JP2012104570A - Substrate housing container - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a substrate housing container including supporting parts in the container body, each of which supports a regulation plate for letting a thin substrate avoid deflection, also the substrate housing container preventing the regulation plate from rotation, decreasing friction between the regulation plate and the supporting parts, and making a substrate easy to be taken out.SOLUTION: A substrate housing container comprises: a container body including an opening part at a front face thereof; and a pair of supporting parts facing each other at an inner wall of the container body. Each supporting part includes a plurality of supporting plates lining up in a vertical direction. A regulation plate is placed on a pair of supporting plates at a same level in supporting parts, and a substrate is placed on other supporting plates which is one upper stage of the supporting plates having the regulation plate thereon. The regulation plate has a cutout from the opening part side of the housing container toward a center part, as planarly viewed, and is provided with simple positional regulation means for being regulated a position thereof against the supporting plates supporting the regulation plate.

Description

  The present invention relates to a substrate storage container used for storing, transporting, transporting, storing, etc., a substrate made of, for example, a semiconductor wafer, a glass wafer, etc., and particularly storing a substrate having a large diameter, for example, a back grind and thinned. The present invention relates to a substrate storage container suitable for this.

  As this type of substrate storage container, for example, a container including a container body having an opening on the front and a lid that closes the opening so as to be sealed is known. In such a substrate storage container, a pair of support members are arranged opposite to the inner wall of the container body, and each support member is configured to include a support plate arranged at equal intervals in the vertical direction. Yes. Each substrate is stored in the substrate storage container in a horizontal state by being placed on a support plate having the same height of the support member in the periphery. In addition, in order to temporarily store and take out the substrate in the process, a substrate storage container (cassette) that is used only in the container main body is used without using the lid.

  Here, as a substrate to be stored in the substrate storage container, for example, a semiconductor wafer made of silicon having a diameter of 300 mm has a thickness of about 300 μm by forming an electronic circuit on the surface and then back grinding the back surface. Alternatively, there is a case in which a thin processed substrate (such a substrate is referred to as a thin-walled substrate) is stored. Further, the amount of bending also increases when the substrate is made of glass or the outer diameter is increased to 300 mm or more.

In this case, since the peripheral portion of the thin-walled substrate is supported by the pair of support members in the substrate storage container, the central portion is easily bent and is bent by 1 mm or more by its own weight. In particular, if there is a deflection of 2 mm or more, there arises a problem that the placement and removal of the substrate, the safe support of the thin-walled substrate, and the transfer by the automatic machine are impaired.
Specifically, when a thin-walled substrate comes into contact with a substrate storage container or an automatic machine, contamination or damage accidents due to rubbing can be considered.

  For this reason, for example, as disclosed in Patent Document 1, a relatively rigid disc-shaped restricting plate is supported on each support portion of the container body, and a thin-walled substrate is brought into contact with the upper surface of the restricting plate. Thus, a technique for avoiding the bending of the thin-walled substrate has been known.

JP 2001-308171 A

  However, the substrate storage container shown in Patent Document 1 has a configuration in which the restricting plate supported by each supporting portion is simply placed on the supporting plate and has a disk shape, which causes a problem of rotating during use. Had a problem. Further, in order to prevent such rotation, it has been proposed to form a protrusion that extends outwardly in a part of the periphery of the regulation plate and serves as a locking portion with the container body, The substrate has to be chucked at a position different from the substrate diameter, which makes it difficult to remove the substrate.

  In addition, since the restriction plate is supported by each support portion, when the restriction plate is inserted or removed, rubbing with each support portion frequently occurs, so that so-called particles are likely to be generated and Concern about dirt.

  Accordingly, the present invention has been made in view of the above-described problems, and supports the restriction plate on each support portion of the container body, and prevents the thin-walled substrate from being bent by the restriction plate. An object of the present invention is to provide a substrate storage container that can prevent rotation, reduce friction between the regulating plate and a support portion, and facilitate the removal of the substrate.

