JPWO2014109008A1 - Deformation measuring apparatus and sheet processing apparatus - Google Patents

Abstract

A deformation measurement method and apparatus, and a sheet processing method and apparatus capable of measuring a deformation amount of a sheet easily and accurately and further performing a deformation process of the sheet are provided. In the present invention, a deformation measuring apparatus for measuring a deformation amount of a sheet-like measurement object having a plurality of patterns, the camera holding housing in which a plurality of cameras for photographing the surface of the sheet-like measurement object are fixedly arranged And a camera holding case moving means for moving the camera holding case on a plane parallel to the surface of the sheet-like measurement target, and a position control of the camera holding case moving means on a plane parallel to the surface of the sheet-like measurement target Camera holding housing position control means, and deformation state analyzing means for calculating the deformation amount of the sheet-like measurement object using the position information determined by the camera holding housing position control means and the shooting information photographed by the camera. It is characterized by that.

Description

  The present invention relates to a deformation measuring method and apparatus for measuring the deformation of a sheet-like or planar measuring object. Furthermore, the present invention relates to a sheet processing method and apparatus for performing processing such as pattern formation on a sheet or a planar measurement object using the measurement result of deformation measurement.

  In a process that requires high-precision positioning on a flat substrate, especially a thin sheet member, the deformed shape of the planar substrate or sheet member (hereinafter collectively referred to as a sheet) is accurately measured. It is essential to do.

  Further, since the sheet-like member easily deforms due to tension or the like, it is necessary to accurately measure the deformation and correct the processing position according to the deformation. In particular, in order to form a fine electronic circuit or the like on a sheet, it is essential to accurately measure a minute deformation (10-4 class in distortion) of the sheet and control the processing position accordingly.

  Patent Documents 1 to 4 disclose an example of measurement techniques for handling these sheets.

JP 2003-200413 A JP 2011-143390 A JP-A-2005-116611 JP 2005-62165 A

  A planar substrate, particularly a sheet member having a small thickness, is also deformed by a minute tension difference or change, and also by a preceding process.

  In particular, in an apparatus for forming a fine electronic circuit or the like on a sheet, since the alignment of the order of 1 μm becomes a problem within a pattern of about 10 cm to 1 m, the strain amount is about 10 −4 to 10 −5. It is necessary to measure the deformation.

  This level of deformation is not uniform with respect to the processing area, and there is also a difference inside the processing area due to the difference in tension applied to the sheet and the previous process (swelling deformation due to partial liquid application by inkjet etc.), Measuring this has become very important nowadays.

  With respect to these problems, Patent Document 1 described above measures the elongation and distortion of the entire processing region, and local (two-dimensional) sheet deformation cannot be observed. In Patent Document 2, one inkjet head and one camera are fixed and moved to one moving housing, but local deformation of the sheet is not taken into account within the head processing region. Patent Document 3 measures the elongation and distortion of the entire processing area as in Patent Document 1, and cannot observe local (two-dimensional) sheet deformation. Patent Document 4 is a patent in which a plurality of cameras are arranged in the width direction although the purpose is different. In order to measure the deformation of the entire sheet, a large number of cameras are required as in Patent Document 4, but there is a concern that the apparatus configuration is complicated and the cost is increased.

  In order to measure the deformation of the entire sheet with a simple apparatus configuration, a method of moving the camera within the measurement region as in Patent Document 2 is effective. However, this method has a problem that the measurement position of the camera is shifted due to subtle distortions such as a guide rail of the moving stage, and it is impossible to realize highly accurate sheet deformation measurement over the entire sheet. .

  In view of the above, an object of the present invention is to provide a deformation measuring method and apparatus, and a sheet processing method and apparatus capable of easily and accurately measuring the deformation amount of the sheet and further performing the deformation process of the sheet. And

  From the above, the present invention is a deformation measurement method for measuring the deformation amount of a sheet-like measurement object with a plurality of patterns, and the arrangement position is fixed from a plane parallel to the surface of the sheet-like measurement object. The sheet-like measurement object is photographed by the plurality of cameras, and the deformation amount of the sheet-like measurement object is calculated using the information of the photographed position and the photographing information photographed by the camera.

  Further, in the present invention, a deformation measurement apparatus for measuring a deformation amount of a sheet-like measurement object having a plurality of patterns, the camera holding the plurality of cameras for photographing the surface of the sheet-like measurement object fixedly arranged Position control of the camera holding housing moving means for moving the housing and the camera holding housing on a surface parallel to the surface of the sheet-like measurement target, and the camera holding housing moving means on a surface parallel to the surface of the sheet-like measurement target A camera holding housing position control means, and a deformation state analysis means for calculating the deformation amount of the sheet-like measurement object using the position information determined by the camera holding housing position control means and the shooting information photographed by the camera. It is characterized by being.

  According to the present invention, there is also provided a sheet processing method for conveying a sheet-shaped measurement object having a plurality of patterns, measuring a deformation amount, and executing sheet processing, in the process of conveying the sheet-shaped measurement object. In the process of measuring the amount of deformation of the sheet-shaped measurement target, the position of the sheet-shaped measurement target with a plurality of patterns is arranged from the plane parallel to the surface of the sheet-shaped measurement target. The sheet-shaped measurement object is photographed by a plurality of cameras with fixed positions, and the deformation amount of the sheet-shaped measurement object is calculated using the information of the photographed position and the photographing information photographed by the camera, and according to the obtained deformation amount Controlling the sheet tension, obtaining corrected position information obtained by correcting the sheet position in accordance with the obtained deformation amount, and performing predetermined processing on the position corresponding to the corrected position information in the course of sheet processing To do.

