WO2013105341A1 - Dressing method for glass substrate edge-grinding grindstone and glass substrate manufacturing method using said dressing method - Google Patents

Dressing method for glass substrate edge-grinding grindstone and glass substrate manufacturing method using said dressing method Download PDF

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Publication number
WO2013105341A1
WO2013105341A1 PCT/JP2012/079994 JP2012079994W WO2013105341A1 WO 2013105341 A1 WO2013105341 A1 WO 2013105341A1 JP 2012079994 W JP2012079994 W JP 2012079994W WO 2013105341 A1 WO2013105341 A1 WO 2013105341A1
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WO
WIPO (PCT)
Prior art keywords
glass substrate
grinding
dressing
grindstone
face
Prior art date
Application number
PCT/JP2012/079994
Other languages
French (fr)
Japanese (ja)
Inventor
潤 大川
勝俊 福間
秀之 遠藤
宮本 幹大
Original Assignee
旭硝子株式会社
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Publication date
Application filed by 旭硝子株式会社 filed Critical 旭硝子株式会社
Priority to KR1020147011536A priority Critical patent/KR20140123038A/en
Priority to JP2013512042A priority patent/JP5500313B2/en
Priority to CN201280056653.0A priority patent/CN103945985A/en
Publication of WO2013105341A1 publication Critical patent/WO2013105341A1/en

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    • BPERFORMING OPERATIONS; TRANSPORTING
    • B24GRINDING; POLISHING
    • B24BMACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B27/00Other grinding machines or devices
    • B24B27/0076Other grinding machines or devices grinding machines comprising two or more grinding tools
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B24GRINDING; POLISHING
    • B24BMACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B1/00Processes of grinding or polishing; Use of auxiliary equipment in connection with such processes
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B24GRINDING; POLISHING
    • B24BMACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B53/00Devices or means for dressing or conditioning abrasive surfaces
    • B24B53/06Devices or means for dressing or conditioning abrasive surfaces of profiled abrasive wheels
    • B24B53/07Devices or means for dressing or conditioning abrasive surfaces of profiled abrasive wheels by means of forming tools having a shape complementary to that to be produced, e.g. blocks, profile rolls
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B24GRINDING; POLISHING
    • B24BMACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B9/00Machines or devices designed for grinding edges or bevels on work or for removing burrs; Accessories therefor
    • B24B9/02Machines or devices designed for grinding edges or bevels on work or for removing burrs; Accessories therefor characterised by a special design with respect to properties of materials specific to articles to be ground
    • B24B9/06Machines or devices designed for grinding edges or bevels on work or for removing burrs; Accessories therefor characterised by a special design with respect to properties of materials specific to articles to be ground of non-metallic inorganic material, e.g. stone, ceramics, porcelain
    • B24B9/08Machines or devices designed for grinding edges or bevels on work or for removing burrs; Accessories therefor characterised by a special design with respect to properties of materials specific to articles to be ground of non-metallic inorganic material, e.g. stone, ceramics, porcelain of glass
    • B24B9/10Machines or devices designed for grinding edges or bevels on work or for removing burrs; Accessories therefor characterised by a special design with respect to properties of materials specific to articles to be ground of non-metallic inorganic material, e.g. stone, ceramics, porcelain of glass of plate glass
    • B24B9/102Machines or devices designed for grinding edges or bevels on work or for removing burrs; Accessories therefor characterised by a special design with respect to properties of materials specific to articles to be ground of non-metallic inorganic material, e.g. stone, ceramics, porcelain of glass of plate glass for travelling sheets

Definitions

  • the present invention relates to a dressing method for a grindstone for grinding an end face of a glass substrate and a method for producing a glass substrate using the dressing method.
  • a glass substrate such as a plate glass or a liquid crystal panel is cut into a predetermined size and then processed into a glass substrate having a product outer diameter by grinding and chamfering the end faces of the four sides.
  • Grinding processing for performing such grinding and chamfering is performed by rotating a cylindrical grindstone having a groove formed on its side surface along the circumferential direction, and the groove portion (groove surface) of the glass substrate to be ground. This is performed by moving the glass substrate or the grindstone while applying the end face (for example, Patent Document 1).
  • Grinding processing of the glass substrate end face can be carried out continuously for a plurality of glass substrates, but as the amount of grinding increases, the clogging of the surface of the grindstone groove (loading), or the abrasive grains falling Spilling or the like occurs and the processing ability of the grindstone decreases. For this reason, dressing is performed in which the end surface grinding apparatus for the glass substrate is periodically stopped to sharpen the grindstone and restore its ability.
  • the present invention can perform dressing without stopping the end surface grinding apparatus for the glass substrate, and can stably recover the processing ability of the grindstone regardless of the operator. It aims at providing the dressing method of the grindstone for the end surface grinding of a glass substrate.
  • a dressing method for a grindstone for grinding an end surface of a glass substrate wherein the glass substrate is used as a dressing material, and the feed rate of the glass substrate used as a dressing material is ground at the time of product manufacture.
  • the end surface grinding is performed so that the amount of grinding of the glass substrate used as a dressing material is slower than the feeding rate of the glass substrate at the time of manufacture, and is larger than the amount of grinding of the glass substrate when the end surface is ground during product manufacture.
  • a glass dressing method for grinding an end surface of a glass substrate is provided, wherein the glass substrate used as a dressing material is supplied to a grinding wheel for use.
  • a normal process of grinding the end face of the glass substrate with a first grinding amount while feeding the glass substrate to the grindstone for end face grinding at a first feed rate A step of determining whether or not dressing of the end surface grinding wheel is necessary at a predetermined timing; and when the dressing is determined to be necessary, the first feeding of the glass substrate to the end surface grinding wheel
  • FIG. 1A, 1B, and 2 a configuration example of a glass substrate end surface grinding apparatus provided with an end surface grinding wheel will be described with reference to FIGS. 1A, 1B, and 2.
  • FIG. 1A, 1B, and 2 a configuration example of a glass substrate end surface grinding apparatus provided with an end surface grinding wheel will be described with reference to FIGS. 1A, 1B, and 2.
  • FIG. 1A and 1B are schematic views of the glass substrate end surface grinding apparatus 10, FIG. 1A is a side view, and FIG. 1B is a top view.
  • the dressing method of this Embodiment is not limited to the end surface grinding apparatus which concerns.
  • the rectangular workpiece W (glass substrate) to be ground is detachably held on the holding means 11 with the end face exposed from the holding means 11.
  • the holding means 11 is disposed on a traveling body S that can move in the left-right direction in FIG. 1 (the arrow direction in FIG. 1A and FIG. 1B). It is configured to be transportable.
  • the conveyance mechanism 12 can be comprised so that the conveyance speed (feeding speed) of the workpiece
  • work W can be controlled by the controller 100 (control part) mentioned later.
  • FIG. 1B shows an example in which one grinding mechanism 13 is arranged on each of the left and right sides of the conveyance mechanism 12 (in the direction orthogonal to the conveyance direction of the workpiece W) (in FIG. 1A, only one grinding mechanism 13 is shown for easy understanding of the structure).
  • a plurality of grinding mechanisms can be arranged in the conveying direction by changing the type and roughness of the grindstone as in rough grinding and finishing.
  • the grinding mechanism 13 is preferably configured so that the distance from the workpiece W can be changed manually or automatically in order to adjust the grinding amount (grinding width).
  • the grinding mechanism 13 is preferably provided with a servo mechanism or the like.
  • the position of the grinding mechanism 13 can also be configured to be controlled by the controller 100 (control unit) described later.
  • the grinding mechanism 13 has a cylindrical end grinding wheel (hereinafter, also simply referred to as “grinding stone”) 132 inside the grinding mechanism 13, and the grinding stone 132 at the center axis of the grinding stone 132 during grinding processing.
  • a motor 131 is provided for rotationally driving the motor as a rotation axis.
  • a grinding mechanism 13 includes a coolant supply mechanism 14 for supplying coolant (coolant) to the periphery of a portion where the grindstone 132 and the workpiece W are in contact with each other, and a suction mechanism 15 for drawing the used coolant through the duct L. Can be connected to.
  • the coolant supplied to the periphery of the portion where the grindstone and the workpiece W come into contact with each other during grinding by the coolant supply mechanism 14 is collected by the suction mechanism 15 and then circulated and used by removing foreign substances with a filter or the like.
  • the dressing material is mixed into the coolant and cannot be removed by a filter during the grinding process.
  • the workpiece W was scratched by the foreign matter.
  • the dressing method of the present embodiment since a glass substrate is used as a dressing material, foreign substances (those different from an object to be ground) are not mixed into the coolant even after performing dressing. The problem can be solved.
  • the type of the grindstone 132 is not particularly limited, and for example, a diamond grindstone can be used.
  • a groove 132 (a) is formed on the side surface (circumferential surface) of the grindstone 132, and the end surface of the workpiece W is applied to the groove.
  • the grinding process of the end surface of the workpiece W is performed.
  • the end face of the workpiece W is chamfered according to the surface shape of the groove.
  • FIG. 2 shows an example in which one groove 132 (a) is provided.
  • a plurality of grooves are provided at predetermined intervals in the axial direction, and each groove is ground when continuously operating the end face grinding apparatus. Depending on the amount or the like, the groove to be used can be switched.
  • the present embodiment relates to a dressing method for an end surface grinding wheel arranged in a grinding mechanism in the above-described glass substrate end surface grinding apparatus, and the dressing method of the present embodiment will be described below.
  • a glass substrate is used as a dressing material, and the feed rate of the glass substrate is made slower than the conditions for grinding the end face during normal product manufacturing, and the amount of grinding of the glass substrate is increased.
  • a glass substrate is supplied to the grindstone for end face grinding (end face grinding apparatus) to recover the processing ability of the grindstone.
  • the feeding speed of the glass substrate is a relative speed between the glass substrate and the grinding mechanism section.
  • the grinding mechanism 13 is fixed, and the end surface grinding is performed to convey the glass substrate.
  • it means the conveyance speed of a glass substrate (workpiece).
  • the grinding mechanism 13 when the glass substrate is fixed and the grinding mechanism 13 is moved, it means the moving speed of the grinding mechanism 13, and when both the glass substrate and the grinding mechanism 13 are transported and moved, the relative speed between the two is determined. Means.
  • the grinding amount means the size (width) of the grinding allowance when the glass substrate end face is ground.
  • the conditions of grinding processing during normal product manufacturing are defined by the characteristics of the edge grinding machine, the shape of the glass substrate, the surface roughness required for the glass substrate product, the type of grindstone (for example, surface roughness and type), etc. Is done. For this reason, the conditions for the grinding processing of the glass substrate end face during normal product production are not limited.
  • the feed rate of the glass substrate is 6000 to 24000 mm / min, and the grinding amount is 80 to 240 ⁇ m. It is preferable to carry out under conditions.
  • the dressing method of this embodiment is a glass substrate that is a dressing material for the grindstone for end face grinding so that it is slower than the feed rate of the glass substrate for the grinding process at the time of product manufacture and the grinding amount is increased. Any other method may be used, and other conditions are not limited.
  • the feeding speed of the glass substrate used as the dressing material can be set to 1/6 or more of the feeding speed of the glass substrate when the end surface is ground during the production of the product.
  • the glass substrate feed rate used as the dressing material can be reduced to 1/6 or more of the glass substrate feed rate at the time of product manufacture, the reduction in the operating rate of the glass substrate end face grinding device is suppressed, and the productivity is improved. Can be maintained.
  • the feed rate of the glass substrate used as a dressing material can be set to 1/3 or less of the feed rate of the glass substrate when the end surface is ground during product production. A sufficient dressing effect can be obtained by setting the feeding speed of the glass substrate used as the dressing material to 1/3 or less of the feeding speed of the glass substrate at the time of manufacturing the product.
  • the amount of grinding of the glass substrate used as the dressing material can be 1.1 times or more of the amount of grinding of the glass substrate when the end surface is ground during product production.
