WO2014141571A1 - Release film for green sheet manufacturing, and method for manufacturing release film for green sheet manufacturing - Google Patents

Release film for green sheet manufacturing, and method for manufacturing release film for green sheet manufacturing Download PDF

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Publication number
WO2014141571A1
WO2014141571A1 PCT/JP2013/085202 JP2013085202W WO2014141571A1 WO 2014141571 A1 WO2014141571 A1 WO 2014141571A1 JP 2013085202 W JP2013085202 W JP 2013085202W WO 2014141571 A1 WO2014141571 A1 WO 2014141571A1
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WIPO (PCT)
Prior art keywords
green sheet
layer
smoothing layer
release agent
release film
Prior art date
Application number
PCT/JP2013/085202
Other languages
French (fr)
Japanese (ja)
Inventor
知巳 深谷
慎也 市川
Original Assignee
リンテック株式会社
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by リンテック株式会社 filed Critical リンテック株式会社
Priority to KR1020157026151A priority Critical patent/KR102037127B1/en
Priority to CN201380074647.2A priority patent/CN105050780B/en
Priority to SG11201507464UA priority patent/SG11201507464UA/en
Publication of WO2014141571A1 publication Critical patent/WO2014141571A1/en
Priority to PH12015502152A priority patent/PH12015502152A1/en

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    • BPERFORMING OPERATIONS; TRANSPORTING
    • B28WORKING CEMENT, CLAY, OR STONE
    • B28BSHAPING CLAY OR OTHER CERAMIC COMPOSITIONS; SHAPING SLAG; SHAPING MIXTURES CONTAINING CEMENTITIOUS MATERIAL, e.g. PLASTER
    • B28B1/00Producing shaped prefabricated articles from the material
    • B28B1/30Producing shaped prefabricated articles from the material by applying the material on to a core or other moulding surface to form a layer thereon
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B32LAYERED PRODUCTS
    • B32BLAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
    • B32B27/00Layered products comprising a layer of synthetic resin
    • B32B27/06Layered products comprising a layer of synthetic resin as the main or only constituent of a layer, which is next to another layer of the same or of a different material
    • B32B27/08Layered products comprising a layer of synthetic resin as the main or only constituent of a layer, which is next to another layer of the same or of a different material of synthetic resin
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B32LAYERED PRODUCTS
    • B32BLAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
    • B32B27/00Layered products comprising a layer of synthetic resin
    • B32B27/16Layered products comprising a layer of synthetic resin specially treated, e.g. irradiated
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B32LAYERED PRODUCTS
    • B32BLAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
    • B32B7/00Layered products characterised by the relation between layers; Layered products characterised by the relative orientation of features between layers, or by the relative values of a measurable parameter between layers, i.e. products comprising layers having different physical, chemical or physicochemical properties; Layered products characterised by the interconnection of layers
    • B32B7/04Interconnection of layers
    • B32B7/06Interconnection of layers permitting easy separation
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B32LAYERED PRODUCTS
    • B32BLAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
    • B32B2307/00Properties of the layers or laminate
    • B32B2307/50Properties of the layers or laminate having particular mechanical properties
    • B32B2307/538Roughness
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B32LAYERED PRODUCTS
    • B32BLAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
    • B32B2307/00Properties of the layers or laminate
    • B32B2307/70Other properties
    • B32B2307/748Releasability
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B32LAYERED PRODUCTS
    • B32BLAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
    • B32B2457/00Electrical equipment
    • B32B2457/16Capacitors

