JP2016062943A - Substrate housing container - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a substrate housing container which suppresses warpage of a substrate due to the many point holding and safely performs housing, transportation, conveyance and the like of the substrate.SOLUTION: A substrate housing container composed of a container body and a lid body includes: a substrate rear end supporting member (60) which is arranged on the inner surface of the depth wall of the container body; or substrate left and right end supporting members (50) arranged in the inner surface of two side walls, respectively, which are opposite to each other in order to support left and right ends of the substrate; or at least a pair of substrate front side supporting members (70) which are arranged on the inner surface of the side wall between the substrate left and right end supporting members and an opening of the container body so that the front end of the substrate is not bent when the lid body is removed from the container body.SELECTED DRAWING: Figure 2

Description

  The present invention relates to a substrate storage container used when a substrate made of a semiconductor wafer or the like is stored, transported, transported, or the like.

  2. Description of the Related Art Conventionally, as a substrate storage container for storing a substrate made of a semiconductor wafer and transporting it in a process in a factory, a structure including a container main body and a lid is known.

  The container body has a cylindrical wall portion in which a container body opening is formed at one end and the other end is closed. A substrate storage space is formed in the container body. The substrate storage space is formed by being surrounded by a wall portion, and can store a plurality of substrates. The lid can be attached to and detached from the container body opening, and the container body opening can be closed.

  A front retainer is provided in a portion of the lid that faces the substrate storage space when the container body opening is closed. The front retainer can support the outer periphery of a plurality of substrates when the container body opening is closed by the lid. Further, the back substrate support portion is provided on the wall portion so as to be paired with the front retainer. The back substrate support part can support the outer periphery of a plurality of substrates. When the container body opening is closed by the lid, the back side substrate support unit supports a plurality of substrates in cooperation with the front retainer, thereby separating adjacent substrates at a predetermined interval. A plurality of substrates are held in a parallel state (see Patent Document 1).

  Here, the substrate storage container may store, for example, a substrate processed thinly until the thickness of the substrate becomes about 300 μm or less by back grinding the back surface of a semiconductor wafer made of silicon having a diameter of 300 mm. is there. Substrates such as thin wafers and large-diameter semiconductor wafers having an outer diameter of 300 mm or more are supported by a pair of support members in the substrate storage container, so that the central portion is easily bent. , Will be bent by its own weight. When the substrate is placed or taken out, the substrate comes into contact with the substrate storage container or the substrate take-out mechanism due to this bending, so that contamination or damage due to rubbing can be considered.

  For this reason, for example, as disclosed in Patent Document 2, a relatively rigid disc-shaped restricting plate is supported on each support portion of the container body, and the substrate is brought into contact with the upper surface of the restricting plate. There is also one that avoids bending of a thin substrate (see Patent Document 2).

Japanese Patent No. 416936 JP 2012-104570 A

  However, in the substrate support method of the substrate storage container shown in Patent Document 2, most of the back surface portion of the substrate is in contact with the regulating plate, and particles or the like are generated by this contact. The generated particles or the like adhere to the lower substrate surface or another substrate, cause pattern defects and the like, and reduce the yield.

  Further, the restriction plate of the conventional substrate storage container shown in Patent Document 2 is used, and the restriction plate is placed on the support plate and the back surface of the substrate is supported by the restriction plate. However, the restriction plate covers the inside of the container widely. Therefore, there is a problem that when the substrate is taken out from the container, or when the substrate is placed in the container, the regulating plate and the substrate handling arm as the substrate taking-out mechanism come into contact with each other.

  An object of the present invention is to provide a substrate storage container capable of storing, transporting, transporting, and the like of a substrate while suppressing an area in contact with the back surface of the substrate and suppressing bending of the substrate.

