WO2013157346A1 - Ventilateur piézoélectrique - Google Patents

Ventilateur piézoélectrique Download PDF

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Publication number
WO2013157346A1
WO2013157346A1 PCT/JP2013/057998 JP2013057998W WO2013157346A1 WO 2013157346 A1 WO2013157346 A1 WO 2013157346A1 JP 2013057998 W JP2013057998 W JP 2013057998W WO 2013157346 A1 WO2013157346 A1 WO 2013157346A1
Authority
WO
WIPO (PCT)
Prior art keywords
piezoelectric
wing plate
main body
body fixing
piezoelectric fan
Prior art date
Application number
PCT/JP2013/057998
Other languages
English (en)
Japanese (ja)
Inventor
田中伸拓
Original Assignee
株式会社村田製作所
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 株式会社村田製作所 filed Critical 株式会社村田製作所
Priority to JP2014511149A priority Critical patent/JP5892240B2/ja
Publication of WO2013157346A1 publication Critical patent/WO2013157346A1/fr
Priority to US14/506,721 priority patent/US20150023819A1/en

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Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D25/00—Pumping installations or systems
    • F04D25/02—Units comprising pumps and their driving means
    • F04D25/06—Units comprising pumps and their driving means the pump being electrically driven
    • F04D25/0606—Units comprising pumps and their driving means the pump being electrically driven the electric motor being specially adapted for integration in the pump
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D23/00—Other rotary non-positive-displacement pumps
    • F04D23/006—Creating a pulsating flow
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D33/00—Non-positive-displacement pumps with other than pure rotation, e.g. of oscillating type
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/20—Piezoelectric or electrostrictive devices with electrical input and mechanical output, e.g. functioning as actuators or vibrators
    • H10N30/204—Piezoelectric or electrostrictive devices with electrical input and mechanical output, e.g. functioning as actuators or vibrators using bending displacement, e.g. unimorph, bimorph or multimorph cantilever or membrane benders
    • H10N30/2041—Beam type
    • H10N30/2042—Cantilevers, i.e. having one fixed end
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L23/00—Details of semiconductor or other solid state devices
    • H01L23/34—Arrangements for cooling, heating, ventilating or temperature compensation ; Temperature sensing arrangements
    • H01L23/46—Arrangements for cooling, heating, ventilating or temperature compensation ; Temperature sensing arrangements involving the transfer of heat by flowing fluids
    • H01L23/467—Arrangements for cooling, heating, ventilating or temperature compensation ; Temperature sensing arrangements involving the transfer of heat by flowing fluids by flowing gases, e.g. air
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/0001—Technical content checked by a classifier
    • H01L2924/0002—Not covered by any one of groups H01L24/00, H01L24/00 and H01L2224/00

