CN208197566U - A kind of vacuum chamber rotating device - Google Patents
A kind of vacuum chamber rotating device Download PDFInfo
- Publication number
- CN208197566U CN208197566U CN201820612026.5U CN201820612026U CN208197566U CN 208197566 U CN208197566 U CN 208197566U CN 201820612026 U CN201820612026 U CN 201820612026U CN 208197566 U CN208197566 U CN 208197566U
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- driven
- shaft
- vacuum chamber
- bearing
- side plate
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Abstract
The utility model provides a kind of vacuum chamber rotating device, including, servo motor, the speed reducer being connected with servo motor output shaft, the shaft coupling being connected with speed reducer output shaft, the shaft being connected with shaft coupling output end, at least one is sheathed on the bearing in shaft；Support base is fixedly arranged on the bearing block of support base upper surface；The bearing is set in bearing block；It is connected in the middle part of shaft output end and vacuum chamber wherein side plate outer wall；It further include driven spindle, the driven bearing of at least one being sheathed on driven spindle, driven support base, the driven bearing block set on driven support base upper surface；The driven bearing is set in driven bearing block；It is connected in the middle part of driven spindle and another side plate outer wall of vacuum chamber, the side plate being connected with the side plate that shaft is connected with same driven spindle is parallel to each other.It is impacted in conclusion being beneficial to prevent the component being connected with bearing and driven bearing etc. with shaft, driven spindle, and stability is preferable when vacuum chamber operation.
Description
Technical field
The utility model relates in vacuum abutted equipment technical field, in particular to a kind of automation vacuum abutted equipment just
In the rotating device that vacuum chamber rotates smoothly.
Background technique
In existing electronics process, vacuum abutted equipment is often used, and vacuum used by vacuum abutted equipment
Cabinet needs to rotate in the process of running, common rotating device include a shaft, the bearing being connected with both ends of the shaft and
Corresponding power mechanism, because being equipped with various routes and pipeline in vacuum chamber, and also to guarantee sealing performance, the shaft
It cannot be connected by way of directly through vacuum chamber inside with vacuum chamber, therefore, common connection type can only be just
Shaft is connected with vacuum chamber upper surface or lower surface, no matter which kind of connection type is used, on vacuum chamber with shaft
Junction is not the center of vacuum chamber, therefore, vacuum chamber when rotated, inevitably generates eccentric moment, right
Bearing and the devices such as bracket that are connected with bearing generate impact, and fluctuation of service.
Utility model content
In place of solving the deficiencies in the prior art, the purpose of this utility model is to provide one kind can eliminate vacuum chamber
The vacuum chamber rotating device of eccentric moment when rotated.
To achieve the above object, the technical solution adopted in the utility model are as follows: a kind of vacuum chamber rotating device, including,
Servo motor, the speed reducer being connected with servo motor output shaft, the shaft coupling being connected with speed reducer output shaft, with shaft coupling
The shaft that output end is connected, at least one is sheathed on the bearing in shaft；Support base is fixedly arranged on support base upper surface
Bearing block；The bearing is set in bearing block；It is connected in the middle part of shaft output end and vacuum chamber wherein side plate outer wall；Also wrap
It includes, driven spindle, the driven bearing of at least one being sheathed on driven spindle, driven support base, is set to driven support base
The driven bearing block of upper surface；The driven bearing is set in driven bearing block；Outside driven spindle and another side plate of vacuum chamber
It is connected in the middle part of wall, the side plate being connected with the side plate that shaft is connected with same driven spindle is parallel to each other.
Further, the connecting pin of the shaft and vacuum chamber is equipped with terminal pad, the terminal pad and vacuum chamber side plate
It is connected in the middle part of outer wall.
The bearing is two, is sheathed in shaft and is located in bearing block；A c-type circlip is additionally provided in shaft
And locking nut.
The c-type circlip is in contact with the outer wall of one of bearing, and locking nut connects with the outer wall of another bearing
Touching.
It further include a square tubular connecting bracket, shaft coupling is set in connecting bracket；The both ends of the connecting bracket are each
Equipped with a fixed disk, one of fixed disk is connected with the output end face of speed reducer, another fixed disk and bearing block
End face is connected.
