WO2014200139A1 - Module de pression et dispositif d'étirage de substrat - Google Patents

Module de pression et dispositif d'étirage de substrat Download PDF

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Publication number
WO2014200139A1
WO2014200139A1 PCT/KR2013/006055 KR2013006055W WO2014200139A1 WO 2014200139 A1 WO2014200139 A1 WO 2014200139A1 KR 2013006055 W KR2013006055 W KR 2013006055W WO 2014200139 A1 WO2014200139 A1 WO 2014200139A1
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WO
WIPO (PCT)
Prior art keywords
pressing
substrate
pressure
rod
module
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Application number
PCT/KR2013/006055
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English (en)
Korean (ko)
Inventor
이현성
정희영
배영진
Original Assignee
주식회사 선익시스템
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Application filed by 주식회사 선익시스템 filed Critical 주식회사 선익시스템
Publication of WO2014200139A1 publication Critical patent/WO2014200139A1/fr

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    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
    • H10K71/00—Manufacture or treatment specially adapted for the organic devices covered by this subclass
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05B—ELECTRIC HEATING; ELECTRIC LIGHT SOURCES NOT OTHERWISE PROVIDED FOR; CIRCUIT ARRANGEMENTS FOR ELECTRIC LIGHT SOURCES, IN GENERAL
    • H05B33/00—Electroluminescent light sources
    • H05B33/10—Apparatus or processes specially adapted to the manufacture of electroluminescent light sources

