JP6000075B2 - Substrate storage container - Google Patents

Description

  The present invention relates to a substrate storage container, and more particularly to a substrate storage container transported in a state where a plurality of substrates such as semiconductor wafers are stored in parallel.

  As a container for storing a substrate such as a semiconductor wafer, a container having a structure including a container main body, a lid, a substrate support plate-shaped portion, a front retainer, and a back substrate support has been conventionally known. .

  The container body has a cylindrical wall portion in which a container body opening is formed at one end and the other end is closed. A substrate storage space is formed in the container body. The substrate storage space is formed by being surrounded by a wall portion, and can store a plurality of substrates. The lid can be attached to and detached from the container body opening, and the container body opening can be closed. The substrate support plate-like portions are provided on the wall portion so as to form a pair in the substrate storage space. The substrate support plate-like portion can support the edges of a plurality of substrates in a state where adjacent substrates are spaced apart and arranged in parallel when the container body opening is not closed by the lid. is there.

The front retainer is provided in a portion of the lid that faces the substrate storage space when the container main body opening is closed. The front retainer can support the edges of the plurality of substrates when the container main body opening is closed by the lid.
The back side substrate support portion is provided on the wall portion so as to form a pair with the front retainer. The back side substrate support part can support the edges of a plurality of substrates. When the container body opening is closed by the lid, the back side substrate support unit supports a plurality of substrates in cooperation with the front retainer, thereby separating adjacent substrates at a predetermined interval. A plurality of substrates are held in parallel.
In addition, the back side substrate support part may be formed integrally with the substrate support plate-like part, or may be constituted separately from the substrate support plate-like part.

  The wall part of the container body has a back wall, an upper wall, a lower wall, a first side wall, and a second side wall. The upper wall is provided with ribs for increasing the rigidity of the wall portion. Moreover, the center part of the upper wall has a flange mounting part to which a flange part can be mounted. When a substrate storage container is transferred by an AMHS (automatic wafer transfer system), a PGV (wafer substrate transfer carriage) or the like, the flange engaging portion of these machines is hung on the flange portion mounted on the flange mounting portion. Then, the substrate storage container is lifted and conveyed by the flange engaging portion integrally with the flange.

  Since the substrate storage container is lifted and conveyed in this manner, the weight of the substrate storage container itself and the plurality of substrates stored in the substrate storage container act on the upper wall. As a result, the upper wall may be elastically deformed, or the shape of the upper wall may change due to plastic deformation. In order to suppress this, for example, the rigidity of the upper wall is increased by making a part of the upper wall protrude upward (see Patent Document 1).

JP 2008-34879 A

  As described above, when the weight of the container or the plurality of substrates acts on the upper wall, the upper wall may be elastically deformed or may be plastically deformed to change the shape of the upper wall. As a countermeasure, ribs are provided on the upper wall. In the substrate storage container or the like described in Patent Document 1, the height of the rib provided on the upper wall does not contact the flange engagement portion because the flange engagement portion is hung on the flange portion and the substrate storage container is lifted. To be limited. With this, it is difficult to make the substrate storage container have a sufficient rigidity.

  An object of this invention is to provide the board | substrate storage container with which the rigidity of the container main body was improved.

  The present invention is a cylindrical wall portion having a container body opening formed at one end and the other end closed, and has a back wall, an upper wall, a lower wall, and a pair of side walls. One end portion, one end portion of the lower wall, and a wall portion in which the container body opening is formed by one end portion of the side wall, the inner surface of the upper wall, the inner surface of the lower wall, the inner surface of the side wall, and the A container main body in which a plurality of substrates can be stored by the inner surface of the inner wall and a substrate storage space communicating with the container main body opening is formed, and can be attached to and detached from the container main body opening. A lid body capable of closing the portion, wherein the upper wall is a locked portion disposed at a central portion of the upper wall, and is locked by a lifting member capable of lifting the container body. An outer surface of the upper wall having an engaging portion is an opening from one side wall to the other side wall. Inwardly directed outer surface end portions located at both end portions in the width direction, the inwardly directed outer surface end portions facing inward of the substrate storage space as approaching the central portion in the opening width direction, and the opening width It is related with the board | substrate storage container which is located in the center part in a direction, and has an outer surface center low part located inward of the said board | substrate storage space rather than both ends of the outer surface of the said upper wall.

