WO2014057573A1 - Substrate housing vessel that suppresses contamination of lid-body-side substrate support section - Google Patents

Substrate housing vessel that suppresses contamination of lid-body-side substrate support section Download PDF

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Publication number
WO2014057573A1
WO2014057573A1 PCT/JP2012/076440 JP2012076440W WO2014057573A1 WO 2014057573 A1 WO2014057573 A1 WO 2014057573A1 JP 2012076440 W JP2012076440 W JP 2012076440W WO 2014057573 A1 WO2014057573 A1 WO 2014057573A1
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WO
WIPO (PCT)
Prior art keywords
lid
container
substrate
main body
opening
Prior art date
Application number
PCT/JP2012/076440
Other languages
French (fr)
Japanese (ja)
Inventor
千明 松鳥
剛 永島
貴立 小山
井上　修一
啓之 志田
裕樹 山岸
和正 大貫
Original Assignee
ミライアル株式会社
信越ポリマー株式会社
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by ミライアル株式会社, 信越ポリマー株式会社 filed Critical ミライアル株式会社
Priority to PCT/JP2012/076440 priority Critical patent/WO2014057573A1/en
Publication of WO2014057573A1 publication Critical patent/WO2014057573A1/en

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    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/673—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere using specially adapted carriers or holders; Fixing the workpieces on such carriers or holders
    • H01L21/6735—Closed carriers
    • H01L21/67369—Closed carriers characterised by shock absorbing elements, e.g. retainers or cushions
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/673—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere using specially adapted carriers or holders; Fixing the workpieces on such carriers or holders
    • H01L21/6735—Closed carriers
    • H01L21/67373—Closed carriers characterised by locking systems

