WO2014201754A1 - Spacer manufacturing method, substrate, display apparatus, and electronic product - Google Patents

Spacer manufacturing method, substrate, display apparatus, and electronic product Download PDF

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Publication number
WO2014201754A1
WO2014201754A1 PCT/CN2013/080790 CN2013080790W WO2014201754A1 WO 2014201754 A1 WO2014201754 A1 WO 2014201754A1 CN 2013080790 W CN2013080790 W CN 2013080790W WO 2014201754 A1 WO2014201754 A1 WO 2014201754A1
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WO
WIPO (PCT)
Prior art keywords
spacer
substrate
photosensitive material
transparent polymer
monomer
Prior art date
Application number
PCT/CN2013/080790
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French (fr)
Chinese (zh)
Inventor
李红敏
李小和
刘永
张晓洁
Original Assignee
合肥京东方光电科技有限公司
京东方科技集团股份有限公司
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Publication of WO2014201754A1 publication Critical patent/WO2014201754A1/en

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Classifications

    • GPHYSICS
    • G02OPTICS
    • G02FOPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/13Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on liquid crystals, e.g. single liquid crystal display cells
    • G02F1/133Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
    • G02F1/1333Constructional arrangements; Manufacturing methods
    • G02F1/1339Gaskets; Spacers; Sealing of cells
    • G02F1/13394Gaskets; Spacers; Sealing of cells spacers regularly patterned on the cell subtrate, e.g. walls, pillars
    • GPHYSICS
    • G02OPTICS
    • G02FOPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/13Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on liquid crystals, e.g. single liquid crystal display cells
    • G02F1/133Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
    • G02F1/1333Constructional arrangements; Manufacturing methods
    • G02F1/1339Gaskets; Spacers; Sealing of cells
    • G02F1/13398Spacer materials; Spacer properties

Definitions

  • the present invention relates to the field of display technologies, and in particular, to a method for manufacturing a spacer, a substrate, a device, and an electronic product.
  • the display panel of the display device is generally composed of an array substrate, a liquid crystal layer and a color filter substrate.
  • a spacer Post Spacer, PS
  • an acrylic resin mixture solution is often used to prepare a spacer.
  • the main component of the acrylic resin mixture solution is an acrylic resin or an acrylic resin monomer and a photoinitiator.
  • the acrylic resin mixture solution is a light sensitive material, and the acrylic resin is used.
  • the mixture solution is coated on the substrate, and a spacer is formed by a process such as exposure development, and the spacer is preferably formed with various heights to achieve a better support effect.
  • the substrate 3 is coated with an acrylic resin mixture solution 2, and the Halftone mask I includes an opaque film.
  • the Halftone mask I includes an opaque film.
  • the portion of the substrate 3 that is blocked by the opaque portion is not irradiated with light, and the upper acrylic resin mixture is removed after development; where the substrate 3 is irradiated with light, due to the portion of the light-transmitting portion
  • the light intensity is stronger than that of the partially transparent portion, so that the thickness of the acrylic resin mixture remaining after development is relatively large, and a high-level main spacer 4 can be formed on the substrate corresponding to the fully transparent portion, and the corresponding portion is transparent.
  • a sub spacer 5 having a small height is formed on the substrate of the light portion.
  • the existing spacer material manufacturing method requires a halftone mask or a gray tone mask to expose the film, which increases the complexity of the process and increases the production cost; and is affected by the exposure precision, the spacer
  • the size of the object is relatively large, resulting in a small aperture ratio of the display panel, which increases the backlight cost.
  • the technical problem to be solved by the present invention is to provide a method for fabricating a spacer, a substrate, a display device, and an electronic product, which can increase the aperture ratio of the display device and reduce the production cost.
  • a method of making a spacer including:
  • the photosensitive material includes a first transparent polymer or a monomer thereof that is not wetted with the substrate;
  • the substrate on which the spacer pattern is formed is heated at a preset temperature and then cooled to cause the plurality of spacer patterns to be convex to form a spacer.
  • the plurality of spacer patterns have different sizes, and the spacer patterns of different sizes form spacers of different heights.
  • the forming a photosensitive material film for forming a spacer on the substrate comprises: including a photoinitiator, a first transparent polymer or a monomer thereof.
  • the photosensitive material solution further includes a second transparent polymer having a non-wetting property with the first transparent polymer and having wettability with the substrate or a monomer thereof.
  • the second transparent polymer is an acrylic resin. Further, in the above manufacturing method, the preset temperature is greater than a glass transition temperature of the first transparent polymer.
  • the surface energy of the first transparent polymer and the monomer thereof is
  • the surface energy is preferably 10-30 dynes/cm, and the surface energy is most preferably 25 dynss/cm.
  • the first transparent polymer is a styrene resin.
  • the heating the substrate on which the spacer pattern is formed, and forming the spacer pattern to form the spacer comprises:
  • the substrate on which the spacer pattern is formed is heated at a temperature of 150 to 300 degrees Celsius for 10 s 1800 s.
  • the substrate can be heated in a vacuum environment.
  • Embodiments of the present invention also provide a spacer for use in the above manufacturing method.
  • the embodiment of the invention further provides a substrate having a spacer made by the above manufacturing method.
  • Embodiments of the present invention also provide a display device including the substrate as described above.
  • Embodiments of the present invention also provide an electronic product including the display device as described above.
  • the photosensitive material film is subjected to exposure and development to form a plurality of spacer patterns on the substrate, and then the substrate is heated, and the molecules of the first transparent polymer or its monomer start to move at a high temperature due to the first transparent polymerization.
  • the material and its monomer and the substrate are not wetted.
  • the spacer pattern will be convex to form a spacer, thereby reducing the size of the spacer in the horizontal direction, thereby It is advantageous to increase the aperture ratio of the display device.
  • the technical solution of the present invention does not need to use a halftone mask or a gray tone mask for exposure, which reduces the complexity of the process and can reduce the production cost.
  • FIG. 1 is a schematic view showing the formation of a main spacer and a secondary spacer by a halftone mask in the prior art
  • FIG. 2 is a schematic view showing a method of fabricating a spacer according to an embodiment of the present invention.
  • Embodiments of the present invention provide a spacer, a method of manufacturing the same, a substrate, and a display device, which are capable of increasing the aperture ratio of the display device and reducing the production cost, in view of the above problems in the method of fabricating the conventional spacer.
  • Embodiments of the present invention provide a method for fabricating a spacer, including:
  • the photosensitive material includes a first transparent polymer or a monomer thereof that is not wetted with the substrate;
  • the photosensitive material film is exposed and developed to form a plurality of spacer patterns on the substrate, and then the substrate is heated, and the molecules of the first transparent polymer or its monomer start to move at a high temperature. Since the first transparent polymer and its monomer and the substrate are not wetted, according to the principle of minimum surface energy, in order to form a stable structure, the spacer pattern will be convexly formed to form a spacer, thereby reducing the level of the spacer at the level The size in the direction is advantageous to increase the aperture ratio of the display device.
  • the technical solution of the present invention does not need to use a halftone mask or a gray tone mask for exposure, which reduces the complexity of the process and can reduce the production cost.
