CN110574152B - Substrate container - Google Patents
Substrate container Download PDFInfo
- Publication number
- CN110574152B CN110574152B CN201780089276.3A CN201780089276A CN110574152B CN 110574152 B CN110574152 B CN 110574152B CN 201780089276 A CN201780089276 A CN 201780089276A CN 110574152 B CN110574152 B CN 110574152B
- Authority
- CN
- China
- Prior art keywords
- substrate
- container body
- inclined surface
- lid
- substrates
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
- 239000000758 substrate Substances 0.000 title claims abstract description 331
- 230000002093 peripheral effect Effects 0.000 claims description 20
- 230000002950 deficient Effects 0.000 description 5
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 4
- 239000000463 material Substances 0.000 description 4
- 229920005989 resin Polymers 0.000 description 4
- 239000011347 resin Substances 0.000 description 4
- 229910052710 silicon Inorganic materials 0.000 description 4
- 239000010703 silicon Substances 0.000 description 4
- 230000004308 accommodation Effects 0.000 description 3
- 238000007789 sealing Methods 0.000 description 3
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 2
- 229920000049 Carbon (fiber) Polymers 0.000 description 2
- 239000004917 carbon fiber Substances 0.000 description 2
- 239000004065 semiconductor Substances 0.000 description 2
- 229920000089 Cyclic olefin copolymer Polymers 0.000 description 1
- 229920000106 Liquid crystal polymer Polymers 0.000 description 1
- 239000004977 Liquid-crystal polymers (LCPs) Substances 0.000 description 1
- 239000004696 Poly ether ether ketone Substances 0.000 description 1
- 239000004697 Polyetherimide Substances 0.000 description 1
- 239000000956 alloy Substances 0.000 description 1
- 229910045601 alloy Inorganic materials 0.000 description 1
- 239000002041 carbon nanotube Substances 0.000 description 1
- 229910021393 carbon nanotube Inorganic materials 0.000 description 1
- 229920001940 conductive polymer Polymers 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 229920001973 fluoroelastomer Polymers 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- 239000003365 glass fiber Substances 0.000 description 1
- VNWKTOKETHGBQD-UHFFFAOYSA-N methane Chemical compound C VNWKTOKETHGBQD-UHFFFAOYSA-N 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 239000012778 molding material Substances 0.000 description 1
- 239000004033 plastic Substances 0.000 description 1
- 229920003023 plastic Polymers 0.000 description 1
- 229920001643 poly(ether ketone) Polymers 0.000 description 1
- -1 polybutylene terephthalate Polymers 0.000 description 1
- 229920001707 polybutylene terephthalate Polymers 0.000 description 1
- 229920000515 polycarbonate Polymers 0.000 description 1
- 239000004417 polycarbonate Substances 0.000 description 1
- 229920000728 polyester Polymers 0.000 description 1
- 229920002530 polyetherether ketone Polymers 0.000 description 1
- 229920001601 polyetherimide Polymers 0.000 description 1
- 229920000098 polyolefin Polymers 0.000 description 1
- 229910052594 sapphire Inorganic materials 0.000 description 1
- 239000010980 sapphire Substances 0.000 description 1
- 229920002379 silicone rubber Polymers 0.000 description 1
- 239000004945 silicone rubber Substances 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- 229920002725 thermoplastic elastomer Polymers 0.000 description 1
- 229920005992 thermoplastic resin Polymers 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/673—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere using specially adapted carriers or holders; Fixing the workpieces on such carriers or holders
- H01L21/6735—Closed carriers
- H01L21/67386—Closed carriers characterised by the construction of the closed carrier
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/673—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere using specially adapted carriers or holders; Fixing the workpieces on such carriers or holders
- H01L21/6735—Closed carriers
- H01L21/67373—Closed carriers characterised by locking systems
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/673—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere using specially adapted carriers or holders; Fixing the workpieces on such carriers or holders
- H01L21/6735—Closed carriers
- H01L21/67369—Closed carriers characterised by shock absorbing elements, e.g. retainers or cushions
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/673—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere using specially adapted carriers or holders; Fixing the workpieces on such carriers or holders
- H01L21/6732—Vertical carrier comprising wall type elements whereby the substrates are horizontally supported, e.g. comprising sidewalls
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/673—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere using specially adapted carriers or holders; Fixing the workpieces on such carriers or holders
- H01L21/6735—Closed carriers
- H01L21/67379—Closed carriers characterised by coupling elements, kinematic members, handles or elements to be externally gripped
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/673—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere using specially adapted carriers or holders; Fixing the workpieces on such carriers or holders
- H01L21/6735—Closed carriers
- H01L21/67383—Closed carriers characterised by substrate supports
Abstract
The invention comprises: a lower substrate guide inclined surface (733) connected to the lower end of the lower inclined surface (731) and inclined at a smaller angle to the vertical direction (D2) than the inclination of the lower inclined surface (731), the vertical direction (D2) being aligned with the direction in which the plurality of substrates are aligned; and an upper substrate guide inclined surface (734) connected to the upper end of the upper inclined surface (732) and inclined at a smaller angle to the vertical direction (D2) than the inclination of the upper inclined surface (732). In the direction in which the groove (703) extends when the container body opening is closed by the lid, the length of the lower substrate guide inclined surface (733) in the up-down direction (D2) increases as the center of the container body opening is approached.