  The present invention relates to a substrate for storing and transporting a substrate in a substrate processing process comprising an upper wall, a lower wall, a container body having an opening made of two side walls facing the inner wall, and a lid that can be attached to the opening. A storage container, comprising: a retainer that supports a front end of the outer periphery of the substrate located on the inner surface of the container body of the lid; and a plurality of substrate support members that are attached to the inner surface of the storage container and support the outer periphery and the bottom surface of the substrate. The support member is a substrate rear end support member disposed on the inner surface of the back wall to support the rear end of the substrate or a substrate left and right end support disposed on each of two opposing side walls to support the left and right ends of the substrate. It is at least one pair of substrate front side support members disposed on the side wall between the substrate left and right end support members and the opening of the container body so that the front end of the substrate does not bend when the member or the lid is removed from the container body. Characterize

  Further, the substrate rear end support member, the substrate left and right end support members, and the substrate front side support member, which are substrate support members, are all the same shape, and the substrate support member extends from the upper surface to the lower surface of the container body and the base side. It is preferable that the board is provided with a shelf plate on which the board is placed, and the side part is provided with a board position regulating part for regulating the position of the board.

  According to the present invention, the present invention provides a substrate storage container that can store, transport, transport, etc. a substrate by using a substrate support member that suppresses the contact area with the back surface of the substrate and suppresses bending of the substrate due to multipoint holding. Can be provided. Therefore, without limiting the size and length of the arm used for taking out the substrate, the installation area between the substrate and the shelf board can be suppressed, and the generation of particles can be suppressed, so that the yield and the like can be improved. Further, by using compatible substrate support members having the same shape, the unit price of the product can be suppressed and the yield can be improved.

It is a perspective view of the substrate storage container 1 which concerns on Embodiment 1 of the substrate storage container of this invention. In the container main body 2 of the substrate storage container 1 according to Embodiment 1 of the substrate storage container of the present invention, FIG. It is a perspective view of the board | substrate right-and-left end support member 50 of the substrate storage container 1 which concerns on Embodiment 1 of the substrate storage container of this invention. It is a front view of the board | substrate right-and-left end support member 50 of the substrate storage container 1 which concerns on Embodiment 1 of the substrate storage container of this invention. It is an upper top view of substrate right-and-left end support member 50 of substrate storage container 1 concerning Embodiment 1 of a substrate storage container of the present invention. In the container main body 2 of the substrate storage container 1 which concerns on Embodiment 2 of the substrate storage container of this invention, it is the upper top view which abbreviate | omitted the upper wall 23. FIG. It is a perspective view of the substrate back side support member 710 of the substrate storage container 1 which concerns on Embodiment 2 of the substrate storage container of this invention. It is an upper top view of the substrate back side support member 710 of the substrate storage container 1 which concerns on Embodiment 2 of the substrate storage container of this invention.

[First Embodiment]
Hereinafter, a substrate storage container 1 according to a first embodiment of the present invention will be described with reference to the drawings. FIG. 1 is an exploded perspective view showing a state in which a substrate W is stored in a substrate storage container 1 according to the first embodiment of the present invention. FIG. 2 is an upper plan view in which the upper wall 23 is omitted in the container body 2 of the substrate storage container 1 according to Embodiment 1 of the substrate storage container of the present invention. FIG. 3 is a perspective view of the substrate left and right end support member 50 of the substrate storage container 1 according to Embodiment 1 of the substrate storage container of the present invention. FIG. 4 is a front view in which the inter-groove 521 of the substrate left and right end support member 50 of the substrate storage container 1 according to Embodiment 1 of the substrate storage container of the present invention is disposed in the front. FIG. 5 is an upper plan view of the substrate left and right end support member 50 of the substrate storage container 1 according to Embodiment 1 of the substrate storage container of the present invention.

