TW201344832A - Receiving device for substrate - Google Patents

Receiving device for substrate Download PDF

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Publication number
TW201344832A
TW201344832A TW101113795A TW101113795A TW201344832A TW 201344832 A TW201344832 A TW 201344832A TW 101113795 A TW101113795 A TW 101113795A TW 101113795 A TW101113795 A TW 101113795A TW 201344832 A TW201344832 A TW 201344832A
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Taiwan
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unit
storage
substrate
base
storage device
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TW101113795A
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Chinese (zh)
Inventor
Jui-Feng Cheng
En-Ning Lin
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Schmid Yaya Technology Co Ltd
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Priority to TW101113795A priority Critical patent/TW201344832A/en
Publication of TW201344832A publication Critical patent/TW201344832A/en

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  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)

Abstract

A kind of receiving device for polygonal substrate includes a elevator unit, a receiving unit, a air-blowing unit and a conveyer unit. The receiving unit disposed on the elevator unit. The air-blowing unit is disposed on one side of the receiving unit. The air-blowing unit biows the substrates which forms a air-flow layer between the adjacent polygonal substrates to reduce the resistance therein and receive the substrates regularly.

Description

基板收納裝置Substrate storage device

本發明有關於一種收納裝置,尤指一種利用一吹氣單元提升收納效果之基板收納裝置。The present invention relates to a storage device, and more particularly to a substrate storage device that enhances a storage effect by using a blowing unit.

太陽能晶片是太陽能電池之重要元件,其需經過多道製程,如擴散、清洗、網印等,在製程過程中須將太陽能晶片收納至收納盒中,習知太陽能晶片在收納時是利用吸附裝置將太陽能晶片逐一吸附並置放於收納盒中,然而此種方式收納速度慢且效率低落。The solar wafer is an important component of the solar cell, and it needs to go through multiple processes, such as diffusion, cleaning, screen printing, etc., and the solar wafer must be stored in the storage box during the process, and the solar wafer is conventionally used by the adsorption device. The solar wafers are adsorbed one by one and placed in the storage box, but in this way, the storage speed is slow and the efficiency is low.

因此後來研發出利用輸送帶的方式,將太陽能晶片排列於輸送帶上後,連續不斷地輸送至收納盒內,此種方式大幅提高了收納速度,但此種方式常會使收納盒中之太陽能晶片因摩擦、靜電等因素而無法對齊且差異甚大,因此易造成破片率上升導致產率的下降。另,習知收納裝置僅能收納單一尺寸之基板,十分不便,且在收納時常會產生太陽能晶片之間刮片之問題。因此,本發明人潛心研究,進而設計出可改良上述缺點之本發明。Therefore, it has been developed to use a conveyor belt to arrange the solar wafers on the conveyor belt and then continuously transport them into the storage box. This method greatly increases the storage speed, but this method often causes the solar wafers in the storage box. Due to friction, static electricity and other factors, it is impossible to align and the difference is very large, so it is easy to cause an increase in fragmentation rate and a decrease in yield. Further, the conventional storage device can accommodate only a single-sized substrate, which is extremely inconvenient, and often causes a problem of a blade between the solar wafers during storage. Therefore, the inventors have diligently studied and designed the present invention which can improve the above disadvantages.

本發明之主要目的在於提供一種基板收納裝置,其可使基板在收納時能更精確的對齊,以降低其破片率,並可防止刮片之問題。SUMMARY OF THE INVENTION A primary object of the present invention is to provide a substrate housing apparatus which can more accurately align a substrate during storage to reduce the fragmentation rate and prevent the problem of the blade.

為了達成上述之目的,本發明提供一種基板收納裝置,用以收納數片基板,包括:一用以收納該些基板之收納單元;一吹氣單元,其設置於該收納單元一側,該吹氣單元之吹氣方向面對該收納單元,用以在收納該些基板時送出導引氣流於該些基板間且形成一氣流層;及一升降單元,該收納單元設置於該升降單元,用以隨該些基板堆疊高度升高而降低該收納單元。In order to achieve the above object, the present invention provides a substrate storage device for accommodating a plurality of substrates, comprising: a storage unit for accommodating the substrates; and a blowing unit disposed on a side of the storage unit, the blowing The air blowing direction of the air unit faces the storage unit for sending a guiding airflow between the substrates to form an air flow layer when the substrates are received, and a lifting unit, wherein the storage unit is disposed on the lifting unit The storage unit is lowered as the stack height of the substrates is increased.