Description
Technical Field
The present invention relates to a substrate storage container for storing, transporting, and conveying a substrate made of a semiconductor wafer or the like.
Background
As a substrate storage container for storing and transporting a substrate composed of a semiconductor wafer, a device including a container body and a lid is known (for example, refer to patent document 1, patent document 2, and patent document 3).
One end of the container body has an opening peripheral edge portion formed with an opening of the container body. The other end of the container body has a closed cylindrical wall portion. A substrate accommodating space is formed in the container body. The substrate accommodating space is surrounded by a wall portion, and can accommodate a plurality of substrates. The lid is detachable from the peripheral edge of the opening, and can close the opening of the container body. The side substrate support portions are provided in pairs in the substrate accommodation space on the wall portion. When the container body opening is not closed by the lid, the side substrate support portion can support the edge portions of the plurality of substrates in a state where adjacent substrates are arranged apart from each other at a predetermined interval.
A front holding member is provided on a portion of the lid body that faces the substrate accommodating space when the opening of the container body is closed. The front holding member has: a cover body side substrate receiving unit which directly contacts with the substrate and supports the substrate; and a lid side leg portion for supporting the lid side substrate receiving portion, wherein the front holding member is capable of supporting the edge portions of the plurality of substrates when the container body opening is closed by the lid. Further, the rear substrate support portion is provided on the wall portion in a pair with the front holding member. The rear substrate support portion can support edge portions of a plurality of substrates. When the container body opening is closed by the lid body, the rear substrate support portion supports the plurality of substrates by cooperating with the front holding member, thereby holding the plurality of substrates in a state in which the adjacent substrates are arranged apart from each other at a predetermined interval.
Prior art literature
Patent document 1: japanese patent laid-open publication No. 2015-135881
Patent document 2: japanese patent public-exterior publication No. 2013-540372
Patent document 3: japanese patent laid-open publication No. Hei 2-106831
In the substrate storage container described in the above publication, when the container body opening is closed by the lid, a defective guide of the substrate is likely to occur in the front holding member, that is, a state in which the substrate enters between the adjacent plurality of lid side substrate receiving portions and comes off is likely to occur.
Disclosure of Invention
The invention provides a substrate storage container capable of suppressing defective guidance of a substrate of a front holding member.
The substrate storage container of the present invention includes: a container body having a tubular wall portion having an opening peripheral edge portion forming an opening of the container body at one end portion and being closed at the other end portion, and a substrate accommodating space formed by an inner surface of the wall portion, the substrate accommodating space being capable of accommodating a plurality of substrates and communicating with the container body opening; a lid body which is detachable from the container body opening and which can close the container body opening; side substrate supporting parts which are arranged in pairs in the substrate accommodating space and can support edge parts of the plurality of substrates in a state that adjacent substrates are arranged at a prescribed interval when the container main body opening part is not closed by the cover body; a lid side substrate support portion which is disposed on the lid portion facing the substrate accommodating space when the container body opening is closed by the lid and can support edge portions of the plurality of substrates; and a rear substrate support portion disposed in the substrate housing space so as to be paired with the lid side substrate support portion, the rear substrate support portion being capable of supporting edge portions of the plurality of substrates, the rear substrate support portion being capable of supporting the plurality of substrates in cooperation with the lid side substrate support portion when the container body opening is closed by the lid, the lid side substrate support portion comprising: a cover side substrate receiving unit which directly contacts the substrate and supports the substrate; and a cover side leg portion for supporting the cover side substrate receiving portion, the cover side substrate receiving portion having: a lower inclined surface extending obliquely away from the center of the substrate accommodating space; an upper inclined surface extending obliquely from an upper end portion of the lower inclined surface so as to approach a center of the substrate accommodating space; a lower substrate guide inclined surface connected to a lower end portion of the lower inclined surface, the lower substrate guide inclined surface being inclined at a smaller angle to an up-down direction, the up-down direction being aligned with an alignment direction in which the plurality of substrates are aligned, than the inclination of the lower inclined surface; and an upper substrate guide inclined surface connected to an upper end portion of the upper inclined surface, the upper substrate guide inclined surface being inclined so as to form an angle smaller with the vertical direction than an inclination of the upper inclined surface, the lower inclined surface and the upper inclined surface being in contact with the substrate when the container body opening is closed by the lid body, the substrate being supported in a groove formed by the lower inclined surface and the upper inclined surface, a length of the lower substrate guide inclined surface in the vertical direction being longer as approaching a center of the container body opening in a direction in which the groove extends when the container body opening is closed by the lid body.
Further, it is preferable that the lid-side substrate receiving portion has a parallelogram shape when viewed in a direction from one end portion toward the other end portion of the container body.
According to the present invention, it is possible to provide a substrate storage container capable of suppressing occurrence of defective substrate guiding of a front holding member.
Drawings
Fig. 1 is an exploded perspective view showing a state in which a plurality of substrates W are accommodated in a substrate accommodating container 1 according to an embodiment of the present invention.
Fig. 2 is a perspective view showing a container body 2 of the substrate storage container 1 according to the embodiment of the present invention.
Fig. 3 is a perspective view showing the lid 3 of the substrate storage container 1 according to the embodiment of the present invention.
Fig. 4 is a perspective view showing the front holding member 7 of the substrate storage container 1 according to the embodiment of the present invention.
