WO2024105879A1 - Housing container and adapter member - Google Patents

Housing container and adapter member Download PDF

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Publication number
WO2024105879A1
WO2024105879A1 PCT/JP2022/042848 JP2022042848W WO2024105879A1 WO 2024105879 A1 WO2024105879 A1 WO 2024105879A1 JP 2022042848 W JP2022042848 W JP 2022042848W WO 2024105879 A1 WO2024105879 A1 WO 2024105879A1
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WO
WIPO (PCT)
Prior art keywords
container body
jig
side support
adapter member
plate
Prior art date
Application number
PCT/JP2022/042848
Other languages
French (fr)
Japanese (ja)
Inventor
隆二 福田
拓人 鹿
Original Assignee
ミライアル株式会社
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by ミライアル株式会社 filed Critical ミライアル株式会社
Priority to PCT/JP2022/042848 priority Critical patent/WO2024105879A1/en
Publication of WO2024105879A1 publication Critical patent/WO2024105879A1/en

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    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/673Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere using specially adapted carriers or holders; Fixing the workpieces on such carriers or holders

Definitions

  • the present invention relates to a storage container used for storing, conveying, storing, transporting, etc., items to be stored, such as substrates such as semiconductor wafers and their jigs, and an adapter member for the storage container.
  • Storage containers for storing and transporting substrates such as semiconductor wafers and associated jigs have been known that are configured to include a container body and a lid (see, for example, Patent Document 1).
  • One end of the container body has an opening periphery where the container body opening is formed.
  • the other end of the container body has a closed cylindrical wall.
  • a storage space is formed within the container body.
  • the storage space is surrounded by the wall and is capable of storing multiple stored objects (such as circuit boards and jigs).
  • the lid is detachable from the opening periphery and is capable of closing the container body opening.
  • the side support parts are provided on the wall parts so as to form a pair within the storage space. The side support parts are capable of supporting the edges of multiple stored objects while arranging adjacent stored objects in parallel with a predetermined distance between them.
  • a front retainer is provided on the portion of the lid that faces the storage space when the container body opening is closed.
  • the front retainer is capable of supporting the edges of multiple stored objects when the container body opening is closed by the lid.
  • a rear support portion is provided on the wall to pair with the front retainer. When the container body opening is closed by the lid, the rear support portion cooperates with the front retainer to support the edges of multiple stored objects while arranging adjacent stored objects in parallel with a predetermined distance between them.
  • the front end of the side support part is often not located near the opening of the container body, but is located away from the opening in the rear direction.
  • the stored object is a board.
  • the support function of the side support part for the stored object is not exerted in the process of moving the stored object rearward through the opening of the container body and placing it in the storage space, or in the process of pulling the stored object placed in the storage space forward through the opening of the container body and removing it from the container body, if the stored object is not located above the side support part.
  • some users of storage containers expect the support function for the stored object to be exerted even near the opening of the container body.
  • the present invention aims to provide a storage container that can change the range in which the support function for the stored object is exerted with a simple configuration, and an adapter member for the storage container.
  • the present invention relates to a storage container comprising: a container body having a storage space formed therein capable of storing a plurality of objects in parallel, one end of which is formed with an opening periphery with a container body opening communicating with the storage space and the other end closed; a lid that is detachable from the container body opening and capable of closing the container body opening; a side support part that is arranged in a pair in the storage space and capable of supporting the edges of the plurality of objects when adjacent objects among the plurality of objects are arranged in parallel with a predetermined distance between them, the side support part having a plurality of plate parts that are arranged between the adjacent objects; and an adapter member that is arranged between the container body opening and the side support part in the storage space in the front-rear direction connecting the one end and the other end of the container body, the adapter member having a guide part that is arranged corresponding to some or all of the plurality of plate parts, the adapter member being configured to be detachable from the side support part or the container
  • a storage container according to any one of (1) to (3), in which the object to be stored is a substrate and/or a plate-shaped jig for a substrate.
  • the present invention relates to an adapter member for a storage container including: a container body having a storage space formed therein capable of storing multiple objects in parallel, one end of which is formed with an opening periphery with a container body opening communicating with the storage space and the other end closed; a lid that is detachable from the container body opening and capable of closing the container body opening; a side support part that is arranged in a pair in the storage space and capable of supporting the edges of the multiple objects when adjacent objects among the multiple objects are arranged in parallel at a predetermined distance from each other, the side support part having multiple plate parts arranged between the adjacent objects; and an adapter member that is arranged between the container body opening and the side support part in the storage space in the front-rear direction connecting the one end and the other end of the container body, the adapter member having guide parts arranged corresponding to some or all of the multiple plate parts, the adapter member being configured to be detachable from the side support part or the container body.
  • the present invention provides a storage container that can change the range in which the support function for the stored object is exerted with a simple configuration, and an adapter member for the storage container.
  • FIG. 1 is an exploded perspective view showing a state in which a plurality of jigs J are stored in a storage container 1 according to a first embodiment of the present invention.
  • FIG. 1 is a perspective view showing a container body 2 of a storage container 1 according to a first embodiment of the present invention, viewed from below.
  • FIG. 3 is a sectional perspective view in which the right-hand portion of FIG. 2 and the adapter member 8 are omitted.
  • 1 is a perspective view showing a lid 3 of a storage container 1 according to a first embodiment of the present invention.
  • 1 is a plan view showing a jig J (jig body J1) which is an object to be stored.
  • FIG. 1 is a plan view showing a state in which a substrate W is held by a jig J.
  • FIG. 2 is a schematic cross-sectional view showing a state in which a substrate W is held by a jig J.
  • FIG. 13 is a perspective view of the side support part 5 and the adapter member 8 in a connected state on the left side, as viewed from the right side.
  • FIG. 13 is a right side view of the side support part 5 and the adapter member 8 in a connected state on the left side.
  • FIG. 13 is a left side view of the lateral support part 5 and the adapter member 8 in a connected state on the left side.
  • 1 is a perspective view of the left side support portion 5 as viewed from the right side.
  • FIG. 2 is a perspective view of the left side support portion 5 as viewed from the left side.
  • 1 is a perspective view of the left adapter member 8 as viewed from the right side.
  • FIG. 2 is a perspective view of the left adapter member 8 as viewed from the left side.
  • 1 is a cross-sectional view of a storage container 1 according to a first embodiment of the present invention in a first state in which an adapter member 8 is not attached, taken along a plane perpendicular to the up-down direction D2.
  • FIG. FIG. 2 is a longitudinal cross-sectional view of the first state taken along a plane perpendicular to the left-right direction D3.
  • FIG. 1 is a cross-sectional view taken along a plane perpendicular to the vertical direction D2, showing a second state in which an adapter member 8 is attached to the storage container 1 according to the first embodiment of the present invention.
  • FIG. FIG. 11B is a partially enlarged view of FIG. 11A.
  • FIG. FIG. 4 is a longitudinal cross-sectional view of the second state taken along a plane perpendicular to the left-right direction D3.
  • 13 is a schematic diagram showing a step between an adapter member 8 and a side support portion 5 in a comparative example.
  • FIG. 13 is a schematic diagram showing a state in which a jig J, which is an object to be stored, is caught on a step between an adapter member 8 and a side support portion 5 in the comparative embodiment.
  • FIG. 4 is a schematic diagram showing a step between an adapter member 8 and a side support portion 5 in the first embodiment of the present invention.
  • FIG. FIG. 11 is a schematic diagram showing a state in which a jig J, which is a stored object, moving in a rear direction D12 slides up on an adapter member 8 in the first embodiment of the present invention.
  • FIG. 2 is a schematic diagram showing a state in which a jig J moves above a step between an adapter member 8 and a side support portion 5 in the first embodiment of the present invention.
  • FIG. 11 is a schematic diagram showing a state in which a jig J, which is a stored object, moving in a forward direction D11 slides up on an adapter member 8 in the first embodiment of the present invention.
  • Fig. 1 is an exploded perspective view showing a state in which a plurality of jigs J are stored in the storage container 1 according to the first embodiment of the present invention.
  • Fig. 2 is a perspective view showing the container body 2 of the storage container 1 according to the first embodiment of the present invention from below.
  • Fig. 3 is a cross-sectional perspective view in which the right-hand portion and the adapter member 8 in Fig. 2 are omitted.
  • Fig. 4 is a perspective view showing the lid body 3 of the storage container 1 according to the first embodiment of the present invention.
  • Fig. 5 is a plan view showing the jig J (jig body J1) which is an object to be stored.
  • Fig. 6A is a plan view showing a state in which a substrate W is held in the jig J.
  • Fig. 6B is a schematic cross-sectional view showing a state in which a substrate W is held in the jig J.
  • Figure 7A is an oblique view of the left side support part 5 and adapter member 8 in a connected state, viewed from the right side.
  • Figure 7B is a right side view of the left side support part 5 and adapter member 8 in a connected state.
  • Figure 7C is a left side view of the left side support part 5 and adapter member 8 in a connected state.
  • Figure 8A is an oblique view of the left side support part 5 as viewed from the right side.
  • Figure 8B is an oblique view of the left side support part 5 as viewed from the left side.
  • Figure 9A is an oblique view of the left adapter member 8 as viewed from the right side.
  • Figure 9B is an oblique view of the left adapter member 8 as viewed from the left side.
  • FIG. 10A is a cross-sectional view taken along a plane perpendicular to the up-down direction D2 in a first state in which the adapter member 8 is not attached in the storage container 1 according to the first embodiment of the present invention.
  • FIG. 10B is a vertical cross-sectional view taken along a plane perpendicular to the left-right direction D3 in the first state.
  • FIG. 11A is a cross-sectional view taken along a plane perpendicular to the up-down direction D2 in a second state in which the adapter member 8 is attached in the storage container 1 according to the first embodiment of the present invention.
  • FIG. 11B is a partially enlarged view of FIG. 11A.
  • FIG. 11C is a perspective view of the second state.
  • FIG. 11D is a vertical cross-sectional view taken along a plane perpendicular to the left-right direction D3 in the second state.
  • the direction from the container body 2 to the lid body 3 is defined as the front direction D11 or front side D11
  • the opposite direction is defined as the rear direction D12 or rear side D12
  • these are collectively defined as the front-rear direction D1.
  • the direction from the lower wall 24 to the upper wall 23 is defined as the upward direction D21 or upper side D21
  • the opposite direction is defined as the downward direction D22 or lower side D22, and these are collectively defined as the up-down direction D2.
  • the direction from the second side wall 26 to the first side wall 25 is defined as the left direction D31 or left side D31
  • the opposite direction is defined as the right direction D32 or right side D32
  • these are collectively defined as the left-right direction D3 or lateral direction D3.
  • the object to be stored in the storage container 1 in the first embodiment is a plate-shaped jig J for a substrate.
  • the jig J in the first embodiment includes a substantially annular plate-shaped jig body J1 and an adhesive sheet J2.
  • the jig body J1 is made of a plate-shaped member that is substantially O-shaped in a plan view (the outer peripheral edge J17 and the inner peripheral edge J18 are substantially circular).
  • the jig body J1 is made of, for example, a metal (for example, SUS).
  • the adhesive sheet J2 is made of a thin-film sheet member having adhesive properties, and is attached to the upper surface J13 of the jig body J1 so as to cover the area inside the inner peripheral edge J18 of the jig body J1.
  • the adhesive sheet J2 is capable of holding the substrate W by its adhesive force.
  • the substrate W is attached and held in the adhesive sheet J2 in an area inside the inner peripheral edge J18 of the jig body J1.
  • the outer peripheral edge J17 of the jig body J1 has a straight front straight edge J11, a straight rear straight edge J12, a straight left straight edge J15, and a straight right straight edge J16 on the front side D11, the rear side D12, the left side D31, and the right side D32, respectively.
  • the substrate W may be subjected to vibrations during processing, but if the substrate W is processed while held by the jig J, the vibrations are reduced by the adhesive sheet J2. Therefore, vibrations are not easily transmitted to the substrate W held by the adhesive sheet J2. Therefore, the substrate W is less likely to be damaged due to vibrations during processing.
  • the storage container 1 of the first embodiment can store, as stored objects, a jig J consisting of only the jig body J1 without the adhesive sheet J2, a jig J comprising the jig body J1 and the adhesive sheet J2, and a jig J holding a substrate W.
  • a jig J consisting of only the jig body J1 without the adhesive sheet J2 is stored.
  • the shape of the jig J (the jig body J1) is not limited to a (closed) ring shape in a plan view, but may be (unclosed) approximately arc-shaped or non-ring-shaped.
  • the substrate W is a disk-shaped silicon wafer, glass wafer, sapphire wafer, or the like, and is a thin substrate used in industry.
  • the substrate W is a silicon wafer having a diameter of 300 mm.
  • the storage container 1 is used as a container for storing a jig J (jig body J1) as an object to be stored, and for storing, conveying, storing, transporting, etc. the jig J by various means, and comprises a container body 2 and a lid 3.
  • the container body 2 comprises a side support portion 5, a rear support portion 6 (see Figures 3, 10A, 11A, etc.), and an adapter member 8 as an optional member.
  • the lid 3 comprises a front retainer 7 (see Figure 4).
  • the storage container 1 can be used in a state where the adapter member 8 is not attached (first state) and in a state where the adapter member 8 is attached (second state) (details will be described later).
  • the container body 2 has a cylindrical wall portion 20 with a container body opening 21 formed at one end and a closed other end.
  • a storage space 27 is formed inside the container body 2.
  • the storage space 27 is surrounded by the wall portion 20.
  • a side support portion 5 is disposed in the portion of the wall portion 20 that forms the storage space 27.
  • a plurality of jigs J can be stored in the storage space 27.
  • the side support parts 5 are provided on the wall part 20 so as to form pairs in the left-right direction D3 within the storage space 27.
  • the side support parts 5 abut against the edges of the multiple jigs J, and are capable of supporting the edges of the multiple jigs J while arranging adjacent jigs J in parallel with a predetermined distance between them.
  • the side support portion 5 can be configured as follows: (1) When the container body opening 21 is not blocked by the lid body 3, the side support portion 5 abuts against the edges of the multiple jigs J, thereby supporting the edges of the multiple jigs J in a state in which adjacent jigs J are spaced apart from each other at a predetermined interval and arranged in parallel (the side support portion 5 does not abut against the edges of the multiple jigs J when the container body opening 21 is blocked by the lid body 3); or (2) When the container body opening 21 is blocked or not blocked by the lid body 3, the side support portion 5 abuts against the edges of the multiple jigs J, thereby supporting the edges of the multiple jigs J in a state in which adjacent jigs J are spaced apart from each other at a predetermined interval and arranged in parallel.
  • the side support portion 5 in this embodiment has the configuration of (2).
  • the rear support portion 6 (see Figures 3, 10A, 11A, etc.) is provided on the wall portion 20 so as to pair with the front retainer 7 (see Figure 4) within the storage space 27.
  • the rear support portion 6 cooperates with the front retainer 7 to abut against the edges of the multiple jigs J, thereby supporting the rear portions of the edges of the multiple jigs J.
  • the lid body 3 is detachable from the opening periphery 28 that forms the container body opening 21, and is capable of closing the container body opening 21.
  • the front retainer 7 is provided on a portion of the lid body 3 that faces the storage space 27 when the container body opening 21 is closed by the lid body 3.
  • the front retainer 7 is disposed inside the storage space 27 so as to form a pair with the rear support part 6 in the front-to-rear direction D1.
  • the front retainer 7 can support the front portions of the edges of the multiple jigs J by abutting against the edges of the multiple jigs J.
  • the front retainer 7 cooperates with the rear support portion 6 to support the multiple jigs J, thereby holding adjacent jigs J in a parallel arrangement with a predetermined distance between them.
  • the storage container 1 is made of resin such as plastic material.
  • resin include thermoplastic resins such as polycarbonate, cycloolefin polymer, polyetherimide, polyetherketone, polybutylene terephthalate, polyetheretherketone, and liquid crystal polymer, as well as alloys of these resins.
  • the wall portion 20 of the container body 2 has a back wall 22, an upper wall 23, a lower wall 24, a first side wall 25 (left side wall), and a second side wall 26 (right side wall).
  • the back wall 22, the upper wall 23, the lower wall 24, the first side wall 25, and the second side wall 26 are made of the materials mentioned above, and are integrally molded.
  • the first side wall 25 and the second side wall 26 face each other in the left-right direction D3, and the upper wall 23 and the lower wall 24 face each other in the up-down direction D2.
  • the rear end of the upper wall 23, the rear end of the lower wall 24, the rear end of the first side wall 25, and the rear end of the second side wall 26 are all connected to the rear wall 22.
  • the front end of the upper wall 23, the front end of the lower wall 24, the front end of the first side wall 25, and the front end of the second side wall 26 are positioned opposite the rear wall 22, and constitute an opening periphery 28 that forms the container body opening 21, which is approximately rectangular in shape.
  • the opening periphery 28 is provided at one end of the container body 2, and the rear wall 22 is located at the other end of the container body 2.
  • the outer shape of the container body 2 formed by the outer surfaces of the walls 20 is box-shaped.
  • the inner surfaces of the walls 20, i.e., the inner surface of the rear wall 22, the inner surface of the upper wall 23, the inner surface of the lower wall 24, the inner surface of the first side wall 25, and the inner surface of the second side wall 26, form a storage space 27 surrounded by these.
  • the container body opening 21 formed in the opening periphery 28 is connected to the storage space 27 formed inside the container body 2, surrounded by the walls 20.
  • the storage space 27 can store, for example, 25 jigs J.
  • the upper wall 23 and the lower wall 24 near the opening periphery 28 are formed with latch engagement recesses 231A, 231B, 241A, and 241B recessed toward the outside in the up-down direction D2 of the storage space 27.
  • a total of four latch engagement recesses 231A, 231B, 241A, and 241B are formed, one each near the left and right ends of the upper wall 23 and the lower wall 24.
  • a top flange 236 is fixed to the outer surface of the upper wall 23.
  • the top flange 236 is a member that is hung on the storage container 1 when suspending the storage container 1 in an AMHS (automated wafer transport system), PGV (wafer substrate transport vehicle), etc.
  • the side support parts 5 are provided on the first side wall 25 and the second side wall 26, respectively, and are interior parts arranged in the storage space 27 in pairs in the left-right direction D3.
  • the side support parts 5 have a plate part 51 and a plate part support part 52.
  • the plate part 51 and the plate part support part 52 are formed by integrally molding a resin material.
  • the plate part 51 is supported by the plate part support part 52.
  • the plate portions 51 extend in the D1-D3 plane and protrude inward in the lateral direction D3.
  • a total of 50 plate portions 51 are provided on each of the first side wall 25 and the second side wall 26, 25 on each side in the vertical direction D2.
  • Adjacent plate portions 51 are spaced apart from each other in the vertical direction D2 by 10 mm to 12 mm and arranged in a parallel relationship.
  • One jig J is arranged between adjacent plate portions 51.
  • another plate-shaped member 59 (see FIG. 8A) is arranged parallel to the plate portion 51.
  • the plate-shaped member 59 acts as a guide for the jig J that is inserted above the plate portion 51 located on the uppermost side D21.
  • the 25 plate sections 51 provided on the first side wall 25 and the 25 plate sections 51 provided on the second side wall 26 are positioned opposite each other in the left-right direction D3.
  • the 50 plate sections 51 and the plate-shaped member 59 that acts as a plate-shaped guide parallel to the plate sections 51 are positioned parallel to the D1-D3 plane.
  • the top surfaces of the plate sections 51 are provided with protrusions 511 and 512.
  • the convex portion 511 protrudes in the upward direction D21 and extends in the left-right direction D3, and the upper end of the convex portion 511 is inclined slightly downward in the downward direction D22 toward the center of the storage space 27. This minimizes the contact area between the upper end of the convex portion 511 and the jig J placed on the convex portion 511, suppressing the generation of particles due to friction between the upper end of the convex portion 511 and the jig body J1.
