WO2015022891A1 - 温湿度センサ - Google Patents
温湿度センサ Download PDFInfo
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- WO2015022891A1 WO2015022891A1 PCT/JP2014/070702 JP2014070702W WO2015022891A1 WO 2015022891 A1 WO2015022891 A1 WO 2015022891A1 JP 2014070702 W JP2014070702 W JP 2014070702W WO 2015022891 A1 WO2015022891 A1 WO 2015022891A1
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N27/00—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
- G01N27/02—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance
- G01N27/22—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating capacitance
- G01N27/223—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating capacitance for determining moisture content, e.g. humidity
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01K—MEASURING TEMPERATURE; MEASURING QUANTITY OF HEAT; THERMALLY-SENSITIVE ELEMENTS NOT OTHERWISE PROVIDED FOR
- G01K7/00—Measuring temperature based on the use of electric or magnetic elements directly sensitive to heat ; Power supply therefor, e.g. using thermoelectric elements
- G01K7/16—Measuring temperature based on the use of electric or magnetic elements directly sensitive to heat ; Power supply therefor, e.g. using thermoelectric elements using resistive elements
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01K—MEASURING TEMPERATURE; MEASURING QUANTITY OF HEAT; THERMALLY-SENSITIVE ELEMENTS NOT OTHERWISE PROVIDED FOR
- G01K7/00—Measuring temperature based on the use of electric or magnetic elements directly sensitive to heat ; Power supply therefor, e.g. using thermoelectric elements
- G01K7/16—Measuring temperature based on the use of electric or magnetic elements directly sensitive to heat ; Power supply therefor, e.g. using thermoelectric elements using resistive elements
- G01K7/18—Measuring temperature based on the use of electric or magnetic elements directly sensitive to heat ; Power supply therefor, e.g. using thermoelectric elements using resistive elements the element being a linear resistance, e.g. platinum resistance thermometer
- G01K7/20—Measuring temperature based on the use of electric or magnetic elements directly sensitive to heat ; Power supply therefor, e.g. using thermoelectric elements using resistive elements the element being a linear resistance, e.g. platinum resistance thermometer in a specially-adapted circuit, e.g. bridge circuit
- G01K7/203—Measuring temperature based on the use of electric or magnetic elements directly sensitive to heat ; Power supply therefor, e.g. using thermoelectric elements using resistive elements the element being a linear resistance, e.g. platinum resistance thermometer in a specially-adapted circuit, e.g. bridge circuit in an oscillator circuit
Definitions
- This invention relates to a temperature / humidity sensor for detecting temperature and humidity.
- Temperature / humidity sensors capable of detecting temperature and humidity are, for example, Japanese Utility Model Laid-Open No. 7-20536 (Patent Document 1), Japanese Patent Laid-Open No. 6-148122 (Patent Document 2), Japanese Patent Laid-Open No. 58-70153. It is described in the gazette (patent document 3).
- This temperature / humidity sensor includes a moisture sensitive film for measuring humidity, and detects humidity by a change in the magnitude of resistance or capacitance.
- Patent Document 4 Japanese Patent Application Laid-Open No. 61-14556
- Patent Document 5 Japanese Translation of PCT International Publication No. 2012-508877
- An object of the present invention is to provide a temperature / humidity sensor that can constitute a highly accurate oscillation circuit and is small and easy to manufacture.
- the present invention relates to a temperature / humidity sensor, comprising: a substrate; a first electrode provided on the substrate; a linear second electrode provided at least partially along the first electrode; and the second electrode.
- a moisture-sensitive film provided between the portion along the first electrode and the first electrode;
- the second electrode forms an inductor.
- the first electrode is made of a first metal layer provided on the substrate.
- the moisture sensitive film is provided on the first metal layer.
- the second electrode includes a spiral wiring and a signal extraction wiring portion.
- the spiral wiring is made of a second metal layer provided on the moisture sensitive film and forms an inductor.
- the signal extraction wiring portion is made of the first metal layer, and three-dimensionally intersects with the spiral wiring from the central portion of the spiral wiring to the outside.
- the first electrode includes an electrode plate made of the first metal layer and provided in a region on the substrate that is different from the three-dimensional intersection with the spiral wiring in the signal extraction wiring portion.
- the first electrode is made of the first metal layer, is provided in a region on the substrate that is different from the three-dimensional intersection with the spiral wiring in the signal extraction wiring portion, and the spiral wiring and Includes overlapping wiring sections.