  Here, for convenience of explanation, a direction from the container body 2 described later to the lid 3 (direction from the upper right to the lower left in FIG. 1) is defined as the front direction, and the opposite direction is defined as the rear direction. Also defined as the front-rear direction. Further, a direction (upward direction in FIG. 1) from the lower wall 24 described later to the upper wall 23 is defined as an upward direction, the opposite direction is defined as a downward direction, and these are collectively defined as an up-down direction. In addition, a direction from the second side wall 26 to the first side wall 25 to be described later (a direction from the lower right to the upper left in FIG. 1) is defined as the left direction, and the opposite direction is defined as the right direction. Left and right direction.

  The substrate W (see FIG. 5) stored in the substrate storage container 1 is a disk-shaped silicon wafer, glass wafer, sapphire wafer, or the like, and is a thin one used in the industry. The substrate W in the present embodiment is a substantially disk-shaped silicon wafer having a diameter of about 300 mm. Although the thickness of the board | substrate W is not specifically limited, For example, the thickness of 50 micrometers or more and 2 mm or less can be used. In this embodiment, a 100 μm substrate was used.

  As shown in FIGS. 1 and 2, the substrate storage container 1 is used as an in-process container for storing a substrate W made of a silicon wafer as described above and transporting it in a process in a factory, or by land transportation means / air transportation. Used as a shipping container for transporting a substrate by means of transportation such as means / shipping means, and supporting the left and right ends of the substrate as a container body 2, a lid body 3, and a lateral substrate support portion as a substrate support member It has the member 50, the board | substrate rear end support member 60 as a back side board | substrate support part, the board | substrate front side support member 70 as a bending prevention support part, and the retainer 5 which is a cover body side board | substrate support part.

  Further, the lid 3 in FIG. 2 is omitted for convenience of description, and only the retainer 5 that is the lid-side substrate support portion is described.

  The container body 2 has a cylindrical wall portion 20 in which a container body opening 21 is formed at one end and the other end is closed. A substrate storage space 27 is formed in the container body 2. The substrate storage space 27 is formed so as to be surrounded by the wall portion 20. Two substrate left and right end support members 50, one substrate rear end support member 60, and two substrate front side support members 70 are arranged in a portion of the wall portion 20 that forms the substrate storage space 27. Yes. As shown in FIG. 1, a plurality of substrates W can be stored in the substrate storage space 27.

  The substrate left and right end support members 50 and the substrate front side support member 70 are provided on the first side wall 25 and the second side wall 26 so as to form a pair in the substrate storage space 27. The substrate rear end support member 60 is provided on the back wall 22 in the substrate storage space 27. The substrate left and right end support members 50, the substrate rear end support member 60, and the substrate front side support member 70 are in contact with the bottom surfaces of the outer circumferences of the plurality of substrates W, thereby separating adjacent substrates W from each other at a predetermined interval. The bottom surfaces of the outer circumferences of the plurality of substrates W can be supported in a state where they are arranged in parallel.

  The lid 3 can be attached to and detached from the opening outer peripheral portion 31 (FIG. 1 and the like) forming the container main body opening 21 and can close the container main body opening 21. The retainer 5 is provided in a portion of the lid 3 that faces the substrate storage space 27 when the container main body opening 21 is closed by the lid 3. The retainer 5 is disposed inside the substrate storage space 27 so as to be paired with the substrate rear end support member 60.

  The retainer 5 can support the front part of the outer periphery of the plurality of substrates W by contacting the outer periphery of the plurality of substrates W when the container main body opening 21 is closed by the lid 3. When the container body opening 21 is closed by the lid 3, the retainer 5 includes a substrate left and right end support member 50, a substrate rear end support member 60 as a side substrate support portion, and a substrate front side support member 70. By supporting the plurality of substrates W in cooperation with each other, the plurality of substrates W are held in a state in which the adjacent substrates W are separated from each other at a predetermined interval and arranged in parallel.