Definitions

  • the present invention relates to a release film for producing a green sheet and a method for producing a release film for producing a green sheet.
  • a release film for producing a green sheet is used to form a green sheet.
  • the release film for producing green sheets is generally composed of a base material and a release agent layer.
  • a green sheet is produced by applying a ceramic slurry in which ceramic particles and a binder resin are dispersed and dissolved in an organic solvent on such a release film for producing a green sheet, and drying the slurry. Moreover, the manufactured green sheet peels from the peeling film for green sheet manufacture, and is used for manufacture of a ceramic capacitor.
  • the ceramic capacitor manufactured by laminating such green sheets has a problem that a malfunction due to a short circuit occurs.
  • the surface (cast surface) of the release film for producing a green sheet is required to have very high smoothness.
  • thermosetting resin liquid is applied to one surface of a substrate sheet having fine irregularities on the surface, and then heated and cured.
  • a release film in which a thermosetting resin layer formed by the above method is provided and a release agent is applied on the thermosetting resin layer to form a release agent layer (see, for example, Patent Document 1).
  • An object of the present invention is to provide a release film for producing a green sheet that can prevent the occurrence of pinholes and partial thickness variations on the surface of the green sheet and can produce a highly reliable green sheet. There is to do.
  • Another object of the present invention is to provide a production method for producing a release film for producing a green sheet, which can prevent pinholes and partial thickness variations on the surface of the green sheet. is there.
  • a release film for producing a green sheet A substrate having a first surface and a second surface; A smoothing layer provided on the first surface of the substrate; A release agent layer provided on the surface side opposite to the base material of the smoothing layer, The smoothing layer is formed by irradiating and curing an active energy ray on a composition for forming a smoothing layer containing an active energy ray-curable compound, An arithmetic average roughness Ra 1 of the outer surface of the release agent layer is 8 nm or less, and a maximum protrusion height Rp 1 of the outer surface of the release agent layer is 50 nm or less. Release film.
  • the smoothing layer has a surface opposite to the substrate, the arithmetic mean roughness Ra 4 of the surface opposite to the base material of the smoothing layer has a 8nm or less, and the smoothing release film for green sheet production according to any one of the maximum protrusion height of the surface opposite the substrate layer Rp 4 is (1) to at 50nm or less (5).
  • the arithmetic mean roughness Ra 3 of the second surface is 10 to 200 nm, and the maximum protrusion height Rp 3 of the second surface is 80 to 1000 nm (1) to (6)
  • a method for producing a release film for producing a green sheet is 8 nm or less, and the maximum protrusion height Rp 1 of the outer surface of the release agent layer is 50 nm or less.
  • a release film for producing a green sheet that can prevent the occurrence of pinholes and partial thickness variations on the surface of the green sheet and can produce a highly reliable green sheet. can do.
  • a release film for producing a green sheet having excellent outer surface smoothness is provided. be able to. If this release film for producing a green sheet is used, pinholes, partial thickness variations and the like can be prevented from occurring on the surface of the green sheet.
  • the peeling film for green sheet manufacture which can manufacture the green sheet excellent in the smoothness of the surface can be manufactured easily and reliably.
  • FIG. 1 is a cross-sectional view of a release film for producing a green sheet of the present invention.
  • the release film for producing a green sheet of the present invention is used for producing a green sheet.
  • the manufactured green sheet is used for manufacture of a ceramic capacitor etc., for example.
  • FIG. 1 is a cross-sectional view of a release film for producing a green sheet of the present invention.
  • the upper side in FIG. 1 is referred to as “upper” and the lower side is referred to as “lower”.
  • the release film 1 for producing a green sheet includes a base material 11 having a first surface 111 and a second surface 112, and a smooth surface provided on the first surface 111 of the base material 11. And the release agent layer 13 provided on the surface 121 side opposite to the base material of the smoothing layer 12. That is, as shown in FIG. 1, the release film 1 for producing a green sheet has a three-layer structure in which a base material 11, a smoothing layer 12, and a release agent layer 13 are laminated so as to be joined to each other in this order. It is.
  • the green sheet when manufacturing a green sheet using the peeling film 1 for green sheet manufacture, the green sheet applies the ceramic slurry which melt
  • the release film 1 for producing a green sheet has a smoothing layer 12 between the substrate 11 and the release agent layer 13.
  • the smoothing layer 12 is formed by irradiating and curing an active energy ray to a smoothing layer forming composition containing an active energy ray-curable compound, and the arithmetic average of the outer surface 131 of the release agent layer 13. It is characterized in that the roughness Ra 1 is 8 nm or less and the maximum protrusion height Rp 1 of the outer surface 131 of the release agent layer 13 is 50 nm or less.
  • the release film 1 for producing a green sheet which is excellent in smoothness of the outer surface 131 of the release agent layer 13 and excellent in peelability. If a green sheet is manufactured using this release film 1 for manufacturing a green sheet, pinholes and partial thickness variations are prevented from occurring on the surface of the green sheet, and a highly reliable green sheet is manufactured. be able to. As a result, when a capacitor is produced by laminating green sheets, it is possible to prevent a problem due to a short circuit from occurring.
  • the film used as the substrate 11 has various surface roughnesses. Inexpensive films tend to have relatively rough surface roughness. Even when a release film for producing a green sheet is formed using a substrate having such a relatively rough surface, a smoothing layer having the above-described characteristics can be provided on the surface of the substrate. The unevenness on the surface of the base material can be accurately embedded (cancelled). As a result, the surface of the smoothing layer opposite to the substrate can be smoothed. Thereby, it can prevent that the unevenness
  • each layer which comprises the peeling film 1 for green sheet manufacture which concerns on this embodiment is demonstrated one by one.
  • the base material 11 has a function of imparting physical strength such as rigidity and flexibility to the release film 1 for producing a green sheet (hereinafter sometimes simply referred to as “release film 1”).
  • the base material 11 has a first surface 111 and a second surface 112.
  • the material constituting the substrate 11 is not particularly limited, and examples thereof include polyester resins such as polybutylene terephthalate resin, polyethylene terephthalate resin and polyethylene naphthalate resin, polyolefin resins such as polypropylene resin and polymethylpentene resin, and polycarbonate. Examples thereof include a film made of plastic.
  • the substrate 11 may be a single layer film or a multilayer film of two or more layers of the same type or different types. Among these, a polyester film is preferable, a polyethylene terephthalate film is more preferable, and a biaxially stretched polyethylene terephthalate film is more preferable.
  • the polyester film is less prone to dust and the like during its processing and use. Therefore, for example, when a green sheet is manufactured using the release film 1 manufactured using a polyester resin, it is possible to effectively prevent a ceramic slurry coating failure due to dust or the like. As a result, a green sheet with fewer pinholes and the like can be manufactured.
  • the base material 11 may contain a filler or the like in addition to the above materials.
  • the filler include silica, titanium oxide, calcium carbonate, kaolin, aluminum oxide, and the like, and one or more of these can be used in combination.
  • the base material 11 preferably has an arithmetic average roughness Ra 2 of the first surface 111 of 10 to 200 nm and a maximum protrusion height Rp 2 of 80 to 1000 nm.
  • the arithmetic average roughness Ra 2 of the first surface 111 is more preferably 15 to 100 nm, and the arithmetic average roughness Ra 2 of the first surface 111 is further preferably 20 to 50 nm. Further, more preferably the maximum projection height Rp 2 of the first surface 111 is 90 ⁇ 800 nm, the maximum projection height Rp 2 of the first surface 111 is more preferably in the range of 100 ⁇ 600 nm.
  • the smoothing layer 12 described later has a relatively thin film thickness, the unevenness of the surface 111 can be embedded more reliably, and the surface 121 opposite to the base material 11 of the smoothing layer 12 can be made smoother. As a result, it is possible to more reliably prevent the unevenness of the first surface 111 of the substrate 11 from affecting the outer surface 131 of the release agent layer 13 formed on the smoothing layer 12.
  • the base 11 having the arithmetic average roughness Ra 2 of the first surface 111 and the maximum protrusion height Rp 2 within the above range is relatively inexpensive and easily available.
  • the unevenness of the first surface 111 is sufficiently filled depending on the constituent material of the smoothing layer forming composition. Therefore, it may be necessary to make the release agent layer 13 relatively thick.
  • the arithmetic average roughness Ra 2 and the maximum protrusion height Rp 2 of the first surface 111 of the substrate 11 are determined according to JIS B0601-1994 surface roughness measuring machine SV3000S4 (Mitutoyo Co., Ltd.). It is a value obtained by measurement by a stylus type).
  • the “arithmetic average roughness and maximum protrusion height” refer to values obtained by measurement as described above.
  • the base material 11 preferably has an arithmetic average roughness Ra 3 of the second surface 112 of 10 to 200 nm and a maximum protrusion height Rp 3 of 80 to 1000 nm.
  • the arithmetic mean roughness Ra 3 of the second surface 112 is more preferably from 15 ⁇ 100 nm, the arithmetic mean roughness Ra 3 of the second surface 112 is even more preferably 20 ⁇ 50 nm.
  • the maximum projection height Rp 3 of the second surface 112 is 90 ⁇ 800 nm, the maximum projection height Rp 3 of the second surface 112 is more preferably in the range of 100 ⁇ 600 nm.
  • the release film 1 When the arithmetic average roughness Ra 3 of the second surface 112 and the maximum protrusion height Rp 3 are within the above ranges, it is preferable that winding deviation or the like occurs when the release film 1 is wound into a roll shape. Can be prevented. Moreover, when the release film 1 is wound up and stored in a roll shape, blocking can be prevented from occurring. Specifically, the release film 1 can be wound and stored in a roll shape around a core material made of paper, plastic, metal, or the like as necessary so that the release agent layer 13 is on the inside. .
  • the average film thickness of the substrate 11 is not particularly limited, but is preferably 10 to 300 ⁇ m, and more preferably 15 to 200 ⁇ m.
  • the smoothing layer 12 has a function of reducing the influence of the unevenness of the first surface 111 of the substrate 11 on the outer surface 131 of the release agent layer 13.
  • the smoothing layer 12 is provided on the first surface 111 of the substrate 11.
  • the smoothing layer 12 is formed by applying a composition for forming a smoothing layer on the first surface 111 of the substrate 11, and irradiating the obtained coating layer with an active energy ray and curing it. Is done.
  • composition for smoothing layer formation contains the active energy ray hardening-type compound hardened
  • composition for smoothing layer formation before irradiating an active energy ray exists in the uncured state or the semi-hardened state at room temperature.
  • such a composition for forming a smoothing layer has appropriate fluidity when applied on the first surface 111 of the substrate 11. Therefore, by using such a composition for forming a smoothing layer, the unevenness of the first surface 111 of the substrate 11 can be easily embedded, and the embedded state can be reliably maintained. As a result, it is possible to prevent the unevenness of the base material 11 from affecting the surface 121 of the smoothing layer 12 opposite to the base material 11 (hereinafter also referred to as “third surface 121”), The third surface 121 of the smoothing layer 12 can be smoothed. Therefore, the outer surface 131 of the release agent layer 13 formed on the third surface 121 of the smoothing layer 12 can be made smoother.
  • the active energy ray-curable compound examples include an ultraviolet curable compound that is cured by irradiating ultraviolet rays, an infrared curable compound that is cured by irradiating infrared rays, and an X-ray that is cured by irradiating X-rays.
  • examples thereof include a curable compound, an electron beam curable compound that is cured by irradiation with an electron beam, and a visible light curable compound that is cured by irradiation with visible light.
  • an ultraviolet curable compound is particularly preferable.
  • the ultraviolet curable compound has appropriate fluidity. For this reason, it is possible to form a smooth surface state by applying the smoothing layer forming composition onto the first surface 111 of the substrate 11. Therefore, even if the smoothing layer 12 is formed relatively thin, the unevenness of the first surface 111 of the substrate 11 can be reliably embedded. As a result, the third surface 121 of the smoothing layer 12 can be smoothed more easily and reliably.
  • active energy ray-curable compound that can be cured by irradiating active energy rays such as ultraviolet rays and electron beams
  • active energy rays such as ultraviolet rays and electron beams
  • those having two or more polymerizable unsaturated groups in the molecule are used.
  • examples include urethane acrylate compounds, polyfunctional acrylate compounds, polyester acrylate compounds, epoxy acrylate compounds, polyol acrylate compounds, and the like.
  • urethane acrylate compounds are preferable.
  • the urethane acrylate compound can be obtained, for example, by esterifying a polyurethane oligomer obtained by reaction of polyether polyol or polyester polyol with polyisocyanate with (meth) acrylic acid.
  • a polyurethane oligomer obtained by reaction of polyether polyol or polyester polyol with polyisocyanate with (meth) acrylic acid.
  • phenylglycidyl ether acrylate hexamethylene diisocyanate urethane prepolymer pentaerythritol triacrylate hexamethylene diisocyanate urethane prepolymer, pentaerythritol triacrylate toluene diisocyanate urethane prepolymer, pentaerythritol triacrylate isophorone diisocyanate urethane prepolymer, dipentaerythritol
  • polyfunctional acrylate compound examples include 1,4-butanediol di (meth) acrylate, 1,6-hexanediol di (meth) acrylate, neopentyl glycol di (meth) acrylate, polyethylene glycol di (meth) acrylate, Neopentyl glycol adipate di (meth) acrylate, dicyclopentanyl di (meth) acrylate, allylated cyclohexyl di (meth) acrylate, isocyanurate di (meth) acrylate, trimethylolpropane tri (meth) acrylate, dipentaerythritol tri (Meth) acrylate, pentaerythritol tri (meth) acrylate, tris (acryloxyethyl) isocyanurate, dipentaerythritol hexa (meth) acrylate and the like.
  • Polyester acrylate compounds can be obtained by, for example, esterifying hydroxyl groups of polyester oligomers having hydroxyl groups at both ends obtained by condensation of polyvalent carboxylic acids and polyhydric alcohols with (meth) acrylic acid, or polyvalent carboxylic acids. It can be obtained by esterifying the terminal hydroxyl group of an oligomer obtained by adding alkylene oxide to (meth) acrylic acid.
  • the epoxy acrylate compound can be obtained, for example, by reacting (meth) acrylic acid with an oxirane ring of a relatively low molecular weight bisphenol type epoxy resin or novolak type epoxy resin and esterifying it.
  • the polyol acrylate compound can be obtained, for example, by esterifying the hydroxyl group of the polyether polyol with (meth) acrylic acid.
  • the active energy ray-curable compound preferably has a mass average molecular weight of 950 or less, and more preferably has a mass average molecular weight of 300 to 700.
  • coating to the 1st surface 111 of the base material 11 and irradiating an active energy ray can be made moderate.
  • the composition for smoothing layer formation has further moderate fluidity
  • the unevenness of the surface of the first surface 111 of the substrate 11 is relatively large, the unevenness of the first surface 111 is reduced by the action and effect of the smoothing layer forming composition as described above. Since it can be embedded suitably, the release film 1 having excellent smoothness of the outer surface 131 of the release agent layer 13 can be obtained.
  • the mass average molecular weight of the active energy ray-curable compound when the mass average molecular weight of the active energy ray-curable compound is less than the lower limit, the viscosity of the smoothing layer forming composition decreases, and the time for curing the smoothing layer 12 becomes relatively long. There is a case.
  • the mass average molecular weight of the active energy ray-curable compound exceeds the upper limit, depending on the type of the active energy ray-curable compound, the viscosity of the smoothing layer-forming composition becomes relatively high. In order to adjust, it may be necessary to add a viscosity modifier or the like.
  • the smoothing layer-forming composition may contain a solvent, if necessary. Thereby, the viscosity of the composition for smoothing layer formation at the time of apply
  • the solvent examples include aromatic hydrocarbons such as toluene and xylene, fatty acid esters such as ethyl acetate and butyl acetate, ketones such as methyl ethyl ketone and methyl isobutyl ketone, and organic solvents such as alcohols such as methanol, ethanol and isopropyl alcohol. 1 type or 2 types or more of them can be used in combination. Thereby, it becomes easy to make moderate the viscosity before apply
  • aromatic hydrocarbons such as toluene and xylene
  • fatty acid esters such as ethyl acetate and butyl acetate
  • ketones such as methyl ethyl ketone and methyl isobutyl ketone
  • organic solvents such as alcohols such as methanol, ethanol and isopropyl alcohol.
  • the smoothing layer forming composition may contain other components in addition to the components as described above.
  • other components include a crosslinking agent, a photopolymerization initiator, a viscosity modifier, a catalyst, a dye, a dispersant, an antistatic agent, and a curing agent.
  • the content of the other components in the smoothing layer forming composition is preferably 0.1 to 10% by mass.
  • the content of the active energy ray-curable compound in the composition for forming a smoothing layer containing a solvent is not particularly limited, but is preferably 0.5 to 60% by mass, and more preferably 1 to 45% by mass. Thereby, it becomes easy to make the viscosity of the composition for smoothing layer formation suitable.
  • the content of the active energy ray-curable compound in the smoothing layer forming composition is not particularly limited, but is preferably 90% by mass or more, and more preferably 95% by mass or more. Thereby, the sclerosis
  • arithmetic mean roughness of the third surface 121 of the smoothing layer 12 Ra 4 is a 8nm or less, and preferably has a maximum projection height Rp 4 is 50nm or less.
  • the arithmetic average roughness Ra 4 of the third surface 121 is more preferably 6 nm or less. Further, it is more preferable that the maximum protrusion height Rp 4 of the third surface 121 is 40 nm or less.
  • the adhesiveness to the release agent layer 13 may be lowered depending on the constituent material of the smoothing layer 12 and the like. is there.
  • the arithmetic average roughness Ra 4 of the third surface 121 exceeds the upper limit, it may be necessary to provide a new smoothing layer between the release agent layer 13 and the smoothing layer 12. .
  • the maximum protrusion height Rp 4 of the third surface 121 is less than the lower limit value, in order to improve the adhesion with the release agent layer 13, on the third surface 121 of the smoothing layer 12, In some cases, it is necessary to perform a treatment for improving the adhesion. On the other hand, if the maximum protrusion height Rp 4 of the third surface 121 exceeds the upper limit, it may be necessary to provide a new smoothing layer between the release agent layer 13 and the smoothing layer 12. .
  • the average film thickness of the smoothing layer 12 is not particularly limited, but is preferably 0.2 to 10 ⁇ m, and more preferably 0.3 to 5 ⁇ m. Thereby, the unevenness
  • the composition for forming a smoothing layer of the present embodiment is formed to contain the active energy ray-curable compound as described above, even if the smoothing layer 12 has a relatively thin film thickness, The unevenness of the first surface 111 of the material 11 can be embedded more easily and reliably. Moreover, the softness
  • the average film thickness of the smoothing layer 12 is less than the lower limit value, the unevenness of the first surface 111 of the substrate 11 may be sufficient depending on the components constituting the smoothing layer forming composition. Therefore, it may be necessary to use the first surface 111 having a relatively small surface roughness.
  • the average film thickness of the smoothing layer 12 exceeds the above upper limit, depending on the components constituting the composition for forming the smoothing layer, curling of the release film 1 is likely to occur due to curing shrinkage of the smoothing layer 12. Therefore, the handleability of the release film 1 may be reduced.
  • the release agent layer 13 has a function of imparting peelability to the release film 1.
  • the release agent layer 13 is provided on the third surface 121 side of the smoothing layer 12.
  • the release agent layer 13 is a layer formed by applying a release agent layer forming composition to the third surface 121 of the smoothing layer 12, drying and curing it.
  • Such a composition for forming a release agent layer contains a release agent.
  • the release agent include alkyd compounds, acrylic compounds, silicone compounds, long-chain alkyl group-containing compounds, fluorine compounds, and the like, and one or more of these can be used in combination.
  • the release agent layer 13 that has an appropriate curability and is particularly excellent in the peelability to the green sheet.
  • alkyd compounds include modified products such as long-chain alkyl-modified alkyd compounds and silicone-modified alkyd compounds.
  • a crosslinking agent or a catalyst may be further added to the release agent layer forming composition.
  • the release agent layer 13 having an alkyd compound having a cross-linked structure can be obtained by a method of heat-curing such a release agent layer forming composition. As a result, when the green sheet is formed on the release agent layer 13, it is possible to prevent the release property of the release agent layer 13 from being prevented from being transferred to the green sheet. it can.
  • the acrylic compound modified products such as a long-chain alkyl-modified acrylic compound and a silicone-modified acrylic compound can be used.
  • a crosslinking agent or a catalyst may be further added to the release agent layer forming composition.
  • the release agent layer 13 having an acrylic compound having a crosslinked structure can be obtained by a method of heat-curing such a release agent layer forming composition. As a result, it is possible to prevent the peelable acrylic compound from moving to the smoothing layer 12 and to prevent the peelability of the release agent layer 13 from being lowered.
  • a silicone compound having dimethylpolysiloxane as a basic skeleton can be used as a specific example.
  • the silicone compound include an addition reaction type, a condensation reaction type, an ultraviolet curable type, and an electron beam curable type.
  • the addition reaction type silicone compound has high reactivity and excellent productivity. Compared with the condensation reaction type silicone compound, the addition reaction type silicone compound has advantages such as little change in peel force after production and no cure shrinkage. It is preferable to use it.
  • addition reaction type silicone compound examples include two alkenyl groups having 2 to 10 carbon atoms such as vinyl group, allyl group, propenyl group, and hexenyl group at the terminal and / or side chain of the molecule of the compound.
  • the organopolysiloxane provided above is mentioned.
  • crosslinking agent examples include, for example, organopolysiloxane having hydrogen atoms bonded to at least two silicon atoms in one molecule, specifically, a dimethylhydrogensiloxy group end-capped dimethylsiloxane-methylhydrogensiloxane copolymer. And trimethylsiloxy group end-capped dimethylsiloxane-methylhydrogensiloxane copolymer, trimethylsiloxy group end-capped methylhydrogenpolysiloxane, poly (hydrogensilsesquioxane), and the like.
  • the catalyst examples include finely divided platinum, finely divided platinum adsorbed on a carbon powder carrier, chloroplatinic acid, alcohol-modified chloroplatinic acid, olefin complexes of chloroplatinic acid, white metal compounds such as palladium and rhodium, etc. Is mentioned.
  • long-chain alkyl group-containing compound for example, polyvinyl carbamate obtained by reacting a polyvinyl alcohol polymer with a long-chain alkyl isocyanate having 8 to 30 carbon atoms, or polyethyleneimine with 8 to 30 carbon atoms.
  • An alkylurea derivative obtained by reacting a long-chain alkyl isocyanate is used.
  • fluorine compound for example, a fluorine silicone compound, a fluorine boron compound, or the like can be used.
  • the release agent layer forming composition may contain a dispersion medium and a solvent in addition to the release agent described above.
  • the viscosity of the composition for forming a release agent layer before being applied to the third surface 121 of the smoothing layer 12 and dried can be made moderate.
  • dispersion medium or solvent examples include aromatic solvents such as toluene, fatty acid esters such as ethyl acetate, ketones such as methyl ethyl ketone, and organic solvents such as aliphatic hydrocarbons such as hexane and heptane. Species or a combination of two or more can be used.
  • the release agent layer forming composition may contain other components.
  • other components include a catalyst, a dye, a dispersant, an antistatic agent, and a curing agent.
  • the content of the other components in the release agent layer forming composition is preferably 0.1 to 10% by mass.
  • the content of the release agent in the release agent layer forming composition is not particularly limited, but is preferably 0.3 to 10% by mass.
  • the outer surface 131 of the release agent layer 13 has an arithmetic average roughness Ra 1 of 8 nm or less, and a maximum protrusion height Rp 1 of 50 nm or less.
  • the arithmetic mean roughness Ra 1 of the outer surface 131 of the release agent layer 13 is preferably 6 nm or less.
  • the maximum protrusion height Rp 1 of the outer surface 131 of the release agent layer 13 is preferably 40 nm or less.
  • the release agent layer 13 preferably has an average film thickness of 0.01 to 3 ⁇ m, and more preferably 0.03 to 1 ⁇ m. If the thickness of the release agent layer 13 is less than 0.01 ⁇ m, the function as the release agent layer may not be sufficiently exhibited depending on the material constituting the release agent layer 13 or the like. On the other hand, when the thickness of the release agent layer 13 exceeds 3 ⁇ m, when the release film 1 is wound into a roll, blocking is likely to occur. There may be a problem that the charging property at the time of unwinding increases.
  • the manufacturing method of the release film 1 of the present embodiment includes a base material preparing step for preparing the base material 11 and a smoothing layer forming composition containing a predetermined active energy ray-curable compound on the first surface of the base material 11.
  • the coating layer forming step for forming the coating layer by applying to 111 and drying it as necessary, and the smoothing layer 12 by forming the coating layer by irradiating and curing the active energy ray
  • the base material 11 is prepared.
  • the base material 11 having the configuration described above can be used.
  • the first surface 111 of the substrate 11 can be subjected to a surface treatment such as an oxidation method or a primer treatment.
  • a surface treatment such as an oxidation method or a primer treatment.
  • FIG. For example, corona discharge treatment, plasma discharge treatment, chromium oxidation treatment (wet), flame treatment, hot air treatment, ozone treatment, ultraviolet irradiation treatment and the like can be mentioned. Among these, it is more preferable to use the corona discharge treatment method from the viewpoint of excellent adhesion to the smoothing layer 12 and easy treatment operation.
  • a smoothing layer forming composition is prepared.
  • the active energy ray-curable compound as described above may be used alone.
  • a composition for forming a smoothing layer in which a solvent and other components as described above are mixed as necessary may be used.
  • a smoothing layer forming composition that forms a liquid is applied on the first surface 111 of the substrate 11.
  • a coating layer is obtained.
  • the smoothing layer-forming composition has an appropriate fluidity, by applying the smoothing layer-forming composition on the first surface 111 of the base material 11, The unevenness of the first surface 111 of the material 11 can be accurately embedded. As a result, it is possible to prevent the unevenness of the base material 11 from affecting the third surface 121 of the smoothing layer 12 and to smooth the third surface 121 of the smoothing layer 12.
  • the smoothing layer forming composition contains a solvent or the like
  • the smoothing layer forming composition is applied onto the first surface 111 of the substrate 11, and then the smoothing layer forming composition is dried. To obtain a coating layer. Thereby, a solvent can be removed by drying the composition for smoothing layer formation.
  • Examples of the method for applying the smoothing layer forming material include a gravure coating method, a bar coating method, a spray coating method, a spin coating method, an air knife coating method, a roll coating method, a blade coating method, a gate roll coating method, and a die coating. Law.
  • the gravure coating method and the bar coating method are more preferable, and the bar coating method is more preferable. Thereby, the coating layer of the target thickness can be formed easily.
  • the method of drying the smoothing layer forming material is not particularly limited, and examples thereof include a method of drying in a hot air drying furnace.
  • the drying conditions are not particularly limited.
  • the drying temperature is preferably 50 to 100 ° C., and the drying time is preferably 5 seconds to 1 minute. Thereby, unintentional alteration of the smoothing layer 12 can be prevented, and the smoothing layer 12 can be formed particularly efficiently. As a result, productivity of the finally obtained release film 1 can be improved.
  • the drying temperature is within the above range, particularly when the release agent layer forming composition contains a solvent or the like, the occurrence of warping or cracking of the smoothing layer 12 accompanied by evaporation of the solvent or the like at the time of drying. Can be prevented.
  • the smoothing layer 12 is formed by irradiating the application layer obtained by the application layer forming step with an activation energy ray and curing it.
  • the coating layer in which the unevenness of the first surface 111 of the substrate 11 is appropriately embedded in the coating layer forming step is cured while maintaining the smoothness of the outer surface.
  • the smoothing layer 12 having a sufficiently smooth third surface 121 can be obtained.
  • corrugation of the 1st surface 111 of the base material 11 with respect to the outer surface 131 of the releasing agent layer 13 can be prevented. Therefore, the smoothness of the outer surface 131 of the release agent layer 13 can be made excellent in the release agent layer forming step described later.
  • the activation energy ray used for curing may be appropriately selected depending on the material contained in the smoothing layer forming composition to be used.
  • visible light ultraviolet ray, infrared ray, X-ray, ⁇ ray, ⁇ Examples thereof include rays, ⁇ rays, and electron beams. Among these, ultraviolet rays or visible rays are preferable.
  • the wavelength of the activation energy ray is not particularly limited, but is preferably 200 to 600 nm, for example, and more preferably 250 to 450 nm. If the wavelength of the activation energy ray is within the above range, the coating layer can be uniformly cured while sufficiently shortening the curing time for curing the coating layer.
  • the means for irradiating the activation energy ray is not particularly limited, and various general means can be used.
  • a light source lamp such as a high-pressure mercury lamp, a metal halide lamp, or an excimer lamp can be used as the light source.
  • the irradiation amount of the activation energy rays is preferably 50 to 400 mJ / cm 2 , and preferably 100 to 300 mJ / cm 2. More preferred.
  • the irradiation amount of the activation energy ray is a value within the above range, the coating layer can be cured more uniformly and reliably.
  • the time for irradiating the activation energy ray is not particularly limited, but is preferably 5 seconds to 1 minute. Thereby, the smoothing layer 12 can be formed particularly efficiently. As a result, productivity of the finally obtained release film 1 can be improved.
  • the release agent layer 13 is formed on the surface 121 side of the smoothing layer 12 opposite to the substrate 11.
  • the release agent layer forming composition constituting the release agent layer 13 a composition in which the above-described materials are mixed is prepared.
  • a liquid release agent layer forming composition is applied on the surface 121 of the smoothing layer 12 opposite to the substrate 11, and then dried and cured. Thereby, the release agent layer 13 is obtained.
  • the drying method is not particularly limited, and examples thereof include a drying method using a hot air drying furnace.
  • drying conditions are not particularly limited.
  • the drying temperature is preferably 80 to 150 ° C.
  • the drying time is preferably 5 seconds to 1 minute.
  • the reliable peeling film 1 which is excellent in smoothness and excellent in peelability can be manufactured easily and reliably.
  • a green sheet is manufactured using such a release film 1, it is possible to prevent a pinhole or the like from being generated on the surface of the green sheet.
  • a ceramic powder-dispersed slurry is applied to the surface of the release agent layer of the release film and dried to form a green sheet.
  • a method of forming an electrode on a ceramic sheet obtained by laminating the peeled green sheets to obtain a laminate and firing the laminate is exemplified. Thereby, a ceramic capacitor can be obtained.
  • a ceramic capacitor is formed with a green sheet formed using the release film 1, a highly reliable ceramic capacitor in which the occurrence of problems due to a short circuit is prevented can be obtained.
  • the base material has been described as having a single-layer structure, but the present invention is not limited to this, and the base material may have a multilayer structure of two or more layers of the same type or different types.
  • the smoothing layer and the release agent layer are similarly described as having a single layer structure, but the present invention is not limited to this, and the smoothing layer and the release agent layer are each of the same or different two or more layers. It may have a multilayer structure.
  • the green sheet manufacturing release film in which the smoothing layer is provided on the first surface of the base material has been described.
  • the release film for producing a green sheet is not limited to this, and a smoothing layer or a release agent layer may be provided on the second surface side of the substrate.
  • the green sheet manufacturing release film has been described as having a three-layer structure in which a base material, a smoothing layer, and a release agent layer are laminated to be joined to each other in this order.
  • the present invention is not limited to this, and an intermediate layer may be provided between the smoothing layer and the release agent layer.
  • the adhesion between the smoothing layer and the release agent layer may be improved, and the occurrence of electrification when winding the release film for green sheet production before the green sheet is formed is further improved. It may be a layer to be suppressed.
  • the manufacturing method of the peeling film for green sheet manufacture of this invention is not limited to the method mentioned above, Arbitrary processes may be added as needed.
  • an ultraviolet curable compound mainly composed of a urethane acrylate oligomer as an active energy ray curable compound [Arakawa Chemical Industries, trade name “Beam Set 575CB”, solid content 100 mass%, mass average molecular weight 470, light Polymerization initiator contained] 100 parts by mass, toluene and methyl ethyl ketone were mixed to obtain a composition for forming a smoothing layer having a solid content of 20% by mass.
  • the obtained composition for forming a smoothing layer was applied to the first surface of the substrate with a Meyer bar # 4 and dried at 80 ° C. for 1 minute to obtain a coating layer.
  • the coating layer was irradiated with ultraviolet rays (wavelength: 365 nm, irradiation amount: 200 mJ / cm 2 ) with an ultraviolet irradiation device to form a smoothing layer (thickness: 1.3 ⁇ m).
  • the release agent layer-forming composition was uniformly applied to the surface of the smoothing layer opposite to the substrate so that the thickness of the release agent layer-forming composition after drying was 0.1 ⁇ m. Thereafter, the release agent layer-forming composition was dried at 130 ° C. for 1 minute to form a release agent layer, thereby producing a release film for producing a green sheet.
  • Example 2 The biaxially stretched polyethylene terephthalate film of Example 1 was converted into a biaxially stretched polyethylene terephthalate film [thickness 31 ⁇ m, arithmetic mean roughness Ra 2 of the first surface: 29 nm, maximum protrusion height Rp 2 : 257 nm of the first surface, A release film for producing a green sheet was produced in the same manner as in Example 1 except that the arithmetic average roughness Ra 3 of the second surface was 29 nm and the maximum protrusion height Rp 3 was 257 nm of the second surface. .
  • Example 3 The biaxially stretched polyethylene terephthalate film of Example 1 was converted into a biaxially stretched polyethylene terephthalate film [thickness 31 ⁇ m, arithmetic mean roughness Ra 2 of the first surface: 15 nm, maximum projection height Rp 2 of first surface: 98 nm, Example 1 except that the arithmetic average roughness Ra 3 of the second surface was changed to 15 nm and the maximum protrusion height Rp 3 of the second surface was 98 nm, and the thickness of the smoothing layer was changed to 0.4 ⁇ m. In the same manner as described above, a release film for producing a green sheet was produced.
  • Example 4 A release film for producing a green sheet was produced in the same manner as in Example 1 except that the thickness of the smoothing layer in Example 1 was changed to 1.8 ⁇ m.
  • Example 5 A release film for producing a green sheet was produced in the same manner as in Example 1 except that the thickness of the smoothing layer in Example 1 was changed to 2.3 ⁇ m.
  • the release agent layer forming composition was uniformly applied on the first surface of the substrate so that the thickness of the release agent layer forming composition after drying was 0.1 ⁇ m. Thereafter, the release agent layer-forming composition was dried at 130 ° C. for 1 minute to form a release agent layer, thereby producing a release film for producing a green sheet.
  • thermosetting compound manufactured by Hitachi Chemical Co., Ltd., trade name “Tesfine 303”, solid content 20 mass%, mass average molecular weight 15000] 100 mass
  • 3 parts by mass of p-toluenesulfonic acid as an acid catalyst, toluene and methyl ethyl ketone were mixed to obtain a composition for forming a smoothing layer having a solid content of 20% by mass.
  • the obtained composition for smoothing layer formation was apply
  • the coating layer was dried at 140 ° C. for 1 minute and heated to form a smoothing layer (thickness: 1.0 ⁇ m).
  • the release agent layer-forming composition was uniformly applied to the surface of the smoothing layer opposite to the substrate so that the thickness of the release agent layer-forming composition after drying was 0.1 ⁇ m. Thereafter, the release agent layer-forming composition was dried at 130 ° C. for 1 minute to form a release agent layer, thereby producing a release film for producing a green sheet.
  • a release film for producing a green sheet was produced in the same manner as in Example 1 except that the composition for forming a chemical layer was obtained.
  • a polyester compound [manufactured by Toyobo Co., Ltd., trade name “Byron 20SS”, solid content 30 mass%, mass average molecular weight 3000] as a thermosetting compound, and methylated melamine 20 as a crosslinking agent
  • a composition for forming a smoothing layer having a solid content of 20% by mass was obtained by mixing 3 parts by mass of p-toluenesulfonic acid as an acid catalyst, toluene, and methyl ethyl ketone.
  • the obtained composition for forming a smoothing layer was applied to the first surface of the substrate with a Meyer bar # 4 to obtain a coating layer.
  • the coating layer was dried at 130 ° C. for 1 minute and heated to form a smoothing layer (thickness: 1.2 ⁇ m).
  • the release agent layer-forming composition was uniformly applied to the surface of the smoothing layer opposite to the substrate so that the thickness of the release agent layer-forming composition after drying was 0.1 ⁇ m. Thereafter, the release agent layer-forming composition was dried at 130 ° C. for 1 minute to form a release agent layer, thereby producing a release film for producing a green sheet.
  • Table 1 summarizes the configurations and the like of the release films for producing green sheets of each Example and each Comparative Example.
  • an ultraviolet curable compound having a urethane acrylate oligomer as a main component as an active energy ray curable compound [manufactured by Arakawa Chemical Industry Co., Ltd., trade name “Beam Set 575CB”, solid content 100 mass%, mass average molecular weight 470 ] “A1”, a mixture of a stearyl-modified alkyd compound as a thermosetting compound and a methylated melamine compound [manufactured by Hitachi Chemical Co., Ltd., trade name “Tesfine 303”, solid content 20 mass%, mass average molecular weight 15000 ] “A2”, a cationic polymerizable ultraviolet curable compound mainly composed of an epoxy-modified silicone compound as an active energy ray curable compound [“UV POLY200” manufactured by Arakawa Chemical Industries, Ltd., solid content concentration: 100 mass%, mass Average molecular weight 20000] is "A3" Ester compound [Toyobo Co., Ltd., trade name
  • the film thicknesses of the base material, the smoothing layer and the release agent layer in each Example and each Comparative Example were measured with a reflective film thickness meter “F20” [manufactured by Filmetrics Co., Ltd.]
  • the arithmetic average roughness Ra 2 and the maximum protrusion height Rp 2 of the first surface of the base material, the arithmetic average roughness Ra 3 and the maximum protrusion height Rp 3 of the second surface of the base material, and the smoothing layer The arithmetic average roughness Ra 4 and maximum protrusion height Rp 4 of the third surface, and the arithmetic average roughness Ra 1 and maximum protrusion height Rp 1 of the outer surface of the release agent layer were measured as follows, respectively. . First, a double-sided tape was affixed to a glass plate.
  • the release film for green sheet production obtained in each example and each comparative example is placed on a double-sided tape so that the surface opposite to the surface on which the arithmetic average roughness and maximum protrusion are measured is the glass plate side. And fixed.
  • the arithmetic average roughness Ra 2 , Ra 3 , Ra 4 , Ra 1 , and the maximum protrusion height Rp 2 , Rp 3 , Rp 4 , Rp 1 are measured according to JIS B0601-1994. Measured with a measuring instrument SV3000S4 (stylus type).
  • A Compared with the appearance of the release film roll before storage obtained by rolling up the release film for green sheet production into a roll, there was no change in the appearance of the release film roll after storage (no blocking).
  • B In the release film roll for producing a green sheet, there was a region in which the color was partially different (those that have a blocking tendency can be used).
  • C The color was different over a wide area of the release film roll for producing a green sheet (with blocking). When blocking occurs due to adhesion between the front and back surfaces of the release film for green sheet production as in the above standard C, and the color changes over a wide area of the release film roll, the release film for green sheet production is normally unwound. May not be possible.
  • a release film for green sheet production obtained in each example and each comparative example was obtained by using a coating solution obtained by dissolving polyvinyl butyral resin in a toluene / ethanol mixed solvent (mass ratio 6/4). On the release agent layer (outer surface), a coating layer was obtained by coating so that the thickness after drying was 3 ⁇ m. The coating layer was dried at 80 ° C. for 1 minute to form a polyvinyl butyral resin layer. Next, a polyester tape was attached to the surface of the polyvinyl butyral resin layer.
  • the release film for green sheet production was peeled from the polyvinyl butyral resin layer, and the polyvinyl butyral resin layer was transferred to a polyester tape.
  • the surface of the polyvinyl butyral resin layer that had been in contact with the release agent layer of the release film for producing a green sheet was observed using an optical interference type surface shape observation device “WYKO-1100” [manufactured by Veeco Corporation].
  • the observation conditions were PSI mode and 50 magnification. In the range of 91.2 ⁇ 119.8 ⁇ m of the surface of the polyvinyl butyral resin layer, the number of recesses confirmed on the surface of the polyvinyl butyral resin layer was counted.
  • the concave portion had a depth of 150 nm or more to which the shape of the release agent layer was transferred.
  • the number of recesses was evaluated according to the following criteria.
  • the capacitor was produced using the polyvinyl butyral resin layer (green sheet) evaluated as the following standard C, there was a tendency for a short circuit to occur due to a decrease in withstand voltage.
  • the release film for producing a green sheet of the present invention was excellent in the smoothness of the outer surface. Moreover, the coarse recessed part etc. were hardly confirmed by the green sheet formed using the peeling film for green sheet manufacture of this invention. Moreover, generation
  • the release film for producing a green sheet of the invention is a substrate having a first surface and a second surface, a smoothing layer provided on the first surface of the substrate, and a substrate opposite to the smoothing layer.
  • the smoothing layer is formed by irradiating the active energy ray-curable composition containing the active energy ray-curable compound with an active energy ray and curing the composition.
  • the arithmetic average roughness Ra 1 of the outer surface of the release agent layer is 8 nm or less, and the maximum protrusion height Rp 1 of the outer surface of the release agent layer is 50 nm or less.
  • ADVANTAGE OF THE INVENTION According to this invention, it can prevent that a pinhole etc. generate

