TWI589402B - Grinding method and grinding apparatus for flat plate glass and edge part of flat glass by grinding edge part - Google Patents

Description

Grinding method and polishing device for flat glass edge of flat glass and flat glass edge portion by grinding belt edge

The present invention relates to a flat glass for use in a flat panel display such as a mobile phone display window, a liquid crystal panel, an organic EL panel, a plasma panel, a solar cell panel, or a cover glass for an electronic component, an optical filter, or the like. Further, it is a flat glass which is polished by at least one side or an end surface by a polishing tape to improve the strength, a method for producing the same, a polishing method, and a polishing apparatus.

The rupture of the flat glass is mostly caused by the micro 瑕疵 which exists at the edge (edge or end surface) of the flat glass from the beginning, and once there is a flaw in the edge of the flat glass, even a fine 瑕疵, During the manufacture of the article or during the operation of the article, when mechanical stress or thermal stress is applied, the crucible may sometimes expand to cause damage to the flat glass.

Further, the flat glass having the corner portion at the edge portion is liable to generate glass swarf, which causes contamination or flaws on the main surface (upper or lower surface) of the flat glass. In particular, the use of flat glass is in the case of protective glass for electronic parts (for example, protective glass for photographic devices) or optical filters (for example, near-infrared correction filters for photographic devices), and sometimes contamination due to swarf Or 瑕疵 will become a big problem.

Therefore, in the past, flat glass used in various flat displays, protective glass, and the like has been used to prevent damage caused by fine flaws, chips (notches) of the rim or edge portion due to swarf, or accompanying At the time of the work, the edge portion is subjected to so-called C chamfering or R chamfering. By performing the chamfering process, the fineness of the edge portion can be reduced, and the strength of the flat glass can be improved.

Conventionally, in order to chamfer the edge portion of the flat glass, a slightly disc-shaped grinding stone is used. In other words, the disk-shaped grinding stone is rotated, and the disk surface or the end surface of the grinding stone is pressed against the edge portion of the flat glass to perform chamfering.

For example, a C-chamfering process for removing only the rib portion is performed by slanting the disk surface of the slightly disc-shaped grinding stone to the rib portion of the flat glass (Japanese Patent Laid-Open Publication No. 2000-233351: Patent Document 1). In addition, an inclined surface is provided on the end surface of the grinding stone, and the inclined surface is pressed against the rib portion of the flat glass to perform C-chamfering processing in which only the ridge portion is removed (Japanese Patent Laid-Open Publication No. 2003-231046: Patent Document 2, Japan) Japanese Laid-Open Patent Publication No. 2011-51068: Patent Document 3).

Further, an arc-shaped concave portion or a concave portion having a desired shape is formed on the end surface of the grinding stone, and then R chamfering or total shape processing for removing the end surface of the flat glass according to the end surface shape of the grinding stone is performed (JP-2002) Japanese Patent Laid-Open Publication No. 2001-85710: Patent Document 5).

In the conventional chamfering process as described above, the grinding stone may be a metal-bonded diamond grinding wheel or the like which is obtained by concentrating and sintering the metal powder, and fixing the diamond abrasive grains, and using grinding wheels of different sizes of abrasive grains (millstone) ) Perform one processing and secondary processing. For one-time processing, a grinding wheel using diamond abrasive grains of size #325~#600 can be used, and the edge of the processed flat glass is processed. The average surface roughness Ra is approximately in the range of 0.5 μm to 1.0 μm. In order to reduce the surface roughness, the secondary processing is performed by using the same cross-sectional shape as that of the grinding wheel for primary processing, and using a grinding wheel for final processing of diamond abrasive grains having a particle size of #1000 to #2000.

Further, a diamond grinding wheel that replaces the metal bond as described above is proposed, but a chamfering grinding wheel in which a fiber structure between fibers is filled with a resin, or a niobium carbide having a particle size of #500 to #2000, is oxidized. A chamfering grinding wheel of a resin structure of abrasive grains such as aluminum (Japanese Patent Laid-Open Publication No. 2002-160147: Patent Document 6). While rotating the chamfer grinding wheel (grinding stone), the peripheral edge portion of the grinding wheel having a concave cross section is pressure-bonded to the end surface of the flat glass for liquid crystal display or the like for processing. In order to perform uniform polishing without uneven processing, the chamfer grinding wheel is used to incline the rotating shaft at a predetermined angle with respect to a perpendicular line standing upright on the surface of the flat glass.

[Advanced technical literature] [Patent Literature]

[Patent Document 1] Japanese Patent Laid-Open Publication No. 2000-233351

[Patent Document 2] Japanese Patent Laid-Open Publication No. 2003-231046

[Patent Document 3] Japanese Patent Laid-Open Publication No. 2011-51068

[Patent Document 4] Japanese Patent Laid-Open Publication No. 2002-59346

[Patent Document 5] Japanese Patent Laid-Open Publication No. 2001-85710

[Patent Document 6] Japanese Patent Laid-Open Publication No. 2002-160147

When the grindstone (grinding wheel) as described above is pressed against the edge portion of the flat glass and is chamfered while being rotated, there is a problem that the clogging of the grindstone and the wear of the grindstone are gradually progressed. When the shape or the like of the processed portion of the grindstone is deteriorated due to clogging or abrasion, a grinding flaw is generated at the edge portion of the flat glass, so that the grindstone does not come into contact with a part of the edge portion of the flat glass, so that no The processing unit (uneven processing), and sometimes burnt due to uneven processing pressure.

When the shape of the processed portion of the grindstone is deteriorated, the trimming or finishing can be performed. However, the diamond grinding wheel requires a high degree of molding precision, and it takes time to adjust the position of the grindstone or the like, and thus the work efficiency is lowered. Further, it is necessary to carry out trimming of the processed portion or the like in a state in which a plurality of unused portions of the grindstone remain, or to replace the grindstone for the life, which causes a problem of an increase in cost.

In addition, when the grinding stone is used to chamfer the edge portion of the flat glass, a mechanical impact is applied when the grinding stone is in contact with the workpiece, and the flat glass is damaged by the impact, and the processing yield rate is deteriorated. .

In the chamfering grinding wheel (Patent Document 6) in which the metal-bonded diamond grinding wheel is bonded to the metal, the impact on the edge portion of the flat glass is reduced, and the occurrence of notches or flaws is reduced. However, the wear of the grindstone becomes fierce, and the shape of the processed portion changes rapidly, which also causes clogging, so there is a problem that the frequency of dressing (or finishing) of the grindstone is high.

In addition, in recent years, flat glass for liquid crystal displays or flat glass for electronic parts having a small thickness (less than 1 mm) is required to chamfer the edge portion (edge or end surface) with higher precision. However, using the conventional knowledge When the grinding stone is chamfered on the edge portion of the flat glass, the precision of the obtained machined surface is not sufficient, and fine flaws or chips are left at the edge portion of the flat glass, and cracking cannot be sufficiently prevented.

In view of the above problems, an object of the present invention is to provide a flat glass having a high-strength edge portion and a high strength, a method for producing the same, a polishing method, and a polishing apparatus.

The flat glass of the present invention for solving the above problems is a ridge portion of at least one of the ridges of the rectangular flat glass having an end surface between the upper surface, the lower surface and the both surfaces thereof at the boundary between the upper surface and the lower surface and the end surface, or at least one The end surface is polished by a polishing tape to form a machined surface having an average surface roughness Ra of 20 nm or less and a maximum valley depth Rv of 200 nm or less.

