WO2014057573A1 - Réceptacle de stockage de substrats empêchant la salissure d'une partie maintien de substrats côté corps de couvercle - Google Patents

Réceptacle de stockage de substrats empêchant la salissure d'une partie maintien de substrats côté corps de couvercle Download PDF

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Publication number
WO2014057573A1
WO2014057573A1 PCT/JP2012/076440 JP2012076440W WO2014057573A1 WO 2014057573 A1 WO2014057573 A1 WO 2014057573A1 JP 2012076440 W JP2012076440 W JP 2012076440W WO 2014057573 A1 WO2014057573 A1 WO 2014057573A1
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WO
WIPO (PCT)
Prior art keywords
lid
container
substrate
main body
opening
Prior art date
Application number
PCT/JP2012/076440
Other languages
English (en)
Japanese (ja)
Inventor
千明 松鳥
剛 永島
貴立 小山
井上　修一
啓之 志田
裕樹 山岸
和正 大貫
Original Assignee
ミライアル株式会社
信越ポリマー株式会社
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by ミライアル株式会社, 信越ポリマー株式会社 filed Critical ミライアル株式会社
Priority to PCT/JP2012/076440 priority Critical patent/WO2014057573A1/fr
Publication of WO2014057573A1 publication Critical patent/WO2014057573A1/fr

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    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/673—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere using specially adapted carriers or holders; Fixing the workpieces on such carriers or holders
    • H01L21/6735—Closed carriers
    • H01L21/67369—Closed carriers characterised by shock absorbing elements, e.g. retainers or cushions
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/673—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere using specially adapted carriers or holders; Fixing the workpieces on such carriers or holders
    • H01L21/6735—Closed carriers
    • H01L21/67373—Closed carriers characterised by locking systems