Definitions

  • the present invention relates to a substrate storage container, and more particularly to a substrate storage container that suppresses contamination of the lid-side substrate support attached to the lid when the lid is removed from the container body.
  • a container for storing a substrate such as a semiconductor wafer
  • a container having a structure including a container body, a lid, a seal member, a front retainer, and a back substrate support has been conventionally known.
  • the container body has a cylindrical wall part in which an opening part of the container body is formed at one end and the other end is closed.
  • a substrate storage space is formed in the container body.
  • the substrate storage space is formed by being surrounded by a wall portion, and can store a plurality of substrates.
  • the lid can be attached to and detached from the container body opening, and the container body opening can be closed.
  • the front retainer is fixed to the lid.
  • the front retainer can support the edges of the plurality of substrates when the container main body opening is closed by the lid.
  • the back side substrate support portion is provided on the wall portion so as to form a pair with the front retainer, and can support the edge portions of a plurality of substrates.
  • the back side substrate support unit supports a plurality of substrates in cooperation with the front retainer, thereby separating adjacent substrates at a predetermined interval. A plurality of substrates are held in a parallel state (see Patent Document 1).
  • the lid is an inner surface of the lid, that is, a surface of the lid, and a front retainer fixed to a surface facing the substrate storage space when the container body opening is closed by the lid, It is necessary to prevent the front retainer from being contaminated by avoiding contact with others.
  • the present invention can suppress contamination of the lid-side substrate support part, further increase the strength of the lid, and cover the substrate (when the container body opening is closed with the lid). It is an object of the present invention to provide a substrate storage container that can suppress the deformation of the substrate, can securely hold the substrate, and can store and store the lids in the case of storing the lids, thereby reducing the storage space.
  • the present invention includes a container main body having an opening peripheral edge portion in which a substrate storage space capable of storing a plurality of substrates is formed, and an opening peripheral edge portion formed at one end portion and communicating with the substrate storage space.
  • a lid that is detachable from the container and capable of closing the container main body opening, and the substrate housing space when the container main body opening is closed by the lid, which is a part of the lid.
  • a lid-side substrate support portion capable of supporting the edges of the plurality of substrates when the container body opening is closed by the lid, and in the inside of the substrate storage space.
  • the lid-side substrate support is disposed when paired with the lid-side substrate support portion, can support edges of the plurality of substrates, and the container body opening is closed by the lid.
  • the lid body In cooperation with the department A back-side substrate support part that supports a number of substrates, and the lid body is a lid body body and a part of the lid body body, and the container body opening is closed by the lid body
  • a main body supporting convex portion located at a portion facing the substrate storage space, and when the container body opening is closed by the lid, the lid is relatively positioned with respect to the container body opening.
  • the present invention relates to a substrate storage container.
  • the main body supporting convex portion has a rib-shaped convex portion extending in one direction. Moreover, it is preferable that a pair of the rib-like convex portions is provided in parallel.
  • the lid body has a rectangular shape, and the portions in the vicinity of a pair of opposing sides in the rectangular lid body have container body engaging portions that can be engaged with the container body, respectively.
  • the lid-side substrate support portion is disposed between one of the container main body engaging portions and the other container main body engaging portion, and the rib-like convex portion is arranged with an edge of the lid main body. It is preferable that it is arrange
  • contamination of the lid-side substrate support portion can be suppressed, and further, the strength of the lid can be increased, and when the substrate is suppressed (when the container main body opening is closed with the lid). It is possible to provide a substrate storage container that can suppress deformation of the lid, hold the substrate securely, and can store the lid in a stacked manner when the lid is stored, thereby reducing the storage space.
  • FIG. 1 is a perspective view showing a substrate storage container according to the present embodiment.
  • FIG. 2A is a cross-sectional view illustrating the substrate storage container according to the present embodiment.
  • FIG. 2B is an enlarged side cross-sectional view showing the back substrate support part of the substrate storage container according to the present embodiment.
  • FIG. 3A is an exploded perspective view showing a state in which the lid of the substrate storage container according to the present embodiment is opened.
  • FIG. 3B is an exploded perspective view showing a state in which the substrate is stored in the substrate storage space of the container main body of the substrate storage container according to the present embodiment.
  • FIG. 1 is a perspective view showing a substrate storage container according to the present embodiment.
  • FIG. 2A is a cross-sectional view illustrating the substrate storage container according to the present embodiment.
  • FIG. 2B is an enlarged side cross-sectional view showing the back substrate support part of the substrate storage container according to the present embodiment.
  • FIG. 3A is an exploded perspective view showing a state in which
  • FIG. 4 is a rear perspective view showing the lid of the substrate storage container according to the present embodiment.
  • FIG. 5 is a cross-sectional view showing the lid of the substrate storage container according to the present embodiment.
  • FIG. 6 is a cross-sectional view of the main part of the substrate storage container according to the present embodiment as viewed from the direction of the line AA in FIG.
  • FIG. 7 is a rear perspective view in which the front retainer, the latch mechanism, and the seal member are omitted from the lid of the substrate storage container according to the present embodiment.
  • a direction from the container body 2 described later to the lid 3 is defined as the front direction D11, and the opposite direction is defined as the rear direction D12. These are defined as the front-rear direction D1.
  • a direction (upward direction in FIG. 3A) from the lower wall 24 to the upper wall 23 described later is defined as an upward direction D21, an opposite direction is defined as a downward direction D22, and these are defined as a vertical direction D2.
  • a direction from the second side wall 26 described later to the first side wall 25 (a direction from the lower right to the upper left in FIG. 3A) is defined as a left direction D31, and the opposite direction is defined as a right direction D32. Is defined as the left-right direction D3.
  • the substrate W (see FIG. 3B) stored in the substrate storage container 1 is a disk-shaped silicon wafer, glass wafer, sapphire wafer, etc., and is a thin one used in the industry.
  • the substrate W in this embodiment is a silicon wafer having a diameter of 450 mm.
  • the substrate storage container 1 includes a container main body 2, a lid 3, a seal member 4, a substrate support plate-like portion 5, and a front retainer 7 as a lid-side substrate receiving portion. have.
  • the container body 2 has a cylindrical wall portion 20 in which a container body opening 21 is formed at one end and the other end is closed.
  • a substrate storage space 27 is formed in the container body 2.
  • the substrate storage space 27 is formed so as to be surrounded by the wall portion 20.
  • the substrate support plate-shaped portion 5 is disposed in a portion of the wall portion 20 that forms the substrate storage space 27.
  • the substrate storage space 27 can store a plurality of substrates W as shown in FIG. 3B.
  • the substrate support plate-like portion 5 is provided on the wall portion 20 so as to form a pair in the substrate storage space 27.
  • the substrate support plate-like portion 5 is arranged in such a manner that adjacent substrates W are separated from each other at a predetermined interval and arranged in parallel.
  • the part can be supported.
  • a back side substrate support portion 6 is provided on the back side of the substrate support plate-like portion 5. The back-side substrate support 6 can support the rear portions of the edges of the plurality of substrates W when the container body opening 21 is closed by the lid 3.
  • the lid 3 can be attached to and detached from the opening peripheral edge 28 that forms the container body opening 21, and can close the container body opening 21.
  • the front retainer 7 is provided in a portion of the lid 3 that faces the substrate storage space 27 when the container main body opening 21 is closed by the lid 3.
  • the front retainer 7 is disposed inside the substrate storage space 27 so as to make a pair with the back substrate support 6.
  • the front retainer 7 can support the front portions of the edges of the plurality of substrates W when the container main body opening 21 is closed by the lid 3.
  • the front retainer 7 supports a plurality of substrates W in cooperation with the back substrate support 6, thereby allowing adjacent substrates W to be predetermined.
  • a plurality of substrates W are held in a state where they are spaced apart and arranged in parallel.
  • the wall portion 20 of the container body 2 includes a back wall 22, an upper wall 23, a lower wall 24, a first side wall 25, and a second side wall 26.
  • the back wall 22, the upper wall 23, the lower wall 24, the first side wall 25, and the second side wall 26 are made of a plastic material or the like. In the first embodiment, they are integrally formed of polycarbonate.
  • the first side wall 25 and the second side wall 26 face each other, and the upper wall 23 and the lower wall 24 face each other.
  • the rear end of the upper wall 23, the rear end of the lower wall 24, the rear end of the first side wall 25, and the rear end of the second side wall 26 are all connected to the back wall 22.
  • the front end of the upper wall 23, the front end of the lower wall 24, the front end of the first side wall 25, and the front end of the second side wall 26 have a positional relationship facing the back wall 22 and have a substantially rectangular shape. Opening peripheral edge portion 28 is formed.
  • the opening peripheral edge 28 is provided at one end of the container main body 2, and the back wall 22 is located at the other end of the container main body 2.
  • the outer shape of the container body 2 formed by the outer surface of the wall portion 20 is box-shaped.
  • the inner surface of the wall portion 20, that is, the inner surface of the back wall 22, the inner surface of the upper wall 23, the inner surface of the lower wall 24, the inner surface of the first side wall 25, and the inner surface of the second side wall 26 are surrounded by these. 27 is formed.
  • the container main body opening 21 formed in the opening peripheral edge portion 28 is surrounded by the wall portion 20 and communicates with the substrate storage space 27 formed in the container main body 2. As will be described later, a maximum of 25 substrates W can be stored in the substrate storage space 27.
  • the latch engaging recesses 231A and 231B that are recessed toward the outside of the substrate storage space 27 are portions of the upper wall 23 and the lower wall 24 and in the vicinity of the opening peripheral edge portion 28. , 241A, 241B are formed.
  • a total of four latch engaging recesses 231A, 231B, 241A, 241B are formed near the left and right ends of the upper wall 23 and the lower wall 24, one each.
  • a rib 233 and a flange fixing portion 234 are integrally formed with the upper wall 23.
  • a plurality of ribs 233 protrude from the outer surface of the upper wall 23 in the upward direction D21.
  • the rib 233 has what extends in the substantially front-back direction D1 and what extends in the substantially left-right direction D3.
  • a top flange 235 is fixed to the flange fixing portion 234.
  • the top flange 235 is fixed to the upper wall 23, and is hung and suspended in the substrate storage container 1 when the substrate storage container 1 is suspended in an AMHS (automatic wafer transport system), a PGV (wafer substrate transport carriage), or the like. It is a member which becomes a part.
  • AMHS automated wafer transport system
  • PGV wafer substrate transport carriage
  • a container main body leg 243 is provided on the outer surface of the lower wall 24.
  • the container main body leg portion 243 is attached to the left and right end edges of the lower wall 24 and extends in the front-rear direction D1 along the left and right end edges of the lower wall 24.
  • the substrate support plate-like portions 5 are provided in the first side wall 25 and the second side wall 26, respectively, and are arranged in the substrate storage space 27 so as to form a pair in the left-right direction D3.
  • the substrate support plate-like portion 5 has a plate portion 51 and a plate portion support portion 52.
  • the plate portion 51 and the plate portion support portion 52 are configured by integrally molding resin.
  • the plate part 51 has a plate-like arc shape.
  • a total of 50 plate portions 51 are provided on each of the first side wall 25 and the second side wall 26, each including 25 plates.
  • Adjacent plate portions 51 are arranged in parallel with each other in the vertical direction D2 so as to be spaced apart from each other at an interval of 10 mm to 12 mm. Note that the same shape as the plate portion 51 is also disposed above the uppermost plate portion 51, but this is the substrate W that is positioned at the uppermost position and inserted into the substrate storage space 27. On the other hand, the member serves as a guide for the insertion.
  • the 25 plate portions 51 provided on the first side wall 25 and the 25 plate portions 51 provided on the second side wall 26 have a positional relationship facing each other in the left-right direction D3.
  • the 50 plate portions 51 and the members serving as two guides having substantially the same shape as the plate portion 51 have a positional relationship parallel to the inner surface of the lower wall 24.
  • a convex portion 511 is provided on the upper surface of the plate portion 51.
  • substrate W supported by the board part 51 contacts only the protrusion end of the convex part 511, and does not contact the board part 51 by a surface.
  • the plate portion support portion 52 is configured by a member extending in the up-down direction D2.
  • the 25 plate portions 51 provided on the first side wall 25 are connected to a plate portion support portion 52 provided on the first side wall 25 side.
  • the 25 plate portions 51 provided on the second side wall 26 are connected to a plate portion support portion 52 provided on the second side wall 26 side.
  • the plate part support part 52 has a first side wall locking part (not shown).
  • the first side wall locking portion can be locked to side plate locking portions (not shown) provided on the first side wall 25 and the second side wall 26, respectively.
  • substrate support plate-shaped part 5 is each fixed to the 1st side wall 25 and the 2nd side wall 26 by latching a 1st side wall latching
  • the back substrate support 6 includes a wall substrate support 60 and a support fixing member 67.
  • the wall portion substrate support portion 60 is formed integrally with the plate portion 51 at the rear end portion of the plate portion 51 of the substrate support plate-like portion 5.
  • the back substrate support 6 is separate from the substrate support plate 5, that is, the wall substrate support 60 is formed separately from the plate 51 of the substrate support 5. Also good.
  • the number of wall substrate support portions 60 corresponding to each one of the substrates W that can be stored in the substrate storage space 27, specifically, 25 is provided.
  • substrate support part 60 provided in the 1st side wall 25 and the 2nd side wall 26 has the positional relationship which makes a pair with the front retainer 7 mentioned later in the front-back direction D1.
  • the support portion fixing member 67 has a side wall rear portion locking portion (not shown). The side wall rear portion locking portion can be locked to back side substrate support portion locking portions (not shown) provided on the first side wall 25 and the second side wall 26, respectively.
  • the first side wall locking portion (not shown) is locked to the side plate locking portion (not shown), and the side wall rear locking portion (not shown) is locked to the back side substrate support portion.
  • the substrate support plate-like part 5 is fixed to the first side wall 25 and the second side wall 26 by being locked to the part (not shown).
  • the wall portion substrate support portion 60 includes a support portion upper portion 62 having a first contact surface 621 and a support portion lower portion 63 having a second contact surface 631.
  • the first contact surface 621 stores the substrate W in the substrate storage space 27 and closes the lid 3 so that the substrate W is supported by the back substrate support 6 and the front retainer 7. When this is done, the edge of the edge of the upper surface of the substrate W can come into contact.
  • the substrate W is stored in the substrate storage space 27 and the lid 3 is closed on the second contact surface 631, the substrate W is supported by the back substrate support 6 and the front retainer 7.
  • substrate W can contact
  • the lid 3 is detachable from the opening peripheral portion 28 of the container body 2, and the lid 3 is attached to the opening peripheral portion 28, whereby the lid 3 is The opening 21 can be closed.
  • the lid body 3 includes a lid body 30 and a rib-like convex portion 304, and substantially matches the shape of the opening peripheral edge portion 28 (see FIG. 3A) of the container body 2. It has a rectangular shape.
  • the lid body 30 has a rectangular shape and forms an outer shape of the rectangular lid body 3, and has an inner surface 301 and an outer surface 302 as shown in FIG. 5.
  • the inner surface 301 faces the substrate storage space 27 when the container main body opening 21 is closed by the lid 3.
  • the outer surface 302 is exposed to the outside of the substrate storage container 1 when the container main body opening 21 is closed by the lid 3.
  • the lid body 30 is made of a plastic material or the like. In the first embodiment, the lid body 30 is made of polycarbonate.
  • a seal member fitting groove 31 is formed along the outer peripheral edge of the lid 3 at the outer peripheral edge of the lid body 30.
  • an annular seal member made of elastically deformable POE (polyoxyethylene), PEE, various thermoplastic elastomers such as polyester and polyolefin, fluororubber, silicon rubber, etc. 4 is fitted.
  • the seal member 4 is arranged so as to go around the outer peripheral edge of the lid 3.
  • the seal member 4 can be brought into contact with an opening peripheral portion 28 which is a portion of the container main body 2 forming the container main body opening 21.
  • the seal member 4 is interposed between the opening peripheral portion 28 and the lid body 30 and is in close contact with the opening peripheral portion 28 so that the container body opening 21 can be closed in an airtight state by the lid 3. It is. By removing the lid 3 from the opening peripheral edge 28, the substrate W can be taken into and out of the substrate storage space 27 in the container body 2.
  • the lid body 30 is a portion in the vicinity of a pair of short sides that are a pair of opposing sides in the rectangular lid body 30, that is, the lid body 30.
  • Each of the portions in the vicinity of the left and right end portions of the lid body 30 has a latch storage portion 303.
  • a latch housing space 303A extending along the pair of short sides is formed in the latch body housing portion.
