 14 and a dielectric layer can continue operating after being lacerated.
  • a laceration e.g., a cut or a tear
  • FIG. 5B is a cross sectional view that shows the sandwich structure of the electrode layer 12 after being cut, exposing an edge 54 of the layer 50.
  • the exposed edge 54 can be sealed with an insulating material (e.g., a silicone paste).
  • the electrode layer 12 can originate as a sheet of electrically conductive material enclosed in an insulator, then cut into any desired shape, and sealed with insulating material as needed.
  • FIG. 5C is a cross sectional view that shows the electrode layer 12 formed by a mixture 58 of insulating material (e.g., silicon) and an electrically conductive material (e.g., carbon powder or carbon paste).
  • the mixture 58 of insulating material and electrically conductive material enables the electrode layer 12 to be made softer than and separable from a corresponding dielectric layer (e.g., the dielectric layer 26) and able to slide over the corresponding dielectric layer and increase actuator strain.
  • An actuator with a self-healing dielectric structure and composition can be used to raise and lower an external surface (e.g., the sides of the electrodes facing away from the dielectric layer) in a motion that can be felt at the external surface.
  • the raising and lowering motion can be used to provide haptic feedback at the external surface.
  • the actuator can be used to provide an artificial muscle for pixels on a display surface that can be raised or lowered, thereby creating a texture on the display surface that can be felt.
  • An artificial muscle for a display surface can provide dynamic buttons or other shapes on the display surface.
  • the haptic feedback can be used to provide information access for visually impaired people as well as make information access more enjoyable for people with sight.
  • An actuator with a self-healing dielectric structure and composition can provide an action in a medical device.
  • the actuator 10 can provide a silent and efficient pump action or a valve action in a medical device.
  • peristaltic pumps and valves that can be used to drive or control blood flow within a body when replacing defective natural components.
  • the self-healing properties of the actuator 10 can increase the operational life and reliability of medical devices and lower healthcare costs.
  • the electrode 12 may include various applications. For example, because of the electrode's 12 elastic and/or resilient properties, it may have medical uses on or inside a patient's body. In another example, the electrode 12 can be superior to other electrodes in various environments including aquatic environments and high or low pressure environment (e.g., outer space).
  • the contraction of the actuator 10 perpendicular to the plane of the electrodes 12 and 14 and the expansion of the actuator 10 in directions parallel to that same plane can yield a number of desirable actuator characteristics.
  • the actuator 10 can provide silence of operation, high energy efficiency, negligible heat production, and a flexible compliant form factor.
  • the actuator 10 can provide smooth natural movement. These characteristics stand in stark contrast to electric motors, which include hard structures, jerky movements, mechanical whirring sounds, high power consumption, and high heat production.
  • the actuator 10 can be used in a robotic system.
  • the actuator 10 can benefit any application which requires movement but is highly intolerant of heat, sound, or excessive power consumption.
  • a further application for the actuator 10 is making deformable surfaces for optics and aerospace. Because the actuator 10 can be made in any size, shape, or configuration, entire surfaces can be made out of them. In other words, the electrode and dielectric layers of the actuator 10 may be compliant, the actuator 10 can be formed in shapes other than a flat sheet (e.g., in a bended shape). For example, the actuator 10 may be formed to assume the shape of a classic light bulb, and thereby imitate the movement of a jellyfish.
  • FIGS. 6A-6B show actuators structured to maximize actuator active surface area in minimal volumes in one or more embodiments of the invention. Possible structures include stacked structures and rolled structures.
  • FIG. 6A is an exploded perspective view of an actuator 60 made up of a set of actuator layers stacked one on top of another vertically.
  • Each actuator layer includes a dielectric layer and an electrode layer (e.g. the top actuator layer includes a dielectric layer 62 and an electrode layer 64).
  • the electrode layers of the actuator 60 alternately connect to positive and negative voltages via a pair of power lines 61 and 63.
  • the number of actuator layers in the actuator 60 can be increased to increase the effective surface area of the actuator 60 in a relatively small volume.