The connecting pin of the driven spindle and vacuum chamber is equipped with driven terminal pad, the side of driven terminal pad and vacuum chamber
It is connected in the middle part of plate outer wall；The driven bearing is two, is set to driven shaft and holds in seat.
Advantageous effects: it in view of the structure using an axis, is connect in any case with vacuum chamber, can generate bias
Torque, therefore an axis is divided into two sections, respectively shaft, driven spindle, the shaft and driven spindle point by the utility model
It is not connected with the outer wall centre of two to be parallel to each other block side plate on vacuum chamber, therefore, when vacuum chamber rotates not
Eccentric moment can be generated, the component being connected with bearing and driven bearing etc. with shaft, driven spindle is beneficial to prevent and is rushed
It hits, and stability is preferable when vacuum chamber operation.
Detailed description of the invention
Fig. 1 is the perspective view for the device being connected in the utility model with shaft；
Fig. 2 is the first stereogram exploded view of the device being connected in the utility model with shaft；
Fig. 3 is the second stereogram exploded view of the device being connected in the utility model with shaft；
Fig. 4 is the partial exploded view for the device being connected in the utility model with shaft；
Fig. 5 is the device exploded view being connected in the utility model with driven spindle；
Fig. 6 is first perspective view of the embodiments of the present invention；
Fig. 7 is second perspective view of the embodiments of the present invention.
Specific embodiment
In order to make those skilled in the art more fully understand the utility model scheme, with reference to the accompanying drawing with embodiment to this
Utility model is described in further detail.
As shown in figs. 1-7, vacuum chamber rotating device includes that servo motor 1, what is be connected with servo motor output shaft subtracts
Fast machine 2, the shaft coupling 4 being connected with speed reducer output shaft 3, the shaft 5 being connected with shaft coupling output end, at least one is arranged
In the bearing 6 in shaft；Support base 7 is fixedly arranged on the bearing block 8 of support base upper surface；The bearing 6 is set to bearing block 8
It is interior；It is connected in the middle part of shaft output end and vacuum chamber 9 wherein 901 outer wall of side plate；It further include that driven spindle 10 is sheathed on
At least one driven bearing 11 on driven spindle, driven support base 12, the driven shaft set on driven support base upper surface
Hold seat 13；The driven bearing 11 is set in driven bearing block 13；In the middle part of driven spindle 10 and another side plate outer wall of vacuum chamber 9
It is connected, the side plate being connected with the side plate that shaft 5 is connected with same driven spindle 10 is parallel to each other.
Shaft 5 and vacuum chamber 9 are linked together for convenience, set in the shaft 5 and the connecting pin of vacuum chamber
There is terminal pad 14, is connected in the middle part of the terminal pad 14 and 901 outer wall of vacuum chamber side plate.
In order to which vacuum chamber 9 is stable, the bearing 6 in the present embodiment is two, is sheathed in shaft 5 and is located at axis
It holds in seat 8.
In order to fix two bearings 6, prevents bearing 6 from moving in shaft 5, a c-type circlip 15 is additionally provided in shaft 5
And locking nut 16；The c-type circlip 15 is in contact with the outer wall of one of bearing 6, locking nut 16 and another bearing
Outer wall be in contact；Specifically, bearing of the c-type circlip 15 for fixed neighbouring vacuum chamber 9, and locking nut 16 is for fixing
The bearing of neighbouring shaft coupling output end.
It further include a square tubular connecting bracket 17 for the ease of installation shaft coupling 4, shaft coupling 4 is set to connecting bracket
It is interior；The both ends of the connecting bracket are respectively provided with a fixed disk 1701, the output end face phase of one of fixed disk and speed reducer 2
Connection, another fixed disk are connected with the end face of bearing block 8.
Similarly, for the ease of installation, the connecting pin of the driven spindle 10 and vacuum chamber 9 is equipped with driven terminal pad
18, it is connected in the middle part of the side plate outer wall of driven terminal pad 18 and vacuum chamber；The driven bearing 11 is two, is set to driven
In bearing block 13.