  • a sufficient dressing effect can be obtained by making the grinding amount of the glass substrate used as the dressing material 1.1 times or more of the grinding amount of the glass substrate at the time of manufacturing the product.
  • the grinding amount of the glass substrate used as a dressing material can be 3.5 times or less of the grinding amount of the glass substrate when the end surface is ground during the production of the product.
  • the glass substrate used as the dressing material is not particularly limited, and various glass substrates can be used.
  • a glass substrate can be prepared exclusively for dressing and used for dressing.
  • the glass substrate used at the time of normal product manufacture can also be used.
  • the size is not particularly limited as long as a sufficient amount of grinding can be ensured.
  • the size is the same as that of a glass substrate of a normal product so that the configuration and arrangement of the end face grinding apparatus need not be changed.
  • the material is not particularly limited, it is preferable to use a glass substrate made of the same material as the glass substrate for products.
  • the glass substrate used as the dressing material can be used either a glass substrate that has been subjected to end face grinding processing or a glass substrate that has not been subjected to grinding processing.
  • the glass substrate used as the dressing material is sufficient without changing the surface shape of the groove of the grindstone regardless of the presence or absence of the grinding process (chamfering process) of the end face part. This is because the effect of dressing can be obtained.
  • the step of processing the glass substrate in advance can be omitted, so that the working efficiency can be increased, which is preferable from the viewpoint of cost.
  • dressing can be performed without changing the glass substrate only by changing the operating conditions of the end grinding device for glass substrate that has been operating normally (slowing the feed rate and increasing the grinding amount). It can be performed. Furthermore, after the dressing is completed, the glass substrate end face can be ground by returning to normal operating conditions. For this reason, since the fall of the operation rate of the end surface grinding apparatus of a glass substrate can also be suppressed especially, it is preferable.
  • a glass substrate used as a dressing material it is preferable to use (can be used) a glass substrate used as a dressing material.
  • a glass substrate used at the time of product manufacture is used as a dressing material, it can be used as a product as long as the amount of grinding increased during dressing is within the tolerance range of the product. In this case, it is not necessary to discard or rework the glass substrate used for dressing, which is preferable from the viewpoint of reducing the cost and environmental burden.
  • the timing for performing the dressing method of the present embodiment is not particularly limited, and can be arbitrarily set. For example, it is possible to perform dressing periodically based on the accumulated grinding amount of the grinding wheel for end face grinding (groove of the grindstone), or to inspect the ground product and perform it at an arbitrary timing based on the inspection result.
  • Fig. 3 shows an example of a specific dressing control flow.
  • dressing is performed at an arbitrary timing based on the accumulated grinding amount of the grindstone for end face grinding.
  • a grindstone for end face grinding is set in the end face grinding apparatus 10 for the end face of the glass substrate, and operation is started under the conditions at the time of product manufacture.
  • the grinding wheel cumulative grinding amount (A) for counting the cumulative grinding amount (processing amount) of the end face grinding wheel is reset to 0 (step S10).
  • the dressing interval grindstone integrated grinding amount (B), which is the cumulative grinding amount (processing amount) since the last dressing, is reset to 0 (step S12).
  • step S14 an end surface grinding process of the glass substrate is performed (step S14).
  • This step is a step of grinding the end face of the glass substrate during product manufacture.
  • the glass substrate is fed to the end surface grinding wheel at a first feed rate, and the end surface of the glass substrate is ground with a first grinding amount. Accordingly, the value of the grinding wheel cumulative grinding amount (A) and the dressing interval grinding wheel cumulative grinding amount (B) are counted up according to the grinding amount (step S16).
  • the following determination is made at a predetermined timing (for example, every time one glass substrate end face grinding process is performed).
  • the set value (A1) defines the accumulated grinding amount of the end surface grinding wheel from when the end surface grinding wheel is installed in the end surface grinding device to when it needs to be replaced. It is defined in advance based on the grindstone for end face grinding, the type of glass substrate to be ground, and the like. That is, since the set value (A1) is defined as a limit value that can be used for the grindstone for end face grinding, it is necessary to replace the grindstone for end face grinding when it is determined that the set value (A1) has been reached.
  • step S18 when it is determined that the set value (A1) has been reached (Yes in step S18), the operation is stopped (step S34), and the end grinding wheel is replaced. If it is determined that the set value (A1) has not been reached (No in step S18), the process proceeds to the next determination.
  • Step S20 As a result of inspecting the end face of the manufactured glass substrate, it is determined whether or not an arbitrary glass dressing start button that is arbitrarily pressed when it is determined that sufficient grinding is not performed.
  • step S24 a dressing process described later is performed. If it is determined that the button has not been pressed (No in step S20), the process proceeds to the next determination.
  • the set value (B1) defines the cumulative grinding amount of the grindstone for end face grinding after dressing until the next dressing.
  • the set value (B1) is defined in advance based on, for example, the configuration of the end face grinding apparatus, the grindstone for end face grinding, the type of the glass substrate to be ground, and the like. .
  • step S22 If it is determined that the set value (B1) has not been reached (No in step S22), the grinding process of the glass substrate end face is repeated.
  • step S22 If it is determined that the set value (B1) has been reached (Yes in step S22), the set value (B1) as described above is accumulated from the last dressing to the next. Since the amount of grinding is determined, dressing is automatically executed (step S24).
  • the glass substrate feed speed (grinding wheel processing speed) is changed to the dressing feed speed as described above, and the position of the grinding mechanism is changed so that the grinding amount becomes a condition for dressing (step). S26).
  • dressing is performed using the glass substrate as a dressing material (step S28).
  • This step is a step of dressing the grindstone for end face grinding using the end face of the glass substrate as a dressing material for the grindstone for end face grinding.
  • the glass substrate is fed to the edge grinding wheel at a second feed rate that is slower than the first feed rate.
  • the end surface of the glass substrate is ground with a second grinding amount larger than the first grinding amount.
  • the grinding mechanism 13 is controlled to reduce the distance between the grindstone for end face grinding and the end face of the glass substrate used as the dressing material.
  • the feed speed and the grinding amount are returned to the normal operating conditions, that is, the original setting values (conditions for manufacturing the product) during the grinding process (steps S30 and S32). ). Then, the dressing interval grindstone integrated grinding amount (B) is reset to 0 (step S12), and the grinding processing of the glass substrate end face is performed again.
  • the glass substrate end face can be ground while performing dressing at a predetermined timing without stopping the end face grinding device for the glass substrate end face.
  • steps S14 to S22 can be made every time processing is performed on a predetermined number (one or more) of glass substrates.
  • FIG. 5 is a block diagram functionally showing the configuration of the controller 100.
  • the controller 100 includes a control unit 102 and a setting condition storage unit 104.
  • the setting condition storage unit 104 includes the setting value (A1), the setting value (B1), the glass substrate feed speed and the grinding amount (position of the grinding mechanism 13) under normal operating conditions (product manufacturing), and the glass dressing time.
  • Preset conditions such as the glass substrate feed speed and grinding amount (position of the grinding mechanism 13), the predetermined timing for determining in steps S18 to S22 in FIG. 3, the predetermined execution time for performing glass dressing, and the like are stored. .
  • a plurality of these conditions can be set according to the type of glass substrate and the required product characteristics.
  • each grinding mechanism 13 You can set conditions.
  • the setting condition storage unit 104 stores these conditions.
  • the predetermined execution time for performing the glass dressing can be set, for example, according to the feed rate and the grinding amount of the glass substrate during the glass dressing. For example, as described above, when the grinding amount at the time of dressing is the same as that at the time of normal operation, the predetermined execution time for performing the glass dressing can be set to be long. In addition, the distance for performing glass dressing and the number of glass substrates for performing glass dressing can be set instead of the predetermined execution time for performing glass dressing.
  • the control unit 102 refers to the conditions set in the setting condition storage unit 104 and controls each procedure in the flowchart shown in FIG. Further, the control unit 102 controls the transport mechanism 12 and the grinding mechanism 13 based on the conditions set in the setting condition storage unit 104 so that the normal operation conditions and the glass dressing are performed.
  • the control unit 102 refers to the flag and performs the determination in step S20 of FIG. Can do.
  • the controller 100 can be configured by a computer having a central processing unit (CPU) that performs various controls, an input / output device, a storage device, and the like, and a configuration in which an execution program that causes the computer to execute each function described above is installed. can do.
  • CPU central processing unit
  • the glass substrate manufacturing apparatus is stopped. It becomes possible to perform dressing of a grindstone without this. For this reason, productivity is improved as compared with the prior art, and it is not necessary for the operator to manually perform dressing, and dressing can be easily performed.
  • the surface condition of the groove of the grindstone after dressing by the operator does not occur as in the conventional case, the processing ability of the grindstone can be stably recovered, and the surface shape of the groove formed on the grindstone is deformed. Can also prevent. For this reason, it becomes possible to manufacture more stable quality glass substrates continuously.
  • Example 1 In the present example, in the glass substrate end surface grinding apparatus having the same configuration as that shown in FIGS. 1A and 1B, dressing was performed on an end surface grinding grindstone that had undergone a grinding process on the glass substrate end surface to reduce the processing ability.
  • the grindstone for end face grinding a cylindrical one having a diameter of 150 ⁇ was used, and a diamond grindstone in which eight grooves having the same shape were formed on the side surface was used.
  • Table 1 the eight grooves formed on the side surface of the grindstone for end face grinding are in the same state with a cumulative processing (grinding) distance of about 1500 m, and each groove was dressed and evaluated. Eight grooves correspond to Examples 1-1 to 1-8 in Table 1.
  • Dressing is performed using the same material and the same size glass substrate (non-alkali glass, manufactured by Asahi Glass Co., Ltd., product name: AN100) as that used during normal product manufacturing, one for each groove. It was. Specifically, a glass substrate having a size of 1850 mm in width, 1500 mm in length, and 0.7 mm in thickness and not subjected to end face grinding in advance was used in this example.
  • Table 1-1 shows Examples 1-1 to As shown in Example 1-8, dressing was performed by changing the feed rate and grinding amount for each groove.
  • Example 1-4 in which the feed rate is 1000 mm / min and the grinding amount is 500 ⁇ m and Example 1-8 in which the feed rate is 2000 mm / min and the grinding amount is 400 ⁇ m are recovered to the same level as before the use of the grindstone. It was confirmed that
  • Example 2 In this example, the feed rate and the grinding amount were changed for each groove in the same manner as in Example 1 except that a glass substrate that had been subjected to end face grinding processing in advance was used as the glass substrate used for dressing. The experiment was conducted.
  • the glass substrate that has been subjected to the end surface grinding processing in advance here is a glass substrate that has been subjected to grinding processing once for the end surface of the glass substrate using the same glass substrate end surface grinding device under the conditions for normal products. It means that there is.
  • Example 2 As the grinding wheel for end face grinding, a 150 ⁇ cylindrical one was used as in Example 1, and a diamond grinding stone having eight grooves of the same shape formed on its side surface was used. As shown in Table 2, the eight grooves formed on the side surface of the grindstone for end face grinding were in the same state with a cumulative processing (grinding) distance of about 1500 m, and each groove was dressed and evaluated. Eight grooves correspond to Examples 2-1 to 2-8 in Table 2.
  • Example 2-4 in which the feed rate is 1000 mm / min and the grinding amount is 500 ⁇ m and Example 2-8 in which the feed rate is 2000 mm / min and the grinding amount is 400 ⁇ m are recovered to the same level as before the start of use of the grindstone. It was confirmed that
  • Example 3 In the present Example, in the end surface grinding apparatus of the glass substrate which has the same structure as FIG. 1A and FIG. 1B, dressing was performed by changing the kind of glass substrate with Example 1,2.
  • Dressing was performed using a glass substrate (soda lime glass, manufactured by Asahi Glass Co., Ltd., product name: PD200) having the same material and size as those used during normal product manufacture as a dressing material.