- the second metal layer includes platinum or molybdenum.
- the first electrode has a spiral shape in plan view and is provided on the substrate.
- the second electrode has a spiral shape in plan view, and is provided on the substrate at an interval along the first electrode.
- the moisture sensitive film is provided on the substrate so as to fill the gap between the first electrode and the second electrode.
- a highly accurate and miniaturized temperature / humidity sensor can be realized.
- FIG. 1 is a perspective view showing a configuration of a temperature / humidity sensor of Embodiment 1.
- FIG. 2 is a plan view showing a configuration of a temperature and humidity sensor according to Embodiment 1.
- FIG. 3 is an equivalent circuit diagram of the temperature / humidity sensor of Embodiment 1.
- FIG. It is a circuit diagram of an oscillation circuit incorporating a temperature and humidity sensor.
- 6 is a plan view showing a configuration of a temperature and humidity sensor of a modification of the first embodiment.
- FIG. FIG. 6 is a diagram in which the spiral wiring in FIG. 5 is removed in order to explain the shape of the first electrode. It is a figure for demonstrating using a temperature / humidity sensor as a temperature sensor.
- FIG. 6 is a plan view showing a configuration of a temperature and humidity sensor according to Embodiment 2.
- FIG. 6 is a schematic cross-sectional view of a temperature / humidity sensor according to Embodiment 2.
- FIG. 5 is a perspective view showing a schematic cross section of a temperature and humidity sensor according to a second embodiment.
- FIG. 6 is an equivalent circuit diagram of the temperature / humidity sensor according to the second embodiment. It is a figure which shows the shape which mounted the temperature / humidity sensor of Embodiment 2 in IC.
- FIG. 1 is a perspective view showing the configuration of the temperature and humidity sensor of the first embodiment.
- FIG. 2 is a plan view showing the configuration of the temperature and humidity sensor of the first embodiment. 1 and 2, the temperature / humidity sensor 1 includes a substrate 2, a first electrode 4 provided on the substrate 2, and a linear shape provided at least partially along the first electrode 4. A second electrode 6 and a moisture sensitive film 8 provided between the first electrode 4 and a portion of the second electrode 6 along the first electrode 4 are provided. The second electrode 6 has a spiral-shaped portion in plan view so as to form an inductor.
- the temperature / humidity sensor 1 includes pads PA, PB, and PC.
- the first electrode 4 is made of a first metal layer provided on the substrate 2.
- the moisture sensitive film 8 is provided on the first metal layer.
- the second electrode 6 includes a spiral wiring 7 and a signal extraction wiring portion 10.
- the spiral wiring 7 is made of a second metal layer provided on the moisture sensitive film 8 and forms an inductor.
- the signal extraction wiring portion 10 is made of the first metal layer, and three-dimensionally intersects with the spiral wiring 7 from the central portion of the spiral wiring 7 to the outside. That is, the signal extraction wiring portion 10 intersects the spiral wiring 7 with the moisture sensitive film 8 interposed therebetween.
- One end of the spiral wiring 7 is connected to the pad PC, and the other end is connected to the signal extraction wiring portion 10.
- One end of the signal extraction wiring portion 10 is connected to the pad PA, and the other end is connected to the other end of the spiral wiring 7.
- the first electrode 4 includes an electrode plate 5 made of a first metal layer.
- the electrode plate 5 is provided on the substrate 2 in a region different from the three-dimensional intersection with the spiral-shaped wiring 7 in the signal extraction wiring unit 10, and the arrangement area of the signal extraction wiring unit 10 is depressed in plan view. It is U-shaped.
- the electrode plate 5 is connected to the pad PB.
- the second electrode 6 functions as both an inductor and a metal resistor. Since the resistance value between the pads PA-PC connected to the second electrode 6 varies depending on the temperature, the temperature / humidity sensor 1 can also be used as a temperature sensor by detecting the resistance value between the pads PA-PC. It is.
- the substrate 2 is a silicon (Si) substrate on which a silicon dioxide (SiO 2 ) film is formed as an insulating film.
- the substrate 2 may be a dielectric substrate.
- the first metal layer is made of gold (Au), aluminum (Al), copper (Cu), platinum (Pt), molybdenum (Mo), or an alloy thereof.
- the moisture sensitive film 8 is made of any one of photosensitive polyimide, porous silicon, and porous dielectric, and preferably made of photosensitive polyimide.
- the second metal layer is made of gold (Au), aluminum (Al), copper (Cu), platinum (Pt), molybdenum (Mo), or an alloy of any of these.