Definitions

  • the present invention relates to a pressure module and a substrate stretching device. More specifically, the present invention relates to a pressurizing module and a substrate stretching apparatus capable of minimizing sagging of a substrate by stretching the substrate with a vertical pressing force.
  • LCDs liquid crystal displays
  • PDPs plasma display panels
  • OLEDs organic light emitting diodes
  • Such a flat panel display device is manufactured by a series of processes such as a deposition process of depositing a metal thin film or an organic thin film on a glass substrate in a predetermined pattern.
  • the glass substrate end In order to deposit a metal thin film or an organic thin film on the glass substrate, the glass substrate end must be supported so that the deposition surface of the glass substrate is exposed. Recently, as the flat panel labeling device is enlarged, the glass substrate is enlarged and a large deflection occurs in the center of the glass substrate. There is a problem in performing a precise process.
  • an organic thin film such as a hole injection layer, a hole transport layer, a light emitting layer, an electron transport layer and an electron injection layer should be deposited on a glass substrate, and the organic thin film is deposited on a glass substrate by vacuum thermal deposition. .
  • the glass substrate is disposed on the upper surface so that the deposition surface of the glass substrate is downwardly exposed in the vacuum chamber, the shadow mask having a predetermined pattern is aligned with the glass substrate, and then the lower surface of the glass substrate is deposited on the glass substrate.
  • the evaporation material sublimed in the evaporation source is deposited on the deposition surface of the glass substrate by applying heat to the disposed evaporation source. In this process, it is necessary to support the end of the glass substrate so that the deposition surface of the glass substrate is exposed downward. As the glass substrate is enlarged, a large deflection may occur, which may cause an error in the alignment of the shadow mask. There is a problem that the yield of the light emitting device is lowered.
  • the present invention is to provide a pressing module and a substrate stretching device that can minimize the deflection of the substrate by stretching the substrate with a vertical pressing force.
  • the pressing module for pressing and stretching the substrate, the pressing rod for moving downward in the vertical direction of the upper surface of the substrate to provide a vertical pressing force;
  • a pressurizing module is provided, including a pressurizing end receiving the vertical pressing force to decompose the vertical pressing force into a vertical component with respect to the substrate and a horizontal component toward the outer end of the substrate.
  • the pressing end may include a pressing piece having one end coupled to one end of the pressing rod and including an inclined portion that is inclined downward from the one end toward the outer end of the substrate.
  • the pressure rod may be composed of a plurality, the plurality of pressure rods are elastically supported by an elastic spring, the pressing end may be coupled to one end of the plurality of pressure rods.
  • the pressing module may further include a pressing positioning member interposed between one end of the pressing rod and the pressing end such that the pressing end is located at the pressing position of the substrate.
  • the pressure module may include a guide block through which the pressure rod penetrates and guides the pressure rod; A fixed block coupled to an upper portion of the guide block and through which the other end of the pressure rod passes; It may further include an elastic spring interposed between the upper end of the guide block and the fixed block to elastically support the pressing rod.
  • the support portion having a plurality of support pieces which are arranged to be spaced apart along the end of the substrate supporting the lower surface of the opposite ends of the substrate; Located in the upper portion of the plurality of support pieces, and including a pressing unit having a pressing module for pressing the upper surface of both ends of the substrate, wherein the pressing module is moved vertically downward in the vertical direction of the upper surface of the substrate A pressurizing rod for providing; A substrate stretching apparatus is provided, comprising a pressurizing end receiving the vertical pressing force and decomposing the vertical pressing force into a vertical component with respect to the substrate and a horizontal component toward the outer end of the substrate.
  • the outermost support pieces at both ends of the plurality of support pieces supporting one end of the substrate extend along an end adjacent to one end of the substrate, and the corresponding outermost pressing module is adjacent to one end of the substrate.
  • the upper end surface can be pressed.
  • the support part includes a support plate to which the plurality of support pieces are coupled such that the plurality of support pieces protrude outwards
  • the pressing part includes a pressure plate to which the plurality of pressure modules opposing the plurality of support pieces are respectively coupled. It may include, the pressing unit may further include a lifting unit for moving up and down.
  • the pressing end may include a pressing piece having one end coupled to one end of the pressing rod and having an inclined portion at one end thereof inclined downward toward the outer end of the substrate.
  • the pressure rod may be composed of a plurality, the plurality of pressure rods are elastically supported by an elastic spring, the pressing end may be coupled to one end of the plurality of pressure rods.
  • the pressing module may further include a pressing positioning member interposed between one end of the pressing rod and the pressing end such that the pressing end is located at the pressing position of the substrate.
  • the pressing module may include a guide block through which the pressing rod passes; A fixed block coupled to an upper portion of the guide block and through which the other end of the pressure rod passes; It may further include an elastic spring interposed between the upper end of the guide block and the fixed block to elastically support the pressing rod.
