WO2014034923A1 - Outil de coupe enrobé - Google Patents

Outil de coupe enrobé Download PDF

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Publication number
WO2014034923A1
WO2014034923A1 PCT/JP2013/073475 JP2013073475W WO2014034923A1 WO 2014034923 A1 WO2014034923 A1 WO 2014034923A1 JP 2013073475 W JP2013073475 W JP 2013073475W WO 2014034923 A1 WO2014034923 A1 WO 2014034923A1
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Prior art keywords
layer
cutting tool
coated cutting
lowermost
base material
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PCT/JP2013/073475
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English (en)
Japanese (ja)
Inventor
正和 菊池
翔太 浅利
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株式会社タンガロイ
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Priority to JP2014533145A priority Critical patent/JPWO2014034923A1/ja
Publication of WO2014034923A1 publication Critical patent/WO2014034923A1/fr

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    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/22—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the deposition of inorganic material, other than metallic material
    • C23C16/30—Deposition of compounds, mixtures or solid solutions, e.g. borides, carbides, nitrides
    • C23C16/34—Nitrides
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
    • C23C14/0641—Nitrides

Definitions

  • the present invention relates to a coated cutting tool.
  • Coated cutting tools in which a coating layer such as a TiN layer or TiAlN layer is coated on the surface of a substrate made of cemented carbide, cermet, cBN, etc. are excellent in mechanical strength and heat resistance, so steel, cast iron, stainless steel, heat resistance Used for cutting alloys.
  • Ti and Al are formed on the surface of a substrate made of tungsten carbide-based cemented carbide or titanium carbonitride-based cermet through an adhesive physical vapor deposition coating layer made of titanium nitride having a specific thickness.
  • an adhesive physical vapor deposition coating layer made of titanium nitride having a specific thickness.
  • a surface-covered cermet cutting tool formed by forming a wear-resistant physical vapor deposition coating layer made of a composite nitride and having a specific thickness (see, for example, Patent Document 1).
  • the present invention has been made to solve the above problems, and provides a coated cutting tool having a small peeling area of the coating layer, a long working distance and a long tool life even when cutting is performed under heavy cutting conditions. Objective.
  • the inventors have conducted research for the purpose of improving the peel resistance of the coating layer, and by optimizing the composition and particle size of the lowermost layer of the coating layer, the peeling area of the coating layer is minimized and the coating layer is coated. It has been found that the working distance of the cutting tool can be increased, and the present invention has been completed.
  • the gist of the present invention is as follows.
  • (1) It consists of a substrate and a coating layer formed on the surface of the substrate.
  • the coating layer is composed of an upper layer on the surface side and a lowermost layer on the substrate side, and the lowermost layer is (Al a Ti b Mc ) N [Wherein M represents at least one element selected from the group consisting of Zr, Hf, V, Nb, Ta, Cr, Mo, W, Y, B, and Si, and a represents Al element, Ti element, and M B represents the atomic ratio of Ti element to the sum of Al, Ti and M elements, and c represents the atom of M element to the sum of Al, Ti and M elements.
  • the coated cutting tool in which the average particle diameter of (Al a Ti b M c ) N particles constituting the lowermost layer is 400 nm or less.
  • the upper layer is made of at least one metal element selected from Ti, Zr, Hf, V, Nb, Ta, Cr, Mo, W, Y, Al, and Si; and at least of these metal elements (1) to (1) are monolayer or multilayer structures comprising at least one selected from the group consisting of one compound and at least one nonmetallic element selected from carbon, nitrogen, oxygen and boron.
  • the coated cutting tool according to any one of 4).
  • Consists of a base material and a coating layer formed on the surface of the base material are composed of an upper layer on the surface side and a lowermost layer on the base material side, and the lowermost layer is (Al d Cr e L f ) N.
  • L represents at least one element selected from the group consisting of Ti, Zr, Hf, V, Nb, Ta, Mo, W, Y, B, and Si
  • d represents an Al element
  • L represents the atomic ratio of the Al element to the sum of the elements
  • e represents the atomic ratio of the Cr element to the sum of the Al element, Cr element and L element
  • f represents the atom of the L element relative to the sum of the Al element, Cr element and L element.
  • a coated cutting tool in which the average particle diameter of (Al d Cr e L f ) N particles constituting the lowermost layer is 400 nm or less.
