WO2013069857A1 - Automatic capillary exchange system - Google Patents

Automatic capillary exchange system Download PDF

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Publication number
WO2013069857A1
WO2013069857A1 PCT/KR2012/003190 KR2012003190W WO2013069857A1 WO 2013069857 A1 WO2013069857 A1 WO 2013069857A1 KR 2012003190 W KR2012003190 W KR 2012003190W WO 2013069857 A1 WO2013069857 A1 WO 2013069857A1
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WO
WIPO (PCT)
Prior art keywords
capillary
unit
axis
clamping
loader
Prior art date
Application number
PCT/KR2012/003190
Other languages
French (fr)
Korean (ko)
Inventor
최영규
Original Assignee
주식회사 일원
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Publication date
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Publication of WO2013069857A1 publication Critical patent/WO2013069857A1/en

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    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L24/00Arrangements for connecting or disconnecting semiconductor or solid-state bodies; Methods or apparatus related thereto
    • H01L24/74Apparatus for manufacturing arrangements for connecting or disconnecting semiconductor or solid-state bodies
    • H01L24/78Apparatus for connecting with wire connectors
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/01Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
    • H01L2224/42Wire connectors; Manufacturing methods related thereto
    • H01L2224/44Structure, shape, material or disposition of the wire connectors prior to the connecting process
    • H01L2224/45Structure, shape, material or disposition of the wire connectors prior to the connecting process of an individual wire connector
    • H01L2224/45001Core members of the connector
    • H01L2224/45099Material
    • H01L2224/451Material with a principal constituent of the material being a metal or a metalloid, e.g. boron (B), silicon (Si), germanium (Ge), arsenic (As), antimony (Sb), tellurium (Te) and polonium (Po), and alloys thereof
    • H01L2224/45138Material with a principal constituent of the material being a metal or a metalloid, e.g. boron (B), silicon (Si), germanium (Ge), arsenic (As), antimony (Sb), tellurium (Te) and polonium (Po), and alloys thereof the principal constituent melting at a temperature of greater than or equal to 950°C and less than 1550°C
    • H01L2224/45144Gold (Au) as principal constituent
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/74Apparatus for manufacturing arrangements for connecting or disconnecting semiconductor or solid-state bodies and for methods related thereto
    • H01L2224/78Apparatus for connecting with wire connectors
    • H01L2224/7825Means for applying energy, e.g. heating means
    • H01L2224/783Means for applying energy, e.g. heating means by means of pressure
    • H01L2224/78301Capillary
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/74Apparatus for manufacturing arrangements for connecting or disconnecting semiconductor or solid-state bodies and for methods related thereto
    • H01L2224/78Apparatus for connecting with wire connectors
    • H01L2224/7825Means for applying energy, e.g. heating means
    • H01L2224/783Means for applying energy, e.g. heating means by means of pressure
    • H01L2224/78301Capillary
    • H01L2224/78308Removable capillary
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/0001Technical content checked by a classifier
    • H01L2924/00014Technical content checked by a classifier the subject-matter covered by the group, the symbol of which is combined with the symbol of this group, being disclosed without further technical details

Definitions

  • the present invention relates to an automatic capillary replacement system capable of automatically replacing the capillary.
  • the wire bond process is one of the processes to manufacture the semiconductor package.
  • the wire bond process connects the semiconductor chip and the substrate with a gold wire to allow electrical signals to flow. It is the process of making a semiconductor have electrical characteristics.
  • Capillary used in the wire bond process is a tool used to directly bond the gold wire and create a wire loop.
  • the sewing machine used to make clothes is a capillary that acts like a needle, and a gold wire corresponds to a thread.
  • the capillary is a consumable item, which has a limit on the amount of use and needs to be replaced according to the limit of the amount of use.
  • the wire bond equipment After entering the limit value of the capillary usage in the wire bond equipment, the wire bond equipment generates an alarm to call the worker when the limit value of the usage is reached. The operator then resets the capillary usage in the warned wire bond equipment, removes the captive screw that secures the capillary and installs the new capillary, ie replacing the conventional capillary is the manual This process was included a considerable part.