  • the substrate is stretched with a vertical pressing force to minimize the deflection of the substrate and thereby increase the precision of the process.
  • the edge of the substrate can be precisely clamped to apply a precise tensile force over the entire surface of the substrate.
  • FIG. 1 is a view briefly showing a substrate sag prevention with a pressure module according to an embodiment of the present invention.
  • FIG. 2 is a perspective view briefly showing a pressure module according to an embodiment of the present invention.
  • Figure 3 is a simplified cross-sectional view of the pressure module according to an embodiment of the present invention.
  • FIG. 4 is a view for explaining the decomposition state of the force by the pressure module according to an embodiment of the present invention.
  • FIG 5 is a view briefly showing a modification of the pressure module according to an embodiment of the present invention.
  • FIG. 6 is a view showing a portion of the substrate stretching apparatus having a pressing module according to an embodiment of the present invention.
  • FIG. 7 is a view for explaining a substrate clamping method of the substrate deflection prevention device having a pressing module according to an embodiment of the present invention.
  • FIG. 1 is a view briefly showing a substrate sag prevention with a pressing module according to an embodiment of the present invention.
  • 2 is a perspective view briefly showing a pressure module according to an embodiment of the present invention
  • FIG. 3 is a cross-sectional view briefly showing a pressure module according to an embodiment of the present invention.
  • Figure 4 is a view for explaining the decomposition state of the force by the pressure module according to an embodiment of the present invention.
  • Figure 5 is a view briefly showing a modification of the pressure module according to an embodiment of the present invention.
  • the pressing module 10 the substrate 12, the pressing rod 14, the pressing end 16, the support 18, the guide block 20, the fixing block 22, and the elastic spring ( 24, inclined portion 26, pressing piece 28, pressing positioning member 30 is shown.
  • the pressurizing module 10 is a pressurizing module 10 which presses and stretches the substrate 12 and moves downward in the vertical direction of the upper surface of the substrate 12 to provide a vertical pressing force ( 14);
  • the substrate 12 is subjected to a vertical pressing force, including a pressing end 16 that receives the vertical pressing force and decomposes the vertical pressing force into a vertical component with respect to the substrate 12 and a horizontal component toward the outer end of the substrate 12.
  • the stretching may minimize the deflection of the substrate 12.
  • FIG. 1 is a view briefly showing a substrate stretching apparatus having a pressing module 10 according to the present embodiment, in which both ends of the substrate 12 facing each other are supported by the support 18.
  • the pressurizing module 10 presses both ends of the substrate 12, respectively, and the support 18 and the pressurizing module ( 10, both ends of the substrate 12 are clamped, and both ends of the substrate 12 are pushed outward by the pressing module 10 to apply a tensile force to the substrate 12. Accordingly, deflection of the substrate 12 may be minimized to increase the precision of the process.
  • the pressing rod 14 is moved downward in the vertical direction of the upper surface of both ends of the substrate 12 to provide a vertical pressing force to the pressing end 16 described later.
  • the pressure end 16 clamps the end portion of the substrate 12 while pushing the end portion of the substrate 12 outward, thereby applying tensile force to the substrate 12. Will be added.
  • the pressing end 16 receives the vertical pressing force and decomposes the vertical pressing force into a vertical component with respect to the substrate 12 and a horizontal component toward the outer end of the substrate 12.
  • the pressing end 16 may be coupled to one end of the pressing rod 14, and receives the vertical pressing force of the pressing rod 14 as the pressing rod 14 moves downward in the vertical direction of the upper surface of the substrate 12. This is decomposed into a vertical component with respect to the substrate 12 and a horizontal component toward the outer end of the substrate 12.
  • the vertical pressing force P by the pressure rod 14 may be a vertical component Fy with respect to the substrate 12 and an outer end portion of the substrate 12 according to the shape or configuration of the pressing end 16.
  • the vertical component Fy pressurizes the substrate 12 while generating a frictional force f with respect to the upper surface of the substrate 12.
  • the horizontal component Fx is a substrate (Fx).
  • the substrate 12 is pushed toward the outer end of the 12.
  • the horizontal component force Fx pushes both ends of the substrate 12 to the outside to generate a tensile force on the substrate 12. Deflection of the substrate 12 can be reduced by the tensile force by the horizontal component Fx of the pressing end 16.
  • the pressing rod 14 may be supported by the elastic spring 24 to elastically press the upper surface of the substrate 12.
  • the pressure rod 14 may be configured in plural numbers.
  • the pressure rod 14 is elastically supported by the elastic spring 24, the pressure end 16 is coupled to one end of the plurality of pressure rods 14, the upper surface of the substrate 12 is pressed.
  • the flatness of the upper surface of the substrate 12 is not uniform. Even if not, it is possible to apply a uniform pressing force to the upper surface of the substrate 12 by the elastic spring 24 of each pressure rod (14).
  • the pressure module 10 in order to guide the precise linear movement of the pressure rod 14, includes a guide block 20 through which the pressure rod 14 penetrates and guides the pressure rod 14; A fixed block 22 coupled to an upper portion of the guide block 20 and through which the other end of the pressure rod 14 passes; It may include an elastic spring 24 interposed between the upper end of the guide block 20 and the fixed block 22 to elastically support the pressure rod 14.