  • either coated cutting tool constituting the lowermost layer average particle diameter of the (Al d Cr e L f) N particles is 10 ⁇ 400nm (7) ⁇ ( 9).
  • the upper layer is a metal composed of at least one metal element selected from Ti, Zr, Hf, V, Nb, Ta, Cr, Mo, W, Y, Al, and Si; and at least of these metal elements
  • a single-layer or multi-layer structure comprising at least one selected from the group consisting of one compound and at least one nonmetallic element selected from carbon, nitrogen, oxygen and boron (7) to (7)
  • the coated cutting tool according to any one of 11).
  • the coated cutting tool of the present invention has the effect that the coating layer is difficult to peel off even in cutting under heavy cutting conditions, and the machining distance is long and the tool life is long.
  • the coated cutting tool of the present invention comprises a substrate and a coating layer formed on the surface of the substrate.
  • the base material is not particularly limited as long as it is used as a base material for a coated cutting tool.
  • the base material is a cemented carbide because the coated cutting tool of the present invention is excellent in wear resistance and fracture resistance.
  • the coating layer includes an upper layer on the surface side of the coated cutting tool and a lowermost layer on the substrate side.
  • the lowermost layer contains at least one element M selected from the group consisting of Zr, Hf, V, Nb, Ta, Cr, Mo, W, Y, B and Si in addition to Al and Ti elements.
  • element M selected from the group consisting of Zr, Hf, V, Nb, Ta, Cr, Mo, W, Y, B and Si in addition to Al and Ti elements.
  • c is in the range of 0 or more and 0.20 or less, the average particle diameter of the (Al a Ti b M c ) N particles constituting the lowermost layer becomes small, and the peel resistance of the coating layer is reduced. improves.
  • c exceeds 0.20, the adhesion strength between the base material and the lowermost layer is remarkably lowered, and the cutting performance of the coated cutting tool is lowered.
  • 0.30 ⁇ a ⁇ 0.70, 0.30 ⁇ b ⁇ 0.70, 0 ⁇ c ⁇ 0.20, and a + b + c 1.
  • a 0.50 or more and b is 0.50 or less
  • the average particle diameter of (Al a Ti b Mc ) N particles constituting the lowermost layer tends to be small, and the peel resistance of the coating layer is improved.
  • 0.50 ⁇ a ⁇ 0.70, 0.30 ⁇ b ⁇ 0.50, 0 ⁇ c ⁇ 0.20, and a + b + c 1.
  • the average particle diameter of the (Al d Cr e L f ) N particles constituting the lowermost layer becomes large, and the peel resistance of the coating layer is lowered.
  • the lowermost layer includes a crystal structure other than cubic crystals, so that the adhesion strength between the base material and the lowermost layer decreases.
  • the lowermost layer contains at least one element L selected from the group consisting of Ti, Zr, Hf, V, Nb, Ta, Mo, W, Y, B and Si in addition to Al and Cr elements. If f is in the range of 0 or more and 0.20 or less, the average particle diameter of the (Al d Cr e L f ) N particles constituting the lowermost layer becomes small, and the peel resistance of the coating layer is reduced. improves. On the other hand, when f exceeds 0.20, the adhesion strength between the base material and the lowermost layer is remarkably lowered, and the cutting performance of the coated cutting tool is lowered.
  • 0.20 ⁇ d ⁇ 0.75, 0.25 ⁇ e ⁇ 0.80, 0 ⁇ f ⁇ 0.20, and d + e + f 1.
  • d 0.40 or more and e is 0.60 or less
  • the average particle diameter of the Cr e L f ) N particles is small, and the peel resistance of the coating layer is improved, which is more preferable.
  • the composition of the lowermost layer in the coating layer of the coated cutting tool of the present invention is an energy dispersion attached to an electron microscope such as a scanning electron microscope (SEM), a field emission scanning electron microscope (FE-SEM), or a transmission electron microscope (TEM). It can be measured using a type X-ray analyzer (EDS), a wavelength dispersive X-ray analyzer (WDS), or the like.
  • SEM scanning electron microscope
  • FE-SEM field emission scanning electron microscope
  • TEM transmission electron microscope
  • EDS wavelength dispersive X-ray analyzer
  • the average particle size of particles ((Al a Ti b M c ) N or (Al d Cr e L f ) N particles, hereinafter also referred to as “lowermost layer constituting particles”) constituting the lowermost layer is 400 nm or less.