Definitions

  • the present invention relates to a piezoelectric fan that blows air by vibrating a slat section using a piezoelectric element as a drive source.
  • the piezoelectric fan described in Patent Document 1 includes a diaphragm and a piezoelectric element. One end of the diaphragm is branched into three wing plate portions. The other end of the diaphragm is provided with a body fixing hole. Piezoelectric elements are attached to the respective slats. The piezoelectric element related to the central wing plate portion and the piezoelectric elements related to the left and right wing plate portions are polarized in opposite directions. When an alternating voltage having the same phase is applied to each piezoelectric element, the center wing plate portion and the left and right wing plate portions vibrate in opposite phases. At the fixed end of the diaphragm, the vibrations in the center blade part and the left and right blade parts cancel each other, so that the vibration is suppressed. The piezoelectric fan blows air by the above operation.
  • the piezoelectric fan described in Patent Document 2 includes a diaphragm, a piezoelectric element, and a support.
  • the diaphragm is composed of two individual blade portions.
  • the piezoelectric element is attached to the two slats in the same manner.
  • the support supports the two slats connected in parallel.
  • FIG. 6 The piezoelectric fan shown in FIG. 6 was devised by the inventors of the present application with Patent Documents 1 and 2 as the prior art.
  • 6A is an external perspective view of the piezoelectric fan 10P
  • FIG. 6B is a plan view of the piezoelectric fan 10P
  • FIG. 6C is a side view of the piezoelectric fan 10P.
  • the piezoelectric fan 10P includes a diaphragm 11, piezoelectric elements 121, 122, 123, 131, 132, 133 and support bodies 141P, 142P.
  • the main body fixing holes 151 and 152 are provided for fixing the main body of the piezoelectric fan 10P to, for example, a housing to which air is blown. In FIG. 5, the piezoelectric elements 131 and 132 are not shown.
  • the diaphragm 11 is integrally formed from three wing plate portions 111, 112, 113 and a base portion 110P.
  • the wing plate portions 111, 112, and 113 are arranged in the order of the wing plate portion 112, the wing plate portion 111, and the wing plate portion 113 along the longitudinal direction of the base portion 110P.
  • a piezoelectric element 121 is attached to one flat plate surface of the wing plate portion 111, and a piezoelectric element 131 is attached to the other flat plate surface of the wing plate portion 111.
  • a piezoelectric element 122 is attached to one flat plate surface of the wing plate portion 112, and a piezoelectric element 132 is attached to the other flat plate surface of the wing plate portion 112.
  • a piezoelectric element 123 is attached to one flat plate surface of the wing plate portion 113, and a piezoelectric element 133 is attached to the other flat plate surface of the wing plate portion 113.
  • each piezoelectric element and the direction of the applied voltage are set so that the central wing plate portion 111 and the left and right wing plate portions 112 and 113 vibrate in opposite phases.
  • the piezoelectric fan 10P operates as described above.
  • Supporters 141P and 142P support diaphragm 11 by sandwiching diaphragm 11 from both planes of base portion 110P.
  • the body fixing holes 151 and 152 pass through the base portion 110P and the support bodies 141P and 142P.
  • the piezoelectric fan 10 ⁇ / b> P is screwed to a housing or the like as a blowing destination by screws inserted into the main body fixing holes 151 and 152, for example.
  • the base portion 110P and the supports 141P and 142P are bonded with an adhesive.
  • the screws are inserted into the main body fixing holes 151 and 152 to be fixed to the external casing (the casing to which the piezoelectric fan is attached).
  • the plate 11 is electrically connected to the external housing.
  • noise may propagate to the diaphragm 11 via the external housing.
  • the driving signal of the piezoelectric element is disturbed by the noise, and desired vibration cannot be obtained.
  • An object of the present invention is to provide a piezoelectric fan that can prevent conduction between a diaphragm and an external housing and stably obtain desired vibration.
  • the piezoelectric fan of the present invention has the following characteristics.
  • the piezoelectric fan includes a diaphragm having a base portion and a wing plate portion, a piezoelectric element attached to the wing plate portion, a holding member that has a support portion and a body fixing portion and supports the base portion by the support portion. .
  • the main body fixing portion of the holding member is provided extending from the support portion.
  • the main body fixing hole formed in the main body fixing portion is formed in a portion where the diaphragm and the support do not contact each other.
  • the piezoelectric fan of the present invention it is preferable that there are a plurality of blade portions and the main body fixing portion is provided between the plurality of blade portions.
  • the main body fixing portion is provided closer to the wing plate portion than the base portion in a plan view of the diaphragm.
  • the piezoelectric fan can be configured in a small size while realizing the above-described effects.
  • the piezoelectric fan of the present invention preferably has the following configuration.
  • the plurality of wing plate portions are three and are arranged side by side along the longitudinal direction of the support portion.
  • the slats at both ends in the arrangement direction and the slats at the center in the arrangement direction are driven to vibrate in opposite phases.