  • the convex portion 512 has a portion that protrudes in the upward direction D21 and extends in the left-right direction D3 to abut against the jig J, and a plate-like portion that extends from that portion in the rear direction D12.
  • the jig J supported by the plate portion 51 only contacts the protruding ends of the convex portions 511, 512, and does not contact the convex portions 511, 512 in a planar manner.
  • the plate support parts 52 are plate-shaped extending in the D1-D2 plane.
  • the plate support parts 52 have a predetermined length in the longitudinal direction of the plate part 51 (front-rear direction D1), and are connected to the outer edge of the plate part 51 in the lateral direction D3. That is, the 25 plate parts 51 provided on the first side wall 25 are connected to the plate support parts 52 provided on the first side wall 25 side. Similarly, the 25 plate parts 51 provided on the second side wall 26 are connected to the plate support parts 52 provided on the second side wall 26 side.
  • the plate support portion 52 has a front fixing portion 56 on the front side D11 and a rear fixing portion 57 on the rear side D12.
  • the front fixing portion 56 is engaged with the wall fixing portion 201 of the first side wall 25 and the second side wall 26
  • the rear fixing portion 57 is engaged with the wall fixing portion 202 of the first side wall 25 and the second side wall 26, whereby the left and right side support portions 5 are fixed to the first side wall 25 and the second side wall 26, respectively.
  • the side support portions 5 also have a front connection portion 53 on the front side D11 (details will be described later).
  • the side support portion 5 can support the edges of the multiple jigs J while keeping adjacent jigs J apart at a predetermined distance and parallel to each other.
  • the rear support portion 6 is provided on the rear wall 22 and is an interior portion disposed within the storage space 27.
  • the rear support portion 6 has a pair of rear edge support portions 60 in the left-right direction D3.
  • a pair of rear edge support portions 60 are provided in the left-right direction D3, the number of which corresponds to each jig J that can be stored in the storage space 27, specifically 25 of each, for a total of 50.
  • the rear edge support portions 60 are positioned in a pair with the front retainer 7 in the front-rear direction D1.
  • the rear edge support portions 60 are, for example, groove-shaped recessed in the rear direction D12, and support the edge of the jig J.
  • the lid 3 has a generally rectangular shape that generally matches the shape of the opening periphery 28 of the container body 2.
  • the lid 3 is detachable from the opening periphery 28 of the container body 2, and the lid 3 can close the container body opening 21 by attaching the lid 3 to the opening periphery 28.
  • a ring-shaped seal member 4 is attached to a portion of the lid 3 that faces the surface (seal surface) of the step portion formed at the position D12 immediately behind the opening periphery 28 when the lid 3 closes the container body opening 21.
  • the seal member 4 is made of various thermoplastic elastomers such as elastically deformable polyesters and polyolefins, fluororubber, silicone rubber, etc.
  • the seal member 4 is arranged so as to go around the outer periphery of the lid 3.
  • the sealing member 4 When the lid 3 is attached to the opening periphery 28, the sealing member 4 is sandwiched between the sealing surface and the inner surface of the lid 3 and elastically deforms, and the lid 3 closes the container body opening 21 in a sealed state.
  • the jig J By removing the lid 3 from the opening periphery 28, the jig J can be inserted and removed from the storage space 27 inside the container body 2.
  • the lid body 3 has a lid body main body 30 that forms the outer shape of the lid body 3, and a latch mechanism is provided on the lid body main body 30.
  • the latch mechanism is provided near both left and right ends of the lid body main body 30, and includes two upper latch portions 32A that can protrude in the upward direction D21 from the upper side of the lid body main body 30, and two lower latch portions 32B that can protrude in the downward direction D22 from the lower side of the lid body main body 30.
  • the two upper latch portions 32A are located near both left and right ends of the upper side of the lid body main body 30, and the two lower latch portions 32B are located near both left and right ends of the lower side of the lid body main body 30.
  • An operating unit is provided on the outer surface of the lid body 30.
  • the upper latch portion 32A and the lower latch portion 32B can be caused to protrude from the upper and lower edges of the lid body 30, respectively, or can be prevented from protruding from the upper and lower edges.
  • the upper latch portion 32A protrudes in the upward direction D21 from the upper edge of the lid body 30 and engages with the latch engagement recesses 231A and 231B of the container body 2
  • the lower latch portion 32B protrudes in the downward direction D22 from the lower edge of the lid body 30 and engages with the latch engagement recesses 241A and 241B of the container body 2, thereby fixing the lid 3 to the opening periphery 28 of the container body 2.
  • a recess 34 is formed on the inside (rear side D12) of the lid body 30, recessed toward the outside (front side D11) of the storage space 27.
  • the front retainer 7 is fixed in the recess 34.
  • the front retainer 7 is positioned in the portion of the lid 3 facing the storage space 27 and can support the edges of multiple jigs J.
  • the front retainer 7 has receiving portions 73.
  • the receiving portions 73 are arranged in pairs, two apart at a predetermined distance in the left-right direction D3.
  • the receiving portions 73 arranged in pairs in this manner are provided in 25 pairs parallel to each other in the up-down direction D2, and each is supported by elastically deformable legs 72.
  • the receiving portion 73 has a lower inclined surface and an upper inclined surface, which together form a roughly V-shaped groove.
  • the adapter member 8 As shown in Figures 9A to 11D, the adapter member 8 is disposed between the container body opening 21 and the side support part 5 in the storage space 27 in the front-to-rear direction D1, which is the direction connecting one end and the other end of the container body 2.
  • the adapter member 8 has guide parts 81 disposed in correspondence with some or all of the multiple plate parts 51 in the side support part 5.
  • One guide part 81 is provided for each of the multiple plate parts 51.
  • the adapter member 8 is configured to be freely attached and detached to the side support part 5 and/or the container body 2.
  • the adapter member 8 is configured to be detachable from the side support portion 5.
  • the guide portion 81 is disposed corresponding to a portion of the plurality of plate portions 51, with one guide portion 81 provided for every two plate portions 51.
  • the guide portions 81 are disposed on every other one of the plurality of plate portions 51 in the upward direction D21 from a position corresponding to the plate portion 51 on the lowest side D22.
  • the adapter member 8 is provided on both the left side D31 and the right side D32.
  • the adapter member 8 on the left side D31 is connected to the side support part 5 of the left side D31 and is supported on the first side wall 25 via the side support part 5 of the left side D31.
  • the adapter member 8 on the right side D32 is connected to the side support part 5 of the right side D32 and is supported on the second side wall 26 via the side support part 5 of the right side D32.
  • the configurations of the adapter member 8 and the side support part 5 are the same on the left side D31 and the right side D32, so the following description will be based on the adapter member 8 and the side support part 5 on the left side as a representative.
  • the adapter members 8 are interior parts arranged in the storage space 27 in a pair in the left-right direction D3. Specifically, as shown in Figures 7A to 7C and 9A to 9B, the adapter members 8 have a guide part 81 and a guide part support part 82.
  • the guide part 81 and the guide part support part 82 are formed by integrally molding a resin material, and the guide part 81 is supported by the guide part support part 82.
  • the guide portions 81 are plate-shaped extending in the D1-D3 plane and protruding inward in the lateral direction D3.
  • a total of 26 guide portions 81 are provided on each of the left side D31 and right side D32, 13 on each side in the vertical direction D2.
  • Adjacent guide portions 81 are spaced apart in the vertical direction D2 at intervals of 20 mm to 24 mm and are positioned parallel to each other. As shown in FIG. 7B, the guide portions 81 are not provided at positions corresponding to the plate-shaped members 59.
  • the 13 guide sections 81 on the left side D31 and the 13 guide sections 81 on the right side D32 are positioned opposite each other in the left-right direction D3.
  • the 26 guide sections 81 are positioned approximately parallel to the D1-D3 plane.
  • one or more jigs J can be placed between adjacent guide parts 81.
  • one or more jigs J can be sandwiched between adjacent guide parts 81.
  • the jig J is not placed between adjacent guide parts 81, as shown by the two-dot chain line in FIG. 11A.
  • the height (position) of the rear end 817 of the upper surface 816 of the rear side D12 of the guide portion 81 is substantially the same as the height (position) of the front end 517 of the upper surface 516 of the front side D11 of the plate portion 51.
  • the gap in the front-to-rear direction D1 between the rear end 817 of the guide portion 81 and the front end 517 of the upper surface 516 of the plate portion 51 is minimal.
  • the rear end 817 of the upper surface 816 of the guide portion 81 and the front end 517 of the upper surface 516 of the plate portion 51 are designed to be continuous in the front-to-rear direction D1.
  • the guide support portion 82 is a plate extending in the D1-D2 plane.
  • the guide support portion 82 has a predetermined length in the longitudinal direction of the guide portion 81 (front-rear direction D1) and is connected to the outer edge of the guide portion 81 in the lateral direction D3.
  • the 13 guide portions 81 on the left side D31 are connected to the guide portion support portion 82 on the left side D31.
  • the 13 guide portions 81 on the right side D32 are connected to the guide portion support portion 82 on the right side D32.
  • the guide portion support portion 82 has a rear connection portion 83 on the rear side D12.
  • the left and right guide portions 81 are fixed to the left and right side support portions 5 by connecting the rear connection portion 83 to the front connection portion 53 of the side support portion 5.
  • the left and right adapter members 8 are fixed to the left and right first side walls 25 and second side walls 26 via the side support portions 5, respectively.
  • the guide portion 81 has a function (guide function) of guiding the jig J, which is the object to be stored, at a position between the container body opening 21 of the container body 2 and the side support portion 5, for example, when inserting the jig J between the adjacent plate portions 51, 51 of the side support portion 5, or when pulling the jig J out from between the adjacent plate portions 51, 51 of the side support portion 5 and removing it.
  • a function guide function
  • the guide portion 81 has a structure (upward directing structure) that directs the sliding direction of the stored object J (jig) sliding on the upper surface 816 of the guide portion 81 upward.
  • the guide portion 81 has a direction guide portion 811.
  • the direction guide portion 811 is formed by having a shape in which the front side D11 portion of the upper surface 816 of the guide portion 81 has a gradually rising shape toward the rear direction D12. Note that the upward directing structure is omitted in some drawings (the upper surface 816 of the guide portion 81 is shown flat).
  • the rear side D12 portion of the upper surface 816 of the guide portion 81 also has a shape that gradually rises toward the front direction D11.
  • the adapter member 8 is an optional member, and the storage container 1 can be used without the adapter member 8 attached (first state).
  • the guide function of the guide portion 81 described above is not performed, but the jig J, which is the object to be stored, can be inserted between the adjacent plate portions 51, 51 of the side support portion 5, or the jig J can be pulled out from between the adjacent plate portions 51, 51 of the side support portion 5 and removed.
  • the jig J shown by the two-dot chain line is inserted between the adjacent plate portions 51, 51 of the side support portion 5.
  • the jig J shown by the solid line is located on the front side D11 of the plate portion 51, is not inserted between the adjacent plate portions 51, 51, and is not in a state where the guide function described above is performed.
  • the storage container 1 can be used even when the adapter member 8 is attached (second state).
  • a state in which the above-mentioned guide function is exerted is created, and in this state, the jig J, which is the object to be stored, can be inserted between the adjacent plate portions 51, 51 of the side support portion 5, or the jig J can be pulled out from between the adjacent plate portions 51, 51 of the side support portion 5 and removed.
  • the jig J shown by the two-dot chain line is inserted between the adjacent plate portions 51, 51 of the side support portion 5.
  • the jig J shown by the solid line is located on the front side D11 of the plate portion 51, and is not inserted between the adjacent plate portions 51, 51, but is in a state in which the above-mentioned guide function is exerted.
  • first state There are various ways to distinguish between the first state and the second state. For example, if some users want a product (storage container) in the first state and others want a product in the second state, the manufacturer needs to prepare (line up) products in the first state and products in the second state. However, if the adapter member 8 is configured to be detachable, a product in the second state can be manufactured simply by attaching the adapter member 8 to a product in the first state, minimizing the number of types of components. Also, if some users want to use the product in either the first or second state, the user can change the product to either the first or second state simply by attaching and detaching the adapter member 8.
  • FIG. 12A is a schematic diagram showing the step between the adapter member 8 and the side support section 5 in the comparative embodiment.
  • FIG. 12B is a schematic diagram showing the state in which the jig J, which is the stored object, is caught on the step between the adapter member 8 and the side support section 5 in the comparative embodiment.
  • FIG. 13A is a schematic diagram showing the step between the adapter member 8 and the side support section 5 in the first embodiment of the present invention.
  • FIG. 13B is a schematic diagram showing the state in which the jig J, which is the stored object moving in the rear direction D12, slides up on the adapter member 8 in the first embodiment of the present invention.
  • FIG. 12A is a schematic diagram showing the step between the adapter member 8 and the side support section 5 in the comparative embodiment.
  • FIG. 12B is a schematic diagram showing the state in which the jig J, which is the stored object moving in the rear direction D12, slides up on the adapter member 8 in the first embodiment of the present invention
  • FIG. 13C is a schematic diagram showing the state in which the jig J moves above the step between the adapter member 8 and the side support section 5 in the first embodiment of the present invention.
  • FIG. 14 is a schematic diagram showing the state in which the jig J, which is the stored object moving in the forward direction D11, slides up on the adapter member 8 in the first embodiment of the present invention.
  • the guide portion 81 does not have the above-mentioned upward directional structure.
  • the comparative example is also one of the embodiments of the present invention (it can also be called the second embodiment) simply because it does not have an upward directional structure.
  • the upper surface 816 of the guide portion 81 of the adapter member 8 is a straight plane extending in the D1-D3 plane. In the first state in which the adapter member 8 and the side support portion 5 are attached, the upper surface 816 of the guide portion 81 and the upper surface 516 of the plate portion 51 are basically (by design) flush (same height).
  • the height (position) of the upper surface 816 (rear end portion 817) of the rear side D12 of the guide portion 81 may be lower than the height (position) of the upper surface 516 (front end portion 517) of the front side D11 of the plate portion 51, as shown by the dashed line in FIG. 12A.
  • the outer periphery J1 of the jig J may get caught (strike) on the front end 517 (which can also be called a step) of the plate portion 51 when it passes the rear end 817 of the guide portion 81, and may not be able to move any further in the rear direction D12. In that case, the jig J cannot be positioned above the plate portion 51. Note that this is not limited to the case of a step, and the same phenomenon can also occur when there is a large gap between the rear end 817 of the guide portion 81 and the front end 517 of the plate portion 51.
  • the guide portion 81 has a structure (upward directing structure) that directs the sliding direction of the stored object J (jig) sliding on the upper surface 816 of the guide portion 81 upward.
  • the height (position) of the upper surface 816 (rear end 817) of the rear side D12 of the guide section 81 is lower than the height (position) of the upper surface 516 (front end 517) of the front side D11 of the plate section 51.
  • the height (position) of the upper surface 516 (front end 517) of the front side D11 of the plate section 51 is higher than the height (position) of the upper surface 816 (rear end 817) of the rear side D12 of the guide section 81.
  • the guide section 81 in the first embodiment has an upward directional structure. Therefore, as shown in FIG.
  • the sliding direction D4 of the stored object J (jig) sliding on the upper surface 816 of the guide section 81 is oriented upward.
  • the jig J slides in a diagonally rearward and upward direction (a direction between the rearward direction D12 and the upward direction D21) so that its lower surface J14 slides on the upper surface 816 of the guide section 81. Therefore, as shown in Figures 13C and 11D, when the outer periphery J17 of the jig body J1 of the jig J passes the rear end 817 of the guide portion 81, it easily passes the front end 517 of the plate portion 51 and moves in the rear direction D12. As a result, the jig J can be easily positioned above the plate portion 51.
  • the rear side D12 of the upper surface 816 of the guide portion 81 also has a shape that gradually rises toward the forward direction D11. Therefore, in the process of moving the jig body J1 of the jig J located at the side support portion 5 in the forward direction D11 and taking it out of the container body opening 21 via the guide portion 81 to the outside, the sliding direction D4 of the jig J sliding on the upper surface 816 of the guide portion 81 is directed upward.
  • the jig J slides in an obliquely forward-upward direction (a direction between the forward direction D11 and the upward direction D21) so that its lower surface J14 slides on the upper surface 816 of the guide portion 81.
  • the jig J slides up and is supported at a position higher than the plate portion 51. Therefore, the outer peripheral edge J17 of the jig J is less likely to hit the joint between the guide portion 81 and the plate portion 51, so that the jig J can be prevented from getting caught.
  • the storage container 1 includes a container body 2 having a storage space 27 formed therein in which a plurality of objects J to be stored in parallel are stored, an opening periphery 28 formed with a container body opening 21 communicating with the storage space 27 at one end and a closed other end, a lid 3 that is detachable from the container body opening 21 and capable of closing the container body opening 21, a side support part 5 that is arranged in pairs in the storage space 27 and can support the edges of the plurality of objects J to be stored when adjacent objects J among the plurality of objects J are arranged in parallel at a predetermined distance apart, the side support part 5 having a plurality of plate parts 51 arranged between the adjacent objects J, and an adapter member 8 that is arranged between the container body opening 21 and the side support part 5 in the storage space 27 in the front-rear direction D1 connecting the one end and the other end of the container body 2, the adapter member 8 having a guide part 81 arranged corresponding to some
  • the storage container 1 By attaching and detaching the adapter member 8, the storage container 1 according to the first embodiment can easily change the range in which it exerts its support function for the stored object J.
  • the rear side D12 part of the jig J in particular may sag.
  • the sagging part of the jig J located above is likely to come into contact with another jig J located below (and/or the substrate W held thereon, if any) (in FIG. 10B, the jig J located above may appear to be supported by the plate parts 51 of the side support parts 5, but as shown in FIG. 10A, the jig J located above is not supported by the plate parts 51 of the side support parts 5).
  • an adapter member 8 is disposed between the container body opening 21 and the side support portion 5 in the storage space 27. Therefore, the sagging portion of the jig J located above is restricted from sagging further downward by the guide portion 81 of the adapter member 8, and is prevented from coming into contact with another jig J or the substrate W located below.
  • one guide portion 81 is provided for each of the multiple (two) plate portions 51. This increases the size of the entrance portion in the vertical direction D2 when the jig J is inserted between the adjacent plate portions 51, 51 of the side support portion 5, thereby achieving, for example, the following effects.
  • the jig J may be inserted between the adjacent plate portions 51, 51 of the side support portion 5 by gripping only the front side D11 portion of the jig J with a jig gripping device (not shown). When gripped and inserted in this manner, the gripped portion of the jig J on the front side D11 is significantly deflected.
  • one guide portion 81 is provided for each of the multiple plate portions 51, the possibility of the jig J with the front side D11 portion being significantly deflected coming into contact with the guide portion 81 can be reduced.
  • the guide portion 81 has a structure that directs the sliding direction D4 of the stored item J sliding on the upper surface 816 of the guide portion 81 upward.
  • the adapter member 8 may be capable of being supported directly or indirectly on the container body 2.
  • the adapter member 8 may be directly supported on the first side wall 25 or the second side wall 26 of the container body 2.
  • the adapter member 8 may be supported on both the side support portion 5 and the container body 2.
  • the guide portions 81 of the adapter member 8 may be provided one by one (without skipping) for each plate portion 51 of the side support portion 5.
  • the guide portions 81 may be provided one by one for every three to five plate portions 51.
  • the pitch of the guide portions 81 in the vertical direction D2 may be equal pitch (equal cycle) or unequal pitch (unequal cycle).
  • the entire upper surface 816 of the guide portion 81 may have a shape that gradually rises toward the rear direction D12.
  • the object to be stored may be a single board or a jig holding a board.
  • the side support parts 5 and the rear support part 6 may form a single interior part that is fixed to the container body 2 inside the container body 2.
  • the rear support part 6 may be integrally molded with the container body 2.