  Further, in the present invention, a tension control unit, a deformation measurement unit, and a sheet processing unit are provided to convey a sheet-like measurement target having a plurality of patterns, measure a deformation amount, and execute sheet processing. The tension control unit includes a tension adjusting unit that controls the tension in the conveyance direction of a sheet-like measurement target having a plurality of patterns, and the deformation measurement unit is a sheet-like measurement target. A camera holding housing in which a plurality of cameras for photographing the surface are fixedly arranged, a camera holding housing moving means for moving the camera holding housing on a plane parallel to the surface of the sheet-like measurement object, and a camera holding housing moving means A camera holding housing position control means for controlling the position on a surface parallel to the surface of the sheet-like measurement object, and a sheet-like measurement using the position information determined by the camera holding housing position control means and shooting information taken by the camera. A deformation state analyzing means for calculating the deformation amount of the object, a sheet tension calculating unit for determining the sheet tension according to the deformation amount obtained by the deformation state analyzing means and giving the tension adjusting means, and a deformation amount obtained by the deformation state analyzing means. And a sheet position correction calculation unit that provides correction position information for correcting the sheet position to the sheet processing unit. The sheet processing unit determines a processing position on the sheet obtained by the sheet position correction calculation unit of the deformation state analysis unit. Processing means for executing predetermined processing is provided.

  According to the above configuration, a set of cameras in the same housing has the same measurement position shift between the sets of cameras due to a subtle distortion of the guide rail that occurs when the measurement camera moves. As a result, the measurement position error of each camera can be almost canceled.

  For this reason, even when the camera is moved in the measurement region, it is possible to make it possible to measure the deformation of each part with high accuracy.

The figure which shows the example of arrangement | positioning structure of the deformation | transformation measuring apparatus 2 of the sheet | seat which concerns on 1st Example of this invention. The figure which showed the whole structure of the means and function which the deformation | transformation measuring device 2 should be equipped with. The flowchart which showed the process of measuring a deformation | transformation using the deformation | transformation measuring apparatus 2. FIG. The figure which shows an example of the arrangement | positioning relationship of the pattern 8 on the measuring object 7. FIG. The figure which shows an example of arrangement | positioning relationship of the several position detection camera 3. FIG. The figure which showed the schematic example of the pattern imaged with four position detection cameras. The figure which shows the measurement position of the pattern 8 when the camera holding | maintenance housing | casing 4 inclines. FIG. 3 is a diagram illustrating a configuration example of a sheet conveying mechanism 101 including a deformation measuring device 2. FIG. 6 is a diagram illustrating a procedure for forming a drawing pattern on a sheet S by the sheet conveying mechanism 101. FIG. 6 is a flowchart illustrating a process performed by the sheet conveyance mechanism 101.

  Embodiments of the present invention will be described below with reference to the drawings.

  FIG. 1 is an example of an arrangement configuration diagram of a sheet deformation measuring apparatus 2 according to a first embodiment of the present invention. As shown in FIG. 1, the deformation measuring device 2 is arranged on the upper portion of the sheet 7 to be measured. The deformation measuring device 2 that measures the deformation of the sheet is provided with two or more position detection cameras 3 and a camera holding housing 4 that integrally holds them. Further, the plurality of position detection cameras 3 are arranged so as to keep a predetermined distance L apart in a lattice shape by the same camera holding housing 4. In this embodiment, four position detection cameras 3a, 3b, 3c, and 3d are installed in a lattice shape at equal intervals in the camera holding housing 4. However, if the position of the position detection camera 3 is fixed, The installation position may be arbitrary.

  Further, the deformation measuring device 2 includes a camera holding housing operating means 5 for moving the camera holding housing 4 and a camera holding housing position control means 6 for recording and controlling the absolute position of the camera holding housing 4 (in FIG. 1). (Not shown). The camera holding casing operating means 5 and the camera holding casing position control means 6 can control the movement of the camera holding casing 4 to a desired position. The camera holding housing operating means 5 includes operating means 5X for moving in the X direction in FIG. 1 and operating means 5Y for moving in the Y direction perpendicular to the X direction, and if necessary, in the height direction. The operating means 5Z (not shown in FIG. 1) may be provided. However, the XY plane determined by the X and Y directions is a horizontal plane with respect to the surface of the sheet 7 to be measured.

  On the other hand, a plurality of patterns 8 that can determine the positional information of the measurement object 7 are formed on the surface of the measurement object 7 of the sheet or planar body that is the measurement object of the deformation measurement apparatus 2. In this embodiment, the shape of the pattern 8 is circular. However, the shape may be any shape such as a triangular shape, a quadrangular shape, a cross shape, or a character shape, and the shape may be different among the plurality of patterns 8. I do not care.

  FIG. 2 shows the overall configuration of the means and functions that the deformation measuring device 2 should have. This means and function includes a camera holding case 4 provided with the camera 3, a camera holding case operating means 5, a camera holding case position control means 6, and a deformation state analysis means 80. Note that these functions of the deformation measuring device 2 need to be arranged in the upper space facing the surface of the measuring object 7 by a support frame or the like. For example, the deformation state analyzing means 80 is located in a place different from the upper space. It may be arranged.

  According to these configurations, the camera holding housing 4 on which the camera 3 is mounted is moved to an arbitrary position on the XY plane by the camera holding housing operating means 5. The moving position is determined by the camera holding housing position control means 6.

  The deformation state analysis means 80 measures the deformation of the measurement object 7 using information of the plurality of position detection cameras 3 photographed at the position. For this measurement, the deformation state analyzing means 80 has 81 to 89 functions and means.

  Specifically, the deformation state analyzing unit 80 stores information on the shape of the pattern 8 formed in advance on the measurement object 7 in the pattern shape storing unit 81, and on the other hand, an image captured by the position detection camera 3. Captured from the camera 3 and recorded in the captured image recording means 82. Here, the information on the shape of the pattern 8 formed in advance reflects the ideal state of the sheet 7 without distortion or distortion, and is known information. Therefore, distortion and distortion can be identified by comparison with a captured image captured from the camera 3. This identification is performed as follows.

  The deformation state analyzing unit 80 detects the center position of the pattern 8 having the same shape from the image captured by the captured image recording unit 82 based on the pattern shape stored in the pattern shape storage unit 81, and the center position of the captured image. The distance to the pattern 8 is calculated by the in-image pattern position specifying means 83.

  Further, the deformation state analyzing unit 80 calculates the pattern 8 from the distance from the image center position calculated by the in-image pattern position specifying unit 83 to the center position of the pattern 8 and the known installation distance between the plurality of position detection cameras 3. The relative position information of the pattern 8 at the time of imaging is recorded in the pattern detection position recording means 85.

