WO2014190680A1 - 涂布设备及彩膜基板制作工艺 - Google Patents

涂布设备及彩膜基板制作工艺 Download PDF

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Publication number
WO2014190680A1
WO2014190680A1 PCT/CN2013/087144 CN2013087144W WO2014190680A1 WO 2014190680 A1 WO2014190680 A1 WO 2014190680A1 CN 2013087144 W CN2013087144 W CN 2013087144W WO 2014190680 A1 WO2014190680 A1 WO 2014190680A1
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WO
WIPO (PCT)
Prior art keywords
substrate
roller
glue
cavity
coating equipment
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Ceased
Application number
PCT/CN2013/087144
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English (en)
French (fr)
Inventor
方群
吴洪江
汪栋
查长军
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
BOE Technology Group Co Ltd
Beijing BOE Display Technology Co Ltd
Original Assignee
BOE Technology Group Co Ltd
Beijing BOE Display Technology Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by BOE Technology Group Co Ltd, Beijing BOE Display Technology Co Ltd filed Critical BOE Technology Group Co Ltd
Priority to US14/355,456 priority Critical patent/US9950336B2/en
Publication of WO2014190680A1 publication Critical patent/WO2014190680A1/zh
Anticipated expiration legal-status Critical
Ceased legal-status Critical Current

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Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05C—APPARATUS FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05C1/00—Apparatus in which liquid or other fluent material is applied to the surface of the work by contact with a member carrying the liquid or other fluent material, e.g. a porous member loaded with a liquid to be applied as a coating
    • B05C1/04—Apparatus in which liquid or other fluent material is applied to the surface of the work by contact with a member carrying the liquid or other fluent material, e.g. a porous member loaded with a liquid to be applied as a coating for applying liquid or other fluent material to work of indefinite length
    • B05C1/08—Apparatus in which liquid or other fluent material is applied to the surface of the work by contact with a member carrying the liquid or other fluent material, e.g. a porous member loaded with a liquid to be applied as a coating for applying liquid or other fluent material to work of indefinite length using a roller or other rotating member which contacts the work along a generating line
    • B05C1/10—Apparatus in which liquid or other fluent material is applied to the surface of the work by contact with a member carrying the liquid or other fluent material, e.g. a porous member loaded with a liquid to be applied as a coating for applying liquid or other fluent material to work of indefinite length using a roller or other rotating member which contacts the work along a generating line the liquid or other fluent material being supplied from inside the roller
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05C—APPARATUS FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05C1/00—Apparatus in which liquid or other fluent material is applied to the surface of the work by contact with a member carrying the liquid or other fluent material, e.g. a porous member loaded with a liquid to be applied as a coating
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05C—APPARATUS FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05C1/00—Apparatus in which liquid or other fluent material is applied to the surface of the work by contact with a member carrying the liquid or other fluent material, e.g. a porous member loaded with a liquid to be applied as a coating
    • B05C1/04—Apparatus in which liquid or other fluent material is applied to the surface of the work by contact with a member carrying the liquid or other fluent material, e.g. a porous member loaded with a liquid to be applied as a coating for applying liquid or other fluent material to work of indefinite length
    • B05C1/08—Apparatus in which liquid or other fluent material is applied to the surface of the work by contact with a member carrying the liquid or other fluent material, e.g. a porous member loaded with a liquid to be applied as a coating for applying liquid or other fluent material to work of indefinite length using a roller or other rotating member which contacts the work along a generating line
    • B05C1/0808—Details thereof, e.g. surface characteristics
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05D—PROCESSES FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05D1/00—Processes for applying liquids or other fluent materials
    • B05D1/28—Processes for applying liquids or other fluent materials performed by transfer from the surfaces of elements carrying the liquid or other fluent material, e.g. brushes, pads, rollers
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05D—PROCESSES FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05D5/00—Processes for applying liquids or other fluent materials to surfaces to obtain special surface effects, finishes or structures
    • B05D5/06—Processes for applying liquids or other fluent materials to surfaces to obtain special surface effects, finishes or structures to obtain multicolour or other optical effects
    • B05D5/065—Processes for applying liquids or other fluent materials to surfaces to obtain special surface effects, finishes or structures to obtain multicolour or other optical effects having colour interferences or colour shifts or opalescent looking, flip-flop, two tones
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B5/00—Optical elements other than lenses
    • G02B5/20—Filters
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05C—APPARATUS FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05C13/00—Means for manipulating or holding work, e.g. for separate articles

Definitions

  • Embodiments of the present invention relate to a coating apparatus, and a color film substrate manufacturing process using the apparatus. Background technique
  • the display panel is formed by an array substrate and a color filter substrate cell-assembly, and a liquid crystal is dripped between the array substrate and the color filter substrate.
  • a color matrix substrate is provided with a black matrix, and a color film unit is arranged in an open area of the black matrix, and each color film unit can be composed of three color pixel units, respectively red (R), blue (B), and green (G). ) three sub-pixel units.
  • the process of fabricating the color film unit is: coating a red photoresist layer on the substrate, pre-curing the film, and exposing a portion of the red photoresist layer remaining on the substrate through the exposure machine and the mask.
  • the portion of the unexposed red photoresist layer is then developed by a developing machine to remove the portion, followed by curing, so that a red pixel unit can be formed in a predetermined region of the substrate.
  • the above process is repeated to form a blue pixel unit and a green pixel unit, respectively, in predetermined regions on the substrate.
  • the above-mentioned color photoresist can be made of a photosensitive material, and no additional photoresist is used for patterning; the color resist can also be made of a material having no photosensitive property, but additional use is required at this time.
  • the photoresist is patterned.
  • Embodiments of the present invention provide a coating apparatus and a color film substrate manufacturing process using the same, which can directly form a color film on a substrate without performing an exposure and development process, thereby saving production time and manufacturing cost.
  • Embodiments of the present invention provide a coating apparatus for fabricating a color filter substrate, including a roller and a pressing device, wherein an outer surface of the roller is provided with a plurality of openings, the shape of the opening is the same as a shape of a color pixel unit of a substrate to be coated, and the roller is further provided with a cavity communicating with the opening The cavity is for receiving a colloid; the gluing device is for pressing the colloid in the cavity from the opening.