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Abstract

This housing container 1 is provided with: a container main body 2 that is internally provided with a housing space 27, in which objects J to be housed can be housed side by side, and has one end provided with an opening peripheral part 28 in which a container main body opening 21 is formed, the container main body opening 21 being in communication with the housing space 27, while having the other end closed; a cover body 3 which is capable of closing the container main body opening 21; a lateral support part 5 which is disposed within the housing space 27 and is capable of supporting edges of the plurality of objects J to be housed in a state where the plurality of objects J to be housed are arranged side by side such that adjacent objects J to be housed are at a specific distance from each other, and which has a plurality of plate parts 51 that are each disposed between adjacent objects J to be housed; and an adapter member 8 which is disposed between the container main body opening 21 and the lateral support part 5 in the housing space 27 in a front-back direction D1 connecting the one end and the other end of the container main body 2, and which has a guide part 81 that is disposed so as to correspond to some or all of the plurality of plate parts 51. The adapter member 8 is configured so as to be freely attachable to and detachable from the lateral support part 5 or the container main body 2.

Description

収納容器及びアダプター部材Storage container and adapter member
 本発明は、半導体ウェーハ等の基板やその治具などの被収納物を収納、搬送、保管、輸送等をする際に使用される収納容器、及び収納容器におけるアダプター部材に関する。 The present invention relates to a storage container used for storing, conveying, storing, transporting, etc., items to be stored, such as substrates such as semiconductor wafers and their jigs, and an adapter member for the storage container.
 半導体ウェーハ等の基板やその治具を収納して搬送するための収納容器としては、容器本体と蓋体とを備える構成のものが、従来より知られている(例えば、特許文献1参照)。 Storage containers for storing and transporting substrates such as semiconductor wafers and associated jigs have been known that are configured to include a container body and a lid (see, for example, Patent Document 1).
 容器本体の一端部は、容器本体開口部が形成された開口周縁部を有する。容器本体の他端部は、閉塞された筒状の壁部を有する。容器本体内には収納空間が形成されている。収納空間は、壁部により取り囲まれて形成されており、複数の被収納物(基板や治具など)を収納可能である。蓋体は、開口周縁部に対して着脱可能であり、容器本体開口部を閉塞可能である。側方支持部は、収納空間内において対をなすように壁部に設けられている。側方支持部は、隣接する被収納物同士を所定の間隔で離間させて並列させた状態で、複数の被収納物の縁部を支持可能である。 One end of the container body has an opening periphery where the container body opening is formed. The other end of the container body has a closed cylindrical wall. A storage space is formed within the container body. The storage space is surrounded by the wall and is capable of storing multiple stored objects (such as circuit boards and jigs). The lid is detachable from the opening periphery and is capable of closing the container body opening. The side support parts are provided on the wall parts so as to form a pair within the storage space. The side support parts are capable of supporting the edges of multiple stored objects while arranging adjacent stored objects in parallel with a predetermined distance between them.
 蓋体の部分であって容器本体開口部を閉塞しているときに収納空間に対向する部分には、フロントリテーナが設けられている。フロントリテーナは、蓋体によって容器本体開口部が閉塞されているときに、複数の被収納物の縁部を支持可能である。また、フロントリテーナと対をなすようにして、奥側支持部が壁部に設けられている。奥側支持部は、蓋体によって容器本体開口部が閉塞されているときに、フロントリテーナと協働して、隣接する被収納物同士を所定の間隔で離間させて並列させた状態で、複数の被収納物の縁部を支持可能である。 A front retainer is provided on the portion of the lid that faces the storage space when the container body opening is closed. The front retainer is capable of supporting the edges of multiple stored objects when the container body opening is closed by the lid. A rear support portion is provided on the wall to pair with the front retainer. When the container body opening is closed by the lid, the rear support portion cooperates with the front retainer to support the edges of multiple stored objects while arranging adjacent stored objects in parallel with a predetermined distance between them.
特許第6445027号公報Japanese Patent No. 6445027
 側方支持部の前端部は、種々の制約(規格など)や仕様などにより、容器本体開口部の近傍に配置されずに、容器本体開口部から後方向に離れて配置されることが多い。例えば、被収納物が基板の場合、そのような配置を採ることが多い。側方支持部が容器本体開口部の近傍に配置されていない構成においては、容器本体開口部を介して被収納物を後方向に移動させて収納空間に配置させる過程や、収納空間に配置されている被収納物を、容器本体開口部を介して前方向に引き出して容器本体から取り出す過程において、被収納物が側方支持部の上方の位置に配置されていない状況では、側方支持部による被収納物の支持機能は発揮されない。一方、収納容器の一部の使用者は、被収納物の支持機能を容器本体開口部の近傍でも発揮できることを期待している。 Due to various constraints (standards, etc.) and specifications, the front end of the side support part is often not located near the opening of the container body, but is located away from the opening in the rear direction. For example, such an arrangement is often adopted when the stored object is a board. In a configuration in which the side support part is not located near the opening of the container body, the support function of the side support part for the stored object is not exerted in the process of moving the stored object rearward through the opening of the container body and placing it in the storage space, or in the process of pulling the stored object placed in the storage space forward through the opening of the container body and removing it from the container body, if the stored object is not located above the side support part. On the other hand, some users of storage containers expect the support function for the stored object to be exerted even near the opening of the container body.
 本発明は、被収納物の支持機能が発揮される範囲の変更を簡易な構成で実現することができる収納容器、及び収納容器におけるアダプター部材を提供することを目的とする。 The present invention aims to provide a storage container that can change the range in which the support function for the stored object is exerted with a simple configuration, and an adapter member for the storage container.
(1)本発明は、複数の被収納物を並列に収納可能な収納空間が内部に形成され、一端部に前記収納空間に連通する容器本体開口部が形成された開口周縁部を有し、他端部が閉塞されている容器本体と、前記容器本体開口部に対して着脱可能であり、前記容器本体開口部を閉塞可能な蓋体と、前記収納空間内において対をなすように配置され、複数の前記被収納物のうちの隣接する前記被収納物を所定の間隔で離間させて並列させた状態で、前記複数の被収納物の縁部を支持可能な側方支持部であって、隣接する前記被収納物の間に配置される複数の板部を有する側方支持部と、前記容器本体の前記一端部と前記他端部とを結ぶ前後方向において、前記収納空間における前記容器本体開口部と前記側方支持部との間に配置されるアダプター部材であって、複数の前記板部の一部又は全部に対応して配置されるガイド部を有するアダプター部材とを、備え、前記アダプター部材は、前記側方支持部又は前記容器本体に着脱自在に構成されている、収納容器に関する。 (1) The present invention relates to a storage container comprising: a container body having a storage space formed therein capable of storing a plurality of objects in parallel, one end of which is formed with an opening periphery with a container body opening communicating with the storage space and the other end closed; a lid that is detachable from the container body opening and capable of closing the container body opening; a side support part that is arranged in a pair in the storage space and capable of supporting the edges of the plurality of objects when adjacent objects among the plurality of objects are arranged in parallel with a predetermined distance between them, the side support part having a plurality of plate parts that are arranged between the adjacent objects; and an adapter member that is arranged between the container body opening and the side support part in the storage space in the front-rear direction connecting the one end and the other end of the container body, the adapter member having a guide part that is arranged corresponding to some or all of the plurality of plate parts, the adapter member being configured to be detachable from the side support part or the container body.
(2)前記ガイド部は、複数の前記板部ごとに、1つ設けられる、(1)に記載の収納容器。 (2) The storage container described in (1), in which one guide portion is provided for each of the multiple plate portions.
(3)前記ガイド部は、前記ガイド部の上面の上をスライドする被収納物のスライド方向を上向きに指向させる構造を有する、(1)又は(2)に記載の収納容器。 (3) The storage container according to (1) or (2), wherein the guide portion has a structure that directs the sliding direction of the stored object sliding on the upper surface of the guide portion upward.
(4)、前記被収納物は、基板、及び/又は基板用の板状の治具である、(1)~(3)のいずれかに記載の収納容器。 (4) A storage container according to any one of (1) to (3), in which the object to be stored is a substrate and/or a plate-shaped jig for a substrate.
(5)本発明は、複数の被収納物を並列に収納可能な収納空間が内部に形成され、一端部に前記収納空間に連通する容器本体開口部が形成された開口周縁部を有し、他端部が閉塞されている容器本体と、前記容器本体開口部に対して着脱可能であり、前記容器本体開口部を閉塞可能な蓋体と、前記収納空間内において対をなすように配置され、複数の前記被収納物のうちの隣接する前記被収納物を所定の間隔で離間させて並列させた状態で、前記複数の被収納物の縁部を支持可能な側方支持部であって、隣接する前記被収納物の間に配置される複数の板部を有する側方支持部と、前記容器本体の前記一端部と前記他端部とを結ぶ前後方向において、前記収納空間における前記容器本体開口部と前記側方支持部との間に配置されるアダプター部材であって、複数の前記板部の一部又は全部に対応して配置されるガイド部を有するアダプター部材とを、備える収納容器におけるアダプター部材であって、前記アダプター部材は、前記側方支持部又は前記容器本体に着脱自在に構成されている、アダプター部材に関する。 (5) The present invention relates to an adapter member for a storage container including: a container body having a storage space formed therein capable of storing multiple objects in parallel, one end of which is formed with an opening periphery with a container body opening communicating with the storage space and the other end closed; a lid that is detachable from the container body opening and capable of closing the container body opening; a side support part that is arranged in a pair in the storage space and capable of supporting the edges of the multiple objects when adjacent objects among the multiple objects are arranged in parallel at a predetermined distance from each other, the side support part having multiple plate parts arranged between the adjacent objects; and an adapter member that is arranged between the container body opening and the side support part in the storage space in the front-rear direction connecting the one end and the other end of the container body, the adapter member having guide parts arranged corresponding to some or all of the multiple plate parts, the adapter member being configured to be detachable from the side support part or the container body.
 本発明によれば、被収納物の支持機能が発揮される範囲の変更を簡易な構成で実現することができる収納容器、及び収納容器におけるアダプター部材を提供することができる。 The present invention provides a storage container that can change the range in which the support function for the stored object is exerted with a simple configuration, and an adapter member for the storage container.
本発明の第1実施形態に係る収納容器1に複数の治具Jが収納された様子を示す分解斜視図である。1 is an exploded perspective view showing a state in which a plurality of jigs J are stored in a storage container 1 according to a first embodiment of the present invention. FIG. 本発明の第1実施形態に係る収納容器1の容器本体2を下方から示す斜視図である。1 is a perspective view showing a container body 2 of a storage container 1 according to a first embodiment of the present invention, viewed from below. 図2について右側の部分及びアダプター部材8を省略した断面斜視図である。FIG. 3 is a sectional perspective view in which the right-hand portion of FIG. 2 and the adapter member 8 are omitted. 本発明の第1実施形態に係る収納容器1の蓋体3を示す斜視図である。1 is a perspective view showing a lid 3 of a storage container 1 according to a first embodiment of the present invention. 被収納物である治具J(治具本体J1)を示す平面図である。1 is a plan view showing a jig J (jig body J1) which is an object to be stored. 治具Jに基板Wが保持されている状態を示す平面図である。1 is a plan view showing a state in which a substrate W is held by a jig J. FIG. 治具Jに基板Wが保持されている状態を示す模式的断面図である。2 is a schematic cross-sectional view showing a state in which a substrate W is held by a jig J. FIG. 左側の接続状態の側方支持部5及びアダプター部材8を右側から視た斜視図である。FIG. 13 is a perspective view of the side support part 5 and the adapter member 8 in a connected state on the left side, as viewed from the right side. 左側の接続状態の側方支持部5及びアダプター部材8の右側面図である。FIG. 13 is a right side view of the side support part 5 and the adapter member 8 in a connected state on the left side. 左側の接続状態の側方支持部5及びアダプター部材8の左側面図である。FIG. 13 is a left side view of the lateral support part 5 and the adapter member 8 in a connected state on the left side. 左側の側方支持部5を右側から視た斜視図である。1 is a perspective view of the left side support portion 5 as viewed from the right side. FIG. 左側の側方支持部5を左側から視た斜視図である。FIG. 2 is a perspective view of the left side support portion 5 as viewed from the left side. 左側のアダプター部材8を右側から視た斜視図である。1 is a perspective view of the left adapter member 8 as viewed from the right side. 左側のアダプター部材8を左側から視た斜視図である。FIG. 2 is a perspective view of the left adapter member 8 as viewed from the left side. 本発明の第1実施形態に係る収納容器1においてアダプター部材8が装着されていない第1状態について、上下方向D2に直交する平面で切断した横断面図である。1 is a cross-sectional view of a storage container 1 according to a first embodiment of the present invention in a first state in which an adapter member 8 is not attached, taken along a plane perpendicular to the up-down direction D2. FIG. 第1状態について、左右方向D3に直交する平面で切断した縦断面図である。FIG. 2 is a longitudinal cross-sectional view of the first state taken along a plane perpendicular to the left-right direction D3. 本発明の第1実施形態に係る収納容器1においてアダプター部材8が装着されている第2状態について、上下方向D2に直交する平面で切断した横断面図である。1 is a cross-sectional view taken along a plane perpendicular to the vertical direction D2, showing a second state in which an adapter member 8 is attached to the storage container 1 according to the first embodiment of the present invention. FIG. 図11Aの部分拡大図である。FIG. 11B is a partially enlarged view of FIG. 11A. 第2状態の斜視図である。FIG. 第2状態について、左右方向D3に直交する平面で切断した縦断面図である。FIG. 4 is a longitudinal cross-sectional view of the second state taken along a plane perpendicular to the left-right direction D3. 比較形態において、アダプター部材8と側方支持部5との段差を示す模式図である。13 is a schematic diagram showing a step between an adapter member 8 and a side support portion 5 in a comparative example. FIG. 比較形態において、被収納物である治具Jがアダプター部材8と側方支持部5との段差に引っ掛かった状態を示す模式図である。13 is a schematic diagram showing a state in which a jig J, which is an object to be stored, is caught on a step between an adapter member 8 and a side support portion 5 in the comparative embodiment. FIG. 本発明の第1実施形態において、アダプター部材8と側方支持部5との段差を示す模式図である。4 is a schematic diagram showing a step between an adapter member 8 and a side support portion 5 in the first embodiment of the present invention. FIG. 本発明の第1実施形態において、後方向D12へ移動している被収納物である治具Jがアダプター部材8の上を滑り上がる状態を示す模式図である。FIG. 11 is a schematic diagram showing a state in which a jig J, which is a stored object, moving in a rear direction D12 slides up on an adapter member 8 in the first embodiment of the present invention. 本発明の第1実施形態において、治具Jがアダプター部材8と側方支持部5との段差の上方を移動する状態示す模式図である。FIG. 2 is a schematic diagram showing a state in which a jig J moves above a step between an adapter member 8 and a side support portion 5 in the first embodiment of the present invention. 本発明の第1実施形態において、前方向D11へ移動している被収納物である治具Jがアダプター部材8の上を滑り上がる状態を示す模式図である。FIG. 11 is a schematic diagram showing a state in which a jig J, which is a stored object, moving in a forward direction D11 slides up on an adapter member 8 in the first embodiment of the present invention.