  Further, at least a portion of the inner surface of the upper wall corresponding to the one end portion of the upper wall is an inwardly directed inner surface end portion located at both end portions in the opening width direction, and a center in the opening width direction. As it approaches the portion, it is located at the inner-facing inner end facing inward of the substrate storage space and the central portion in the width direction of the opening, and inward of the substrate storage space from both ends of the inner surface of the upper wall It is preferable to have an inner surface center low part located near.

  Further, the outer surface center low portion and the inner surface center lower portion have a rectangular shape in a positional relationship that coincides with each other, and one side of the rectangular shape is an end of the upper wall that forms the container body opening. It is preferable to constitute a part.

  Moreover, it is preferable that the said inward-oriented outer surface edge part has a rib extended in the direction approaching the said to-be-latched part. Moreover, it is preferable that the outer surface of the said upper wall has a rib extended radially centering on the said to-be-latched part. Moreover, it is preferable that the said to-be-latched part has a flange part which opposes the outer surface of the said upper wall.

  The present invention can provide a substrate storage container in which the rigidity of the container body is increased.

It is a perspective view which shows the substrate storage container which concerns on this embodiment. It is a front view which shows the substrate storage container which concerns on this embodiment. It is a top view which shows the substrate storage container which concerns on this embodiment. It is a right view which shows the substrate storage container which concerns on this embodiment. It is sectional drawing which followed the AA line of FIG. 2A. It is a disassembled perspective view which shows the state which opened the cover of the substrate storage container which concerns on this embodiment. It is a disassembled perspective view which shows the state which accommodated the board | substrate in the board | substrate accommodation space of the container main body of the board | substrate storage container which concerns on this embodiment. It is a perspective view which shows the state which removed the flange part of the substrate storage container which concerns on this embodiment. It is a schematic perspective view which shows the container main body of the substrate storage container which concerns on this embodiment. It is a schematic front view which shows the container main body of the substrate storage container which concerns on this embodiment. It is a schematic sectional drawing which shows the container main body of the substrate storage container which concerns on this embodiment. It is a schematic downward perspective view which shows the container main body of the substrate storage container which concerns on this embodiment. It is a schematic perspective view which shows the container main body of the 1st modification of the substrate storage container which concerns on this embodiment. It is a schematic front view which shows the container main body of the 1st modification of the substrate storage container which concerns on this embodiment. It is a schematic sectional drawing which shows the container main body of the 1st modification of the substrate storage container which concerns on this embodiment. It is a schematic perspective view which shows the container main body of the 2nd modification of the substrate storage container which concerns on this embodiment. It is a schematic front view which shows the container main body of the 2nd modification of the substrate storage container which concerns on this embodiment. It is a schematic sectional drawing which shows the container main body of the 2nd modification of the substrate storage container which concerns on this embodiment. It is a schematic perspective view which shows the container main body of the 3rd modification of the substrate storage container which concerns on this embodiment. It is a schematic sectional drawing which shows the container main body of the 3rd modification of the substrate storage container which concerns on this embodiment.

  Hereinafter, a substrate storage container according to an embodiment of the present invention will be described with reference to the drawings. FIG. 1 is a perspective view showing a substrate storage container according to the present embodiment. FIG. 2A is a front view showing the substrate storage container according to the present embodiment. FIG. 2B is a plan view showing the substrate storage container according to the present embodiment. FIG. 2C is a right side view illustrating the substrate storage container according to the present embodiment. 2D is a cross-sectional view taken along line AA in FIG. 2A. FIG. 3A is an exploded perspective view showing a state in which the lid of the substrate storage container according to the present embodiment is opened. FIG. 3B is an exploded perspective view showing a state in which the substrate is stored in the substrate storage space of the container main body of the substrate storage container according to the present embodiment. FIG. 4 is a perspective view showing a state in which the flange portion of the substrate storage container according to the present embodiment is removed.

  FIG. 5A is a schematic perspective view showing a container main body of the substrate storage container according to the present embodiment. FIG. 5B is a schematic front view showing the container body of the substrate storage container according to the present embodiment. FIG. 5C is a schematic cross-sectional view showing the container body of the substrate storage container according to the present embodiment. FIG. 5D is a schematic lower perspective view showing the container main body of the substrate storage container according to the present embodiment. FIG. 6A is a schematic perspective view showing a container body of a first modified example of the substrate storage container according to the present embodiment. FIG. 6B is a schematic front view showing a container body of a first modification of the substrate storage container according to the present embodiment. FIG. 6C is a schematic cross-sectional view showing a container body of a first modified example of the substrate storage container according to the present embodiment.