- the second metal layer is preferably made of either platinum or molybdenum having a large resistance temperature count.
- the moisture sensitive film 8 preferably has the same shape as the spiral wiring 7 as shown in FIG. Thereby, the surface area of the exposed part of the moisture sensitive film 8 to the outside increases, and the sensitivity as a humidity sensor can be improved.
- FIG. 3 is an equivalent circuit diagram of the temperature / humidity sensor 1 according to the first embodiment.
- the inductor L ⁇ b> 1 corresponds to an inductor composed of the inductance of the spiral wiring 7.
- the variable capacitor C2 includes a moisture sensitive film 8 as a dielectric, and a first electrode 4 and a second electrode 6 that face each other with the moisture sensitive film 8 interposed therebetween.
- the nodes PA, PB, and PC in FIG. 3 electrically correspond to the pads PA, PB, and PC in FIG. Further, DC connection is prevented by connecting a capacitor C3 between the pads PA and PC.
- the capacitor C3 is prepared separately from the temperature / humidity sensor 1.
- the variable capacitor C2 and the capacitor C3 constitute a capacitor C1.
- FIG. 4 is a circuit diagram of an oscillation circuit in which the temperature / humidity sensor 1 of the first embodiment is incorporated.
- a parallel connection portion of the capacitor C1 and the inductor L1 of the resonance circuit shown in FIG. 4 corresponds to the circuit of FIG.
- the temperature / humidity sensor 1 can be used not only for the resonance circuit (tank circuit) shown in FIG. 4 but also for the resonance circuit of the Cl series resonance system.
- a three-terminal element having PB and PC is used.
- FIG. 5 is a plan view showing a configuration of a temperature / humidity sensor 101 according to a modification of the first embodiment.
- FIG. 6 is a diagram in which the spiral wiring 7 of FIG. 5 is removed in order to explain the shape of the first electrode.
- temperature / humidity sensor 101 includes first electrode 4 ⁇ / b> A instead of first electrode 4 in the configuration of temperature / humidity sensor 1 shown in FIG. 2. .
- the first electrode 4 in FIG. 2 is provided in a region on the substrate 2 that is different from the three-dimensional intersection with the spiral wiring 7 in the signal extraction wiring portion 10 and is U-shaped in plan view.
- a plate 5 was included.
- the first electrode 4A includes a wiring portion having a shape substantially similar to that of the spiral wiring 7 and connection wiring portions 5A and 5B that connect adjacent wiring portions. That is, the wiring portion of the first electrode 4A overlaps the spiral wiring 7 in plan view.
- FIG. 7 is a diagram for explaining the use of the temperature / humidity sensor 1 shown in FIG. 2 as a temperature sensor.
- the signal extraction wiring portion 10 and the spiral wiring 7 are connected between the pad PA and the pad PC. Therefore, the resistance value between the signal extraction wiring portion 10 and the spiral wiring 7 is substantially equal to the resistance value between the pad PA and the pad PC.
- FIG. 8 is a diagram showing the relationship between the resistance value and temperature of the temperature and humidity sensor 1 in which the second metal layer is made of platinum.
- the second metal layer forming the spiral wiring 7 is preferably made of platinum. In this case, as shown in FIG. 8, the change in the ambient temperature and the resistance value ratio shows good linearity.
- FIG. 9 is a plan view showing the configuration of the temperature and humidity sensor of the second embodiment.
- FIG. 10 is a schematic cross-sectional view of the temperature and humidity sensor of the second embodiment.
- FIG. 11 is a perspective view showing a schematic cross section of the temperature and humidity sensor of the second embodiment.
- the temperature / humidity sensor 201 is a linear shape formed so as to be at least partially along the substrate 2, the first electrode 4 ⁇ / b> B provided on the substrate 2, and the first electrode 4 ⁇ / b> B.
- a second electrode 6 and a moisture-sensitive film 8 provided between the first electrode 4B and the second electrode 6 facing each other at a part thereof are provided.
- the second electrode 6 has a spiral shape in plan view so as to form an inductor.
- the first electrode 4B has a spiral shape in plan view and is provided on the substrate 2.
- the second electrode 6 has a spiral shape in plan view, and is provided on the substrate 2 at an interval along the first electrode 4B.
- the moisture sensitive film 8 is provided on the substrate 2 so that the portion 8B shown in FIG. 11 fills the interval between the first electrode 4B and the second electrode 6.
