JP7210835B2 - Thin plate storage container - Google Patents

Description

TECHNICAL FIELD The present disclosure relates to thin plate storage containers.

2. Description of the Related Art A thin plate storage container is known that can store a plurality of types of thin plates with different diameters while using the same support jig.

JP 2013-182938 A

However, with the conventional technology described above, when trying to accommodate thin plates of new diameters, it is necessary to change the design of the support jig itself, making it difficult to flexibly accommodate thin plates of various diameters. .

Therefore, in one aspect, an object of the present invention is to enable flexible handling of thin plates of various diameters.

On one side, a container body having an opening formed on the front surface and capable of accommodating a thin plate having a circular outer shape;
a plurality of support jigs that can be accommodated in the container body and on which the thin plate can be placed;
A thin plate storage container is provided that includes a regulating member that can be attached to each of the support jigs in a detachable manner from the support jig and that can abut radially against the outer peripheral edge of the thin plate having a predetermined radius. .

In one aspect, according to the present invention, it is possible to flexibly deal with thin plates of various diameters.

1 is a perspective view schematically showing the appearance of a thin plate storage container according to an embodiment; FIG. It is a bottom view which shows roughly the lower side of the thin-plate storage container which concerns on a present Example. FIG. 3 is a perspective view showing the thin plate storage container with the lid removed. FIG. 4 is a cross-sectional view of the thin plate storage container when cut along a plane within a horizontal plane; FIG. 3 is a perspective view of a support jig in a single item state; FIG. 4 is a perspective view of a support jig to which an offset member is attached; FIG. 4 is a plan view of one offset member in a single item state; FIG. 4 is a perspective view of a single offset member viewed from below; FIG. 11 is an explanatory diagram of an offset member according to another embodiment; FIG. 11 is an explanatory diagram of an offset member according to another embodiment; FIG. 11 is an explanatory diagram of an offset member according to another embodiment;

Each embodiment will be described in detail below with reference to the accompanying drawings.

In the following description, the left-right direction (width direction) of the thin plate storage container 1 is referred to as the X direction, the front-rear direction of the thin plate storage container 1 is referred to as the Y direction, and the up-down direction (height direction) of the thin plate storage container 1 is referred to as the Z direction. The up/down, front/rear, left/right, and inside/outside directions of the storage container 1 are simply referred to as up/down, front/rear, left/right, and inside/outside directions. In addition, unless otherwise specified, the “radial direction” refers to the radial direction with respect to the center of the circular thin plate stored in the thin plate storage container 1 . As will be described later, the thin plates W that can be stored in the thin plate storage container 1 have various diameters. Therefore, when thin plates W with different diameters are stored, the centers of the thin plates W slightly change. Such changes do not materially affect the meaning of the term "radial" and shall be disregarded with regard to the meaning of the term "radial". In addition, the same reference numerals are given to the same or corresponding parts in all the drawings.

FIG. 1 is a perspective view schematically showing the appearance of a thin plate storage container 1 according to this embodiment. FIG. 2 is a bottom view schematically showing the lower side of the thin plate storage container 1 according to this embodiment. As shown in FIGS. 1 and 2 , the thin plate storage container 1 according to the embodiment includes a container body 3 and a lid 4 .

The container main body 3 accommodates a thin plate W having a diameter of 150 mm to 550 mm and a thickness of 0.01 mm to 4.0 mm. The thin plate W has a circular outer shape. The thin plate W may be a solid plate (disk-shaped plate) up to the center side, or a hollow plate (ring-shaped plate) on the center side. The thin plate W may be made of any material, such as silicon, glass, alumina, or ceramics. For example, the thin plate W may be a semiconductor wafer, mask glass, or the like. In this case, the thin plate W may be an object to be processed, a thin plate during processing, or a thin plate after processing. Alternatively, the thin plate W functions as a jig used in semiconductor manufacturing equipment, and may be, for example, a ring-shaped plate made of silicon.

The container main body 3 is a front-open type container having an opening 3a formed on the front side, which is the front. 3e and a back wall 3f facing the opening 3a. A bottom plate 7 for positioning and fixing the container body 3 to the processing device is attached to the lower surface of the container body 3. The bottom plate 7 is used to position the container body 3 to the processing device. A positioning member 8 is provided for this purpose.