  • the coating apparatus may further include a base, the roller is supported on the base, and a support platform for placing the substrate is disposed between the base and the roller, and between the support platform and the roller The distance is the same as or equivalent to the thickness of the substrate.
  • the support platform is coupled with a movement adjusting device for moving the support platform, and the moving direction of the support platform is perpendicular to the axial direction of the roller.
  • the coating apparatus may further include a heating device for heating the support platform or the substrate.
  • the gluing device may include a glue feeding mechanism for conveying the colloid into the cavity and attaching a colloid to the opening; and the gas conveying mechanism A gas for outputting gas into the cavity and adhering the opening.
  • the glue transfer mechanism may include a glue transfer pipe and a glue pump, one end of the glue transfer pipe is connected to the glue pump, and the other end is inserted into the cavity of the roller.
  • the glue pipe extends into and through the cavity, and the glue pipe extending into the glue pipe is provided with a glue port opposite to the opening.
  • the shape of the glue opening is the same as the shape of the opening.
  • the gas delivery mechanism may include a gas delivery conduit and a gas delivery pump, one end of the gas delivery conduit being connected to the gas delivery pump and the other end extending into the cavity of the roller.
  • the gas pipeline extends into and through the cavity, and the gas pipeline extending into the gas duct is provided with an air outlet opposite to the opening.
  • the rollers are uniformly distributed in the axial direction with a plurality of openings, each of which is composed of a plurality of openings distributed in the circumferential direction.
  • a baffle is provided on the outer surface and/or the inner surface of the roller between adjacent two turns of the axial direction.
  • the baffle protrudes slightly above the surface of the roller.
  • the embodiment of the present invention further provides a color film substrate manufacturing process, comprising: providing a substrate, wherein the substrate is provided with a predetermined area for forming a color film unit pattern; A pattern forming a color film unit is coated in a predetermined region of the substrate.
  • the predetermined area includes a first predetermined area, a second predetermined area, and a third predetermined area, so that a roller of the coating device is pressed against a surface of the substrate, and when the roller and the substrate move relative to each other, a first color photoresist of the coating device at a first predetermined area of the substrate, forming a first color pixel unit pattern after the curing process; and then repeating the above steps at a second predetermined area of the substrate Forming a second color pixel unit pattern, and forming a third color pixel unit pattern at the third predetermined area.
  • the method may further include: forming a black matrix on the substrate on which the color film unit pattern is formed after coating the pattern of the color film unit in a predetermined region of the substrate, wherein the black matrix is disposed on the color pixel unit Between the patterns.
  • FIG. 1 is a schematic view of a coating apparatus according to an embodiment of the present invention.
  • FIG. 2 is a schematic view of a coating device coated substrate according to an embodiment of the present invention.
  • FIG. 3 is a schematic plan view showing a developing device of a coating device according to an embodiment of the present invention
  • FIG. 4 is a schematic cross-sectional view of a rubber feeding pipe in a coating device according to an embodiment of the present invention
  • FIG. 6 is a schematic flow chart of a process for fabricating a color filter substrate according to an embodiment of the present invention
  • FIG. 7 is a schematic flow chart of a process for fabricating a color filter substrate according to an embodiment of the present invention.
  • an embodiment of the present invention provides a coating apparatus that can be used to fabricate a color filter substrate, including a roller and a gluing device.
  • the outer surface of the roller 1 is provided with a plurality of openings 10 having the same shape as the color pixel unit on the substrate to be coated, and the roller 1 is further provided with a cavity communicating with the opening 10. (not shown), the cavity is for receiving a colloid; the gluing device is for pressing the colloid in the cavity from the opening 10.
  • the colloid extruded from the opening 10 forms a pattern having the same shape as the opening 10 on the substrate, that is, a pattern of the color pixel unit is formed, so that the exposure and development processes are not performed.
  • the pattern of the color film unit can be directly formed on the substrate, saving production time and manufacturing cost.
  • this embodiment saves the exposure and development processes.
  • this method avoids the use of the mask used in the exposure process, and as described in the background art, the mask is expensive to manufacture, so that the present invention reduces the manufacturing cost to a large extent.
  • a color photoresist having a photosensitive property is coated in a whole process in the exposure process, and then most of the color photoresist (more than 2/3) is removed in the developing process.
  • only the color photoresist can be applied in a predetermined area, which saves a large amount of color photoresist, and also avoids the use of the developer.
  • the frequency of use of the exposure machine, the developing machine and the like can be reduced, which not only reduces a large amount of energy consumption, but also improves the service life of the device; moreover, the reduction of the process can improve the excellent rate of the product. Easier quality monitoring and improvement.
  • a coating apparatus that can perform a color film coating process directly on a substrate will be described in detail below with reference to FIGS. It can be understood that the coating apparatus in the embodiment of the present invention can also apply other structural patterns other than the color film unit under certain circumstances.
  • an embodiment of the present invention provides a coating apparatus including a roller 1 provided with a cavity, a pressing device, and a base (not shown), and the outer surface of the roller 1 is provided.
  • a coating apparatus including a roller 1 provided with a cavity, a pressing device, and a base (not shown), and the outer surface of the roller 1 is provided.
  • the roller is further provided with a cavity communicating with the opening, the cavity for accommodating the object to be coated a colloid device for pressing a colloid in the cavity from the opening;
  • the roller 1 is supported on the base, and the base and the roller 1 are provided between The support platform 2 of the substrate 3 is placed.
  • the distance between the support platform 2 and the roller 1 is the same as or equivalent to the thickness of the substrate 3,
  • the roller 1 can be pressed or completely pressed against the surface of the substrate 3, so that the glue extruded by the pressing device can be directly coated on the substrate 3, and the following problems can be avoided: the lithography is pressed due to the large distance.
  • the glue deviates from the predetermined area to form a complete color pixel unit pattern.
  • the substrate 3 may be placed in a state in which its length direction is parallel to the axial direction of the roller 1, and the length of the substrate 3 is substantially the same as the axial length of the roller 1; or may be the substrate 3
  • the width direction is parallel to the axial direction of the roller 1, and the width of the substrate 3 at this time is substantially the same as the axial length of the roller 1. In the embodiments of the present invention, the latter will be described as an alternative.
  • roller 1 When coating with a coating apparatus, relative movement between the roller 1 and the support platform 2 enables complete coating of all predetermined areas on the substrate 3.