  • the size of the glass substrate was 2250 mm wide ⁇ 1900 mm long ⁇ 1.8 mm thick, and a glass substrate not subjected to end face grinding was used.
  • Example 3-1 dressing was performed with two types of diamond grinding stones having different surface roughness.
  • the grindstone for end face grinding was a cylindrical shape of 204 ⁇ , and one having grooves formed on the side surface of the grindstone was used.
  • Example 3-1 dressing was performed for an accumulated machining distance of 16000 m
  • Example 3-2 dressing was performed for an accumulated machining distance of 6000 m.
  • the cumulative machining distance after the last dressing is 1000 m.
  • Example 3-1 and Example 3-2 during normal product manufacturing, the glass substrate end face is ground under the conditions of a glass substrate feed rate of 20000 mm / min and a grinding amount of 160 ⁇ m.
  • the conditions were such that the glass substrate feed rate was 4000 mm / min and the grinding amount was 500 ⁇ m.
  • the surface roughness, protrusion amount, and wear amount were measured before the start of use (the state at the time of grinding wheel shipment) and the groove portion of the grinding wheel for end face grinding after dressing.
  • the surface roughness was measured using a surface roughness meter (product name: Surfcom 1400A-12, manufactured by Tokyo Seimitsu Co., Ltd.). Further, the groove portion was magnified 100 times using a microscope (trade name: VHX-100F, manufactured by Keyence Corporation), and the surface was observed.
  • Table 3 shows the measurement results of the surface roughness, protrusion amount, and wear amount.
  • 4A to 4D show surface images of the groove portion of the grinding wheel for end face grinding before use and after dressing.
  • FIG. 4A and 4B are surface images of the groove portion of the grinding wheel for end face grinding in Example 3-1, FIG. 4A is a surface image after dressing, and FIG. 4B is a surface image before starting use.
  • FIG. 4C and 4D are surface images of the groove portion of the end face grinding wheel of Example 3-2.
  • FIG. 4C is a surface image after dressing and FIG.
  • the dressing method for the end face grinding can be performed by the dressing method of the present embodiment regardless of the type and size of the glass substrate and the grindstone.
  • the dressing method of the grinding wheel for end face grinding of the glass substrate according to the present embodiment uses a glass substrate as a dressing material, makes the feed rate slower than that at the time of product manufacture, and increases the grinding amount (processing amount) than at the time of product manufacture. In this way, dressing is performed by supplying a glass substrate to the end face grinding apparatus. For this reason, it is possible to perform dressing without stopping the end surface grinding apparatus, and it is possible to improve the productivity as compared with the prior art, and it is not necessary for the operator to manually perform dressing, and dressing can be easily performed.
  • the surface condition of the groove of the grindstone after dressing by the operator does not occur, and the processing ability of the grindstone can be stably recovered, and the surface of the groove formed on the grindstone Shape deformation can also be prevented.

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  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Chemical & Material Sciences (AREA)
  • Ceramic Engineering (AREA)
  • Inorganic Chemistry (AREA)
  • Grinding And Polishing Of Tertiary Curved Surfaces And Surfaces With Complex Shapes (AREA)
  • Manufacturing Of Magnetic Record Carriers (AREA)
  • Grinding-Machine Dressing And Accessory Apparatuses (AREA)
  • Finish Polishing, Edge Sharpening, And Grinding By Specific Grinding Devices (AREA)
  • Grinding Of Cylindrical And Plane Surfaces (AREA)

Abstract

A dressing method for a glass substrate edge-grinding grindstone and a glass substrate manufacturing method using said dressing method. The glass substrate edge-grinding grindstone dressing method is characterized in that: a glass substrate is used as the dressing material; and the glass substrate being used as the dressing material is supplied to the edge-grinding grindstone so that the feed rate for the glass substrate being used as the dressing material is slower than the feed rate for glass substrates when the edges thereof are ground during product manufacture, and the grinding allowance for the glass substrate being used as the dressing material is greater than the grinding allowance for glass substrates when the edges thereof are ground during product manufacture.

Description

ガラス基板の端面研削用砥石のドレッシング方法および該ドレッシング方法を用いたガラス基板の製造方法Method for dressing a grinding wheel for end grinding of a glass substrate and method for producing a glass substrate using the dressing method
 本発明は、ガラス基板の端面研削用砥石のドレッシング方法および該ドレッシング方法を用いたガラス基板の製造方法に関する。 The present invention relates to a dressing method for a grindstone for grinding an end face of a glass substrate and a method for producing a glass substrate using the dressing method.
 板ガラスや液晶パネル等のガラス基板は所定のサイズに切断加工した後、四辺の端面について研削及び面取り加工することにより、製品外径寸法のガラス基板に加工される。 A glass substrate such as a plate glass or a liquid crystal panel is cut into a predetermined size and then processed into a glass substrate having a product outer diameter by grinding and chamfering the end faces of the four sides.
 係る研削及び面取り加工を行う研削加工処理は、その側面に円周方向に沿って溝が形成された円柱形状の砥石を回転させ、該溝部分(溝の表面)に研削対象であるガラス基板の端面を当てながら、ガラス基板または砥石を移動させることにより行われる(例えば、特許文献1)。 Grinding processing for performing such grinding and chamfering is performed by rotating a cylindrical grindstone having a groove formed on its side surface along the circumferential direction, and the groove portion (groove surface) of the glass substrate to be ground. This is performed by moving the glass substrate or the grindstone while applying the end face (for example, Patent Document 1).
 ガラス基板端面の研削加工処理は複数のガラス基板について連続して実施することができるが、研削量の増加に伴い砥石の溝の表面の目が詰まる目詰まり(Loading)や、砥粒が落ちる目こぼれ(Shedding)等が起き砥石の加工能力が低下する。このため、定期的にガラス基板の端面研削装置を止め、砥石の切れ味を鋭利にして能力を回復させるドレッシングが行なわれている。 Grinding processing of the glass substrate end face can be carried out continuously for a plurality of glass substrates, but as the amount of grinding increases, the clogging of the surface of the grindstone groove (loading), or the abrasive grains falling Spilling or the like occurs and the processing ability of the grindstone decreases. For this reason, dressing is performed in which the end surface grinding apparatus for the glass substrate is periodically stopped to sharpen the grindstone and restore its ability.
特願2010-268055Japanese Patent Application 2010-268055
 しかしながら、従来のドレッシング方法によれば、ドレッシングを行っている間は端面研削装置を止め、作業員が端面研削用砥石にドレッシング材を当てて実施する必要があった。 However, according to the conventional dressing method, it is necessary to stop the end surface grinding device during dressing and to apply the dressing material to the end surface grinding wheel.
 このため、端面研削装置の稼働率が下がり生産性が低下するという問題があった。 For this reason, there was a problem that the operating rate of the end face grinding device was lowered and the productivity was lowered.
 さらに、作業者が手作業によりドレッシングを行うため、作業者によってドレッシング後の砥石の溝の表面の状態にバラツキが生じ、ドレッシングを行ったとしても砥石の加工能力が回復しない場合や、砥石の溝部の形状が変形してしまう場合がある等の問題もあった。 Furthermore, since the operator performs dressing manually, the surface condition of the grindstone groove after dressing varies by the operator, and even if dressing is performed, the grindstone processing capacity does not recover, or the grindstone groove There was also a problem that the shape of the case may be deformed.
 本発明は上記従来技術が有する問題に鑑み、ガラス基板の端面研削装置を止めることなくドレッシングを行うことが可能であり、作業者によらず安定して砥石の加工能力を回復させることができる、ガラス基板の端面研削用砥石のドレッシング方法を提供することを目的とする。 In view of the problems of the prior art described above, the present invention can perform dressing without stopping the end surface grinding apparatus for the glass substrate, and can stably recover the processing ability of the grindstone regardless of the operator. It aims at providing the dressing method of the grindstone for the end surface grinding of a glass substrate.
 一つの形態によれば、ガラス基板の端面研削用砥石のドレッシング方法であって、ドレッシング材としてガラス基板を用い、ドレッシング材として用いる前記ガラス基板の送り速度を、製品製造時に端面を研削加工処理する際のガラス基板の送り速度よりも遅くし、ドレッシング材として用いる前記ガラス基板の研削量が、製品製造時に端面を研削加工処理する際のガラス基板の研削量よりも多くなるように、前記端面研削用砥石に対してドレッシング材として用いる前記ガラス基板を供給することを特徴とするガラス基板の端面研削用砥石のドレッシング方法が提供される。 According to one embodiment, there is provided a dressing method for a grindstone for grinding an end surface of a glass substrate, wherein the glass substrate is used as a dressing material, and the feed rate of the glass substrate used as a dressing material is ground at the time of product manufacture. The end surface grinding is performed so that the amount of grinding of the glass substrate used as a dressing material is slower than the feeding rate of the glass substrate at the time of manufacture, and is larger than the amount of grinding of the glass substrate when the end surface is ground during product manufacture. A glass dressing method for grinding an end surface of a glass substrate is provided, wherein the glass substrate used as a dressing material is supplied to a grinding wheel for use.
 他の形態によれば、製品製造時において、ガラス基板を端面研削用砥石に対して第1の送り速度で送りながら第1の研削量で当該ガラス基板の端面を研削加工処理する通常工程と、所定のタイミングで、前記端面研削用砥石のドレッシングが必要か否かを判断する工程と、前記ドレッシングが必要と判断された場合に、ガラス基板を前記端面研削用砥石に対して前記第1の送り速度よりも遅い第2の送り速度で送りながら、前記第1の研削量よりも多い第2の研削量で当該ガラス基板の端面を研削加工処理するドレッシング工程と、
を含むガラス基板の製造方法が提供される。
According to another aspect, at the time of product manufacture, a normal process of grinding the end face of the glass substrate with a first grinding amount while feeding the glass substrate to the grindstone for end face grinding at a first feed rate; A step of determining whether or not dressing of the end surface grinding wheel is necessary at a predetermined timing; and when the dressing is determined to be necessary, the first feeding of the glass substrate to the end surface grinding wheel A dressing step of grinding the end face of the glass substrate with a second grinding amount larger than the first grinding amount while feeding at a second feeding speed slower than the speed;
The manufacturing method of the glass substrate containing this is provided.
実施形態に係るガラス基板の端面研削装置の側面図Side view of an end surface grinding apparatus for a glass substrate according to an embodiment 実施形態に係るガラス基板の端面研削装置の上面図The top view of the end surface grinding device of the glass substrate concerning an embodiment 実施形態に係るガラス基板の端面研削装置で用いる端面研削用砥石の説明図Explanatory drawing of the grindstone for end surface grinding used with the end surface grinding apparatus of the glass substrate which concerns on embodiment 実施形態に係るドレッシングの制御フローControl flow of dressing according to the embodiment 実施例3における例3-1のドレッシング後の砥石の溝表面の観察図Observation view of groove surface of grindstone after dressing of Example 3-1 in Example 3 実施例3における例3-1の使用開始前の砥石の溝表面の観察図Observation view of groove surface of grindstone before start of use of Example 3-1 in Example 3 実施例3における例3-2のドレッシング後の砥石の溝表面の観察図Observation view of groove surface of grindstone after dressing in Example 3-2 in Example 3 実施例3における例3-2の使用前の砥石の溝表面の観察図Observation view of groove surface of grindstone before use of Example 3-2 in Example 3 コントローラーの構成の一例を示す図Diagram showing an example of controller configuration
 以下、本発明を実施するための形態について図面を参照して説明するが、本発明は、下記の実施形態に制限されることはなく、本発明の範囲を逸脱することなく、下記の実施形態に種々の変形および置換を加えることができる。 DESCRIPTION OF EMBODIMENTS Hereinafter, embodiments for carrying out the present invention will be described with reference to the drawings. However, the present invention is not limited to the following embodiments, and the following embodiments are not departed from the scope of the present invention. Various modifications and substitutions can be made.
