WO2013125791A1 - Système pour séparer et réutiliser un composé de perfluorocarbone - Google Patents

Système pour séparer et réutiliser un composé de perfluorocarbone Download PDF

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Publication number
WO2013125791A1
WO2013125791A1 PCT/KR2013/000477 KR2013000477W WO2013125791A1 WO 2013125791 A1 WO2013125791 A1 WO 2013125791A1 KR 2013000477 W KR2013000477 W KR 2013000477W WO 2013125791 A1 WO2013125791 A1 WO 2013125791A1
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WO
WIPO (PCT)
Prior art keywords
nitrogen
sulfur hexafluoride
exhaust gas
filter
water
Prior art date
Application number
PCT/KR2013/000477
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English (en)
Korean (ko)
Inventor
노영석
Original Assignee
(주) 파인텍
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by (주) 파인텍 filed Critical (주) 파인텍
Publication of WO2013125791A1 publication Critical patent/WO2013125791A1/fr

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    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D53/00—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols
    • B01D53/34—Chemical or biological purification of waste gases
    • B01D53/46—Removing components of defined structure
    • B01D53/68—Halogens or halogen compounds
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D53/00—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols
    • B01D53/02—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols by adsorption, e.g. preparative gas chromatography
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D53/00—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols
    • B01D53/34—Chemical or biological purification of waste gases
    • B01D53/74—General processes for purification of waste gases; Apparatus or devices specially adapted therefor
    • B01D53/75—Multi-step processes
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D53/00—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols
    • B01D53/34—Chemical or biological purification of waste gases
    • B01D53/74—General processes for purification of waste gases; Apparatus or devices specially adapted therefor
    • B01D53/77—Liquid phase processes
    • B01D53/78—Liquid phase processes with gas-liquid contact
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D2257/00—Components to be removed
    • B01D2257/20—Halogens or halogen compounds
    • B01D2257/204—Inorganic halogen compounds
    • B01D2257/2047—Hydrofluoric acid
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D2258/00—Sources of waste gases
    • B01D2258/02—Other waste gases
    • B01D2258/0216—Other waste gases from CVD treatment or semi-conductor manufacturing
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02C—CAPTURE, STORAGE, SEQUESTRATION OR DISPOSAL OF GREENHOUSE GASES [GHG]
    • Y02C20/00—Capture or disposal of greenhouse gases
    • Y02C20/30—Capture or disposal of greenhouse gases of perfluorocarbons [PFC], hydrofluorocarbons [HFC] or sulfur hexafluoride [SF6]

