CN108445248B - Low-temperature two-dimensional vacuum sample stage - Google Patents
Low-temperature two-dimensional vacuum sample stage Download PDFInfo
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- CN108445248B CN108445248B CN201810469666.XA CN201810469666A CN108445248B CN 108445248 B CN108445248 B CN 108445248B CN 201810469666 A CN201810469666 A CN 201810469666A CN 108445248 B CN108445248 B CN 108445248B
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- 229910000831 Steel Inorganic materials 0.000 claims abstract description 87
- 239000010959 steel Substances 0.000 claims abstract description 87
- 238000001816 cooling Methods 0.000 claims abstract description 28
- 230000033001 locomotion Effects 0.000 claims abstract description 18
- 238000009792 diffusion process Methods 0.000 claims abstract description 3
- 230000005540 biological transmission Effects 0.000 claims description 104
- 229910052802 copper Inorganic materials 0.000 claims description 13
- 239000010949 copper Substances 0.000 claims description 13
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 claims description 12
- 238000004519 manufacturing process Methods 0.000 abstract description 3
- 238000010168 coupling process Methods 0.000 description 5
- 238000005859 coupling reaction Methods 0.000 description 5
- 230000005389 magnetism Effects 0.000 description 5
- 230000008878 coupling Effects 0.000 description 4
- 238000011160 research Methods 0.000 description 4
- 238000011161 development Methods 0.000 description 2
- 239000001307 helium Substances 0.000 description 2
- 229910052734 helium Inorganic materials 0.000 description 2
- SWQJXJOGLNCZEY-UHFFFAOYSA-N helium atom Chemical compound [He] SWQJXJOGLNCZEY-UHFFFAOYSA-N 0.000 description 2
- 239000007788 liquid Substances 0.000 description 2
- 238000000034 method Methods 0.000 description 2
- 230000009286 beneficial effect Effects 0.000 description 1
- 238000004140 cleaning Methods 0.000 description 1
- 239000002826 coolant Substances 0.000 description 1
- 238000001514 detection method Methods 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 230000004927 fusion Effects 0.000 description 1
- 239000007789 gas Substances 0.000 description 1
- 238000009776 industrial production Methods 0.000 description 1
- 238000012423 maintenance Methods 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 230000002035 prolonged effect Effects 0.000 description 1
- 238000012827 research and development Methods 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 239000007787 solid Substances 0.000 description 1
- 238000006467 substitution reaction Methods 0.000 description 1
Classifications
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N35/00—Automatic analysis not limited to methods or materials provided for in any single one of groups G01N1/00 - G01N33/00; Handling materials therefor
- G01N35/10—Devices for transferring samples or any liquids to, in, or from, the analysis apparatus, e.g. suction devices, injection devices
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N35/00—Automatic analysis not limited to methods or materials provided for in any single one of groups G01N1/00 - G01N33/00; Handling materials therefor
Abstract
The invention belongs to the field of ultrahigh vacuum equipment, and particularly relates to a low-temperature two-dimensional vacuum sample stage. The power of the two rotary driving motors is respectively transmitted into the sample stage rotating mechanism by a first nonmagnetic rotating steel wire and a second nonmagnetic rotating steel wire, and the first nonmagnetic rotating steel wire transmits torque into the sample stage rotating mechanism to realize the in-plane rotating motion of the sample stage; the second non-magnetic rotating steel wire transmits torque into the sample table rotating mechanism to realize the inclination angle swing of the sample table; the lower end of the cooling sleeve is contacted with the sample stage rotating mechanism, and the upper end of the cooling sleeve is provided with a cold source inlet so as to keep the sample stage rotating mechanism at low temperature; the sample platform rotating mechanism is coated with a low-temperature shielding cover to prevent temperature diffusion. The invention has simple structure, convenient production and low cost, and meets different use requirements; the invention can work in ultra-low temperature environment while maintaining ultra-high vacuum environment.
Description
Technical Field
The invention belongs to the field of ultrahigh vacuum equipment, and particularly relates to a low-temperature two-dimensional vacuum sample stage.
