WO2013108437A1 - Dispositif de traitement au laser - Google Patents

Dispositif de traitement au laser Download PDF

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Publication number
WO2013108437A1
WO2013108437A1 PCT/JP2012/073932 JP2012073932W WO2013108437A1 WO 2013108437 A1 WO2013108437 A1 WO 2013108437A1 JP 2012073932 W JP2012073932 W JP 2012073932W WO 2013108437 A1 WO2013108437 A1 WO 2013108437A1
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WO
WIPO (PCT)
Prior art keywords
laser
work distance
range
scanning
workpiece
Prior art date
Application number
PCT/JP2012/073932
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English (en)
Japanese (ja)
Inventor
直哉 山崎
明久 松本
杉山　徹
正則 熊澤
康一 若子
井上　浩輔
Original Assignee
パナソニック デバイスＳｕｎｘ 株式会社
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
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Application filed by パナソニック デバイスＳｕｎｘ 株式会社 filed Critical パナソニック デバイスＳｕｎｘ 株式会社
Publication of WO2013108437A1 publication Critical patent/WO2013108437A1/fr

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    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/02—Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
    • B23K26/04—Automatically aligning, aiming or focusing the laser beam, e.g. using the back-scattered light
    • B23K26/046—Automatically focusing the laser beam
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/08—Devices involving relative movement between laser beam and workpiece
    • B23K26/082—Scanning systems, i.e. devices involving movement of the laser beam relative to the laser head

Definitions

  • the present invention relates to a laser processing apparatus that scans a laser beam using a galvanometer mirror and irradiates the workpiece with the laser beam.
  • the laser processing apparatus scans the laser beam with a pair of galvanometer mirrors.
  • the scanned laser light is irradiated on the workpiece so as to have a predetermined spot diameter through a converging lens such as an f ⁇ lens.
  • the distance (work distance) between the converging lens and the workpiece may vary depending on the manufacturing variation of the workpiece and the type of the workpiece.
  • the processing range defined by the range of the deflection angle of the scanning mirror changes depending on the work distance. For this reason, a laser beam will be irradiated to a different position.
  • the range (scanning angle) of the deflection angle of the galvanometer mirror is changed so that the workpiece is processed at the same position and the same size regardless of the workpiece distance.
  • the machining range can be made the same even if the work distance is different.
  • An object of the present invention is to provide a laser processing apparatus capable of maintaining the processing quality while maintaining the same processing range even when the work distance is different.
  • a laser emitting unit that emits laser light
  • a scanning mirror that scans laser light from the laser emitting unit
  • a control unit that controls the scanning mirror
  • the control unit narrows the scanning angle of the scanning mirror and increases the scanning angle of the scanning mirror so that the workpiece is processed at the same position and size on the processing surface of the workpiece irrespective of the workpiece distance between the laser emission port and the workpiece. Control is performed so as to reduce the speed, and the smaller the work distance, the wider the scanning angle of the scanning mirror and the higher the scanning speed of the scanning mirror.
  • the same position and size of the work surface of the work that is, the work range can be made the same regardless of the work distance.
  • the moving speed of the laser beam on the work can be made constant regardless of the change in the scanning angle due to the difference in the work distance.
  • the laser processing apparatus includes a work distance setting unit for setting a work distance, and the control unit can change the scanning angle and the scanning speed of the scanning mirror according to the work distance set by the work distance setting unit. preferable.
  • control unit can change the scanning angle and scanning speed of the scanning mirror according to the work distance set by the setting unit. Therefore, the machining range can be made the same regardless of the work distance set in the setting unit.
  • the work distance setting unit sets the work distance according to the measurement result from the measuring means for measuring the work distance.
  • the setting unit sets the work distance according to the measurement result from the measurement means for measuring the work distance. Therefore, it is possible to save the user from setting the work distance and to set the work distance accurately. Furthermore, the work distance is automatically changed, and the processing range can be made the same more accurately.
  • the laser machining apparatus further includes an informing means for informing that the work distance set in the work distance setting unit is out of the reference range when the work distance is out of the preset reference range.
  • the notification means can notify the user that the work distance set in the work distance setting unit is outside the preset reference range. Therefore, the set work distance is not set outside the reference range.
  • an invalid means for invalidating the setting of the work distance setting unit is provided when the work distance set in the work distance setting unit is outside a preset reference range.
  • the setting of the work distance setting unit can be invalidated by the invalidating means. Therefore, even if the set work distance is set outside the reference range, machining based on the setting is not started.
  • the laser processing apparatus includes a processing range setting unit that allows a user to set a processing range, and the control unit controls the processing range set by the processing range setting unit to be the same regardless of the work distance. It is preferable.
  • the control unit controls the machining range set by the machining range setting unit to be the same regardless of the work distance. For this reason, even if the machining range is changed, the workpiece can be machined regardless of the work distance so that the changed machining range is obtained.
  • the perspective view which shows schematic structure of the laser processing apparatus which concerns on one Embodiment of this invention.
  • the block diagram which shows the outline
  • the perspective view of a connector Sectional drawing of the protrusion part of a connector.
  • the side view which shows the connection structure of a connector.
  • (A) and (b) are schematic diagrams for explaining laser light converged by an f ⁇ lens.
  • (A) (b) is a schematic diagram for demonstrating the guide display by the 1st and 2nd visible light.
