WO2014109008A1 - Deformation measuring method and device, and sheet processing method and device - Google Patents
Deformation measuring method and device, and sheet processing method and device Download PDFInfo
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- WO2014109008A1 WO2014109008A1 PCT/JP2013/050164 JP2013050164W WO2014109008A1 WO 2014109008 A1 WO2014109008 A1 WO 2014109008A1 JP 2013050164 W JP2013050164 W JP 2013050164W WO 2014109008 A1 WO2014109008 A1 WO 2014109008A1
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- sheet
- deformation
- camera
- measurement
- tension
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/16—Measuring arrangements characterised by the use of optical techniques for measuring the deformation in a solid, e.g. optical strain gauge
- G01B11/165—Measuring arrangements characterised by the use of optical techniques for measuring the deformation in a solid, e.g. optical strain gauge by means of a grating deformed by the object
Definitions
- the present invention relates to a deformation measuring method and apparatus for measuring the deformation of a sheet-like or planar measuring object. Furthermore, the present invention relates to a sheet processing method and apparatus for performing processing such as pattern formation on a sheet or a planar measurement object using the measurement result of deformation measurement.
- the deformed shape of the planar substrate or sheet member (hereinafter collectively referred to as a sheet) is accurately measured. It is essential to do.
- the sheet-like member easily deforms due to tension or the like, it is necessary to accurately measure the deformation and correct the processing position accordingly.
- Patent Documents 1 to 4 disclose an example of measurement techniques for handling these sheets.
- JP 2003-200413 A JP 2011-143390 A JP-A-2005-116611 JP 2005-62165 A
- ⁇ Planar substrates, especially thin sheet members, are also deformed by minute tension differences and changes, and even by the previous process.
- the strain amount is about 10 ⁇ 4 to 10 ⁇ 5. It is necessary to measure the deformation.
- Patent Document 1 measures the elongation and distortion of the entire processing region and cannot observe local (two-dimensional) sheet deformation.
- Patent Document 2 one inkjet head and one camera are fixed and moved to one moving housing, but local deformation of the sheet is not taken into account within the head processing region.
- Patent Document 3 measures the elongation and distortion of the entire processing area as in Patent Document 1, and cannot observe local (two-dimensional) sheet deformation.
- Patent Document 4 is a patent in which a plurality of cameras are arranged in the width direction although the purpose is different. In order to measure the deformation of the entire sheet, a large number of cameras are required as in Patent Document 4, but there is a concern that the apparatus configuration is complicated and the cost is increased.
- an object of the present invention is to provide a deformation measuring method and apparatus, and a sheet processing method and apparatus capable of easily and accurately measuring the deformation amount of the sheet and further performing the deformation process of the sheet.
- the present invention is a deformation measurement method for measuring the deformation amount of a sheet-like measurement object with a plurality of patterns, and the arrangement position is fixed from a plane parallel to the surface of the sheet-like measurement object.
- the sheet-like measurement object is photographed by the plurality of cameras, and the deformation amount of the sheet-like measurement object is calculated using the information of the photographed position and the photographing information photographed by the camera.
- a deformation measurement apparatus for measuring a deformation amount of a sheet-like measurement object having a plurality of patterns, the camera holding the plurality of cameras for photographing the surface of the sheet-like measurement object fixedly arranged Position control of the camera holding housing moving means for moving the housing and the camera holding housing on a surface parallel to the surface of the sheet-like measurement target, and the camera holding housing moving means on a surface parallel to the surface of the sheet-like measurement target
- a camera holding housing position control means, and a deformation state analysis means for calculating the deformation amount of the sheet-like measurement object using the position information determined by the camera holding housing position control means and the shooting information photographed by the camera. It is characterized by being.
- a sheet processing method for conveying a sheet-shaped measurement object having a plurality of patterns, measuring a deformation amount, and executing sheet processing, in the process of conveying the sheet-shaped measurement object.
- the position of the sheet-shaped measurement target with a plurality of patterns is arranged from the plane parallel to the surface of the sheet-shaped measurement target.
- the sheet-shaped measurement object is photographed by a plurality of cameras with fixed positions, and the deformation amount of the sheet-shaped measurement object is calculated using the information of the photographed position and the photographing information photographed by the camera, and according to the obtained deformation amount Controlling the sheet tension, obtaining corrected position information obtained by correcting the sheet position in accordance with the obtained deformation amount, and performing predetermined processing on the position corresponding to the corrected position information in the course of sheet processing To do.
- a tension control unit a deformation measurement unit, and a sheet processing unit are provided to convey a sheet-like measurement target having a plurality of patterns, measure a deformation amount, and execute sheet processing.
- the tension control unit includes a tension adjusting unit that controls the tension in the conveyance direction of a sheet-like measurement target having a plurality of patterns, and the deformation measurement unit is a sheet-like measurement target.
- a camera holding housing in which a plurality of cameras for photographing the surface are fixedly arranged, a camera holding housing moving means for moving the camera holding housing on a plane parallel to the surface of the sheet-like measurement object, and a camera holding housing moving means
- Camera holding housing position control means for controlling the position on a surface parallel to the surface of the sheet-like measuring object, and information on the position determined by the camera holding housing position control means and photographing information taken by the camera
- Deformation state analysis means for calculating a deformation amount to be fixed, a sheet tension calculation unit that determines a sheet tension according to the deformation amount obtained by the deformation state analysis means and applies the tension adjustment means, and a deformation amount obtained by the deformation state analysis means
- a sheet position correction calculation unit that supplies correction position information for correcting the sheet position to the sheet processing unit, and the sheet processing unit determines a processing position on the sheet obtained by the sheet position correction calculation unit of the deformation state analysis unit.
- processing means for executing predetermined processing.
- a set of cameras in the same housing has the same measurement position deviation between the set of cameras due to subtle distortions of the guide rail that occur when the measurement camera moves. As a result, the measurement position error of each camera can be almost canceled.
- FIG. 1 The figure which shows the example of arrangement
- FIG. The figure which shows an example of the arrangement
- FIG. The figure which showed the schematic example of the pattern imaged with four position detection cameras.
- FIG. 3 is a diagram illustrating a configuration example of a sheet conveying mechanism 101 including a deformation measuring device 2.
- FIG. 6 is a diagram illustrating a procedure for forming a drawing pattern on a sheet S by the sheet conveying mechanism 101.
- FIG. 6 is a flowchart illustrating a process performed by the sheet conveyance mechanism 101.
- FIG. 1 is an example of an arrangement configuration diagram of a sheet deformation measuring device 2 according to a first embodiment of the present invention.
- the deformation measuring device 2 is arranged on the upper portion of the sheet 7 to be measured.
- the deformation measuring device 2 that measures the deformation of the sheet is provided with two or more position detection cameras 3 and a camera holding housing 4 that integrally holds them.
- the plurality of position detection cameras 3 are arranged so as to keep a predetermined distance L apart in a lattice shape by the same camera holding housing 4.
- four position detection cameras 3a, 3b, 3c, and 3d are installed in a lattice shape at equal intervals in the camera holding housing 4.
- the installation position may be arbitrary.
- the deformation measuring device 2 includes a camera holding housing operating means 5 for moving the camera holding housing 4 and a camera holding housing position control means 6 for recording and controlling the absolute position of the camera holding housing 4 (in FIG. 1). (Not shown).
- the camera holding casing operating means 5 and the camera holding casing position control means 6 can control the movement of the camera holding casing 4 to a desired position.
- the camera holding housing operating means 5 includes operating means 5X for moving in the X direction in FIG. 1 and operating means 5Y for moving in the Y direction perpendicular to the X direction, and if necessary, in the height direction.
- the operating means 5Z (not shown in FIG. 1) may be provided. However, the XY plane determined by the X and Y directions is a horizontal plane with respect to the surface of the sheet 7 to be measured.
- a plurality of patterns 8 capable of discriminating position information of the measuring object 7 are formed on the surface of the measuring object 7 of the sheet or the planar body that is the measuring object of the deformation measuring device 2.
- the shape of the pattern 8 is circular.
- the shape may be any shape such as a triangular shape, a quadrangular shape, a cross shape, or a character shape, and the shape may be different among the plurality of patterns 8. I do not care.
- FIG. 2 shows the overall configuration of means and functions that the deformation measuring device 2 should have.
- This means and function includes a camera holding case 4 provided with the camera 3, a camera holding case operating means 5, a camera holding case position control means 6, and a deformation state analysis means 80.
- these functions of the deformation measuring device 2 need to be arranged in the upper space facing the surface of the measuring object 7 by a support frame or the like.
- the deformation state analyzing means 80 is located in a place different from the upper space. It may be arranged.
- the camera holding housing 4 on which the camera 3 is mounted is moved to an arbitrary position on the XY plane by the camera holding housing operating means 5.
- the moving position is determined by the camera holding housing position control means 6.
- the deformation state analyzing means 80 measures the deformation of the measurement object 7 using information of the plurality of position detection cameras 3 photographed at the position. For this measurement, the deformation state analyzing means 80 has 81 to 89 functions and means.
- the deformation state analyzing unit 80 stores information on the shape of the pattern 8 formed in advance on the measurement object 7 in the pattern shape storing unit 81, and on the other hand, an image captured by the position detection camera 3. Captured from the camera 3 and recorded in the captured image recording means 82.
- the information on the shape of the pattern 8 formed in advance reflects the ideal state of the sheet 7 without distortion or distortion, and is known information. Therefore, distortion and distortion can be identified by comparison with a captured image captured from the camera 3. This identification is performed as follows.
- the deformation state analyzing unit 80 detects the center position of the pattern 8 having the same shape from the image captured by the captured image recording unit 82 based on the pattern shape stored in the pattern shape storage unit 81, and the center position of the captured image.
- the distance to the pattern 8 is calculated by the in-image pattern position specifying means 83.
- the deformation state analyzing unit 80 calculates the pattern 8 from the distance from the image center position calculated by the in-image pattern position specifying unit 83 to the center position of the pattern 8 and the known installation distance between the plurality of position detection cameras 3.
- the relative position information of the pattern 8 at the time of imaging is recorded in the pattern detection position recording means 85.
- the deformation amount calculation means 87 obtains the deformation amount using the information of the pattern detection position recorded in the pattern detection position recording means 85 and records this in the deformation amount recording means 88.
- the pattern one recording means 86 receives position information when the camera holding housing position control means 6 executes position control of the camera holding housing operating means 5, and this position information is the pattern detection position recording means 85 and
- the recording information of the deformation amount recording means 88 is used for recording in association with the position information of the measurement object 7.
- the deformation state analyzing unit 80 generates deformation data of the entire observation surface of the measurement target 7 based on the deformation information recorded in the deformation amount recording unit 88 at a plurality of locations of the measurement target 7. Means 89 are provided. Based on the deformation data generated by the measurement object deformation analysis unit 89, the measurement object 7 can be positioned with high accuracy in consideration of local distortion of the measurement object 7.
- the position information of the pattern 8 can be identified.
- the detection position of the pattern 8 is the center position of the pattern 8, but may be any place as long as the specific position of the pattern 8 can be detected.
- the position of the pattern 8 in the image is detected by calculating the distance of the center position of the pattern 8 from the center of the captured image with reference to the center position of the captured image in the captured image.
- the reference position may be an arbitrary position instead of the center position of the captured image.
- FIG. 3 is a flowchart showing a process of measuring deformation using the deformation measuring device 2 of FIG.
- the deformation measurement method of FIG. 3 is executed by periodic processing of a computer, and thus a series of procedures of the deformation measurement method of the present invention will be described.
- the camera holding housing 4 is moved to a desired position by the camera holding housing operating means 5.
- a desired position will be described.
- Circular patterns 8a, 8b, 8c, and 8d are engraved on the measurement object 7 in advance. Further, the relative formation positions of the four circular patterns 8a, 8b, 8c, and 8d at the time of pattern formation are set so that the four position detection cameras 3a, 3b, 3c, and 3d are parallel to the surface direction of the measuring object 7. They are formed at a relative position interval such that all four patterns 8a, 8b, 8c, and 8d are simultaneously accommodated in the imaging range when moved by the holding housing operating means 5 onto the pattern 8.
- the number of patterns 8 and the relative positions between the patterns 8 are arbitrary as long as the above conditions are satisfied. However, it is assumed that the X-axis direction and the Y-axis direction are parallel to the measurement target surface and perpendicular to each other, as shown in FIG.
- the position coordinates of the pattern 8 at the time of pattern formation in this example shown in FIG. 4 are such that the position of the pattern 8a is (X 8a , Y 8a ) on the XY coordinates, and the other three patterns 8b, 8c, 8d are lattices Are formed at positions (X 8a + M, Y 8a ), (X 8a , Y 8a + M), (X 8a + M, Y 8a + M) that are separated by a distance M in the X-axis direction and the Y-axis direction. .
- FIG. 1 an example of the arrangement relationship of the plurality of position detection cameras 3 is shown in FIG.
- the coordinates of the position detection camera 3 when the position detection cameras 3 are arranged in parallel on the measurement object 7 are shown.
- the position coordinates of the position detection camera 3a are (X 3a , Y 3a ) on the XY coordinates
- the other three position detection cameras 3b, 3c, 3d are (X 3a + L, Y 3a ), ( X 3a , Y 3a + L), (X 3a + L, Y 3a + L).
- the position detection camera 3 is moved so that the pattern 8 enters the field of view of each of the plurality of position detection cameras 3. This means that the position state has been moved to the desired position described above.
- a plurality of patterns 8 are imaged by a plurality of position detection cameras 3 in the processing step S2 of FIG.
- the imaged pattern 8 is taken into the deformed shape analyzing means 80 in FIG.
- FIG. 6 is a schematic diagram showing circular patterns 8a, 8b, 8c, and 8d captured by four position detection cameras 3a, 3b, 3c, and 3d.
- 14a, 14b, 14c, and 14d are the visual fields (images) of the four position detection cameras 3a, 3b, 3c, and 3d
- 15a, 15b, 15c, and 15d are the central positions of the visual fields.
- the distance between the centers 15a, 15b, 15c, and 15d of the visual fields 14a, 14b, 14c, and 14d in FIG. 6 is the distance L in FIG. 5, for example, a circle in each of the circular visual fields 14a, 14b, 14c, and 14d.
- Shape patterns 8a, 8b, 8c, and 8d are visually recognized.
- the distance between the circular patterns 8a, 8b, 8c, and 8d after photography should be ideal with the arrangement relationship of FIG. 4 as an ideal distance, but the distance M is clearly not maintained in the example of FIG. .
- distortion and distortion are detected from the imaging information.
- the center position of the plurality of patterns 8 in the captured image is detected by the in-image pattern position specifying means 83.
- the positions of the centers 15a, 15b, 15c, and 15d of the captured visual fields 14a, 14b, 14c, and 14d and the distance L between the center positions are known as shown in FIG. . This positional relationship is established when the position detection camera 3 is attached to the camera holding housing 4.
- the positions of the centers 15a, 15b, 15c, and 15d of the patterns 8a, 8b, 8c, and 8d in the captured visual fields 14a, 14b, 14c, and 14d are as exemplified in the visual field 14a of the lower left position detection camera in FIG.
- the position of the center of the visual field 15a is grasped as the position of the XY coordinates with the origin (0, 0).
- the center position coordinates of the patterns 8a, 8b, 8c, and 8d are expressed as (dX a , dY a ), (dX b , dY b ), (dX c , dY c ), (dX d , dY d ).
- processing step S4 the relative position coordinates between the patterns 8 are calculated by the pattern position identification means 84.
- process step S5 the obtained relative position coordinates are recorded in the pattern detection position recording means 85. This process relatively grasps the mutual distance between the patterns 8a, 8b, 8c, and 8d in FIG.
- the relative position of the pattern 8a is (dX a, dY a).
- the relative position of 8b is (dX b + L, dY b )
- the relative position of 8c is (dX c , dY c + L)
- the relative position of 8d is represented by (dX d + L, dY d + L).
- the relative position information calculated in this way is recorded in the pattern position recording means 86 that records the position information of the pattern 8.