Fig. 5 is a front view showing the front holding member 7 of the substrate storage container 1 according to the embodiment of the present invention.
Fig. 6 is a side cross-sectional view showing the front holding member 7 of the substrate storage container 1 according to the embodiment of the present invention.
Fig. 7 is an enlarged cross-sectional view showing the front holding member substrate receiving portion 73 of the substrate storage container 1 according to the embodiment of the present invention.
Fig. 8 is a schematic view showing a state in which a substrate W is inserted into the V-shaped groove 703 of the front holding member substrate receiving portion 73 of the substrate storage container 1 according to the embodiment of the present invention.
Description of the reference numerals
1 substrate storage container
2 Container body
3 cover body
5 substrate supporting plate (side substrate supporting part)
6 rear side substrate support
7 front holding member (cover side base support)
20 wall portions
21 opening of container body
27 substrate accommodating space
28 opening peripheral edge portion
72 feet (cover side feet)
73 front holding member substrate receiving portion (cover side substrate receiving portion)
703V-shaped groove
731 is inclined obliquely downwards
732 upper inclined slope
733 lower substrate guiding inclined plane
734 upper substrate guiding inclined plane
W substrate
Detailed Description
The substrate storage container 1 according to the present embodiment is described below with reference to the drawings.
Fig. 1 is an exploded perspective view showing a state in which a plurality of substrates W are accommodated in a substrate accommodating container 1 according to an embodiment of the present invention. Fig. 2 is a perspective view showing a container body 2 of the substrate storage container 1 according to the embodiment of the present invention. Fig. 3 is a perspective view showing the lid 3 of the substrate storage container 1 according to the embodiment of the present invention.
Here, for convenience of explanation, a direction from the container body 2 to the lid body 3 (a direction from the upper right to the lower left in fig. 1) described later is defined as a forward direction D11, a direction opposite to the forward direction D11 is defined as a backward direction D12, and the forward direction D11 and the backward direction D12 are defined as a forward-backward direction D1. The direction from the lower wall 24 to the upper wall 23 (upward direction in fig. 1) described later is defined as an upward direction D21, the opposite direction of the upward direction D21 is defined as a downward direction D22, and the upward direction D21 and the downward direction D22 are defined as an up-down direction D2. Further, a direction from the second side wall 26 described later toward the first side wall 25 (a direction from the lower right toward the upper left in fig. 1) is defined as a left direction D31, an opposite direction to the left direction D31 is defined as a right direction D32, and the left direction D31 and the right direction D32 are defined as a left-right direction D3. In the main figures, arrows representing these directions are illustrated.
The substrate W (see fig. 1) stored in the substrate storage container 1 is a disk-shaped silicon wafer, glass wafer, sapphire wafer, or the like, and is a thin wafer used in industry. The substrate W in the present embodiment is a silicon wafer having a diameter of 300 mm.
As shown in fig. 1, a substrate storage container 1 stores a substrate W composed of the above-described silicon wafer, and serves as a shipping container for transporting the substrate W by a transport means such as a land transport means, an air transport means, or a sea transport means, and the substrate storage container 1 includes a container main body 2 and a lid 3. The container body 2 includes a substrate support plate-like portion 5 and a rear substrate support portion 6 (see fig. 2 and the like) as side substrate support portions, and the lid 3 includes a front holding member 7 (see fig. 3 and the like) as lid side substrate support portions.
The container body 2 has a tubular wall portion 20 having a container body opening 21 formed at one end and the other end closed. A substrate accommodating space 27 is formed in the container body 2. The substrate accommodating space 27 is surrounded by the wall portion 20. The substrate support plate-like portion 5 is disposed at a portion of the wall portion 20 where the substrate accommodating space 27 is formed. As shown in fig. 1, the substrate accommodating space 27 can accommodate a plurality of substrates W.
The substrate support plate-like portions 5 are provided in pairs on the wall portion 20 in the substrate accommodation space 27. When the container body opening 21 is not closed by the lid body 3, the substrate support plate-like portion 5 can support the edge portions of the plurality of substrates W in a state where the adjacent substrates W are arranged at a predetermined interval from each other by abutting against the edge portions of the plurality of substrates W. A rear substrate support portion 6 is provided on the rear side of the substrate support plate portion 5 integrally with the substrate support plate portion 5.
The rear substrate support portion 6 (see fig. 2, etc.) is provided in the substrate accommodation space 27 so as to be paired with a front holding member 7 (see fig. 3, etc.), which will be described later, on the wall portion 20. When the container body opening 21 is closed by the lid 3, the rear substrate support portion 6 can support the rear portions of the edge portions of the plurality of substrates W by abutting against the edge portions of the plurality of substrates W.
The lid 3 is detachable from an opening peripheral edge 28 (fig. 1, etc.) forming the container body opening 21, and can close the container body opening 21. The front holding member 7 is provided on a portion of the lid body 3 that opposes the substrate accommodating space 27 when the container body opening 21 is closed by the lid body 3. The front holding member 7 is disposed in the substrate housing space 27 so as to be paired with the rear substrate support portion 6.
When the container body opening 21 is closed by the lid 3, the front holding member 7 can support the front portions of the edge portions of the plurality of substrates W by abutting against the edge portions of the plurality of substrates W. When the container body opening 21 is closed by the lid body 3, the front holding member 7 supports the plurality of substrates W in cooperation with the rear substrate support 6, and holds the substrates W in a state where the adjacent substrates W are arranged apart from each other at a predetermined interval.