The lid 4 is fitted to the opening 3 a of the container body 3 to seal the container body 3 . A sealing member is attached to the outer peripheral surface of the lid 4 to seal the opening 3a of the container body 3, and the inner surface of the lid 4 separates the thin plates W stored in the container body 3. A holding member 5 made of an elastic material is attached to hold it. Further, the lid 4 incorporates a locking mechanism 9 for holding the lid 4 in a state of being fitted to the opening 3a.

FIG. 3 is a perspective view showing the thin plate storage container 1 with the lid 4 removed. FIG. 4 is a cross-sectional view of the thin plate storage container 1 when cut along a plane within the horizontal plane, and is a cross-sectional view taken along line IV-IV shown in FIG.

As shown in FIGS. 3 and 4, the support jig 10 on which the thin plate W is placed is stacked on the container body 3, and the support jig 11 is accommodated in the container body 3. A fixing member 12 fixed to the main body 3 and an offset member 70 (an example of a regulating member) for regulating the position of the thin plate W placed on the support jig 10 are stored.

5A is a perspective view of one support jig 10 in a single product state, and FIG. 5B is a perspective view of the support jig 10 to which an offset member 70 is attached. 6A is a plan view of a single offset member 70, and FIG. 6B is a perspective view of the single offset member 70 viewed from below.

As shown in FIGS. 3 to 5B, the support jig 10 constituting the support jig 11 is formed in a plate shape that opens toward the opening 3a of the container body 3. As shown in FIG. That is, the support jig 10 is a U-shaped plate member having an opening 14 that opens toward the opening 3 a of the container body 3 , and the thin plate W is formed on the inner peripheral edge surrounding at least the opening 14 . A U-shaped mounting portion 15 to be mounted is formed. The opening 14 allows the hand (end effector) of the transfer robot to move up and down in the Z direction when the thin plate W is placed on the placing portion 15 or when the thin plate W is removed from the placing portion 15 . It is a space to At least a portion of the inner edge of the opening 14 is located on the inner diameter side of the thin plate W placed on the placing portion 15 .

The support jig 10 also has a fixing member insertion hole 16 into which the fixing member 12 is inserted, a fitting hole 17 into which the offset member 70 is fitted, and a positioning hole for positioning the support jig 10 with respect to the container body 3 . A cutout 18 is formed.

The fixing member insertion hole 16 is a through hole into which the fixing member 12 is inserted through the support jig 10 vertically. A total of five fixing member insertion holes 16 are formed in the outer peripheral portion of the support jig 10 . Two holes are formed near each of the left and right side walls 3 b and 3 c of the container body 3 . One is formed near the wall 3f. In addition, the fixing member insertion hole 16 is formed outside the mounting portion 15 in order to prevent interference with the thin plate W. As shown in FIG.

The fitting hole 17 is a hole into which the offset member 70 is fitted. Two fitting holes 17 are provided on each side. The position, number, etc. of the fitting holes 17 are arbitrary. However, two or more fitting holes 17 are preferably provided for one offset member 70 in order to prevent the offset member 70 from rotating in the horizontal plane.

Of the two fitting holes 17 provided on each side, one on each side may function for the thin plate W with a diameter of 330 mm. In this case, the fitting hole 17 is provided in such a manner that a rod-shaped position restricting body (not shown) penetrates. Such a position regulating body is disclosed in Patent Document 1, and such a position regulating body can be used.

The positioning notch 18 is a notch formed by cutting the support jig 10 into an elongated U shape. A pair of positioning notches 18 are formed at the rear end portion of the container body 3 on the back wall 3f side, and extend in the Y direction so as to be parallel to each other. On the other hand, on the back wall 3f or the bottom wall 3d of the container body 3, positioning ribs 39 (see FIG. 4) extending in the longitudinal direction of the container body 3 are formed at positions corresponding to the pair of positioning notches 18. there is By inserting the positioning rib 39 into the positioning notch 18, the support jig 10 is positioned with respect to the container body 3. As shown in FIG.