  • the technical solution of the present invention can realize the formation of spacers of different heights by forming spacer patterns of different sizes, thereby realizing that the formed substrate and the display panel are not physically damaged.
  • the forming a photosensitive material film for forming a spacer on the substrate comprises:
  • a photosensitive material film is formed by coating (spin coating or knife coating) on the substrate, the photosensitive material solution includes a photoinitiator, and includes a first transparent polymer or a monomer thereof.
  • the photosensitive material solution may further include a first transparent polymer a second transparent polymer or a monomer thereof which is non-wetting and has wettability with the substrate, and the spacer pattern thus formed is composed of a first transparent polymer or a monomer thereof, a second transparent polymer or a monomer thereof
  • the molecules of the first transparent polymer or its monomer start to move, because the first transparent polymer and its monomer and the second transparent polymer and the monomer thereof have non-wetting property, according to the principle of minimum surface energy, Forming a stable structure, wherein the first transparent polymer or its monomer will bulge, and also the second transparent polymer or its monomer has a certain protrusion, which can reduce the spacer in the horizontal direction
  • the size is advantageous to increase the aperture ratio of the display device.
  • the preset temperature needs to be greater than a glass transition temperature of the first transparent polymer, so that the molecules of the first transparent polymer or its monomer can be caused to start moving.
  • the surface energy of the first transparent polymer and its monomer is 5 x 50 dynes/cm.
  • the second transparent polymer may be a acryl resin which is commonly used to make a spacer
  • the first transparent polymer may be a styrene resin having non-wetting property with an acrylic resin
  • the substrate on which the spacer pattern is formed is heated at a temperature of 150-300 degrees Celsius for 10 s to 1800 s, preferably in a vacuum, and after heating, the substrate on which the spacer is formed is cooled to room temperature, and the substrate is completed. Production of spacers.
  • Embodiments of the present invention also provide a spacer for use in the above manufacturing method.
  • the embodiment of the invention further provides a substrate having a spacer made by the above manufacturing method.
  • the substrate may be, but not limited to, an array substrate, a color filter substrate, or the like.
  • Embodiments of the present invention also provide a display device including the substrate as described above.
  • the structure of other parts of the display device can be referred to the prior art, and will not be described in detail herein.
  • the display device can be a liquid crystal display panel, an electronic paper, an OLED (Organic Light Emitting Diode) panel, a liquid crystal television, a liquid crystal display, a digital photo frame, a mobile phone, a tablet computer, etc., having any display function, as long as the display device It is only necessary to provide a spacer on the substrate of the device.
  • Embodiments of the present invention also provide an electronic product including the display device as described above.
  • Embodiment 1 The method for fabricating the spacer of the present invention will be described in detail below with reference to the drawings and specific embodiments: Embodiment 1
  • a plurality of spacers of different heights can be formed on the substrate, wherein the substrate can be an array substrate or a color filter substrate.
  • This embodiment specifically includes the following steps:
  • Step ah forming a photosensitive material solution, the main component of the photosensitive material solution being a first transparent polymer or a monomer thereof, a photoinitiator, wherein the first transparent polymer and the monomer thereof and the substrate are not wetted, the first transparent polymer
  • the molecular weight may range from several thousand to one million.
  • the first transparent polymer may be selected from styrene resins;
  • Step a2 spin-coating or scraping the photosensitive material solution on the substrate to form a film of the photosensitive material, wherein the size of the spacer can be reduced by controlling the thickness of the photosensitive material film, and the thickness of the photosensitive material film is smaller.
  • the size of the finally formed spacer is also smaller; in one embodiment of the present invention, the photosensitive material solution may be spin-coated or blade-coated on the substrate to form a film of the photosensitive material, and the coater is only used.
  • Step a3 Film of the photosensitive material on the substrate Exposure development is performed to form a plurality of spacer patterns of different sizes on the substrate.
  • the single-tone mask can be used for exposure, which reduces the complexity of the process and reduces the production cost.
  • the size of the spacer pattern is determined by the resolution of the exposure machine, ranging from several micrometers to several tens of micrometers; in one embodiment of the invention, the exposure material can be used for exposure and development of the photosensitive material film on the substrate.
  • the exposure machine is only an exemplary embodiment, and other types of suitable components can be used as long as the photosensitive material film on the substrate can be exposed and developed;
  • the step of heat-treating the substrate on which the spacer pattern is formed the heating temperature is required to be greater than the glass transition temperature of the styrenic resin, specifically, heating at a temperature of 150-300 Torr for 10 s to 1800 s, preferably in a vacuum.
  • the substrate is heated to avoid external influence on the spacer and reduce impurities in the spacer.
  • the molecular motion of the styrenic resin begins. Since the styrene resin does not wet with the substrate, the interface energy between them is large.
  • the spacer pattern in order to form a stable structure, the spacer pattern will be
  • the protrusions form spacers, and the spacer patterns of different sizes will form spacers of different heights, and the larger the size of the spacer pattern, the greater the height of the spacers formed;
  • Step a5 cooling the substrate on which the spacer is formed, preferably cooling to room temperature in a vacuum
  • the spacer can be fabricated to obtain a substrate on which the spacer is formed.
  • the substrate on which the spacer pattern is formed may be heated and cooled using a vacuum cover with a heating device, and the vacuum cover is merely an exemplary embodiment, as long as it can be formed
  • the substrate of the spacer pattern is heated and cooled, and other types of suitable components can also be used.
  • the increase in the height of the spacer pattern will result in a reduction in the size in the horizontal direction, which can greatly reduce the size of the finally formed spacer, which is advantageous in increasing the aperture ratio of the display device.
  • the height of the spacer can be controlled by controlling the size of the spacer pattern, and a plurality of spacers can be formed on the substrate, and the spacer can be realized by using a single-tone mask for exposure. The production can reduce the complexity of the process and reduce the production cost.
  • a plurality of spacers of different heights can be formed on the substrate, wherein the substrate can be an array substrate or a color filter substrate.
  • This embodiment specifically includes the following steps:
  • Step bl forming a photosensitive material solution, adding a first transparent polymer or a monomer thereof to a solution of an acrylic resin mixture used to prepare a spacer to form a photosensitive material solution, wherein the first transparent polymer and the acrylic resin are not mutually Infiltration, the first transparent polymer may have a molecular weight ranging from several thousand to one million. Specifically, the first transparent polymer may be selected from a styrene resin;
  • Step b2 As shown in (a) of FIG. 2, a photosensitive material solution is spin-coated or blade-coated on the substrate 3 to form a photosensitive material film 6, wherein the spacer can be reduced by controlling the thickness of the photosensitive material film.
  • the size of the object the smaller the thickness of the photosensitive material film, the smaller the size of the finally formed spacer;
  • Step b3 As shown in (b) iff of FIG. 2, the photosensitive material film 6 on the substrate 3 is exposed and developed, and a plurality of spacer patterns 8 of different sizes are formed on the substrate. In this step, a single tone mask is used. The exposure of the board can reduce the complexity of the process and reduce the production cost. Wherein, the size of the spacer pattern 8 is determined by the resolution of the exposure machine, ranging from several micrometers to several tens of micrometers;
  • Step b4 heat-treating the substrate 3 on which the spacer pattern 8 is formed, and the heating temperature is required to be larger than the glass transition temperature of the styrene resin, and specifically, may be heated at a temperature of 150 to 300 Torr for 10 s to 1800 s, preferably The substrate is heated in a vacuum to avoid external influence on the spacer and reduce impurities in the spacer. At high temperatures, the molecular motion of styrenic resins and their monomers begins. Because of the non-wetting property of styrenic resins and acrylic resins, the interface energy between them is large.
