WO2014069726A1 - Système de mesure de champ magnétique élevé comprenant un étage à température extrêmement basse et procédé de commande du système - Google Patents

Système de mesure de champ magnétique élevé comprenant un étage à température extrêmement basse et procédé de commande du système Download PDF

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Publication number
WO2014069726A1
WO2014069726A1 PCT/KR2013/002159 KR2013002159W WO2014069726A1 WO 2014069726 A1 WO2014069726 A1 WO 2014069726A1 KR 2013002159 W KR2013002159 W KR 2013002159W WO 2014069726 A1 WO2014069726 A1 WO 2014069726A1
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WO
WIPO (PCT)
Prior art keywords
stage
measurement
cryogenic
magnetic field
high magnetic
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PCT/KR2013/002159
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English (en)
Korean (ko)
Inventor
최연석
김동락
복민갑
전종수
이종현
Original Assignee
한국기초과학지원연구원
윤슬(주)
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Publication of WO2014069726A1 publication Critical patent/WO2014069726A1/fr

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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R33/00—Arrangements or instruments for measuring magnetic variables
    • G01R33/007—Environmental aspects, e.g. temperature variations, radiation, stray fields
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N27/00—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
    • G01N27/72—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating magnetic variables
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N25/00—Investigating or analyzing materials by the use of thermal means
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R33/00—Arrangements or instruments for measuring magnetic variables
    • G01R33/007—Environmental aspects, e.g. temperature variations, radiation, stray fields
    • G01R33/0082—Compensation, e.g. compensating for temperature changes