Definitions

  • the present invention relates to a separation and recycling system of perfluorinated compounds, and more specifically, to develop a method for effectively separating and removing or recycling perfluorinated compounds including sulfur hexafluoride mainly generated in a semiconductor production process.
  • the present invention relates to a separation and recycling system for purified perfluorinated compounds.
  • sulfur hexafluoride is formed by using a plasma apparatus to produce F- ions, and the etching process reacts with an insulator and etches it.
  • CVD cleaning process chamber cleaning
  • insulator plasma etching method
  • the current gas scrubber technology has a method of removing at a high temperature by electricity and fuel, a chemical treatment method, and a plasma treatment method, but each has problems such as high operating cost, large-capacity treatment, or low processing efficiency. It was a situation to have.
  • the present invention was developed to solve the above problems, the object of the perfluorinated compound separation and recycling system that can easily separate and remove various gases and dust including perfluorinated compounds generated in the electronics industry It's about developing.
  • the present invention uses a perfluorinated compound, such as a dry etching process and a CVD cleaning chamber, or separates and recycles a perfluorinated compound for treating a gas including dust generated in a flue gas generating facility.
  • a perfluorinated compound such as a dry etching process and a CVD cleaning chamber
  • the first chamber the water filled in the lower portion of the first chamber, the exhaust gas inlet through which the exhaust gas sucked from the first dry pump flows directly above the water surface, and the exhaust gas introduced into the exhaust gas inlet rises to pass therethrough.
  • An alkaline adsorbent layer a plurality of water spray nozzles into which a portion of the water filled in the lower part flows, and spraying water to the upper portion of the alkaline adsorbent layer, a water adsorption filter formed on the water spray nozzles, and the water adsorption filter
  • a pretreatment filter composed of an exhaust gas discharge part formed at an upper portion of the exhaust gas;
  • a plurality of separation holes having a diameter of 3 to 4 angstroms is formed in the second chamber and at least one inside of the second chamber, and the exhaust gas passing through the pretreatment filter is introduced so that nitrogen is separated into the separation holes.
  • a membrane separation filter which passes through and is discharged to the nitrogen discharge unit and does not pass through the sulfur hexafluoride to discharge to the sulfur hexafluoride discharge unit for combustion;
  • a second dry pump for sucking nitrogen discharged to the nitrogen discharge unit, a nitrogen discharge pipe for discharging nitrogen into the atmosphere, a nitrogen tank filled with nitrogen, and a resupply supplying nitrogen to the tank from the second dry pump It is characterized by consisting of a nitrogen recycling supply unit consisting of a pipe and a nitrogen supply pipe for supplying nitrogen from the nitrogen tank to the first dry pump.
  • a sulfur hexafluoride recycling supply unit configured to include a sulfur hexafluoride tank filled with sulfur hexafluoride discharged to the sulfur hexafluoride discharge unit and a sulfur hexafluoride supply pipe for supplying sulfur hexafluoride to one or more flue gas generating facilities is formed. It is characterized by.
  • the pre-treatment filter is characterized in that the PM filter.
  • the present invention makes it possible to easily remove various dusts and other gases as well as greenhouse gases, which are the main culprit of greenhouse gases, in stages by a pretreatment filter and a membrane separation filter, thereby drastically reducing the amount of air pollution and greenhouse gas emissions. It can be effective.
  • the sulfur hexafluoride is separated by nitrogen and the membrane separation filter and then reused in the exhaust gas generating facility to reduce the operating cost and to recycle the raw materials.
  • FIG. 2 is a conceptual diagram illustrating a structure of a preprocessing filter according to an embodiment of the present invention.
  • FIG. 3 is a conceptual diagram illustrating a structure of a membrane separation filter according to an embodiment of the present invention.
  • FIG. 4 is a conceptual diagram according to another embodiment of the present invention.
  • FIG. 1 is a conceptual diagram according to an embodiment of the present invention
  • Figure 2 is a conceptual diagram showing the structure of a wet filter according to an embodiment of the present invention
  • Figure 3 is a structure of a membrane separation filter according to an embodiment of the present invention
  • the present application includes a first dry pump 2 for sucking exhaust gas generated in one or more flue gas generating facilities 1.
  • the exhaust gas refers to the discharged gas, and particularly in the dry etching process, sulfur hexafluoride ( ), Promethium (PM) and silicon tetrafluoride ( ) And oxygen ( )and, And various dusts are discharged.
  • nitrogen is mixed by the nitrogen recycling supply unit 5 described below to prevent damage to the apparatus. Configuration is essential.
  • the nitrogen-mixed exhaust gas is filled in the first chamber 31, the water 32 filled in the lower portion of the first chamber 31, and the first dry pump 2 directly above the water surface of the water 32.
  • the exhaust gas inlet 33 through which the sucked exhaust gas is introduced, the alkaline adsorbent layer 34 allowing the exhaust gas introduced into the exhaust gas inlet 33 to rise, and a portion of the water filled in the lower portion are introduced into the alkaline property.
  • the pretreatment filter 3 is a wet filter as nitrogen ( ) And sulfur hexafluoride ( Promethium (PM) and silicon tetrafluoride ( ) And oxygen ( )and, And the first flue gas is acidic by adsorbing various dusts, and after purifying them, the final moisture adsorption filter 36 finally adsorbs the fine dust together with the moisture, and finally nitrogen ( ) And sulfur hexafluoride ( ) Will remain.
  • Such nitrogen ( ) And sulfur hexafluoride ( ) Is formed in the second chamber 41 and at least one inside the second chamber 41 to form a plurality of separation holes 42 having a diameter of 3 to 4 angstroms. 3) After passing through the exhaust gas, the nitrogen passes through the separation hole 42 and is discharged to the nitrogen discharge part 43, and the sulfur hexafluoride does not pass and discharges to the sulfur hexafluoride discharge part 44 to burn. Pass through the separation filter (4).
  • the membrane separation filter (4) is a filter using the size of the particles in the case of nitrogen particle size 3 ohms ( ⁇ ) and in the case of sulfur hexafluoride (5 ohms) to exit the separation hole 42 only nitrogen It is a structure to make it possible.
  • Omstrom ( ⁇ ) refers to the length of 0.1 nanometers.
  • Nitrogen recycling supply unit 5 consisting of a nitrogen supply pipe (55) to recycle and circulate, and nitrogen can be selectively discharged or recycled because it is a gas that does not matter at all in the atmosphere.
  • FIG. 4 is a conceptual diagram according to another embodiment of the present invention, wherein the sulfur hexafluoride tank 61 filled with sulfur hexafluoride discharged to the sulfur hexafluoride discharge unit 44 and one or more flue gas generating facilities 1
  • a sulfur hexafluoride recycling supply unit 6 including a sulfur hexafluoride supply pipe 62 for supplying sulfur fluoride is further formed is provided.
  • the above embodiment proposes a method for storing and recycling high-purity sulfur hexafluoride gas by connecting sulfur hexafluoride gas mainly used in a nicking process with a system for separating perfluorinated compounds.
  • the sulfur hexafluoride tank (61) is shown in the form of being directly connected to the sulfur hexafluoride supply pipe (62), but this may be supplied by direct piping and supplied to each industrial site in a separate storage facility using a vehicle or the like. It is presented a flow.
  • FIG. 5 is a conceptual diagram according to another embodiment of the present invention, in which the pretreatment filter 3 is an embodiment consisting of a PM filter 3 '.
  • the embodiment is to use the PM filter (3 '), which is a chemical filter having a dry characteristic rather than a wet filter, the method is different but serves to remove gas and various dusts except nitrogen and sulfur hexafluoride.
  • PM filter 31 first chamber
  • alkaline adsorbent layer 35 water spray nozzle