The substrate storage container 1 is made of a resin such as a plastic material, and examples of the resin used as a material include thermoplastic resins such as polycarbonate, cyclic olefin polymer, polyetherimide, polyetherketone, polybutylene terephthalate, polyetheretherketone, and liquid crystal polymer, and alloys thereof, unless otherwise specified. When the resin of the molding material is given conductivity, a conductive substance such as carbon fiber, carbon powder, carbon nanotube, or conductive polymer is optionally added. In order to improve rigidity, glass fibers, carbon fibers, and the like may be added.
Hereinafter, each portion will be specifically described.
Fig. 4 is a perspective view showing the front holding member 7 of the substrate storage container 1 according to the embodiment of the present invention. Fig. 5 is a front view showing the front holding member 7 of the substrate storage container 1 according to the embodiment of the present invention. Fig. 6 is a side cross-sectional view showing the front holding member 7 of the substrate storage container 1 according to the embodiment of the present invention. Fig. 7 is an enlarged cross-sectional view showing the front holding member substrate receiving portion 73 of the substrate storage container 1 according to the embodiment of the present invention.
As shown in fig. 1, the wall portion 20 of the container body 2 has a rear wall 22, an upper wall 23, a lower wall 24, a first side wall 25, and a second side wall 26. The rear wall 22, the upper wall 23, the lower wall 24, the first side wall 25 and the second side wall 26 are formed of the materials described and integrally formed.
The first side wall 25 is opposite the second side wall 26 and the upper wall 23 is opposite the lower wall 24. The rear end of the upper wall 23, the rear end of the lower wall 24, the rear end of the first side wall 25 and the rear end of the second side wall 26 are all connected to the rear wall 22. The front end of the upper wall 23, the front end of the lower wall 24, the front end of the first side wall 25, and the front end of the second side wall 26 constitute an opening peripheral edge portion 28, and the opening peripheral edge portion 28 forms a substantially rectangular container body opening 21 having a positional relationship opposed to the rear wall 22.
The opening peripheral edge portion 28 is provided at one end portion of the container body 2, and the rear wall 22 is located at the other end portion of the container body 2. The container body 2 formed by the outer surface of the wall portion 20 has a box-like shape. The inner surfaces of the wall portion 20, that is, the inner surface of the rear wall 22, the inner surface of the upper wall 23, the inner surface of the lower wall 24, the inner surface of the first side wall 25, and the inner surface of the second side wall 26 form a substrate accommodating space 27 surrounded by them. The container body opening 21 formed by the opening peripheral edge 28 communicates with the substrate accommodating space 27 surrounded by the wall 20 and formed in the interior of the container body 2. The substrate accommodating space 27 can accommodate at most 25 substrates W.
As shown in fig. 1, latch engaging recesses 231A, 231B, 241A, 241B recessed toward the outside of the substrate accommodating space 27 are formed in portions near the opening peripheral edge portion 28, which are portions of the upper wall 23 and the lower wall 24. The number of latch engaging recesses 231A, 231B, 241A, 241B is 1 near each of the left and right ends of the upper wall 23 and the lower wall 24, and 4 in total.
As shown in fig. 1, a rib 235 is provided on the outer surface of the upper wall 23 integrally with the upper wall 23. The ribs 235 increase the rigidity of the container body 2. Further, a top flange 236 is fixed to the central portion of the upper wall 23. When the substrate container 1 is suspended in an AMHS (automatic wafer transport system), PGV (wafer substrate transport cart), or the like, the top flange 236 becomes a suspended portion in the substrate container 1.
The substrate support plate-like portions 5 are provided on the first side wall 25 and the second side wall 26, respectively, and are built-in members arranged in pairs in the substrate accommodating space 27 in the lateral direction D3. Specifically, as shown in fig. 2, the substrate supporting plate-like portion 5 has a plate portion 51 and a supporting wall 52 as a plate portion supporting portion. The plate 51 and the support wall 52 are integrally formed of a resin material, and the plate 51 is supported by the support wall 52.
The plate portion 51 has a plate-like substantially arc shape. The plate portion 51 is provided with 25 plates in the vertical direction D2 on the first side wall 25 and the second side wall 26, and 50 plates in total. The adjacent plate portions 51 are arranged in parallel and spaced apart from each other at intervals of 10mm to 12mm in the up-down direction D2. A plate-like member, not shown, is disposed above the uppermost plate portion 51 and parallel to the plate portion 51, and this member plays a role of guiding the substrate W inserted into the substrate accommodating space 27 in the uppermost direction.
Further, the 25 plate portions 51 provided on the first side wall 25 and the 25 plate portions 51 provided on the second side wall 26 have a positional relationship opposing each other in the left-right direction D3. Further, 50 plate portions 51 and a plate-like member, not shown, parallel to the plate portions 51 and functioning as a guide have a positional relationship parallel to the inner surface of the lower wall 24. As shown in fig. 2 and the like, protrusions 511 and 512 are provided on the upper surface of the plate portion 51. The substrate W supported by the plate 51 is in contact with only the protruding ends of the protrusions 511 and 512 and is not in surface contact with the plate 51.