Definitions

  • the present invention relates to a high magnetic field measuring system including a cryogenic stage and a control method thereof, and more particularly, to measuring characteristics of a sample by using a high magnetic field in a cryogenic and vacuum state. It is intended for quick and easy measurement.
  • the present invention relates to a high magnetic field measurement system including a cryogenic stage that enables the position of a sample in a high magnetic field to be easily changed using a triaxial stage having only a mechanical configuration, and a control method thereof.
  • analytical devices that measure magnetic characteristics by applying an external magnetic field at low temperature or cryogenic temperature are made of liquid nitrogen or liquid helium to make a low temperature or cryogenic condition. Not only this, but also a problem that requires a large amount of liquid nitrogen or liquid helium.
  • Korean Patent Publication No. 10-1002118 "Mossbauer Spectroscopy System for Applying a Magnetic Field at Cryogenic Temperature by Using a Freezer," which is one of the technologies for solving this problem, uses a freezer without using liquid nitrogen or liquid helium.
  • the present invention relates to an apparatus for measuring magnetic properties of a sample while maintaining a cryogenic state, and solves the problems caused by the use of liquid nitrogen or liquid helium.
  • the measurer uses a sample rod to move the sample to the measurement position to measure. This is because, due to the structural characteristics of the analyzer for measuring the characteristics of the sample in the magnetic field, electronic devices or components affected by the magnetic field cannot be used.
  • the present invention in the process of measuring the magnetic properties of the sample, the position and angle of the sample easily through the external operation in the state in which the sample is placed in the measurement position under a high magnetic environment environment It is an object of the present invention to provide a high magnetic field measurement system including an adjustable cryogenic stage and a control method thereof.
  • a high magnetic field measuring system including a cryogenic stage comprises a measurement chamber configured in a superconducting coil for generating a high magnetic field; A triaxial stage constructed in the measurement chamber; A cooling stage coupled to an upper portion of the triaxial stage to place a sample thereon; A vacuum chamber configured to form a vacuum pump for making the inside of the measurement chamber into a vacuum state; A three axis controller for controlling at least one of movement and rotation of the three axis stage; And a cryogenic cooling device for cooling the cooling stage to cryogenic.
  • the measurement chamber and the vacuum chamber is spatially connected by a hollow connection tube
  • the three-axis control device is configured inside the connection tube includes a control line for transmitting power to control the three-axis stage
  • the cryogenic cooling device may include a cooling line configured in the connection pipe to supply cold air to the cooling stage.
  • control line and the cooling line may be connected by at least one thermal link.
  • the cooling line may include a refrigerant pipe for refrigerant circulation between the cryogenic cooling device and the cooling stage.
  • At least a portion of the refrigerant pipe may be formed of a flexible pipe or a bellows pipe.
  • the cooling stage may be fixedly installed on the upper portion of the rotating unit.
  • the X-axis moving unit may further include: a first fixing plate fixed to the lower surface of the measurement chamber; A screw bolt installed to be rotatable to the first fixing plate and rotating by receiving power from the control line; And a first moving plate which moves in a rotational axis direction of the screw bolt in response to the rotation of the screw bolt.
  • the Y-axis moving unit may further include: a second fixing plate fixedly installed on an upper portion of the first moving plate; A second moving plate configured on an upper portion of the second fixing plate; And it may include a rack pinion gear (Rack Pinion Gear) for receiving the power from the control line to move the second moving plate in a direction orthogonal to the rotation axis direction of the screw bolt.
  • a rack pinion gear Riv Pinion Gear
  • the rotating unit may further include: a third fixing plate fixed to an upper portion of the second moving plate; A rotating plate configured on an upper portion of the third fixing plate; And it may include a worm gear (Worm Gear) or bevel gear (Bevel Gear) to rotate the rotating plate by receiving the power from the control line Z axis as the rotating shaft.
  • a third fixing plate fixed to an upper portion of the second moving plate
  • a rotating plate configured on an upper portion of the third fixing plate
  • it may include a worm gear (Worm Gear) or bevel gear (Bevel Gear) to rotate the rotating plate by receiving the power from the control line Z axis as the rotating shaft.
  • a control method of a high magnetic field measuring system including a cryogenic stage includes a sample seating step of moving a cooling stage and a three-axis stage in which a sample is placed into a measurement chamber; A vacuum forming step of operating a vacuum pump to vacuum the inside of the measurement chamber; A cryogenic cooling step of operating the cryogenic cooling device to make the inside of the measurement chamber cryogenic; And it may include a measuring step of measuring the characteristics of the sample using a high magnetic field generated by supplying electrical energy to the superconducting coil.
  • the measuring step may include a position adjusting step of adjusting the position of the sample by controlling the three-axis stage.
  • the measuring step may include: a measuring item calling step of calling a measuring item for measuring a characteristic of the sample; And a measurement order setting step of setting a measurement order corresponding to the measurement item, wherein the position adjustment step may adjust the position of the sample according to the measurement order.
  • the measuring step if all the characteristics of each of the measurement items of the sample in accordance with the measurement order, the measurement information providing step of performing at least one of collecting, storing, transmitting and displaying the measurement information of the characteristics of each measurement item It may further include.