Definitions

  • the present invention relates to a substrate storage container, and more particularly to a substrate storage container that suppresses contamination of the lid-side substrate support attached to the lid when the lid is removed from the container body.
  • a container for storing a substrate such as a semiconductor wafer
  • a container having a structure including a container body, a lid, a seal member, a front retainer, and a back substrate support has been conventionally known.
  • the container body has a cylindrical wall part in which an opening part of the container body is formed at one end and the other end is closed.
  • a substrate storage space is formed in the container body.
  • the substrate storage space is formed by being surrounded by a wall portion, and can store a plurality of substrates.
  • the lid can be attached to and detached from the container body opening, and the container body opening can be closed.
  • the front retainer is fixed to the lid.
  • the front retainer can support the edges of the plurality of substrates when the container main body opening is closed by the lid.
  • the back side substrate support portion is provided on the wall portion so as to form a pair with the front retainer, and can support the edge portions of a plurality of substrates.
  • the back side substrate support unit supports a plurality of substrates in cooperation with the front retainer, thereby separating adjacent substrates at a predetermined interval. A plurality of substrates are held in a parallel state (see Patent Document 1).
  • the lid is an inner surface of the lid, that is, a surface of the lid, and a front retainer fixed to a surface facing the substrate storage space when the container body opening is closed by the lid, It is necessary to prevent the front retainer from being contaminated by avoiding contact with others.
  • the present invention can suppress contamination of the lid-side substrate support part, further increase the strength of the lid, and cover the substrate (when the container body opening is closed with the lid). It is an object of the present invention to provide a substrate storage container that can suppress the deformation of the substrate, can securely hold the substrate, and can store and store the lids in the case of storing the lids, thereby reducing the storage space.
  • the present invention includes a container main body having an opening peripheral edge portion in which a substrate storage space capable of storing a plurality of substrates is formed, and an opening peripheral edge portion formed at one end portion and communicating with the substrate storage space.
  • a lid that is detachable from the container and capable of closing the container main body opening, and the substrate housing space when the container main body opening is closed by the lid, which is a part of the lid.
  • a lid-side substrate support portion capable of supporting the edges of the plurality of substrates when the container body opening is closed by the lid, and in the inside of the substrate storage space.
  • the lid-side substrate support is disposed when paired with the lid-side substrate support portion, can support edges of the plurality of substrates, and the container body opening is closed by the lid.
  • the lid body In cooperation with the department A back-side substrate support part that supports a number of substrates, and the lid body is a lid body body and a part of the lid body body, and the container body opening is closed by the lid body
  • a main body supporting convex portion located at a portion facing the substrate storage space, and when the container body opening is closed by the lid, the lid is relatively positioned with respect to the container body opening.
  • the present invention relates to a substrate storage container.
  • the main body supporting convex portion has a rib-shaped convex portion extending in one direction. Moreover, it is preferable that a pair of the rib-like convex portions is provided in parallel.
  • the lid body has a rectangular shape, and the portions in the vicinity of a pair of opposing sides in the rectangular lid body have container body engaging portions that can be engaged with the container body, respectively.
  • the lid-side substrate support portion is disposed between one of the container main body engaging portions and the other container main body engaging portion, and the rib-like convex portion is arranged with an edge of the lid main body. It is preferable that it is arrange
  • contamination of the lid-side substrate support portion can be suppressed, and further, the strength of the lid can be increased, and when the substrate is suppressed (when the container main body opening is closed with the lid). It is possible to provide a substrate storage container that can suppress deformation of the lid, hold the substrate securely, and can store the lid in a stacked manner when the lid is stored, thereby reducing the storage space.
  • FIG. 1 is a perspective view showing a substrate storage container according to the present embodiment.
  • FIG. 2A is a cross-sectional view illustrating the substrate storage container according to the present embodiment.
  • FIG. 2B is an enlarged side cross-sectional view showing the back substrate support part of the substrate storage container according to the present embodiment.
  • FIG. 3A is an exploded perspective view showing a state in which the lid of the substrate storage container according to the present embodiment is opened.
  • FIG. 3B is an exploded perspective view showing a state in which the substrate is stored in the substrate storage space of the container main body of the substrate storage container according to the present embodiment.
  • FIG. 1 is a perspective view showing a substrate storage container according to the present embodiment.
  • FIG. 2A is a cross-sectional view illustrating the substrate storage container according to the present embodiment.
  • FIG. 2B is an enlarged side cross-sectional view showing the back substrate support part of the substrate storage container according to the present embodiment.
  • FIG. 3A is an exploded perspective view showing a state in which
  • FIG. 4 is a rear perspective view showing the lid of the substrate storage container according to the present embodiment.
  • FIG. 5 is a cross-sectional view showing the lid of the substrate storage container according to the present embodiment.
  • FIG. 6 is a cross-sectional view of the main part of the substrate storage container according to the present embodiment as viewed from the direction of the line AA in FIG.
  • FIG. 7 is a rear perspective view in which the front retainer, the latch mechanism, and the seal member are omitted from the lid of the substrate storage container according to the present embodiment.