  • FIG. 1 is a conceptual diagram of a cross-sectional structure of a coated cutting tool in which the average particle diameter of the lowest layer constituent particles is large.
  • the tool includes a base material 1 and a coating layer 2, and the coating layer 2 includes a lowermost layer 3 and an upper layer 4.
  • the work material is welded to a portion indicated by reference numeral 5, and a crack 7 is generated from the portion, and peeling occurs when this reaches the interface between the coating layer 2 and the substrate 1. Is considered to occur.
  • the average particle diameter of the constituent particles of the lowermost layer 3 is large in the coated cutting tool of FIG.
  • FIG. 2 is a conceptual diagram of a cross-sectional structure of a coated cutting tool in which the average particle diameter of the lowest layer constituent particles is small.
  • the tool includes a base material 8 and a coating layer 9, and the coating layer 9 includes a lowermost layer 10 and an upper layer 11.
  • the work material is welded to the portion indicated by reference numeral 12, and cracks 14 are generated from the welded material. Even if the interface is reached, the part 13 to be peeled is considered to be small.
  • the average particle size of the lowermost layer constituting particles is set to 400 nm or less. Since the adhesion strength between the base material and the lowermost layer tends to decrease when the average particle size of the lowermost layer constituting particles is less than 10 nm, the average particle size of the lowermost layer constituting particles is preferably 10 to 400 nm. From the viewpoint of reducing the peeled area of the coating layer, the average particle size of the lowermost layer constituting particles is particularly preferably 20 to 100 nm.
  • the average particle diameter of the lowermost layer constituting particles is measured by the surface texture of the lowermost layer obtained by removing the upper layer of the coated cutting tool.
  • the method for removing the upper layer include a method of grinding with a diamond grindstone and then polishing with diamond paste or colloidal silica, ion milling, and the like.
  • the surface structure of the lowermost layer that appears after removing the upper layer is observed with a field emission scanning electron microscope (FE-SEM), transmission electron microscope (TEM), electron backscatter diffraction (EBSD), etc.
  • the average particle size of the particles can be measured.
  • the surface texture of the lowermost layer obtained by removing the upper layer is observed.
  • the diameter of a circle having an area equal to the area of the lowest layer constituting particle is defined as the particle diameter of the particle, and the particle diameter of each particle in a fixed visual field (measurement range) is obtained.
  • a particle size distribution diagram including a vertical axis indicating the area ratio of all the particles included in each of the sections is created.
  • the central value of the 5 nm interval division for example, the central value of the 5-10 nm division is 7.5 nm
  • the area ratio of all the particles included in the division are multiplied.
  • the area ratio is an area ratio occupied by all particles (for example, all particles having a particle diameter of 5 to 10 nm) included in a certain division in the entire measurement range (for example, 2 ⁇ m ⁇ 2 ⁇ m).
  • the sum of all values obtained by multiplying the center value of the 5-nm interval division and the area ratio of all the particles contained in the division is defined as the average particle size of the lowest layer constituent particles.
  • EBSD is preferable because the grain boundary of particles becomes clear.
  • the EBSD is preferably set so that a boundary having a step size of 0.01 ⁇ m, a measurement range of 2 ⁇ m ⁇ 2 ⁇ m, and an orientation difference of 5 ° or more is regarded as a grain boundary.
  • the lowermost layer of the coating layer in the coated cutting tool of the present invention composed of the specific particles described above is excellent in peeling resistance. Therefore, the peeling resistance of the coating layer is improved, the working distance of the coated cutting tool of the present invention can be increased, and the tool life can be extended.
  • the average layer thickness of the lowermost layer is preferably 0.1 to 1 ⁇ m.
  • the average layer thickness of the lowest layer can be measured using an optical microscope, a scanning electron microscope (SEM), a field emission scanning electron microscope (FE-SEM), a transmission electron microscope (TEM), or the like.
  • the upper layer constituting the coating layer of the coated cutting tool of the present invention will be described.
  • the upper layer is not particularly limited as long as it is used as having a function required for a coated cutting tool such as wear resistance, fracture resistance, or welding resistance.