  Using the pattern detection position information recorded in the pattern detection position recording means 85, the deformation amount calculating means 87 obtains the deformation amount and records it in the deformation amount recording means 88. The pattern one recording means 86 receives position information when the camera holding housing position control means 6 executes position control of the camera holding housing operating means 5, and this position information is the pattern detection position recording means 85 and The recording information of the deformation amount recording means 88 is used for recording in association with the position information of the measurement object 7.

  The deformation state analyzing unit 80 generates deformation data of the entire observation surface of the measurement target 7 based on the deformation information recorded in the deformation amount recording unit 88 at a plurality of locations of the measurement target 7. Means 89 are provided. Based on the deformation data generated by the measurement object deformation analysis unit 89, the measurement object 7 can be positioned with high accuracy in consideration of local distortion of the measurement object 7.

  With the above configuration, the position information of the pattern 8 can be identified. In the present embodiment, the detection position of the pattern 8 is the center position of the pattern 8, but may be any place as long as the specific position of the pattern 8 can be detected. In this embodiment, the position of the pattern 8 in the image is detected by calculating the distance of the center position of the pattern 8 from the center of the captured image with reference to the center position of the captured image in the captured image. However, the reference position may be an arbitrary position instead of the center position of the captured image.

  FIG. 3 is a flowchart showing a process of measuring deformation using the deformation measuring device 2 of FIG. The deformation measurement method of FIG. 3 is executed by periodic processing of a computer, and thus a series of procedures of the deformation measurement method of the present invention will be described.

  In the first processing step S1 of FIG. 3, the camera holding housing 4 is moved to a desired position by the camera holding housing operating means 5. Here, what is meant by a desired position will be described. For that purpose, it is necessary to exemplify and understand the arrangement relationship of the pattern 8 on the measurement object 7 and the arrangement relationship of the plurality of position detection cameras 3 fixed in advance as the premise.

  An example of the arrangement relationship of the pattern 8 on the measurement object 7 is shown in FIG. Circular patterns 8a, 8b, 8c, and 8d are engraved on the measurement object 7 in advance. Further, the relative formation positions of the four circular patterns 8a, 8b, 8c, and 8d at the time of pattern formation are set so that the four position detection cameras 3a, 3b, 3c, and 3d are parallel to the surface direction of the measuring object 7. They are formed at a relative position interval such that all four patterns 8a, 8b, 8c, and 8d are simultaneously accommodated in the imaging range when moved by the holding housing operating means 5 onto the pattern 8. The number of patterns 8 and the relative positions between the patterns 8 are arbitrary as long as the above conditions are satisfied. However, it is assumed that the X-axis direction and the Y-axis direction are parallel to the measurement target surface and perpendicular to each other, as shown in FIG.

The position coordinates of the pattern 8 at the time of pattern formation in this example shown in FIG. 4 are such that the position of the pattern 8a is ( _X8a , _Y8a ) on the XY coordinates, and the other three patterns 8b, 8c, 8d are lattices Are formed at positions (X _8a + M, Y _8a ), (X _8a , Y _8a + M), (X _8a + M, Y _8a + M) that are separated by a distance M in the X-axis direction and the Y-axis direction. .

On the other hand, an example of the arrangement relationship of the plurality of position detection cameras 3 is shown in FIG. In this example, the coordinates of the position detection camera 3 when the position detection cameras 3 are arranged in parallel on the measurement object 7 are shown. When the position coordinates of the position detection camera 3a are (X _3a , Y _3a ) on the XY coordinates, the other three position detection cameras 3b, 3c, 3d are (X _3a + L, Y _3a ), ( X _3a , Y _3a + L), (X _3a + L, Y _3a + L).

  In FIG. 4, it is assumed that the field of view of the position detection cameras 3a, 3b, 3c, and 3d when the surface of the sheet 7 is photographed by the position detection camera 3 is in the range of 14a, 14b, 14c, and 14d, respectively.

  When the positional relationship between the pattern 8 and the position detection camera 3 is assumed, the position detection camera 3 is moved so that the pattern 8 enters the field of view of each of the plurality of position detection cameras 3. This means that the position state has been moved to the desired position described above.

  At the desired position, a plurality of patterns 8 are imaged by a plurality of position detection cameras 3 in the processing step S2 of FIG. The imaged pattern 8 is taken into the deformed shape analyzing means 80 in FIG.

  FIG. 6 is a schematic diagram illustrating circular patterns 8a, 8b, 8c, and 8d captured by four position detection cameras 3a, 3b, 3c, and 3d. In FIG. 6, 14a, 14b, 14c, and 14d are the visual fields (images) of the four position detection cameras 3a, 3b, 3c, and 3d, and 15a, 15b, 15c, and 15d are the central positions of the visual fields. Further, the distance between the centers 15a, 15b, 15c, and 15d of the visual fields 14a, 14b, 14c, and 14d in FIG. 6 is the distance L in FIG. 5, for example, a circle in each of the circular visual fields 14a, 14b, 14c, and 14d. Shape patterns 8a, 8b, 8c, and 8d are visually recognized.

  The distance between the circular patterns 8a, 8b, 8c, and 8d after photography should be ideal with the arrangement relationship of FIG. 4 as an ideal distance, but the distance M is clearly not maintained in the example of FIG. . In the subsequent processing, distortion and distortion are detected from the imaging information.

  In the first processing step S3 of the image processing for this purpose, the center position of the plurality of patterns 8 in the captured image is detected by the in-image pattern position specifying means 83. In this case, in the case of FIG. 6, the positions of the centers 15a, 15b, 15c, and 15d of the captured visual fields 14a, 14b, 14c, and 14d and the distance L between the center positions are known as shown in FIG. . This positional relationship is established when the position detection camera 3 is attached to the camera holding housing 4.

The positions of the centers 15a, 15b, 15c, and 15d of the patterns 8a, 8b, 8c, and 8d in the captured visual fields 14a, 14b, 14c, and 14d are as exemplified by the visual field 14a of the lower left position detection camera in FIG. The position of the center of the visual field 15a is grasped as the position of the XY coordinates with the origin (0, 0). The center position coordinates of the patterns 8a, 8b, 8c, and 8d when the positions of the centers 15a, 15b, 15c, and 15d of the visual fields 14a, 14b, 14c, and 14d are the origins (0, 0), respectively, are expressed as (dX _a , dY _a ), (dX _b , dY _b ), (dX _c , dY _c ), (dX _d , dY _d ).