Abstract

This release film for green sheet manufacturing has a substrate having a first face and a second face, a smoothing layer provided to the first face of the substrate, and a release agent layer provided to a face of the smoothing layer on a reverse side thereof from the substrate, and is characterized in that the smoothing layer is formed by irradiating, with active energy rays, a smoothing layer formation composition including a thermosetting compound having a mass average molecular weight of 950 or less, and curing the smoothing layer formation composition, the arithmetic mean roughness (Ra1) of an outer surface of the releasing agent layer is 8 nm or less, and the maximum projection height (Rp1) of the outer surface of the releasing agent layer is 50 nm or less. Through the present invention, a release film for green sheet manufacturing can be obtained whereby it is possible to prevent pinholing and the like in the surface of the green sheet, and to manufacture a highly reliable green sheet.

Description

グリーンシート製造用剥離フィルムおよびグリーンシート製造用剥離フィルムの製造方法Release film for producing green sheet and method for producing release film for producing green sheet
 本発明は、グリーンシート製造用剥離フィルムおよびグリーンシート製造用剥離フィルムの製造方法に関するものである。 The present invention relates to a release film for producing a green sheet and a method for producing a release film for producing a green sheet.
 セラミックコンデンサーの製造において、グリーンシートを形成するためにグリーンシート製造用剥離フィルムが用いられている。 In the production of ceramic capacitors, a release film for producing a green sheet is used to form a green sheet.
 グリーンシート製造用剥離フィルムは、一般に基材と剥離剤層とから構成される。グリーンシートは、このようなグリーンシート製造用剥離フィルム上に、セラミックス粒子とバインダー樹脂とを有機溶媒に分散、溶解させたセラミックスラリーを塗工して、それを乾燥することで製造される。また、製造されたグリーンシートは、グリーンシート製造用剥離フィルムから剥離して、セラミックコンデンサーの製造に用いられる。 The release film for producing green sheets is generally composed of a base material and a release agent layer. A green sheet is produced by applying a ceramic slurry in which ceramic particles and a binder resin are dispersed and dissolved in an organic solvent on such a release film for producing a green sheet, and drying the slurry. Moreover, the manufactured green sheet peels from the peeling film for green sheet manufacture, and is used for manufacture of a ceramic capacitor.
 従来のグリーンシート製造用剥離フィルムを用いたグリーンシートの製造においては、グリーンシート製造用剥離フィルムの表面の凹凸がグリーンシートに転写されることで、グリーンシートの表面にピンホールが生じる等の問題があった。その結果、このようなグリーンシートを積層して製造されたセラミックコンデンサーにおいては、短絡による不具合が発生するという問題が生じていた。かかる問題を解決するために、グリーンシート製造用剥離フィルムの表面(キャスト面)には、非常に高い平滑性が求められている。 In the production of a green sheet using a conventional release film for producing a green sheet, problems such as the occurrence of pinholes on the surface of the green sheet due to the surface irregularities of the release film for producing a green sheet being transferred to the green sheet was there. As a result, the ceramic capacitor manufactured by laminating such green sheets has a problem that a malfunction due to a short circuit occurs. In order to solve such a problem, the surface (cast surface) of the release film for producing a green sheet is required to have very high smoothness.
 そこで、表面が平滑なグリーンシート製造用剥離フィルムを製造する方法として、表面に微細な凹凸がある基材シートの一方の表面に、熱硬化樹脂液を塗布して、それを加熱、硬化させることにより形成された熱硬化樹脂層を設け、さらにその熱硬化樹脂層上に剥離剤を塗布して剥離剤層を形成した剥離フィルムが提案されている(例えば、特許文献1参照)。 Therefore, as a method for producing a release film for producing a green sheet having a smooth surface, a thermosetting resin liquid is applied to one surface of a substrate sheet having fine irregularities on the surface, and then heated and cured. There has been proposed a release film in which a thermosetting resin layer formed by the above method is provided and a release agent is applied on the thermosetting resin layer to form a release agent layer (see, for example, Patent Document 1).
 また、近年のセラミックコンデンサーの小型化、高密度化に伴って、グリーンシートのさらなる薄膜化が求められている。しかしながら、従来のグリーンシート製造用剥離フィルムでは、薄いグリーンシートを製造しようとすると、グリーンシートの表面にピンホール等が生じてしまい、信頼性の高いグリーンシートを得るのが困難であった。 In addition, with the recent reduction in size and density of ceramic capacitors, further reduction in the thickness of green sheets is required. However, in the conventional release film for producing a green sheet, if a thin green sheet is to be produced, a pinhole or the like is generated on the surface of the green sheet, and it is difficult to obtain a reliable green sheet.
特開2007-069360号公報JP 2007-069360 A
 本発明の目的は、グリーンシートの表面にピンホールや部分的な厚みのばらつき等が発生するのを防止し、信頼性の高いグリーンシートを製造することが可能なグリーンシート製造用剥離フィルムを提供することにある。また、本発明の別の目的は、グリーンシートの表面にピンホールや部分的な厚みのばらつき等が生じるのを防止することができるグリーンシート製造用剥離フィルムを製造する製造方法を提供することにある。 An object of the present invention is to provide a release film for producing a green sheet that can prevent the occurrence of pinholes and partial thickness variations on the surface of the green sheet and can produce a highly reliable green sheet. There is to do. Another object of the present invention is to provide a production method for producing a release film for producing a green sheet, which can prevent pinholes and partial thickness variations on the surface of the green sheet. is there.
 このような目的は、下記(1)~(8)の本発明により達成される。
 (1) グリーンシート製造用剥離フィルムであって、
 第1の面と第2の面とを有する基材と、
 前記基材の前記第1の面に設けられた平滑化層と、
 前記平滑化層の前記基材と反対の面側に設けられた剥離剤層とを有し、
 前記平滑化層は、活性エネルギー線硬化型化合物を含む平滑化層形成用組成物に、活性エネルギー線を照射して硬化させることにより形成されており、
 前記剥離剤層の外表面の算術平均粗さRaが8nm以下であり、かつ、前記剥離剤層の前記外表面の最大突起高さRpが50nm以下であることを特徴とするグリーンシート製造用剥離フィルム。
Such an object is achieved by the present inventions (1) to (8) below.
(1) A release film for producing a green sheet,
A substrate having a first surface and a second surface;
A smoothing layer provided on the first surface of the substrate;
A release agent layer provided on the surface side opposite to the base material of the smoothing layer,
The smoothing layer is formed by irradiating and curing an active energy ray on a composition for forming a smoothing layer containing an active energy ray-curable compound,
An arithmetic average roughness Ra 1 of the outer surface of the release agent layer is 8 nm or less, and a maximum protrusion height Rp 1 of the outer surface of the release agent layer is 50 nm or less. Release film.
 (2) 前記第1の面の算術平均粗さRaが10~200nmであり、かつ、前記第1の面の最大突起高さRpが80~1000nmである上記(1)に記載のグリーンシート製造用剥離フィルム。 (2) The green according to (1), wherein the arithmetic average roughness Ra 2 of the first surface is 10 to 200 nm and the maximum protrusion height Rp 2 of the first surface is 80 to 1000 nm. Release film for sheet production.
 (3) 前記活性エネルギー線硬化型化合物は、質量平均分子量が950以下の化合物である上記(1)または(2)に記載のグリーンシート製造用剥離フィルム。 (3) The release film for producing a green sheet according to the above (1) or (2), wherein the active energy ray-curable compound is a compound having a mass average molecular weight of 950 or less.
 (4) 前記活性エネルギー線硬化型化合物は、紫外線硬化型化合物であり、前記活性エネルギー線は、紫外線である上記(1)ないし(3)のいずれかに記載のグリーンシート製造用剥離フィルム。 (4) The release film for producing a green sheet according to any one of (1) to (3), wherein the active energy ray-curable compound is an ultraviolet curable compound, and the active energy ray is ultraviolet light.
 (5) 前記平滑化層の平均膜厚が、0.2~10μmである上記(1)ないし(4)のいずれかに記載のグリーンシート製造用剥離フィルム。 (5) The release film for producing a green sheet according to any one of (1) to (4), wherein the smoothing layer has an average film thickness of 0.2 to 10 μm.
 (6) 前記平滑化層は、前記基材と反対の面を有し、前記平滑化層の前記基材と反対の前記面の算術平均粗さRaが8nm以下であり、かつ、前記平滑化層の前記基材と反対の前記面の最大突起高さRpが50nm以下である上記(1)ないし(5)のいずれかに記載のグリーンシート製造用剥離フィルム。 (6) The smoothing layer has a surface opposite to the substrate, the arithmetic mean roughness Ra 4 of the surface opposite to the base material of the smoothing layer has a 8nm or less, and the smoothing release film for green sheet production according to any one of the maximum protrusion height of the surface opposite the substrate layer Rp 4 is (1) to at 50nm or less (5).
 (7) 前記第2の面の算術平均粗さRaが10~200nmであり、かつ、前記第2の面の最大突起高さRpが80~1000nmである上記(1)ないし(6)のいずれかに記載のグリーンシート製造用剥離フィルム。 (7) The arithmetic mean roughness Ra 3 of the second surface is 10 to 200 nm, and the maximum protrusion height Rp 3 of the second surface is 80 to 1000 nm (1) to (6) A release film for producing a green sheet according to any one of the above.
 (8) 上記(1)ないし(7)のいずれかに記載のグリーンシート製造用剥離フィルムの製造方法であって、
 前記第1の面と前記第2の面とを有する前記基材を準備する基材準備工程と、
 前記活性エネルギー線硬化型化合物を含む前記平滑化層形成用組成物を、前記基材の前記第1の面側に塗布することにより塗布層を形成する塗布層形成工程と、
 前記塗布層に前記活性エネルギー線を照射して硬化させることにより、前記平滑化層を形成する平滑化層形成工程と、
 前記平滑化層の前記基材と反対の前記面側に、前記剥離剤層を形成する剥離剤層形成工程とを有し、
 前記剥離剤層の前記外表面の前記算術平均粗さRaが8nm以下であり、かつ、前記剥離剤層の前記外表面の前記最大突起高さRpが50nm以下であることを特徴とするグリーンシート製造用剥離フィルムの製造方法。
(8) A method for producing a release film for producing a green sheet according to any one of (1) to (7) above,
A base material preparing step of preparing the base material having the first surface and the second surface;
A coating layer forming step of forming a coating layer by coating the smoothing layer forming composition containing the active energy ray-curable compound on the first surface side of the substrate;
A smoothing layer forming step of forming the smoothing layer by irradiating and curing the active energy ray on the coating layer;
A release agent layer forming step of forming the release agent layer on the surface side of the smoothing layer opposite to the substrate;
The arithmetic average roughness Ra 1 of the outer surface of the release agent layer is 8 nm or less, and the maximum protrusion height Rp 1 of the outer surface of the release agent layer is 50 nm or less. A method for producing a release film for producing a green sheet.
 本発明によれば、グリーンシートの表面にピンホールや部分的な厚みのばらつき等が発生するのを防止し、信頼性の高いグリーンシートを製造することが可能なグリーンシート製造用剥離フィルムを提供することができる。特に、グリーンシート製造用剥離フィルムを構成する基材として、表面粗さの比較的大きい基材を用いた場合であっても、外表面の平滑性に優れたグリーンシート製造用剥離フィルムを提供することができる。このグリーンシート製造用剥離フィルムを用いれば、グリーンシートの表面にピンホールや部分的な厚みのばらつき等が生じるのを防ぐことができる。その結果、グリーンシートを積層してコンデンサを作製したときに、短絡による不具合が発生するのを防ぐことができる。また、本発明によれば、表面の平滑性に優れたグリーンシートを製造することができるグリーンシート製造用剥離フィルムを、容易かつ確実に製造することができる。 According to the present invention, there is provided a release film for producing a green sheet that can prevent the occurrence of pinholes and partial thickness variations on the surface of the green sheet and can produce a highly reliable green sheet. can do. In particular, even when a substrate having a relatively large surface roughness is used as a substrate constituting the release film for producing a green sheet, a release film for producing a green sheet having excellent outer surface smoothness is provided. be able to. If this release film for producing a green sheet is used, pinholes, partial thickness variations and the like can be prevented from occurring on the surface of the green sheet. As a result, when a capacitor is produced by laminating green sheets, it is possible to prevent a problem due to a short circuit from occurring. Moreover, according to this invention, the peeling film for green sheet manufacture which can manufacture the green sheet excellent in the smoothness of the surface can be manufactured easily and reliably.
図1は、本発明のグリーンシート製造用剥離フィルムの横断面図である。FIG. 1 is a cross-sectional view of a release film for producing a green sheet of the present invention.
 以下、本発明を好適実施形態に基づいて詳細に説明する。
 〈〈グリーンシート製造用剥離フィルム〉〉
 本発明のグリーンシート製造用剥離フィルムは、グリーンシートの製造に用いられるものである。そして、製造されたグリーンシートは、例えば、セラミックコンデンサー等の製造に用いられる。
Hereinafter, the present invention will be described in detail based on preferred embodiments.
<Peeling film for manufacturing green sheets>
The release film for producing a green sheet of the present invention is used for producing a green sheet. And the manufactured green sheet is used for manufacture of a ceramic capacitor etc., for example.
 図1は、本発明のグリーンシート製造用剥離フィルムの横断面図である。なお、以下の説明では、図1中の上側を「上」、下側を「下」と言う。 FIG. 1 is a cross-sectional view of a release film for producing a green sheet of the present invention. In the following description, the upper side in FIG. 1 is referred to as “upper” and the lower side is referred to as “lower”.
 図1に示すように、グリーンシート製造用剥離フィルム1は、第1の面111と第2の面112とを有する基材11と、基材11の第1の面111上に設けられた平滑化層12と、平滑化層12の基材と反対の面121側に設けられた剥離剤層13を有している。すなわち、グリーンシート製造用剥離フィルム1は、図1に示すように、基材11と、平滑化層12と剥離剤層13とがこの順に互いに接合するように積層された三層構造をなすものである。 As shown in FIG. 1, the release film 1 for producing a green sheet includes a base material 11 having a first surface 111 and a second surface 112, and a smooth surface provided on the first surface 111 of the base material 11. And the release agent layer 13 provided on the surface 121 side opposite to the base material of the smoothing layer 12. That is, as shown in FIG. 1, the release film 1 for producing a green sheet has a three-layer structure in which a base material 11, a smoothing layer 12, and a release agent layer 13 are laminated so as to be joined to each other in this order. It is.
 なお、本明細書において、グリーンシート製造用剥離フィルム1を用いてグリーンシートを製造する場合には、グリーンシートは、例えば、剥離剤層13の外表面131上に溶解したセラミックスラリーを塗工することで形成される。 In addition, in this specification, when manufacturing a green sheet using the peeling film 1 for green sheet manufacture, the green sheet applies the ceramic slurry which melt | dissolved on the outer surface 131 of the releasing agent layer 13, for example. Is formed.
 本発明において、グリーンシート製造用剥離フィルム1は、基材11と剥離剤層13との間に平滑化層12を有する。平滑化層12は、活性エネルギー線硬化型化合物を含む平滑化層形成用組成物に、活性エネルギー線を照射して硬化させることにより形成されており、剥離剤層13の外表面131の算術平均粗さRaが8nm以下であり、かつ、剥離剤層13の外表面131の最大突起高さRpが50nm以下である点に特徴を有している。 In the present invention, the release film 1 for producing a green sheet has a smoothing layer 12 between the substrate 11 and the release agent layer 13. The smoothing layer 12 is formed by irradiating and curing an active energy ray to a smoothing layer forming composition containing an active energy ray-curable compound, and the arithmetic average of the outer surface 131 of the release agent layer 13. It is characterized in that the roughness Ra 1 is 8 nm or less and the maximum protrusion height Rp 1 of the outer surface 131 of the release agent layer 13 is 50 nm or less.
 このような特徴を有することにより、剥離剤層13の外表面131の平滑性に優れ、剥離性に優れたグリーンシート製造用剥離フィルム1を得ることができる。このグリーンシート製造用剥離フィルム1を用いてグリーンシートを製造すれば、グリーンシートの表面にピンホールや部分的な厚みのばらつき等が発生するのを防止し、信頼性の高いグリーンシートを製造することができる。その結果、グリーンシートを積層してコンデンサを作製したときに、短絡による不具合が発生するのを防ぐことができる。 By having such characteristics, it is possible to obtain the release film 1 for producing a green sheet which is excellent in smoothness of the outer surface 131 of the release agent layer 13 and excellent in peelability. If a green sheet is manufactured using this release film 1 for manufacturing a green sheet, pinholes and partial thickness variations are prevented from occurring on the surface of the green sheet, and a highly reliable green sheet is manufactured. be able to. As a result, when a capacitor is produced by laminating green sheets, it is possible to prevent a problem due to a short circuit from occurring.
 ところで、基材11として用いられるフィルムは、多様な表面粗さを有する。安価なフィルムほど表面粗さが比較的粗い傾向がある。このような表面粗さが比較的粗い基材を用いてグリーンシート製造用剥離フィルムを形成する場合であっても、基材の表面に、前記のような特徴を有する平滑化層を設けることで、基材の表面の凹凸を的確に埋め込む(相殺する)ことができる。その結果、平滑化層の基材と反対の面を平滑にすることができる。これにより、平滑化層の上に形成された剥離剤層の外表面に、基材の表面の凹凸が影響してしまうのを防ぐことができ、剥離剤層の外表面の平滑性に優れたグリーンシート製造用剥離フィルムを得ることができる。 By the way, the film used as the substrate 11 has various surface roughnesses. Inexpensive films tend to have relatively rough surface roughness. Even when a release film for producing a green sheet is formed using a substrate having such a relatively rough surface, a smoothing layer having the above-described characteristics can be provided on the surface of the substrate. The unevenness on the surface of the base material can be accurately embedded (cancelled). As a result, the surface of the smoothing layer opposite to the substrate can be smoothed. Thereby, it can prevent that the unevenness | corrugation of the surface of a base material affects the outer surface of the release agent layer formed on the smoothing layer, and was excellent in the smoothness of the outer surface of a release agent layer. A release film for producing a green sheet can be obtained.
 以下、本実施形態に係るグリーンシート製造用剥離フィルム1を構成する各層について順次説明する。 Hereafter, each layer which comprises the peeling film 1 for green sheet manufacture which concerns on this embodiment is demonstrated one by one.
 <基材11>
 基材11は、グリーンシート製造用剥離フィルム1(以下、単に「剥離フィルム1」ということもある。)に、剛性、柔軟性等の物理的強度を付与する機能を有している。
<Substrate 11>
The base material 11 has a function of imparting physical strength such as rigidity and flexibility to the release film 1 for producing a green sheet (hereinafter sometimes simply referred to as “release film 1”).
 基材11は、図1に示すように、第1の面111と第2の面112とを有する。
 基材11を構成する材料としては、特に限定されず、例えば、ポリブチレンテレフタレート樹脂、ポリエチレンテレフタレート樹脂、ポリエチレンナフタレート樹脂などのポリエステル樹脂、ポリプロピレン樹脂やポリメチルペンテン樹脂などのポリオレフィン樹脂、ポリカーボネートなどのプラスチックからなるフィルム等が挙げられる。基材11は、単層フィルムであってもよいし、同種または異種の2層以上の多層フィルムであってもよい。これらの中でも特に、ポリエステルフィルムであるのが好ましく、ポリエチレンテレフタレートフィルムであるのがより好ましく、更には二軸延伸ポリエチレンテレフタレートフィルムが好ましい。特に、ポリエステルフィルムは、その加工時や使用時等において、埃等が発生しにくい。そのため、例えば、ポリエステル樹脂を用いて製造した剥離フィルム1を使用して、グリーンシートを製造する場合に、埃等によるセラミックスラリー塗工不良等を効果的に防止することができる。その結果、ピンホール等がより少ないグリーンシートを製造することができる。
As shown in FIG. 1, the base material 11 has a first surface 111 and a second surface 112.
The material constituting the substrate 11 is not particularly limited, and examples thereof include polyester resins such as polybutylene terephthalate resin, polyethylene terephthalate resin and polyethylene naphthalate resin, polyolefin resins such as polypropylene resin and polymethylpentene resin, and polycarbonate. Examples thereof include a film made of plastic. The substrate 11 may be a single layer film or a multilayer film of two or more layers of the same type or different types. Among these, a polyester film is preferable, a polyethylene terephthalate film is more preferable, and a biaxially stretched polyethylene terephthalate film is more preferable. In particular, the polyester film is less prone to dust and the like during its processing and use. Therefore, for example, when a green sheet is manufactured using the release film 1 manufactured using a polyester resin, it is possible to effectively prevent a ceramic slurry coating failure due to dust or the like. As a result, a green sheet with fewer pinholes and the like can be manufactured.
 また、基材11には、前記のような材料に加え、フィラー等を含有させてもよい。フィラーとしては、シリカ、酸化チタン、炭酸カルシウム、カオリン、酸化アルミニウム等が挙げられ、これらのうち1種または2種以上を組み合わせて用いることができる。このようなフィラーを含むことにより、基材11に機械的強度を付与すると共に、基材11の表裏面の滑り性が向上し、ブロッキングを抑制することができる。 Further, the base material 11 may contain a filler or the like in addition to the above materials. Examples of the filler include silica, titanium oxide, calcium carbonate, kaolin, aluminum oxide, and the like, and one or more of these can be used in combination. By including such a filler, while giving mechanical strength to the base material 11, the slipperiness of the front and back of the base material 11 improves, and blocking can be suppressed.
 また、基材11は、第1の面111の算術平均粗さRaが10~200nmであり、かつ、その最大突起高さRpが80~1000nmであるのが好ましい。 The base material 11 preferably has an arithmetic average roughness Ra 2 of the first surface 111 of 10 to 200 nm and a maximum protrusion height Rp 2 of 80 to 1000 nm.
 特に、第1の面111の算術平均粗さRaは、15~100nmであるのがより好ましく、第1の面111の算術平均粗さRaは、20~50nmであるのがさらに好ましい。また、第1の面111の最大突起高さRpが90~800nmであるのがより好ましく、第1の面111の最大突起高さRpが100~600nmであるのがさらに好ましい。 In particular, the arithmetic average roughness Ra 2 of the first surface 111 is more preferably 15 to 100 nm, and the arithmetic average roughness Ra 2 of the first surface 111 is further preferably 20 to 50 nm. Further, more preferably the maximum projection height Rp 2 of the first surface 111 is 90 ~ 800 nm, the maximum projection height Rp 2 of the first surface 111 is more preferably in the range of 100 ~ 600 nm.
 第1の面111の算術平均粗さRaおよび最大突起高さRpが前記範囲内であると、後述する平滑化層12の膜厚が比較的薄くても、基材11の第1の面111の凹凸をより確実に埋め込むことができ、平滑化層12の基材11と反対の面121をより平滑にすることができる。その結果、平滑化層12上に形成された剥離剤層13の外表面131に、基材11の第1の面111の凹凸が影響するのをさらに確実に防ぐことができる。 When the arithmetic average roughness Ra 2 and the maximum protrusion height Rp 2 of the first surface 111 are within the above ranges, even if the smoothing layer 12 described later has a relatively thin film thickness, The unevenness of the surface 111 can be embedded more reliably, and the surface 121 opposite to the base material 11 of the smoothing layer 12 can be made smoother. As a result, it is possible to more reliably prevent the unevenness of the first surface 111 of the substrate 11 from affecting the outer surface 131 of the release agent layer 13 formed on the smoothing layer 12.
 また、第1の面111の算術平均粗さRa、および、その最大突起高さRpが前記範囲内である基材11は、比較的安価であるうえに入手が容易である。 In addition, the base 11 having the arithmetic average roughness Ra 2 of the first surface 111 and the maximum protrusion height Rp 2 within the above range is relatively inexpensive and easily available.
 これに対して、第1の面111の算術平均粗さRaが前記上限値を超えると、平滑化層形成用組成物の構成材料等によっては、第1の面111の凹凸を十分に埋めることが困難であるため、剥離剤層13の膜厚を比較的厚くする必要が生じる場合がある。 On the other hand, when the arithmetic average roughness Ra 2 of the first surface 111 exceeds the upper limit value, the unevenness of the first surface 111 is sufficiently filled depending on the constituent material of the smoothing layer forming composition. Therefore, it may be necessary to make the release agent layer 13 relatively thick.
 なお、本明細書では、基材11の第1の面111の算術平均粗さRaおよび最大突起高さRpは、JIS B0601-1994に準拠してミツトヨ社製表面粗さ測定機SV3000S4(触針式)により測定して求められる値である。そして、本明細書では、特に断りのない限り、「算術平均粗さおよび最大突起高さ」とは、前記のようにして測定して得られる値のことを指す。 In the present specification, the arithmetic average roughness Ra 2 and the maximum protrusion height Rp 2 of the first surface 111 of the substrate 11 are determined according to JIS B0601-1994 surface roughness measuring machine SV3000S4 (Mitutoyo Co., Ltd.). It is a value obtained by measurement by a stylus type). In the present specification, unless otherwise specified, the “arithmetic average roughness and maximum protrusion height” refer to values obtained by measurement as described above.
 また、基材11は、第2の面112の算術平均粗さRaが10~200nmであり、かつ、その最大突起高さRpが80~1000nmであるのが好ましい。特に、第2の面112の算術平均粗さRaが15~100nmであるのがより好ましく、第2の面112の算術平均粗さRaが20~50nmであるのがさらに好ましい。また、第2の面112の最大突起高さRpが90~800nmであるのがより好ましく、第2の面112の最大突起高さRpが100~600nmであるのがさらに好ましい。 The base material 11 preferably has an arithmetic average roughness Ra 3 of the second surface 112 of 10 to 200 nm and a maximum protrusion height Rp 3 of 80 to 1000 nm. In particular, the arithmetic mean roughness Ra 3 of the second surface 112 is more preferably from 15 ~ 100 nm, the arithmetic mean roughness Ra 3 of the second surface 112 is even more preferably 20 ~ 50 nm. Further, more preferably the maximum projection height Rp 3 of the second surface 112 is 90 ~ 800 nm, the maximum projection height Rp 3 of the second surface 112 is more preferably in the range of 100 ~ 600 nm.
 第2の面112の算術平均粗さRa、および、その最大突起高さRpが前記範囲内であると、剥離フィルム1をロール状に巻き取る際に、巻きずれ等が生じるのを好適に防ぐことができる。また、剥離フィルム1をロール状に巻き取って保管した際に、ブロッキングが発生することを防止することができる。具体的には、剥離フィルム1は、必要に応じて、剥離剤層13が内側になるように、紙製、プラスチック製または金属製等のコア材にロール状に巻き取り、保管することができる。この際に、第2の面112の算術平均粗さRa、および、その最大突起高さRpが前記範囲内であると、剥離フィルム1をロール状に巻き取る際に、空気抜けが良好になり、巻きずれを効果的に抑制することができる。そのため、剥離フィルム1を巻き取る際に、巻き取り張力を高める必要が無く、巻き取り張力に起因する巻き芯部の変形を抑制することが可能となる。また、ロール状の剥離フィルム1における第2の面112の算術平均粗さRa、および、その最大突起高さRpが前記範囲内であると、剥離剤層13と基材11の第2の面112とが密着することで生じるブロッキングの発生をより効果的に防止することができる。そのため、ロール状の剥離フィルム1の繰り出しを、容易に行うことができる。 When the arithmetic average roughness Ra 3 of the second surface 112 and the maximum protrusion height Rp 3 are within the above ranges, it is preferable that winding deviation or the like occurs when the release film 1 is wound into a roll shape. Can be prevented. Moreover, when the release film 1 is wound up and stored in a roll shape, blocking can be prevented from occurring. Specifically, the release film 1 can be wound and stored in a roll shape around a core material made of paper, plastic, metal, or the like as necessary so that the release agent layer 13 is on the inside. . At this time, when the arithmetic average roughness Ra 3 of the second surface 112 and the maximum protrusion height Rp 3 are within the above ranges, air release is good when the release film 1 is wound into a roll shape. Thus, winding deviation can be effectively suppressed. Therefore, when winding the release film 1, it is not necessary to increase the winding tension, and it is possible to suppress the deformation of the winding core portion caused by the winding tension. In addition, when the arithmetic average roughness Ra 3 of the second surface 112 and the maximum protrusion height Rp 3 in the roll-shaped release film 1 are within the above ranges, the release agent layer 13 and the second base material 11 The occurrence of blocking caused by the close contact with the surface 112 can be more effectively prevented. Therefore, the roll-shaped release film 1 can be easily fed out.