  • a direction from the container body 2 described later to the lid 3 is defined as the front direction D11, and the opposite direction is defined as the rear direction D12. These are defined as the front-rear direction D1.
  • a direction (upward direction in FIG. 3A) from the lower wall 24 to the upper wall 23 described later is defined as an upward direction D21, an opposite direction is defined as a downward direction D22, and these are defined as a vertical direction D2.
  • a direction from the second side wall 26 described later to the first side wall 25 (a direction from the lower right to the upper left in FIG. 3A) is defined as a left direction D31, and the opposite direction is defined as a right direction D32. Is defined as the left-right direction D3.
  • the substrate W (see FIG. 3B) stored in the substrate storage container 1 is a disk-shaped silicon wafer, glass wafer, sapphire wafer, etc., and is a thin one used in the industry.
  • the substrate W in this embodiment is a silicon wafer having a diameter of 450 mm.
  • the substrate storage container 1 includes a container main body 2, a lid 3, a seal member 4, a substrate support plate-like portion 5, and a front retainer 7 as a lid-side substrate receiving portion. have.
  • the container body 2 has a cylindrical wall portion 20 in which a container body opening 21 is formed at one end and the other end is closed.
  • a substrate storage space 27 is formed in the container body 2.
  • the substrate storage space 27 is formed so as to be surrounded by the wall portion 20.
  • the substrate support plate-shaped portion 5 is disposed in a portion of the wall portion 20 that forms the substrate storage space 27.
  • the substrate storage space 27 can store a plurality of substrates W as shown in FIG. 3B.
  • the substrate support plate-like portion 5 is provided on the wall portion 20 so as to form a pair in the substrate storage space 27.
  • the substrate support plate-like portion 5 is arranged in such a manner that adjacent substrates W are separated from each other at a predetermined interval and arranged in parallel.
  • the part can be supported.
  • a back side substrate support portion 6 is provided on the back side of the substrate support plate-like portion 5. The back-side substrate support 6 can support the rear portions of the edges of the plurality of substrates W when the container body opening 21 is closed by the lid 3.
  • the lid 3 can be attached to and detached from the opening peripheral edge 28 that forms the container body opening 21, and can close the container body opening 21.
  • the front retainer 7 is provided in a portion of the lid 3 that faces the substrate storage space 27 when the container main body opening 21 is closed by the lid 3.
  • the front retainer 7 is disposed inside the substrate storage space 27 so as to make a pair with the back substrate support 6.
  • the front retainer 7 can support the front portions of the edges of the plurality of substrates W when the container main body opening 21 is closed by the lid 3.
  • the front retainer 7 supports a plurality of substrates W in cooperation with the back substrate support 6, thereby allowing adjacent substrates W to be predetermined.
  • a plurality of substrates W are held in a state where they are spaced apart and arranged in parallel.
  • the wall portion 20 of the container body 2 includes a back wall 22, an upper wall 23, a lower wall 24, a first side wall 25, and a second side wall 26.
  • the back wall 22, the upper wall 23, the lower wall 24, the first side wall 25, and the second side wall 26 are made of a plastic material or the like. In the first embodiment, they are integrally formed of polycarbonate.
  • the first side wall 25 and the second side wall 26 face each other, and the upper wall 23 and the lower wall 24 face each other.
  • the rear end of the upper wall 23, the rear end of the lower wall 24, the rear end of the first side wall 25, and the rear end of the second side wall 26 are all connected to the back wall 22.
  • the front end of the upper wall 23, the front end of the lower wall 24, the front end of the first side wall 25, and the front end of the second side wall 26 have a positional relationship facing the back wall 22 and have a substantially rectangular shape. Opening peripheral edge portion 28 is formed.
  • the opening peripheral edge 28 is provided at one end of the container main body 2, and the back wall 22 is located at the other end of the container main body 2.
  • the outer shape of the container body 2 formed by the outer surface of the wall portion 20 is box-shaped.
  • the inner surface of the wall portion 20, that is, the inner surface of the back wall 22, the inner surface of the upper wall 23, the inner surface of the lower wall 24, the inner surface of the first side wall 25, and the inner surface of the second side wall 26 are surrounded by these. 27 is formed.
  • the container main body opening 21 formed in the opening peripheral edge portion 28 is surrounded by the wall portion 20 and communicates with the substrate storage space 27 formed in the container main body 2. As will be described later, a maximum of 25 substrates W can be stored in the substrate storage space 27.
  • the latch engaging recesses 231A and 231B that are recessed toward the outside of the substrate storage space 27 are portions of the upper wall 23 and the lower wall 24 and in the vicinity of the opening peripheral edge portion 28. , 241A, 241B are formed.
  • a total of four latch engaging recesses 231A, 231B, 241A, 241B are formed near the left and right ends of the upper wall 23 and the lower wall 24, one each.
  • a rib 233 and a flange fixing portion 234 are integrally formed with the upper wall 23.
  • a plurality of ribs 233 protrude from the outer surface of the upper wall 23 in the upward direction D21.
  • the rib 233 has what extends in the substantially front-back direction D1 and what extends in the substantially left-right direction D3.
  • a top flange 235 is fixed to the flange fixing portion 234.
  • the top flange 235 is fixed to the upper wall 23, and is hung and suspended in the substrate storage container 1 when the substrate storage container 1 is suspended in an AMHS (automatic wafer transport system), a PGV (wafer substrate transport carriage), or the like. It is a member which becomes a part.
  • AMHS automated wafer transport system
  • PGV wafer substrate transport carriage
  • a container main body leg 243 is provided on the outer surface of the lower wall 24.
  • the container main body leg portion 243 is attached to the left and right end edges of the lower wall 24 and extends in the front-rear direction D1 along the left and right end edges of the lower wall 24.
  • the substrate support plate-like portions 5 are provided in the first side wall 25 and the second side wall 26, respectively, and are arranged in the substrate storage space 27 so as to form a pair in the left-right direction D3.
  • the substrate support plate-like portion 5 has a plate portion 51 and a plate portion support portion 52.
