WO2014069726A1

WO2014069726A1 - High magnetic field measurement system comprising extremely low temperature stage, and method for controlling same

Info

Publication number: WO2014069726A1
Application number: PCT/KR2013/002159
Authority: WO
Inventors: 최연석; 김동락; 복민갑; 전종수; 이종현
Original assignee: 한국기초과학지원연구원; 윤슬(주)
Priority date: 2012-11-01
Filing date: 2013-03-18
Publication date: 2014-05-08
Also published as: KR101242677B1

Abstract

The present invention relates to a high magnetic field measurement system comprising an extremely low temperature stage and to a method for controlling the same. More particularly, the present invention relates to a system and a method for controlling same, in which the characteristics of a sample based on the location variation can be quickly and easily measured by measuring the characteristics of the sample using a high magnetic field at an extremely low temperature and in a vacuum state. Particularly, the system of the present invention may easily adjust the location and angle of a relevant sample through the manipulation from an external source at the state where the sample is placed on a measurement location under an extremely low temperature high magnetic field environment, by using a three-axis stage that only has a mechanical configuration rather than an electronic device, thus continuously measuring the characteristics of the sample based on the location variation in a short period of time. Further, various measurement results can be obtained in a short period of time, and thus load to the measurement system and to each device can be minimized, thereby improving the life of a product. Accordingly, reliability and competitiveness can be improved not only in the field of magnetic characteristic measurement device and system in an extremely low temperature high magnetic field environment but also in related or similar fields.

Description

High magnetic field measurement system including cryogenic stage and control method thereof

The present invention relates to a high magnetic field measuring system including a cryogenic stage and a control method thereof, and more particularly, to measuring characteristics of a sample by using a high magnetic field in a cryogenic and vacuum state. It is intended for quick and easy measurement.

In particular, the present invention relates to a high magnetic field measurement system including a cryogenic stage that enables the position of a sample in a high magnetic field to be easily changed using a triaxial stage having only a mechanical configuration, and a control method thereof.

In general, analytical devices that measure magnetic characteristics by applying an external magnetic field at low temperature or cryogenic temperature are made of liquid nitrogen or liquid helium to make a low temperature or cryogenic condition. Not only this, but also a problem that requires a large amount of liquid nitrogen or liquid helium.

Korean Patent Publication No. 10-1002118, "Mossbauer Spectroscopy System for Applying a Magnetic Field at Cryogenic Temperature by Using a Freezer," which is one of the technologies for solving this problem, uses a freezer without using liquid nitrogen or liquid helium. The present invention relates to an apparatus for measuring magnetic properties of a sample while maintaining a cryogenic state, and solves the problems caused by the use of liquid nitrogen or liquid helium.

On the other hand, in the analysis device for measuring the magnetic properties of the sample, the measurer uses a sample rod to move the sample to the measurement position to measure. This is because, due to the structural characteristics of the analyzer for measuring the characteristics of the sample in the magnetic field, electronic devices or components affected by the magnetic field cannot be used.

For this reason, conventional analyzers for measuring magnetic properties need to take several samples while changing the position of the sample with respect to the same sample. There was the hassle of having to install and measure the analyzer.

In addition, it is not only necessary to reestablish the measurement environment (for example, to form a cryogenic state and a vacuum state) at each measurement, but also to reset the same environment as the previous measurement environment. Accuracy may be degraded.

This problem is the same in the case of the Republic of Korea Patent Publication No. 10-1002118 "Mossbauer spectroscopy system for applying a magnetic field at cryogenic temperature using a refrigerator."

In order to solve the above problems, the present invention in the process of measuring the magnetic properties of the sample, the position and angle of the sample easily through the external operation in the state in which the sample is placed in the measurement position under a high magnetic environment environment It is an object of the present invention to provide a high magnetic field measurement system including an adjustable cryogenic stage and a control method thereof.

In particular, it is an object of the present invention to provide a high magnetic field measurement system including a cryogenic stage capable of adjusting the position and angle of a sample by a mechanical configuration without using an electronic device, and a control method thereof.