  • This configuration shows a more specific configuration example of the piezoelectric fan.
  • the vibration of each slat is canceled by the base, and the vibration is not propagated to the outside.
  • a desired drive signal is more reliably applied to each wing plate portion, so that vibration can be more reliably offset.
  • the holding member is made of an insulating material.
  • the holding member is electrically insulated from the outside, it is possible to prevent noise from being superimposed on the drive signal through the holding member.
  • the present invention it is possible to reliably insulate the diaphragm from the external housing and stably obtain the desired vibration.
  • FIG. 1 is an external perspective view, a plan view, a side view, and a cross-sectional view of a piezoelectric fan 10 according to a first embodiment of the present invention. It is a figure which shows the drive concept of the piezoelectric fan 10 which concerns on the 1st Embodiment of this invention. It is a top view of holding member 142 concerning a 1st embodiment of the present invention. It is the external appearance perspective view of the piezoelectric fan 10A which concerns on the 2nd Embodiment of this invention, a top view, and a side view. It is the external appearance perspective view of the piezoelectric fan 10B which concerns on the 3rd Embodiment of this invention, a top view, and a side view. It is the external appearance perspective view of the piezoelectric fan 10P which concerns on the comparative example of this invention, a top view, and a side view.
  • FIG. 1A is an external perspective view of the piezoelectric fan 10 according to the first embodiment of the present invention.
  • FIG. 1B is a plan view of the piezoelectric fan 10 according to the first embodiment of the present invention.
  • FIG. 1C is a side view of the piezoelectric fan 10 according to the first embodiment of the present invention.
  • FIG. 1D is a cross-sectional view taken along the line A-A ′ of the piezoelectric fan 10 according to the first embodiment of the present invention.
  • FIG. 2 is a diagram illustrating a driving concept of the piezoelectric fan 10 according to the first embodiment of the present invention.
  • FIG. 3 is a plan view of the holding member 142 according to the first embodiment of the present invention.
  • the piezoelectric fan 10 includes a diaphragm 11, piezoelectric elements 121, 122, 123, 131, 132, 133, and a holding unit 14.
  • the diaphragm 11 is a flat plate having a first flat plate surface and a second flat plate surface facing each other and having a predetermined rigidity, and is made of, for example, SUS (stainless steel) having a thickness of 0.1 mm.
  • the diaphragm 11 is integrally formed from three wing plate portions 111, 112, 113 and a base portion 110.
  • the wing plate portions 111, 112, 113 and the base portion 110 are each a long flat plate.
  • the wing plate portions 111, 112, and 113 are connected to the base portion 110 at a predetermined interval along the longitudinal direction of the base portion 110.
  • the wing plate portions 111, 112, and 113 are connected in the order of the wing plate portion 112, the wing plate portion 111, and the wing plate portion 113 along the longitudinal direction of the base portion 110.
  • the longitudinal direction of the wing plate portions 111, 112, 113 is orthogonal to the longitudinal direction of the base portion 110, that is, the arrangement direction of the wing plate portions 111, 112, 113.
  • the end portions of the wing plate portions 111, 112, 113 on the side connected to the base portion 110 become fixed ends of the wing plate portions 111, 112, 113.
  • the ends of the wing plate portions 111, 112, 113 opposite to the fixed ends are free ends.
  • the width (length in the short direction) of the wing plate portions 111, 112, and 113 varies along the longitudinal direction. Specifically, the width on the fixed end side of the wing plate portions 111, 112, 113 is shorter than the width on the free end side of the wing plate portions 111, 112, 113. Thereby, when the diaphragm 11 is viewed in plan (viewed from a direction orthogonal to the first flat plate surface and the second flat plate surface), a gap is formed between the wing plate portion 111 and the wing plate portion 112, A gap having a predetermined interval is formed between the wing plate portion 111 and the wing plate portion 113.
  • the slats 112 and 113 at both ends have the same shape.
  • the width of the central wing plate portion 111 along the arrangement direction is approximately twice the width of the wing plate portions 112 and 113 at both ends along the arrangement direction.
  • the piezoelectric element 121 is attached to the first flat plate surface of the wing plate portion 111.
  • the piezoelectric element 131 is attached to the second flat plate surface (the surface opposite to the first flat plate surface) of the wing plate portion 111.
  • the piezoelectric element 122 is attached to the first flat plate surface of the wing plate portion 112.
  • the piezoelectric element 132 is attached to the second flat plate surface of the wing plate portion 112.
  • the piezoelectric element 123 is attached to the first flat plate surface of the wing plate portion 113.
  • the piezoelectric element 133 is attached to the second flat plate surface of the wing plate portion 113.
  • the piezoelectric elements 121, 122, 123, 131, 132, 133 are long flat plates. Each piezoelectric element is polarized in a direction orthogonal to the flat plate surface. On the flat plate surface of each piezoelectric element, an electrode for applying a drive signal is formed (not shown).