The positioning notch 18 may be inserted into at least one positioning notch 18 of the support jig 10 . Therefore, the positioning notch 18 may be formed only at a height corresponding to the positioning notch 18 of one support jig 10 , or the positioning notch 18 of a plurality of support jigs 10 It may be formed at a corresponding height, or may be formed at a height corresponding to the positioning cutouts 18 of all the support jigs 10 . In addition, in the case of forming only the height corresponding to the positioning notch 18 of one support jig 10, for example, the height corresponding to the positioning notch 18 of the support jig 10 arranged in the bottom layer It can be formed to

As shown in FIGS. 5A and 5B, the offset member 70 can be attached to each support jig 10 in a detachable manner from the support jig 10 . That is, the relationship between the offset member 70 and the support jig 10 is shown in FIG. 5A, in which the offset member 70 is removed from the support jig 10, and in FIG. 5B, in which the offset member 70 is attached to the support jig 10. It is possible to change between states.

Offset member 70 may be formed of any material. For example, the offset member 70 may be made of the same material as the support jig 10 . For example, the support jig 10 and the offset member 70 are made of thermoplastic resin such as polyacetal, polycarbonate, polybutylene terephthalate, polybutylene naphthalate, polyetheretherketone, polyetherimide, cycloolefin polymer, polyester, polystyrene, It can be formed from a thermoplastic elastomer such as polyolefin. Additives such as carbon fiber, carbon black, and carbon nanotube can be appropriately added to these resins in order to impart electrical conductivity. In addition, glass fiber may be added to improve rigidity, and slidability can be improved by adding mica, fluororesin, or the like.

Two offset members 70 are provided for one support jig 10 . That is, the offset members 70 are provided on both left and right sides of one support jig 10 . The left offset member 70L and the right offset member 70R have bilaterally symmetrical configurations, and hereinafter, unless otherwise specified, the left and right offset members 70L and 70R are referred to as the offset member 70 without distinction. In addition, in a modification, the left and right offset members 70L and 70R may be implemented as a single offset member.

The offset member 70 can contact the outer peripheral edge of the thin plate W in the radial direction. Specifically, as shown in FIG. 4, when the offset member 70 is attached to the support jig 10, the offset member 70 radially contacts the outer peripheral edge of the thin plate W placed on the support jig 10. .

6A and 6B, offset member 70 will now be described in greater detail.

The offset member 70 includes a base portion 70a, a front projection portion 71, a rear projection portion 72 (an example of a projection portion), and a fitting portion 74, as shown in FIGS. 6A and 6B.

The base portion 70 a extends along the surface (horizontal plane) of the support jig 10 . In this embodiment, when the offset member 70 is attached to the support jig 10 , the lower surface of the base portion 70 a is in surface contact with the upper surface of the support jig 10 . The base portion 70a preferably extends to a region that does not protrude from the support jig 10 when viewed from above. Also, the base 70 a has a notch 701 for avoiding the fixing member 12 .

The front protrusion 71 has the same shape as the rear protrusion 72 described below, but is slightly offset outward with respect to the center of the thin plate W relative to the rear protrusion 72 . The front protruding portion 71 is provided to prevent slight displacement (lateral displacement) of the thin plate W on the support jig 10 in the horizontal plane. Note that, in a modified example, the front protrusion 71 may be omitted.

The front projecting portion 71 has a predetermined height H1 (see FIG. 5B) with respect to the surface of the mounting portion 15 of the support jig 10 when the offset member 70 is attached to the support jig 10 . The predetermined height H1 may be the same as the predetermined height H2 for the rear protrusion 72, which will be described later. That is, it is significantly larger than the thickness of the thin plate W and significantly larger than the thickness of the base portion 70a. Accordingly, it is possible to effectively prevent the thin plate W from riding over the front protruding portion 71 and moving radially outward. That is, the function of preventing lateral shift by the front projection 71 can be exhibited more reliably.

The rear protrusion 72 protrudes upward from the upper side of the base 70a. With the offset member 70 attached to the support jig 10 , the rear protruding portion 72 radially contacts the outer peripheral edge of the thin plate W placed on the support jig 10 .