 本実施の形態では、ガラス基板の端面研削用砥石のドレッシング方法について説明を行う。 In the present embodiment, a method for dressing a grindstone for grinding an end face of a glass substrate will be described.
 まず、端面研削用砥石が設置されたガラス基板の端面研削装置の構成例について図1A、図1B、図2を用いて説明する。 First, a configuration example of a glass substrate end surface grinding apparatus provided with an end surface grinding wheel will be described with reference to FIGS. 1A, 1B, and 2. FIG.
 図1A、図1Bはガラス基板の端面研削装置10の概略図であり、図1Aは側面図、図1Bは上面図を示している。なお、本実施の形態のドレッシング方法は、係る端面研削装置に限定されるものではない。 1A and 1B are schematic views of the glass substrate end surface grinding apparatus 10, FIG. 1A is a side view, and FIG. 1B is a top view. In addition, the dressing method of this Embodiment is not limited to the end surface grinding apparatus which concerns.
 研削対象となる矩形状のワークW(ガラス基板)は、保持手段11上に、端面が保持手段11から露出した状態で着脱可能に保持される。保持手段11は図1中左右方向(図1A、図1B中の矢印方向)に移動可能な走行体S上に配置されており、搬送機構12により、走行体Sを介してワークWを左右方向に搬送可能に構成されている。また、搬送機構12は、後述するコントローラー100(制御部)によりワークWの搬送速度(送り速度)を制御できるように構成することができる。 The rectangular workpiece W (glass substrate) to be ground is detachably held on the holding means 11 with the end face exposed from the holding means 11. The holding means 11 is disposed on a traveling body S that can move in the left-right direction in FIG. 1 (the arrow direction in FIG. 1A and FIG. 1B). It is configured to be transportable. Moreover, the conveyance mechanism 12 can be comprised so that the conveyance speed (feeding speed) of the workpiece | work W can be controlled by the controller 100 (control part) mentioned later.
 保持手段11上に保持されたワークWは、搬送機構12により、研削機構13が設置された位置へと搬送され、その両端面部分について、研削及び面取り処理(以下、単に研削加工処理とする)が行われる。研削機構13は、図1Bでは搬送機構12の左右(ワークWの搬送方向に対して直交方向)に1つずつ配置した例を示しているが(図1Aでは構造が分かり易いよう1つのみを記載している)、例えば粗研削用、仕上げ用のように砥石の種類、粗さをかえて搬送方向に複数の研削機構を配置することもできる。 The workpiece W held on the holding means 11 is transferred by the transfer mechanism 12 to the position where the grinding mechanism 13 is installed, and grinding and chamfering processing (hereinafter simply referred to as grinding processing) is performed on both end portions thereof. Is done. FIG. 1B shows an example in which one grinding mechanism 13 is arranged on each of the left and right sides of the conveyance mechanism 12 (in the direction orthogonal to the conveyance direction of the workpiece W) (in FIG. 1A, only one grinding mechanism 13 is shown for easy understanding of the structure). For example, a plurality of grinding mechanisms can be arranged in the conveying direction by changing the type and roughness of the grindstone as in rough grinding and finishing.
 研削機構13は研削量(研削幅)を調整するために、手動または自動でワークWとの間の距離を変更できるように構成されていることが好ましい。具体的には、例えば研削機構13にサーボ機構等を備えていることが好ましい。本実施の形態において、研削機構13の位置(ワークWとの距離)も、後述するコントローラー100(制御部)により制御できるように構成することができる。 The grinding mechanism 13 is preferably configured so that the distance from the workpiece W can be changed manually or automatically in order to adjust the grinding amount (grinding width). Specifically, for example, the grinding mechanism 13 is preferably provided with a servo mechanism or the like. In the present embodiment, the position of the grinding mechanism 13 (distance from the workpiece W) can also be configured to be controlled by the controller 100 (control unit) described later.
 研削機構13は、図1Bに示したように、その内部に円柱形状の端面研削用砥石(以下、単に「砥石」とも記載する。)132、研削加工処理時に砥石132を、砥石132の中心軸を回転軸として回転駆動させるモーター131が配置されている。さらに、研削時、砥石132とワークWとが接触する部分周辺にクーラント(冷却剤)を供給するためのクーラント供給機構14、ダクトLを介して使用済みのクーラントを引き込む吸引機構15が研削機構13に接続することができる。 As shown in FIG. 1B, the grinding mechanism 13 has a cylindrical end grinding wheel (hereinafter, also simply referred to as “grinding stone”) 132 inside the grinding mechanism 13, and the grinding stone 132 at the center axis of the grinding stone 132 during grinding processing. A motor 131 is provided for rotationally driving the motor as a rotation axis. Further, a grinding mechanism 13 includes a coolant supply mechanism 14 for supplying coolant (coolant) to the periphery of a portion where the grindstone 132 and the workpiece W are in contact with each other, and a suction mechanism 15 for drawing the used coolant through the duct L. Can be connected to.
 なお、通常、上記クーラント供給機構14により研削時に砥石とワークWとが接触する部分周辺に供給するクーラントは上記吸引機構15で回収した後、フィルター等により異物を除去して循環利用されている。このため、従来のドレッシング方法のように被研削物のワークW(ガラス基板)とは異なる材質のドレッシング材を用いた場合、クーラントにドレッシング材が混入し、研削工程中にフィルターで除去しきれなかった異物によりワークWにキズを生じる等の問題があった。しかし、本実施の形態のドレッシング方法によればドレッシング材としてガラス基板を用いているため、ドレッシングを行った後もクーラントに異物(被研削物とは異なるもの)が混入することがないため、上記問題も解消できる。 Normally, the coolant supplied to the periphery of the portion where the grindstone and the workpiece W come into contact with each other during grinding by the coolant supply mechanism 14 is collected by the suction mechanism 15 and then circulated and used by removing foreign substances with a filter or the like. For this reason, when a dressing material made of a material different from the workpiece W (glass substrate) of the object to be ground is used as in the conventional dressing method, the dressing material is mixed into the coolant and cannot be removed by a filter during the grinding process. There was a problem that the workpiece W was scratched by the foreign matter. However, according to the dressing method of the present embodiment, since a glass substrate is used as a dressing material, foreign substances (those different from an object to be ground) are not mixed into the coolant even after performing dressing. The problem can be solved.
 砥石132の種類については特に限定されるものではなく、例えばダイヤモンド砥石を用いることができる。そして、砥石132の側面(周面)には、図2に示した砥石の横側面図からも分かるように、溝132(a)が形成されており、ワークWの端面をこの溝に当てながらワークWを搬送させることによりワークWの端面の研削加工処理が行われる。この際、溝の表面形状にあわせて、ワークWの端面の面取りが行われることになる。図2においては溝132(a)を一本設けた例を示したが、例えば溝を軸方向に所定間隔で複数本設けておき、連続的に端面研削装置を運転する際に各溝の研削量等に応じて、使用する溝を切り替えることもできる。 The type of the grindstone 132 is not particularly limited, and for example, a diamond grindstone can be used. Further, as can be seen from the lateral side view of the grindstone shown in FIG. 2, a groove 132 (a) is formed on the side surface (circumferential surface) of the grindstone 132, and the end surface of the workpiece W is applied to the groove. By conveying the workpiece W, the grinding process of the end surface of the workpiece W is performed. At this time, the end face of the workpiece W is chamfered according to the surface shape of the groove. FIG. 2 shows an example in which one groove 132 (a) is provided. For example, a plurality of grooves are provided at predetermined intervals in the axial direction, and each groove is ground when continuously operating the end face grinding apparatus. Depending on the amount or the like, the groove to be used can be switched.
 なお、ここでは、ワークWを搬送してその端面を研削加工する端面研削装置について説明を行ったが、ワークWは固定して研削機構13が移動するように構成しても良く、ワークW、研削機構13の両方を搬送、移動するように構成しても良い。 In addition, although the end surface grinding apparatus which conveys the workpiece | work W and grinds the end surface was demonstrated here, you may comprise so that the workpiece | work W may be fixed and the grinding mechanism 13 may move, You may comprise so that both of the grinding mechanisms 13 may be conveyed and moved.
 そして、本実施の形態は上記に説明したようなガラス基板の端面研削装置において研削機構に配置された端面研削用砥石のドレッシング方法に関し、以下に本実施の形態のドレッシング方法について説明する。 The present embodiment relates to a dressing method for an end surface grinding wheel arranged in a grinding mechanism in the above-described glass substrate end surface grinding apparatus, and the dressing method of the present embodiment will be described below.
 通常の研削加工処理条件(製品の製造条件)で研削を行っていると、切り屑(研削屑)によって砥石の溝の表面の目が詰まる目詰まりや、砥粒が落ちる目こぼれなどの現象が起き、砥石の加工能力は低下してくる。 If grinding is performed under normal grinding conditions (product manufacturing conditions), clogging of the surface of the grindstone grooves due to chips (grinding debris) or spilling of abrasive grains may occur. Waking up, the processing capacity of the grindstone will decline.
 本実施の形態のドレッシング方法は、ドレッシング材としてガラス基板を用い、通常の製品製造時に端面を研削加工処理する際の条件よりもガラス基板の送り速度を遅くし、ガラス基板の研削量が多くなるように、端面研削用砥石(端面研削装置)にガラス基板を供給し砥石の加工能力を回復させるものである。 In the dressing method of the present embodiment, a glass substrate is used as a dressing material, and the feed rate of the glass substrate is made slower than the conditions for grinding the end face during normal product manufacturing, and the amount of grinding of the glass substrate is increased. Thus, a glass substrate is supplied to the grindstone for end face grinding (end face grinding apparatus) to recover the processing ability of the grindstone.
 これは、ガラス基板の通常の製品加工時の条件よりも送り速度を遅くし、研削量を多くすることにより、砥石の溝の表面に付着していた切り屑(研削屑)を除去したり、砥石のうち削られ易い砥粒ボンド材を一部除去して、砥粒を砥石の溝の表面に出す効果が得られるためと考えられる。 This is to remove the chips (grinding debris) adhering to the surface of the grindstone groove by slowing the feed rate and increasing the amount of grinding than the conditions for normal product processing of the glass substrate, This is probably because part of the abrasive bond material that is easily cut out of the grindstone is removed, and the effect of putting the abrasive grains on the surface of the grindstone groove is obtained.
 ここでガラス基板の送り速度とは、ガラス基板と研削機構部との間の相対的な速度であり、例えば図1A、図1Bのように研削機構13を固定し、ガラス基板を搬送させる端面研削装置においては、ガラス基板(ワーク)の搬送速度のことを意味している。また、ガラス基板を固定し、研削機構13を移動させる場合には、研削機構13の移動速度のことを意味し、ガラス基板、研削機構13両方を搬送、移動させる場合には、両者の相対速度を意味する。 Here, the feeding speed of the glass substrate is a relative speed between the glass substrate and the grinding mechanism section. For example, as shown in FIGS. 1A and 1B, the grinding mechanism 13 is fixed, and the end surface grinding is performed to convey the glass substrate. In an apparatus, it means the conveyance speed of a glass substrate (workpiece). Further, when the glass substrate is fixed and the grinding mechanism 13 is moved, it means the moving speed of the grinding mechanism 13, and when both the glass substrate and the grinding mechanism 13 are transported and moved, the relative speed between the two is determined. Means.
 また、研削量(加工量)とは、ガラス基板端面の研削加工処理を行う際の研削代の大きさ(幅)を意味している。 Further, the grinding amount (processing amount) means the size (width) of the grinding allowance when the glass substrate end face is ground.