  The substrate storage container of the present invention has a devised shape of a regulating plate for preventing and supporting a thin-walled substrate that is bent by its own weight to be 1 mm or more, particularly 2 mm or more. A position restricting means having a simple configuration is provided between the plate and the support plate of the support portion.

The present invention is grasped by the following configurations.
(1) A substrate storage container of the present invention includes a container main body having an opening on the front surface, and a pair of support portions disposed on the inner wall of the container main body so as to face each other, and each of the support portions is vertical. More than the support plate on which the restriction plate is placed, and the restriction plate is placed by the support plate having the same height of the pair of support portions. A substrate storage container in which a substrate is placed on another support plate that is one level above, and the restriction plate is provided with notches at the opening side and the center of the storage container when viewed in plan. And a position restricting means for restricting the position of the support plate supporting the restricting plate is provided.

(2) The substrate storage container of the present invention is based on (1), and the restriction plate has a shape in which the cutout is provided with respect to substantially the same shape as the substrate when viewed in plan. Features.
(3) The substrate storage container of the present invention is based on (1), and the position restricting means of the restricting plate is constituted by a recessed portion along the periphery of a part of the periphery of the surface of the restricting plate, The recessed portion is characterized in that after the insertion of the substrate into the container body, the position of the recessed portion is restricted with respect to the support plate that is one step higher than the support plate that supports the restriction plate.

(4) The substrate storage container according to the present invention is based on (3), and the recessed portion of the restriction plate position restriction means supports the restriction plate when the substrate is inserted into the container body. It is characterized by having a guide function with respect to the support plate that is one level higher.
(5) The substrate storage container of the present invention is based on any one of (3) and (4), and the recessed portion of the restriction plate is symmetrical with respect to the insertion direction of the restriction plate into the container body. The shape of these concave portions as viewed in plan is asymmetric.

(6) The substrate storage container according to the present invention is based on (5), and the shape of each of the recessed portions of the restriction plate viewed in plan is the one after the restriction plate is inserted to the back side of the container body. By rotating in the direction, it is formed in a shape that avoids interference with the support plate that is one step higher than the support plate that supports the regulation plate.
(7) The substrate storage container according to the present invention is based on (1), and a support protrusion for point contact is formed on the upper surface of the support plate. When the plate is supported by the support plate, a groove portion is formed to be fitted with the support protrusion.

(8) The substrate storage container of the present invention is based on (1), and the position restricting means of the restricting plate is formed on a side wall surface of the restricting plate, and is fitted to insert a support plate that supports the restricting plate. It is characterized by comprising a groove.
(9) The substrate storage container of the present invention is based on (8), and the restricting plate is formed with a locking claw that is fitted into the recessed portion of the support plate inserted into the fitting groove. It is characterized by.

(10) The regulation plate of the present invention includes a container body having an opening on the front surface, and a pair of support parts disposed opposite to each other on the inner wall of the container body, and each of the support parts is in a vertical direction. In the substrate storage container configured to include a plurality of support plates arranged side by side, the substrate is placed by the support plates having the same height of the pair of support portions, and the support is placed on the substrate. A restriction plate placed on another support plate that is one step lower than the plate, and the restriction plate is provided with a notch in the opening side and the central portion of the storage container when viewed in plan. A position restricting means for restricting the position of the support plate is provided.

  According to the substrate storage container of the present invention, the regulation plate is supported on each support portion of the container body, and the regulation plate prevents the thin-walled substrate from being bent. The friction between the plate and the support portion can be reduced, and the substrate can be easily taken out.