In this embodiment, the rear protrusion 72 is in the form of a curved wall. The curved form of the rear protruding part 72 is such that the curved center is outside the center of the thin plate W when viewed from above. Thereby, the rear protruding portion 72 can contact the thin plate W at a point in the radial direction.

As shown in FIG. 5B, the rear protruding portion 72 is positioned on the surface of the mounting portion 15 of the support jig 10 when the offset member 70 is attached to the support jig 10 . As a result, when the rear protruding portion 72 contacts the thin plate W placed on the surface of the mounting portion 15 of the support jig 10, the rear protruding portion 72 contacts the portion of the thin plate W that is not bent by gravity. can.

Here, since the offset members 70 are provided on the left and right as described above, the thin plate W is brought into radial contact with the left and right rear projections 72 at two points. Further, the thin plate W is radially abutted on the front side by the holding member 5 of the lid 4 . As a result, the thin plate W is abutted at three or more different points along the circumferential direction, so that displacement in the radial direction is appropriately restricted. Hereinafter, the function of the rear protrusion 72 (that is, the function of regulating the position of the thin plate W in the radial direction by coming into contact with the radially outer edge of the thin plate W) will be referred to as "regulating the radial position of the thin plate W. Also called function.

In other words, when viewed from above, the diameter of a circle passing through the positions of the two points of the left and right rear projections 72 and the position of the contact point of the holding member 5 is adjusted appropriately by the support jig 10 to which the offset member 70 is attached. corresponds to the diameter of the thin plate W that can be supported by Therefore, by setting the positions of the left and right rear projections 72 according to the diameter of the thin plate W to be supported, the thin plate W to be supported can be supported appropriately. When there are a plurality of types of thin plates W to be supported and different diameters, a plurality of types of offset members 70 having different positions of the rear protrusions 72 for each diameter can be prepared to support thin plates W with various diameters. .

In addition, in this embodiment, the offset member 70 is configured, as an example, so as to correspond to a thin plate W having a diameter of 310 mm. Further, as described above, the offset member 70 has a second type configured to correspond to the thin plate W having a diameter of 300 mm in addition to the first type configured to correspond to the thin plate W having a diameter of 310 mm. You can By preparing a plurality of types of offset members 70 in this way, thin plates W having various diameters can be handled.

The rear protruding portion 72 has a predetermined height H2 (see FIG. 5B) with respect to the surface of the mounting portion 15 of the support jig 10 when the offset member 70 is attached to the support jig 10 . The predetermined height H2 is significantly larger than the thickness of the thin plate W and significantly larger than the thickness of the base 70a. For example, the predetermined height H2 may be a value slightly smaller than the gap between the support jigs 10 adjacent in the vertical direction. In this case, it is possible to effectively prevent the thin plate W from riding over the rear protruding portion 72 and moving radially outward. That is, the function of restricting the radial position of the thin plate W by the rear protruding portion 72 can be exhibited more reliably.

The fitting portion 74 is provided so as to protrude downward from the lower side of the base portion 70a. The fitting portion 74 fits into the fitting hole 17 of the support jig 10 described above.

Here, in the example shown in FIG. 6B, four fitting portions 74 are separately provided around one fitting hole 17 . Specifically, the fitting portion 74 includes a pair of first fitting portions 74a and a pair of second fitting portions 74b. The pair of first fitting portions 74a extends downward from the pair of second fitting portions 74b and has a claw 741 at the lower end. For example, the projection height of the pair of second fitting portions 74b is equivalent to the plate thickness of the support jig 10 . The claws 741 of the pair of first fitting portions 74 a are provided at positions where they are caught by the lower surface of the support jig 10 . The claw 741 extends radially outward in the radial direction of the fitting hole 17 and extends to the outside of the opening edge of the fitting hole 17 . This can prevent the fitting portion 74 from coming out of the fitting hole 17 in an unintended manner.