  • the plate portion 51 and the plate portion support portion 52 are configured by integrally molding resin.
  • the plate part 51 has a plate-like arc shape.
  • a total of 50 plate portions 51 are provided on each of the first side wall 25 and the second side wall 26, each including 25 plates.
  • Adjacent plate portions 51 are arranged in parallel with each other in the vertical direction D2 so as to be spaced apart from each other at an interval of 10 mm to 12 mm. Note that the same shape as the plate portion 51 is also disposed above the uppermost plate portion 51, but this is the substrate W that is positioned at the uppermost position and inserted into the substrate storage space 27. On the other hand, the member serves as a guide for the insertion.
  • the 25 plate portions 51 provided on the first side wall 25 and the 25 plate portions 51 provided on the second side wall 26 have a positional relationship facing each other in the left-right direction D3.
  • the 50 plate portions 51 and the members serving as two guides having substantially the same shape as the plate portion 51 have a positional relationship parallel to the inner surface of the lower wall 24.
  • a convex portion 511 is provided on the upper surface of the plate portion 51.
  • substrate W supported by the board part 51 contacts only the protrusion end of the convex part 511, and does not contact the board part 51 by a surface.
  • the plate portion support portion 52 is configured by a member extending in the up-down direction D2.
  • the 25 plate portions 51 provided on the first side wall 25 are connected to a plate portion support portion 52 provided on the first side wall 25 side.
  • the 25 plate portions 51 provided on the second side wall 26 are connected to a plate portion support portion 52 provided on the second side wall 26 side.
  • the plate part support part 52 has a first side wall locking part (not shown).
  • the first side wall locking portion can be locked to side plate locking portions (not shown) provided on the first side wall 25 and the second side wall 26, respectively.
  • substrate support plate-shaped part 5 is each fixed to the 1st side wall 25 and the 2nd side wall 26 by latching a 1st side wall latching
  • the back substrate support 6 includes a wall substrate support 60 and a support fixing member 67.
  • the wall portion substrate support portion 60 is formed integrally with the plate portion 51 at the rear end portion of the plate portion 51 of the substrate support plate-like portion 5.
  • the back substrate support 6 is separate from the substrate support plate 5, that is, the wall substrate support 60 is formed separately from the plate 51 of the substrate support 5. Also good.
  • the number of wall substrate support portions 60 corresponding to each one of the substrates W that can be stored in the substrate storage space 27, specifically, 25 is provided.
  • substrate support part 60 provided in the 1st side wall 25 and the 2nd side wall 26 has the positional relationship which makes a pair with the front retainer 7 mentioned later in the front-back direction D1.
  • the support portion fixing member 67 has a side wall rear portion locking portion (not shown). The side wall rear portion locking portion can be locked to back side substrate support portion locking portions (not shown) provided on the first side wall 25 and the second side wall 26, respectively.
  • the first side wall locking portion (not shown) is locked to the side plate locking portion (not shown), and the side wall rear locking portion (not shown) is locked to the back side substrate support portion.
  • the substrate support plate-like part 5 is fixed to the first side wall 25 and the second side wall 26 by being locked to the part (not shown).
  • the wall portion substrate support portion 60 includes a support portion upper portion 62 having a first contact surface 621 and a support portion lower portion 63 having a second contact surface 631.
  • the first contact surface 621 stores the substrate W in the substrate storage space 27 and closes the lid 3 so that the substrate W is supported by the back substrate support 6 and the front retainer 7. When this is done, the edge of the edge of the upper surface of the substrate W can come into contact.
  • the substrate W is stored in the substrate storage space 27 and the lid 3 is closed on the second contact surface 631, the substrate W is supported by the back substrate support 6 and the front retainer 7.
  • substrate W can contact
  • the lid 3 is detachable from the opening peripheral portion 28 of the container body 2, and the lid 3 is attached to the opening peripheral portion 28, whereby the lid 3 is The opening 21 can be closed.
  • the lid body 3 includes a lid body 30 and a rib-like convex portion 304, and substantially matches the shape of the opening peripheral edge portion 28 (see FIG. 3A) of the container body 2. It has a rectangular shape.
  • the lid body 30 has a rectangular shape and forms an outer shape of the rectangular lid body 3, and has an inner surface 301 and an outer surface 302 as shown in FIG. 5.
  • the inner surface 301 faces the substrate storage space 27 when the container main body opening 21 is closed by the lid 3.
  • the outer surface 302 is exposed to the outside of the substrate storage container 1 when the container main body opening 21 is closed by the lid 3.
  • the lid body 30 is made of a plastic material or the like. In the first embodiment, the lid body 30 is made of polycarbonate.
  • a seal member fitting groove 31 is formed along the outer peripheral edge of the lid 3 at the outer peripheral edge of the lid body 30.
  • an annular seal member made of elastically deformable POE (polyoxyethylene), PEE, various thermoplastic elastomers such as polyester and polyolefin, fluororubber, silicon rubber, etc. 4 is fitted.
  • the seal member 4 is arranged so as to go around the outer peripheral edge of the lid 3.
  • the seal member 4 can be brought into contact with an opening peripheral portion 28 which is a portion of the container main body 2 forming the container main body opening 21.
  • the seal member 4 is interposed between the opening peripheral portion 28 and the lid body 30 and is in close contact with the opening peripheral portion 28 so that the container body opening 21 can be closed in an airtight state by the lid 3. It is. By removing the lid 3 from the opening peripheral edge 28, the substrate W can be taken into and out of the substrate storage space 27 in the container body 2.
  • the lid body 30 is a portion in the vicinity of a pair of short sides that are a pair of opposing sides in the rectangular lid body 30, that is, the lid body 30.
  • Each of the portions in the vicinity of the left and right end portions of the lid body 30 has a latch storage portion 303.
  • a latch housing space 303A extending along the pair of short sides is formed in the latch body housing portion.