 これに対して、第2の面112の算術平均粗さRaが前記下限値未満であると、ロール状に巻き取る際に、剥離フィルム1の表裏(基材11の第2の面112と剥離剤層13の外表面131)でブロッキングが発生しやすくなるおそれがある。また、基材11の平均膜厚は、特に限定されないが、10~300μmであるのが好ましく、15~200μmであるのがより好ましい。これにより、剥離フィルム1の柔軟性を適度なものとしつつ、引裂きや破断等に対する耐性を特に優れたものとすることができる。 On the other hand, when the arithmetic average roughness Ra 3 of the second surface 112 is less than the lower limit value, when winding up into a roll shape, the front and back of the release film 1 (with the second surface 112 of the base material 11 and There is a possibility that blocking is likely to occur on the outer surface 131) of the release agent layer 13. The average film thickness of the substrate 11 is not particularly limited, but is preferably 10 to 300 μm, and more preferably 15 to 200 μm. Thereby, while making the softness | flexibility of the peeling film 1 moderate, the tolerance with respect to tearing, a fracture | rupture, etc. can be made especially excellent.
 <平滑化層12>
 平滑化層12は、剥離剤層13の外表面131に対する、基材11の第1の面111の凹凸の影響を低減する機能を有している。
<Smoothing layer 12>
The smoothing layer 12 has a function of reducing the influence of the unevenness of the first surface 111 of the substrate 11 on the outer surface 131 of the release agent layer 13.
 図1に示すように、平滑化層12は、基材11の第1の面111上に設けられている。
 平滑化層12は、基材11の第1の面111上に、平滑化層形成用組成物を塗布し、得られた塗布層に対して、活性エネルギー線を照射して硬化させることにより形成される。
As shown in FIG. 1, the smoothing layer 12 is provided on the first surface 111 of the substrate 11.
The smoothing layer 12 is formed by applying a composition for forming a smoothing layer on the first surface 111 of the substrate 11, and irradiating the obtained coating layer with an active energy ray and curing it. Is done.
 平滑化層形成用組成物は、活性エネルギー線を照射することにより硬化する活性エネルギー線硬化型化合物を含む。 The composition for smoothing layer formation contains the active energy ray hardening-type compound hardened | cured by irradiating an active energy ray.
 なお、活性エネルギー線を照射する前の平滑化層形成用組成物は、室温で未硬化の状態、または、半硬化の状態で存在している。 In addition, the composition for smoothing layer formation before irradiating an active energy ray exists in the uncured state or the semi-hardened state at room temperature.
 また、かかる平滑化層形成用組成物は、基材11の第1の面111上に塗布するに際し、適度な流動性を有している。したがって、かかる平滑化層形成用組成物を用いれば、基材11の第1の面111の凹凸を容易に埋め込むことができ、その埋め込んだ状態を確実に保持することができる。その結果、平滑化層12の基材11と反対の面121(以下、「第3の面121」ということもある。)側に、基材11の凹凸が影響するのを防ぐことができ、平滑化層12の第3の面121を平滑にすることができる。そのため、平滑化層12の第3の面121上に形成される剥離剤層13の外表面131をより平滑にすることができる。 Further, such a composition for forming a smoothing layer has appropriate fluidity when applied on the first surface 111 of the substrate 11. Therefore, by using such a composition for forming a smoothing layer, the unevenness of the first surface 111 of the substrate 11 can be easily embedded, and the embedded state can be reliably maintained. As a result, it is possible to prevent the unevenness of the base material 11 from affecting the surface 121 of the smoothing layer 12 opposite to the base material 11 (hereinafter also referred to as “third surface 121”), The third surface 121 of the smoothing layer 12 can be smoothed. Therefore, the outer surface 131 of the release agent layer 13 formed on the third surface 121 of the smoothing layer 12 can be made smoother.
 また、活性エネルギー線硬化型化合物としては、例えば、紫外線を照射することにより硬化する紫外線硬化型化合物、赤外線を照射することにより硬化する赤外線硬化型化合物、X線を照射することにより硬化するX線硬化型化合物、電子線を照射することにより硬化する電子線硬化型化合物、および、可視光線を照射することにより硬化する可視光線硬化型化合物等が挙げられる。これらの中でも特に、紫外線硬化型化合物であるのが好ましい。紫外線硬化型化合物は、適度な流動性を有する。このため、平滑化層形成用組成物を基材11の第1の面111上に塗布することで平滑な面状態を形成することが可能である。したがって、平滑化層12を比較的薄く形成したとしても、基材11の第1の面111の凹凸を確実に埋め込むことができる。その結果、平滑化層12の第3の面121をより容易かつ確実に平滑にすることができる。 Examples of the active energy ray-curable compound include an ultraviolet curable compound that is cured by irradiating ultraviolet rays, an infrared curable compound that is cured by irradiating infrared rays, and an X-ray that is cured by irradiating X-rays. Examples thereof include a curable compound, an electron beam curable compound that is cured by irradiation with an electron beam, and a visible light curable compound that is cured by irradiation with visible light. Among these, an ultraviolet curable compound is particularly preferable. The ultraviolet curable compound has appropriate fluidity. For this reason, it is possible to form a smooth surface state by applying the smoothing layer forming composition onto the first surface 111 of the substrate 11. Therefore, even if the smoothing layer 12 is formed relatively thin, the unevenness of the first surface 111 of the substrate 11 can be reliably embedded. As a result, the third surface 121 of the smoothing layer 12 can be smoothed more easily and reliably.
 紫外線や電子線などの活性エネルギー線を照射することにより硬化させることができる活性エネルギー線硬化型化合物としては、分子内に2個以上の重合性不飽和基を有するものが用いられる。例えば、ウレタンアクリレート系化合物、多官能アクリレート系化合物、ポリエステルアクリレート系化合物、エポキシアクリレート系化合物、ポリオールアクリレート系化合物などが挙げられる。これらの中でも、ウレタンアクリレート系化合物が好ましい。 As the active energy ray-curable compound that can be cured by irradiating active energy rays such as ultraviolet rays and electron beams, those having two or more polymerizable unsaturated groups in the molecule are used. Examples include urethane acrylate compounds, polyfunctional acrylate compounds, polyester acrylate compounds, epoxy acrylate compounds, polyol acrylate compounds, and the like. Among these, urethane acrylate compounds are preferable.
 ウレタンアクリレート系化合物は、例えば、ポリエーテルポリオールやポリエステルポリオールとポリイソシアネートの反応によって得られるポリウレタンオリゴマーを、(メタ)アクリル酸でエステル化することにより得ることができる。具体的には、フェニルグリシジルエーテルアクリレートヘキサメチレンジイソシアネートウレタンプレポリマー、ペンタエリスリトールトリアクリレートヘキサメチレンジイソシアネートウレタンプレポリマー、ペンタエリスリトールトリアクリレートトルエンジイソシアネートウレタンプレポリマー、ペンタエリスリトールトリアクリレートイソホロンジイソシアネートウレタンプレポリマー、ジペンタエリスリトールペンタアクリレートヘキサメチレンジイソシアネートウレタンプレポリマーなどが挙げられる。 The urethane acrylate compound can be obtained, for example, by esterifying a polyurethane oligomer obtained by reaction of polyether polyol or polyester polyol with polyisocyanate with (meth) acrylic acid. Specifically, phenylglycidyl ether acrylate hexamethylene diisocyanate urethane prepolymer, pentaerythritol triacrylate hexamethylene diisocyanate urethane prepolymer, pentaerythritol triacrylate toluene diisocyanate urethane prepolymer, pentaerythritol triacrylate isophorone diisocyanate urethane prepolymer, dipentaerythritol Examples include pentaacrylate hexamethylene diisocyanate urethane prepolymer.
 多官能アクリレート系化合物は、例えば、1,4-ブタンジオールジ(メタ)アクリレート、1,6-ヘキサンジオールジ(メタ)アクリレート、ネオペンチルグリコールジ(メタ)アクリレート、ポリエチレングリコールジ(メタ)アクリレート、ネオペンチルグリコールアジペートジ(メタ)アクリレート、ジシクロペンタニルジ(メタ)アクリレート、アリル化シクロヘキシルジ(メタ)アクリレート、イソシアヌレートジ(メタ)アクリレート、トリメチロールプロパントリ(メタ)アクリレート、ジペンタエリスリトールトリ(メタ)アクリレート、ペンタエリスリトールトリ(メタ)アクリレート、トリス(アクリロキシエチル)イソシアヌレート、ジペンタエリスリトールヘキサ(メタ)アクリレートなどが挙げられる。 Examples of the polyfunctional acrylate compound include 1,4-butanediol di (meth) acrylate, 1,6-hexanediol di (meth) acrylate, neopentyl glycol di (meth) acrylate, polyethylene glycol di (meth) acrylate, Neopentyl glycol adipate di (meth) acrylate, dicyclopentanyl di (meth) acrylate, allylated cyclohexyl di (meth) acrylate, isocyanurate di (meth) acrylate, trimethylolpropane tri (meth) acrylate, dipentaerythritol tri (Meth) acrylate, pentaerythritol tri (meth) acrylate, tris (acryloxyethyl) isocyanurate, dipentaerythritol hexa (meth) acrylate and the like.
 ポリエステルアクリレート系化合物は、例えば、多価カルボン酸と多価アルコールの縮合によって得られる両末端に水酸基を有するポリエステルオリゴマーの水酸基を(メタ)アクリル酸でエステル化することにより、あるいは、多価カルボン酸にアルキレンオキシドを付加して得られるオリゴマーの末端の水酸基を(メタ)アクリル酸でエステル化することにより得ることができる。 Polyester acrylate compounds can be obtained by, for example, esterifying hydroxyl groups of polyester oligomers having hydroxyl groups at both ends obtained by condensation of polyvalent carboxylic acids and polyhydric alcohols with (meth) acrylic acid, or polyvalent carboxylic acids. It can be obtained by esterifying the terminal hydroxyl group of an oligomer obtained by adding alkylene oxide to (meth) acrylic acid.
 エポキシアクリレート系化合物は、例えば、比較的低分子量のビスフェノール型エポキシ樹脂やノボラック型エポキシ樹脂のオキシラン環に、(メタ)アクリル酸を反応しエステル化することにより得ることができる。 The epoxy acrylate compound can be obtained, for example, by reacting (meth) acrylic acid with an oxirane ring of a relatively low molecular weight bisphenol type epoxy resin or novolak type epoxy resin and esterifying it.
 ポリオールアクリレート系化合物は、例えば、ポリエーテルポリオールの水酸基を(メタ)アクリル酸でエステル化することにより得ることができる。 The polyol acrylate compound can be obtained, for example, by esterifying the hydroxyl group of the polyether polyol with (meth) acrylic acid.
 また、活性エネルギー線硬化型化合物は、質量平均分子量が950以下のであるのが好ましく、質量平均分子量が300~700であるのがより好ましい。これにより、基材11の第1の面111に塗布して活性エネルギー線を照射する前の平滑化層形成用組成物の粘度を適度にすることができる。これにより、平滑化層形成用組成物は、さらに適度な流動性を有する。このような平滑化層形成用組成物を用いて基材11の第1の面111側に平滑化層12を形成することで、基材11の第1の面111の凹凸をより確実に埋め込むことができる。その結果、平滑化層12の第3の面121に対して、基材11の凹凸が影響するのをより確実に防ぐことができ、平滑化層12の第3の面121をより平滑にすることができる。したがって、平滑化層12上に形成された剥離剤層13の外表面に対して、基材11の凹凸が影響してしまうのを特に防ぐことができ、剥離剤層13の外表面131をより平滑にすることができる。 In addition, the active energy ray-curable compound preferably has a mass average molecular weight of 950 or less, and more preferably has a mass average molecular weight of 300 to 700. Thereby, the viscosity of the composition for smoothing layer formation before apply | coating to the 1st surface 111 of the base material 11 and irradiating an active energy ray can be made moderate. Thereby, the composition for smoothing layer formation has further moderate fluidity | liquidity. By forming the smoothing layer 12 on the first surface 111 side of the base material 11 using such a smoothing layer forming composition, the unevenness of the first surface 111 of the base material 11 is more reliably embedded. be able to. As a result, it is possible to more reliably prevent the unevenness of the base material 11 from affecting the third surface 121 of the smoothing layer 12, and to make the third surface 121 of the smoothing layer 12 smoother. be able to. Therefore, it is possible to particularly prevent the unevenness of the base material 11 from affecting the outer surface of the release agent layer 13 formed on the smoothing layer 12, and the outer surface 131 of the release agent layer 13 can be further increased. Can be smooth.
 特に、基材11の第1の面111の表面の凹凸が比較的大きいものであっても、前記のような平滑化層形成用組成物の作用、効果により、第1の面111の凹凸を好適に埋め込むことができるため、剥離剤層13の外表面131の平滑性特に優れた剥離フィルム1を得ることができる。 In particular, even if the unevenness of the surface of the first surface 111 of the substrate 11 is relatively large, the unevenness of the first surface 111 is reduced by the action and effect of the smoothing layer forming composition as described above. Since it can be embedded suitably, the release film 1 having excellent smoothness of the outer surface 131 of the release agent layer 13 can be obtained.
 これに対して、活性エネルギー線硬化型化合物の質量平均分子量が前記下限値未満であると、平滑化層形成用組成物の粘度が低下し、平滑化層12を硬化させる時間が比較的長くなる場合がある。また、活性エネルギー線硬化型化合物の質量平均分子量が前記上限値を超えると、活性エネルギー線硬化型化合物の種類等によっては、平滑化層形成用組成物の粘度が比較的高くなるため、粘度を調整するために、粘度調整剤等を添加する必要が生じる場合がある。 On the other hand, when the mass average molecular weight of the active energy ray-curable compound is less than the lower limit, the viscosity of the smoothing layer forming composition decreases, and the time for curing the smoothing layer 12 becomes relatively long. There is a case. In addition, when the mass average molecular weight of the active energy ray-curable compound exceeds the upper limit, depending on the type of the active energy ray-curable compound, the viscosity of the smoothing layer-forming composition becomes relatively high. In order to adjust, it may be necessary to add a viscosity modifier or the like.
 また、平滑化層形成用組成物は、活性エネルギー線硬化型化合物に加え、必要に応じて、溶媒を含むものであってもよい。これにより、基材11の第1の面111に塗布する際の平滑化層形成用組成物の粘度を容易に調整することができる。 In addition to the active energy ray-curable compound, the smoothing layer-forming composition may contain a solvent, if necessary. Thereby, the viscosity of the composition for smoothing layer formation at the time of apply | coating to the 1st surface 111 of the base material 11 can be adjusted easily.
 溶媒としては、例えば、トルエンやキシレンなどの芳香族炭化水素、酢酸エチルや酢酸ブチルなどの脂肪酸エステル、メチルエチルケトンやメチルイソブチルケトンなどのケトン、メタノール、エタノールおよびイソプロピルアルコールなどのアルコール等の有機溶媒等が挙げられ、これらのうち1種または2種以上を組み合わせて用いることができる。これにより、平滑化層形成用組成物の、基材11の第1の面111に塗布して活性エネルギー線を照射する前の粘度を適度にすることが容易となる。 Examples of the solvent include aromatic hydrocarbons such as toluene and xylene, fatty acid esters such as ethyl acetate and butyl acetate, ketones such as methyl ethyl ketone and methyl isobutyl ketone, and organic solvents such as alcohols such as methanol, ethanol and isopropyl alcohol. 1 type or 2 types or more of them can be used in combination. Thereby, it becomes easy to make moderate the viscosity before apply | coating to the 1st surface 111 of the base material 11, and irradiating an active energy ray of the composition for smoothing layer formation.
 なお、平滑化層形成用組成物は、前途したような成分に加え、その他の成分が含まれていてもよい。その他の成分としては、架橋剤、光重合開始剤、粘度調整剤、触媒、染料、分散剤、帯電防止剤、硬化剤等が挙げられる。また、前記その他の成分を含む場合には、平滑化層形成用組成物中(固形分換算)における、前記その他の成分の含有率は、0.1~10質量%であることが好ましい。 The smoothing layer forming composition may contain other components in addition to the components as described above. Examples of other components include a crosslinking agent, a photopolymerization initiator, a viscosity modifier, a catalyst, a dye, a dispersant, an antistatic agent, and a curing agent. When the other components are contained, the content of the other components in the smoothing layer forming composition (in terms of solid content) is preferably 0.1 to 10% by mass.
 また、溶媒を含む平滑化層形成用組成物中における、活性エネルギー線硬化型化合物の含有率は、特に限定されないが、0.5~60質量%が好ましく、1~45質量%がより好ましい。これにより、平滑化層形成用組成物の粘度を適当にすることが容易となる。 The content of the active energy ray-curable compound in the composition for forming a smoothing layer containing a solvent is not particularly limited, but is preferably 0.5 to 60% by mass, and more preferably 1 to 45% by mass. Thereby, it becomes easy to make the viscosity of the composition for smoothing layer formation suitable.
 また、平滑化層形成用組成物中(固形分換算)における、活性エネルギー線硬化型化合物の含有率は、特に限定されないが、90質量%以上が好ましく、95質量%以上がより好ましい。これにより、平滑化層形成用組成物の硬化性を特に優れたものとすることができる。 The content of the active energy ray-curable compound in the smoothing layer forming composition (in terms of solid content) is not particularly limited, but is preferably 90% by mass or more, and more preferably 95% by mass or more. Thereby, the sclerosis | hardenability of the composition for smoothing layer formation can be made especially excellent.
 また、平滑化層12の第3の面121の算術平均粗さRaが8nm以下であり、かつ、その最大突起高さRpが50nm以下であることが好ましい。特に、第3の面121の算術平均粗さRaが6nm以下であるのがより好ましい。また、第3の面121の最大突起高さRpが、40nm以下であることがより好ましい。 Also, arithmetic mean roughness of the third surface 121 of the smoothing layer 12 Ra 4 is a 8nm or less, and preferably has a maximum projection height Rp 4 is 50nm or less. In particular, the arithmetic average roughness Ra 4 of the third surface 121 is more preferably 6 nm or less. Further, it is more preferable that the maximum protrusion height Rp 4 of the third surface 121 is 40 nm or less.
 第3の面121の算術平均粗さRaおよび最大突起高さRpが前記範囲内であると、剥離剤層13の外表面131に対する、基材11の表面の凹凸の影響をより確実に防ぐことができる。 When the arithmetic average roughness Ra 4 and the maximum protrusion height Rp 4 of the third surface 121 are within the above ranges, the influence of the unevenness of the surface of the base material 11 on the outer surface 131 of the release agent layer 13 is more reliably achieved. Can be prevented.
 これに対し、第3の面121の算術平均粗さRaが前記下限値未満であると、平滑化層12の構成材料等によっては、剥離剤層13との密着性が低下する可能性がある。一方、第3の面121の算術平均粗さRaが前記上限値を超えると、剥離剤層13と平滑化層12との間に、さらに新たな平滑化層を設ける必要が生じる場合がある。 On the other hand, if the arithmetic average roughness Ra 4 of the third surface 121 is less than the lower limit value, the adhesiveness to the release agent layer 13 may be lowered depending on the constituent material of the smoothing layer 12 and the like. is there. On the other hand, when the arithmetic average roughness Ra 4 of the third surface 121 exceeds the upper limit, it may be necessary to provide a new smoothing layer between the release agent layer 13 and the smoothing layer 12. .
 一方、第3の面121の最大突起高さRpが前記下限値未満であると、剥離剤層13との密着性を向上させるために、平滑化層12の第3の面121上に、密着性を向上させるための処理を施す必要が生じる場合がある。一方、第3の面121の最大突起高さRpが前記上限値を超えると、剥離剤層13と平滑化層12との間に、さらに新たな平滑化層を設ける必要が生じる場合がある。 On the other hand, when the maximum protrusion height Rp 4 of the third surface 121 is less than the lower limit value, in order to improve the adhesion with the release agent layer 13, on the third surface 121 of the smoothing layer 12, In some cases, it is necessary to perform a treatment for improving the adhesion. On the other hand, if the maximum protrusion height Rp 4 of the third surface 121 exceeds the upper limit, it may be necessary to provide a new smoothing layer between the release agent layer 13 and the smoothing layer 12. .
 また、平滑化層12の平均膜厚は、特に限定されないが、0.2~10μmであるのが好ましく、0.3~5μmであるのがより好ましい。これにより、基材11の第1の面111の凹凸をより確実に埋め込むことができ、剥離フィルム1の外表面の平滑性をより高くすることができる。特に、本実施形態の平滑化層形成用組成物が、前述したような活性エネルギー線硬化型化合物を含んで形成されているため、膜厚が比較的薄い平滑化層12であっても、基材11の第1の面111の凹凸をさらに容易かつ確実に埋め込むことができる。また、平滑化層12の柔軟性を適度なものとすることができる。 The average film thickness of the smoothing layer 12 is not particularly limited, but is preferably 0.2 to 10 μm, and more preferably 0.3 to 5 μm. Thereby, the unevenness | corrugation of the 1st surface 111 of the base material 11 can be embedded more reliably, and the smoothness of the outer surface of the peeling film 1 can be made higher. In particular, since the composition for forming a smoothing layer of the present embodiment is formed to contain the active energy ray-curable compound as described above, even if the smoothing layer 12 has a relatively thin film thickness, The unevenness of the first surface 111 of the material 11 can be embedded more easily and reliably. Moreover, the softness | flexibility of the smoothing layer 12 can be made moderate.
 これに対して、平滑化層12の平均膜厚が前記下限値未満であると、平滑化層形成用組成物を構成する成分等によっては、基材11の第1の面111の凹凸を十分に埋め込むために、第1の面111の表面粗さが比較的小さいものを用いる必要が生じる場合がある。また、平滑化層12の平均膜厚が前記上限値を超えると、平滑化層形成用組成物を構成する成分等によっては、平滑化層12の硬化収縮により剥離フィルム1にカールが発生し易くなり、剥離フィルム1の取扱性が低下する場合がある。 On the other hand, if the average film thickness of the smoothing layer 12 is less than the lower limit value, the unevenness of the first surface 111 of the substrate 11 may be sufficient depending on the components constituting the smoothing layer forming composition. Therefore, it may be necessary to use the first surface 111 having a relatively small surface roughness. Moreover, when the average film thickness of the smoothing layer 12 exceeds the above upper limit, depending on the components constituting the composition for forming the smoothing layer, curling of the release film 1 is likely to occur due to curing shrinkage of the smoothing layer 12. Therefore, the handleability of the release film 1 may be reduced.
 <剥離剤層13>
 剥離剤層13は、剥離フィルム1に剥離性を付与する機能を有している。
<Release layer 13>
The release agent layer 13 has a function of imparting peelability to the release film 1.
 剥離剤層13は、図1に示すように、平滑化層12の第3の面121側に設けられている。 As shown in FIG. 1, the release agent layer 13 is provided on the third surface 121 side of the smoothing layer 12.
 剥離剤層13は、平滑化層12の第3の面121に剥離剤層形成用組成物を塗布し、それを乾燥、硬化することにより形成された層である。 The release agent layer 13 is a layer formed by applying a release agent layer forming composition to the third surface 121 of the smoothing layer 12, drying and curing it.
 かかる剥離剤層形成用組成物は、剥離剤を含むものである。
 剥離剤としては、アルキド系化合物、アクリル系化合物、シリコーン系化合物、長鎖アルキル基含有化合物、フッ素化合物等が挙げられ、これらのうち1種または2種以上を組み合わせて用いることができる。これらの中でも、アルキド系化合物、アクリル系化合物、シリコーン系化合物、長鎖アルキル基含有化合物を用いるのが好ましい。これにより、適度な硬化性を有しつつ、グリーンシートに対する剥離性が特に優れた剥離剤層13を得ることができる。
Such a composition for forming a release agent layer contains a release agent.
Examples of the release agent include alkyd compounds, acrylic compounds, silicone compounds, long-chain alkyl group-containing compounds, fluorine compounds, and the like, and one or more of these can be used in combination. Among these, it is preferable to use an alkyd compound, an acrylic compound, a silicone compound, or a long-chain alkyl group-containing compound. As a result, it is possible to obtain the release agent layer 13 that has an appropriate curability and is particularly excellent in the peelability to the green sheet.
 アルキド系化合物としては、具体例には、長鎖アルキル変性アルキド化合物、シリコーン変性アルキド化合物等の変性物等を用いることができる。また、アルキド系化合物を用いる場合には、剥離剤層形成用組成物には、さらに架橋剤や触媒を添加してもよい。このような剥離剤層形成用組成物を加熱硬化させる方法により、架橋構造を有するアルキド系化合物を有する剥離剤層13を得ることができる。その結果、剥離剤層13上にグリーンシートを形成する際に、剥離性を有するアルキド系化合物がグリーンシートに移行するのを防ぐことができ、剥離剤層13の剥離性の低下を防ぐことができる。 Specific examples of alkyd compounds include modified products such as long-chain alkyl-modified alkyd compounds and silicone-modified alkyd compounds. When an alkyd compound is used, a crosslinking agent or a catalyst may be further added to the release agent layer forming composition. The release agent layer 13 having an alkyd compound having a cross-linked structure can be obtained by a method of heat-curing such a release agent layer forming composition. As a result, when the green sheet is formed on the release agent layer 13, it is possible to prevent the release property of the release agent layer 13 from being prevented from being transferred to the green sheet. it can.
 また、アクリル系化合物としては、具体例には、長鎖アルキル変性アクリル化合物、シリコーン変性アクリル化合物等の変性物等を用いることができる。また、剥離剤層形成用組成物がアクリル系化合物を含む場合には、剥離剤層形成用組成物には、さらに架橋剤や触媒を添加してもよい。このような剥離剤層形成用組成物を加熱硬化させる方法により、架橋構造を有するアクリル系化合物を有する剥離剤層13を得ることができる。その結果、剥離性を有するアクリル系化合物が平滑化層12に移行することを防ぐことができ、剥離剤層13の剥離性の低下を防ぐことができる。 As specific examples of the acrylic compound, modified products such as a long-chain alkyl-modified acrylic compound and a silicone-modified acrylic compound can be used. When the release agent layer forming composition contains an acrylic compound, a crosslinking agent or a catalyst may be further added to the release agent layer forming composition. The release agent layer 13 having an acrylic compound having a crosslinked structure can be obtained by a method of heat-curing such a release agent layer forming composition. As a result, it is possible to prevent the peelable acrylic compound from moving to the smoothing layer 12 and to prevent the peelability of the release agent layer 13 from being lowered.
 また、シリコーン系化合物としては、具体例には、基本骨格としてジメチルポリシロキサンを有するシリコーン系化合物等を用いることができる。シリコーン系化合物としては、付加反応型、縮合反応型、紫外線硬化型、電子線硬化型等がある。付加反応型シリコーン系化合物は、反応性が高く生産性に優れる。縮合反応型シリコーン系化合物と比較すると、付加反応型シリコーン系化合物は、その製造後の剥離力の変化が小さい、硬化収縮が無い等のメリットがあるため、剥離剤層13を構成する剥離剤として使用することが好ましい。 In addition, as a silicone compound, a silicone compound having dimethylpolysiloxane as a basic skeleton can be used as a specific example. Examples of the silicone compound include an addition reaction type, a condensation reaction type, an ultraviolet curable type, and an electron beam curable type. The addition reaction type silicone compound has high reactivity and excellent productivity. Compared with the condensation reaction type silicone compound, the addition reaction type silicone compound has advantages such as little change in peel force after production and no cure shrinkage. It is preferable to use it.