 以下、第1実施形態による収納容器1について、図面を参照しながら説明する。図1は、本発明の第1実施形態に係る収納容器1に複数の治具Jが収納された様子を示す分解斜視図である。図2は、本発明の第1実施形態に係る収納容器1の容器本体2を下方から示す斜視図である。図3は、図2について右側の部分及びアダプター部材8を省略した断面斜視図である。図4は、本発明の第1実施形態に係る収納容器1の蓋体3を示す斜視図である。図5は、被収納物である治具J(治具本体J1)を示す平面図である。図6Aは、治具Jに基板Wが保持されている状態を示す平面図である。図6Bは、治具Jに基板Wが保持されている状態を示す模式的断面図である。 The storage container 1 according to the first embodiment will be described below with reference to the drawings. Fig. 1 is an exploded perspective view showing a state in which a plurality of jigs J are stored in the storage container 1 according to the first embodiment of the present invention. Fig. 2 is a perspective view showing the container body 2 of the storage container 1 according to the first embodiment of the present invention from below. Fig. 3 is a cross-sectional perspective view in which the right-hand portion and the adapter member 8 in Fig. 2 are omitted. Fig. 4 is a perspective view showing the lid body 3 of the storage container 1 according to the first embodiment of the present invention. Fig. 5 is a plan view showing the jig J (jig body J1) which is an object to be stored. Fig. 6A is a plan view showing a state in which a substrate W is held in the jig J. Fig. 6B is a schematic cross-sectional view showing a state in which a substrate W is held in the jig J.
 図7Aは、左側の接続状態の側方支持部5及びアダプター部材8を右側から視た斜視図である。図7Bは、左側の接続状態の側方支持部5及びアダプター部材8の右側面図である。図7Cは、左側の接続状態の側方支持部5及びアダプター部材8の左側面図である。図8Aは、左側の側方支持部5を右側から視た斜視図である。図8Bは、左側の側方支持部5を左側から視た斜視図である。図9Aは、左側のアダプター部材8を右側から視た斜視図である。図9Bは、左側のアダプター部材8を左側から視た斜視図である。 Figure 7A is an oblique view of the left side support part 5 and adapter member 8 in a connected state, viewed from the right side. Figure 7B is a right side view of the left side support part 5 and adapter member 8 in a connected state. Figure 7C is a left side view of the left side support part 5 and adapter member 8 in a connected state. Figure 8A is an oblique view of the left side support part 5 as viewed from the right side. Figure 8B is an oblique view of the left side support part 5 as viewed from the left side. Figure 9A is an oblique view of the left adapter member 8 as viewed from the right side. Figure 9B is an oblique view of the left adapter member 8 as viewed from the left side.
 図10Aは、本発明の第1実施形態に係る収納容器1においてアダプター部材8が装着されていない第1状態について、上下方向D2に直交する平面で切断した横断面図である。図10Bは、第1状態について、左右方向D3に直交する平面で切断した縦断面図である。図11Aは、本発明の第1実施形態に係る収納容器1においてアダプター部材8が装着されている第2状態について、上下方向D2に直交する平面で切断した横断面図である。図11Bは、図11Aの部分拡大図である。図11Cは、第2状態の斜視図である。図11Dは、第2状態について、左右方向D3に直交する平面で切断した縦断面図である。 FIG. 10A is a cross-sectional view taken along a plane perpendicular to the up-down direction D2 in a first state in which the adapter member 8 is not attached in the storage container 1 according to the first embodiment of the present invention. FIG. 10B is a vertical cross-sectional view taken along a plane perpendicular to the left-right direction D3 in the first state. FIG. 11A is a cross-sectional view taken along a plane perpendicular to the up-down direction D2 in a second state in which the adapter member 8 is attached in the storage container 1 according to the first embodiment of the present invention. FIG. 11B is a partially enlarged view of FIG. 11A. FIG. 11C is a perspective view of the second state. FIG. 11D is a vertical cross-sectional view taken along a plane perpendicular to the left-right direction D3 in the second state.
 ここで、説明の便宜上、後述の容器本体2から蓋体3へ向かう方向(図1における右上から左下へ向かう方向)を前方向D11又は前側D11と定義し、その反対の方向を後方向D12又は後ろ側D12と定義し、これらを合わせて前後方向D1と定義する。また、後述の下壁24から上壁23へと向かう方向(図1における上方向)を上方向D21又は上側D21と定義し、その反対の方向を下方向D22又は下側D22と定義し、これらを合わせて上下方向D2と定義する。また、後述の第2側壁26から第1側壁25へと向かう方向(図1における右下から左上へ向かう方向)を左方向D31又は左側D31と定義し、その反対の方向を右方向D32又は右側D32と定義し、これらを合わせて左右方向D3又は横方向D3と定義する。一部の図面には、これらの方向を示す矢印を図示している。 For ease of explanation, the direction from the container body 2 to the lid body 3 (from the upper right to the lower left in FIG. 1) is defined as the front direction D11 or front side D11, the opposite direction is defined as the rear direction D12 or rear side D12, and these are collectively defined as the front-rear direction D1. The direction from the lower wall 24 to the upper wall 23 (upward direction in FIG. 1) is defined as the upward direction D21 or upper side D21, the opposite direction is defined as the downward direction D22 or lower side D22, and these are collectively defined as the up-down direction D2. The direction from the second side wall 26 to the first side wall 25 (from the lower right to the upper left in FIG. 1) is defined as the left direction D31 or left side D31, the opposite direction is defined as the right direction D32 or right side D32, and these are collectively defined as the left-right direction D3 or lateral direction D3. Some drawings include arrows indicating these directions.
 図1~図3に示すように、第1実施形態において収納容器1に収納される被収納物は、基板用の板状の治具Jである。図5~図6Bに示すように、第1実施形態における治具Jは、略円環板状の治具本体J1と粘着シートJ2とを備える。治具本体J1は、平面視で略O字状(外周縁J17及び内周縁J18が略円状)の板状部材からなる。治具本体J1は、例えば、金属(例えば、SUS)製である。粘着シートJ2は、粘着性を有する薄膜状のシート部材からなり、治具本体J1の内周縁J18の内側の領域を塞ぐように、治具本体J1の上面J13に取り付けられている。粘着シートJ2は、その粘着力により、基板Wを保持可能である。基板Wは、粘着シートJ2における、治具本体J1の内周縁J18よりも内側の領域に、貼り付けられて保持される。治具本体J1の外周縁J17において、前側D11、後ろ側D12、左側D31及び右側D32それぞれに、直線状の前方直縁J11、後方直縁J12、左方直縁J15及び右方直縁J16が設けられている。 As shown in Figures 1 to 3, the object to be stored in the storage container 1 in the first embodiment is a plate-shaped jig J for a substrate. As shown in Figures 5 to 6B, the jig J in the first embodiment includes a substantially annular plate-shaped jig body J1 and an adhesive sheet J2. The jig body J1 is made of a plate-shaped member that is substantially O-shaped in a plan view (the outer peripheral edge J17 and the inner peripheral edge J18 are substantially circular). The jig body J1 is made of, for example, a metal (for example, SUS). The adhesive sheet J2 is made of a thin-film sheet member having adhesive properties, and is attached to the upper surface J13 of the jig body J1 so as to cover the area inside the inner peripheral edge J18 of the jig body J1. The adhesive sheet J2 is capable of holding the substrate W by its adhesive force. The substrate W is attached and held in the adhesive sheet J2 in an area inside the inner peripheral edge J18 of the jig body J1. The outer peripheral edge J17 of the jig body J1 has a straight front straight edge J11, a straight rear straight edge J12, a straight left straight edge J15, and a straight right straight edge J16 on the front side D11, the rear side D12, the left side D31, and the right side D32, respectively.
 基板Wの加工時に基板Wに振動などが加わることがあるが、基板Wを治具Jに保持させた状態に基板Wを加工すれば、振動などは、粘着シートJ2によって低減される。そのため、粘着シートJ2に保持されている基板Wには、振動などが伝わりにくい。従って、基板Wの加工時に基板Wが振動などに起因して破損することが起こりにくい。 The substrate W may be subjected to vibrations during processing, but if the substrate W is processed while held by the jig J, the vibrations are reduced by the adhesive sheet J2. Therefore, vibrations are not easily transmitted to the substrate W held by the adhesive sheet J2. Therefore, the substrate W is less likely to be damaged due to vibrations during processing.
 第1実施形態の収納容器1は、被収納物として、粘着シートJ2が無い治具本体J1のみからなる状態の治具J、治具本体J1及び粘着シートJ2を備える治具J、基板Wを保持した状態の治具Jを収納することができる。以下には、粘着シートJ2が無い治具本体J1のみからなる状態の治具Jを収納する場合を例にして説明する。 The storage container 1 of the first embodiment can store, as stored objects, a jig J consisting of only the jig body J1 without the adhesive sheet J2, a jig J comprising the jig body J1 and the adhesive sheet J2, and a jig J holding a substrate W. The following describes an example in which a jig J consisting of only the jig body J1 without the adhesive sheet J2 is stored.
 治具J(の治具本体J1)の形状は、平面視において(閉じている)環状に制限されず、(閉じていない)略弧状や非環状であってもよい。 The shape of the jig J (the jig body J1) is not limited to a (closed) ring shape in a plan view, but may be (unclosed) approximately arc-shaped or non-ring-shaped.
 基板Wは、円盤状のシリコンウェーハ、ガラスウェーハ、サファイアウェーハ等であり、産業に用いられる薄いものである。第1実施形態における基板Wは、直径300mmのシリコンウェーハである。 The substrate W is a disk-shaped silicon wafer, glass wafer, sapphire wafer, or the like, and is a thin substrate used in industry. In the first embodiment, the substrate W is a silicon wafer having a diameter of 300 mm.
 図1~図4に示すように、収納容器1は、被収納物としての治具J(治具本体J1)を収納して、各種の手段により治具Jの収納、搬送、保管、輸送等をするための容器として用いられたりするものであり、容器本体2と、蓋体3とを備えている。容器本体2は、側方支持部5と、奥側支持部6(図3、図10A、図11A等参照)と、オプション部材としてのアダプター部材8とを備えている。蓋体3は、フロントリテーナ7(図4参照)を備えている。収納容器1は、アダプター部材8が装着されていない状態(第1状態)と、アダプター部材8が装着された状態(第2状態)とで、使用可能である(詳細は後述)。 As shown in Figures 1 to 4, the storage container 1 is used as a container for storing a jig J (jig body J1) as an object to be stored, and for storing, conveying, storing, transporting, etc. the jig J by various means, and comprises a container body 2 and a lid 3. The container body 2 comprises a side support portion 5, a rear support portion 6 (see Figures 3, 10A, 11A, etc.), and an adapter member 8 as an optional member. The lid 3 comprises a front retainer 7 (see Figure 4). The storage container 1 can be used in a state where the adapter member 8 is not attached (first state) and in a state where the adapter member 8 is attached (second state) (details will be described later).
 容器本体2は、一端部に容器本体開口部21が形成され、他端部が閉塞された筒状の壁部20を有する。容器本体2内には収納空間27が形成されている。収納空間27は、壁部20により取り囲まれて形成されている。壁部20の部分であって収納空間27を形成している部分には、側方支持部5が配置されている。収納空間27には、複数の治具Jを収納可能である。 The container body 2 has a cylindrical wall portion 20 with a container body opening 21 formed at one end and a closed other end. A storage space 27 is formed inside the container body 2. The storage space 27 is surrounded by the wall portion 20. A side support portion 5 is disposed in the portion of the wall portion 20 that forms the storage space 27. A plurality of jigs J can be stored in the storage space 27.
 側方支持部5は、収納空間27内において左右方向D3に対をなすように壁部20に設けられている。側方支持部5は、複数の治具Jの縁部に当接することにより、隣接する治具J同士を所定の間隔で離間させて並列させた状態で、複数の治具Jの縁部を支持可能である。 The side support parts 5 are provided on the wall part 20 so as to form pairs in the left-right direction D3 within the storage space 27. The side support parts 5 abut against the edges of the multiple jigs J, and are capable of supporting the edges of the multiple jigs J while arranging adjacent jigs J in parallel with a predetermined distance between them.
 側方支持部5は、(1)蓋体3によって容器本体開口部21が閉塞されていないときに、複数の治具Jの縁部に当接することにより、隣接する治具J同士を所定の間隔で離間させて並列させた状態で、複数の治具Jの縁部を支持可能な構成(側方支持部5は、蓋体3によって容器本体開口部21が閉塞されているときには、複数の治具Jの縁部に当接しない)と、(2)蓋体3によって容器本体開口部21が閉塞されているとき及び閉塞されていないときのいずれにおいても、複数の治具Jの縁部に当接することにより、隣接する治具J同士を所定の間隔で離間させて並列させた状態で、複数の治具Jの縁部を支持可能な構成と、を採り得る。本実施形態における側方支持部5は(2)の構成を有する。 The side support portion 5 can be configured as follows: (1) When the container body opening 21 is not blocked by the lid body 3, the side support portion 5 abuts against the edges of the multiple jigs J, thereby supporting the edges of the multiple jigs J in a state in which adjacent jigs J are spaced apart from each other at a predetermined interval and arranged in parallel (the side support portion 5 does not abut against the edges of the multiple jigs J when the container body opening 21 is blocked by the lid body 3); or (2) When the container body opening 21 is blocked or not blocked by the lid body 3, the side support portion 5 abuts against the edges of the multiple jigs J, thereby supporting the edges of the multiple jigs J in a state in which adjacent jigs J are spaced apart from each other at a predetermined interval and arranged in parallel. The side support portion 5 in this embodiment has the configuration of (2).
 奥側支持部6(図3、図10A、図11A等参照)は、収納空間27内においてフロントリテーナ7(図4参照)と対をなすように壁部20に設けられている。奥側支持部6は、蓋体3によって容器本体開口部21が閉塞されているときに、フロントリテーナ7と協働して複数の治具Jの縁部に当接することにより、複数の治具Jの縁部の後部を支持可能である。 The rear support portion 6 (see Figures 3, 10A, 11A, etc.) is provided on the wall portion 20 so as to pair with the front retainer 7 (see Figure 4) within the storage space 27. When the container body opening 21 is closed by the lid 3, the rear support portion 6 cooperates with the front retainer 7 to abut against the edges of the multiple jigs J, thereby supporting the rear portions of the edges of the multiple jigs J.
 図1、図4に示すように、蓋体3は、容器本体開口部21を形成する開口周縁部28に対して着脱可能であり、容器本体開口部21を閉塞可能である。フロントリテーナ7は、蓋体3の部分であって蓋体3によって容器本体開口部21が閉塞されているときに収納空間27に対向する部分に設けられている。フロントリテーナ7は、収納空間27の内部において、前後方向D1に奥側支持部6と対をなすように配置されている。 As shown in Figures 1 and 4, the lid body 3 is detachable from the opening periphery 28 that forms the container body opening 21, and is capable of closing the container body opening 21. The front retainer 7 is provided on a portion of the lid body 3 that faces the storage space 27 when the container body opening 21 is closed by the lid body 3. The front retainer 7 is disposed inside the storage space 27 so as to form a pair with the rear support part 6 in the front-to-rear direction D1.
 フロントリテーナ7は、蓋体3によって容器本体開口部21が閉塞されているときに、複数の治具Jの縁部に当接することにより複数の治具Jの縁部の前部を支持可能である。フロントリテーナ7は、蓋体3によって容器本体開口部21が閉塞されているときに、奥側支持部6と協働して複数の治具Jを支持することにより、隣接する治具J同士を所定の間隔で離間させて並列させた状態で保持する。 When the container body opening 21 is closed by the lid 3, the front retainer 7 can support the front portions of the edges of the multiple jigs J by abutting against the edges of the multiple jigs J. When the container body opening 21 is closed by the lid 3, the front retainer 7 cooperates with the rear support portion 6 to support the multiple jigs J, thereby holding adjacent jigs J in a parallel arrangement with a predetermined distance between them.
 収納容器1は、プラスチック材等の樹脂で構成されている。樹脂としては、例えば、ポリカーボネート、シクロオレフィンポリマー、ポリエーテルイミド、ポリエーテルケトン、ポリブチレンテレフタレート、ポリエーテルエーテルケトン、液晶ポリマーといった熱可塑性樹脂やこれらのアロイ等が挙げられる。 The storage container 1 is made of resin such as plastic material. Examples of resin include thermoplastic resins such as polycarbonate, cycloolefin polymer, polyetherimide, polyetherketone, polybutylene terephthalate, polyetheretherketone, and liquid crystal polymer, as well as alloys of these resins.
 以下、各部について、詳細に説明する。図1~図3に示すように、容器本体2の壁部20は、奥壁22と上壁23と下壁24と第1側壁25(左側壁)と第2側壁26(右側壁)とを有する。奥壁22、上壁23、下壁24、第1側壁25、及び第2側壁26は、上述した材料により構成されており、一体成形されて構成されている。 The individual parts are described in detail below. As shown in Figures 1 to 3, the wall portion 20 of the container body 2 has a back wall 22, an upper wall 23, a lower wall 24, a first side wall 25 (left side wall), and a second side wall 26 (right side wall). The back wall 22, the upper wall 23, the lower wall 24, the first side wall 25, and the second side wall 26 are made of the materials mentioned above, and are integrally molded.