In order to achieve the above object, a high magnetic field measuring system including a cryogenic stage according to the present invention comprises a measurement chamber configured in a superconducting coil for generating a high magnetic field; A triaxial stage constructed in the measurement chamber; A cooling stage coupled to an upper portion of the triaxial stage to place a sample thereon; A vacuum chamber configured to form a vacuum pump for making the inside of the measurement chamber into a vacuum state; A three axis controller for controlling at least one of movement and rotation of the three axis stage; And a cryogenic cooling device for cooling the cooling stage to cryogenic.

In addition, the measurement chamber and the vacuum chamber is spatially connected by a hollow connection tube, the three-axis control device is configured inside the connection tube includes a control line for transmitting power to control the three-axis stage, The cryogenic cooling device may include a cooling line configured in the connection pipe to supply cold air to the cooling stage.

In addition, the control line and the cooling line may be connected by at least one thermal link.

The cooling line may include a refrigerant pipe for refrigerant circulation between the cryogenic cooling device and the cooling stage.

In addition, at least a portion of the refrigerant pipe may be formed of a flexible pipe or a bellows pipe.

In addition, the three-axis stage, the X-axis moving unit for moving the cooling stage in the X-axis direction; A Y-axis moving unit which moves the cooling stage in the Y-axis direction; And it may include a rotating part for rotating the cooling stage.

In addition, the three-axis stage, the X-axis moving unit, the Y-axis moving unit and the rotating unit is sequentially stacked and fixed, the cooling stage may be fixedly installed on the upper portion of the rotating unit.

The X-axis moving unit may further include: a first fixing plate fixed to the lower surface of the measurement chamber; A screw bolt installed to be rotatable to the first fixing plate and rotating by receiving power from the control line; And a first moving plate which moves in a rotational axis direction of the screw bolt in response to the rotation of the screw bolt.

The Y-axis moving unit may further include: a second fixing plate fixedly installed on an upper portion of the first moving plate; A second moving plate configured on an upper portion of the second fixing plate; And it may include a rack pinion gear (Rack Pinion Gear) for receiving the power from the control line to move the second moving plate in a direction orthogonal to the rotation axis direction of the screw bolt.

The rotating unit may further include: a third fixing plate fixed to an upper portion of the second moving plate; A rotating plate configured on an upper portion of the third fixing plate; And it may include a worm gear (Worm Gear) or bevel gear (Bevel Gear) to rotate the rotating plate by receiving the power from the control line Z axis as the rotating shaft.

In addition, a control method of a high magnetic field measuring system including a cryogenic stage according to the present invention includes a sample seating step of moving a cooling stage and a three-axis stage in which a sample is placed into a measurement chamber; A vacuum forming step of operating a vacuum pump to vacuum the inside of the measurement chamber; A cryogenic cooling step of operating the cryogenic cooling device to make the inside of the measurement chamber cryogenic; And it may include a measuring step of measuring the characteristics of the sample using a high magnetic field generated by supplying electrical energy to the superconducting coil.

In addition, the measuring step may include a position adjusting step of adjusting the position of the sample by controlling the three-axis stage.

The measuring step may include: a measuring item calling step of calling a measuring item for measuring a characteristic of the sample; And a measurement order setting step of setting a measurement order corresponding to the measurement item, wherein the position adjustment step may adjust the position of the sample according to the measurement order.

In addition, the measuring step, if all the characteristics of each of the measurement items of the sample in accordance with the measurement order, the measurement information providing step of performing at least one of collecting, storing, transmitting and displaying the measurement information of the characteristics of each measurement item It may further include.

By means of the above-described solution, the present invention makes it possible to easily adjust the position and angle of the sample in accordance with the change in position by operating from the outside in a state where the sample is placed in the measurement position in the cryogenic high magnetic field environment, The advantage is that the properties can be measured continuously in a short time.

In particular, the present invention by using a three-axis stage consisting of only a mechanical configuration, without using an electronic device, it is possible to change the position of the sample placed in the cryogenic high magnetic field environment, thereby reducing the error or error caused by the change of the position and angle of the sample It can be prevented in advance, and it is effective to secure the reliability of the measurement information.

In addition, various measurement results can be obtained for a short time, and as a result, the burden on the measurement system and each device can be minimized, thereby improving the life of the product.

Therefore, it is possible to improve the reliability and competitiveness in the field of magnetic properties measuring apparatus and system in the cryogenic high magnetic field environment, as well as related or similar fields.

