WO2014008679A1 - 线宽量测装置及其方法 - Google Patents

线宽量测装置及其方法 Download PDF

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Publication number
WO2014008679A1
WO2014008679A1 PCT/CN2012/078887 CN2012078887W WO2014008679A1 WO 2014008679 A1 WO2014008679 A1 WO 2014008679A1 CN 2012078887 W CN2012078887 W CN 2012078887W WO 2014008679 A1 WO2014008679 A1 WO 2014008679A1
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WIPO (PCT)
Prior art keywords
light source
pattern
line width
width measuring
color mixing
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PCT/CN2012/078887
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English (en)
French (fr)
Inventor
林勇佑
王清平
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深圳市华星光电技术有限公司
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Application filed by 深圳市华星光电技术有限公司 filed Critical 深圳市华星光电技术有限公司
Priority to US13/700,400 priority Critical patent/US9074886B2/en
Publication of WO2014008679A1 publication Critical patent/WO2014008679A1/zh

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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/02—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/95—Investigating the presence of flaws or contamination characterised by the material or shape of the object to be examined
    • G01N21/956—Inspecting patterns on the surface of objects
    • G01N21/95684—Patterns showing highly reflecting parts, e.g. metallic elements

Definitions

  • the invention relates to a line width measuring technology, in particular to a line width measuring device capable of improving the line width measuring accuracy and a method thereof.
  • FIG. 1 is a schematic diagram of line width measurement in the prior art.
  • an image capturing device 91 such as a CCD lens
  • the image capturing device is usually assembled with a light source device 90.
  • the light source device 90 provides an illumination source directly above the pattern to be tested 92, so that the image capturing device can extract a clear image.
  • the captured color image needs to be converted into a grayscale image before the line width measurement can be performed.
  • the computer first loads the standard graphic as the measurement reference before performing the line width measurement of the grayscale image.
  • the light of the light source device 90 of FIG. 1 passes through a filter 93 to provide suitable illumination light, so that the grayscale image converted from the captured image is similar to the color of the standard pattern.
  • the filter 93 for the illumination device for line width measurement generally includes five different color filter units 930 to provide different illumination options for illumination by using different illumination units 930. Get different grayscale images.
  • the accuracy of the line width measurement will be affected. Since the foregoing filter 93 can only provide five kinds of filter units 930, the light source device 90 can only provide five kinds of illumination sources. Since the materials of different patterns to be tested have different reflection characteristics for light, the illumination selection of only five kinds of light sources will limit the adjustment space of the grayscale image of the pattern to be tested.
  • the main object of the present invention is to provide a line width measuring device and a method thereof, which can provide illumination selection of more color light sources to solve the color of the gray scale image and the standard pattern of the pattern to be tested.
  • the invention provides a line width measuring device, which comprises:
  • An image capturing device is disposed above the platform for capturing a graphic of the measurement area of the measurement area;
  • a color mixing light source device is disposed above the platform and includes a plurality of monochromatic light sources, and adjusts a brightness ratio of each of the monochromatic light sources according to a matching ratio between the pattern to be tested and a standard pattern.
  • the line width measuring device further includes a controller, the controller is connected to the image capturing device, and receives a graphic of the pattern to be tested acquired by the image capturing device.
  • the controller further connects the color mixing light source device, and controls the color mixing light source device to adjust the brightness of each monochromatic light source according to a matching ratio between the pattern to be tested and the standard pattern. proportion.
  • the controller is further configured to convert the graphic of the pattern to be tested into a grayscaled pattern, and compare the grayscaled graphic with the standard pattern to confirm the standard pattern Match rate.
  • the controller is further configured to measure a width of the line in the grayscaled graph when the matching ratio is greater than or equal to 80%; and match When the rate is less than 80%, the color mixing light source device is controlled to adjust the brightness ratio of each of the monochromatic light sources.
  • the color mixing light source device comprises a red light source, a blue light source and a green light source, and 256 different colors of illumination light sources can be provided by color mixing.
  • the red light source, the blue light source, and the green light source are respectively a red light emitting diode, a blue light emitting diode, and a green light emitting diode.