Further, in the example shown in FIG. 6B, the pair of first fitting portions 74a and the pair of second fitting portions 74b have corners of the lower end surfaces (corners on the radially outer side in the radial direction of the fitting hole 17). It has a C surface (an inclined surface that slopes downward toward the radially inner side in the radial direction of the fitting hole 17 ) 742 . This facilitates fitting of the fitting portion 74 into the fitting hole 17 . Note that the C surface 742 may be formed so as to be continuous with the lower end surface of the claw 741 as shown in FIG. 6B.

Note that the fitting portion 74 may be elastically deformed radially inward in the radial direction of the fitting hole 17 while being fitted in the fitting hole 17 , for example. For example, the outer diameter (the outer diameter when viewed in the vertical direction) formed by the pair of first fitting portions 74a and the pair of second fitting portions 74b is slightly larger than the inner diameter of the fitting hole 17. good too. In this case, the fitting state between the fitting portion 74 and the fitting hole 17 can be stably maintained.

As described above, according to this embodiment, the offset member 70 is provided for each support jig 10 , so that the offset member 70 can be attached and detached for each support jig 10 . As a result, even if the offset member 70 corresponding to a different diameter needs to be reattached due to a change in the thin plate W to be supported or the like, such replacement work becomes relatively easy. Some of the support jigs 10 out of the plurality of support jigs 10 are fitted with the offset member 70 corresponding to the first diameter, and the other support jigs 10 are fitted with the offset member 70 corresponding to the first diameter. It is also possible to install an offset member 70 corresponding to a second diameter different from the first diameter.

Further, according to this embodiment, it is possible to prepare a plurality of types of offset members 70 so as to correspond to variations in the diameter of the thin plate W to be supported. Thin plates W of various diameters can be accommodated.

Further, according to the present embodiment, the offset member 70 is attached to the support jig 10 by fitting, so that it can be easily removed. Also, the offset member 70 can be detachably attached to the support jig 10 using a simple fitting structure.

Further, according to this embodiment, since the offset members 70 are provided on both the left and right sides of one support jig 10, the positions of the thin plates W (thin plate container 1 position of the thin plate W relative to ) can be regulated in the radial direction. As a result, compared to the case where the position of the thin plate W is regulated in the radial direction at two locations relatively close to each other in the circumferential direction of the thin plate W, the radial position regulating function of the thin plate W by the rear protruding portion 72 is exhibited more reliably. can be made The contact points (two points) of the left and right rear protrusions 72 with the thin plate W and the contact points of the holding member 5 with the thin plate W are more stably spaced apart in the circumferential direction of the thin plate W. The position of W can be regulated in the radial direction.

Further, according to the present embodiment, the rear protruding portion 72 of the offset member 70 has a wall-like shape that curves inwardly when viewed from the top as described above. direction can be reached. As a result, the position of the thin plate W (the position of the thin plate W within the container body 3) can be determined with high accuracy compared to the case where one rear protrusion 72 abuts the thin plate W at a plurality of points in the circumferential direction of the thin plate W in the radial direction. position) can be defined radially.

Further, according to this embodiment, the rear protruding portion 72 of the offset member 70 extends upward to the predetermined height H2 with respect to the mounting portion 15 as described above. It is possible to prevent the rear protrusion 72 from riding on the thin plate W, and to more reliably exert the function of regulating the radial position of the thin plate W by the rear protrusion 72 .

Further, according to this embodiment, since the offset member 70 has the front protruding portion 71, it is possible to appropriately prevent slight displacement (lateral deviation) of the thin plate on the support jig 10 in the horizontal plane.

In this embodiment, by preparing a plurality of types of offset members 70, it is possible to deal with thin plates W having various diameters. By making the fitting position with respect to 10 variable, the number of diameters of the thin plates W that can be accommodated may be two or more. That is, by providing a plurality of fitting holes 17 in the support jig 10 and varying the mounting position of the offset member 70 (position relative to the support jig 10), thin plates W with various diameters may be supported.

Another embodiment of the offset member will now be described. Note that the offset members 70A to 70C of each embodiment described below can be used in place of the offset member 70 described above, or can be used together with the offset member 70. FIG.

FIG. 7 is an explanatory diagram of an offset member 70A according to another embodiment, and is a perspective view showing a state in which the offset member 70A is attached to the support jig 10. FIG.