  The substrate storage container 1 is made of a resin such as a plastic material. Unless otherwise specified, examples of the resin of the material include polycarbonate, cycloolefin polymer, polyetherimide, polyetherketone, and polybutylene. Examples thereof include thermoplastic resins such as terephthalate, polyether ether ketone, and liquid crystal polymer, and alloys thereof. When imparting electrical conductivity to these molding material resins, conductive substances such as carbon fibers, carbon powder, carbon nanotubes, and conductive polymers are selectively added. It is also possible to add glass fiber, carbon fiber or the like in order to increase the rigidity.

Hereinafter, each part will be described in detail.
As shown in FIG. 1 and the like, the wall portion 20 of the container body 2 includes a back wall 22, an upper wall 23, a lower wall 24, a first side wall 25, and a second side wall 26. The back wall 22, the upper wall 23, the lower wall 24, the first side wall 25, and the second side wall 26 are made of the above-described materials and are integrally formed.

  The first side wall 25 and the second side wall 26 face each other, and the upper wall 23 and the lower wall 24 face each other. The rear end of the upper wall 23, the rear end of the lower wall 24, the rear end of the first side wall 25, and the rear end of the second side wall 26 are all connected to the back wall 22. The front end of the upper wall 23, the front end of the lower wall 24, the front end of the first side wall 25, and the front end of the second side wall 26 have a positional relationship facing the back wall 22 and have a substantially rectangular shape. Opening outer peripheral part 31 which forms is constituted.

  The opening outer peripheral portion 31 is provided at one end portion of the container body 2, and the back wall 22 is located at the other end portion of the container body 2. The outer shape of the container body 2 formed by the outer surface of the wall portion 20 is box-shaped. The inner surface of the wall portion 20, that is, the inner surface of the back wall 22, the inner surface of the upper wall 23, the inner surface of the lower wall 24, the inner surface of the first side wall 25, and the inner surface of the second side wall 26 are surrounded by these. 27 is formed. The container main body opening 21 formed in the outer peripheral portion 31 of the opening communicates with the substrate storage space 27 that is surrounded by the wall portion 20 and formed inside the container main body 2. A maximum of thirteen substrates W can be stored in the substrate storage space 27.

  As shown in FIG. 1, latch engagement recesses 40 </ b> A and 40 </ b> B that are recessed toward the outside of the substrate storage space 27 in the upper wall 23 and the lower wall 24 and in the vicinity of the opening outer peripheral portion 31. , 41A, 41B are formed. A total of four latch engagement recesses 40A, 40B, 41A, 41B are formed in the vicinity of the left and right ends of the upper wall 23 and the lower wall 24, one each.

  As shown in FIG. 1, ribs 28 are integrally formed with the upper wall 23 on the outer surface of the upper wall 23. The rib 28 is provided to increase the rigidity of the container body.

  A top flange 29 is fixed to the central portion of the upper wall 23. The top flange 29 is a member that is a portion that is hung and suspended in the substrate storage container 1 when the substrate storage container 1 is suspended in an AMHS (automatic wafer conveyance system), PGV (wafer substrate conveyance carriage), or the like.

  As shown in FIG. 1, the lid 3 has a substantially rectangular shape that substantially matches the shape of the opening outer peripheral portion 31 of the container body 2. The lid 3 can be attached to and detached from the opening outer peripheral portion 31 of the container main body 2, and the lid 3 can close the container main body opening 21 by mounting the lid 3 on the opening outer peripheral portion 31. . It is an inner surface of the lid 3 (the surface on the back side of the lid 3 shown in FIG. 1), and is formed at a position immediately behind the opening outer peripheral portion 31 when the lid 3 closes the container main body opening 21. An annular seal member 4 is attached to a surface facing the surface of the stepped portion (the seal surface 30). The seal member 4 is made of various types of thermoplastic elastomers such as polyester and polyolefin that can be elastically deformed, fluorine rubber, and silicon rubber. The seal member 4 is arranged so as to go around the outer periphery of the lid 3.