  • the roller 1 can be set as a movable mechanism, and its moving direction is perpendicular to its own axial direction; or the support platform 2 can be set as a movable mechanism, that is, the support platform 2 is connected for movement.
  • the movement adjusting device of the support platform 2, the moving direction of the support platform 2 is perpendicular to the axial direction of the roller 1.
  • the latter embodiment uses the latter as a preferred solution, and the movable support platform in this preferred embodiment facilitates the pipeline fabrication of the substrate.
  • the embodiment of the present invention directly coats the color film unit pattern in the predetermined area of the substrate 3 through the roller 1, and the color film unit is regularly arranged on the substrate 3, it is required that the substrate 3 accurately on the support platform 2 and the roller 1 Counterpoint. For this reason, the above-described movement adjusting device can also have a function of alignment adjustment for performing alignment adjustment of the support platform 2.
  • the coating apparatus may further include a heating device (not shown).
  • the heating device is configured to heat the support platform 2 such that the substrate 3 placed thereon reaches a certain temperature, thereby heating and curing the colored photoresist on the substrate 3; or it may not need to be heated by heating
  • the platform 2 is supported to bring the substrate 3 to a certain temperature, and the heating device directly heats the substrate 3 to reach a certain temperature, thereby heating and curing the color photoresist remaining on the substrate 3.
  • an example may include a glue conveying mechanism and a gas conveying mechanism.
  • a glue applying mechanism for conveying the colloid into the cavity and attaching the colloid to the opening 10;
  • a gas delivery mechanism for outputting gas into the cavity and attaching the glue at the opening 10 from The opening 10 is pressed out, and the amount of the pressing is controlled by controlling the air pressure of the gas conveying mechanism, whereby the thickness of the pattern coated on the substrate 3 can be controlled.
  • an example of the above-mentioned glue feeding mechanism includes a glue pipe 4 and a glue pump (not shown), and one end of the glue pipe 4 connects the wire.
  • the rubber pump has the other end projecting into the cavity of the roller 1. In this way, the color photoresist can be pumped into the glue pipe 4 through the glue pump, and flow into the cavity from the end of the glue pipe 4 into the cavity.
  • the glue port 40 (shown in FIG. 4) opposite to the opening 10 is provided.
  • the colloid in the glue pipe 4 can directly flow out from the rubber feed port 40 and adhere to the opening 10, so that the color photoresist can be adhered to each of the openings 10 at the same time to avoid omission and the part of the color pixel unit is missing. picture of.
  • the shape of the rubber port 40 is the same as that of the opening 10, so that the color photoresist which is pressed out from the glue port 40 is completely attached to the opening 10.
  • an example of the above-described gas delivery mechanism includes a gas delivery conduit 5 and a gas delivery pump (not shown), one end of which is connected to the delivery The other end of the air pump extends into the cavity of the roller 1, so that gas is pumped into the gas delivery pipe 5 through the gas delivery pump, and flows from the gas delivery pipe 5 into one end of the cavity into the cavity.
  • the gas transmission pipe 5 extends into and penetrates the cavity, and an air outlet 50 opposite to the opening 10 is disposed on the gas transmission pipe 5 extending therein (as shown in the figure). 5;;, the gas in the gas pipeline 5 can be directly blown from the gas outlet 50 to the opening 10. It can be seen that the gas pressure of each gas outlet is almost the same or the same, so that the amount of the extruded photoresist is almost the same or the same, so that the thickness of the formed color pixel unit pattern on the substrate is almost or completely the same. .
  • the cavity is a sealed cavity when the roller 1 is coated.
  • one end of the cavity is closed, and the other end is provided with a first through hole 11 matching the glue pipe 4 and a second through hole 12 matching the gas pipe 5. Therefore, when the glue pipe 4 and the gas pipe 5 are inserted from the first through hole 11 and the second through hole 12, respectively, the inside of the roller 1 is formed into a sealed structure.
  • Both ends of the cavity having the first through hole 11 and the second through hole 12 may also be a cover structure, and the first through hole 11 and the second through hole 12 are provided in the cover at one end. This cover structure can be disassembled to facilitate cleaning, maintenance, etc. of the inside of the roller 1.
  • the gas conveying mechanism may not be included, and the pumping pump is provided.
  • the pattern of the color film unit usually formed on the substrate is a matrix pattern.
  • Each color film unit includes three color pixel units, for example, red, green, and blue sub-pixel units, respectively.
  • the substrate can also be regarded as being formed by a plurality of rows of juxtaposed color pixel units, and there are two color pixel units of different colors between each adjacent two rows of color pixel units of the same color.
  • a plurality of openings may be uniformly distributed in the axial direction of the roller 1. For example, reference may be made to FIG. 3, which is an expanded plan view of the roller 1 after being axially cut.
  • the width is the circumferential length of the roller 1, and the length is the axial length of the roller 1.
  • Each opening is composed of a plurality of openings 10 distributed in the circumferential direction, and a plurality of openings 10 per turn are axially
  • the rows are arranged to form a plurality of rows of openings, and the color pixel units corresponding to the openings of each of the three openings can be red, green and blue respectively according to FIG.
  • the pattern of the color film unit formed on the substrate is not limited to the regular matrix pattern.
  • the color film on the substrate can be formed by a plurality of rows of juxtaposed color pixel cells, and the color pixel cells in each row are arranged offset in the column direction, which is commonly referred to as the "mosaic" arrangement.
  • the roller 1 of the coating apparatus is uniformly distributed in the axial direction with a plurality of openings, each of which is composed of a plurality of openings 10 distributed in the circumferential direction, and the plurality of openings 10 of each turn are displaced in the axial direction. Arrange.
  • the color film unit may include at least three color pixel units, and in addition to the red, green, and blue sub-pixel units mentioned above, may also include yellow and/or burgundy and/or transparent colors according to design requirements. Pixel unit.
  • the above-mentioned three colors of red, green and blue are preferred solutions, but it is not excluded that other colors can be used to achieve some desired display functions.
  • the outer surface and/or the inner surface of the roller between the adjacent two turns are provided with the baffle 6 shown in FIG. 1 or FIG. In this way, the color photoresist which is attached to one of the openings 10 is prevented from flowing to the opening 10 of the adjacent one, so that the mixing of the different color photoresists occurs.