In the offset member 70A according to the present embodiment, the front protrusion 71 is replaced with a front protrusion 71A, and the rear protrusion 72 is replaced with a rear protrusion 72A. different point. Other configurations of the offset member 70A may be similar to the offset member 70 according to the embodiment described above.

71 A of front side protrusion parts are a columnar form, as shown in FIG. Similarly, the front projecting portion 71A may extend from the mounting portion 15 to a predetermined height H1.

The front protruding portion 71A of the offset member 70A according to this embodiment can also function in the same manner as the front protruding portion 71 of the offset member 70 according to the above-described embodiment. That is, a similar lateral deviation prevention function can be realized.

72 A of rear side protrusion parts are a columnar form, as shown in FIG. Also in this case, the rear protrusion 72A can contact the thin plate W at a point in the radial direction. Similarly, the rear protruding portion 72A may extend from the mounting portion 15 to a predetermined height H2.

The rear protrusion 72A of the offset member 70A according to this embodiment can also function in the same manner as the rear protrusion 72 of the offset member 70 according to the embodiment described above. That is, a similar radial position control function for the thin plate W can be realized.

Therefore, even when the offset member 70A according to this embodiment is used, the same effects as those of the above embodiment can be obtained.

FIG. 8 is an explanatory diagram of an offset member 70B according to another embodiment, and is a perspective view showing a state in which the offset member 70B is attached to the support jig 10. FIG.

The offset member 70B according to the present embodiment differs from the offset member 70 according to the above-described embodiment in that the rear projection 72 and the front projection 71 are omitted. Other configurations of the offset member 70B may be similar to the offset member 70 according to the embodiments described above.

When the offset member 70B according to the present embodiment is used, the rear protrusion 72 and the front protrusion 71 are omitted, so that each function of the rear protrusion 72 and the front protrusion 71 (function to prevent riding up) can be obtained. However, substantially the same effects as those of the above-described embodiment can be obtained.

Note that the left and right offset members 70B of this embodiment are integral, but the left and right may be separate.

FIG. 9 is an explanatory diagram of an offset member 70C according to another embodiment, and is a perspective view showing a state in which the offset member 70C is attached to the support jig 10. FIG.

The offset member 70</b>C according to this embodiment differs from the offset member 70 according to the above-described embodiment in that it further includes the function of the mounting portion 15 . The offset member 70C is available, for example, as a third type configured to accommodate a thin plate W significantly smaller than 300 mm in diameter (eg, a thin plate W with a diameter of 200 mm).

The offset member 70C includes a base portion 70aC, a rear projection portion 72C, and a front projection portion 71C. The offset member 70C has a fitting portion similar to the fitting portion 74 of the offset member 70 of the embodiment described above. Therefore, the offset member 70C can be attached to the support jig 10 in a detachable manner.

The base portion 70aC includes a first base portion 70aC-1 and a second base portion 70aC-2.

The first base portion 70aC-1 is substantially the same as the base portion 70a of the offset member 70 of the embodiment described above, and extends along the surface (horizontal plane) of the support jig 10. As shown in FIG.

The second base 70aC-2 has an upper surface that is offset downward from the first base 70aC-1. Specifically, the second base portion 70aC-2 has an upper surface that is flush with the upper surface of the mounting portion 15 of the support jig 10 when the offset member 70C is attached to the support jig 10. As shown in FIG. Therefore, the second base portion 70aC-2 has the function of supporting the thin plate W at a predetermined height, like the mounting portion 15 of the support jig 10. FIG.

The second base portion 70aC-2 extends radially inward (that is, toward the center of the thin plate W) from the first base portion 70aC-1. That is, the second base portion 70aC-2 extends radially inward so as to support a thin plate W with a small diameter (for example, a thin plate W with a diameter of 200 mm) that cannot be supported by the support jig 10 alone.

As shown in FIG. 9, the front projecting portion 71C is in the form of an elliptical cylinder. Similarly, the front projecting portion 71C may extend from the mounting portion 15 to a predetermined height H1.

The front protruding portion 71C of the offset member 70C according to this embodiment can also function in the same manner as the front protruding portion 71 of the offset member 70 according to the above-described embodiment. That is, a similar lateral deviation prevention function can be realized.