本發明具有以下有益之效果:The invention has the following beneficial effects:

本發明利用吹氣單元在每片基板之間產生一氣流層,降低基板間所受到之諸多阻力,如摩擦力、靜電造成之吸附力等之影響,使每片基板皆可到達預定之收納位置,讓基板能收納更加整齊,進而降低其破片率,並可防止刮片之問題。The invention utilizes a blowing unit to generate an air flow layer between each substrate, thereby reducing various resistances between the substrates, such as frictional force, adsorption force caused by static electricity, etc., so that each substrate can reach a predetermined storage position. The substrate can be stored more neatly, thereby reducing the fragmentation rate and preventing the problem of the blade.

本發明之收納盒採用模組化設計,收納盒可具有多種尺寸,如5吋或6吋等。使用者可依因應所欲收納之基板大小來選用不同尺寸之收納盒。The storage box of the present invention adopts a modular design, and the storage box can have various sizes, such as 5 inches or 6 inches. The user can select different sizes of storage boxes according to the size of the substrate to be stored.

請參閱圖1、圖6及圖6A所示,本發明提供了一種基板收納裝置,包括一機體1、一升降單元2、一連接單元3、一收納單元4、一吹氣單元5及一輸送單元6。Referring to FIG. 1 , FIG. 6 and FIG. 6A , the present invention provides a substrate storage device including a body 1, a lifting unit 2, a connecting unit 3, a storage unit 4, a blowing unit 5, and a conveying device. Unit 6.

升降單元2設置於該機體1。本實施例中,升降單元2為線性滑軌且垂直固設於機體1側面。升降單元2之種類不加以限制,僅須具相同功能即可,依實際需求可選擇不同之機構。The lifting unit 2 is disposed on the body 1. In this embodiment, the lifting unit 2 is a linear sliding rail and is vertically fixed to the side of the body 1. The type of the lifting unit 2 is not limited, and only the same function is required, and different mechanisms can be selected according to actual needs.

連接單元3裝設於升降單元2,其可利用升降單元2調整高度。連接單元3具有一三角架31及一支撐柱32。三角架31裝設於升降單元2,支撐柱32一端連接三角架31,另一端連接收納單元4。本實施例中,三角架31包括有一連接板311、兩三角狀之支撐板312及一基板313。連接板311裝設於升降單元2。該兩支撐板312一邊連接於連接板311,另一相鄰邊連接於基板313。該兩支撐板312彼此平行且對齊。基板313平行於水平面且連接於支撐柱32。The connecting unit 3 is mounted on the lifting unit 2, which can be adjusted in height by the lifting unit 2. The connecting unit 3 has a tripod 31 and a support post 32. The tripod 31 is mounted on the lifting unit 2, and one end of the support post 32 is connected to the tripod 31, and the other end is connected to the storage unit 4. In this embodiment, the tripod 31 includes a connecting plate 311, two triangular supporting plates 312 and a substrate 313. The connecting plate 311 is mounted on the lifting unit 2. The two supporting plates 312 are connected to the connecting plate 311 at one side, and the other adjacent side is connected to the substrate 313. The two support plates 312 are parallel and aligned with each other. The substrate 313 is parallel to the horizontal plane and is connected to the support post 32.

請參閱圖1、圖2及圖5所示,收納單元4連接於連接單元3之支撐柱32。本實施例中之收納單元4透過連接單元3設置於升降單元2,但收納單元4亦可直接設置於升降單元2。收納單元4具有一底座41及一收納盒42,收納盒42可拆卸地設置於底座41。底座41與水平面間具有一傾斜角θ,底座41具有一卡接部412。本實施例中,底座41與水平面間之傾斜角θ為10°至20°。收納盒42之形狀不加以限制,可適當加以變化,如四邊形、六邊形、八邊形或圓形等。Referring to FIGS. 1 , 2 and 5 , the storage unit 4 is connected to the support column 32 of the connection unit 3 . The storage unit 4 in the present embodiment is disposed in the elevation unit 2 through the connection unit 3, but the storage unit 4 may be directly disposed in the elevation unit 2. The storage unit 4 has a base 41 and a storage box 42 , and the storage box 42 is detachably provided to the base 41 . The base 41 has an inclination angle θ with the horizontal plane, and the base 41 has a catching portion 412. In this embodiment, the inclination angle θ between the base 41 and the horizontal plane is 10° to 20°. The shape of the storage case 42 is not limited and may be appropriately changed, such as a quadrangle, a hexagon, an octagon or a circle.