It is a perspective view which shows Embodiment 1 of the board | substrate storage container of this invention. It is a front view which shows Embodiment 1 of the board | substrate storage container of this invention. It is a perspective view which expands and shows the support part of the substrate storage container of this invention. It is a top view which shows the control board accommodated in the board | substrate storage container of this invention. It is the perspective view which looked at the control board accommodated in the board | substrate storage container of this invention from the back surface. It is a front view which shows the state by which the control board and the thin wall substrate are supported by the support part in the board | substrate storage container of this invention. It is explanatory drawing which shows the procedure at the time of accommodating a control board in the board | substrate storage container of this invention with FIG. It is explanatory drawing which shows the procedure at the time of accommodating a control board in the board | substrate storage container of this invention with FIG. It is a perspective view which shows Embodiment 2 of the board | substrate storage container of this invention. It is a perspective view which shows the state which accommodated the control board in the board | substrate storage container of this invention. It is a perspective view which shows the fitting groove and latching claw which were provided in the control board. It is a top view which shows the vicinity of the latching claw at the time of supporting a control board on a support plate. It is sectional drawing in the XIII-XIII line | wire of FIG.

DESCRIPTION OF EMBODIMENTS Hereinafter, embodiments for carrying out the present invention (hereinafter referred to as embodiments) will be described in detail with reference to the accompanying drawings. Note that the same number is assigned to the same element throughout the description of the embodiment.
(Embodiment 1)

  FIG. 1 is a perspective view showing Embodiment 1 of the substrate storage container 1 of the present invention, which is a view seen from the front side. FIG. 2 is a front view of the substrate storage container 1 shown in FIG.

  As shown in FIGS. 1 and 2, the substrate storage container 100 includes a container body 1 having a substantially cubic shape having an opening 1 </ b> A on the front side. The substrate storage container 100 includes a container body 1 and a lid that closes the opening 1A in a sealable manner, but the lid is not shown in FIGS. 1 and 2. For this reason, in FIGS. 1 and 2, a space (substrate housing portion) surrounded by the inner wall of the container body 1 is visually observed through the opening 1 </ b> A.

  For example, a robotic flange (not shown) is attached to the upper surface 1B of the container body 1 configured as described above, and the substrate storage container 100 is installed in a clean room of the factory via the robotic flange. It is transported along the transport rail 60.

  A pair of support portions 2L and 2R are disposed on the left and right wall surfaces of the inner wall of the container body 1 as viewed from the opening 1A side so as to face each other. Each of these support portions 2L, 2R is constituted by a plurality of support plates 20 arranged at equal intervals in the vertical direction. Each support plate 20 is disposed horizontally from the opening 1A side of the container body 1 to the back side, and the width thereof is relatively narrow.

  In the case where a substrate such as a semiconductor wafer accommodated in the container body 1 is formed to be relatively thick and there is no concern about the substrate being bent, each of the substrates has a height of the supporting members 2L and 2R at the periphery. By being placed on the same support plate 20, it is stored horizontally in the container body 1. However, when the substrate accommodated in the container body 1 is a thin-walled substrate formed thinly, as shown in FIGS. 1 and 2, the support having the same height among the support plates 20 of the pair of support portions 2L and 2R. By placing the regulating plate 6 so as to be placed by the plate 20 and placing the thin-walled substrate on another supporting plate 20 that is one level higher than the supporting plate 20 on which the regulating plate 6 is placed, The restriction plate 6 can avoid the bending that occurs in the thin-walled substrate. For this reason, the thickness of the regulating plate 6 may be such that when the regulating plate 6 and the thin-walled substrate are in the above-described arrangement relationship, the surface of the regulating plate 6 and the back surface of the thin-walled substrate are in light contact. It becomes preferable. This is because the back surface of the thin substrate is in contact with the surface of the regulating plate 6 and is supported while maintaining a substantially horizontal state.