- the deformation amount calculation means 87 calculates the deformation state of the measurement location and records the deformation state in the deformation amount recording means 88.
- the distance between the captured patterns 8 is maintained at the distance M in FIG. If the distance in FIG. 4 and the distance L in FIG. 5 are simply considered to be equal, the distance between the patterns 8 in FIG. 6 should be L, but in this example, the distance L is not clearly maintained. In this case, the deviation from the distance L means the amount of deformation.
- the deformation amount of the measuring object 7 is calculated by the deformation amount calculation means 87 using the equation (1), assuming that the pattern 8a and 8b are ⁇ abx and ⁇ aby in the X axis direction and the Y axis direction, respectively. Can do.
- the equation (1) represents a general equation in which the distance M and the distance L are not equal.
- the above processing is repeatedly executed until the measurement for a plurality of measurement points is completed.
- the measurement object 7 is determined from the deformation state of the plurality of observation points recorded in the deformation amount recording means 88 in the processing step S8. Generate deformation data for the entire measurement area.
- the distortion rate is further calculated from the deformation amount of the measurement location and recorded in the deformation amount recording means 88.
- the distortion rates in the X-axis direction and the Y-axis direction between the patterns 8a and 8b, ⁇ abx, ⁇ aby are calculated, they can be calculated by the equation (2) using the deformation amounts ⁇ abx, ⁇ aby .
- the distortion shape of the measurement object 7 can also be obtained from the deformation amount or the distortion rate between the four patterns 8.
- Information such as the calculated deformation amount, distortion rate, and distortion shape is recorded in the deformation amount recording means 88.
- FIG. 7 is a diagram illustrating measurement positions of the patterns 8a, 8b, 8c, and 8d when the camera holding housing 4 is tilted.
- the four position detection cameras 3a, 3b, 3c, and 3d are arranged at a distance L from each other in a lattice shape in the X-axis direction and the Y-axis direction.
- FIG. 7 shows the state of the inclination ⁇ y in the Y-axis direction when the position detection cameras 3a and 3b observe the patterns 8a and 8b.
- Equation (3) an error ⁇ ax of the detection position in the X direction of the pattern 8a of the position detection camera 3a and an error ⁇ ay of the detection position in the Y direction caused by the inclination of the camera holding housing 4 are expressed by Equation (3).
- the deformation amount and the distortion rate are obtained from the distance between the two points at the specific position and the change in the distance. Since the position detection cameras 3a and 3b are fixed to the camera holding housing 4, the inclination angles of the position detection cameras 3a and 3b are equal. Therefore, an error in the detected position between the patterns 8a and 8b due to the inclination of the position detection cameras 3a and 3b appears in substantially the same amount in the same direction. For this reason, when the distance between the patterns 8a and 8b is obtained, the difference between the detected position coordinates between the patterns 8a and 8b is obtained.
- Equation 5 The measurement errors ⁇ abx and ⁇ aby of the deformation amounts in the X-axis direction and the Y-axis direction due to the tilt of the camera holding housing 4 are expressed by Equation (5).
- equation 9 sin ⁇ ⁇ ⁇ cos ⁇ 1- ⁇ / 2 tan ⁇ (9) Therefore, the distance between the patterns 8a and 8b, that is, the measurement error of the deformation amount is expressed by the equation (10).
- the tilt angle ⁇ x and theta y camera holding housing 4 about 0.003rad less, i.e., less than about 0.17 degrees
- the measurement error of the deformation amount or the distortion rate of the measuring object 7 due to the tilt of the camera holding housing 4 can be suppressed to 10 ⁇ 5 level or less as a ratio.
- the camera tilt angles ( ⁇ 1bx, ⁇ 1by ) are respectively set to about 10-5 rad or less. In other words, it is necessary to suppress the value to an order of about 5.7 ⁇ 10 ⁇ 4 degrees or less, which is 3 or 4 digits smaller.
- the measurement error of the deformation amount or the distortion rate when the position detection camera 3 is moved and measured at a plurality of observation points is reduced. I understand that I can do it. Further, the measurement error of the deformation amount and the distortion rate caused by the inclination of the position detection camera 3 is obtained by fixing the position detection camera 3 to the camera holding housing 4 so that the distance H between the position detection camera 3 and the measurement object 7 is It can be seen that even when the distance between the position detection camera 3 and the measurement object 7 is increased, the measurement error of the deformation amount and the distortion rate is not affected or is small.
- the deformation measuring device 2 can measure the deformation amount or the distortion rate of the measuring object 7 at a desired position with high accuracy.
- FIG. 8 is an example of a configuration diagram of the sheet conveying mechanism 101 including the deformation measuring device 2.
- a sheet-like or planar measurement object (hereinafter referred to as a sheet S) handled in the present invention is formed in a band shape, and is conveyed by being sandwiched between rollers and sent to a processed portion.
- the deformation is measured by the deformation measuring device 2 of the present invention, and the measurement result is reflected in the machining at the machining portion.
- the sheet transport mechanism 101 is provided with a transport motor 102 for transporting the sheet S and a plurality of rollers (121, 122, 131, 132) driven by the transport motor 102.
- a transport motor 102 for transporting the sheet S and a plurality of rollers (121, 122, 131, 132) driven by the transport motor 102.
- the sheet S that is the measurement object 7 is transported from the left to the right in FIG. 8 by the transport motor 102.
- the application example of the sheet conveying mechanism 101 of the present invention is not limited to this example. In short, anything may be used as long as the deformation measuring device 2 is included in the former stage of processing during the conveyance and the detected deformation is reflected in the later stage of machining.
- the sheet conveyance mechanism 101 shown in the figure is configured to hold the sheet S fixedly, measure the deformation of the sheet S while holding the deformation of the sheet S, and convey the sheet S.
- a pattern forming unit 180 that forms a drawing pattern such as an electrical wiring; a tension blocking unit 120 that is disposed at two locations on the upstream side and the downstream side with respect to the conveyance of the sheet S; It is comprised from the tension control part 130 which controls tension
- the sheet positioning unit 110 includes a sheet or planar deformation measuring device 1.
- the sheet or planar deformation measuring apparatus 1 includes a deformation measuring apparatus 2 that measures the deformation of the sheet S, and a sheet fixing and holding unit 111 that fixes and holds the deformation state of the sheet S before measuring the deformation of the sheet S. .
- the deformation measuring device 2 includes a distance sensor 9 that measures the distance between the camera holding housing 4 and the sheet S, and the distance sensor 9 is fixed to the camera holding housing 4. Can move with. By moving the camera holding housing 4 with the camera holding housing operating means 5, the deformation of the sheet S in the out-of-plane direction can be measured at an arbitrary position.
- the measurement result of the distance sensor 9 is taken in and calculated by the deformation state analyzing means 80, so that not only in-plane deformation data of the sheet S but also three-dimensional deformation including out-of-plane deformation can be measured.
- the deformation state analyzing unit 80 calculates correction data for the formation position of the drawing pattern formed by the pattern forming unit 180 from the deformation state of the sheet S, and sends it to the pattern forming position control unit 184 of the pattern forming unit 180.
- a position calculation unit 90 and a sheet tension calculation mechanism 91 that calculates a tension value to be changed so as to keep the deformation within a predetermined range from the deformation state of the sheet S and transmits the calculated value to the tension adjustment roller position adjustment unit 134 of the tension control unit 130. Have.
- the camera holding case operating means 5 conveniently has the camera holding case vertical operating means 10 that moves not only in parallel to the sheet S surface but also to move vertically with respect to the sheet S surface.
- the movement of the camera holding case 4 by the camera holding case vertical operating means 10 is controlled by the camera holding case position control means 6 (shown in FIG. 2).
- the vertical operation means 10 even if an interference object such as the conveyance roller or the pattern forming unit 180 exists or moves to a position where it interferes with the camera holding housing 4 in the sheet positioning unit 110, Can be avoided by vertically moving the camera holding case 4 by the camera holding case vertical operating means 10.
- the camera holding casing 4 is moved vertically by the camera holding casing vertical operation means 10 and the distance sensor 9 is out of plane. Based on the measurement result of the direction, the pattern 8 can be measured while the distance H between the camera holding housing 4 and the sheet S surface is kept within a predetermined distance.
- the sheet fixing and holding unit 111 may include a sheet fixing and holding unit driving unit 112 that can convey the sheet fixing and holding unit 111 together with the sheet S in a state where the sheet S is fixed and held.
- the sheet fixing and holding unit driving unit 112 can transport the sheet S to an area where the sheet S is processed, such as the pattern forming unit 180, while keeping the measured deformation state of the sheet S.
- the pattern forming unit 180 includes a pattern forming unit 181 that forms a drawing pattern on the sheet S and a pattern formation position control unit 184 that controls the pattern forming unit 181.
- the pattern forming unit 181 includes a pattern forming unit moving mechanism that drives the pattern forming unit 181 and a pattern formation position adjusting unit that adjusts the formation position of the drawing pattern from the pattern forming unit 181.
- the pattern formation position control means 184 controls the pattern formation means moving mechanism and the pattern formation position adjustment means so that a drawing pattern is formed at a predetermined position.
- the tension blocking unit 120 includes a high friction roller 121 whose surface is a high friction unit such as rubber, and a pressure roller 122 that is disposed at a position facing the high friction roller 121 and pinches the sheet S.
- the tension T acting between the sheets S is cut off by the pressure contact portion between the high friction roller 121 and the pressure roller 122.
- the tension T of the sheet S between the two tension blocking units 120 is further increased in the upstream side or the downstream side. It is possible to avoid the influence of the tension of the sheet S in the area of the above.
- the tension control unit 130 includes a tension adjusting roller 131, a guide roller 132, a tension adjusting roller driving unit 133, and a tension adjusting roller position control unit 134.
- the tension adjusting roller 131 is in contact with the sheet S between the pressure contact roller 122 and the guide roller 132 of the adjacent tension blocking unit 120.
- FIG. 9 is a table summarizing a procedure for forming a drawing pattern on the sheet S by the sheet conveying mechanism 101.
- the sheet S is conveyed through each main mechanism.
- the sheet S is first conveyed from the upstream side to the sheet positioning unit 110 through the tension blocking unit 120 and the tension control unit 130 as shown in the sheet S conveyance path indicated by the solid line arrow.
- the sheet S conveyed to the sheet positioning unit 110 is fixed and held by the sheet fixing and holding unit 111 inside.
- the deformation of the sheet S is measured by the deformation measuring device 2 while the sheet S is fixedly held.
- the deformation state analysis means 80 reflects the result of this analysis in the control process.
- the control process here includes a pattern forming position calculation unit 90 and a sheet tension calculation mechanism 91.
- the sheet tension calculating mechanism 91 operates. As indicated by the dotted line information transmission path 200, the sheet S is released from being fixedly held, and the appropriate tension information calculated by the sheet tension calculating mechanism 91 is sent to the tension adjusting roller position control means 134, thereby controlling the tension. The means 130 is adjusted so that an appropriate tension T is applied. In this case, the procedure of fixing and holding the sheet S and measuring the deformation is repeated.
- the sheet S is conveyed to the pattern forming unit 180 while the shape is fixed to the sheet fixing holding unit 111.
- the drawing pattern shape corresponding to the deformation of the sheet S which is the deformation measurement result of the sheet S, is transmitted to the pattern forming position control means 184.
- This line is the output of the pattern formation position calculation unit 90 shown in the information transmission path 300 indicated by the dotted arrow in FIG.
- the function of the pattern formation position calculation unit 90 is to give the position to be processed on the sheet as information on the corrected position corrected in accordance with the amount of deformation.
- the pattern formation position calculation unit 90 can be generally regarded as a sheet position correction calculation unit.
- the pattern formation position control means 184 adjusts the drawing pattern formation position by moving the pattern formation means 181 by the pattern formation means moving mechanism based on the drawing pattern formation information, or draws by the pattern formation position adjustment means. Adjust the pattern formation position.
- the fixing and holding of the sheet fixing portion 111 of the sheet S is released, and the portion where the drawing pattern of the sheet S is formed is conveyed and fixed to the sheet S via the tension blocking unit 120 on the downstream side.
- the part 111 is returned to the sheet positioning part 110.
- the sheet conveying mechanism 101 measures the deformation of the sheet S by the sheet or planar deformation measuring apparatus 1 and conveys the sheet holding the deformation to the pattern forming unit, and sends deformation data.
- the sheet S can be positioned with high accuracy, and the drawing pattern can be formed with high accuracy.
- the tension control unit 130 controls the tension T by adjusting the position of the tension adjusting roller 131.
- a difference in the conveyance speed of the sheet S between the conveyance motors 102 is possible.
- a means for adjusting the tension T can be considered, but the tension control method may be any method.
- the number of sheet fixing and holding units 111 there is no description about the number of sheet fixing and holding units 111, but the number may be any number.
- FIG. 10 is a flowchart showing a process of processing by the sheet conveying mechanism 101 in FIG.
- the sheet conveying method of FIG. 10 is executed by periodic processing of a computer, and a series of procedures of the sheet conveying method of the present invention will be described.
- the drawing pattern forming surface of the sheet S is conveyed to the sheet positioning unit 110, and in the processing step S12, the shape of the drawing pattern forming surface of the sheet S is fixed by the fixed holding unit 111.
- the deformation measuring device 2 measures the deformation of the drawing pattern forming surface after fixing.
- the deformation results of the deformation state in each part of the sheet S are aggregated to create deformation data of the drawing pattern forming surface. The process so far can be implemented using a series of processes in FIG.
- processing step S15 the deformation data in the transport direction and the width direction of the sheet S are compared, and the amount of expansion / contraction due to the tension T of the sheet S is calculated. For example, when the deformation in the transport direction is larger than the deformation in the width direction, there is a high possibility that the tension has an influence, and data on the amount of expansion / contraction at this time is obtained.
- process step S16 it is checked whether the amount of expansion / contraction is in an appropriate range. If it is appropriate, the process proceeds to the next process step S19, and if not appropriate (a state in which the deformation is excessive due to the tension), the process proceeds to process step S17.
- processing step S17 a tension for suppressing the deformation amount within a predetermined range is calculated, and the fixing of the sheet S by the fixing holding unit 111 is released. Further, the calculated tension value is transmitted to the tension control unit 130 to control the tension.
- the measurement and determination from the previous processing step S12 to the processing step S15 are performed again in a state where the tension of the sheet S is appropriately maintained through these processes and the tension of the sheet S is appropriately maintained.
- the amount of deformation under a condition where the tension is appropriate is handled as a new amount of deformation.
- step S19 only the deformation amount of the case where the influence of the tension is within a predetermined range is handled.
- step S ⁇ b> 19 first, the drawing pattern forming surface of the sheet S is conveyed to the pattern forming unit 180. Next, a drawing pattern formation position that matches the deformation obtained from the deformation data of the sheet S is calculated and transmitted to the pattern forming unit 180.
- processing step S20 a drawing pattern is formed on the sheet S in accordance with the drawing pattern forming position in accordance with the deformation.
- the fixing of the sheet S by the sheet fixing holding unit 111 is released in processing step S21, and the sheet S is conveyed. Further, the sheet fixing and holding unit 111 is returned to the sheet positioning unit 110 to prepare for the next deformation measurement.
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Abstract
A deformation measuring method and device and a sheet processing method and device capable of simple and accurate measurement of the amount of deformation in a sheet and further capable of sheet deformation processing are provided. This deformation measuring device, which measures the amount of deformation in an object to be measured that is a sheet whereon a plurality of patterns are inscribed, is characterized by comprising: a camera holding case in which a plurality of cameras to photograph the surface of the sheet object to be measured are fixedly disposed; a camera holding case moving means for moving the camera holding case on a plane parallel to the surface of the sheet object to be measured; a camera holding case position control means for controlling the position of the camera holding case moving means on a plane parallel to the surface of the sheet object to be measured; and a deformation shape analyzing means for calculating the amount of deformation of the sheet object to be measured using information on the position determined by the camera holding case position control means and imaging information photographed by the cameras.