  • (A) is a schematic diagram for demonstrating the scanning of the laser beam by the laser processing apparatus of this invention
  • (b) is a schematic diagram for demonstrating the scanning of the laser beam by the conventional laser processing apparatus.
  • the schematic diagram which shows the guide mark of another example is a schematic diagram which shows the guide mark of another example.
  • (A) (b) is a schematic diagram which shows the guide mark of another example.
  • (A) (b) is a schematic diagram which shows the guide mark of another example.
  • (A) (b) is a schematic diagram which shows the guide mark of another example.
  • the schematic diagram for demonstrating the scanning of the laser beam by the laser processing apparatus of another example The schematic diagram for demonstrating the scanning of the laser beam by the laser processing apparatus of another example.
  • (A) is a schematic diagram for explaining scanning of laser light by a laser processing apparatus according to another example, and (b) explains the contents of different processing depending on the number of repetitions of scanning of laser light by the laser processing apparatus.
  • Schematic diagram for (A)-(d) is a schematic diagram for demonstrating the scanning of the laser beam by the laser processing apparatus of another example.
  • a laser marking device (laser processing device) 10 includes a main body portion 11, a head portion 14 connected to the main body portion 11 via a fiber cable 12 and an electric cable 13, and an electric power to the main body portion 11. And a console 16 connected via a cable 15.
  • a control unit 17 that controls the operating state of the entire apparatus and a laser oscillation unit (laser oscillator) 18 that oscillates laser light L are accommodated in the main body unit 11.
  • the control unit 17 is electrically connected to the laser oscillation unit 18 and controls driving of the laser oscillation unit 18.
  • the laser light L emitted from the laser oscillation unit 18 is sent to the head unit 14 through the fiber cable 12.
  • One end of the fiber cable 12 is fixed to the head unit 14 via the connector 20.
  • the connector 20 holds the end portion of the fiber cable 12 and is fixed to the rear surface of the housing 30 of the head portion 14.
  • the connector 20 has a substantially cylindrical holding portion 21.
  • the fiber cable 12 is inserted and held inside the holding portion 21.
  • An extrapolation member 22 is sheathed on the fiber cable 12.
  • the extrapolation member 22 is fixed to the rear end of the holding portion 21.
  • a plate-like flange portion 23 is formed at the end of the holding portion 21.
  • a projecting portion 24 having a cylindrical shape is formed on the front surface of the flange portion 23.
  • the protruding portion 24 is provided coaxially with the holding portion 21 and has a smaller diameter than the holding portion 21.
  • the fiber cable 12 is inserted from the holding portion 21 to the protruding portion 24.
  • the end surface 12a (laser emission surface) of the fiber cable 12 and the end surface 24a of the protrusion 24 are substantially flush.
  • the connector 20 holds the flexible fiber cable 12 straight by a portion extending from the holding portion 21 to the protruding portion 24.
  • a positioning pin 23 a is provided on the surface of the flange portion 23 that faces the head portion 14.
  • a concave portion 25 is provided on the lower surface of the holding portion 21.
  • the projecting portion 24 has three screw holes 24b formed at equal intervals along the circumferential direction. Each screw hole 24b penetrates from the outer peripheral surface of the protrusion 24 to the inner peripheral surface. A locking screw 26 is screwed into each screw hole 24b. The distal end of each rotation-preventing screw 26 slightly protrudes from the inner peripheral surface of the protruding portion 24 and is in contact with the outer peripheral surface of the fiber cable 12 in the protruding portion 24. Thereby, the fiber cable 12 is fixed in the protruding portion 24. For this reason, the rotation of the fiber cable 12 is suppressed in the protrusion 24, and the twist of the fiber cable 12 is suppressed. Further, the locking screw 26 is in contact with the fiber cable 12 at equal intervals along the circumferential direction. For this reason, the fiber cable 12 is fixed with good balance and stability.
  • a contact surface 31 that contacts the flange portion 23 is provided on the rear surface of the housing 30.
  • the connector 20 is fixed to the contact surface 31 with a plurality of screws 20a.
  • the contact surface 31 has an annular shape extending along the outer edge of the flange portion 23.
  • an accommodation recess 32 into which the protrusion 24 is inserted is provided on the inner side of the contact surface 31, on the inner side of the contact surface 31, an accommodation recess 32 into which the protrusion 24 is inserted is provided on the inner side of the contact surface 31, an accommodation recess 32 into which the protrusion 24 is inserted is provided.
  • a gap is provided in the axial direction (optical axis direction) and the radial direction between the wall constituting the housing recess 32 and the protruding portion 24.
  • a disc-shaped protective glass 33 is provided in the inner portion 32 a of the housing recess 32. The housing recess 32 and the interior of the housing 30 are partitioned by the protective glass 33.
  • the protective glass 33 and the end surface 24a of the protrusion 24 are opposed to each other while being close to each other.
  • a gap is provided between the wall of the housing recess 32 and the rotation-preventing screw 26 so that they do not interfere with each other.
  • Two positioning holes 34 into which the positioning pins 23 a of the connector 20 are inserted are formed in the contact surface 31 of the housing 30.
  • the positioning hole 34 shown on the left side of FIG. 3 is a long hole. For this reason, movement of the positioning pin 23 a is allowed in the positioning hole 34.
  • Each positioning pin 23a and each positioning hole 34 constitute positioning means for positioning the connector 20 and the head portion 14 in a direction orthogonal to the optical axis of the laser light L.