  In processing step S4, the relative position coordinates between the patterns 8 are calculated by the pattern position identifying means 84. In process step S5, the obtained relative position coordinates are recorded in the pattern detection position recording means 85. This process relatively grasps the mutual distance between the patterns 8a, 8b, 8c, and 8d in FIG.

In this relative position grasp, for example, since it is understood the central position of the field 3a as the origin of the X-Y coordinates (0,0), the relative position of the pattern 8a is _(dX a, dY _a). In contrast,
Since the distance between the center positions of the visual fields is the distance L shown in FIG. 5, the relative position of 8b is (dX _b + L, dY _b ), the relative position of 8c is (dX _c , dY _c + L), and the relative position of 8d. The position is represented by (dX _d + L, dY _d + L). The relative position information calculated in this way is recorded in the pattern position recording means 86 that records the position information of the pattern 8.

  Next, in processing step S 6, the deformation state of the measurement location is calculated by the deformation amount calculation means 87, and the deformation state is recorded in the deformation amount recording means 88. Here, in an ideal state where there is no deformation in the sheet, the distance between the captured patterns 8 is maintained at the distance M in FIG. If the distance in FIG. 4 and the distance L in FIG. 5 are simply considered to be equal, the distance between the patterns 8 in FIG. 6 should be L, but in this example, the distance L is not clearly maintained. In this case, the deviation from the distance L means the amount of deformation.

From this, the deformation amount of the measuring object 7 is calculated by the deformation amount calculation means 87 using the equation (1), assuming that the pattern 8a and 8b are δabx and _{δaby in} the X axis direction and the Y axis direction, respectively. Can do. Note that the equation (1) represents a general equation in which the distance M and the distance L are not equal.
[Equation 1]
δ _abx = dX _a + dX _b + ML
δ _aby = dY _a + dY _b (1)
Similarly, it is possible to calculate the deformation amount δacx between patterns 8a and 8c, [delta] _acy, deformation amount δcdx between 8c and 8d, [delta] _CDy, 8d deformation amount between the 8b Derutadbx, the [delta] _DBY.

  In the processing step S7, the above processing is repeatedly executed until the measurement for a plurality of measurement points is completed. After the completion, the measurement object 7 is determined from the deformation state of the plurality of observation points recorded in the deformation amount recording means 88 in the processing step S8. Generate deformation data for the entire measurement area.

Further, the distortion rate is further calculated from the deformation amount of the measurement location and recorded in the deformation amount recording means 88. For example, if the distortion rates in the X-axis direction and the Y-axis direction between the patterns 8a and 8b, Δabx, _Δaby are calculated, they can be calculated by the equation (2) using the deformation amounts δabx, _δaby .
[Equation 2]
_Δabx = (dX _a + dX _b + ML) / M
Δ _aby = (dY _a + dY _b ) / M
Similarly, the deformation amounts Δ _acx and Δ _acy between the patterns 8a and 8c, the deformation amounts Δ _cdx and Δ _cdy between 8c and 8d, and the deformation amounts Δ _dbx and Δ _dby between 8d and 8b are calculated. Can do.

  In this way, the distortion shape of the measuring object 7 can also be obtained from the deformation amount or the distortion rate between the four patterns 8. Information such as the calculated deformation amount, distortion rate, and distortion shape is recorded in the deformation amount recording means 88.

  By the way, in the deformation measuring apparatus 2 of FIG. 1, when the camera holding housing 4 is moved, the camera holding housing 4 is moved with respect to the surface of the measuring object 7 due to distortion of the guide rail on the camera holding housing operating means 5. Inclination is assumed. Since the position detection camera 3 of the camera holding housing 4 is inclined, an error occurs in the position detection result of the pattern 8 by the position detection camera 3. This problem and countermeasures will be described with reference to FIG.

FIG. 7 is a diagram illustrating measurement positions of the patterns 8a, 8b, 8c, and 8d when the camera holding housing 4 is tilted. The four position detection cameras 3a, 3b, 3c, and 3d are arranged at a distance L from each other in a lattice shape in the X-axis direction and the Y-axis direction. The distance between the camera holding housing 4 and the measurement object 7 and H, the camera holding housing 4 θx in the X-axis direction, and are theta _y inclined in Y-axis direction. FIG. 7 shows the state of the inclination θ _{y in} the Y-axis direction when the position detection cameras 3a and 3b observe the patterns 8a and 8b.

In this case, an error δ _ax of the detection position in the X direction of the pattern 8a of the position detection camera 3a and an error δ _ay of the detection position in the Y direction caused by the inclination of the camera holding housing 4 are expressed by Equation (3).
[Equation 3]
δ _ax = ((H + L / 2 (sin θx + sin θy)) tan θ _y )
+ L / 2 (1-cos θy)
δ _ay = ((H + L / 2 (sin θx + sin θy)) tan θ _x )
+ L / 2 (1-cos θ _x ) (3)
Similarly, error δbx detection position in the X-axis direction and the Y-axis direction of the pattern 8b, [delta] _By is represented by equation (4).
[Equation 4]
δ _bx = ((H + L / 2 (sin θx−sin θy)) tan θ _y )
-L / 2 (1-cosθy)
δ _by = ((H + L / 2 (sin θx−sin θy)) tan θ _x )
+ L / 2 (1-cos θ _x ) (4)
It becomes.