The support wall 52 has a plate shape extending in the up-down direction D2 and the substantially front-rear direction D1. The support wall 52 has a predetermined length in the longitudinal direction of the plate portion 51, and is connected to the side end edge of the plate portion 51. The plate-like support wall 52 is bent toward the substrate accommodating space 27 along the outer end edge of the plate portion 51.
That is, 25 plate portions 51 provided on the first side wall 25 are connected to the support wall 52 provided on the first side wall 25 side. Likewise, 25 plate portions 51 provided on the second side wall 26 are connected to the support wall 52 provided on the second side wall 26 side. The support wall 52 is fixed to the first side wall 25 and the second side wall 26, respectively.
The substrate support plate-like portion 5 configured as described above can support the edge portions of the plurality of substrates W in a state where adjacent substrates W among the plurality of substrates W are separated from each other at a predetermined interval and in a state where the adjacent substrates are in a parallel positional relationship with each other.
As shown in fig. 2, the rear substrate support portion 6 has a rear end edge support portion 60. The rear end edge support portion 60 is integrally formed with the plate portion 51 and the support wall 52 at the rear end portion of the plate portion 51 of the substrate support plate portion 5. Therefore, the substrate support plate-like portion 5 and the rear substrate support portion 6, which are side substrate support portions, constitute one built-in member fixedly coupled to the container body 2 inside the container body 2.
The number of the rear end edge support portions 60 corresponds to each substrate W that can be stored in the substrate storage space 27, and specifically, 25 rear end edge support portions 60 are provided. The rear end edge support portions 60 disposed on the first side wall 25 and the second side wall 26 have a positional relationship in pairs with the front holding members 7 described later in the front-rear direction D1.
The rear side end edge support 60 has a lower inclined slope 611 and an upper inclined slope 612, thereby forming a substantially V-shaped groove. When the container body opening 21 is closed by the lid 3, the substrate W slides and gradually rises with respect to the lower inclined surface 611, and when the edge portion of the substrate W abuts against the upper inclined surface 612, the edge portion of the substrate W is supported by the rear end edge support portion 60.
As shown in fig. 1 and the like, the lid body 3 has a substantially rectangular shape substantially conforming to the shape of the opening peripheral edge portion 28 of the container body 2. The lid 3 is detachable from the opening peripheral edge portion 28 of the container body 2, and by attaching the lid 3 to the opening peripheral edge portion 28, the lid 3 can close the container body opening 21. An annular seal member 4 is attached to a surface (seal surface 281) which is an inner surface of the lid body 3 (a surface on the back side of the lid body 3 shown in fig. 1) and which is opposite to a surface (seal surface 281) formed on a step portion at a position abutting against the opening peripheral edge portion 28 in the backward direction D12 when the lid body 3 closes the container body opening portion 21. The sealing member 4 is made of various thermoplastic elastomers such as polyester and polyolefin, fluororubber products, silicone rubber products, and the like, which are elastically deformable. The seal member 4 is disposed so as to surround the outer peripheral edge portion of the lid body 3.
When the lid body 3 is attached to the opening peripheral edge portion 28, the sealing member 4 is sandwiched between the sealing surface 281 and the inner surface of the lid body 3, and elastically deforms, and the lid body 3 closes the container body opening portion 21 in a sealed state. By removing the lid 3 from the opening peripheral edge 28, the substrate W can be taken into and put out of the substrate accommodating space 27 in the container body 2.
A latch mechanism is arranged on the cover body 3. As shown in fig. 1, the latch mechanism is provided near both right and left end portions of the cover 3, and includes: two upper plug portions 32A that can protrude from the upper side of the cover 3 in the upward direction D21; and two lower side plug portions 32B that can protrude from the lower side of the cover 3 in the downward direction D22. Two upper plug portions 32A are disposed near the left and right ends of the upper side of the cover 3, and two lower plug portions 32B are disposed near the left and right ends of the lower side of the cover 3.
An operation portion 33 is provided on the outer surface of the cover 3. By operating the operating portion 33 from the front side of the cover 3, the upper side plug portion 32A and the lower side plug portion 32B can be made to protrude from the upper side and the lower side of the cover 3, respectively, and the upper side plug portion 32A and the lower side plug portion 32B can be made to be in a state of not protruding from the upper side and the lower side. The lid 3 is fixed to the opening peripheral edge 28 of the container body 2 by projecting the upper plug 32A from the upper side of the lid 3 in the upward direction D21 and engaging with the plug engagement recesses 231A, 231B of the container body 2, and projecting the lower plug 32B from the lower side of the lid 3 in the downward direction D22 and engaging with the plug engagement recesses 241A, 241B of the container body 2.
As shown in fig. 3, a recess 34 recessed toward the outside of the substrate accommodating space 27 is formed on the inside of the cover 3. A front holding member 7 is fixed to a portion of the cover 3 inside the recess 34.
The front holding member 7 has a front holding member substrate receiving portion 73 as a cover side substrate receiving portion. The front holding member substrate receiving portions 73 are arranged two by two in a pair at a predetermined interval in the left-right direction D3. The front holding member substrate receiving portions 73, which are arranged two by two in a pair manner, are provided in an aligned state of 25 pairs in the up-down direction D2, and are supported by the leg portions 72, which are cover-side leg portions, respectively, which are elastically deformable. At the end of the leg 72, a vertical frame 71 extending parallel to the vertical direction D2 is provided integrally with the leg 72. By accommodating the substrate W in the substrate accommodating space 27 and closing the cover 3, the front holding member substrate receiving portion 73 clamps and supports the end edge of the edge portion of the substrate W in a state of applying a force to the center of the substrate accommodating space 27 by the elastic force of the leg portion 72.