  When the lid 3 is mounted on the outer periphery 31 of the opening, the seal member 4 is sandwiched between the seal surface 30 and the inner surface of the lid 3 and elastically deforms, and the lid 3 seals the container body opening 21. Shuts down in a closed state. By removing the lid 3 from the outer periphery 31 of the opening, the substrate W can be taken in and out of the substrate storage space 27 in the container body 2.

  The lid body 3 is provided with a latch mechanism. The latch mechanism is provided in the vicinity of both left and right end portions of the lid 3, and as shown in FIG. 1, two upper latch portions 32 </ b> A and 32 </ b> B that can project upward from the upper side of the lid 3, and the lid 3. And two lower latch portions (not shown) that can project downward from the lower side of the upper side. The two upper latch portions 32 </ b> A and 32 </ b> B are disposed in the vicinity of the left and right ends of the upper side of the lid 3, and the two lower latch portions are disposed in the vicinity of the left and right ends of the lower side of the lid 3.

  An operation unit 33 is provided on the outer surface of the lid 3. By operating the operation portion 33 from the front side of the lid body 3, the upper latch portions 32A and 32B and the lower latch portion (not shown) can be protruded from the upper side and the lower side of the lid body 3, It can be set as the state which does not protrude from a lower side. The upper latch portions 32A and 32B protrude upward from the upper side of the lid body 3 and engage with the latch engagement recesses 40A and 40B of the container body 2, and the lower latch portion (not shown) is the lid body 3. The lid 3 is fixed to the opening outer peripheral portion 31 of the container main body 2 by projecting downward from the lower side of the container and engaging with the latch engaging recesses 41 </ b> A and 41 </ b> B of the container main body 2.

  As shown in FIGS. 1 and 2, the substrate left and right end support members 50 are disposed in the substrate storage space 27 so as to form a pair with the first side wall 25 and the second side wall 26, respectively.

  As shown in FIGS. 3 to 5, the substrate left and right end support member 50 includes a base portion 51 and a shelf plate 52. The shelf plate 52 extends in the vertical direction with respect to one side of the base 51 and is arranged at equal intervals.

  The substrate left and right end support members 50 are made of a resin such as a plastic material, for example, a thermoplastic resin such as polycarbonate, cycloolefin polymer, polyetherimide, polyetherketone, polybutylene terephthalate, polyetheretherketone, or liquid crystal polymer. These alloys can be raised. When imparting conductivity to the resin of these molding materials, a conductive substance such as carbon fiber, carbon powder, carbon nanotube, and conductive polymer is selectively added to the resin of these molding materials. It is also possible to add glass fiber, carbon fiber or the like in order to increase the rigidity.

  A total of 12 streaks are formed between the grooves 521 formed between the shelf boards 52. The width of the gap 521 is about 20 mm. One substrate can be inserted between each groove 521.

  The base 51 is provided with a main body attachment surface 54 in contact with the wall portion 20 of the container main body 2 on the surface opposite to the surface on which the shelf plate 52 is formed. Further, the base 51 is provided with a concave shape restricting portion 531 and a flat surface restricting portion 532 that are in contact with the outer periphery of the substrate W and restrict the position of the substrate W on the surface on which the shelf plate 52 is formed. The plane restricting portions 532 are located at both ends of the concave shape restricting portion 531.

  The shape of the concave shape restricting portion 531 is a shape that matches the outer periphery of the substrate W. Thereby, the outer periphery of the substrate W can be held over the entire surface of the concave shape restricting portion 531. Further, the shape of the plane restricting portion 532 has a flat surface.

  The concave shape restricting portion 531 of the base portion 51 has a screw hole 55 for screwing to the container body 2. In the present embodiment, three screw holes 55 are provided in the vertical direction with respect to one substrate left and right end support member.

  The substrate rear end support member 60 and the substrate front side support member 70 have the same shape as the substrate left and right end support members 50, and a description thereof will be omitted.