  • the guide block 20 and the guide block through which the guide hole penetrated by the pressure rod 14 is formed perpendicular to the substrate 12 were configured to precisely guide the linear movement of the pressure rod 14.
  • the elastic spring 24 is interposed between the upper end of the guide block 20 and the fixed block 22 in the state of being inserted into the other end of the pressure rod 14 penetrating the guide block 20 to burn the pressure rod 14. Sexual support was provided.
  • the pressing end 16 according to the present embodiment is coupled to one end of the pressure rod 14 along one end and And a pressing piece 28 having an inclined portion 26 that forms an inclined downward from one end toward the outer end of the substrate 12.
  • One end of the pressure piece 28 is coupled to one end of the pressure rod 14, the other end is in contact with the upper surface of the substrate 12.
  • the inclined portion 26 extending from one end is inclined downward toward the outer end of the substrate 12, and the vertical pressing force P of the pressing rod 14 is caused by the inclined portion 26.
  • the warp force F is converted toward the outer end and the warp force F is decomposed into a vertical component Fy against the substrate 12 and a horizontal component Fx toward the outer end of the substrate 12. .
  • the vertical component Fy with respect to the substrate 12 presses the substrate 12 while clamping the substrate 12 while generating a frictional force f with respect to the upper surface of the substrate 12.
  • the horizontal component Fx The substrate 12 is pushed toward the outer end of the substrate 12.
  • the horizontal component Fx pushes both ends of the substrate 12 to the outside to generate a tensile force on the substrate 12, and the deflection of the substrate 12 is caused by the tensile force by the horizontal component Fx of the pressing piece 28. Can be reduced.
  • the shape or configuration of the pressing end 16 is not limited to the pressing piece 28, and the vertical pressing force by the pressing rod 14 is applied to the vertical component with respect to the substrate 12 and toward the outer end of the substrate 12. Anything that can be resolved into a horizontal component exists within the spirit of the present invention.
  • FIG. 5 is a view briefly illustrating a modification of the pressing module 10 according to the present embodiment, wherein the pressing position of the upper surface of the substrate 12 end is determined in advance by the size of the substrate 12 to be processed.
  • the inclined portion 26 of the pressing piece 28 may be in contact with the substrate 12 of the pressing piece 28 from the preset pressing position. Therefore, in the state in which the pressure positioning member 30 is coupled to one end of the pressure rod 14, the pressure piece 28 is coupled to the pressure positioning member 30 so that the pressure piece 28 is positioned at the pressure position.
  • FIG. 6 is a view showing a portion of the substrate stretching apparatus having a pressing module according to an embodiment of the present invention
  • Figure 7 is a substrate stretching apparatus having a pressing module 10 according to an embodiment of the present invention It is a figure for demonstrating the substrate clamping method.
  • the pressurizing module 10 the substrate 12, the support part 33, the support plate 32, the support piece 34, the outermost support piece 35, the pressure plate 36, the pressure The part 37, the substrate holding plate 38, the lifting moving part 40, the lifting rod 41, the supporting frame 42, the elastic connector 44, and the elastic member 46 are illustrated.
  • the substrate stretching apparatus supports a lower surface of both ends of the substrate 12 facing each other, and includes a support part 33 including a plurality of support pieces 34 spaced apart along the ends of the substrate 12. )Wow; Located on an upper portion of the plurality of support pieces 34, and includes a pressing unit 37 having a pressing module 10 for pressing the upper surface of both ends of the substrate 12, the pressing module 10, the substrate A pressurizing rod 14 which moves downward in the vertical direction of the upper surface of 12 to provide a vertical pressing force; It is coupled to one end of the pressure rod 14, and includes a pressing end 16 for decomposing the vertical pressing force into the vertical component with respect to the substrate and the horizontal component toward the outer end of the substrate 12.
  • End portions of the substrate 12 are clamped by the support portion 33 and the pressing portion 37.
  • the pressing portion 37 is provided while the supporting portion 33 and the pressing portion 37 clamp both ends of the substrate 12, respectively. Both ends of the substrate 12 are pushed outward by the pressing module 10 to apply a tensile force to the substrate 12. Accordingly, deflection of the substrate 12 may be minimized to increase the precision of the process.
  • the plurality of support pieces 34 are disposed to be spaced apart from each other on the lower surface of the end of the substrate 12, and the pressing module 10 is opposed to each of the support pieces 34.
  • the upper surface of the end is pressed to clamp the end of the substrate 12.
  • the end of the substrate 12 By clamping the end of the substrate 12 with the plurality of support pieces 34 and the pressure module 10 arranged to be spaced apart from each other, the end of the substrate 12 can be precisely clamped, and thus the entire surface of the substrate 12 can be clamped. Precise tensile force can be applied over. Since the support piece 34 supporting the substrate 12 is in the form of a small piece, precise processing with high flatness is possible, and since the self deflection is very small, the support piece 34 can be precisely supported along the end of the substrate 12.
  • FIG. 6 is a view showing a part of a substrate stretching apparatus having a pressing module 10 according to the present embodiment, and shows a clamping state of one end of both ends of the substrate 12, but is opposed to each other at one end. The other end is likewise clamped.