  • the upper layer is made of at least one metal element selected from Ti, Zr, Hf, V, Nb, Ta, Cr, Mo, W, Y, Al and Si;
  • a single-layer or multi-layer structure comprising at least one selected from the group consisting of at least one compound selected from the group consisting of at least one non-metallic element selected from carbon, nitrogen, oxygen and boron. This is more preferable because the wear resistance of the coated cutting tool is improved.
  • the composition of the upper layer is different from the composition of the lowermost layer.
  • the upper layer is a multilayer structure because the wear resistance of the coated cutting tool is suitably improved.
  • the upper layer is a multilayer structure
  • a mode in which layers made of the above metals or compounds are laminated with an average layer thickness of 2 nm to 10 ⁇ m can be mentioned.
  • the two or more layers having different compositions include one or more laminated structures in which the average layer thickness of each layer is periodically laminated with a thickness of 2 nm to 500 nm.
  • periodically laminating means that the layers are laminated with a certain periodicity, for example, two or more layers having different compositions are alternately laminated.
  • the composition of the upper layer and the average layer thickness of each layer when the upper layer is a multilayer structure can be measured by the same method as that for the lowermost layer.
  • the average layer thickness of the entire upper layer in the coated cutting tool of the present invention described above is preferably 0.2 to 10 ⁇ m. This is because if the average layer thickness of the entire upper layer is less than 0.2 ⁇ m, the effect of improving the wear resistance of the coated cutting tool may be small, and if it exceeds 10 ⁇ m, the coating layer may easily peel from the substrate. It is.
  • the average layer thickness of the entire upper layer of the present invention can be measured by the same method as that for the lowermost layer.
  • the coated cutting tool of the present invention can be produced by a conventional physical vapor deposition method, and can be produced, for example, by the following method.
  • a metal evaporation source having the composition of the coating layer (lowermost layer, upper layer) is installed.
  • the prepared substrate is placed in a reaction vessel of an arc ion plating apparatus.
  • the base material is subjected to ion bombardment treatment before forming the lowermost layer.
  • the inside of the reaction vessel is evacuated to 1 ⁇ 10 ⁇ 2 Pa or less, and a reaction gas such as N 2 as a lowermost raw material is introduced into the reaction vessel, and the atmosphere in the reaction vessel is changed.
  • a reactive gas such as N 2 is used as a raw material for the lowermost layer.
  • the pressure in the reaction vessel is set to 0.5 to 5.0 Pa, and the base material is heated by a furnace heater so that the temperature of the base material is higher than 750 ° C.
  • the magnetic flux density at the center of the metal evaporation source as the lowermost layer raw material is 13 mT to 17 mT, and the arc current is 80 to 150 A.
  • a lowermost layer may be formed on the surface of the material.
  • the temperature of the base material when the lowermost layer is formed is preferably over 750 ° C. and 1000 ° C. or less, and is 800 ° C. or more and 950 ° C. or less. And more preferred. After forming the lowermost layer on the base material in this way and further forming an upper layer, the coated cutting tool of the present invention can be obtained.
  • the upper layer can be manufactured, for example, by the following method. After forming the lowermost layer, the bias voltage applied to the base material is ⁇ 10 to ⁇ 150 V, the base material temperature is 600 ° C., the magnetic flux density at the center of the metal evaporation source as the upper layer raw material is 5 mT to 15 mT, and the arc The upper layer is preferably formed under the condition that the current is 80 to 150 A.
  • a bias voltage of ⁇ 10 to ⁇ 150 V is applied to the substrate, the temperature of the substrate is 600 ° C., the magnetic flux density at the center of the metal evaporation source is 5 mT to 15 mT, Each layer can be formed on the lowermost surface by evaporating a metal evaporation source corresponding to the metal component by arc discharge.
  • a reaction vessel The layer thickness of each layer constituting the multilayer structure can be controlled by adjusting the number of revolutions of the turntable to which the substrate is fixed.
  • the multilayer structure is configured by adjusting the arc discharge time of each metal evaporation source. The layer thickness of each layer can be controlled.
  • composition and average layer thickness of each coating layer in the coated cutting tools of the invention and comparative products manufactured below were measured, and the average particle size of the lowest layer constituent particles was measured as follows.