 上記付加反応型シリコーン系化合物の具体例としては、該化合物の分子の末端および/または側鎖に、ビニル基、アリル基、プロペニル基、ヘキセニル基等の炭素数2~10のアルケニル基を2個以上備えたオルガノポリシロキサンが挙げられる。このような付加反応型シリコーン系化合物を用いる際には、架橋剤および触媒を併用することが好ましい。 Specific examples of the addition reaction type silicone compound include two alkenyl groups having 2 to 10 carbon atoms such as vinyl group, allyl group, propenyl group, and hexenyl group at the terminal and / or side chain of the molecule of the compound. The organopolysiloxane provided above is mentioned. When such an addition reaction type silicone compound is used, it is preferable to use a crosslinking agent and a catalyst in combination.
 上記架橋剤としては、例えば1分子中に少なくとも2個のケイ素原子に結合した水素原子を有するオルガノポリシロキサン、具体的には、ジメチルハイドロジェンシロキシ基末端封鎖ジメチルシロキサン-メチルハイドロジェンシロキサン共重合体、トリメチルシロキシ基末端封鎖ジメチルシロキサン-メチルハイドロジェンシロキサン共重合体、トリメチルシロキシ基末端封鎖メチルハイドロジェンポリシロキサン、ポリ(ハイドロジェンシルセスキオキサン)等が挙げられる。 Examples of the crosslinking agent include, for example, organopolysiloxane having hydrogen atoms bonded to at least two silicon atoms in one molecule, specifically, a dimethylhydrogensiloxy group end-capped dimethylsiloxane-methylhydrogensiloxane copolymer. And trimethylsiloxy group end-capped dimethylsiloxane-methylhydrogensiloxane copolymer, trimethylsiloxy group end-capped methylhydrogenpolysiloxane, poly (hydrogensilsesquioxane), and the like.
 また、上記触媒としては、微粒子状白金、炭素粉末担体上に吸着された微粒子状白金、塩化白金酸、アルコール変性塩化白金酸、塩化白金酸のオレフィン錯体、パラジウム、ロジウム等の白金属系化合物等が挙げられる。このような触媒を用いることにより、剥離剤層形成用組成物の硬化反応をより効率よく進行させることができる。 Examples of the catalyst include finely divided platinum, finely divided platinum adsorbed on a carbon powder carrier, chloroplatinic acid, alcohol-modified chloroplatinic acid, olefin complexes of chloroplatinic acid, white metal compounds such as palladium and rhodium, etc. Is mentioned. By using such a catalyst, the curing reaction of the composition for forming a release agent layer can be advanced more efficiently.
 また、例えば、長鎖アルキル基含有化合物としては、例えば、ポリビニルアルコール系重合体に炭素数8~30の長鎖アルキルイソシアネートを反応させて得られたポリビニルカーバメートや、ポリエチレンイミンに炭素数8~30の長鎖アルキルイソシアネートを反応させて得られたアルキル尿素誘導体などが用いられる。 For example, as the long-chain alkyl group-containing compound, for example, polyvinyl carbamate obtained by reacting a polyvinyl alcohol polymer with a long-chain alkyl isocyanate having 8 to 30 carbon atoms, or polyethyleneimine with 8 to 30 carbon atoms. An alkylurea derivative obtained by reacting a long-chain alkyl isocyanate is used.
 また、フッ素化合物としては、具体例には、フッ素シリコーン化合物、フッ素ボロン化合物等を用いることができる。 In addition, as the fluorine compound, for example, a fluorine silicone compound, a fluorine boron compound, or the like can be used.
 また、剥離剤層形成用組成物には、前述した剥離剤の他に、分散媒、溶媒が含まれていてもよい。分散媒および溶媒のうちの少なくとも一方を含むことにより、平滑化層12の第3の面121に塗布して乾燥させる前の、剥離剤層形成用組成物の粘度を適度にすることができる。 Moreover, the release agent layer forming composition may contain a dispersion medium and a solvent in addition to the release agent described above. By including at least one of the dispersion medium and the solvent, the viscosity of the composition for forming a release agent layer before being applied to the third surface 121 of the smoothing layer 12 and dried can be made moderate.
 分散媒または溶媒としては、例えば、トルエンなどの芳香族炭化水素、酢酸エチルなどの脂肪酸エステル、メチルエチルケトンなどのケトン、ヘキサン、ヘプタンなどの脂肪族炭化水素等の有機溶媒が挙げられ、これらのうち1種または2種以上を組み合わせて用いることができる。 Examples of the dispersion medium or solvent include aromatic solvents such as toluene, fatty acid esters such as ethyl acetate, ketones such as methyl ethyl ketone, and organic solvents such as aliphatic hydrocarbons such as hexane and heptane. Species or a combination of two or more can be used.
 なお、剥離剤層形成用組成物には、前述したような成分に加え、その他の成分が含まれていてもよい。その他の成分としては、例えば、触媒、染料、分散剤、帯電防止剤、硬化剤等が挙げられる。また、前記その他の成分を含む場合には、剥離剤層形成用組成物における前記その他の成分の含有率は、0.1~10質量%であることが好ましい。 In addition, in addition to the above components, the release agent layer forming composition may contain other components. Examples of other components include a catalyst, a dye, a dispersant, an antistatic agent, and a curing agent. When the other components are included, the content of the other components in the release agent layer forming composition is preferably 0.1 to 10% by mass.
 また、剥離剤層形成用組成物中における、剥離剤の含有率は、特に限定されないが、0.3~10質量%であるのが好ましい。 Further, the content of the release agent in the release agent layer forming composition is not particularly limited, but is preferably 0.3 to 10% by mass.
 また、前述したように、剥離剤層13の外表面131は、算術平均粗さRaが8nm以下であり、かつ、その最大突起高さRpが50nm以下である。特に、剥離剤層13の外表面131の算術平均粗さRaが6nm以下であるのが好ましい。また、剥離剤層13の外表面131の最大突起高さRpが40nm以下であることが好ましい。 As described above, the outer surface 131 of the release agent layer 13 has an arithmetic average roughness Ra 1 of 8 nm or less, and a maximum protrusion height Rp 1 of 50 nm or less. In particular, the arithmetic mean roughness Ra 1 of the outer surface 131 of the release agent layer 13 is preferably 6 nm or less. In addition, the maximum protrusion height Rp 1 of the outer surface 131 of the release agent layer 13 is preferably 40 nm or less.
 剥離剤層13の外表面131の算術平均粗さRaおよび最大突起高さRpが前記範囲内であると、グリーンシートを形成する際に、外表面131の比較的高平滑な面形状がグリーンシートに転写されることにより、グリーンシートの表面にピンホール等が発生するのをより好適に防ぐことができる。その結果、表面がより高平滑なグリーンシートを得ることができる。 When the arithmetic average roughness Ra 1 and the maximum protrusion height Rp 1 of the outer surface 131 of the release agent layer 13 are within the above ranges, a relatively high smooth surface shape of the outer surface 131 is formed when the green sheet is formed. By being transferred to the green sheet, pinholes and the like can be more suitably prevented from occurring on the surface of the green sheet. As a result, a green sheet having a higher smooth surface can be obtained.
 また、剥離剤層13は、平均膜厚が、0.01~3μmであるのが好ましく、0.03~1μmであるのがより好ましい。剥離剤層13の厚さが0.01μm未満であると、剥離剤層13を構成する材料等によっては、剥離剤層としての機能が十分に発揮されない場合がある。一方、剥離剤層13の厚さが3μmを超えると、剥離フィルム1をロール状に巻き取った際に、ブロッキングが発生し易いために、剥離フィルム1の巻き取り不良が生じたり、剥離フィルム1の巻き出し時の帯電性が高くなる等の問題が起こる場合がある。 Further, the release agent layer 13 preferably has an average film thickness of 0.01 to 3 μm, and more preferably 0.03 to 1 μm. If the thickness of the release agent layer 13 is less than 0.01 μm, the function as the release agent layer may not be sufficiently exhibited depending on the material constituting the release agent layer 13 or the like. On the other hand, when the thickness of the release agent layer 13 exceeds 3 μm, when the release film 1 is wound into a roll, blocking is likely to occur. There may be a problem that the charging property at the time of unwinding increases.
 〈〈グリーンシート製造用剥離フィルムの製造方法〉〉
 次に、前述したようなグリーンシート製造用剥離フィルム1の製造方法の好適な実施形態について説明する。
<Method for producing release film for producing green sheet>
Next, a preferred embodiment of the method for producing the release film 1 for producing a green sheet as described above will be described.
 本実施形態の剥離フィルム1の製造方法は、基材11を準備する基材準備工程と、所定の活性エネルギー線硬化型化合物を含む平滑化層形成用組成物を基材11の第1の面111に塗布して、必要に応じてそれを乾燥させることで、塗布層を形成する塗布層形成工程と、塗布層に活性エネルギー線を照射して硬化させることにより平滑化層12を形成する平滑化層形成工程と、平滑化層12の前記基材11と反対の面121側に、剥離剤層13を形成する剥離剤層形成工程とを有している。 The manufacturing method of the release film 1 of the present embodiment includes a base material preparing step for preparing the base material 11 and a smoothing layer forming composition containing a predetermined active energy ray-curable compound on the first surface of the base material 11. The coating layer forming step for forming the coating layer by applying to 111 and drying it as necessary, and the smoothing layer 12 by forming the coating layer by irradiating and curing the active energy ray And a release agent layer forming step of forming the release agent layer 13 on the surface 121 side of the smoothing layer 12 opposite to the substrate 11.
 以下、各工程について詳細に説明する。
 <基材準備工程> 
 まず、基材11を準備する。
 基材11としては、前述したような構成の基材11を用いることができる。
Hereinafter, each step will be described in detail.
<Base material preparation process>
First, the base material 11 is prepared.
As the base material 11, the base material 11 having the configuration described above can be used.
 また、基材11の第1の面111に、酸化法などによる表面処理、あるいはプライマー処理を施すことができる。これにより、基材11と、基材11の第1の面111側に設けられる平滑化層12との密着性を特に優れたものとすることができる。 In addition, the first surface 111 of the substrate 11 can be subjected to a surface treatment such as an oxidation method or a primer treatment. Thereby, the adhesiveness of the base material 11 and the smoothing layer 12 provided in the 1st surface 111 side of the base material 11 can be made especially excellent.
 酸化法などによる表面処理としては、基材11の種類等に応じて適宜選択すればよい。例えば、コロナ放電処理、プラズマ放電処理、クロム酸化処理(湿式)、火炎処理、熱風処理、オゾン処理、紫外線照射処理等が挙げられる。これらの中でも特に、平滑化層12との密着性に優れ、処理の操作が簡便である点から、コロナ放電処理法を用いることがより好ましい。 What is necessary is just to select suitably as surface treatment by an oxidation method etc. according to the kind etc. of the base material 11. FIG. For example, corona discharge treatment, plasma discharge treatment, chromium oxidation treatment (wet), flame treatment, hot air treatment, ozone treatment, ultraviolet irradiation treatment and the like can be mentioned. Among these, it is more preferable to use the corona discharge treatment method from the viewpoint of excellent adhesion to the smoothing layer 12 and easy treatment operation.
 <塗布層形成工程> 
 本工程では、まず、平滑化層形成用組成物を準備する。
<Coating layer formation process>
In this step, first, a smoothing layer forming composition is prepared.
 平滑化層形成用組成物は、前述したような活性エネルギー線硬化型化合物を単独で用いてもよい。これに加えて、必要に応じて前述したような溶媒やその他の成分を混合した平滑化層形成用組成物を用いてもよい。 As the smoothing layer-forming composition, the active energy ray-curable compound as described above may be used alone. In addition to this, a composition for forming a smoothing layer in which a solvent and other components as described above are mixed as necessary may be used.
 次いで、基材11の第1の面111上に、液状をなす平滑化層形成用組成物を塗布する。これにより、塗布層を得る。前述したように、平滑化層形成用組成物は、適度な流動性を有するものであるため、基材11の第1の面111上に平滑化層形成用組成物を塗布することにより、基材11の第1の面111の凹凸を的確に埋め込むことができる。その結果、平滑化層12の第3の面121に対して、基材11の凹凸が影響するのを防ぐことができ、平滑化層12の第3の面121を平滑にすることができる。 Next, a smoothing layer forming composition that forms a liquid is applied on the first surface 111 of the substrate 11. Thereby, a coating layer is obtained. As described above, since the smoothing layer-forming composition has an appropriate fluidity, by applying the smoothing layer-forming composition on the first surface 111 of the base material 11, The unevenness of the first surface 111 of the material 11 can be accurately embedded. As a result, it is possible to prevent the unevenness of the base material 11 from affecting the third surface 121 of the smoothing layer 12 and to smooth the third surface 121 of the smoothing layer 12.
 また、平滑化層形成用組成物が溶媒等を含む場合には、平滑化層形成用組成物を基材11の第1の面111上に塗布した後に、平滑化層形成用組成物を乾燥させることで塗布層を得る。これにより、平滑化層形成用組成物を乾燥させることで、溶媒を除去することができる。 Further, when the smoothing layer forming composition contains a solvent or the like, the smoothing layer forming composition is applied onto the first surface 111 of the substrate 11, and then the smoothing layer forming composition is dried. To obtain a coating layer. Thereby, a solvent can be removed by drying the composition for smoothing layer formation.
 平滑化層形成用材料を塗布する方法としては、例えば、グラビアコート法、バーコート法、スプレーコート法、スピンコート法、エアーナイフコート法、ロールコート法、ブレードコート法、ゲートロールコート法、ダイコート法等が挙げられる。これらの中でも特に、グラビアコート法、バーコート法であるのがより好ましく、バーコート法であるのがさらに好ましい。これにより、目的とする厚さの塗布層を容易に形成することができる。 Examples of the method for applying the smoothing layer forming material include a gravure coating method, a bar coating method, a spray coating method, a spin coating method, an air knife coating method, a roll coating method, a blade coating method, a gate roll coating method, and a die coating. Law. Among these, the gravure coating method and the bar coating method are more preferable, and the bar coating method is more preferable. Thereby, the coating layer of the target thickness can be formed easily.
 また、平滑化層形成用組成物が溶媒等を含む場合において、平滑化層形成用材料を乾燥する方法としては、特に限定されないが、例えば、熱風乾燥炉などで乾燥する方法等が挙げられる。 In addition, when the smoothing layer forming composition contains a solvent or the like, the method of drying the smoothing layer forming material is not particularly limited, and examples thereof include a method of drying in a hot air drying furnace.
 また、平滑化層形成用組成物を乾燥させる場合、乾燥条件としては、特に限定されない。乾燥温度は、50~100℃であるのが好ましく、乾燥時間は5秒間~1分間であるのが好ましい。これにより、平滑化層12の不本意な変質を防ぐことができるとともに、平滑化層12を特に効率よく形成することができる。その結果、最終的に得られる剥離フィルム1の生産性を向上させることができる。また、乾燥温度が前記範囲であると、剥離剤層形成用組成物が溶媒等を含むものである場合に、乾燥時の溶媒等の蒸発を伴う、平滑化層12の反りやひび等の発生を特に防ぐことができる。 Further, when the smoothing layer forming composition is dried, the drying conditions are not particularly limited. The drying temperature is preferably 50 to 100 ° C., and the drying time is preferably 5 seconds to 1 minute. Thereby, unintentional alteration of the smoothing layer 12 can be prevented, and the smoothing layer 12 can be formed particularly efficiently. As a result, productivity of the finally obtained release film 1 can be improved. Further, when the drying temperature is within the above range, particularly when the release agent layer forming composition contains a solvent or the like, the occurrence of warping or cracking of the smoothing layer 12 accompanied by evaporation of the solvent or the like at the time of drying. Can be prevented.
<平滑化層形成工程> 
 次に、塗布層形成工程により得られた塗布層に、活性化エネルギー線を照射して硬化させることにより平滑化層12を形成する。
<Smoothing layer forming step>
Next, the smoothing layer 12 is formed by irradiating the application layer obtained by the application layer forming step with an activation energy ray and curing it.
 本工程において、前記塗布層形成工程にて、基材11の第1の面111の凹凸を的確に埋め込んだ塗布層を、その外表面の平滑性を保持したまま硬化する。その結果、第3の面121が十分に平滑な平滑化層12を得ることができる。これにより、剥離剤層13の外表面131に対する、基材11の第1の面111の凹凸の影響を防ぐことができる。したがって、後述する剥離剤層形成工程において、剥離剤層13の外表面131の平滑性を優れたものとすることができる。 In this step, the coating layer in which the unevenness of the first surface 111 of the substrate 11 is appropriately embedded in the coating layer forming step is cured while maintaining the smoothness of the outer surface. As a result, the smoothing layer 12 having a sufficiently smooth third surface 121 can be obtained. Thereby, the unevenness | corrugation of the 1st surface 111 of the base material 11 with respect to the outer surface 131 of the releasing agent layer 13 can be prevented. Therefore, the smoothness of the outer surface 131 of the release agent layer 13 can be made excellent in the release agent layer forming step described later.
 硬化に使用される活性化エネルギー線としては、用いる平滑化層形成用組成物に含まれる材料等によって、適宜選択すればよいが、例えば、可視光線、紫外線、赤外線、X線、α線、β線、γ線および電子線などが挙げられる。これらの中でも紫外線または可視光線であるのが好ましい。 The activation energy ray used for curing may be appropriately selected depending on the material contained in the smoothing layer forming composition to be used. For example, visible light, ultraviolet ray, infrared ray, X-ray, α ray, β Examples thereof include rays, γ rays, and electron beams. Among these, ultraviolet rays or visible rays are preferable.
 活性化エネルギー線(紫外線または可視光線)の波長は、特に限定されないが、例えば、200~600nmであるのが好ましく、波長250~450nmであるのがより好ましい。活性化エネルギー線の波長が前記範囲内のものであれば、塗布層を硬化する硬化時間を十分に短くしつつ、塗布層を均一に硬化させることができる。 The wavelength of the activation energy ray (ultraviolet light or visible light) is not particularly limited, but is preferably 200 to 600 nm, for example, and more preferably 250 to 450 nm. If the wavelength of the activation energy ray is within the above range, the coating layer can be uniformly cured while sufficiently shortening the curing time for curing the coating layer.
 また、活性化エネルギー線(紫外線または可視光線)を照射する手段としては、特に限定されず、種々の一般的手段を利用することができる。例えば光源としては、高圧水銀ランプ、メタルハライドランプ、エキシマランプなどの光源ランプを用いることができる。 Further, the means for irradiating the activation energy ray (ultraviolet light or visible light) is not particularly limited, and various general means can be used. For example, a light source lamp such as a high-pressure mercury lamp, a metal halide lamp, or an excimer lamp can be used as the light source.
 また、活性化エネルギー線(紫外線または可視光線)を照射する場合には、活性化エネルギー線の照射量は、50~400mJ/cmであるのが好ましく、100~300mJ/cmであるのがより好ましい。活性化エネルギー線の照射量が前記範囲内の値であると、塗布層をより均一にかつ確実に硬化させることができる。 When activating energy rays (ultraviolet rays or visible rays) are irradiated, the irradiation amount of the activation energy rays is preferably 50 to 400 mJ / cm 2 , and preferably 100 to 300 mJ / cm 2. More preferred. When the irradiation amount of the activation energy ray is a value within the above range, the coating layer can be cured more uniformly and reliably.
 また、活性化エネルギー線を照射する時間としては、特に限定されないが、5秒間~1分間であるのが好ましい。これにより、平滑化層12を特に効率よく形成することができる。その結果、最終的に得られる剥離フィルム1の生産性を向上させることができる。 The time for irradiating the activation energy ray is not particularly limited, but is preferably 5 seconds to 1 minute. Thereby, the smoothing layer 12 can be formed particularly efficiently. As a result, productivity of the finally obtained release film 1 can be improved.
 <剥離剤層形成工程> 
 次に、平滑化層12の基材11と反対の面121側に、剥離剤層13を形成する。
<Release agent layer forming step>
Next, the release agent layer 13 is formed on the surface 121 side of the smoothing layer 12 opposite to the substrate 11.
 剥離剤層13を構成する剥離剤層形成用組成物として、前述したような材料を混合した組成物を用意する。 As the release agent layer forming composition constituting the release agent layer 13, a composition in which the above-described materials are mixed is prepared.
 次いで、平滑化層12の基材11と反対の面121上に、液状をなす剥離剤層形成用組成物を塗布した後、それを乾燥、硬化する。これにより、剥離剤層13を得る。 Next, a liquid release agent layer forming composition is applied on the surface 121 of the smoothing layer 12 opposite to the substrate 11, and then dried and cured. Thereby, the release agent layer 13 is obtained.
 乾燥方法としては、特に限定されないが、例えば、熱風乾燥炉等を用いた乾燥方法が挙げられる。 The drying method is not particularly limited, and examples thereof include a drying method using a hot air drying furnace.
 また、乾燥条件としては、特に限定されない。乾燥温度は、80~150℃であるのが好ましく、乾燥時間は5秒間~1分間であるのが好ましい。これにより、剥離剤層13の不本意な変質を防ぐことができるとともに、剥離剤層13を特に効率よく形成することができる。その結果、最終的に得られる剥離フィルム1の生産性を向上させることができる。 Also, the drying conditions are not particularly limited. The drying temperature is preferably 80 to 150 ° C., and the drying time is preferably 5 seconds to 1 minute. Thereby, unintentional alteration of the release agent layer 13 can be prevented, and the release agent layer 13 can be formed particularly efficiently. As a result, productivity of the finally obtained release film 1 can be improved.
 以上のような工程によれば、平滑性に優れ、剥離性に優れた信頼性の高い剥離フィルム1を、容易かつ確実に製造することができる。 According to the above process, the reliable peeling film 1 which is excellent in smoothness and excellent in peelability can be manufactured easily and reliably.
 また、このような剥離フィルム1を用いてグリーンシートを製造すれば、グリーンシートの表面にピンホール等が生じるのを防止することができる。 Further, if a green sheet is manufactured using such a release film 1, it is possible to prevent a pinhole or the like from being generated on the surface of the green sheet.
 なお、剥離フィルム1を用いてセラミックグリーンシートを製造する方法としては、例えば、剥離フィルムの剥離剤層の表面に、セラミック粉末分散スラリーを塗布、乾燥してグリーンシートを形成した後、剥離フィルムから剥離したグリーンシートを積層して積層体を得、該積層体を焼成して得られたセラミックシートに電極を形成する方法が挙げられる。これにより、セラミックコンデンサーを得ることができる。このように、剥離フィルム1を用いて形成されたグリーンシートによりセラミックコンデンサーを形成すれば、短絡による不具合の発生が防止された信頼性の高いセラミックコンデンサーを得ることができる。 In addition, as a method of manufacturing a ceramic green sheet using the release film 1, for example, a ceramic powder-dispersed slurry is applied to the surface of the release agent layer of the release film and dried to form a green sheet. A method of forming an electrode on a ceramic sheet obtained by laminating the peeled green sheets to obtain a laminate and firing the laminate is exemplified. Thereby, a ceramic capacitor can be obtained. Thus, if a ceramic capacitor is formed with a green sheet formed using the release film 1, a highly reliable ceramic capacitor in which the occurrence of problems due to a short circuit is prevented can be obtained.
 以上、本発明を好適実施形態に基づいて詳細に説明したが、本発明はこれに限定されるものではない。 As mentioned above, although this invention was demonstrated in detail based on preferred embodiment, this invention is not limited to this.
 例えば、前述した本実施形態では、基材は単層構造を有するとして説明したが、これに限定されず、基材は、同種又は異種の2層以上の多層構造を有してもよい。また、平滑化層、剥離剤層についても同様に、単層構造を有するとして説明したが、これに限定されず、平滑化層、剥離剤層についても、それぞれ、同種又は異種の2層以上の多層構造を有してもよい。 For example, in the above-described embodiment, the base material has been described as having a single-layer structure, but the present invention is not limited to this, and the base material may have a multilayer structure of two or more layers of the same type or different types. In addition, the smoothing layer and the release agent layer are similarly described as having a single layer structure, but the present invention is not limited to this, and the smoothing layer and the release agent layer are each of the same or different two or more layers. It may have a multilayer structure.
 また、例えば、前述した実施形態では、基材の第1の面に平滑化層を設けたグリーンシート製造用剥離フィルムについて説明した。しかし、グリーンシート製造用剥離フィルムは、これに限定されず、基材の第2の面側に平滑化層や剥離剤層を設けてもよい。 In addition, for example, in the above-described embodiment, the green sheet manufacturing release film in which the smoothing layer is provided on the first surface of the base material has been described. However, the release film for producing a green sheet is not limited to this, and a smoothing layer or a release agent layer may be provided on the second surface side of the substrate.
 また、例えば、前述した実施形態では、グリーンシート製造用剥離フィルムは、基材と、平滑化層と、剥離剤層とがこの順に互いに接合するように積層された三層構造をなすとして説明したが、これに限定されず、平滑化層と、剥離剤層との間に中間層を設けてもよい。また、基材と、平滑化層との間に中間層を設けてもよい。このような中間層としては、平滑化層と、剥離剤層との密着性を向上させてもよく、また、グリーンシート形成前のグリーンシート製造用剥離フィルムを巻き取る際の帯電の発生をより抑制させる層であってもよい。 Further, for example, in the above-described embodiment, the green sheet manufacturing release film has been described as having a three-layer structure in which a base material, a smoothing layer, and a release agent layer are laminated to be joined to each other in this order. However, the present invention is not limited to this, and an intermediate layer may be provided between the smoothing layer and the release agent layer. Moreover, you may provide an intermediate | middle layer between a base material and a smoothing layer. As such an intermediate layer, the adhesion between the smoothing layer and the release agent layer may be improved, and the occurrence of electrification when winding the release film for green sheet production before the green sheet is formed is further improved. It may be a layer to be suppressed.
 また、本発明のグリーンシート製造用剥離フィルムの製造方法は、前述した方法に限定されず、必要に応じて任意の工程が追加されてもよい。 Moreover, the manufacturing method of the peeling film for green sheet manufacture of this invention is not limited to the method mentioned above, Arbitrary processes may be added as needed.
 次に、本発明のグリーンシート製造用剥離フィルムの具体的実施例について説明するが、本発明はこれら実施例のみに限定されない。 Next, specific examples of the release film for producing a green sheet of the present invention will be described. However, the present invention is not limited to these examples.
 [1]グリーンシート製造用剥離フィルムの作製
 (実施例1)
 まず、基材としての二軸延伸ポリエチレンテレフタレートフィルム[厚み:38μm、第1の面の算術平均粗さRa:42nm、第1の面の最大突起高さRp:619nm、第2の面の算術平均粗さRa:42nm、第2の面の最大突起高さRp:619nm]を用意した。
[1] Production of release film for green sheet production (Example 1)
First, a biaxially stretched polyethylene terephthalate film as a substrate [thickness: 38 μm, arithmetic average roughness Ra 2 of the first surface: 42 nm, maximum protrusion height Rp 2 of the first surface: 619 nm, of the second surface Arithmetic average roughness Ra 3 : 42 nm, maximum protrusion height Rp 3 : 619 nm on the second surface] was prepared.
 次に、活性エネルギー線硬化型化合物としてのウレタンアクリレートオリゴマーを主成分とする紫外線硬化型化合物[荒川化学工業社製、商品名「ビームセット575CB」、固形分100質量%、質量平均分子量470、光重合開始剤含有]100質量部と、トルエンと、メチルエチルケトンとを混合して固形分20質量%の平滑化層形成用組成物を得た。 Next, an ultraviolet curable compound mainly composed of a urethane acrylate oligomer as an active energy ray curable compound [Arakawa Chemical Industries, trade name “Beam Set 575CB”, solid content 100 mass%, mass average molecular weight 470, light Polymerization initiator contained] 100 parts by mass, toluene and methyl ethyl ketone were mixed to obtain a composition for forming a smoothing layer having a solid content of 20% by mass.