  • the styrene-like W grease and its monomer in the spacer pattern 8 will be convex, and the acrylic resin and the substrate are wettable, and the finally formed styrene-based resin is separated.
  • the spacers 7 of different sizes will form spacers of different heights, and the larger the size of the spacer pattern, the larger the height of the spacers formed;
  • Step 5 The substrate on which the spacer is formed is cooled, preferably cooled to room temperature in a vacuum, to complete the preparation of the spacer, and a substrate on which the spacer is formed is obtained.
  • the styrene resin and its monomer bulge will also drive the acrylic resin and its monomer to have certain protrusions. Due to the principle of mass conservation, the increase of the height of the spacer pattern will lead to the reduction of the size in the horizontal direction. This can reduce the size of the finally formed spacer in the horizontal direction, thereby contributing to an increase in the aperture ratio of the display device.
  • the height of the spacer can be controlled by controlling the size of the spacer pattern, and a plurality of spacers can be formed on the substrate, and the spacer can be realized by using a single-tone mask for exposure. The production can reduce the complexity of the process and reduce the production cost.
  • the photosensitive material solution includes one or two kinds of transparent polymers. Further, the photosensitive material solution may further include two or more kinds of transparent polymers, as long as one of the transparent polymers and other transparent ones are satisfied. The polymer and the substrate are not wetted. In the actual production process, in order to reduce the complexity of the process, in general, the photosensitive material solution includes one or two kinds of transparent poly.
  • the photosensitive material solution includes one or two kinds of transparent poly.

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  • Physics & Mathematics (AREA)
  • Nonlinear Science (AREA)
  • Mathematical Physics (AREA)
  • Chemical & Material Sciences (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Devices For Indicating Variable Information By Combining Individual Elements (AREA)
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Abstract

Provided are a spacer, a manufacturing method therefor, a substrate, and a display apparatus. The method for manufacturing the spacer comprises: forming, on a substrate (3), a photosensitive material thin film (6) used for manufacturing the spacer, the photosensitive material comprises a first transparent polymer or a monomer thereof, the first transparent polymer not infiltrating the substrate (3); exposing and developing the photosensitive material thin film (6), and forming multiple spacer patterns (8) with different sizes on the substrate (3); and in a preset temperature, heating the substrate (3) on which the spacer patterns (8) are formed, and then, cooling to enable the spacer patterns (8) to protrude to form the spacers, the spacer patterns (8) with different sizes forming spacers with different heights. By using the provided technical solutions, the aperture ratio of a display apparatus can be increased, and the production cost can be reduced.

Description

本发明涉及显示技术领域, 具体涉及一种隔垫物的制作方法、 基板、 显 :装置及电子产品。  The present invention relates to the field of display technologies, and in particular, to a method for manufacturing a spacer, a substrate, a device, and an electronic product.
示器) 的显示面板通常由阵列基板、 液晶层及彩膜基板构成, 为了控制液晶 层的厚度及其均一性,通常在彩膜基板或阵列基板上形成隔垫物 (Post Spacer, PS ) 以保证液晶盒厚。 The display panel of the display device is generally composed of an array substrate, a liquid crystal layer and a color filter substrate. In order to control the thickness of the liquid crystal layer and its uniformity, a spacer (Post Spacer, PS) is usually formed on the color filter substrate or the array substrate. Ensure that the LCD case is thick.
现有技术中常采用丙烯酸树脂类混合物溶液来制备隔垫物, 丙烯酸树脂 类混合物溶液的主要成分为丙烯酸树脂或丙烯酸树脂单体和光引发剂等, 丙 烯酸树脂类混合物溶液为光敏感材料, 将丙烯酸树脂类混合物溶液涂覆在基 板上, 经过曝光显影等工艺即可形成隔垫物, 隔垫物优选地形成有多种高度 以实现更好的支撑效果。  In the prior art, an acrylic resin mixture solution is often used to prepare a spacer. The main component of the acrylic resin mixture solution is an acrylic resin or an acrylic resin monomer and a photoinitiator. The acrylic resin mixture solution is a light sensitive material, and the acrylic resin is used. The mixture solution is coated on the substrate, and a spacer is formed by a process such as exposure development, and the spacer is preferably formed with various heights to achieve a better support effect.
为了形成多种高度的隔垫物, 需要使用半色调掩膜板或灰色调掩膜板 (Half-tone mask) 来进行曝光。 以采 ^半色调掩膜板或灰色调掩膜板进行曝 光为例, 如图 I的 (a) 所示, 基板 3上涂覆有丙烯酸树脂类混合物溶液 2, Halftone mask I包括有不透光部分、 部分透光部分和全透光部分, 在利用该 掩膜板曝光后, 如图 i的 (b)所示, 由于光照不同, 而导致丙烯酸树脂类混 合物上出现段差, 然后如图 1的 (c)所示, 基板 3上被不透光部分遮挡的地 方由于未被光照射, 上面的丙烯酸树脂类混合物在显影后被除去; 基板 3上 被光照射的地方, 由于全透光部分的光强比部分透光部分的光强大, 因此显 影后保留的丙烯酸树脂类混合物的厚度比较大, 能够在对应全透光部分的基 板上形成高度较大的主隔垫物 4, 在对应部分透光部分的基板上形成高度较 小的辅隔垫物 5。  In order to form spacers of various heights, it is necessary to perform exposure using a halftone mask or a half-tone mask. Taking the exposure of a halftone mask or a gray tone mask as an example, as shown in (a) of FIG. 1, the substrate 3 is coated with an acrylic resin mixture solution 2, and the Halftone mask I includes an opaque film. Part, part of the light-transmitting portion and the all-light-transmitting portion, after being exposed by the mask, as shown in (b) of Figure i, due to different illumination, a step difference occurs on the acrylic resin mixture, and then as shown in FIG. (c), the portion of the substrate 3 that is blocked by the opaque portion is not irradiated with light, and the upper acrylic resin mixture is removed after development; where the substrate 3 is irradiated with light, due to the portion of the light-transmitting portion The light intensity is stronger than that of the partially transparent portion, so that the thickness of the acrylic resin mixture remaining after development is relatively large, and a high-level main spacer 4 can be formed on the substrate corresponding to the fully transparent portion, and the corresponding portion is transparent. A sub spacer 5 having a small height is formed on the substrate of the light portion.
现有隔垫物的制作方法需要利 ^半色调掩膜板或灰色调掩膜板来迸行曝 光, 增加了工艺的复杂性, 提高了生产成本; 并且受曝光精度的影响, 隔垫 物的尺寸都比较大, 导致显示面板的开口率较小, 增加了背光成本。 The existing spacer material manufacturing method requires a halftone mask or a gray tone mask to expose the film, which increases the complexity of the process and increases the production cost; and is affected by the exposure precision, the spacer The size of the object is relatively large, resulting in a small aperture ratio of the display panel, which increases the backlight cost.