Description
本発明は、シート状もしくは平面状の測定対象の変形を計測する変形計測方法及び装置に関する。更には、変形計測の測定結果を用いて、シートもしくは平面状の測定対象上に、パターン形成などの処理を行うシート処理方法及び装置に関する。
The present invention relates to a deformation measuring method and apparatus for measuring the deformation of a sheet-like or planar measuring object. Furthermore, the present invention relates to a sheet processing method and apparatus for performing processing such as pattern formation on a sheet or a planar measurement object using the measurement result of deformation measurement.
平面状基材、特に厚さの薄いシート部材上において、高精度な位置決めが必要なプロセスでは、平面状基材やシート部材(以下これらを総称して単にシートという)の変形形状を正確に計測することが必須となる。
In a process that requires high-precision positioning on a flat substrate, especially a thin sheet member, the deformed shape of the planar substrate or sheet member (hereinafter collectively referred to as a sheet) is accurately measured. It is essential to do.
更には、シート状部材は、張力などによって容易に形状変形を生じることから、変形を正確に計測し、それに合わせた処理位置の補正を行うことが必要である。特に、微細な電子回路などをシート上に形成するためには、シートの微小変形(歪量で10-4クラス)を正確に計測し、それに合わせた処理位置制御が必須となる。
Furthermore, since the sheet-like member easily deforms due to tension or the like, it is necessary to accurately measure the deformation and correct the processing position accordingly. In particular, in order to form a fine electronic circuit or the like on a sheet, it is indispensable to accurately measure a minute deformation (10-4 class in distortion) of the sheet and control the processing position in accordance with the measurement.
特許文献1から特許文献4は、これらのシートを取り扱う上での測定技術の一例を開示している。
Patent Documents 1 to 4 disclose an example of measurement techniques for handling these sheets.
平面状基材、特に厚さの薄いシート部材は、微小な張力差や変化、さらには前段プロセスによっても、変形を生じる。
∙ Planar substrates, especially thin sheet members, are also deformed by minute tension differences and changes, and even by the previous process.
特に、微細な電子回路などをシート上に形成する装置類においては、10cm~1m程度のパターン内で、1μmオーダの位置合わせが問題となるために、歪量として10-4~10-5程度の変形を計測する必要がある。
In particular, in an apparatus for forming a fine electronic circuit or the like on a sheet, since an alignment of the order of 1 μm is a problem within a pattern of about 10 cm to 1 m, the strain amount is about 10 −4 to 10 −5. It is necessary to measure the deformation.
このレベルの変形は、処理領域に対して均一ではなく、シートに与えられる張力の左右差や前段プロセス(インクジェットなどによる部分液塗布による膨潤変形など)によって、処理領域内部でも差が生じており、これを計測することが、昨今非常に重要となってきている。
This level of deformation is not uniform with respect to the processing area, and there is also a difference inside the processing area due to the difference in tension applied to the sheet and the previous process (swelling deformation due to partial liquid application by inkjet etc.), Measuring this has become very important nowadays.
これ等の課題に対して前述の特許文献1は、処理領域全体の伸びや歪を測定するものであり、局部的(2次元的)シート変形を観測できない。特許文献2は、インクジェットヘッド1つと1つのカメラを1つの移動筺体に固定し移動するものであるが、ヘッド処理領域内部でシートの局所変形は勘案されていない。特許文献3は、特許文献1と同様に処理領域全体の伸びや歪を測定するものであり、局部的(2次元的)シート変形を観測できない。特許文献4は、目的は異なるが幅方向に複数のカメラを配置した特許である。シート全域の変形を計測するためには、特許文献4のように、多数のカメラが必要となるが、装置構成を複雑とし、コストアップにつながる懸念がある。
For these problems, the above-mentioned Patent Document 1 measures the elongation and distortion of the entire processing region and cannot observe local (two-dimensional) sheet deformation. In Patent Document 2, one inkjet head and one camera are fixed and moved to one moving housing, but local deformation of the sheet is not taken into account within the head processing region. Patent Document 3 measures the elongation and distortion of the entire processing area as in Patent Document 1, and cannot observe local (two-dimensional) sheet deformation. Patent Document 4 is a patent in which a plurality of cameras are arranged in the width direction although the purpose is different. In order to measure the deformation of the entire sheet, a large number of cameras are required as in Patent Document 4, but there is a concern that the apparatus configuration is complicated and the cost is increased.
簡単な装置構成でシート全域の変形を計測するためには、特許文献2のように、測定領域内で、カメラを移動させる方式が有効である。しかしながら、この方式では、移動ステージのガイドレールなどの微妙な歪みなどにより、カメラの測定箇所がずれてしまうという問題点を持ち、シート全域での、高精度なシート変形計測を実現することができない。
In order to measure the deformation of the entire sheet area with a simple device configuration, a method of moving the camera within the measurement area as in Patent Document 2 is effective. However, this method has a problem that the measurement position of the camera is shifted due to subtle distortions such as a guide rail of the moving stage, and it is impossible to realize highly accurate sheet deformation measurement over the entire sheet. .
以上のことから本発明では、シートの変形量を簡単、正確に計測し、さらにはシートの変形処理を行うことが可能な変形計測方法および装置、並びにシート処理方法及び装置を提供することを目的とする。
In view of the above, an object of the present invention is to provide a deformation measuring method and apparatus, and a sheet processing method and apparatus capable of easily and accurately measuring the deformation amount of the sheet and further performing the deformation process of the sheet. And
以上のことから本発明では、複数のパターンを記したシート状の測定対象の変形量を計測する変形計測方法であって、シート状の測定対象の表面に平行な面上から、配置位置が固定された複数カメラによりシート状の測定対象を撮影し、撮影した位置の情報とカメラの撮影した撮影情報を用いてシート状の測定対象の変形量を算出することを特徴とする。
From the above, the present invention is a deformation measurement method for measuring the deformation amount of a sheet-like measurement object with a plurality of patterns, and the arrangement position is fixed from a plane parallel to the surface of the sheet-like measurement object. The sheet-like measurement object is photographed by the plurality of cameras, and the deformation amount of the sheet-like measurement object is calculated using the information of the photographed position and the photographing information photographed by the camera.
また本発明では、複数のパターンを記したシート状の測定対象の変形量を計測する変形計測装置であって、シート状の測定対象の表面を撮影する複数のカメラを固定配置しているカメラ保持筺体と、カメラ保持筺体をシート状の測定対象の表面に平行な面上で移動させるカメラ保持筺体移動手段と、カメラ保持筺体移動手段をシート状の測定対象の表面に平行な面上で位置制御するカメラ保持筺体位置制御手段と、カメラ保持筺体位置制御手段が定めた位置の情報とカメラの撮影した撮影情報を用いてシート状の測定対象の変形量を算出する変形状態解析手段とを備えていることを特徴とする。
Further, in the present invention, a deformation measurement apparatus for measuring a deformation amount of a sheet-like measurement object having a plurality of patterns, the camera holding the plurality of cameras for photographing the surface of the sheet-like measurement object fixedly arranged Position control of the camera holding housing moving means for moving the housing and the camera holding housing on a surface parallel to the surface of the sheet-like measurement target, and the camera holding housing moving means on a surface parallel to the surface of the sheet-like measurement target A camera holding housing position control means, and a deformation state analysis means for calculating the deformation amount of the sheet-like measurement object using the position information determined by the camera holding housing position control means and the shooting information photographed by the camera. It is characterized by being.
また本発明では、複数のパターンを記したシート状の測定対象を搬送して、変形量を計測して、シート処理を実行するシート処理方法であって、シート状の測定対象の搬送の過程で、複数のパターンを記したシート状の測定対象の搬送方向の張力を制御し、シート状の測定対象の変形量計測の過程で、シート状の測定対象の表面に平行な面上から、配置位置が固定された複数カメラによりシート状の測定対象を撮影し、撮影した位置の情報とカメラの撮影した撮影情報を用いてシート状の測定対象の変形量を算出し、求めた変形量に応じてシート張力を制御し、求めた変形量に応じてシート位置を修正した修正位置情報を得、シート処理の過程で、修正位置情報に応じた位置に対して所定の処理を実行することを特徴とする。
According to the present invention, there is also provided a sheet processing method for conveying a sheet-shaped measurement object having a plurality of patterns, measuring a deformation amount, and executing sheet processing, in the process of conveying the sheet-shaped measurement object. In the process of measuring the amount of deformation of the sheet-shaped measurement target, the position of the sheet-shaped measurement target with a plurality of patterns is arranged from the plane parallel to the surface of the sheet-shaped measurement target. The sheet-shaped measurement object is photographed by a plurality of cameras with fixed positions, and the deformation amount of the sheet-shaped measurement object is calculated using the information of the photographed position and the photographing information photographed by the camera, and according to the obtained deformation amount Controlling the sheet tension, obtaining corrected position information obtained by correcting the sheet position in accordance with the obtained deformation amount, and performing predetermined processing on the position corresponding to the corrected position information in the course of sheet processing To do.
また本発明では、複数のパターンを記したシート状の測定対象を搬送して、変形量を計測して、シート処理を実行するために、張力制御部と、変形計測部と、シート処理部を備えたシート処理装置であって、張力制御部は、複数のパターンを記したシート状の測定対象の搬送方向の張力を制御する張力調整手段を備え、変形計測部は、シート状の測定対象の表面を撮影する複数のカメラを固定配置しているカメラ保持筺体と、カメラ保持筺体をシート状の測定対象の表面に平行な面上で移動させるカメラ保持筺体移動手段と、カメラ保持筺体移動手段をシート状の測定対象の表面に平行な面上で位置制御するカメラ保持筺体位置制御手段と、カメラ保持筺体位置制御手段が定めた位置の情報とカメラの撮影した撮影情報を用いてシート状の測定対象の変形量を算出する変形状態解析手段と、変形状態解析手段で求めた変形量に応じてシート張力を定め張力調整手段に与えるシート張力演算部と、変形状態解析手段で求めた変形量に応じてシート位置を修正する修正位置情報をシート処理部に与えるシート位置修正演算部を備え、シート処理部は、変形状態解析手段のシート位置修正演算部が求めたシート上の処理位置を定めて所定の処理を実行する処理手段を備えている。
Further, in the present invention, a tension control unit, a deformation measurement unit, and a sheet processing unit are provided to convey a sheet-like measurement target having a plurality of patterns, measure a deformation amount, and execute sheet processing. The tension control unit includes a tension adjusting unit that controls the tension in the conveyance direction of a sheet-like measurement target having a plurality of patterns, and the deformation measurement unit is a sheet-like measurement target. A camera holding housing in which a plurality of cameras for photographing the surface are fixedly arranged, a camera holding housing moving means for moving the camera holding housing on a plane parallel to the surface of the sheet-like measurement object, and a camera holding housing moving means Camera holding housing position control means for controlling the position on a surface parallel to the surface of the sheet-like measuring object, and information on the position determined by the camera holding housing position control means and photographing information taken by the camera Deformation state analysis means for calculating a deformation amount to be fixed, a sheet tension calculation unit that determines a sheet tension according to the deformation amount obtained by the deformation state analysis means and applies the tension adjustment means, and a deformation amount obtained by the deformation state analysis means A sheet position correction calculation unit that supplies correction position information for correcting the sheet position to the sheet processing unit, and the sheet processing unit determines a processing position on the sheet obtained by the sheet position correction calculation unit of the deformation state analysis unit. And processing means for executing predetermined processing.
上記構成によれば、同一筺体内の一組のカメラは、測定カメラ移動時に生ずるガイドレールの微妙な歪みなどによる測定位置ずれは、一組のカメラ間で同一となる。これによって、各カメラの測定位置誤差を、ほぼ打消すことが可能となる。
According to the above configuration, a set of cameras in the same housing has the same measurement position deviation between the set of cameras due to subtle distortions of the guide rail that occur when the measurement camera moves. As a result, the measurement position error of each camera can be almost canceled.
このため、測定領域内で、カメラを動かす場合においても、各部の変形を高精度に計測可能とならしめることを可能とするものである。
For this reason, even when the camera is moved in the measurement area, it is possible to make it possible to measure the deformation of each part with high accuracy.
以下、本発明の実施例について図面を用いて説明する。
Hereinafter, embodiments of the present invention will be described with reference to the drawings.
図1は、本発明の第1実施例に係るシートの変形計測装置2の配置構成図例である。図1に示すように測定対象であるシート7の上部には、変形計測装置2が配置されている。シートの変形を計測する変形計測装置2には、2台以上の位置検出カメラ3と、これらを一体に保持するカメラ保持筐体4が備えられている。また複数台の位置検出カメラ3は、同一のカメラ保持筺体4により、格子状に規定の距離L離れた状態を保つように配置されている。なお本実施例では、カメラ保持筐体4に4台の位置検出カメラ3a、3b、3c、3dが格子状に等間隔で設置されているが、位置検出カメラ3は位置が固定されていれば設置位置は任意であってよい。
FIG. 1 is an example of an arrangement configuration diagram of a sheet deformation measuring device 2 according to a first embodiment of the present invention. As shown in FIG. 1, the deformation measuring device 2 is arranged on the upper portion of the sheet 7 to be measured. The deformation measuring device 2 that measures the deformation of the sheet is provided with two or more position detection cameras 3 and a camera holding housing 4 that integrally holds them. Further, the plurality of position detection cameras 3 are arranged so as to keep a predetermined distance L apart in a lattice shape by the same camera holding housing 4. In this embodiment, four position detection cameras 3a, 3b, 3c, and 3d are installed in a lattice shape at equal intervals in the camera holding housing 4. However, if the position of the position detection camera 3 is fixed, The installation position may be arbitrary.
さらに変形計測装置2には、カメラ保持筐体4を移動するカメラ保持筺体稼動手段5と、カメラ保持筐体4の絶対位置を記録し制御するカメラ保持筐体位置制御手段6(図1には図示せず)が備えられている。カメラ保持筐体稼動手段5とカメラ保持筐体位置制御手段6により、カメラ保持筐体4を所望の位置まで移動制御できる。カメラ保持筺体稼動手段5は、図1のX方向に移動させるための稼動手段5Xと、X方向に直行するY方向に移動させるための稼動手段5Yとで構成され、必要であれば高さ方向の稼動手段5Z(図1には図示せず)を備えてもよい。但し、X、Y方向で定まるXY平面は、測定対象であるシート7の表面に対する水平面とされる。
Further, the deformation measuring device 2 includes a camera holding housing operating means 5 for moving the camera holding housing 4 and a camera holding housing position control means 6 for recording and controlling the absolute position of the camera holding housing 4 (in FIG. 1). (Not shown). The camera holding casing operating means 5 and the camera holding casing position control means 6 can control the movement of the camera holding casing 4 to a desired position. The camera holding housing operating means 5 includes operating means 5X for moving in the X direction in FIG. 1 and operating means 5Y for moving in the Y direction perpendicular to the X direction, and if necessary, in the height direction. The operating means 5Z (not shown in FIG. 1) may be provided. However, the XY plane determined by the X and Y directions is a horizontal plane with respect to the surface of the sheet 7 to be measured.
これに対し変形計測装置2の計測対象であるシートまたは面状体の測定対象7の表面には、測定対象7の位置情報を判別できる複数個のパターン8が形成されている。本実施例では、パターン8の形状が円形状となっているが、三角形状、四角形状、十字形状、文字形状などと形状は任意で、かつ複数個のパターン8間で形状が異なっていても構わない。
On the other hand, a plurality of patterns 8 capable of discriminating position information of the measuring object 7 are formed on the surface of the measuring object 7 of the sheet or the planar body that is the measuring object of the deformation measuring device 2. In this embodiment, the shape of the pattern 8 is circular. However, the shape may be any shape such as a triangular shape, a quadrangular shape, a cross shape, or a character shape, and the shape may be different among the plurality of patterns 8. I do not care.