  • the outer surface and/or the inner surface of the roller 1 are preferably provided with a baffle 6.
  • the height of the baffle 6 When the height of the baffle 6 is large, a certain distance is generated between the outer surface of the roller 1 and the surface of the support platform 2, and when the roller 1 is coated, the roller 1 may not be pressed against the substrate 3, which may It will cause the extruded color photoresist to deviate from the predetermined area, so that a complete color pixel unit pattern cannot be formed. Therefore, to avoid this phenomenon, the height of the baffle 6 should be slightly higher (the height is less than 10 ⁇ ).
  • the value of m is preferably the outer and/or inner surface of the roller 1.
  • the coating apparatus provided in the embodiments of the present invention may be in the form of any combination described above, and is not limited to the embodiment of the combination. In order to facilitate the reader to clearly understand the present invention, the following is true. One of the preferred combinations is specifically described.
  • the coating apparatus includes a roller 1 provided with a cavity, a pressing device, a base for supporting the roller 1, and a heating device for heating and curing, and the roller 1 uniformly distributes the plurality of openings 10 in the axial direction.
  • the outer surface and the inner surface of the roller between the adjacent two openings 10 are provided with a baffle 6 having the same shape as the color pixel unit (including red, green and blue pixel units); one end of the cavity is closed, The other end is provided with a first through hole 11 and a second through hole 12, and the glue pipe 4 and the gas pipe 5 respectively extend from the first through hole 11 and the second through hole 12 and penetrate the entire cavity, and the glue pipe 4
  • the rubber feed port 40 is opposite to the opening 10, and the shape of the rubber feed port 40 is the same as the shape of the opening 10.
  • the gas supply pipe 5 is provided with an air outlet 50 opposite to the opening 10.
  • a support platform 2 for placing the substrate 3 and movable is disposed between the base and the roller 1.
  • the distance between the support platform 2 and the roller 1 is the same as or equivalent to the thickness of the substrate 3.
  • the moving direction of the support platform 2 is perpendicular to the roller 1. Axial.
  • the width direction of the substrate 3 is parallel to the axial direction of the roller, and the substrate 3 is aligned with the roller 1 by the movement adjusting device, and the roller 1 is pressed against the substrate 3, and then The substrate 3 is moved by the movement adjusting device, and at the same time, the roller 1 also starts to roll, thereby performing a coating operation.
  • an embodiment of the present invention further provides a color film substrate manufacturing process, as shown in FIG. 6, comprising:
  • the substrate is provided with a predetermined area forming a color film unit pattern