In this case, the deformation amount and the distortion rate are obtained from the distance between the two points at the specific position and the change in the distance. Since the position detection cameras 3a and 3b are fixed to the camera holding housing 4, the inclination angles of the position detection cameras 3a and 3b are equal. Therefore, an error in the detected position between the patterns 8a and 8b due to the inclination of the position detection cameras 3a and 3b appears in substantially the same amount in the same direction. For this reason, when the distance between the patterns 8a and 8b is obtained, the difference between the detected position coordinates between the patterns 8a and 8b is obtained. The measurement errors δabx and δ _aby of the deformation amounts in the X-axis direction and the Y-axis direction due to the tilt of the camera holding housing 4 are expressed by Equation (5).
[Equation 5]
δabx = Lsinθytanθy + L (1−cosθy)
δaby = Lsinθytanθ _x (5)
On the other hand, let us consider a case where the deformation between the patterns 8a and 8b is measured by one position detection camera 3. X-axis direction of the camera inclination angle theta _1ax during measurement of the pattern _8a, when the _Y-axis direction of the camera inclination angle theta _1ay, the detection position of the error [delta] _1ax and Y-axis direction of the detection position in the X-axis direction of the pattern 8a The error δ _{1ay of} is expressed by equation (6).
[Equation 6]
δ1ax = Hsinθ1ay
δ1ay = Hsinθ _1ax (6)
After the measurement of the pattern 8a, the position detection camera 3 moves on the pattern 8b in order to measure the pattern 8b. Therefore, the inclination angle of the position detection camera 3 changes due to the movement. _Assume that the camera tilt angle in the X-axis direction during measurement of the pattern 8b is θ _1bx and the camera tilt angle in the Y-axis direction is θ _1by, and the error δ _1bx of the detection position in the X-axis direction of the pattern 8b and the detection position in the Y-axis direction The error δ _1by is expressed by equation (7).
[Equation 7]
δ1bx = Hsinθ1by
δ1by = Hsinθ _1bx (7)
Therefore, the measurement errors δ1abx and _δ1aby of the deformation amount between the patterns 8a and 8b obtained by one position detection camera 3 are expressed by the equation (8).
[Equation 8]
δ1abx = Hsinθ1ay + Hsinθ1by
δ1acx = Hsin θ1ax + Hsinθ _1bx (8)
Here, consider a case where the tilt angles of the camera holding housing 4 and the position detection camera 3 are as small as, for example, 1 degree or less. When the angle θ is small, sin θ, cos θ, and tan θ are expressed by equation (9).
[Equation 9]
sinθ ≒ θ
cos θ≈1-θθ / 2
tan θ≈θ (9)
Therefore, the distance between the patterns 8a and 8b, that is, the measurement error of the deformation amount is expressed by the equation (10).
[Equation 10]
δabx≈3Lθyθy / 2
δaby ≒ Lθyθ _x (10)
On the other hand, the distance between the patterns 8a and 8b, that is, the measurement error of the deformation amount, which occurs when measured by one position detection camera 3, is expressed by equation (11).
[Equation 11]
δ1abx≈H (θ1ay + θ1by)
δ1acx≈H (θ1ax + _θ1bx ) (11)
Here, the measurement error of the deformation amount or the distortion rate is considered quantitatively. Assume that the distance H between the position detection camera 3 and the measuring object 7 and the distance M between the patterns 8a and 8b at the time of pattern formation are equal. When measuring the position detection camera 3 multiple while fixedly held on the camera holding housing 4, the tilt angle θx and theta _y camera holding housing 4 about 0.003rad less, i.e., less than about 0.17 degrees By suppressing, the measurement error of the deformation amount or the distortion rate of the measuring object 7 due to the tilt of the camera holding housing 4 can be suppressed to 10 −5 level or less as a ratio.

On the other hand, a case where distortion is measured by one position detection camera 3 will be considered. Since the movement amount of the position detection camera 3 is considered to be substantially equal to the distance M between the patterns 8a and 8b, the measurement error is calculated based on that. In this case, in order to suppress the measurement error of the deformation amount or the distortion rate of the measurement object 7 to a level of 10 −5 or less, the camera inclination angles (θ1bx, _θ1by ) are respectively set to about 10−5 rad or less. In other words, it is necessary to suppress the value to an order of about 5.7 × 10 −4 degrees or less to a value that is 3 or 4 digits smaller.

  From this point, by fixing and holding a plurality of position detection cameras 3 on the camera holding housing 4, the measurement error of the deformation amount or the distortion rate when the position detection camera 3 is moved and measured at a plurality of observation points is reduced. I understand that I can do it. Further, the measurement error of the deformation amount and the distortion rate caused by the inclination of the position detection camera 3 is obtained by fixing the position detection camera 3 to the camera holding housing 4 so that the distance H between the position detection camera 3 and the measurement object 7 is It can be seen that even when the distance between the position detection camera 3 and the measurement object 7 is increased, the measurement error of the deformation amount and the distortion rate is not affected or is small.

  Therefore, the deformation measuring device 2 can measure the deformation amount or the distortion rate of the measurement object 7 at a desired position with high accuracy.

FIG. 8 is an example of a configuration diagram of the sheet conveying mechanism 101 including the deformation measuring device 2. A sheet-like or planar measurement object (hereinafter referred to as a sheet S) handled in the present invention is formed in a band shape, and is conveyed by being sandwiched between rollers and sent to a processed portion. Before being sent to the machining portion, the deformation is measured by the deformation measuring device 2 of the present invention, and the measurement result is reflected in the machining at the machining portion. For this reason, the sheet transport mechanism 101 is provided with a transport motor 102 for transporting the sheet S and a plurality of rollers (121, 122, 131, 132) driven by the transport motor 102. In the sheet transport mechanism 101 in FIG. 8, the sheet S that is the measurement object 7 is transported from the left to the right in FIG. 8 by the transport motor 102. The application example of the sheet conveying mechanism 101 of the present invention is not limited to this example. In short, anything may be used as long as the deformation measuring device 2 is included in the former stage of processing during the conveyance and the detected deformation is reflected in the later stage of machining.

  The sheet conveyance mechanism 101 shown in the figure is configured to hold the sheet S fixedly, measure the deformation of the sheet S while holding the deformation of the sheet S, and convey the sheet S. A pattern forming unit 180 that forms a drawing pattern such as an electrical wiring; a tension blocking unit 120 that is disposed at two locations on the upstream side and the downstream side with respect to the conveyance of the sheet S; It is comprised from the tension control part 130 which controls tension | tensile_strength T of.