 得られた平滑化層形成用組成物を、マイヤーバー#4で基材の第1の面に塗布し、80℃で1分間それを乾燥させて塗布層を得た。 The obtained composition for forming a smoothing layer was applied to the first surface of the substrate with a Meyer bar # 4 and dried at 80 ° C. for 1 minute to obtain a coating layer.
 次に、塗布層に、紫外線照射装置で、紫外線を照射(波長:365nm、照射量:200mJ/cm)することにより、平滑化層(厚み1.3μm)を形成した。 Next, the coating layer was irradiated with ultraviolet rays (wavelength: 365 nm, irradiation amount: 200 mJ / cm 2 ) with an ultraviolet irradiation device to form a smoothing layer (thickness: 1.3 μm).
 さらに、剥離剤としての付加反応型シリコーン系化合物と架橋剤との混合物[信越化学工業株式会社製、商品名「シリコーンKS-847H」、固形分30質量%]100質量部をトルエンで希釈して希釈液を得た。この希釈液に白金触媒[信越化学工業株式会社製、商品名「PL-50T」]2質量部を添加し、混合することにより固形分1.5質量%の剥離剤層形成用組成物を得た。剥離剤層形成用組成物の乾燥後の厚みが0.1μmとなるように、前記平滑化層の基材と反対の面に剥離剤層形成用組成物を均一に塗布した。その後、130℃で1分間、剥離剤層形成用組成物を乾燥させて剥離剤層を形成して、グリーンシート製造用剥離フィルムを作製した。 Furthermore, 100 parts by mass of a mixture of an addition reaction type silicone compound as a release agent and a crosslinking agent [manufactured by Shin-Etsu Chemical Co., Ltd., trade name “silicone KS-847H”, solid content 30% by mass] with toluene was diluted. A dilution was obtained. 2 parts by mass of a platinum catalyst [trade name “PL-50T” manufactured by Shin-Etsu Chemical Co., Ltd.] was added to this diluted solution and mixed to obtain a composition for forming a release agent layer having a solid content of 1.5% by mass. It was. The release agent layer-forming composition was uniformly applied to the surface of the smoothing layer opposite to the substrate so that the thickness of the release agent layer-forming composition after drying was 0.1 μm. Thereafter, the release agent layer-forming composition was dried at 130 ° C. for 1 minute to form a release agent layer, thereby producing a release film for producing a green sheet.
 (実施例2)
 実施例1の二軸延伸ポリエチレンテレフタレートフィルムを、二軸延伸ポリエチレンテレフタレートフィルム[厚み31μm、第1の面の算術平均粗さRa:29nm、第1の面の最大突起高さRp:257nm、第2の面の算術平均粗さRa:29nm、第2の面の最大突起高さRp:257nm]に変更した以外は、実施例1と同様にしてグリーンシート製造用剥離フィルムを作製した。
(Example 2)
The biaxially stretched polyethylene terephthalate film of Example 1 was converted into a biaxially stretched polyethylene terephthalate film [thickness 31 μm, arithmetic mean roughness Ra 2 of the first surface: 29 nm, maximum protrusion height Rp 2 : 257 nm of the first surface, A release film for producing a green sheet was produced in the same manner as in Example 1 except that the arithmetic average roughness Ra 3 of the second surface was 29 nm and the maximum protrusion height Rp 3 was 257 nm of the second surface. .
 (実施例3)
 実施例1の二軸延伸ポリエチレンテレフタレートフィルムを、二軸延伸ポリエチレンテレフタレートフィルム[厚み31μm、第1の面の算術平均粗さRa:15nm、第1の面の最大突起高さRp:98nm、第2の面の算術平均粗さRa:15nm、第2の面の最大突起高さRp:98nm]に変更し、平滑化層の厚みを0.4μmに変更した以外は、実施例1と同様にしてグリーンシート製造用剥離フィルムを作製した。
(Example 3)
The biaxially stretched polyethylene terephthalate film of Example 1 was converted into a biaxially stretched polyethylene terephthalate film [thickness 31 μm, arithmetic mean roughness Ra 2 of the first surface: 15 nm, maximum projection height Rp 2 of first surface: 98 nm, Example 1 except that the arithmetic average roughness Ra 3 of the second surface was changed to 15 nm and the maximum protrusion height Rp 3 of the second surface was 98 nm, and the thickness of the smoothing layer was changed to 0.4 μm. In the same manner as described above, a release film for producing a green sheet was produced.
 (実施例4)
 実施例1の平滑化層の厚みを1.8μmに変更した以外は、実施例1と同様にしてグリーンシート製造用剥離フィルムを作製した。
Example 4
A release film for producing a green sheet was produced in the same manner as in Example 1 except that the thickness of the smoothing layer in Example 1 was changed to 1.8 μm.
 (実施例5)
 実施例1の平滑化層の厚みを2.3μmに変更した以外は、実施例1と同様にしてグリーンシート製造用剥離フィルムを作製した。
(Example 5)
A release film for producing a green sheet was produced in the same manner as in Example 1 except that the thickness of the smoothing layer in Example 1 was changed to 2.3 μm.
 (比較例1)
 まず、基材としての二軸延伸ポリエチレンテレフタレートフィルム[厚み:38μm、第1の面の算術平均粗さRa:42nm、第1の面の最大突起高さRp:619nm、第2の面の算術平均粗さRa:42nm、第2の面の最大突起高さRp:619nm]を用意した。
(Comparative Example 1)
First, a biaxially stretched polyethylene terephthalate film as a substrate [thickness: 38 μm, arithmetic average roughness Ra 2 of the first surface: 42 nm, maximum protrusion height Rp 2 of the first surface: 619 nm, of the second surface Arithmetic average roughness Ra 3 : 42 nm, maximum protrusion height Rp 3 : 619 nm on the second surface] was prepared.
 次に、剥離剤としての付加反応型シリコーン系化合物と架橋剤との混合物[信越化学工業株式会社製、商品名「シリコーンKS-847H」、固形分30質量%]100質量部をトルエンで希釈して希釈液を得た。この希釈液に白金触媒[信越化学工業株式会社製、商品名「PL-50T」]2質量部を添加し、混合することにより固形分1.5質量%の剥離剤層形成用組成物を得た。剥離剤層形成用組成物の乾燥後の厚みが0.1μmとなるように、前記基材の第1の面上に剥離剤層形成用組成物を均一に塗布した。その後、130℃で1分間、剥離剤層形成用組成物を乾燥させて剥離剤層を形成して、グリーンシート製造用剥離フィルムを作製した。 Next, 100 parts by mass of a mixture of an addition reaction type silicone compound as a release agent and a crosslinking agent [manufactured by Shin-Etsu Chemical Co., Ltd., trade name “Silicone KS-847H”, solid content 30% by mass] with toluene is diluted. To obtain a diluted solution. 2 parts by mass of a platinum catalyst [trade name “PL-50T” manufactured by Shin-Etsu Chemical Co., Ltd.] was added to this diluted solution and mixed to obtain a composition for forming a release agent layer having a solid content of 1.5% by mass. It was. The release agent layer forming composition was uniformly applied on the first surface of the substrate so that the thickness of the release agent layer forming composition after drying was 0.1 μm. Thereafter, the release agent layer-forming composition was dried at 130 ° C. for 1 minute to form a release agent layer, thereby producing a release film for producing a green sheet.
 (比較例2)
 まず、基材としての二軸延伸ポリエチレンテレフタレートフィルム[厚み:38μm、第1の面の算術平均粗さRa:42nm、第1の面の最大突起高さRp:619nm、第2の面の算術平均粗さRa:42nm、第2の面の最大突起高さRp:619nm]を用意した。
(Comparative Example 2)
First, a biaxially stretched polyethylene terephthalate film as a substrate [thickness: 38 μm, arithmetic average roughness Ra 2 of the first surface: 42 nm, maximum protrusion height Rp 2 of the first surface: 619 nm, of the second surface Arithmetic average roughness Ra 3 : 42 nm, maximum protrusion height Rp 3 : 619 nm on the second surface] was prepared.
 次に、熱硬化性化合物としてのステアリル変性アルキド化合物とメチル化メラミン化合物との混合物[日立化成ポリマー株式会社製、商品名「テスファイン303」、固形分20質量%、質量平均分子量15000]100質量部と、酸触媒のp-トルエンスルホン酸3質量部と、トルエンと、メチルエチルケトンとを混合して固形分20質量%の平滑化層形成用組成物を得た。得られた平滑化層形成用組成物を、マイヤーバー#4で、基材の第1の面に塗布し、塗布層を得た。 Next, a mixture of a stearyl-modified alkyd compound and a methylated melamine compound as a thermosetting compound [manufactured by Hitachi Chemical Co., Ltd., trade name “Tesfine 303”, solid content 20 mass%, mass average molecular weight 15000] 100 mass Then, 3 parts by mass of p-toluenesulfonic acid as an acid catalyst, toluene and methyl ethyl ketone were mixed to obtain a composition for forming a smoothing layer having a solid content of 20% by mass. The obtained composition for smoothing layer formation was apply | coated to the 1st surface of a base material with Mayer bar # 4, and the coating layer was obtained.
 次に、塗布層を、140℃で1分間乾燥させて加熱することにより、平滑化層(厚み1.0μm)を形成した。 Next, the coating layer was dried at 140 ° C. for 1 minute and heated to form a smoothing layer (thickness: 1.0 μm).
 さらに、剥離剤としての付加反応型シリコーン系化合物と架橋剤との混合物[信越化学工業株式会社製、商品名「シリコーンKS-847H」、固形分30質量%]100質量部をトルエンで希釈して希釈液を得た。この希釈液に白金触媒[信越化学工業株式会社製、商品名「PL-50T」]2質量部を添加し、混合することにより固形分1.5質量%の剥離剤層形成用組成物を得た。剥離剤層形成用組成物の乾燥後の厚みが0.1μmとなるように、前記平滑化層の基材と反対の面に剥離剤層形成用組成物を均一に塗布した。その後、130℃で1分間、剥離剤層形成用組成物を乾燥させて剥離剤層を形成して、グリーンシート製造用剥離フィルムを作製した。 Furthermore, 100 parts by mass of a mixture of an addition reaction type silicone compound as a release agent and a crosslinking agent [manufactured by Shin-Etsu Chemical Co., Ltd., trade name “silicone KS-847H”, solid content 30% by mass] with toluene was diluted. A dilution was obtained. 2 parts by mass of a platinum catalyst [trade name “PL-50T” manufactured by Shin-Etsu Chemical Co., Ltd.] was added to this diluted solution and mixed to obtain a composition for forming a release agent layer having a solid content of 1.5% by mass. It was. The release agent layer-forming composition was uniformly applied to the surface of the smoothing layer opposite to the substrate so that the thickness of the release agent layer-forming composition after drying was 0.1 μm. Thereafter, the release agent layer-forming composition was dried at 130 ° C. for 1 minute to form a release agent layer, thereby producing a release film for producing a green sheet.
 (比較例3)
 活性エネルギー線硬化型化合物としてのエポキシ変性シリコーン化合物を主成分とするカチオン重合性紫外線硬化型化合物[荒川化学工業株式会社製「UV POLY200」、固形分濃度100質量%、質量平均分子量20000]40質量部と、触媒としてホウ素系カチオン硬化UV触媒[荒川化学工業株式会社製「UV CAT A211」、固形分20%]3質量部と、トルエンと、メチルエチルケトンとを混合して固形分20質量%の平滑化層形成用組成物を得た以外は、実施例1と同様にしてグリーンシート製造用剥離フィルムを作製した。
(Comparative Example 3)
Cationic polymerizable UV curable compound mainly composed of an epoxy-modified silicone compound as an active energy ray curable compound [“UV POLY200” manufactured by Arakawa Chemical Industries, Ltd., solid content concentration 100 mass%, mass average molecular weight 20000] 40 mass Part, 3 parts by mass of a boron-based cationic curing UV catalyst [“UV CAT A211” manufactured by Arakawa Chemical Co., Ltd., solid content 20%] as a catalyst, toluene, and methyl ethyl ketone are mixed to obtain a smooth content of 20% by mass. A release film for producing a green sheet was produced in the same manner as in Example 1 except that the composition for forming a chemical layer was obtained.
 (比較例4)
 まず、基材としての二軸延伸ポリエチレンテレフタレートフィルム[厚み:38μm、第1の面の算術平均粗さRa:42nm、第1の面の最大突起高さRp:619nm、第2の面の算術平均粗さRa:42nm、第2の面の最大突起高さRp:619nm]を用意した。
(Comparative Example 4)
First, a biaxially stretched polyethylene terephthalate film as a substrate [thickness: 38 μm, arithmetic average roughness Ra 2 of the first surface: 42 nm, maximum protrusion height Rp 2 of the first surface: 619 nm, of the second surface Arithmetic average roughness Ra 3 : 42 nm, maximum protrusion height Rp 3 : 619 nm on the second surface] was prepared.
 次に、熱硬化性化合物としてのポリエステル化合物[東洋紡績(株)製、商品名「バイロン20SS」、固形分30質量%、質量平均分子量3000]80質量部と、架橋剤としてのメチル化メラミン20質量部と、酸触媒のp-トルエンスルホン酸3質量部と、トルエンと、メチルエチルケトンとを混合して固形分20質量%の平滑化層形成用組成物を得た。 Next, 80 parts by mass of a polyester compound [manufactured by Toyobo Co., Ltd., trade name “Byron 20SS”, solid content 30 mass%, mass average molecular weight 3000] as a thermosetting compound, and methylated melamine 20 as a crosslinking agent A composition for forming a smoothing layer having a solid content of 20% by mass was obtained by mixing 3 parts by mass of p-toluenesulfonic acid as an acid catalyst, toluene, and methyl ethyl ketone.
 得られた平滑化層形成用組成物を、マイヤーバー#4で、基材の第1の面に塗布し、塗布層を得た。 The obtained composition for forming a smoothing layer was applied to the first surface of the substrate with a Meyer bar # 4 to obtain a coating layer.
 次に、塗布層を、130℃で1分間乾燥させて加熱することにより、平滑化層(厚み1.2μm)を形成した。 Next, the coating layer was dried at 130 ° C. for 1 minute and heated to form a smoothing layer (thickness: 1.2 μm).
 さらに、剥離剤としての付加反応型シリコーン系化合物と架橋剤との混合物[信越化学工業株式会社製、商品名「シリコーンKS-847H」、固形分30質量%]100質量部をトルエンで希釈して希釈液を得た。この希釈液に白金触媒[信越化学工業株式会社製、商品名「PL-50T」]2質量部を添加し、混合することにより固形分1.5質量%の剥離剤層形成用組成物を得た。剥離剤層形成用組成物の乾燥後の厚みが0.1μmとなるように、前記平滑化層の基材と反対の面に剥離剤層形成用組成物を均一に塗布した。その後、130℃で1分間、剥離剤層形成用組成物を乾燥させて剥離剤層を形成して、グリーンシート製造用剥離フィルムを作製した。 Furthermore, 100 parts by mass of a mixture of an addition reaction type silicone compound as a release agent and a crosslinking agent [manufactured by Shin-Etsu Chemical Co., Ltd., trade name “silicone KS-847H”, solid content 30% by mass] with toluene was diluted. A dilution was obtained. 2 parts by mass of a platinum catalyst [trade name “PL-50T” manufactured by Shin-Etsu Chemical Co., Ltd.] was added to this diluted solution and mixed to obtain a composition for forming a release agent layer having a solid content of 1.5% by mass. It was. The release agent layer-forming composition was uniformly applied to the surface of the smoothing layer opposite to the substrate so that the thickness of the release agent layer-forming composition after drying was 0.1 μm. Thereafter, the release agent layer-forming composition was dried at 130 ° C. for 1 minute to form a release agent layer, thereby producing a release film for producing a green sheet.
 (比較例5)
 活性エネルギー線硬化型化合物としてのアクリレートオリゴマーを主成分とする紫外線硬化型化合物[大成ファインケミカル株式会社製「8KX-012C」、固形分濃度40質量%、質量平均分子量25000]を、トルエンで希釈し、固形分20%の平滑化層形成用組成物を得た以外は、実施例1と同様にしてグリーンシート製造用剥離フィルムを作製した。
(Comparative Example 5)
An ultraviolet curable compound mainly composed of an acrylate oligomer as an active energy ray curable compound [“8KX-012C” manufactured by Taisei Fine Chemical Co., Ltd., solid content concentration 40 mass%, mass average molecular weight 25000] is diluted with toluene, A release film for producing a green sheet was produced in the same manner as in Example 1 except that a composition for forming a smoothing layer having a solid content of 20% was obtained.
 各実施例および各比較例のグリーンシート製造用剥離フィルムの構成等を表1にまとめて示した。 Table 1 summarizes the configurations and the like of the release films for producing green sheets of each Example and each Comparative Example.
 なお、表中、活性エネルギー線硬化型化合物としてのウレタンアクリレートオリゴマーを主成分とする紫外線硬化型化合物[荒川化学工業社製、商品名「ビームセット575CB」、固形分100質量%、質量平均分子量470]を「A1」、熱硬化性化合物としてのステアリル変性アルキド化合物とメチル化メラミン化合物との混合物[日立化成ポリマー株式会社製、商品名「テスファイン303」、固形分20質量%、質量平均分子量15000]を「A2」、活性エネルギー線硬化型化合物としてのエポキシ変性シリコーン化合物を主成分とするカチオン重合性紫外線硬化型化合物[荒川化学工業株式会社製「UV POLY200」、固形分濃度100質量%、質量平均分子量20000]を「A3」、熱硬化性化合物としてのポリエステル化合物[東洋紡績(株)製、商品名「バイロン20SS」、固形分30質量%、質量平均分子量3000]を「A4」、活性エネルギー線硬化型化合物としてのアクリレートオリゴマーを主成分とする紫外線硬化型化合物[大成ファインケミカル株式会社製「8KX-012C」、固形分濃度40質量%、質量平均分子量25000]を「A5」と示した。 In the table, an ultraviolet curable compound having a urethane acrylate oligomer as a main component as an active energy ray curable compound [manufactured by Arakawa Chemical Industry Co., Ltd., trade name “Beam Set 575CB”, solid content 100 mass%, mass average molecular weight 470 ] “A1”, a mixture of a stearyl-modified alkyd compound as a thermosetting compound and a methylated melamine compound [manufactured by Hitachi Chemical Co., Ltd., trade name “Tesfine 303”, solid content 20 mass%, mass average molecular weight 15000 ] “A2”, a cationic polymerizable ultraviolet curable compound mainly composed of an epoxy-modified silicone compound as an active energy ray curable compound [“UV POLY200” manufactured by Arakawa Chemical Industries, Ltd., solid content concentration: 100 mass%, mass Average molecular weight 20000] is "A3" Ester compound [Toyobo Co., Ltd., trade name “Byron 20SS”, solid content 30% by mass, mass average molecular weight 3000] is “A4”, UV curing mainly composed of acrylate oligomer as active energy ray curable compound Type compound [“8KX-012C” manufactured by Taisei Fine Chemical Co., Ltd., solid concentration: 40 mass%, mass average molecular weight: 25000] was designated as “A5”.
 また、各実施例および各比較例の基材、平滑化層および剥離剤層の膜厚は、それぞれ、反射式膜厚計「F20」[フィルメトリックス株式会社製]にて測定した。 Further, the film thicknesses of the base material, the smoothing layer and the release agent layer in each Example and each Comparative Example were measured with a reflective film thickness meter “F20” [manufactured by Filmetrics Co., Ltd.]
 また、基材の第1の面の算術平均粗さRaおよび最大突起高さRp、基材の第2の面の算術平均粗さRaおよび最大突起高さRp、平滑化層の第3の面の算術平均粗さRaおよび最大突起高さRp、剥離剤層の外表面の算術平均粗さRaおよび最大突起高さRpは、それぞれ、次のように測定された。まず、ガラス板に両面テープを貼付した。次に、各実施例および各比較例で得られたグリーンシート製造用剥離フィルムを、両面テープ上に、算術平均粗さおよび最大突起を測定する側の面の反対面がガラス板側になるようにして固定した。こうして、前記算術平均粗さRa、Ra、Ra、Ra、前記最大突起高さRp、Rp、Rp、Rpを、JIS B0601-1994に準拠してミツトヨ社製表面粗さ測定機SV3000S4(触針式)にて測定した。 Further, the arithmetic average roughness Ra 2 and the maximum protrusion height Rp 2 of the first surface of the base material, the arithmetic average roughness Ra 3 and the maximum protrusion height Rp 3 of the second surface of the base material, and the smoothing layer The arithmetic average roughness Ra 4 and maximum protrusion height Rp 4 of the third surface, and the arithmetic average roughness Ra 1 and maximum protrusion height Rp 1 of the outer surface of the release agent layer were measured as follows, respectively. . First, a double-sided tape was affixed to a glass plate. Next, the release film for green sheet production obtained in each example and each comparative example is placed on a double-sided tape so that the surface opposite to the surface on which the arithmetic average roughness and maximum protrusion are measured is the glass plate side. And fixed. Thus, the arithmetic average roughness Ra 2 , Ra 3 , Ra 4 , Ra 1 , and the maximum protrusion height Rp 2 , Rp 3 , Rp 4 , Rp 1 are measured according to JIS B0601-1994. Measured with a measuring instrument SV3000S4 (stylus type).
Figure JPOXMLDOC01-appb-T000001
Figure JPOXMLDOC01-appb-T000001
 [2]評価
 以上のようにして得られたグリーンシート製造用剥離フィルムに関して、以下のような評価を行った。
[2] Evaluation Regarding the release film for producing a green sheet obtained as described above, the following evaluation was performed.
 [2.1]ブロッキング性評価
 各実施例および各比較例で得られたグリーンシート製造用剥離フィルムの幅400mm、長さ5000mをロール状に巻き上げて、剥離フィルムロールを得た。この剥離フィルムロールを40℃、湿度50%以下の環境下に30日間保管した。その後、剥離フィルムロールの外観を目視にて観察し、以下の判断基準でブロッキング性を評価した。
[2.1] Evaluation of blocking property The release film for green sheet production obtained in each Example and each Comparative Example was rolled up into a roll having a width of 400 mm and a length of 5000 m to obtain a release film roll. This release film roll was stored for 30 days in an environment of 40 ° C. and a humidity of 50% or less. Thereafter, the appearance of the release film roll was visually observed, and the blocking property was evaluated according to the following criteria.
  A:グリーンシート製造用剥離フィルムをロール状に巻き上げて得られた保管前の剥離フィルムロールの外観と比較して、保管後の剥離フィルムロールの外観に変化がなかった(ブロッキング無し)。
  B:グリーンシート製造用剥離フィルムロールにおいて、部分的に色目が異なる領域があった(ブロッキング傾向にあるものの使用可能)。
  C:グリーンシート製造用剥離フィルムロールの広範な領域にわたって色目が異なった(ブロッキング有り)。
 上記基準Cのように、グリーンシート製造用剥離フィルムの表裏の密着によるブロッキングが発生して、剥離フィルムロールの広範な領域にわたって色目が変化した場合、グリーンシート製造用剥離フィルムを正常に巻き出すことができない場合がある。
A: Compared with the appearance of the release film roll before storage obtained by rolling up the release film for green sheet production into a roll, there was no change in the appearance of the release film roll after storage (no blocking).
B: In the release film roll for producing a green sheet, there was a region in which the color was partially different (those that have a blocking tendency can be used).
C: The color was different over a wide area of the release film roll for producing a green sheet (with blocking).
When blocking occurs due to adhesion between the front and back surfaces of the release film for green sheet production as in the above standard C, and the color changes over a wide area of the release film roll, the release film for green sheet production is normally unwound. May not be possible.
 [2.2]凹部数評価
 ポリビニルブチラール樹脂をトルエン/エタノール混合溶剤(質量比6/4)にて溶解した塗工液を、各実施例および各比較例で得られたグリーンシート製造用剥離フィルムの剥離剤層の上(外表面)に、乾燥後の厚さが3μmとなるように、塗布して塗布層を得た。塗布層を80℃で1分間乾燥させて、ポリビニルブチラール樹脂層を成形した。次いで、そのポリビニルブチラール樹脂層の表面にポリエステルテープを貼付した。次いで、グリーンシート製造用剥離フィルムをポリビニルブチラール樹脂層から剥離し、ポリビニルブチラール樹脂層をポリエステルテープに転写した。次いで、グリーンシート製造用剥離フィルムの剥離剤層に接触していたポリビニルブチラール樹脂層の面を、光干渉式表面形状観察装置「WYKO-1100」[株式会社Veeco社製]を用いて観察した。観察条件は、PSIモード、50倍率とした。ポリビニルブチラール樹脂層の面の91.2×119.8μmの範囲内で、ポリビニルブチラール樹脂層の面に確認される凹部をカウントした。その凹部は、剥離剤層の形状が転写された150nm以上の深さを有していた。凹部の数を以下の判断基準で評価した。なお、下記基準Cと評価されたポリビニルブチラール樹脂層(グリーンシート)を用いてコンデンサを作製した場合、耐電圧低下によるショートが発生し易い傾向があった。
[2.2] Evaluation of the number of recesses A release film for green sheet production obtained in each example and each comparative example was obtained by using a coating solution obtained by dissolving polyvinyl butyral resin in a toluene / ethanol mixed solvent (mass ratio 6/4). On the release agent layer (outer surface), a coating layer was obtained by coating so that the thickness after drying was 3 μm. The coating layer was dried at 80 ° C. for 1 minute to form a polyvinyl butyral resin layer. Next, a polyester tape was attached to the surface of the polyvinyl butyral resin layer. Next, the release film for green sheet production was peeled from the polyvinyl butyral resin layer, and the polyvinyl butyral resin layer was transferred to a polyester tape. Next, the surface of the polyvinyl butyral resin layer that had been in contact with the release agent layer of the release film for producing a green sheet was observed using an optical interference type surface shape observation device “WYKO-1100” [manufactured by Veeco Corporation]. The observation conditions were PSI mode and 50 magnification. In the range of 91.2 × 119.8 μm of the surface of the polyvinyl butyral resin layer, the number of recesses confirmed on the surface of the polyvinyl butyral resin layer was counted. The concave portion had a depth of 150 nm or more to which the shape of the release agent layer was transferred. The number of recesses was evaluated according to the following criteria. In addition, when the capacitor was produced using the polyvinyl butyral resin layer (green sheet) evaluated as the following standard C, there was a tendency for a short circuit to occur due to a decrease in withstand voltage.
  A:凹部の数が0個である。
  B:凹部の数が1~5個である。
  C:凹部の数が6個以上である。
 これらの結果を表2に示す。
A: The number of recesses is zero.
B: The number of recesses is 1 to 5.
C: The number of recesses is 6 or more.
These results are shown in Table 2.
Figure JPOXMLDOC01-appb-T000002
Figure JPOXMLDOC01-appb-T000002
 表2から明らかなように、本発明のグリーンシート製造用剥離フィルムは、その外表面の平滑性に優れていた。また、本発明のグリーンシート製造用剥離フィルムを用いて形成したグリーンシートには、粗大な凹部等はほとんど確認されなかった。また、本発明のグリーンシート製造用剥離フィルムを用いて形成したグリーンシートにより製造したセラミックコンデンサーには、短絡等の不具合の発生が確認されなかった。これに対して、比較例では満足な結果が得られなかった。 As is apparent from Table 2, the release film for producing a green sheet of the present invention was excellent in the smoothness of the outer surface. Moreover, the coarse recessed part etc. were hardly confirmed by the green sheet formed using the peeling film for green sheet manufacture of this invention. Moreover, generation | occurrence | production of malfunctions, such as a short circuit, was not confirmed by the ceramic capacitor manufactured with the green sheet formed using the peeling film for green sheet manufacture of this invention. On the other hand, satisfactory results were not obtained in the comparative example.
 発明のグリーンシート製造用剥離フィルムは、第1の面と第2の面とを有する基材と、基材の第1の面に設けられた平滑化層と、平滑化層の基材と反対の面側に設けられた剥離剤層とを有し、平滑化層は、活性エネルギー線硬化型化合物を含む平滑化層形成用組成物に、活性エネルギー線を照射して硬化させることにより形成されており、前記剥離剤層の外表面の算術平均粗さRaが8nm以下であり、かつ、剥離剤層の前記外表面の最大突起高さRpが50nm以下であることを特徴とする。本発明によれば、グリーンシートの表面にピンホール等が発生することを防止し、信頼性の高いグリーンシートを製造することが可能なグリーンシート製造用剥離フィルムを提供することができる。したがって、本発明は産業上の利用可能性を有する。 The release film for producing a green sheet of the invention is a substrate having a first surface and a second surface, a smoothing layer provided on the first surface of the substrate, and a substrate opposite to the smoothing layer. The smoothing layer is formed by irradiating the active energy ray-curable composition containing the active energy ray-curable compound with an active energy ray and curing the composition. The arithmetic average roughness Ra 1 of the outer surface of the release agent layer is 8 nm or less, and the maximum protrusion height Rp 1 of the outer surface of the release agent layer is 50 nm or less. ADVANTAGE OF THE INVENTION According to this invention, it can prevent that a pinhole etc. generate | occur | produce on the surface of a green sheet, and can provide the peeling film for green sheet manufacture which can manufacture a reliable green sheet. Therefore, the present invention has industrial applicability.
1・・・グリーンシート製造用剥離フィルム
11・・・基材
111・・・基材の第1の面
112・・・基材の第2の面
12・・・平滑化層
121・・・面(第3の面)
13・・・剥離剤層
131・・・剥離剤層の外表面
DESCRIPTION OF SYMBOLS 1 ... Release film 11 for green sheet manufacture ... Base material 111 ... 1st surface 112 of a base material ... 2nd surface 12 of a base material 12 ... Smoothing layer 121 ... Surface (Third aspect)
13 ... Release agent layer 131 ... Outer surface of release agent layer