 第1側壁25と第2側壁26とは左右方向D3に対向しており、上壁23と下壁24とは上下方向D2に対向している。上壁23の後端、下壁24の後端、第1側壁25の後端、及び第2側壁26の後端は、全て奥壁22に接続されている。上壁23の前端、下壁24の前端、第1側壁25の前端、及び第2側壁26の前端は、奥壁22に対向する位置関係を有し、略長方形状をした容器本体開口部21を形成する開口周縁部28を構成する。 The first side wall 25 and the second side wall 26 face each other in the left-right direction D3, and the upper wall 23 and the lower wall 24 face each other in the up-down direction D2. The rear end of the upper wall 23, the rear end of the lower wall 24, the rear end of the first side wall 25, and the rear end of the second side wall 26 are all connected to the rear wall 22. The front end of the upper wall 23, the front end of the lower wall 24, the front end of the first side wall 25, and the front end of the second side wall 26 are positioned opposite the rear wall 22, and constitute an opening periphery 28 that forms the container body opening 21, which is approximately rectangular in shape.
 開口周縁部28は、容器本体2の一端部に設けられており、奥壁22は、容器本体2の他端部に位置している。壁部20の外面により形成される容器本体2の外形は箱状である。壁部20の内面、即ち、奥壁22の内面、上壁23の内面、下壁24の内面、第1側壁25の内面、及び第2側壁26の内面は、これらによって取り囲まれた収納空間27を形成している。開口周縁部28に形成された容器本体開口部21は、壁部20により取り囲まれて容器本体2の内部に形成された収納空間27に、連通している。収納空間27には、例えば25枚の治具Jを収納可能である。 The opening periphery 28 is provided at one end of the container body 2, and the rear wall 22 is located at the other end of the container body 2. The outer shape of the container body 2 formed by the outer surfaces of the walls 20 is box-shaped. The inner surfaces of the walls 20, i.e., the inner surface of the rear wall 22, the inner surface of the upper wall 23, the inner surface of the lower wall 24, the inner surface of the first side wall 25, and the inner surface of the second side wall 26, form a storage space 27 surrounded by these. The container body opening 21 formed in the opening periphery 28 is connected to the storage space 27 formed inside the container body 2, surrounded by the walls 20. The storage space 27 can store, for example, 25 jigs J.
 上壁23及び下壁24の部分であって、開口周縁部28の近傍の部分には、収納空間27の上下方向D2の外側へ向かって窪んだラッチ係合凹部231A、231B、241A、241Bが形成されている。ラッチ係合凹部231A、231B、241A、241Bは、上壁23及び下壁24の左右両端部近傍に1つずつ、計4つ形成されている。 The upper wall 23 and the lower wall 24 near the opening periphery 28 are formed with latch engagement recesses 231A, 231B, 241A, and 241B recessed toward the outside in the up-down direction D2 of the storage space 27. A total of four latch engagement recesses 231A, 231B, 241A, and 241B are formed, one each near the left and right ends of the upper wall 23 and the lower wall 24.
 上壁23の外面には、トップフランジ236が固定される。トップフランジ236は、AMHS(自動ウェーハ搬送システム)、PGV(ウェーハ基板搬送台車)等において収納容器1を吊り下げる際に、収納容器1において掛けられて吊り下げられる部分となる部材である。 A top flange 236 is fixed to the outer surface of the upper wall 23. The top flange 236 is a member that is hung on the storage container 1 when suspending the storage container 1 in an AMHS (automated wafer transport system), PGV (wafer substrate transport vehicle), etc.
 次に、側方支持部5及び奥側支持部6について詳細に説明する。側方支持部5は、第1側壁25及び第2側壁26にそれぞれ設けられており、左右方向D3において対をなすようにして収納空間27内に配置された内装部である。具体的には、図7A~図8Bに示すように、側方支持部5は、板部51と板部支持部52とを有している。板部51と板部支持部52は、樹脂材料が一体成形されて構成されている。板部51は、板部支持部52によって支持されている。 Next, the side support parts 5 and the rear support part 6 will be described in detail. The side support parts 5 are provided on the first side wall 25 and the second side wall 26, respectively, and are interior parts arranged in the storage space 27 in pairs in the left-right direction D3. Specifically, as shown in Figures 7A to 8B, the side support parts 5 have a plate part 51 and a plate part support part 52. The plate part 51 and the plate part support part 52 are formed by integrally molding a resin material. The plate part 51 is supported by the plate part support part 52.
 板部51は、D1-D3平面に延び且つ横方向D3の内側に突出する板状である。板部51は、第1側壁25、第2側壁26それぞれに、上下方向D2に25枚ずつ計50枚設けられている。隣接する板部51は、上下方向D2において10mm~12mm間隔で互いに離間して平行な位置関係で配置されている。隣接する板部51の間に、1つの治具Jが配置される。最も上側D21に位置する板部51の上方には、板部51と平行に、板状の部材59(図8A参照)が、もう一枚配置されている。板状の部材59は、最も上側D21に位置する板部51の上方へ挿入される治具Jに対して、挿入の際のガイドの役割をする部材である。 The plate portions 51 extend in the D1-D3 plane and protrude inward in the lateral direction D3. A total of 50 plate portions 51 are provided on each of the first side wall 25 and the second side wall 26, 25 on each side in the vertical direction D2. Adjacent plate portions 51 are spaced apart from each other in the vertical direction D2 by 10 mm to 12 mm and arranged in a parallel relationship. One jig J is arranged between adjacent plate portions 51. Above the plate portion 51 located on the uppermost side D21, another plate-shaped member 59 (see FIG. 8A) is arranged parallel to the plate portion 51. The plate-shaped member 59 acts as a guide for the jig J that is inserted above the plate portion 51 located on the uppermost side D21.
 第1側壁25に設けられた25枚の板部51と、第2側壁26に設けられた25枚の板部51とは、互いに左右方向D3において対向する位置関係を有している。また、50枚の板部51、及び、板部51と平行な板状のガイドの役割をする板状の部材59は、D1-D3平面に平行な位置関係を有している。板部51の上面には、凸部511、512が設けられている。 The 25 plate sections 51 provided on the first side wall 25 and the 25 plate sections 51 provided on the second side wall 26 are positioned opposite each other in the left-right direction D3. The 50 plate sections 51 and the plate-shaped member 59 that acts as a plate-shaped guide parallel to the plate sections 51 are positioned parallel to the D1-D3 plane. The top surfaces of the plate sections 51 are provided with protrusions 511 and 512.
 凸部511は、上方向D21へ突出すると共に左右方向D3に延びており、凸部511の上端部は、収納空間27の中心に向ってわずかに下方向D22へ下がるように傾斜している。これにより、凸部511の上端部と、凸部511に載置された治具Jとの接触面積が極力小さくなり、凸部511の上端部と治具本体J1と摩擦によるパーティクルの発生が抑制される。 The convex portion 511 protrudes in the upward direction D21 and extends in the left-right direction D3, and the upper end of the convex portion 511 is inclined slightly downward in the downward direction D22 toward the center of the storage space 27. This minimizes the contact area between the upper end of the convex portion 511 and the jig J placed on the convex portion 511, suppressing the generation of particles due to friction between the upper end of the convex portion 511 and the jig body J1.
 凸部512は、上方向D21へ突出すると共に左右方向D3に延びて治具Jに当接する部分と、その部分から後方向D12に延びる板状の部分とを有している。板部51に支持された治具Jは、凸部511、512の突出端にのみ接触し、面状では凸部511、512に接触しない。 The convex portion 512 has a portion that protrudes in the upward direction D21 and extends in the left-right direction D3 to abut against the jig J, and a plate-like portion that extends from that portion in the rear direction D12. The jig J supported by the plate portion 51 only contacts the protruding ends of the convex portions 511, 512, and does not contact the convex portions 511, 512 in a planar manner.
 板部支持部52は、D1-D2平面に延びる板状である。板部支持部52は、板部51の長手方向(前後方向D1)において所定の長さを有しており、板部51の横方向D3の外側端縁に接続されている。即ち、第1側壁25に設けられた25枚の板部51は、第1側壁25側に設けられた板部支持部52に接続されている。同様に、第2側壁26に設けられた25枚の板部51は、第2側壁26側に設けられた板部支持部52に接続されている。 The plate support parts 52 are plate-shaped extending in the D1-D2 plane. The plate support parts 52 have a predetermined length in the longitudinal direction of the plate part 51 (front-rear direction D1), and are connected to the outer edge of the plate part 51 in the lateral direction D3. That is, the 25 plate parts 51 provided on the first side wall 25 are connected to the plate support parts 52 provided on the first side wall 25 side. Similarly, the 25 plate parts 51 provided on the second side wall 26 are connected to the plate support parts 52 provided on the second side wall 26 side.
 図8A、図8Bに示すように、板部支持部52は、前側D11に前方固定部56を有し、後ろ側D12に後方固定部57を有する。図10Aに示すように、前方固定部56を第1側壁25及び第2側壁26の壁部固定部201に係合させると共に後方固定部57を第1側壁25及び第2側壁26の壁部固定部202に係合させることによって、左右の側方支持部5は、第1側壁25、第2側壁26にそれぞれ固定される。また、側方支持部5は、前側D11に前方接続部53を有する(詳細は後述)。 As shown in Figures 8A and 8B, the plate support portion 52 has a front fixing portion 56 on the front side D11 and a rear fixing portion 57 on the rear side D12. As shown in Figure 10A, the front fixing portion 56 is engaged with the wall fixing portion 201 of the first side wall 25 and the second side wall 26, and the rear fixing portion 57 is engaged with the wall fixing portion 202 of the first side wall 25 and the second side wall 26, whereby the left and right side support portions 5 are fixed to the first side wall 25 and the second side wall 26, respectively. The side support portions 5 also have a front connection portion 53 on the front side D11 (details will be described later).
 側方支持部5は、複数の治具Jのうちの隣接する治具J同士を、所定の間隔で離間した状態で且つ互いに平行な位置関係とした状態で、複数の治具Jの縁部を支持可能である。 The side support portion 5 can support the edges of the multiple jigs J while keeping adjacent jigs J apart at a predetermined distance and parallel to each other.
 図3、図10A、図11Aに示すように、奥側支持部6は、奥壁22に設けられており、収納空間27内に配置された内装部である。奥側支持部6は、左右方向D3に一対の奥側端縁支持部60を有している。 As shown in Figures 3, 10A, and 11A, the rear support portion 6 is provided on the rear wall 22 and is an interior portion disposed within the storage space 27. The rear support portion 6 has a pair of rear edge support portions 60 in the left-right direction D3.
 左右方向D3に一対の奥側端縁支持部60は、収納空間27に収納可能な治具Jの一枚毎に対応した個数、具体的には、それぞれ25個、計50個設けられている。奥側端縁支持部60は、前後方向D1において、フロントリテーナ7と対をなすような位置関係を有している。奥側端縁支持部60は、例えば、後方向D12に凹んだ溝状であり、治具Jの縁部を支持する。 A pair of rear edge support portions 60 are provided in the left-right direction D3, the number of which corresponds to each jig J that can be stored in the storage space 27, specifically 25 of each, for a total of 50. The rear edge support portions 60 are positioned in a pair with the front retainer 7 in the front-rear direction D1. The rear edge support portions 60 are, for example, groove-shaped recessed in the rear direction D12, and support the edge of the jig J.
 次に、蓋体3及びフロントリテーナ7について詳細に説明する。図1及び図4に示すように、蓋体3は、容器本体2の開口周縁部28の形状と略一致する略長方形状を有している。蓋体3は容器本体2の開口周縁部28に対して着脱可能であり、開口周縁部28に蓋体3が装着されることにより、蓋体3は、容器本体開口部21を閉塞可能である。蓋体3の部分であって、蓋体3が容器本体開口部21を閉塞しているときの開口周縁部28のすぐ後ろ側D12の位置に形成された段差の部分の面(シール面)に対向する部分には、環状のシール部材4が取り付けられている。シール部材4は、弾性変形可能なポリエステル系、ポリオレフィン系など各種熱可塑性エラストマー、フッ素ゴム製、シリコンゴム製等により構成されている。シール部材4は、蓋体3の外周縁部を一周するように配置されている。 Next, the lid 3 and the front retainer 7 will be described in detail. As shown in FIG. 1 and FIG. 4, the lid 3 has a generally rectangular shape that generally matches the shape of the opening periphery 28 of the container body 2. The lid 3 is detachable from the opening periphery 28 of the container body 2, and the lid 3 can close the container body opening 21 by attaching the lid 3 to the opening periphery 28. A ring-shaped seal member 4 is attached to a portion of the lid 3 that faces the surface (seal surface) of the step portion formed at the position D12 immediately behind the opening periphery 28 when the lid 3 closes the container body opening 21. The seal member 4 is made of various thermoplastic elastomers such as elastically deformable polyesters and polyolefins, fluororubber, silicone rubber, etc. The seal member 4 is arranged so as to go around the outer periphery of the lid 3.
 蓋体3が開口周縁部28に装着されたときに、シール部材4は、前記シール面と蓋体3の内面とにより挟まれて弾性変形し、蓋体3は、容器本体開口部21を密閉した状態で閉塞する。開口周縁部28から蓋体3が取り外されることにより、容器本体2内の収納空間27に対して、治具Jを出し入れ可能となる。 When the lid 3 is attached to the opening periphery 28, the sealing member 4 is sandwiched between the sealing surface and the inner surface of the lid 3 and elastically deforms, and the lid 3 closes the container body opening 21 in a sealed state. By removing the lid 3 from the opening periphery 28, the jig J can be inserted and removed from the storage space 27 inside the container body 2.
 蓋体3は、蓋体3の外形をなす蓋体本体30を有しており、蓋体本体30には、ラッチ機構が設けられている。ラッチ機構は、蓋体本体30の左右両端部近傍に設けられており、蓋体本体30の上辺から上方向D21へ突出可能な2つの上側ラッチ部32Aと、蓋体本体30の下辺から下方向D22へ突出可能な2つの下側ラッチ部32Bと、を備えている。2つの上側ラッチ部32Aは、蓋体本体30の上辺の左右両端近傍に配置されており、2つの下側ラッチ部32Bは、蓋体本体30の下辺の左右両端近傍に配置されている。 The lid body 3 has a lid body main body 30 that forms the outer shape of the lid body 3, and a latch mechanism is provided on the lid body main body 30. The latch mechanism is provided near both left and right ends of the lid body main body 30, and includes two upper latch portions 32A that can protrude in the upward direction D21 from the upper side of the lid body main body 30, and two lower latch portions 32B that can protrude in the downward direction D22 from the lower side of the lid body main body 30. The two upper latch portions 32A are located near both left and right ends of the upper side of the lid body main body 30, and the two lower latch portions 32B are located near both left and right ends of the lower side of the lid body main body 30.
 蓋体本体30の外面側には操作部が設けられている。前記操作部を蓋体本体30の前側から操作することにより、上側ラッチ部32A、下側ラッチ部32Bをそれぞれ蓋体本体30の上辺、下辺から突出させることができ、また、上辺、下辺から突出させない状態とすることができる。上側ラッチ部32Aが蓋体本体30の上辺から上方向D21へ突出して、容器本体2のラッチ係合凹部231A、231Bに係合し、且つ、下側ラッチ部32Bが蓋体本体30の下辺から下方向D22へ突出して、容器本体2のラッチ係合凹部241A、241Bに係合することにより、蓋体3は、容器本体2の開口周縁部28に固定される。 An operating unit is provided on the outer surface of the lid body 30. By operating the operating unit from the front side of the lid body 30, the upper latch portion 32A and the lower latch portion 32B can be caused to protrude from the upper and lower edges of the lid body 30, respectively, or can be prevented from protruding from the upper and lower edges. The upper latch portion 32A protrudes in the upward direction D21 from the upper edge of the lid body 30 and engages with the latch engagement recesses 231A and 231B of the container body 2, and the lower latch portion 32B protrudes in the downward direction D22 from the lower edge of the lid body 30 and engages with the latch engagement recesses 241A and 241B of the container body 2, thereby fixing the lid 3 to the opening periphery 28 of the container body 2.
 蓋体本体30の内側(後ろ側D12)においては、収納空間27の外側(前側D11)へ窪んだ凹部34が形成されている。凹部34には、フロントリテーナ7が固定されて設けられる。 A recess 34 is formed on the inside (rear side D12) of the lid body 30, recessed toward the outside (front side D11) of the storage space 27. The front retainer 7 is fixed in the recess 34.
 フロントリテーナ7は、蓋体3によって容器本体開口部21が閉塞されているときに、収納空間27に対向する蓋体3の部分に配置されて、複数の治具Jの縁部を支持可能である。 When the container body opening 21 is closed by the lid 3, the front retainer 7 is positioned in the portion of the lid 3 facing the storage space 27 and can support the edges of multiple jigs J.
 フロントリテーナ7は、受け部73を有している。受け部73は、左右方向D3に所定の間隔で離間して対をなすようにして2つずつ配置されている。このように対をなすようにして2つずつ配置された受け部73は、上下方向D2に25対並列した状態で設けられており、それぞれ弾性変形可能な脚部72により支持されている。収納空間27内に治具Jが収納され、蓋体3が閉じられることにより、受け部73は、脚部72の弾性力により、治具Jの縁部の端縁を、収納空間27の中心へ付勢した状態で挟持して支持する。 The front retainer 7 has receiving portions 73. The receiving portions 73 are arranged in pairs, two apart at a predetermined distance in the left-right direction D3. The receiving portions 73 arranged in pairs in this manner are provided in 25 pairs parallel to each other in the up-down direction D2, and each is supported by elastically deformable legs 72. When the jig J is stored in the storage space 27 and the lid 3 is closed, the receiving portions 73 clamp and support the edge of the edge of the jig J by the elastic force of the legs 72 while biasing it toward the center of the storage space 27.