  • the present invention has been made in view of the above, and an object thereof is to provide an improved capillary automatic replacement system for automating the installation and release of capillary through an automatic process.
  • the clamping loader is installed on the base, having a loader clamping portion for clamping the capillary at the tip;
  • a capillary supply and recovery unit for supplying or recovering a capillary to the clamping loader side, the capillary supplying and recovering unit having a grip for selectively gripping the capillary;
  • An x-axis transfer unit for transferring the capillary supply and recovery unit in the x-axis direction;
  • a y-axis transfer unit for transferring the capillary supply and recovery unit in the y-axis direction;
  • a z-axis transfer unit for transferring the capillary supply and recovery unit in a z-axis direction;
  • a capillary stopper unit which prevents the capillary from rising to an upper end of the clamping portion when a new capillary is supplied to the clamping portion by the capillary supply and recovery unit;
  • a clamping release unit for selectively locking or releasing the clamping portion to allow the capillary to be mounted
  • control unit by driving the x-axis, y-axis and z-axis transfer unit to move the capillary supply and recovery unit below the loader clamping portion of the clamping loader while rotating the clamping release unit to clamp the loader
  • the z-axis feed unit is driven to insert the capillary into the loader clamping portion, and then the clamping release unit is rotated in the opposite direction to control the loader clamping portion to be reduced so that the capillary is supported.
  • the grip unit is extended and controlled, and then the z-axis transfer unit is controlled to move the grip portion downward, and then the gripper is controlled to be gripped again, and then the x-axis transfer unit is controlled to move the capillary upward. It is preferable to pressurize.
  • the control unit may control the capillary to limit upward movement of the z-axis transfer unit when the capillary stopper unit is no longer moved upward.
  • the capillary mounting unit Stepping motor; It is preferable that the stepping motor is rotated at a predetermined rotational angle, the mounting rotating plate is formed with a mounting hole in which the capillary is inserted and mounted.
  • the station is provided with the capillary supply and recovery unit, x-axis transfer unit, y-axis transfer unit, z-axis transfer unit, capillary stopping unit, clamping release unit and capillary mounting unit; And an adjusting unit for adjusting the station to be rotated at a rotation angle ⁇ having the x-axis, the y-axis, the z-axis movement, and the y-axis as the rotation axis.
  • the adjustment unit the stationary plate fixed to the station; A ⁇ rotating plate rotatably installed on the fixing plate; A y-axis plate adjustable in the y-axis direction to the ⁇ rotating plate; And an x-axis plate adjustable in the x-axis direction on the y-axis plate.
  • the capillary stopping unit can be controlled to maintain the position of the capillary before or after the replacement, so that the capillary is inserted or less than the clamping portion By inserting, it is possible to solve the problem that the defect rate increases due to the characteristics of the semiconductor to be precisely processed.
  • the position in the clamping portion of the capillary can be maintained more precisely, and thus the semiconductor can be precisely processed.
  • the adjustment unit can be used to finely adjust the station to the x-axis, the y-axis, and the z-axis using the adjustment unit according to the position and state of the clamping loader, which is fixed and impossible to adjust. It is possible to precisely control the filler supply and recovery unit.
  • FIG. 1 is a block diagram showing a capillary automatic replacement system according to an embodiment of the present invention.
  • Figure 2a is a perspective view showing an automatic capillary replacement system according to an embodiment of the present invention.
  • FIG. 2B and 2C are diagrams for explaining the operation of the capillary supply and recovery unit shown in FIG. 2A.
  • FIG. 3 is a view for explaining an operation state by the clamping release unit in the clamping portion of the clamping loader shown in FIG.
  • FIG. 4A is a perspective view showing the main portion of FIG.
  • FIG. 4B is a schematic front view for explaining the clamping release unit shown in FIG. 2A.
