WO2015004972A1 - X線検出信号処理ユニットおよびそれを備えるx線分析装置 - Google Patents
X線検出信号処理ユニットおよびそれを備えるx線分析装置 Download PDFInfo
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- WO2015004972A1 WO2015004972A1 PCT/JP2014/061557 JP2014061557W WO2015004972A1 WO 2015004972 A1 WO2015004972 A1 WO 2015004972A1 JP 2014061557 W JP2014061557 W JP 2014061557W WO 2015004972 A1 WO2015004972 A1 WO 2015004972A1
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- preamplifier
- ray
- buffer amplifier
- processing unit
- signal processing
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01T—MEASUREMENT OF NUCLEAR OR X-RADIATION
- G01T1/00—Measuring X-radiation, gamma radiation, corpuscular radiation, or cosmic radiation
- G01T1/16—Measuring radiation intensity
- G01T1/17—Circuit arrangements not adapted to a particular type of detector
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- the present invention relates to wiring of an X-ray detection signal processing unit in an X-ray analyzer.
- the X-ray detection is performed from the coaxial cable 55, which is a signal cable for outputting the output signal of the X-ray detector 4, as shown in FIG.
- a preamplifier power cable 60 for supplying power to the preamplifier 50 of the detector 4 and a bias cable (not shown) for supplying a bias power to the X-ray detector 4 are separately provided.
- the coaxial cable 55 and the preamplifier power supply cable 60 are required as many as the number of measurement channels, the wiring is more complicated, and the appearance is also complicated. Met. Further, in the scanning fluorescent X-ray analyzer (not shown), the coaxial cable 55 and the preamplifier power supply cable 60 move together with the X-ray detector 4 at the time of scanning. It was a load.
- the conventional X-ray detection signal processing unit 5C has such various problems.
- the output signal of the X-ray detector has a wide frequency band of 10 kHz to 20 MHz with a fast frequency at the time of rising of 10 MHz to 20 MHz and a slow frequency of attenuation of 10 kHz.
- the output signal of the X-ray detector having a broadband frequency cannot be separated from the power source.
- the present invention has been made in view of the above-described conventional problems, and does not require an output signal cable and a preamplifier power cable of the X-ray detector separately, and the X-ray detector 4 can be formed only by the coaxial cable 55.
- X-ray detection signal processing that can send output signals and power from the preamplifier power supply 56, simplify wiring, eliminate incorrect wiring, poor contact, interference with mechanical structures, and reduce the weight of the wire. It is an object to provide a unit and an X-ray analysis apparatus including the unit.
- an X-ray detection signal processing unit is an X-ray detection signal processing unit that processes an output signal of an X-ray detector with a pulse processor, the X-ray detector A preamplifier for amplifying the output signal of the preamplifier, a buffer amplifier for stabilizing the output signal of the preamplifier, an output terminal of the buffer amplifier and the pulse processor via a first capacitor on the buffer amplifier side, A coaxial cable connected to the pulse processor via a second capacitor; and a preamplifier power supply for supplying power to the preamplifier and the buffer amplifier.
- the preamplifier power supply, the preamplifier, and the buffer amplifier are connected to the preamplifier power supply side via a first inductor, and the preamplifier and the buffer amplifier side are connected to a second inductor,
- a feedback circuit is provided that is connected by a coaxial cable and connects the end of the first capacitor on the side of the coaxial cable and the input end of the buffer amplifier via a third capacitor.
- the output signal cable of the X-ray detector and the amplifier power supply cable are not required separately, and the output signal of the X-ray detector and the above-mentioned Power from the preamplifier power supply can be sent, wiring can be simplified to eliminate erroneous wiring, poor contact, interference with mechanical structures and the like, and the weight of the wire can be reduced.
- the X-ray analyzer of the second configuration of the present invention includes the X-ray detection signal processing unit of the first configuration of the present invention.
- the same effect as the X-ray detection signal processing unit of the first configuration of the present invention is obtained. Can play.