 受け部73は、下側傾斜面と上側傾斜面とを有しており、これらにより、略V字状溝が形成されている。蓋体3により容器本体開口部21を閉塞したときには、治具Jが下側傾斜面に対して摺動して滑り上がり、治具JがV字状溝の頂点の位置に至ったときに、治具Jの縁部は受け部73に支持される。 The receiving portion 73 has a lower inclined surface and an upper inclined surface, which together form a roughly V-shaped groove. When the container body opening 21 is closed by the lid 3, the jig J slides up against the lower inclined surface, and when the jig J reaches the apex of the V-shaped groove, the edge of the jig J is supported by the receiving portion 73.
 次に、アダプター部材8について詳細に説明する。図9A~図11Dに示すように、アダプター部材8は、容器本体2の一端部と他端部とを結ぶ方向である前後方向D1において、収納空間27における容器本体開口部21と側方支持部5との間に配置される。アダプター部材8は、側方支持部5における複数の板部51の一部又は全部に対応して配置されるガイド部81を有する。ガイド部81は、複数の板部51ごとに、1つ設けられる。アダプター部材8は、側方支持部5及び/又は容器本体2に着脱自在に構成されている。 Next, the adapter member 8 will be described in detail. As shown in Figures 9A to 11D, the adapter member 8 is disposed between the container body opening 21 and the side support part 5 in the storage space 27 in the front-to-rear direction D1, which is the direction connecting one end and the other end of the container body 2. The adapter member 8 has guide parts 81 disposed in correspondence with some or all of the multiple plate parts 51 in the side support part 5. One guide part 81 is provided for each of the multiple plate parts 51. The adapter member 8 is configured to be freely attached and detached to the side support part 5 and/or the container body 2.
 第1実施形態においては、アダプター部材8は、側方支持部5に着脱自在に構成されている。ガイド部81は、複数の板部51の一部に対応して配置され、2つの板部51ごとに、1つ設けられる。つまり、ガイド部81は、複数の板部51に対して、最も下側D22の板部51に対応する位置から、上方向D21に1つおきに(1つ飛ばしで)配置されている。 In the first embodiment, the adapter member 8 is configured to be detachable from the side support portion 5. The guide portion 81 is disposed corresponding to a portion of the plurality of plate portions 51, with one guide portion 81 provided for every two plate portions 51. In other words, the guide portions 81 are disposed on every other one of the plurality of plate portions 51 in the upward direction D21 from a position corresponding to the plate portion 51 on the lowest side D22.
 アダプター部材8は、左側D31及び右側D32の両方に設けられている。詳細には、左側D31のアダプター部材8は、左側D31の側方支持部5に連結されており、左側D31の側方支持部5を介して第1側壁25に支持されている。同様に、右側D32のアダプター部材8は、右側D32の側方支持部5に連結されており、右側D32の側方支持部5を介して第2側壁26に支持されている。アダプター部材8及び側方支持部5の構成は、左側D31及び右側D32において同様であるので、以下では代表して、左側のアダプター部材8及び側方支持部5に基づいて説明する。 The adapter member 8 is provided on both the left side D31 and the right side D32. In detail, the adapter member 8 on the left side D31 is connected to the side support part 5 of the left side D31 and is supported on the first side wall 25 via the side support part 5 of the left side D31. Similarly, the adapter member 8 on the right side D32 is connected to the side support part 5 of the right side D32 and is supported on the second side wall 26 via the side support part 5 of the right side D32. The configurations of the adapter member 8 and the side support part 5 are the same on the left side D31 and the right side D32, so the following description will be based on the adapter member 8 and the side support part 5 on the left side as a representative.
 アダプター部材8は、左右方向D3において対をなすようにして収納空間27内に配置された内装部である。具体的には、図7A~図7C、図9A~図9Bに示すように、アダプター部材8は、ガイド部81とガイド部支持部82とを有している。ガイド部81とガイド部支持部82は、樹脂材料が一体成形されて構成されており、ガイド部81は、ガイド部支持部82によって支持されている。 The adapter members 8 are interior parts arranged in the storage space 27 in a pair in the left-right direction D3. Specifically, as shown in Figures 7A to 7C and 9A to 9B, the adapter members 8 have a guide part 81 and a guide part support part 82. The guide part 81 and the guide part support part 82 are formed by integrally molding a resin material, and the guide part 81 is supported by the guide part support part 82.
 ガイド部81は、D1-D3平面に延び且つ横方向D3の内側に突出する板状である。ガイド部81は、左側D31及び右側D32それぞれに、上下方向D2に13枚ずつ計26枚設けられている。隣接するガイド部81は、上下方向D2において20mm~24mm間隔で互いに離間して平行な位置関係で配置されている。図7Bに示すように、ガイド部81は、板状の部材59に対応する位置には、設けられていない。 The guide portions 81 are plate-shaped extending in the D1-D3 plane and protruding inward in the lateral direction D3. A total of 26 guide portions 81 are provided on each of the left side D31 and right side D32, 13 on each side in the vertical direction D2. Adjacent guide portions 81 are spaced apart in the vertical direction D2 at intervals of 20 mm to 24 mm and are positioned parallel to each other. As shown in FIG. 7B, the guide portions 81 are not provided at positions corresponding to the plate-shaped members 59.
 左側D31の13枚のガイド部81と、右側D32の13枚のガイド部81とは、互いに左右方向D3において対向する位置関係を有している。また、26枚のガイド部81は、D1-D3平面に略平行な位置関係を有している。 The 13 guide sections 81 on the left side D31 and the 13 guide sections 81 on the right side D32 are positioned opposite each other in the left-right direction D3. The 26 guide sections 81 are positioned approximately parallel to the D1-D3 plane.
 図11Dに示すように、隣接するガイド部81の間に、1つ又は複数の治具Jが配置可能である。逆に言うと、1つ又は複数の治具Jは、隣接するガイド部81の間に、挟まれることができる。蓋体3によって容器本体開口部21が閉塞されているときには、図11Aにおいて2点鎖線で示すように、治具Jは、隣接するガイド部81の間には配置されない。 As shown in FIG. 11D, one or more jigs J can be placed between adjacent guide parts 81. In other words, one or more jigs J can be sandwiched between adjacent guide parts 81. When the container body opening 21 is closed by the lid 3, the jig J is not placed between adjacent guide parts 81, as shown by the two-dot chain line in FIG. 11A.
 図11B、図11Dに示すように、ガイド部81の後ろ側D12の上面816の後端部817の高さ(位置)は、板部51の前側D11の上面516の前端部517の高さ(位置)と実質的に同じである。ガイド部81の後端部817と板部51の前端部517との間の前後方向D1の隙間は、最小限である。つまり、巨視的に視て、ガイド部81の上面816の後端部817と板部51の上面516の前端部517とは、前後方向D1に連続するように設計されている。 As shown in Figures 11B and 11D, the height (position) of the rear end 817 of the upper surface 816 of the rear side D12 of the guide portion 81 is substantially the same as the height (position) of the front end 517 of the upper surface 516 of the front side D11 of the plate portion 51. The gap in the front-to-rear direction D1 between the rear end 817 of the guide portion 81 and the front end 517 of the upper surface 516 of the plate portion 51 is minimal. In other words, from a macroscopic perspective, the rear end 817 of the upper surface 816 of the guide portion 81 and the front end 517 of the upper surface 516 of the plate portion 51 are designed to be continuous in the front-to-rear direction D1.
 ガイド部支持部82は、D1-D2平面に延びる板状である。ガイド部支持部82は、ガイド部81の長手方向(前後方向D1)において所定の長さを有しており、ガイド部81の横方向D3の外側端縁に接続されている。 The guide support portion 82 is a plate extending in the D1-D2 plane. The guide support portion 82 has a predetermined length in the longitudinal direction of the guide portion 81 (front-rear direction D1) and is connected to the outer edge of the guide portion 81 in the lateral direction D3.
 即ち、左側D31の13枚のガイド部81は、左側D31のガイド部支持部82に接続されている。同様に、右側D32の13枚のガイド部81は、右側D32のガイド部支持部82に接続されている。図8A、図8Bに示すように、ガイド部支持部82は、後ろ側D12に後方接続部83を有する。図7Cに示すように、後方接続部83と側方支持部5の前方接続部53とを接続させることによって、左右のガイド部81は、左右の側方支持部5にそれぞれ固定される。これにより、左右のアダプター部材8は、それぞれ、側方支持部5を介して、左右の第1側壁25、第2側壁26に固定される。 That is, the 13 guide portions 81 on the left side D31 are connected to the guide portion support portion 82 on the left side D31. Similarly, the 13 guide portions 81 on the right side D32 are connected to the guide portion support portion 82 on the right side D32. As shown in Figures 8A and 8B, the guide portion support portion 82 has a rear connection portion 83 on the rear side D12. As shown in Figure 7C, the left and right guide portions 81 are fixed to the left and right side support portions 5 by connecting the rear connection portion 83 to the front connection portion 53 of the side support portion 5. As a result, the left and right adapter members 8 are fixed to the left and right first side walls 25 and second side walls 26 via the side support portions 5, respectively.
 ガイド部81は、例えば、被収納物である治具Jを側方支持部5の隣接する板部51,51の間に挿入する際や、治具Jを側方支持部5の隣接する板部51,51の間から引き出して取り出す際に、容器本体2の容器本体開口部21と側方支持部5との間の位置において、治具Jをガイドする機能(ガイド機能)を有する。 The guide portion 81 has a function (guide function) of guiding the jig J, which is the object to be stored, at a position between the container body opening 21 of the container body 2 and the side support portion 5, for example, when inserting the jig J between the adjacent plate portions 51, 51 of the side support portion 5, or when pulling the jig J out from between the adjacent plate portions 51, 51 of the side support portion 5 and removing it.
 ガイド部81は、ガイド部81の上面816の上をスライドする被収納物J(治具)のスライド方向を上向きに指向させる構造(上向き指向構造)を有する。詳細には、図9A、図11Dに示すように、ガイド部81は方向ガイド部811を備える。第1実施形態においては、方向ガイド部811は、ガイド部81の上面816の前側D11の部分が後方向D12に向けて徐々に上がっていく形状を有することにより、形成される。なお、上向き指向構造は、一部の図面では省略されている(ガイド部81の上面816が平坦状に示されている。)。方向ガイド部811においては、ガイド部81の上面816の後ろ側D12の部分は、前方向D11に向けて徐々に上がっていく形状も有する。 The guide portion 81 has a structure (upward directing structure) that directs the sliding direction of the stored object J (jig) sliding on the upper surface 816 of the guide portion 81 upward. In detail, as shown in Figs. 9A and 11D, the guide portion 81 has a direction guide portion 811. In the first embodiment, the direction guide portion 811 is formed by having a shape in which the front side D11 portion of the upper surface 816 of the guide portion 81 has a gradually rising shape toward the rear direction D12. Note that the upward directing structure is omitted in some drawings (the upper surface 816 of the guide portion 81 is shown flat). In the direction guide portion 811, the rear side D12 portion of the upper surface 816 of the guide portion 81 also has a shape that gradually rises toward the front direction D11.
 アダプター部材8はオプション部材であり、アダプター部材8が装着されていない状態(第1状態)で、収納容器1を使用することができる。図3、図10A、図10Bに示すように、アダプター部材8が装着されていない状態では、前述のガイド部81によるガイド機能が発揮されないが、被収納物である治具Jを側方支持部5の隣接する板部51,51の間に挿入したり、治具Jを側方支持部5の隣接する板部51,51の間から引き出して取り出すことができる。なお、図10Aにおいて、2点鎖線で示す治具Jは、側方支持部5の隣接する板部51,51の間に挿入されている状態である。実線で示す治具Jは、板部51よりも前側D11に位置しており、隣接する板部51,51の間に挿入されておらず、前述のガイド機能が発揮されない状態である。 The adapter member 8 is an optional member, and the storage container 1 can be used without the adapter member 8 attached (first state). As shown in Figs. 3, 10A, and 10B, when the adapter member 8 is not attached, the guide function of the guide portion 81 described above is not performed, but the jig J, which is the object to be stored, can be inserted between the adjacent plate portions 51, 51 of the side support portion 5, or the jig J can be pulled out from between the adjacent plate portions 51, 51 of the side support portion 5 and removed. In Fig. 10A, the jig J shown by the two-dot chain line is inserted between the adjacent plate portions 51, 51 of the side support portion 5. The jig J shown by the solid line is located on the front side D11 of the plate portion 51, is not inserted between the adjacent plate portions 51, 51, and is not in a state where the guide function described above is performed.
 一方、アダプター部材8が装着された状態(第2状態)でも、収納容器1を使用することができる。図1、図2、図11A~図11Dに示すように、アダプター部材8が装着されると、前述のガイド機能が発揮される状態が形成され、ガイド機能が発揮される状態において、被収納物である治具Jを側方支持部5の隣接する板部51,51の間に挿入したり、治具Jを側方支持部5の隣接する板部51,51の間から引き出して取り出すことができる。なお、図11Aにおいて、2点鎖線で示す治具Jは、側方支持部5の隣接する板部51,51の間に挿入されている状態である。図11A、図11Bにおいて、実線で示す治具Jは、板部51よりも前側D11に位置しており、隣接する板部51,51の間に挿入されていないが、前述のガイド機能が発揮される状態である。 On the other hand, the storage container 1 can be used even when the adapter member 8 is attached (second state). As shown in Figs. 1, 2, and 11A to 11D, when the adapter member 8 is attached, a state in which the above-mentioned guide function is exerted is created, and in this state, the jig J, which is the object to be stored, can be inserted between the adjacent plate portions 51, 51 of the side support portion 5, or the jig J can be pulled out from between the adjacent plate portions 51, 51 of the side support portion 5 and removed. In Fig. 11A, the jig J shown by the two-dot chain line is inserted between the adjacent plate portions 51, 51 of the side support portion 5. In Figs. 11A and 11B, the jig J shown by the solid line is located on the front side D11 of the plate portion 51, and is not inserted between the adjacent plate portions 51, 51, but is in a state in which the above-mentioned guide function is exerted.
 第1状態と第2状態との使い分けは、様々である。例えば、第1状態の製品(収納容器)を欲する使用者と第2状態の製品を欲する使用者がいる場合、製造者は、第1状態の製品と第2状態の製品とを用意する(ラインアップする)必要がある。しかし、アダプター部材8が着脱自在に構成されていれば、第1状態の製品にアダプター部材8を装着するだけで、第2状態の製品を製造することができ、構成部品の種類を最小限にすることができる。また、製品を第1状態と第2状態とで使い分けたい使用者がいる場合、使用者は、アダプター部材8を着脱するだけで、製品を第1状態又は第2状態に変更することができる。 There are various ways to distinguish between the first state and the second state. For example, if some users want a product (storage container) in the first state and others want a product in the second state, the manufacturer needs to prepare (line up) products in the first state and products in the second state. However, if the adapter member 8 is configured to be detachable, a product in the second state can be manufactured simply by attaching the adapter member 8 to a product in the first state, minimizing the number of types of components. Also, if some users want to use the product in either the first or second state, the user can change the product to either the first or second state simply by attaching and detaching the adapter member 8.
 ガイド部81の上向き指向構造の効果について説明する。図12Aは、比較形態において、アダプター部材8と側方支持部5との段差を示す模式図である。図12Bは、比較形態において、被収納物である治具Jがアダプター部材8と側方支持部5との段差に引っ掛かった状態を示す模式図である。図13Aは、本発明の第1実施形態において、アダプター部材8と側方支持部5との段差を示す模式図である。図13Bは、本発明の第1実施形態において、後方向D12へ移動している被収納物である治具Jがアダプター部材8の上を滑り上がる状態を示す模式図である。図13Cは、本発明の第1実施形態において、治具Jがアダプター部材8と側方支持部5との段差の上方を移動する状態示す模式図である。図14は、本発明の第1実施形態において、前方向D11へ移動している被収納物である治具Jがアダプター部材8の上を滑り上がる状態を示す模式図である。 The effect of the upward directional structure of the guide section 81 will be explained. FIG. 12A is a schematic diagram showing the step between the adapter member 8 and the side support section 5 in the comparative embodiment. FIG. 12B is a schematic diagram showing the state in which the jig J, which is the stored object, is caught on the step between the adapter member 8 and the side support section 5 in the comparative embodiment. FIG. 13A is a schematic diagram showing the step between the adapter member 8 and the side support section 5 in the first embodiment of the present invention. FIG. 13B is a schematic diagram showing the state in which the jig J, which is the stored object moving in the rear direction D12, slides up on the adapter member 8 in the first embodiment of the present invention. FIG. 13C is a schematic diagram showing the state in which the jig J moves above the step between the adapter member 8 and the side support section 5 in the first embodiment of the present invention. FIG. 14 is a schematic diagram showing the state in which the jig J, which is the stored object moving in the forward direction D11, slides up on the adapter member 8 in the first embodiment of the present invention.