  • composition of each layer was measured using a scanning electron microscope S-6600 manufactured by Hitachi High-Technologies Corporation and an EDS attached to a transmission electron microscope.
  • ⁇ Average thickness of each layer> For the average layer thickness of each layer of the coating layer in the sample (when the upper layer is a multilayer structure, the average layer thickness of each layer constituting it), using an optical microscope, scanning electron microscope S-6600 and transmission electron microscope, The cross section of the sample on the side facing the evaporation source was mirror-polished with diamond paste, the cross section of the obtained sample was measured at five locations, and the average value was obtained.
  • ⁇ Average particle size of the lowest layer constituent particles> The average particle size of the lowermost layer constituting particles of the coated cutting tool samples of the invention and the comparative product was measured as follows. The upper layer formed on the surface of the lowermost layer was removed by ion milling. Using the EBSD device manufactured by TSL Solutions Co., Ltd., the step size is set to 0.01 ⁇ m, the measurement range is set to 2 ⁇ m ⁇ 2 ⁇ m, and the boundary where the orientation difference is 5 ° or more is used for the surface of the lowermost layer that appears after removing the upper layer The average particle diameter of the lowermost layer constituting particles was determined from the image of the surface texture of the lowermost layer as the boundary.
  • the diameter of a circle having an area equal to the area of the constituent particles of the lowermost layer is used as the particle diameter of the particle.
  • the particle size distribution chart was created by determining the particle size of each particle in the measurement range and including a horizontal axis indicating the particle size divided at intervals of 5 nm and a vertical axis indicating the area ratio of all particles included in the interval of 5 nm intervals. .
  • the center value of the particle size classification was multiplied by the area ratio of all the particles included in the classification. Then, all the values obtained by multiplying the median value of the particle size classification and the area ratio of all the particles contained in the classification were summed, and the obtained value was defined as the average particle size of the lowermost layer constituting particles.
  • a metal evaporation source having the composition of the coating layers (lowermost layer and uppermost layer) shown in Table 1 was installed in the reaction vessel of the arc ion plating apparatus. Subsequently, the base material is attached to a sample holder in the reaction vessel of the arc ion plating apparatus, the pressure in the reaction vessel is set to a vacuum of 1 ⁇ 10 ⁇ 2 Pa or less, and the temperature of the base material is 500 ° C. with a furnace heater. Heated until.
  • the pressure in the reaction vessel is reduced to a vacuum of 1 ⁇ 10 ⁇ 2 Pa or less, the Ar gas is discharged, and N 2 gas, which is the lowermost raw material, is introduced into the reaction vessel.
  • the inside atmosphere was a nitrogen atmosphere.
  • the pressure in the reaction vessel was set to 3 Pa, and the base material was heated with an in-furnace heater to set the temperature of the base material to 800 ° C.
  • Table 1 The composition shown in Table 1 on the surface of the base material under the coating conditions in which the bias voltage applied to the base material is ⁇ 50 V, the magnetic flux density at the center of the metal evaporation source as the lowermost raw material is 15 mT, and the arc current is 150 A.
  • the bottom layer of was formed.
  • the atmosphere in the reaction vessel was changed to a nitrogen atmosphere, the pressure in the reaction vessel was set to 3 Pa, and the substrate was heated with a furnace heater to set the temperature of the substrate to 600 ° C.
  • the bias voltage applied to the substrate is ⁇ 50 V
  • the magnetic flux density at the center of the metal evaporation source that is the raw material of the upper layer is 15 mT, and the arc current is 150 A
  • the surface layer has the composition shown in Table 1.
  • An upper layer was formed.
  • the resulting inventive coated cutting tool was then cooled and removed from the reaction vessel.
  • a metal evaporation source having the composition of the coating layers (lowermost layer and uppermost layer) shown in Table 1 was installed in the reaction vessel of the arc ion plating apparatus. Subsequently, the base material was attached to a sample holder in the reaction vessel of the arc ion plating apparatus, and Ar ion bombardment treatment was performed under the same conditions as invented products 1 to 20.
  • the pressure in the reaction vessel is reduced to a vacuum of 1 ⁇ 10 ⁇ 2 Pa or less, the Ar gas is discharged, and N 2 gas, which is the lowermost raw material, is introduced into the reaction vessel.
  • the inside atmosphere was a nitrogen atmosphere.