  • the latch storage space 303A stores a latch mechanism 32 as a container body engaging portion, and the latch mechanism 32 includes an upper latch portion 32A and a lower latch portion 32B.
  • the upper latch portion 32A is formed of a long plate-like member.
  • the portion slightly lower than the upper end portion is the thickest in the front-rear direction D1.
  • the upper latch portion 32A gradually becomes thinner from the thickest portion toward the upper end and the lower end.
  • the upper latch portion 32A is movable in the vertical direction D2 in the latch storage space 303A.
  • the upper end of the upper latch portion 32A can project in the upward direction D21 from the upper side of the lid body 30.
  • the lower end of the upper latch portion 32A is connected to the operation portion 33 described later so that the upper latch portion 32A can be moved by the operation portion 33 described later.
  • the lower latch portion 32B is configured by a long plate-like member.
  • the part slightly raised from the lower end part is the thickest in the front-rear direction D1.
  • the lower latch portion 32B gradually becomes thinner from the thickest portion toward the upper end and the lower end.
  • the lower latch portion 32B is movable in the vertical direction D2 in the latch storage space 303A.
  • the lower end of the lower latch portion 32B can project in the downward direction D22 from the lower side of the lid body 30.
  • the upper end of the lower latch part 32B is connected to the operation part 33 described later so that the lower latch part 32B can be moved by the operation part 33 described later.
  • the upper latch portion 32 ⁇ / b> A and the lower latch portion 32 ⁇ / b> B are housed in a latch housing portion 303 configured by a part of the lid body 30.
  • an operation portion 33 is provided in a portion in the latch storage space 303A and in the central portion in the vertical direction D2. A part of the operation unit 33 is exposed to the outside of the latch storage space 303A through a hole formed in the front surface of the lid body 30, and the part can be operated from the front side.
  • the upper latch part 32A By operating the operation part 33 from the front side of the lid 3, the upper latch part 32A can be moved in the upward direction D21, and at the same time, the lower latch part 32B can be moved in the downward direction D22. By this movement, the upper latch portion 32A and the lower latch portion 32B can be protruded from the upper side and the lower side of the lid 3, respectively. Further, by operating the operating portion 33 in the opposite direction to this operation, the upper latch portion 32A can be moved in the downward direction D22, and at the same time, the lower latch portion 32B is moved in the upward direction D21. Can do. By this movement, the lower latch portion 32B can be prevented from projecting from the lower side.
  • the upper latch portion 32A protrudes in the upward direction D21 from the upper side of the lid body 30 and engages with the latch engagement recesses 231A and 231B of the container body 2, and the lower latch portion 32B extends from the lower side of the lid body 30.
  • the lid 3 is fixed to the opening peripheral edge 28 of the container body 2 by projecting in the downward direction D22 and engaging with the latch engagement recesses 241A and 241B of the container body 2.
  • a portion of the inner surface 301 of the lid body 30 that closes the container body opening 21 is used to fix the lid legs that are recessed in the front direction D ⁇ b> 11.
  • a recess 341 is formed.
  • the lid leg fixing recess 341 has a width of about one-third of the width in the left-right direction D3 of the lid body 30 at the center position in the left-right direction D3 of the lid body 30 in the vertical direction D2.
  • the lid body 30 is formed from the vicinity of the upper end portion thereof to the vicinity of the lower end portion thereof.
  • the upper and lower ends of the lid leg fixing recess 341 are formed by the edge of the lid body 30.
  • the portions of the inner surface 301 of the lid body 30 that are on both sides of the lid leg fixing recess 341 in the left-right direction D ⁇ b> 3 are configured by inner surface left and right end flat surfaces 342.
  • the lid body 30 has a symmetric configuration with a virtual line S extending vertically at the center of the lid body 30 in the left-right direction D3. Therefore, the configuration of the left side (left side D31) part will be mainly described in detail below, and detailed description of the right side (right side D32) part will be omitted.
  • the front retainer 7 fixed to the lid body 30 also forms two pairs symmetrically about the virtual line S. Is provided.
  • the portion of the inner surface 301 of the lid body 30 that forms the lid leg fixing recess 341 has a flat bottom surface 341A and a stepped surface 341B.
  • the bottom flat surface 341A is located on the front side (front direction D11 side) of the inner surface left and right end flat surfaces 342.
  • the stepped surface 341B is disposed at both ends of the bottom flat surface 341A in the left-right direction D3.
  • the stepped surface 341B includes an intermediate flat surface 341C that is one step higher than the bottom flat surface 341A, a first stepped surface 341D that goes up to the intermediate flat surface 341C, and an inner surface that is one step higher than the intermediate flat surface 341C.
  • a second stepped surface 341E rising to the left and right end flat surface 342.
  • the pair of front retainer locking plates 343 extend in the vertical direction D2.
  • the front retainer locking plate 343 is fixed to the bottom flat surface 341 ⁇ / b> A of the lid body 30.
  • a through-hole 343A is formed in the front retainer locking plate 343.
  • one front retainer locking portion 344 is provided in the center portion of each inner surface left and right end flat surface 342 in the left-right direction D3.
  • the front retainer locking portion 344 has a plate-like locking portion 344A and a base side support portion 344B.
  • the front and back surfaces of the plate-like locking portion 344A are separated from the inner left and right end flat surfaces 342 in a positional relationship parallel to the inner left and right end flat surfaces 342, and the longitudinal direction is parallel to the vertical direction D2. Is arranged in.
  • the plate-like locking portion 344A is connected to the base side support portion 344B, and the base side support portion 344B is fixed to the inner surface left and right end flat surface 342.
  • the base side support portion 344B extends from the vicinity of the edge on the upper direction D21 side of the lid body 30 to the vicinity of the edge on the lower direction D22 side.
  • the front retainer locking plate 343 on the left side (left side D31 side) is located at the position facing the inner surface 301 of the lid body 30 from the front retainer locking portion 344 on the left side.