Claims (8)

  1.  グリーンシート製造用剥離フィルムであって、
     第1の面と第2の面とを有する基材と、
     前記基材の前記第1の面に設けられた平滑化層と、
     前記平滑化層の前記基材と反対の面側に設けられた剥離剤層とを有し、
     前記平滑化層は、活性エネルギー線硬化型化合物を含む平滑化層形成用組成物に、活性エネルギー線を照射して硬化させることにより形成されており、
     前記剥離剤層の外表面の算術平均粗さRaが8nm以下であり、かつ、前記剥離剤層の前記外表面の最大突起高さRpが50nm以下であることを特徴とするグリーンシート製造用剥離フィルム。
    A release film for producing green sheets,
    A substrate having a first surface and a second surface;
    A smoothing layer provided on the first surface of the substrate;
    A release agent layer provided on the surface side opposite to the base material of the smoothing layer,
    The smoothing layer is formed by irradiating and curing an active energy ray on a composition for forming a smoothing layer containing an active energy ray-curable compound,
    An arithmetic average roughness Ra 1 of the outer surface of the release agent layer is 8 nm or less, and a maximum protrusion height Rp 1 of the outer surface of the release agent layer is 50 nm or less. Release film.
  2.  前記第1の面の算術平均粗さRaが10~200nmであり、かつ、前記第1の面の最大突起高さRpが80~1000nmである請求項1に記載のグリーンシート製造用剥離フィルム。 2. The green sheet manufacturing release according to claim 1, wherein the arithmetic mean roughness Ra 2 of the first surface is 10 to 200 nm, and the maximum protrusion height Rp 2 of the first surface is 80 to 1000 nm. the film.
  3.  前記活性エネルギー線硬化型化合物は、質量平均分子量が950以下の化合物である請求項1または2に記載のグリーンシート製造用剥離フィルム。 The release film for producing a green sheet according to claim 1 or 2, wherein the active energy ray-curable compound is a compound having a mass average molecular weight of 950 or less.
  4.  前記活性エネルギー線硬化型化合物は、紫外線硬化型化合物であり、前記活性エネルギー線は、紫外線である請求項1ないし3のいずれか1項に記載のグリーンシート製造用剥離フィルム。 The release film for producing a green sheet according to any one of claims 1 to 3, wherein the active energy ray-curable compound is an ultraviolet ray curable compound, and the active energy ray is an ultraviolet ray.
  5.  前記平滑化層の平均膜厚が、0.2~10μmである請求項1ないし4のいずれか1項に記載のグリーンシート製造用剥離フィルム。 The release film for producing a green sheet according to any one of claims 1 to 4, wherein an average film thickness of the smoothing layer is 0.2 to 10 µm.
  6.  前記平滑化層は、前記基材と反対の面を有し、
     前記平滑化層の前記基材と反対の前記面の算術平均粗さRaが8nm以下であり、かつ、前記平滑化層の前記基材と反対の前記面の最大突起高さRpが50nm以下である請求項1ないし5のいずれか1項に記載のグリーンシート製造用剥離フィルム。
    The smoothing layer has a surface opposite to the substrate;
    The arithmetic average roughness Ra 4 of the surface of the smoothing layer opposite to the base material is 8 nm or less, and the maximum protrusion height Rp 4 of the surface of the smoothing layer opposite to the base material is 50 nm. The release film for producing a green sheet according to any one of claims 1 to 5, which is as follows.
  7.  前記第2の面の算術平均粗さRaが10~200nmであり、かつ、前記第2の面の最大突起高さRpが80~1000nmである請求項1ないし6のいずれか1項に記載のグリーンシート製造用剥離フィルム。 7. The arithmetic mean roughness Ra 3 of the second surface is 10 to 200 nm, and the maximum protrusion height Rp 3 of the second surface is 80 to 1000 nm. The release film for green sheet manufacture as described.
  8.  請求項1ないし7のいずれか1項に記載のグリーンシート製造用剥離フィルムの製造方法であって、
     前記第1の面と前記第2の面とを有する前記基材を準備する基材準備工程と、
     前記活性エネルギー線硬化型化合物を含む前記平滑化層形成用組成物を、前記基材の前記第1の面側に塗布することにより塗布層を形成する塗布層形成工程と、
     前記塗布層に前記活性エネルギー線を照射して硬化させることにより、前記平滑化層を形成する平滑化層形成工程と、
     前記平滑化層の前記基材と反対の前記面側に、前記剥離剤層を形成する剥離剤層形成工程とを有し、
     前記剥離剤層の前記外表面の前記算術平均粗さRaが8nm以下であり、かつ、前記剥離剤層の前記外表面の前記最大突起高さRpが50nm以下であることを特徴とするグリーンシート製造用剥離フィルムの製造方法。
    It is a manufacturing method of the peeling film for green sheet manufacture of any one of Claim 1 thru | or 7, Comprising:
    A base material preparing step of preparing the base material having the first surface and the second surface;
    A coating layer forming step of forming a coating layer by coating the smoothing layer forming composition containing the active energy ray-curable compound on the first surface side of the substrate;
    A smoothing layer forming step of forming the smoothing layer by irradiating and curing the active energy ray on the coating layer;
    A release agent layer forming step of forming the release agent layer on the surface side of the smoothing layer opposite to the substrate;
    The arithmetic average roughness Ra 1 of the outer surface of the release agent layer is 8 nm or less, and the maximum protrusion height Rp 1 of the outer surface of the release agent layer is 50 nm or less. A method for producing a release film for producing a green sheet.
PCT/JP2013/085202 2013-03-15 2013-12-27 Release film for green sheet manufacturing, and method for manufacturing release film for green sheet manufacturing WO2014141571A1 (en)