  • the pressure in the reaction vessel was set to 3 Pa, and the base material was heated with an in-furnace heater to set the temperature of the base material to 800 ° C.
  • Table 1 The composition shown in Table 1 on the surface of the base material under the coating conditions in which the bias voltage applied to the base material is ⁇ 50 V, the magnetic flux density at the center of the metal evaporation source as the lowermost raw material is 15 mT, and the arc current is 150 A.
  • the bottom layer of was formed.
  • the pressure was set to 2.7 Pa, and the temperature of the substrate was set to 600 ° C. by heating the substrate with a furnace heater.
  • the bias voltage applied to the substrate is ⁇ 50 V
  • the magnetic flux density at the center of the metal evaporation source that is the raw material of the upper layer is 15 mT
  • the arc current is 150 A
  • the surface layer has the composition shown in Table 1.
  • An upper layer was formed.
  • the resulting inventive coated cutting tool was then cooled and removed from the reaction vessel.
  • a metal evaporation source having the composition of the coating layer (lowermost layer, uppermost layer) shown in Table 2 was installed in the reaction vessel of the arc ion plating apparatus. Subsequently, the base material was attached to a sample holder in the reaction vessel of the arc ion plating apparatus, and Ar ion bombardment treatment was performed under the same conditions as invented products 1 to 20.
  • the pressure in the reaction vessel is reduced to a vacuum of 1 ⁇ 10 ⁇ 2 Pa or less, the Ar gas is discharged, and N 2 gas, which is the lowermost raw material, is introduced into the reaction vessel.
  • the atmosphere inside was a nitrogen atmosphere, and the pressure in the reaction vessel was 3 Pa.
  • the base material was heated with the furnace heater and the temperature of the base material was 800 degreeC.
  • Table 2 The composition shown in Table 2 on the surface of the base material under the coating conditions in which the bias voltage applied to the base material is ⁇ 50 V, the magnetic flux density at the center of the metal evaporation source as the lowermost raw material is 15 mT, and the arc current is 150 A.
  • the bottom layer of was formed.
  • each metal evaporation source is alternately arced under a coating condition in which the bias voltage applied to the substrate is ⁇ 50 V, the magnetic flux density at the center of each metal evaporation source serving as the upper layer material is 15 mT, and the arc current is 150 A. Evaporated by discharge. As a result, an upper layer having an alternately laminated structure composed of A layers and B layers having different compositions shown in Table 2 was formed.
  • the arc discharge times of the A layer and the B layer were adjusted to control the average layer thickness of the A layer and the average layer thickness of the B layer to be 100 nm, respectively.
  • the resulting inventive coated cutting tool was cooled and removed from the reaction vessel.
  • a metal evaporation source having the composition of the coating layers (lowermost layer and uppermost layer) shown in Table 3 was installed in the reaction vessel of the arc ion plating apparatus. Subsequently, the base material was attached to a sample holder in the reaction vessel of the arc ion plating apparatus, and Ar ion bombardment treatment was performed under the same conditions as invented products 1 to 20.
  • the pressure in the reaction vessel is reduced to a vacuum of 1 ⁇ 10 ⁇ 2 Pa or less, and N 2 gas as the lowermost raw material is introduced into the reaction vessel, and the atmosphere in the reaction vessel is changed.
  • a nitrogen atmosphere was set, and the pressure in the reaction vessel was 3 Pa.
  • the base material was heated with the furnace heater and the temperature of the base material was 750 degreeC.
  • the bottom layer of was formed.
  • the atmosphere in the reaction vessel was changed to a nitrogen atmosphere, the pressure in the reaction vessel was set to 3 Pa, and the substrate was heated with a furnace heater to set the temperature of the substrate to 600 ° C.
  • the bias voltage applied to the substrate is -50 V
  • the magnetic flux density at the center of the metal evaporation source as the upper layer raw material is 15 mT, and the arc current is 150 A
  • the composition shown in Table 3 is formed on the surface of the lowermost layer.
  • An upper layer was formed.
  • the resulting coated coated cutting tool was cooled and removed from the reaction vessel.
  • a metal evaporation source having the composition of the coating layers (lowermost layer and upper layer) shown in Table 3 was installed in the reaction vessel of the arc ion plating apparatus, and the base material was reacted by the arc ion plating apparatus.