  • a front retainer 7 is provided at all the positions.
  • the front retainer 7 includes a pair of vertical frames 71 extending in parallel with the vertical direction D ⁇ b> 2, a pair of front retainer legs 72, and a front retainer substrate receiving portion 73.
  • the pair of vertical frame bodies 71, the front retainer legs 72, and the front retainer board receiving portion 73 are integrally formed of resin and connected to each other.
  • the front retainer substrate receiving portion 73 is a portion of the lid body 30, and the left front retainer in the left-right direction D ⁇ b> 3 from the left end (the end in the left direction D ⁇ b> 31) of the middle flat surface 341 ⁇ / b> C. It arrange
  • the front retainer substrate receiving portion 73 as the lid-side substrate receiving portion is not disposed in the lid leg fixing recess 341 and is deeper than the lid leg fixing recess 341 in the depth direction (rear direction D12). It arrange
  • the front retainer substrate receiving portion 73 includes a receiving portion upper portion 731 having a front retainer first contact surface 733 and a receiving portion lower portion 732 having a front retainer second contact surface 734. Yes.
  • the front retainer first contact surface 733 stores the substrate W in the substrate storage space 27 and closes the container main body opening 21 by the lid 3, so that the substrate W is connected to the back side substrate support 6 and the front retainer 7.
  • the front retainer second contact surface 734 the substrate W is stored in the substrate storage space 27 and the container body opening 21 is closed by the lid 3, so that the substrate W is connected to the back substrate support 6 and the front retainer 7.
  • the front retainer substrate receiving portion 73 can support the edge portions of the plurality of substrates W.
  • the left end portion (the end portion in the left direction D ⁇ b> 31) that is one end portion of the front retainer substrate receiving portion 73 is the right end portion of one front retainer leg portion 721 of the pair of front retainer legs 72. (The end of the right direction D32).
  • the right end portion which is the other end portion of the front retainer substrate receiving portion 73 is connected to the left end portion of the other front retainer leg portion 722 of the pair of front retainer leg portions 72.
  • One front retainer leg 721 extends from the left end of the front retainer substrate receiving portion 73 so as to approach the inner left / right end flat surface 342, bends right before the inner left / right end flat surface 342, and the inner left / right end. It extends long so as to approach the front retainer locking portion 344 in parallel with the flat surface 342. This long extending portion occupies more than two-thirds of one front retainer leg 721. Then, it is bent at a right angle so as to be separated from the inner surface left and right end flat surface 342, slightly extends, bends at a right angle again, extends slightly so as to approach the front retainer locking portion 344, and is bent at a right angle again to the inner surface left and right end flat surface 342. The left end of one front retainer leg 72 is connected to one vertical frame 711.
  • the other front retainer leg 722 extends so as to approach the middle flat surface 341C, bends at an obtuse angle before the middle flat surface 341C, and extends linearly to the vicinity of the front retainer locking plate 343. Then, it bends at an obtuse angle, extends slightly so as to approach the bottom flat surface 341A, and is connected to the other vertical frame 712.
  • the front retainer board receiving portion 73 and the paired front retainer leg portions 72 are provided in a state where 25 are arranged in parallel in the vertical direction D2.
  • the edge of the vertical frame 71 in the width direction of the vertical frame 71 is formed between the plate-like locking portion 344 ⁇ / b> A of the front retainer locking portion 344 and the flat surface 342 on the inner left and right ends.
  • the vertical frame 71 is locked to the front retainer locking portion 344 by entering the space.
  • the second lid locking portion 714 protruding from the edge of the vertical frame 71 in the width direction of the other vertical frame 712 is a through hole of the front retainer locking plate 343.
  • the vertical frame body 712 is locked to the front retainer locking plate 343 by being inserted into 343A.
  • the one vertical frame body 711 is locked to the front retainer locking portion 344, and the other vertical frame body 712 is locked to the front retainer locking plate 343. It is fixed to the main body 30.
  • the front retainer 7 serving as a lid-side substrate support fixed to the lid body 30 is disposed between a latch mechanism 32 disposed on the right direction D32 side and a latch mechanism 32 disposed on the left direction D31 side. Has been.
  • the lid side substrate receiving portion (front retainer substrate receiving portion 73) is The portion of the left end of one front retainer leg 721 that is fixed to the lid body 30, that is, the portion of one front retainer leg 721 that is connected to one vertical frame 711. The portion can be swung with the swinging axis as a swing axis.
  • the front retainer engaging portion 344 is released from the first lid engaging portion 713 and the front retainer engaging plate 343 is released from the second lid engaging portion 714. 7 is removed from the lid body 30.
  • a rib-shaped convex portion 304 is disposed at a position between the edge of the lid body 30 and the front retainer 7.
  • the edge of the lid body 30 is the edge of the lid 3 that defines the short side of the left side (left side D ⁇ b> 31) of the rectangular lid body 30. Part.
  • the rib-shaped convex portion 304 is fixed to the lid body 30 at this position.
  • a rib-like convex portion 304 is disposed at a position between the edge of the lid body 30 and the front retainer 7.
  • the edge of the lid body 30 is the edge of the lid 3 that defines the short side on the right side (right side D ⁇ b> 32) of the rectangular lid body 30.
  • the rib-shaped convex portion 304 is fixed to the lid body 30 at this position. That is, the rib-shaped convex portion 304 is located in a portion of the lid body 30 that faces the substrate storage space 27 when the container body opening 21 is closed by the lid 3.
  • the pair of rib-shaped convex portions 304 are arranged in parallel.
  • each of the rib-shaped convex portions 304 is in the vicinity of the edge of the lid 3 that defines the short side on the left side (left side D31 side) of the rectangular lid body 30 of the lid body 30. It extends in the up-down direction D2 which is one direction along the edge.
  • the rib-shaped convex portion 304 is a position that is raised about a quarter of the length of the edge from the lower end of the edge from a position that is lowered about a quarter of the length of the edge from the upper end of the edge. It extends to.