  The regulation plate 6 is stored in the container main body 1, and the planar shape thereof is such that the left side wall surface (the support portion 2 </ b> L is disposed) and the right side wall surface (the support portion 2 </ b> R is disposed) of the container main body 1. , And a width in the horizontal direction on each side of the back side wall surface, and is formed in a substantially crescent shape with a notch formed in the opening 1A side and the central portion. The reason why the restriction plate 6 has such a shape is that a thin-walled substrate can be inserted into or removed from the container body 1 while the restriction plate 6 is supported by the pair of support portions 2L and 2R. This is to prevent the restricting plate from being damaged in the vicinity of the opening 1A of the main body 1. In this case, since the number of times the restricting plate 6 is taken in and out of the container body 1 can be reduced, the friction between the restricting plate 6 and the support portions 2L and 2R can be reduced, and so-called particle generation can be suppressed.

  FIG. 1 shows a state where only the regulation plate 6 is accommodated in the container body 1, but FIG. 2 shows the thin-walled substrate W accommodated in the upper stage of the regulation plate 6 and the regulation plate 6. It also shows. The thin and thick substrate W is, for example, a circular semiconductor wafer having a diameter of 300 mm. FIG. 6 shows an enlarged view of a state in which the regulating plate 6 and the thin-walled substrate W are supported by the support portion 2L disposed on the left side wall surface of the container body 1, for example. The restricting plate 6 is placed and supported on the support plate 20 of the support portion 2L, and the thin-walled substrate W arranged in contact with the surface of the restricting plate 6 is another support above the support plate 20. It is placed on the plate 20. FIG. 6 (same as in FIG. 2) shows one regulating plate 6 and one thin-walled substrate W, but actually a plurality of regulating plates 6 and a plurality of thin-walled substrates W are accommodated. The support plates 20 of the support portions 2L and 2R are provided on the support plates 20 from the bottom side of the container body 1, respectively, from the bottom surface side, the regulation plate 6, the thin-walled substrate W, the regulation plate 6, the thin-walled substrate W, and the regulation plate 6 respectively. , ... and so on.

  FIG. 3 is an enlarged partial perspective view of the support portion 2R disposed on the right wall surface of the container body 1 of the pair of support portions 2L and 2R. Each of the support plates 20 arranged in parallel in the vertical direction has support projections 3 formed on the upper surface thereof, for example, at a location close to the opening 1A side of the container main body 1 and a location close to the back side of the container main body 1. Has been. Each support plate 20 of the support portion 2L on the left side wall surface of the container body 1 is also the same, so that the thin-walled substrate W is placed on the support plate 20 at the same height of the pair of support portions 2L and 2R, for example, It is supported by four support protrusions 3. By doing so, the thin-walled substrate W is supported on the support plate 20 with a contact portion having an extremely small area, and contamination of the thin-walled substrate W can be minimized. Further, on the upper surface of each support plate 20, a region other than the region on which the thin substrate W is placed is formed to have a height higher than that of the support protrusion 3, and the position regulating step portion 4 is formed. . The position regulating step 4 can prevent the thin-walled substrate W from being displaced, for example, toward the opening 1 </ b> A of the container body 1. An inclined wall surface 5 is formed at the rear end of the support plate 20, and the thin walled substrate W is positioned by the inclined wall surface 5 in the rear side direction.