  • a stack actuator capable of moving an arm, for example, could typically require several hundred layers to achieve a desired power. If a single defect occurs in any layer at any time, the entire actuator could be rendered useless. The cost and difficulty of making such an actuator would be worthwhile if the actuator would continue properly operating for a reasonable period (e.g., not damaged by a debilitating breach).
  • the manufacturing demands for making an actuator with no defects are very high.
  • the actuator 10 With the ability to self-heal, the need to completely eliminate any microscopic defects in the actuator 10 is removed, and the process of manufacturing a stronger actuator with many layers is made dramatically simpler. In addition, the actuator 10 may be far more robust than a traditional actuator. Further, with the ability to self-heal, the actuator 10 may be manufactured in sheets and then cut and stacked or configured in any desired manner. The net result is that the actuators can be easier and cheaper to make, and reliable enough that investment can be made in real-world applications for them.
  • the dielectric layer 62 can be a self-healing dielectric layer, similar to the dielectric layer 26 (FIG. 2A) or the dielectric layer 46 (FIG. 4A).
  • the electrode layer 64 can be a conductive layer enclosed in an insulator similar to the electrode layer 12 (FIG. 5A).
  • the self-healing structures in the actuator 60 can increase its reliability of the actuator 60 and the sandwich structure in its electrode layers enhance its usability.
  • the actuator layers for the actuator 60 can be cut from sheets of dielectric and conductive layers into a desired circular shape or shapes.
  • the electrode layer in each actuator layer can then be attached to the appropriate power line 61 or 63 and then the layers can be stacked, as many as are desired for a particular application.
  • a sandwich structure in the electrode layers separable from the dielectric layers can facilitate attachment of leads to the power lines 61 and 63.
  • FIG. 6B is perspective view of an actuator 66 made by rolling up a dielectric layer 67 and electrode layer 68.
  • the dielectric layer 67 and the electrode layer 68 may be cut to desired shapes from a larger sheet of dielectric and electrode layers.
  • the dielectric layer 67 can have a self-healing structure to increase reliability and the electrode layer 68 can have a sandwich structure to enhance usability (e.g., attachment of power leads, clips, etc.).
  • the actuator 10 includes a first electrode layer 12 including a first surface and a second electrode layer 14 including a second surface.
  • the first and second surfaces of the electrode layers 12 and 14 provide surfaces that can act on a dielectric layer in an active region of the actuator 10.
  • the first electrode layer 12 and the second electrode layer 14 can provide a means for compressing and/or expanding a dielectric layer.
  • the first electrode layer 12 and the second electrode layer 14 can each have a surface area that corresponds to a surface area of a dielectric layer.
  • the first electrode layer 12 and the second electrode layer 14 can each include a thin layer of electrically conductive material.
  • the actuator 10 includes a dielectric layer 16 coupled with the first surface and the second surface.
  • the coupling enables the first and second electrode layers 12 and 14 to act on the dielectric layer 16 and create actuator motion.
  • the first surface of the first electrode layer 12 can be coupled with an upper surface of the dielectric layer 16 and the second surface of the second electrode layer 14 can be coupled with a lower surface of the dielectric layer 16.
  • the dielectric layer 16 includes a compliant structure operable to compress or expand in response to a voltage applied to the first electrode layer 12 and the second electrode layer 14.
  • a compliant structure can be a structure that is flexible, pliable, and/or elastic. The compression and expansion provides a smooth actuator motion that mimics natural muscle. Accordingly, the dielectric layer 16 provides a flexible active region for the actuator 10.
  • the dielectric layer 16 can be a thin sheet of compliant, flexible, pliable dielectric material.
  • the compliant structure includes at least one selected from a group consisting of a porous dielectric material, an open-celled material, and a material having a lattice structure. Accordingly, the compliant structure may include pores and/or channels.
  • the compliant structure can be a sponge-like or a foam-like material.
  • the compliant structure includes a fluid material operable to flow into a breach of the compliant structure.
  • the flow of fluid material into the breach can heal the breach and restore the dielectric properties of the dielectric layer 16 and restore the actuator 10 to proper operation.
  • the fluid material can be any material that can flow into a breach and restore the dielectric properties interrupted by the breach.