 図12A及び図12Bに示す形態は、ガイド部81が前述の上向き指向構造を有していない比較考形態である。なお、比較形態も、上向き指向構造を有していないだけであり、本発明の実施形態の一つ(第2実施形態と呼ぶこともできる。)である。詳細には、アダプター部材8のガイド部81の上面816は、D1-D3平面に延びる直平面状である。アダプター部材8及び側方支持部5が装着された第1状態においては、ガイド部81の上面816と板部51の上面516とは、基本的には(設計上は)、面一(高さが同じ)になっている。しかし、各種部材間のガタ等の影響により、図12Aに1点鎖線で示すように、ガイド部81の後ろ側D12の上面816(後端部817)の高さ(位置)が、板部51の前側D11の上面516(前端部517)の高さ(位置)よりも、低くなっていることがある。 12A and 12B are comparative examples in which the guide portion 81 does not have the above-mentioned upward directional structure. The comparative example is also one of the embodiments of the present invention (it can also be called the second embodiment) simply because it does not have an upward directional structure. In detail, the upper surface 816 of the guide portion 81 of the adapter member 8 is a straight plane extending in the D1-D3 plane. In the first state in which the adapter member 8 and the side support portion 5 are attached, the upper surface 816 of the guide portion 81 and the upper surface 516 of the plate portion 51 are basically (by design) flush (same height). However, due to the influence of play between various members, the height (position) of the upper surface 816 (rear end portion 817) of the rear side D12 of the guide portion 81 may be lower than the height (position) of the upper surface 516 (front end portion 517) of the front side D11 of the plate portion 51, as shown by the dashed line in FIG. 12A.
 そのような場合、被収納物である治具J(治具本体J1)を、ガイド部81の上面816の上を後方向D12へスライドさせていくと、図12Bに1点鎖線で示すように、治具Jの治具本体J1の外周縁J17は、ガイド部81の後端部817を超えると、板部51の前端部517(段差ということもできる)に引っ掛かり(突き当たり)、それ以上、後方向D12に移動しなくなることがある。その場合、治具Jを板部51の上方に配置させられなくなる。なお、段差の場合に限らず、ガイド部81の後端部817と板部51の前端部517との間の隙間が大きい場合にも、同様の現象が起こり得る。 In such a case, when the jig J (jig body J1), which is the object to be stored, is slid in the rear direction D12 on the upper surface 816 of the guide portion 81, as shown by the dashed line in FIG. 12B, the outer periphery J1 of the jig J may get caught (strike) on the front end 517 (which can also be called a step) of the plate portion 51 when it passes the rear end 817 of the guide portion 81, and may not be able to move any further in the rear direction D12. In that case, the jig J cannot be positioned above the plate portion 51. Note that this is not limited to the case of a step, and the same phenomenon can also occur when there is a large gap between the rear end 817 of the guide portion 81 and the front end 517 of the plate portion 51.
 これに対しては、第1実施形態においては、前述の通り、ガイド部81は、ガイド部81の上面816の上をスライドする被収納物J(治具)のスライド方向を上向きに指向させる構造(上向き指向構造)を有する。 In response to this, in the first embodiment, as described above, the guide portion 81 has a structure (upward directing structure) that directs the sliding direction of the stored object J (jig) sliding on the upper surface 816 of the guide portion 81 upward.
 図13Aに1点鎖線で示すように、ガイド部81の後ろ側D12の上面816(後端部817)の高さ(位置)が、板部51の前側D11の上面516(前端部517)の高さ(位置)よりも、低くなっている。逆に言うと、板部51の前側D11の上面516(前端部517)の高さ(位置)が、ガイド部81の後ろ側D12の上面816(後端部817)の高さ(位置)よりも、高くなっている。しかし、第1実施形態におけるガイド部81は、上向き指向構造を有する。そのため、図13Bに示すように、ガイド部81の上面816の上をスライドする被収納物J(治具)のスライド方向D4は、上向きに指向する。言い換えると、治具Jは、その下面J14がガイド部81の上面816の上を滑るようにして、斜め後ろ上方向(後方向D12と上方向D21との間の方向)にスライドする。そのため、図13C及び図11Dに示すように、治具Jの治具本体J1の外周縁J17は、ガイド部81の後端部817を超えると、板部51の前端部517を更に超えて、後方向D12に移動しやすい。その結果、治具Jを板部51の上方に容易に配置させることができる。 As shown by the dashed line in FIG. 13A, the height (position) of the upper surface 816 (rear end 817) of the rear side D12 of the guide section 81 is lower than the height (position) of the upper surface 516 (front end 517) of the front side D11 of the plate section 51. In other words, the height (position) of the upper surface 516 (front end 517) of the front side D11 of the plate section 51 is higher than the height (position) of the upper surface 816 (rear end 817) of the rear side D12 of the guide section 81. However, the guide section 81 in the first embodiment has an upward directional structure. Therefore, as shown in FIG. 13B, the sliding direction D4 of the stored object J (jig) sliding on the upper surface 816 of the guide section 81 is oriented upward. In other words, the jig J slides in a diagonally rearward and upward direction (a direction between the rearward direction D12 and the upward direction D21) so that its lower surface J14 slides on the upper surface 816 of the guide section 81. Therefore, as shown in Figures 13C and 11D, when the outer periphery J17 of the jig body J1 of the jig J passes the rear end 817 of the guide portion 81, it easily passes the front end 517 of the plate portion 51 and moves in the rear direction D12. As a result, the jig J can be easily positioned above the plate portion 51.
 また、図14に示すように、方向ガイド部811においては、ガイド部81の上面816の後ろ側D12の部分は、前方向D11に向けて徐々に上がっていく形状も有する。そのため、側方支持部5に位置する治具Jの治具本体J1を前方向D11へ移動させて、ガイド部81を経由して容器本体開口部21から外部へ取り出す過程において、ガイド部81の上面816の上をスライドする治具Jのスライド方向D4は、上向きに指向する。言い換えると、治具Jは、その下面J14がガイド部81の上面816の上を滑るようにして、斜め前上方向(前方向D11と上方向D21との間の方向)にスライドする。このように、治具Jは、滑り上がり、板部51よりも高い位置に支持される。そのため、治具Jの外周縁J17がガイド部81と板部51との継ぎ目に当たり難くなるため、治具Jの引っ掛かりを抑制することができる。 Also, as shown in FIG. 14, in the directional guide portion 811, the rear side D12 of the upper surface 816 of the guide portion 81 also has a shape that gradually rises toward the forward direction D11. Therefore, in the process of moving the jig body J1 of the jig J located at the side support portion 5 in the forward direction D11 and taking it out of the container body opening 21 via the guide portion 81 to the outside, the sliding direction D4 of the jig J sliding on the upper surface 816 of the guide portion 81 is directed upward. In other words, the jig J slides in an obliquely forward-upward direction (a direction between the forward direction D11 and the upward direction D21) so that its lower surface J14 slides on the upper surface 816 of the guide portion 81. In this way, the jig J slides up and is supported at a position higher than the plate portion 51. Therefore, the outer peripheral edge J17 of the jig J is less likely to hit the joint between the guide portion 81 and the plate portion 51, so that the jig J can be prevented from getting caught.
 第1実施形態に係る収納容器1によれば、以下のような効果を得ることができる。収納容器1は、複数の被収納物Jを並列に収納可能な収納空間27が内部に形成され、一端部に収納空間27に連通する容器本体開口部21が形成された開口周縁部28を有し、他端部が閉塞されている容器本体2と、容器本体開口部21に対して着脱可能であり、容器本体開口部21を閉塞可能な蓋体3と、収納空間27内において対をなすように配置され、複数の被収納物Jのうちの隣接する被収納物Jを所定の間隔で離間させて並列させた状態で、複数の被収納物Jの縁部を支持可能な側方支持部5であって、隣接する被収納物Jの間に配置される複数の板部51を有する側方支持部5と、容器本体2の前記一端部と前記他端部とを結ぶ前後方向D1において、収納空間27における容器本体開口部21と側方支持部5との間に配置されるアダプター部材8であって、複数の板部51の一部又は全部に対応して配置されるガイド部81を有するアダプター部材8とを、備え、アダプター部材8は、側方支持部5又は容器本体2に着脱自在に構成されている。 According to the storage container 1 of the first embodiment, the following effects can be obtained. The storage container 1 includes a container body 2 having a storage space 27 formed therein in which a plurality of objects J to be stored in parallel are stored, an opening periphery 28 formed with a container body opening 21 communicating with the storage space 27 at one end and a closed other end, a lid 3 that is detachable from the container body opening 21 and capable of closing the container body opening 21, a side support part 5 that is arranged in pairs in the storage space 27 and can support the edges of the plurality of objects J to be stored when adjacent objects J among the plurality of objects J are arranged in parallel at a predetermined distance apart, the side support part 5 having a plurality of plate parts 51 arranged between the adjacent objects J, and an adapter member 8 that is arranged between the container body opening 21 and the side support part 5 in the storage space 27 in the front-rear direction D1 connecting the one end and the other end of the container body 2, the adapter member 8 having a guide part 81 arranged corresponding to some or all of the plurality of plate parts 51, and the adapter member 8 is configured to be freely attached and detached to the side support part 5 or the container body 2.
 アダプター部材8の着脱により、第1実施形態に係る収納容器1は、被収納物Jの支持機能が発揮される範囲の変更を簡易な構成で実現することができる。 By attaching and detaching the adapter member 8, the storage container 1 according to the first embodiment can easily change the range in which it exerts its support function for the stored object J.
 また、治具把持装置(不図示)により治具Jの前側D11の部分のみを把持して、側方支持部5に支持されている治具Jを前方向D11に引き出して取り出す場合、治具Jが側方支持部5に支持されなくなると(板部51の上方から外れると)、治具Jの特に後ろ側D12の部分は、垂れ下がることがある。その場合(図10Bに示すように、仮にアダプター部材8が存在しない場合)、上方に位置する治具Jにおける垂れ下がった部分は、下方に位置する別の治具J(及び/又は、もしあれば、それに保持されている基板W)に接触しそうになる(図10Bでは、上方に位置する治具Jが側方支持部5の板部51に支持されているように見えるかもしれないが、図10Aに示すように、上方に位置する治具Jは側方支持部5の板部51に支持されていない)。 In addition, when the jig J supported by the side support parts 5 is pulled out in the forward direction D11 by gripping only the front side D11 of the jig J with a jig gripping device (not shown), if the jig J is no longer supported by the side support parts 5 (if it comes off from above the plate parts 51), the rear side D12 part of the jig J in particular may sag. In that case (if the adapter member 8 is not present as shown in FIG. 10B), the sagging part of the jig J located above is likely to come into contact with another jig J located below (and/or the substrate W held thereon, if any) (in FIG. 10B, the jig J located above may appear to be supported by the plate parts 51 of the side support parts 5, but as shown in FIG. 10A, the jig J located above is not supported by the plate parts 51 of the side support parts 5).
 しかし、図11A~図11Dに示すように、第1実施形態においては、収納空間27における容器本体開口部21と側方支持部5との間にアダプター部材8が配置されている。そのため、上方に位置する治具Jにおける垂れ下がった部分は、アダプター部材8のガイド部81によって、それ以上に下方に垂れ下がることが規制され、下方に位置する別の治具Jや基板Wに接触することが抑制される。 However, as shown in Figures 11A to 11D, in the first embodiment, an adapter member 8 is disposed between the container body opening 21 and the side support portion 5 in the storage space 27. Therefore, the sagging portion of the jig J located above is restricted from sagging further downward by the guide portion 81 of the adapter member 8, and is prevented from coming into contact with another jig J or the substrate W located below.
 第1実施形態においては、ガイド部81は、複数(2つ)の板部51ごとに、1つ設けられる。これにより、治具Jを側方支持部5の隣接する板部51,51の間に挿入する際の入り口部分の上下方向D2の大きさが拡大するので、例えば以下の効果が奏される。治具把持装置(不図示)により治具Jの前側D11の部分のみを把持して、治具Jを側方支持部5の隣接する板部51,51の間に挿入することがある。このように把持して挿入する場合においては、把持されている前側D11の治具Jの部分は大きく撓む。ガイド部81が複数の板部51ごとに1つ設けられる形態においては、前側D11の部分が大きく撓んだ状態の治具Jがガイド部81に接触する可能性が低減させることができる。 In the first embodiment, one guide portion 81 is provided for each of the multiple (two) plate portions 51. This increases the size of the entrance portion in the vertical direction D2 when the jig J is inserted between the adjacent plate portions 51, 51 of the side support portion 5, thereby achieving, for example, the following effects. The jig J may be inserted between the adjacent plate portions 51, 51 of the side support portion 5 by gripping only the front side D11 portion of the jig J with a jig gripping device (not shown). When gripped and inserted in this manner, the gripped portion of the jig J on the front side D11 is significantly deflected. In a configuration in which one guide portion 81 is provided for each of the multiple plate portions 51, the possibility of the jig J with the front side D11 portion being significantly deflected coming into contact with the guide portion 81 can be reduced.
 第1実施形態においては、ガイド部81は、ガイド部81の上面816の上をスライドする被収納物Jのスライド方向D4を上向きに指向させる構造を有する。これにより、ガイド部81の上面816の上を後方向D12へスライドする被収納物Jの外周縁J17は、ガイド部81の後端部817を超えると、板部51の前端部517を更に超えて、後方向D12に移動しやすい。その結果、被収納物Jを板部51の上方に容易に配置させることができる。 In the first embodiment, the guide portion 81 has a structure that directs the sliding direction D4 of the stored item J sliding on the upper surface 816 of the guide portion 81 upward. As a result, when the outer peripheral edge J17 of the stored item J sliding in the rear direction D12 on the upper surface 816 of the guide portion 81 passes the rear end portion 817 of the guide portion 81, it easily passes further beyond the front end portion 517 of the plate portion 51 and moves in the rear direction D12. As a result, the stored item J can be easily positioned above the plate portion 51.
 本発明は、上述した実施形態に限定されることはなく、請求の範囲に記載された技術的範囲において変形が可能である。 The present invention is not limited to the above-described embodiments, and modifications are possible within the technical scope described in the claims.
 例えば、アダプター部材8は、直接的に又は間接的に容器本体2に支持可能であればよい。例えば、アダプター部材8は、容器本体2の第1側壁25又は第2側壁26に直接的に支持されるものであってもよい。アダプター部材8は、側方支持部5及び容器本体2の両方に支持されるものであってもよい。 For example, the adapter member 8 may be capable of being supported directly or indirectly on the container body 2. For example, the adapter member 8 may be directly supported on the first side wall 25 or the second side wall 26 of the container body 2. The adapter member 8 may be supported on both the side support portion 5 and the container body 2.
 アダプター部材8のガイド部81は、側方支持部5の1つの板部51毎に、1つずつ(飛ばされずに)設けられていてもよい。ガイド部81は、3~5つの板部51毎に、1つずつ設けられていてもよい。ガイド部81の上下方向D2のピッチは、等ピッチ(等サイクル)であってもよく、不等ピッチ(不等サイクル)であってもよい。 The guide portions 81 of the adapter member 8 may be provided one by one (without skipping) for each plate portion 51 of the side support portion 5. The guide portions 81 may be provided one by one for every three to five plate portions 51. The pitch of the guide portions 81 in the vertical direction D2 may be equal pitch (equal cycle) or unequal pitch (unequal cycle).
 ガイド部81の上向き指向構造は、被収納物Jのスライド方向を上向きに指向させることができれば、制限されない。例えば、ガイド部81の上面816の全面が後方向D12に向けて徐々に上がっていく形状を有していてもよい。 There are no limitations to the upwardly oriented structure of the guide portion 81, so long as it can orient the sliding direction of the stored object J upward. For example, the entire upper surface 816 of the guide portion 81 may have a shape that gradually rises toward the rear direction D12.
 被収納物は、基板単体であってもよく、基板を保持した状態の治具であってもよい。 The object to be stored may be a single board or a jig holding a board.
 側方支持部5と奥側支持部6とは、容器本体2の内部において容器本体2に対して固定される1つの内装部を構成していてもよい。奥側支持部6は、容器本体2に一体成形されて構成されていてもよい。 The side support parts 5 and the rear support part 6 may form a single interior part that is fixed to the container body 2 inside the container body 2. The rear support part 6 may be integrally molded with the container body 2.
1 収納容器
2 容器本体
21 容器本体開口部
27 収納空間
28 開口周縁部
3 蓋体
5 側方支持部
51 板部
8 アダプター部材
81 ガイド部
816 上面
D1 前後方向
D4 スライド方向
J 被収納物(治具)
J1 治具本体
W 基板
1 Storage container 2 Container body 21 Container body opening 27 Storage space 28 Opening periphery 3 Lid 5 Side support portion 51 Plate portion 8 Adapter member 81 Guide portion 816 Top surface D1 Front-rear direction D4 Slide direction J Stored object (jig)
J1 Jig body W Board