Specifically, as shown in fig. 7, the front holding member substrate receiving portion 73 has a lower inclined slope 731 and an upper inclined slope 732.
When the container body opening 21 is closed by the lid 3, the lower inclined surface 731 abuts on the end edge of the back surface of the substrate W. The upper inclined surface 732 abuts against an end edge of the surface of the substrate W. Specifically, the lower inclined surface 731 is constituted by an inclined surface that extends obliquely away from the center of the substrate accommodating space 27 in the front-rear direction D1 as advancing in the upward direction D21. The upper inclined surface 732 is constituted by an inclined surface that extends obliquely so as to approach the center of the substrate accommodating space 27 in the front-rear direction D1 as advancing in the upward direction D21. The lower inclined groove 731 and the upper inclined groove 732 form a V-shaped groove 703, and the V-shaped groove 703 is a recessed groove recessed so as to be away from the center of the substrate accommodating space 27, and extends in the left-right direction D3.
The front holding member substrate receiving portion 73 has a lower substrate guide inclined surface 733 and an upper substrate guide inclined surface 734. The lower substrate guide inclined surface 733 is connected to the lower end portion of the lower inclined surface 731, and extends obliquely in a substantially downward direction. The lower substrate guide inclined surface 733 is inclined at a smaller angle to the up-down direction D2 than the inclination of the lower inclined surface 731. That is, as shown in fig. 7, the lower substrate guide inclined surface 733 is inclined so as to expand the V-shaped groove 703 as it moves away from the apex of the V-shaped groove 703.
The upper substrate guide inclined surface 734 is connected to the upper end portion of the upper inclined surface 732, extends obliquely in a substantially upward direction, and is inclined at a smaller angle with respect to the vertical direction D2 than the upper inclined surface 732. That is, as shown in fig. 7, the upper substrate guide inclined surface 734 is inclined so as to expand the V-shaped groove 703 as it moves away from the apex of the V-shaped groove 703.
As shown in fig. 5 and the like, the front holding member substrate receiving portion 73 has a parallelogram shape when viewed from one end portion toward the other end portion of the container body 2, that is, when viewed from the rear. I.e. having a pair of short sides and a pair of long sides. In the rear view shown in fig. 5, a pair of short sides have a positional relationship parallel to the up-down direction D2. In the rear view shown in fig. 5, the pair of long sides have a positional relationship with a predetermined angle with respect to the left-right direction D3, and the length of the lower substrate guide inclined surface 733 in the up-down direction D2 increases in the down direction D22 as approaching the center of the container body opening 21, that is, as approaching the center of the front holding member 7 in fig. 5, in the left-right direction D3, which is the direction in which the V-shaped groove 703 extends when the container body opening 21 is closed by the lid body 3.
Further, since the front holding member substrate receiving portion 73 has a parallelogram shape, the upper substrate guide inclined surface 734 extends in the upward direction D21 as it goes away from the center of the front holding member 7, but the left end portion of the upper substrate guide inclined surface 734 of the front holding member substrate receiving portion 73 on the left side (right side shown in fig. 5) has a shape in which a chamfer 735 is implemented, and the chamfer 735 becomes shorter in width as it goes further in the vertical direction D2 from a predetermined position toward the left direction D31. Similarly, the right end portion of the upper substrate guide inclined surface 734 of the right (left side in fig. 5) front holding member substrate receiving portion 73 has a shape in which a chamfer 735 is formed, and the chamfer 735 becomes shorter in width in the up-down direction D2 from a predetermined position further toward the right direction D32.
Next, an operation when the substrate W is stored in the substrate storage space 27 in the substrate storage container 1 and the container body opening 21 is closed with the lid 3 will be described. Fig. 8 is a schematic view showing a state in which the substrate W is inserted into the V-shaped groove 703 of the front holding member substrate receiving portion 73 of the substrate storage container 1 according to the embodiment of the present invention.
First, as shown in fig. 1, the container body 2 is disposed so that the front-rear direction D1 and the left-right direction D3 are in a positional relationship parallel to the horizontal plane. Next, the plurality of substrates W are respectively carried on the convex portions 511 and 512 of the plate portion 51 of the substrate supporting plate portion 5.
Next, the lid 3 is brought close to the container body opening 21, and the substrate W is brought into contact with the front holding member substrate receiving portion 73 of the front holding member 7. Then, as shown in fig. 8, if the lid 3 is further brought closer to the container body opening 21, the end edge of the back surface of the edge portion of the substrate W faces the lower substrate guide inclined surface 733 formed longer in the up-down direction D2, and therefore, is brought into contact with the lower substrate guide inclined surface 733, and slides and is guided in the direction indicated by the arrow in fig. 8. Then, if the lower inclined surface 731 is reached, the end edge of the back surface of the edge portion of the substrate W comes into contact with the lower inclined surface 731, slides with respect to the lower inclined surface 731, and gradually rises. Similarly, in the rear side end edge support portion 60, if the substrate W reaches the not-shown lower inclined side 611, the end edge of the rear surface of the edge portion of the substrate W abuts against the lower inclined side 611 of the rear side end edge support portion 60, and slides and gradually rises with respect to the lower inclined side 611.