The method of using the polishing tape is to form a processed surface having a high-precision surface property on the ridge or end surface of the flat glass by grinding the ribs or end faces of the flat glass. By forming the processing surface of the surface roughness Ra and the maximum valley depth Rv by the rib or the end surface, the strength of the flat glass is remarkably improved. The flat glass of the present invention can prevent the occurrence of cracking starting from the fine ridges or notches of the peripheral portion, and can prevent damage due to mechanical stress or thermal shock. It is also possible to improve the processing yield of the subsequent steps, and to improve the reliability of the article in which the flat glass is loaded.

The manufacturing method of the flat glass for forming a processing portion having a predetermined surface property according to the present invention comprises the following steps: in the polishing belt a step of disposing a surface of the elastic spacer member on the back surface, and performing a C-chamfering process on at least one side of the flat glass, and arranging the surface of the polishing tape facing the one edge of the flat glass; The step of applying a predetermined pressing force to the polishing tape to abut the surface of the polishing tape and press it against the one edge portion; and moving the flat glass along the linear movement axis to polish the one edge portion. Here, the surface of the polishing tape is composed of a polishing layer containing abrasive grains, and the average particle diameter of the abrasive grains is in the range of 0.2 μm or more and 3.0 μm or less. In the grinding step, the polishing tape may be in a state in which no traveling is stopped, or may be in a traveling state.

In this way, by arranging the one side edge of the upper surface or the lower surface of the flat glass so as to face the surface of the polishing tape, and performing the polishing (C surface polishing) by abutting or pressing, the ridge portion which is the most likely cause of damage can be removed. Rupture or gap.

By using a polishing tape having fine abrasive grains on the surface and having flexibility and a cushion member having elasticity, the end portion (edge portion) of the surface (machined surface) on which the rib portion is chamfered is not formed at an acute angle. Moreover, a new flaw or a notch is not formed at the edge portion of the flat glass, and a processed surface subjected to high-precision grinding can be formed. The strength of the flat glass on which such a machined surface is formed is remarkably enhanced and is not easily cracked or damaged.

During the grinding step, the surface of the flat glass and the polishing belt are relatively moved. Preferably, the flat glass moves back and forth along the linear movement axis. By the flexibility of the polishing tape and the spacer member, the elasticity, and the strength of the flat glass, even if the object to be polished (plate glass) is moved against the polishing body (the surface of the polishing tape), the object to be polished is also polished. Will not be damaged.

Preferably, when the plate glass moves along the movement axis, the edge of one side is inclined only by a predetermined angle (θ) with respect to the axis of movement. By inclining the ribs with respect to the axis of movement, the fine abrasive grains on the surface of the polishing tape can be effectively applied to the ridges. Moreover, the width (area) of the abrasive tape can be effectively utilized and effectively polished in a short time.

The predetermined angle (θ) is preferably in the range of 5 to 60 degrees. Adjusting the angle (θ) by the width of the polishing tape in this range is quite preferable from the viewpoint of cost.

Further, the movement axis may be parallel to the longitudinal direction of the polishing tape, or may be inclined only by a predetermined angle (β) with respect to the longitudinal direction of the polishing tape. The axis of movement is more efficient with respect to the longitudinal direction of the polishing tape depending on the width and the traveling state of the polishing tape.

Further, the manufacturing method of the flat glass for producing an end surface of the present invention which is a processing surface having a predetermined surface property comprises the steps of: arranging a surface of the elastic spacer member on the back surface of the polishing tape, and the surface of the polishing tape a step of arranging opposite to one end surface of the flat glass; applying a predetermined pressing force to the polishing tape via the spacer member, a step of abutting and pressing the surface of the polishing tape on one end surface; and moving the flat glass along the linear movement axis The step of moving and grinding an end face. Here, the surface of the polishing tape is composed of a polishing layer containing abrasive grains, and the average particle diameter of the abrasive grains is in the range of 0.2 μm or more and 3.0 μm or less. In the grinding step, the polishing tape may not be in a state of being stopped but may be stopped.

According to the above manufacturing method, it is possible to manufacture a flat glass in which the entire end faces are formed into a processed surface. After the ribs are formed into a processed surface, by the above The method causes the remaining portion of the end face to form a machined surface. By grinding all the end faces, there is no grinding missing portion, and the removal of dirt or grinding debris can be sufficiently performed, thereby preventing contamination or flaws on the main surface of the flat glass.

The surface of the above pad member may be a flat surface. Since the surface of the spacer is a flat surface, all of the rib portions on one side can be brought into contact with the surface of the polishing tape disposed on the surface of the spacer and polished.

Further, the surface of the spacer member may not be a flat surface but a convex curved surface. This is because the corner portion of the flat glass (the portion formed between one end surface and the other end surface) can be restricted from contacting the surface of the polishing tape, and the polishing tape can be polished while being polished.

Preferably, the spacer member is a first spacer member having a Shore A hardness of 20 to 50. By the elastic spacer member, the mechanical impact caused by the contact between the polishing tape and the edge portion of the flat glass can be alleviated, and even if the shape of the edge portion changes with polishing, it can be processed accordingly.

Further, in the manufacturing method of the present invention, a second spacer member having a Shore A hardness of 90 or less may be disposed between the polishing tape and the first spacer member. It is used as a suitable spacer member depending on the material and thickness of the flat glass.

The flat glass of the present invention uses a flexible abrasive tape and a resilient spacer member to form a processed surface by polishing the rib or the end surface. Therefore, the processed surface of the ridge portion after C chamfering has a cross section R. The surface of the shape. Since the processed surface of the rib portion satisfies the surface property such as the maximum valley depth described above, and the cross-sectional shape has a curved surface, it can be a flat glass having few occurrences of cracks or cracks.

In the grinding, the polishing tape may be in a stopped state, and may continue to travel continuously or intermittently. In the case where the polishing process is performed for a short period of time, the amount of the polishing tape used is reduced by polishing in a state where the polishing tape is stopped, which is economical. In the case where the polishing time is long, the polishing efficiency can be improved by sequentially feeding a new polishing tape.

The pressing force of pressing the surface of the polishing tape on the edge or the end surface of the flat glass may be small in the initial stage of the flat glass and gradually increased as the polishing progresses. For example, depending on the flat glass, there is a portion having an acute angle at a corner or a ridge. In this case, once a strong pressing force is applied from the initial stage of the grinding, sometimes the squeegee is caused in the polishing belt due to the acute angle portion, or It is to damage the grinding belt. By adjusting the pressing force, it is possible to polish the polishing belt while polishing.

Grinding can be carried out either dry or wet. In the case of a wet type, polishing is performed while supplying water or an aqueous solution to which a surfactant is added on the surface of the polishing tape.

Further, the present invention relates to a polishing apparatus for forming a machined surface having high precision on a ridge portion or an end surface of a flat glass. The polishing apparatus of the present invention is a rib or at least one end surface of at least one of the ribs of the rectangular flat glass having an end surface between the upper surface, the lower surface and the both surfaces thereof at the boundary between the upper surface and the lower surface and the end surface, and is formed by grinding with a polishing tape. The surface grinding device is characterized by: a base; a workpiece unit for arranging the flat glass, and the flat glass is disposed on the base so as to be movable along a movement axis parallel to the base And a polishing tape unit for arranging the polishing tape, and is disposed on the base opposite to the workpiece unit. Workpiece The unit has a holding table for holding the flat glass in such a manner that one end surface of the flat glass is parallel to the moving axis, and the upper or lower surface of the flat glass is parallel to the base; the holding table is pivoted about the moving axis, thereby making the flat plate a first tilting means for tilting the upper or lower surface of the glass with respect to the base only by a predetermined angle (α); and rotating the holding table about a rotation axis perpendicular to the movement axis and parallel to the base, thereby making the flat glass The second tilting means that tilts only a predetermined angle (θ) with respect to the base above or below. The polishing tape unit has: a spacer for arranging the polishing tape with the surface of the polishing tape having the surface of the abrasive grain facing the one edge of the flat glass or the one end surface; and a polishing plate for mounting the spacer perpendicular to the base; The surface of the polishing tape abuts and presses the polishing plate toward the one edge or one end surface to move the polishing plate toward the direction parallel to the base and perpendicular to the movement axis; and the polishing tape traveling means for advancing the polishing tape.