  • the sample was attached to the sample holder in the container, and Ar ion bombardment treatment was performed under the same conditions as invented products 1-20.
  • the pressure in the reaction vessel is reduced to a vacuum of 1 ⁇ 10 ⁇ 2 Pa or less, and N 2 gas as the lowermost raw material is introduced into the reaction vessel, and the atmosphere in the reaction vessel is changed.
  • a nitrogen atmosphere was set, and the pressure in the reaction vessel was 3 Pa.
  • the base material was heated with the furnace heater and the temperature of the base material was 750 degreeC.
  • the bottom layer of was formed.
  • the atmosphere in the reaction vessel was changed to a nitrogen atmosphere, the pressure in the reaction vessel was set to 3 Pa, and the substrate was heated with a furnace heater to set the temperature of the substrate to 600 ° C.
  • the bias voltage applied to the substrate is -50 V
  • the magnetic flux density at the center of the metal evaporation source as the upper layer raw material is 15 mT, and the arc current is 150 A
  • the composition shown in Table 3 is formed on the surface of the lowermost layer.
  • An upper layer was formed. Then, the coated cutting tool of the comparative product 4 obtained was cooled and taken out from the reaction vessel.
  • a metal evaporation source having the composition of the coating layer (lowermost layer, uppermost layer) shown in Table 3 was installed in the reaction vessel of the arc ion plating apparatus. Subsequently, the base material was attached to a sample holder in the reaction vessel of the arc ion plating apparatus, and Ar ion bombardment treatment was performed under the same conditions as invented products 1 to 20.
  • the inside of the reaction vessel is evacuated to 1 ⁇ 10 ⁇ 2 Pa or less, and N 2 gas as a lowermost raw material is introduced into the reaction vessel, so that the atmosphere in the reaction vessel is a nitrogen atmosphere And the pressure in the reaction vessel was 3 Pa.
  • the base material was heated with the furnace heater and the temperature of the base material was 500 degreeC.
  • the bottom layer of was formed.
  • the atmosphere in the reaction vessel was continuously changed to a nitrogen atmosphere, and the pressure in the reaction vessel was set to 3 Pa. Then, the base material was heated with the furnace heater and the temperature of the base material was 600 degreeC. Under the coating conditions where the bias voltage applied to the substrate is -50 V, the magnetic flux density at the center of the metal evaporation source as the upper layer raw material is 15 mT, and the arc current is 150 A, the composition shown in Table 3 is formed on the surface of the lowermost layer. An upper layer was formed. The resulting coated cutting tool of Comparative Product 5 was cooled and removed from the reaction vessel.
  • a metal evaporation source having the composition of the coating layer (lowermost layer, uppermost layer) shown in Table 3 was installed in the reaction vessel of the arc ion plating apparatus. Subsequently, the base material was attached to a sample holder in the reaction vessel of the arc ion plating apparatus, and Ar ion bombardment treatment was performed under the same conditions as invented products 1 to 20.
  • the pressure in the reaction vessel is reduced to a vacuum of 1 ⁇ 10 ⁇ 2 Pa or less, the Ar gas is discharged, and N 2 gas, which is the lowermost raw material, is introduced into the reaction vessel.
  • the atmosphere inside was a nitrogen atmosphere, and the pressure in the reaction vessel was 3 Pa.
  • the base material was heated with the furnace heater and the temperature of the base material was 750 degreeC.
  • the bottom layer of was formed.
  • the pressure was 2.7 Pa.
  • the base material was heated with the furnace heater and the temperature of the base material was 600 degreeC.
  • the bias voltage applied to the substrate is -50 V
  • the magnetic flux density at the center of the metal evaporation source as the upper layer raw material is 15 mT
  • the arc current is 150 A
  • the composition shown in Table 3 is formed on the surface of the lowermost layer.
  • An upper layer was formed.
  • the coated cutting tool of the comparative product 7 obtained was cooled and taken out from the reaction vessel.
  • a metal evaporation source having the composition of the coating layer (lowermost layer, uppermost layer) shown in Table 3 was installed in the reaction vessel of the arc ion plating apparatus. Subsequently, the base material was attached to a sample holder in the reaction vessel of the arc ion plating apparatus, and Ar ion bombardment treatment was performed under the same conditions as invented products 1 to 20.