  • the coating apparatus described above is used in the production process of the color filter substrate, the pattern for forming the color filter unit can be directly applied onto the substrate without performing the exposure and development processes, thereby saving production time and production cost.
  • this embodiment saves the exposure and development processes.
  • the process avoids the use of a mask used in the exposure process, and as described in the background art, the mask is expensive to manufacture, so that the invention reduces the manufacturing cost to a large extent;
  • the process only applies a color photoresist in a predetermined area, which saves a lot of color photoresist and avoids The developing solution is used; then, the process can reduce the frequency of use of the exposure machine, the developing machine and the like, which not only reduces a large amount of energy consumption, but also improves the service life of the device; finally, the reduction of the process can improve the excellent rate of the product. It is easier to monitor and improve quality.
  • a substrate is provided, and the substrate is provided with a predetermined area forming a color film unit pattern; the predetermined area includes a first predetermined area, a second predetermined area, and a third predetermined area.
  • the color film substrate manufacturing process may further include:
  • step S21 includes the following process:
  • the first color described in step S210 and the second color and the third color in step S220 may be red, green, and blue, respectively, but here and the aforementioned red, green, and blue colors. All three colors are a better solution, but it is not excluded that other colors can be used, and even other colors such as the fourth and fifth colors can be included to achieve some desired display functions.
  • the order of the pixel unit patterns of different colors may be selected according to the needs of the design, and is not limited herein.

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Optical Filters (AREA)
  • Coating Apparatus (AREA)

Abstract

一种涂布设备，用于制作彩膜基板，包括滚轮和压胶装置，所述滚轮的外表面设有多个开口，所述开口的形状与待涂布基板的彩色像素单元的形状相同，所述滚轮还设有与所述开口连通的空腔，所述空腔用于容纳胶体；所述压胶装置用于将所述空腔内的胶体从所述开口处压出。还公开了一种彩膜基板制作工艺，包括：提供一基板，所述基板上设有形成彩膜单元图案的预定区域；通过涂布设备在所述基板的预定区域内涂布形成彩膜单元的图案。

Description

涂布设备及彩膜基板制作工艺 技术领域
本发明的实施例涉及一种涂布设备， 以及应用该设备进行的彩膜基板制 作工艺。 背景技术
显示面板由阵列基板和彩膜基板对盒（cell-assembly )而形成， 阵列基板 和彩膜基板之间滴注有液晶。 彩膜基板上设有黑矩阵， 在黑矩阵的开口区域 设有彩膜单元，每个彩膜单元可以由三个彩色像素单元构成，分别为红（R )、 蓝（B ) 、 绿（G )三个亚像素单元。
目前， 制作彩膜单元的工艺为： 在基板上涂布红色光阻胶层， 将其预固 化以后， 通过曝光机和掩膜板对基板上需要留下的部分红色光阻胶层进行曝 光，然后利用显影机对未曝光的红色光阻胶层部分进行显影以将该部分去除， 接着固化，从而可以在基板的预定区域内形成红色像素单元。重复上述过程， 在基板上的预定区域内分别形成蓝色像素单元和绿色像素单元。 上述提到的 彩色光阻胶可以采用具有感光性质的材料， 此时无需再额外使用光刻胶来进 行图案化； 彩色光阻胶也可以采用不具有感光性质的材料， 但此时需要额外 使用光刻胶来进行图案化。
不难看出， 在上述制作彩膜的过程中要不断进行曝光、 显影等工序， 这 样一方面工序较为复杂， 导致制作时间较长； 另一方面彩色光阻胶的使用量 较多， 设备的能耗比较大， 而且掩膜板的价格也比较高 （约为 80万 /张） ， 使得整体的制作成本也比较高。 发明内容
本发明的实施例提供了一种涂布设备及应用该设备进行的彩膜基板制作 工艺， 可以在不进行曝光、 显影工序的情况下， 直接在基板上形成彩膜， 节 省制作时间以及制作成本。