  • the support part 33 may include a support plate 32 to which the plurality of support pieces 34 are coupled such that the plurality of support pieces 34 protrude outwards, and the pressing part 37 includes a plurality of support pieces. It may include a pressing plate 36 to which a plurality of pressing modules 10 opposing each of the 34. Lifting and moving unit 40 is coupled to the pressing unit 37 to move the pressing unit 37 up and down. Accordingly, the plurality of pressure modules 10 coupled to the pressure plate 36 are simultaneously moved up and down.
  • the substrate holding plate 38 serves to support the substrate stretching device, and the substrate stretching device is coupled to the substrate holding plate 38 to clamp both ends of the substrate 12 and to stretch the substrate 12 to extend the substrate 12.
  • the substrate 12 is supported while preventing sagging.
  • the support plates 32 are disposed parallel to the ends of the substrate 12, and the plurality of support pieces 34 are spaced apart from each other so that the ends of the support pieces 34 protrude outwards and are coupled to the support plates 32. End portions of the plurality of support pieces 34 protruding from the support plate 32 support the lower surface of the end portion of the substrate 12.
  • the pressure plate 36 is disposed above the support plate 32, and a plurality of pressure modules 10 respectively facing the plurality of support pieces 34 are coupled to the pressure plate 36.
  • the substrate 12 is stretched while clamping the end portion thereof.
  • the pressurizing module 10 coupled to the pressurizing plate 36 is as described above, and thus detailed description thereof will be omitted.
  • the outermost support pieces 35 at both ends of the plurality of support pieces 34 supporting one end of the substrate 12 have an end portion of the substrate 12 adjacent to one end of the substrate 12. It extends along the length, the outermost pressing module 10 corresponding thereto may be configured to press the upper surface of the end portion adjacent to one end of the substrate 12. The sagging of the substrate 12 is reduced by extending the outermost support pieces 34 at both ends of the plurality of support pieces 34 supporting one end of the substrate 12 along an end portion adjacent to one end of the substrate 12. Can be. In other words, the four corner portions of the substrate 12 are widely supported to reduce the deflection of the substrate 12.
  • An elevating mover 40 may be disposed at an upper end of the substrate holding plate 38 to move the pressing plate 36 up and down, and an elevating rod 41 extending from the elevating mover 40 may have a substrate holding plate 38. It is coupled to the pressing plate 36 which is disposed on the upper end of the support plate 32 through).
  • the support frame 42 is coupled to the lower end of the substrate holding plate 38, the support plate 32 is coupled to the lower end thereof, and the pressing plate 36 is disposed above the support plate 32.
  • the support plate 32 is fixed to the end of the support frame 42, the pressing plate 36 disposed on the upper end of the support plate 32 with respect to the support plate 32 in accordance with the operation of the lifting and lowering unit 40 Move up and down.
  • the lifting rod 41 descends by the lifting movement part 40, the pressure plate 36 is lowered, and the plurality of pressure modules 10 coupled to the pressure plate 36 are simultaneously formed on the upper surface of the end of the substrate 12. Pressing to stretch the substrate 12 while clamping the end of the substrate 12.
  • an actuator, a rack-pinion structure, or the like may be used as the lifting unit 40.
  • the pressing plate 36 may be elastically coupled to the support plate 32 by the elastic connector 44 so as to be opened with respect to the support plate 32. That is, the pressure plate 36 and the support plate 32 are opened at a predetermined distance by the elastic member 46 of the elastic connector 44, and a force greater than the elastic force of the elastic member 46 of the elastic connector 44.
  • the lifting rod 41 descends to lower the pressure plate 36
  • the pressure plate 36 descends while the pressure rod of the pressure module 10 presses the upper surface of the end portion of the substrate 12.
  • the pressure piece coupled to one end of the pressure rod presses the upper surface of the substrate 12, and the vertical pressing force of the pressure rod is a vertical component with respect to the substrate 12 and the substrate ( It is decomposed into the horizontal component toward the outer end of 12) and acts on the upper surface of the substrate 12.
  • the vertical component pressurizes the substrate 12 while generating a frictional force against the upper surface of the substrate 12, and in this state, the horizontal component pushes the substrate 12 toward the outer end of the substrate 12.
  • Such horizontal force pushes both ends of the substrate 12 outward to generate a tensile force on the substrate 12.
  • Deflection of the substrate 12 can be reduced by the tensile force by the horizontal component force of the pressing piece.
  • the elevating rod 41 is lifted by the elevating moving part 40 and pressed against the support plate 32 by the elastic restoring force of the elastic member 46 of the elastic connector 44.
  • the plate 36 is opened in its original state.
  • both ends of the substrate 12 are supported by the support piece 34 of the support plate 32 by a robot arm or the like.
  • the substrate 12 is loaded.
  • the lifting rod 41 descends in accordance with the operation of the lifting movement unit 40, and the pressing module 36 descends in response to the lowering of the lifting rod 41. Press the upper surface.
  • the pressing piece coupled to the ends of the plurality of pressure rods elastically supported by the elastic spring as the pressure module 10 descends uniformly press the upper surface of the substrate 12.
  • the uniform vertical pressing force is decomposed into a vertical component and a horizontal component by the pressing piece to stretch while clamping the substrate 12. Both ends of the substrate 12 are pushed outward by the pressing pieces positioned at opposite ends of the substrate 12 to each other, thereby generating a tensile force on the substrate 12, thereby reducing the deflection of the substrate 12.
  • the precision of the process may be increased.