  • the pressure in the reaction vessel is reduced to a vacuum of 1 ⁇ 10 ⁇ 2 Pa or less, the Ar gas is discharged, and N 2 gas, which is the lowermost raw material, is introduced into the reaction vessel.
  • the atmosphere inside was a nitrogen atmosphere, and the pressure in the reaction vessel was 3 Pa.
  • the base material was heated with the furnace heater and the temperature of the base material was 750 degreeC.
  • the bottom layer of was formed.
  • the atmosphere in the reaction vessel was continuously changed to a nitrogen atmosphere, and the pressure in the reaction vessel was set to 3 Pa. Then, the base material was heated with the furnace heater and the temperature of the base material was 600 degreeC. A bias voltage applied to the substrate is set to ⁇ 50 V, a magnetic flux density at the center of each metal evaporation source as an upper layer material is set to 15 mT, and an arc current is set to 150 A. Evaporated.
  • an upper layer having an alternately laminated structure composed of A layers and B layers having different compositions shown in Table 3 was formed.
  • the arc discharge times of the A layer and the B layer were adjusted to control the average layer thickness of the A layer and the average layer thickness of the B layer to be 100 nm, respectively.
  • the obtained comparative coated cutting tool was cooled and taken out from the reaction vessel.
  • the coating layer was peeled off for (1) a sample cut to a working distance of 0.8 m and (2) a sample cut to a working distance of 2.0 m.
  • the area where the material was exposed was measured. Specifically, after the cutting test, the work material welded to the sample surface is removed with aqua regia, the sample surface is observed with SEM, and the substrate is exposed from the SEM composition image using image analysis software. The measured area (mm 2 ) was measured. The areas (mm 2 ) where the substrate was exposed are shown in Tables 4 and 5. Further, (3) Tables 4 and 5 show the processing distances of the samples processed until reaching the tool life.
  • the inventive product has a smaller exposed area of the base material than the comparative product at both processing distances of 0.8 m and 2.0 m, and the coating layer is excellent in peel resistance. Moreover, the processing distance until the tool life of the invention product is longer than that of the comparative product. This indicates that the tool life of the inventive product is longer than that of the comparative product.

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  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Inorganic Chemistry (AREA)
  • General Chemical & Material Sciences (AREA)
  • Cutting Tools, Boring Holders, And Turrets (AREA)
  • Physical Vapour Deposition (AREA)

Abstract

La présente invention a pour objectif un outil de coupe enrobé ayant une longueur d'usinage longue et une longue durée de vie et pour lequel la surface de couche enrobée retirée est petite même lors d'un usinage dans des conditions d'usinage sévères. La présente invention concerne un outil de coupe enrobé comprenant un matériau de base et une couche d'enrobage formée sur une surface de matériau de base, et la couche d'enrobage comprend une couche supérieure sur le côté surface et une couche inférieure sur le côté matériau de base. La couche de inférieure est configurée comme (AlaTibMc)N [à condition que M représente au moins un élément choisi dans le groupe constitué par Zr, Hf, V, Nb, Ta, Cr, Mo, W, Y, B et Si ; a représente le rapport atomique de l'Al élémentaire par rapport au total de l'Al élémentaire, du Ti élémentaire et du M élémentaire ; b représente le rapport atomique du Ti élémentaire par rapport au total de l'Al élémentaire, du Ti élémentaire et du M élémentaire ; c représente le rapport atomique du M élémentaire par rapport au total de l'Al élémentaire, du Ti élémentaire et du M élémentaire ; et a, b et c répondent à 0,30 ≤ a ≤ 0,70, 0,30 ≤ b ≤ 0,70, 0 ≤ c ≤0,20 et a+b+c = 1], et le diamètre de particule moyen de la particule (AlaTibMc)N comprenant la couche inférieure ne fait pas plus de 400 nm.
PCT/JP2013/073475 2012-08-31 2013-09-02 Outil de coupe enrobé WO2014034923A1 (fr)

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CN113714526A (zh) * 2020-05-25 2021-11-30 株式会社泰珂洛 被覆切削工具

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WO2020213263A1 (fr) * 2019-04-19 2020-10-22 住友電工ハードメタル株式会社 Outil de coupe
JP2024032363A (ja) * 2022-08-29 2024-03-12 株式会社Moldino 被覆工具

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