WO2014047956A1 - 洁净室及其自动清洁盒 - Google Patents

洁净室及其自动清洁盒 Download PDF

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Publication number
WO2014047956A1
WO2014047956A1 PCT/CN2012/082538 CN2012082538W WO2014047956A1 WO 2014047956 A1 WO2014047956 A1 WO 2014047956A1 CN 2012082538 W CN2012082538 W CN 2012082538W WO 2014047956 A1 WO2014047956 A1 WO 2014047956A1
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Prior art keywords
clean room
monitoring unit
cassette
automatic cleaning
particle
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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PCT/CN2012/082538
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English (en)
French (fr)
Inventor
陈增宏
吴俊豪
林昆贤
齐明虎
郭振华
杨卫兵
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TCL China Star Optoelectronics Technology Co Ltd
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Shenzhen China Star Optoelectronics Technology Co Ltd
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Application filed by Shenzhen China Star Optoelectronics Technology Co Ltd filed Critical Shenzhen China Star Optoelectronics Technology Co Ltd
Priority to US13/642,544 priority Critical patent/US20140083474A1/en
Publication of WO2014047956A1 publication Critical patent/WO2014047956A1/zh
Anticipated expiration legal-status Critical
Ceased legal-status Critical Current

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    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B08—CLEANING
    • B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
    • B08B5/00—Cleaning by methods involving the use of air flow or gas flow
    • B08B5/02—Cleaning by the force of jets, e.g. blowing-out cavities