  The sheet positioning unit 110 includes a sheet or planar deformation measuring device 1. The sheet or planar deformation measuring apparatus 1 includes a deformation measuring apparatus 2 that measures the deformation of the sheet S, and a sheet fixing and holding unit 111 that fixes and holds the deformation state of the sheet S before measuring the deformation of the sheet S. .

  In this embodiment, the deformation measuring device 2 includes a distance sensor 9 that measures the distance between the camera holding housing 4 and the sheet S, and the distance sensor 9 is fixed to the camera holding housing 4. Can move with. By moving the camera holding housing 4 with the camera holding housing operating means 5, the deformation of the sheet S in the out-of-plane direction can be measured at an arbitrary position. The measurement result of the distance sensor 9 is taken in and calculated by the deformation state analyzing means 80, so that not only in-plane deformation data of the sheet S but also three-dimensional deformation including out-of-plane deformation can be measured.

  Further, the deformation state analyzing unit 80 calculates correction data for the formation position of the drawing pattern formed by the pattern forming unit 180 from the deformation state of the sheet S, and sends it to the pattern forming position control unit 184 of the pattern forming unit 180. A position calculation unit 90 and a sheet tension calculation mechanism 91 that calculates a tension value to be changed so as to keep the deformation within a predetermined range from the deformation state of the sheet S and transmits the calculated value to the tension adjustment roller position adjustment unit 134 of the tension control unit 130. Have.

  The camera holding housing operating means 5 advantageously has a camera holding housing vertical operating means 10 that moves not only in parallel to the sheet S surface but also to move vertically with respect to the sheet S surface. The movement of the camera holding case 4 by the camera holding case vertical operating means 10 is controlled by the camera holding case position control means 6 (shown in FIG. 2). By providing the vertical operation means 10, even if an interference object such as a conveyance roller or a pattern forming unit 180 exists or moves to a position in the sheet positioning unit 110 that interferes with the camera holding housing 4, Can be avoided by vertically moving the camera holding case 4 by the camera holding case vertical operating means 10. Further, even if there is a place where the height of the sheet S surface is different depending on the conveyance path of the sheet S, the camera holding casing 4 is moved vertically by the camera holding casing vertical operation means 10 and the distance sensor 9 is out of plane. Based on the measurement result of the direction, the pattern 8 can be measured while the distance H between the camera holding housing 4 and the sheet S surface is kept within a predetermined distance.

  The sheet fixing and holding unit 111 may include a sheet fixing and holding unit driving unit 112 that can convey the sheet fixing and holding unit 111 together with the sheet S in a state where the sheet S is fixed and held. The sheet fixing and holding unit driving unit 112 can transport the sheet S to an area where the sheet S is processed, such as the pattern forming unit 180, while keeping the measured deformation state of the sheet S.

  The pattern forming unit 180 includes a pattern forming unit 181 that forms a drawing pattern on the sheet S and a pattern formation position control unit 184 that controls the pattern forming unit 181. The pattern forming unit 181 includes a pattern forming unit moving mechanism that drives the pattern forming unit 181 and a pattern formation position adjusting unit that adjusts the formation position of the drawing pattern from the pattern forming unit 181. The pattern formation position control means 184 controls the pattern formation means moving mechanism and the pattern formation position adjustment means so that a drawing pattern is formed at a predetermined position.

  The tension blocking unit 120 includes a high friction roller 121 whose surface is a high friction part such as rubber, and a pressure roller 122 that is disposed at a position facing the high friction roller 121 and holds the sheet S therebetween. The tension T acting between the sheets S is cut off by the pressure contact portion between the high friction roller 121 and the pressure roller 122. As shown in FIG. 8, by providing the tension blocking unit 120 on the upstream side and the downstream side of the sheet conveying mechanism 101, the tension T of the sheet S between the two tension blocking units 120 is further increased in the upstream side or the downstream side. It is possible to avoid the influence of the tension of the sheet S in the area of the above.

  The tension control unit 130 includes a tension adjustment roller 131, a guide roller 132, a tension adjustment roller driving unit 133, and a tension adjustment roller position control unit 134. The tension adjusting roller 131 is in contact with the sheet S between the pressure contact roller 122 and the guide roller 132 of the adjacent tension blocking unit 120. By adjusting the tension adjusting roller 131 by the tension adjusting roller driving means 133 so that the prescribed tension T is applied by the tension adjusting roller position control means 134, the tension T acting on the sheet S is arbitrarily adjusted. It is possible.

  Hereinafter, the operation of the sheet conveying mechanism 101 in this embodiment will be described. FIG. 9 is a table summarizing a procedure for forming a drawing pattern on the sheet S by the sheet conveying mechanism 101. In the order of the solid arrows in FIG. 9, the sheet S is conveyed through each main mechanism.

  As shown in the sheet S conveyance path indicated by the solid line arrow, the sheet S is first conveyed from the upstream side to the sheet positioning unit 110 through the tension blocking unit 120 and the tension control unit 130.

  The sheet S conveyed to the sheet positioning unit 110 is fixed and held by the sheet fixing and holding unit 111 inside. The deformation of the sheet S is measured by the deformation measuring device 2 while the sheet S is fixedly held. The deformation state analysis means 80 reflects the result of this analysis in the control process. The control process here includes a pattern forming position calculation unit 90 and a sheet tension calculation mechanism 91.

  As a result of the analysis, when it is determined that the sheet S is larger than the predetermined shape due to the tension T applied to the sheet S, the sheet tension calculation mechanism 91 operates. As indicated by the dotted line information transmission path 200, the sheet S is released from being fixedly held, and the appropriate tension information calculated by the sheet tension calculating mechanism 91 is sent to the tension adjusting roller position control means 134, thereby controlling the tension. The means 130 is adjusted so that an appropriate tension T is applied. In this case, the procedure of fixing and holding the sheet S and measuring the deformation is repeated.