  • the present invention makes it possible to easily adjust the position and angle of the sample in accordance with the change in position by operating from the outside in a state where the sample is placed in the measurement position in the cryogenic high magnetic field environment,
  • the advantage is that the properties can be measured continuously in a short time.
  • the present invention by using a three-axis stage consisting of only a mechanical configuration, without using an electronic device, it is possible to change the position of the sample placed in the cryogenic high magnetic field environment, thereby reducing the error or error caused by the change of the position and angle of the sample It can be prevented in advance, and it is effective to secure the reliability of the measurement information.
  • FIG. 1 is a block diagram illustrating a high magnetic field measurement system including a cryogenic stage according to the present invention.
  • FIG. 2 is a perspective view illustrating a triaxial stage and a cooling stage of FIG. 1.
  • FIG. 3 is a perspective view illustrating the movement of the triaxial stage of FIG. 2 to the X axis.
  • FIG. 4 is a perspective view illustrating the movement of the triaxial stage of FIG. 2 to the Y axis.
  • FIG. 5 is a perspective view illustrating the rotation of the triaxial stage of FIG. 2.
  • FIG. 6 is a partially enlarged perspective view illustrating a thermal link of FIG. 1.
  • FIG. 7 is a partially enlarged perspective view illustrating another embodiment of the refrigerant pipe of FIG. 2.
  • FIG. 8 is a flow chart illustrating a control method of a high magnetic field measurement system including a cryogenic stage according to the present invention.
  • FIG. 9 is a flowchart specifically describing step S400 of FIG. 8.
  • FIG. 1 is a block diagram illustrating a high magnetic field measurement system including a cryogenic stage according to the present invention.
  • the high magnetic field measuring system A includes a measurement chamber 100, a three-axis stage 200, a cooling stage 300, a vacuum chamber 400, a three-axis controller 500 and a cryogenic cooling device. And 600.
  • the measurement chamber 100 is positioned under a high magnetic field environment generated by the superconducting coil C, and has a space portion including a triaxial stage 200 and a cooling stage 300 on which a sample is placed, and on one side thereof, a vacuum chamber.
  • the connector 420 may be configured to be spatially connected to the 400.
  • the three-axis stage 200 is installed to be fixed to one side, preferably the lower surface inside the measurement chamber 100, to change the position and angle of the sample placed on the upper portion of the cooling stage 300 in accordance with the external operation Can be operated.
  • the cooling stage 300 is fixedly installed on the upper portion of the triaxial stage 200, and serves to lower the temperature of the sample placed on the upper surface to a cryogenic state.
  • the vacuum chamber 400 is composed of a vacuum pump 410 on one side, by the operation of the vacuum pump 410 can make the interior of the measurement chamber 100 in a vacuum state.
  • a three-axis controller 500 and a cryogenic cooling device 600 are provided inside the vacuum chamber 400.
  • the three-axis controller 500 and the cryogenic cooling device 600 may be replaced with a vacuum chamber if the sealing property of each component that is spatially connected to the vacuum chamber 400 can be ensured. 400 can be configured outside.
  • the three-axis controller 500 controls at least one of the movement and rotation of the three-axis stage 200, may include a stepper motor (Stepper motor).
  • the power generated in the three-axis control device 500 is transmitted to the three-axis stage 200 through the control line 510.
  • the transmission of the power may be made by using gears for converting the rotational motion into a linear motion or a rotational motion of another rotational shaft.
  • the cryogenic cooling apparatus 600 cools the cooling stage 300 to a cryogenic state through heat exchange of the refrigerant, and the refrigerant cooled in the cryogenic cooling apparatus 600 is supplied to the cooling stage 300 through the cooling line 610. do.
  • the cryogenic cooling device 600, the cooling line 610 and the cooling stage 300 is preferably configured such that the refrigerant to be heat exchanged to move the independent circulation loop.
  • the three-axis stage 200 and the control line 510 are operated by a mechanical configuration.
  • heat may be generated by friction between the components in a process of transmitting power. It may act as a factor of raising the temperature inside the measurement chamber 100.
  • the present invention by connecting the cooling line 610 and the control line 510 in which the refrigerant moves to the thermal link (700), the cold air flowing out of the cooling line 610 control line ( By supplying 510, it is possible to offset the heat generated by the mechanical configuration.
  • FIG. 2 is a perspective view illustrating a triaxial stage and a cooling stage of FIG. 1.
  • the three-axis stage 200 includes an X-axis moving unit 210 for moving the cooling stage 300 in the X-axis direction and a Y-axis moving unit for moving the cooling stage 300 in the Y-axis direction ( 220 and a rotating unit 230 for rotating the cooling stage 300.
  • the three-axis stage 200, the X-axis moving unit 210, Y-axis moving unit 220 and the rotating unit 230 may be sequentially stacked and installed, the cooling stage 300 is a rotating unit ( 230 may be fixed to the upper portion.
  • the X-axis moving part 210 may include a first fixing flat plate 211, a first moving plate 212, a screw bolt 213, and a moving guide 214.
  • the first fixing plate 211 may be fixedly installed on the lower surface of the measurement chamber 100, and the screw bolt 213 may be rotatable.
  • the first moving plate 212 may be screwed to the screw bolt 213, and may be configured to linearly move along the moving guide 214 configured to be parallel to the rotation shaft of the screw bolt 213.
  • the movement guide 214 may include a linear motion (LM) guide.
  • the Y-axis moving part 220 may include a second fixed plate 221, a second moving plate 222, and a rack gear 223.
  • the second fixing plate 221 may be fixedly installed on the upper portion of the first moving plate 212 of the X-axis moving unit 210, and pinion gear (Pinion gear) coupled to the rack gear 223 therein (shown) Not).