  • the rib-shaped convex portion 304 is integrally formed with the lid body 30 and is made of polycarbonate, which is the same material as the lid body 30.
  • the rib-shaped convex portion 304 moves toward the opening closing direction in which the lid 3 is relatively approached with respect to the container body opening 21, that is, in the backward direction. Projecting from the inner surface 301 of the lid body 30 toward D12. As shown in FIG. 5, the inside of the rib-shaped convex part 304 is hollow.
  • the cross section of the rib-like convex portion 304 cut by a virtual plane parallel to the front-rear direction D1 and the left-right direction D3 has a trapezoidal shape having a tapered shape.
  • the protruding end 304 ⁇ / b> A of the rib-like convex portion 304 is located on the rear direction D ⁇ b> 12 side, which is the opening closing direction, with respect to the front retainer substrate receiving portion 73 as the lid side substrate support portion of the front retainer 7.
  • the lid 3 is a portion of the lid body 30 and the portion of the lid body 30 that faces the substrate storage space 27 when the container body opening 21 is closed by the lid 3.
  • a main body supporting convex portion (rib-shaped convex portion 304) that is positioned so that when the container body opening portion 21 is closed by the lid body 3, the lid body 3 is relatively close to the container body opening portion 21. It has a main body supporting convex portion (rib-shaped convex portion 304) protruding from the lid main body 30 in the closing direction (rear direction D12).
  • the protruding end of the main body support convex portion is located closer to the opening closing direction side (rear direction D12 side) than the lid side substrate support portion (front retainer substrate receiving portion 73 of the front retainer 7). Therefore, when the lid 3 is placed on a flat surface with the lid-side substrate support portion (front retainer substrate receiving portion 73 of the front retainer 7) facing down, the lid-side substrate support portion is placed on the flat surface. Contact can be prevented, and contamination of the lid-side substrate support portion can be suppressed.
  • the retainer first contact surface 733 is in contact with the front portion of the edge W3 of the edge of the upper surface of the substrate W.
  • the front retainer second contact surface 734 when the substrate W is stored in the substrate storage space 27 and the lid 3 is closed, the substrate W is supported by the back substrate support 6 and the front retainer 7.
  • the front part of the edge W4 at the edge of the lower surface of the substrate W abuts. Accordingly, the front retainer substrate receiving portion 73 supports the edge portions of the plurality of substrates W.
  • the front retainer 7 receives a reaction force from the substrate W in the direction indicated by the arrow F1 in FIG.
  • the vertical frame 71 of the front retainer 7 pushes the lid body 30 in the forward direction D11
  • the lid body 30 pushes the latch in the forward direction D11.
  • the upper end portion of the upper latch portion 32A is engaged with the latch engagement recess portions 231A and 231B
  • the lower end portion of the lower latch portion 32B is engaged with the latch engagement recess portions 241A and 241B.
  • the portion 32A and the lower latch are prevented from moving in the forward direction D11.
  • the upper latch portion 32A and the lower latch are portions of the lid body 30 that are pushed in the front direction D11 by the vertical frame 71 of the front retainer 7 in the direction indicated by the arrow F2.
  • a reaction force is applied to the surface to suppress deformation of this portion.
  • the rib-shaped convex portion 304 is provided in the portion of the lid body 30 and in the vicinity of the portion pressed in the front direction D11 by the vertical frame 71 of the front retainer 7,
  • the strength of this part and the entire lid body 30 can be increased, and deformation of this part can be effectively suppressed. Therefore, the substrate W can be supported by the back substrate support 6 and the front retainer 7 stably and reliably with high accuracy. Further, it is possible to suppress the movement of the upper latch portion 32A and the lower latch portion 32B from being hindered by pressing the upper latch portion 32A and the lower latch portion 32B.
  • the strength of the lid 3 can be increased.
  • the container main body opening 21 is closed by the lid 3, and the back substrate support (the wall substrate support 60 of the back substrate support 6) is the lid substrate support (front retainer 7).
  • the lid substrate support front retainer 7
  • a reaction force that deforms the lid body 30 is applied to the lid body 30 from the substrate via the lid-side substrate support portion. Act. Even in such a case, the deformation of the lid body 30 can be suppressed.
  • the rib-like convex portions 304 are arranged in parallel and provided as a pair, the strength of the lid body 30 can be further increased, and deformation of the lid body 30 can be suppressed.
  • the lid body 30 has a rectangular shape, and portions in the vicinity of a pair of opposing sides in the rectangular lid body 30 are respectively container body engaging portions (latches) that can be engaged with the container body 2.
  • the lid body side substrate support part (front retainer 7) has a mechanism 32) and is disposed between one container body engaging part and the other container body engaging part.
  • a reaction force that deforms the lid body 30 acts on the portion of the container body engaging portion that is engaged with the container body 2.
  • the reaction force acting on the container body 2 is a portion of the lid body 30 and also acts on a portion between the edge of the lid body 30 and the lid-side substrate support portion.
  • the rib-shaped convex portion 304 is disposed at a position between the edge of the lid body 30 and the lid-side substrate support portion, the lid body 30 resists such a reaction force. Deformation can be reduced.
  • the main body support convex portion is configured by the rib-shaped convex portion 304, but is not limited to this configuration.
  • the rib-shaped convex part 304 was arrange
  • the shape of the container main body and the lid, the number of substrates that can be stored in the container main body, and the dimensions thereof are the shape of the container main body 2 and the lid 3 in this embodiment and the number of substrates W that can be stored in the container main body 2.
  • the dimensions are not limited.
  • the adjacent plate portions 51 of the substrate support plate-like portion 5 are arranged in a parallel positional relationship apart from each other. However, they may not be strictly in a parallel positional relationship, and may be in parallel.