  • the invention further provides a line width measuring method, which comprises the following steps:
  • S102 providing illumination to the measurement area by a color mixing light source device including a plurality of monochromatic light sources;
  • S103 Scan the measurement area to obtain a graphic of the pattern to be tested
  • S104 Convert the graphic of the pattern to be tested into a grayscaled pattern, and compare the grayscaled graphic with the standard pattern to confirm a matching ratio with the standard pattern;
  • Step S105 If the matching ratio is greater than or equal to a specific value, further measuring a width of the line in the grayscaled pattern, if the matching ratio is less than the specific value, further adjusting a brightness ratio of each monochromatic light source, and then performing illumination, and Step S103, step S104, and step S105 are re-executed.
  • the specific value is 80%.
  • the color mixing light source device includes a red light source, a blue light source, and a green light source.
  • the brightness ratio of each unit light source is adjusted as follows: adjusting a red light source, a blue light source, and a green light source. The brightness ratio.
  • the invention further provides a line width measuring device, comprising:
  • An image capturing device is disposed above the platform for capturing a pattern of the measurement pattern of the measurement area;
  • controller is connected to the image capturing device, and receives a graphic of a pattern to be tested acquired by the image capturing device;
  • a color mixing light source device disposed above the platform, comprising a plurality of monochromatic light sources, and adjusting a brightness ratio of each monochromatic light source according to a matching ratio of the pattern to be tested and a standard pattern to provide suitable mixed color light for illumination;
  • the color mixing light source device includes a red light source, a blue light source, and a green light source.
  • the color mixing light source device further includes an optical element; the light emitted by the monochromatic light source is commonly projected onto the optical element, mixed and passed through the optical element and projected out.
  • the invention mainly uses a color mixing light source device to provide illumination corresponding to the measurement area, wherein the color mixing light source device comprises a plurality of monochromatic light sources, and can adjust the brightness ratio of each monochromatic light source according to the matching ratio between the pattern to be tested and the standard pattern. Providing suitable mixed color light for illumination, thereby reducing the difference in color contrast between the grayscale image of the pattern to be tested and the standard pattern, thereby effectively improving the accuracy of the line width measurement.
  • 1 is a schematic view showing the operation of a conventional line width measuring device.
  • FIG. 2 is a schematic view showing the operation of the illumination device of the conventional line width measuring device for projecting light through a filter.
  • FIG. 3 is a schematic view showing the operation of a line width measuring device according to a preferred embodiment of the present invention.
  • FIG. 4 is a schematic structural view of a color mixing light source device of a line width measuring device according to a preferred embodiment of the present invention.
  • FIG. 5 is a flow chart of a method for measuring a line width according to a preferred embodiment of the present invention.
  • FIG. 3 is a schematic diagram of the operation of the line width measuring device according to a preferred embodiment of the present invention.
  • the line width measuring device includes a platform 10, an image capturing device 20, and a color mixing light source device 30.
  • the platform 10 has a measuring area 11 on the upper surface of the platform 10 for placing a pattern 100 to be tested.
  • the pattern to be tested 100 mainly refers to a related component in the field of a liquid crystal display (LCD), such as an indium tin oxide (ITO) transparent electrode layer of a liquid crystal panel, a data line, a scan line, and the like, but is not limited thereto.
  • LCD liquid crystal display
  • ITO indium tin oxide
  • the image capturing device 20 is disposed above the platform 10 and can be mounted on a support frame (not shown) disposed on the platform 10.
  • the image capturing device 20 is preferably a measuring area 11 facing the platform 10, and the graphic of the pattern to be tested 100 is captured in the measuring area 11.
  • the color mixing light source device 30 is disposed above the platform 10.
  • the color mixing light source device 30 provides illumination corresponding to the measurement area 11, and the incident direction of the light emitted is perpendicular to the platform surface 10.
  • the color mixing light source device 30 can be a light emitting diode (LED) component.
  • FIG. 4 is a schematic structural view of the color mixing light source device 30 of the line width measuring device according to a preferred embodiment of the present invention.
  • the color mixing light source device 30 includes a plurality of monochromatic light sources.
  • the plurality of monochromatic light sources include a red light source 300, a blue light source 301, and a green light source 302, and the red light source 300, the blue light source 301, and the green light source 302 are preferably red light emitting diodes, respectively. Blue LED and green LED.