本发明要解决的技术问题是提供一种隔垫物的制作方法、 基板、 显示装 置及电子产品, 能够增大显示装置的开口率, 并可降低生产成本。 The technical problem to be solved by the present invention is to provide a method for fabricating a spacer, a substrate, a display device, and an electronic product, which can increase the aperture ratio of the display device and reduce the production cost.
为解决上述技术问题, 本发明的实施例提供技术方案如下:  In order to solve the above technical problem, the embodiments of the present invention provide the following technical solutions:
一方面, 提供一种隔垫物的制作方法, 包括:  In one aspect, a method of making a spacer is provided, including:
在基板上形成用于制作隔垫物的感光材料薄膜, 所述感光材料中包括有 与所述基板不浸润的第一透明聚合物或其单体;  Forming a photosensitive material film for forming a spacer on the substrate, wherein the photosensitive material includes a first transparent polymer or a monomer thereof that is not wetted with the substrate;
对所述感光材料薄膜迸行曝光显影,在所述基板上形成多个隔垫物图形; 以及  Exposing and developing the photosensitive material film to form a plurality of spacer patterns on the substrate;
对形成有隔垫物图形的基板在预设温度下进行加热, 然后冷却, 使所述 多个隔垫物图形凸起形成隔垫物。  The substrate on which the spacer pattern is formed is heated at a preset temperature and then cooled to cause the plurality of spacer patterns to be convex to form a spacer.
进一步地, 上述制作方法中, 所述多个隔垫物图形具有不同的尺寸, 而 不同尺寸的隔垫物图形形成不同高度的隔垫物。  Further, in the above manufacturing method, the plurality of spacer patterns have different sizes, and the spacer patterns of different sizes form spacers of different heights.
进一步地, 上述制作方法中, 所述在基板上形成用于制作隔垫物的感光 材料薄膜包括: 中包括有光引发剂、 第一透明聚合物或其单体。  Further, in the above manufacturing method, the forming a photosensitive material film for forming a spacer on the substrate comprises: including a photoinitiator, a first transparent polymer or a monomer thereof.
进一步地, 上述制作方法中, 所述感光材料溶液中还包括有与所述第一 透明聚合物具有不浸润性并与 述基板具有浸润性的第二透明聚合物或其单 体。  Further, in the above production method, the photosensitive material solution further includes a second transparent polymer having a non-wetting property with the first transparent polymer and having wettability with the substrate or a monomer thereof.
迸一歩地, 上述制作方法中, 所述第二透明聚合物为丙烯酸类树脂。 进一步地, 上述制作方法中, 所述预设温度大于所述第一透明聚合物的 玻璃化转变温度。  In the above production method, the second transparent polymer is an acrylic resin. Further, in the above manufacturing method, the preset temperature is greater than a glass transition temperature of the first transparent polymer.
进一步地, 上述制作方法中, 所述第一透明聚合物及其单体的表面能为 Further, in the above manufacturing method, the surface energy of the first transparent polymer and the monomer thereof is
5- 50dynes/cm, 所述表面能优选为 10-30 dynes/cm, 所述表面能最优选为 25 dynss/cm。 5-50 dynes/cm, the surface energy is preferably 10-30 dynes/cm, and the surface energy is most preferably 25 dynss/cm.
迸一歩地, 上述制作方法中, 所述第一透明聚合物为苯乙烯类树脂。 迸一步地, 上述制作方法中, 所述对形成有隔垫物图形的基板进行加热, 使所述隔垫物图形凸起形成隔垫物包括: In the above production method, the first transparent polymer is a styrene resin. Further, in the above manufacturing method, the heating the substrate on which the spacer pattern is formed, and forming the spacer pattern to form the spacer comprises:
将形成有隔垫物图形的基板在 150- 300摄氏度的温度中加热 10s 1800s。 优选地, 可以在真空环境下对所述基板进行加热。  The substrate on which the spacer pattern is formed is heated at a temperature of 150 to 300 degrees Celsius for 10 s 1800 s. Preferably, the substrate can be heated in a vacuum environment.
本发明实施例还提供了一种隔垫物, 为采用上述的制作方法制成。  Embodiments of the present invention also provide a spacer for use in the above manufacturing method.
本发明实施例还提供了一种基板,具有采用上述制作方法制成的隔垫物。 本发明实施例还提供了一种显示装置, 包括如上所述的基板。  The embodiment of the invention further provides a substrate having a spacer made by the above manufacturing method. Embodiments of the present invention also provide a display device including the substrate as described above.
本发明实施例还提供了一种电子产品, 包括如上所述的显示装置。  Embodiments of the present invention also provide an electronic product including the display device as described above.
本发明的实施例具有以下有益效果:  Embodiments of the present invention have the following beneficial effects:
上述方案中, 对感光材料薄膜进行曝光显影在基板上形成多个隔垫物图 形, 之后对基板进行加热, 在高温下第一透明聚合物或其单体的分子开始运 动, 由于第一透明聚合物及其单体与基板不浸润, 根据表面能最小原理, 为 了形成稳定的结构, 隔垫物图形将会凸起形成隔垫物, 这样可以减小隔垫物 在水平方向上的尺寸, 从而有利于增大显示装置的开口率。  In the above solution, the photosensitive material film is subjected to exposure and development to form a plurality of spacer patterns on the substrate, and then the substrate is heated, and the molecules of the first transparent polymer or its monomer start to move at a high temperature due to the first transparent polymerization. The material and its monomer and the substrate are not wetted. According to the principle of minimum surface energy, in order to form a stable structure, the spacer pattern will be convex to form a spacer, thereby reducing the size of the spacer in the horizontal direction, thereby It is advantageous to increase the aperture ratio of the display device.
此外, 本发明的技术方案不必采用半色调掩膜板或灰色调掩膜板来进行 曝光, 降低了工艺的复杂性, 能够减少生产成本。  In addition, the technical solution of the present invention does not need to use a halftone mask or a gray tone mask for exposure, which reduces the complexity of the process and can reduce the production cost.
图 1 为现有技术中采用半色调掩膜板迸行曝光形成主隔垫物和辅隔垫物 的示意图; 1 is a schematic view showing the formation of a main spacer and a secondary spacer by a halftone mask in the prior art;
图 2为本发明实施例隔垫物的制作方法的示意图。  2 is a schematic view showing a method of fabricating a spacer according to an embodiment of the present invention.