  • the latch storage space 303A stores a latch mechanism 32 as a container body engaging portion, and the latch mechanism 32 includes an upper latch portion 32A and a lower latch portion 32B.
  • the upper latch portion 32A is formed of a long plate-like member.
  • the portion slightly lower than the upper end portion is the thickest in the front-rear direction D1.
  • the upper latch portion 32A gradually becomes thinner from the thickest portion toward the upper end and the lower end.
  • the upper latch portion 32A is movable in the vertical direction D2 in the latch storage space 303A.
  • the upper end of the upper latch portion 32A can project in the upward direction D21 from the upper side of the lid body 30.
  • the lower end of the upper latch portion 32A is connected to the operation portion 33 described later so that the upper latch portion 32A can be moved by the operation portion 33 described later.
  • the lower latch portion 32B is configured by a long plate-like member.
  • the part slightly raised from the lower end part is the thickest in the front-rear direction D1.
  • the lower latch portion 32B gradually becomes thinner from the thickest portion toward the upper end and the lower end.
  • the lower latch portion 32B is movable in the vertical direction D2 in the latch storage space 303A.
  • the lower end of the lower latch portion 32B can project in the downward direction D22 from the lower side of the lid body 30.
  • the upper end of the lower latch part 32B is connected to the operation part 33 described later so that the lower latch part 32B can be moved by the operation part 33 described later.
  • the upper latch portion 32 ⁇ / b> A and the lower latch portion 32 ⁇ / b> B are housed in a latch housing portion 303 configured by a part of the lid body 30.
  • an operation portion 33 is provided in a portion in the latch storage space 303A and in the central portion in the vertical direction D2. A part of the operation unit 33 is exposed to the outside of the latch storage space 303A through a hole formed in the front surface of the lid body 30, and the part can be operated from the front side.
  • the upper latch part 32A By operating the operation part 33 from the front side of the lid 3, the upper latch part 32A can be moved in the upward direction D21, and at the same time, the lower latch part 32B can be moved in the downward direction D22. By this movement, the upper latch portion 32A and the lower latch portion 32B can be protruded from the upper side and the lower side of the lid 3, respectively. Further, by operating the operating portion 33 in the opposite direction to this operation, the upper latch portion 32A can be moved in the downward direction D22, and at the same time, the lower latch portion 32B is moved in the upward direction D21. Can do. By this movement, the lower latch portion 32B can be prevented from projecting from the lower side.
  • the upper latch portion 32A protrudes in the upward direction D21 from the upper side of the lid body 30 and engages with the latch engagement recesses 231A and 231B of the container body 2, and the lower latch portion 32B extends from the lower side of the lid body 30.
  • the lid 3 is fixed to the opening peripheral edge 28 of the container body 2 by projecting in the downward direction D22 and engaging with the latch engagement recesses 241A and 241B of the container body 2.
  • a portion of the inner surface 301 of the lid body 30 that closes the container body opening 21 is used to fix the lid legs that are recessed in the front direction D ⁇ b> 11.
  • a recess 341 is formed.
  • the lid leg fixing recess 341 has a width of about one-third of the width in the left-right direction D3 of the lid body 30 at the center position in the left-right direction D3 of the lid body 30 in the vertical direction D2.
  • the lid body 30 is formed from the vicinity of the upper end portion thereof to the vicinity of the lower end portion thereof.
  • the upper and lower ends of the lid leg fixing recess 341 are formed by the edge of the lid body 30.
  • the portions of the inner surface 301 of the lid body 30 that are on both sides of the lid leg fixing recess 341 in the left-right direction D ⁇ b> 3 are configured by inner surface left and right end flat surfaces 342.
  • the lid body 30 has a symmetric configuration with a virtual line S extending vertically at the center of the lid body 30 in the left-right direction D3. Therefore, the configuration of the left side (left side D31) part will be mainly described in detail below, and detailed description of the right side (right side D32) part will be omitted.
  • the front retainer 7 fixed to the lid body 30 also forms two pairs symmetrically about the virtual line S. Is provided.
  • the portion of the inner surface 301 of the lid body 30 that forms the lid leg fixing recess 341 has a flat bottom surface 341A and a stepped surface 341B.
  • the bottom flat surface 341A is located on the front side (front direction D11 side) of the inner surface left and right end flat surfaces 342.
  • the stepped surface 341B is disposed at both ends of the bottom flat surface 341A in the left-right direction D3.
  • the stepped surface 341B includes an intermediate flat surface 341C that is one step higher than the bottom flat surface 341A, a first stepped surface 341D that goes up to the intermediate flat surface 341C, and an inner surface that is one step higher than the intermediate flat surface 341C.
  • a second stepped surface 341E rising to the left and right end flat surface 342.
  • the pair of front retainer locking plates 343 extend in the vertical direction D2.
  • the front retainer locking plate 343 is fixed to the bottom flat surface 341 ⁇ / b> A of the lid body 30.
  • a through-hole 343A is formed in the front retainer locking plate 343.
  • one front retainer locking portion 344 is provided in the center portion of each inner surface left and right end flat surface 342 in the left-right direction D3.
  • the front retainer locking portion 344 has a plate-like locking portion 344A and a base side support portion 344B.
  • the front and back surfaces of the plate-like locking portion 344A are separated from the inner left and right end flat surfaces 342 in a positional relationship parallel to the inner left and right end flat surfaces 342, and the longitudinal direction is parallel to the vertical direction D2. Is arranged in.
  • the plate-like locking portion 344A is connected to the base side support portion 344B, and the base side support portion 344B is fixed to the inner surface left and right end flat surface 342.
  • the base side support portion 344B extends from the vicinity of the edge on the upper direction D21 side of the lid body 30 to the vicinity of the edge on the lower direction D22 side.
  • the front retainer locking plate 343 on the left side (left side D31 side) is located at the position facing the inner surface 301 of the lid body 30 from the front retainer locking portion 344 on the left side.
  • a front retainer 7 is provided at all the positions.
  • the front retainer 7 includes a pair of vertical frames 71 extending in parallel with the vertical direction D ⁇ b> 2, a pair of front retainer legs 72, and a front retainer substrate receiving portion 73.
  • the pair of vertical frame bodies 71, the front retainer legs 72, and the front retainer board receiving portion 73 are integrally formed of resin and connected to each other.
  • the front retainer substrate receiving portion 73 is a portion of the lid body 30, and the left front retainer in the left-right direction D ⁇ b> 3 from the left end (the end in the left direction D ⁇ b> 31) of the middle flat surface 341 ⁇ / b> C. It arrange
  • the front retainer substrate receiving portion 73 as the lid-side substrate receiving portion is not disposed in the lid leg fixing recess 341 and is deeper than the lid leg fixing recess 341 in the depth direction (rear direction D12). It arrange
  • the front retainer substrate receiving portion 73 includes a receiving portion upper portion 731 having a front retainer first contact surface 733 and a receiving portion lower portion 732 having a front retainer second contact surface 734. Yes.
  • the front retainer first contact surface 733 stores the substrate W in the substrate storage space 27 and closes the container main body opening 21 by the lid 3, so that the substrate W is connected to the back side substrate support 6 and the front retainer 7.
  • the front retainer second contact surface 734 the substrate W is stored in the substrate storage space 27 and the container body opening 21 is closed by the lid 3, so that the substrate W is connected to the back substrate support 6 and the front retainer 7.
  • the front retainer substrate receiving portion 73 can support the edge portions of the plurality of substrates W.
  • the left end portion (the end portion in the left direction D ⁇ b> 31) that is one end portion of the front retainer substrate receiving portion 73 is the right end portion of one front retainer leg portion 721 of the pair of front retainer legs 72. (The end of the right direction D32).
  • the right end portion which is the other end portion of the front retainer substrate receiving portion 73 is connected to the left end portion of the other front retainer leg portion 722 of the pair of front retainer leg portions 72.
  • One front retainer leg 721 extends from the left end of the front retainer substrate receiving portion 73 so as to approach the inner left / right end flat surface 342, bends right before the inner left / right end flat surface 342, and the inner left / right end. It extends long so as to approach the front retainer locking portion 344 in parallel with the flat surface 342. This long extending portion occupies more than two-thirds of one front retainer leg 721. Then, it is bent at a right angle so as to be separated from the inner surface left and right end flat surface 342, slightly extends, bends at a right angle again, extends slightly so as to approach the front retainer locking portion 344, and is bent at a right angle again to the inner surface left and right end flat surface 342. The left end of one front retainer leg 72 is connected to one vertical frame 711.
  • the other front retainer leg 722 extends so as to approach the middle flat surface 341C, bends at an obtuse angle before the middle flat surface 341C, and extends linearly to the vicinity of the front retainer locking plate 343. Then, it bends at an obtuse angle, extends slightly so as to approach the bottom flat surface 341A, and is connected to the other vertical frame 712.
  • the front retainer board receiving portion 73 and the paired front retainer leg portions 72 are provided in a state where 25 are arranged in parallel in the vertical direction D2.
  • the edge of the vertical frame 71 in the width direction of the vertical frame 71 is formed between the plate-like locking portion 344 ⁇ / b> A of the front retainer locking portion 344 and the flat surface 342 on the inner left and right ends.
  • the vertical frame 71 is locked to the front retainer locking portion 344 by entering the space.
  • the second lid locking portion 714 protruding from the edge of the vertical frame 71 in the width direction of the other vertical frame 712 is a through hole of the front retainer locking plate 343.
  • the vertical frame body 712 is locked to the front retainer locking plate 343 by being inserted into 343A.
  • the one vertical frame body 711 is locked to the front retainer locking portion 344, and the other vertical frame body 712 is locked to the front retainer locking plate 343. It is fixed to the main body 30.
  • the front retainer 7 serving as a lid-side substrate support fixed to the lid body 30 is disposed between a latch mechanism 32 disposed on the right direction D32 side and a latch mechanism 32 disposed on the left direction D31 side. Has been.
  • the lid side substrate receiving portion (front retainer substrate receiving portion 73) is The portion of the left end of one front retainer leg 721 that is fixed to the lid body 30, that is, the portion of one front retainer leg 721 that is connected to one vertical frame 711. The portion can be swung with the swinging axis as a swing axis.
  • the front retainer engaging portion 344 is released from the first lid engaging portion 713 and the front retainer engaging plate 343 is released from the second lid engaging portion 714. 7 is removed from the lid body 30.
  • a rib-shaped convex portion 304 is disposed at a position between the edge of the lid body 30 and the front retainer 7.
  • the edge of the lid body 30 is the edge of the lid 3 that defines the short side of the left side (left side D ⁇ b> 31) of the rectangular lid body 30. Part.
  • the rib-shaped convex portion 304 is fixed to the lid body 30 at this position.
  • a rib-like convex portion 304 is disposed at a position between the edge of the lid body 30 and the front retainer 7.
  • the edge of the lid body 30 is the edge of the lid 3 that defines the short side on the right side (right side D ⁇ b> 32) of the rectangular lid body 30.
  • the rib-shaped convex portion 304 is fixed to the lid body 30 at this position. That is, the rib-shaped convex portion 304 is located in a portion of the lid body 30 that faces the substrate storage space 27 when the container body opening 21 is closed by the lid 3.
  • the pair of rib-shaped convex portions 304 are arranged in parallel.
  • each of the rib-shaped convex portions 304 is in the vicinity of the edge of the lid 3 that defines the short side on the left side (left side D31 side) of the rectangular lid body 30 of the lid body 30. It extends in the up-down direction D2 which is one direction along the edge.
  • the rib-shaped convex portion 304 is a position that is raised about a quarter of the length of the edge from the lower end of the edge from a position that is lowered about a quarter of the length of the edge from the upper end of the edge. It extends to.
  • the rib-shaped convex portion 304 is integrally formed with the lid body 30 and is made of polycarbonate, which is the same material as the lid body 30.
  • the rib-shaped convex portion 304 moves toward the opening closing direction in which the lid 3 is relatively approached with respect to the container body opening 21, that is, in the backward direction. Projecting from the inner surface 301 of the lid body 30 toward D12. As shown in FIG. 5, the inside of the rib-shaped convex part 304 is hollow.
  • the cross section of the rib-like convex portion 304 cut by a virtual plane parallel to the front-rear direction D1 and the left-right direction D3 has a trapezoidal shape having a tapered shape.
  • the protruding end 304 ⁇ / b> A of the rib-like convex portion 304 is located on the rear direction D ⁇ b> 12 side, which is the opening closing direction, with respect to the front retainer substrate receiving portion 73 as the lid side substrate support portion of the front retainer 7.
  • the lid 3 is a portion of the lid body 30 and the portion of the lid body 30 that faces the substrate storage space 27 when the container body opening 21 is closed by the lid 3.
  • a main body supporting convex portion (rib-shaped convex portion 304) that is positioned so that when the container body opening portion 21 is closed by the lid body 3, the lid body 3 is relatively close to the container body opening portion 21. It has a main body supporting convex portion (rib-shaped convex portion 304) protruding from the lid main body 30 in the closing direction (rear direction D12).
  • the protruding end of the main body support convex portion is located closer to the opening closing direction side (rear direction D12 side) than the lid side substrate support portion (front retainer substrate receiving portion 73 of the front retainer 7). Therefore, when the lid 3 is placed on a flat surface with the lid-side substrate support portion (front retainer substrate receiving portion 73 of the front retainer 7) facing down, the lid-side substrate support portion is placed on the flat surface. Contact can be prevented, and contamination of the lid-side substrate support portion can be suppressed.
  • the retainer first contact surface 733 is in contact with the front portion of the edge W3 of the edge of the upper surface of the substrate W.
  • the front retainer second contact surface 734 when the substrate W is stored in the substrate storage space 27 and the lid 3 is closed, the substrate W is supported by the back substrate support 6 and the front retainer 7.
  • the front part of the edge W4 at the edge of the lower surface of the substrate W abuts. Accordingly, the front retainer substrate receiving portion 73 supports the edge portions of the plurality of substrates W.
  • the front retainer 7 receives a reaction force from the substrate W in the direction indicated by the arrow F1 in FIG.
  • the vertical frame 71 of the front retainer 7 pushes the lid body 30 in the forward direction D11
  • the lid body 30 pushes the latch in the forward direction D11.
  • the upper end portion of the upper latch portion 32A is engaged with the latch engagement recess portions 231A and 231B
  • the lower end portion of the lower latch portion 32B is engaged with the latch engagement recess portions 241A and 241B.
  • the portion 32A and the lower latch are prevented from moving in the forward direction D11.
  • the upper latch portion 32A and the lower latch are portions of the lid body 30 that are pushed in the front direction D11 by the vertical frame 71 of the front retainer 7 in the direction indicated by the arrow F2.
  • a reaction force is applied to the surface to suppress deformation of this portion.
  • the rib-shaped convex portion 304 is provided in the portion of the lid body 30 and in the vicinity of the portion pressed in the front direction D11 by the vertical frame 71 of the front retainer 7,
  • the strength of this part and the entire lid body 30 can be increased, and deformation of this part can be effectively suppressed. Therefore, the substrate W can be supported by the back substrate support 6 and the front retainer 7 stably and reliably with high accuracy. Further, it is possible to suppress the movement of the upper latch portion 32A and the lower latch portion 32B from being hindered by pressing the upper latch portion 32A and the lower latch portion 32B.
  • the strength of the lid 3 can be increased.
  • the container main body opening 21 is closed by the lid 3, and the back substrate support (the wall substrate support 60 of the back substrate support 6) is the lid substrate support (front retainer 7).
  • the lid substrate support front retainer 7
  • a reaction force that deforms the lid body 30 is applied to the lid body 30 from the substrate via the lid-side substrate support portion. Act. Even in such a case, the deformation of the lid body 30 can be suppressed.
  • the rib-like convex portions 304 are arranged in parallel and provided as a pair, the strength of the lid body 30 can be further increased, and deformation of the lid body 30 can be suppressed.
  • the lid body 30 has a rectangular shape, and portions in the vicinity of a pair of opposing sides in the rectangular lid body 30 are respectively container body engaging portions (latches) that can be engaged with the container body 2.
  • the lid body side substrate support part (front retainer 7) has a mechanism 32) and is disposed between one container body engaging part and the other container body engaging part.
  • a reaction force that deforms the lid body 30 acts on the portion of the container body engaging portion that is engaged with the container body 2.
  • the reaction force acting on the container body 2 is a portion of the lid body 30 and also acts on a portion between the edge of the lid body 30 and the lid-side substrate support portion.
  • the rib-shaped convex portion 304 is disposed at a position between the edge of the lid body 30 and the lid-side substrate support portion, the lid body 30 resists such a reaction force. Deformation can be reduced.
  • the main body support convex portion is configured by the rib-shaped convex portion 304, but is not limited to this configuration.
  • the rib-shaped convex part 304 was arrange
  • the shape of the container main body and the lid, the number of substrates that can be stored in the container main body, and the dimensions thereof are the shape of the container main body 2 and the lid 3 in this embodiment and the number of substrates W that can be stored in the container main body 2.
  • the dimensions are not limited.
  • the adjacent plate portions 51 of the substrate support plate-like portion 5 are arranged in a parallel positional relationship apart from each other. However, they may not be strictly in a parallel positional relationship, and may be in parallel.