  • a sealing member (not shown) is interposed between the flange portion 23 and the contact surface 31. Thereby, the gap between the flange portion 23 and the contact surface 31 is sealed, and entry of water or the like into the housing recess 32 is suppressed.
  • the place where the rotation-preventing screw 26 and the screw hole 24b are provided is a place where it is desired to avoid adhesion of water or the like. Therefore, according to this embodiment, the protrusion 24 is disposed in the housing recess 32 in which the watertightness is maintained, and the rotation screw 26 and the screw hole 24 b are provided in the protrusion 24.
  • a connection terminal portion 35 to which the electric cable 13 is attached and detached is provided above the contact surface 31.
  • a rectangular parallelepiped convex portion 36 protruding toward the connector 20 is provided below the contact surface 31.
  • the convex portion 36 is fitted into the concave portion 25 of the connector 20.
  • the convex portion 36 and the concave portion 25 function as positioning and a guide when the connector 20 is assembled to the housing 30.
  • a half mirror 41 as a light merging means is provided at the subsequent stage of the protective glass 33.
  • the half mirror 41 is disposed on the optical axis of the laser light L emitted from the fiber cable 12 and incident from the protective glass 33.
  • the half mirror 41 transmits a predetermined ratio of the laser light L.
  • a pair of galvanometer mirrors 42 is disposed behind the half mirror 41 on the optical axis of the laser beam L.
  • the pair of galvanometer mirrors 42 are scanning mirrors that reflect the laser beam L toward the workpiece W and scan the laser beam L.
  • Each galvanometer mirror 42 is rotated by a galvano motor 43. As each galvanometer mirror 42 rotates, the laser light L irradiated onto the workpiece W is scanned in the XY direction (two-dimensional direction). Further, when the galvano motor 43 is driven by the control unit 17, the angle of each galvano mirror 42 is controlled.
  • an f ⁇ lens (convergence lens) 44 is arranged below the galvanometer mirror 42.
  • the f ⁇ lens 44 converges the laser beam L reflected by the galvanometer mirror 42 until a predetermined spot diameter is obtained on the print surface Wa of the workpiece W.
  • the energy density of the laser light L is increased to an energy density suitable for marking.
  • a laser emission port 46 partitioned by a protective glass 45 is formed below the f ⁇ lens 44.
  • the laser beam L converged by the f ⁇ lens 44 is irradiated on the print surface Wa of the workpiece W through the protective glass 45.
  • the laser beam L is scanned in a two-dimensional direction on the printing surface Wa. With such an operation, characters, figures, and the like are marked on the print surface Wa of the workpiece W.
  • each galvanometer mirror 42 and the f ⁇ lens 44 constitute an irradiation optical system that irradiates the workpiece W with the laser light L emitted from the end surface 12a of the fiber cable 12.
  • a first visible light source 51 disposed in the vicinity of the half mirror 41 and a second visible light source 52 disposed in the vicinity of the lower portion of the housing 30 are provided.
  • the visible light VL1 emitted from the first visible light source 51 is reflected by the half mirror 41 toward the galvanometer mirror 42.
  • the visible light VL ⁇ b> 1 reflected by the galvanometer mirror 42 is irradiated onto the print surface Wa of the workpiece W through the f ⁇ lens 44.
  • the galvanometer mirror 42 scans the visible light VL1 in the two-dimensional direction in the same manner as when scanning the laser light L.
  • a guide mark Ga as shown in FIG. 8B is displayed by the visible light VL1 scanned by the galvanometer mirror 42 in this way.
  • the guide mark Ga is displayed as a circle figure centered on the cross and the intersection of the cross.
  • the cross point of the guide mark Ga indicates the origin (center) of the XY coordinates in the scanning of the galvano mirror 42 and is located on the axis of the f ⁇ lens 44.
  • the second visible light source 52 is disposed between the f ⁇ lens 44 and the connector 20.
  • the second visible light source 52 emits the second visible light VL2 toward the print surface Wa of the workpiece W.
  • the second visible light VL2 is emitted obliquely with respect to the first visible light VL1.
  • the optical axis of the second visible light VL2 intersects with the axis of the f ⁇ lens 44.
  • FIG. 8B shows guide points Gb0, Gb1, and Gb2 as examples of guide points.
  • the second visible light VL2 is green, and the first visible light VL1 is red.
  • connection terminal portion 35 is electrically connected to the galvano motor 43, the first visible light source 51, and the second visible light source 52. Accordingly, the control unit 17 is electrically connected to the galvano motor 43, the first visible light source 51, and the second visible light source 52 via the electric cable 13 and the connection terminal unit 35.
  • a console 16 having a display unit 16a and an operation unit 16b is connected to the main body unit 11.
  • the user operates the operation unit 16b to set desired print data.
  • the print data set by the operation unit 16 b is output to the control unit 17 of the main body unit 11 through the electric cable 15.
  • the control unit 17 controls the laser oscillation unit 18, the galvano motor 43, the first visible light source 51, and the second visible light source 52 based on the print data.
  • the control unit 17 drives the laser oscillation unit 18 and the galvano motor 43 based on the print data.
  • the laser oscillating unit 18 emits laser light L to the fiber cable 12, and the laser light L is transmitted to the head unit 14 via the fiber cable 12.