When the substrate W reaches the apex position of the V-shaped groove 703, the end edge of the back surface and the end edge of the front surface of the substrate W are brought into contact with the lower inclined surface 731 and the upper inclined surface 732, respectively, and the edge portion of the substrate W is supported by the V-shaped groove 703. Similarly, the end edges of the back surface and the end edges of the front surface of the substrate W are respectively brought into contact with the lower inclined surface 611 and the upper inclined surface 612 of the rear end edge support portion 60, and are supported by the rear end edge support portion 60.
According to the substrate storage container 1 of the present embodiment having the above-described structure, the following effects can be obtained.
As described above, the substrate storage container 1 includes: the container body 2 has a tubular wall portion 20, the wall portion 20 has an opening peripheral edge portion 28 forming the container body opening portion 21 at one end portion, the other end portion is closed, a substrate accommodating space 27 is formed by an inner surface of the wall portion 20, and the substrate accommodating space 27 can accommodate a plurality of substrates W and communicates with the container body opening portion 21; a lid 3 which is detachable from the container body opening 21 and which can close the container body opening 21; the substrate support plate-like portions 5 as side substrate support portions are disposed in pairs in the substrate housing space 27, and when the container body opening 21 is not closed by the cover 3, edge portions of the plurality of substrates W can be supported while adjacent substrates W of the plurality of substrates W are arranged at predetermined intervals; the front holding member 7 as a lid side substrate support portion is disposed on a portion of the lid 3 facing the substrate accommodating space 27 when the container body opening 21 is closed by the lid 3, and can support edge portions of the plurality of substrates W; and a rear substrate support portion 6 disposed in the substrate housing space 27 so as to be paired with the front holding member 7, and configured to support the edge portions of the plurality of substrates W, and configured to cooperate with the front holding member 7 when the container body opening 21 is closed by the lid body 3, and configured to support the plurality of substrates W.
The front holding member 7 includes: a front holding member substrate receiving portion 73 as a lid side substrate receiving portion, which directly contacts and supports the substrate W; and a leg 72 serving as a lid-side leg for supporting the front-holding-member substrate receiving portion 73.
The front holding member substrate receiving portion 73 includes: a lower inclined portion 731 extending obliquely away from the center of the substrate accommodating space 27; an upper inclined slope 732 extending obliquely from an upper end portion of the lower inclined slope 731 so as to approach the center of the substrate accommodating space 27; the lower substrate guide inclined surface 733 is connected to the lower end portion of the lower inclined surface 731, and is inclined so as to be smaller than the inclination of the lower inclined surface 731 by an angle a formed in the up-down direction D2, the up-down direction D2 being aligned with the alignment direction of the plurality of substrates W; and an upper substrate guide inclined surface 734 connected to an upper end portion of the upper inclined surface 732, and inclined at an angle b smaller than an angle b formed by the upper inclined surface 732 in the up-down direction D2.
When the container body opening 21 is closed by the lid 3, the lower inclined slope 731 and the upper inclined slope 732 come into contact with the substrate W, and the substrate W is supported by the V-shaped groove 703 formed by the lower inclined slope 731 and the upper inclined slope 732.
In the direction in which the V-shaped groove 703 extends when the container body opening 21 is closed by the lid body 3, the length of the lower substrate guide inclined surface 733 in the up-down direction D2 increases as the center of the container body opening 21 is approached.
With this configuration, the lower substrate guide inclined surface 733 expands in the downward direction D22. Thus, when the cover 3 is closed, the end edge of the back surface of the edge portion of the substrate W is easily brought into contact with the lower substrate guide inclined surface 733. As a result, the cover 3 can be easily brought into contact with the lower inclined surface 731 by the lower substrate guide inclined surface 733, and the substrate W can be reliably guided to the V-shaped groove 703. This reduces the defective guide of the substrate W in the front holding member 7, that is, reduces the substrate W from coming between the adjacent plurality of front holding member substrate receiving portions 73 and coming off the substrate. Therefore, in the case of manually covering the enclosure body 3, there is no concern about defective guidance of the substrate W, and workability can be improved.
Further, the front holding member substrate receiving portion 73 has a parallelogram shape when viewed from the rear in a direction (forward direction D11) from one end toward the other end of the container main body 2. According to this configuration, the lower substrate guide inclined surface 733 can be enlarged in the downward direction D22 without expanding the interval between the V-shaped grooves 703 adjacent to each other in the vertical direction D2 and the V-shaped grooves 703. Therefore, when the container body opening 21 is closed with the lid 3, the position of the substrate W supported by the V-shaped groove 703 can be set to the same position as the conventional structure in which the substrate guide inclined surface 733 is not enlarged.
The present invention is not limited to the embodiments described above, and various modifications are possible within the technical scope of the claims.
For example, the shapes of the container body and the lid, the number and the size of the substrates W that can be accommodated in the container body are not limited to the shapes of the container body 2 and the lid 3, and the number and the size of the substrates W that can be accommodated in the container body 2 in the present embodiment. That is, the structures of the side substrate support portion, the cover side substrate support portion, and the rear side substrate support portion are not limited to the structures of the substrate support plate-like portion 5, the front holding member 7, and the rear side substrate support portion 6. The substrate W in the present embodiment is a silicon wafer having a diameter of 300mm, but is not limited to this value.