收納盒42具有一基部421及至少一擋止部422。該至少一擋止部422連接於基部421邊緣。該至少一擋止部422垂直於基部421。收納盒42之基部421卡接於底座41之卡接部412。收納盒42之邊緣具有至少一缺口423,可方便收納完畢後之基板取出。收納盒42之該至少一擋止部422內側各具有一緩衝墊424,該緩衝墊424連接於該至少一擋止部422。緩衝墊424可防止基板(圖略)在收納時與擋止部422之碰撞,降低破片率。本實施例中,緩衝墊424為泡棉墊,但不加以限制。The storage box 42 has a base portion 421 and at least one stopper portion 422. The at least one stop portion 422 is coupled to the edge of the base portion 421. The at least one stop portion 422 is perpendicular to the base portion 421. The base portion 421 of the storage box 42 is engaged with the engaging portion 412 of the base 41. The edge of the storage box 42 has at least one notch 423, which can facilitate the removal of the substrate after the storage. The at least one blocking portion 422 of the storage box 42 has a cushion 424 inside, and the cushion 424 is connected to the at least one stopping portion 422. The cushion pad 424 can prevent the substrate (not shown) from colliding with the stopper portion 422 during storage, thereby reducing the chipping rate. In this embodiment, the cushion 424 is a foam pad, but is not limited.

請參閱圖1、圖6及圖6A所示,吹氣單元5設置於收納單元4之一側。本實施例中,吹氣單元5固定於升降單元2頂部,但不加以限制,可依實際狀況適當加以變化,例如吹氣單元5可固定於機體1、連接單元3或收納單元4等地方。吹氣單元5之吹氣方向面對收納盒42,吹氣單元5連接至適當的供氣裝置(圖略),可不停朝向收納盒42送出導引氣流(圖略)。本實施例中,吹氣單元5具有一中空殼體51。中空殼體51上具有至少一進氣孔53,中空殼體51上面對收納盒42之一面具有數個出氣孔52,將氣體從進氣孔53注入中空殼體51內,進而使氣體從出氣孔52送出。Referring to FIGS. 1 , 6 , and 6A , the air blowing unit 5 is disposed on one side of the storage unit 4 . In the present embodiment, the air blowing unit 5 is fixed to the top of the lifting unit 2, but it is not limited, and may be appropriately changed according to actual conditions. For example, the air blowing unit 5 may be fixed to the body 1, the connecting unit 3, or the storage unit 4, and the like. The blowing direction of the blowing unit 5 faces the storage box 42, and the blowing unit 5 is connected to an appropriate air supply device (not shown), and the guiding airflow can be sent to the storage box 42 without stopping (not shown). In the present embodiment, the air blowing unit 5 has a hollow casing 51. The hollow casing 51 has at least one air inlet hole 53. The hollow casing 51 has a plurality of air outlet holes 52 on one side of the storage box 42 to inject gas from the air inlet hole 53 into the hollow casing 51. The gas is sent out from the air outlet 52.

輸送單元6設置於機體1且輸送方向朝向收納單元4,用以將基板(圖略)輸送至收納單元4之收納盒42內。輸送單元6高於吹氣單元5。本實施例中之輸送單元6為輸送帶,但不加以限制,可選用不同具輸送功能之機構。The transport unit 6 is disposed in the body 1 and has a transport direction toward the storage unit 4 for transporting the substrate (not shown) into the storage case 42 of the storage unit 4. The conveying unit 6 is higher than the blowing unit 5. The conveying unit 6 in this embodiment is a conveyor belt, but is not limited, and a different conveying mechanism can be selected.

本發明之運作方式及原理如下:The operation mode and principle of the present invention are as follows:

首先開啟吹氣單元5,使之持續對收納盒42送出導引氣流。接下來開啟輸送單元6將基板不斷輸送至收納盒42。First, the air blowing unit 5 is turned on to continuously supply the guiding airflow to the storage box 42. Next, the transport unit 6 is turned on to continuously transport the substrate to the storage case 42.

在收納過程中,每片基板剛進入收納盒42時會因吹氣單元5所送出之導引氣流,使得此片基板與收納盒42內的基板之間形成一氣流層(圖略),並使基板沿著底座41傾斜之方向滑入收納盒42,直至頂抵至擋止部422而到達預定收納位置。During the storage process, each of the substrates immediately enters the storage box 42 due to the airflow sent by the air blowing unit 5, so that an air flow layer is formed between the substrate and the substrate in the storage box 42 (not shown). The substrate is slid into the storage case 42 in the direction in which the base 41 is inclined, and reaches the predetermined storage position until the top abuts against the stopper portion 422.