  • Each piezoelectric element includes, for example, a piezoelectric body made of lead zirconate titanate-based ceramics and electrodes formed on both main surfaces of the piezoelectric body.
  • the diaphragm 11 side electrode can be omitted by using the diaphragm 11 as a conductor.
  • the polarization direction of the piezoelectric element 121 is opposite to the polarization direction of the piezoelectric elements 122 and 123. Further, the polarization direction of the piezoelectric element 131 is opposite to the polarization direction of the piezoelectric elements 132 and 133. Further, the polarization direction of the piezoelectric element 121 and the polarization direction of the piezoelectric element 131 are the same.
  • the wing plate portion 111 and the wing plate portions 112, 113 vibrate in opposite phases.
  • the vibrations of the wing plate portion 111 and the wing plate portions 112 and 113 cancel each other, so that the vibration is suppressed.
  • the holding unit 14 includes a support 141 and a holding member 142.
  • the support body 141 is formed of a flat plate that is substantially the same as the base portion 110.
  • the support 141 is made of an insulating material such as glass epoxy resin.
  • the support body 141 is attached to the first flat plate surface of the base portion 110 so that the longitudinal direction thereof coincides with the base portion 110.
  • the holding member 142 is integrally formed from the support portion 160 and the main body fixing portions 161 and 162.
  • the holding member 142 is made of an insulating material such as glass epoxy resin, for example.
  • an insulating material such as glass epoxy resin, for example.
  • the support portion 160 is formed of a long plate that is substantially the same as the base portion 110.
  • the main body fixing portions 161 and 162 protrude from end faces parallel to the longitudinal direction of the flat plate surface of the support 160.
  • the main body fixing portions 161 and 162 are located substantially apart from each other by the width of the wing plate portion 111.
  • the main body fixing portions 161 and 162 are formed with main body fixing holes 151 and 152, respectively.
  • the piezoelectric fan 10 is screwed into an external housing such as a blower housing by metal screws or the like inserted into the main body fixing holes 151 and 152.
  • the holding member 142 is attached to the second flat plate surface of the base portion 110 so that the longitudinal directions of the support portion 160 and the base portion 110 coincide.
  • the main body fixing portion 161 is located in the gap between the wing plate portion 111 and the wing plate portion 112, and the main body fixing portion 162 is located in the gap between the wing plate portion 111 and the wing plate portion 113. ing.
  • the holding member 142 is attached to the diaphragm 11 by bonding the support portion 160 and the base portion 110 with an adhesive. Since the main body fixing holes 151 and 152 are not formed in the support portion 160, the main body fixing holes 151 and 152 are not likely to be blocked by the adhesive. Therefore, the adhesiveness between the support portion and the diaphragm can be improved without affecting the main body fixing hole.
  • the main body fixing portions 161 and 162 are located in a gap formed between the slats. This formation is more preferable because the outer shape of the piezoelectric fan 10 does not increase.
  • the main body fixing portions 161 and 162 are formed of an insulating material such as glass epoxy resin, for example. Thereby, even if the piezoelectric fan 10 is fixed by a conductor such as a metal screw, the conductor and the vibration plate 11 are electrically insulated by the main body fixing portions 161 and 162. Therefore, a structure for applying a desired voltage to the diaphragm from the outside can be easily realized.
  • FIG. 4A is an external perspective view of a piezoelectric fan 10A according to the second embodiment of the present invention.
  • FIG. 4B is a plan view of a piezoelectric fan 10A according to the second embodiment of the present invention.
  • FIG. 4C is a side view of the piezoelectric fan 10A according to the second embodiment of the present invention.
  • the piezoelectric fan 10A of the second embodiment has the same configuration as the piezoelectric fan 10 shown in the first embodiment except that the support 141 is not provided. In the second embodiment, the same effect as that of the first embodiment can be obtained.
  • FIG. 5A is an external perspective view of a piezoelectric fan 10B according to the third embodiment of the present invention.
  • FIG. 5B is a plan view of a piezoelectric fan 10B according to the third embodiment of the present invention.
  • FIG. 5C is a side view of the piezoelectric fan 10B according to the third embodiment of the present invention.
  • the piezoelectric fan 10B according to the third embodiment includes a holding unit 14B instead of the holding unit 14 of the first embodiment.
  • the holding part 14B includes a holding member 142B having main body fixing parts 161B and 162B.
  • the main body fixing portions 161B and 162B are located on the side where the wing plate portions 111, 112 and 113 do not protrude from the base portion 110.
  • the shape and arrangement of the main body fixing portion are not limited to the above embodiment.
  • the number of blade portions constituting the diaphragm is not limited to the above embodiment.
  • the piezoelectric element is composed of lead zirconate titanate ceramics, but is not limited thereto.
  • the piezoelectric elements are attached to both flat surfaces of the diaphragm (bimorph type), but the piezoelectric elements may be attached to one flat surface of the diaphragm (unimorph type).