  • Figure 5a is a view showing a state in which the capillary supply and recovery unit is moved toward the clamping portion to separate the capillary.
  • 5B and 5C are schematic views for explaining a capillary release operation of the clamping release unit.
  • 6 to 13 are views for explaining the operation of replacing the capillary using the capillary automatic replacement system of the present invention.
  • the capillary automatic replacement system includes a loader clamping part 21 installed on the base 10 and clamping the capillary 11 at its tip.
  • the base 10 is provided with a loader mounting portion 12 in which the clamping loader 20 is detachably supported.
  • the clamping loader 20 is mounted to the loader mounting part 12, and the clamping loader 20 is provided with a clamping part 21 for clamping the outer side of the capillary 11 at its front end.
  • the clamping part 21 is in the form of a tong, and the capillary 11 is compressed while being restored by elastic force after being inserted into the capillary 11, thereby clamping the capillary 11.
  • a release pin coupling portion 21b formed in communication with the remounting portion 21a and the capillary mounting portion 21a and having a predetermined space.
  • the capillary 11 in the clamping state may be released while the remounting unit 21a is forcibly opened. Therefore, the used capillary 11 can be separated from the clamping part 21, and a new capillary can be inserted into the opened capillary mounting part 21a.
  • the capillary supply and recovery unit 110 may grip operations of the grip member 112 and the grip member 112 that are movably installed on the y-axis transfer unit 130.
  • a grip driving unit 114 for controlling.
  • the grip member 112 is provided with a pair, and a grip portion 112a for selectively gripping or releasing the capillary 11 during operation is formed at the lower end thereof.
  • the grip member 112 is controlled by the grip driving unit 114, the grip operation and the release operation.
  • the grip driving unit 114 includes a pair of chuck members 114a connected to the grip member 112 and a driving source 114b for reciprocating driving the chuck members 114a.
  • the grip member 112 is connected to the pair of chuck members 114a and rotates with respect to the pivot center 115 so that the grip operation and the release operation are performed.
  • the driving source 114b may be various examples such as a hydraulic cylinder and a motor including a lead screw, detailed description thereof will be omitted.
  • the present invention is not limited by the configuration of the capillary supply and recovery unit 110 of the above configuration, it should be understood that various embodiments are possible.
  • the y-axis transfer unit 130 is installed on the z-axis transfer unit 140 to reciprocate in the y-axis direction while supporting the capillary supply and recovery unit 110.
  • the y-axis transfer unit 130 includes a y-axis transfer block 131, a y-axis drive unit 133 and a guide unit 135.
  • the y-axis feed block 131 supports the capillary supply and recovery unit 110 and is reciprocally slid in the y-axis direction by the y-axis driver 133.
  • the y-axis drive unit 133 may include a hydraulic cylinder, a linear motor, and the like, and various examples are possible.
  • the guide unit 135 is provided with a pair, and is installed to support the transfer in the y-axis direction of the y-axis transfer block 131 with respect to the z-axis transfer unit 140.
  • the y-axis transfer unit 130 is supported by the z-axis transfer unit 140 is reciprocated in the z-axis direction.
  • the z-axis transfer unit 130 includes a z-axis transfer block 141 and a z-axis drive unit 143.
  • the y-axis transfer unit 130 is supported on the z-axis transfer block 141, and the z-axis transfer block 141 is z-axis direction relative to the x-axis transfer unit 120 by the z-axis drive unit 143. It is installed to reciprocate in the vertical direction.
  • the z-axis driving unit 143 includes a plurality of linear motors, and the z-axis feed block 141 can be moved up and down in the z-axis direction by driving the linear motor.
  • the z-axis driving unit 143 is naturally applicable to a variety of known driving means in addition to the linear motor.
  • the x-axis conveying unit 120 includes an x-axis conveying block 121, an x-axis driving unit 123, and an x-axis guide unit 125.