 通常の製品製造時の研削加工処理の条件は、端面研削装置の特性、ガラス基板の形状、ガラス基板の製品で要求される表面粗さ、砥石の種類(例えば表面粗さや、種類)等により規定される。このため、通常の製品製造時のガラス基板端面の研削加工処理の条件は限定されるものではないが、例えば、ガラス基板の送り速度としては6000~24000mm/min、研削量としては80~240μmの条件で行うことが好ましい。 The conditions of grinding processing during normal product manufacturing are defined by the characteristics of the edge grinding machine, the shape of the glass substrate, the surface roughness required for the glass substrate product, the type of grindstone (for example, surface roughness and type), etc. Is done. For this reason, the conditions for the grinding processing of the glass substrate end face during normal product production are not limited. For example, the feed rate of the glass substrate is 6000 to 24000 mm / min, and the grinding amount is 80 to 240 μm. It is preferable to carry out under conditions.
 そして、本実施の形態のドレッシング方法は、製品製造時の研削加工処理のガラス基板の送り速度よりも遅く、かつ、研削量が多くなるように端面研削用砥石に対してドレッシング材であるガラス基板を供給する方法であればよく、その他の条件は限定されるものではない。 And the dressing method of this embodiment is a glass substrate that is a dressing material for the grindstone for end face grinding so that it is slower than the feed rate of the glass substrate for the grinding process at the time of product manufacture and the grinding amount is increased. Any other method may be used, and other conditions are not limited.
 ドレッシング材として用いるガラス基板の送り速度は、製品製造時に端面を研削加工処理する際のガラス基板の送り速度の1/6以上とすることができる。ドレッシング材として用いているガラス基板の送り速度を製品製造時のガラス基板の送り速度の1/6以上とすることにより、ガラス基板の端面研削装置の稼働率の低下を抑え、生産性を良好に維持できる。また、ドレッシング材として用いるガラス基板の送り速度は、製品製造時に端面を研削加工処理する際のガラス基板の送り速度の1/3以下とすることができる。ドレッシング材として用いているガラス基板の送り速度を製品製造時のガラス基板の送り速度の1/3以下とすることにより、十分なドレッシング効果を得ることができる。 The feeding speed of the glass substrate used as the dressing material can be set to 1/6 or more of the feeding speed of the glass substrate when the end surface is ground during the production of the product. By reducing the glass substrate feed rate used as the dressing material to 1/6 or more of the glass substrate feed rate at the time of product manufacture, the reduction in the operating rate of the glass substrate end face grinding device is suppressed, and the productivity is improved. Can be maintained. Moreover, the feed rate of the glass substrate used as a dressing material can be set to 1/3 or less of the feed rate of the glass substrate when the end surface is ground during product production. A sufficient dressing effect can be obtained by setting the feeding speed of the glass substrate used as the dressing material to 1/3 or less of the feeding speed of the glass substrate at the time of manufacturing the product.
 ドレッシング材として用いるガラス基板の研削量は、製品製造時に端面を研削加工処理する際のガラス基板の研削量の1.1倍以上とすることができる。ドレッシング材として用いるガラス基板の研削量を製品製造時のガラス基板の研削量の1.1倍以上とすることにより、十分なドレッシング効果を得ることができる。また、ドレッシング材として用いるガラス基板の研削量は、製品製造時に端面を研削加工処理する際のガラス基板の研削量の3.5倍以下とすることができる。ドレッシング材として用いるガラス基板の研削量を製品製造時のガラス基板の研削量の3.5倍以下とすることにより、研削加工処理中にガラス基板が割れたりすることを防ぐことができる。 The amount of grinding of the glass substrate used as the dressing material can be 1.1 times or more of the amount of grinding of the glass substrate when the end surface is ground during product production. A sufficient dressing effect can be obtained by making the grinding amount of the glass substrate used as the dressing material 1.1 times or more of the grinding amount of the glass substrate at the time of manufacturing the product. Moreover, the grinding amount of the glass substrate used as a dressing material can be 3.5 times or less of the grinding amount of the glass substrate when the end surface is ground during the production of the product. By setting the grinding amount of the glass substrate used as the dressing material to 3.5 times or less of the grinding amount of the glass substrate at the time of product manufacture, it is possible to prevent the glass substrate from being broken during the grinding process.
 ドレッシング材として用いるガラス基板としては特に限定されるものではなく、各種ガラス基板を使用することができる。例えば、ドレッシング専用にガラス基板を用意し、これをドレッシング時に使用することもできる。また、通常の製品製造時に用いるガラス基板を使用することもできる。 The glass substrate used as the dressing material is not particularly limited, and various glass substrates can be used. For example, a glass substrate can be prepared exclusively for dressing and used for dressing. Moreover, the glass substrate used at the time of normal product manufacture can also be used.
 ドレッシングのために専用のガラス基板を用意する場合、そのサイズについては特に限定されるものではなく、十分な研削量が確保できるサイズであれば良い。ただし、端面研削装置の構成、配置を変更せずに済むよう、通常の製品のガラス基板と同程度のサイズであることが好ましい。特に砥石の溝の表面形状に対応できるよう、製品のガラス基板と同じ厚さのガラス基板を用いることが好ましい。材質も特に限定されるものではないが、製品用のガラス基板と同じ材質のガラス基板を用いることが好ましい。 When a dedicated glass substrate is prepared for dressing, the size is not particularly limited as long as a sufficient amount of grinding can be ensured. However, it is preferable that the size is the same as that of a glass substrate of a normal product so that the configuration and arrangement of the end face grinding apparatus need not be changed. In particular, it is preferable to use a glass substrate having the same thickness as the glass substrate of the product so as to correspond to the surface shape of the groove of the grindstone. Although the material is not particularly limited, it is preferable to use a glass substrate made of the same material as the glass substrate for products.
 また、ドレッシング材として用いるガラス基板は、予め端面の研削加工処理を行ったガラス基板、または、行っていないガラス基板、いずれであっても使用することができる。 Moreover, the glass substrate used as the dressing material can be used either a glass substrate that has been subjected to end face grinding processing or a glass substrate that has not been subjected to grinding processing.
 後述する実施例1、2にも示すように、ドレッシング材として用いるガラス基板は端面部分の研削加工処理(面取り加工)の有無に関わらず、砥石の溝の表面形状を変形させることなく、十分なドレッシングの効果が得られるためである。 As shown in Examples 1 and 2 to be described later, the glass substrate used as the dressing material is sufficient without changing the surface shape of the groove of the grindstone regardless of the presence or absence of the grinding process (chamfering process) of the end face part. This is because the effect of dressing can be obtained.
 特に、予め端面部分の研削加工処理を行っていないガラス基板を使用する場合、ガラス基板に前もって加工する工程を省略することができるため、作業効率を高めることができ、コストの観点からも好ましい。 In particular, when a glass substrate that has not been subjected to grinding processing of the end face portion in advance is used, the step of processing the glass substrate in advance can be omitted, so that the working efficiency can be increased, which is preferable from the viewpoint of cost.
 また、この場合、例えば通常の運転を行っていたガラス基板の端面研削装置の運転条件を変更する(送り速度を遅くし、研削量を多くする)だけでガラス基板の入れ替え等を行わずにドレッシングを行うことができる。さらに、ドレッシング終了後は通常の運転条件に戻しガラス基板端面の研削加工処理を行える。このため、ガラス基板の端面研削装置の稼働率の低下を特に抑制することもできるため好ましい。 In this case, for example, dressing can be performed without changing the glass substrate only by changing the operating conditions of the end grinding device for glass substrate that has been operating normally (slowing the feed rate and increasing the grinding amount). It can be performed. Furthermore, after the dressing is completed, the glass substrate end face can be ground by returning to normal operating conditions. For this reason, since the fall of the operation rate of the end surface grinding apparatus of a glass substrate can also be suppressed especially, it is preferable.
 そして、ドレッシング材として用いたガラス基板も製品として使用する(使用可能である)ことが好ましい。例えば、ドレッシング材として製品製造時に用いるガラス基板を使用した場合、ドレッシングの際に増加する研削量が製品の公差の範囲内に入っていればそのまま製品として使用することが可能になる。この場合、ドレッシングに用いたガラス基板を廃棄または再加工を行う必要がないためコスト、環境への負荷を低減する点からも好ましい。 Further, it is preferable to use (can be used) a glass substrate used as a dressing material. For example, when a glass substrate used at the time of product manufacture is used as a dressing material, it can be used as a product as long as the amount of grinding increased during dressing is within the tolerance range of the product. In this case, it is not necessary to discard or rework the glass substrate used for dressing, which is preferable from the viewpoint of reducing the cost and environmental burden.
 ドレッシングを行う際には、1枚のガラス基板のみで行う必要はない。例えば、1枚のガラス基板だけではドレッシングの効果が十分でない場合や、製品に要求される加工精度(公差)の都合上、十分に研削量を確保できない場合には、2枚またはそれ以上の複数のガラス基板を用いてドレッシングを行うこともできる。 When performing dressing, it is not necessary to perform with only one glass substrate. For example, if the effect of dressing is not enough with only one glass substrate, or if the grinding amount cannot be secured sufficiently due to the processing accuracy (tolerance) required for the product, two or more It is also possible to perform dressing using a glass substrate.
 本実施の形態のドレッシング方法を行うタイミングとしては特に限定されるものではなく、任意に設定することができる。例えば、端面研削用砥石(砥石の溝)の積算研削量に基づいてドレッシングを定期的に行うことや、研削加工した製品について検査を行い、検査結果に基づいて任意のタイミングで行うこともできる。 The timing for performing the dressing method of the present embodiment is not particularly limited, and can be arbitrarily set. For example, it is possible to perform dressing periodically based on the accumulated grinding amount of the grinding wheel for end face grinding (groove of the grindstone), or to inspect the ground product and perform it at an arbitrary timing based on the inspection result.
 具体的なドレッシングの制御フロー例について図3に示す。これは、端面研削用砥石の積算研削量に基づいて、また、任意のタイミングでドレッシングを実施するものである。 Fig. 3 shows an example of a specific dressing control flow. In this method, dressing is performed at an arbitrary timing based on the accumulated grinding amount of the grindstone for end face grinding.
 まず、ガラス基板端面の端面研削装置10に端面研削用砥石をセットし、製品製造時の条件で運転を開始する。ここで、端面研削用砥石の積算研削量(加工量)をカウントする砥石積算研削量(A)を0にリセットする(ステップS10)。また、ドレッシングを最後に行ってからの累積研削量(加工量)である、ドレッシングインターバル砥石積算研削量(B)を0にリセットする(ステップS12)。 First, a grindstone for end face grinding is set in the end face grinding apparatus 10 for the end face of the glass substrate, and operation is started under the conditions at the time of product manufacture. Here, the grinding wheel cumulative grinding amount (A) for counting the cumulative grinding amount (processing amount) of the end face grinding wheel is reset to 0 (step S10). Further, the dressing interval grindstone integrated grinding amount (B), which is the cumulative grinding amount (processing amount) since the last dressing, is reset to 0 (step S12).
 その後ガラス基板の端面研削加工工程を行う(ステップS14)。この工程は、製品製造時においてガラス基板の端面を研削加工処理する工程である。ガラス基板を端面研削用砥石に対して第1の送り速度で送るとともに、ガラス基板の端面を第1の研削量で研削する。これに伴い砥石積算研削量(A)、ドレッシングインターバル砥石積算研削量(B)の値は研削量に応じてカウントアップされていく(ステップS16)。 Thereafter, an end surface grinding process of the glass substrate is performed (step S14). This step is a step of grinding the end face of the glass substrate during product manufacture. The glass substrate is fed to the end surface grinding wheel at a first feed rate, and the end surface of the glass substrate is ground with a first grinding amount. Accordingly, the value of the grinding wheel cumulative grinding amount (A) and the dressing interval grinding wheel cumulative grinding amount (B) are counted up according to the grinding amount (step S16).
 そして、ガラス基板端面の研削加工処理を行っていく中で、所定のタイミングで(例えばガラス基板端面の研削加工処理を1枚行うたびに)以下の判定を行う。 In the course of grinding the glass substrate end face, the following determination is made at a predetermined timing (for example, every time one glass substrate end face grinding process is performed).