Background
The vacuum is classified into a low vacuum field, a medium vacuum field, a high vacuum field, an ultra-high vacuum field and an ultra-high vacuum field according to various degrees. In the ultra-high vacuum field, including molecules adsorbed on the walls of the vacuum vessel, the presence of gas molecules is almost negligible and the maintenance time of the solid cleaning surface can be relatively prolonged. Therefore, in extreme environments such as vacuum, low temperature, etc., studies in the fields of surface science, semiconductor applications, nuclear fusion devices, etc., have been conducted, and these studies have played an important role in solving the problems such as environment, energy, new materials, etc., faced by current humans. Therefore, such demands are becoming particularly urgent for the development of devices that operate in extreme environments such as ultra-high vacuum fields, ultra-low temperature environments, and the like.
In the prior art, as in the field of photoelectron detection, there is no better solution to the problem of multi-dimensional movement in ultra-high vacuum and extremely low temperature environments, generally, the movement of a sample stage is controlled by a manipulator, but the control algorithm of the manipulator equipment is complex, the cost is higher, and an electronic element cannot adapt to the extremely low temperature environments, so that it is urgent to develop a device capable of realizing multi-dimensional movement in the extremely low temperature environments.
At present, the research and development production and the technical popularization of high-end vacuum equipment in China can not meet the requirements far, the science and research expense input by the country every year is used for purchasing foreign scientific and research equipment without the capability of directly competing with international opponents, and therefore, the scientific and research in China is not only influenced by people, but also hardly has original scientific and research achievements. Therefore, the development of vacuum technical equipment in China is rapidly improved.
Disclosure of Invention
Aiming at the problems in the prior art, the invention innovatively designs the low Wen Erwei vacuum sample stage which has the advantages of simple structure, low cost and easiness in realizing batch industrial production.
The technical scheme adopted by the invention is as follows:
the utility model provides a low temperature two-dimensional vacuum sample platform, includes two gyration driving motor 1, first no magnetism rotation steel wire 2, support sleeve 3, cooling sleeve 4, sample platform rotary mechanism 5, the no magnetism rotation steel wire of second 6, six lead to nozzle stub 8 and low temperature shield cover 9, wherein:
the power of the two rotary driving motors 1 is respectively transmitted into the sample stage rotating mechanism 5 by the first nonmagnetic rotating steel wire 2 and the second nonmagnetic rotating steel wire 6, and the first nonmagnetic rotating steel wire 2 transmits torque into the sample stage rotating mechanism 5 to realize the in-plane rotating motion of the sample stage 54; the second non-magnetic rotary steel wire 6 transmits torque into the sample stage rotary mechanism 5 to realize the inclination swing of the sample stage 54; the upper end of the support sleeve 3 is connected with a six-way short pipe 8, the lower end of the support sleeve 3 is connected with a sample stage rotating mechanism 5, and the first nonmagnetic rotating steel wire 2, the second nonmagnetic rotating steel wire 6 and the cooling sleeve 4 are positioned in the support sleeve 3; the lower end of the cooling sleeve 4 is contacted with the sample stage rotating mechanism 5, and the upper end of the cooling sleeve 4 is provided with a cold source inlet so as to keep the sample stage rotating mechanism 5 in a low-temperature environment; the sample stage rotating mechanism 5 is externally covered with a low-temperature shielding cover 9 to prevent temperature diffusion.
Further, the first nonmagnetic rotary steel wire 2 and the second nonmagnetic rotary steel wire 6 are positioned in the support sleeve 3, and the first nonmagnetic rotary steel wire 2 and the second nonmagnetic rotary steel wire 6 are bound in the support sleeve 3 by the support sheet 7.