図2は、変形計測装置2が備えるべき手段や機能の全体構成を示している。この手段や機能は、カメラ3を備えたカメラ保持筺体4、カメラ保持筺体稼働手段5、カメラ保持筺体位置制御手段6、変形状態解析手段80で構成される。なお、変形計測装置2のこれ等機能は、支持枠などにより測定対象7の表面に対向する上部空間に配置される必要があるが、例えば変形状態解析手段80は上部空間とは別の個所に配置されていてもよい。
FIG. 2 shows the overall configuration of means and functions that the deformation measuring device 2 should have. This means and function includes a camera holding case 4 provided with the camera 3, a camera holding case operating means 5, a camera holding case position control means 6, and a deformation state analysis means 80. Note that these functions of the deformation measuring device 2 need to be arranged in the upper space facing the surface of the measuring object 7 by a support frame or the like. For example, the deformation state analyzing means 80 is located in a place different from the upper space. It may be arranged.
これらの構成によれば、カメラ3を搭載するカメラ保持筺体4をカメラ保持筺体稼働手段5により、XY平面上の任意位置に移動させる。移動位置はカメラ保持筺体位置制御手段6により決定される。
According to these configurations, the camera holding housing 4 on which the camera 3 is mounted is moved to an arbitrary position on the XY plane by the camera holding housing operating means 5. The moving position is determined by the camera holding housing position control means 6.
変形状態解析手段80では、当該位置で撮影した複数の位置検出カメラ3の情報を用いて、測定対象7の変形を計測する。この計測のために、変形状態解析手段80は81から89の機能、手段を備えている。
The deformation state analyzing means 80 measures the deformation of the measurement object 7 using information of the plurality of position detection cameras 3 photographed at the position. For this measurement, the deformation state analyzing means 80 has 81 to 89 functions and means.
具体的に述べると、変形状態解析手段80は、測定対象7上に予め形成したパターン8の形状の情報をパターン形状記憶手段81に記憶しており、他方で位置検出カメラ3により撮像した画像をカメラ3から取り込んで撮像画像記録手段82に記録する。ここで、予め形成したパターン8の形状の情報は、歪みや、ひずみを持たないシート7の理想的な状態を反映したものであり、かつ既知の情報である。従ってカメラ3から取り込んだ撮像画像との対比により、歪みや、ひずみを識別可能とする。この識別は以下のように実行される。
Specifically, the deformation state analyzing unit 80 stores information on the shape of the pattern 8 formed in advance on the measurement object 7 in the pattern shape storing unit 81, and on the other hand, an image captured by the position detection camera 3. Captured from the camera 3 and recorded in the captured image recording means 82. Here, the information on the shape of the pattern 8 formed in advance reflects the ideal state of the sheet 7 without distortion or distortion, and is known information. Therefore, distortion and distortion can be identified by comparison with a captured image captured from the camera 3. This identification is performed as follows.
変形状態解析手段80では、パターン形状記憶手段81に記憶したパターン形状をもとに、同一形状のパターン8の中心位置を撮像画像記録手段82に撮像した画像から検出し、撮像した画像の中心位置からのパターン8への距離を画像内パターン位置特定手段83により算出する。
The deformation state analyzing unit 80 detects the center position of the pattern 8 having the same shape from the image captured by the captured image recording unit 82 based on the pattern shape stored in the pattern shape storage unit 81, and the center position of the captured image. The distance to the pattern 8 is calculated by the in-image pattern position specifying means 83.
さらに変形状態解析手段80は、画像内パターン位置特定手段83により算出した画像中心位置からのパターン8の中心位置への距離と、複数台の位置検出カメラ3間の既知の設置距離から、パターン8間の相対位置をパターン位置同定手段84により同定し、撮像時のパターン8の相対位置情報をパターン検出位置記録手段85に記録する。
Further, the deformation state analyzing unit 80 calculates the pattern 8 from the distance from the image center position calculated by the in-image pattern position specifying unit 83 to the center position of the pattern 8 and the known installation distance between the plurality of position detection cameras 3. The relative position information of the pattern 8 at the time of imaging is recorded in the pattern detection position recording means 85.
パターン検出位置記録手段85に記録されたパターン検出位置の情報を用いて変形量演算手段87では変形量を求め、これを変形量記録手段88に記録する。なお、パターン一記録手段86は、カメラ保持筺体位置制御手段6がカメラ保持筺体稼働手段5の位置制御を実行する時の位置情報を入力しており、この位置情報はパターン検出位置記録手段85や変形量記録手段88の記録情報を測定対象7状の位置情報に関連付けて記録するのに利用している。
The deformation amount calculation means 87 obtains the deformation amount using the information of the pattern detection position recorded in the pattern detection position recording means 85 and records this in the deformation amount recording means 88. The pattern one recording means 86 receives position information when the camera holding housing position control means 6 executes position control of the camera holding housing operating means 5, and this position information is the pattern detection position recording means 85 and The recording information of the deformation amount recording means 88 is used for recording in association with the position information of the measurement object 7.
また変形状態解析手段80は、変形量記録手段88に記録された、測定対象7の複数箇所での変形情報をもとに、測定対象7の観測面全体の変形データを生成する測定対象変形解析手段89を備えている。測定対象変形解析手段89より生成された変形データをもとに、測定対象7の局所的な歪みも考慮した測定対象7の高精度な位置決めを可能とする。
The deformation state analyzing unit 80 generates deformation data of the entire observation surface of the measurement target 7 based on the deformation information recorded in the deformation amount recording unit 88 at a plurality of locations of the measurement target 7. Means 89 are provided. Based on the deformation data generated by the measurement object deformation analysis unit 89, the measurement object 7 can be positioned with high accuracy in consideration of local distortion of the measurement object 7.
上記構成により、パターン8の位置情報を同定することが可能である。なお本実施例では、パターン8の検出位置は、パターン8の中心位置としているが、パターン8の特定位置を検出できれば任意の場所でよい。また本実施例では、撮像画像内で撮像画像の中心位置を基準に、撮像画像の中心からのパターン8の中心位置の距離を算出することで、パターン8の画像内の位置を検出しているが、基準となる位置は撮像画像の中心位置でなく任意の位置でよい。
With the above configuration, the position information of the pattern 8 can be identified. In the present embodiment, the detection position of the pattern 8 is the center position of the pattern 8, but may be any place as long as the specific position of the pattern 8 can be detected. In this embodiment, the position of the pattern 8 in the image is detected by calculating the distance of the center position of the pattern 8 from the center of the captured image with reference to the center position of the captured image in the captured image. However, the reference position may be an arbitrary position instead of the center position of the captured image.
図3は、図2の変形計測装置2を用いて変形を計測する過程を示したフロー図である。図3の変形計測方法は、計算機の周期的な処理により実行されるものであり、これにより本発明の変形計測方法の一連の手順を説明する。
FIG. 3 is a flowchart showing a process of measuring deformation using the deformation measuring device 2 of FIG. The deformation measurement method of FIG. 3 is executed by periodic processing of a computer, and thus a series of procedures of the deformation measurement method of the present invention will be described.
図3の最初の処理ステップS1では、カメラ保持筺体4をカメラ保持筺体稼動手段5により所望の位置まで移動させる。ここで所望の位置の意味する事柄について説明しておく。そのためには、その前提としてあらかじめ固定に定められている測定対象7上のパターン8の配置関係と、複数の位置検出カメラ3の配置関係を例示し、理解しておく必要がある。
In the first processing step S1 of FIG. 3, the camera holding housing 4 is moved to a desired position by the camera holding housing operating means 5. Here, what is meant by a desired position will be described. For that purpose, it is necessary to exemplify and understand the arrangement relationship of the pattern 8 on the measurement object 7 and the arrangement relationship of the plurality of position detection cameras 3 fixed in advance as the premise.
このうち測定対象7上のパターン8の配置関係の一例を図4に示している。測定対象7上には予め円形状パターン8a、8b、8c、8dが刻印されている。また、パターン形成時における4つの円形状パターン8a、8b、8c、8dの相対形成位置は、4台の位置検出カメラ3a、3b、3c、3dを測定対象7の面方向へ平行方向に、カメラ保持筺体稼動手段5によりパターン8上に移動させた時に、撮像範囲内に4つのパターン8a、8b、8c、8d全てが同時に収まるような相対位置間隔で形成されている。パターン8の数及びパターン8間の相対位置は上記条件を満たす限り任意である。但し、X軸方向とY軸方向は、それぞれ図1に示すように、測定対象面に平行でかつ互いに直行していることとする。
Among these, an example of the arrangement relationship of the pattern 8 on the measurement object 7 is shown in FIG. Circular patterns 8a, 8b, 8c, and 8d are engraved on the measurement object 7 in advance. Further, the relative formation positions of the four circular patterns 8a, 8b, 8c, and 8d at the time of pattern formation are set so that the four position detection cameras 3a, 3b, 3c, and 3d are parallel to the surface direction of the measuring object 7. They are formed at a relative position interval such that all four patterns 8a, 8b, 8c, and 8d are simultaneously accommodated in the imaging range when moved by the holding housing operating means 5 onto the pattern 8. The number of patterns 8 and the relative positions between the patterns 8 are arbitrary as long as the above conditions are satisfied. However, it is assumed that the X-axis direction and the Y-axis direction are parallel to the measurement target surface and perpendicular to each other, as shown in FIG.
図4に示す本事例におけるパターン形成時のパターン8の位置座標は、パターン8aの位置をX-Y座標上の(X8a、Y8a)とし、他の3つのパターン8b、8c、8dは格子状に、X軸方向及びY軸方向に距離M離れた位置(X8a+M、Y8a)、(X8a、Y8a+M)、(X8a+M、Y8a+M)に形成されているとする。
The position coordinates of the pattern 8 at the time of pattern formation in this example shown in FIG. 4 are such that the position of the pattern 8a is (X 8a , Y 8a ) on the XY coordinates, and the other three patterns 8b, 8c, 8d are lattices Are formed at positions (X 8a + M, Y 8a ), (X 8a , Y 8a + M), (X 8a + M, Y 8a + M) that are separated by a distance M in the X-axis direction and the Y-axis direction. .
他方、複数の位置検出カメラ3の配置関係の一例を図5に示している。本事例では、測定対象7上に位置検出カメラ3がそれぞれ平行に配置している時の位置検出カメラ3の座標が示されている。位置検出カメラ3aの位置座標をX-Y座標上の(X3a、Y3a)とした時、他の3台の位置検出カメラ3b、3c、3dは、(X3a+L、Y3a)、(X3a、Y3a+L)、(X3a+L、Y3a+L)の位置に配置されているとする。
On the other hand, an example of the arrangement relationship of the plurality of position detection cameras 3 is shown in FIG. In this example, the coordinates of the position detection camera 3 when the position detection cameras 3 are arranged in parallel on the measurement object 7 are shown. When the position coordinates of the position detection camera 3a are (X 3a , Y 3a ) on the XY coordinates, the other three position detection cameras 3b, 3c, 3d are (X 3a + L, Y 3a ), ( X 3a , Y 3a + L), (X 3a + L, Y 3a + L).
また図4において、位置検出カメラ3によりシート7の表面を撮影したときの位置検出カメラ3a、3b、3c、3dの視野は、夫々14a、14b、14c、14dの範囲であるとする。
In FIG. 4, it is assumed that the field of view of the position detection cameras 3a, 3b, 3c, and 3d when the surface of the sheet 7 is photographed by the position detection camera 3 is in the range of 14a, 14b, 14c, and 14d, respectively.
パターン8と位置検出カメラ3の上記の配置関係を前提とするときに、複数の位置検出カメラ3の夫々の視野の中にパターン8が入ってくるように位置検出カメラ3を移動させたときの位置状態が、先に述べた所望の位置に移動させたことを意味している。
When the positional relationship between the pattern 8 and the position detection camera 3 is assumed, the position detection camera 3 is moved so that the pattern 8 enters the field of view of each of the plurality of position detection cameras 3. This means that the position state has been moved to the desired position described above.
この所望の位置において、図3の処理ステップS2では複数台の位置検出カメラ3により複数個のパターン8を撮像する。撮像されたパターン8は、図2の変形形状解析手段80に取り込まれる。
At this desired position, a plurality of patterns 8 are imaged by a plurality of position detection cameras 3 in the processing step S2 of FIG. The imaged pattern 8 is taken into the deformed shape analyzing means 80 in FIG.
図6は、4台の位置検出カメラ3a、3b、3c、3dにより撮像した円形状パターン8a、8b、8c、8dを示した模式図例である。図6で、14a、14b、14c、14dは、4台の位置検出カメラ3a、3b、3c、3dの視野(画像)であり、15a、15b、15c、15dは視野の中心位置である。また図6の視野14a、14b、14c、14dの中心15a、15b、15c、15d間の距離は、図5の距離Lであり、例えば円形の視野14a、14b、14c、14dの中にそれぞれ円形状パターン8a、8b、8c、8dが視認されている。
FIG. 6 is a schematic diagram showing circular patterns 8a, 8b, 8c, and 8d captured by four position detection cameras 3a, 3b, 3c, and 3d. In FIG. 6, 14a, 14b, 14c, and 14d are the visual fields (images) of the four position detection cameras 3a, 3b, 3c, and 3d, and 15a, 15b, 15c, and 15d are the central positions of the visual fields. Further, the distance between the centers 15a, 15b, 15c, and 15d of the visual fields 14a, 14b, 14c, and 14d in FIG. 6 is the distance L in FIG. 5, for example, a circle in each of the circular visual fields 14a, 14b, 14c, and 14d. Shape patterns 8a, 8b, 8c, and 8d are visually recognized.
写真撮影後の円形状パターン8a、8b、8c、8d間の距離は、図4の配置関係を理想とし距離Mを保つべきであるが、図6の例では明らかに距離Mが保たれていない。以後の処理では、撮像情報から歪みやひずみを検知していく。
The distance between the circular patterns 8a, 8b, 8c, and 8d after photography should be ideal with the arrangement relationship of FIG. 4 as an ideal distance, but the distance M is clearly not maintained in the example of FIG. . In the subsequent processing, distortion and distortion are detected from the imaging information.
このための画像処理の最初の処理ステップS3では、画像内パターン位置特定手段83により、撮像した画像内の複数個のパターン8の中心位置を検出する。なおこの前提として図6の場合には、撮像した視野14a、14b、14c、14dの中心15a、15b、15c、15dの位置と、中心位置間の距離Lが図5のように知られている。位置検出カメラ3をカメラ保持筺体4に取り付けたときに、この位置関係が成立するようにされている。
In the first processing step S3 of the image processing for this purpose, the center position of the plurality of patterns 8 in the captured image is detected by the in-image pattern position specifying means 83. In this case, in the case of FIG. 6, the positions of the centers 15a, 15b, 15c, and 15d of the captured visual fields 14a, 14b, 14c, and 14d and the distance L between the center positions are known as shown in FIG. . This positional relationship is established when the position detection camera 3 is attached to the camera holding housing 4.
撮像した視野14a、14b、14c、14d内の各パターン8a、8b、8c、8dの中心15a、15b、15c、15dの位置は、例えば図6の左下の位置検出カメラの視野14aで例示したように視野の中心15a位置を原点(0、0)とするX-Y座標の位置として把握される。視野14a、14b、14c、14dの中心15a、15b、15c、15dの位置を夫々の原点(0、0)とするときの、パターン8a、8b、8c、8dの中心位置座標を、それぞれ(dXa、dYa)、(dXb、dYb)、(dXc、dYc)、(dXd、dYd)とする。
The positions of the centers 15a, 15b, 15c, and 15d of the patterns 8a, 8b, 8c, and 8d in the captured visual fields 14a, 14b, 14c, and 14d are as exemplified in the visual field 14a of the lower left position detection camera in FIG. The position of the center of the visual field 15a is grasped as the position of the XY coordinates with the origin (0, 0). When the positions of the centers 15a, 15b, 15c, and 15d of the visual fields 14a, 14b, 14c, and 14d are the origins (0, 0), the center position coordinates of the patterns 8a, 8b, 8c, and 8d are expressed as (dX a , dY a ), (dX b , dY b ), (dX c , dY c ), (dX d , dY d ).
処理ステップS4ではパターン位置同定手段84によりパターン8間の相対位置座標を演算する。処理ステップS5では、求めた相対位置座標をパターン検出位置記録手段85に記録する。この処理は、図4のパターン8a、8b、8c、8dの相互の距離を相対的に把握したものである。
In processing step S4, the relative position coordinates between the patterns 8 are calculated by the pattern position identification means 84. In process step S5, the obtained relative position coordinates are recorded in the pattern detection position recording means 85. This process relatively grasps the mutual distance between the patterns 8a, 8b, 8c, and 8d in FIG.