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  • Engineering & Computer Science (AREA)
  • Chemical & Material Sciences (AREA)
  • Environmental & Geological Engineering (AREA)
  • Analytical Chemistry (AREA)
  • General Chemical & Material Sciences (AREA)
  • Oil, Petroleum & Natural Gas (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Health & Medical Sciences (AREA)
  • Biomedical Technology (AREA)
  • Treating Waste Gases (AREA)

Abstract

La présente invention concerne un système pour séparer et réutiliser un composé de perfluorocarbone, mis au point pour séparer, éliminer et réutiliser de manière efficace un composé de perfluorocarbone comprenant de l'hexafluorure de soufre, le composé de perfluorocarbone étant généré principalement pendant la fabrication de semiconducteurs. Le système pour séparer et réutiliser un composé de perfluorocarbone qui utilise du gaz comprenant de la poussière générée par des installations émettant des gaz d'échappement utilisant ou générant des perfluorocarbones, telle qu'une chambre de gravure à sec et de nettoyage par dépôt chimique en phase vapeur, comprend une première pompe désamorcée, un filtre de pré-traitement, un filtre de séparation par membrane, une unité d'alimentation à recyclage de l'azote, une unité d'alimentation à recyclage de hexafluorure de soufre et une unité de commande. Ainsi, ce système facilite la séparation et l'extraction d'une variété de gaz et de poussière comprenant des perfluorocarbones générés par l'industrie de l'électronique, et il permet le recyclage de l'hexafluorure de soufre par séparation de ce dernier du gaz d'échappement puis retraitement.
PCT/KR2013/000477 2012-02-23 2013-01-21 Système pour séparer et réutiliser un composé de perfluorocarbone WO2013125791A1 (fr)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
KR1020120018421A KR101410712B1 (ko) 2012-02-23 2012-02-23 과불화화합물의 분리 및 재활용시스템
KR10-2012-0018421 2012-02-23

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US15/407,849 Continuation US11034418B2 (en) 2012-05-12 2017-01-17 System and method for fuel savings and safe operation of marine structure

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WO2013125791A1 true WO2013125791A1 (fr) 2013-08-29

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Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN109432965A (zh) * 2018-10-19 2019-03-08 高立伟 一种工业尾气处理再利用装置

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR101638325B1 (ko) * 2014-09-03 2016-07-12 노영석 분리막시스템과 스크러버가 일체로 이루어지는 과불화화합물 분리시스템
CN104399343B (zh) * 2014-11-21 2015-12-02 浙江稽山印染有限公司 一种定型机的废气处理装置

Citations (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH09285719A (ja) * 1996-04-23 1997-11-04 Mitsubishi Electric Corp 六弗化硫黄ガスの回収再生装置、ならびに、移動式回収再生装置
KR19990007129A (ko) * 1997-06-20 1999-01-25 나카노 기요구라 Sf 6 가스 회수. 정제 처리장치 및 방법
JP2000005561A (ja) * 1998-06-18 2000-01-11 Nippon Sanso Kk フッ化物の処理方法
KR100266460B1 (ko) * 1995-07-17 2000-09-15 쉬에르 피에르 퍼플루오로화합물 기체를 분리 및 회수하기 위한방법 및 시스템
JP2001103626A (ja) * 1999-09-30 2001-04-13 Toshiba Corp ガス回収装置
KR20020010488A (ko) * 2000-07-26 2002-02-04 마에다 히로카쓰 가스 분리장치
JP2004123419A (ja) * 2002-09-30 2004-04-22 Mitsubishi Electric Corp 六弗化硫黄ガス再生装置
JP2005185897A (ja) * 2003-12-24 2005-07-14 Central Glass Co Ltd 六フッ化硫黄ガスの処理方法

Patent Citations (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100266460B1 (ko) * 1995-07-17 2000-09-15 쉬에르 피에르 퍼플루오로화합물 기체를 분리 및 회수하기 위한방법 및 시스템
JPH09285719A (ja) * 1996-04-23 1997-11-04 Mitsubishi Electric Corp 六弗化硫黄ガスの回収再生装置、ならびに、移動式回収再生装置
KR19990007129A (ko) * 1997-06-20 1999-01-25 나카노 기요구라 Sf 6 가스 회수. 정제 처리장치 및 방법
JP2000005561A (ja) * 1998-06-18 2000-01-11 Nippon Sanso Kk フッ化物の処理方法
JP2001103626A (ja) * 1999-09-30 2001-04-13 Toshiba Corp ガス回収装置
KR20020010488A (ko) * 2000-07-26 2002-02-04 마에다 히로카쓰 가스 분리장치
JP2004123419A (ja) * 2002-09-30 2004-04-22 Mitsubishi Electric Corp 六弗化硫黄ガス再生装置
JP2005185897A (ja) * 2003-12-24 2005-07-14 Central Glass Co Ltd 六フッ化硫黄ガスの処理方法

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN109432965A (zh) * 2018-10-19 2019-03-08 高立伟 一种工业尾气处理再利用装置

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KR20130096876A (ko) 2013-09-02
KR101410712B1 (ko) 2014-06-24

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