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  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)

Abstract

L'invention concerne un module de pression et un dispositif d'étirage de substrat. L'invention concerne un module de pression destiné à étirer le substrat, qui comprend : des tiges de pression destinées à fournir une force de pression verticale en se déplaçant vers le bas depuis une direction perpendiculaire à la surface supérieure du substrat ; et des extrémités de pression destinées à recevoir la force de pression verticale et à répartir la force de pression verticale en une force de composante verticale et une force de composante horizontale dirigées au niveau de parties d'extrémités externes du substrat.
PCT/KR2013/006055 2013-06-13 2013-07-08 Module de pression et dispositif d'étirage de substrat WO2014200139A1 (fr)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
KR20130067916A KR20140145449A (ko) 2013-06-13 2013-06-13 가압모듈 및 기판 스트레칭 장치
KR10-2013-0067916 2013-06-13

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WO2014200139A1 true WO2014200139A1 (fr) 2014-12-18

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WO (1) WO2014200139A1 (fr)

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CN109476524A (zh) * 2016-07-06 2019-03-15 朴在壹 真空绝热玻璃板的制造方法及密封盖封闭装置
CN113959865A (zh) * 2021-09-25 2022-01-21 浙江省浙南综合工程勘察测绘院有限公司 一种便捷式野外岩土剪切试验设备

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KR101702762B1 (ko) * 2015-07-27 2017-02-07 에스엔유 프리시젼 주식회사 기판 처짐 방지 장치
KR101656462B1 (ko) * 2015-10-07 2016-09-12 주식회사 선익시스템 듀얼 그립퍼가 구비된 기판 그립 장치
KR102456074B1 (ko) * 2016-02-05 2022-10-19 삼성디스플레이 주식회사 마스크 얼라인 장치와, 이를 이용한 마스크 얼라인 방법
KR102079165B1 (ko) * 2018-02-28 2020-02-19 이노6 주식회사 전자소자 본딩 장치
WO2023075549A1 (fr) * 2021-10-29 2023-05-04 이원복 Système de pressage de billes et appareil de pressage de billes pour boitier bga

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CN113959865A (zh) * 2021-09-25 2022-01-21 浙江省浙南综合工程勘察测绘院有限公司 一种便捷式野外岩土剪切试验设备
CN113959865B (zh) * 2021-09-25 2024-04-16 浙江省浙南综合工程勘察测绘院有限公司 一种便捷式野外岩土剪切试验设备

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