In the present invention, when the polishing tape is disposed on the spacer, it is preferable that the longitudinal direction of the polishing tape is parallel to the movement axis.

Further, the longitudinal direction (traveling direction) of the polishing tape disposed on the spacer may be inclined by a predetermined angle (β) with respect to the movement axis depending on the width of the polishing tape or the traveling state. In order to incline the longitudinal direction of the polishing tape with respect to the axis of movement, the polishing tape unit preferably includes a polishing plate tilting means for tilting the polishing plate.

Furthermore, the present invention relates to a rectangular flat glass having an end surface between the upper surface, the lower surface and the both sides thereof, which is moved along a horizontal movement axis and which is at least at a boundary between the upper surface or the lower surface of the flat glass and the end surface. The rib of one side is formed by grinding the surface of the abrasive belt with abrasive particles The grinding method of the machined surface. The grinding method of the present invention comprises the steps of: arranging the flat glass in such a manner that one end surface of the flat glass is parallel to the moving axis, and the upper or lower surface of the flat glass is horizontally formed; and the flat glass is pivoted about the moving axis, thereby a first tilting step of tilting the upper or lower surface of the flat glass with respect to the horizontal only by a predetermined angle (α); rotating the flat glass centering on a horizontal axis and a rotation axis perpendicular to the moving axis, thereby making the upper or lower surface of the flat glass relatively a second tilting step of tilting only a predetermined angle (θ) horizontally; a step of disposing the polishing tape on the surface of the spacer member in such a manner that the surface of the polishing tape faces the edge of one of the flat glass; via the spacer member The polishing tape applies a predetermined pressing force to abut the surface of the polishing tape and presses the edge portion, and a step of moving the flat glass along the movement axis to polish the edge portion.

In the above polishing method, the longitudinal direction of the polishing tape disposed on the spacer member may be parallel to the movement axis, or may be inclined only by a predetermined angle (β) with respect to the movement axis.

According to the present invention, it is possible to manufacture a cover glass or an optical filter for a flat-panel display or an electronic component for use in a mobile phone display window, a liquid crystal panel, an organic EL panel, a plasma panel, a solar cell panel, etc., and the ridge portion Or flat glass with high-precision machining to increase the strength. By polishing the edge or the end surface of the flat glass by using the polishing belt, it is possible to sufficiently remove the flaw or the notch of the edge portion which causes the damage, and it is possible to form a highly precise machined surface. By implementing the flat glass of the present invention, various types can be improved The yield of products such as flat-panel displays is improved, and the quality and precision of products incorporating the flat glass can be improved.

The various features of the present invention are described below with reference to the drawings and the preferred embodiments of the invention. The drawings are simplistic for illustration and the scales are not necessarily consistent.

Fig. 1 is a schematic view of a flat glass W. The flat glass W has a rib at a boundary between the upper surface or the lower surface (main surface) and the end surface, and has a corner at the boundary between one end surface and the other end surface. The flat glass of the present invention is obtained by grinding the ribs or end faces by a polishing tape and forming a highly precise machined surface.

Fig. 2 is a schematic view showing a process of chamfering the sheet glass W and a side surface shape of the formed surface. Fig. 2(A) shows the rib portion forming the processed surface 30a by so-called C chamfering. Fig. 2(B) shows the entire processing surface 30b from the rib to the end surface by so-called R chamfering.

In order to increase the strength of the flat glass W, it is important to polish the edge portion to remove the ridges or fragments of the ribs and to reduce the surface roughness or the maximum valley depth of the processed surface 30a or 30b formed by removing the ridges. In order to impart sufficient mechanical strength to the sheet glass W, it is effective to set the average surface roughness Ra of the machined surface 30a or 30b to 20 nm or less, and the maximum valley depth Rv of the roughness curve is 200 nm or less.

In order to obtain such a high-precision working surface, the present invention is characterized in that the flat glass is coated by a polishing belt having an abrasive layer having fine abrasive grains on the surface. The edge or end surface (end edge portion) of the glass W is polished. In order to obtain the machined surface 30a or 30b with high precision, the grinding can be carried out by the steps of coarse grinding, medium grinding, and mirror finishing. Further, the chamfering of the corner portion (Fig. 1) can be performed by using a grindstone to which a resin having a small skew is processed in advance, and then polished by a polishing tape to perform efficient polishing.

The average particle diameter of the abrasive grains on the surface of the polishing tape is preferably in the range of 0.2 μm or more (#20000) or 3 μm or less (#4000). When the average particle diameter exceeds 3 μm, a large flaw or a notch before polishing can be removed, but a new flaw or a notch is formed on the machined surface, and the flat glass W cannot be provided with sufficient strength, which is not preferable. When the average particle diameter is less than 0.2 μm, the polishing efficiency is extremely lowered, and the productivity is deteriorated, so that it is not practical in the industry.

Hereinafter, a state in which the edge portion (or the end surface) of the sheet glass W is polished by the polishing tape as a processing surface having a predetermined surface property will be described with reference to the drawings.

3 is a plan view of the polishing apparatus 1, and FIG. 5 is a side view of the polishing apparatus 1. The polishing apparatus 1 of the present invention is composed of a workpiece unit 3 and a polishing belt unit 4 which are disposed to face each other on the susceptor 2.

The workpiece unit 3 is mounted on a reciprocating mechanism provided on the base 2. Referring to Fig. 3, the reciprocating mechanism includes: a LM guide 6 having a guide rail 32 parallel to the base 2; and a single-axis robot 5 having a guide rail (box) 31 parallel to the guide rail 32. As shown in detail in Fig. 5, a traveling body 7 parallel to the susceptor 2 is coupled to the LM guide 6 and the uniaxial robot 5. The workpiece unit 3 is mounted on the traveling body 7, whereby the workpiece unit 3 can be along the LM guide 6 The guide rails 32 move. The axis of movement 13 of the workpiece unit 3 can be drawn by the guide rails 32.

In the uniaxial robot 5, the ball screw in the guide rail 31 is rotated by the motor, whereby the nut (movable portion) is linearly reciprocated by grinding the ball screw at a predetermined interval (stroke). Since the traveling body 7 is coupled to the movable portion of the uniaxial robot 5, the traveling body 7 is driven to reciprocate. Further, since the uniaxial robot 5 is coupled to the coaxial portion of the nut (movable portion), the nut can be rotated relative to the fixed ball screw and linearly reciprocated, or by other components. The traveling body 7 is linearly driven.

In order to reciprocate the traveling body 7 correctly along the movement axis 13 (Fig. 3), it is preferable to use the single-axis robot 5 and the LM guide 6, but the traveling body 7 can also be actuated by the single-axis robot 5 or as an actuation. The LM guide for the device performs a reciprocating motion.

Referring to Fig. 5, the workpiece unit 3 is constituted by a front panel 14 vertically mounted on the traveling body 7, an inclined plate 37 mounted in parallel to the front panel 14, an inclined plate 35 vertically mounted on the inclined plate 37, and The holding table 12 held by the movable plate 35' of the inclined plate 35. The holding table 12 is vertical with respect to the front panel 14 in a state of being not inclined by the inclined plate (35 or 37), and is parallel to the base 2.