氣流層可使基板在到達預定收納位置前使其保持一半懸空狀態,進而降低基板間之阻力,如摩擦力或靜電之吸附力等所造成之影響,使每片基板皆可到達預定之收納位置,讓基板能收納更加整齊,進而降低其破片率,並可防止刮片之問題。The airflow layer allows the substrate to remain in a semi-floating state before reaching the predetermined storage position, thereby reducing the resistance between the substrates, such as the frictional force or the electrostatic adsorption force, so that each substrate can reach the predetermined storage position. The substrate can be stored more neatly, thereby reducing the fragmentation rate and preventing the problem of the blade.

隨著基板不斷累積而使其厚度增加,收納單元4會透過升降單元2而相應下降,使吹氣單元5之出氣孔52維持面對收納盒42內表層基板之相對高度。As the substrate is continuously accumulated to increase its thickness, the storage unit 4 is lowered by the lifting unit 2, so that the air outlet 52 of the air blowing unit 5 is maintained at a relative height facing the surface substrate in the storage case 42.

本發明之收納盒42採用模組化設計,如圖3及圖4所示,收納盒42可具有多種尺寸,如5吋或6吋等。使用者可依因應所欲收納之基板大小來選用不同尺寸之收納盒42。The storage box 42 of the present invention adopts a modular design. As shown in FIGS. 3 and 4, the storage box 42 can have various sizes, such as 5 inches or 6 inches. The user can select the storage box 42 of different sizes according to the size of the substrate to be stored.

請參閱圖6所示,本發明第二實施例中可在單一機體1上同時設置多組升降單元2、連接單元3、收納單元4、吹氣單元5及輸送單元6,以增加其收納之效率。Referring to FIG. 6 , in the second embodiment of the present invention, a plurality of sets of lifting unit 2 , connecting unit 3 , storage unit 4 , air blowing unit 5 and conveying unit 6 can be simultaneously disposed on a single body 1 to increase the storage thereof. effectiveness.

以上所述者,僅為本發明其中的較佳實施例,並非用來限定本發明的實施範圍,即凡依本發明申請專利範圍所做的均等變化與修飾,皆為本發明專利範圍所涵蓋。The above is only the preferred embodiment of the present invention, and is not intended to limit the scope of the present invention, that is, the equivalent changes and modifications made by the scope of the present invention are covered by the scope of the present invention. .

1...機體1. . . Body

2...升降單元2. . . Lifting unit

3...連接單元3. . . Connection unit

31...三角架31. . . Tripod

311...連接板311. . . Connection plate

312...支撐板312. . . Support plate

313...基板313. . . Substrate

32...支撐柱32. . . Support column

4...收納單元4. . . Storage unit

41...底座41. . . Base

θ...傾斜角θ. . . Tilt angle

412...卡接部412. . . Card joint

42...收納盒42. . . Storage Box

421...基部421. . . Base

422...擋止部422. . . Stop

423...缺口423. . . gap

424...緩衝墊424. . . Cushion

5...吹氣單元5. . . Blowing unit

51...中空殼體51. . . Hollow housing

52...出氣孔52. . . Vent

53...進氣孔53. . . Air intake

6...輸送單元6. . . Conveyor unit

圖1 為本發明基板收納裝置之立體圖。1 is a perspective view of a substrate storage device of the present invention.

圖2 為本發明基板收納裝置之傾斜角放大圖。2 is an enlarged view of a tilt angle of a substrate housing device of the present invention.

圖3 為本發明基板收納裝置具五吋收納盒之收納單元放大圖。3 is an enlarged view of a storage unit of a five-inch storage box of the substrate storage device of the present invention.

圖4 為本發明基板收納裝置具六吋收納盒之收納單元放大圖。4 is an enlarged view of a storage unit of a six-inch storage box of the substrate storage device of the present invention.

圖5 為本發明基板收納裝置之底座放大圖。Fig. 5 is an enlarged view of the base of the substrate storage device of the present invention.

圖6 為本發明基板收納裝置第二實施例之立體圖。Figure 6 is a perspective view showing a second embodiment of the substrate housing apparatus of the present invention.

圖6A 為本發明基板收納裝置之吹氣單元放大圖。Fig. 6A is an enlarged view of a blowing unit of the substrate housing apparatus of the present invention.