  • the color mixing light source device 30 can adjust the brightness ratio of each of the monochromatic light sources according to the matching ratio of the pattern to be tested 100 and a standard pattern to provide suitable mixed color light for illumination.
  • the color mixing light source device 30 can provide 256 different colors of illumination light sources by color mixing.
  • the color mixing light source device 30 may further include an optical element 31, such as a lens; the light emitted by the monochromatic light source may be collectively projected onto the optical element 31, mixed and passed through the optical element 31 and projected. Go out.
  • the line width measuring device further includes a controller 40.
  • the controller 40 is connected to the image capturing device 20 for receiving a graphic of the pattern to be tested 100 acquired by the image capturing device 20.
  • the controller 40 is further connected to the color mixing light source device 30 for controlling the color mixing light source device 30 to adjust each monochromatic light source according to the matching ratio between the pattern to be tested 100 and the standard pattern.
  • the brightness ratio is further configured to convert the graphic of the pattern to be tested 100 into a grayscaled pattern, and compare the grayscaled graphic with the standard pattern to confirm the matching ratio thereof with the standard pattern.
  • the controller 40 further measures the width of the line in the grayscaled graph; if the matching ratio is less than the specific value, the controller 40 further controls the mixed color light source device. 30 Adjust the brightness ratio of each of the monochromatic light sources.
  • the specific value is preferably 80%, and the matching ratio refers to the degree of similarity of the color contrast of the grayscaled pattern and the standard pattern.
  • the color mixing light source device can adjust the brightness ratio of each of the monochromatic light sources according to the matching ratio of the pattern to be tested and the standard pattern, thereby providing an illumination source of an appropriate color by mixing light.
  • the illumination source of the appropriate color can make the grayscale pattern of the pattern to be tested 100 similar to the color of the standard pattern, so that the controller 40 can more accurately measure the line width of the pattern 100 to be tested.
  • the line width measuring device can be operated by a line width measuring method, as shown in FIG. 5, comprising the following steps:
  • S103 Scan the measurement area 11, and acquire a graphic of the pattern to be tested 100;
  • S104 Convert the graphic of the pattern to be tested 100 into a grayscaled pattern, and compare the grayscaled graphic with the standard pattern to confirm the matching ratio with the standard pattern;
  • step S105 if the matching ratio is smaller than the specific value, the brightness ratio of each of the monochromatic light sources is further adjusted, and then the irradiation is performed, and steps S103, S104, and S105 are re-executed.
  • the step S101 is to load the standard pattern by the controller 40.
  • the step S102 is to provide illumination to the measurement area 11 by a plurality of monochromatic light sources of the color mixing light source device 30.
  • the step S103 is to scan the measurement area 11 by the image capturing device 20 to acquire a graphic of the pattern to be tested 100.
  • the step S104 is to convert the graphic of the pattern to be tested 100 into a grayscaled image by the controller 40, and compare the grayscaled graphic with the standard pattern by the controller 40 to confirm the matching with the standard pattern. rate.
  • the step S105 is to determine, by the controller 40, that if the matching ratio is greater than or equal to a specific value, further measure the width of the line in the grayscaled graph; if the controller 40 determines that the matching ratio is less than the specific value, Then, the controller 40 further controls the color mixing light source device 30 to adjust the brightness ratio of each of the monochromatic light sources, and then performs illumination, and performs steps S103, S104, and S105 again.
  • the specific value is 80%.
  • the selection of the illumination color provided by the existing line width measuring device is limited by the color type of the filter unit of the filter, and the present invention uses a color mixing light source device composed of a plurality of monochromatic light sources.
  • the illumination source of 256 colors can be provided by mixing light. Therefore, the measurement method of the present invention can provide an illumination source of an appropriate color for the matching ratio between the pattern to be tested and the standard pattern, and reduce the gray scale image and the standard pattern of the pattern to be tested.
  • the difference in color contrast effectively improves the accuracy and stability of the line width measurement.