本发明的实施例提供了一种涂布设备， 用于制作彩膜基板， 包括滚轮和 压胶装置， 其中， 所述滚轮的外表面设有多个开口， 所述开口的形状与待涂 布基板的彩色像素单元的形状相同，所述滚轮还设有与所述开口连通的空腔， 所述空腔用于容纳胶体； 所述压胶装置用于将所述空腔内的胶体从所述开口 处压出。
例如， 该涂布设备还可以包括底座， 所述滚轮支撑在所述底座上， 所述 底座和所述滚轮之间设有用于放置基板的支撑平台， 所述支撑平台与所述滚 轮之间的距离与所述基板的厚度相同或相当。
例如， 该涂布设备种， 所述支撑平台连接有用于移动所述支撑平台的移 动调节装置， 所述支撑平台的移动方向垂直于所述滚轮的轴向。
例如， 该涂布设备还可以包括加热装置， 所述加热装置用于加热所述支 撑平台或所述基板。
例如， 所述压胶装置可以包括输胶机构和输气机构， 所述输胶机构用于 将所述胶体输送至所述空腔内并使胶体附着在所述开口处； 所述输气机构用 于将气体输出至所述空腔内并将所述开口处附着的胶体压出。
例如， 所述输胶机构可以包括输胶管道和输胶泵， 所述输胶管道的一端 连接所述输胶泵、 另一端伸入所述滚轮的空腔内。
例如， 所述输胶管道伸入并贯通所述空腔， 且伸入的输胶管道上设有与 所述开口相对的输胶口。
例如， 所述输胶口的形状与所述开口的形状相同。
例如， 所述输气机构可以包括输气管道和输气泵， 所述输气管道的一端 连接所述输气泵、 另一端伸入所述滚轮的空腔内。
例如， 所述输气管道伸入并贯通所述空腔， 且伸入的输气管道上设有与 所述开口相对的出气口。
例如， 所述滚轮沿轴向均匀分布设有多圏开口， 每圏开口由沿周向间隔 分布的多个开口组成。
例如， 沿轴向的相邻两圏开口之间的滚轮外表面和 /或内表面设有挡板。 例如， 所述挡板伸出的高度略高于所述滚轮的表面。
本发明实施例还提供了一种彩膜基板制作工艺， 包括： 提供一基板， 所 述基板上设有形成彩膜单元图案的预定区域； 通过上述任一项所述的涂布设 备在所述基板的预定区域内涂布形成彩膜单元的图案。 例如， 所述预定区域包括第一预定区域、 第二预定区域以及第三预定区 域， 使涂布设备的滚轮压在所述基板的表面， 在所述滚轮与所述基板发生相 对移动时， 通过涂布设备的压胶装置在所述基板的第一预定区域处第一颜色 光阻胶， 经固化工序后形成第一颜色像素单元图案； 然后， 重复上述步骤， 在基板的第二预定区域处形成第二颜色像素单元图案、 以及第三预定区域处 形成第三颜色像素单元图案。
例如， 该方法在所述基板的预定区域内涂布形成彩膜单元的图案之后还 可以包括： 在形成有彩膜单元图案的基板上形成黑色矩阵， 所述黑色矩阵设 置于所述彩色像素单元图案之间。 附图说明
为了更清楚地说明本发明实施例的技术方案， 下面将对实施例的附图作 筒单地介绍，显而易见地，下面描述中的附图仅仅涉及本发明的一些实施例， 而非对本发明的限制。
图 1为本发明实施例提供的涂布设备的示意图；
图 2为本发明实施例提供的涂布设备涂布基板的示意图；
图 3为本发明实施例提供的涂布设备中滚轮的展开平面示意图； 图 4为本发明实施例提供的涂布设备中输胶管道的截面示意图； 图 5为本发明实施例提供的涂布设备中输气管道的截面示意图； 图 6为本发明实施例提供的彩膜基板制作工艺的流程示意图；
图 7为本发明实施例提供的彩膜基板制作工艺的具体流程示意图。
附图标记：
1-滚轮， 10-开口， 11-第一通孔， 12-第二通孔， 2-支撑平台， 3-基板， 4- 输胶管道， 40-输胶口， 5-输气管道， 50-出气口， 6-挡板。 具体实施方式
为使本发明实施例的目的、 技术方案和优点更加清楚， 下面将结合本发 明实施例的附图，对本发明实施例的技术方案进行清楚、 完整地描述。显然， 所描述的实施例是本发明的一部分实施例， 而不是全部的实施例。 基于所描 述的本发明的实施例， 本领域普通技术人员在无需创造性劳动的前提下所获 得的所有其他实施例， 都属于本发明保护的范围。
参照图 1 , 本发明实施例提供了一种涂布设备， 可用于制作彩膜基板， 包括滚轮和压胶装置。 所述滚轮 1的外表面设有多个开口 10, 所述开口 10 的形状与待涂布基板上的彩色像素单元的形状相同， 所述滚轮 1还设有与所 述开口 10连通的空腔（图中未示）， 所述空腔用于容纳胶体； 所述压胶装置 用于将所述空腔内的胶体从所述开口 10处压出。
当滚轮 1在基板上滚动时，从开口 10处压出的胶体会在基板上形成和所 述开口 10形状相同的图案， 即形成彩色像素单元的图案，这样可以在不进行 曝光、 显影工序的情况下， 便能够直接在基板上形成彩膜单元的图案， 节省 了制作时间以及制作成本。
进一步需要说明的是， 本实施例节省了曝光、 显影工序。 首先， 该方式 避免了使用曝光工序中用到的掩膜板， 而如背景技术中所述， 掩膜板的制作 成本较高， 这样本发明在较大程度上减少了制作成本。 其次， 传统技术中具 有感光性质的彩色光阻胶在曝光工序中， 先整板涂布， 尔后大部分彩色光阻 胶（2/3 以上）会在显影工序中被除掉。 本实施例则仅在预定的区域内涂布 彩色光阻胶即可， 这样节约了大量彩色光阻胶， 同时还避免使用显影液。 另 夕卜， 本实施例可以降低曝光机、 显影机等相关设备的使用频率， 这样不但减 少了大量能耗， 也可以提高设备的使用寿命； 而且， 工序的减少可以使产品 的优良率提高， 较容易进行质量监控及改善。
为了使本领域技术人员可以更好地理解本发明实施例，下面结合附图 1-5 对可以实现直接在基板上进行彩膜涂布工艺的涂布设备进行详细说明。 可以 理解的是， 本发明实施例中的涂布设备在一定情况下也可以涂布除彩膜单元 以外的其它结构图案。
如图 1和图 2所示， 本发明实施例提供了一种涂布设备， 包括设有空腔 的滚轮 1、 压胶装置、 底座（图中未示） ， 所述滚轮 1的外表面设有多个开 口 10, 所述开口 10的形状与待涂布基板的彩色像素单元的形状相同； 所述 滚轮还设有与所述开口连通的空腔， 所述空腔用于容纳待涂布的胶体， 所述 压胶装置用于将所述空腔内的胶体从所述开口处压出； 所述滚轮 1支撑在所 述底座上， 所述底座和所述滚轮 1之间设有用于放置基板 3的支撑平台 2。 所述支撑平台 2与所述滚轮 1之间的距离与所述基板 3的厚度相同或相当， 这样滚轮 1可以接近于或完全压在基板 3的表面上， 以使压胶装置压出的胶 直接涂在基板 3上， 而且还可以避免如下问题： 由于该距离大而使得压出的 光刻胶与预定区域发生偏离而无法形成完整的彩色像素单元图案。
这里需要说明的是， 在涂布时， 基板 3的摆放状态可以是其长度方向平 行于滚轮 1轴向， 此时基板 3的长度和滚轮 1的轴向长度大致相同； 或者可 以是基板 3的宽度方向平行于滚轮 1的轴向方向， 此时基板 3的宽度和滚轮 1 的轴向长度大致相同。 在本发明实施例中， 均以后者作为可选的方案进行 描述。
在利用涂布设备进行涂布时， 滚轮 1和支撑平台 2之间具有相对运动才 能对基板 3上所有的预定区域进行完整涂布。 为实现相对移动这一目的， 可 以将滚轮 1设置为可移动的机构， 且其移动方向垂直于自身轴向； 或者可以 将支撑平台 2设置为可以移动的机构， 即将支撑平台 2连接有用于移动支撑 平台 2的移动调节装置， 支撑平台 2的移动方向垂直于滚轮 1的轴向。 本发 明实施例采用后者作为优选的方案， 且此优选方案中的可移动支撑平台还便 于基板的流水线制作。 由于本发明实施例是直接通过滚轮 1将彩膜单元图案 涂布在基板 3预定区域内， 且彩膜单元规则地布置在基板 3上， 因此需要基 板 3在支撑平台 2上准确地与滚轮 1对位。 鉴于此原因， 上述移动调节装置 还可以具有对位调节的功能， 用来对支撑平台 2进行对位调节。