  • the fluid material includes at least one selected from a group consisting of a dielectric fluid, a dielectric liquid, a dielectric gel, a dielectric viscoelastic substance, and a silicone oil.
  • the dielectric layer 16 is operable to continue electrically insulating the first electrode layer 12 and the second electrode layer 14 after the fluid material flows into a breach in the dielectric layer 16. A breach healed in this manner can increase the useful life and reliability of the actuator 10 and facilitate use in applications such as medical devices.
  • the first electrode layer 12 and the second electrode layer 14 are operable to move toward or away from one another in response to a voltage applied to the first electrode layer 12 and the second electrode layer 14.
  • the magnitude and duty cycle of the applied voltage together with the motion of the electrode layers 12 and 14 and dielectric layer 16 can yield a smooth quiet motion of the actuator 10.
  • the compliant structure causes the dielectric layer 16 to return, or substantially return, to its original shape after deformation.
  • a lattice implementation of the compliant structure can enable the structure to return at least substantially to its original shape after deformation, keeping the fluid in place while the fluid maintains the integrity of the dielectric layer 16.
  • the compliant structure allows the actuator 10 to flex and provide a desired actuator motion while still at least substantially maintaining its shape.
  • the dielectric layer 16 includes a dielectric gel having a firmness that enables the dielectric layer 16 to return, or substantially return, to its original shape after deformation and allows the dielectric gel to flow into the breach and heal the breach.
  • a balance can be achieved between a fluidity of the dielectric gel for enabling healing of a breach and a firmness of the dielectric gel for returning the dielectric layer 16 to its original shape.
  • the first electrode layer 12 and the second electrode layer 14 each include an electrically conductive material 50 at least partially enclosed by an electrically insulating material 52.
  • the electrically conductive material may include carbon powder or carbon paste. Enclosing the carbon paste at least partially in an insulating material can facilitate coupling of the electrode layers 12 and 14 to a fluid-soaked dielectric structure when a layer of carbon paste or powder could not be directly applied thereon.
  • Partially or fully enclosing the electrically conductive material in an insulating material can isolate the conductive material from the dielectric layer 16. At the same time, the electrode layer is thereby flexible (e.g., able to stretch with the dielectric layer).
  • the first electrode layer 12 and the second electrode layer 14 are formed onto and separable from the dielectric layer 16.
  • the separable electrode layers 12 and 14 can enhance ease of use when attaching electrical leads and when forming actuator structures from sheets of material.
  • the first electrode layer 12 and the second electrode layer 14 are operable to stretch with the dielectric layer 16. Enclosing the conductive material 50 in an insulating material 52 enables the first and second electrode layers 12 and 14 to be formed onto the dielectric layer 16 and be stretchable with the dielectric layer 16 while also allowing the electrode layers 12 and 14 to be separable from the dielectric layer 16.
  • a method for making an actuator includes providing a layer of dielectric material including a compliant structure and containing a fluid material operable to flow within the compliant structure and into a breach of the compliant structure.
  • the layer of dielectric material can be a sheet of porous dielectric material including a silicone gel or fluid, a sheet of open-celled material including a silicone gel or fluid, or any lattice structure capable of at least substantially returning to original shape while enabling flow of fluid or gel material for healing a breach.
  • the sheet of dielectric material can be a thin sheet of dielectric sponge material soaked with a silicone gel or fluid.
  • the sheet of dielectric material can be a thin sheet of dielectric gel (e.g., silicone gel).
  • a method for making an actuator includes providing a layer of dielectric material including a compliant structure and containing a fluid material operable to flow within the compliant structure and into a breach of the compliant structure.
  • a method for making an actuator includes providing a first electrode layer and a second electrode layer each operable to slide over a respective surface of the layer of dielectric material. The sliding action can increase strain in an actuator for preventing short circuits.
  • a method for making an actuator includes forming the layer of dielectric material and the first and second electrode layers into an actuator. Layers or sheets of dielectric material and electrodes can be cut into any shape and stacked or rolled as needed when forming a desired actuator form factor.