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Abstract

一种线宽量测装置，包括：一平台（10），具有一量测区（11）；一取像装置（20），设于所述平台（10）上方，用于撷取所述量测区（11）一待测图案（100）的图形；一控制器（40），所述控制器（40）连接所述取像装置（20），并接收所述取像装置（20）所获取的待测图案（100）的图形；以及一混色光源装置（30），设于所述平台（10）上方，包括多个单色光源，并根据待测图案（100）与一标准图案的匹配率调整各个单色光源的亮度比例以提供适合的混色光作为照明使用；所述混色光源装置（30）包括红色光源、蓝色光源及绿色光源。还公开了一种线宽量测方法。本发明可提供更好地量测环境，进而提升线宽量测精确度。

Description

线宽量测装置及其方法 技术领域
本发明是有关于一种线宽量测技术，特别是有关于一种可提升线宽量测精确度的线宽量测装置及其方法。
 背景技术
随着半导体制程的发展，积体电路元件越来越精密。因此在半导体制程中，光罩或晶圆的细微线路图案的线宽、线距等关键尺寸(Critical Dimension，CD)的控制是一个很重要的环节。一般而言，制造商会使用线宽量测装置对线路图案进行关键尺寸的检测，其可以用来量测线宽、线距是否准确而没有偏移。
请参考图1所示，图1为现有技术进行线宽量测的示意图。现有技术是使用一取像装置91(如CCD镜头)对一待测图案92进行撷取影像，再通过电脑处理进行线宽量测。而所述取像装置通常会跟一光源装置90组装在一起，由所述光源装置90于所述待测图案92的正上方提供照明光源，让所述取像装置得以撷取出清晰的影像。
撷取的彩色影像需先转换成灰阶影像才能进行线宽量测的运算。一般来说，电脑在进行灰阶影像的线宽量测之前，会先载入标准图形作为测量基准。请参考图2所示，前述图1的光源装置90的光线会通过一滤光片93以提供适合的照明光，使得从撷取的影像所转换成的灰阶影像与标准图案的颜色对比相近，以便进行线宽量测。所述用于线宽量测的照明装置的滤光片93一般包括五种不同颜色的滤光单元930，以提供不同色光照明的选择，通过使用不同滤光单元930所投射的照明光线，可获得不同的灰阶影像。
然而，当待测图案的灰阶影像与标准图案的颜色对比差异过大，将会影响到线宽量测的精确度。由于前述滤光片93仅能提供五种滤光单元930，所述光源装置90也就只能提供五种照明光源。由于不同的待测图案的材质对于光的反射特性也不同，仅五种光源的照明选择将使得待测图案的灰阶影像的调整空间受到限制。
故，有必要提供一种线宽量测装置及其方法，以解决现有技术所存在的问题。
 技术问题
有鉴于现有技术的缺点，本发明的主要目的在于提供一种线宽量测装置及其方法，可提供更多颜色光源的照明选择，以解决待测图案的灰阶影像与标准图案的颜色对比差异影响到线宽量测的精确度的技术问题。
 技术解决方案
本发明提供一种线宽量测装置，其包含：
一平台，具有一量测区；
一取像装置，设于所述平台上方，用于撷取所述量测区一待测图案的图形；及
一混色光源装置，设于所述平台上方，包括多个单色光源，并根据待测图案与一标准图案的匹配率调整各个单色光源的亮度比例。
在本发明的一实施例中，所述线宽量测装置更包含一控制器，所述控制器连接所述取像装置，并接收所述取像装置所获取的待测图案的图形。
在本发明的一实施例中，所述控制器进一步连接所述混色光源装置，用于根据所述待测图案与所述标准图案的匹配率控制所述混色光源装置调整各个单色光源的亮度比例。
在本发明的一实施例中，所述控制器还用于将该待测图案的图形转换成灰阶化图形，并将灰阶化图形与所述标准图案进行比较，确认其与标准图案的匹配率。
在本发明的一实施例中，若匹配率大于或等于80%，则所述控制器进一步用于在匹配率大于或等于80%时测量该灰阶化图形中的线路的宽度；及在匹配率小于80%时控制所述混色光源装置调整其各个单色光源的亮度比例。
在本发明的一实施例中，所述混色光源装置包括红色光源、蓝色光源及绿色光源，可通过混色提供256种不同颜色的照明光源。
在本发明的一实施例中，所述红色光源、蓝色光源及绿色光源分别为红色发光二极管、蓝色发光二极管及绿色发光二极管。