- This apparatus irradiates a sample S with a primary X-ray 2 from an X-ray source 1 (for example, an X-ray tube), and the intensity of the generated secondary X-ray 3 is measured by an X-ray detector 4 without using a spectroscopic element.
- the output signal of the X-ray detector 4 corresponding to the measured X-ray intensity is processed by the X-ray detection signal processing unit 5A, and contained in the sample S based on the processed measurement data.
- a fluorescent X-ray analyzer is used for performing qualitative analysis, quantitative analysis, etc.
- This apparatus includes an X-ray detection signal processing unit 5A for processing an output signal of the X-ray detector 4 by a pulse processor 52.
- the X-ray detection signal processing unit 5A includes a preamplifier 50 that amplifies the output signal of the X-ray detector 4, a buffer amplifier 51 that stabilizes the output signal of the preamplifier 50, and an output terminal B2 of the buffer amplifier 51. Power is supplied to the input terminal P of the pulse processor 52 to the buffer amplifier side via the first capacitor 53 and to the pulse processor side via the second capacitor 54, to the preamplifier 50 and the buffer amplifier 51. And a preamplifier power supply 56 to be supplied.
- the preamplifier power source 56, the preamplifier 50, and the buffer amplifier 51 are connected to the preamplifier power source side through the first inductor 57, and the preamplifier 50 and the buffer amplifier side are second.
- the inductor 58 is connected by a coaxial cable 55.
- the first terminal T 1 provided at the coaxial cable side end of the first capacitor 53 and the second terminal T 2 provided at the coaxial cable side end of the second capacitor 54 are connected by the coaxial cable 55.
- the X-ray detection signal processing unit 5A includes a feedback circuit 7 that connects the first terminal T1 and the input terminal B1 of the buffer amplifier 51 via the third capacitor 59 and feeds back the output signal of the buffer amplifier 51.
- the operation of the X-ray analyzer of this embodiment will be described with reference to FIG.
- the intensity of the secondary X-ray 3 generated from the sample S is detected by the X-ray detector 4.
- An output signal from the X-ray detector 4 is sent to the X-ray detection signal processing unit 5A, and data processing is performed by the X-ray detection signal processing unit 5A.
- An analysis result of the sample S is obtained based on the processed measurement data.
- the output signal from the X-ray detector 4 sent to the X-ray detection signal processing unit 5A enters the preamplifier 50, where it is converted from a current signal to a voltage signal and amplified.
- the amplified output signal of the preamplifier 50 is sent to the buffer amplifier 51 and stabilized.
- the output signal of the buffer amplifier 51 passes through the first capacitor 53, is sent to the coaxial cable 55 via the first terminal T1, passes through the first capacitor 53, and passes through the third capacitor 59 from the first terminal T1. Feedback to the input terminal B1 of the buffer amplifier 51 to correct distortion of the output waveform of the buffer amplifier 51.
- the output signal of the buffer amplifier 51 sent to the coaxial cable 55 passes through the second terminal T2, is sent to the pulse processor 52 via the second capacitor 54 and the input terminal P of the pulse processor 52, and is processed.
- the analysis result of the sample S is obtained based on the measurement data sent to the pulse processor 52 and processed.
- the power from the preamplifier power source 56 passes through the first inductor 57 connected to the preamplifier power source 56, is sent to the coaxial cable 55 via the second terminal T2, and passes through the first terminal T1. Then, it passes through the second inductor 58 and is supplied to the preamplifier 50 and the buffer amplifier 51.
- FIG. 2 shows the signal waveform at the input terminal B1 of the buffer amplifier 51 (input waveform of the buffer amplifier 51), and the lower figure of FIG. 2 shows the signal waveform at the input terminal P of the pulse processor 52 (the output waveform of the buffer amplifier 51). Equivalent).
- the horizontal axis of the signal waveform is time, and the vertical axis is signal intensity (voltage).
- the rise time of the signal waveform is 0.05 ⁇ s (microseconds)
- the decay time is 10 ⁇ s
- this signal waveform has a wide frequency band of 10 kHz to 20 MHz. .