Further, the sample stage rotating mechanism 5 comprises a cold head connecting mechanism 51, a worm rotating hinge 52, a sample stage support 53, a sample stage 54, a sample frame 55, a rotating transmission rod 56 and a rotating support plate 57; the cold head connecting mechanism 51 is fixed on the rotary supporting plate 57 and connected with the cooling sleeve 4, and conducts low temperature to the sample stage 54, so that the sample stage 54 is ensured to be in a low-temperature environment; the two ends of the worm rotary hinge 52 are respectively connected with the first nonmagnetic rotary steel wire 2 and the sample frame 55, and the torque of the first nonmagnetic rotary steel wire 2 is transmitted to the sample frame 55 so as to realize the in-plane rotary motion of the sample frame 55; one end of the sample stage support 53 is fixed with the rotary support plate 57, and the other end is connected with the sample stage 54 through a transmission plate 56a in the rotary transmission rod 56; a sample frame 55 is arranged in the center of the sample table 54, a turbine 55a fixed on the sample frame 55 penetrates through the sample table 54 to be matched with the worm rotary hinge 52, and the sample table 54 is connected with a rotary transmission rod 56; the other end of the rotary transmission rod 56 is connected with a second nonmagnetic rotary steel wire 6, and the torque of the second nonmagnetic rotary steel wire 6 is transmitted to the sample stage 54 to realize the inclination angle swing of the sample stage 54; the upper end of the rotary support plate 57 is fixed to the support sleeve 3.
Further, the low-temperature shielding cover 9 is coated on the outer side of the sample stage rotating mechanism 5, the sample stage rotating mechanism 5 further comprises a shielding cover supporting plate 58, an annular fastening device of the shielding cover supporting plate 58 is fixed on the outer wall of the cooling sleeve 4, and screw holes are reserved on the plate-shaped structure of the other end of the shielding cover supporting plate 58 and used for fixing the low-temperature shielding cover 9.
Further, the cold head connecting mechanism 51 includes a copper pipe 51a, a cold head connecting portion 51b, a thermometer 51c and a non-magnetic screw 51d. The copper pipe 51a is fixed at the tail end of the cold head connecting part 51b, the thermometer 51c is fixed on the cold head connecting part 51b, the nonmagnetic screw 51d is arranged at the front end of the cold head connecting part 51b, the cold head connecting part 51 is fixed on the cooling sleeve 4 through the nonmagnetic screw 51d, the low temperature of the cooling sleeve 4 is conducted to the copper pipe 51a, the copper pipe 51a is in direct contact with the sample stage 54, and the temperature of the sample stage 54 can be reduced, so that the sample stage 54 is ensured to be in a low-temperature environment.
Further, the worm wheel and worm rotating hinge 52 comprises a coupling 52a, a worm rotating hinge shaft 52b, a rotating steel wire 52c, a sliding sleeve 52d, a positioning pin 52e, a transmission pin 52f, an adapter 52g and a worm 52h; the first non-magnetic rotating steel wire 2 is connected with the worm rotating hinge shaft 52b through the coupler 52a, so that the rotating steel wire 52c is driven to rotate, the rotating steel wire 52c is fixed with the sliding sleeve 52d, the locating pin 52e circumferentially fixes the transmission pin 52f in the sliding sleeve 52d, the transmission pin 52f can slide axially while fixed, torque is transmitted to the worm 52h through the adapter 52g, the worm 52h is matched with the turbine 55a fixed on the sample frame 55, and the turbine 55a is driven to rotate, so that in-plane rotating motion of the sample table 54 is realized.
Further, the rotary driving rod 56 comprises a driving plate 56a, a driving rod 56b, a driving rod slideway 56c, a driving rod nut 56d, a driving rod screw 56e, a non-magnetic steel wire connecting piece 56f, a screw 56g and a pin shaft 56h; in the rotary transmission rod 56, the second non-magnetic rotary steel wire 6 is connected with the transmission rod screw 56e through the non-magnetic steel wire connecting piece 56f to drive the transmission rod screw 56e to rotate, and then the transmission rod nut 56d moves axially along the transmission rod 56e, the transmission rod 56b is in clearance fit with the transmission rod slideway 56c, the transmission rod nut 56d drives the transmission rod 56b to slide, and further drives the transmission plate 56a connected to the end part of the transmission rod 56b to rotate around the pin shaft 56h, the end part of the transmission plate 56a is connected with the sample table support 53 through the pin shaft 56h, the middle part of the transmission plate 56a is connected with the sample table 54 through the screw 56g, and finally the inclination angle swing of the sample table 54 is realized.