  FIG. 7A is a schematic perspective view showing a container body of a second modification of the substrate storage container according to the present embodiment. FIG. 7B is a schematic front view showing a container body of a second modification of the substrate storage container according to the present embodiment. FIG. 7C is a schematic cross-sectional view showing a container body of a second modification of the substrate storage container according to the present embodiment. FIG. 8A is a schematic perspective view showing a container body of a third modification of the substrate storage container according to the present embodiment. FIG. 8B is a schematic cross-sectional view showing a container body of a third modification of the substrate storage container according to the present embodiment.

  Here, for convenience of explanation, a direction (left direction in FIG. 2C) from the container body 2 to the lid 3 described later is defined as the front direction D11, and the opposite direction is defined as the rear direction D12. It is defined as D1. Further, a direction (upward direction in FIG. 2C) from the lower wall 24 to the upper wall 23, which will be described later, is defined as an upward direction D21, the opposite direction is defined as a downward direction D22, and these are defined as a vertical direction D2. . Also, a direction (left direction in FIG. 2A) from the second side wall 26 to be described later to the first side wall 25 is defined as the left direction D31, the opposite direction is defined as the right direction D32, and these are defined as the left-right direction D3. Define.

  The substrate W (see FIG. 3B, etc.) stored in the substrate storage container 1 is a disk-shaped silicon wafer, glass wafer, sapphire wafer, etc., and is a thin one used in the industry. The substrate W in this embodiment is a silicon wafer having a diameter of 450 mm.

  As shown in FIGS. 1 to 4, the substrate storage container 1 includes a container body 2, a lid body 3, a seal member 4, a substrate support plate-like portion 5, and a front retainer 7 (see FIG. 2D). doing.

  The container body 2 has a cylindrical wall portion 20 in which a container body opening 21 is formed at one end and the other end is closed. A substrate storage space 27 is formed in the container body 2. The substrate storage space 27 (see FIG. 3A and the like) is formed so as to be surrounded by the wall portion 20. The substrate support plate-shaped portion 5 is disposed in a portion of the wall portion 20 that forms the substrate storage space 27. The substrate storage space 27 can store a plurality of substrates W as shown in FIG. 3B.

  The substrate support plate-like portions 5 are provided on the wall portion 20 so as to form a pair in the substrate storage space 27. When the container body opening 21 is not closed by the lid 3, the substrate support plate-like portion 5 is arranged in such a manner that adjacent substrates W are separated from each other at a predetermined interval and arranged in parallel. The part can be supported. A back side substrate support portion 6 is provided on the back side of the substrate support plate-like portion 5. The back-side substrate support 6 can support the rear portions of the edges of the plurality of substrates W when the container body opening 21 is closed by the lid 3.

  The lid 3 is detachable from the container body opening 21 and can close the container body opening 21. The front retainer 7 is provided in a portion of the lid 3 that faces the substrate storage space 27 when the container main body opening 21 is closed by the lid 3. The front retainer 7 is disposed so as to make a pair with the back substrate support 6.

  The front retainer 7 can support the front portions of the edges of the plurality of substrates W when the container main body opening 21 is closed by the lid 3. When the container main body opening 21 is closed by the lid 3, the front retainer 7 supports a plurality of substrates W in cooperation with the back substrate support 6, thereby allowing adjacent substrates W to be predetermined. A plurality of substrates W are held in a state where they are spaced apart and arranged in parallel. Hereinafter, each part will be described in detail.

  The wall portion 20 of the container body 2 includes a back wall 22, an upper wall 23, a lower wall 24, a first side wall 25, and a second side wall 26. The back wall 22, the upper wall 23, the lower wall 24, the first side wall 25, and the second side wall 26 are made of a plastic material or the like. In the first embodiment, they are integrally formed of polycarbonate.

  As shown in FIG. 3A and the like, the first side wall 25 and the second side wall 26 face each other, and the upper wall 23 and the lower wall 24 face each other. The rear end of the upper wall 23, the rear end of the lower wall 24, the rear end of the first side wall 25, and the rear end of the second side wall 26 are all connected to the back wall 22. The front end of the upper wall 23, the front end of the lower wall 24, the front end of the first side wall 25, and the front end of the second side wall 26 have a positional relationship facing the back wall 22 and have a substantially rectangular shape. Opening peripheral edge portion 28 is formed.