As shown in detail in Fig. 3, a flat glass W for processing and polishing by a polishing tape is disposed on the upper surface of the holding table 12. The flat glass W is disposed such that one end surface thereof is parallel to the movement axis 13 and is fixed to the holding table 12. The plate glass W is fixed by the fixing plate 33 and the fixing rod 34. In match An elastic patch such as cloth or rubber is adhered to the surface of the holding table 12 of the flat glass W and the back surface of the fixing plate 33 so as not to cause flaws on the flat glass surface. In addition to this, the flat glass W may be fixed to the holding table 12 by vacuum adsorption, bonding, or the like.

Fig. 6 is a front elevational view showing the workpiece unit 3 partially overlapping the polishing tape unit 4. The slightly U-shaped front panel 14 having the upward opening portion is elongated perpendicular to the traveling body 7 parallel to the susceptor 2 and parallel to the movement axis 13. A slightly U-shaped inclined plate 37 is attached to the front panel 14 in parallel. Among the drawings, the opening of the front panel 14 overlapping the inclined plate 37 is indicated by a broken line. A pair of inclined plates 35 and 35 are vertically provided to the inclined plate 37 so that the inner side of the opening portion of the inclined plate 37 is opposed to the right and left.

The inclined plate 37 has an arc-shaped thread groove on the right and left sides, and has an arc-shaped guide groove 39 at the lower portion. The thread groove and the guide groove 39 are each formed by drawing a part of the circumference of a circle centered on C. The left and right threaded grooves are provided for the fixing screws 38 for fixing the inclined plate 37 to the front panel 14 at a predetermined angle. The tilting plate 37 can be fixed to the front panel 14 by locking the fixing screw 38 via a washer or the like (not shown). The guide groove 39 has a rod (guide roller) 39a fixed to the front panel 14 through, and in a state where the fixing screw 38 is loosened, the inclined plate 37 can be perpendicular to the base along the guide groove 39 and the rod 39a. 2 in-plane rotation. In other words, the inclined plate 37 can be rotated about an axis perpendicular to the movement axis 13 and parallel to the base 2 through the center C.

With the rotation of the inclined plate 37, the tilt provided integrally with the inclined plate 37 The plate 35 is also rotated, and the holding table 12 held between the left and right movable plates 35' is rotated as shown by a chain line to be inclined with respect to the movement axis 13 parallel to the base 2. When the holding table 12 is inclined only at a desired angle with respect to the movement axis 13, the inclined plate 37 can be fixed to the front panel 14 by the fixing screw 38.

The inclined plate 35 that is vertically provided integrally with the inclined plate 37 has a bilaterally symmetrical configuration. A pair of right and left movable plates 35' and 35' parallel to the inclined plate 35 are provided inside the pair of right and left inclined plates 35, 35. The movable plate 35' holds the holding table 12.

Referring to Fig. 5, the inclined plate 35 has an arcuate thread groove 35a (solid line portion). The threaded groove 35a is inserted through the inclined plate 35 so as to be locked from the outside by the fixing screw 36 inserted into the movable plate 35'. In order to be effectively locked, the fixing screw 36 preferably has a handle or a knob such as a clamp lever.

On the inner side of the inclined plate 35, an arcuate guide groove 35b (dashed line portion) having substantially the same shape as the screw groove is formed along the above-described screw groove 35a. Fig. 5B is a schematic view showing a cross section of the center of the inclined plate 35. The inner guide groove 35b is formed to be wider than the screw groove 35a and does not penetrate the inclined plate 35.

As shown in detail in Fig. 5, the thread groove 35a and the guide groove 35b are each formed by drawing a portion of the circumference of a circle centered at C'. The rod (guide roller) 35'a (Fig. 15A) of the movable plate 35' slides along the guide groove 35b. That is, the movable plate 35' of the inclined plate 35 is pivoted about C' in the plane perpendicular to the front panel 14, and is fixed to the movable plate 35', 35' by the pivoting of the movable plate 35'. The holding table 12 will pass through the center C' The axis of movement 13 is pivoted about the axis and is inclined relative to the base 2. When the holding table 12 is inclined at a desired angle with respect to the base 2, the movable plate 35' can be fixed to the inclined plate 35 by locking the fixing screw 36 from the outside of the inclined plate 35.

As described above, the holding table 12 (from a state parallel to the susceptor 2) is tilted by pivoting about the moving axis 13 by the inclined plate 35, or the holding table 12 is made by the inclined plate 37 (from parallel to the base) The state of the seat 2 is adjusted by the inclination angle which is inclined with respect to the axis of movement 13 and which is parallel to the axis of the base 2, and either one of them can be performed first.

Fig. 5 shows a side view of the polishing tape unit 4. The polishing tape unit 4 has a pair of fixing plates 50, 50 that are vertically elongated from the base 2 and face each other. A pair of inclined plates 46 and 46 are attached to the fixed plates 50 and 50 in parallel via a rod (guide roller) 49a (Fig. 7A). Between the inclined plates 46, 46, a guide bearing 48 composed of a shaft (shaft) and a nut (bearing) is elongated. As shown in the front view of Fig. 7A, the pair of left and right guide bearings 48, 48 are elongated by the inclined plates 46, 46, and are integrally coupled by a joint member (without symbol). The guide bearing 48 may also be a linear bearing, a ball spline or a ball bearing guide composed of a shaft and a cylindrical nut.

Referring to Fig. 5, a moving plate 42 parallel to the susceptor 2 is placed on the guide bearing 48. From the moving plate 42, the polishing plate 27 is vertically elongated. A pad 26 perpendicular to the base 2 can be mounted on the lapping plate 27.

The rod of the cylinder 43 is pushed out or pulled in by the air pressure or the spring, whereby the nut (movable portion) of the guide bearing 48 is reciprocated along the shaft in the direction of the arrow 28. It can also replace the cylinder 43 and be used to give the snail Other means of pushing the cap (movable part) to move back and forth. When the nut (movable portion) of the guide bearing 48 moves back and forth, the moving plate 42 and the grinding plate 27 mounted on the moving plate 42 reciprocate along the arrow 28, and the surface of the polishing tape T disposed on the spacer 26 can be close to the workpiece. The unit 3 is pushed against the object to be polished (plate glass W) at a predetermined pressing force (thrust) or is separated from the workpiece unit 3.

Figure 7A shows the sloping plate 46. The fixing plate 50 in the drawing is indicated by a broken line. The slanting plate 46 has an arcuate thread groove for the fixing screw 47 to pass right and left, and has an arcuate guide groove 49. The left and right thread grooves and guide grooves 49 are preferably formed by drawing a portion of a circumference of a circle centered on the center C" of the polishing tape T of the spacer 26. By this configuration, the inclined plate 46 can be formed. In a state where the fixing screw 47 is loosened, the rod (the guide roller) 49a which is guided along the guide groove 49 and passes through the guide groove is rotated.

As detailed in Fig. 7B, when the inclined plate 46 is rotated, the moving plate 42 is inclined from a state parallel to the base 2, and the polishing plate 27 is also inclined. When the polishing plate 27 is inclined, the longitudinal direction of the polishing tape T attached to the polishing plate 27 via the spacer 26 is inclined with respect to the susceptor 2 (the movement axis 13 of the workpiece unit 3). In other words, the longitudinal direction of the abrasive tape T can be rotated centering on the axis perpendicular to the movement axis 13 and parallel to the passage C" of the base 2, and inclined with respect to the movement axis 13. The longitudinal direction of the abrasive tape T is relative to the movement When the axis 13 is only inclined at a desired angle, the inclined plate 46 can be fixed to the fixed plate 50 by the fixing screw 47.