Claims (8)

  1.  複数の被収納物を並列に収納可能な収納空間が内部に形成され、一端部に前記収納空間に連通する容器本体開口部が形成された開口周縁部を有し、他端部が閉塞されている容器本体と、
     前記容器本体開口部に対して着脱可能であり、前記容器本体開口部を閉塞可能な蓋体と、
     前記収納空間内において対をなすように配置され、複数の前記被収納物のうちの隣接する前記被収納物を所定の間隔で離間させて並列させた状態で、前記複数の被収納物の縁部を支持可能な側方支持部であって、隣接する前記被収納物の間に配置される複数の板部を有する側方支持部と、
     前記容器本体の前記一端部と前記他端部とを結ぶ前後方向において、前記収納空間における前記容器本体開口部と前記側方支持部との間に配置されるアダプター部材であって、複数の前記板部の一部又は全部に対応して配置されるガイド部を有するアダプター部材とを、備え、
     前記アダプター部材は、前記側方支持部又は前記容器本体に着脱自在に構成されている、収納容器。
    a container body having a storage space formed therein capable of storing a plurality of objects in parallel, one end of which has an opening periphery formed with a container body opening communicating with the storage space, and the other end of which is closed;
    A lid body that is detachable from the container body opening and can close the container body opening;
    side support parts that are arranged in pairs within the storage space and that can support edges of the plurality of stored objects when adjacent stored objects are arranged in parallel with a predetermined distance apart from each other, the side support parts having a plurality of plate parts that are arranged between the adjacent stored objects;
    an adaptor member disposed between the container body opening and the side support portion in the storage space in a front-rear direction connecting the one end and the other end of the container body, the adaptor member having a guide portion disposed corresponding to some or all of the plurality of plate portions;
    The adapter member is configured to be freely attached and detached to the side support portion or the container body.
  2.  前記ガイド部は、複数の前記板部ごとに、1つ設けられる、請求項1に記載の収納容器。 The storage container according to claim 1, wherein one guide portion is provided for each of the plurality of plate portions.
  3.  前記ガイド部は、前記ガイド部の上面の上をスライドする被収納物のスライド方向を上向きに指向させる構造を有する、請求項1又は2に記載の収納容器。 The storage container according to claim 1 or 2, wherein the guide portion has a structure that directs the sliding direction of the stored object sliding on the upper surface of the guide portion upward.
  4.  前記被収納物は、基板、及び/又は基板用の板状の治具である、請求項1~3のいずれかに記載の収納容器。 The storage container according to any one of claims 1 to 3, wherein the object to be stored is a substrate and/or a plate-shaped jig for a substrate.
  5.  複数の被収納物を並列に収納可能な収納空間が内部に形成され、一端部に前記収納空間に連通する容器本体開口部が形成された開口周縁部を有し、他端部が閉塞されている容器本体と、前記容器本体開口部に対して着脱可能であり、前記容器本体開口部を閉塞可能な蓋体と、前記収納空間内において対をなすように配置され、複数の前記被収納物のうちの隣接する前記被収納物を所定の間隔で離間させて並列させた状態で、前記複数の被収納物の縁部を支持可能な側方支持部であって、隣接する前記被収納物の間に配置される複数の板部を有する側方支持部と、前記容器本体の前記一端部と前記他端部とを結ぶ前後方向において、前記収納空間における前記容器本体開口部と前記側方支持部との間に配置されるアダプター部材であって、複数の前記板部の一部又は全部に対応して配置されるガイド部を有するアダプター部材とを、備える収納容器におけるアダプター部材であって、
     前記アダプター部材は、前記側方支持部又は前記容器本体に着脱自在に構成されている、アダプター部材。
    an adaptor member for a storage container comprising: a container body having a storage space formed therein capable of storing a plurality of stored objects in parallel, one end of which has an opening periphery with a container body opening communicating with the storage space formed therein and the other end of which is closed; a lid that is detachable from the container body opening and capable of closing the container body opening; a side support part that is arranged in a pair within the storage space and capable of supporting edges of the plurality of stored objects when adjacent items among the plurality of stored objects are arranged in parallel and spaced apart from each other at a predetermined interval, the side support part having a plurality of plate parts that are arranged between the adjacent items; and an adaptor member that is arranged between the container body opening and the side support part in the storage space in the front-to-rear direction connecting the one end and the other end of the container body, the adaptor member having guide parts that are arranged corresponding to some or all of the plurality of plate parts,
    The adapter member is configured to be freely attached to and detached from the side support portion or the container body.
  6. 前記ガイド部は、複数の前記板部ごとに、1つ設けられる、請求項5に記載のアダプター部材。 The adapter member according to claim 5, wherein one guide portion is provided for each of the plurality of plate portions.
  7. 前記ガイド部は、前記ガイド部の上面の上をスライドする被収納物のスライド方向を上向きに指向させる構造を有する、請求項5又は6に記載のアダプター部材。 The adapter member according to claim 5 or 6, wherein the guide portion has a structure that directs the sliding direction of the stored object sliding on the upper surface of the guide portion upward.
  8. 前記被収納物は、基板、及び/又は基板用の板状の治具である、請求項5~7のいずれかに記載のアダプター部材。 An adapter member according to any one of claims 5 to 7, wherein the object to be stored is a substrate and/or a plate-shaped jig for a substrate.
PCT/JP2022/042848 2022-11-18 2022-11-18 Housing container and adapter member WO2024105879A1 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
PCT/JP2022/042848 WO2024105879A1 (en) 2022-11-18 2022-11-18 Housing container and adapter member

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
PCT/JP2022/042848 WO2024105879A1 (en) 2022-11-18 2022-11-18 Housing container and adapter member

Publications (1)

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WO2024105879A1 true WO2024105879A1 (en) 2024-05-23

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Application Number Title Priority Date Filing Date
PCT/JP2022/042848 WO2024105879A1 (en) 2022-11-18 2022-11-18 Housing container and adapter member

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Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2005340264A (en) * 2004-05-24 2005-12-08 Asahi Kasei Microsystems Kk Substrate accommodation vessel and auxiliary tool therefor
JP2012195507A (en) * 2011-03-17 2012-10-11 Shin Etsu Polymer Co Ltd Substrate housing container and support jig
JP2013120896A (en) * 2011-12-08 2013-06-17 Shin Etsu Polymer Co Ltd Thin plate housing container
JP2021168354A (en) * 2020-04-10 2021-10-21 信越ポリマー株式会社 Substrate housing container

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2005340264A (en) * 2004-05-24 2005-12-08 Asahi Kasei Microsystems Kk Substrate accommodation vessel and auxiliary tool therefor
JP2012195507A (en) * 2011-03-17 2012-10-11 Shin Etsu Polymer Co Ltd Substrate housing container and support jig
JP2013120896A (en) * 2011-12-08 2013-06-17 Shin Etsu Polymer Co Ltd Thin plate housing container
JP2021168354A (en) * 2020-04-10 2021-10-21 信越ポリマー株式会社 Substrate housing container

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