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  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Structures Of Non-Positive Displacement Pumps (AREA)

Abstract

L'invention porte sur un ventilateur piézoélectrique, dans lequel la vibration de sections de pale n'est pas affectée par un bruit extérieur. Un ventilateur piézoélectrique (10) comprend une plaque vibrante (11), dans laquelle des sections de pale (111, 112, 113) et une section de base (110) sont formées en une seule pièce. Des éléments piézoélectriques (121, 131) sont attachés au côté section de base (110) de la section de pale (111). Des éléments piézoélectriques (122, 132) sont attachés au côté section de base (110) de la section de pale (112). Des éléments piézoélectriques (123, 133) sont attachés au côté section de base (110) de la section de pale (113). Une section de retenue (14) est formée d'un corps de support long (141) et d'un élément de retenue long (142), qui prennent la section de base (110) en sandwich. L'élément de retenue (142) est muni d'une section de support longue (160) et de sections de fixation de corps principal (161, 162) dans lesquelles sont formés des trous de fixation de corps principal (151, 152), respectivement. Les sections de fixation de corps principal (161, 162) sont formées dans des formes qui s'étendent à partir de la section de support (160).
PCT/JP2013/057998 2012-04-17 2013-03-21 Ventilateur piézoélectrique WO2013157346A1 (fr)

Priority Applications (2)

Application Number Priority Date Filing Date Title
JP2014511149A JP5892240B2 (ja) 2012-04-17 2013-03-21 圧電ファン
US14/506,721 US20150023819A1 (en) 2012-04-17 2014-10-06 Piezoelectric fan

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2012093524 2012-04-17
JP2012-093524 2012-04-17

Related Child Applications (1)

Application Number Title Priority Date Filing Date
US14/506,721 Continuation US20150023819A1 (en) 2012-04-17 2014-10-06 Piezoelectric fan

Publications (1)

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WO2013157346A1 true WO2013157346A1 (fr) 2013-10-24

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US (1) US20150023819A1 (fr)
JP (1) JP5892240B2 (fr)
WO (1) WO2013157346A1 (fr)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2015062137A1 (fr) * 2013-10-28 2015-05-07 广州市番禺奥迪威电子有限公司 Ventilateur de type piézoélectrique à courant continu
WO2015096470A1 (fr) * 2013-12-26 2015-07-02 华为技术有限公司 Module et système de dissipation thermique, procédé de commande et dispositif associé
CN105101736A (zh) * 2014-05-12 2015-11-25 联想(北京)有限公司 一种气流加速装置和电子设备

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Publication number Priority date Publication date Assignee Title
GB201220471D0 (en) * 2012-11-14 2012-12-26 Technology Partnership The Pump
DE102017211103A1 (de) * 2017-06-29 2019-01-03 E.G.O. Elektro-Gerätebau GmbH Lüftungsvorrichtung für ein Elektrogerät und Elektrogerät mit einer solchen Lüftungsvorrichtung
JP2023097782A (ja) * 2021-12-28 2023-07-10 エルジー ディスプレイ カンパニー リミテッド 装置

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JPH0335298U (fr) * 1989-08-10 1991-04-05
JP2002364599A (ja) * 2001-06-08 2002-12-18 Nippon Keiki Works Ltd 薄型冷却ファン

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JPS63162999U (fr) * 1987-04-13 1988-10-25
JPH0335298U (fr) * 1989-08-10 1991-04-05
JP2002364599A (ja) * 2001-06-08 2002-12-18 Nippon Keiki Works Ltd 薄型冷却ファン

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2015062137A1 (fr) * 2013-10-28 2015-05-07 广州市番禺奥迪威电子有限公司 Ventilateur de type piézoélectrique à courant continu
WO2015096470A1 (fr) * 2013-12-26 2015-07-02 华为技术有限公司 Module et système de dissipation thermique, procédé de commande et dispositif associé
CN105101736A (zh) * 2014-05-12 2015-11-25 联想(北京)有限公司 一种气流加速装置和电子设备

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JP5892240B2 (ja) 2016-03-23
US20150023819A1 (en) 2015-01-22
JPWO2013157346A1 (ja) 2015-12-21

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