  The opening peripheral edge 28 is provided at one end of the container main body 2, and the back wall 22 is located at the other end of the container main body 2. The outer shape of the container body 2 formed by the outer surface of the wall portion 20 is box-shaped. The inner surface of the wall portion 20, that is, the inner surface of the back wall 22, the inner surface of the upper wall 23, the inner surface of the lower wall 24, the inner surface of the first side wall 25, and the inner surface of the second side wall 26 are surrounded by these. 27 is formed. The container main body opening 21 formed in the opening peripheral edge portion 28 is surrounded by the wall portion 20 and communicates with the substrate storage space 27 formed in the container main body 2. As will be described later, a maximum of 25 substrates W can be stored in the substrate storage space 27.

  As shown in FIG. 3A, the latch engaging recesses 231A and 231B that are recessed toward the outside of the substrate storage space 27 are portions of the upper wall 23 and the lower wall 24 and in the vicinity of the opening peripheral edge portion 28. , 241A, 241B are formed. A total of four latch engaging recesses 231A, 231B, 241A, 241B are formed near the left and right ends of the upper wall 23 and the lower wall 24, one each.

As shown in FIG. 1, the upper wall 23 has a plate shape with a substantially uniform thickness. The upper wall 23 has a central low part 232 and an inwardly directed end part 233.
The central lower portion 232 is a part of the upper wall 23 and is a central portion in the left-right direction D3, that is, a direction in which the upper long side of the rectangular container body opening 21 extends (hereinafter referred to as “opening width direction”). ) And is in a position lowered in the downward direction D22. That is, the central low portion 232 is configured by a central portion when the upper wall 23 is divided into approximately three equal parts in the left-right direction D3. The width of the container body 2 in the left-right direction D3 is about 500 mm, whereas the width of the central low portion 232 in the left-right direction D3 is about 250 mm. A front end portion of the central low portion 232 constitutes a part of the opening peripheral portion 28 to form the container body opening 21. A rear end portion of the central low portion 232 is connected to the back wall 22.

Accordingly, the inner center lower portion 232A (see FIGS. 5A and 5B), which is the inner surface of the center lower portion 232, is about 2 mm to 10 mm from the both ends 233C and 233C (see FIGS. 5A and 5B) of the inner surface of the upper wall 23. It is located inward of the storage space 27, and in this embodiment, it is located inward of the substrate storage space 27 by about 5 mm. Further, the outer center lower portion 232B, which is the outer surface of the center lower portion 232, is located inward of the substrate storage space 27 by about 2 mm to 10 mm from both ends 233D and 233D of the outer surface of the upper wall 23. Then, it is located inward of the substrate storage space 27 by about 5 mm.
Further, the inner surface center low portion 232A and the outer surface center lower portion 232B have a rectangular shape in which the positional relations coincide with each other, and one side of the rectangular shape constitutes a part of the opening peripheral edge portion 28 and opens the container body. Part 21 is formed.

Further, the inwardly directed end portion 233 is located on both ends of the upper wall 23 on both sides of the central low portion 232 in the left-right direction D3, that is, the central portion of the upper wall 23 in the opening width direction, that is, In the left-right direction D <b> 3, the substrate is inclined inward of the substrate storage space 27 as it approaches the central low part 232. Accordingly, the inner directing inner surface end 233A that is the inner surface of the inner directing end 233 and the inner directing outer surface end 233B that is the outer surface of the inner directing end 233 are also low in the center in the opening width direction. As it approaches the part 232, it inclines toward the inside of the substrate storage space 27.
Therefore, as shown in FIG. 5B, the portion 281 of the opening peripheral edge portion 28 constituted by the front end portion of the upper wall 23 as viewed from the front, and the portion 281 with which a seal member of the lid 3 to be described later contacts, The portion 232 has a shape protruding downward so that it protrudes downward most.

As shown in FIG. 4, a flange fixing portion 234 and ribs 235 </ b> A and 235 </ b> B are provided integrally with the upper wall 23 on the outer surface of the upper wall 23.
The flange fixing portion 234 is disposed at the center portion of the upper wall 23. As shown in FIG. 1, a top flange 236 as a locked portion is fixed to the flange fixing portion 234. Therefore, the top flange 236 is disposed at the center of the upper wall 23. As shown in FIG. 2C, the top flange 236 includes a fixed portion 236A fixed to the flange fixing portion 234, and a flange portion 236B connected to the fixed portion 236A and facing the outer surface of the upper wall 23. Yes. The top flange 236 is hung on an arm (not shown) of these machines as a lifting member when the substrate storage container 1 is suspended in an AMHS (automatic wafer transfer system), PGV (wafer substrate transfer carriage) or the like. Thereby, the substrate storage container 1 is suspended from the arm.