  • an actuator includes a dielectric layer 16 disposed between the first electrode layer 12 and the second electrode layer 14, where the dielectric layer 16 includes a compliant structure operable to compress or expand in response to a voltage applied to the first electrode layer 12 and the second electrode layer 14.
  • the first electrode layer 12 and the second electrode layer 14 are operable to stretch with the dielectric layer 16.
  • the first electrode layer 12 and the second electrode layer 14 are operable to bend with the dielectric layer 16.
  • FIG. 7 shows a flowchart of a method for making an actuator in one or more embodiments.
  • a layer of dielectric material having a compliant structure and containing a material selected to flow within the compliant structure such that when a breach forms in the compliant structure, the material responds by flowing into the breach and healing the breach.
  • a layer of dielectric material may be provided at step 700 by forming a thin layer of dielectric material having a lattice, sponge, porous structure, or open-celled structure and saturating the layer of dielectric material with a fluid, oil, or gel having dielectric properties and fluid properties.
  • a layer of dielectric material may be provided at step 700 by forming a thin layer of a dielectric gel having enough firmness to return to its original shape but enough fluid characteristics so that the dielectric gel can flow into breaches.
  • a first electrode layer and a second electrode layer are provided each operable to slide over a respective surface of the layer of dielectric material.
  • the layers of electrode material can be separable from the layer of dielectric material.
  • the layers of electrode material can stretch along with the layer of dielectric material when under a compressive force.
  • the layers of electrode material can include a layer of electrically conductive material enclosed in layers of insulating material or a mixture of an insulating material and an electrically conductive material.
  • the layer of dielectric material and the first and second electrode layers are formed into a dielectric elastomer actuator.
  • the layers can be cut into desired shapes and the cut portions can be stacked or rolled as needed given the overall form factor of the dielectric elastomer actuator.
  • FIG. 8 shows a flowchart of a method for making an actuator in one or more embodiments. While the various steps in this flowchart are presented and described sequentially, one of ordinary skill will appreciate that some or all of the steps can be executed in different orders and some or all of the steps can be executed in parallel. Further, in one or more embodiments, one or more of the steps described below can be omitted, repeated, and/or performed in a different order. Accordingly, the specific arrangement of steps shown in FIG. 8 should not be construed as limiting the scope of the invention.
  • a dielectric layer having a compliant structure operable to compress or expand in response to an external compressive force.
  • the dielectric layer provides an active region of motion and may or may not have a self- healing structure.
  • a sheet of electrode layers is formed by forming a first layer of insulator material, disposing a layer of conductive material onto the first layer, and forming a second layer of insulator material on the layer of conductive material.
  • Disposing a layer of conductive material may include painting the first layer with a carbon paste or coating the first layer with another conductive material.
  • the sheet of electrode layers is cut into a first electrode layer and a second electrode layer and the first and second electrode layers are affixed to respective upper and lower surfaces of the dielectric layer.
  • the first and second electrode layers may be laminated onto the dielectric layer so that the first and second electrode layers stretch with the dielectric layer but are also separable from the dielectric layer.

Abstract

L'invention concerne un actionneur, comprenant : une première couche d'électrode comprenant une première surface ; une seconde couche d'électrode comprenant une seconde surface ; et une couche diélectrique couplée à la première surface et à la seconde surface, la couche diélectrique comprenant une structure élastique apte à se comprimer ou à s'étendre en réponse à une tension appliquée sur la première couche d'électrode et la seconde couche d'électrode, et la structure élastique comprenant un matériau fluide apte à s'écouler dans une brèche de la structure élastique.