The rear protrusion 72C is in the form of an elliptical cylinder, as shown in FIG. In this case also, the rear protrusion 72C can contact the thin plate W at a point in the radial direction, like the rear protrusion 72 of the offset member 70 according to the embodiment described above. Similarly, the rear protrusion 72C may extend from the mounting portion 15 to a predetermined height H2.

The rear protrusion 72C of the offset member 70C according to this embodiment can also function in the same manner as the rear protrusion 72 of the offset member 70 according to the embodiment described above. That is, a similar radial position control function for the thin plate W can be realized.

Therefore, even when the offset member 70A according to this embodiment is used, the same effects as those of the above embodiment can be obtained.

In the present embodiment, the rear protrusion 72C and the front protrusion 71C are in the form of an elliptical cylinder, but they may be in the form of a curved wall like the rear protrusion 72 and the front protrusion 71 described above. , or may have a columnar shape such as the rear protrusion 72A and the front protrusion 71A described above.

Although each embodiment has been described in detail above, it is not limited to a specific embodiment, and various modifications and changes are possible within the scope described in the claims. It is also possible to combine all or more of the constituent elements of the above-described embodiments.
For example, in the above-described embodiment, the front protrusion 71 achieves the lateral shift prevention function and the rear protrusion 72 implements the radial position control function, but the opposite is also possible. That is, by changing the radially innermost positions of the front protrusion 71 and the rear protrusion 72 (reversing the relationship), the front protrusion 71 achieves the radial position regulating function, and the rear protrusion 72 may implement the lateral deviation prevention function.

1 thin plate storage container 3 container main body 3a opening 3b side wall 3c side wall 3d bottom wall 3e top wall 3f back wall 4 lid 5 holding member 9 locking mechanism 10 support jig 11 support jig 12 fixing member 14 opening 15 placing portion 16 Fixing member insertion hole 17 Fitting hole 70 (70L, 70R) Offset member 70a Base 70A Offset member 70aC Base 70aC-1 First base 70aC-2 Second base 70B Offset member 70C Offset member 71 Front protrusion 71A Front protrusion 71C front protrusion 72 rear protrusion 72A rear protrusion 72C rear protrusion 74 fitting portion 74a first fitting portion 74b second fitting portion 741 claw W thin plate

Claims (6)

a container body having an opening formed on the front surface and capable of accommodating a circular thin plate;
a plurality of support jigs that can be accommodated in the container body and on which the thin plate can be placed;
a regulating member that can be attached to each of the support jigs in a detachable manner from the support jigs and that can be in radial contact with an outer peripheral edge of the thin plate having a predetermined radius ;
the regulating member includes a base portion extending along the surface of the support jig and a projecting portion projecting upward from the base portion;
The thin plate storage container , wherein the projecting portion of the regulating member is located on the inner diameter side relative to other portions when the regulating member is attached to the support jig . a container body having an opening formed on the front surface and capable of accommodating a circular thin plate;
a plurality of support jigs that can be accommodated in the container body and on which the thin plate can be placed;
a regulating member that can be attached to each of the support jigs in a detachable manner from the support jigs and that can be in radial contact with an outer peripheral edge of the thin plate having a predetermined radius;
the regulating member includes a base and a protruding portion protruding upward from the base;
The base includes a first base extending along the surface of the support jig and a second base extending radially inward from the first base,
The thin plate storage container, wherein the second base has an upper surface that is flush with the surface of the support jig radially inward of the support jig and the projecting portion. 3. The thin plate storage container according to claim 1 , wherein a plurality of types of said regulating member are set corresponding to a plurality of different predetermined radii. The thin plate storage container according to any one of claims 1 to 3, wherein the regulating member can be attached to the support jig by fitting. The thin plate storage container according to any one of claims 1 to 4 , wherein the regulating members are provided on both left and right sides of the container body when viewed from the front. 6. Any one of claims 1 to 5 , wherein the protruding portion is in the form of a cylinder or an elliptical cylinder, or in the form of a wall curved in such a manner that the center of curvature is outside the center of the thin plate. The thin plate storage container according to the item.

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