  The ribs 235A and 235B are provided on the inwardly directed outer surface end portion 233B and the outer surface center low portion 232B, respectively. Three ribs 235A provided on the inwardly directed outer surface end portion 233B extend from the left end of the upper wall 23 in the left-right direction D3 toward the flange fixing portion 234 diagonally rightward and rearward. Three wires extend in the direction approaching the flange fixing portion 234 from the right end in the left-right direction D3 diagonally to the left. These ribs 235A gradually increase in height in the vertical direction D2 as they approach the flange fixing portion 234 from the left end and right end in the left-right direction D3 of the upper wall 23.

  Further, five ribs 235 </ b> B provided on the outer center lower portion 232 </ b> B extend from the front end of the upper wall 23 toward the flange fixing portion 234 toward the rear toward the flange fixing portion 234. Therefore, the outer surface of the upper wall 23 in plan view has these ribs 235A and 235B extending radially around the flange fixing portion 234 as the locked portion. These ribs 235B have a constant height in the vertical direction D2, and have the same height as that of the highest portion, which is the portion of the rib 235A provided on the inwardly directed outer surface end 233B. doing.

  As shown in FIG. 3A, the substrate support plate-like portions 5 are provided in the first side wall 25 and the second side wall 26, respectively, and are arranged in the substrate storage space 27 so as to form a pair in the left-right direction D3. . Specifically, as illustrated in FIG. 2D, the substrate support plate-like portion 5 includes a plate portion 51 and a plate portion support portion 52. The plate portion 51 and the plate portion support portion 52 are configured by integrally molding resin. The plate part 51 has a plate-like arc shape. A total of 50 plate portions 51 are provided on each of the first side wall 25 and the second side wall 26, each including 25 plates. Adjacent plate portions 51 are arranged in a parallel positional relationship apart from each other at intervals of 10 mm to 12 mm in the vertical direction D2. Note that the same shape as the plate portion 51 is also disposed above the uppermost plate portion 51, but this is the substrate W that is positioned at the uppermost position and inserted into the substrate storage space 27. On the other hand, the member serves as a guide for the insertion.

  Further, the 25 plate portions 51 provided on the first side wall 25 and the 25 plate portions 51 provided on the second side wall 26 have a positional relationship facing each other in the left-right direction D3. Further, the 50 plate portions 51 and the members serving as two guides having substantially the same shape as the plate portion 51 have a positional relationship parallel to the inner surface of the lower wall 24. As shown in FIG. 2D, a convex portion 511 is provided on the upper surface of the plate portion 51. The board | substrate W supported by the board part 51 contacts only the protrusion end of the convex part 511, and does not contact the board part 51 by a surface.

As shown in FIG. 2D, the plate portion support portion 52 is configured by a member extending in the vertical direction D2. The 25 plate portions 51 provided on the first side wall 25 are connected to a plate portion support portion 52 provided on the first side wall 25 side. Similarly, the 25 plate portions 51 provided on the second side wall 26 are connected to a plate portion support portion 52 provided on the second side wall 26 side. The substrate support plate-like portion 5 is fixed to the first side wall 25 and the second side wall 26, respectively.
With the substrate support plate-like portion 5 having such a configuration, the plurality of substrates W in the state where the adjacent substrates W among the plurality of substrates W are separated from each other at a predetermined interval and in parallel with each other. Can be supported.

As shown in FIG. 2D, the back substrate support 6 has a wall substrate support 60. The wall portion substrate support portion 60 is formed integrally with the plate portion 51 at the rear end portion of the plate portion 51 of the substrate support plate-like portion 5.
The back substrate support 6 is separate from the substrate support plate 5, that is, the wall substrate support 60 is formed separately from the plate 51 of the substrate support 5. Also good.

  The wall portion substrate support portions 60 are provided in a number corresponding to each substrate W that can be stored in the substrate storage space 27, specifically, 25 pieces. The wall part board | substrate support part 60 provided in the 1st side wall 25 and the 2nd side wall 26 has the positional relationship which makes a pair with the front retainer 7 mentioned later in the front-back direction D1. As described later, the substrate W is stored in the substrate storage space 27 and the lid 3 is closed, so that the wall substrate support 60 holds the edge of the edge of the substrate W.