Definitions

  • the invention relates to the technical field of liquid crystal panel production and manufacture, in particular to a clean room and an automatic cleaning box thereof.
  • the liquid crystal panel is made of a glass substrate through a plurality of processes, and the glass substrate is required to be completed in a dust-free environment in each process and each process.
  • glass panels are stored in the stocker, and the glass substrates are processed by various automated processes to complete the various processes and inspections. In the clean room, such as particles, the glass process and inspection will be very large. The effect will cause the LCD panel yield to drop.
  • the particle monitoring unit can measure the change of particles in each clean room.
  • the particle monitoring unit since the particle monitoring unit will contact the leaking particles, after long-term use, the particles will accumulate on the particle monitoring unit.
  • the particle monitoring unit needs to be manually cleaned periodically to ensure the accuracy of the particle monitoring unit to monitor the data.
  • the manual cleaning of the particle monitoring unit takes a long time, which seriously affects the production efficiency of the liquid crystal panel.
  • the technical problem to be solved by the present invention is to provide a clean room to solve the problem that the artificial cleaning particle monitoring unit takes a long time in the prior art.
  • a technical solution adopted by the present invention is to provide a clean room for storing a glass substrate, wherein the clean room is provided with a particle monitoring unit, wherein the clean room is further provided with an automatic cleaning box, the automatic a cleaning box for cleaning the particle monitoring unit;
  • the automatic cleaning box includes:
  • control unit configured to control the plurality of blow suction nozzles to perform a suction operation and control the lid to open or close.
  • another technical solution adopted by the present invention is to provide a clean room for storing a glass substrate, the clean room is provided with a particle monitoring unit, and the clean room is further provided with an automatic cleaning box, the automatic cleaning The cassette is used to clean the particle monitoring unit.
  • the clean room is provided with a storage rack, and the storage rack includes a plurality of storage locations, and the plurality of storage locations include:
  • a cassette storage location for storing a cassette for storing the glass substrate
  • the automatic cleaning cartridge comprises:
  • control unit configured to control the plurality of blow suction nozzles to perform a suction operation and control the lid to open or close.
  • the lid is a roller blind.
  • the particle monitoring unit comprises:
  • a particle counter for monitoring the number of particles
  • a wireless communication module electrically connected to the particle counter for maintaining communication with an external monitoring center
  • a power source electrically coupled to the particle counter and the wireless communication module for powering the particle counter and the wireless communication module.
  • the particle monitoring unit further includes a cassette frame that mates with the cassette storage for securing the particle counter, the wireless communication module, and the power source.
  • the clean room is provided with an automated handling device for carrying the cassette and the particle monitoring unit.
  • the automated handling apparatus includes a handling fork for the fork picking cassette and the particle monitoring unit.
  • an automatic cleaning box for cleaning the particle monitoring unit and the cassette in the clean room characterized in that the automatic cleaning box comprises:
  • control unit configured to control the plurality of blow suction nozzles to perform a suction operation and control the lid to open or close.
  • the invention has the beneficial effects that the automatic cleaning box is added to the clean room provided by the invention, and the cassette and the particle monitoring unit can be cleaned in the clean room, which is convenient, quick and effective. The cost of labor.
  • FIG. 1 is a schematic perspective view of a clean room in accordance with a preferred embodiment of the present invention.
  • Figure 2 is a front cross-sectional view of the clean room shown in Figure 1;
  • FIG. 3 is a schematic structural view of the particle monitoring unit shown in FIG. 1;
  • FIG. 4 is a block diagram of the particle monitoring unit shown in Figure 3;
  • FIG. 5 is a schematic view showing the contamination of the particle monitoring unit shown in Figure 3;
  • Figure 6 is a perspective view showing the structure of the automatic cleaning box shown in Figure 1;
  • Figure 7 is a diagram showing the operation state of the automatic cleaning cartridge shown in Figure 6;
  • Figure 8 is a second working state of the automatic cleaning box shown in Figure 6;
  • Figure 9 is a third operational view of the automatic cleaning cartridge shown in Figure 6.
  • the present invention provides a clean room 10 for storing a glass substrate.
  • the clean room 10 is formed by enclosing the top plate 110, the side plate 120, and the bottom plate 130.
  • the clean room 10 includes a storage rack 140, an automated handling device 160, a particle monitoring unit 400, and an automatic cleaning cartridge 500.
  • the storage rack 140 is placed on the bottom plate 130, and the storage rack 140 includes a plurality of storage locations including a cassette storage location for storing the cassettes 142 and an automatic cleaning storage for placing the automatic cleaning box 500. Bit. Among them, the cassette 142 is used to store a glass substrate.
  • the automated handling device 160 includes a handling fork 162 for forking the cassette 142, the particle monitoring unit 400, and the automatic cleaning cartridge 500 on the storage shelf 140.
  • the particle monitoring unit 400 includes a particle counter 410, a wireless communication module 420, a power source 430, and a cassette frame 440.
  • the particle counter 410 is configured to monitor the number of particles in the clean room 10; the wireless communication module 420 is electrically connected to the particle counter 410 for maintaining communication with an external monitoring center; the power source 430 and the particle counter 410 and the wireless communication module 420 is electrically connected for powering the particle counter 410 and the wireless communication module 420; the cassette frame 440 is matched with the cassette storage for fixing the particle counter 410, the wireless communication module 420, and the power source 430.
  • the particle monitoring unit 400 can be used to monitor a plurality of clean rooms. As shown in FIG. 1, the particle monitoring unit 400 can be transported to the next clean room for monitoring after a clean room 10 is monitored.
  • the cassette 142 and the particle monitoring unit 400 are often transported by the automated handling equipment 160 to various storage locations of the clean room 10, and after long-term use, the particles 450 are accumulated on the particle monitoring unit 400 and the cassette 142.
  • the manual cleaning of the particle monitoring unit 400 and the cassette 142 is required, which takes a long time and seriously affects the production efficiency of the liquid crystal panel.
  • the present invention provides an automatic cleaning cartridge 500.
  • the automatic cleaning cartridge 500 includes a cartridge 510, a lid 520, and a control unit 530.
  • the inner wall of the casing 510 is provided with a plurality of blowing nozzles 512; the lid 520 encloses the casing 510 to form a cleaning space; and the control unit 530 is configured to control the plurality of blowing nozzles 512 for blowing And controlling the lid 520 to open or close.
  • the case 510 may have a rectangular box shape as shown in FIG. 5, but is not limited thereto.
  • the cartridge 510 can be inserted into an automatic cleaning storage location, or some storage locations of the storage shelf 140 can be closed to form the cartridge 510.
  • the lid 520 can be a roller blind or a push-pull door panel.
  • FIG. 6 to FIG. 8 are views showing an operation state of the automatic cleaning cartridge 500.
  • the control unit 530 controls the box.
  • the cover 520 closes the case 510 as shown in FIG. 7; then, the control unit 530 controls the plurality of blow suction nozzles 512 to perform a blowing operation to clean the particles accumulated on the particle monitoring unit 400 or the cassette 142, after cleaning.
  • the control unit 530 controls the lid 520 to open, as shown in FIG. 8; finally, the automated handling device 160 carries the particle monitoring unit 400 or the cassette 142 out to complete the cleaning of the particle monitoring unit 400 or the cassette 142.
  • the automatic cleaning box 500 is added to the clean room 10 provided by the present invention, and the cassette 142 and the particle monitoring unit 400 can be cleaned inside the clean room 10, which is convenient, efficient and effective. The land cost is reduced.