本发明另提供一种线宽量测方法，其包括下列步骤：
S101：载入标准图案；
S102：以包括多个单色光源的混色光源装置对量测区提供照明；
S103：扫描量测区，获取待测图案的图形；
S104：将待测图案的图形转换成灰阶化图形，并将灰阶化图形与标准图案进行比较，确认其与标准图案的匹配率；以及
S105：若匹配率大于或等于一特定值，进一步测量该灰阶化图形中的线路的宽度，若匹配率小于所述特定值，则进一步调整各个单色光源的亮度比例，再进行照射，并重新执行步骤S103、步骤S104及步骤S105。
在本发明的一实施例中，所述特定值为80%。
在本发明的一实施例中，所述混色光源装置包括红色光源、蓝色光源及绿色光源，步骤S105中所述调整各个单元光源的亮度比例具体为：调整红色光源、蓝色光源及绿色光源的亮度比例。
本发明另提供一种线宽量测装置，其包含：
一平台，具有一量测区；
一取像装置，设于所述平台上方，用于撷取所述量测区一待测图案的图形；
一控制器，所述控制器连接所述取像装置，并接收所述取像装置所获取的待测图案的图形；以及
一混色光源装置，设于所述平台上方，包括多个单色光源，并根据待测图案与一标准图案的匹配率调整各个单色光源的亮度比例以提供适合的混色光作为照明使用；所述混色光源装置包括红色光源、蓝色光源及绿色光源。
在本发明的一实施例中，所述混色光源装置进一步包括一光学元件；所述单色光源发出的光共同投射于所述光学元件上，混色并通过所述光学元件后投射出去。
 有益效果
本发明主要是使用混色光源装置对应于量测区提供照明，其中所述混色光源装置包括多个单色光源，并能根据待测图案与标准图案的匹配率调整各个单色光源的亮度比例以提供适合的混色光作为照明使用，进而减少待测图案的灰阶影像与标准图案的颜色对比差异，有效提升线宽量测的精确度。
 附图说明
图1是现有线宽量测装置的操作示意图。
图2是现有线宽量测装置的照明装置通过滤光片投射光线的操作示意图。
图3是本发明一较佳实施例的线宽量测装置的操作示意图。
图4是本发明一较佳实施例的线宽量测装置的混色光源装置的结构示意图。
图5是本发明一较佳实施例的线宽量测方法的方法流程图。
 本发明的最佳实施方式
为让本发明上述目的、特征及优点更明显易懂，下文特举本发明较佳实施例，并配合附图，作详细说明如下。再者，本发明所提到的方向用语，例如「上」、「下」、「前」、「后」、「左」、「右」、「内」、「外」、「侧面」等，仅是参考附加图式的方向。因此，使用的方向用语是用以说明及理解本发明，而非用以限制本发明。
请参考图3所示，图3是本发明一较佳实施例的线宽量测装置的操作示意图。所述线宽量测装置包括一平台10、一取像装置20以及一混色光源装置30。
所述平台10具有一量测区11，所述量测区11位于平台10的上表面，用于放置一待测图案100。所述待测图案100主要是指液晶显示器(LCD)领域的相关组件，例如是液晶面板的铟锡氧化物(ITO)透明电极层、数据线、扫描线等，但并不限于此。
所述取像装置20是设于所述平台10上方，其可装设于一设于所述平台10上的支撑架(图中未绘示)。所述取像装置20优选是正对所述平台10的量测区11，而于所述量测区11内撷取所述待测图案100的图形。
所述混色光源装置30设于所述平台10上方。所述混色光源装置30对应所述量测区11提供照明，其发出的光线的入射方向与所述平台表面10呈垂直。所述混色光源装置30可以是发光二极管(LED)组件。请进一步参考图4所示，图4是本发明一较佳实施例的线宽量测装置的所述混色光源装置30的结构示意图。所述混色光源装置30包括多个单色光源。在本实施例中，所述多个单色光源包括红色光源300、蓝色光源301及绿色光源302，且所述红色光源300、蓝色光源301及绿色光源302优选是分别为红色发光二极管、蓝色发光二极管及绿色发光二极管。所述混色光源装置30可根据所述待测图案100与一标准图案的匹配率来调整各个单色光源的亮度比例以提供适合的混色光作为照明使用。当所述多个单色光源为红色光源300、蓝色光源301及绿色光源302时，所述混色光源装置30可通过混色提供256种不同颜色的照明光源。再者，所述混色光源装置30可进一步包括一光学元件31，例如透镜；所述单色光源发出的光可共同投射于所述光学元件31上，混色并通过该所述光学元件31后投射出去。