  As shown in FIG. 3A, the lid 3 has a substantially rectangular shape that substantially matches the shape of the opening peripheral edge 28 of the container body 2. The lid 3 can be attached to and detached from the opening peripheral edge 28 of the container main body 2, and the lid 3 can close the container main body opening 21 by attaching the lid 3 to the opening peripheral edge 28. . A seal member fitting groove is formed along the outer peripheral edge of the lid 3 at the outer peripheral edge of the lid 3. In the seal member fitting groove, as shown in FIG. 3A, various thermoplastic elastomers such as POE (polyoxyethylene) and PEE that can be elastically deformed, polyester, and polyolefin, fluororubber, and silicon rubber are used. An annular seal member 4 such as is fitted. The seal member 4 is arranged so as to go around the outer peripheral edge of the lid 3.

  When the lid 3 is mounted on the opening peripheral edge 28, the outer peripheral edge of the lid 3 abuts on the inner peripheral edge of the opening peripheral edge 28 of the container body 2 via the seal member 4. Thereby, the seal member 4 is sandwiched between the outer peripheral edge portion of the lid body 3 and the inner peripheral edge portion of the opening peripheral edge portion 28 and elastically deforms, and the lid body 3 closes the container body opening portion 21 in a sealed state. By removing the lid 3 from the opening peripheral edge 28, the substrate W can be taken into and out of the substrate storage space 27 in the container body 2.

  The lid body 3 is provided with a latch mechanism. The latch mechanism is provided in the vicinity of both left and right ends of the lid 3, and as shown in FIGS. 3A and 3B, two upper latch portions 32A that can project from the upper side of the lid 3 in the upward direction D21, and the lid And two lower latch portions (not shown) that can project in the downward direction D22 from the lower side of the body 3. The two upper latch portions 32 </ b> A are disposed in the vicinity of the left and right ends of the upper side of the lid 3, and the two lower latch portions are disposed in the vicinity of the left and right ends of the lower side of the lid 3.

  An operation unit 33 is provided on the outer surface of the lid 3. By operating the operation portion 33 from the front side of the lid 3, the upper latch portion 32A and the lower latch portion (not shown) can be protruded from the upper and lower sides of the lid 3, and from the upper and lower sides. It can be made not to protrude. The upper latch portion 32A protrudes from the upper side of the lid body 3 in the upward direction D21 and engages with the latch engagement recesses 231A and 231B of the container body 2, and the lower latch portion extends from the lower side of the lid body 3 in the downward direction D22. The lid 3 is fixed to the opening peripheral edge 28 of the container body 2 by projecting to the latch engagement recesses 241A and 241B of the container body 2.

  On the inner side of the lid 3, a recess (not shown) that is recessed outward from the substrate storage space 27 is formed. The recess is formed at the center position of the lid 3 in the left-right direction D3. On the inner surface of the lid 3 forming the recess, front retainer locking portions (not shown) are provided in pairs in the left-right direction D3.

  A front retainer 7 is provided in the recess (not shown). As shown in FIG. 2D, the front retainer 7 has a pair of vertical frames 71 extending in parallel with the up-down direction D2, front retainer legs 72, and a front retainer substrate receiving portion 73. The pair of vertical frame bodies 71, the front retainer legs 72, and the front retainer board receiving portion 73 are integrally formed of resin and connected to each other.

  Two front retainer substrate receiving portions 73 are arranged in pairs so as to form a pair spaced apart at a predetermined interval in the left-right direction D3. The front retainer substrate receiving portions 73 arranged in pairs so as to form a pair in this way are provided in a state where 25 pairs are juxtaposed in the vertical direction D2. As will be described later, when the substrate W is stored in the substrate storage space 27 and the lid 3 is closed, the front retainer substrate receiving portion 73 holds the edge of the edge of the substrate W and supports it.

  The front frame 7 is fixed to the lid 3 by fixing the paired vertical frame 71 to the lid 3. The front retainer 7 is removed from the lid 3 by releasing the fixing of the vertical frame 71 to the lid 3.