PCT/US2014/050971 2013-08-15 2014-08-13 Actionneur en élastomère diélectrique WO2015023803A1 (fr)

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Cited By (13)

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EP3401762A1 (fr) * 2017-05-11 2018-11-14 Immersion Corporation Systèmes d'actionnement autocicatrisants pour des systèmes haptiques
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WO2022043804A1 (fr) * 2020-08-25 2022-03-03 Toyota Jidosha Kabushiki Kaisha Structures d'actionnement en couches comprenant des muscles artificiels
US11370496B2 (en) 2020-01-31 2022-06-28 Toyota Motor Engineering & Manufacturing North America, Inc. Programmable texture surfaces having artificial muscles
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US11611293B2 (en) 2020-03-13 2023-03-21 Toyota Motor Engineering & Manufacturing North America, Inc. Artificial muscles having a reciprocating electrode stack
US11827459B2 (en) 2020-10-16 2023-11-28 Artimus Robotics Inc. Control of conveyor systems using hydraulically amplified self-healing electrostatic (HASEL) actuators

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DE102016200153B4 (de) 2016-01-08 2022-08-25 Robert Bosch Gmbh Elektromechanischer Wandler und Verfahren zur Herstellung eines elektromechanischen Wandlers
WO2017165282A1 (fr) * 2016-03-21 2017-09-28 President And Fellows Of Harvard College Techniques et dispositifs de fabrication utilisant des élastomères diélectriques
US10995779B2 (en) 2017-03-22 2021-05-04 The Regents Of The University Of Colorado Hydraulically amplified self-healing electrostatic actuators
WO2018175741A1 (fr) * 2017-03-22 2018-09-27 The Regents Of The University Of Colorado, A Body Corporate Transducteurs électrostatiques autocicatrisants à amplification hydraulique
US11408452B2 (en) 2017-03-22 2022-08-09 The Regents Of The University Of Colorado Hydraulically amplified self-healing electrostatic actuators
EP3601810A4 (fr) * 2017-03-22 2020-12-23 The Regents of the University of Colorado, A Body Corporate Transducteurs électrostatiques autocicatrisants à amplification hydraulique
EP3401762A1 (fr) * 2017-05-11 2018-11-14 Immersion Corporation Systèmes d'actionnement autocicatrisants pour des systèmes haptiques
US10440848B2 (en) 2017-12-20 2019-10-08 Immersion Corporation Conformable display with linear actuator
CN111293922B (zh) * 2018-12-10 2024-04-26 丰田自动车工程及制造北美公司 具有夹紧构造的软体致动器
CN111293922A (zh) * 2018-12-10 2020-06-16 丰田自动车工程及制造北美公司 具有夹紧构造的软体致动器
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US20200185590A1 (en) * 2018-12-11 2020-06-11 Facebook Technologies, Llc Spatially addressable nanovoided polymers
US11594672B2 (en) * 2018-12-11 2023-02-28 Meta Platforms Technologies, Llc Spatially addressable nanovoided polymers
US11448798B1 (en) 2018-12-11 2022-09-20 Meta Platforms Technologies, Llc Nanovoided graded-index optical elements, optical arrays, and methods of forming the same
US11370496B2 (en) 2020-01-31 2022-06-28 Toyota Motor Engineering & Manufacturing North America, Inc. Programmable texture surfaces having artificial muscles
US11689119B2 (en) 2020-01-31 2023-06-27 Toyota Motor Engineering & Manufacturing North America, Inc. Variable stiffening device comprising electrode stacks in a flexible envelope
US11139755B2 (en) 2020-01-31 2021-10-05 Toyota Motor Engineering & Manufacturing North America, Inc. Variable stiffening device comprising electrode stacks in a flexible envelope
US11453347B2 (en) 2020-03-12 2022-09-27 Toyota Motor Engineering & Manufacturing North America, Inc. Suction devices having artificial muscles
US11611293B2 (en) 2020-03-13 2023-03-21 Toyota Motor Engineering & Manufacturing North America, Inc. Artificial muscles having a reciprocating electrode stack
US11491646B2 (en) 2020-08-25 2022-11-08 Toyota Motor Engineering & Manufacturing North America, Inc. Layered actuation structures comprising artificial muscles
WO2022043804A1 (fr) * 2020-08-25 2022-03-03 Toyota Jidosha Kabushiki Kaisha Structures d'actionnement en couches comprenant des muscles artificiels
US11827459B2 (en) 2020-10-16 2023-11-28 Artimus Robotics Inc. Control of conveyor systems using hydraulically amplified self-healing electrostatic (HASEL) actuators

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