  • the laser light L emitted from the end surface 12 a of the fiber cable 12 passes through the half mirror 41 and is then irradiated onto the print surface Wa of the workpiece W through the f ⁇ lens 44 and the protective glass 45.
  • the laser beam L is scanned in a two-dimensional direction on the print surface Wa by the galvanometer mirror 42.
  • the laser light L emitted from the fiber cable 12 is emitted as parallel light (that is, the divergence angle is approximately 0 degrees), and specifically, is made into parallel light by a collimator lens or the like.
  • the laser beam L that is parallel light is incident on the f ⁇ lens 44.
  • Incident light that is laser light L incident on the f ⁇ lens 44 is converged with a predetermined refractive index based on the performance of the f ⁇ lens 44.
  • FIG. 7B shows the diameter (spot diameter Sr) of the laser light L at the focal position P0 of the f ⁇ lens 44, and the spot diameter Sr is obtained by the following equation.
  • the focal depth df shown in FIG. 7A becomes deeper as the spot diameter Sr is larger. That is, the smaller the diameter Lw of the incident light, the deeper the focal depth df of the laser light L.
  • the diameter of the incident light is determined so as to obtain a spot diameter designed at the focal point (aperture position).
  • the diameter Lw of the incident light is made smaller than the designed diameter of the incident light in order to make the spot diameter of the laser light L larger than its design value and deepen the focal depth df. .
  • work W can be irradiated with the laser beam L with the deep focal depth df.
  • the energy of the laser light L is substantially uniform and large enough to ensure the desired marking quality, and the diameter (spot diameter Sr) of the laser light L is also substantially uniform. .
  • the desired marking on the printing surface Wa becomes possible by matching the printing surface Wa of the workpiece W within the range of the focal depth df. Further, as long as the position of the print surface Wa of the workpiece W is within the range of the focal depth df, the quality of the marking becomes substantially uniform.
  • FIGS. 7A and 7B show an example of the laser beam La in a conventional laser marking apparatus by a two-dot chain line.
  • the diameter of incident light is large, the spot diameter at the focal point is small and the focal depth is shallow. For this reason, although high energy can be obtained at the focal point, the depth of focus is shallow, so that it is necessary to closely adjust the work distance corresponding to the distance from the laser emission port 46 to the print surface Wa of the work W and the focus of the laser light. .
  • the aperture position in the Z-axis direction corresponding to the axial direction of the f ⁇ lens 44 is adjusted by changing the divergence angle of incident light using a variable lens distance beam expander, a 3D scanner, or the like. In this way, it was possible to cope with marking on the printing surface of various types of workpieces having different work distances or workpieces having inclined surfaces, steps, or irregularities.
  • the laser marking device 10 of the present embodiment does not include an inter-lens distance variable beam expander or a 3D scanner that changes the spread angle of the laser light L, and the laser light L emitted from the fiber cable 12 is The light enters the f ⁇ lens 44 with the diameter Lw kept small. Thereby, the focal depth df becomes deep. As the focal depth df increases, the range that can be regarded as a focal point (distance in the Z-axis direction) increases.
  • the laser beam L is applied to perform oxidation printing (black marking) on the workpiece W mainly made of a metal material such as a bearing or a carbide drill.
  • the spot diameter of the laser beam L on the printing surface Wa needs to satisfy certain conditions.
  • the oscillation method of the laser oscillation part 18 is continuous (CW: Continuous wave) oscillation. This is because, in thermal processing, the physical properties of the workpiece W are more likely to change when the laser beam L is oscillated on the average than when the laser beam L is oscillated instantaneously with high energy (pulse oscillation). It is.
  • the diameter Lw of the f ⁇ lens 44 is set so as to satisfy the above-described certain condition in order to oxidize and print on the workpiece W.
  • the print surface Wa of the workpiece W is set at a position offset from the actual focus position by adjusting the focus position so as to satisfy the above-described certain condition. Then, the position of the focal length needs to be offset by using a variable inter-lens distance beam expander or a 3D scanner following the change of the position of the printing surface Wa, that is, the work distance.
  • the divergence angle is changed by an inter-lens distance variable beam expander, a 3D scanner, or the like. For this reason, since the condition of the spread angle is different at the offset position as described above, the print quality may be affected if the work distance changes.
  • the diameter of the incident light incident on the f ⁇ lens 44 is reduced and the range of the focal depth df is increased, so that printing is performed within the focal depth df. Quality can be the same.
  • the guide mark Ga is displayed by the first visible light VL1 scanned by the galvano mirror 42. For this reason, the size of the guide mark Ga slightly changes depending on the position of the print surface Wa in the Z-axis direction (Z-axis position). However, since the change in the size of the guide mark Ga is so small that it can be ignored, the size of the guide mark Ga will not be changed depending on the Z-axis position of the printing surface Wa.
  • FIGS. 8A and 8B the display position of the guide point by the second visible light VL2 changes with respect to the guide mark Ga depending on the position of the print surface Wa in the Z-axis direction.
  • FIG. 8B shows the locus T of the guide point with a broken line when the Z-axis position of the printing surface Wa is changed.
  • the trajectory T is a straight line.
  • the guide point Gb0 displayed on the print surface Wa overlaps the center (cross point of the cross) of the guide mark Ga.
  • the focal position P0 coincides with the center position of the focal depth df in the Z-axis direction. That is, when the guide point displayed on the print surface Wa overlaps the cross point of the guide mark Ga, the print surface Wa is positioned at the center of the focal depth df (see FIG. 7A).