According to the substrate storage container 1 having the above-described configuration according to the present embodiment, the following effects can be obtained.
The outer surface of the upper wall 23 is an inwardly directed outer surface end portion 233B positioned at both end portions in the opening width direction from one side wall to the other side wall, that is, in the left-right direction D3, and a central portion in the opening width direction Is positioned in the inwardly directed outer surface end portion 233B toward the inside of the substrate storage space 27 and the central portion in the opening width direction, and closer to the inward side of the substrate storage space 27 than both ends of the outer surface of the upper wall 23. And an outer surface central low part 232B.

  For this reason, the distance from the upper surface of the upper wall 23 to the upper limit based on SEMI (Semiconductor Equipment and Materials International) standard can be secured longer. As a result, when ribs 235A and 235B for increasing the rigidity of the container body 2 are provided between the upper surface of the upper wall 23 and the upper limit based on the SEMI standard, the upper limit based on the SEMI standard is determined from the upper surface of the upper wall 23. The height of the ribs 235A and 235B toward the position can be secured higher. Thereby, the rigidity of the container main body 2 can be made higher.

Further, the inner surface of the upper wall 23 is an inwardly directed inner surface end portion 233A located at both end portions in the opening width direction, and goes toward the inside of the substrate storage space 27 as it approaches the central portion in the opening width direction. It has an inwardly directed inner surface end portion 233A and an inner surface center low portion 232A that is located in the center portion in the opening width direction and is located closer to the inside of the substrate storage space 27 than both ends 233C of the inner surface of the upper wall 23. .
For this reason, even when the container body 2 is lifted by the lifting member, even if it is deformed so that the upper wall 23 is pulled upward, one end of the upper wall 23 that forms the container body opening 21 is provided. It is possible to prevent the portion 281 from facing the edge of the lid 3, and the seal member of the lid 3 can always contact one end portion of the upper wall 23. Thereby, the sealing performance between the part 281 of the one end part of the upper wall 23 which forms the container main body opening part 21, and the edge part of the cover body 3 can be maintained.

  Further, the outer surface center low portion 232B and the inner surface center lower portion 232A have a rectangular shape in which the positional relations coincide with each other, and one side of the rectangular shape is the container body opening 21 formed by one end portion of the upper wall 23. Part of it. Therefore, the upper wall 23 is not configured to be thicker than necessary, and has an inwardly directed outer surface end portion 233B, an outer surface center low portion 232B, an inwardly directed inner surface end portion 233A, and an inner surface center low portion 232A. Can do. Thereby, the material which comprises the upper wall 23 can be saved, and the weight reduction of the container main body 2 can be achieved.

  Further, the inwardly directed outer surface end portion 233B has a rib 235A that extends in a direction approaching the locked portion (top flange 236). Further, the outer surface of the upper wall 23 has ribs 235A and 235B extending radially with the locked portion as the center. For this reason, coupled with the fact that the height of the ribs 235A and 235B can be increased at the inwardly directed outer surface end portion 233B and the outer surface center low portion 232B, the rigidity of the container body 2 can be further increased. Moreover, since it has the flange part 236B which opposes the outer surface of the upper wall 23, the flange part 236B can be easily latched by the lifting member.

The present invention is not limited to the above-described embodiments, and can be modified within the technical scope described in the claims.
For example, the shape of the container main body and the lid, the number of the substrates W that can be stored in the container main body, and the dimensions thereof are the shapes of the container main body 2 and the lid 3 in the present embodiment, and the substrate W that can be stored in the container main body 2. It is not limited to the number of sheets and dimensions.

  For example, the shape and configuration of the inwardly directed outer surface end, the outer surface center low portion, the inwardly directed inner surface end portion, and the inner surface center low portion are not limited to the shape and configuration of the present embodiment. For example, although the center low part 232 was comprised by the center part when the upper wall 23 is divided into about 3 equally in the left-right direction D3, it is not limited to this structure.

  For example, as shown in FIGS. 6A, 6B, and 6C, the central lower portion 232H of the container body 2H is not rectangular, and has a lower bottom at the front end portion of the upper wall 23H, and the rear end portion of the upper wall 23H. It may have a trapezoidal shape having a top bottom and a height in the front-rear direction D1. Further, as shown in FIGS. 7A, 7B, and 7C, the upper wall 23I gradually increases from both ends of the upper wall 23 in the left and right direction D3 of the upper wall of the container body 2I toward the center of the upper wall 23I in the left and right direction D3. You may have the curved surface which goes down toward the downward direction D22. In this case, the part of the upper wall 23I that is the part that has been lowered most downward D22, and the central part of the upper wall 23I in the left-right direction D3 is the central low part 232I, and part of the upper wall 23I. And the part of the both sides of the center low part 232I in the left-right direction D3 is the inwardly directed end part 233I.