It in view of the structure using an axis, is connect in any case with vacuum chamber 9, vacuum chamber 9 can generate when running
Eccentric moment, a therefore axis is divided into two sections, respectively shaft 5, driven spindle 10 by the utility model, the shaft 5 with from
Turn axis 10 is connected with the outer wall centre of two to be parallel to each other block side plate 901 on vacuum chamber 9 respectively, therefore, very
Empty van body 9 will not generate eccentric moment when rotating, and be beneficial to prevent and bearing 6 and driven bearing 11 etc. and shaft 5, driven spindle
10 components being connected are impacted, and stability is preferable when the operation of vacuum chamber 9.
Although depicting the invention by embodiment, it will be appreciated by the skilled addressee that the utility model has perhaps
Shape changeable and variation without departing from the utility model spirit, it is desirable to the attached claims include these deformation and change without
It is detached from the spirit of the utility model.
Claims (6)
1. a kind of vacuum chamber rotating device, which is characterized in that including servo motor is connected with servo motor output shaft
Speed reducer, the shaft coupling being connected with speed reducer output shaft, the shaft being connected with shaft coupling output end, at least one is sheathed on
Bearing in shaft；Support base is fixedly arranged on the bearing block of support base upper surface；The bearing is set in bearing block；Shaft
It is connected in the middle part of output end and vacuum chamber wherein side plate outer wall；Further include driven spindle, is sheathed on driven spindle extremely
A few driven bearing, driven support base, the driven bearing block set on driven support base upper surface；The driven bearing is set
In in driven bearing block；Be connected in the middle part of driven spindle and another side plate outer wall of vacuum chamber, the side plate being connected with shaft with
It is parallel to each other with the side plate that driven spindle is connected.
2. a kind of vacuum chamber rotating device as described in claim 1, which is characterized in that the company of the shaft and vacuum chamber
It connects end and is equipped with terminal pad, be connected in the middle part of the terminal pad and vacuum chamber side plate outer wall.
3. a kind of vacuum chamber rotating device as claimed in claim 2, which is characterized in that the bearing is two, is arranged
In in shaft and in bearing block；A c-type circlip and locking nut are additionally provided in shaft.
4. a kind of vacuum chamber rotating device as claimed in claim 3, which is characterized in that the c-type circlip and one of them
The outer wall of bearing is in contact, and locking nut is in contact with the outer wall of another bearing.
5. a kind of vacuum chamber rotating device as claimed in claim 2, which is characterized in that further include a square tubular connection
Bracket, shaft coupling are set in connecting bracket；The both ends of the connecting bracket are respectively provided with a fixed disk, one of fixed disk with
The output end face of speed reducer is connected, another fixed disk is connected with the end face of bearing block.
6. a kind of vacuum chamber rotating device as described in claim 1, which is characterized in that the driven spindle and vacuum chamber
Connecting pin be equipped with driven terminal pad, be connected in the middle part of the side plate outer wall of driven terminal pad and vacuum chamber；The driven bearing
It is two, is set to driven shaft and holds in seat.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201820612026.5U CN208197566U (en) | 2018-04-26 | 2018-04-26 | A kind of vacuum chamber rotating device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201820612026.5U CN208197566U (en) | 2018-04-26 | 2018-04-26 | A kind of vacuum chamber rotating device |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN208197566U true CN208197566U (en) | 2018-12-07 |
Family
ID=64521179
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201820612026.5U Active CN208197566U (en) | 2018-04-26 | 2018-04-26 | A kind of vacuum chamber rotating device |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN208197566U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN110609265A (en) * | 2019-09-25 | 2019-12-24 | 深圳市速腾聚创科技有限公司 | Bearing mounting structure for laser radar and laser radar |
-
2018
- 2018-04-26 CN CN201820612026.5U patent/CN208197566U/en active Active
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN110609265A (en) * | 2019-09-25 | 2019-12-24 | 深圳市速腾聚创科技有限公司 | Bearing mounting structure for laser radar and laser radar |
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