Landscapes

  • Sanitary Device For Flush Toilet (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
  • Cleaning In General (AREA)

Description

洁净室及其自动清洁盒
【技术领域】
本发明涉及液晶面板生产制造技术领域，特别是涉及一种洁净室及其自动清洁盒。
【背景技术】
液晶面板是由玻璃基板经过多道制程制作而成，玻璃基板在各个制程和各道检测工艺中，都需在无尘环境下完成。液晶面板制造行业中，玻璃面板存储于洁净室（Stocker）中，通过自动化搬运设备使玻璃基板完成各个制程和各道检测，而洁净室内如泄漏粒子（Particle）将对玻璃制程和检测有很大影响，会造成液晶面板良率下降。
目前对于洁净室粒子监测，可以通过粒子监测单元来量测各洁净室内粒子的变化状况，然而由于粒子监测单元会接触泄漏粒子的地方，经过长期使用后，粒子会累积在粒子监测单元上，此时需要人工定期清洁粒子监测单元，以保证粒子监测单元监控数据的准确性，然而人工清洁粒子监测单元花费时间较长，严重影响液晶面板的生产效率。
【发明内容】
本发明主要解决的技术问题是提供一种洁净室，以解决现有技术中人工清洁粒子监测单元花费时间较长的问题。
为解决上述技术问题，本发明采用的一个技术方案是：提供一种洁净室，用于存放玻璃基板，该洁净室内设有粒子监测单元，其中，该洁净室内还设有自动清洁盒，该自动清洁盒用于对该粒子监测单元进行清洁；
该自动清洁盒包括：
盒体，该盒体内壁设有多个吹吸气嘴；
盒盖，封闭该盒体以形成清洁空间；
控制单元，用于控制该多个吹吸气嘴进行吹吸工作及控制该盒盖打开或关闭。
为解决上述技术问题，本发明采用的另一个技术方案是：提供一种洁净室，用于存放玻璃基板，该洁净室内设有粒子监测单元，该洁净室内还设有自动清洁盒，该自动清洁盒用于对该粒子监测单元进行清洁。
根据本发明一优选实施例，该洁净室内设有储位架，该储位架包括多个储位，该多个储位包括：
卡匣储位，用于存放卡匣，该卡匣用于存放该玻璃基板；
自动清洁储位，用于放置该自动清洁盒。
根据本发明一优选实施例，该自动清洁盒包括：
盒体，该盒体内壁设有多个吹吸气嘴；
盒盖，封闭该盒体以形成清洁空间；
控制单元，用于控制该多个吹吸气嘴进行吹吸工作及控制该盒盖打开或关闭。
根据本发明一优选实施例，该盒盖为卷帘。
根据本发明一优选实施例，该粒子监测单元包括：
粒子计数器，用于监测粒子数量；
无线通信模块，与该粒子计数器电连接，用于与外部监控中心保持通信；
电源，与粒子计数器和该无线通信模块电连接，用于向粒子计数器和该无线通信模块供电。
根据本发明一优选实施例，该粒子监测单元还包括卡匣框架，该卡匣框架与该卡匣储位相匹配，用于固定该粒子计数器、该无线通信模块以及该电源。
根据本发明一优选实施例，该洁净室内设有自动化搬运设备，该自动化搬运设备用于搬运该卡匣及该粒子监测单元。
根据本发明一优选实施例，该自动化搬运设备包括搬运叉，该搬运叉用于叉取卡匣及该粒子监测单元。
为解决上述技术问题，本发明采用的另一个技术方案是：提供一种自动清洁盒，用于在洁净室中对粒子监测单元及卡匣进行清洁，其特征在于，该自动清洁盒包括：
盒体，该盒体内壁设有多个吹吸气嘴；
盒盖，封闭该盒体以形成清洁空间；
控制单元，用于控制该多个吹吸气嘴进行吹吸工作及控制该盒盖打开或关闭。
本发明的有益效果是：区别于现有技术的情况，本发明提供的洁净室中增设有自动清洁盒，可以在洁净室内部对卡匣和粒子监测单元进行清洁，其方便快捷，有效地降低了人力成本。
【附图说明】
为了更清楚地说明本发明实施例中的技术方案，下面将对实施例描述中所需要使用的附图作简单地介绍，显而易见地，下面描述中的附图仅仅是本发明的一些实施例，对于本领域普通技术人员来讲，在不付出创造性劳动的前提下，还可以根据这些附图获得其他的附图，其中：
图1为根据本发明一优选实施例的洁净室的立体结构示意图；
图2为图1中所示的洁净室的前视截面示意图；