The working principle of the invention is as follows:
the invention transmits the motor power into the sample rotating mechanism through the two non-magnetic rotating steel wires, and can realize the in-plane rotation and the inclination angle swing of the sample table at the same time.
The sample mesa internal rotation, first non-magnetism rotatory steel wire 2 top is connected with gyration driving motor 1, the other end is connected with worm swivel hinge axle 52b through shaft coupling 52a, and then drive rotatory steel wire 52c and rotate, sliding sleeve 52d is fixed with rotatory steel wire 52c lower extreme, locating pin 52e is fixed driving pin 52f circumference in sliding sleeve 52d, driving pin 52f does not influence its axial slip when fixed, consequently can not cause the interference to the wobbling motion process of inclination, driving pin 52f passes the moment of torsion on worm 52h through adapter 52g, worm 52h cooperates with the turbine 55a of fixing on sample rack 55, drive turbine 55a and rotate. Ultimately effecting in-plane rotational movement of the sample holder 55.
The sample table is in inclination angle swinging, the second non-magnetic rotary steel wire 6 is connected with the other rotary driving motor 1, the second non-magnetic rotary steel wire 6 transmits torque to the rotary transmission rod 56, the second non-magnetic rotary steel wire 6 is connected with the transmission rod screw rod 56e through the non-magnetic steel wire connecting piece 56f, the torque is transmitted to the transmission rod screw rod 56e, the transmission rod nut 56d is driven to move axially, the transmission rod 56b is in clearance fit with the transmission rod slideway 56c, the transmission rod nut 56d drives the transmission rod 56b to slide, the transmission plate 56a connected to the end part of the transmission rod 56b is further driven to rotate around the pin shaft 56h, the end part of the transmission plate 56a is connected with the sample table support 53 through the pin shaft 56h, the middle part of the transmission plate 56a is fixed with the sample table 54 through the screw rod 56g, and finally the inclination angle swinging of the sample table 54 is realized.
Compared with the prior art, the invention has the beneficial effects that:
the structure is simple, the production is convenient, the cost is low, the double-motor drive is adopted, the two non-magnetic rotary steel wires transmit the motor power into the sample rotary mechanism, the in-plane rotary motion and the inclination swinging motion of the sample table are realized, and different use requirements are met; the invention can work in ultra-low temperature environment while maintaining ultra-high vacuum environment.
Drawings
In order to more clearly illustrate the embodiments of the present application or the technical solutions in the prior art, the present invention is further described in detail below according to specific examples of the present invention and with reference to the accompanying drawings, wherein:
FIG. 1 is a schematic view showing the overall structure of a low Wen Erwei vacuum sample stage according to example 1 of the present invention;
FIG. 2 is a schematic diagram of a rotation mechanism of a sample stage according to embodiment 1 of the present invention;
FIG. 3 is a top view of the flip of FIG. 2;
FIG. 4 is a schematic view of the coolant header coupling mechanism of FIG. 2;
FIG. 5 is a schematic view of the worm rotary hinge of FIG. 2;
FIG. 6 is a schematic view of the rotary transmission rod in FIG. 2;
FIG. 7 is a schematic view of the shield mounting position of FIG. 2;
in the figure: the device comprises a 1-slewing drive motor, a 2-first nonmagnetic rotating wire, a 3-supporting sleeve, a 4-cooling sleeve, a 5-sample stage rotating mechanism, a 6-second nonmagnetic rotating wire, a 7-supporting plate, an 8-six-way short pipe, a 9-low temperature shielding cover, a 51-cold head connecting mechanism, a 52-worm rotating hinge, a 53-sample stage support, a 54-sample stage, a 55-sample frame, a 56-rotating transmission rod, a 57-rotating support plate, a 58-shielding cover support plate, a 51 a-copper pipe, a 51 b-cold head connecting part, a 51 c-thermometer, a 51 d-nonmagnetic screw, a 52 a-coupling, a 52 b-worm rotating hinge shaft, a 52 c-rotating wire, a 52 d-sliding sleeve, a 52 e-locating pin, a 52 f-transmission pin, a 52 g-adaptor, a 52 h-worm, a turbine, a 56 a-transmission plate, a 56 b-transmission rod, a 56 c-transmission rod slideway, a 56 d-transmission nut, a 56 e-transmission screw, a 56 f-nonmagnetic connector, a 56 g-magnetic steel pin and a 56 h-magnetic steel.