涂布在基板 3上的彩色光阻胶需要通过加热固化， 从而形成稳固的彩膜 单元图案，因此本发明实施例提供的涂布设备还可以进一步包括加热装置（图 中未示） 。 所述加热装置用于加热所述支撑平台 2, 以使放置其上的基板 3 达到一定的温度， 进而对留在基板 3上的彩色光阻胶进行加热固化； 或者也 可以不需要通过借助加热支撑平台 2来使基板 3达到一定的温度， 加热装置 直接加热基板 3以使其达到一定温度， 进而对留在基板 3上的彩色光阻胶进 行加热固化。
对于上述涂布设备中的压胶装置， 一个示例可以包括输胶机构和输气机 构。 输胶机构用于将胶体输送至所述空腔内并使胶体附着在所述开口 10处； 输气机构用于将气体输出至所述空腔内并将所述开口 10处附着的胶从开口 10处压出， 且通过控制输气机构的气压来控制压胶量， 进而可以控制涂布在 基板 3上的图案厚度。 作为一种可选的方案， 结合图 1和图 2, 上述输胶机构的一个示例包括 输胶管道 4和输胶泵（图中未示 ) , 所述输胶管道 4的一端连接所述输胶泵、 另一端伸入所述滚轮 1的空腔内。 这样可以将通过输胶泵将彩色光阻胶抽送 至输胶管道 4内， 并从输胶管道 4伸入空腔的一端流入空腔内。
不过当所述输胶管道 4伸入并贯通所述空腔， 且在伸入的输胶管道 4上 设有与所述开口 10相对的输胶口 40 (如图 4所示） 时， 输胶管道 4内的胶 体可以直接从输胶口 40处流出并附着在开口 10处， 这样可以保证每个开口 10处同时都附着彩色光阻胶，避免出现遗漏而^^板缺少部分彩色像素单元 的图案。
上述输胶口 40的形状与所述开口 10的形状相同，这样保证从输胶口 40 压出的彩色光阻胶完全附着在开口 10处。
同样作为一种可选的方案， 结合图 1和图 2, 上述输气机构的一个示例 包括输气管道 5和输气泵（图中未示） ， 所述输气管道 5的一端连接所述输 气泵、 另一端伸入所述滚轮 1的空腔内， 这样将通过输气泵将气体抽送至输 气管道 5内， 并从输气管道 5伸入空腔的一端流入空腔内。
与上述输胶管道 4的结构类似， 所述输气管道 5伸入并贯通所述空腔， 且在伸入的输气管道 5上设有与所述开口 10相对的出气口 50(如图 5所示；)， 输气管道 5内的气体可以从出气口 50直接吹向开口 10。 可以看出， 这样每 个出气口的气体压力几乎或完全相同， 从而使得压出彩色光阻胶的量几乎或 完全相同， 进而使得在基板上的形成的彩色像素单元图案的厚度几乎或完全 相同。
这里可以理解的是， 为了使空腔内的气体形成能够聚集而形成较大的气 压， 以便于将空腔内的彩色光阻 出， 该空腔在滚轮 1进行涂布时为密封 的腔体， 可参照图 1 , 空腔的一端封闭、 另一端设有与输胶管道 4相匹配的 第一通孔 11和与所述输气管道 5相匹配的第二通孔 12。 因此， 当输胶管道 4 和输气管道 5分别从第一通孔 11和第二通孔 12插入以后， 滚轮 1的内部形 成为密封的结构。 空腔具有第一通孔 11和第二通孔 12的两端也均可以是盖 子结构， 其一端的盖子上设有所述第一通孔 11和所述第二通孔 12。 这种盖 子结构可以进行拆卸， 便于对滚轮 1内部进行清洗、 维护等。
当然， 对于上述压胶装置， 也可以不包括输气机构， 通过给输胶泵提供 一个足够大的抽泵力， 以使滚轮 1进行涂布时该足够大的抽泵力能够将彩色 光阻胶从滚轮 1的开口 10处压出，并涂到基板 3上，从而在基板 3上形成图 案。
通常在基板上形成的彩膜单元的图案为矩阵图案。 每一个彩膜单元包括 三个彩色像素单元， 例如可以分别为红、 绿、 蓝亚像素单元。 这样在基板上 也可以看作是由多排并列的彩色像素单元形成， 每相邻两排相同颜色的彩色 像素单元之间有两种不同颜色的彩色像素单元。 当为了使滚轮 1在涂布时形 成上述图案， 可以在滚轮 1沿轴向均匀分布设有多圏开口， 例如可参照图 3, 该图为沿滚轮 1轴向剪开后的展开平面图， 在此图示状态下， 宽度为滚轮 1 的圓周长度， 长度为滚轮 1的轴向长度， 每圏开口由沿周向间隔分布的多个 开口 10组成， 且每圏的多个开口 10沿轴向排布形成多排开口， 每三圏开口 对应的彩色像素单元沿图 3可以分别为红、 绿、 蓝。
需要说明的是， 在基板上形成的彩膜单元的图案不仅仅限于规则的矩阵 图案。 例如， 基板上的彩膜可以由多排并列的彩色像素单元形成， 而在每排 的彩色像素单元在列向上错位排布， 即通常所称的 "马赛克" 排列方式。 这 种情况下， 涂布设备的滚轮 1沿轴向均匀分布设有多圏开口， 每圏开口由沿 周向间隔分布的多个开口 10组成， 每圏的多个开口 10沿轴向呈错位排布。
另外， 彩膜单元可以至少包括三个彩色像素单元， 除了上述提到的红、 绿、 蓝亚像素单元以外， 可以根据设计的需要还包括黄和 /或酒红和 /或透明 等颜色的亚像素单元。 当然， 前述所提及的红、 绿、 蓝三种颜色均是为一种 较优的方案， 但不排除可以采用其它颜色， 以实现某些需要的显示功能。
由于沿轴向的相邻两圏之间对应不同颜色的彩色光阻胶， 因此相邻两圏 开口之间的滚轮外表面和 /或内表面设有图 1或图 3所示的挡板 6, 这样以避 免其中一圏开口 10处附着的彩色光阻胶流动到相邻一圏的开口 10处， 从而 发生不同颜色彩色光阻胶的混合。这里优选地将滚轮 1的外表面和 /或内表面 均设有挡板 6。
当挡板 6的高度较大时， 滚轮 1的外表面与支撑平台 2表面之间就会产 生一定的距离， 而在滚轮 1涂布时， 滚轮 1便可能无法压在基板 3上， 这样 可能会导致压出的彩色光阻胶偏离预定区域， 从而无法形成完整的彩色像素 单元图案， 因此为避免这一现象， 挡板 6的高度应略高于（高度以小于 10 μ m的数值较佳 )滚轮 1的外表面和 /或内表面。
综上所述,本发明实施例提供的涂布设备可以是上述任意的组合的形式， 而并不限于某一种组合形式的实施例， 为了便于使读者清晰地了解本发明， 下述是对其中一种优选的组合形式进行具体描述。
再次结合图 1和图 2, 涂布设备包括设有空腔的滚轮 1、压胶装置、 支撑 滚轮 1的底座、 以及用于加热固化的加热装置， 滚轮 1沿轴向均匀分布多圏 开口 10, 相邻两圏开口 10之间的滚轮外表面和内表面设有挡板 6, 开口 10 的形状与彩色像素单元（包括红、 绿、 蓝像素单元） 的形状相同； 空腔的一 端封闭、 另一端设有第一通孔 11和第二通孔 12, 输胶管道 4和输气管道 5 分别从第一通孔 11和第二通孔 12伸入并贯通整个空腔， 输胶管道 4上设有 与所述开口 10相对的输胶口 40, 且输胶口 40的形状与所述开口 10的形状 相同， 输气管道 5设有与开口 10相对的出气口 50。 底座和滚轮 1之间设有 用于放置基板 3且可以移动的支撑平台 2, 该支撑平台 2与滚轮 1之间的距 离与基板 3的厚度相同或相当，支撑平台 2的移动方向垂直于滚轮 1的轴向。