For example, the structure of the lid side substrate receiving portion is not limited to that of the front holding member substrate receiving portion 73. Therefore, the left end portion of the upper substrate guide inclined surface 734 of the left (right shown in fig. 5) front holding member substrate receiving portion 73 and the right end portion of the upper substrate guide inclined surface 734 of the right (left shown in fig. 5) front holding member substrate receiving portion 73 have a shape in which the chamfering 735 is performed, but may have a shape in which such chamfering is not performed.
The rear substrate support portion is constituted by the rear substrate support portion 6 in the present embodiment, but is not limited to this configuration. For example, the rear substrate support portion may be formed by a rear holding member integrally formed with the container body.
Claims (1)
1. A substrate storage container is characterized in that,
the substrate storage container includes:
a container body having a tubular wall portion having an opening peripheral edge portion forming an opening of the container body at one end portion and being closed at the other end portion, and a substrate accommodating space formed by an inner surface of the wall portion, the substrate accommodating space being capable of accommodating a plurality of substrates and communicating with the container body opening;
a lid body which is detachable from the container body opening and which can close the container body opening;
side substrate supporting parts which are arranged in pairs in the substrate accommodating space and can support edge parts of the plurality of substrates in a state that adjacent substrates are arranged at a prescribed interval when the container main body opening part is not closed by the cover body;
a lid side substrate support portion which is disposed on the lid portion facing the substrate accommodating space when the container body opening is closed by the lid and can support edge portions of the plurality of substrates; and
a rear substrate support portion disposed in the substrate housing space so as to be paired with the lid side substrate support portion, the rear substrate support portion being capable of supporting edge portions of the plurality of substrates, the rear substrate support portion being capable of supporting the plurality of substrates in cooperation with the lid side substrate support portion when the container main body opening is closed by the lid,
the cover side substrate support section includes: a lid side substrate receiving unit which is disposed in pairs with the center of the container body opening interposed therebetween and directly contacts the substrate to support the substrate; and a cover side leg portion for supporting the cover side substrate receiving portion,
the cover-side substrate receiving unit includes:
a lower inclined surface extending obliquely away from the center of the substrate accommodating space;
an upper inclined surface extending obliquely from an upper end portion of the lower inclined surface so as to approach a center of the substrate accommodating space;
a lower substrate guide inclined surface connected to a lower end portion of the lower inclined surface, the lower substrate guide inclined surface being inclined at a smaller angle to an up-down direction, the up-down direction being aligned with an alignment direction in which the plurality of substrates are aligned, than the inclination of the lower inclined surface; and
an upper substrate guide inclined surface connected to an upper end portion of the upper inclined surface and inclined at a smaller angle to the vertical direction than the inclination of the upper inclined surface,
when the container body opening is closed by the cover, the lower inclined slope and the upper inclined slope are in contact with the substrate, the substrate is supported in a groove formed by the lower inclined slope and the upper inclined slope,
in the direction in which the groove extends when the container body opening is closed by the lid body, the length in the up-down direction of the lower substrate guide inclined surfaces of the lid body side substrate receiving parts arranged in pairs becomes longer as the center of the container body opening is approached,
the lid-side substrate receiving portions arranged in pairs have a shape of a mirror-symmetrical parallelogram centered on the center of the container body opening when viewed in a direction from one end portion toward the other end portion of the container body.
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| PCT/JP2017/014281 WO2018185894A1 (en) | 2017-04-05 | 2017-04-05 | Board storing container |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN110574152A CN110574152A (en) | 2019-12-13 |
| CN110574152B true CN110574152B (en) | 2023-10-27 |
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201780089276.3A Active CN110574152B (en) | 2017-04-05 | 2017-04-05 | Substrate container |
Country Status (6)
| Country | Link |
|---|---|
| US (1) | US11101155B2 (en) |
| JP (1) | JP6854341B2 (en) |
| KR (1) | KR102354123B1 (en) |
| CN (1) | CN110574152B (en) |
| TW (1) | TWI749205B (en) |
| WO (1) | WO2018185894A1 (en) |
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| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP6915037B2 (en) * | 2017-02-27 | 2021-08-04 | ミライアル株式会社 | Board storage container |
| JP7113031B2 (en) * | 2018-10-29 | 2022-08-04 | ミライアル株式会社 | Substrate storage container molding method, mold, and substrate storage container |
| JP7313975B2 (en) * | 2019-08-27 | 2023-07-25 | 信越ポリマー株式会社 | Substrate storage container |
| KR102252648B1 (en) | 2020-09-28 | 2021-05-17 | 서상호 | Structure Of Assemble For Steel Frame |
| WO2023233554A1 (en) * | 2022-05-31 | 2023-12-07 | ミライアル株式会社 | Substrate storage container and lid-body-side substrate support part |
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Also Published As
| Publication number | Publication date |
|---|---|
| TW201838042A (en) | 2018-10-16 |
| TWI749205B (en) | 2021-12-11 |
| JP6854341B2 (en) | 2021-04-07 |
| JPWO2018185894A1 (en) | 2020-02-20 |
| WO2018185894A1 (en) | 2018-10-11 |
| KR102354123B1 (en) | 2022-01-21 |
| CN110574152A (en) | 2019-12-13 |
| KR20190137809A (en) | 2019-12-11 |
| US11101155B2 (en) | 2021-08-24 |
| US20200051841A1 (en) | 2020-02-13 |
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