CN102861737A - 洁净室及其自动清洁盒 - Google Patents
洁净室及其自动清洁盒 Download PDFInfo
- Publication number
- CN102861737A CN102861737A CN2012103648040A CN201210364804A CN102861737A CN 102861737 A CN102861737 A CN 102861737A CN 2012103648040 A CN2012103648040 A CN 2012103648040A CN 201210364804 A CN201210364804 A CN 201210364804A CN 102861737 A CN102861737 A CN 102861737A
- Authority
- CN
- China
- Prior art keywords
- toilet
- monitoring unit
- cleaning box
- particle monitoring
- card casket
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000004140 cleaning Methods 0.000 title claims abstract description 37
- 239000002245 particle Substances 0.000 claims abstract description 53
- 238000012544 monitoring process Methods 0.000 claims abstract description 46
- 239000011521 glass Substances 0.000 claims abstract description 12
- 239000000758 substrate Substances 0.000 claims abstract description 10
- 238000003860 storage Methods 0.000 claims description 27
- 238000004891 communication Methods 0.000 claims description 13
- 238000000151 deposition Methods 0.000 claims description 9
- 230000000295 complement effect Effects 0.000 claims description 3
- 239000004973 liquid crystal related substance Substances 0.000 description 6
- 238000000034 method Methods 0.000 description 6
- 238000005516 engineering process Methods 0.000 description 5
- 238000004519 manufacturing process Methods 0.000 description 4
- 238000001514 detection method Methods 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 230000007774 longterm Effects 0.000 description 2
- 238000007789 sealing Methods 0.000 description 2
- 238000009825 accumulation Methods 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 238000012512 characterization method Methods 0.000 description 1
- 238000006243 chemical reaction Methods 0.000 description 1
Images
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B08—CLEANING
- B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
- B08B5/00—Cleaning by methods involving the use of air flow or gas flow
- B08B5/02—Cleaning by the force of jets, e.g. blowing-out cavities
Landscapes
- Sanitary Device For Flush Toilet (AREA)
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
- Cleaning In General (AREA)
Abstract
Description
Claims (10)
Priority Applications (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN201210364804.0A CN102861737B (zh) | 2012-09-26 | 2012-09-26 | 洁净室 |
US13/642,544 US20140083474A1 (en) | 2012-09-26 | 2012-10-08 | Cleanroom and Automatic Cleaning Container |
PCT/CN2012/082538 WO2014047956A1 (zh) | 2012-09-26 | 2012-10-08 | 洁净室及其自动清洁盒 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN201210364804.0A CN102861737B (zh) | 2012-09-26 | 2012-09-26 | 洁净室 |
Publications (2)
Publication Number | Publication Date |
---|---|
CN102861737A true CN102861737A (zh) | 2013-01-09 |
CN102861737B CN102861737B (zh) | 2015-04-01 |
Family
ID=47441015
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
CN201210364804.0A Expired - Fee Related CN102861737B (zh) | 2012-09-26 | 2012-09-26 | 洁净室 |
Country Status (2)
Country | Link |
---|---|
CN (1) | CN102861737B (zh) |
WO (1) | WO2014047956A1 (zh) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN107497781A (zh) * | 2017-10-10 | 2017-12-22 | 苏州安泰空气技术有限公司 | 一种带有人眼识别、灭菌及洁净动态评价的智能风淋室 |
CN108672411A (zh) * | 2018-05-11 | 2018-10-19 | 广州市长科自动化设备有限公司 | 一种自动清洁机 |
Citations (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2000019095A (ja) * | 1998-06-30 | 2000-01-21 | Nec Kyushu Ltd | クリーンルームの清浄度測定装置およびクリーンルームの清浄度測定方法 |
US6343425B1 (en) * | 1999-05-06 | 2002-02-05 | Intecon Systems, Inc. | Measurement and cleaning of elastomeric articles having particulate adhered thereto |
CN1600454A (zh) * | 2004-10-12 | 2005-03-30 | 友达光电股份有限公司 | 除尘装置、蒸镀机台及以其进行清洁遮罩的方法 |
US20060107973A1 (en) * | 2004-10-12 | 2006-05-25 | Samuel Leung | Endpoint detector and particle monitor |