Detailed Description
In order to make the technical scheme and advantages of the present invention more clear, the technical scheme in the embodiments of the present invention will be further described below with reference to the accompanying drawings.
Example 1
The utility model provides a low temperature two-dimensional vacuum sample platform, includes two gyration driving motor 1, first no magnetism rotation steel wire 2, support sleeve 3, cooling sleeve 4, sample platform rotary mechanism 5, the no magnetism rotation steel wire of second 6, six lead to nozzle stub 8 and low temperature shield cover 9, wherein:
as shown in fig. 1, the power of two rotary driving motors 1 is respectively transmitted into a sample stage system 5 by a first nonmagnetic rotary steel wire 2 and a second nonmagnetic rotary steel wire 6, and the first nonmagnetic rotary steel wire 2 and the second nonmagnetic rotary steel wire 6 are restrained in a support sleeve 3 by a support sheet 7; the vacuum flange on the six-way short pipe 8 is an interface connected with other equipment, the upper end of the cooling sleeve 4 is a cold source inlet, and liquid helium is filled in the cooling sleeve to serve as a cold source.
As shown in fig. 2 and 3, the sample stage rotating mechanism 5 includes a cold head connecting mechanism 51, a worm rotating hinge 52, a sample stage support 53, a sample stage 54, a sample holder 55, a rotating transmission rod 56, and a rotating support plate 57. The cold head connecting mechanism 51 is fixed on the rotary supporting plate 57 and is in contact with the cooling sleeve 4, and low temperature is conducted to the sample stage 54, so that the sample stage 54 is ensured to be in an extremely low-temperature environment; the two ends of the worm rotary hinge 52 are respectively connected with the first nonmagnetic rotary steel wire 2 and the sample frame 55, and the torque of the first nonmagnetic rotary steel wire 2 is transmitted to the sample frame 55 so as to realize the in-plane rotary motion of the sample frame 55; one end of the sample stage support 53 is fixed with the rotary support plate 57, and the other end is connected with the sample stage 54 through a transmission plate 56a in the rotary transmission rod 56; a sample frame 55 is arranged in the center of the sample table 54, a turbine 55a fixed on the sample frame 55 penetrates through the sample table 54 to be matched with the worm rotary hinge 52, and the sample table 54 is connected with a rotary transmission rod 56; the other end of the rotary transmission rod 56 is connected with a second nonmagnetic rotary steel wire 6, and the torque of the second nonmagnetic rotary steel wire 6 is transmitted to the sample stage 54 to realize the inclination angle swing of the sample stage 54; the upper end of the rotary support plate 57 is fixed to the support sleeve 3.
As shown in fig. 4, the cooling jacket 4 and the coldhead connection mechanism 51 are connected by a non-magnetic screw 51d, and the coldhead connection mechanism 51 includes a copper tube 51a, a coldhead connection portion 51b, a thermometer 51c, and a non-magnetic screw 51d. The copper pipe 51a is fixed at the tail end of the cold head connecting part 51b and is in direct contact with the cold head connecting part 51b, the thermometer 51c is fixed on the cold head connecting part 51b, the cold head connecting part 51b and the cooling sleeve 4 are fixed through the nonmagnetic screw 51d, after liquid helium is injected into the cooling sleeve 4 as a cooling source, the low temperature is conducted to the copper pipe 51a along the cold head connecting part 51b, the copper pipe 51a is in direct contact with the sample stage 54, and the purpose of cooling the sample stage 54 is achieved.