图3为图1中所示的粒子监测单元的结构示意图；
图4为图3中所示的粒子监测单元的模块示意图；
图5为图3中所示的粒子监测单元受污染的示意图；
图6为图1中所示的自动清洁盒的立体结构示意图；
图7为图6中所示的自动清洁盒的工作状态图一；。
图8为图6中所示的自动清洁盒的工作状态图二；
图9为图6中所示的自动清洁盒的工作状态图三。
【具体实施方式】
下面将结合本发明实施例中的附图，对本发明实施例中的技术方案进行清楚、完整地描述，显然，所描述的实施例仅是本发明的一部分实施例，而不是全部的实施例。基于本发明中的实施例，本领域普通技术人员在没有做出创造性劳动前提下所获得的所有其他实施例，都属于本发明保护的范围。
请一并参阅图1和图2，本发明提供一种洁净室10，用于存放玻璃基板，该洁净室10由顶板110、侧板120以及底板130围合形成。该洁净室10包括储位架140、自动化搬运设备160、粒子监测单元400以及自动清洁盒500。
储位架140放置于底板130上，该储位架140包括多个储位，该多个储位包括用于存放卡匣142的卡匣储位和用于放置自动清洁盒500的自动清洁储位。其中，卡匣142用于存玻璃基板。
该自动化搬运设备160包括搬运叉162，该搬运叉162用于叉取该储位架140上的该卡匣142、粒子监测单元400及自动清洁盒500。
请一并参阅图3至图5，粒子监测单元400包括粒子计数器410、无线通信模块420、电源430以及卡匣框架440。
其中，该粒子计数器410用于监测洁净室10内的粒子数量；该无线通信模块420与粒子计数器410电连接，用于与外部监控中心保持通信；该电源430与粒子计数器410和该无线通信模块420电连接，用于向粒子计数器410和该无线通信模块420供电；该卡匣框架440与该卡匣储位相匹配，用于固定该粒子计数器410、该无线通信模块420以及该电源430。
粒子监测单元400可用于对多个洁净室进行监测，如图1中所示，粒子监测单元400在一个洁净室10监测完毕后可以被搬运到下一个洁净室进行监测。
卡匣142及粒子监测单元400经常被自动化搬运设备160搬运到洁净室10的各个储位，长期使用后，粒子450会累积在粒子监测单元400及卡匣142上。现有技术中需要人工清洁粒子监测单元400及卡匣142，花费时间较长，严重影响液晶面板的生产效率。
因此，本发明提供一种自动清洁盒500，请一并参阅图5，该自动清洁盒500包括盒体510、盒盖520以及控制单元530。
其中，该盒体510内壁设有多个吹吸气嘴512；该盒盖520封闭该盒体510以形成清洁空间；该控制单元530用于控制该多个吹吸气嘴512进行吹吸工作及控制该盒盖520打开或关闭。
具体而言，该盒体510可为图5中所示的矩形盒体形状，但并不于此。该盒体510可以插入到自动清洁储位，或者，可以将储位架140的某些储位封闭形成该盒体510。该盒盖520可为卷帘或推拉式门板。
请一并参阅图6至图8，图6至图8示出了自动清洁盒500的工作状态图。
当粒子监测单元400或卡匣142上累积了较多的粒子时，首先，可通过自动化搬运设备160将其搬运到自动清洁盒500内，如图6中所示；其次，控制单元530控制盒盖520封闭盒体510，如图7中所示；然后，控制单元530控制多个吹吸气嘴512进行吹吸工作，清洁该粒子监测单元400或卡匣142上累积的粒子，清洁完毕后，控制单元530控制盒盖520打开，如图8中所示；最后，自动化搬运设备160将粒子监测单元400或卡匣142搬运出，完成粒子监测单元400或卡匣142的清洁。
综上所述，本领域技术人容易理解，本发明提供的洁净室10中增设有自动清洁盒500，可以在洁净室10内部对卡匣142和粒子监测单元400进行清洁，其方便快捷，有效地降低了人力成本。
以上所述仅为本发明的示例性实施例，并非因此限制本发明的专利保护范围，凡是利用本发明说明书及附图内容所作的等效结构或等效流程变换，或直接或间接运用在其他相关的技术领域，均同理包括在本发明的专利保护范围内。