 まず、砥石積算研削量(A)が設定値(A1)に達したかを判定する(ステップS18)。ここで設定値(A1)は、端面研削用砥石を端面研削装置に設置してから交換を要するまでの端面研削用砥石の積算研削量を規定したものであり、例えば、端面研削装置の構成や端面研削用砥石、被研削物であるガラス基板の種類等に基づいて予め規定したものである。すなわち、設定値(A1)は端面研削用砥石の使用できる限界値として規定したものであるから、設定値(A1)に到達したと判定した場合には端面研削用砥石の交換が必要となる。このため、設定値(A1)に到達したと判定した場合には(ステップS18のYes)運転を停止して(ステップS34)端面研削用砥石を交換する。設定値(A1)に達していないと判定した場合には(ステップS18のNo)次の判定に移る。 First, it is determined whether the grinding wheel cumulative grinding amount (A) has reached the set value (A1) (step S18). Here, the set value (A1) defines the accumulated grinding amount of the end surface grinding wheel from when the end surface grinding wheel is installed in the end surface grinding device to when it needs to be replaced. It is defined in advance based on the grindstone for end face grinding, the type of glass substrate to be ground, and the like. That is, since the set value (A1) is defined as a limit value that can be used for the grindstone for end face grinding, it is necessary to replace the grindstone for end face grinding when it is determined that the set value (A1) has been reached. For this reason, when it is determined that the set value (A1) has been reached (Yes in step S18), the operation is stopped (step S34), and the end grinding wheel is replaced. If it is determined that the set value (A1) has not been reached (No in step S18), the process proceeds to the next determination.
 次に、製造したガラス基板の端面について検査を行った結果、十分な研削加工が行われていないと判断された場合等に任意に押下される任意ガラスドレッシング開始ボタンが押されていないかを判定する(ステップS20)。 Next, as a result of inspecting the end face of the manufactured glass substrate, it is determined whether or not an arbitrary glass dressing start button that is arbitrarily pressed when it is determined that sufficient grinding is not performed. (Step S20).
 任意ガラスドレッシング開始ボタンが押下された場合には(ステップS20のYes)、後述するドレッシング工程(ステップS24)が実施される。押下されていないと判断した場合には(ステップS20のNo)、次の判定に移る。 When the arbitrary glass dressing start button is pressed (Yes in step S20), a dressing process (step S24) described later is performed. If it is determined that the button has not been pressed (No in step S20), the process proceeds to the next determination.
 そして、ドレッシングインターバル砥石積算研削量(B)が設定値(B1)に到達したかを判定する(ステップS22)。ここで、設定値(B1)とは、ドレッシングを行った後、次にドレッシングを行うまでの端面研削用砥石の積算研削量を規定したものである。設定値(B1)も上記設定値(A1)の場合と同様に、例えば、端面研削装置の構成や端面研削用砥石、被研削物であるガラス基板の種類等に基づいて予め規定したものである。 Then, it is determined whether the dressing interval grinding wheel cumulative grinding amount (B) has reached the set value (B1) (step S22). Here, the set value (B1) defines the cumulative grinding amount of the grindstone for end face grinding after dressing until the next dressing. Similarly to the case of the set value (A1), the set value (B1) is defined in advance based on, for example, the configuration of the end face grinding apparatus, the grindstone for end face grinding, the type of the glass substrate to be ground, and the like. .
 設定値(B1)に達していないと判定した場合には(ステップS22のNo)、ガラス基板端面の研削加工処理を繰り返し行う。 If it is determined that the set value (B1) has not been reached (No in step S22), the grinding process of the glass substrate end face is repeated.
 そして、設定値(B1)に達したと判定した場合には(ステップS22のYes)、上記のように係る設定値(B1)はドレッシングを最後に行ってから、次に行うまでの砥石の累積研削量を定めたものであるから、自動的にドレッシングが実行される(ステップS24)。 If it is determined that the set value (B1) has been reached (Yes in step S22), the set value (B1) as described above is accumulated from the last dressing to the next. Since the amount of grinding is determined, dressing is automatically executed (step S24).
 ドレッシングは、上記のようにガラス基板の送り速度(砥石の加工速度)をドレッシング用の送り速度に変更し、研削量がドレッシングを行う際の条件になるように研削機構の位置を変更する(ステップS26)。その後ガラス基板をドレッシング材として用い、ドレッシングを行う(ステップS28)。この工程は、当該ガラス基板の端面を端面研削用砥石のドレッシング材として用いて端面研削用砥石をドレッシングする工程である。ここでは、ガラス基板を端面研削用砥石に対して上記の第1の送り速度よりも遅い第2の送り速度で送る。また、ガラス基板の端面を第1の研削量よりも多い第2の研削量で研削する。具体的には、研削機構13を制御して、端面研削用砥石とドレッシング材として用いるガラス基板の端面との距離を近づける。 For dressing, the glass substrate feed speed (grinding wheel processing speed) is changed to the dressing feed speed as described above, and the position of the grinding mechanism is changed so that the grinding amount becomes a condition for dressing (step). S26). Thereafter, dressing is performed using the glass substrate as a dressing material (step S28). This step is a step of dressing the grindstone for end face grinding using the end face of the glass substrate as a dressing material for the grindstone for end face grinding. Here, the glass substrate is fed to the edge grinding wheel at a second feed rate that is slower than the first feed rate. Further, the end surface of the glass substrate is ground with a second grinding amount larger than the first grinding amount. Specifically, the grinding mechanism 13 is controlled to reduce the distance between the grindstone for end face grinding and the end face of the glass substrate used as the dressing material.
 端面研削用砥石をドレッシングする工程を所定時間行った後、送り速度、研削量を通常運転条件、すなわち元の研削加工処理時の設定値(製品製造時の条件)に戻す(ステップS30、ステップS32)。そして、ドレッシングインターバル砥石積算研削量(B)を0にリセットし(ステップS12)、上記ガラス基板端面の研削加工処理を再度実施する。 After performing the process of dressing the grinding wheel for end face for a predetermined time, the feed speed and the grinding amount are returned to the normal operating conditions, that is, the original setting values (conditions for manufacturing the product) during the grinding process (steps S30 and S32). ). Then, the dressing interval grindstone integrated grinding amount (B) is reset to 0 (step S12), and the grinding processing of the glass substrate end face is performed again.
 以上のフローチャートに従い繰り返しガラス基板端面の研削加工処理を行うことにより、ガラス基板端面の端面研削装置を停止することなく、所定のタイミングでドレッシングを行いながらガラス基板端面の研削加工処理を行うことができる。 By repeatedly grinding the glass substrate end face according to the above flowchart, the glass substrate end face can be ground while performing dressing at a predetermined timing without stopping the end face grinding device for the glass substrate end face. .
 また、上記のステップS14~ステップS22の判定は、所定数(1以上)のガラス基板への処理を行う毎に、行うことができる。 Further, the determinations in steps S14 to S22 can be made every time processing is performed on a predetermined number (one or more) of glass substrates.
 次に、コントローラー100の構成を説明する。図5は、コントローラー100の構成を機能的に示すブロック図である。コントローラー100は、制御部102と、設定条件記憶部104とを含む。 Next, the configuration of the controller 100 will be described. FIG. 5 is a block diagram functionally showing the configuration of the controller 100. The controller 100 includes a control unit 102 and a setting condition storage unit 104.
 設定条件記憶部104は、上述した設定値(A1)、設定値(B1)、通常運転条件(製品製造時)におけるガラス基板の送り速度及び研削量(研削機構13の位置)、ガラスドレッシング時におけるガラス基板の送り速度及び研削量(研削機構13の位置)、図3のステップS18~ステップS22の判定を行う所定のタイミング、ガラスドレッシングを行う所定の実行時間等の予め設定された条件を記憶する。これらの条件は、ガラス基板の種類や、求められる製品の特性に応じて複数設定することができる。 The setting condition storage unit 104 includes the setting value (A1), the setting value (B1), the glass substrate feed speed and the grinding amount (position of the grinding mechanism 13) under normal operating conditions (product manufacturing), and the glass dressing time. Preset conditions such as the glass substrate feed speed and grinding amount (position of the grinding mechanism 13), the predetermined timing for determining in steps S18 to S22 in FIG. 3, the predetermined execution time for performing glass dressing, and the like are stored. . A plurality of these conditions can be set according to the type of glass substrate and the required product characteristics.
 また、図1Bを参照して説明したように、例えば粗研削用、仕上げ用のように砥石の種類、粗さをかえて搬送方向に複数の研削機構13を配置した場合、各研削機構13毎に条件を設定することができる。設定条件記憶部104は、これらの条件を記憶する。 In addition, as described with reference to FIG. 1B, for example, when a plurality of grinding mechanisms 13 are arranged in the transport direction by changing the type and roughness of the grindstone for rough grinding and finishing, each grinding mechanism 13 You can set conditions. The setting condition storage unit 104 stores these conditions.
 また、ガラスドレッシングを行う所定の実行時間は、例えばガラスドレッシング時におけるガラス基板の送り速度及び研削量に応じて設定することができる。例えば、上述したように、ドレッシング時の研削量を通常の運転時と同様にする場合は、ガラスドレッシングを行う所定の実行時間が長くなるように設定することができる。また、ガラスドレッシングを行う所定の実行時間に変えて、ガラスドレッシングを行う距離やガラスドレッシングを行うガラス基板の枚数を設定しておくこともできる。 Further, the predetermined execution time for performing the glass dressing can be set, for example, according to the feed rate and the grinding amount of the glass substrate during the glass dressing. For example, as described above, when the grinding amount at the time of dressing is the same as that at the time of normal operation, the predetermined execution time for performing the glass dressing can be set to be long. In addition, the distance for performing glass dressing and the number of glass substrates for performing glass dressing can be set instead of the predetermined execution time for performing glass dressing.
 制御部102は、設定条件記憶部104に設定された条件を参照して、図3に示したフローチャートの各手順の制御を行う。また、制御部102は、設定条件記憶部104に設定された条件に基づき、搬送機構12や研削機構13を制御して、通常運転条件及びガラスドレッシングが行われるようにする。 The control unit 102 refers to the conditions set in the setting condition storage unit 104 and controls each procedure in the flowchart shown in FIG. Further, the control unit 102 controls the transport mechanism 12 and the grinding mechanism 13 based on the conditions set in the setting condition storage unit 104 so that the normal operation conditions and the glass dressing are performed.
 なお、上述した任意ガラスドレッシング開始ボタンが押された場合、たとえばその旨を示すフラグの設定がオンとされ、制御部102は、当該フラグを参照して、図3のステップS20の判断を行うことができる。 In addition, when the arbitrary glass dressing start button described above is pressed, for example, the setting of a flag indicating that is turned on, and the control unit 102 refers to the flag and performs the determination in step S20 of FIG. Can do.
 コントローラー100は、例えば各種制御を行うCentral Processing Unit(CPU)、入出力装置、記憶装置等を有するコンピュータにより構成することができ、上述した各機能をコンピュータに実行させる実行プログラムがインストールされた構成とすることができる。 For example, the controller 100 can be configured by a computer having a central processing unit (CPU) that performs various controls, an input / output device, a storage device, and the like, and a configuration in which an execution program that causes the computer to execute each function described above is installed. can do.
 ここまで説明してきたガラス基板の端面研削砥石のドレッシング方法をガラス基板の製造工程に用いた場合、すなわち、該ドレッシング方法を用いたガラス基板の製造方法とした場合、ガラス基板の製造装置を停止させることなく、砥石のドレッシングを行うことが可能になる。このため、従来に比べて生産性を高め、また、作業者が手作業で行う必要がなく、容易にドレッシングを実施することができる。 When the dressing method of the edge grinding wheel of the glass substrate described so far is used in the glass substrate manufacturing process, that is, when the glass substrate manufacturing method using the dressing method is used, the glass substrate manufacturing apparatus is stopped. It becomes possible to perform dressing of a grindstone without this. For this reason, productivity is improved as compared with the prior art, and it is not necessary for the operator to manually perform dressing, and dressing can be easily performed.