The pad 26 of the polishing tape unit 4 is provided with a travelable polishing tape T (Fig. 3).

By facing the spacer 26 on the back surface of the polishing tape T, the surface of the polishing tape T is pressed against the polished portion (edge portion) of the flat glass W via the spacer. Since the spacer 26 has elasticity, the processed surface (30a) can be curved, that is, the cross section is formed in an R shape, and the strength of the flat glass can be further improved. The gasket 26 may be an elastomer of rubber, a foamed resin or a composite thereof.

In order to form a highly precise machined surface using an abrasive belt having fine abrasive grains on its surface, the elasticity of the gasket 26 is preferably appropriately selected.

When the elasticity of the spacer 26 is excessively large (for example, the Shore A hardness is less than 20), the processed surface of the flat glass W is slack and the linearity of the edge portion is lost, which is not preferable. On the other hand, if the elasticity is too small (for example, the Shore A hardness exceeds 90), the linearity of the edge portion of the processed surface is sufficient, but the removal of the flaw or the notch generated by the workpiece due to the mechanical impact becomes insufficient. The strength of the flat glass W is lowered, which is not preferable.

Therefore, in order to alleviate the mechanical impact, the gasket 26 may be a foamed resin sheet having a Shore A hardness of 20 to 50. In addition, when the average particle diameter of the abrasive grains provided on the surface of the polishing tape T is 1 μm or less (#8000), the polishing rate of the foamed resin sheet having a large elasticity is rapidly lowered, which is not practical, and therefore, the lining is required. The pad 26 is preferably a combination of the above-mentioned foamed resin sheet and a rubber sheet having a Shore A hardness of 80 to 90. By doing so, even if a polishing tape having an extremely fine particle diameter (for example, 1 μm or less) is used, the polishing rate is not too slow, and a high-precision surface property can be formed. A machined surface of the shape (Ra, Rv) and a machined surface with a good linearity at the edge.

Fig. 4 is a schematic view of the polishing tape unit 4 in which the elastic spacers 26A, 26B are disposed. For example, the spacer 26A is a rubber sheet having a small elasticity, and the spacer 26B is a foamed resin sheet having a large elasticity.

Figure 15 is a view of the arrangement of the movement axis 13 and the surface of the abrasive tape T and other aspects. As shown in Fig. 16 (a), when the corner portion of the flat glass W is chamfered into an R shape, the flat glass W is reciprocated and polished while the surface of the polishing tape T is parallel to the movement axis 13.

As shown in Fig. 16(b), the flat glass W has not been chamfered beforehand, or has a chamfered corner (hereinafter referred to as a corner portion R'), as shown in Fig. 16(a). When the surface of the polishing tape T is in a parallel state with the movement axis 13 of the plate glass W, the corner portion R' entering the polishing tape T causes a flaw in the polishing tape T, and thus the polishing tape T may be damaged and the grinding must be interrupted.

Therefore, in the case where the flat glass W having the corner portion R' is polished by the polishing tape T, the surface of the polishing tape T preferably has a convex curved surface with respect to the flat glass W. In order to arrange the surface of the polishing tape T in this manner, it is preferable to mount the spacer 26 along the curved surface of the polishing plate 27 having a convex curved surface on the surface facing the flat glass W. Alternatively, a spacer 26 having a convex curved surface with respect to the sheet glass W may be attached to the flat polishing plate 27. In this case, the contact with the surface of the polishing tape T at the corner portion R' of the polishing tape T is restricted, so that the flaw of the polishing tape T is not formed, and the durability of the polishing tape T can be improved.

Preferably, the convex curved surface is an arc-shaped curved surface having a large radius of curvature, and It is a surface that is close to a flat surface. When the curvature of the surface of the polishing tape T is excessively large, the contact area between the surface of the polishing tape T and the sheet glass W is small, and the polishing efficiency is lowered, which is not preferable. Further, when the interval (stroke) of the reciprocating movement of the sheet glass W is small, the polishing portion (the both end portions are closer to the center portion) in the center portion and the both end portions of the polished portion (the ridge portion) of the sheet glass W. The amount of grinding will be less, which is not ideal.

Referring to Fig. 3, the polishing tape unit 4 has a supply roller 22 that supplies the polishing tape T, and a take-up roller 23 that winds up the polishing tape. The supply spool 22 is connected to a torque motor (not shown) in order to impart a moderate tension to the polishing tape T. The take-up reel 23 is connected to a stepping motor (not shown) and winds up the polishing tape T supplied from the supply reel 22. A stopper roller (not shown) for imparting a moderate tension to the polishing tape T is provided on the winding reel 23 side. Further, the polishing tape unit 4 may have auxiliary rollers 24 and 25 for appropriately arranging the polishing tape T on the polishing pad 27.

In the grinding, the polishing tape T may be in a stationary state or may be continuously or intermittently traveled by means of a grinding belt traveling means. In the case where the polishing is finished in a short time, the polishing tape T may be used without being traveling but in a stationary state, and the surface of the new polishing tape T may be supplied for the next polishing after the polishing. Grinding takes a long time, and in order to continuously supply a stable abrasive surface with high precision, that is, the surface of the abrasive belt having the abrasive grains, it is preferable to continuously or intermittently advance the polishing tape.

The grinding device 1 further comprises control means for controlling the workpiece unit 3 and the polishing belt unit 4. Further, when grinding in a wet manner, it may have an aqueous solution for supplying water or a surfactant added to the surface of the polishing tape T. Water supply or water pipe.

According to the polishing apparatus 1 having the above configuration, the ridge portion (or the end surface) of the sheet glass W is abutted against the movement axis 13 at a predetermined angle, and is pressed against the surface of the polishing tape T. The plate glass W will reciprocate along the moving axis 13 and be ground.

Fig. 8 (a) and (b) are plan views showing the flat glass W by the first and second tilting means (35, 37) viewed from the side or the front side of the surface of the polishing tape 13 or the front side, respectively. The configuration of the inclination angle α or the inclination angle θ.

As shown by the broken line in Fig. 8(a), in a state where the holding table 12 is not inclined, the upper surface or the lower surface of the flat glass W is perpendicular to the surface of the polishing tape T, and the end surface is parallel to the surface of the polishing tape T. The sheet glass W1 is inclined only by the angle α by the first tilting means 35. As shown in Fig. 2(C), the angle α corresponds to the angle of the so-called C chamfer.

Fig. 8(b) is a view showing a state in which the sheet glass W is inclined by an angle θ with respect to the movement axis 13 by the second inclination means 37. The angle θ is preferably in the range of 5 to 60 degrees. The selection of the angle θ is limited by the width of the polishing tape T to be used and the length of the polished portion (edge of one side) of the sheet glass W. However, when the angle θ is less than 5 degrees, the polishing efficiency is less likely to increase. When the angle θ exceeds 60 degrees, the polishing efficiency is improved. However, since the contact resistance of the flat glass W is so large that the contact resistance with the surface of the polishing tape T becomes large, stable polishing is not easily performed. Moreover, if it is a thin-walled flat glass W, sometimes the glass may be broken. Further, when the angle θ is small, the sheet glass W is sequentially moved in the width direction of the unused polishing tape T, The abrasive belt can be effectively utilized.