  As shown in FIGS. 1 and 2, the substrate left and right end support members 50 are disposed in the substrate storage space 27 so as to be paired with the first side wall 25 and the second side wall 26, respectively. Specifically, the board left and right end support members 50 are screwed so that the plane regulation portion 532 is located at a position that passes through the container body center of the first side wall 25 and the second side wall 26 and intersects with a plane parallel to the container opening. Be placed.

  With this arrangement, the left and right ends of the base W are brought into contact with each other in the plane restricting portion 532 of the substrate left and right end support member 50, thereby restricting the position of the end of the substrate W in the left and right direction.

  The substrate rear end support member 60 is formed on the inner surface of the substrate storage space 27 of the confirmation window for confirming the substrate W stored in the interior of the substrate storage container 1 installed on the back wall 22 or the back surface 22. . The shelf plate of the substrate rear end support member 60 and the shelf plate 52 of the substrate left and right end support member 50 are arranged in parallel and at the same height. Specifically, the substrate rear end support member 60 is screwed and arranged at the center of the back wall 22 or the confirmation window in the left-right direction.

  With this arrangement, the retainer 5 pushes the substrate W toward the rear of the container, and the outer periphery of the substrate W abuts at 531 of the substrate rear end support member 60, thereby restricting the position of the rear end portion of the substrate W.

  As a result, the substrate W is supported by the retainer 5, the substrate left and right end support member 50, and the substrate rear end support member 60, as shown in FIG. While abutting 532, it abuts against the concave shape restricting portion 531 of the substrate rear end support member 60, positioning of the substrate W is performed, and the substrate W is restricted from moving on the shelf plate 52.

  The front substrate support member 70 is screwed so as to be in parallel with the left and right substrate support members 50 in the substrate storage space 27 so as to be paired with the first side wall 25 and the second side wall 26, respectively, and at the same height. It is fastened and arranged. Specifically, the substrate front side support member 70 is disposed between the substrate left and right end support members 50 and the container body opening 21.

  Further, as shown in FIG. 1, the substrate rear end support member 60 and the substrate front side support member 70 attach the adapter 80 as a position adjustment member, the back wall 22 or the confirmation window, the first side wall 25, the second side wall 26, and the body attachment. It is arranged between the surface 54. The thickness of the adapter 80 is about 12 mm in this embodiment.

  The board left and right end support member 50, the board rear end support member 60, and the board front side support member 70 are fixed to the container body 2 by the fastening screw 100 and the fastening nut 110 through the fastening screw 100 passing through the screw hole 55 of the base 51. Has been. The container body 2 has a through hole (not shown) at a corresponding location.

According to the substrate storage container 1 according to the first embodiment having the above configuration, the following effects can be obtained.
A substrate storage container for storing and transporting a substrate in a substrate processing process comprising an upper wall, a lower wall, a container body having an opening made of two side walls facing the back wall, and a lid attached to the opening. A retainer that is positioned on the inner surface of the container body of the lid and supports the front end of the outer periphery of the substrate; and a plurality of substrate support members that are attached to the inner surface of the storage container and support the outer periphery and bottom surface of the substrate. Is a substrate rear end support member arranged on the inner surface of the back wall to support the rear end of the substrate, or a substrate left and right end respectively arranged on the inner surfaces of two opposing side walls to support the left and right ends of the substrate At least one pair of substrate front side support members disposed on the inner surface of the side wall between the substrate left and right end support members and the opening of the container body so that the front end of the substrate does not bend when the support member or the lid is removed from the container body. Have

  With this configuration, the substrate back surface can be held at multiple points, so that the substrate can be prevented from being bent regardless of the presence or absence of the retainer, and the contact area between the substrate and the substrate support member can be reduced. As a result, it is possible to provide a substrate storage container that can store, transport, and transport the substrate without damaging the substrate. And by reducing the contact area with the substrate, without limiting the size and length of the arm used for removing the substrate, the installation area of the substrate and the shelf board can be suppressed, and the generation of particles can be suppressed. Yield and the like can be improved.