  FIG. 4 is a plan view showing the restriction plate 6. As described above, the restriction plate 6 has a crescent shape. That is, in a circular shape that is almost the same size as the thin-walled substrate W, a shape in which a notch 7 having an arc is provided on one side (when the container body 1 is housed, the opening 1A side of the container body 1) It has become. The regulating plate 6 having such a shape is formed with a recessed portion 8 along the periphery in a part of the periphery. That is, when the regulating plate 6 is stored in the container main body 1, the concave portion 8 is provided on the side facing the left wall surface and the right wall surface of the container body 1 (hereinafter referred to as the concave wall facing the left wall surface). The portion 8 is indicated by 8L, and the recessed portion 8 facing the right side wall surface is indicated by 8R). The recessed portions 8L and 8R of the restriction plate 6 have a function of guiding the support plate when the restriction plate is stored in the container body 1. An example of a storage method for storing the restriction plate 6 in the container main body 1 will be described later. The recessed portion 8L and the recessed portion 8R are inserted in the direction in which the restriction plate 6 is inserted into the container main body 1 (arrow α direction in the figure). It has an asymmetric shape. That is, the recessed portion 8L includes a recessed portion having a shape including an end wall 9a extending substantially parallel to the α direction from the opening side of the container body 1 and an end wall 9b extending slightly bent toward the center side thereafter. It has become. The recessed portion 8L is a recessed portion having a shape having an end wall 9d extending substantially parallel to the α direction from the back side of the container body 1 and an end wall 6c extending slightly bent toward the center side thereafter. . FIG. 5 is a perspective view of the restriction plate 6 as viewed from the back side. When the restriction plate 6 is stored in the container body 1, the restriction plate 6 is formed with a groove 10 </ b> L on the back surface on the side facing the left wall surface of the container body 1, and the back surface on the side facing the right wall surface of the container body 1. A groove 10R is formed in FIG. These grooves 10 </ b> L and 10 </ b> R are formed in the support plate 10 when the regulation plate 6 is accommodated in the container body 1 and is adjusted to a normal position with respect to the support plate 20 on which the regulation plate 6 is placed. The supporting projections 3 are engaged with each other.

  FIG. 7 and FIG. 8 are diagrams showing an example of a procedure when the regulating plate 6 is stored in the container main body 1. First, as shown in FIG. 7, when the restriction plate 6 is inserted from the opening 1 </ b> A of the container body 1 along the direction of the arrow α, for example, the end wall 9 b of the recessed portion 8 </ b> L of the restriction plate 6 pulls the restriction plate 6. The support plate 20 is moved so as to be in contact with the end side of the support plate 20 which is one upper stage of the support plate 20 to be supported. In this case, in the recessed portion 8R of the restriction plate 6, those end walls 9c and 9d have a slight gap from the corresponding end wall of the support plate 20, so that the restriction plate 6 can be easily inserted. It has become. Then, after it is confirmed that the regulating plate 6 has been sufficiently inserted to the far side of the container body 1, the regulating plate 6 is slightly rotated in the clockwise direction with respect to the center (indicated by symbol C in FIG. 4). I will let you.

  Thereby, as shown in FIG. 8, the end wall 9 a of the recessed portion 8 </ b> L abuts the corresponding support plate 20 on the support portion 2 </ b> L and the end wall 9 d of the recessed portion 8 </ b> L supports the regulating plate 6. The end of the support plate 20 corresponding to the portion 2R comes into contact, and the positioning of the restriction plate 6 with respect to the pair of support portions 2L and 2R is completed.

  As a result, the recessed portions 8L and 8R having the above-described shape formed on the regulation plate 6 are one step higher than the support plate 20 that supports the regulation plate 6 when the thin-walled substrate W is inserted into the container body 1. It becomes clear that it has a guide function with respect to the upper support plate 20 and has a function to restrict the position of the support plate 20 thereafter. In this case, as shown in the description of FIG. 5, the groove 10L formed on the back surface of the regulating plate 6 is fitted into the support protrusion 3 of the corresponding support plate 20, and the groove 10R is the corresponding support. The support protrusion 3 of the plate 20 is fitted.

In the substrate storage container 100 configured in this way, the restriction plate 6 is supported by the support portions 2L and 2R of the container body 1, and the bending of the thin-walled substrate W can be avoided by the restriction plate 6. . In addition, rotation of the restriction plate W can be prevented, friction between the restriction plate W and the support portions 2L and 2R can be reduced, and the thin substrate W can be easily taken out.
(Embodiment 2)

  FIG. 9 is a perspective view showing Embodiment 2 of the substrate storage container 100 of the present invention, and is a view as seen from the front side. The substrate storage container 100 shown in FIG. 9 includes the restriction plate 12 as in the case of the first embodiment.