In the state of the plate glass W1 (the state in which the rib portion is parallel to the movement axis), the plate glass W1 can be reciprocated along the movement axis to be polished, or the angle α and the angle θ can be combined ( Grinding is performed in a state in which the rib portion is inclined only by an angle θ with respect to the movement axis. In the state of the sheet glass W1, the polishing efficiency may be insufficient. However, efficient polishing can be performed by inclining the traveling direction (longitudinal direction) of the polishing tape with respect to the movement axis. Further, when grinding in a state where the angle α and the angle θ are combined, the width of the polishing tape can be increased and used, and the abrasive grains can be effectively applied to the ridge portion, and the polishing speed can be increased, which is also advantageous in terms of cost.

Fig. 9 shows another grinding method of the flat glass W. The width Tw of the polishing tape T can be used as long as it is equal to or greater than the thickness (width of the end surface) of the flat glass W, but is pressed against the polishing tape T by tilting the edge portion of the flat glass W with respect to the movement axis 13 by a predetermined angle. In the case where the surface is ground and moved to perform grinding, it is preferable to select the width of the polishing tape T in consideration of the area of the reciprocating movement. Grinding is preferably carried out within the width of the abrasive tape T.

As shown in Fig. 9(a), in a state where the end surface (or the rib portion) of the sheet glass W is inclined by θ' with respect to the movement axis 13, the polishing tape T travels at a predetermined speed in the direction of the arrow 21, with respect to the polishing belt. The width Tw of T is small for the width Tw' of the polishing, so that the surface of the polishing tape T has an unused portion, which is not economical. As shown in Fig. 9(b), when the polishing tape T is caused to travel only by an inclination angle β with respect to the movement axis 13, as the polishing tape T travels The width Tw of the polishing tape T is all in contact with the portion to be polished of the plate glass W in order, so that the width Tw of the polishing tape T is actually equal to the width Tw' used for the polishing. In the state in which the longitudinal direction of the polishing tape T is inclined by the angle β with respect to the movement axis 13 while the polishing tape T is traveling in the direction of the arrow 21, the sheet glass W is placed at a predetermined round-trip interval along the movement axis 13 ( When the stroke L moves back and forth, the operation of the flat glass W with respect to the surface of the polishing tape T forms a shape in which the saw teeth are drawn up and down, so that the width Tw of the polishing tape T can be effectively utilized.

The angle (θ' + β) is preferably in the range of 5 to 60 degrees. In this range, it is preferable to adjust so that the polished portion of the sheet glass W does not exceed the width of the polishing tape T during the reciprocating movement. This is to prevent the occurrence of flaws in the edge portion of the sheet glass W by preventing the step contact with the end portion of the polishing tape T in the width direction.

Fig. 10 shows another grinding method of the flat glass W. As shown in Fig. 10(a), the upper surface or the lower surface of the flat glass W may be perpendicular to the surface of the polishing tape T and abut against the longitudinal direction of the polishing tape T, or may be made as shown in Fig. 10(b). The polishing plate 27 performs an arcuate reciprocating motion from the upper edge portion of the flat glass W to the lower edge portion, and performs arc-shaped R-surface polishing on the entire end surface of the flat glass.

The polishing tape used in the present invention is obtained by applying a solution in which abrasive grains are dispersed in a resin binder to a base film made of plastic, and drying and hardening the sheet to form a slit of a necessary width and winding. On the reel.

As the base film, a plastic film made of a synthetic resin having flexibility can be used. Specifically, polyethylene terephthalate or polyterephthalic acid can be used. Polyester resin such as dibutyl ester, polyethylene naphthalate or polybutylene naphthalate, polyolefin resin such as polyethylene or polypropylene, and polyvinyl alcohol or methacrylic ethanol A film formed of an acrylic resin or the like of the component is used as a base film.

As the abrasive grains (abrasive particles), alumina (Al ₂ O ₃ ), cerium oxide (CeO ₂ ), cerium oxide (SiO ₂ ), diamond, cerium oxide (SiC), chromium oxide (Cr ₂ O ₃ ), oxidation may be used. Zirconium (ZrO ₂ ), cubic boron nitride (cBN), and the like, and mixtures thereof, and are in the range of the above particle diameters.

Example 1

According to the manufacturing method of the first embodiment of the present invention, it is possible to manufacture a flat glass having a machined surface with high precision at the rib portion. The flat glass is a rectangular soda lime glass having a length of 700 mm, a width of 400 mm, and a thickness of 0.8 mm. The four corners of the flat glass are subjected to R chamfering by a grindstone in advance, and then the ribs of the octagon are polished by a polishing tape to form a processed surface. During the grinding, the reciprocating movement of the flat glass is performed in a state where the ridge portion is inclined by 10 degrees with respect to the movement axis (θ=10°), and the flat glass abuts against the surface of the polishing belt at an angle of 45 degrees (α=45°). The amount of polishing (h of Fig. 2C) was 50 μm. In order to set the amount of polishing to a certain extent, the number of round trips of the flat glass is adjusted by the polishing particle diameter of the surface of the polishing tape (1 round trip = 1 sweep). The surface of the abrasive belt is parallel with respect to the axis of movement of the plate glass and is in a stationary state. And grinding is performed while supplying a small amount of water to the surface of the abrasive belt.

The conditions of the production method of Example 1 are summarized as follows.

Grinding conditions (one side)

Status of the abrasive belt: stationary

Angle of inclination of the flat glass relative to the surface perpendicular to the surface of the abrasive belt (α): 45°

Grinding amount (h): 50 μm

Angle of inclination of the rib relative to the axis of movement (θ): 10°

Stroke length of reciprocating motion (L): 150mm

Grinding belt width (Tw): 30mm

Pushing force of the grinding belt (thrust): 15N

The polishing tape was a GC (green diamond) #4000 (SiC: average abrasive particle diameter: 3 μm), and the gasket member was a foamed resin gasket using a Shore A hardness of 30. The round trip number of flat glass is 21 sweeps.

Example 2

In the production method of Example 2, the polishing tape was a GC #6000 (average polishing particle diameter of 2 μm). The round trip number of the flat glass is 24 sweeps. Other conditions are the same as in the first embodiment.

Example 3

In the production method of Example 3, the polishing tape was GC#10000 (average polishing particle diameter: 0.5 μm). The spacer member was a rubber sheet having a Shore A hardness of 80 and a foamed resin sheet having a Shore A hardness of 30. The round trip number of the flat glass is 31 sweeps. Other conditions are the same as in the first embodiment.

Comparative example 1

In the production method of Comparative Example 1, GC#1000 (average polishing particle diameter: 16 μm) was used for the polishing tape. The round trip times of the flat glass is 7 sweeps. Other conditions are the same as in the first embodiment.

Comparative example 2

In the production method of Comparative Example 2, the polishing tape was GC#2000 (average polishing particle diameter: 9 μm). The round trip number of the flat glass is 11 sweeps. Other conditions are the same as in the first embodiment.

Comparative example 3

In the production method of Comparative Example 3, the polishing tape was GC#3000 (average polishing particle diameter: 5 μm). The round trip number of the flat glass is 17 sweeps. Other conditions are the same as in the first embodiment.

Comparative example 4

In the production method of Comparative Example 4, a grinding stone in which a diamond abrasive grain (average particle diameter of 14 to 22 μm) having a particle size of #1000 was bonded was used. The edge portion of the grinding stone and the flat glass is placed as shown in Fig. 14 and the grinding stone is rotated to perform chamfer grinding of the ridge.

The average surface roughness Ra of the examples and the comparative examples subjected to the above-described processing and polishing, and the maximum valley depth Rv of the roughness curve are shown in Table 1 below. The average surface roughness Ra and the maximum valley depth Rv were measured by a surface roughness meter (product name New View 5000: manufactured by Zygo Co., Ltd.).

