JP5638343B2 - 蛍光センサ - Google Patents
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- JP5638343B2 JP5638343B2 JP2010238802A JP2010238802A JP5638343B2 JP 5638343 B2 JP5638343 B2 JP 5638343B2 JP 2010238802 A JP2010238802 A JP 2010238802A JP 2010238802 A JP2010238802 A JP 2010238802A JP 5638343 B2 JP5638343 B2 JP 5638343B2
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- JMASRVWKEDWRBT-UHFFFAOYSA-N Gallium nitride Chemical compound [Ga]#N JMASRVWKEDWRBT-UHFFFAOYSA-N 0.000 description 1
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- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 1
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- 150000004676 glycans Chemical class 0.000 description 1
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- 229910052698 phosphorus Inorganic materials 0.000 description 1
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- 229910052707 ruthenium Inorganic materials 0.000 description 1
- HBMJWWWQQXIZIP-UHFFFAOYSA-N silicon carbide Chemical compound [Si+]#[C-] HBMJWWWQQXIZIP-UHFFFAOYSA-N 0.000 description 1
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- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 1
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Classifications
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/62—Systems in which the material investigated is excited whereby it emits light or causes a change in wavelength of the incident light
- G01N21/63—Systems in which the material investigated is excited whereby it emits light or causes a change in wavelength of the incident light optically excited
- G01N21/64—Fluorescence; Phosphorescence
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/75—Systems in which material is subjected to a chemical reaction, the progress or the result of the reaction being investigated
- G01N21/77—Systems in which material is subjected to a chemical reaction, the progress or the result of the reaction being investigated by observing the effect on a chemical indicator
-
- A—HUMAN NECESSITIES
- A61—MEDICAL OR VETERINARY SCIENCE; HYGIENE
- A61B—DIAGNOSIS; SURGERY; IDENTIFICATION
- A61B5/00—Measuring for diagnostic purposes; Identification of persons
- A61B5/145—Measuring characteristics of blood in vivo, e.g. gas concentration, pH value; Measuring characteristics of body fluids or tissues, e.g. interstitial fluid, cerebral tissue
- A61B5/14532—Measuring characteristics of blood in vivo, e.g. gas concentration, pH value; Measuring characteristics of body fluids or tissues, e.g. interstitial fluid, cerebral tissue for measuring glucose, e.g. by tissue impedance measurement
-
- A—HUMAN NECESSITIES
- A61—MEDICAL OR VETERINARY SCIENCE; HYGIENE
- A61B—DIAGNOSIS; SURGERY; IDENTIFICATION
- A61B5/00—Measuring for diagnostic purposes; Identification of persons
- A61B5/145—Measuring characteristics of blood in vivo, e.g. gas concentration, pH value; Measuring characteristics of body fluids or tissues, e.g. interstitial fluid, cerebral tissue