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Abstract

This substrate housing vessel (1) is provided with: a vessel main body (2) having an aperture rim (28) at which a vessel main body aperture (21) has been formed; and a lid body (3) that can occlude that vessel main body aperture (21) and that can be attached to and detached from the aperture rim (28). The lid body (3) has a lid body main body (30) and a main body support protrusion (304) that is a portion of the lid body main body (30), is positioned at a section facing a substrate housing space (27) when the vessel main body aperture (21) is occluded by the lid body (3), and protrudes from the lid body main body (30) towards the direction of aperture occlusion causing the lid body (3) to relatively approach the vessel main body aperture (21) when the vessel main body aperture (21) is occluded by the lid body (3). The protruding tip of the main body support protrusion (304) is positioned at the aperture occlusion direction (D22) side with respect to a lid-body-side substrate support section (7).

Description

蓋体側基板支持部の汚染を抑制する基板収納容器Substrate storage container that suppresses contamination of lid-side substrate support
　本発明は、基板収納容器に関し、特に、蓋体を容器本体から取り外した状態のときに、蓋体に取り付けられた蓋体側基板支持部が汚染されることを抑制する基板収納容器に関する。 The present invention relates to a substrate storage container, and more particularly to a substrate storage container that suppresses contamination of the lid-side substrate support attached to the lid when the lid is removed from the container body.
　半導体ウェーハ等の基板を収納する容器としては、容器本体と、蓋体と、シール部材と、フロントリテーナと、奥側基板支持部とを備える構成のものが、従来より知られている。 As a container for storing a substrate such as a semiconductor wafer, a container having a structure including a container body, a lid, a seal member, a front retainer, and a back substrate support has been conventionally known.
　容器本体は、一端部に容器本体開口部が形成され、他端部が閉塞された筒状の壁部を有する。容器本体内には基板収納空間が形成されている。基板収納空間は、壁部により取り囲まれて形成されており、複数の基板を収納可能である。蓋体は、容器本体開口部に対して着脱可能であり、容器本体開口部を閉塞可能である。 The container body has a cylindrical wall part in which an opening part of the container body is formed at one end and the other end is closed. A substrate storage space is formed in the container body. The substrate storage space is formed by being surrounded by a wall portion, and can store a plurality of substrates. The lid can be attached to and detached from the container body opening, and the container body opening can be closed.
　フロントリテーナは、蓋体に固定されている。フロントリテーナは、蓋体によって容器本体開口部が閉塞されているときに、複数の基板の縁部を支持可能である。
　奥側基板支持部は、フロントリテーナと対をなすように壁部に設けられており、複数の基板の縁部を支持可能である。奥側基板支持部は、蓋体によって容器本体開口部が閉塞されているときに、フロントリテーナと協働して複数の基板を支持することにより、隣接する基板同士を所定の間隔で離間させて並列させた状態で、複数の基板を保持する（特許文献１参照）。 The front retainer is fixed to the lid. The front retainer can support the edges of the plurality of substrates when the container main body opening is closed by the lid.
The back side substrate support portion is provided on the wall portion so as to form a pair with the front retainer, and can support the edge portions of a plurality of substrates. When the container body opening is closed by the lid, the back side substrate support unit supports a plurality of substrates in cooperation with the front retainer, thereby separating adjacent substrates at a predetermined interval. A plurality of substrates are held in a parallel state (see Patent Document 1).
特開２０００－１５９２８８号公報JP 2000-159288 A
　前述のように基板収納容器においては、基板収容空間内に基板を収納しようとするときには、蓋体を容器本体から取り外す必要がある。取り外された蓋体は、蓋体の内面、即ち蓋体の面であって、蓋体によって容器本体開口部が閉塞されているときに基板収納空間に対向する面に固定されたフロントリテーナが、他のものに接触しないようにして、フロントリテーナが汚染されることを抑制する必要がある。 As described above, in the substrate storage container, when the substrate is stored in the substrate storage space, it is necessary to remove the lid from the container body. The removed lid is an inner surface of the lid, that is, a surface of the lid, and a front retainer fixed to a surface facing the substrate storage space when the container body opening is closed by the lid, It is necessary to prevent the front retainer from being contaminated by avoiding contact with others.
　本発明は、蓋体側基板支持部の汚染を抑制することができ、更に、蓋体の強度を上げることができ、基板を抑える際（蓋体で容器本体開口部を閉じたとき）の蓋体の変形を抑制し、基板を確実に保持でき、蓋体の保存の場合などに、蓋体を積み重ねて保管でき、保管スペースを少なくできる基板収納容器を提供することを目的とする。 The present invention can suppress contamination of the lid-side substrate support part, further increase the strength of the lid, and cover the substrate (when the container body opening is closed with the lid). It is an object of the present invention to provide a substrate storage container that can suppress the deformation of the substrate, can securely hold the substrate, and can store and store the lids in the case of storing the lids, thereby reducing the storage space.
　本発明は、複数の基板を収納可能な基板収納空間が内部に形成され、一端部に前記基板収納空間に連通する容器本体開口部が形成された開口周縁部を有する容器本体と、前記開口周縁部に対して着脱可能であり、前記容器本体開口部を閉塞可能な蓋体と、前記蓋体の部分であって前記蓋体によって前記容器本体開口部が閉塞されているときに前記基板収納空間に対向する部分に配置され、前記蓋体によって前記容器本体開口部が閉塞されているときに、前記複数の基板の縁部を支持可能な蓋体側基板支持部と、前記基板収納空間の内部において前記蓋体側基板支持部と対をなすように配置され、前記複数の基板の縁部を支持可能であり、前記蓋体によって前記容器本体開口部が閉塞されているときに、前記蓋体側基板支持部と協働して前記複数の基板を支持する奥側基板支持部と、を備え、前記蓋体は、蓋体本体と、前記蓋体本体の部分であって前記蓋体によって前記容器本体開口部が閉塞されているときに前記基板収納空間に対向する部分に位置する本体支持凸部であって、前記蓋体によって前記容器本体開口部を閉塞するときに、前記蓋体を前記容器本体開口部に対して相対的に接近させる開口閉塞方向へ向かって前記蓋体本体から突出する本体支持凸部とを有し、前記本体支持凸部の突出端は、前記蓋体側基板支持部よりも前記開口閉塞方向の側に位置している基板収納容器に関する。 The present invention includes a container main body having an opening peripheral edge portion in which a substrate storage space capable of storing a plurality of substrates is formed, and an opening peripheral edge portion formed at one end portion and communicating with the substrate storage space. A lid that is detachable from the container and capable of closing the container main body opening, and the substrate housing space when the container main body opening is closed by the lid, which is a part of the lid. A lid-side substrate support portion capable of supporting the edges of the plurality of substrates when the container body opening is closed by the lid, and in the inside of the substrate storage space. The lid-side substrate support is disposed when paired with the lid-side substrate support portion, can support edges of the plurality of substrates, and the container body opening is closed by the lid. In cooperation with the department A back-side substrate support part that supports a number of substrates, and the lid body is a lid body body and a part of the lid body body, and the container body opening is closed by the lid body A main body supporting convex portion located at a portion facing the substrate storage space, and when the container body opening is closed by the lid, the lid is relatively positioned with respect to the container body opening. A main body support convex portion projecting from the lid body toward the opening closing direction to be approached, and a projecting end of the main body support convex portion is positioned on the opening closing direction side with respect to the lid side substrate support portion. The present invention relates to a substrate storage container.
　ここで、前記本体支持凸部は、一の方向に延びるリブ状凸部を有することが好ましい。また、前記リブ状凸部は、平行に配置されて一対設けられていることが好ましい。 Here, it is preferable that the main body supporting convex portion has a rib-shaped convex portion extending in one direction. Moreover, it is preferable that a pair of the rib-like convex portions is provided in parallel.
　また、前記蓋体本体は長方形状を有し、前記長方形状の前記蓋体本体において対向する一の対の辺の近傍の部分は、それぞれ前記容器本体に係合可能な容器本体係合部を有し、前記蓋体側基板支持部は、一方の前記容器本体係合部と他方の前記容器本体係合部との間に配置され、前記リブ状凸部は、前記蓋体本体の縁部と、前記蓋体側基板支持部との間の位置に配置されていることが好ましい。 Further, the lid body has a rectangular shape, and the portions in the vicinity of a pair of opposing sides in the rectangular lid body have container body engaging portions that can be engaged with the container body, respectively. The lid-side substrate support portion is disposed between one of the container main body engaging portions and the other container main body engaging portion, and the rib-like convex portion is arranged with an edge of the lid main body. It is preferable that it is arrange | positioned in the position between the said cover body side board | substrate support parts.
　本発明によれば、蓋体側基板支持部の汚染を抑制することができ、更に、蓋体の強度を上げることができ、基板を抑える際（蓋体で容器本体開口部を閉じたとき）の蓋体の変形を抑制し、基板を確実に保持でき、蓋体の保存の場合などに、蓋体を積み重ねて保管でき、保管スペースを少なくできる基板収納容器を提供することができる。 According to the present invention, contamination of the lid-side substrate support portion can be suppressed, and further, the strength of the lid can be increased, and when the substrate is suppressed (when the container main body opening is closed with the lid). It is possible to provide a substrate storage container that can suppress deformation of the lid, hold the substrate securely, and can store the lid in a stacked manner when the lid is stored, thereby reducing the storage space.
本実施形態に係る基板収納容器を示す斜視図である。It is a perspective view which shows the substrate storage container which concerns on this embodiment. 本実施形態に係る基板収納容器を示す断面図である。It is sectional drawing which shows the board | substrate storage container which concerns on this embodiment. 本実施形態に係る基板収納容器の奥側基板支持部を示す側方拡大断面図である。It is a side expanded sectional view which shows the back | inner side board | substrate support part of the substrate storage container which concerns on this embodiment. 本実施形態に係る基板収納容器の蓋を開いた状態を示す分解斜視図である。It is a disassembled perspective view which shows the state which opened the cover of the substrate storage container which concerns on this embodiment. 本実施形態に係る基板収納容器の容器本体の基板収容空間に基板を収納した状態を示す分解斜視図である。It is a disassembled perspective view which shows the state which accommodated the board | substrate in the board | substrate accommodation space of the container main body of the board | substrate storage container which concerns on this embodiment. 本実施形態に係る基板収納容器の蓋体を示す後方斜視図である。It is a back perspective view which shows the cover body of the substrate storage container which concerns on this embodiment. 本実施形態に係る基板収納容器の蓋体を示す断面図である。It is sectional drawing which shows the cover body of the substrate storage container which concerns on this embodiment. 図５のＡ－Ａ線の方向から見た本実施形態に係る基板収納容器の要部断面図である。It is principal part sectional drawing of the substrate storage container which concerns on this embodiment seen from the direction of the AA line of FIG. 本実施形態に係る基板収納容器の蓋体においてフロントリテーナ、ラッチ機構、及びシール部材を省略した後方斜視図である。It is the back perspective view which omitted a front retainer, a latch mechanism, and a seal member in a lid of a substrate storage container concerning this embodiment.
　以下、本発明の実施形態による基板収納容器について、図面を参照しながら説明する。
　図１は、本実施形態に係る基板収納容器を示す斜視図である。図２Ａは、本実施形態に係る基板収納容器を示す断面図である。図２Ｂは、本実施形態に係る基板収納容器の奥側基板支持部を示す側方拡大断面図である。図３Ａは、本実施形態に係る基板収納容器の蓋を開いた状態を示す分解斜視図である。図３Ｂは、本実施形態に係る基板収納容器の容器本体の基板収容空間に基板を収納した状態を示す分解斜視図である。図４は、本実施形態に係る基板収納容器の蓋体を示す後方斜視図である。図５は、本実施形態に係る基板収納容器の蓋体を示す断面図である。図６は、図５のＡ－Ａ線の方向から見た本実施形態に係る基板収納容器の要部断面図である。図７は、本実施形態に係る基板収納容器の蓋体においてフロントリテーナ、ラッチ機構、及びシール部材を省略した後方斜視図である。 Hereinafter, a substrate storage container according to an embodiment of the present invention will be described with reference to the drawings.
FIG. 1 is a perspective view showing a substrate storage container according to the present embodiment. FIG. 2A is a cross-sectional view illustrating the substrate storage container according to the present embodiment. FIG. 2B is an enlarged side cross-sectional view showing the back substrate support part of the substrate storage container according to the present embodiment. FIG. 3A is an exploded perspective view showing a state in which the lid of the substrate storage container according to the present embodiment is opened. FIG. 3B is an exploded perspective view showing a state in which the substrate is stored in the substrate storage space of the container main body of the substrate storage container according to the present embodiment. FIG. 4 is a rear perspective view showing the lid of the substrate storage container according to the present embodiment. FIG. 5 is a cross-sectional view showing the lid of the substrate storage container according to the present embodiment. FIG. 6 is a cross-sectional view of the main part of the substrate storage container according to the present embodiment as viewed from the direction of the line AA in FIG. FIG. 7 is a rear perspective view in which the front retainer, the latch mechanism, and the seal member are omitted from the lid of the substrate storage container according to the present embodiment.
　ここで、説明の便宜上、後述の容器本体２から蓋体３へ向かう方向（図１における右上から左下へ向かう方向）を前方向Ｄ１１と定義し、その反対の方向を後方向Ｄ１２と定義し、これらを前後方向Ｄ１と定義する。また、後述の下壁２４から上壁２３へと向かう方向（図３Ａにおける上方向）を上方向Ｄ２１と定義し、その反対の方向を下方向Ｄ２２と定義し、これらを上下方向Ｄ２と定義する。また、後述する第２側壁２６から第１側壁２５へと向かう方向（図３Ａにおける右下から左上へ向かう方向）を左方向Ｄ３１と定義し、その反対の方向を右方向Ｄ３２と定義し、これらを左右方向Ｄ３と定義する。 Here, for convenience of explanation, a direction from the container body 2 described later to the lid 3 (direction from the upper right to the lower left in FIG. 1) is defined as the front direction D11, and the opposite direction is defined as the rear direction D12. These are defined as the front-rear direction D1. In addition, a direction (upward direction in FIG. 3A) from the lower wall 24 to the upper wall 23 described later is defined as an upward direction D21, an opposite direction is defined as a downward direction D22, and these are defined as a vertical direction D2. . Further, a direction from the second side wall 26 described later to the first side wall 25 (a direction from the lower right to the upper left in FIG. 3A) is defined as a left direction D31, and the opposite direction is defined as a right direction D32. Is defined as the left-right direction D3.
　また、基板収納容器１に収納される基板Ｗ（図３Ｂ参照）は、円盤状のシリコンウェーハ、ガラスウェーハ、サファイアウェーハ等であり、産業に用いられる薄いものである。本実施形態における基板Ｗは、直径４５０ｍｍのシリコンウェーハである。 Further, the substrate W (see FIG. 3B) stored in the substrate storage container 1 is a disk-shaped silicon wafer, glass wafer, sapphire wafer, etc., and is a thin one used in the industry. The substrate W in this embodiment is a silicon wafer having a diameter of 450 mm.
　図１～図３Ｂに示すように、基板収納容器１は、容器本体２と、蓋体３と、シール部材４と、基板支持板状部５と、蓋体側基板受け部としてのフロントリテーナ７とを有している。 As shown in FIGS. 1 to 3B, the substrate storage container 1 includes a container main body 2, a lid 3, a seal member 4, a substrate support plate-like portion 5, and a front retainer 7 as a lid-side substrate receiving portion. have.
　図３Ａに示すように、容器本体２は、一端部に容器本体開口部２１が形成され、他端部が閉塞された筒状の壁部２０を有する。容器本体２内には基板収納空間２７が形成されている。基板収納空間２７は、壁部２０により取り囲まれて形成されている。壁部２０の部分であって基板収納空間２７を形成している部分には、基板支持板状部５が配置されている。基板収納空間２７には、図３Ｂに示すように、複数の基板Ｗを収納可能である。 As shown in FIG. 3A, the container body 2 has a cylindrical wall portion 20 in which a container body opening 21 is formed at one end and the other end is closed. A substrate storage space 27 is formed in the container body 2. The substrate storage space 27 is formed so as to be surrounded by the wall portion 20. The substrate support plate-shaped portion 5 is disposed in a portion of the wall portion 20 that forms the substrate storage space 27. The substrate storage space 27 can store a plurality of substrates W as shown in FIG. 3B.
　基板支持板状部５は、基板収納空間２７内において対をなすように壁部２０に設けられている。基板支持板状部５は、蓋体３によって容器本体開口部２１が閉塞されていないときに、隣接する基板Ｗ同士を所定の間隔で離間させて並列させた状態で、複数の基板Ｗの縁部を支持可能である。基板支持板状部５の奥側には、奥側基板支持部６が設けられている。奥側基板支持部６は、蓋体３によって容器本体開口部２１が閉塞されているときに、複数の基板Ｗの縁部の後部を支持可能である。 The substrate support plate-like portion 5 is provided on the wall portion 20 so as to form a pair in the substrate storage space 27. When the container body opening 21 is not closed by the lid 3, the substrate support plate-like portion 5 is arranged in such a manner that adjacent substrates W are separated from each other at a predetermined interval and arranged in parallel. The part can be supported. A back side substrate support portion 6 is provided on the back side of the substrate support plate-like portion 5. The back-side substrate support 6 can support the rear portions of the edges of the plurality of substrates W when the container body opening 21 is closed by the lid 3.
　蓋体３は、容器本体開口部２１を形成する開口周縁部２８に対して着脱可能であり、容器本体開口部２１を閉塞可能である。フロントリテーナ７は、蓋体３の部分であって蓋体３によって容器本体開口部２１が閉塞されているときに基板収納空間２７に対向する部分に設けられている。フロントリテーナ７は、基板収納空間２７の内部において奥側基板支持部６と対をなすように配置されている。 The lid 3 can be attached to and detached from the opening peripheral edge 28 that forms the container body opening 21, and can close the container body opening 21. The front retainer 7 is provided in a portion of the lid 3 that faces the substrate storage space 27 when the container main body opening 21 is closed by the lid 3. The front retainer 7 is disposed inside the substrate storage space 27 so as to make a pair with the back substrate support 6.