1 is a block diagram illustrating a high magnetic field measurement system including a cryogenic stage according to the present invention.

FIG. 2 is a perspective view illustrating a triaxial stage and a cooling stage of FIG. 1. FIG.

3 is a perspective view illustrating the movement of the triaxial stage of FIG. 2 to the X axis.

4 is a perspective view illustrating the movement of the triaxial stage of FIG. 2 to the Y axis.

FIG. 5 is a perspective view illustrating the rotation of the triaxial stage of FIG. 2. FIG.

6 is a partially enlarged perspective view illustrating a thermal link of FIG. 1.

7 is a partially enlarged perspective view illustrating another embodiment of the refrigerant pipe of FIG. 2.

8 is a flow chart illustrating a control method of a high magnetic field measurement system including a cryogenic stage according to the present invention.

FIG. 9 is a flowchart specifically describing step S400 of FIG. 8.

Examples of a high magnetic field measurement system including a cryogenic stage and a control method thereof according to the present invention can be applied in various ways, and the most preferred embodiment will be described below with reference to the accompanying drawings.

Referring to FIG. 1, the high magnetic field measuring system A includes a measurement chamber 100, a three-axis stage 200, a cooling stage 300, a vacuum chamber 400, a three-axis controller 500 and a cryogenic cooling device. And 600.

The measurement chamber 100 is positioned under a high magnetic field environment generated by the superconducting coil C, and has a space portion including a triaxial stage 200 and a cooling stage 300 on which a sample is placed, and on one side thereof, a vacuum chamber. The connector 420 may be configured to be spatially connected to the 400.

The three-axis stage 200 is installed to be fixed to one side, preferably the lower surface inside the measurement chamber 100, to change the position and angle of the sample placed on the upper portion of the cooling stage 300 in accordance with the external operation Can be operated.

The cooling stage 300 is fixedly installed on the upper portion of the triaxial stage 200, and serves to lower the temperature of the sample placed on the upper surface to a cryogenic state.

The vacuum chamber 400 is composed of a vacuum pump 410 on one side, by the operation of the vacuum pump 410 can make the interior of the measurement chamber 100 in a vacuum state.

In FIG. 1, in order to improve the sealing property of the vacuum chamber 400, the connection pipe 420, and the measurement chamber 100, a three-axis controller 500 and a cryogenic cooling device 600 are provided inside the vacuum chamber 400. Although the present invention is not limited thereto, the three-axis controller 500 and the cryogenic cooling device 600 may be replaced with a vacuum chamber if the sealing property of each component that is spatially connected to the vacuum chamber 400 can be ensured. 400 can be configured outside.

The three-axis controller 500 controls at least one of the movement and rotation of the three-axis stage 200, may include a stepper motor (Stepper motor).

In addition, the power generated in the three-axis control device 500 is transmitted to the three-axis stage 200 through the control line 510. At this time, the transmission of the power may be made by using gears for converting the rotational motion into a linear motion or a rotational motion of another rotational shaft.

The cryogenic cooling apparatus 600 cools the cooling stage 300 to a cryogenic state through heat exchange of the refrigerant, and the refrigerant cooled in the cryogenic cooling apparatus 600 is supplied to the cooling stage 300 through the cooling line 610. do. Here, the cryogenic cooling device 600, the cooling line 610 and the cooling stage 300 is preferably configured such that the refrigerant to be heat exchanged to move the independent circulation loop.

Meanwhile, the three-axis stage 200 and the control line 510 are operated by a mechanical configuration. In the case of a mechanical device, heat may be generated by friction between the components in a process of transmitting power. It may act as a factor of raising the temperature inside the measurement chamber 100.

In order to prevent this, the present invention, by connecting the cooling line 610 and the control line 510 in which the refrigerant moves to the thermal link (700), the cold air flowing out of the cooling line 610 control line ( By supplying 510, it is possible to offset the heat generated by the mechanical configuration.

Referring to FIG. 2, the three-axis stage 200 includes an X-axis moving unit 210 for moving the cooling stage 300 in the X-axis direction and a Y-axis moving unit for moving the cooling stage 300 in the Y-axis direction ( 220 and a rotating unit 230 for rotating the cooling stage 300.