  After the deformation measurement and tension control of the sheet S are finished, the sheet S is conveyed to the pattern forming unit 180 while the shape is fixed to the sheet fixing holding unit 111. Before the drawing pattern is formed on the sheet S, the drawing pattern shape corresponding to the deformation of the sheet S, which is the deformation measurement result of the sheet S, is transmitted to the pattern forming position control means 184. This line is the output of the pattern formation position calculation unit 90 shown in the information transmission path 300 indicated by the dotted arrow in FIG. In short, the function of the pattern formation position calculation unit 90 is to give the position to be processed on the sheet as information on the corrected position corrected in accordance with the amount of deformation. For this reason, the pattern formation position calculation unit 90 can be generally regarded as a sheet position correction calculation unit.

  The pattern formation position control means 184 adjusts the drawing pattern formation position by moving the pattern formation means 181 by the pattern formation means moving mechanism based on the drawing pattern formation information, or draws by the pattern formation position adjustment means. Adjust the pattern formation position.

  After the drawing pattern is formed, the fixing and holding of the sheet fixing portion 111 of the sheet S is released, and the portion where the drawing pattern of the sheet S is formed is conveyed and fixed to the sheet S via the tension blocking unit 120 on the downstream side. The part 111 is returned to the sheet positioning part 110.

  By repeating the above operations, the sheet conveying mechanism 101 measures the deformation of the sheet S by the sheet or planar deformation measuring apparatus 1 and conveys the sheet holding the deformation to the pattern forming unit, and sends deformation data. Thus, the sheet S can be positioned with high accuracy, and the drawing pattern can be formed with high accuracy.

  In this embodiment, the tension control unit 130 controls the tension T by adjusting the position of the tension adjusting roller 131. However, as another tension adjusting unit, for example, a difference in the conveyance speed of the sheet S between the conveyance motors 102 is possible. A means for adjusting the tension T can be considered, but the tension control method may be any method.

  In this embodiment, there is no description about the number of sheet fixing and holding units 111, but the number may be any number.

  FIG. 10 is a flowchart showing a process of processing by the sheet conveying mechanism 101 in FIG. The sheet conveying method of FIG. 10 is executed by periodic processing of a computer, and a series of procedures of the sheet conveying method of the present invention will be described.

  In the first processing step S11 of FIG. 10, the drawing pattern forming surface of the sheet S is conveyed to the sheet positioning unit 110, and in the processing step S12, the shape of the drawing pattern forming surface of the sheet S is fixed by the fixed holding unit 111. In processing step S13, the deformation measuring device 2 measures the deformation of the drawing pattern forming surface after fixing. In processing step S14, the deformation results of the deformation state in each part of the sheet S are aggregated to create deformation data of the drawing pattern forming surface. The process so far can be implemented using a series of processes in FIG.

  In process step S15, the deformation data in the conveyance direction and the width direction of the sheet S are compared, and the expansion / contraction amount due to the tension T of the sheet S is calculated. For example, when the deformation in the transport direction is larger than the deformation in the width direction, there is a high possibility that the tension has an influence, and data on the amount of expansion / contraction at this time is obtained. In process step S16, it is checked whether the amount of expansion / contraction is in an appropriate range. If it is appropriate, the process proceeds to the next process step S19, and if not appropriate (a state in which the deformation is excessive due to the tension), the process proceeds to process step S17.

  In processing step S17, a tension for suppressing the deformation amount within a predetermined range is calculated, and the fixing of the sheet S by the fixing holding unit 111 is released. Further, the calculated tension value is transmitted to the tension control unit 130 to control the tension. The measurement and determination from the previous processing step S12 to the processing step S15 are performed again in a state where the tension of the sheet S is appropriately maintained through these processes and the tension of the sheet S is appropriately maintained. The amount of deformation under a condition where the tension is appropriate is handled as a new amount of deformation.

  As a result, in the processing after processing step S19, only the deformation amount of the case in which the influence of the tension is within a predetermined range is handled. In the specific processing of step S <b> 19, first, the drawing pattern forming surface of the sheet S is conveyed to the pattern forming unit 180. Next, a drawing pattern formation position that matches the deformation obtained from the deformation data of the sheet S is calculated and transmitted to the pattern forming unit 180.

  In processing step S20, a drawing pattern is formed on the sheet S in accordance with the drawing pattern forming position in accordance with the deformation. After the formation, the fixing of the sheet S by the sheet fixing holding unit 111 is released in processing step S21, and the sheet S is conveyed. Further, the sheet fixing and holding unit 111 is returned to the sheet positioning unit 110 to prepare for the next deformation measurement.

DESCRIPTION OF SYMBOLS 1: Deformation measuring device of sheet | seat or planar object, 2: Deformation measuring device, 3: Position detection camera, 4: Camera holding housing, 5: Camera holding housing operating means, 6: Camera holding housing position control means, 7: Measurement Target: 8: Pattern, 9: Distance sensor, 10: Camera holding case vertical movement means, 80: Deformation state analysis means, 81: Pattern shape storage means, 82: Captured image recording means, 83: Pattern position specifying means in image , 84: Pattern position identification means, 85: Pattern detection position recording means, 86: Pattern position recording means, 87: Deformation amount calculation means, 88: Deformation amount recording means, 89: Measurement object deformation analysis means, 90: Pattern formation position Calculation unit, 91: sheet tension calculation mechanism, 101: sheet conveyance mechanism, 102: conveyance motor, 110: sheet positioning unit, 111: sheet fixing and holding unit, 112: paper 120: tension blocking unit, 121: high friction roller, 122: pressure roller, 130: tension control unit, 131: tension adjusting roller, 132: guide roller, 133: tension adjusting roller driving unit, 134: Tension adjusting roller position control means, 180: pattern forming unit, 181: pattern forming means, 184: pattern forming position control means, S: sheet

In view of the above, an object of the present invention is to provide a deformation measuring apparatus and a sheet processing apparatus that can easily and accurately measure the deformation amount of a sheet and that can perform a deformation process of the sheet .