この相対的位置把握では、例えば視野3aの中心位置をX-Y座標の原点(0、0)として把握されるので、パターン8aの相対位置は(dXa、dYa)である。これに対し、
各視野の中心位置間距離は図5に示した距離Lであるので、8bの相対位置は(dXb+L、dYb)、8cの相対位置は(dXc、dYc+L)、8dの相対位置は(dXd+L、dYd+L)で表される。このようにして算出された相対位置情報がパターン8の位置情報を記録するパターン位置記録手段86に記録される。 In this relative position grasp, for example, since it is understood the central position of thefield 3a as the origin of the X-Y coordinates (0,0), the relative position of the pattern 8a is (dX a, dY a). In contrast,
Since the distance between the center positions of the visual fields is the distance L shown in FIG. 5, the relative position of 8b is (dX b + L, dY b ), the relative position of 8c is (dX c , dY c + L), and the relative position of 8d. The position is represented by (dX d + L, dY d + L). The relative position information calculated in this way is recorded in the pattern position recording means 86 that records the position information of the pattern 8.
各視野の中心位置間距離は図5に示した距離Lであるので、8bの相対位置は(dXb+L、dYb)、8cの相対位置は(dXc、dYc+L)、8dの相対位置は(dXd+L、dYd+L)で表される。このようにして算出された相対位置情報がパターン8の位置情報を記録するパターン位置記録手段86に記録される。 In this relative position grasp, for example, since it is understood the central position of the
Since the distance between the center positions of the visual fields is the distance L shown in FIG. 5, the relative position of 8b is (dX b + L, dY b ), the relative position of 8c is (dX c , dY c + L), and the relative position of 8d. The position is represented by (dX d + L, dY d + L). The relative position information calculated in this way is recorded in the pattern position recording means 86 that records the position information of the pattern 8.
次いで処理ステップS6では変形量演算手段87により測定箇所の変形状態を演算し、変形量記録手段88に変形状態を記録する。ここで、シートに変形が存在しない理想的な状態では、撮影されたパターン8間の距離は図4の距離Mを保つことになる。簡便に図4の距離と図5の距離Lが等しいとして考えると、図6のパターン8間の距離はLであるはずが、この例では明らかに距離Lを保ってはいない。この場合に、距離Lとの偏差が変形量を意味する。
Next, in processing step S 6, the deformation amount calculation means 87 calculates the deformation state of the measurement location and records the deformation state in the deformation amount recording means 88. Here, in an ideal state where there is no deformation in the sheet, the distance between the captured patterns 8 is maintained at the distance M in FIG. If the distance in FIG. 4 and the distance L in FIG. 5 are simply considered to be equal, the distance between the patterns 8 in FIG. 6 should be L, but in this example, the distance L is not clearly maintained. In this case, the deviation from the distance L means the amount of deformation.
このことから、測定対象7の変形量は、パターン8a、8b間では、X軸方向とY軸方向、それぞれδabx、δabyとすると、変形量演算手段87により、(1)式により算出することができる。なお(1)式では距離Mと距離Lが等しくない一般的な式で表している。
[数1]
δabx=dXa+dXb+M-L
δaby=dYa+dYb (1)
同様にして、パターン8aと8cの間の変形量δacx、δacy、8cと8dの間の変形量δcdx、δcdy、8dと8bの間の変形量δdbx、δdbyを算出することができる。 From this, the deformation amount of the measuringobject 7 is calculated by the deformation amount calculation means 87 using the equation (1), assuming that the pattern 8a and 8b are δabx and δaby in the X axis direction and the Y axis direction, respectively. Can do. Note that the equation (1) represents a general equation in which the distance M and the distance L are not equal.
[Equation 1]
δ abx = dX a + dX b + ML
δ aby = dY a + dY b (1)
Similarly, it is possible to calculate the deformation amount δacx between patterns 8a and 8c, [delta] acy, deformation amount δcdx between 8c and 8d, [delta] CDy, 8d deformation amount between the 8b Derutadbx, the [delta] DBY.
[数1]
δabx=dXa+dXb+M-L
δaby=dYa+dYb (1)
同様にして、パターン8aと8cの間の変形量δacx、δacy、8cと8dの間の変形量δcdx、δcdy、8dと8bの間の変形量δdbx、δdbyを算出することができる。 From this, the deformation amount of the measuring
[Equation 1]
δ abx = dX a + dX b + ML
δ aby = dY a + dY b (1)
Similarly, it is possible to calculate the deformation amount δacx between
処理ステップS7では複数の計測箇所についての計測が終了するまで上記の処理を繰り返し実行し、終了後に処理ステップS8において、変形量記録手段88に記録された複数観測箇所の変形状態から、測定対象7の計測エリア全面の変形データを生成する。
In the processing step S7, the above processing is repeatedly executed until the measurement for a plurality of measurement points is completed. After the completion, the measurement object 7 is determined from the deformation state of the plurality of observation points recorded in the deformation amount recording means 88 in the processing step S8. Generate deformation data for the entire measurement area.
また、測定箇所の変形量から、さらに歪み率を算出して変形量記録手段88に記録する。例えばパターン8a、8b間のX軸方向とY軸方向の歪み率、Δabx、Δabyを算出すると、変形量δabx、δabyを用いて(2)式により算出できる。
[数2]
Δabx=(dXa+dXb+M-L)/M
Δaby=(dYa+dYb)/M
同様にして、パターン8aと8cの間の変形量Δacx、Δacy、8cと8dの間の変形量Δcdx、Δcdy、8dと8bの間の変形量Δdbx、Δdbyを算出することができる。 Further, the distortion rate is further calculated from the deformation amount of the measurement location and recorded in the deformation amount recording means 88. For example, if the distortion rates in the X-axis direction and the Y-axis direction between the patterns 8a and 8b, Δabx, Δaby are calculated, they can be calculated by the equation (2) using the deformation amounts δabx, δaby .
[Equation 2]
Δabx = (dX a + dX b + ML) / M
Δ aby = (dY a + dY b ) / M
Similarly, the deformation amounts Δ acx and Δ acy between the patterns 8 a and 8 c, the deformation amounts Δ cdx and Δ cdy between 8 c and 8 d, and the deformation amounts Δ dbx and Δ dby between 8 d and 8 b are calculated. Can do.
[数2]
Δabx=(dXa+dXb+M-L)/M
Δaby=(dYa+dYb)/M
同様にして、パターン8aと8cの間の変形量Δacx、Δacy、8cと8dの間の変形量Δcdx、Δcdy、8dと8bの間の変形量Δdbx、Δdbyを算出することができる。 Further, the distortion rate is further calculated from the deformation amount of the measurement location and recorded in the deformation amount recording means 88. For example, if the distortion rates in the X-axis direction and the Y-axis direction between the
[Equation 2]
Δabx = (dX a + dX b + ML) / M
Δ aby = (dY a + dY b ) / M
Similarly, the deformation amounts Δ acx and Δ acy between the
このようにして、4つのパターン8間の変形量もしくは、歪み率から測定対象7の歪み形状も求めることができる。算出した変形量、歪み率、歪み形状などの情報は変形量記録手段88に記録される。
In this way, the distortion shape of the measurement object 7 can also be obtained from the deformation amount or the distortion rate between the four patterns 8. Information such as the calculated deformation amount, distortion rate, and distortion shape is recorded in the deformation amount recording means 88.
ところで図1の変形計測装置2において、カメラ保持筐体4を移動させると、カメラ保持筺体稼動手段5上のガイドレールなどの歪みなどにより、カメラ保持筐体4は測定対象7の面に対して傾斜することが想定される。カメラ保持筐体4の位置検出カメラ3が傾斜することで、位置検出カメラ3によるパターン8の位置検出結果に誤差が生じる。この問題とその対策を、図7を用いて説明する。
By the way, in the deformation measuring apparatus 2 of FIG. 1, when the camera holding housing 4 is moved, the camera holding housing 4 is moved with respect to the surface of the measuring object 7 due to distortion of the guide rail on the camera holding housing operating means 5. Inclination is assumed. Since the position detection camera 3 of the camera holding housing 4 is inclined, an error occurs in the position detection result of the pattern 8 by the position detection camera 3. This problem and countermeasures will be described with reference to FIG.
図7は、カメラ保持筐体4が傾斜した時のパターン8a、8b、8c、8dの計測位置を示す図である。4台の位置検出カメラ3a、3b、3c、3dは、X軸方向及びY軸方向に格子状にそれぞれ距離L離れ配置されている。カメラ保持筐体4と測定対象7との距離をHとし、カメラ保持筐体4はX軸方向にθx、Y軸方向にθy傾斜しているとする。図7はこのうち、位置検出カメラ3a、3bがパターン8a、8bを観測するときの、Y軸方向の傾斜θyの様子を示している。
FIG. 7 is a diagram illustrating measurement positions of the patterns 8a, 8b, 8c, and 8d when the camera holding housing 4 is tilted. The four position detection cameras 3a, 3b, 3c, and 3d are arranged at a distance L from each other in a lattice shape in the X-axis direction and the Y-axis direction. The distance between the camera holding housing 4 and the measurement object 7 and H, the camera holding housing 4 θx in the X-axis direction, and are theta y inclined in Y-axis direction. FIG. 7 shows the state of the inclination θ y in the Y-axis direction when the position detection cameras 3a and 3b observe the patterns 8a and 8b.
この場合、カメラ保持筐体4の傾斜により生じる、位置検出カメラ3aのパターン8aのX方向における検出位置の誤差δaxとY方向における検出位置の誤差δayは、(3)式で示される。
[数3]
δax=((H+L/2(sinθx+sinθy))tanθy)
+L/2(1-cosθy)
δay=((H+L/2(sinθx+sinθy))tanθx)
+L/2(1-cosθx) (3)
同様に、パターン8bのX軸方向とY軸方向の検出位置の誤差δbx、δbyは、(4)式で示される。
[数4]
δbx=((H+L/2(sinθx-sinθy))tanθy)
-L/2(1-cosθy)
δby=((H+L/2(sinθx-sinθy))tanθx)
+L/2(1-cosθx) (4)
となる。 In this case, an error δ ax of the detection position in the X direction of thepattern 8a of the position detection camera 3a and an error δ ay of the detection position in the Y direction caused by the inclination of the camera holding housing 4 are expressed by Equation (3).
[Equation 3]
δ ax = ((H + L / 2 (sin θx + sin θy)) tan θ y )
+ L / 2 (1-cosθy)
δ ay = ((H + L / 2 (sin θx + sin θy)) tan θ x )
+ L / 2 (1-cosθ x ) (3)
Similarly, error δbx detection position in the X-axis direction and the Y-axis direction of thepattern 8b, [delta] By is represented by equation (4).
[Equation 4]
δ bx = ((H + L / 2 (sin θx−sin θy)) tan θ y )
-L / 2 (1-cosθy)
δ by = ((H + L / 2 (sin θx−sin θy)) tan θ x )
+ L / 2 (1-cos θ x ) (4)
It becomes.
[数3]
δax=((H+L/2(sinθx+sinθy))tanθy)
+L/2(1-cosθy)
δay=((H+L/2(sinθx+sinθy))tanθx)
+L/2(1-cosθx) (3)
同様に、パターン8bのX軸方向とY軸方向の検出位置の誤差δbx、δbyは、(4)式で示される。
[数4]
δbx=((H+L/2(sinθx-sinθy))tanθy)
-L/2(1-cosθy)
δby=((H+L/2(sinθx-sinθy))tanθx)
+L/2(1-cosθx) (4)
となる。 In this case, an error δ ax of the detection position in the X direction of the
[Equation 3]
δ ax = ((H + L / 2 (sin θx + sin θy)) tan θ y )
+ L / 2 (1-cosθy)
δ ay = ((H + L / 2 (sin θx + sin θy)) tan θ x )
+ L / 2 (1-cosθ x ) (3)
Similarly, error δbx detection position in the X-axis direction and the Y-axis direction of the
[Equation 4]
δ bx = ((H + L / 2 (sin θx−sin θy)) tan θ y )
-L / 2 (1-cosθy)
δ by = ((H + L / 2 (sin θx−sin θy)) tan θ x )
+ L / 2 (1-cos θ x ) (4)
It becomes.
この場合に、変形量及び歪み率は、特定位置の2点間の距離及び距離の変化より求められる。位置検出カメラ3a、3bはカメラ保持筐体4に固定されているため、位置検出カメラ3a、3bの傾斜角は等しくなる。そのため、位置検出カメラ3a、3bの傾斜によるパターン8a、8b間の検出位置の誤差は、同じ方向にほぼ等しい量現れる。そのため、パターン8a、8b間の距離を求める場合、パターン8a、8b間の検出位置座標の差分から求めるため、検出位置の誤差はほぼ相殺される。カメラ保持筐体4の傾斜によるX軸方向とY軸方向の変形量の計測誤差δabx及びδabyは、(5)式で示される。
[数5]
δabx=Lsinθytanθy+L(1-cosθy)
δaby=Lsinθytanθx (5)
一方、1台の位置検出カメラ3により、パターン8a、8b間の変形を計測する場合を考える。パターン8aの計測時におけるX軸方向のカメラ傾斜角をθ1ax、Y軸方向のカメラ傾斜角をθ1ayとすると、パターン8aのX軸方向の検出位置の誤差δ1axとY軸方向の検出位置の誤差δ1ayは、(6)式で示される。
[数6]
δ1ax=Hsinθ1ay
δ1ay=Hsinθ1ax (6)
パターン8aの計測後、パターン8bを計測するため、位置検出カメラ3はパターン8b上に移動するため、移動により位置検出カメラ3傾斜角が変化する。パターン8b計測時のX軸方向のカメラ傾斜角をθ1bx、Y軸方向のカメラ傾斜角をθ1byとするとし、パターン8bのX軸方向の検出位置の誤差δ1bxとY軸方向の検出位置の誤差δ1byは、(7)式で示される。
[数7]
δ1bx=Hsinθ1by
δ1by=Hsinθ1bx (7)
よって、1台の位置検出カメラ3により求めたパターン8a、8b間の変形量の計測誤差δ1abxとδ1abyは、(8)式で示される。
[数8]
δ1abx=Hsinθ1ay+Hsinθ1by
δ1acx=Hsinθ1ax+Hsinθ1bx (8)
ここで、カメラ保持筐体4及び位置検出カメラ3の傾斜角が、例えば1度以下と微小な場合を考える。角度θが微小の場合、sinθ、cosθ、tanθは、(9)式で示される。
[数9]
sinθ≒θ
cosθ≒1-θθ/2
tanθ≒θ (9)
よって、パターン8a、8bの距離、つまり変形量の計測誤差は、(10)式で示される。
[数10]
δabx≒3Lθyθy/2
δaby≒ Lθyθx (10)
一方、1台の位置検出カメラ3により測定した時に生じるパターン8a、8b間の距離、つまり変形量の計測誤差は、(11)式で示される。
[数11]
δ1abx≒H(θ1ay+θ1by)
δ1acx≒H(θ1ax+θ1bx) (11)
ここで、変形量もしくは歪み率の計測誤差を定量的に考えてみる。位置検出カメラ3と測定対象7との距離Hとパターン形成時におけるパターン8a、8b間の距離Mが仮に等しいとする。複数台の位置検出カメラ3をカメラ保持筐体4に固定保持した状態で計測すると、カメラ保持筐体4の傾斜角θxとθyを約0.003rad以下、つまり、約0.17度以下に抑えることにより、カメラ保持筐体4が傾斜したことによる測定対象7の変形量もしくは歪み率の計測誤差を比率にして10-5レベル以下に抑えることができる。 In this case, the deformation amount and the distortion rate are obtained from the distance between the two points at the specific position and the change in the distance. Since the position detection cameras 3a and 3b are fixed to the camera holding housing 4, the inclination angles of the position detection cameras 3a and 3b are equal. Therefore, an error in the detected position between the patterns 8a and 8b due to the inclination of the position detection cameras 3a and 3b appears in substantially the same amount in the same direction. For this reason, when the distance between the patterns 8a and 8b is obtained, the difference between the detected position coordinates between the patterns 8a and 8b is obtained. The measurement errors δabx and δ aby of the deformation amounts in the X-axis direction and the Y-axis direction due to the tilt of the camera holding housing 4 are expressed by Equation (5).