- the first electrode 4 ⁇ / b> B and the second electrode 6 are covered with a moisture sensitive film 8.
- One end of the first electrode 4B is connected to the pad PB1, and the other end is connected to the pad PB2.
- One end of the second electrode 6 is connected to the pad PC, and the other end is connected to the pad PA.
- the first electrode 4B and the second electrode 6 are provided on the same plane on the substrate 2, that is, at the same height from the substrate 2. ing. For this reason, the first electrode 4 ⁇ / b> B and the second electrode 6 face each other in a direction parallel to the substrate 2.
- the first electrode 4B and the second electrode 6 are preferably formed by etching a metal layer formed in the same process using a photolithography technique.
- FIG. 12 is an equivalent circuit diagram of the temperature / humidity sensor 201 of the second embodiment.
- the circuit diagram shown in FIG. 12 is basically the same as the circuit diagram described in FIG. 3, but shows that the pad PB1 or the pad PB2 corresponds to a connection node between the capacitor C1 and the capacitor C2. The point is different.
- a capacitor C3 may be connected between the pad PB1 or PB2 and the pad PC outside the temperature / humidity sensor 201. At this time, the resistance may be lowered by connecting the pad PB1 and the pad PB2 with an external wiring.
- FIG. 13 is a diagram showing a shape in which the temperature / humidity sensor 201 according to the second embodiment is mounted on the IC 401.
- a detection CMOS-ASIC that constitutes an oscillation circuit is used.
- the external terminals T 1 to T 6 are arranged around the temperature / humidity sensor 201, and the temperature / humidity sensor 201 is arranged at the center of the IC 401.
- FIG. 14 is a plan view showing a configuration of a temperature / humidity sensor 301 according to a modification of the second embodiment.
- FIG. 15 is a schematic cross-sectional view of a temperature / humidity sensor 301 according to a modification of the second embodiment.
- the first electrode 4 ⁇ / b> C and the first electrode 4 ⁇ / b> D are provided on both sides of the second electrode 6.
- the first electrodes 4C and 4D have a spiral shape in plan view and are provided on the substrate 2.
- the second electrode 6 has a spiral shape in plan view, and is provided on the substrate 2 with a gap along the first electrodes 4C and 4D.
- the substrate 2 is formed such that the space between the first electrode 4C and the second electrode 6 is filled with the portion 8C2 shown in FIG. 15 and the space between the first electrode 4D and the second electrode 6 is filled with the portion 8C1. It is provided above.
- the first electrodes 4C and 4D and the second electrode 6 are covered with a moisture sensitive film 8.
- One end of the first electrode 4C is connected to the pad PB1, and the other end is connected to the pad PB2.
- One end of the first electrode 4D is connected to the pad PB3, and the other end is connected to the pad PB4.
- One end of the second electrode 6 is connected to the pad PC, and the other end is connected to the pad PA.
- the first electrodes 4C and 4D and the second electrode 6 are the same on the substrate 2, that is, the same from the substrate 2. It is provided at the height. For this reason, the first electrodes 4 ⁇ / b> C and 4 ⁇ / b> D and the second electrode 6 face each other in a direction parallel to the substrate 2.
- first electrode 4C and the first electrode 4D may be used as inductors, and the second electrode 6 may be used as a capacitor.
- the temperature / humidity sensor 301 of the modification of the second embodiment can also realize a highly accurate and small-sized temperature / humidity sensor.
- two or more electrodes constituting the inductor are provided on the substrate 2 and a moisture sensitive film is provided so as to cover the electrodes.
- the resistance value between the input and output of the electrode is a temperature sensor. That is, the electrode functions as both an inductor and a metal resistor.
- the temperature / humidity sensor is formed by a simple process, for example, forming electrodes by a CMOS semiconductor process and forming a moisture sensitive film by spin coating. Can be manufactured.
- Temperature / humidity sensor 2, substrate, 4, 4A, 4B, 4C, 4D first electrode, 5 electrode plate, 5A, 5B connection wiring part, 6 second electrode, 7 spiral-shaped wiring, 8 moisture sensitive film 10, signal extraction wiring part, C1, C2, C3 capacitor, L1 inductor, PA, PB, PC pad, T1 to T6 external terminals.