As shown in fig. 5, the worm wheel and worm rotary hinge 52 includes a coupling 52a, a worm rotary hinge shaft 52b, a rotary wire 52c, a sliding sleeve 52d, a positioning pin 52e, a driving pin 52f, a coupler 52g, and a worm 52h. The first non-magnetic rotating steel wire 2 is connected with the worm rotating hinge shaft 52b through the coupler 52a, and then drives the rotating steel wire 52c to rotate, the rotating steel wire 52c is fixed with the sliding sleeve 52d, the locating pin 52e circumferentially fixes the transmission pin 52f in the sliding sleeve 52d, the transmission pin 52f is fixed without affecting the axial sliding of the transmission pin 52f, the transmission pin 52f transmits torque to the worm 52h through the adapter 52g, the worm 52h is matched with the turbine 55a on the sample frame 55 to drive the turbine 55a to rotate, and accordingly in-plane rotating motion of the sample frame 55 is achieved.
As shown in fig. 6, the rotary transmission rod 56 includes a transmission plate 56a, a transmission rod 56b, a transmission rod slideway 56c, a transmission rod nut 56d, a transmission rod screw 56e, and non-magnetic steel wire connectors 56f and 56g. In the rotary transmission rod 56 mechanism, a second non-magnetic rotary steel wire 6 is connected with a transmission rod screw 56e through a non-magnetic steel wire connecting piece 56f, drives the transmission rod screw 56e to rotate, further drives a transmission rod nut 56d to axially move along the transmission rod 56e, and drives a transmission rod 56b to be in clearance fit with a transmission rod slideway 56c, and the transmission rod nut 56d drives the transmission rod 56b to slide, further drives a transmission plate 56a connected to the end part of the transmission rod 56b to rotate around a pin shaft 56h, the end part of the transmission plate 56a is connected with a sample table support 53 through the pin shaft 56h, and the middle part of the transmission plate 56a is connected with the sample table 54 through a screw 56g, so that the inclination angle swing of the sample table 54 is finally realized.
As shown in fig. 7, the sample stage rotating mechanism 5 further includes a shield cover supporting plate 58, an annular fastening device on the shield cover supporting plate 58 is fixed on the outer wall of the cooling jacket 4, and a screw hole is reserved on the plate-shaped structure on the other end for fixing the low-temperature shield cover 9, and the low-temperature shield cover 9 is coated on the outer side of the sample stage rotating mechanism 5.
The invention transmits the power of the motor into the sample rotating mechanism through the two non-magnetic rotating steel wires, and simultaneously realizes the in-plane rotation and the inclination angle swing of the sample table.
The sample table top rotates internally, the top end of the first nonmagnetic rotary steel wire 2 is connected with the rotary driving motor 1, the other end of the first nonmagnetic rotary steel wire 2 is connected with the worm rotary hinge shaft 52b through the coupler 52a, the rotary steel wire 52c is driven to rotate, the transmission pin 52f is circumferentially fixed on the sliding sleeve 52d of the rotary steel wire 52c through the positioning pin 52e and can slide axially, interference is avoided in the movement process of inclination angle swinging, the transmission pin 52f transmits torque to the worm 52h through the adapter 52g, the worm 52h is connected with the turbine 55a of the sample table 55, namely the first nonmagnetic rotary steel wire 2 transmits the torque to the worm rotary hinge 52, the worm 52h is driven to rotate, and accordingly the turbine 55a is driven to rotate, and in-plane rotary movement of the sample table 54 is realized.