[Equation 5]
δabx = Lsinθytanθy + L (1−cosθy)
δaby = Lsinθytanθ x (5)
On the other hand, let us consider a case where the deformation between the patterns 8a and 8b is measured by one position detection camera 3. X-axis direction of the camera inclination angle theta 1ax during measurement of the pattern 8a, when the Y-axis direction of the camera inclination angle theta 1ay, the detection position of the error [delta] 1ax and Y-axis direction of the detection position in the X-axis direction of the pattern 8a The error δ 1ay of is expressed by equation (6).
[Equation 6]
δ1ax = Hsinθ1ay
δ1ay = Hsinθ 1ax (6)
After the measurement of thepattern 8a, the position detection camera 3 moves on the pattern 8b in order to measure the pattern 8b. Therefore, the inclination angle of the position detection camera 3 changes due to the movement. Assume that the camera tilt angle in the X-axis direction during measurement of the pattern 8b is θ 1bx and the camera tilt angle in the Y-axis direction is θ 1by, and the error δ 1bx of the detection position in the X-axis direction of the pattern 8b and the detection position in the Y-axis direction The error δ 1by is expressed by equation (7).
[Equation 7]
δ1bx = Hsinθ1by
δ1by = Hsinθ 1bx (7)
Therefore, the measurement errors δ1abx and δ1aby of the deformation amount between the patterns 8a and 8b obtained by one position detection camera 3 are expressed by the equation (8).
[Equation 8]
δ1abx = Hsinθ1ay + Hsinθ1by
δ1acx = Hsin θ1ax + Hsinθ 1bx (8)
Here, consider a case where the tilt angles of thecamera holding housing 4 and the position detection camera 3 are as small as, for example, 1 degree or less. When the angle θ is small, sin θ, cos θ, and tan θ are expressed by equation (9).
[Equation 9]
sinθ ≒ θ
cos θ≈1-θθ / 2
tan θ≈θ (9)
Therefore, the distance between the patterns 8a and 8b, that is, the measurement error of the deformation amount is expressed by the equation (10).
[Equation 10]
δabx≈3Lθyθy / 2
δaby ≒ Lθyθ x (10)
On the other hand, the distance between the patterns 8a and 8b, that is, the measurement error of the deformation amount, which occurs when measured by one position detection camera 3, is expressed by equation (11).
[Equation 11]
δ1abx≈H (θ1ay + θ1by)
δ1acx≈H (θ1ax + θ1bx ) (11)
Here, the measurement error of the deformation amount or the distortion rate is considered quantitatively. Assume that the distance H between the position detection camera 3 and the measuringobject 7 and the distance M between the patterns 8a and 8b at the time of pattern formation are equal. When measuring the position detection camera 3 multiple while fixedly held on the camera holding housing 4, the tilt angle θx and theta y camera holding housing 4 about 0.003rad less, i.e., less than about 0.17 degrees By suppressing, the measurement error of the deformation amount or the distortion rate of the measuring object 7 due to the tilt of the camera holding housing 4 can be suppressed to 10−5 level or less as a ratio.
[数5]
δabx=Lsinθytanθy+L(1-cosθy)
δaby=Lsinθytanθx (5)
一方、1台の位置検出カメラ3により、パターン8a、8b間の変形を計測する場合を考える。パターン8aの計測時におけるX軸方向のカメラ傾斜角をθ1ax、Y軸方向のカメラ傾斜角をθ1ayとすると、パターン8aのX軸方向の検出位置の誤差δ1axとY軸方向の検出位置の誤差δ1ayは、(6)式で示される。
[数6]
δ1ax=Hsinθ1ay
δ1ay=Hsinθ1ax (6)
パターン8aの計測後、パターン8bを計測するため、位置検出カメラ3はパターン8b上に移動するため、移動により位置検出カメラ3傾斜角が変化する。パターン8b計測時のX軸方向のカメラ傾斜角をθ1bx、Y軸方向のカメラ傾斜角をθ1byとするとし、パターン8bのX軸方向の検出位置の誤差δ1bxとY軸方向の検出位置の誤差δ1byは、(7)式で示される。
[数7]
δ1bx=Hsinθ1by
δ1by=Hsinθ1bx (7)
よって、1台の位置検出カメラ3により求めたパターン8a、8b間の変形量の計測誤差δ1abxとδ1abyは、(8)式で示される。
[数8]
δ1abx=Hsinθ1ay+Hsinθ1by
δ1acx=Hsinθ1ax+Hsinθ1bx (8)
ここで、カメラ保持筐体4及び位置検出カメラ3の傾斜角が、例えば1度以下と微小な場合を考える。角度θが微小の場合、sinθ、cosθ、tanθは、(9)式で示される。
[数9]
sinθ≒θ
cosθ≒1-θθ/2
tanθ≒θ (9)
よって、パターン8a、8bの距離、つまり変形量の計測誤差は、(10)式で示される。
[数10]
δabx≒3Lθyθy/2
δaby≒ Lθyθx (10)
一方、1台の位置検出カメラ3により測定した時に生じるパターン8a、8b間の距離、つまり変形量の計測誤差は、(11)式で示される。
[数11]
δ1abx≒H(θ1ay+θ1by)
δ1acx≒H(θ1ax+θ1bx) (11)
ここで、変形量もしくは歪み率の計測誤差を定量的に考えてみる。位置検出カメラ3と測定対象7との距離Hとパターン形成時におけるパターン8a、8b間の距離Mが仮に等しいとする。複数台の位置検出カメラ3をカメラ保持筐体4に固定保持した状態で計測すると、カメラ保持筐体4の傾斜角θxとθyを約0.003rad以下、つまり、約0.17度以下に抑えることにより、カメラ保持筐体4が傾斜したことによる測定対象7の変形量もしくは歪み率の計測誤差を比率にして10-5レベル以下に抑えることができる。 In this case, the deformation amount and the distortion rate are obtained from the distance between the two points at the specific position and the change in the distance. Since the
[Equation 5]
δabx = Lsinθytanθy + L (1−cosθy)
δaby = Lsinθytanθ x (5)
On the other hand, let us consider a case where the deformation between the
[Equation 6]
δ1ax = Hsinθ1ay
δ1ay = Hsinθ 1ax (6)
After the measurement of the
[Equation 7]
δ1bx = Hsinθ1by
δ1by = Hsinθ 1bx (7)
Therefore, the measurement errors δ1abx and δ1aby of the deformation amount between the
[Equation 8]
δ1abx = Hsinθ1ay + Hsinθ1by
δ1acx = Hsin θ1ax + Hsinθ 1bx (8)
Here, consider a case where the tilt angles of the
[Equation 9]
sinθ ≒ θ
cos θ≈1-θθ / 2
tan θ≈θ (9)
Therefore, the distance between the
[Equation 10]
δabx≈3Lθyθy / 2
δaby ≒ Lθyθ x (10)
On the other hand, the distance between the
[Equation 11]
δ1abx≈H (θ1ay + θ1by)
δ1acx≈H (θ1ax + θ1bx ) (11)
Here, the measurement error of the deformation amount or the distortion rate is considered quantitatively. Assume that the distance H between the position detection camera 3 and the measuring
一方、1台の位置検出カメラ3により歪み計測をした場合を考える。位置検出カメラ3の移動量はパターン8a、8b間の距離Mとほぼ等しいと考えられるので、それをもとに計測誤差を計算する。この場合、測定対象7の変形量または歪み率の計測誤差を、比率にして10-5レベル以下に抑えるためには、カメラ傾斜角(θ1bx、θ1by)をそれぞれ、約10-5rad以下に、つまり、約5.7×10-4度以下とオーダにして3、4桁小さな値に抑える必要がある。
On the other hand, a case where distortion is measured by one position detection camera 3 will be considered. Since the movement amount of the position detection camera 3 is considered to be substantially equal to the distance M between the patterns 8a and 8b, the measurement error is calculated based on that. In this case, in order to suppress the measurement error of the deformation amount or the distortion rate of the measurement object 7 to a level of 10-5 or less, the camera tilt angles (θ1bx, θ1by ) are respectively set to about 10-5 rad or less. In other words, it is necessary to suppress the value to an order of about 5.7 × 10 −4 degrees or less, which is 3 or 4 digits smaller.
ここから、カメラ保持筐体4に複数台の位置検出カメラ3を固定保持することで、複数の観測点で、位置検出カメラ3を移動させ計測したときの変形量または歪み率の計測誤差を小さくできることがわかる。また、位置検出カメラ3の傾斜により生じる変形量と歪み率の計測誤差は、カメラ保持筐体4に位置検出カメラ3を固定保持することで、位置検出カメラ3と測定対象7間の距離Hの影響を受けなくなり、位置検出カメラ3と測定対象7間との距離が離れた場合においても変形量及び歪み率の計測誤差に影響しない、または少ないことがわかる。
From this point, by fixing and holding a plurality of position detection cameras 3 on the camera holding housing 4, the measurement error of the deformation amount or the distortion rate when the position detection camera 3 is moved and measured at a plurality of observation points is reduced. I understand that I can do it. Further, the measurement error of the deformation amount and the distortion rate caused by the inclination of the position detection camera 3 is obtained by fixing the position detection camera 3 to the camera holding housing 4 so that the distance H between the position detection camera 3 and the measurement object 7 is It can be seen that even when the distance between the position detection camera 3 and the measurement object 7 is increased, the measurement error of the deformation amount and the distortion rate is not affected or is small.
よって、変形計測装置2により、所望位置で測定対象7の変形量または歪み率を高精度に計測できる。
Therefore, the deformation measuring device 2 can measure the deformation amount or the distortion rate of the measuring object 7 at a desired position with high accuracy.
図8は、変形計測装置2を含むシート搬送機構101の構成図の例である。本発明で取り扱うシート状もしくは平面状の測定対象(以下シートSという)は、帯状に形成されており、ローラに挟まれて搬送され、加工部分に送られる。また加工部分に送られる前に本発明の変形計測装置2により変形を計測され、計測結果が加工部分での加工に反映される。このため、シート搬送機構101には、シートSを搬送する搬送モータ102及び
搬送モータ102によって駆動されるローラ(121、122、131、132)が複数台備え付けられている。図8のシート搬送機構101において、測定対象7であるシートSは、搬送モータ102によって、図8中の左から右へ搬送される。なお、本発明のシート搬送機構101の適用事例はこの例に限らない。要するに搬送の途中、加工の前段に変形計測装置2を含み、その検出した変形を後段の加工に反映させるものであれば何でもよい。 FIG. 8 is an example of a configuration diagram of thesheet conveying mechanism 101 including the deformation measuring device 2. A sheet-like or planar measurement object (hereinafter referred to as a sheet S) handled in the present invention is formed in a band shape, and is conveyed by being sandwiched between rollers and sent to a processed portion. Before being sent to the machining portion, the deformation is measured by the deformation measuring device 2 of the present invention, and the measurement result is reflected in the machining at the machining portion. For this reason, the sheet transport mechanism 101 is provided with a transport motor 102 for transporting the sheet S and a plurality of rollers (121, 122, 131, 132) driven by the transport motor 102. In the sheet transport mechanism 101 in FIG. 8, the sheet S that is the measurement object 7 is transported from the left to the right in FIG. 8 by the transport motor 102. The application example of the sheet conveying mechanism 101 of the present invention is not limited to this example. In short, anything may be used as long as the deformation measuring device 2 is included in the former stage of processing during the conveyance and the detected deformation is reflected in the later stage of machining.
搬送モータ102によって駆動されるローラ(121、122、131、132)が複数台備え付けられている。図8のシート搬送機構101において、測定対象7であるシートSは、搬送モータ102によって、図8中の左から右へ搬送される。なお、本発明のシート搬送機構101の適用事例はこの例に限らない。要するに搬送の途中、加工の前段に変形計測装置2を含み、その検出した変形を後段の加工に反映させるものであれば何でもよい。 FIG. 8 is an example of a configuration diagram of the
図示のシート搬送機構101は、シートSを固定保持し、シートSの変形を保持したままシートSの変形を計測し搬送するシート位置決め部110と、シート位置決め部110の後段に位置し絶縁膜や電気配線などの描画パターンを形成するパターン形成部180と、シートSの搬送に対し上流側と下流側の2箇所に配置されシートSの張力をその前後で遮断する張力遮断部120と、シートSの張力Tを制御する張力制御部130から構成されている。
The sheet conveyance mechanism 101 shown in the figure is configured to hold the sheet S fixedly, measure the deformation of the sheet S while holding the deformation of the sheet S, and convey the sheet S. A pattern forming unit 180 that forms a drawing pattern such as an electrical wiring; a tension blocking unit 120 that is disposed at two locations on the upstream side and the downstream side with respect to the conveyance of the sheet S; It is comprised from the tension control part 130 which controls tension | tensile_strength T of.
シート位置決め部110は、シートまたは面状体の変形計測装置1を備える。シートまたは面状体の変形計測装置1は、シートSの変形を計測する変形計測装置2を有するとともに、シートSの変形計測前にシートSの変形状態を固定保持するシート固定保持部111を有する。
The sheet positioning unit 110 includes a sheet or planar deformation measuring device 1. The sheet or planar deformation measuring apparatus 1 includes a deformation measuring apparatus 2 that measures the deformation of the sheet S, and a sheet fixing and holding unit 111 that fixes and holds the deformation state of the sheet S before measuring the deformation of the sheet S. .
本実施例では、変形計測装置2は、カメラ保持筐体4とシートSとの距離を測定する距離センサ9を有するとともに、距離センサ9はカメラ保持筐体4に固定され、カメラ保持筐体4とともに移動できる。カメラ保持筐体4をカメラ保持筺体稼動手段5で動かすことで、任意の位置でシートSの面外方向の変形を計測できる。距離センサ9の計測結果を、変形状態解析手段80に取り込み演算させることで、シートSの面内変形のデータだけでなく、面外変形も含めた3次元の変形を計測することができる。
In this embodiment, the deformation measuring device 2 includes a distance sensor 9 that measures the distance between the camera holding housing 4 and the sheet S, and the distance sensor 9 is fixed to the camera holding housing 4. Can move with. By moving the camera holding housing 4 with the camera holding housing operating means 5, the deformation of the sheet S in the out-of-plane direction can be measured at an arbitrary position. The measurement result of the distance sensor 9 is taken in and calculated by the deformation state analyzing means 80, so that not only in-plane deformation data of the sheet S but also three-dimensional deformation including out-of-plane deformation can be measured.
また、変形状態解析手段80は、シートSの変形状態からパターン形成部180で形成する描画パターンの形成位置の補正データを演算し、パターン形成部180のパターン形成位置制御手段184に送付するパターン形成位置演算部90と、シートSの変形状態から変形を所定範囲内に留めるよう変更する張力の値を演算し、張力制御部130の張力調整ローラ位置調整手段134に伝達するシート張力演算機構91を有する。
Further, the deformation state analyzing unit 80 calculates correction data for the formation position of the drawing pattern formed by the pattern forming unit 180 from the deformation state of the sheet S, and sends it to the pattern forming position control unit 184 of the pattern forming unit 180. A position calculation unit 90 and a sheet tension calculation mechanism 91 that calculates a tension value to be changed so as to keep the deformation within a predetermined range from the deformation state of the sheet S and transmits the calculated value to the tension adjustment roller position adjustment unit 134 of the tension control unit 130. Have.