 そして、従来のように作業者によるドレッシング後の砥石の溝の表面の状態にバラツキは発生せず、安定して砥石の加工能力を回復させることができ、砥石に形成した溝の表面形状の変形も防ぐことができる。このため、より安定した品質のガラス基板を連続的に製造することが可能になる。 And, the surface condition of the groove of the grindstone after dressing by the operator does not occur as in the conventional case, the processing ability of the grindstone can be stably recovered, and the surface shape of the groove formed on the grindstone is deformed. Can also prevent. For this reason, it becomes possible to manufacture more stable quality glass substrates continuously.
 以下に具体的な実施例を挙げて説明するが、本発明はこれらの実施例に限定されるものではない。
[実施例1]
 本実施例では、図1A、図1Bと同じ構成を有するガラス基板の端面研削装置において、ガラス基板端面の研削加工処理を行い加工能力が低下した端面研削用砥石についてドレッシングを行った。端面研削用砥石としては150φの円柱形状のものを使用し、その側面に、8本の同じ形状の溝が形成されたダイヤモンド砥石を使用した。表1に示すように端面研削用砥石の側面に形成された8本の溝は累積の加工(研削)距離が約1500mの同じ状態であり、各溝についてドレッシングを行いその評価を行った。8本の溝は表1中の例1-1~例1-8に相当する。
Specific examples will be described below, but the present invention is not limited to these examples.
[Example 1]
In the present example, in the glass substrate end surface grinding apparatus having the same configuration as that shown in FIGS. 1A and 1B, dressing was performed on an end surface grinding grindstone that had undergone a grinding process on the glass substrate end surface to reduce the processing ability. As the grindstone for end face grinding, a cylindrical one having a diameter of 150φ was used, and a diamond grindstone in which eight grooves having the same shape were formed on the side surface was used. As shown in Table 1, the eight grooves formed on the side surface of the grindstone for end face grinding are in the same state with a cumulative processing (grinding) distance of about 1500 m, and each groove was dressed and evaluated. Eight grooves correspond to Examples 1-1 to 1-8 in Table 1.
 ドレッシングは、通常の製品製造時に使用しているものと同じ材質および同じサイズのガラス基板(無アルカリガラス、旭硝子株式会社製、製品名:AN100)を各溝について1枚ずつドレッシング材として用いて行った。具体的には、サイズが横1850mm×縦1500mm×厚さ0.7mmであり、本実施例では予め端面研削処理を行っていないガラス基板を使用した。 Dressing is performed using the same material and the same size glass substrate (non-alkali glass, manufactured by Asahi Glass Co., Ltd., product name: AN100) as that used during normal product manufacturing, one for each groove. It was. Specifically, a glass substrate having a size of 1850 mm in width, 1500 mm in length, and 0.7 mm in thickness and not subjected to end face grinding in advance was used in this example.
 通常、製品用のガラス基板端面の研削加工処理を行う際には、送り速度が6000mm/min、研削量150μmの条件で行っているガラス基板の端面研削装置において、表1に例1-1~例1-8で示すように溝毎に送り速度、研削量を変えてドレッシングを行った。 Usually, when grinding a glass substrate end surface for a product, in the glass substrate end surface grinding apparatus under the conditions of a feed rate of 6000 mm / min and a grinding amount of 150 μm, Table 1-1 shows Examples 1-1 to As shown in Example 1-8, dressing was performed by changing the feed rate and grinding amount for each groove.
 評価としては、ドレッシング前後で、砥石の溝表面についてマイクロスコープ(株式会社キーエンス製 商品名:VHX-100F)を用いて観察、比較して評価を行った。結果を表1に示す。 Evaluation was made by observing and comparing the groove surface of the grindstone with a microscope (trade name: VHX-100F, manufactured by Keyence Corporation) before and after dressing. The results are shown in Table 1.
 表1中、ドレッシングの効果が見られたものについては丸を、使用開始前(出荷時と同程度)にまで砥石の溝表面の状態にまで回復したものについては二重丸を付した。 In Table 1, circles were given for those where the effect of dressing was seen, and double circles were given for those that had recovered to the state of the groove surface of the grindstone before the start of use (similar to that at the time of shipment).
 これによると、いずれの試料(溝)についてもガラス基板の送り速度を遅くし、研削量を多くすることによって、ドレッシングの効果が得られることが確認できた。特に送り速度が1000mm/min、研削量が500μmの例1-4と、送り速度が2000mm/min、研削量が400μmの例1-8とが砥石の使用開始前と同程度にまで回復していることが確認できた。 According to this, it was confirmed that the effect of dressing can be obtained by slowing the glass substrate feed rate and increasing the grinding amount for any sample (groove). In particular, Example 1-4 in which the feed rate is 1000 mm / min and the grinding amount is 500 μm and Example 1-8 in which the feed rate is 2000 mm / min and the grinding amount is 400 μm are recovered to the same level as before the use of the grindstone. It was confirmed that
 また、いずれの場合でもドレッシング前後で砥石側面に形成された溝の表面形状に大きな変化は見られず、適切にドレッシングが行われていることが確認できた。 In any case, no significant change was observed in the surface shape of the groove formed on the side surface of the grindstone before and after dressing, and it was confirmed that dressing was performed appropriately.
Figure JPOXMLDOC01-appb-T000001
[実施例2]
 本実施例では、ドレッシングの際に用いるガラス基板として、予め端面研削加工処理を行ったガラス基板を用いた点以外は実施例1と同様にして、溝ごとに送り速度、研削量を変化させて実験を行った。
Figure JPOXMLDOC01-appb-T000001
[Example 2]
In this example, the feed rate and the grinding amount were changed for each groove in the same manner as in Example 1 except that a glass substrate that had been subjected to end face grinding processing in advance was used as the glass substrate used for dressing. The experiment was conducted.
 ここでいう予め端面研削加工処理を行ったガラス基板とは、同じガラス基板の端面研削装置を使用してガラス基板の端面について、通常製品用の条件で研削加工処理を1回行ったガラス基板であることを意味している。 The glass substrate that has been subjected to the end surface grinding processing in advance here is a glass substrate that has been subjected to grinding processing once for the end surface of the glass substrate using the same glass substrate end surface grinding device under the conditions for normal products. It means that there is.
 本実施例においても端面研削用砥石としては実施例1と同様に150φの円柱形状のものを使用し、その側面に、8本の同じ形状の溝が形成されたダイヤモンド砥石を使用した。表2に示すように端面研削用砥石の側面に形成された8本の溝は累積の加工(研削)距離が約1500mの同じ状態であり、各溝についてドレッシングを行いその評価を行った。8本の溝は表2中の例2-1~例2-8に相当する。 Also in this example, as the grinding wheel for end face grinding, a 150φ cylindrical one was used as in Example 1, and a diamond grinding stone having eight grooves of the same shape formed on its side surface was used. As shown in Table 2, the eight grooves formed on the side surface of the grindstone for end face grinding were in the same state with a cumulative processing (grinding) distance of about 1500 m, and each groove was dressed and evaluated. Eight grooves correspond to Examples 2-1 to 2-8 in Table 2.
 評価についても実施例1と同様にドレッシング前後で砥石の溝表面についてマイクロスコープ(株式会社キーエンス製 商品名:VHX-100F)を用いて観察、比較して評価を行った。結果を表2に示す。 Regarding the evaluation, the surface of the grindstone groove surface was observed and compared with a microscope (trade name: VHX-100F, manufactured by Keyence Corporation) before and after dressing in the same manner as in Example 1. The results are shown in Table 2.
 表2においても、ドレッシングの効果が見られたものについては丸を、使用開始前(砥石出荷時と同程度)にまで砥石の溝表面の状態が回復しているものについては二重丸を付した。 Also in Table 2, circles are marked for dressing effects, and double circles are marked for those in which the condition of the groove surface of the grinding stone has recovered before the start of use (similar to when the grinding wheel is shipped). did.
 これによると、いずれの試料(溝)についてもガラス基板の送り速度を遅くし、研削量を多くすることによって、ドレッシングの効果が得られることが確認できた。特に送り速度が1000mm/min、研削量が500μmの例2-4と、送り速度が2000mm/min、研削量が400μmの例2-8とが砥石の使用開始前と同程度にまで回復していることが確認できた。 According to this, it was confirmed that the effect of dressing can be obtained by slowing the glass substrate feed rate and increasing the grinding amount for any sample (groove). In particular, Example 2-4 in which the feed rate is 1000 mm / min and the grinding amount is 500 μm and Example 2-8 in which the feed rate is 2000 mm / min and the grinding amount is 400 μm are recovered to the same level as before the start of use of the grindstone. It was confirmed that
 また、いずれの場合でもドレッシング前後で溝の表面形状に大きな変化は見られず、適切にドレッシングが行われていることが確認できた。 In any case, no significant change was observed in the surface shape of the groove before and after dressing, and it was confirmed that dressing was performed appropriately.
 実施例1、2の結果を比較すると、ガラス基板端面の研削加工処理を予め行っているかに関わらず同様にドレッシングの効果が得られており、ガラス基板端面について研削加工処理の有無に関わらずドレッシング効果が得られることが確認できた。 When the results of Examples 1 and 2 are compared, the effect of dressing is obtained regardless of whether the grinding process of the glass substrate end surface is performed in advance, and the dressing is performed regardless of the presence or absence of the grinding process on the glass substrate end surface. It was confirmed that the effect was obtained.
Figure JPOXMLDOC01-appb-T000002
[実施例3]
 本実施例では、図1A、図1Bと同じ構成を有するガラス基板の端面研削装置において、実施例1、2とはガラス基板の種類を変更してドレッシングを行った。
Figure JPOXMLDOC01-appb-T000002
[Example 3]
In the present Example, in the end surface grinding apparatus of the glass substrate which has the same structure as FIG. 1A and FIG. 1B, dressing was performed by changing the kind of glass substrate with Example 1,2.
 ドレッシングは、通常の製品製造時に使用しているものと同じ材質および同じサイズのガラス基板(ソーダライムガラス、旭硝子株式会社製、製品名:PD200)をドレッシング材として用いて行った。ガラス基板のサイズは横2250mm×縦1900mm×厚さ1.8mmであり、端面研削処理を行っていないガラス基板を使用した。 Dressing was performed using a glass substrate (soda lime glass, manufactured by Asahi Glass Co., Ltd., product name: PD200) having the same material and size as those used during normal product manufacture as a dressing material. The size of the glass substrate was 2250 mm wide × 1900 mm long × 1.8 mm thick, and a glass substrate not subjected to end face grinding was used.
 端面研削用砥石としては表3に例3-1、例3-2で示すように、表面粗さの異なる2種類のダイヤモンド砥石でドレッシングを行った。端面研削用砥石の形状はいずれも204φの円柱形状であり、砥石側面には溝が形成されているものを使用した。例3-1では、累積加工距離が16000mのものについて、例3-2では累積加工距離が6000mのものについてドレッシングを行った。なお、例3-1、例3-2共に最後にドレッシングを行ってからの累積加工距離は1000mである。 As shown in Table 3 in Example 3 and Example 3-2, dressing was performed with two types of diamond grinding stones having different surface roughness. The grindstone for end face grinding was a cylindrical shape of 204φ, and one having grooves formed on the side surface of the grindstone was used. In Example 3-1, dressing was performed for an accumulated machining distance of 16000 m, and in Example 3-2, dressing was performed for an accumulated machining distance of 6000 m. In addition, in Example 3-1 and Example 3-2, the cumulative machining distance after the last dressing is 1000 m.