1...機體1. . . Body

2...升降單元2. . . Lifting unit

3...連接單元3. . . Connection unit

31...三角架31. . . Tripod

311...連接板311. . . Connection plate

312...支撐板312. . . Support plate

313...基板313. . . Substrate

32...支撐柱32. . . Support column

4...收納單元4. . . Storage unit

41...底座41. . . Base

42...收納盒42. . . Storage Box

421...基部421. . . Base

422...擋止部422. . . Stop

423...缺口423. . . gap

424...緩衝墊424. . . Cushion

6...輸送單元6. . . Conveyor unit

Claims (10)

一種基板收納裝置,用以收納數片基板,包括:一用以收納該些基板之收納單元;一吹氣單元,其設置於該收納單元一側,該吹氣單元之吹氣方向面對該收納單元,用以在收納該些基板時送出導引氣流於該些基板間且形成一氣流層;及一升降單元,該收納單元設置於該升降單元,用以隨該些基板堆疊高度升高而降低該收納單元。A substrate storage device for accommodating a plurality of substrates, comprising: a storage unit for accommodating the substrates; a blowing unit disposed on a side of the storage unit, wherein a blowing direction of the blowing unit faces the a storage unit configured to send a guiding airflow between the substrates to form an airflow layer when accommodating the substrates; and a lifting unit disposed on the lifting unit for increasing the stack height of the substrates The storage unit is lowered. 如申請專利範圍第1項所述之基板收納裝置,其中該收納單元具有一底座及一收納盒,該收納盒可拆卸地設置於該底座。The substrate storage device according to claim 1, wherein the storage unit has a base and a storage box, and the storage box is detachably disposed on the base. 如申請專利範圍第2項所述之基板收納裝置,其中該底座具有一卡接部,該底座與水平面間具有一傾斜角,用以使該些基板進入該收納盒後能持續滑行至預定收納位置。The substrate storage device of claim 2, wherein the base has a latching portion, and the base has an inclined angle with the horizontal plane for allowing the substrates to continuously slide to the predetermined storage after entering the storage box. position. 如申請專利範圍第3項所述之基板收納裝置,其中該收納盒具有一基部及至少一擋止部,該至少一擋止部連接於該基部邊緣且垂直於該基部,該收納盒之該基部卡接於該卡接部。The substrate storage device of claim 3, wherein the storage box has a base portion and at least one blocking portion, the at least one blocking portion is connected to the edge of the base portion and perpendicular to the base portion, and the storage box is The base is snapped to the snap portion. 如申請專利範圍第4項所述之基板收納裝置,其中該收納盒之該至少一擋止部內側各具有一緩衝墊,該緩衝墊連接於該至少一擋止部。The substrate storage device of claim 4, wherein the at least one blocking portion of the storage box has a cushion inside, and the cushion is connected to the at least one blocking portion. 如申請專利範圍第5項所述之基板收納裝置,其中該緩衝墊為泡棉墊。.The substrate storage device of claim 5, wherein the cushion is a foam pad. . 如申請專利範圍第2項所述之基板收納裝置,其中該收納盒為五吋方形收納盒或六吋方形收納盒。The substrate storage device according to claim 2, wherein the storage box is a five-inch square storage box or a six-inch square storage box. 如申請專利範圍第2項所述之基板收納裝置,其中該收納盒呈四邊形、六邊形、八邊形或圓形。The substrate storage device according to claim 2, wherein the storage case has a quadrangular shape, a hexagonal shape, an octagonal shape, or a circular shape. 如申請專利範圍第1項所述之基板收納裝置,其中更包括有一連接單元,該收納單元透過該連接單元設置於該升降單元,該連接單元具有一三角架及一支撐柱,該三角架裝設於該升降單元,該支撐柱一端連接該三角架,另一端連接該收納單元。The substrate storage device of claim 1, further comprising a connecting unit, wherein the receiving unit is disposed on the lifting unit through the connecting unit, the connecting unit has a tripod and a supporting column, and the connecting frame has a tripod The lifting unit is disposed at one end of the support column and connected to the storage unit. 如申請專利範圍第3項所述之基板收納裝置,其中該底座與水平面間之該傾斜角為10°至20°。The substrate storage device of claim 3, wherein the inclination angle between the base and the horizontal plane is 10° to 20°.
TW101113795A 2012-04-18 2012-04-18 Receiving device for substrate TW201344832A (en)

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Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI749205B (en) * 2017-04-05 2021-12-11 日商未來兒股份有限公司 Substrate storage container

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI749205B (en) * 2017-04-05 2021-12-11 日商未來兒股份有限公司 Substrate storage container

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