  The planar shape of the restriction plate 12 is almost crescent, but when the restriction plate 12 is housed in the container main body 1, the width w1 of the portion corresponding to the back side is on the opening 1 </ b> A side of the container main body 1. It is formed to be smaller than the width w2 of the corresponding portion in a step shape. The width w2 of the portion corresponding to the opening 1A side of the container main body 1 of the regulation plate 12 is formed slightly larger than the separation distance between the pair of support portions 2L and 2R of the container main body 1, and the width w2 Fitting grooves 13 </ b> L and 13 </ b> R along the insertion direction of the restriction plate 12 into the container body 1 (the direction of the arrow α in the figure) are formed in the left and right end wall portions of the portion having the shape.

  As shown in FIG. 10, the insertion state of the regulating plate into the container body 1 is such that the fitting grooves 13L and 13R of the regulating plate 6 are the ends of the supporting plates 20 corresponding to the pair of supporting portions 2L and 2R (the container body 1). The peripheral part on the center side is fitted. That is, when the restriction plate 6 is inserted into the container main body 1, the width w1 on the back side is formed small, so that the restriction plate 6 is first inserted without being interfered with the support portions 2L and 2R, and then the large width w2 is inserted. When the corresponding support plate 20 of each of the support portions 2L and 2R is fitted into the fitting grooves 13L and 13R in the portion having the inner wall, the regulation plate 6 is moved to the inner side of the container body 1 and the inside of the container body 1 Can be stored. In this case, the support plate 20 fitted in the fitting grooves 13 </ b> L and 13 </ b> R of the restriction plate 6 supports the restriction plate 12.

  Then, when the restricting plate 12 is moved to the back side of the container body 1, the engaging claw 17 formed on the restricting plate 12 is clicked on the support plate 20 to position the restricting plate 12. Will be made accurately. FIG. 11 shows a locking claw 17 provided on the restriction plate 12, which is formed in the formation region of the fitting groove 13 when the restriction plate 12 is viewed in a plan view. The locking claw 17 is configured by forming, for example, a substantially “U” -shaped notch 18 on the upper surface of the regulation plate 12 until reaching the fitting groove 13. The front end of the locking claw 17 is matched with the insertion direction of the regulation plate 12 into the container body 1. FIG. 12 is an enlarged plan view showing a case where the regulation plate 12 is fitted at a regular position on the support plate 20 disposed on the right wall surface of the container body 1. The locking claw 17 is disposed at a position overlapping the support plate 20 fitted in the fitting groove 13R of the regulation plate 12, and the locking claw 17 is supported by the elastic force biased toward the support plate 20 side. It is locked to a recessed portion 20A formed on the surface. FIG. 13 shows a cross-sectional view taken along line XIII-XIII in FIG. The front end of the locking claw 17 is formed to be thick, for example, and the thick portion 17A is locked to a recessed portion 20A formed on the surface of the support plate 20. In addition, by forming the side wall of the thickened portion 17A of the locking claw 17 on the base side of the locking claw 17 and the side wall of the recessed portion 20A facing the side wall, respectively, the storage container 1 of the regulation plate 12 is formed. It can be easily removed from the camera.

  In the substrate storage container 100 configured in this manner, the restriction plate 12 is supported by the support portions 2L and 2R of the container body 1, and the bending of the thin substrate W can be avoided by the restriction plate 12. . Further, rotation of the restriction plate 12 can be prevented, friction between the restriction plate 12 and the support portions 2L and 2R can be reduced, and the thin substrate W can be easily taken out.

  The substrate storage container of the present invention is not limited to the above-described configuration. For example, the cassette has openings on the front and back sides, support portions are formed on the left and right side walls, and support columns are formed on the back side. It may be. Further, the cutout formed in the restriction plate may be, for example, a rectangle or a trapezoid other than the arc shape or the U shape. This is because the same effect can be obtained in both cases.