- A61B5/1455—Measuring characteristics of blood in vivo, e.g. gas concentration, pH value; Measuring characteristics of body fluids or tissues, e.g. interstitial fluid, cerebral tissue using optical sensors, e.g. spectral photometrical oximeters
-
- A—HUMAN NECESSITIES
- A61—MEDICAL OR VETERINARY SCIENCE; HYGIENE
- A61B—DIAGNOSIS; SURGERY; IDENTIFICATION
- A61B5/00—Measuring for diagnostic purposes; Identification of persons
- A61B5/72—Signal processing specially adapted for physiological signals or for diagnostic purposes
- A61B5/7235—Details of waveform analysis
- A61B5/725—Details of waveform analysis using specific filters therefor, e.g. Kalman or adaptive filters
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/75—Systems in which material is subjected to a chemical reaction, the progress or the result of the reaction being investigated
- G01N21/77—Systems in which material is subjected to a chemical reaction, the progress or the result of the reaction being investigated by observing the effect on a chemical indicator
- G01N2021/7769—Measurement method of reaction-produced change in sensor
- G01N2021/7786—Fluorescence
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- Pathology (AREA)
- General Health & Medical Sciences (AREA)
- Public Health (AREA)
- Veterinary Medicine (AREA)
- Animal Behavior & Ethology (AREA)
- Surgery (AREA)
- Molecular Biology (AREA)
- Heart & Thoracic Surgery (AREA)
- Medical Informatics (AREA)
- Biophysics (AREA)
- Biomedical Technology (AREA)
- Chemical & Material Sciences (AREA)
- Optics & Photonics (AREA)
- Biochemistry (AREA)
- Immunology (AREA)
- General Physics & Mathematics (AREA)
- Analytical Chemistry (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Plasma & Fusion (AREA)
- Artificial Intelligence (AREA)
- Emergency Medicine (AREA)
- Computer Vision & Pattern Recognition (AREA)
- Physiology (AREA)
- Psychiatry (AREA)
- Signal Processing (AREA)
- Spectroscopy & Molecular Physics (AREA)
- Nuclear Medicine, Radiotherapy & Molecular Imaging (AREA)
- Investigating, Analyzing Materials By Fluorescence Or Luminescence (AREA)
- Investigating Or Analysing Materials By The Use Of Chemical Reactions (AREA)
Description
以下、本発明の第1実施形態の蛍光センサ10について説明する。
図3に示すように、蛍光センサ10を有する針型蛍光センサ4は、本体部2およびレシーバー3と、ともにセンサシステム1を構成する。
すなわち、PD素子13は、凹部23の側面24の少なくとも一部に、形成されていればよい。
別途、配線基板30となる導電性(N型)の第2のシリコンウエハ30Wが準備される。第2のシリコンウエハ30Wには、PD素子13からの検出信号を送信するための配線61、62およびLED素子12に駆動信号を供給するための配線63、64がスパッタ法または蒸着法等により形成される。
すると図6(D)に示すように、2枚のウエハが接合された接合ウエハ20Wでは、枠状基板40の貫通孔46は、底面22のある凹部23となる。
LED素子12は、例えば30秒に1回の間隔で中心波長が375nm前後の励起光Eをパルス発光する。例えば、LED素子12へのパルス電流は1mA〜100mAであり、発光のパルス幅は10ms〜100msである。
次に、本発明の第1実施形態の変形例の蛍光センサ10Aを有する針型蛍光センサ4Aについて説明する。本変形例の蛍光センサ10Aは第1実施形態の蛍光センサ10と類似しているため同じ構成要素には同じ符号を付し説明は省略する。
このため、例えば、LED素子12の厚さが100μm、凹部の深さが150μmの場合、蛍光センサ10のインジケータ層16の厚さは50μm以下である。
次に、本発明の第2実施形態の蛍光センサ10Bを有する針型蛍光センサ4Bについて説明する。本実施形態の蛍光センサ10Bは第1実施形態の蛍光センサ10と類似しているため同じ構成要素には同じ符号を付し説明は省略する。
次に、本発明の第2実施形態の変形例の蛍光センサ10Cを有する針型蛍光センサ4Cについて説明する。本変形例の蛍光センサ10Cは第2実施形態の蛍光センサ10Bと類似しているため同じ構成要素には同じ符号を付し説明は省略する。