图标记  Graph mark
1 半色调掩膜板 2 丙烯酸树脂类混合物溶液 3 基板  1 halftone mask 2 acrylic resin mixture solution 3 substrate
4 主隔垫物 5 辅隔垫物 6 感光材料薄膜  4 main spacer 5 auxiliary spacer 6 photosensitive material film
7 苯乙烯类树脂隔垫物 8 隔垫物图形  7 styrenic resin spacers 8 spacer patterns
为使本发明的实施例要解决的技术问题、 技术方案和优点更加清楚, 下 面将结合 ^图及具体实施例进行详细描述。 现有隔垫物的制作方法中存在下述问题: 需要利用半色调掩膜板或灰色 调掩膜板来进行曝光, 增加了工艺的复杂性, 提高了生产成本; 并且受曝光 精度的影响, 隔垫物的尺寸都比较大, 导致显示面板的开口率较小, 增加了 背光成本。 本发明的实施例针对现有隔垫物的制作方法中的上述问题提供一 种隔垫物及其制作方法、 基板及显示装置, 能够增大显示装置的开口率, 并 可降低生产成本。 The technical problems, the technical solutions, and the advantages of the embodiments of the present invention will be more clearly described in the following description. The following problems exist in the manufacturing method of the existing spacer: It is necessary to use a halftone mask or a gray mask to perform exposure, which increases the complexity of the process and increases the production cost; and is affected by the exposure accuracy. The size of the spacers is relatively large, resulting in a small aperture ratio of the display panel, which increases the backlight cost. Embodiments of the present invention provide a spacer, a method of manufacturing the same, a substrate, and a display device, which are capable of increasing the aperture ratio of the display device and reducing the production cost, in view of the above problems in the method of fabricating the conventional spacer.
本发明实施例提供了一种隔垫物的制作方法, 包括:  Embodiments of the present invention provide a method for fabricating a spacer, including:
在基板上形成用于制作隔垫物的感光材料薄膜, 所述感光材料中包括有 与所述基板不浸润的第一透明聚合物或其单体;  Forming a photosensitive material film for forming a spacer on the substrate, wherein the photosensitive material includes a first transparent polymer or a monomer thereof that is not wetted with the substrate;
对所述感光材料薄膜进行曝光显影, 在所述基板上形成多个不同尺寸的 隔垫物图形;  Exposing and developing the photosensitive material film to form a plurality of different size spacer patterns on the substrate;
对形成有隔垫物图形的基板在预设温度下进行加热, 然后冷却, 使所述 隔垫物图形凸起形成隔垫物, 其中, 不同尺寸的隔垫物图形形成不同高度的 隔垫物。  Heating the substrate on which the spacer pattern is formed at a preset temperature, and then cooling, so that the spacer pattern is convexly formed to form a spacer, wherein different size spacer patterns form spacers of different heights .
本发明的隔垫物的制作方法, 对感光材料薄膜进行曝光显影在基板上形 成多个隔垫物图形, 之后对基板进行加热, 在高温下第一透明聚合物或其单 体的分子开始运动, 由于第一透明聚合物及其单体与基板不浸润, 根据表面 能最小原理, 为了形成稳定的结构, 隔垫物图形将会凸起形成隔垫物, 这样 可以减小隔垫物在水平方向上的尺寸, 从而有利于增大显示装置的开口率。  In the method for fabricating the spacer of the present invention, the photosensitive material film is exposed and developed to form a plurality of spacer patterns on the substrate, and then the substrate is heated, and the molecules of the first transparent polymer or its monomer start to move at a high temperature. Since the first transparent polymer and its monomer and the substrate are not wetted, according to the principle of minimum surface energy, in order to form a stable structure, the spacer pattern will be convexly formed to form a spacer, thereby reducing the level of the spacer at the level The size in the direction is advantageous to increase the aperture ratio of the display device.
此外, 本发明的技术方案不必采用半色调掩膜板或灰色调掩膜板来进行 曝光, 降低了工艺的复杂性, 能够减少生产成本。  In addition, the technical solution of the present invention does not need to use a halftone mask or a gray tone mask for exposure, which reduces the complexity of the process and can reduce the production cost.
此外, 本发明的技术方案通过形成不同尺寸的隔垫物图形即可实现形成 不同高度的隔垫物, 从而实现了所形成的基板和显示面板在物理蝕碰 ^不宜 受损。  In addition, the technical solution of the present invention can realize the formation of spacers of different heights by forming spacer patterns of different sizes, thereby realizing that the formed substrate and the display panel are not physically damaged.
具体地, 上述制作方法中, 所述在基板上形成用于制作隔垫物的感光材 料薄膜包括:  Specifically, in the above manufacturing method, the forming a photosensitive material film for forming a spacer on the substrate comprises:
在基板上涂布(旋涂或刮涂)一层感光材料溶液形成所述感光材料薄膜, 所述感光材料溶液中包括有光引发剂, 并包括有第一透明聚合物或其单体。  A photosensitive material film is formed by coating (spin coating or knife coating) on the substrate, the photosensitive material solution includes a photoinitiator, and includes a first transparent polymer or a monomer thereof.
迸一步地, 所述感光材料溶液中还可包括有与 iff述第一透明聚合物具有 不浸润性并与所述基板具有浸润性的第二透明聚合物或其单体, 这样形成的 隔垫物图形由第一透明聚合物或其单体、 第二透明聚合物或其单体组成, 在 高温下第一透明聚合物或其单体的分子开始运动, 由于第一透明聚合物及其 单体与第二透明聚合物及其单体具有不浸润性, 根据表面能最小原理, 为了 形成稳定的结构, 其中的第一透明聚合物或其单体将会凸起, 也会带动第二 透明聚合物或其单体有一定的凸起, 这样可以减小隔垫物在水平方向上的尺 寸, 认而有利于增大显示装置的开口率。 Further, the photosensitive material solution may further include a first transparent polymer a second transparent polymer or a monomer thereof which is non-wetting and has wettability with the substrate, and the spacer pattern thus formed is composed of a first transparent polymer or a monomer thereof, a second transparent polymer or a monomer thereof At the high temperature, the molecules of the first transparent polymer or its monomer start to move, because the first transparent polymer and its monomer and the second transparent polymer and the monomer thereof have non-wetting property, according to the principle of minimum surface energy, Forming a stable structure, wherein the first transparent polymer or its monomer will bulge, and also the second transparent polymer or its monomer has a certain protrusion, which can reduce the spacer in the horizontal direction The size is advantageous to increase the aperture ratio of the display device.
其中, 所述预设温度需要大于所述第一透明聚合物的玻璃化转变温度, 这样才可以促使第一透明聚合物或其单体的分子开始运动。 为了保证第一透 明聚合物或其单体能够形成凸起的隔垫物, 所述第一透明聚合物及其单体的 表面能为 5»50dynes/cm。  Wherein, the preset temperature needs to be greater than a glass transition temperature of the first transparent polymer, so that the molecules of the first transparent polymer or its monomer can be caused to start moving. In order to ensure that the first transparent polymer or its monomer is capable of forming a raised spacer, the surface energy of the first transparent polymer and its monomer is 5 x 50 dynes/cm.
具体地, 所述第二透明聚合物可以为现有常用来制作隔垫物的丙^酸树 脂,所述第一透明聚合物可以为与丙烯酸树脂具有不浸润性的苯乙烯类树脂, 所述对形成有隔垫物图形的基板进行加热, 使所述隔垫物图形凸起形成隔垫 物具体为:  Specifically, the second transparent polymer may be a acryl resin which is commonly used to make a spacer, and the first transparent polymer may be a styrene resin having non-wetting property with an acrylic resin, Heating the substrate on which the spacer pattern is formed, and forming the spacer pattern to form the spacer is specifically:
将形成有隔垫物图形的基板在 150- 300摄氏度的温度中加热 10s- 1800s, 优选在真空中进行加热, 在加热后, 将形成有隔垫物的基板冷却至室温, 即 可完成基板上隔垫物的制作。  The substrate on which the spacer pattern is formed is heated at a temperature of 150-300 degrees Celsius for 10 s to 1800 s, preferably in a vacuum, and after heating, the substrate on which the spacer is formed is cooled to room temperature, and the substrate is completed. Production of spacers.