  • the x-axis transport block 121 is installed to be reciprocated in the x-axis direction in the station 210 to be described later installed in the base 10, the movement in the x-axis direction is guided by the guide portion 125 .
  • the x-axis drive unit 123 includes a drive motor, and the drive gear (not shown) installed on the axis of the drive motor and the x-axis rack gear (not shown) installed in the x-axis direction in the station 210 in the As a result, the x-axis transfer block 121 may be reciprocated to the x-axis when the driving motor is driven. That is, the drive motor of the x-axis drive unit 123 is installed in the x-axis transfer block 121, the x-axis rack gear is installed in the station 210, the x-axis transfer block 121 when driving the drive motor. It can be reciprocated in the x-axis direction.
  • the x-axis driving unit 123 may be various examples including a hydraulic cylinder, a linear motor, and the like.
  • the capillary mounting unit 150 is rotated at a predetermined rotational angle by a mounting drive source 151 fixed to the station 210 and the mounting drive source 151, the capillary 11 is inserted and mounted And a mounting rotating plate 153 in which the mounting holes 153a are formed.
  • the mounting drive source 151 preferably includes a stepping motor capable of precise driving at a predetermined angle.
  • the mounting rotating plate 153 is connected to the mounting drive source 151, that is, the rotating shaft of the stepping motor, and a mounting hole 153a is formed at a predetermined interval in the circumferential direction so that the capillary 11 is inserted and mounted.
  • the clamping release unit 160 separates the capillary 11 from the clamping unit 21 of the clamping loader 20 and clamps the clamping unit 21 so that a new capillary 12 can be mounted. To release it.
  • the clamping release unit 160 includes a release pin 161, a lifting member 162 for supporting the release pin 161, a lifting drive part 163 for lifting the lifting member 162, and the release pin (
  • a horizontal driving unit 165 which is movable in the y-axis direction while supporting the pin driver 164, the pin driver 164, and the lift driver 163 for rotating the 161 is provided.
  • the release pin 161 is formed in a non-circular cross-sectional shape, it is rotatably installed at the end of the elevating member 161.
  • the release pin 161 is fitted into the release pin coupling portion 21a adjacent to the clamping portion 21 of the clamping loader 20.
  • the release pin 161 is rotated about 90 degrees in the fitted state, the non-circular release pin coupling portion 21b ), The clamping unit 21 may be loosened.
  • the lifting member 162 is lifted in the state in which the release pin 161 is moved to the lower portion of the release pin coupling portion 21b of the clamping loader 20 to be fitted to the release pin coupling portion 21a, and to be separated when descending. In order to be able to be installed by the elevating drive unit 163 to move up and down.
  • the elevating driver 163 includes an elevating guider 163a for guiding the elevating movement of the elevating member 162, and an elevating driving source 163c for vertically moving the elevating member 162 along the elevating guider 163a.
  • the lifting drive source 163c includes a linear motor 163b installed in the horizontal drive unit 165. Therefore, the elevating member 162 may be moved up and down by driving the linear motor 163b.
  • the pin driver 164 is rotated on the elevating member 162 so that the drive motor 164a, the drive gear 164b connected to the drive shaft of the pin drive motor 164a, and the gear connected to the drive gear 164b are rotated.
  • a driven gear 164c which is installed as possible, a gear train 164d which is converted into a rotational force and a rotational direction of the drive gear 164b and transmitted to the driven gear 164c, a driven gear 164c and the driven gear 164c.
  • a rotating plate 164e which is rotated coaxially with the rotating plate, and a link member 165f connecting the rotating plate 164e and the release pin 161.
  • the driven gear 164c is rotated by receiving power from the drive gear 164b through the gear train 164d, and the rotating shaft 164g is connected to the rotating plate 164e to rotate integrally, thereby interlocking.
  • One end of the link member 165e is connected to the center of rotation of the release pin 161, and the other end of the link member 165e is connected to an eccentric position away from the center of rotation of the rotating plate 164d which is rotated together with the driven gear 164c.