JP2007152222A (ja) * | 2005-12-05 | 2007-06-21 | Hitachi Plant Technologies Ltd | フィルムロールの除塵方法及びフィルムロール用除塵設備 |
CN201464241U (zh) * | 2009-07-28 | 2010-05-12 | 上海优科伽瓦自动化工程有限公司 | 具有侧吹功能的采样探头 |
CN202256115U (zh) * | 2011-09-07 | 2012-05-30 | 深圳市新纶科技股份有限公司 | 一种洁净室尘埃粒子在线监控系统 |
Family Cites Families (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2006010353A (ja) * | 2004-06-22 | 2006-01-12 | Fuji Electric Systems Co Ltd | 微粒子測定装置 |
DE102005050010A1 (de) * | 2005-10-11 | 2007-04-12 | M + W Zander Facility Engineering Gmbh | Lager für in einem Reinraum zu behandelnde Produkte, vorzugsweise Glasscheiben für Flüssigkristallbildschirme , sowie Verfahren zur Reinhaltung von Produkten in einem solchen Lager |
CN200954515Y (zh) * | 2006-09-07 | 2007-10-03 | 乔辉企业股份有限公司 | 盒体洁净设备结构 |
CN101492118B (zh) * | 2009-02-10 | 2012-02-08 | 友达光电股份有限公司 | 减少洁净室的扬尘的方法、仓储系统及其移载装置 |
CN202289755U (zh) * | 2011-11-07 | 2012-07-04 | 东莞市汇乐清洁设备有限公司 | 集尘器自动清灰系统的脉冲式反吹装置 |
-
2012
- 2012-09-26 CN CN201210364804.0A patent/CN102861737B/zh not_active Expired - Fee Related
- 2012-10-08 WO PCT/CN2012/082538 patent/WO2014047956A1/zh active Application Filing
Patent Citations (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2000019095A (ja) * | 1998-06-30 | 2000-01-21 | Nec Kyushu Ltd | クリーンルームの清浄度測定装置およびクリーンルームの清浄度測定方法 |
US6343425B1 (en) * | 1999-05-06 | 2002-02-05 | Intecon Systems, Inc. | Measurement and cleaning of elastomeric articles having particulate adhered thereto |
CN1600454A (zh) * | 2004-10-12 | 2005-03-30 | 友达光电股份有限公司 | 除尘装置、蒸镀机台及以其进行清洁遮罩的方法 |
US20060107973A1 (en) * | 2004-10-12 | 2006-05-25 | Samuel Leung | Endpoint detector and particle monitor |
JP2007152222A (ja) * | 2005-12-05 | 2007-06-21 | Hitachi Plant Technologies Ltd | フィルムロールの除塵方法及びフィルムロール用除塵設備 |
CN201464241U (zh) * | 2009-07-28 | 2010-05-12 | 上海优科伽瓦自动化工程有限公司 | 具有侧吹功能的采样探头 |
CN202256115U (zh) * | 2011-09-07 | 2012-05-30 | 深圳市新纶科技股份有限公司 | 一种洁净室尘埃粒子在线监控系统 |
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN107497781A (zh) * | 2017-10-10 | 2017-12-22 | 苏州安泰空气技术有限公司 | 一种带有人眼识别、灭菌及洁净动态评价的智能风淋室 |
CN107497781B (zh) * | 2017-10-10 | 2020-06-09 | 苏州安泰空气技术有限公司 | 一种带有人眼识别、灭菌及洁净动态评价的智能风淋室 |
CN108672411A (zh) * | 2018-05-11 | 2018-10-19 | 广州市长科自动化设备有限公司 | 一种自动清洁机 |
Also Published As
Publication number | Publication date |
---|---|
WO2014047956A1 (zh) | 2014-04-03 |
CN102861737B (zh) | 2015-04-01 |
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Legal Events
Date | Code | Title | Description |
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C06 | Publication | ||
PB01 | Publication | ||
C10 | Entry into substantive examination | ||
SE01 | Entry into force of request for substantive examination | ||
C14 | Grant of patent or utility model | ||
GR01 | Patent grant | ||
PE01 | Entry into force of the registration of the contract for pledge of patent right |
Denomination of invention: Dynamic detection system and method for cleaning room garment system protection validity Effective date of registration: 20190426 Granted publication date: 20150401 Pledgee: Bank of Beijing Limited by Share Ltd. Shenzhen branch Pledgor: SHENZHEN CHINA STAR OPTOELECTRONICS TECHNOLOGY Co.,Ltd. Registration number: 2019440020032 |
|
PE01 | Entry into force of the registration of the contract for pledge of patent right | ||
PC01 | Cancellation of the registration of the contract for pledge of patent right |
Date of cancellation: 20201016 Granted publication date: 20150401 Pledgee: Bank of Beijing Limited by Share Ltd. Shenzhen branch Pledgor: Shenzhen China Star Optoelectronics Technology Co.,Ltd. Registration number: 2019440020032 |
|
PC01 | Cancellation of the registration of the contract for pledge of patent right | ||
CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20150401 |
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CF01 | Termination of patent right due to non-payment of annual fee |