The sample table is in inclination angle swinging, the second non-magnetic rotary steel wire 6 is connected with the other rotary driving motor 1, the second non-magnetic rotary steel wire 6 transmits torque to the rotary transmission rod 56, the second non-magnetic rotary steel wire 6 is connected with the transmission rod screw rod 56e through the non-magnetic steel wire connecting piece 56f, the torque is transmitted to the transmission rod screw rod 56e, the transmission rod nut 56d is driven to move axially, the transmission rod 56b is in clearance fit with the transmission rod slideway 56c, the transmission rod nut 56d drives the transmission rod 56b to slide, the other end of the transmission rod 56b is in movable connection with the transmission plate 56a through a pin shaft, the other end of the transmission plate 56a is in movable connection with the sample table support 53 through a pin shaft, the middle of the transmission plate 56a is in fastening connection with the sample table through the screw rod 56g, and finally the purpose of sample table inclination angle swinging is achieved.
The above description is only one of the preferred embodiments of the present invention, but the scope of the present invention is not limited thereto. It is obvious that any person skilled in the art, without any creative effort, shall cover the protection scope of the present invention according to the technical scheme of the present invention and the inventive concept thereof with equivalent substitution or slight variation.
Claims (5)
1. The utility model provides a low temperature two-dimensional vacuum sample platform, its characterized in that includes two gyration driving motor (1), first non-magnetic rotatory steel wire (2), support sleeve (3), cooling sleeve (4), sample platform rotary mechanism (5), second non-magnetic rotatory steel wire (6), six lead to nozzle stub (8) and low temperature shield cover (9), wherein:
the power of the two rotary driving motors (1) is respectively transmitted into the sample stage rotating mechanism (5) through a first nonmagnetic rotating steel wire (2) and a second nonmagnetic rotating steel wire (6), and the first nonmagnetic rotating steel wire (2) transmits torque into the sample stage rotating mechanism (5) to realize the in-plane rotating motion of the sample stage; the second non-magnetic rotary steel wire (6) transmits torque into the sample table rotary mechanism (5) to realize the inclination angle swing of the sample table; the upper end of the support sleeve (3) is connected with a six-way short pipe (8), the lower end of the support sleeve (3) is connected with a sample table rotating mechanism (5), and the first nonmagnetic rotating steel wire (2), the second nonmagnetic rotating steel wire (6) and the cooling sleeve (4) are positioned in the support sleeve (3); the upper end of the cooling sleeve (4) is provided with a cold source inlet so as to keep the sample table rotating mechanism (5) in a low-temperature environment; the sample table rotating mechanism (5) is externally coated with a low-temperature shielding cover (9) to prevent temperature diffusion;
the sample table rotating mechanism (5) comprises a cold head connecting mechanism (51), a worm rotating hinge (52), a sample table support (53), a sample table (54), a sample frame (55), a rotating transmission rod (56) and a rotating support plate (57); the cold head connecting mechanism (51) is fixed on the rotary supporting plate (57) and connected with the cooling sleeve (4) to conduct low temperature to the sample stage (54) so as to ensure that the sample stage (54) is in a low-temperature environment; the two ends of the worm rotary hinge (52) are respectively connected with the first nonmagnetic rotary steel wire (2) and the sample frame (55), and torque of the first nonmagnetic rotary steel wire (2) is transmitted to the sample frame (55) so as to realize in-plane rotary motion of the sample frame (55); one end of the sample table support (53) is fixed with the rotary support plate (57), and the other end of the sample table support is connected with the sample table (54) through a transmission plate (56 a) in the rotary transmission rod (56); a sample frame (55) is arranged at the center of the sample table (54), a turbine (55 a) fixed on the sample frame (55) passes through the sample table (54) to be matched with the worm rotary hinge (52), and the sample table (54) is connected with a rotary transmission rod (56); the other end of the rotary transmission rod (56) is connected with a second non-magnetic rotary steel wire (6), and torque of the second non-magnetic rotary steel wire (6) is transmitted to the sample table (54) to realize inclination angle swing of the sample table (54); the upper end of the rotary supporting plate (57) is fixed with the supporting sleeve (3);
the rotary transmission rod (56) comprises a transmission plate (56 a), a transmission rod (56 b), a transmission rod slideway (56 c), a transmission rod nut (56 d), a transmission rod screw (56 e), a non-magnetic steel wire connecting piece (56 f), a screw (56 g) and a pin roll (56 h); the second non-magnetic rotary steel wire (6) is connected with a transmission rod screw (56 e) through a non-magnetic steel wire connecting piece (56 f), the transmission rod screw (56 e) is driven to rotate, a transmission rod nut (56 d) moves axially along the transmission rod screw (56 e), a transmission rod (56 b) is in clearance fit with a transmission rod slideway (56 c), the transmission rod nut (56 d) drives the transmission rod (56 b) to slide, a transmission plate (56 a) connected to the end part of the transmission rod (56 b) is further driven to rotate around a pin shaft (56 h), the end part of the transmission plate (56 a) is connected with a sample table support (53) through a pin shaft (56 h), the middle part of the transmission plate (56 a) is connected with the sample table (54) through a screw (56 g), and finally the inclination angle swing of the sample table (54) is realized.