  Also, the substrate rear end support member, the substrate left and right end support member, and the substrate front side support member, which are substrate support members, are all the same shape, and the substrate support member extends between the upper wall and the lower wall of the container body. The side part is provided with a shelf plate on which the substrate is placed, and the side part is provided with a substrate position restricting part for restricting the position of the substrate.

  With this configuration, by using compatible substrate support members having the same shape, the unit price of the product can be reduced, the types of components at the time of assembly can be reduced, and the yield can be improved.

  In addition, the concave shape restricting portion is provided on the rear side of the substrate by providing a concave shape restricting portion having the same shape as the outer periphery of the substrate and a planar restricting portion located at both ends of the concave shape restricting portion and having a planar shape. The rear end of the outer periphery of the substrate can be restricted by the end support member, and the position of the right and left ends of the outer periphery of the substrate can be restricted by the plane restricting portion.

  With this configuration, the substrate position can be regulated, the substrate can be placed and supported at a predetermined position, and the substrate can be safely stored, transported, and transported.

[Second Embodiment]
Next, a substrate storage container 1 according to a second embodiment of the present invention will be described with reference to FIGS. FIG. 6 is an upper plan view in which the upper wall 23 is omitted in the container body 2 of the substrate storage container 1 according to the second embodiment of the present invention. FIG. 7 is a perspective view of the substrate back side support member 710 of the substrate storage container 1 according to Embodiment 2 of the substrate storage container of the present invention. FIG. 8 is an upper plan view of the substrate back side support member 710 of the substrate storage container 1 according to Embodiment 2 of the substrate storage container of the present invention.
Further, the lid 3 in FIG. 6 is omitted for convenience of explanation.

  The substrate storage container according to the second embodiment is different from the configuration of the substrate storage container 1 according to the first embodiment in that a substrate back side support member 710 is provided in order to suppress substrate bending at the rear of the container. Since the configuration other than this is the same as the configuration of the substrate storage container 1 according to the first embodiment, the same configuration as each configuration in the first embodiment is denoted by the same reference numeral and description thereof is omitted.

  As shown in FIGS. 6 to 8, the substrate rear side support member 710 has the same configuration as the substrate support member such as the substrate left and right end support member 50, but the shape of the main body mounting surface 541 in the base 51 is the substrate left and right end support. It differs from the body mounting surface 54 of the substrate support member of the member 50, the substrate rear end support member 60, and the substrate front side support member 70.

  The main body attachment surface 54 of the first embodiment has a substantially planar shape, but the main body attachment surface 541 of the substrate back side support member 710 of the present embodiment has an arc shape. This arc shape is a shape that fits the curved portion 251 of the first side wall 25 and the curved portion 261 of the second side wall 26, and the main body mounting surface 541 is parallel to the left and right substrate support members 50 on the curved portion 261. And it is screwed and arranged so that it may be located in the same height, it can control that substrate W moves on shelf board 52, retainer 5, substrate right-and-left end support member 50, substrate back-end support member 60 and the substrate front side support member 70 support the substrate W.

  The substrate back side support member 710 is fixed to the container body 2 by the fastening screw 100 and the fastening nut 110 with the fastening screw 100 passing through the screw hole 55 of the base 51. The container body 2 has a through hole (not shown) at a corresponding location.

With this configuration, the following effects are exhibited in addition to the effects of the first embodiment.
When the substrate W stored in the container body is extremely easy to bend, even when it is desired to further suppress the bending of the substrate W, the substrate back side support member is disposed on the curved portion 251 of the first side wall 25 and the curved portion 261 of the second side wall 26. In addition, by supporting the bottom surface of the substrate W between the substrate left and right end support members 50 and the substrate rear end support member 60, the range in which the bottom surface of the substrate W is not supported can be narrowed, and bending can be reduced.