　フロントリテーナ７は、蓋体３によって容器本体開口部２１が閉塞されているときに、複数の基板Ｗの縁部の前部を支持可能である。フロントリテーナ７は、蓋体３によって容器本体開口部２１が閉塞されているときに、奥側基板支持部６と協働して複数の基板Ｗを支持することにより、隣接する基板Ｗ同士を所定の間隔で離間させて並列させた状態で、複数の基板Ｗを保持する。以下、各部について、詳細に説明する。 The front retainer 7 can support the front portions of the edges of the plurality of substrates W when the container main body opening 21 is closed by the lid 3. When the container main body opening 21 is closed by the lid 3, the front retainer 7 supports a plurality of substrates W in cooperation with the back substrate support 6, thereby allowing adjacent substrates W to be predetermined. A plurality of substrates W are held in a state where they are spaced apart and arranged in parallel. Hereinafter, each part will be described in detail.
　図３Ａ等に示すように、容器本体２の壁部２０は、奥壁２２と上壁２３と下壁２４と第１側壁２５と第２側壁２６とを有する。奥壁２２、上壁２３、下壁２４、第１側壁２５、及び第２側壁２６は、プラスチック材等により構成されており、第１実施形態では、ポリカーボネートにより一体成形されて構成されている。 As shown in FIG. 3A and the like, the wall portion 20 of the container body 2 includes a back wall 22, an upper wall 23, a lower wall 24, a first side wall 25, and a second side wall 26. The back wall 22, the upper wall 23, the lower wall 24, the first side wall 25, and the second side wall 26 are made of a plastic material or the like. In the first embodiment, they are integrally formed of polycarbonate.
　第１側壁２５と第２側壁２６とは対向しており、上壁２３と下壁２４とは対向している。上壁２３の後端、下壁２４の後端、第１側壁２５の後端、及び第２側壁２６の後端は、全て奥壁２２に接続されている。上壁２３の前端、下壁２４の前端、第１側壁２５の前端、及び第２側壁２６の前端は、奥壁２２に対向する位置関係を有し、略長方形状をした容器本体開口部２１を形成する開口周縁部２８を構成する。 The first side wall 25 and the second side wall 26 face each other, and the upper wall 23 and the lower wall 24 face each other. The rear end of the upper wall 23, the rear end of the lower wall 24, the rear end of the first side wall 25, and the rear end of the second side wall 26 are all connected to the back wall 22. The front end of the upper wall 23, the front end of the lower wall 24, the front end of the first side wall 25, and the front end of the second side wall 26 have a positional relationship facing the back wall 22 and have a substantially rectangular shape. Opening peripheral edge portion 28 is formed.
　開口周縁部２８は、容器本体２の一端部に設けられており、奥壁２２は、容器本体２の他端部に位置している。壁部２０の外面により形成される容器本体２の外形は箱状である。壁部２０の内面、即ち、奥壁２２の内面、上壁２３の内面、下壁２４の内面、第１側壁２５の内面、及び第２側壁２６の内面は、これらによって取り囲まれた基板収納空間２７を形成している。開口周縁部２８に形成された容器本体開口部２１は、壁部２０により取り囲まれて容器本体２の内部に形成された基板収納空間２７に連通している。基板収納空間２７には後述のように、最大で２５枚の基板Ｗを収納可能である。 The opening peripheral edge 28 is provided at one end of the container main body 2, and the back wall 22 is located at the other end of the container main body 2. The outer shape of the container body 2 formed by the outer surface of the wall portion 20 is box-shaped. The inner surface of the wall portion 20, that is, the inner surface of the back wall 22, the inner surface of the upper wall 23, the inner surface of the lower wall 24, the inner surface of the first side wall 25, and the inner surface of the second side wall 26 are surrounded by these. 27 is formed. The container main body opening 21 formed in the opening peripheral edge portion 28 is surrounded by the wall portion 20 and communicates with the substrate storage space 27 formed in the container main body 2. As will be described later, a maximum of 25 substrates W can be stored in the substrate storage space 27.
　図３Ａに示すように、上壁２３及び下壁２４の部分であって、開口周縁部２８の近傍の部分には、基板収納空間２７の外方へ向かって窪んだラッチ係合凹部２３１Ａ、２３１Ｂ、２４１Ａ、２４１Ｂが形成されている。ラッチ係合凹部２３１Ａ、２３１Ｂ、２４１Ａ、２４１Ｂは、上壁２３及び下壁２４の左右両端部近傍に１つずつ、計４つ形成されている。 As shown in FIG. 3A, the latch engaging recesses 231A and 231B that are recessed toward the outside of the substrate storage space 27 are portions of the upper wall 23 and the lower wall 24 and in the vicinity of the opening peripheral edge portion 28. , 241A, 241B are formed. A total of four latch engaging recesses 231A, 231B, 241A, 241B are formed near the left and right ends of the upper wall 23 and the lower wall 24, one each.
　図１、図２Ａ、図３Ａに示すように、上壁２３の外面においては、リブ２３３及びフランジ固定部２３４（図２Ａ参照）が上壁２３と一体成形されて設けられている。リブ２３３は、上壁２３の外面から上方向Ｄ２１へ突出し、複数設けられている。リブ２３３は、略前後方向Ｄ１へ延びるものと、略左右方向Ｄ３へ延びるものとを有している。フランジ固定部２３４には、トップフランジ２３５が固定される。トップフランジ２３５は、上壁２３に固定され、ＡＭＨＳ（自動ウェーハ搬送システム）、ＰＧＶ（ウェーハ基板搬送台車）等において基板収納容器１を吊り下げる際に、基板収納容器１において掛けられて吊り下げられる部分となる部材である。 As shown in FIG. 1, FIG. 2A, and FIG. 3A, on the outer surface of the upper wall 23, a rib 233 and a flange fixing portion 234 (see FIG. 2A) are integrally formed with the upper wall 23. A plurality of ribs 233 protrude from the outer surface of the upper wall 23 in the upward direction D21. The rib 233 has what extends in the substantially front-back direction D1 and what extends in the substantially left-right direction D3. A top flange 235 is fixed to the flange fixing portion 234. The top flange 235 is fixed to the upper wall 23, and is hung and suspended in the substrate storage container 1 when the substrate storage container 1 is suspended in an AMHS (automatic wafer transport system), a PGV (wafer substrate transport carriage), or the like. It is a member which becomes a part.
　図１に示すように、下壁２４の外面には、容器本体脚部２４３が設けられている。容器本体脚部２４３は、下壁２４の左右両端縁に取り付けられており、下壁２４の左右両端縁に沿って前後方向Ｄ１に延びている。容器本体脚部２４３は、下壁２４を下側（下方向Ｄ２２の側）として容器本体２を水平な平坦面上に載置したときに、当該平坦面に当接して、容器本体２を安定して支持する。 As shown in FIG. 1, a container main body leg 243 is provided on the outer surface of the lower wall 24. The container main body leg portion 243 is attached to the left and right end edges of the lower wall 24 and extends in the front-rear direction D1 along the left and right end edges of the lower wall 24. When the container main body 2 is placed on a horizontal flat surface with the lower wall 24 on the lower side (downward D22 side), the container main body leg 243 is brought into contact with the flat surface to stabilize the container main body 2. And support.
　図２Ａ、図３Ａに示すように、基板支持板状部５は、第１側壁２５及び第２側壁２６にそれぞれ設けられて、左右方向Ｄ３において対をなすようにして基板収納空間２７内に配置されている。具体的には、図２Ａに示すように、基板支持板状部５は、板部５１と板部支持部５２とを有している。板部５１と板部支持部５２とは、樹脂が一体成形されて構成されている。板部５１は、板状の弧形状を有している。板部５１は、第１側壁２５、第２側壁２６に、それぞれ２５枚ずつ計５０枚設けられている。隣接する板部５１は、上下方向Ｄ２において１０ｍｍ～１２ｍｍ間隔で互いに離間して平行な位置関係で配置されている。なお、最も上に位置する板部５１の上方にも、板部５１と同一形状のものが配置されているが、これは、最も上に位置して基板収納空間２７内へ挿入される基板Ｗに対して、当該挿入の際のガイドの役割をする部材である。 As shown in FIGS. 2A and 3A, the substrate support plate-like portions 5 are provided in the first side wall 25 and the second side wall 26, respectively, and are arranged in the substrate storage space 27 so as to form a pair in the left-right direction D3. Has been. Specifically, as shown in FIG. 2A, the substrate support plate-like portion 5 has a plate portion 51 and a plate portion support portion 52. The plate portion 51 and the plate portion support portion 52 are configured by integrally molding resin. The plate part 51 has a plate-like arc shape. A total of 50 plate portions 51 are provided on each of the first side wall 25 and the second side wall 26, each including 25 plates. Adjacent plate portions 51 are arranged in parallel with each other in the vertical direction D2 so as to be spaced apart from each other at an interval of 10 mm to 12 mm. Note that the same shape as the plate portion 51 is also disposed above the uppermost plate portion 51, but this is the substrate W that is positioned at the uppermost position and inserted into the substrate storage space 27. On the other hand, the member serves as a guide for the insertion.
　また、第１側壁２５に設けられた２５枚の板部５１と、第２側壁２６に設けられた２５枚の板部５１とは、互いに左右方向Ｄ３において対向する位置関係を有している。また、５０枚の板部５１、及び、板部５１と略同形状の２枚のガイドの役割をする部材は、下壁２４の内面に平行な位置関係を有している。図２Ａに示すように、板部５１の上面には、凸部５１１が設けられている。板部５１に支持された基板Ｗは、凸部５１１の突出端にのみ接触し、面で板部５１に接触しない。 Further, the 25 plate portions 51 provided on the first side wall 25 and the 25 plate portions 51 provided on the second side wall 26 have a positional relationship facing each other in the left-right direction D3. Further, the 50 plate portions 51 and the members serving as two guides having substantially the same shape as the plate portion 51 have a positional relationship parallel to the inner surface of the lower wall 24. As shown in FIG. 2A, a convex portion 511 is provided on the upper surface of the plate portion 51. The board | substrate W supported by the board part 51 contacts only the protrusion end of the convex part 511, and does not contact the board part 51 by a surface.
　板部支持部５２は、図２Ａに示すように、上下方向Ｄ２に延びる部材により構成されている。第１側壁２５に設けられた２５枚の板部５１は、第１側壁２５側に設けられた板部支持部５２に接続されている。同様に、第２側壁２６に設けられた２５枚の板部５１は、第２側壁２６側に設けられた板部支持部５２に接続されている。 As shown in FIG. 2A, the plate portion support portion 52 is configured by a member extending in the up-down direction D2. The 25 plate portions 51 provided on the first side wall 25 are connected to a plate portion support portion 52 provided on the first side wall 25 side. Similarly, the 25 plate portions 51 provided on the second side wall 26 are connected to a plate portion support portion 52 provided on the second side wall 26 side.
　板部支持部５２は、第１側壁係止部（図示せず）を有している。第１側壁係止部は、第１側壁２５、第２側壁２６にそれぞれ設けられた側方板係止部（図示せず）に係止可能である。第１側壁係止部が側方板係止部に係止されることにより、基板支持板状部５は、第１側壁２５、第２側壁２６にそれぞれ固定される。
　このような構成の基板支持板状部５により、複数の基板Ｗのうちの隣接する基板Ｗ同士を、所定の間隔で離間した状態で且つ互いに平行な位置関係とした状態で、複数の基板Ｗの縁部を支持可能である。 The plate part support part 52 has a first side wall locking part (not shown). The first side wall locking portion can be locked to side plate locking portions (not shown) provided on the first side wall 25 and the second side wall 26, respectively. The board | substrate support plate-shaped part 5 is each fixed to the 1st side wall 25 and the 2nd side wall 26 by latching a 1st side wall latching | locking part to a side plate latching | locking part.
With the substrate support plate-like portion 5 having such a configuration, the plurality of substrates W in the state where the adjacent substrates W among the plurality of substrates W are separated from each other at a predetermined interval and in parallel with each other. Can be supported.
　図２Ａに示すように、奥側基板支持部６は、壁部基板支持部６０と支持部固定部材６７とを有している。壁部基板支持部６０は、基板支持板状部５の板部５１の後端部に、板部５１と一体で成形されている。
　なお、奥側基板支持部６は、基板支持板状部５とは別体、即ち、壁部基板支持部６０は、基板支持板状部５の板部５１とは別体で構成されていてもよい。 As shown in FIG. 2A, the back substrate support 6 includes a wall substrate support 60 and a support fixing member 67. The wall portion substrate support portion 60 is formed integrally with the plate portion 51 at the rear end portion of the plate portion 51 of the substrate support plate-like portion 5.
The back substrate support 6 is separate from the substrate support plate 5, that is, the wall substrate support 60 is formed separately from the plate 51 of the substrate support 5. Also good.
　支持部固定部材６７においては、それぞれ壁部基板支持部６０が、基板収納空間２７に収納可能な基板Ｗの一枚毎に対応した個数、具体的には、２５個設けられている。第１側壁２５及び第２側壁２６に設けられた壁部基板支持部６０は、前後方向Ｄ１において、後述するフロントリテーナ７と対をなすような位置関係を有している。支持部固定部材６７は、側壁後部係止部（図示せず）を有している。側壁後部係止部は、第１側壁２５、第２側壁２６にそれぞれ設けられた奥側基板支持部係止部（図示せず）に係止可能である。前述の第１側壁係止部（図示せず）が側方板係止部（図示せず）に係止されると共に、側壁後部係止部（図示せず）が奥側基板支持部係止部（図示せず）に係止されることによって、基板支持板状部５は、第１側壁２５、第２側壁２６にそれぞれ固定される。 In the support portion fixing member 67, the number of wall substrate support portions 60 corresponding to each one of the substrates W that can be stored in the substrate storage space 27, specifically, 25 is provided. The wall part board | substrate support part 60 provided in the 1st side wall 25 and the 2nd side wall 26 has the positional relationship which makes a pair with the front retainer 7 mentioned later in the front-back direction D1. The support portion fixing member 67 has a side wall rear portion locking portion (not shown). The side wall rear portion locking portion can be locked to back side substrate support portion locking portions (not shown) provided on the first side wall 25 and the second side wall 26, respectively. The first side wall locking portion (not shown) is locked to the side plate locking portion (not shown), and the side wall rear locking portion (not shown) is locked to the back side substrate support portion. The substrate support plate-like part 5 is fixed to the first side wall 25 and the second side wall 26 by being locked to the part (not shown).
　壁部基板支持部６０は、図２Ｂに示すように、第１当接面６２１を有する支持部上部６２と第２当接面６３１を有する支持部下部６３とを有している。
　第１当接面６２１には、後述のように基板収納空間２７内に基板Ｗが収納され、蓋体３が閉じられることにより、基板Ｗが奥側基板支持部６とフロントリテーナ７とによって支持されたときに、基板Ｗの上面の縁部の端縁が当接可能である。第２当接面６３１には、基板収納空間２７内に基板Ｗが収納され蓋体３が閉じられることにより、基板Ｗが奥側基板支持部６とフロントリテーナ７とによって支持されたときに、基板Ｗの下面の縁部の端縁が当接可能である。 As shown in FIG. 2B, the wall portion substrate support portion 60 includes a support portion upper portion 62 having a first contact surface 621 and a support portion lower portion 63 having a second contact surface 631.
As will be described later, the first contact surface 621 stores the substrate W in the substrate storage space 27 and closes the lid 3 so that the substrate W is supported by the back substrate support 6 and the front retainer 7. When this is done, the edge of the edge of the upper surface of the substrate W can come into contact. When the substrate W is stored in the substrate storage space 27 and the lid 3 is closed on the second contact surface 631, the substrate W is supported by the back substrate support 6 and the front retainer 7. The edge of the edge part of the lower surface of the board | substrate W can contact | abut.
　図３Ａに示すように、蓋体３は、容器本体２の開口周縁部２８に対して着脱可能であり、開口周縁部２８に蓋体３が装着されることにより、蓋体３は、容器本体開口部２１を閉塞可能である。
　図４に示すように、蓋体３は、蓋体本体３０と、リブ状凸部３０４とを有しており、容器本体２の開口周縁部２８（図３Ａ参照）の形状と略一致する略長方形状を有している。蓋体本体３０は長方形状を有し、長方形をした蓋体３の外郭を形成しており、図５に示すように、内面３０１と、外面３０２とを有している。内面３０１は、後述のように、蓋体３によって容器本体開口部２１が閉塞されているときに基板収納空間２７に対向する。外面３０２は、蓋体３によって容器本体開口部２１が閉塞されているときに、基板収納容器１の外部に露出する。蓋体本体３０は、プラスチック材等により構成されており、第１実施形態では、ポリカーボネートにより成形されて構成されている。 As shown in FIG. 3A, the lid 3 is detachable from the opening peripheral portion 28 of the container body 2, and the lid 3 is attached to the opening peripheral portion 28, whereby the lid 3 is The opening 21 can be closed.
As shown in FIG. 4, the lid body 3 includes a lid body 30 and a rib-like convex portion 304, and substantially matches the shape of the opening peripheral edge portion 28 (see FIG. 3A) of the container body 2. It has a rectangular shape. The lid body 30 has a rectangular shape and forms an outer shape of the rectangular lid body 3, and has an inner surface 301 and an outer surface 302 as shown in FIG. 5. As will be described later, the inner surface 301 faces the substrate storage space 27 when the container main body opening 21 is closed by the lid 3. The outer surface 302 is exposed to the outside of the substrate storage container 1 when the container main body opening 21 is closed by the lid 3. The lid body 30 is made of a plastic material or the like. In the first embodiment, the lid body 30 is made of polycarbonate.
　図５に示すように、蓋体本体３０の外周縁部においては、シール部材嵌合溝３１が蓋体３の外周縁部に沿って形成されている。シール部材嵌合溝３１においては、弾性変形可能なＰＯＥ（ポリオキシエチレン）製、ＰＥＥ製をはじめ、ポリエステル系、ポリオレフィン系など各種熱可塑性エラストマー、フッ素ゴム製、シリコンゴム製等の環状のシール部材４が嵌め込まれている。シール部材４は、蓋体３の外周縁部を一周するように配置されている。 As shown in FIG. 5, a seal member fitting groove 31 is formed along the outer peripheral edge of the lid 3 at the outer peripheral edge of the lid body 30. In the seal member fitting groove 31, an annular seal member made of elastically deformable POE (polyoxyethylene), PEE, various thermoplastic elastomers such as polyester and polyolefin, fluororubber, silicon rubber, etc. 4 is fitted. The seal member 4 is arranged so as to go around the outer peripheral edge of the lid 3.
　シール部材４は、容器本体開口部２１を形成している容器本体２の部分である開口周縁部２８に当接可能である。シール部材４は、開口周縁部２８と蓋体本体３０との間に介在して開口周縁部２８に密着して当接することにより、蓋体３によって容器本体開口部２１を気密の状態で閉塞可能である。開口周縁部２８から蓋体３が取り外されることにより、容器本体２内の基板収納空間２７に対して、基板Ｗを出し入れ可能となる。 The seal member 4 can be brought into contact with an opening peripheral portion 28 which is a portion of the container main body 2 forming the container main body opening 21. The seal member 4 is interposed between the opening peripheral portion 28 and the lid body 30 and is in close contact with the opening peripheral portion 28 so that the container body opening 21 can be closed in an airtight state by the lid 3. It is. By removing the lid 3 from the opening peripheral edge 28, the substrate W can be taken into and out of the substrate storage space 27 in the container body 2.