According to the manufacturing methods of Examples 1 to 4, a flat glass having a highly precise processed surface (average surface roughness Ra: 1.7 nm to 11.5 nm, maximum valley depth Rv: 32 nm to 162 nm) can be obtained. The number of round trips is 20 to 30, and the grinding speed is also sufficient. The maximum valley depth of the processed surface of the flat glass according to the manufacturing method of the comparative example mostly exceeds 1000 nm.

An enlarged photograph of the processed surface of the examples and comparative examples is shown in Fig. 11. The left side is an optical photograph using a digital microscope (product name: VHX500: KEYENCE), and the photo on the right side is a surface roughness meter (product name: NewView 5000: manufactured by Zygo Co., Ltd.). Fig. 11(A) shows a comparative example 1, (B) is a comparative example 2, (C) is a first embodiment, and (D) is a processed surface of the third embodiment.

In the comparative examples (A) and (B), the surface unevenness was large, and the surface properties of the processed surface were not sufficient. In the examples (C) and (D), no irregularities or flaws are formed. High precision machined surface. Moreover, since the polishing tape is used, the machined surface has a curved surface, and the linearity of the edge portion is also excellent.

Fig. 12 is an enlarged photograph of the processed surface of the plate glass obtained by the production method of Comparative Example 4. Since the grinding is performed by the grindstone, the machined surface does not form a curved surface. Moreover, there are grinding marks (grinding wheel marks) on the surface, and many defects are seen.

The edge strength (MPa) of each of the plate glasses of the examples and the comparative examples was measured. The edge strength refers to the strength of the edge portion of the glass. The edge strength was measured according to the room temperature bending strength test method (JIS R1601) using a commercially available four-point bending tester. The method of the edge strength test (four-point bending) is shown in the pattern diagram of Fig. 13. The test was carried out under the condition that the load jig interval was 10 mm, the support jig interval was 30 mm, and the load speed was 5 mm/min.

Table 1 shows the average value of the edge strengths obtained in 10 sheets of the flat glass of the test examples and the comparative examples. The use of the polishing belt having fine abrasive grains on the surface of the present invention to polish the edge portion to form a flat glass of a machined surface, which can greatly reduce the average surface roughness Ra and the maximum valley depth Rv of the machined surface, as compared with the past. The processing of the grindstone has increased the edge strength by more than three times. Thus, since the edge strength of the flat glass of the present invention is remarkably improved, the flat glass can be prevented from being damaged by mechanical stress or thermal shock in the process of using the flat glass article. Moreover, the flat glass is not easily damaged after it is loaded into the article, and the reliability of the article can be improved.

It will be apparent to those skilled in the art that various modifications can be made without departing from the spirit and scope of the invention. Therefore, it is to be understood that the invention is not intended to limit the scope of the invention.

W‧‧‧Flat glass (abrasive body)

T‧‧‧grinding tape

Tw‧‧‧grinding tape width

Tw’‧‧‧ grinding width

1‧‧‧ grinding device

2‧‧‧Base

3‧‧‧Workpiece unit

4‧‧‧grinding belt unit

5‧‧‧ Single-axis robot

6‧‧‧LM Guide

7‧‧‧Traveling body

12‧‧‧ Keeping the table

13‧‧‧Mobile axis

21‧‧‧Drilling belt travel direction

22‧‧‧Supply wheel

23‧‧‧Rolling wheel

24‧‧‧Auxiliary Roller 1

25‧‧‧Auxiliary roller 2

26‧‧‧ cushion

26A‧‧‧2nd pad means

26B‧‧‧1st pad means

27‧‧‧grinding plate

28‧‧‧The direction of movement of the grinding plate 1

29‧‧‧The direction of movement of the grinding plate 2

30a‧‧‧Machining surface (edge)

30b‧‧‧Machining surface (end face)

31‧‧‧ Guide rail 1

32‧‧‧ Guide 2

33‧‧‧ fixed plate

34‧‧‧Fixed rod

35‧‧‧ Inclined plate 1

35a‧‧ thread groove

35b‧‧‧ Guide groove

35’‧‧‧ movable board

35’a‧‧‧ rod 1

35’b‧‧ threaded hole

36‧‧‧Fixed screws 1

37‧‧‧ Inclined plate 2

38‧‧‧Fixed screws 2

39‧‧‧ Guide groove 1

39a‧‧‧ Rod 2

40‧‧‧磨石

42‧‧‧Mobile board

43‧‧‧ cylinder

46‧‧‧ Inclined plate 3

47‧‧‧Fixed screws 3

48‧‧‧Guided bearings

49‧‧‧ Guide groove 2

49a‧‧‧ rod 3

50‧‧‧ fixed board

Figure 1 is a schematic view of a flat glass.

Fig. 2 (A) and (B) are schematic views showing a process of forming a machined surface at the edge portion of the flat glass and a side surface shape of the formed machined surface. Fig. 2(C) is a schematic view showing the angle between the flat glass and the surface of the polishing tape in the process of forming the processed surface of Fig. 2(A).

Figure 3 is a plan view of a polishing apparatus in the same state of the present invention.

Fig. 4 is a schematic view of the polishing apparatus of the present invention.

Fig. 5 is a side view of the polishing apparatus in the same state of the present invention.

Fig. 5A is a schematic view showing a movable plate of the polishing apparatus of the present invention.

Fig. 5B is a schematic view showing a central cross section of the inclined plate 35 of the polishing apparatus of the present invention.

Fig. 6 is a front elevational view of the polishing apparatus in the same state of the present invention.

Fig. 7A is a front elevational view of the polishing belt unit in the same state of the present invention.

Fig. 7B is a front elevational view showing the inclined state of the polishing tape unit in the same state of the present invention.

Fig. 8(a) and Fig. 8(b) are schematic views showing a method of producing flat glass, a polishing method, a flat glass of a polishing apparatus, a surface of a polishing belt, and a moving axis in the same manner as in the present invention.

Fig. 9 is a schematic view showing a method of producing flat glass according to another aspect of the present invention, a polishing method, a plate glass of a polishing apparatus, a surface of a polishing belt, and a moving axis.

Figure 10 (a) and (b) are the same as the flat glass of the present invention. Manufacturing method, grinding method, flat glass of the polishing apparatus, pattern of the surface of the polishing belt, and a pattern of the direction of movement thereof.

Fig. 11 (A) to (D) are enlarged photographs of respective processed faces of the plate glass of the embodiment of the present invention and the plate glass of the comparative example.

Fig. 12 is an enlarged photograph of the processed surface of the flat glass of Comparative Example 4 using a grindstone.

Fig. 13 is a schematic view showing a four-point bending test method for measuring the edge strength of the flat glass.

Fig. 14 is a schematic view showing a polishing method of the ridge portion of the flat glass using the grindstone of Comparative Example 4.

Fig. 15 (a) and (b) are schematic views showing the shape of the corner portion of each flat glass and the shape of the spacer.