  In addition, for example, the outer surface of the central low portion 232 and the inner surface of the central low portion 232 have a rectangular shape with the same positional relationship, but are not limited to this configuration. For example, the rectangles do not have to have a positional relationship with each other.

  In addition, for example, a portion corresponding to at least one end portion of the upper wall on the inner surface of the upper wall, that is, a portion of the peripheral edge of the opening and a portion constituted by the front end portion of the upper wall, or a portion in the vicinity thereof is inward. You may have a directional inner surface edge part and an inner surface center low part.

  Further, in the present embodiment, the inner surface of the upper wall 23 has the inwardly directed inner surface end portion 233A and the inner surface central low portion 232A, but the inner surface of the upper wall is a flat surface that does not have these. The outer surface of the upper wall may have an inwardly directed outer surface end portion 233B and an outer surface center low portion 232B. In addition, even when the inner surface of the upper wall is configured as a flat surface in this way, the outer center lower portion 232B may be rectangular or non-rectangular.

  Further, the shape of the rib is not limited to the shape of the present embodiment. For example, as shown in FIGS. 8A and 8B, the ribs 235J provided on the inwardly directed outer surface end portion 233B extend in parallel in the left-right direction D3 and have a parallel positional relationship with each other, and the outer surface central low portion 232B The provided ribs 235K may extend in parallel to the front-rear direction D1 and have a parallel relationship with each other.

  Moreover, although the to-be-latched part has the flange part 236B, it is not limited to this structure. The to-be-latched part should just have the structure latched by the lifting member.

  Further, the adjacent plate portions 51 of the substrate support plate-like portion 5 are arranged in a parallel positional relationship apart from each other, but may not be in a strictly parallel positional relationship, and may be in parallel.

DESCRIPTION OF SYMBOLS 1 Substrate storage container 2 Container main body 3 Lid 20 Wall part 21 Container main body opening part 22 Back wall 23 Upper wall 24 Lower wall 25 1st side wall 26 2nd side wall 27 Substrate storage space 28 Opening peripheral part 232A Inner surface center low part 232B Outer surface Center low part 235A, 235B Rib 236B Flange

Claims (6)

A cylindrical wall portion having a container body opening formed at one end and the other end closed, having a back wall, an upper wall, a lower wall, and a pair of side walls, one end of the upper wall, An inner wall of the upper wall; an inner surface of the lower wall; an inner surface of the side wall; and an inner surface of the back wall. A container main body in which a plurality of substrates can be stored and a substrate storage space communicating with the container main body opening is formed;
A lid that can be attached to and detached from the container body opening, and can close the container body opening,
The upper wall is a locked portion disposed in a central portion of the upper wall, and has a locked portion that is locked to a lifting member that can lift the container body.
The outer surface of the upper wall is an inwardly directed outer surface end located at both end portions in the opening width direction from the one side wall to the other side wall, and approaches the central portion in the opening width direction. An inwardly directed outer surface end facing inward of the substrate storage space, and an outer surface center positioned at the central portion in the opening width direction and closer to the inward of the substrate storage space than both ends of the outer surface of the upper wall A substrate storage container having a lower portion.   The portion corresponding to at least the one end portion of the upper wall on the inner surface of the upper wall is an inwardly directed inner surface end portion located at both end portions in the opening width direction, and a central portion in the opening width direction. As it gets closer, it is located at the inwardly directed inner surface end toward the inside of the substrate storage space and the central portion in the opening width direction, and closer to the inward of the substrate storage space than both ends of the inner surface of the upper wall. The substrate storage container according to claim 1, further comprising an inner surface center low portion located.   The outer surface center low portion and the inner surface center lower portion have a rectangular shape that is in the same positional relationship, and one side of the rectangular shape is a part of one end portion of the upper wall that forms the container body opening The board | substrate storage container of Claim 2 which comprises these.   The substrate storage container according to claim 1, wherein the inwardly directed outer surface end has a rib extending in a direction approaching the locked portion.   The substrate storage container according to any one of claims 1 to 3, wherein an outer surface of the upper wall has ribs extending radially around the locked portion.   The substrate storage container according to claim 1, wherein the locked portion has a flange portion facing the outer surface of the upper wall.

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