The present invention is not limited to the above-described embodiments, and can be modified within the technical scope described in the claims.
The shapes of the substrate left and right end support members, the rear end substrate support member, the substrate front side support member, and the substrate back side support member are not limited to the shapes of the present embodiment. In particular, the size and arrangement can be changed as appropriate. In addition, although the groove 521 is formed with 12 lines, it is needless to say that the number is not limited to this number and depends on the number of substrates to be stored.

  Further, a clearance may be provided between the plane restricting portion 532 of the substrate left and right end support member 50 and the outer periphery of the left and right ends of the base W. By providing the clearance, the substrate W can be easily taken out.

  The shape of the container main body and the lid, and the number and dimensions of the substrates W that can be stored in the container main body are not limited to the shapes of the container main body 2 and the lid 3 and the dimensions of the substrate W that can be stored in the container main body 2 in this embodiment. .

DESCRIPTION OF SYMBOLS 1 Substrate storage container 2 Container main body 3 Cover body 4 Seal member 5 Retainer 20 Wall part 21 Container main body opening part 22 Back wall 23 Upper wall 24 Lower wall 25 First side wall 26 Second side wall 27 Substrate storage space 28 Rib 29 Top flange 30 Seal surface 31 Opening outer peripheral portions 32A, 32B Upper latch portion 33 Operation portions 40A, 40B, 41A, 41B Latch engaging recess 45 Air intake hole 46 Air exhaust port 50 Substrate left and right end support member
51 Base 52 Shelf 53 Substrate Position Restricting Unit 54 Main Body Mounting Surface 55 Screw Hole 60 Substrate Rear End Support Member 70 Substrate Front Support Member 80 Adapter 100 Mounting Screw 110 Fastening Nut 251 First Side Wall Bent 261 Second Side Wall Bent 521 Groove 541 Body mounting surface 710 Substrate back support member W Substrate

Claims (7)

Substrate storage for storing and transporting a substrate in a substrate processing step, which includes a container body having an opening made up of two side walls facing the back wall, an upper wall, a lower wall, and a lid that can be attached to the opening. A container,
A retainer for supporting the front end of the outer periphery of the substrate located on the container body inner surface side of the lid, and a plurality of substrate support members attached to the inner surface of the substrate storage container and supporting the outer periphery and bottom surface of the substrate;
The substrate support member is disposed on each of the substrate rear end support member disposed on the inner surface of the back wall to support the rear end of the substrate or the two side walls opposed to support the left and right ends of the substrate. The substrate left and right end support members or the front end of the substrate is not bent when the lid is removed from the container body, and is disposed on the side wall between the substrate left and right end support members and the opening of the container body. A substrate storage container comprising at least one pair of substrate front support members. The substrate rear end support member, the substrate left and right end support member and the substrate front side support member, which are the substrate support members, are all the same shape,
The substrate support member includes a base portion extending between an upper surface and a lower surface of the container main body and a shelf plate on which the substrate provided on a side portion of the base portion is placed, and the side portion restricts the position of the substrate. The substrate storage container according to claim 1, further comprising a position restricting portion.   The board position restricting portion includes a concave shape restricting portion having the same shape as the outer periphery of the substrate, and a planar restricting portion located at both ends of the concave shape restricting portion and having a planar shape. The substrate storage container as described.   4. The substrate according to claim 3, wherein the concave shape restricting portion restricts a substrate rear end in the substrate rear end supporting member, and the plane restricting portion restricts a substrate left and right end position in the substrate left and right end supporting member. Storage container.   The said recessed shape control part controls a board | substrate rear-end position in the said board | substrate rear-end support member, The said plane control part regulates a board | substrate right-and-left end position in a board | substrate right-and-left end support member. Substrate storage container.   5. The substrate according to claim 1, wherein the substrate support member further includes a substrate back side support member disposed between the substrate rear end support member and the substrate left and right end support members. Storage container.   The shape of the main body attachment surface formed at the base of the substrate back side support member is different from the substrate rear end support member, the substrate left and right end support member, and the substrate front side support member. Substrate storage container.

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