 例3-1、例3-2いずれも、通常の製品製造時には、ガラス基板端面の研削加工処理をガラス基板の送り速度が20000mm/min、研削量160μmの条件で行っているところ、ドレッシングの際には、ガラス基板の送り速度が4000mm/min、研削量が500μmの条件として行った。 In both cases of Example 3-1 and Example 3-2, during normal product manufacturing, the glass substrate end face is ground under the conditions of a glass substrate feed rate of 20000 mm / min and a grinding amount of 160 μm. The conditions were such that the glass substrate feed rate was 4000 mm / min and the grinding amount was 500 μm.
 評価については、使用開始前(砥石出荷時の状態)と、ドレッシング後の端面研削用砥石の溝部分について、表面粗さ、突出量、磨耗量を測定した。表面粗さについては、表面粗さ計(株式会社東京精密製 製品名:サーフコム1400A-12)を用いて測定した。また、マイクロスコープ(株式会社キーエンス製 商品名:VHX-100F)を用いて溝部分を100倍に拡大して表面観察を行った。 For evaluation, the surface roughness, protrusion amount, and wear amount were measured before the start of use (the state at the time of grinding wheel shipment) and the groove portion of the grinding wheel for end face grinding after dressing. The surface roughness was measured using a surface roughness meter (product name: Surfcom 1400A-12, manufactured by Tokyo Seimitsu Co., Ltd.). Further, the groove portion was magnified 100 times using a microscope (trade name: VHX-100F, manufactured by Keyence Corporation), and the surface was observed.
 表面粗さ、突出量、磨耗量の測定結果を表3に示す。 Table 3 shows the measurement results of the surface roughness, protrusion amount, and wear amount.
 図4A~図4Dに、使用開始前と、ドレッシング後の端面研削用砥石の溝部分の表面画像を示す。 4A to 4D show surface images of the groove portion of the grinding wheel for end face grinding before use and after dressing.
 図4A、図4Bが例3-1の端面研削用砥石の溝部分の表面画像であり、図4Aがドレッシング後、図4Bが使用開始前の表面画像である。 4A and 4B are surface images of the groove portion of the grinding wheel for end face grinding in Example 3-1, FIG. 4A is a surface image after dressing, and FIG. 4B is a surface image before starting use.
 そして、図4C、図4Dが例3-2の端面研削用砥石の溝部分の表面画像であり、図4Cがドレッシング後、図4Dが使用開始前の表面画像である。 4C and 4D are surface images of the groove portion of the end face grinding wheel of Example 3-2. FIG. 4C is a surface image after dressing and FIG.
 表面画像によれば、いずれの砥石の場合でもドレッシング後に使用開始前とほぼ同程度の溝表面の状態に戻っていることが確認できた。 According to the surface image, it was confirmed that the condition of the surface of the groove was returned to the same level as that before the start of use after dressing in any grindstone.
 このことは表3において、表面粗さRa、突出量、磨耗量共に、ドレッシング後の砥石の溝表面の測定結果が、使用開始前とほぼ同等にまで回復していることからも確認できた。 This can also be confirmed from the fact that in Table 3, the measurement results of the groove surface of the grindstone after dressing recovered to almost the same level as before the start of use in terms of surface roughness Ra, protrusion amount and wear amount.
Figure JPOXMLDOC01-appb-T000003
 以上の実施例の結果より、ガラス基板や砥石の種類、サイズによらず、本実施の形態のドレッシング方法により端面研削用砥石のドレッシングを行えることが確認できた。
Figure JPOXMLDOC01-appb-T000003
From the results of the above examples, it was confirmed that the dressing method for the end face grinding can be performed by the dressing method of the present embodiment regardless of the type and size of the glass substrate and the grindstone.
 本実施の形態のガラス基板の端面研削用砥石のドレッシング方法は、ドレッシング材としてガラス基板を使用し、送り速度を製品製造時よりも遅くし、研削量(加工量)を製品製造時よりも多くなるように端面研削装置にガラス基板を供給してドレッシングを行うものである。このため、端面研削装置を止めることなくドレッシングを行うことができ、従来に比べて生産性を高め、また、作業者が手作業で行う必要がなく、容易にドレッシングを実施することができる。 The dressing method of the grinding wheel for end face grinding of the glass substrate according to the present embodiment uses a glass substrate as a dressing material, makes the feed rate slower than that at the time of product manufacture, and increases the grinding amount (processing amount) than at the time of product manufacture. In this way, dressing is performed by supplying a glass substrate to the end face grinding apparatus. For this reason, it is possible to perform dressing without stopping the end surface grinding apparatus, and it is possible to improve the productivity as compared with the prior art, and it is not necessary for the operator to manually perform dressing, and dressing can be easily performed.
 そして、従来のドレッシング方法のように作業者によるドレッシング後の砥石の溝の表面の状態にバラツキは発生せず、安定して砥石の加工能力を回復させることができ、砥石に形成した溝の表面形状の変形も防ぐことができる。 And, as in the conventional dressing method, the surface condition of the groove of the grindstone after dressing by the operator does not occur, and the processing ability of the grindstone can be stably recovered, and the surface of the groove formed on the grindstone Shape deformation can also be prevented.
 また、従来は砥石に形成した溝の表面形状に不備があることが端面研削装置に設置してから判明した場合、端面研削装置を停止し、砥石の交換を行う必要があった。しかし、このような場合でも本実施の形態のドレッシング方法を実施することにより、端面研削装置を停止することなく溝の表面形状の不備を解消することが可能であり、この点でも従来に比べて生産性を高められる。 Also, conventionally, when it was found that the surface shape of the groove formed in the grindstone was inadequate after being installed in the end face grinding apparatus, it was necessary to stop the end face grinding apparatus and replace the grindstone. However, even in such a case, by performing the dressing method of the present embodiment, it is possible to eliminate the deficiencies in the surface shape of the grooves without stopping the end face grinding apparatus. Increase productivity.
 以上、本発明の好ましい実施形態及び実施例について詳述したが、本発明は上記した特定の実施形態及び実施例に限定されるものではなく、特許請求の範囲に記載された本発明の要旨の範囲内において、種々の変形・変更が可能なものである。 The preferred embodiments and examples of the present invention have been described in detail above. However, the present invention is not limited to the specific embodiments and examples described above, and is based on the gist of the present invention described in the claims. Various modifications and changes can be made within the range.
 本国際出願は2012年1月13日に出願された日本国特許出願2012-005649号に基づく優先権を主張するものであり、その全内容をここに援用する。 This international application claims priority based on Japanese Patent Application No. 2012-005649 filed on January 13, 2012, the entire contents of which are incorporated herein by reference.

Claims (8)

  1.  ガラス基板の端面研削用砥石のドレッシング方法であって、
     ドレッシング材としてガラス基板を用い、
     ドレッシング材として用いる前記ガラス基板の送り速度を、製品製造時に端面を研削加工処理する際のガラス基板の送り速度よりも遅くし、
     ドレッシング材として用いる前記ガラス基板の研削量が、製品製造時に端面を研削加工処理する際のガラス基板の研削量よりも多くなるように、
     前記端面研削用砥石に対してドレッシング材として用いる前記ガラス基板を供給することを特徴とするガラス基板の端面研削用砥石のドレッシング方法。
    A method for dressing a grinding wheel for grinding an end face of a glass substrate,
    Using a glass substrate as a dressing material,
    The feed rate of the glass substrate used as a dressing material is slower than the feed rate of the glass substrate when the end surface is ground during product production,
    The amount of grinding of the glass substrate used as a dressing material is larger than the amount of grinding of the glass substrate when the end surface is ground during product production.
    A method for dressing a grindstone for grinding an end face of a glass substrate, wherein the glass substrate used as a dressing material is supplied to the grindstone for end face grinding.
  2.  ドレッシング材として用いる前記ガラス基板の送り速度が、製品製造時に端面を研削加工処理する際のガラス基板の送り速度の1/6以上1/3以下であって、
     ドレッシング材として用いる前記ガラス基板の研削量が、製品製造時に端面を研削加工処理する際のガラス基板の研削量の1.1倍以上3.5倍以下であることを特徴とする請求項1に記載のガラス基板の端面研削用砥石のドレッシング方法。
    The feed rate of the glass substrate used as a dressing material is 1/6 or more and 1/3 or less of the feed rate of the glass substrate when the end surface is ground during product production,
    The grinding amount of the glass substrate used as a dressing material is 1.1 times or more and 3.5 times or less of the grinding amount of the glass substrate when the end surface is ground during product manufacture. A method for dressing a grindstone for grinding an end face of a glass substrate as described.
  3.  ドレッシング材として用いる前記ガラス基板が、
     予め端面の研削加工処理を行っていないガラス基板であることを特徴とする請求項1または2に記載のガラス基板の端面研削用砥石のドレッシング方法。
    The glass substrate used as a dressing material is
    3. The method for dressing a grindstone for grinding an end face of a glass substrate according to claim 1, wherein the end face grinding process is performed on the glass substrate.
  4.  ドレッシング材として用いた前記ガラス基板を製品として使用することを特徴とする請求項1乃至3いずれか一項に記載のガラス基板の端面研削用砥石のドレッシング方法。 The said glass substrate used as a dressing material is used as a product, The dressing method of the grindstone for end surface grinding of the glass substrate as described in any one of Claim 1 thru | or 3 characterized by the above-mentioned.
  5.  製品製造時において、ガラス基板を端面研削用砥石に対して第1の送り速度で送りながら第1の研削量で当該ガラス基板の端面を研削加工処理する通常工程と、
     所定のタイミングで、前記端面研削用砥石のドレッシングが必要か否かを判断する工程と、
     前記ドレッシングが必要と判断された場合に、ガラス基板を前記端面研削用砥石に対して前記第1の送り速度よりも遅い第2の送り速度で送りながら、前記第1の研削量よりも多い第2の研削量で当該ガラス基板の端面を研削加工処理するドレッシング工程と、
    を含むガラス基板の製造方法。
    At the time of product manufacture, a normal process of grinding the end surface of the glass substrate with a first grinding amount while feeding the glass substrate to the end surface grinding wheel at a first feed rate;
    Determining whether or not dressing of the grinding wheel for end face grinding is necessary at a predetermined timing; and
    When it is determined that the dressing is necessary, the glass substrate is fed to the end grinding grindstone at a second feed rate that is slower than the first feed rate, and the first grinding amount is larger than the first grinding amount. A dressing step of grinding the end surface of the glass substrate with a grinding amount of 2,
    The manufacturing method of the glass substrate containing this.
  6.  前記ドレッシング工程を所定時間行った後、再び前記通常工程を行う請求項5に記載のガラス基板の製造方法。 The method for producing a glass substrate according to claim 5, wherein the normal process is performed again after performing the dressing process for a predetermined time.
  7.  複数のガラス基板を前記端面研削用砥石に対して連続的に送り、
     所定数の前記ガラス基板へ前記通常工程を行う毎に、前記判断する工程を行う請求項5または6に記載のガラス基板の製造方法。
    Continuously sending a plurality of glass substrates to the end surface grinding wheel,
    The method for producing a glass substrate according to claim 5 or 6, wherein the step of determining is performed each time the normal step is performed on a predetermined number of the glass substrates.
  8.  前記判断する工程において、前記ドレッシング工程を最後に行ってからのガラス基板の累積研削量が設定値以上となった場合に、前記端面研削用砥石のドレッシングが必要と判断する請求項5乃至7いずれか一項に記載のガラス基板の製造方法。 8. Any one of claims 5 to 7, wherein, in the step of judging, when the cumulative grinding amount of the glass substrate after the last dressing step is equal to or more than a set value, it is judged that dressing of the grindstone for end face grinding is necessary. A method for producing a glass substrate according to claim 1.
PCT/JP2012/079994 2012-01-13 2012-11-19 Dressing method for glass substrate edge-grinding grindstone and glass substrate manufacturing method using said dressing method WO2013105341A1 (en)

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CN112792717A (en) * 2021-02-02 2021-05-14 河北光兴半导体技术有限公司 Substrate glass surface polishing production line system and substrate glass surface polishing production method

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