1‧‧‧ grinding device

2‧‧‧Base

3‧‧‧Workpiece unit

4‧‧‧grinding belt unit

5‧‧‧ Single-axis robot

6‧‧‧LM Guide

7‧‧‧Traveling body

12‧‧‧ Keeping the table

13‧‧‧Mobile axis

14‧‧‧ front panel

22‧‧‧Supply wheel

23‧‧‧Rolling wheel

24‧‧‧Auxiliary Roller 1

25‧‧‧Auxiliary roller 2

26‧‧‧ cushion

27‧‧‧grinding plate

31‧‧‧ Guide rail 1

32‧‧‧ Guide 2

33‧‧‧ fixed plate

34‧‧‧Fixed rod

35‧‧‧ Inclined plate 1

35’‧‧‧ movable board

37‧‧‧ Inclined plate 2

42‧‧‧Mobile board

T‧‧‧grinding tape

43‧‧‧ cylinder

W‧‧‧Flat glass (abrasive body)

Claims (23)

A method for manufacturing a flat glass is a ridge portion of at least one of a ridge portion of the rectangular flat glass having an end surface between the upper surface and the lower surface and between the both surfaces thereof, which is located on the upper surface or at a boundary between the lower surface and the end surface, and is formed by grinding a polishing tape. A method for producing a flat glass on a machined surface, comprising the steps of: arranging a surface of an elastic spacer member on a back surface of the polishing tape, and performing C-chamfering on a rib portion of at least one side of the flat glass; a surface of the polishing tape is disposed to face a side edge of the flat glass, and a surface of the polishing tape is formed of a polishing layer having abrasive grains; and the polishing tape is given a predetermined push through the spacer member a step of abutting and pressing the surface of the polishing tape on the one edge portion; and a step of moving the plate glass along the linear movement axis to grind the edge portion, wherein the average particle diameter of the abrasive grain is In the range of 0.2 μm or more and 3.0 μm or less, in the polishing step, the polishing tape is in a state of not stopping. In the state of the traveling or the traveling state, in the polishing step, the flat glass is reciprocated along the movement axis by a predetermined angle (θ) with respect to the movement axis. A method for manufacturing flat glass, which is above, below and both sides A method of manufacturing a flat glass having at least one end surface of a rectangular flat glass having an end surface formed by grinding a polishing tape to form a processed surface, comprising the steps of: arranging a surface of the cushion member having elasticity on a back surface of the polishing belt And arranging the surface of the polishing tape opposite to one end surface of the flat glass, and the surface of the polishing tape is a step of a polishing layer having abrasive grains; and applying the predetermined polishing tape to the polishing tape via the spacer member a step of pressing the surface of the polishing belt against and pressing against the one end surface; and a step of moving the flat glass along the linear movement axis to grind the one end surface, wherein the average particle diameter of the abrasive particles is 0.2 In the range of μm or more and 3.0 μm or less, in the polishing step, the polishing tape is in a state of not stopping or traveling, and in the polishing step, the one end surface is inclined only by a predetermined angle with respect to the movement axis (θ The state of the sheet glass reciprocates along the aforementioned movement axis. The method for producing a sheet glass according to the first or second aspect of the invention, wherein the predetermined angle (θ) is in a range of 5 degrees or more and 60 degrees or less. The method for producing a flat glass according to the first or second aspect of the invention, wherein the surface of the spacer member is a flat surface. The method for producing a flat glass according to the first or second aspect of the invention, wherein the surface of the spacer member has a convex curved surface. The method for producing a flat glass according to the first or second aspect of the invention, wherein the movement axis is parallel to a longitudinal direction of the polishing tape. The method for producing a flat glass according to the first or second aspect of the invention, wherein the movement axis is inclined by a predetermined angle (β) with respect to a longitudinal direction of the polishing tape. The method for producing a flat glass according to the first or second aspect of the invention, wherein the spacer member is a first spacer member having a Shore A hardness of 20 to 50. The method for producing a sheet glass according to the eighth aspect of the invention, wherein a second spacer member having a Shore A hardness of 90 or less is disposed between the polishing tape and the first spacer member. The method for producing a flat glass according to the first or second aspect of the invention, wherein, in the polishing step, the polishing tape travels continuously or intermittently. The method for producing a flat glass according to the first or second aspect of the invention, wherein the predetermined pressing force is gradually increased as the polishing progresses. A grinding device is a rectangular flat glass having an end surface between the upper surface, the lower surface and the both sides thereof, located on the aforementioned upper surface or the lower surface and the foregoing a rib or at least one end surface of at least one of the ribs at the boundary of the end surface, wherein the polishing device for polishing the surface is formed by polishing the belt, and is characterized by: a pedestal; a workpiece unit for arranging the slab a glass, wherein the flat glass is disposed on the base to be movable along a movement axis parallel to the base; and a polishing belt unit for arranging the polishing belt, and is disposed opposite to the workpiece unit In the susceptor, the workpiece unit has a holding table for holding the flat glass such that one end surface of the flat glass is parallel to the movement axis, and the upper surface or the lower surface of the flat glass is parallel to the susceptor; a first holding stage tilting means for pivoting the holding table, wherein the front surface or the lower surface of the flat glass is inclined at a predetermined angle (α) with respect to the base; and the holding table is a rotation axis that is perpendicular to the aforementioned movement axis and parallel to the aforementioned base, thereby rotating the aforementioned plate a second holding stage tilting means for inclining the pedestal with respect to the susceptor only at a predetermined angle (θ), wherein the polishing tape unit has a surface having abrasive grains on the polishing tape and one side of the flat glass Having the rib or the one end surface facing the opposite side of the pad; a polishing plate for mounting the pad perpendicular to the base; abutting and pressing the surface of the polishing tape on the one edge or the one end surface to make the polishing plate parallel to the base and moving forward A pressing means for moving the axis in the direction perpendicular to the axis; and a means for traveling the polishing tape for advancing the aforementioned abrasive tape. The polishing apparatus according to claim 12, wherein the longitudinal direction of the polishing tape disposed on the spacer is parallel to the movement axis. The polishing apparatus according to claim 13, wherein the polishing tape unit includes: tilting the polishing plate so that the longitudinal direction of the polishing tape is inclined by a predetermined angle (β) with respect to the movement axis Grinding plate tilting means. The polishing apparatus according to any one of claims 12 to 14, wherein the surface of the polishing tape is a flat surface. The polishing apparatus according to any one of the items 12 to 14, wherein the surface of the polishing tape has a convex curved surface. A grinding method is a method of moving a rectangular flat glass having an end surface between the upper surface, the lower surface and the both sides thereof along a horizontal movement axis, and at least a portion of the edge portion of the front surface of the flat glass or the lower surface and the end surface A grinding method for forming a machined surface by grinding a surface of an abrasive belt with abrasive grains, which comprises the following steps: a step of arranging the flat glass in such a manner that one end surface of the flat glass is parallel to the moving axis, and the front surface or the lower surface of the flat glass is horizontal; and the flat glass is pivoted about the moving axis, thereby a first tilting step in which the aforementioned upper surface or the lower surface of the flat glass is inclined at a predetermined angle (α) with respect to a horizontal direction; the flat glass is rotated about a rotation axis perpendicular to the movement axis, thereby making the flat glass The second inclined step of tilting the predetermined angle (θ) with respect to the horizontal direction with respect to the horizontal surface; and arranging the polishing tape on the cushion member such that the surface of the polishing tape faces the edge of the flat glass a step of applying a predetermined pressing force to the polishing tape via the spacer member, a step of abutting and pressing the surface of the polishing tape on the one edge portion; and moving the flat glass along the movement axis The step of grinding the aforementioned one edge portion. The polishing method according to claim 17, wherein the longitudinal direction of the polishing tape disposed on the spacer member is parallel to the movement axis. The polishing method according to claim 17, wherein the longitudinal direction of the polishing tape disposed on the spacer member is inclined only by a predetermined angle (β) with respect to the movement axis. The polishing method according to Item 17 or Item 18, wherein the surface of the spacer member is a flat surface. The polishing method according to claim 19, wherein the surface of the spacer member is a flat surface. The polishing method according to Item 17 or Item 18, wherein the surface of the spacer member is a convex curved surface. The polishing method according to claim 19, wherein the surface of the spacer member is a convex curved surface.