In addition, the three-axis stage 200, the X-axis moving unit 210, Y-axis moving unit 220 and the rotating unit 230 may be sequentially stacked and installed, the cooling stage 300 is a rotating unit ( 230 may be fixed to the upper portion.

The X-axis moving part 210 may include a first fixing flat plate 211, a first moving plate 212, a screw bolt 213, and a moving guide 214.

The first fixing plate 211 may be fixedly installed on the lower surface of the measurement chamber 100, and the screw bolt 213 may be rotatable.

In addition, the first moving plate 212 may be screwed to the screw bolt 213, and may be configured to linearly move along the moving guide 214 configured to be parallel to the rotation shaft of the screw bolt 213. Here, the movement guide 214 may include a linear motion (LM) guide.

The Y-axis moving part 220 may include a second fixed plate 221, a second moving plate 222, and a rack gear 223.

The second fixing plate 221 may be fixedly installed on the upper portion of the first moving plate 212 of the X-axis moving unit 210, and pinion gear (Pinion gear) coupled to the rack gear 223 therein (shown) Not). Here, the pivot shaft of the pinion gear may be the same as or parallel to the pivot shaft of the screw bolt 213. Accordingly, the X-axis moving unit 210 and the Y-axis moving unit 220 may move in parallel and orthogonal directions, respectively, with respect to the same rotation axis.

The second moving plate 222 may be configured above the second fixing plate 221 and may be moved by the rack gear 223 linearly corresponding to the rotation of the rack gear.

Of course, the configuration of the X-axis moving unit 210 and the Y-axis moving unit 220 according to the needs of those skilled in the art can be changed to each other, or may be changed to another configuration to perform the same function.

The rotating unit 230 may include a third fixing plate 231 and a rotating plate 232.

The third fixing plate 231 may be fixedly installed on the upper portion of the second moving plate 222 of the Y-axis moving unit 220.

The rotating plate 232 may be configured in the third fixed plate 231 to rotate by receiving power from the control line 510. Here, the rotating plate 232 may rotate the Z axis perpendicular to the plane formed by the movement of the X-axis moving unit 210 and the Y-axis moving unit 220 to the rotating axis.

At this time, the power transmitted from the control line 510 may be the same as or parallel to the rotational axis of the screw bolt 213, in order to convert this rotational movement into a rotational movement using the Z-axis rotational rotation, the rotating plate 232 Can be rotated by a worm gear or a bevel gear.

In FIG. 2, the cooling line 610 may include a refrigerant pipe 611 for refrigerant circulation between the cryogenic cooling device 600 and the cooling stage 300.

At this time, the refrigerant pipe 611 may be configured in a zigzag form in the interior of the cooling stage 300 in order to achieve a greater amount of heat exchange.

In addition, a sample holder 310 in which a sample is placed may be formed at one side of the cooling stage 300, and a transparent window 320 may be formed at a lower portion of the sample holder 310 to transmit light (light). Can be.

In FIG. 3, when the power transmitted through the control line 510 is supplied to the X-axis moving unit 210 in the form of a rotational movement based on the power transmission axis Ax, the screw bolt of the X-axis moving unit 210 is rotated. As the 213 is rotated, the first moving plate 212 screwed with the screw bolt 213 may move along the direction of the power transmission axis Ax.

Therefore, the X-axis moving unit 210 may move the cooling stage 300 configured on the upper part of the rotating unit 230 in the X-axis direction by using the power transmitted through the control line 510.

In FIG. 4, when the power transmitted through the control line 510 is supplied to the Y-axis moving unit 220 in the form of a rotational movement based on the power transmission axis Ax, the pinion gear of the Y-axis moving unit 220 is provided. While not shown, the second moving plate 222 fixed to the rack gear 223 may move in a direction perpendicular to the direction of the power transmission axis Ax.

Accordingly, the Y-axis moving unit 220 may move the cooling stage 300 configured at the upper portion of the rotating unit 230 in the Y-axis direction by using the power transmitted through the control line 510.

In FIG. 5, when the power transmitted through the control line 510 is supplied to the rotating unit 230 in the form of a rotational movement with respect to the power transmission axis Ax, the third fixed plate 231 and the rotating plate 232. The rotating plate 232 can be rotated by a worm gear (Worm gear) configured between.