当基板 3放置在支撑平台 2上时,基板 3的宽度方向平行于滚轮的轴向， 并且将通过移动调节装置将基板 3与滚轮 1进行对位， 并使滚轮 1压在基板 3上，再通过移动调节装置移动基板 3, 同时滚轮 1也开始滚动，从而进行涂 布作业。
根据上述涂布设备， 本发明的实施例还提供了一种彩膜基板制作工艺， 如图 6所示， 包括：
S10、 提供一基板， 所述基板上设有形成彩膜单元图案的预定区域；
S 11、 通过所述涂布设备在所述基板的预定区域内涂布形成彩膜单元的 图案。
由于该彩膜基板制作工艺中采用了上述的涂布设备， 因此可以在不进行 曝光、 显影工序的情况下， 直接在基板上涂布形成彩膜单元的图案， 节省了 制作时间以及制作成本。
进一步需要说明的是， 本实施例节省了曝光、 显影工序。 首先， 该工艺 避免了使用曝光工序中用到的掩膜板， 而如背景技术中所述， 掩膜板的制作 成本较高， 这样本发明在较大程度上减少了制作成本； 其次， 该工艺仅在预 定的区域内涂布彩色光阻胶， 这样节约了大量彩色光阻胶， 同时还避免了使 用显影液； 然后， 该工艺可以降低曝光机、 显影机等相关设备的使用频率， 这样不但减少了大量能耗， 也可以提高设备的使用寿命； 最后， 工序的减少 可以使产品的优良率提高， 较容易进行质量监控及改善。
下面进一步结合图 7来介绍本发明实施例提供的彩膜基板制作工艺。 S20、 提供一基板， 所述基板上设有形成彩膜单元图案的预定区域； 所 述预定区域包括第一预定区域、 第二预定区域以及第三预定区域。
S21、 通过所述涂布设备在所述基板的预定区域内涂布形成彩膜单元的 图案。
522、 在形成有彩膜单元图案的基板上形成黑色矩阵， 所述黑色矩阵设 置于所述彩色像素单元图案之间。
对于扭曲向列型或者垂直取向型的显示面板， 彩膜基板制作工艺还可以 进一步包括：
523、 在形成有彩膜单元和黑色矩阵的基板上形成公共电极。
所述步骤 S21的一个示例包括如下工艺：
S210、 将放置在支撑平台上的基板与滚轮进行对位， 使滚轮压在所述基 板的表面， 在滚轮与基板发生相对移动时， 通过压胶装置在所述基板的第一 预定区域处涂布第一颜色光阻胶， 经加热装置的加热固化工序后形成第一颜 色像素单元图案；
S220、 重复上述步骤， 在基板的第二预定区域处形成第二颜色像素单元 图案、 以及第三预定区域处形成第三颜色像素单元图案， 进而形成完整的彩 膜单元；
这里需要说明的是， 步骤 S210所述的第一颜色、 步骤 S220所述的第二 颜色和第三颜色可以分别为红、 绿、 蓝， 但是此处以及前述所提及的红、 绿、 蓝三种颜色均是为一种较优的方案， 但不排除可以采用其它颜色， 甚至还可 以包括第四、 第五种等其他颜色， 以实现某些需要的显示功能。 另外， 对于 不同颜色的像素单元图案的制作顺序，可以根据设计的需要来自行进行选择， 在此不做限定。
由于上述方法中涉及的涂布设备已经在前述中详细描述， 因此这里不再 对其进行重复描述； 黑色矩阵、 公共电极等制作工艺均可以采用传统技术中 的成熟工艺， 这里也不再对其进行赘述。 还可以理解的是， 本领域技术人员 可以通过结合前述任意一种方式的涂布设备均能实现上述彩膜基板制作工艺 所要达到的目的。
以上所述仅是本发明的示范性实施方式， 而非用于限制本发明的保护范 围， 本发明的保护范围由所附的权利要求确定。

Claims

权利要求书
1、 一种涂布设备， 用于制作彩膜基板， 包括滚轮和压胶装置， 其中， 所述滚轮的外表面设有多个开口， 所述开口的形状与待涂布基板 的彩色像素单元的形状相同， 所述滚轮还设有与所述开口连通的空腔， 所述 空腔用于容纳胶体；
所述压胶装置用于将所述空腔内的胶体从所述开口处压出。
2、 根据权利要求 1所述的涂布设备， 还包括底座， 其中， 所述滚轮支撑 在所述底座上， 所述底座和所述滚轮之间设有用于放置基板的支撑平台， 所 述支撑平台与所述滚轮之间的距离与所述基板的厚度相同或相当。
3、根据权利要求 1或 2所述的涂布设备， 其中， 所述支撑平台连接有用 于移动所述支撑平台的移动调节装置， 所述支撑平台的移动方向垂直于所述 滚轮的轴向。
4、 根据权利要求 1-3任一所述的涂布设备， 还包括加热装置， 其中， 所 述加热装置用于加热所述支撑平台或所述基板。
5、 根据权利要求 1-4任一所述的涂布设备， 其中， 所述压胶装置包括： 输胶机构， 所述输胶机构用于将所述胶体输送至所述空腔内并使胶体附 着在所述开口处；
输气机构， 所述输气机构用于将气体输出至所述空腔内并将所述开口处 附着的胶体压出。
6、根据权利要求 5所述的涂布设备， 其中， 所述输胶机构包括输胶管道 和输胶泵， 所述输胶管道的一端连接所述输胶泵、 另一端伸入所述滚轮的空 腔内。
7、根据权利要求 6所述的涂布设备， 其中， 所述输胶管道伸入并贯通所 述空腔， 且伸入的输胶管道上设有与所述开口相对的输胶口。
8、根据权利要求 7所述的涂布设备， 其中， 所述输胶口的形状与所述开 口的形状相同。
9、根据权利要求 5所述的涂布设备， 其中， 所述输气机构包括输气管道 和输气泵， 所述输气管道的一端连接所述输气泵、 另一端伸入所述滚轮的空 腔内。
10、 根据权利要求 9所述的涂布设备， 其中， 所述输气管道伸入并贯通 所述空腔， 且伸入的输气管道上设有与所述开口相对的出气口。
11、 根据权利要求 1-10任一项所述的涂布设备， 其中， 所述滚轮沿轴向 均匀分布设有多圏开口， 每圏开口由沿周向间隔分布的多个开口组成。
12、根据权利要求 11所述的涂布设备， 其中， 沿轴向的相邻两圏开口之 间的滚轮外表面和 /或内表面设有挡板。
13、根据权利要求 12所述的涂布设备， 其中， 所述挡板伸出的高度略高 于所述滚轮的表面。
14、 一种彩膜基板制作工艺， 包括：
提供一基板， 所述基板上设有形成彩膜单元图案的预定区域； 通过权利要求 1-13任一项所述的涂布设备在所述基板的预定区域内涂 布形成彩膜单元的图案。
15、根据权利要求 14所述的彩膜基板制作工艺， 其中， 所述预定区域包 括第一预定区域、 第二预定区域以及第三预定区域，
使所述涂布设备的滚轮压在所述基板的表面， 在所述滚轮与所述基板发 生相对移动时， 通过所述涂布设备的压胶装置在所述基板的第一预定区域处 涂布第一颜色光阻胶， 经固化工序后形成第一颜色像素单元图案； 然后， 重 复上述步骤， 在所述基板的第二预定区域处形成第二颜色像素单元图案、 以 及第三预定区域处形成第三颜色像素单元图案。
16、 根据权利要求 14或 15所述的彩膜基板制作工艺， 所述基板的预定 区域内涂布形成彩膜单元的图案之后还包括：
在形成有彩膜单元图案的基板上形成黑色矩阵， 所述黑色矩阵设置于所 述彩色像素单元图案之间。
PCT/CN2013/087144 2013-05-31 2013-11-14 涂布设备及彩膜基板制作工艺 Ceased WO2014190680A1 (zh)

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