　図５に示すように、蓋体本体３０の部分であって、長方形状の蓋体本体３０において対向する一の対の辺である一対の短辺の近傍の部分、即ち、蓋体本体３０の部分であって蓋体本体３０の左右両端部近傍の部分は、それぞれラッチ収納部３０３を有している。ラッチ本体収納部内には、当該一対の短辺に沿って延びるラッチ収納空間３０３Ａが、それぞれ形成されている。 As shown in FIG. 5, the lid body 30 is a portion in the vicinity of a pair of short sides that are a pair of opposing sides in the rectangular lid body 30, that is, the lid body 30. Each of the portions in the vicinity of the left and right end portions of the lid body 30 has a latch storage portion 303. A latch housing space 303A extending along the pair of short sides is formed in the latch body housing portion.
　ラッチ収納空間３０３Ａには、容器本体係合部としてのラッチ機構３２が収納されており、ラッチ機構３２は、上側ラッチ部３２Ａと、下側ラッチ部３２Ｂとを備えている。
　図６に示すように、上側ラッチ部３２Ａは、長尺の板状の部材により構成されている。上側ラッチ部３２Ａにおいては、上端部よりも少し下がった部分が前後方向Ｄ１において最も厚い。当該最も厚い部分から、上端及び下端に近づくにつれて、上側ラッチ部３２Ａは、徐々に薄くなる。上側ラッチ部３２Ａは、ラッチ収納空間３０３Ａ内において、上下方向Ｄ２へ移動可能である。上側ラッチ部３２Ａの上端は、蓋体本体３０の上辺から上方向Ｄ２１へ突出可能である。上側ラッチ部３２Ａの下端は、後述の操作部３３によって上側ラッチ部３２Ａを移動させることができるように、後述の操作部３３に連結されている。 The latch storage space 303A stores a latch mechanism 32 as a container body engaging portion, and the latch mechanism 32 includes an upper latch portion 32A and a lower latch portion 32B.
As shown in FIG. 6, the upper latch portion 32A is formed of a long plate-like member. In the upper latch portion 32A, the portion slightly lower than the upper end portion is the thickest in the front-rear direction D1. The upper latch portion 32A gradually becomes thinner from the thickest portion toward the upper end and the lower end. The upper latch portion 32A is movable in the vertical direction D2 in the latch storage space 303A. The upper end of the upper latch portion 32A can project in the upward direction D21 from the upper side of the lid body 30. The lower end of the upper latch portion 32A is connected to the operation portion 33 described later so that the upper latch portion 32A can be moved by the operation portion 33 described later.
　下側ラッチ部３２Ｂは、長尺の板状の部材により構成されている。下側ラッチ部３２Ｂにおいては、下端部よりも少し上がった部分が前後方向Ｄ１において最も厚い。当該最も厚い部分から、上端及び下端に近づくにつれて、下側ラッチ部３２Ｂは、徐々に薄くなる。下側ラッチ部３２Ｂは、ラッチ収納空間３０３Ａ内において、上下方向Ｄ２へ移動可能である。下側ラッチ部３２Ｂの下端は、蓋体本体３０の下辺から下方向Ｄ２２へ突出可能である。下側ラッチ部３２Ｂの上端は、後述の操作部３３によって下側ラッチ部３２Ｂを移動させることができるように、後述の操作部３３に連結されている。
　上側ラッチ部３２Ａ、下側ラッチ部３２Ｂは、蓋体本体３０の一部により構成されたラッチ収納部３０３内に収納されている。 The lower latch portion 32B is configured by a long plate-like member. In the lower latch part 32B, the part slightly raised from the lower end part is the thickest in the front-rear direction D1. The lower latch portion 32B gradually becomes thinner from the thickest portion toward the upper end and the lower end. The lower latch portion 32B is movable in the vertical direction D2 in the latch storage space 303A. The lower end of the lower latch portion 32B can project in the downward direction D22 from the lower side of the lid body 30. The upper end of the lower latch part 32B is connected to the operation part 33 described later so that the lower latch part 32B can be moved by the operation part 33 described later.
The upper latch portion 32 </ b> A and the lower latch portion 32 </ b> B are housed in a latch housing portion 303 configured by a part of the lid body 30.
　また、ラッチ収納空間３０３Ａ内の部分であって、上下方向Ｄ２における中央の部分には、操作部３３が設けられている。操作部３３の一部は、蓋体本体３０の前面に形成された穴からラッチ収納空間３０３Ａの外方に対して露出しており、当該一部を前側から操作可能である。 In addition, an operation portion 33 is provided in a portion in the latch storage space 303A and in the central portion in the vertical direction D2. A part of the operation unit 33 is exposed to the outside of the latch storage space 303A through a hole formed in the front surface of the lid body 30, and the part can be operated from the front side.
　操作部３３を蓋体３の前側から操作することにより、上側ラッチ部３２Ａを上方向Ｄ２１へ移動させることができ、これと同時に、下側ラッチ部３２Ｂを下方向Ｄ２２へ移動させることができる。この移動により、上側ラッチ部３２Ａ、下側ラッチ部３２Ｂを、それぞれ蓋体３の上辺、下辺から突出させることができる。また、この操作とは逆方向に操作部３３を操作することにより、上側ラッチ部３２Ａを下方向Ｄ２２へ移動させることができ、これと同時に、下側ラッチ部３２Ｂを上方向Ｄ２１へ移動させることができる。この移動により、下側ラッチ部３２Ｂを、下辺から突出しない状態とさせることができる。 By operating the operation part 33 from the front side of the lid 3, the upper latch part 32A can be moved in the upward direction D21, and at the same time, the lower latch part 32B can be moved in the downward direction D22. By this movement, the upper latch portion 32A and the lower latch portion 32B can be protruded from the upper side and the lower side of the lid 3, respectively. Further, by operating the operating portion 33 in the opposite direction to this operation, the upper latch portion 32A can be moved in the downward direction D22, and at the same time, the lower latch portion 32B is moved in the upward direction D21. Can do. By this movement, the lower latch portion 32B can be prevented from projecting from the lower side.
　上側ラッチ部３２Ａが蓋体本体３０の上辺から上方向Ｄ２１へ突出して、容器本体２のラッチ係合凹部２３１Ａ、２３１Ｂに係合し、且つ、下側ラッチ部３２Ｂが蓋体本体３０の下辺から下方向Ｄ２２へ突出して、容器本体２のラッチ係合凹部２４１Ａ、２４１Ｂに係合することにより、蓋体３は、容器本体２の開口周縁部２８に固定される。 The upper latch portion 32A protrudes in the upward direction D21 from the upper side of the lid body 30 and engages with the latch engagement recesses 231A and 231B of the container body 2, and the lower latch portion 32B extends from the lower side of the lid body 30. The lid 3 is fixed to the opening peripheral edge 28 of the container body 2 by projecting in the downward direction D22 and engaging with the latch engagement recesses 241A and 241B of the container body 2.
　図４、図５、図７に示すように、蓋体本体３０の内面３０１の部分であって、容器本体開口部２１を閉塞する部分には、前方向Ｄ１１に窪んだ蓋体脚部固定用凹部３４１が形成されている。蓋体脚部固定用凹部３４１は、蓋体本体３０の左右方向Ｄ３の中央位置において、蓋体本体３０の左右方向Ｄ３における幅の３分の１程度の幅を有して、上下方向Ｄ２において、蓋体本体３０の上端部近傍から下端部近傍に至るまで形成されている。蓋体脚部固定用凹部３４１の上端及び下端は、蓋体本体３０の縁部により形成されている。蓋体本体３０の内面３０１の部分であって、左右方向Ｄ３における蓋体脚部固定用凹部３４１の両脇の部分は、内面左右端部平坦面３４２により構成されている。 As shown in FIGS. 4, 5, and 7, a portion of the inner surface 301 of the lid body 30 that closes the container body opening 21 is used to fix the lid legs that are recessed in the front direction D <b> 11. A recess 341 is formed. The lid leg fixing recess 341 has a width of about one-third of the width in the left-right direction D3 of the lid body 30 at the center position in the left-right direction D3 of the lid body 30 in the vertical direction D2. The lid body 30 is formed from the vicinity of the upper end portion thereof to the vicinity of the lower end portion thereof. The upper and lower ends of the lid leg fixing recess 341 are formed by the edge of the lid body 30. The portions of the inner surface 301 of the lid body 30 that are on both sides of the lid leg fixing recess 341 in the left-right direction D <b> 3 are configured by inner surface left and right end flat surfaces 342.
　蓋体本体３０は、図５に示すように、左右方向Ｄ３における蓋体本体３０の中央において上下に延びる仮想線Ｓを中心とした対称の構成を有している。このため、以下、主として左側（左方向の側Ｄ３１）の部分の構成について詳述し、右側（右方向の側Ｄ３２）の部分については、詳細な説明を省略する。
　このように、蓋体本体３０は、対称の構成を有しているため、蓋体本体３０に固定されているフロントリテーナ７も、仮想線Ｓを中心として対称的に２つ、対をなして設けられている。 As shown in FIG. 5, the lid body 30 has a symmetric configuration with a virtual line S extending vertically at the center of the lid body 30 in the left-right direction D3. Therefore, the configuration of the left side (left side D31) part will be mainly described in detail below, and detailed description of the right side (right side D32) part will be omitted.
Thus, since the lid body 30 has a symmetric configuration, the front retainer 7 fixed to the lid body 30 also forms two pairs symmetrically about the virtual line S. Is provided.
　図５に示すように、蓋体本体３０の内面３０１の部分であって蓋体脚部固定用凹部３４１を形成している部分は、底部平坦面３４１Ａと階段状面３４１Ｂとを有している。底部平坦面３４１Ａは、内面左右端部平坦面３４２よりも前側（前方向Ｄ１１の側）に位置している。階段状面３４１Ｂは、左右方向Ｄ３における底部平坦面３４１Ａの両端に配置されている。階段状面３４１Ｂは、底部平坦面３４１Ａから１段高い位置にある中段平坦面３４１Ｃと、中段平坦面３４１Ｃに上がる第１段状面３４１Ｄと、中段平坦面３４１Ｃから更にもう一段高い位置である内面左右端部平坦面３４２に上がる第２段状面３４１Ｅと、を有している。 As shown in FIG. 5, the portion of the inner surface 301 of the lid body 30 that forms the lid leg fixing recess 341 has a flat bottom surface 341A and a stepped surface 341B. . The bottom flat surface 341A is located on the front side (front direction D11 side) of the inner surface left and right end flat surfaces 342. The stepped surface 341B is disposed at both ends of the bottom flat surface 341A in the left-right direction D3. The stepped surface 341B includes an intermediate flat surface 341C that is one step higher than the bottom flat surface 341A, a first stepped surface 341D that goes up to the intermediate flat surface 341C, and an inner surface that is one step higher than the intermediate flat surface 341C. And a second stepped surface 341E rising to the left and right end flat surface 342.
　一対のフロントリテーナ係止板３４３は、上下方向Ｄ２に延びている。フロントリテーナ係止板３４３は、蓋体本体３０の底部平坦面３４１Ａに対して固定されている。フロントリテーナ係止板３４３には、貫通孔３４３Ａが形成されている。 The pair of front retainer locking plates 343 extend in the vertical direction D2. The front retainer locking plate 343 is fixed to the bottom flat surface 341 </ b> A of the lid body 30. A through-hole 343A is formed in the front retainer locking plate 343.
　また、左右方向Ｄ３における各内面左右端部平坦面３４２の中央部分には、フロントリテーナ係止部３４４がそれぞれ１つずつ設けられている。
　図７に示すように、フロントリテーナ係止部３４４は、板状係止部３４４Ａと基部側支持部３４４Ｂとを有している。板状係止部３４４Ａの表面及び裏面は、内面左右端部平坦面３４２に平行な位置関係で内面左右端部平坦面３４２から離間して、且つ、長手方向が上下方向Ｄ２に平行な位置関係で配置されている。 Further, one front retainer locking portion 344 is provided in the center portion of each inner surface left and right end flat surface 342 in the left-right direction D3.
As shown in FIG. 7, the front retainer locking portion 344 has a plate-like locking portion 344A and a base side support portion 344B. The front and back surfaces of the plate-like locking portion 344A are separated from the inner left and right end flat surfaces 342 in a positional relationship parallel to the inner left and right end flat surfaces 342, and the longitudinal direction is parallel to the vertical direction D2. Is arranged in.
　板状係止部３４４Ａは、基部側支持部３４４Ｂに接続されており、基部側支持部３４４Ｂは、内面左右端部平坦面３４２に固定されている。基部側支持部３４４Ｂは、蓋体本体３０の上方向Ｄ２１の側の縁部近傍から下方向Ｄ２２の側の縁部近傍に至るまで延びる。 The plate-like locking portion 344A is connected to the base side support portion 344B, and the base side support portion 344B is fixed to the inner surface left and right end flat surface 342. The base side support portion 344B extends from the vicinity of the edge on the upper direction D21 side of the lid body 30 to the vicinity of the edge on the lower direction D22 side.
　図４～図６に示すように、蓋体本体３０の内面３０１に対向する位置であって、左側（左方向Ｄ３１の側）のフロントリテーナ係止板３４３から左側のフロントリテーナ係止部３４４に至るまでの位置には、フロントリテーナ７が設けられている。フロントリテーナ７は、図４に示すように、上下方向Ｄ２に平行に延びる一対の縦枠体７１と、一対のフロントリテーナ脚部７２と、フロントリテーナ基板受け部７３とを有している。一対の縦枠体７１、フロントリテーナ脚部７２、及びフロントリテーナ基板受け部７３は、樹脂により一体成形され、互いに接続されている。 As shown in FIG. 4 to FIG. 6, the front retainer locking plate 343 on the left side (left side D31 side) is located at the position facing the inner surface 301 of the lid body 30 from the front retainer locking portion 344 on the left side. A front retainer 7 is provided at all the positions. As shown in FIG. 4, the front retainer 7 includes a pair of vertical frames 71 extending in parallel with the vertical direction D <b> 2, a pair of front retainer legs 72, and a front retainer substrate receiving portion 73. The pair of vertical frame bodies 71, the front retainer legs 72, and the front retainer board receiving portion 73 are integrally formed of resin and connected to each other.
　図５に示すように、フロントリテーナ基板受け部７３は、蓋体本体３０の部分であって、中段平坦面３４１Ｃの左端部（左方向Ｄ３１の端部）から、左右方向Ｄ３における左側のフロントリテーナ係止部３４４と左側のフロントリテーナ係止板３４３との中央部に至るまでの部分に対向するように配置されている。蓋体側基板受け部としてのフロントリテーナ基板受け部７３は、蓋体脚部固定用凹部３４１内に配置されておらず、奥行方向（後方向Ｄ１２）において蓋体脚部固定用凹部３４１よりも奥側（後方向Ｄ１２の側）に配置されている。 As shown in FIG. 5, the front retainer substrate receiving portion 73 is a portion of the lid body 30, and the left front retainer in the left-right direction D <b> 3 from the left end (the end in the left direction D <b> 31) of the middle flat surface 341 </ b> C. It arrange | positions so that the part to the center part of the latching | locking part 344 and the left front retainer latching plate 343 may be opposed. The front retainer substrate receiving portion 73 as the lid-side substrate receiving portion is not disposed in the lid leg fixing recess 341 and is deeper than the lid leg fixing recess 341 in the depth direction (rear direction D12). It arrange | positions at the side (side of the rear direction D12).
　図６に示すように、フロントリテーナ基板受け部７３は、フロントリテーナ第１当接面７３３を有する受け部上部７３１と、フロントリテーナ第２当接面７３４を有する受け部下部７３２とを有している。 As shown in FIG. 6, the front retainer substrate receiving portion 73 includes a receiving portion upper portion 731 having a front retainer first contact surface 733 and a receiving portion lower portion 732 having a front retainer second contact surface 734. Yes.
　フロントリテーナ第１当接面７３３には、基板収納空間２７内に基板Ｗが収納され蓋体３によって容器本体開口部２１が閉じられることにより、基板Ｗが奥側基板支持部６とフロントリテーナ７とによって支持されたときに、基板Ｗの上面の縁部の端縁の前部が当接する。フロントリテーナ第２当接面７３４には、基板収納空間２７内に基板Ｗが収納され蓋体３によって容器本体開口部２１が閉じられることにより、基板Ｗが奥側基板支持部６とフロントリテーナ７とによって支持されたときに、基板Ｗの下面の縁部の端縁の前部が当接する。これにより、フロントリテーナ基板受け部７３は、複数の基板Ｗの縁部を支持することができる。 The front retainer first contact surface 733 stores the substrate W in the substrate storage space 27 and closes the container main body opening 21 by the lid 3, so that the substrate W is connected to the back side substrate support 6 and the front retainer 7. The front part of the edge of the edge part of the upper surface of the board | substrate W contact | abuts. On the front retainer second contact surface 734, the substrate W is stored in the substrate storage space 27 and the container body opening 21 is closed by the lid 3, so that the substrate W is connected to the back substrate support 6 and the front retainer 7. The front part of the edge of the edge part of the lower surface of the board | substrate W contact | abuts. Thereby, the front retainer substrate receiving portion 73 can support the edge portions of the plurality of substrates W.
　図５に示すように、フロントリテーナ基板受け部７３の一端部である左端部（左方向Ｄ３１の端部）は、一対のフロントリテーナ脚部７２のうちの一方のフロントリテーナ脚部７２１の右端部（右方向Ｄ３２の端部）に接続されている。フロントリテーナ基板受け部７３の他端部である右端部は、一対のフロントリテーナ脚部７２のうちの他方のフロントリテーナ脚部７２２の左端部に接続されている。 As shown in FIG. 5, the left end portion (the end portion in the left direction D <b> 31) that is one end portion of the front retainer substrate receiving portion 73 is the right end portion of one front retainer leg portion 721 of the pair of front retainer legs 72. (The end of the right direction D32). The right end portion which is the other end portion of the front retainer substrate receiving portion 73 is connected to the left end portion of the other front retainer leg portion 722 of the pair of front retainer leg portions 72.
　一方のフロントリテーナ脚部７２１は、フロントリテーナ基板受け部７３の左端部から内面左右端部平坦面３４２に近づくように延び、内面左右端部平坦面３４２の手前で直角に折れ曲がり、内面左右端部平坦面３４２に平行にフロントリテーナ係止部３４４へ近づくように長く延びている。この長く延びる部分は、一方のフロントリテーナ脚部７２１の３分の２以上を占めている。そして、内面左右端部平坦面３４２から離間するように直角に折れ曲がって少し延び、再び直角に折れ曲がりフロントリテーナ係止部３４４へ近づくように少し延び、再び直角に折れ曲がり内面左右端部平坦面３４２へ近づくように延び、一方のフロントリテーナ脚部７２の左端部は、一方の縦枠体７１１に接続されている。 One front retainer leg 721 extends from the left end of the front retainer substrate receiving portion 73 so as to approach the inner left / right end flat surface 342, bends right before the inner left / right end flat surface 342, and the inner left / right end. It extends long so as to approach the front retainer locking portion 344 in parallel with the flat surface 342. This long extending portion occupies more than two-thirds of one front retainer leg 721. Then, it is bent at a right angle so as to be separated from the inner surface left and right end flat surface 342, slightly extends, bends at a right angle again, extends slightly so as to approach the front retainer locking portion 344, and is bent at a right angle again to the inner surface left and right end flat surface 342. The left end of one front retainer leg 72 is connected to one vertical frame 711.
　他方のフロントリテーナ脚部７２２は、中段平坦面３４１Ｃに近づくように延び、中段平坦面３４１Ｃの手前で鈍角に折れ曲がり、フロントリテーナ係止板３４３の近傍へ至るまで直線状に延びている。そして、鈍角に折れ曲がり、底部平坦面３４１Ａに接近するように少し延び、他方の縦枠体７１２に接続されている。このようなフロントリテーナ基板受け部７３及び対をなしているフロントリテーナ脚部７２は、上下方向Ｄ２に２５個並列した状態で設けられている。 The other front retainer leg 722 extends so as to approach the middle flat surface 341C, bends at an obtuse angle before the middle flat surface 341C, and extends linearly to the vicinity of the front retainer locking plate 343. Then, it bends at an obtuse angle, extends slightly so as to approach the bottom flat surface 341A, and is connected to the other vertical frame 712. The front retainer board receiving portion 73 and the paired front retainer leg portions 72 are provided in a state where 25 are arranged in parallel in the vertical direction D2.