Claims (12)

  1. 一种洁净室，用于存放玻璃基板，所述洁净室内设有粒子监测单元，其中，所述洁净室内还设有自动清洁盒，所述自动清洁盒用于对所述粒子监测单元进行清洁；
    所述自动清洁盒包括：
    盒体，所述盒体内壁设有多个吹吸气嘴；
    盒盖，封闭所述盒体以形成清洁空间；
    控制单元，用于控制所述多个吹吸气嘴进行吹吸工作及控制所述盒盖打开或关闭。
  2. 根据权利要求1所述的洁净室，其中，所述盒盖为卷帘。
  3. 一种洁净室，用于存放玻璃基板，所述洁净室内设有粒子监测单元，其中，所述洁净室内还设有自动清洁盒，所述自动清洁盒用于对所述粒子监测单元进行清洁。
  4. 根据权利要求3所述的洁净室，其中，所述洁净室内设有储位架，所述储位架包括多个储位，所述多个储位包括：
    卡匣储位，用于存放卡匣，所述卡匣用于存放所述玻璃基板；
    自动清洁储位，用于放置所述自动清洁盒。
  5. 根据权利要求3所述的洁净室，其中，所述自动清洁盒包括：
    盒体，所述盒体内壁设有多个吹吸气嘴；
    盒盖，封闭所述盒体以形成清洁空间；
    控制单元，用于控制所述多个吹吸气嘴进行吹吸工作及控制所述盒盖打开或关闭。
  6. 根据权利要求5所述的洁净室，其中，所述盒盖为卷帘。
  7. 根据权利要求4所述的洁净室，其中，所述粒子监测单元包括：
    粒子计数器，用于监测粒子数量；
    无线通信模块，与所述粒子计数器电连接，用于与外部监控中心保持通信；
    电源，与所述粒子计数器和所述无线通信模块电连接，用于向所述粒子计数器和所述无线通信模块供电。
  8. 根据权利要求7所述的洁净室，其中，所述粒子监测单元还包括卡匣框架，所述卡匣框架与所述卡匣储位相匹配，用于固定所述粒子计数器、所述无线通信模块以及所述电源。
  9. 根据权利要求4所述的洁净室，其中，所述洁净室内设有自动化搬运设备，所述自动化搬运设备用于搬运所述卡匣及所述粒子监测单元。
  10. 根据权利要求9所述的洁净室，其中，所述自动化搬运设备包括搬运叉，所述搬运叉用于叉取卡匣及所述粒子监测单元。
  11. 一种自动清洁盒，用于在洁净室中对粒子监测单元及卡匣进行清洁，其中，所述自动清洁盒包括：
    盒体，所述盒体内壁设有多个吹吸气嘴；
    盒盖，封闭所述盒体以形成清洁空间；
    控制单元，用于控制所述多个吹吸气嘴进行吹吸工作及控制所述盒盖打开或关闭。
  12. 根据权利要求11所述的自动清洁盒，其中，所述盒盖为卷帘。
PCT/CN2012/082538 2012-09-26 2012-10-08 洁净室及其自动清洁盒 Ceased WO2014047956A1 (zh)

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