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SG11201507464UA SG11201507464UA (en) 2013-03-15 2013-12-27 Release film for green sheet manufacturing, and method for manufacturing release film for green sheet manufacturing
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Families Citing this family (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP6400430B2 (en) * 2014-10-21 2018-10-03 リンテック株式会社 Curable composition for silicone coating layer and silicone coating sheet
JP6524650B2 (en) * 2014-11-28 2019-06-05 工機ホールディングス株式会社 Driving machine
JP2016141008A (en) * 2015-01-30 2016-08-08 リンテック株式会社 Release film and method for producing release film
CN110312602B (en) * 2017-03-01 2021-12-14 东洋纺株式会社 Release film for producing ceramic green sheet and method for producing same
JP7183530B2 (en) * 2017-06-01 2022-12-06 東洋紡株式会社 Release film for manufacturing ceramic green sheets
JP7311241B2 (en) * 2017-10-12 2023-07-19 東洋紡株式会社 Release film for manufacturing ceramic green sheets
JP6852720B2 (en) * 2017-10-12 2021-03-31 東洋紡株式会社 Release film for manufacturing ceramic green sheets
JP7306515B2 (en) * 2018-03-22 2023-07-11 東洋紡株式会社 Release film for manufacturing ceramic green sheets
JP7306516B2 (en) * 2018-03-22 2023-07-11 東洋紡株式会社 Release film for manufacturing ceramic green sheets
JP7106912B2 (en) * 2018-03-22 2022-07-27 東洋紡株式会社 Release film for manufacturing ceramic green sheets
JP7306514B2 (en) * 2018-03-22 2023-07-11 東洋紡株式会社 Release film for manufacturing ceramic green sheets
JP2022011406A (en) * 2020-06-30 2022-01-17 セイコーエプソン株式会社 Piezoelectric element, liquid discharge head, and printer
CN112280085A (en) * 2020-09-24 2021-01-29 浙江日久新材料科技有限公司 Low-roughness MLCC functional release film capable of being used in tape casting and preparation method thereof

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2004196856A (en) * 2002-12-16 2004-07-15 Mitsubishi Polyester Film Copp Polyester film for release film
JP2009208236A (en) * 2008-02-29 2009-09-17 Tdk Corp Method of manufacturing support sheet and laminated ceramic electronic parts
JP2011212903A (en) * 2010-03-31 2011-10-27 Lintec Corp Release film
JP2012224011A (en) * 2011-04-21 2012-11-15 Lintec Corp Release film for ceramic green sheet manufacturing process

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3668439B2 (en) * 2001-06-14 2005-07-06 ソニーケミカル株式会社 Adhesive film
JP2007069360A (en) 2005-09-02 2007-03-22 Lintec Corp High smoothness peeling sheet and its manufacturing method
JP5632336B2 (en) * 2010-07-29 2014-11-26 大日本印刷株式会社 Adhesive composition and method for producing thermosetting adhesive sheet

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2004196856A (en) * 2002-12-16 2004-07-15 Mitsubishi Polyester Film Copp Polyester film for release film
JP2009208236A (en) * 2008-02-29 2009-09-17 Tdk Corp Method of manufacturing support sheet and laminated ceramic electronic parts
JP2011212903A (en) * 2010-03-31 2011-10-27 Lintec Corp Release film
JP2012224011A (en) * 2011-04-21 2012-11-15 Lintec Corp Release film for ceramic green sheet manufacturing process

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