Claims (18)

A deformation measurement method for measuring a deformation amount of a sheet-like measurement object with a plurality of patterns,
The sheet-shaped measurement object is photographed by a plurality of cameras whose arrangement positions are fixed from a plane parallel to the surface of the sheet-shaped measurement object, and information on the photographed position and photographing information photographed by the camera are used. A deformation measurement method, comprising: calculating a deformation amount of the sheet-like measurement object. The deformation measurement method according to claim 1,
An imaging position by the camera is a position where the pattern enters a field of view of the plurality of cameras. The deformation measurement method according to claim 2,
The distance between the plurality of patterns written on the surface of the sheet-like measurement object and the distance between the plurality of cameras are known in advance, and the relative relationship between the patterns photographed in the field of view of the plurality of cameras A deformation measurement method, comprising: measuring a deformation amount of the sheet-like measurement object according to a distance. The deformation measurement method according to claim 3,
The deformation measurement method characterized by obtaining the deformation amount of the sheet-like measurement object by performing the photographing by the camera and the deformation amount calculation process using the photographing information at a plurality of locations of the sheet-like measurement object. . A deformation measuring device for measuring a deformation amount of a sheet-like measurement object in which a plurality of patterns are described,
A camera holding case in which a plurality of cameras for photographing the surface of the sheet-like measurement object are fixedly arranged, and a camera holding case for moving the camera holding case on a plane parallel to the surface of the sheet-like measurement object Means, camera holding housing position controlling means for controlling the position of the camera holding housing moving means on a plane parallel to the surface of the sheet-like object to be measured, position information determined by the camera holding housing position control means, A deformation measurement apparatus comprising: deformation state analysis means for calculating a deformation amount of the sheet-like measurement object using photographing information photographed by a camera. The deformation measuring device according to claim 5,
The deformation measuring apparatus, wherein the camera holding housing position control means controls the position to a position where the pattern enters the field of view of the plurality of cameras. The deformation measuring device according to claim 6,
The distance between the plurality of patterns written on the surface of the sheet-like measurement object and the distance between the plurality of cameras are known in advance, and the deformation state analyzing means is photographed in the field of view of the plurality of cameras. A deformation measuring apparatus for measuring a deformation amount of the sheet-like measurement object according to a relative distance between the patterns. The deformation measuring device according to claim 7,
The deformation measurement apparatus characterized in that photographing by the camera and the deformation amount calculation process using the photographing information are performed at a plurality of locations of the sheet-shaped measurement target to obtain the deformation amount of the sheet-shaped measurement target. . A sheet processing method for conveying a sheet-like measurement object having a plurality of patterns, measuring a deformation amount, and executing sheet processing,
In the process of transporting the sheet-shaped measurement target, control the tension in the transport direction of the sheet-shaped measurement target in which the plurality of patterns are written,
In the process of measuring the deformation amount of the sheet-shaped measurement object, the sheet-shaped measurement object was photographed by a plurality of cameras whose arrangement positions were fixed from a plane parallel to the surface of the sheet-shaped measurement object. The amount of deformation of the sheet-like object to be measured is calculated using position information and photographing information captured by the camera, the sheet tension is controlled according to the obtained amount of deformation, and the sheet is obtained according to the obtained amount of deformation. Obtain corrected position information with corrected position,
A sheet processing method comprising: performing a predetermined process on a position corresponding to the correction position information in the course of the sheet process. The sheet processing method according to claim 9,
The deformation amount of the sheet-shaped measurement target is obtained in the conveyance direction and the width direction, and the tension in the conveyance direction of the sheet-shaped measurement target is controlled when the calculated deformation amount in the conveyance direction is larger than a predetermined value. A sheet processing method characterized by performing camera photographing again after correction and calculating a deformation amount. The sheet processing method according to claim 10, comprising:
A sheet processing method characterized in that after the tension is corrected, camera photographing is performed again to obtain correction position information in which the sheet position is corrected in accordance with the obtained deformation amount, and the sheet processing is performed in accordance with the correction position information. A sheet processing apparatus including a tension control unit, a deformation measurement unit, and a sheet processing unit for conveying a sheet-like measurement target having a plurality of patterns, measuring a deformation amount, and executing sheet processing Because
The tension control unit includes a tension adjusting unit that controls the tension in the conveyance direction of the sheet-like measurement target on which the plurality of patterns are written,
The deformation measurement unit includes a camera holding housing in which a plurality of cameras for photographing the surface of the sheet-like measurement target is fixed, and the camera holding housing on a plane parallel to the surface of the sheet-like measurement target. Camera holding case moving means for moving, camera holding case position control means for controlling the position of the camera holding case moving means on a plane parallel to the surface of the sheet-like object to be measured, and the camera holding case position control means Deformation state analysis means for calculating the deformation amount of the sheet-like measurement object using the information on the position and the photographing information taken by the camera, and the sheet tension is determined according to the deformation amount obtained by the deformation state analysis means. A sheet tension calculator for giving to the tension adjusting means, and a sheet position correction for giving correction position information for correcting the sheet position according to the deformation amount obtained by the deformation state analyzing means to the sheet processing section. An arithmetic unit,
The sheet processing apparatus includes a processing unit that determines a processing position on the sheet obtained by the sheet position correction calculation unit of the deformation state analysis unit and executes a predetermined process. The sheet processing apparatus according to claim 12,
The sheet processing apparatus, wherein the camera holding housing moving means performs a three-dimensional movement including a movement on a plane parallel to the surface of the sheet-like measurement object. The sheet processing apparatus according to claim 12 or 13,
The sheet when the deformation is measured by the deformation measuring unit is fixed by a sheet fixing and holding unit, and is conveyed to the subsequent sheet processing unit while maintaining the measured deformation state of the sheet. Sheet processing apparatus. The sheet processing apparatus according to any one of claims 12 to 14,
A sheet processing apparatus comprising a tension blocking unit before and after a conveyance process including the deformation measuring unit, and further eliminating the influence of sheet tension in another region on the upstream side or downstream side. The deformation measuring device according to claim 5,
A deformation measuring apparatus comprising a distance sensor capable of measuring a position of a measurement target in an out-of-plane direction, and the distance sensor having a distance sensor moving means capable of moving in parallel with the surface of the measurement target. The deformation measuring device according to claim 16, wherein
A deformation measuring apparatus comprising: a distance sensor moving means capable of moving in parallel with the surface of a measurement object; and the camera holding housing moving means. The deformation measuring device according to claim 5,
The deformation measurement apparatus, wherein the camera holding housing moving means has measurement target plane holding means for holding the measurement target in a fixed plane within a range configured to be movable.

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