所述线宽量测装置更包含一控制器40。所述控制器40连接所述取像装置20，用于接收所述取像装置20所获取的待测图案100的图形。在本实施例中，所述控制器40还进一步连接所述混色光源装置30，用于根据所述待测图案100与所述标准图案的匹配率控制所述混色光源装置30调整各个单色光源的亮度比例。所述控制器40还用于将该待测图案100的图形转换成灰阶化图形，并将灰阶化图形与所述标准图案进行比较，确认其与标准图案的匹配率。若匹配率大于或等于一特定值，则所述控制器40进一步测量该灰阶化图形中的线路的宽度；若匹配率小于该特定值，则所述控制器40进一步控制所述混色光源装置30调整其各个单色光源的亮度比例。在本实施例中，所述特定值优选是80%，所述匹配率是指灰阶化图形与标准图案的颜色对比的相似程度。
由于使用所述混色光源装置30提供照明，所述混色光源装置能根据待测图案与标准图案的匹配率调整各个单色光源的亮度比例，进而通过混光而提供适当颜色的照明光源。适当颜色的照明光源可使得待测图案100的灰阶化图形与标准图案的颜色对比相近，如此一来，所述控制器40便可更精确地测量所述待测图案100的线宽。
所述线宽量测装置可通过一线宽量测方法来操作，所述线宽量测方法如图5所示，包含下列步骤：
S101：载入标准图案；
S102：以混色光源装置对量测区11提供照明；
S103：扫描量测区11，获取待测图案100的图形；
S104：将待测图案100的图形转换成灰阶化图形，并将灰阶化图形与标准图案进行比较，确认其与标准图案的匹配率；以及
S105：若匹配率大于或等于一特定值，进一步测量该灰阶化图形中的线路的宽度。
再者，在步骤S105中，若匹配率小于所述特定值，则进一步调整各个单色光源的亮度比例，再进行照射，并重新执行步骤S103、步骤S104及步骤S105。
更详细来说，所述步骤S101是通过所述控制器40载入所述标准图案。所述步骤S102是通过所述混色光源装置30的多个单色光源对所述量测区11提供照明。所述步骤S103是通过所述取像装置20扫描所述量测区11，以获取待测图案100的图形。所述步骤S104是通过所述控制器40将待测图案100的图形转换成灰阶化图形，并通过所述控制器40将灰阶化图形与标准图案进行比较，确认其与标准图案的匹配率。所述步骤S105是通过所述控制器40判断若匹配率大于或等于一特定值，进一步测量该灰阶化图形中的线路的宽度；若所述控制器40判断匹配率小于所述特定值，则所述控制器40进一步控制所述混色光源装置30调整其各个单色光源的亮度比例，再进行照射，并重新执行步骤S103、步骤S104及步骤S105。在所述线宽量测方法的一实施例中，所述特定值为80%。
综上所述，相较于现有线宽量测装置所提供的照明颜色的选择受限于滤光片的滤光单元的颜色种类，本发明使用多个单色光源所组成的混色光源装置，可通过混光提供256种颜色的照明光源，因此，本发明的量测方法便可针对待测图案与标准图案的匹配率提供适当颜色的照明光源，减少待测图案的灰阶影像与标准图案的颜色对比的差异，有效提升线宽量测的精确度与稳定性。
本发明已由上述相关实施例加以描述，然而上述实施例仅为实施本发明的范例。必需指出的是，已公开的实施例并未限制本发明的范围。相反地，包含于权利要求书的精神及范围的修改及均等设置均包括于本发明的范围内。
 本发明的实施方式
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Claims (18)

  1. 一种线宽量测装置，其包括：
    一平台，具有一量测区；
    一取像装置，设于所述平台上方，用于撷取所述量测区一待测图案的图形；
    一控制器，所述控制器连接所述取像装置，并接收所述取像装置所获取的待测图案的图形；以及
    一混色光源装置，设于所述平台上方，包括多个单色光源，并根据待测图案与一标准图案的匹配率调整各个单色光源的亮度比例以提供适合的混色光作为照明使用；所述混色光源装置包括红色光源、蓝色光源及绿色光源。