次に、本発明の第3実施形態の変形例の蛍光センサ10Dを有する針型蛍光センサ4Dについて説明する。本変形例の蛍光センサ10Dは第1実施形態の蛍光センサ10等と類似しているため同じ構成要素には同じ符号を付し説明は省略する。
図10(A)に示すように、シリコンウエハ20DWの第1の主面21にマスク層27が作製される。そして、図10(B)に示すように、エッチング法により、第1の主面21と平行な底面22Dのある凹部23Dが形成される。
次に、本発明の第3実施形態の変形例の蛍光センサ10Eを有する針型蛍光センサ4Eについて説明する。本変形例の蛍光センサ10Eは第3実施形態の蛍光センサ10D等と類似しているため同じ構成要素には同じ符号を付し説明は省略する。
さらに、側面24Dおよび底面22Dに一体形成されたPD素子13Eは形成が容易であるだけでなく、検出信号のための配線が61E、62Eの2本でよい。また酸化シリコン層42Eおよびフィルタ41Eも側面24Dおよび底面22Dに一体形成できる。
次に、本発明の第4実施形態の蛍光センサ10F(10F1、10F2)を有する針型蛍光センサ4F(4F1、4F2)について説明する。本実施の形態の蛍光センサ10Fは第1実施形態の蛍光センサ10等と類似しているため同じ構成要素には同じ符号を付し説明は省略する。
Claims (10)
- 第1の主面に前記第1の主面と平行な底面のある凹部があり、前記凹部の側面の少なくとも一部に蛍光を受光し検出信号を出力する光電変換素子が形成されている検出基板部と、
前記検出基板部の前記凹部の前記底面に配設された、励起光Eを発生する発光素子と、
前記発光素子の上の前記凹部の内部に配設された、前記励起光とアナライト量とに応じた前記蛍光を発生するインジケータ層と、
を具備することを特徴とする蛍光センサ。 - 前記検出基板部が、配線基板と、貫通孔が形成され前記配線基板と接合された枠状基板と、からなり、
前記配線基板の表面が前記凹部の前記底面であり、前記枠状基板の前記貫通孔の壁面が前記凹部の前記側面であることを特徴とする請求項1に記載の蛍光センサ。 - 前記凹部が、半導体基板に形成された凹部であることを特徴とする請求項1に記載の蛍光センサ。
- 前記凹部の前記底面の少なくとも一部に、前記蛍光を受光し第2の検出信号を出力する第2の光電変換素子が形成されていることを特徴とする請求項1から請求項3のいずれか1項に記載の蛍光センサ。
- 前記第2の光電変換素子と、前記発光素子と、前記インジケータ層のそれぞれの中央部が前記凹部内の同一領域内に形成されていることを特徴とする請求項4に記載の蛍光センサ。
- 前記光電変換素子の検出信号と、前記第2の光電変換素子の第2の検出信号と、の合算検出信号を出力する配線を有することを特徴とする請求項4または請求項5に記載の蛍光センサ。
- 前記光電変換素子が、前記凹部の前記側面および前記底面に、一体的に形成されていることを特徴とする請求項1から請求項3のいずれか1項に記載の蛍光センサ。
- 前記凹部の前記側面および前記底面の前記光電変換素子上に、前記励起光をカットするフィルタが一体的に形成されていることを特徴とする請求項7に記載の蛍光センサ。
- 前記発光素子が発生する前記励起光の長波長成分をカットする長波長カットフィルタを有することを特徴とする請求項1から請求項8のいずれか1項に記載の蛍光センサ。
- 体外に配置される本体部の嵌合部と嵌合するコネクタ部を有し、体内のアナライトを計測する針型センサであることを特徴とする請求項1から請求項9のいずれか1項に記載の蛍光センサ。
Priority Applications (5)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2010238802A JP5638343B2 (ja) | 2010-10-25 | 2010-10-25 | 蛍光センサ |
EP11836125.2A EP2634562B1 (en) | 2010-10-25 | 2011-10-20 | Fluorescence sensor |
PCT/JP2011/074164 WO2012056989A1 (ja) | 2010-10-25 | 2011-10-20 | 蛍光センサ |
CN201180050482.6A CN103180720B (zh) | 2010-10-25 | 2011-10-20 | 荧光传感器 |
US13/869,213 US8853649B2 (en) | 2010-10-25 | 2013-04-24 | Fluorescence sensor |
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Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2010238802A JP5638343B2 (ja) | 2010-10-25 | 2010-10-25 | 蛍光センサ |
Publications (2)
Publication Number | Publication Date |
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JP2012093128A JP2012093128A (ja) | 2012-05-17 |
JP5638343B2 true JP5638343B2 (ja) | 2014-12-10 |
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JP2010238802A Active JP5638343B2 (ja) | 2010-10-25 | 2010-10-25 | 蛍光センサ |
Country Status (5)
Country | Link |
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US (1) | US8853649B2 (ja) |
EP (1) | EP2634562B1 (ja) |
JP (1) | JP5638343B2 (ja) |
CN (1) | CN103180720B (ja) |
WO (1) | WO2012056989A1 (ja) |
Families Citing this family (15)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2012093190A (ja) * | 2010-10-26 | 2012-05-17 | Olympus Corp | 蛍光センサの補正方法おび蛍光センサ |
JP2013040797A (ja) * | 2011-08-11 | 2013-02-28 | Olympus Corp | 蛍光センサ |
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