本发明实施例还提供了一种隔垫物, 为采用上述的制作方法制成。  Embodiments of the present invention also provide a spacer for use in the above manufacturing method.
本发明实施例还提供了一种基板,具有采用上述制作方法制成的隔垫物。 所述基板可以但不限于为阵列基板、 彩膜基板等。  The embodiment of the invention further provides a substrate having a spacer made by the above manufacturing method. The substrate may be, but not limited to, an array substrate, a color filter substrate, or the like.
本发明实施例还提供了一种显示装置, 包括如上所述的基板。 显示装置 其他部分的结构可以参考现有技术, 对此本文不再详细描述。 该显示装置可 以为液晶显示面板、 电子纸、 OLED (Organic Light Emitting Diode, 有机发 光二极管) 面板、 液晶电视、 液晶显示器、 数码相框、 手机、 平板电脑等具 有任何显示功能的产品或部件,只要显示装置的基板上需要设置隔垫物即可。  Embodiments of the present invention also provide a display device including the substrate as described above. The structure of other parts of the display device can be referred to the prior art, and will not be described in detail herein. The display device can be a liquid crystal display panel, an electronic paper, an OLED (Organic Light Emitting Diode) panel, a liquid crystal television, a liquid crystal display, a digital photo frame, a mobile phone, a tablet computer, etc., having any display function, as long as the display device It is only necessary to provide a spacer on the substrate of the device.
本发明实施例还提供了一种电子产品, 包括如上所述的显示装置。  Embodiments of the present invention also provide an electronic product including the display device as described above.
下面结合^图及具体的实施例对本发明的隔垫物的制作方法进行详细介 绍: 实施例一 The method for fabricating the spacer of the present invention will be described in detail below with reference to the drawings and specific embodiments: Embodiment 1
本实施例可以实现在基板上形成多种不同高度的隔垫物, 其中基板可以 为阵列基板或彩膜基板。 本实施例具体包括以下步骤:  In this embodiment, a plurality of spacers of different heights can be formed on the substrate, wherein the substrate can be an array substrate or a color filter substrate. This embodiment specifically includes the following steps:
步骤 ah 形成感光材料溶液, 感光材料溶液的主要成分为第一透明聚合 物或其单体、 光引发剂, 其中, 第一透明聚合物及其单体与基板不浸润, 第 一透明聚合物的分子量范围可为几千至百万, 具体地, 第一透明聚合物可以 选用苯乙烯类树脂;  Step ah, forming a photosensitive material solution, the main component of the photosensitive material solution being a first transparent polymer or a monomer thereof, a photoinitiator, wherein the first transparent polymer and the monomer thereof and the substrate are not wetted, the first transparent polymer The molecular weight may range from several thousand to one million. Specifically, the first transparent polymer may be selected from styrene resins;
步骤 a2: 将感光材料溶液旋涂或刮涂在基板上形成一层感光材料薄膜, 其中, 可以通过控制感光材料薄膜的厚度来实现减小隔垫物的尺寸, 感光材 料薄膜的厚度越小, 最后形成的隔垫物的尺寸也越小; 在本发明的一个实施 例中, 可以采用涂布机将感光材料溶液旋涂或刮涂在基板上形成一层感光材 料薄膜, 而涂布机仅是一种示例性的实施方式, 只要能够将感光材料溶液旋 涂或刮涂在基板上形成一层感光材料薄膜,还可使用其他类型的合适的部件; 步骤 a3 : 对基板上的感光材料薄膜进行曝光显影, 在基板上形成多个不 同尺寸的隔垫物图形, 此步骤中, 采用单色调掩膜板迸行曝光即可, 降低了 工艺的复杂性, 能够减少生产成本。 其中, 隔垫物图形的尺寸由曝光机的分 辨率决定, 由几微米至数十微米不等; 在本发明的一个实施例中, 可以采用 曝光机对基板上的感光材料薄膜进行曝光显影, 而曝光机仅是一种示例性的 实施方式, 只要能够对基板上的感光材料薄膜迸行曝光显影, 还可使用其他 类型的合适的部件;  Step a2: spin-coating or scraping the photosensitive material solution on the substrate to form a film of the photosensitive material, wherein the size of the spacer can be reduced by controlling the thickness of the photosensitive material film, and the thickness of the photosensitive material film is smaller. The size of the finally formed spacer is also smaller; in one embodiment of the present invention, the photosensitive material solution may be spin-coated or blade-coated on the substrate to form a film of the photosensitive material, and the coater is only used. Is an exemplary embodiment, as long as the photosensitive material solution can be spin-coated or blade-coated on the substrate to form a film of photosensitive material, other types of suitable components can be used; Step a3: Film of the photosensitive material on the substrate Exposure development is performed to form a plurality of spacer patterns of different sizes on the substrate. In this step, the single-tone mask can be used for exposure, which reduces the complexity of the process and reduces the production cost. Wherein, the size of the spacer pattern is determined by the resolution of the exposure machine, ranging from several micrometers to several tens of micrometers; in one embodiment of the invention, the exposure material can be used for exposure and development of the photosensitive material film on the substrate. The exposure machine is only an exemplary embodiment, and other types of suitable components can be used as long as the photosensitive material film on the substrate can be exposed and developed;
步骤 对形成有隔垫物图形的基板迸行加热处理, 加热温度需大于苯 乙烯类树脂的玻璃化转变温度, 具体地, 可以在 150- 300 Ό的温度下加热 10s- 1800s, 优选在真空中对基板进行加热, 这样可以避免外界对隔垫物的影 响, 减少隔垫物中的杂质。 在高温下, 苯乙烯类树脂的分子运动开始, 由于 苯乙烯类树脂与基板不浸润, 彼此之间的界面能较大, 根据表面能最小原理, 为了形成稳定的结构, 隔垫物图形将会凸起形成隔垫物, 不同尺寸的隔垫物 图形将形成不同高度的隔垫物, 隔垫物图形的尺寸越大, 形成的隔垫物的高 度越大;  The step of heat-treating the substrate on which the spacer pattern is formed, the heating temperature is required to be greater than the glass transition temperature of the styrenic resin, specifically, heating at a temperature of 150-300 Torr for 10 s to 1800 s, preferably in a vacuum. The substrate is heated to avoid external influence on the spacer and reduce impurities in the spacer. At high temperatures, the molecular motion of the styrenic resin begins. Since the styrene resin does not wet with the substrate, the interface energy between them is large. According to the principle of minimum surface energy, in order to form a stable structure, the spacer pattern will be The protrusions form spacers, and the spacer patterns of different sizes will form spacers of different heights, and the larger the size of the spacer pattern, the greater the height of the spacers formed;
步骤 a5: 对形成有隔垫物的基板进行冷却, 优选在真空中冷却至室温, 即可完成隔垫物的制作, 得到形成有隔垫物的基板。 在本发明的一个实施例 中, 可以采用带有加热设备的真空罩对形成有隔垫物图形的基板进行加热和 冷却, 而真空罩仅是一种示例性的实施方式, 只要能够对形成有隔垫物图形 的基板进行加热和冷却, 还可使用其他类型的合适的部件。 Step a5: cooling the substrate on which the spacer is formed, preferably cooling to room temperature in a vacuum, The spacer can be fabricated to obtain a substrate on which the spacer is formed. In one embodiment of the present invention, the substrate on which the spacer pattern is formed may be heated and cooled using a vacuum cover with a heating device, and the vacuum cover is merely an exemplary embodiment, as long as it can be formed The substrate of the spacer pattern is heated and cooled, and other types of suitable components can also be used.