  • the diameter of the guide mark Ga circle is set to correspond to the range of the focal depth df. That is, when the printing surface Wa is at the lower limit position P1 of the focal depth df, the guide point Gb1 is displayed on the circle line of the guide mark Ga, and when the printing surface Wa is at the upper limit position P2 of the focal depth df, the guide mark Ga. A guide point Gb2 is displayed on the circle line. The display positions of the guide point Gb1 and the guide point Gb2 are symmetric with respect to the center of the guide mark Ga.
  • the focal depth df In the range of the focal depth df (range from the lower limit position P1 to the upper limit position P2), it is possible to mark the printing surface Wa of the workpiece W with substantially uniform quality. For this reason, when the guide point is displayed inside the circle of the guide mark Ga, the Z-axis position of the printing surface Wa is within the range of the focal depth df, and marking on the printing surface Wa is possible. On the other hand, when the guide point is displayed outside the circle of the guide mark Ga, the Z-axis position of the printing surface Wa is outside the range of the focal depth df, and the Z-axis position of the printing surface Wa needs to be adjusted. Thereby, the user can confirm before marking whether the printing surface Wa is in the Z-axis position where marking can be performed by viewing the positional relationship between the guide mark Ga and the guide point displayed on the printing surface Wa. .
  • the control unit 17 controls the galvanometer mirror 42 so that the printing range (marking range) does not change according to the work distance.
  • the user can input and change the work distance via the operation unit 16b as a setting unit.
  • the work distance reference position is set in advance by the manufacturer.
  • the reference position is a position Wd0. Further, the speed of the laser beam L at the reference position Wd0 is set by the operation unit 16b.
  • the range of the deflection angle which is the scanning angle of the galvanometer mirror 42 necessary for scanning the printing range Ar0
  • the range is defined as the range.
  • the control unit 17 controls the galvano motor 43 so as to slow down the drive range (scanning speed) of the galvano mirror 42 per unit distance in the deflection angle range ⁇ 1. Thereby, the moving speed of the laser beam L on the workpiece W becomes constant.
  • the range of the swing angle of the galvanometer mirror 42 is set to a range of the swing angle ⁇ 2 that is wider than the range of the swing angle ⁇ 0.
  • the swing angle range ⁇ 2 of the galvanometer mirror 42 that is, the drive range of the galvanometer mirror 42 is expanded.
  • the control unit 17 controls the galvano motor 43 so as to increase the scanning speed of the galvano mirror 42 in the deflection angle range ⁇ 1.
  • the control unit 17 changes the scanning angle and scanning speed of the galvanometer mirror 42 according to the work distance. As a result, regardless of the distance of the workpiece distance between the laser emission port 46 and the workpiece W, the printing surface Wa (processing surface) of the workpiece W is processed at the same position and size. That is, as the work distance increases, the control unit 17 narrows the range of the swing angle as the scanning angle of the galvanometer mirror 42 and decreases the scanning speed of the galvanometer mirror 42. Further, as the work distance is smaller, the control unit 17 widens the range of the deflection angle as the scanning angle of the galvanometer mirror 42 and increases the scanning speed of the galvanometer mirror 42.
  • control unit 17 changes the deflection angles ⁇ 0 to ⁇ 2 as the scanning angles of the galvanometer mirror 42 according to the work distance.
  • the printing surface Wa of the workpiece W can be processed in the same position and size, that is, in the same printing range as the processing range Ar0.
  • the moving speed of the laser light L on the work W can be made constant regardless of the change in the scanning angle due to the difference in the work distance. Thereby, even if the workpiece distance is changed, the machining quality of the workpiece W can be maintained while keeping the machining range Ar0 the same.
  • the control unit 17 changes the scanning angle (deflection angle) and scanning speed of the galvano mirror 42 according to the work distance set by the operation unit 16b.
  • the scanning angle and scanning speed of the galvanometer mirror 42 can be changed without using a sensor or the like that detects the work distance.
  • the machining range can be made the same regardless of the set work distance.
  • the laser marking device 10 includes teaching means including a first visible light source 51 and a second visible light source 52.
  • the first visible light source 51 irradiates the printing surface Wa with the first visible light VL1.
  • the second visible light source 52 emits the second visible light VL2 obliquely with respect to the axis of the f ⁇ lens 44 so that the second visible light VL2 intersects the first visible light VL1.
  • a guide mark Ga indicating a range corresponding to the focal depth df of the laser light L is displayed on the printing surface Wa.
  • the irradiation position (guide point display position) of the second visible light VL2 changes in a direction (XY axis direction) orthogonal to the Z axis direction according to the position of the print surface Wa in the Z axis direction. Then, the display position of the guide point with respect to the guide mark Ga teaches whether or not the print surface Wa is at a position that can be processed. For this reason, the user simply irradiates the print surface Wa with the first and second visible lights VL1 and VL2 before laser marking, and confirms whether there is a guide point within the range of the guide mark Ga. It is possible to easily grasp whether or not laser marking is possible on the printing surface Wa.
  • the guide point When the printing surface Wa is within the range of the focal depth df, the guide point is within the range of the guide mark Ga, and when the printing surface Wa is outside the range of the focal depth df, the guide point is at the guide mark Ga. It is out of range. That is, whether or not the print surface Wa of the workpiece W is at a position that can be processed can be taught by whether or not the guide point is within the range of the guide mark Ga.