カメラ保持筐体稼動手段5は、シートS面に平行移動するだけでなく、シートS面に対し垂直移動せしめるカメラ保持筐体垂直稼動手段10を有するのが好都合である。カメラ保持筐体垂直稼動手段10によるカメラ保持筐体4の移動は、カメラ保持筐体位置制御手段6(図2に図示)によって制御される。垂直稼働手段10を備えることで、シート位置決め部110内のカメラ保持筐体4と干渉する位置に搬送ローラやパターン形成部180などの干渉物が存在または移動しても、カメラ保持筐体4との干渉をカメラ保持筐体垂直稼動手段10によってカメラ保持筐体4を垂直移動することで回避できる。また、シートSの搬送経路により、シートS面の高さが異なる場所が存在しても、カメラ保持筐体垂直稼動手段10により、カメラ保持筐体4を垂直移動させ、距離センサ9の面外方向の計測結果をもとに、カメラ保持筐体4とシートS面との距離Hを所定距離内に保ったままパターン8を計測することが可能となる。
The camera holding case operating means 5 conveniently has the camera holding case vertical operating means 10 that moves not only in parallel to the sheet S surface but also to move vertically with respect to the sheet S surface. The movement of the camera holding case 4 by the camera holding case vertical operating means 10 is controlled by the camera holding case position control means 6 (shown in FIG. 2). By providing the vertical operation means 10, even if an interference object such as the conveyance roller or the pattern forming unit 180 exists or moves to a position where it interferes with the camera holding housing 4 in the sheet positioning unit 110, Can be avoided by vertically moving the camera holding case 4 by the camera holding case vertical operating means 10. Further, even if there is a place where the height of the sheet S surface is different depending on the conveyance path of the sheet S, the camera holding casing 4 is moved vertically by the camera holding casing vertical operation means 10 and the distance sensor 9 is out of plane. Based on the measurement result of the direction, the pattern 8 can be measured while the distance H between the camera holding housing 4 and the sheet S surface is kept within a predetermined distance.
シート固定保持部111は、シートSを固定保持した状態で、シートSとともにシート固定保持部111を搬送できるシート固定保持部駆動手段112を備えるのがよい。シート固定保持部駆動手段112によって、計測したシートSの変形状態を保ったまま、パターン形成部180などのシートSを処理するエリアへ搬送できる。
The sheet fixing and holding unit 111 may include a sheet fixing and holding unit driving unit 112 that can convey the sheet fixing and holding unit 111 together with the sheet S in a state where the sheet S is fixed and held. The sheet fixing and holding unit driving unit 112 can transport the sheet S to an area where the sheet S is processed, such as the pattern forming unit 180, while keeping the measured deformation state of the sheet S.
パターン形成部180は、シートSに描画パターンを形成するパターン形成手段181とパターン形成手段181を制御するパターン形成位置制御手段184を有する。なおパターン形成手段181には、パターン形成手段181を駆動するパターン形成手段移動機構と、パターン形成手段181からの描画パターンの形成位置を調整するパターン形成位置調整手段とが含まれる。パターン形成位置制御手段184は、所定の位置に描画パターンが形成されるように、パターン形成手段移動機構とパターン形成位置調整手段を制御する。
The pattern forming unit 180 includes a pattern forming unit 181 that forms a drawing pattern on the sheet S and a pattern formation position control unit 184 that controls the pattern forming unit 181. The pattern forming unit 181 includes a pattern forming unit moving mechanism that drives the pattern forming unit 181 and a pattern formation position adjusting unit that adjusts the formation position of the drawing pattern from the pattern forming unit 181. The pattern formation position control means 184 controls the pattern formation means moving mechanism and the pattern formation position adjustment means so that a drawing pattern is formed at a predetermined position.
張力遮断部120は、表面が例えばゴム等の高摩擦部で成る高摩擦ローラ121と、高摩擦ローラ121に対抗した位置に配置されシートSを狭持する圧接ローラ122を有する。これら高摩擦ローラ121と圧接ローラ122による圧接部によって、シートS間に作用する張力Tが遮断される。図8のように、張力遮断部120をシート搬送機構101の上流側と下流側にそれぞれ備えることにより、2つの張力遮断部120間におけるシートSの張力Tは、更に上流側もしくは下流側の他の領域のシートSの張力の影響を受けなくさせることができる。
The tension blocking unit 120 includes a high friction roller 121 whose surface is a high friction unit such as rubber, and a pressure roller 122 that is disposed at a position facing the high friction roller 121 and pinches the sheet S. The tension T acting between the sheets S is cut off by the pressure contact portion between the high friction roller 121 and the pressure roller 122. As shown in FIG. 8, by providing the tension blocking unit 120 on the upstream side and the downstream side of the sheet conveying mechanism 101, the tension T of the sheet S between the two tension blocking units 120 is further increased in the upstream side or the downstream side. It is possible to avoid the influence of the tension of the sheet S in the area of the above.
張力制御部130は、張力調整ローラ131と、ガイドローラ132と、張力調整ローラ駆動手段133と張力調整ローラ位置制御手段134を有する。隣接した張力遮断部120の圧接ローラ122とガイドローラ132間のシートSに、張力調整ローラ131が接触している。張力調整ローラ131を、張力調整ローラ位置制御手段134により、規定の張力Tがかかるよう張力調整ローラ駆動手段133により張力調整ローラ131を動かすことで、シートSに作用する張力Tを任意に調整することが可能となっている。
The tension control unit 130 includes a tension adjusting roller 131, a guide roller 132, a tension adjusting roller driving unit 133, and a tension adjusting roller position control unit 134. The tension adjusting roller 131 is in contact with the sheet S between the pressure contact roller 122 and the guide roller 132 of the adjacent tension blocking unit 120. By adjusting the tension adjusting roller 131 by the tension adjusting roller driving means 133 so that the prescribed tension T is applied by the tension adjusting roller position control means 134, the tension T acting on the sheet S is arbitrarily adjusted. It is possible.
以下、本実施例におけるシート搬送機構101の動作の説明をする。図9は、シート搬送機構101によるシートSへの描画パターン形成の手順についてまとめた表である。図9の実線矢印の順に、シートSは各主要機構を通り搬送される。
Hereinafter, the operation of the sheet conveying mechanism 101 in this embodiment will be described. FIG. 9 is a table summarizing a procedure for forming a drawing pattern on the sheet S by the sheet conveying mechanism 101. In the order of the solid arrows in FIG. 9, the sheet S is conveyed through each main mechanism.
シートSは、実線矢印のシートS搬送経路に示すように、まず上流側から張力遮断部120と、張力制御部130を通り、シート位置決め部110に搬送される。
The sheet S is first conveyed from the upstream side to the sheet positioning unit 110 through the tension blocking unit 120 and the tension control unit 130 as shown in the sheet S conveyance path indicated by the solid line arrow.
シート位置決め部110に搬送されたシートSは、その内部のシート固定保持部111により固定保持される。そしてシートSを固定保持した状態で、シートSの変形を変形計測装置2により計測する。変形状態解析手段80では、この解析の結果を制御処理に反映させる。ここでの制御処理はパターン形成位置演算部90によるものと、シート張力演算機構91によるものとがある。
The sheet S conveyed to the sheet positioning unit 110 is fixed and held by the sheet fixing and holding unit 111 inside. The deformation of the sheet S is measured by the deformation measuring device 2 while the sheet S is fixedly held. The deformation state analysis means 80 reflects the result of this analysis in the control process. The control process here includes a pattern forming position calculation unit 90 and a sheet tension calculation mechanism 91.
解析の結果、シートSにかかる張力TによってシートSが所定形状より大きく形状が異なると判断した場合は、シート張力演算機構91が働く。点線矢印の情報伝達経路200に示すように、シートSの固定保持を解除し、シート張力演算機構91により演算された適正張力の情報を、張力調整ローラ位置制御手段134に送ることで、張力制御手段部130で、適正な張力Tがかかるようを調整する。この場合、シートSを固定保持し変形を計測する手順を繰り返す。
As a result of the analysis, when it is determined that the sheet S is larger than the predetermined shape due to the tension T applied to the sheet S, the sheet tension calculating mechanism 91 operates. As indicated by the dotted line information transmission path 200, the sheet S is released from being fixedly held, and the appropriate tension information calculated by the sheet tension calculating mechanism 91 is sent to the tension adjusting roller position control means 134, thereby controlling the tension. The means 130 is adjusted so that an appropriate tension T is applied. In this case, the procedure of fixing and holding the sheet S and measuring the deformation is repeated.
シートSの変形計測かつ張力制御を終えた後、シートSは、シート固定保持部111に形状を固定されたまま、パターン形成部180に搬送される。またシートSの描画パターン形成前に、シートSの変形計測結果であるシートSの変形に合わせた描画パターンの形状を、パターン形成位置制御手段184に伝達する。このラインが図9点線矢印の情報伝達経路300に示されたパターン形成位置演算部90の出力である。このパターン形成位置演算部90の機能は、要するにシート上の加工処理すべき位置を、変形量に応じて修正した修正位置の情報として与えたものである。このため、パターン形成位置演算部90は、一般にはシート位置修正演算部と捉えることができる。
After finishing the deformation measurement and tension control of the sheet S, the sheet S is conveyed to the pattern forming unit 180 while the shape is fixed to the sheet fixing holding unit 111. Before the drawing pattern is formed on the sheet S, the drawing pattern shape corresponding to the deformation of the sheet S, which is the deformation measurement result of the sheet S, is transmitted to the pattern forming position control means 184. This line is the output of the pattern formation position calculation unit 90 shown in the information transmission path 300 indicated by the dotted arrow in FIG. In short, the function of the pattern formation position calculation unit 90 is to give the position to be processed on the sheet as information on the corrected position corrected in accordance with the amount of deformation. For this reason, the pattern formation position calculation unit 90 can be generally regarded as a sheet position correction calculation unit.
パターン形成位置制御手段184は、その描画パターン形成情報をもとに、パターン形成手段移動機構によりパターン形成手段181を移動させることで描画パターンの形成位置を調整、あるいは、パターン形成位置調整手段で描画パターンの形成位置を調整する。
The pattern formation position control means 184 adjusts the drawing pattern formation position by moving the pattern formation means 181 by the pattern formation means moving mechanism based on the drawing pattern formation information, or draws by the pattern formation position adjustment means. Adjust the pattern formation position.
描画パターン形成後、シートSのシート固定保持部111の固定保持を解除し、シートSの描画パターンを形成した部分を下流側の張力遮断部120を介し、シートSを搬送しつつ、シート固定保持部111をシート位置決め部110まで戻す。
After the drawing pattern is formed, the fixing and holding of the sheet fixing portion 111 of the sheet S is released, and the portion where the drawing pattern of the sheet S is formed is conveyed and fixed to the sheet S via the tension blocking unit 120 on the downstream side. The part 111 is returned to the sheet positioning part 110.
以上の操作を繰り返すことで、シート搬送機構101において、シートまたは面状体の変形計測装置1によりシートSの変形を計測しパターン形成部に変形を保持したシートを搬送し、また変形データを送ることで、高精度にシートSを位置決めし、描画パターンを高精度に形成することができる。
By repeating the above operations, the sheet conveying mechanism 101 measures the deformation of the sheet S by the sheet or planar deformation measuring apparatus 1 and conveys the sheet holding the deformation to the pattern forming unit, and sends deformation data. Thus, the sheet S can be positioned with high accuracy, and the drawing pattern can be formed with high accuracy.
本実施例では、張力制御部130において、張力Tを張力調整ローラ131の位置調整により制御しているが、他の張力調整手段として、例えば、各搬送モータ102間でシートSの搬送速度に差を持たせ、張力Tを調整する手段等も考えられるが、張力制御方法は任意の方法でよい。
In this embodiment, the tension control unit 130 controls the tension T by adjusting the position of the tension adjusting roller 131. However, as another tension adjusting unit, for example, a difference in the conveyance speed of the sheet S between the conveyance motors 102 is possible. A means for adjusting the tension T can be considered, but the tension control method may be any method.
本実施例では、シート固定保持部111の数について記述はないが、数は任意の数でよい。
In this embodiment, there is no description about the number of sheet fixing and holding units 111, but the number may be any number.
なお図10は、図8のシート搬送機構101による処理の過程を示したフロー図である。図10のシート搬送方法は、計算機の周期的な処理により実行されるものであり、これにより本発明のシート搬送方法の一連の手順を説明する。
FIG. 10 is a flowchart showing a process of processing by the sheet conveying mechanism 101 in FIG. The sheet conveying method of FIG. 10 is executed by periodic processing of a computer, and a series of procedures of the sheet conveying method of the present invention will be described.
図10の最初の処理ステップS11では、シートSの描画パターン形成面をシート位置決め部110まで搬送し、処理ステップS12ではシートSの描画パターン形成面の形状を固定保持部111で固定する。処理ステップS13では固定後に変形計測装置2により、描画パターン形成面の変形を計測する。また処理ステップS14ではシートS各部における変形状態の計測結果を集約して、描画パターン形成面の変形データを作成する。ここまでの処理は、図3の一連の処理を利用して実施することができる。
In the first processing step S11 of FIG. 10, the drawing pattern forming surface of the sheet S is conveyed to the sheet positioning unit 110, and in the processing step S12, the shape of the drawing pattern forming surface of the sheet S is fixed by the fixed holding unit 111. In processing step S13, the deformation measuring device 2 measures the deformation of the drawing pattern forming surface after fixing. In processing step S14, the deformation results of the deformation state in each part of the sheet S are aggregated to create deformation data of the drawing pattern forming surface. The process so far can be implemented using a series of processes in FIG.
処理ステップS15では、シートSの搬送方向と幅方向の変形データを比較して、シートSの張力Tによる伸縮量を算出する。例えば、搬送方向の変形が幅方向の変形に対して大きい場合に、張力が影響している可能性大であり、この時の伸縮量のデータを求める。処理ステップS16では、伸縮量が適正範囲か確認し、適正であれば次の処理ステップS19に移り、適正でない(張力により変形が過大になっている状態)場合には、処理ステップS17に移る。
In processing step S15, the deformation data in the transport direction and the width direction of the sheet S are compared, and the amount of expansion / contraction due to the tension T of the sheet S is calculated. For example, when the deformation in the transport direction is larger than the deformation in the width direction, there is a high possibility that the tension has an influence, and data on the amount of expansion / contraction at this time is obtained. In process step S16, it is checked whether the amount of expansion / contraction is in an appropriate range. If it is appropriate, the process proceeds to the next process step S19, and if not appropriate (a state in which the deformation is excessive due to the tension), the process proceeds to process step S17.
処理ステップS17では、変形量を所定範囲内に抑制するための張力を算出し、固定保持部111によるシートSの固定を解除する。さらに、算出した張力の値を張力制御部130に伝達して張力を制御する。これ等の処理を通じてシートSの張力が適正に保たれ、シートSの張力が適正に保たれた状態で、先の処理ステップS12から処理ステップS15の計測と判断を再実行する。張力が適正な条件下での変形量を新たな変形量として取り扱う。
In processing step S17, a tension for suppressing the deformation amount within a predetermined range is calculated, and the fixing of the sheet S by the fixing holding unit 111 is released. Further, the calculated tension value is transmitted to the tension control unit 130 to control the tension. The measurement and determination from the previous processing step S12 to the processing step S15 are performed again in a state where the tension of the sheet S is appropriately maintained through these processes and the tension of the sheet S is appropriately maintained. The amount of deformation under a condition where the tension is appropriate is handled as a new amount of deformation.
この結果、処理ステップS19以降の処理では、張力の影響が所定の範囲内にあるケースの変形量のみが取り扱われる。具体的な処理ステップS19の処理では、まずシートSの描画パターン形成面をパターン形成部180に搬送する。次いで、シートSの変形データから求めた変形に合わせた描画パターンの形成位置を演算して、パターン形成部180に伝達する。
As a result, in the processing after processing step S19, only the deformation amount of the case where the influence of the tension is within a predetermined range is handled. In the specific processing of step S <b> 19, first, the drawing pattern forming surface of the sheet S is conveyed to the pattern forming unit 180. Next, a drawing pattern formation position that matches the deformation obtained from the deformation data of the sheet S is calculated and transmitted to the pattern forming unit 180.