由于质量守恒原理, 隔垫物图形高度的增加将导致其水平方向上尺寸的 减小, 能够大大减小最后形成的隔垫物的尺寸, 认而有利于增大显示装置的 开口率。 本实施例通过控制隔垫物图形的尺寸即可控制隔垫物的高度, 能够 在基板上形成多种高度的隔垫物, 并且只需采用单色调掩膜板进行曝光即可 实现隔垫物的制作, 能够降低工艺的复杂性, 减少生产成本。  Due to the principle of mass conservation, the increase in the height of the spacer pattern will result in a reduction in the size in the horizontal direction, which can greatly reduce the size of the finally formed spacer, which is advantageous in increasing the aperture ratio of the display device. In this embodiment, the height of the spacer can be controlled by controlling the size of the spacer pattern, and a plurality of spacers can be formed on the substrate, and the spacer can be realized by using a single-tone mask for exposure. The production can reduce the complexity of the process and reduce the production cost.
实施例二  Embodiment 2
本实施例可以实现在基板上形成多种不同高度的隔垫物, 其中基板可以 为阵列基板或彩膜基板。 本实施例具体包括以下步骤:  In this embodiment, a plurality of spacers of different heights can be formed on the substrate, wherein the substrate can be an array substrate or a color filter substrate. This embodiment specifically includes the following steps:
步骤 bl : 形成感光材料溶液, 在现有用来制备隔垫物的丙烯酸树脂类混 合物溶液中添加第一透明聚合物或其单体形成感光材料溶液, 其中, 第一透 明聚合物与丙烯酸树脂互不浸润, 第一透明聚合物的分子量范围可为几千至 百万, 具体地, 第一透明聚合物可以选用苯乙烯类树脂;  Step bl: forming a photosensitive material solution, adding a first transparent polymer or a monomer thereof to a solution of an acrylic resin mixture used to prepare a spacer to form a photosensitive material solution, wherein the first transparent polymer and the acrylic resin are not mutually Infiltration, the first transparent polymer may have a molecular weight ranging from several thousand to one million. Specifically, the first transparent polymer may be selected from a styrene resin;
步骤 b2: 如图 2的(a)所示, 将感光材料溶液旋涂或刮涂在基板 3上形 成一层感光材料薄膜 6, 其中, 可以通过控制感光材料薄膜的厚度来实现减 小隔垫物的尺寸, 感光材料薄膜的厚度越小, 最后形成的隔垫物的尺寸也越 小;  Step b2: As shown in (a) of FIG. 2, a photosensitive material solution is spin-coated or blade-coated on the substrate 3 to form a photosensitive material film 6, wherein the spacer can be reduced by controlling the thickness of the photosensitive material film. The size of the object, the smaller the thickness of the photosensitive material film, the smaller the size of the finally formed spacer;
步骤 b3 : 如图 2的 (b ) iff示, 对基板 3上的感光材料薄膜 6进行曝光 显影, 在基板上形成多个不同尺寸的隔垫物图形 8, 此步骤中, 采用单色调 掩膜板进行曝光即可, 降低了工艺的复杂性, 能够减少生产成本。 其中, 隔 垫物图形 8的尺寸由曝光机的分辨率决定, 由几微米至数十微米不等;  Step b3: As shown in (b) iff of FIG. 2, the photosensitive material film 6 on the substrate 3 is exposed and developed, and a plurality of spacer patterns 8 of different sizes are formed on the substrate. In this step, a single tone mask is used. The exposure of the board can reduce the complexity of the process and reduce the production cost. Wherein, the size of the spacer pattern 8 is determined by the resolution of the exposure machine, ranging from several micrometers to several tens of micrometers;
步骤 b4: 对形成有隔垫物图形 8的基板 3进行加热处理, 加热温度需大 于苯乙烯类树脂的玻璃化转变温度, 具体地, 可以在 150- 300Ό的温度下加热 10s- 1800s, 优选在真空中对基板进行加热, 这样可以避免外界对隔垫物的影 响, 减少隔垫物中的杂质。 在高温下, 苯乙烯类树脂及其单体的分子运动开 始, 由于苯乙烯类树脂与丙烯酸树脂具有不浸润性, 彼此之间的界面能较大, 根据表面能最小原理, 为了形成稳定的结构, 隔垫物图形 8中的苯乙烯类 W 脂及其单体将会凸起, 而丙烯酸树脂与基板具有浸润性, 最后形成的苯乙烯 类树脂隔垫物 7如图 2的(c)所示, 不同尺寸的隔垫物图形将形成不同高度 的隔垫物, 隔垫物图形的尺寸越大, 形成的隔垫物的高度越大; Step b4: heat-treating the substrate 3 on which the spacer pattern 8 is formed, and the heating temperature is required to be larger than the glass transition temperature of the styrene resin, and specifically, may be heated at a temperature of 150 to 300 Torr for 10 s to 1800 s, preferably The substrate is heated in a vacuum to avoid external influence on the spacer and reduce impurities in the spacer. At high temperatures, the molecular motion of styrenic resins and their monomers begins. Because of the non-wetting property of styrenic resins and acrylic resins, the interface energy between them is large. According to the principle of minimum surface energy, in order to form a stable structure, the styrene-like W grease and its monomer in the spacer pattern 8 will be convex, and the acrylic resin and the substrate are wettable, and the finally formed styrene-based resin is separated. As shown in FIG. 2(c), the spacers 7 of different sizes will form spacers of different heights, and the larger the size of the spacer pattern, the larger the height of the spacers formed;
步骤 5: 对形成有隔垫物的基板进行冷却, 优选在真空中冷却至室温, 即可完成隔垫物的制作, 得到形成有隔垫物的基板。  Step 5: The substrate on which the spacer is formed is cooled, preferably cooled to room temperature in a vacuum, to complete the preparation of the spacer, and a substrate on which the spacer is formed is obtained.
苯乙烯类树脂及其单体的凸起, 也会带动丙烯酸树脂及其单体有一定的 凸起, 由于质量守恒原理, 隔垫物图形高度的增加将导致其水平方向上尺寸 的减小, 这样可以减小最后形成的隔垫物在水平方向上的尺寸, 从而有利于 增大显示装置的开口率。 本实施例通过控制隔垫物图形的尺寸即可控制隔垫 物的高度, 能够在基板上形成多种高度的隔垫物, 并且只需采用单色调掩膜 板进行曝光即可实现隔垫物的制作, 能够降低工艺的复杂性, 减少生产成本。  The styrene resin and its monomer bulge will also drive the acrylic resin and its monomer to have certain protrusions. Due to the principle of mass conservation, the increase of the height of the spacer pattern will lead to the reduction of the size in the horizontal direction. This can reduce the size of the finally formed spacer in the horizontal direction, thereby contributing to an increase in the aperture ratio of the display device. In this embodiment, the height of the spacer can be controlled by controlling the size of the spacer pattern, and a plurality of spacers can be formed on the substrate, and the spacer can be realized by using a single-tone mask for exposure. The production can reduce the complexity of the process and reduce the production cost.
