WO2013121850A1 - 蛍光センサおよびセンサシステム - Google Patents
蛍光センサおよびセンサシステム Download PDFInfo
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- WO2013121850A1 WO2013121850A1 PCT/JP2013/051419 JP2013051419W WO2013121850A1 WO 2013121850 A1 WO2013121850 A1 WO 2013121850A1 JP 2013051419 W JP2013051419 W JP 2013051419W WO 2013121850 A1 WO2013121850 A1 WO 2013121850A1
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- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
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- G01N21/63—Systems in which the material investigated is excited whereby it emits light or causes a change in wavelength of the incident light optically excited
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- G01N21/62—Systems in which the material investigated is excited whereby it emits light or causes a change in wavelength of the incident light
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- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
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- G01N21/62—Systems in which the material investigated is excited whereby it emits light or causes a change in wavelength of the incident light
- G01N21/63—Systems in which the material investigated is excited whereby it emits light or causes a change in wavelength of the incident light optically excited
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- G01N21/63—Systems in which the material investigated is excited whereby it emits light or causes a change in wavelength of the incident light optically excited
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Abstract
Description
小型の蛍光光度計は、光源と光検出器と蛍光色素を含有したインジケータとを有している。そして、被計測溶液中のアナライトが出入り自在なインジケータに光源からの励起光を照射し、インジケータが発生する蛍光を光検出器が受光する。光検出器は光電変換素子であり、受光強度に応じた電気信号を出力する。光検出器からの電気信号をもとに溶液中のアナライト濃度が算出される。
最初に、本発明の第1実施形態の蛍光センサ30およびセンサシステム1について説明する。図3に示すように、センサシステム1は、蛍光センサ30と、本体部40と、本体部40からの信号を受信し記憶するレシーバー45と、を有する。本体部40とレシーバー45との間の信号の送受信は無線または有線で行われる。
次に、図4および図5を用いて、蛍光センサ30の主要機能部であるセンサ部10の構造について説明する。なお、図は、いずれも説明のための模式図であり、縦横の寸法比等は実際とは異なっており、一部の構成要素を図示しない場合もある。また、図4および図5に示すZ軸方向を上方向という。
次に、図6A~図6Gを用いて、蛍光センサ30の製造方法について簡単に説明する。なお、図6A~図6Gは1個の蛍光センサ30のセンサ部10の領域の部分断面図であるが、実際の工程では、ウエハプロセスとして一括して多数の蛍光センサ30のセンサ部10が作製される。
次に、蛍光センサ30の動作を説明する。
第1実施形態の蛍光センサ30は、貫通孔21の壁面22が第1の主面11SA(第2の主面11SB)に対して略垂直であった。これに対して、図7に示すように、第1実施形態の変形例のセンサシステム1Aの蛍光センサ30Aは、センサ部10Aの検出基板部11Aの貫通孔21Aの壁面22Aが、テーパーのある形状、すなわち、壁面が主面に対して、所定の角度θで傾斜しており、第1の主面11SAの開口が、第2の主面11SBの開口よりも大きい。壁面22Aがテーパー形状の貫通孔21Aは、水酸化テトラメチルアンモニウム(TMAH)水溶液、水酸化カリウム(KOH)水溶液などを用いるウエットエッチング等により形成することができる。
次に、第2実施形態のセンサシステム1Bおよび蛍光センサ30Bについて説明する。蛍光センサ30B等は蛍光センサ30等と類似しているので同じ構成要素には同じ符号を付し説明は省略する。
Claims (8)
- 第1の主面と第2の主面とを貫通する貫通孔の壁面に、蛍光を電気信号に変換する光電変換素子が形成されている検出基板部と、
前記貫通孔の内部に配設された、励起光を受光するとアナライトの濃度に応じた強度の前記蛍光を発生するインジケータと、
前記光電変換素子を覆う、前記蛍光を透過し前記励起光を遮断するフィルタ層と、
前記貫通孔の前記第1の主面の開口を覆う前記アナライトが通過可能な遮光層と、
前記貫通孔の前記第2の主面の開口の直下領域を覆う前記励起光を発生する発光素子チップと、を具備することを特徴とする蛍光センサ。 - 前記検出基板部、前記フィルタ層、前記インジケータ、前記遮光層および前記発光素子チップを含むセンサ部を針先端部に有する針型センサであることを特徴とする請求項1に記載の蛍光センサ。
- 前記第2の主面に、前記光電変換素子と接続された検出信号配線と、前記発光素子チップと接続された駆動信号配線と、が配設されていることを特徴とする請求項2に記載の蛍光センサ。
- 前記フィルタ層が前記第2の主面にも配設されていることを特徴とする請求項3に記載の蛍光センサ。
- 前記貫通孔の前記壁面がテーパー形状であることを特徴とする請求項4に記載の蛍光センサ。
- 前記第2の主面に第2の光電変換素子が形成されており、
前記発光素子チップが、前記第2の主面の前記開口の前記直下領域および前記第2の光電変換素子の直下領域を覆うことを特徴とする請求項1に記載の蛍光センサ。 - 前記光電変換素子からの前記電気信号が、前記第2の光電変換素子からの電気信号を用いて、補正されることを特徴とする請求項6に記載の蛍光センサ。
- 第1の主面と第2の主面とを貫通する貫通孔の壁面に蛍光を電気信号に変換する第1の光電変換素子が形成されているとともに、前記第2の主面に第2の光電変換素子が形成されている検出基板部と、
前記貫通孔の内部に配設された、アナライトに反応し励起光を受光すると前記アナライトの濃度に応じた強度の前記蛍光を発生するインジケータと、
前記貫通孔の前記第1の主面の開口を覆う前記アナライトが通過可能な遮光層と、
前記第2の主面の前記開口の前記直下領域および前記第2の光電変換素子の直下領域を覆う前記励起光を発生する発光素子チップと、を含むセンサ部を、針先端部に有する針型センサと、
前記光電変換素子からの電気信号を、前記第2の光電変換素子からの電気信号を用いて、補正する演算部と、を具備することを特徴とするセンサシステム。
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CN109103744A (zh) * | 2018-09-03 | 2018-12-28 | 业成科技(成都)有限公司 | 发光装置及其制造方法 |
CN109738403A (zh) * | 2019-01-03 | 2019-05-10 | 必欧瀚生物技术(合肥)有限公司 | 一种荧光标准卡及荧光标准卡用荧光膜的制备方法 |
CN115399760A (zh) * | 2021-05-26 | 2022-11-29 | 南京微纳科技研究院有限公司 | 植入式探针及植入式传感器 |
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