処理ステップS20では、変形に合わせた描画パターンの形成位置に応じてシートSに描画パターンを形成する。形成後は、処理ステップS21においてシート固定保持部111によるシートSの固定を解除しシートSを搬送する。またシート固定保持部111をシート位置決め部110に戻し、次の変形計測に備える。
In processing step S20, a drawing pattern is formed on the sheet S in accordance with the drawing pattern forming position in accordance with the deformation. After the formation, the fixing of the sheet S by the sheet fixing holding unit 111 is released in processing step S21, and the sheet S is conveyed. Further, the sheet fixing and holding unit 111 is returned to the sheet positioning unit 110 to prepare for the next deformation measurement.
1:シートまたは面状体の変形計測装置,2:変形計測装置,3:位置検出カメラ,4:カメラ保持筺体,5:カメラ保持筺体稼動手段,6:カメラ保持筺体位置制御手段,7:測定対象,8:パターン,9:距離センサ,10:カメラ保持筐体垂直移動手段,80:変形状態解析手段,81:パターン形状記憶手段,82:撮像画像記録手段,83:画像内パターン位置特定手段,84:パターン位置同定手段,85:パターン検出位置記録手段,86:パターン位置記録手段,87:変形量演算手段,88:変形量記録手段,89:測定対象変形解析手段,90:パターン形成位置演算部,91:シート張力演算機構,101:シート搬送機構,102:搬送モータ,110:シート位置決め部,111:シート固定保持部,112:シート固定保持駆動手段,120:張力遮断部,121:高摩擦ローラ,122:圧接ローラ,130:張力制御部,131:張力調整ローラ,132:ガイドローラ,133:張力調整ローラ駆動手段,134:張力調整ローラ位置制御手段,180:パターン形成部,181:パターン形成手段,184:パターン形成位置制御手段,S:シート
DESCRIPTION OF SYMBOLS 1: Deformation measuring device of sheet | seat or planar object, 2: Deformation measuring device, 3: Position detection camera, 4: Camera holding housing, 5: Camera holding housing operating means, 6: Camera holding housing position control means, 7: Measurement Target: 8: Pattern, 9: Distance sensor, 10: Camera holding case vertical movement means, 80: Deformation state analysis means, 81: Pattern shape storage means, 82: Captured image recording means, 83: Pattern position specifying means in image , 84: Pattern position identification means, 85: Pattern detection position recording means, 86: Pattern position recording means, 87: Deformation amount calculation means, 88: Deformation amount recording means, 89: Measurement object deformation analysis means, 90: Pattern formation position Calculation unit, 91: sheet tension calculation mechanism, 101: sheet conveyance mechanism, 102: conveyance motor, 110: sheet positioning unit, 111: sheet fixing and holding unit, 112: paper 120: tension blocking unit, 121: high friction roller, 122: pressure roller, 130: tension control unit, 131: tension adjusting roller, 132: guide roller, 133: tension adjusting roller driving unit, 134: Tension adjusting roller position control means, 180: pattern forming unit, 181: pattern forming means, 184: pattern forming position control means, S: sheet
Claims (18)
- 複数のパターンを記したシート状の測定対象の変形量を計測する変形計測方法であって、
前記シート状の測定対象の表面に平行な面上から、配置位置が固定された複数カメラにより前記シート状の測定対象を撮影し、撮影した位置の情報と前記カメラの撮影した撮影情報を用いて前記シート状の測定対象の変形量を算出することを特徴とする変形計測方法。 A deformation measurement method for measuring a deformation amount of a sheet-like measurement object with a plurality of patterns,
The sheet-shaped measurement object is photographed by a plurality of cameras whose arrangement positions are fixed from a plane parallel to the surface of the sheet-shaped measurement object, and information on the photographed position and photographing information photographed by the camera are used. A deformation measurement method, comprising: calculating a deformation amount of the sheet-like measurement object. - 請求項1記載の変形計測方法であって、
前記カメラによる撮影位置は、前記複数のカメラの視野内に前記パターンが入る位置であることを特徴とする変形計測方法。 The deformation measurement method according to claim 1,
An imaging position by the camera is a position where the pattern enters a field of view of the plurality of cameras. - 請求項2記載の変形計測方法であって、
前記シート状の測定対象の表面に記された複数のパターン間の距離、及び前記複数のカメラ間の距離が予め知られており、前記複数のカメラの視野内に撮影された前記パターン間の相対距離に応じて前記シート状の測定対象の変形量を計測することを特徴とする変形計測方法。 The deformation measurement method according to claim 2,
The distance between the plurality of patterns written on the surface of the sheet-like measurement object and the distance between the plurality of cameras are known in advance, and the relative relationship between the patterns photographed in the field of view of the plurality of cameras A deformation measurement method, comprising: measuring a deformation amount of the sheet-like measurement object according to a distance. - 請求項3記載の変形計測方法であって、
前記カメラによる撮影、及び撮影情報を用いた前記変形量算出処理を、前記シート状の測定対象の複数個所で実施し、前記シート状の測定対象の変形量を得ることを特徴とする変形計測方法。 The deformation measurement method according to claim 3,
The deformation measurement method characterized by obtaining the deformation amount of the sheet-like measurement object by performing the photographing by the camera and the deformation amount calculation process using the photographing information at a plurality of locations of the sheet-like measurement object. . - 複数のパターンを記したシート状の測定対象の変形量を計測する変形計測装置であって、
前記シート状の測定対象の表面を撮影する複数のカメラを固定配置しているカメラ保持筺体と、該カメラ保持筺体を前記シート状の測定対象の表面に平行な面上で移動させるカメラ保持筺体移動手段と、該カメラ保持筺体移動手段を前記シート状の測定対象の表面に平行な面上で位置制御するカメラ保持筺体位置制御手段と、該カメラ保持筺体位置制御手段が定めた位置の情報と前記カメラの撮影した撮影情報を用いて前記シート状の測定対象の変形量を算出する変形状態解析手段とを備えていることを特徴とする変形計測装置。 A deformation measuring device for measuring a deformation amount of a sheet-like measurement object in which a plurality of patterns are described,
A camera holding case in which a plurality of cameras for photographing the surface of the sheet-like measurement object are fixedly arranged, and a camera holding case for moving the camera holding case on a plane parallel to the surface of the sheet-like measurement object Means, camera holding housing position controlling means for controlling the position of the camera holding housing moving means on a plane parallel to the surface of the sheet-like object to be measured, position information determined by the camera holding housing position control means, A deformation measurement apparatus comprising: deformation state analysis means for calculating a deformation amount of the sheet-like measurement object using photographing information photographed by a camera. - 請求項5記載の変形計測装置であって、
前記カメラ保持筺体位置制御手段は、前記複数のカメラの視野内に前記パターンが入る位置に位置制御することを特徴とする変形計測装置。 The deformation measuring device according to claim 5,
The deformation measuring apparatus, wherein the camera holding housing position control means controls the position to a position where the pattern enters the field of view of the plurality of cameras. - 請求項6記載の変形計測装置であって、
前記シート状の測定対象の表面に記された複数のパターン間の距離、及び前記複数のカメラ間の距離が予め知られており、前記変形状態解析手段は前記複数のカメラの視野内に撮影された前記パターン間の相対距離に応じて前記シート状の測定対象の変形量を計測することを特徴とする変形計測装置。 The deformation measuring device according to claim 6,
The distance between the plurality of patterns written on the surface of the sheet-like measurement object and the distance between the plurality of cameras are known in advance, and the deformation state analyzing means is photographed in the field of view of the plurality of cameras. A deformation measuring apparatus for measuring a deformation amount of the sheet-like measurement object according to a relative distance between the patterns. - 請求項7記載の変形計測装置であって、
前記カメラによる撮影、及び撮影情報を用いた前記変形量算出処理を、前記シート状の測定対象の複数個所で実施し、前記シート状の測定対象の変形量を得ることを特徴とする変形計測装置。 The deformation measuring device according to claim 7,
The deformation measurement apparatus characterized in that photographing by the camera and the deformation amount calculation process using the photographing information are performed at a plurality of locations of the sheet-shaped measurement target to obtain the deformation amount of the sheet-shaped measurement target. . - 複数のパターンを記したシート状の測定対象を搬送して、変形量を計測して、シート処理を実行するシート処理方法であって、
前記シート状の測定対象の搬送の過程で、前記複数のパターンを記したシート状の測定対象の搬送方向の張力を制御し、
前記シート状の測定対象の変形量計測の過程で、前記シート状の測定対象の表面に平行な面上から、配置位置が固定された複数カメラにより前記シート状の測定対象を撮影し、撮影した位置の情報と前記カメラの撮影した撮影情報を用いて前記シート状の測定対象の変形量を算出し、求めた変形量に応じて前記シート張力を制御し、前記求めた変形量に応じてシート位置を修正した修正位置情報を得、
前記シート処理の過程で、前記修正位置情報に応じた位置に対して所定の処理を実行することを特徴とするシート処理方法。 A sheet processing method for conveying a sheet-like measurement object having a plurality of patterns, measuring a deformation amount, and executing sheet processing,
In the process of transporting the sheet-shaped measurement target, control the tension in the transport direction of the sheet-shaped measurement target in which the plurality of patterns are written,
In the process of measuring the deformation amount of the sheet-shaped measurement object, the sheet-shaped measurement object was photographed by a plurality of cameras whose arrangement positions were fixed from a plane parallel to the surface of the sheet-shaped measurement object. The amount of deformation of the sheet-like object to be measured is calculated using position information and photographing information captured by the camera, the sheet tension is controlled according to the obtained amount of deformation, and the sheet is obtained according to the obtained amount of deformation. Obtain corrected position information with corrected position,
A sheet processing method comprising: performing a predetermined process on a position corresponding to the correction position information in the course of the sheet process. - 請求項9記載のシート処理方法であって、
前記シート状の測定対象の変形量を搬送方向と幅方向について求め、算出された搬送方向の変形量が所定値よりも大きいときに前記シート状の測定対象の搬送方向の張力を制御し、張力修正後に再度カメラ撮影を行い、変形量を算出することを特徴とするシート処理方法。 The sheet processing method according to claim 9,
The deformation amount of the sheet-shaped measurement target is obtained in the conveyance direction and the width direction, and the tension in the conveyance direction of the sheet-shaped measurement target is controlled when the calculated deformation amount in the conveyance direction is larger than a predetermined value. A sheet processing method characterized by performing camera photographing again after correction and calculating a deformation amount. - 請求項10記載のシート処理方法であって、
張力修正後に再度カメラ撮影を行い求められた変形量に応じてシート位置を修正した修正位置情報を得、当該修正位置情報に応じて前記シート処理を行うことを特徴とするシート処理方法。 The sheet processing method according to claim 10, comprising:
A sheet processing method characterized in that after the tension is corrected, camera photographing is performed again to obtain correction position information in which the sheet position is corrected in accordance with the obtained deformation amount, and the sheet processing is performed in accordance with the correction position information. - 複数のパターンを記したシート状の測定対象を搬送して、変形量を計測して、シート処理を実行するために、張力制御部と、変形計測部と、シート処理部を備えたシート処理装置であって、
前記張力制御部は、前記複数のパターンを記したシート状の測定対象の搬送方向の張力を制御する張力調整手段を備え、
前記変形計測部は、前記シート状の測定対象の表面を撮影する複数のカメラを固定配置しているカメラ保持筺体と、該カメラ保持筺体を前記シート状の測定対象の表面に平行な面上で移動させるカメラ保持筺体移動手段と、該カメラ保持筺体移動手段を前記シート状の測定対象の表面に平行な面上で位置制御するカメラ保持筺体位置制御手段と、該カメラ保持筺体位置制御手段が定めた位置の情報と前記カメラの撮影した撮影情報を用いて前記シート状の測定対象の変形量を算出する変形状態解析手段と、該変形状態解析手段で求めた変形量に応じてシート張力を定め前記張力調整手段に与えるシート張力演算部と、前記変形状態解析手段で求めた変形量に応じてシート位置を修正する修正位置情報を前記シート処理部に与えるシート位置修正演算部を備え、
前記シート処理部は、前記変形状態解析手段のシート位置修正演算部が求めたシート上の処理位置を定めて所定の処理を実行する処理手段を備えていることを特徴とするシート処理装置。 A sheet processing apparatus including a tension control unit, a deformation measurement unit, and a sheet processing unit for conveying a sheet-like measurement target having a plurality of patterns, measuring a deformation amount, and executing sheet processing Because
The tension control unit includes a tension adjusting unit that controls the tension in the conveyance direction of the sheet-like measurement target on which the plurality of patterns are written,
The deformation measurement unit includes a camera holding housing in which a plurality of cameras for photographing the surface of the sheet-like measurement target is fixed, and the camera holding housing on a plane parallel to the surface of the sheet-like measurement target. Camera holding case moving means for moving, camera holding case position control means for controlling the position of the camera holding case moving means on a plane parallel to the surface of the sheet-like object to be measured, and the camera holding case position control means Deformation state analysis means for calculating the deformation amount of the sheet-like measurement object using the information on the position and the photographing information taken by the camera, and the sheet tension is determined according to the deformation amount obtained by the deformation state analysis means. A sheet tension calculator for giving to the tension adjusting means, and a sheet position correction for giving correction position information for correcting the sheet position according to the deformation amount obtained by the deformation state analyzing means to the sheet processing section. An arithmetic unit,
The sheet processing apparatus includes a processing unit that determines a processing position on the sheet obtained by the sheet position correction calculation unit of the deformation state analysis unit and executes a predetermined process. - 請求項12記載のシート処理装置であって、
前記カメラ保持筺体移動手段は、前記シート状の測定対象の表面に平行な面上での移動を含む3次元の移動を行うことを特徴とするシート処理装置。 The sheet processing apparatus according to claim 12,
The sheet processing apparatus, wherein the camera holding housing moving means performs a three-dimensional movement including a movement on a plane parallel to the surface of the sheet-like measurement object. - 請求項12、または請求項13記載のシート処理装置であって、
前記変形計測部において変形を計測する時の前記シートは、シート固定保持部により固定されており、計測したシートの変形状態を保ったまま、後段の前記シート処理部へ搬送されることを特徴とするシート処理装置。 The sheet processing apparatus according to claim 12 or 13,
The sheet when the deformation is measured by the deformation measuring unit is fixed by a sheet fixing and holding unit, and is conveyed to the subsequent sheet processing unit while maintaining the measured deformation state of the sheet. Sheet processing apparatus. - 請求項12から請求項14のいずれか1項に記載のシート処理装置であって、
前記変形計測部を含む搬送過程の前後に張力遮断部を備え、更に上流側もしくは下流側の他の領域でのシートの張力の影響を排除することを特徴とするシート処理装置。 The sheet processing apparatus according to any one of claims 12 to 14,
A sheet processing apparatus comprising a tension blocking unit before and after a conveyance process including the deformation measuring unit, and further eliminating the influence of sheet tension in another region on the upstream side or downstream side. - 請求項5記載の変形計測装置であって、
測定対象の面外方向の位置を計測可能な距離センサを有し、該距離センサは前記測定対象の表面に平行に移動可能な距離センサ移動手段を有することを特徴とする変形計測装置。 The deformation measuring device according to claim 5,
A deformation measuring apparatus comprising a distance sensor capable of measuring a position of a measurement target in an out-of-plane direction, and the distance sensor having a distance sensor moving means capable of moving in parallel with the surface of the measurement target. - 請求項16記載の変形計測装置であって、
測定対象の表面に平行に移動可能な距離センサ移動手段と、前記カメラ保持筺体移動手段が同一体に組み込まれていることを特徴とする変形計測装置。 The deformation measuring device according to claim 16, wherein
A deformation measuring apparatus comprising: a distance sensor moving means capable of moving in parallel with the surface of a measurement object; and the camera holding housing moving means. - 請求項5記載の変形計測装置であって、
前記カメラ保持筺体移動手段が、移動可能に構成された範囲内において、前記測定対象を平面固定保持する測定対象平面保持手段を有することを特徴とする変形計測装置。 The deformation measuring device according to claim 5,
The deformation measurement apparatus, wherein the camera holding housing moving means has measurement target plane holding means for holding the measurement target in a fixed plane within a range configured to be movable.
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