- the output waveform in the lower diagram of FIG. 2 shows a normal output waveform without undershoot and waveform disturbance. Even if the power supplied to the preamplifier 50 and the buffer amplifier 51 is superimposed on the coaxial cable 55 which is a signal cable from this normal output waveform, the normal waveform can be sent to the pulse processor 52. It can be seen that normal signal processing can be performed.
- the output signal cable of the X-ray detector and the preamplifier power supply cable are not required separately, and the output signal of the X-ray detector 4 and the pre-amplifier are only required by the coaxial cable 55.
- the power from the amplifier power supply 56 can be sent, and the wiring can be simplified to eliminate erroneous wiring, poor contact, interference with the machine structure, and the like, and the weight of the wire can be reduced.
- the X-ray detection signal processing unit 5B of the experimental apparatus produced prior to the present invention will be described below with reference to FIG.
- the X-ray detection signal processing unit 5B of the experimental apparatus shown in FIG. 4 does not include the feedback circuit 7 included in the X-ray detection signal processing unit 5A of the embodiment of the present invention, and the other configurations are the same.
- the power supplied from the preamplifier power source 56 is superimposed on the preamplifier 50 and the buffer amplifier 51 on the coaxial cable 55 which is a signal cable. Since the X-ray detection signal processing unit 5B of the experimental apparatus does not include the feedback circuit 7, the flow of the X-ray detection signal does not flow to the feedback circuit 7, but otherwise the X-ray detection of the embodiment of the present invention is performed.
- the flow is the same as that of the signal processing unit 5A.
- the flow of power supplied from the preamplifier power source 56 to the preamplifier 50 and the buffer amplifier 51 is the same as that of the X-ray detection signal processing unit 5A of the embodiment of the present invention.
- FIG. 3 shows the signal waveform at the input terminal B1 of the buffer amplifier 51 in the X-ray detection signal processing unit 5B of the experimental apparatus, and the lower figure in FIG. 3 shows the signal waveform at the input terminal P of the pulse processor 52.
- the output waveform in the lower diagram of FIG. 3 is greatly undershooted.
- the signal processing in the pulse processor 52 is greatly affected, and normal data processing is performed. I could't.
- the X-ray detection signal processing unit 5B of the experimental apparatus using a general circuit formed of an inductor and a capacitor, power supplied to the preamplifier 50 and the buffer amplifier 51 is superimposed on the coaxial cable 55 which is a signal cable.
- the present invention has been conceived as a result of various improvements.
- any X-ray analyzer provided with the X-ray detection signal processing unit 5A of the present invention may be used. It may be a fluorescent X-ray analyzer, a scanning fluorescent X-ray analyzer, an X-ray reflectivity measuring device, an X-ray diffractometer, or a combined X-ray analyzer in which these devices are combined.