  2. 如权利要求1所述的线宽量测装置，其中：所述混色光源装置进一步包括一光学元件；所述单色光源发出的光共同投射于所述光学元件上，混色并通过所述光学元件后投射出去。
  3. 如权利要求1所述的线宽量测装置，其中：所述控制器进一步连接所述混色光源装置，用于根据所述待测图案与所述标准图案的匹配率控制所述混色光源装置调整各个单色光源的亮度比例。
  4. 如权利要求1所述的线宽量测装置，其中：所述控制器还用于将该待测图案的图形转换成灰阶化图形，并将灰阶化图形与所述标准图案进行比较，确认其与标准图案的匹配率。
  5. 如权利要求4所述的线宽量测装置，其中：所述控制器进一步用于在匹配率大于或等于80%时测量该灰阶化图形中的线路的宽度；及在匹配率小于80%时控制所述混色光源装置调整其各个单色光源的亮度比例。
  6. 如权利要求1所述的线宽量测装置，其中：所述红色光源、蓝色光源及绿色光源可通过混色提供256种不同颜色的照明光源。
  7. 如权利要求1所述的线宽量测装置，其中：所述红色光源、蓝色光源及绿色光源分别为红色发光二极管、蓝色发光二极管及绿色发光二极管。
  8. 一种线宽量测装置，其包括：
    一平台，具有一量测区；
    一取像装置，设于所述平台上方，用于撷取所述量测区一待测图案的图形；及
    一混色光源装置，设于所述平台上方，包括多个单色光源，并根据待测图案与一标准图案的匹配率调整各个单色光源的亮度比例。
  9. 如权利要求8所述的线宽量测装置，其中：所述线宽量测装置更包含一控制器，所述控制器连接所述取像装置，并接收所述取像装置所获取的待测图案的图形。
  10. 如权利要求9所述的线宽量测装置，其中：所述控制器进一步连接所述混色光源装置，用于根据所述待测图案与所述标准图案的匹配率控制所述混色光源装置调整各个单色光源的亮度比例。
  11. 如权利要求10所述的线宽量测装置，其中：所述控制器还用于将该待测图案的图形转换成灰阶化图形，并将灰阶化图形与所述标准图案进行比较，确认其与标准图案的匹配率。
  12. 如权利要求11所述的线宽量测装置，其中：所述控制器进一步用于在匹配率大于或等于80%时测量该灰阶化图形中的线路的宽度；及在匹配率小于80%时控制所述混色光源装置调整其各个单色光源的亮度比例。
  13. 如权利要求8所述的线宽量测装置，其中：所述混色光源装置包括红色光源、蓝色光源及绿色光源，可通过混色提供256种不同颜色的照明光源。
  14. 如权利要求13所述的线宽量测装置，其中：所述红色光源、蓝色光源及绿色光源分别为红色发光二极管、蓝色发光二极管及绿色发光二极管。
  15. 如权利要求8所述的线宽量测装置，其中：所述混色光源装置进一步包括一光学元件；所述单色光源发出的光共同投射于所述光学元件上，混色并通过所述光学元件后投射出去。
  16. 一种线宽量测方法，其中：所述量测方法包括下列步骤：
    S101：载入标准图案；
    S102：以包括多个单色光源的混色光源装置对量测区提供照明；
    S103：扫描量测区，获取待测图案的图形；
    S104：将待测图案的图形转换成灰阶化图形，并将灰阶化图形与标准图案进行比较，确认其与标准图案的匹配率；以及
    S105：若匹配率大于或等于一特定值，进一步测量该灰阶化图形中的线路的宽度，若匹配率小于所述特定值，则进一步调整各个单色光源的亮度比例，再进行照射，并重新执行步骤S103、步骤S104及步骤S105。
  17. 如权利要求16所述的线宽量测方法，其中：所述特定值为80%。
  18. 如权利要求16所述的线宽量测方法，其中：所述混色光源装置包括红色光源、蓝色光源及绿色光源，步骤S105中所述调整各个单元光源的亮度比例具体为：调整红色光源、蓝色光源及绿色光源的亮度比例。
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CN102944179B (zh) * 2012-11-22 2015-09-02 深圳市华星光电技术有限公司 一种图案匹配方法、装置及线宽测量机
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