  • the guide mark Ga is shown as an annular frame (circle) indicating a range corresponding to the focal depth df. That is, whether or not the print surface Wa of the workpiece W is at a position where it can be processed is taught by whether or not the guide point display position is within the frame (circle) of the guide mark Ga. For this reason, the user can intuitively grasp whether or not laser marking is possible on the printing surface Wa.
  • the guide mark Ga includes a cross-shaped figure (focus position teaching mark).
  • the display position of the guide point overlaps with the cross point of the guide mark Ga. That is, the user can grasp whether or not the print surface Wa is at the focal position P0 of the f ⁇ lens 44 based on whether or not the guide point overlaps the intersection of the guide marks Ga.
  • the second visible light VL2 is green visible light
  • the first visible light VL1 is red visible light. That is, since the color of the first visible light VL1 and the color of the second visible light VL2 are different, the visibility of the guide mark Ga and the guide point is improved. As a result, the user can more easily grasp whether or not laser processing on the printing surface Wa is possible.
  • the connector 20 is provided with a cylindrical protrusion 24 through which the fiber cable 12 is inserted.
  • the protrusion 24 is inserted into the housing recess 32 of the housing 30.
  • the protruding portion 24 is formed with a screw hole 24b penetrating from the outer peripheral surface to the inner peripheral surface.
  • a locking screw 26 that contacts the fiber cable 12 inserted through the protruding portion 24 is screwed into the screw hole 24b. According to this configuration, the twisting of the fiber cable 12 can be suppressed by the anti-rotation screw 26.
  • the detent screws 26 are provided at equal intervals along the circumferential direction of the fiber cable 12. For this reason, since the fiber cable 12 can be fixed with good balance, the fiber cable 12 can be fixed stably.
  • the user directly inputs the work distance by operating the operation unit 16b.
  • the user inputs the distance between the f ⁇ lens 44 and the mounting surface of the work W and the height of the work W, and the work distance. May be calculated by the control unit 17.
  • the laser marking device 10 may be provided with a sensor as a measuring means for measuring the work distance. In this case, the scanning angle and scanning speed of the galvanometer mirror 42 can be accurately changed based on the measurement result from the sensor. Furthermore, the work distance is automatically changed, so that the machining range can be made more accurate.
  • a notification unit for notifying that effect may be used.
  • control unit 17 may control the setting of the work distance setting unit to be invalidated when the work distance set in the work distance setting unit is outside the preset reference range. Good.
  • the control unit 17 controls the print range to be the print range Ar0 regardless of the work distance, but the print range Ar0 can be arbitrarily changed using the operation unit 16b as the processing range setting unit. Also good.
  • the control unit 17 controls the scanning angle and the scanning speed based on the work distance so that the printing range set by the operation unit 16b is the same regardless of the work distance. In this case, the user can set and change the processing range. Even if the machining range is changed, the workpiece can be machined regardless of the work distance so that the changed machining range is obtained.
  • the size of the range indicated by the guide mark Ga may be adjustable.
  • the range (depth of focus) that can be regarded as the focal point of the laser light L becomes narrower.
  • high marking quality that is, when the accuracy of the laser power is not so high, the range that can be regarded as the focal point of the laser light L is widened. That is, the convenience of the guide mark Ga is improved by making the size of the guide mark Ga adjustable according to the marking mode. The user operates the operation unit 16b to input a necessary laser power value and material of the workpiece W.
  • the control unit 17 controls the size of the guide mark Ga by drive control of the galvanometer mirror 42 based on the user input. Further, the user may be able to directly set the size of the guide mark Ga by operating the operation unit 16b. According to this configuration, it is possible to easily grasp whether or not highly accurate laser marking is possible when the range of the guide mark Ga is adjusted to be small.
  • the first visible light VL1 is red visible light and the second visible light VL2 is green visible light.
  • the colors of the first visible light VL1 and the second visible light VL2 may be changeable.
  • the operation unit 16b may be operated to set the colors of the first visible light VL1 and the second visible light VL2. Further, the operation unit 16b is operated to input the color of the workpiece W, and the first and second visible lights VL1 and VL2 having colors (for example, complementary colors) having good visibility with respect to the color of the workpiece W are emitted. Also good. According to this configuration, since the colors of the first and second visible lights VL1 and VL2 can be set according to the color of the workpiece W, the visibility of the guide mark Ga and the guide point is further improved.
  • the second visible light source 52 is disposed between the f ⁇ lens 44 and the connector 20, but the second visible light VL2 from the second visible light source 52 intersects the axis of the f ⁇ lens 44. And as long as it irradiates the printing surface Wa, you may arrange
  • the guide mark Ga has a shape made up of a cross and a circle centered on the intersection of the cross, but the cross may be omitted and only the circle may be used.
  • the figure may include a lower limit position teaching line Gd and an upper limit position teaching line Gu as shown in FIG.
  • the lower limit position teaching line Gd and the upper limit position teaching line Gu are dividing lines positioned on the guide point trajectory T, and correspond to the lower limit position P1 and the upper limit position P2 of the focal depth df, respectively. That is, when the print surface Wa is at the lower limit position P1 of the focal depth df, the guide point Gb1 is displayed on the lower limit position teaching line Gd.
  • the guide point Gb2 is displayed on the upper limit position teaching line Gu.