  • the pivot shaft of the pinion gear may be the same as or parallel to the pivot shaft of the screw bolt 213. Accordingly, the X-axis moving unit 210 and the Y-axis moving unit 220 may move in parallel and orthogonal directions, respectively, with respect to the same rotation axis.
  • the second moving plate 222 may be configured above the second fixing plate 221 and may be moved by the rack gear 223 linearly corresponding to the rotation of the rack gear.
  • the configuration of the X-axis moving unit 210 and the Y-axis moving unit 220 can be changed to each other, or may be changed to another configuration to perform the same function.
  • the rotating unit 230 may include a third fixing plate 231 and a rotating plate 232.
  • the third fixing plate 231 may be fixedly installed on the upper portion of the second moving plate 222 of the Y-axis moving unit 220.
  • the rotating plate 232 may be configured in the third fixed plate 231 to rotate by receiving power from the control line 510.
  • the rotating plate 232 may rotate the Z axis perpendicular to the plane formed by the movement of the X-axis moving unit 210 and the Y-axis moving unit 220 to the rotating axis.
  • the power transmitted from the control line 510 may be the same as or parallel to the rotational axis of the screw bolt 213, in order to convert this rotational movement into a rotational movement using the Z-axis rotational rotation, the rotating plate 232 Can be rotated by a worm gear or a bevel gear.
  • the cooling line 610 may include a refrigerant pipe 611 for refrigerant circulation between the cryogenic cooling device 600 and the cooling stage 300.
  • the refrigerant pipe 611 may be configured in a zigzag form in the interior of the cooling stage 300 in order to achieve a greater amount of heat exchange.
  • a sample holder 310 in which a sample is placed may be formed at one side of the cooling stage 300, and a transparent window 320 may be formed at a lower portion of the sample holder 310 to transmit light (light). Can be.
  • FIG. 3 is a perspective view illustrating the movement of the triaxial stage of FIG. 2 to the X axis.
  • the X-axis moving unit 210 may move the cooling stage 300 configured on the upper part of the rotating unit 230 in the X-axis direction by using the power transmitted through the control line 510.
  • FIG. 4 is a perspective view illustrating the movement of the triaxial stage of FIG. 2 to the Y axis.
  • the pinion gear of the Y-axis moving unit 220 is provided. While not shown, the second moving plate 222 fixed to the rack gear 223 may move in a direction perpendicular to the direction of the power transmission axis Ax.
  • the Y-axis moving unit 220 may move the cooling stage 300 configured at the upper portion of the rotating unit 230 in the Y-axis direction by using the power transmitted through the control line 510.
  • FIG. 5 is a perspective view illustrating the rotation of the triaxial stage of FIG. 2.
  • the rotating unit 230 may rotate the cooling stage 300 configured at the upper portion of the rotating unit 230 using the Z-axis as the rotating shaft by using the power transmitted through the control line 510.
  • FIG. 6 is a partially enlarged perspective view illustrating a thermal link of FIG. 1.
  • the thermal link 700 may be configured to be in contact with the external surfaces of the control line 510 and the cooling line 610 to supply the cool air of the cooling line 610 to the control line 510.
  • the width of the thermal link 700 is configured to be minimized, and as shown in FIG. 1, a plurality of thermal links 700 may be configured at predetermined intervals.
  • FIG. 7 is a partially enlarged perspective view illustrating another embodiment of the refrigerant pipe of FIG. 2.
  • At least a portion of the refrigerant pipe 611 may be formed as a bellows pipe 612.
  • the refrigerant pipe 611 and the cooling stage 300 are stably connected to each other even when the cooling stage 300 moves or rotates.
  • the circulation can be made smoothly.
  • At least a part of the refrigerant pipe 611 may be formed as a flexible pipe.
  • FIG. 8 is a flow chart illustrating a control method of a high magnetic field measurement system including a cryogenic stage according to the present invention.
  • the measurer may move the cooling stage 300 and the three-axis stage 200 on which the sample is placed into the measurement chamber 100 to seat the sample at the measurement position (step S100).
  • the measurer When the sample is located at the desired position, the measurer operates the vacuum pump 410 to make the inside of the measuring chamber 100 in a vacuum state (step S200), and operates the cryogenic cooling device 600 to open the inside of the measuring chamber 100. Make the cryogenic state (step S300).
  • the measurer supplies electric energy to the superconducting coil c and generates a high magnetic field to measure the characteristics of the sample (step S400).
  • Such a series of processes can be operated by the measurer, but is preferably controlled automatically through the measurement control device 800 as shown in FIG.
  • FIG. 9 is a flowchart specifically describing step S400 of FIG. 8.
  • the measurement control device 800 may call a measurement item for measuring the characteristic of the sample (step S401).
  • the measurement items are classified according to the position and angle of the sample, and may be preset and stored in the measurement control device 800 according to the requirements of those skilled in the art.
  • the measurement item may be input to the measurement control device 800 by the measurer.
  • the measurement control apparatus 800 may set the measurement order corresponding to the measurement item (step S402). For example, the measurement control device 800 may move a certain distance to the X axis after the first measurement, and then measure the second measurement, a third distance to the Y axis, a third measurement, and rotate by ⁇ to set the measurement order. have.
  • the measurement control device 800 may adjust the position of the sample by controlling the three-axis stage 200 through the three-axis control device 500 in accordance with the measurement order (step S403), and when the adjustment of the position is completed, Measurement can be performed (step S404).
  • the measurement control device 800 may repeat steps 'S403' and 'S404', and if the characteristics of each measurement item of the sample are measured according to the measurement procedure (step S405). In addition, after collecting and storing the measurement information of the characteristic of each measurement item according to the requirements of those skilled in the art, it may be transmitted to an external display device for display (step S406).