2. The low-temperature two-dimensional vacuum sample stage according to claim 1, wherein the cold head connecting mechanism (51) comprises a copper pipe (51 a), a cold head connecting part (51 b), a thermometer (51 c) and a non-magnetic screw (51 d); the copper pipe (51 a) is fixed at the tail end of the cold head connecting part (51 b); a thermometer (51 c) is fixed to the coldhead connection portion (51 b); a non-magnetic screw (51 d) is mounted at the front end of the cold head connecting part (51 b); the cold head connecting part (51 b) is fixed on the cooling sleeve (4) through a non-magnetic screw (51 d), the low temperature in the cooling sleeve (4) is conducted to the copper pipe (51 a), the copper pipe (51 a) is in direct contact with the sample stage (54), and the temperature can be finally conducted to the sample stage (54).
3. The low-temperature two-dimensional vacuum sample stage according to claim 1, wherein the worm rotary hinge (52) comprises a coupler (52 a), a worm rotary hinge shaft (52 b), a rotary steel wire (52 c), a sliding sleeve (52 d), a positioning pin (52 e), a transmission pin (52 f), an adapter (52 g) and a worm (52 h); the first non-magnetic rotating steel wire (2) is connected with a worm rotating hinge shaft (52 b) through a coupler (52 a), and then drives the rotating steel wire (52 c) to rotate, the rotating steel wire (52 c) is fixed with a sliding sleeve (52 d), a positioning pin (52 e) circumferentially fixes a transmission pin (52 f) in the sliding sleeve (52 d), the axial sliding of the transmission pin (52 f) is not influenced while the transmission pin is fixed, and then torque is transmitted to a worm (52 h) through an adapter (52 g), and the worm (52 h) is matched with a turbine (55 a) fixed on a sample frame (55) to drive the turbine (55 a) to rotate, so that the in-plane rotating motion of the sample frame (55) is realized.
4. A low-temperature two-dimensional vacuum sample stage according to claim 2, characterized in that the low-temperature shielding cover (9) is coated on the outer side of the sample stage rotating mechanism (5), the sample stage rotating mechanism (5) further comprises a shielding cover supporting plate (58), the shielding cover supporting plate (58) is fixed on the outer wall of the cooling sleeve (4) through an annular fastening device, and screw holes are reserved on the other end plate-shaped structure and used for fixing the low-temperature shielding cover (9).
5. The low-temperature two-dimensional vacuum sample stage according to claim 1, wherein the first nonmagnetic rotary steel wire (2) and the second nonmagnetic rotary steel wire (6) are positioned in the support sleeve (3), and the first nonmagnetic rotary steel wire (2) and the second nonmagnetic rotary steel wire (6) are bound in the support sleeve (3) by the support sheet (7).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201810469666.XA CN108445248B (en) | 2018-05-16 | 2018-05-16 | Low-temperature two-dimensional vacuum sample stage |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201810469666.XA CN108445248B (en) | 2018-05-16 | 2018-05-16 | Low-temperature two-dimensional vacuum sample stage |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN108445248A CN108445248A (en) | 2018-08-24 |
| CN108445248B true CN108445248B (en) | 2024-02-27 |
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