  • the printing surface Wa is at the Z-axis position where marking can be performed is taught depending on whether or not the guide point is located between the lower limit position teaching line Gd and the upper limit position teaching line Gu.
  • the user can intuitively grasp whether or not laser marking is possible on the printing surface Wa.
  • a cross similar to the guide mark Ga may be provided between the lower limit position teaching line Gd and the upper limit position teaching line Gu.
  • the change in the size of the guide mark Ga with respect to the Z-axis position of the printing surface Wa is negligibly small.
  • the guide mark in other cases is shown in FIGS. 11 (a) to 13 (b). It explains according to. As the work distance increases, the size of the guide mark increases.
  • the guide mark Ga1 shown in FIGS. 11A and 11B includes a first arc K1 (lower limit position teaching line) and a second arc K2 (upper limit position teaching line).
  • the diameter of the first arc K1 is smaller than the diameter of the second arc K2.
  • the first arc K1 and the second arc K2 correspond to the lower limit position P1 and the upper limit position P2 of the focal depth df, respectively.
  • the print surface Wa is at the lower limit position P1 of the focal depth df, the work distance is larger than that of the upper limit position P2, so that the size of the guide mark Ga1 is increased as shown in FIG.
  • the guide point Gb1 is displayed on the first arc K1. That is, whether or not the printing surface Wa is at the Z-axis position where marking can be performed is taught by whether or not the guide point is located between the first arc K1 and the second arc K2. In this way, by making the diameters of the first arc K1 and the second arc K2 different, it is possible to cope with the case where the size of the guide mark Ga1 changes depending on the Z-axis position of the printing surface Wa.
  • the guide mark Ga2 shown in FIGS. 12A and 12B is composed of an ellipse and a cross-shaped figure within the ellipse.
  • the major axis of the ellipse of the guide mark Ga2 extends along the trajectory T direction of the guide point, and both ends of the ellipse in the major axis direction correspond to the upper limit position P2 and the lower limit position P1 of the focal depth df of the laser beam L, respectively. is doing.
  • the guide point Gb2 is displayed on the first end portion in the major axis direction of the ellipse.
  • the print surface Wa is at the lower limit position P1 of the focal depth df, the work distance is larger than that of the upper limit position P2, so that the size of the guide mark Ga1 is increased as shown in FIG.
  • the guide point Gb1 is displayed on the second end portion in the major axis direction of the ellipse. That is, whether or not the printing surface Wa is at the Z-axis position where marking can be performed is taught by whether or not the guide point is located within the ellipse of the guide mark Ga2.
  • the guide point is displayed on the intersection of the guide marks Ga2.
  • the cross point position of the cross is shifted in the locus T direction from the center of the ellipse of the guide mark Ga2. In this way, it is possible to cope with a case where the size of the guide mark Ga2 changes at the Z-axis position of the printing surface Wa.
  • the guide mark Ga2 shown in FIGS. 12A and 12B may be an ellipse without a cross.
  • the guide mark Ga3 shown in FIGS. 13A and 13B includes two circles C1 and C2 having different diameters.
  • the large-diameter circle C1 and the small-diameter circle C2 correspond to the upper limit position P2 and the lower limit position P1 of the focal depth df, respectively.
  • the guide point Gb2 is displayed on the large-diameter circle C1.
  • the work distance is larger than that of the upper limit position P2, so that the size of the guide mark Ga3 is increased as shown in FIG.
  • the guide point Gb1 is displayed on the small-diameter circle C2. That is, whether or not the printing surface Wa is at the Z-axis position where marking can be performed is taught by whether or not the guide point is located in the small-diameter circle C2.
  • Such two circles C1 and C2 can cope with a case where the size of the guide mark Ga2 changes at the Z-axis position of the printing surface Wa.
  • the control unit 17 performs drive control of the galvano motor 43 after being emitted for a predetermined time at the emission start point of the laser light L, and scans the laser light L based on the print data (processing data).
  • the control unit 17 When laser processing is performed by scanning the laser beam L based on the coordinate data from the start point SP0 to the end point EP0, the control unit 17 is positioned between the start point SP0 and the end point EP0 or in the direction opposite to the end point EP0 with respect to the start point SP0. Then, a correction point CP is generated. Then, the control unit 17 reciprocates the laser beam L between the correction point CP and the start point SP0, and secures a time from when the laser beam L is emitted until it can be processed.
  • the control unit 17 emits the laser beam L from the correction point CP and scans the laser beam L toward the start point SP0 (scanning Sc1). Thereafter, the control unit 17 scans the laser beam L from the start point SP0 through the correction point CP to the end point EP0 side (scanning Sc2).
  • the method for generating the correction point CP between the start point SP0 and the end point EP0 may be changed as follows. That is, as shown in FIG. 15, the laser beam L is emitted from the start point SP0, and the laser beam L is scanned on the correction point CP side (scanning Sc1). Next, the control unit 17 scans the laser beam L from the correction point CP to the start point SP0 side (scanning Sc2). Thereafter, the controller 17 scans the laser beam L from the start point SP0 to the end point EP0 side through the correction point CP (scanning Sc3).
  • the control unit 17 emits the laser light L from the correction point CP and scans the laser light L toward the start point SP0 (scanning Sc1).
  • the controller 17 scans the laser beam L from the start point SP0 to the correction point CP side in the direction opposite to the end point EP0 (scanning Sc2).
  • the controller 17 scans the laser beam L from the correction point CP to the end point EP0 through the start point SP0 (scanning Sc3).