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  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
  • Packaging Frangible Articles (AREA)

Abstract

Le réceptacle de stockage (1) de l'invention est équipé : d'un corps principal de réceptacle (2) qui possède une partie bord périphérique d'ouverture (28) au niveau de laquelle est formée une partie ouverture de corps principal de réceptacle (21) ; et d'un corps de couvercle (3) permettant un attachement et un détachement vis-à-vis de la partie bord périphérique d'ouverture (28), et permettant la fermeture de la partie ouverture de corps principal de réceptacle (21). Le corps de couvercle (3) possède : un corps principal de corps de couvercle (30) ; et une partie relief de maintien de corps principal (304) positionnée dans une portion correspondant à la portion du corps principal de corps de couvercle (30) et s'opposant à un espace de stockage de substrats (27) lorsque la partie ouverture de corps principal de réceptacle (21) est fermée par le corps de couvercle (3), en outre, cette partie relief de maintien de corps principal (304) est en saillie depuis le corps principal de corps de couvercle (30) dans une direction de fermeture d'ouverture dans laquelle le corps de couvercle (3) se rapproche de manière relative de la partie ouverture de corps principal de réceptacle (21), lorsque la partie ouverture de corps principal de réceptacle (21) est fermée par le corps de couvercle (3). L'extrémité saillie de la partie relief de maintien de corps principal (304), est positionnée côté direction de fermeture d'ouverture (D22) par rapport à une partie maintien de substrats côté corps de couvercle (7).
PCT/JP2012/076440 2012-10-12 2012-10-12 Réceptacle de stockage de substrats empêchant la salissure d'une partie maintien de substrats côté corps de couvercle WO2014057573A1 (fr)

Priority Applications (1)

Application Number Priority Date Filing Date Title
PCT/JP2012/076440 WO2014057573A1 (fr) 2012-10-12 2012-10-12 Réceptacle de stockage de substrats empêchant la salissure d'une partie maintien de substrats côté corps de couvercle

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
PCT/JP2012/076440 WO2014057573A1 (fr) 2012-10-12 2012-10-12 Réceptacle de stockage de substrats empêchant la salissure d'une partie maintien de substrats côté corps de couvercle

Publications (1)

Publication Number Publication Date
WO2014057573A1 true WO2014057573A1 (fr) 2014-04-17

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PCT/JP2012/076440 WO2014057573A1 (fr) 2012-10-12 2012-10-12 Réceptacle de stockage de substrats empêchant la salissure d'une partie maintien de substrats côté corps de couvercle

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Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN110574152A (zh) * 2017-04-05 2019-12-13 未来儿股份有限公司 基板收纳容器
CN110770889A (zh) * 2017-04-06 2020-02-07 未来儿股份有限公司 基板收纳容器

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2002353301A (ja) * 2001-05-30 2002-12-06 Shin Etsu Polymer Co Ltd 精密基板収納容器及びその押さえ部材
JP2006128461A (ja) * 2004-10-29 2006-05-18 Shin Etsu Polymer Co Ltd 基板収納容器
WO2009131016A1 (fr) * 2008-04-25 2009-10-29 信越ポリマー株式会社 Élément de retenue et contenant de stockage de substrat muni de cet élément de retenue
JP2011162235A (ja) * 2010-02-10 2011-08-25 Sekisui Plastics Co Ltd 板状体搬送用ボックス

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2002353301A (ja) * 2001-05-30 2002-12-06 Shin Etsu Polymer Co Ltd 精密基板収納容器及びその押さえ部材
JP2006128461A (ja) * 2004-10-29 2006-05-18 Shin Etsu Polymer Co Ltd 基板収納容器
WO2009131016A1 (fr) * 2008-04-25 2009-10-29 信越ポリマー株式会社 Élément de retenue et contenant de stockage de substrat muni de cet élément de retenue
JP2011162235A (ja) * 2010-02-10 2011-08-25 Sekisui Plastics Co Ltd 板状体搬送用ボックス

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN110574152A (zh) * 2017-04-05 2019-12-13 未来儿股份有限公司 基板收纳容器
CN110574152B (zh) * 2017-04-05 2023-10-27 未来儿股份有限公司 基板收纳容器
CN110770889A (zh) * 2017-04-06 2020-02-07 未来儿股份有限公司 基板收纳容器
CN110770889B (zh) * 2017-04-06 2023-10-27 未来儿股份有限公司 基板收纳容器

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