- X-ray detectors 5A, 5B, 5C X-ray detection signal processing unit 50 Preamplifier 51 Buffer amplifier 52 Pulse processor 53 First capacitor 54 Second capacitor 55 Coaxial cable 56 Preamplifier power supply 57 First inductor 58 Second inductor 59 3rd capacitor
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- Life Sciences & Earth Sciences (AREA)
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Abstract
Description
5A、5B、5C X線検出信号処理ユニット
50 前置増幅器
51 バッファアンプ
52 パルスプロセッサ
53 第1コンデンサ
54 第2コンデンサ
55 同軸ケーブル
56 前置増幅器電源
57 第1インダクタ
58 第2インダクタ
59 第3コンデンサ
Claims (2)
- X線検出器の出力信号をパルスプロセッサで処理するX線検出信号処理ユニットであって、
X線検出器の出力信号を増幅する前置増幅器と、
前記前置増幅器の出力信号を安定化するバッファアンプと、
前記バッファアンプの出力端と前記パルスプロセッサとを、前記バッファアンプ側に第1コンデンサを介し、前記パルスプロセッサ側に第2コンデンサを介して接続する同軸ケーブルと、
前記前置増幅器および前記バッファアンプに電力を供給する前置増幅器電源とを備え、 前記前置増幅器電源と前記前置増幅器および前記バッファアンプとが、前記前置増幅器電源側に第1インダクタを介し、前記前置増幅器および前記バッファアンプ側に第2インダクタを介して、前記同軸ケーブルにより接続され、
前記第1コンデンサの前記同軸ケーブル側端と前記バッファアンプの入力端とを第3コンデンサを介して接続するフィードバック回路を備えるX線検出信号処理ユニット。 - 請求項1に記載のX線検出信号処理ユニットを備えるX線分析装置。
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CN201480038894.1A CN105358968B (zh) | 2013-07-10 | 2014-04-24 | X射线检测信号处理单元和具有它的x射线分析装置 |
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JP2013-144520 | 2013-07-10 | ||
JP2013144520A JP5593495B1 (ja) | 2013-07-10 | 2013-07-10 | X線検出信号処理ユニットおよびそれを備えるx線分析装置 |
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Citations (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2000329854A (ja) * | 1999-05-20 | 2000-11-30 | Hitachi Ltd | 放射線検出装置および電子顕微鏡および計測装置 |
JP2002532174A (ja) * | 1998-12-16 | 2002-10-02 | ボストン サイエンティフィック リミテッド | 超音波およびx線ビデオ交換システムのマルチモードビデオコントローラ |
JP3460199B2 (ja) * | 1994-10-14 | 2003-10-27 | 日本原子力研究所 | 放射線センサ等の直流高電圧供給システム |
JP4360895B2 (ja) * | 2003-12-11 | 2009-11-11 | 日立Geニュークリア・エナジー株式会社 | 中性子監視装置 |
JP4984811B2 (ja) * | 2006-10-13 | 2012-07-25 | 株式会社日立製作所 | 産業用x線ct装置 |
JP5028367B2 (ja) * | 2008-09-12 | 2012-09-19 | 日立Geニュークリア・エナジー株式会社 | ノイズ抑制装置及びそれを有するプラント |
JP2013015475A (ja) * | 2011-07-06 | 2013-01-24 | Shimadzu Corp | X線検出器 |
-
2013
- 2013-07-10 JP JP2013144520A patent/JP5593495B1/ja not_active Expired - Fee Related
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2014
- 2014-04-24 CN CN201480038894.1A patent/CN105358968B/zh not_active Expired - Fee Related
- 2014-04-24 WO PCT/JP2014/061557 patent/WO2015004972A1/ja active Application Filing
Patent Citations (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP3460199B2 (ja) * | 1994-10-14 | 2003-10-27 | 日本原子力研究所 | 放射線センサ等の直流高電圧供給システム |
JP2002532174A (ja) * | 1998-12-16 | 2002-10-02 | ボストン サイエンティフィック リミテッド | 超音波およびx線ビデオ交換システムのマルチモードビデオコントローラ |
JP2000329854A (ja) * | 1999-05-20 | 2000-11-30 | Hitachi Ltd | 放射線検出装置および電子顕微鏡および計測装置 |
JP4360895B2 (ja) * | 2003-12-11 | 2009-11-11 | 日立Geニュークリア・エナジー株式会社 | 中性子監視装置 |
JP4984811B2 (ja) * | 2006-10-13 | 2012-07-25 | 株式会社日立製作所 | 産業用x線ct装置 |
JP5028367B2 (ja) * | 2008-09-12 | 2012-09-19 | 日立Geニュークリア・エナジー株式会社 | ノイズ抑制装置及びそれを有するプラント |
JP2013015475A (ja) * | 2011-07-06 | 2013-01-24 | Shimadzu Corp | X線検出器 |
Also Published As
Publication number | Publication date |
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JP5593495B1 (ja) | 2014-09-24 |
CN105358968A (zh) | 2016-02-24 |
JP2015017866A (ja) | 2015-01-29 |
CN105358968B (zh) | 2017-03-15 |
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