  As mentioned above, although this invention was demonstrated using embodiment, it cannot be overemphasized that the technical scope of this invention is not limited to the range as described in the said embodiment. It will be apparent to those skilled in the art that various modifications or improvements can be added to the above-described embodiments. Further, it is apparent from the scope of the claims that the embodiments added with such changes or improvements can be included in the technical scope of the present invention.

DESCRIPTION OF SYMBOLS 1 ... Container main body, 1A ... Opening part, 1B ... Upper surface, 2L, 2R ... Supporting part, 3 ... Supporting protrusion, 6, 12 ... Restriction plate, 7 ... Notch, 8L, 8R ... ... recessed part, 9a, 9b, 9c, 9d ... end wall, 10 ... groove part, 13L, 13R ... fitting groove, 17 ... locking claw, 18 ... notch, 20 ... support plate, 100 …… Substrate storage container, W …… Thin-walled substrate.

Claims (10)

A container body having an opening on the front surface, and a pair of support portions disposed opposite to each other on the inner wall of the container body,
Each of the support portions includes a plurality of support plates arranged in parallel in the vertical direction,
A substrate storage in which a restriction plate is placed by the support plate having the same height of the pair of support portions, and a substrate is placed on another support plate that is one level higher than the support plate on which the restriction plate is placed. A container,
The restriction plate, when viewed in plan, has a shape in which a cutout is provided in the opening side and the center of the storage container,
A substrate storage container comprising a position restricting means for restricting a position with respect to the support plate for supporting the restricting plate.   The substrate storage container according to claim 1, wherein the restriction plate has a shape in which the cutout is provided with respect to substantially the same shape as the substrate when viewed in plan.   The restricting plate position restricting means is constituted by a recessed portion along the periphery of a part of the periphery of the surface of the restricting plate, and the recessed portion is disposed after the substrate is inserted into the container body. The substrate storage container according to claim 1, wherein the position is regulated with respect to a support plate that is one step higher than the support plate that supports the substrate.   The recessed portion of the position restricting means of the restricting plate has a guide function with respect to a support plate that is one level higher than the support plate that supports the restricting plate when the substrate is inserted into the container body. The substrate storage container according to claim 3.   The concave portions of the restriction plate are provided at symmetrical positions with respect to the insertion direction of the restriction plate into the container body, and the shape of the concave portions as viewed in plan is asymmetric. The substrate storage container according to claim 3. The shape of each of the concave portions of the restriction plate viewed in plan is more than the support plate that supports the restriction plate by rotating the unidirectional rotation after inserting the restriction plate to the back side. The substrate storage container according to claim 5, wherein the substrate storage container is formed in a shape that avoids interference with the support plate on one stage.   A support protrusion for point contact is formed on the upper surface of the support plate, and the support protrusion is formed on the back surface of the restriction plate when the restriction plate is supported by the support plate. The board | substrate storage container of Claim 1 in which the groove part to fit is formed.   The said position control means of the said control board is formed in the side wall surface of the said control board, and is comprised by the fitting groove | channel which inserts the support plate which supports the said control board. Substrate storage container.   9. The substrate storage container according to claim 8, wherein the restricting plate is formed with a locking claw that fits into a recessed portion of the support plate inserted into the fitting groove. A container body having an opening on the front surface, and a pair of support portions disposed opposite to each other on the inner wall of the container body,
Each of the support portions is provided in a substrate storage container configured to include a plurality of support plates arranged in parallel in the vertical direction.
A restriction plate that places the substrate by the support plate having the same height of the pair of support portions, and places the substrate on another support plate that is one step lower than the support plate on which the substrate is placed,
When viewed in a plan view, the restricting plate has a shape in which notches are provided on the opening side and the central portion of the storage container, and position restricting means for restricting the position with respect to the support plate is provided. A regulation plate characterized by

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