上述实施例中, 感光材料溶液中包括有一种或两种透明聚合物, 进一步 地, 感光材料溶液中还可以包括有两种以上的透明聚合物, 只要满足其中的 一种透明聚合物与其他透明聚合物和基板不浸润即可, 实际生产过程中, 为 了降低工艺的复杂性, 一般情况下, 感光材料溶液中包括一种或两种透明聚 以上所述是本发明的优选实施方式, 应当指出, 对于本技术领域的普通 技术人员来说, 在不脱离本发明所述原理的前提下, 还可以作出若千改进和 润饰, 这些改进和润饰也应视为本发明的保护范围。  In the above embodiment, the photosensitive material solution includes one or two kinds of transparent polymers. Further, the photosensitive material solution may further include two or more kinds of transparent polymers, as long as one of the transparent polymers and other transparent ones are satisfied. The polymer and the substrate are not wetted. In the actual production process, in order to reduce the complexity of the process, in general, the photosensitive material solution includes one or two kinds of transparent poly. The above is a preferred embodiment of the present invention, and it should be noted that Those skilled in the art can also make thousands of improvements and retouchings without departing from the principles of the present invention. These improvements and refinements should also be considered as protection scope of the present invention.

Claims

1. 一种隔垫物的制作方法, 其特征在于, 包括: A method of manufacturing a spacer, comprising:
在基板上形成用于制作隔垫物的感光材料薄膜, 所述感光材料中包括有 与所述基板不浸润的第一透明聚合物或其单体;  Forming a photosensitive material film for forming a spacer on the substrate, wherein the photosensitive material includes a first transparent polymer or a monomer thereof that is not wetted with the substrate;
对所述感光材料薄膜迸行曝光显影,在所述基板上形成多个隔垫物图形; 以及  Exposing and developing the photosensitive material film to form a plurality of spacer patterns on the substrate;
对形成有隔垫物图形的基板在预设温度下进行加热, 然后冷却, 使所述 多个隔垫物图形凸起形成隔垫物。  The substrate on which the spacer pattern is formed is heated at a preset temperature and then cooled to cause the plurality of spacer patterns to be convex to form a spacer.
2. 根据权利要求 1所述的隔垫物的制作方法, 其特征在于, 所述多个隔 垫物图形具有不同的尺寸,而不同尺寸的隔垫物图形形成不同高度的隔垫物。  2. The method of fabricating a spacer according to claim 1, wherein the plurality of spacer patterns have different sizes, and the different size spacer patterns form spacers of different heights.
3. 根据权利要求 1或 2所述的隔垫物的制作方法, 其特征在于, 所述在 基板上形成用于制作隔垫物的感光材料薄膜包括:  The method of manufacturing a spacer according to claim 1 or 2, wherein the forming a photosensitive material film for forming a spacer on the substrate comprises:
在基板上涂布感光材料溶液形成所述感光材料薄膜, 所述感光材料溶液 中包括有光引发剂, 并包括有第一透明聚合物或其单体。  A photosensitive material solution is formed on the substrate to form the photosensitive material film, the photosensitive material solution includes a photoinitiator, and includes a first transparent polymer or a monomer thereof.
4. 根据权利要求 1-3中任一项所述的隔垫物的制作方法, 其特征在于, 所述感光材料溶液中还包括有与所述第一透明聚合物具有不浸润性并与 iff述 基板具有浸润性的第二透明聚合物或其单体。  The method for fabricating a spacer according to any one of claims 1 to 3, wherein the photosensitive material solution further comprises a non-wetting property with the first transparent polymer and iff The substrate has a wettable second transparent polymer or a monomer thereof.
5. 根据权利要求 1-4中任一项所述的隔垫物的制作方法, 其特征在于, 所述第二透明聚合物为丙烯酸类树脂。  The method for producing a spacer according to any one of claims 1 to 4, wherein the second transparent polymer is an acrylic resin.
6. 根据权利要求 1 5中任一项所述的隔垫物的制作方法, 其特征在于, 所述预设温度大于所述第一透明聚合物的玻璃化转变温度。  The method of manufacturing a spacer according to any one of claims 1 to 5, wherein the predetermined temperature is greater than a glass transition temperature of the first transparent polymer.
7. 根据权利要求 1 6中任一项所述的隔垫物的制作方法, 其特征在于, 所述第一透明聚合物及其单体的表面能为 5-50dynes/cm。  The method for producing a spacer according to any one of claims 1 to 6, wherein the first transparent polymer and the monomer thereof have a surface energy of 5 to 50 dynes/cm.
8. 根据权利要求 7所述的隔垫物的制作方法, 其特征在于, 所述表面能 优选为 10-30 dynes./cm。  The method of producing a spacer according to claim 7, wherein the surface energy is preferably 10-30 dynes./cm.
9. 根据权利要求 8所述的隔垫物的制作方法, 其特征在于, 所述表面能 最优选为 25 dynes/cm  9. The method of making a spacer according to claim 8, wherein the surface energy is most preferably 25 dynes/cm.
10. 根据权利要求 1-9中任一项所述的隔垫物的制作方法, 其特征在于, 所述第一透明聚合物为苯乙烯类树脂。 The method of manufacturing a spacer according to any one of claims 1 to 9, characterized in that The first transparent polymer is a styrenic resin.
11 .根据权利要求 1-10中任一项所述的隔垫物的制作方法,其特征在于, 所述对形成有隔垫物图形的基板迸行加热, 使所述隔垫物图形凸起形成隔垫 物包括:  The method for fabricating a spacer according to any one of claims 1 to 10, wherein the substrate on which the spacer pattern is formed is heated to cause the spacer pattern to be raised. Forming the spacer includes:
将形成有隔垫物图形的基板在 150- 300摄氏度的温度中加热 10s 1800s。 The substrate on which the spacer pattern is formed is heated at a temperature of 150 to 300 degrees Celsius for 10 s 1800 s.
12.根据权利要求 141中任一项所述的隔垫物的制作方法,其特征在于, 在真空环境下对所述基板进行加热。 The method of producing a spacer according to any one of claims 1 to 4, wherein the substrate is heated in a vacuum environment.
13. 一种基板, 其特征在于, 包括采用权利要求] 12任一项所述的制作 方法制成的隔垫物。  A substrate comprising a spacer made by the manufacturing method according to any one of claims 12 to 12.
14. 一种显示装置, 其特征在于, 包括如权利要求! 3所述的基板。  14. A display device, comprising: as claimed! 3 said substrate.
15. 一种电子产品, 其特征在于, 包括如权利要求 14所述的显示装置。  An electronic product, comprising the display device according to claim 14.
PCT/CN2013/080790 2013-06-21 2013-08-05 Spacer manufacturing method, substrate, display apparatus, and electronic product WO2014201754A1 (en)

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