Therefore, the rotating unit 230 may rotate the cooling stage 300 configured at the upper portion of the rotating unit 230 using the Z-axis as the rotating shaft by using the power transmitted through the control line 510.

Referring to FIG. 6, the thermal link 700 may be configured to be in contact with the external surfaces of the control line 510 and the cooling line 610 to supply the cool air of the cooling line 610 to the control line 510.

At this time, the larger the width of the thermal link 700, the greater the amount of cold air delivered, but if the area in contact with the control line 510 is wide, the heat energy generated by the movement of the control line 510 is Can increase.

Therefore, the width of the thermal link 700 is configured to be minimized, and as shown in FIG. 1, a plurality of thermal links 700 may be configured at predetermined intervals.

Referring to FIG. 7, at least a portion of the refrigerant pipe 611 may be formed as a bellows pipe 612.

As such, when at least a portion of the refrigerant pipe 611 is formed as the bellows pipe 612, the refrigerant pipe 611 and the cooling stage 300 are stably connected to each other even when the cooling stage 300 moves or rotates. The circulation can be made smoothly.

In addition, at least a part of the refrigerant pipe 611 may be formed as a flexible pipe.

Referring to FIG. 8, the measurer may move the cooling stage 300 and the three-axis stage 200 on which the sample is placed into the measurement chamber 100 to seat the sample at the measurement position (step S100).

When the sample is located at the desired position, the measurer operates the vacuum pump 410 to make the inside of the measuring chamber 100 in a vacuum state (step S200), and operates the cryogenic cooling device 600 to open the inside of the measuring chamber 100. Make the cryogenic state (step S300).

As described above, when the sample is located at the measurement position and the composition of the measurement environment is completed, the measurer supplies electric energy to the superconducting coil c and generates a high magnetic field to measure the characteristics of the sample (step S400).

Such a series of processes can be operated by the measurer, but is preferably controlled automatically through the measurement control device 800 as shown in FIG.

Hereinafter, the process of measuring the characteristics of the sample according to various position changes through the measurement control device 800 will be described.

FIG. 9 is a flowchart specifically describing step S400 of FIG. 8.

Referring to FIG. 9, the measurement control device 800 may call a measurement item for measuring the characteristic of the sample (step S401). Here, the measurement items are classified according to the position and angle of the sample, and may be preset and stored in the measurement control device 800 according to the requirements of those skilled in the art. In addition, the measurement item may be input to the measurement control device 800 by the measurer.

The measurement control apparatus 800 may set the measurement order corresponding to the measurement item (step S402). For example, the measurement control device 800 may move a certain distance to the X axis after the first measurement, and then measure the second measurement, a third distance to the Y axis, a third measurement, and rotate by θ to set the measurement order. have.

The measurement control device 800 may adjust the position of the sample by controlling the three-axis stage 200 through the three-axis control device 500 in accordance with the measurement order (step S403), and when the adjustment of the position is completed, Measurement can be performed (step S404).

If there are additional measurement items to measure, the measurement control device 800 may repeat steps 'S403' and 'S404', and if the characteristics of each measurement item of the sample are measured according to the measurement procedure (step S405). In addition, after collecting and storing the measurement information of the characteristic of each measurement item according to the requirements of those skilled in the art, it may be transmitted to an external display device for display (step S406).

The high magnetic field measuring system including the cryogenic stage and the control method thereof according to the present invention have been described above. Such a technical configuration of the present invention will be understood by those skilled in the art that the present invention can be implemented in other specific forms without changing the technical spirit or essential features of the present invention.

Therefore, the above-described embodiments are to be understood in all respects as illustrative and not restrictive, and the scope of the present invention is indicated by the appended claims rather than the foregoing description, and therefore the meaning of the claims. And all changes or modifications derived from the scope and equivalent concept thereof should be construed as being included in the scope of the present invention.

It is possible to improve the reliability and competitiveness in the field of magnetic properties measuring apparatus and system in the cryogenic high magnetic environment, as well as related or similar fields.