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Abstract

La présente invention concerne un système de mesure de champ magnétique élevé comprenant un étage à température extrêmement basse et un procédé de commande du système. Plus particulièrement, la présente invention concerne un système et un procédé de commande du système, dans lequel il est possible de calculer rapidement et facilement les caractéristiques d'un échantillon, en fonction de la variation de l'emplacement, en utilisant un champ magnétique élevé à une température extrêmement basse et dans un état sous vide. En particulier, le système de la présente invention peut facilement ajuster l'emplacement et l'angle d'un échantillon concerné à travers une manipulation depuis une source externe, à l'état où l'échantillon est placé sur un emplacement de mesure dans un environnement de champ magnétique élevé à température extrêmement basse, en utilisant un étage à trois axes possédant uniquement une configuration mécanique plutôt qu'un dispositif électronique, mesurant ainsi de façon continue les caractéristiques de l'échantillon en fonction la variation de l'emplacement sur une courte période. En outre, il est possible d'obtenir différents résultats de mesure sur une courte période, et de réduire au minimum la charge du système de mesure et de chaque dispositif, améliorant ainsi la durée de vie d'un produit. De cette façon, il est possible d'améliorer la fiabilité et la compétitivité non seulement dans le domaine des dispositifs et systèmes de mesure de caractéristique magnétique dans un environnement de champ magnétique élevé à température extrêmement basse, mais également dans les domaines associés ou semblables.
PCT/KR2013/002159 2012-11-01 2013-03-18 Système de mesure de champ magnétique élevé comprenant un étage à température extrêmement basse et procédé de commande du système WO2014069726A1 (fr)

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KR1020120122776A KR101242677B1 (ko) 2012-11-01 2012-11-01 극저온 스테이지를 포함하는 고자기장 측정 시스템 및 그 제어 방법
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Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN108430850A (zh) * 2016-01-25 2018-08-21 日产自动车株式会社 车辆的滑行停止控制方法及控制装置
CN108885032A (zh) * 2016-03-16 2018-11-23 住友重机械工业株式会社 可动工作台冷却装置及可动工作台冷却系统
CN111965243A (zh) * 2020-07-29 2020-11-20 华南理工大学 实验用磁场加载动态控制装置

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CN108445248B (zh) * 2018-05-16 2024-02-27 大连交通大学 一种低温二维真空样品台
KR102481575B1 (ko) * 2021-05-31 2022-12-28 에코피아 주식회사 진공 챔버를 적용한 제백 계수 및 홀 효과 측정 장치

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2000121713A (ja) * 1998-10-09 2000-04-28 Taiyo Toyo Sanso Co Ltd 低温試料位置制御装置
KR20100045551A (ko) * 2008-10-24 2010-05-04 국민대학교산학협력단 냉동기를 이용하여 극저온에서 자기장을 인가하는 뫼스바우어 분광시스템
KR20100063327A (ko) * 2008-12-03 2010-06-11 한국전기연구원 자장각도 의존성 초전도 특성 측정 장치
KR20120054135A (ko) * 2010-11-19 2012-05-30 한국기초과학지원연구원 극저온 냉동기를 이용한 초전도 자석 시스템

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2000121713A (ja) * 1998-10-09 2000-04-28 Taiyo Toyo Sanso Co Ltd 低温試料位置制御装置
KR20100045551A (ko) * 2008-10-24 2010-05-04 국민대학교산학협력단 냉동기를 이용하여 극저온에서 자기장을 인가하는 뫼스바우어 분광시스템
KR20100063327A (ko) * 2008-12-03 2010-06-11 한국전기연구원 자장각도 의존성 초전도 특성 측정 장치
KR20120054135A (ko) * 2010-11-19 2012-05-30 한국기초과학지원연구원 극저온 냉동기를 이용한 초전도 자석 시스템

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN108430850A (zh) * 2016-01-25 2018-08-21 日产自动车株式会社 车辆的滑行停止控制方法及控制装置
CN108430850B (zh) * 2016-01-25 2021-01-15 日产自动车株式会社 车辆的滑行停止控制方法及控制装置
CN108885032A (zh) * 2016-03-16 2018-11-23 住友重机械工业株式会社 可动工作台冷却装置及可动工作台冷却系统
CN108885032B (zh) * 2016-03-16 2020-08-25 住友重机械工业株式会社 可动工作台冷却装置及可动工作台冷却系统
CN111965243A (zh) * 2020-07-29 2020-11-20 华南理工大学 实验用磁场加载动态控制装置

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