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Abstract
Description
好ましくは、第1電極は、平面視して渦巻き状の形状を有し、基板上に設けられている。第2電極は、平面視して渦巻状の形状を有し、第1電極に沿って間隔をあけて基板上に設けられている。感湿膜は、第1電極と第2電極との間隔を埋めるように基板上に設けられている。
図1は、実施の形態1の温湿度センサの構成を示す斜視図である。
図1、図2を参照して、温湿度センサ1は、基板2と、基板2に設けられた第1電極4と、第1電極4に、少なくとも一部分が沿うように設けられた線状の第2電極6と、第2電極6における第1電極4に沿う部分と第1電極4との間に設けられている感湿膜8とを備える。第2電極6は、インダクタを形成するように、平面視して渦巻状の形状の部分を有する。また、温湿度センサ1は、パッドPA,PB,PCを有する。
図2、図3を参照して、インダクタL1は、渦巻形状配線7のインダクタンスからなるインダクタに相当する。また、可変キャパシタC2は、誘電体としての感湿膜8と、感湿膜8を介在させて対向する第1電極4と第2電極6とを含んで構成される。図3のノードPA,PB,PCは、図2のパッドPA,PB,PCに電気的に対応する。そして、パッドPA-PC間にキャパシタC3を接続することによってDC直結を防いでいる。なお、キャパシタC3は温湿度センサ1とは別に用意されている。可変キャパシタC2とキャパシタC3は、キャパシタC1を構成している。
図5は、実施の形態1の変形例の温湿度センサ101の構成を示す平面図である。
図9は、実施の形態2の温湿度センサの構成を示す平面図である。図10は、実施の形態2の温湿度センサの模式断面図である。図11は、実施の形態2の温湿度センサの模式断面を示した斜視図である。
図14は、実施の形態2の変形例の温湿度センサ301の構成を示す平面図である。図15は、実施の形態2の変形例の温湿度センサ301の模式断面図である。図14、図15に示す構成では、第2電極6の両脇に第1電極4Cと第1電極4Dが設けられている。
Claims (6)
- 基板と、
前記基板に設けられた第1電極と、
前記第1電極に、少なくとも一部分が沿うように設けられた線状の第2電極と、
前記第2電極における前記第1電極に沿う部分と前記第1電極との間に設けられている感湿膜と
を備え、
前記第2電極は、インダクタを形成する、温湿度センサ。 - 前記第1電極は、前記基板上に設けられた第1金属層からなり、
前記感湿膜は、前記第1金属層上に設けられており、
前記第2電極は、渦巻形状配線と、信号取出配線部とを含み、
前記渦巻形状配線は、前記感湿膜の上に設けられた第2金属層からなり、前記インダクタを形成し、
前記信号取出配線部は、前記第1金属層からなり、前記渦巻形状配線の中央部分から外側に向けて前記渦巻形状配線と立体交差する、請求項1に記載の温湿度センサ。 - 前記第1電極は、前記第1金属層からなり、前記基板上であって前記信号取出配線部における前記渦巻形状配線との立体交差部分とは異なる領域に設けられている、電極板を含む、請求項2に記載の温湿度センサ。
- 前記第1電極は、前記第1金属層からなり、前記基板上であって前記信号取出配線部における前記渦巻形状配線との立体交差部分とは異なる領域に設けられており、かつ、前記渦巻形状配線と重なる配線部を含む、請求項2に記載の温湿度センサ。
- 前記第2金属層は、白金またはモリブデンを含む、請求項2~請求項4のいずれか1項に記載の温湿度センサ。
- 前記第1電極は、平面視して渦巻状の形状を有し、前記基板上に設けられており、
前記第2電極は、平面視して渦巻状の形状を有し、前記第1電極に沿って間隔をあけて前記基板上に設けられており、
前記感湿膜は、前記第1電極と前記第2電極との間隔を埋めるように前記基板上に設けられている、請求項1に記載の温湿度センサ。
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JP2015531785A JP6098724B2 (ja) | 2013-08-13 | 2014-08-06 | 温湿度センサ |
CN201480044709.XA CN105452853B (zh) | 2013-08-13 | 2014-08-06 | 温湿度传感器 |
US15/041,262 US10338023B2 (en) | 2013-08-13 | 2016-02-11 | Temperature and humidity sensor |
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JP2013-168039 | 2013-08-13 | ||
JP2013168039 | 2013-08-13 |
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US15/041,262 Continuation US10338023B2 (en) | 2013-08-13 | 2016-02-11 | Temperature and humidity sensor |
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US20160161435A1 (en) | 2016-06-09 |
US10338023B2 (en) | 2019-07-02 |
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CN105452853A (zh) | 2016-03-30 |
CN105452853B (zh) | 2018-01-30 |
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