Claims

A measurement chamber configured in a superconducting coil for generating a high magnetic field;

A triaxial stage constructed in the measurement chamber;

A cooling stage coupled to an upper portion of the triaxial stage to place a sample thereon;

A vacuum chamber configured to form a vacuum pump for making the inside of the measurement chamber into a vacuum state;

A three axis controller for controlling at least one of movement and rotation of the three axis stage; And

And a cryogenic stage comprising a cryogenic cooling device for cooling the cooling stage to cryogenic temperature.
The method of claim 1,

The measuring chamber and the vacuum chamber are spatially connected by a hollow connecting tube,

The three axis control device includes a control line configured to transfer power for controlling the three axis stage is configured inside the connection pipe,

The cryogenic cooling device is a high magnetic field measurement system comprising a cryogenic stage, characterized in that the cooling pipe is configured to be provided inside the connection pipe for supplying cold air to the cooling stage.
The method of claim 2,

The control line and the cooling line is a high magnetic field measuring system comprising a cryogenic stage, characterized in that connected by at least one thermal link (Thermal link).
The method of claim 2,

The cooling line,

A high magnetic field measurement system comprising a cryogenic stage, characterized in that it comprises a refrigerant pipe for refrigerant circulation between the cryogenic cooling device and the cooling stage.
The method of claim 4, wherein

At least part of the refrigerant pipe,

A high magnetic field measurement system comprising a cryogenic stage, characterized in that it is formed of a flexible tube or bellows tube.
The method of claim 1,

The triaxial stage,

An X-axis moving unit which moves the cooling stage in the X-axis direction;

A Y-axis moving unit which moves the cooling stage in the Y-axis direction; And

High magnetic field measurement system comprising a cryogenic stage, characterized in that it comprises a rotating part for rotating the cooling stage.
The method of claim 6,

The three-axis stage, the X-axis moving unit, the Y-axis moving unit and the rotating unit is sequentially laminated and fixed,

The cooling stage is a high magnetic field measurement system comprising a cryogenic stage, characterized in that fixed to the upper portion of the rotating part.
The method of claim 7, wherein

The X-axis moving unit,

A first fixing plate fixed to the lower surface of the measurement chamber;

A screw bolt installed to be rotatable to the first fixing plate and rotating by receiving power from the control line; And

A high magnetic field measuring system comprising a cryogenic stage, characterized in that it comprises a first moving plate moving in the direction of the rotational axis of the screw bolt corresponding to the rotation of the screw bolt.
The method of claim 8,

The Y-axis moving unit,

A second fixing plate fixedly installed on an upper portion of the first moving plate;

A second moving plate configured on an upper portion of the second fixing plate; And

High magnetic field measurement comprising a cryogenic stage, characterized in that it comprises a rack pinion gear for receiving power from the control line to move the second moving plate in a direction orthogonal to the rotational axis direction of the screw bolt. system.
The method of claim 9,

The rotating part,

A third fixing plate fixedly installed on an upper portion of the second moving plate;

A rotating plate configured on an upper portion of the third fixing plate; And

High magnetic field measurement system comprising a cryogenic stage characterized in that it comprises a worm gear (Worm Gear) or a bevel gear (Rom) to rotate the rotating plate by receiving the power from the control line Z axis as a rotating shaft.
A sample seating step of moving the cooling stage and the three-axis stage in which the sample is placed into the measurement chamber;

A vacuum forming step of operating a vacuum pump to vacuum the inside of the measurement chamber;

A cryogenic cooling step of operating the cryogenic cooling device to make the inside of the measurement chamber cryogenic; And

A control method of a high magnetic field measuring system including a cryogenic stage including a measuring step of measuring characteristics of a sample using a high magnetic field generated by supplying electrical energy to a superconducting coil.
The method of claim 11,

The measuring step,

And a position adjusting step of adjusting the position of the sample by controlling the three-axis stage.
The method of claim 12,

The measuring step,

A measurement item calling step of calling a measurement item for measuring a characteristic of the sample; And

The method may further include a measurement order setting step of setting a measurement order corresponding to the measurement item.

The position adjustment step,

Control method of a high magnetic field measuring system comprising a cryogenic stage, characterized in that for adjusting the position of the sample in accordance with the measuring sequence.
The method of claim 13,

The measuring step,

If all the characteristics of the measurement items of the sample in accordance with the measurement order is measured, further comprising the measurement information providing step of performing at least one of collecting, storing, transmitting and displaying the measurement information of the characteristics of each measurement item Control method of a high magnetic field measurement system comprising a cryogenic stage.