  • the same character may be repeatedly marked in the same range, and the thickness of the line constituting the character or symbol may be changed.
  • the specific marking method of the another example is shown below.
  • FIGS. 17 (a) and 17 (b) show the case where the letter “A” is marked on the workpiece W by the laser marking device.
  • the operation shown below by the control unit 17 is executed through control of the galvano motor 43.
  • the controller 17 scans the laser light L from the start point SP1 to the end point EP1 of the first unit marking. Thereafter, the control unit 17 moves the irradiation position of the laser light L from the end point EP1 of the first unit marking to the start point SP2 of the second unit marking without emitting the laser light L.
  • the control unit 17 scans the laser light L from the start point SP2 to the end point EP2 of the second unit marking.
  • control unit 17 moves the irradiation position of the laser light L from the end point EP2 of the second unit marking to the start point SP1 of the first unit marking without emitting the laser light L.
  • the controller 17 can increase the thickness of the line as shown in FIG. 17B by repeating the series of steps described above.
  • the print data may be disassembled for each unit marking, marked for the required number of times for each unit marking, and then transferred to the next unit marking.
  • two reciprocal markings are performed for each unit marking as many times as necessary, that is, four times are marked for each unit marking.
  • control unit 17 when marking the character “A” on the workpiece W, the control unit 17 performs one reciprocating scan between the start point SP1 and the end point EP1 of the first unit marking, as shown in FIG. More specifically, the controller 17 scans the laser beam L from the first unit marking start point SP1 to the end point EP1, and then scans the laser beam L from the first unit marking end point EP1 to the first unit marking start point SP1. Scan.
  • control unit 17 further performs one reciprocating scan between the start point SP1 and the end point EP1 of the first unit marking. Thereafter, the control unit 17 does not emit the laser light L, and from the first unit marking start point SP1 to the second unit marking end point EP2 as the next marking start point, as shown in FIG. 18B.
  • the irradiation position of the laser beam L is moved.
  • control unit 17 performs one reciprocating scan between the start point SP2 and the end point EP2 of the second unit marking. More specifically, the controller 17 scans the laser beam L from the end point EP2 of the second unit marking to the start point SP2 of the second unit marking, and then the laser beam L from the start point SP2 of the second unit marking to the end point EP2. Scan.
  • control unit 17 further performs one reciprocating scan between the start point SP2 start point and the end point EP2 of the second unit marking. In this way, it is possible to perform marking with the same character quality as when the character “A” is marked four times. Further, it is possible to reduce the number of times of moving the irradiation position of the laser light L to the next marking start point without emitting the laser light L.
  • the number of locking screws 26 provided on the connector 20 is three. However, if the fixing and twisting of the fiber cable 12 can be suppressed, the number of locking screws 26 is set to one or two. Also good. Further, when the number of the locking screws 26 is four or more, by providing the locking screws 26 at equal intervals in the circumferential direction of the fiber cable 12, the fiber cable 12 can be fixed in a balanced manner or stably. Can be. Further, the rotation-preventing screw 26 may be used, for example, for aligning the optical axis of the fiber cable 12 in addition to suppressing twisting of the fiber cable 12.
  • the galvanometer mirrors 42 may not be a pair (two).
  • a beam splitter, a dichroic mirror, or the like may be used instead of the half mirror 41 as the light merging means.
  • the present invention is applied to the laser marking device 10 in which the main body portion 11 having the laser oscillation portion 18 and the head portion 14 are separated, but may be applied to a laser marking device in which the main body portion and the head portion are integrated. Further, the present invention is applied to the laser marking apparatus 10 for marking patterns such as characters, symbols, and figures, but may be applied to a laser processing apparatus that performs processing such as cutting on the workpiece W.

Abstract

Dans la présente invention, une unité de commande modifie la vitesse de balayage et modifie, en tant qu'angle de balayage, la plage θ0-θ2 de l'angle de déviation d'un miroir Galvano, conformément à la distance de travail, de manière à permettre à la surface d'impression (la surface de traitement) d'une pièce d'être traitée dans la même position et à la même taille, quelle que soit la distance de travail entre un orifice d'émission laser (46) et la pièce. En d'autres termes, l'unité de commande effectue une commande de sorte que la plage de l'angle de déviation du miroir Galvano diminue et que la vitesse de balayage diminue quand la distance de travail augmente, et l'unité de commande effectue une commande de sorte que la plage de l'angle de déviation du miroir Galvano augmente et que la vitesse de balayage augmente quand la distance de travail diminue.
PCT/JP2012/073932 2012-01-20 2012-09-19 Dispositif de traitement au laser WO2013108437A1 (fr)

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JP2012010537A JP6002392B2 (ja) 2012-01-20 2012-01-20 レーザ加工装置
JP2012-010537 2012-01-20

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JP6822385B2 (ja) * 2017-11-30 2021-01-27 ブラザー工業株式会社 レーザ加工装置
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JP2004322106A (ja) * 2003-04-21 2004-11-18 Sumitomo Heavy Ind Ltd レーザ加工方法およびレーザ加工装置
JP2008012538A (ja) * 2006-06-30 2008-01-24 Keyence Corp レーザ加工装置、レーザ加工条件設定装置、レーザ加工条件設定方法、レーザ加工条件設定プログラム、コンピュータで読み取り可能な記録媒体及び記録した機器
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