　縦枠体７１の幅方向における縦枠体７１の縁部が、図４、図５に示すように、フロントリテーナ係止部３４４の板状係止部３４４Ａと内面左右端部平坦面３４２との間に入り込むことにより、一方の縦枠体７１は、フロントリテーナ係止部３４４に係止される。 As shown in FIGS. 4 and 5, the edge of the vertical frame 71 in the width direction of the vertical frame 71 is formed between the plate-like locking portion 344 </ b> A of the front retainer locking portion 344 and the flat surface 342 on the inner left and right ends. The vertical frame 71 is locked to the front retainer locking portion 344 by entering the space.
　また、図４、図５に示すように、他方の縦枠体７１２の幅方向における縦枠体７１の縁部から突出する第２蓋体係止部７１４がフロントリテーナ係止板３４３の貫通孔３４３Ａに挿入されることにより、縦枠体７１２は、フロントリテーナ係止板３４３に係止される。 As shown in FIGS. 4 and 5, the second lid locking portion 714 protruding from the edge of the vertical frame 71 in the width direction of the other vertical frame 712 is a through hole of the front retainer locking plate 343. The vertical frame body 712 is locked to the front retainer locking plate 343 by being inserted into 343A.
　このように、一方の縦枠体７１１がフロントリテーナ係止部３４４に係止され、他方の縦枠体７１２がフロントリテーナ係止板３４３に係止されることにより、フロントリテーナ７は、蓋体本体３０に固定される。蓋体本体３０に固定された蓋体側基板支持部としてのフロントリテーナ７は、右方向Ｄ３２の側に配置されたラッチ機構３２と左方向Ｄ３１の側に配置されたラッチ機構３２との間に配置されている。 As described above, the one vertical frame body 711 is locked to the front retainer locking portion 344, and the other vertical frame body 712 is locked to the front retainer locking plate 343. It is fixed to the main body 30. The front retainer 7 serving as a lid-side substrate support fixed to the lid body 30 is disposed between a latch mechanism 32 disposed on the right direction D32 side and a latch mechanism 32 disposed on the left direction D31 side. Has been.
　このようにフロントリテーナ７は蓋体本体３０に固定され、一方のフロントリテーナ脚部７２１は、上述のような構成を有しているため、蓋体側基板受け部（フロントリテーナ基板受け部７３）は、一方のフロントリテーナ脚部７２１の左端の部分であって蓋体本体３０に固定されている部分、即ち、一方のフロントリテーナ脚部７２１の部分であって一方の縦枠体７１１に接続されている部分を揺動軸心として揺動可能である。
　フロントリテーナ係止部３４４に対する第１蓋体係止部７１３の係止が解除され、且つフロントリテーナ係止板３４３に対する第２蓋体係止部７１４の係止が解除されることにより、フロントリテーナ７は蓋体本体３０から取り外される。 Thus, since the front retainer 7 is fixed to the lid body 30 and one of the front retainer legs 721 has the above-described configuration, the lid side substrate receiving portion (front retainer substrate receiving portion 73) is The portion of the left end of one front retainer leg 721 that is fixed to the lid body 30, that is, the portion of one front retainer leg 721 that is connected to one vertical frame 711. The portion can be swung with the swinging axis as a swing axis.
The front retainer engaging portion 344 is released from the first lid engaging portion 713 and the front retainer engaging plate 343 is released from the second lid engaging portion 714. 7 is removed from the lid body 30.
　蓋体本体３０の左側（左方向Ｄ３１の側）において、蓋体本体３０の縁部と、フロントリテーナ７との間の位置には、リブ状凸部３０４が配置されている。図４、図５、図７に示すように、蓋体本体３０の縁部とは、長方形状の蓋体本体３０の左側（左方向Ｄ３１の側）の短辺を規定する蓋体３の縁部を意味する。リブ状凸部３０４は、この位置において、蓋体本体３０に固定されている。
　同様に、蓋体本体３０の右側（右方向Ｄ３２の側）において、蓋体本体３０の縁部と、フロントリテーナ７との間の位置には、リブ状凸部３０４が配置されている。図４、図５、図７に示すように、蓋体本体３０の縁部とは、長方形状の蓋体本体３０の右側（右方向Ｄ３２の側）の短辺を規定する蓋体３の縁部を意味する。リブ状凸部３０４は、この位置において、蓋体本体３０に固定されている。
　即ち、リブ状凸部３０４は、蓋体本体３０の部分であって蓋体３によって容器本体開口部２１が閉塞されているときに基板収納空間２７に対向する部分に位置している。一対のリブ状凸部３０４は、平行に配置されている。 On the left side of the lid body 30 (the left direction D31 side), a rib-shaped convex portion 304 is disposed at a position between the edge of the lid body 30 and the front retainer 7. As shown in FIGS. 4, 5, and 7, the edge of the lid body 30 is the edge of the lid 3 that defines the short side of the left side (left side D <b> 31) of the rectangular lid body 30. Part. The rib-shaped convex portion 304 is fixed to the lid body 30 at this position.
Similarly, on the right side (right side D32 side) of the lid body 30, a rib-like convex portion 304 is disposed at a position between the edge of the lid body 30 and the front retainer 7. 4, 5, and 7, the edge of the lid body 30 is the edge of the lid 3 that defines the short side on the right side (right side D <b> 32) of the rectangular lid body 30. Part. The rib-shaped convex portion 304 is fixed to the lid body 30 at this position.
That is, the rib-shaped convex portion 304 is located in a portion of the lid body 30 that faces the substrate storage space 27 when the container body opening 21 is closed by the lid 3. The pair of rib-shaped convex portions 304 are arranged in parallel.
　より詳細には、リブ状凸部３０４は、それぞれ蓋体本体３０の長方形状の蓋体本体３０の左側（左方向Ｄ３１の側）の短辺を規定する蓋体３の縁部の近傍において、当該縁部に沿って一の方向である上下方向Ｄ２に延びている。リブ状凸部３０４は、当該縁部の上端から当該縁部の長さの４分の１程度下がった位置から、当該縁部の下端から縁部の長さの４分の１程度上がった位置に至るまで延びている。リブ状凸部３０４は、蓋体本体３０と一体成形されており、蓋体本体３０と同一の材料であるポリカーボネートにより構成されている。 More specifically, each of the rib-shaped convex portions 304 is in the vicinity of the edge of the lid 3 that defines the short side on the left side (left side D31 side) of the rectangular lid body 30 of the lid body 30. It extends in the up-down direction D2 which is one direction along the edge. The rib-shaped convex portion 304 is a position that is raised about a quarter of the length of the edge from the lower end of the edge from a position that is lowered about a quarter of the length of the edge from the upper end of the edge. It extends to. The rib-shaped convex portion 304 is integrally formed with the lid body 30 and is made of polycarbonate, which is the same material as the lid body 30.
　リブ状凸部３０４は、蓋体３によって容器本体開口部２１を閉塞するときに、蓋体３を容器本体開口部２１に対して相対的に接近させる開口閉塞方向へ向かって、即ち、後方向Ｄ１２へ向かって、蓋体本体３０の内面３０１から突出している。図５に示すように、リブ状凸部３０４の内部は、中空である。前後方向Ｄ１及び左右方向Ｄ３に平行な仮想平面で切ったリブ状凸部３０４の断面は、先細りの形状を有する台形状を有している。リブ状凸部３０４の突出端３０４Ａは、フロントリテーナ７の蓋体側基板支持部としてのフロントリテーナ基板受け部７３よりも開口閉塞方向である後方向Ｄ１２の側に位置している。 When the container body opening 21 is closed by the lid 3, the rib-shaped convex portion 304 moves toward the opening closing direction in which the lid 3 is relatively approached with respect to the container body opening 21, that is, in the backward direction. Projecting from the inner surface 301 of the lid body 30 toward D12. As shown in FIG. 5, the inside of the rib-shaped convex part 304 is hollow. The cross section of the rib-like convex portion 304 cut by a virtual plane parallel to the front-rear direction D1 and the left-right direction D3 has a trapezoidal shape having a tapered shape. The protruding end 304 </ b> A of the rib-like convex portion 304 is located on the rear direction D <b> 12 side, which is the opening closing direction, with respect to the front retainer substrate receiving portion 73 as the lid side substrate support portion of the front retainer 7.
　上記構成の本実施形態による基板収納容器１によれば、以下のような効果を得ることができる。
　前述のように、蓋体３は、蓋体本体３０と、蓋体本体３０の部分であって蓋体３によって容器本体開口部２１が閉塞されているときに基板収納空間２７に対向する部分に位置する本体支持凸部（リブ状凸部３０４）であって、蓋体３によって容器本体開口部２１を閉塞するときに、蓋体３を容器本体開口部２１に対して相対的に接近させる開口閉塞方向（後方向Ｄ１２）へ向かって蓋体本体３０から突出する本体支持凸部（リブ状凸部３０４）とを有する。本体支持凸部の突出端は、蓋体側基板支持部（フロントリテーナ７のフロントリテーナ基板受け部７３）よりも開口閉塞方向の側（後方向Ｄ１２の側）に位置している。
　このため、蓋体側基板支持部（フロントリテーナ７のフロントリテーナ基板受け部７３）を下にして蓋体３を平坦な面上に載置したときに、当該平坦な面に蓋体側基板支持部が接触することを防止することができ、蓋体側基板支持部が汚染されてしまうことを抑制することができる。 According to the substrate storage container 1 having the above-described configuration according to the present embodiment, the following effects can be obtained.
As described above, the lid 3 is a portion of the lid body 30 and the portion of the lid body 30 that faces the substrate storage space 27 when the container body opening 21 is closed by the lid 3. A main body supporting convex portion (rib-shaped convex portion 304) that is positioned so that when the container body opening portion 21 is closed by the lid body 3, the lid body 3 is relatively close to the container body opening portion 21. It has a main body supporting convex portion (rib-shaped convex portion 304) protruding from the lid main body 30 in the closing direction (rear direction D12). The protruding end of the main body support convex portion is located closer to the opening closing direction side (rear direction D12 side) than the lid side substrate support portion (front retainer substrate receiving portion 73 of the front retainer 7).
Therefore, when the lid 3 is placed on a flat surface with the lid-side substrate support portion (front retainer substrate receiving portion 73 of the front retainer 7) facing down, the lid-side substrate support portion is placed on the flat surface. Contact can be prevented, and contamination of the lid-side substrate support portion can be suppressed.
　また、基板収納空間２７内に基板Ｗ（図４等参照）が収納され蓋体３が閉じられることにより、基板Ｗが奥側基板支持部６とフロントリテーナ７とによって支持されたときに、フロントリテーナ第１当接面７３３には、基板Ｗの上面の縁部の端縁Ｗ３の前部が当接する。フロントリテーナ第２当接面７３４においては、基板収納空間２７内に基板Ｗが収納され蓋体３が閉じられることにより、基板Ｗが奥側基板支持部６とフロントリテーナ７とによって支持されたときに、基板Ｗの下面の縁部の端縁Ｗ４の前部が当接する。これにより、フロントリテーナ基板受け部７３は、複数の基板Ｗの縁部を支持する。 When the substrate W is supported by the back substrate support 6 and the front retainer 7 by storing the substrate W (see FIG. 4 and the like) in the substrate storage space 27 and closing the lid 3, The retainer first contact surface 733 is in contact with the front portion of the edge W3 of the edge of the upper surface of the substrate W. At the front retainer second contact surface 734, when the substrate W is stored in the substrate storage space 27 and the lid 3 is closed, the substrate W is supported by the back substrate support 6 and the front retainer 7. The front part of the edge W4 at the edge of the lower surface of the substrate W abuts. Accordingly, the front retainer substrate receiving portion 73 supports the edge portions of the plurality of substrates W.
　このとき、図６の矢印Ｆ１で示す方向に、基板Ｗからフロントリテーナ７は反力を受ける。これにより、フロントリテーナ７の縦枠体７１は、蓋体本体３０を前方向Ｄ１１へ押し、蓋体本体３０は、ラッチを前方向Ｄ１１へ押す。しかし、上側ラッチ部３２Ａの上端部は、ラッチ係合凹部２３１Ａ、２３１Ｂに係合し、下側ラッチ部３２Ｂの下端部は、ラッチ係合凹部２４１Ａ、２４１Ｂに係合しているため、上側ラッチ部３２Ａ及び下側ラッチは、前方向Ｄ１１への移動が阻止される。これにより、上側ラッチ部３２Ａ及び下側ラッチは、蓋体本体３０の部分であって、フロントリテーナ７の縦枠体７１によって前方向Ｄ１１へ押されている部分に対して、矢印Ｆ２で示す方向に反力を作用させ、この部分の変形を抑えようとする。 At this time, the front retainer 7 receives a reaction force from the substrate W in the direction indicated by the arrow F1 in FIG. Thereby, the vertical frame 71 of the front retainer 7 pushes the lid body 30 in the forward direction D11, and the lid body 30 pushes the latch in the forward direction D11. However, the upper end portion of the upper latch portion 32A is engaged with the latch engagement recess portions 231A and 231B, and the lower end portion of the lower latch portion 32B is engaged with the latch engagement recess portions 241A and 241B. The portion 32A and the lower latch are prevented from moving in the forward direction D11. As a result, the upper latch portion 32A and the lower latch are portions of the lid body 30 that are pushed in the front direction D11 by the vertical frame 71 of the front retainer 7 in the direction indicated by the arrow F2. A reaction force is applied to the surface to suppress deformation of this portion.
　このとき、蓋体本体３０の部分であって、フロントリテーナ７の縦枠体７１によって前方向Ｄ１１へ押されている部分の近傍の部分には、リブ状凸部３０４が設けられているため、この部分及び蓋体本体３０全体の強度を高めることができ、この部分の変形を、効果的に抑制することができる。従って、奥側基板支持部６とフロントリテーナ７とによる基板Ｗの支持を、高い精度で安定して、且つ確実に行うことができる。また、上側ラッチ部３２Ａや下側ラッチ部３２Ｂが押されることにより、上側ラッチ部３２Ａや下側ラッチ部３２Ｂの動きに支障を来たすことを抑制することができる。 At this time, since the rib-shaped convex portion 304 is provided in the portion of the lid body 30 and in the vicinity of the portion pressed in the front direction D11 by the vertical frame 71 of the front retainer 7, The strength of this part and the entire lid body 30 can be increased, and deformation of this part can be effectively suppressed. Therefore, the substrate W can be supported by the back substrate support 6 and the front retainer 7 stably and reliably with high accuracy. Further, it is possible to suppress the movement of the upper latch portion 32A and the lower latch portion 32B from being hindered by pressing the upper latch portion 32A and the lower latch portion 32B.
　即ち、本体支持凸部は、一の方向（上下方向Ｄ２）に延びるリブ状凸部３０４を有するため、蓋体３の強度を高めることができる。特に、前述のように、蓋体３によって容器本体開口部２１が閉塞され、奥側基板支持部（奥側基板支持部６の壁部基板支持部６０）が蓋体側基板支持部（フロントリテーナ７のフロントリテーナ基板受け部７３）と協働して複数の基板を支持しているときには、蓋体側基板支持部を介して、蓋体本体３０を変形させる反力が基板から蓋体本体３０に対して作用する。このようなときであっても、蓋体本体３０の変形を抑制することができる。 That is, since the main body supporting convex portion has the rib-shaped convex portion 304 extending in one direction (vertical direction D2), the strength of the lid 3 can be increased. In particular, as described above, the container main body opening 21 is closed by the lid 3, and the back substrate support (the wall substrate support 60 of the back substrate support 6) is the lid substrate support (front retainer 7). When a plurality of substrates are supported in cooperation with the front retainer substrate receiving portion 73), a reaction force that deforms the lid body 30 is applied to the lid body 30 from the substrate via the lid-side substrate support portion. Act. Even in such a case, the deformation of the lid body 30 can be suppressed.
　更に、リブ状凸部３０４は、平行に配置されて一対設けられているため、蓋体本体３０の強度をより高めることができ、蓋体本体３０の変形を抑制することができる。 Furthermore, since the rib-like convex portions 304 are arranged in parallel and provided as a pair, the strength of the lid body 30 can be further increased, and deformation of the lid body 30 can be suppressed.
　また、蓋体本体３０は長方形状を有し、長方形状の蓋体本体３０において対向する一の対の辺の近傍の部分は、それぞれ容器本体２に係合可能な容器本体係合部（ラッチ機構３２）を有し、蓋体側基板支持部（フロントリテーナ７）は、一方の容器本体係合部と他方の容器本体係合部との間に配置されている。このような構成の場合には、容器本体係合部の部分であって容器本体２に係合している部分に、蓋体本体３０を変形させる反力が作用する。そして、容器本体２に作用する反力は、蓋体本体３０の部分であって、蓋体本体３０の縁部と、蓋体側基板支持部との間の位置の部分にも作用する。しかし、リブ状凸部３０４は、蓋体本体３０の縁部と、蓋体側基板支持部との間の位置に配置されているため、蓋体本体３０は、このような反力に抗して変形を少なくすることができる。 Further, the lid body 30 has a rectangular shape, and portions in the vicinity of a pair of opposing sides in the rectangular lid body 30 are respectively container body engaging portions (latches) that can be engaged with the container body 2. The lid body side substrate support part (front retainer 7) has a mechanism 32) and is disposed between one container body engaging part and the other container body engaging part. In the case of such a configuration, a reaction force that deforms the lid body 30 acts on the portion of the container body engaging portion that is engaged with the container body 2. The reaction force acting on the container body 2 is a portion of the lid body 30 and also acts on a portion between the edge of the lid body 30 and the lid-side substrate support portion. However, since the rib-shaped convex portion 304 is disposed at a position between the edge of the lid body 30 and the lid-side substrate support portion, the lid body 30 resists such a reaction force. Deformation can be reduced.
　本発明は、上述した実施形態に限定されることはなく、特許請求の範囲に記載された技術的範囲において変形が可能である。
　例えば、本実施形態では、本体支持凸部は、リブ状凸部３０４により構成されていたが、この構成に限定されない。例えば、前後方向Ｄ１及び上下方向Ｄ２に平行な仮想平面上において直線状に並ばない３つの凸部により構成されてもよい。また、リブ状凸部３０４は、平行に配置されていたが、平行に配置されていなくてもよい。
　また、容器本体及び蓋体の形状や、容器本体に収納可能な基板の枚数、寸法は、本実施形態における容器本体２及び蓋体３の形状や、容器本体２に収納可能な基板Ｗの枚数、寸法に限定されない。 The present invention is not limited to the above-described embodiments, and can be modified within the technical scope described in the claims.
For example, in this embodiment, the main body support convex portion is configured by the rib-shaped convex portion 304, but is not limited to this configuration. For example, you may be comprised by three convex parts which are not arranged in a straight line on the virtual plane parallel to the front-back direction D1 and the up-down direction D2. Moreover, although the rib-shaped convex part 304 was arrange | positioned in parallel, it does not need to be arrange | positioned in parallel.
The shape of the container main body and the lid, the number of substrates that can be stored in the container main body, and the dimensions thereof are the shape of the container main body 2 and the lid 3 in this embodiment and the number of substrates W that can be stored in the container main body 2. The dimensions are not limited.
　また、基板支持板状部５の隣接する板部５１は、互いに離間して平行な位置関係で配置されていたが、厳密に平行な位置関係でなくてもよく、並列されていればよい。 Further, the adjacent plate portions 51 of the substrate support plate-like portion 5 are arranged in a parallel positional relationship apart from each other. However, they may not be strictly in a parallel positional relationship, and may be in parallel.
１　　基板収納容器
２　　容器本体
３　　蓋体
６　　奥側基板支持部（奥側基板支持部）
７　　フロントリテーナ（蓋体側基板支持部）
２１　　容器本体開口部
２７　　基板収納空間
２８　　開口周縁部
３０　　蓋体本体
３２　　ラッチ機構（容器本体係合部）
３０４　　リブ状凸部
Ｗ　　基板 DESCRIPTION OF SYMBOLS 1 Substrate storage container 2 Container body 3 Cover body 6 Back side substrate support part (back side substrate support part)
7 Front retainer (cover side substrate support)
21 Container body opening 27 Substrate storage space 28 Opening peripheral edge 30 Lid body 32 Latch mechanism (container body engaging portion)
304 Rib-shaped convex part W Substrate

Claims (4)

  1. 　複数の基板を収納可能な基板収納空間が内部に形成され、一端部に前記基板収納空間に連通する容器本体開口部が形成された開口周縁部を有する容器本体と、
    　前記開口周縁部に対して着脱可能であり、前記容器本体開口部を閉塞可能な蓋体と、
    　前記蓋体の部分であって前記蓋体によって前記容器本体開口部が閉塞されているときに前記基板収納空間に対向する部分に配置され、前記蓋体によって前記容器本体開口部が閉塞されているときに、前記複数の基板の縁部を支持可能な蓋体側基板支持部と、
    　前記基板収納空間の内部において前記蓋体側基板支持部と対をなすように配置され、前記複数の基板の縁部を支持可能であり、前記蓋体によって前記容器本体開口部が閉塞されているときに、前記蓋体側基板支持部と協働して前記複数の基板を支持する奥側基板支持部と、を備え
    　前記蓋体は、蓋体本体と、前記蓋体本体の部分であって前記蓋体によって前記容器本体開口部が閉塞されているときに前記基板収納空間に対向する部分に位置する本体支持凸部であって、前記蓋体によって前記容器本体開口部を閉塞するときに、前記蓋体を前記容器本体開口部に対して相対的に接近させる開口閉塞方向へ向かって前記蓋体本体から突出する本体支持凸部とを有し、
    　前記本体支持凸部の突出端は、前記蓋体側基板支持部よりも前記開口閉塞方向の側に位置している基板収納容器。     A container main body having an opening peripheral edge portion in which a substrate storage space capable of storing a plurality of substrates is formed, and a container main body opening portion communicating with the substrate storage space is formed at one end;
    A lid that can be attached to and detached from the peripheral edge of the opening, and that can close the opening of the container body;
    The lid body is disposed in a portion facing the substrate storage space when the container body opening is closed by the lid, and the container body opening is closed by the lid. Sometimes, the lid side substrate support part capable of supporting the edges of the plurality of substrates,
    When arranged inside the substrate storage space so as to be paired with the lid-side substrate support portion, can support the edges of the plurality of substrates, and the container body opening is closed by the lid And a back side substrate support part for supporting the plurality of substrates in cooperation with the lid side substrate support part, wherein the lid is a lid body and a part of the lid body and the lid A body-supporting convex portion located at a portion facing the substrate storage space when the container body opening is closed by a body, and the lid when the container body opening is closed by the lid A main body support convex portion projecting from the lid body toward the opening closing direction for making the body relatively close to the container main body opening,
    The protruding end of the main body support convex portion is a substrate storage container located on the side of the opening closing direction with respect to the lid side substrate support portion.
  2. 　前記本体支持凸部は、一の方向に延びるリブ状凸部を有する請求項１に記載の基板収納容器。 2. The substrate storage container according to claim 1, wherein the main body supporting convex portion has a rib-shaped convex portion extending in one direction.
  3. 　前記リブ状凸部は、平行に配置されて一対設けられている請求項２に記載の基板収納容器。 3. The substrate storage container according to claim 2, wherein a pair of the rib-like convex portions are arranged in parallel.
  4. 　前記蓋体本体は長方形状を有し、前記長方形状の前記蓋体本体において対向する一の対の辺の近傍の部分は、それぞれ前記容器本体に係合可能な容器本体係合部を有し、前記蓋体側基板支持部は、一方の前記容器本体係合部と他方の前記容器本体係合部との間に配置され、
    　前記リブ状凸部は、前記蓋体本体の縁部と、前記蓋体側基板支持部との間の位置に配置されている請求項２又は請求項３に記載の基板収納容器。     The lid body has a rectangular shape, and each of the portions in the vicinity of a pair of opposing sides in the rectangular lid body has a container body engaging portion that can be engaged with the container body. The lid-side substrate support portion is disposed between one of the container main body engaging portions and the other of the container main body engaging portions,
    The said rib-shaped convex part is a substrate storage container of Claim 2 or Claim 3 arrange | positioned in the position between the edge part of the said cover body main body, and the said cover body side board | substrate support part.
PCT/JP2012/076440 2012-10-12 2012-10-12 Substrate housing vessel that suppresses contamination of lid-body-side substrate support section WO2014057573A1 (en)

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* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN110574152A (en) * 2017-04-05 2019-12-13 未来儿股份有限公司 substrate storage container
CN110770889A (en) * 2017-04-06 2020-02-07 未来儿股份有限公司 Substrate storage container

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JP2006128461A (en) * 2004-10-29 2006-05-18 Shin Etsu Polymer Co Ltd Substrate storing container
WO2009131016A1 (en) * 2008-04-25 2009-10-29 信越ポリマー株式会社 Retainer and substrate storage container provided with same retainer
JP2011162235A (en) * 2010-02-10 2011-08-25 Sekisui Plastics Co Ltd Box for conveying plate-like product

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JP2002353301A (en) * 2001-05-30 2002-12-06 Shin Etsu Polymer Co Ltd Vessel for storing precision substrate and its presser member
JP2006128461A (en) * 2004-10-29 2006-05-18 Shin Etsu Polymer Co Ltd Substrate storing container
WO2009131016A1 (en) * 2008-04-25 2009-10-29 信越ポリマー株式会社 Retainer and substrate storage container provided with same retainer
JP2011162235A (en) * 2010-02-10 2011-08-25 Sekisui Plastics Co Ltd Box for conveying plate-like product

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* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN110574152A (en) * 2017-04-05 2019-12-13 未来儿股份有限公司 substrate storage container
CN110574152B (en) * 2017-04-05 2023-10-27 未来儿股份有限公司 Substrate container
CN110770889A (en) * 2017-04-06 2020-02-07 未来儿股份有限公司 Substrate storage container
CN110770889B (en) * 2017-04-06 2023-10-27 未来儿股份有限公司 Substrate container

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