  • the joint 164h is provided between both ends.
  • the horizontal driver 165c may include a linear motor installed in the station 210 to drive the movable block 165a and the motor support block 165b to reciprocate in the y-axis direction.
  • the horizontal drive unit 165c may be various examples, such as a hydraulic cylinder, a motor driving unit including a lead screw, in addition to the linear motor, and thus, detailed description thereof will be omitted.
  • the capillary stopping unit 170 supports the stopper member 171 and the stopper member 171 positioned above the capillary 11 of the clamping part 21 and supports the capillary mounting unit 150. It is provided with a unit body 173 coupled to. Specifically, the unit body 173 is coupled to the outside (motor housing) of the mounting drive unit 151 of the capillary mounting unit 150 is fixed in position, the stopper member 171 is installed at the lower end. The stopper member 171 is maintained at a predetermined height of the upper portion of the clamping portion 21, and when the new capillary is mounted on the clamping portion 21, the capillary 11 rises upwards. It is to prevent it from becoming.
  • the unit body 173 may be installed to be fixed to other parts than the outside of the mounting drive unit 151.
  • the controller 180 independently of the capillary supply and recovery unit 110, the clamping release unit 160, the x-axis transfer unit 120, the y-axis transfer unit 130, and the z-axis transfer unit 140, respectively Drive control.
  • the controller 180 drives the x-axis, y-axis, and z-axis transfer units 120, 130, 140 to drive the capillary supply and recovery unit 110 to the clamping loader 20.
  • the clamping release unit 160 is rotated while the lower portion of the loader clamping portion 21 is rotated, thereby controlling the clamping portion 21 to be expanded by rotating the release pin 161.
  • the controller 180 drives the z-axis transfer unit 140 to insert the capillary 11 into the loader clamping portion 21 and then rotates the clamping release unit 160 in the opposite direction. After the loader clamping unit 21 is controlled to be reduced so that the capillary 11 is supported (state of FIG.
  • the grip unit 112a is expanded and then controlled to control the z-axis transfer unit 140.
  • the clamping release unit 160 is controlled to grip the capillary 11 again, and then the z-axis feed unit 160 is controlled to control the capillary 11. Pressurized upwards (see FIG. 11C).
  • the controller 180 controls to limit the upward movement of the z-axis transfer unit 160 when the capillary 11 is no longer moved upward by the capillary stopping unit 170. To stop it.
  • the controller 180 controls the capillary release unit 160 again so that the capillary 11 is clamped to the clamping unit 21 as shown in FIG. 11D. Then, the grip part 112a is released and separated from the capillary 11.
  • the capillary automatic replacement system of the present invention referring to Figures 14 to 16, the capillary supply and recovery unit 110, x-axis transfer unit 120, y-axis transfer unit 130, It further comprises a station 210, the adjustment unit 220, the z-axis transfer unit 140, the capillary stopping unit 170, the clamping release unit 160 and the capillary mounting unit 150 is installed can do.
  • the station 210 is installed and supported by a plurality of devices, the precise posture and position of the station 210 can be precisely controlled by the adjustment unit 220.
  • the adjusting unit 220 adjusts the station to be rotated at a rotation angle ⁇ having the x-axis, the y-axis, the z-axis movement, and the y-axis as the rotation axis.
  • the adjustment unit 220 is a fixed plate 221 fixed to the station 210, ⁇ rotating plate 223 is rotatably installed on the fixing plate 221, y axis direction to the ⁇ rotating plate 223 And a y-axis plate 225 that can be adjusted, and an x-axis plate 227 that can be adjusted in the x-axis direction.
  • the adjustment of each of the plates 221, 223, 225, 227 can be adjusted by adjusting a plurality of adjustment screws, etc. installed between the plates, in addition to the various means of adjustment is possible, the adjustment method can be easily understood from known techniques Can be.
  • the station 2210 can be finely adjusted to the x-axis, the y-axis, and the z-axis according to the position and the state of the clamping loader 10 that is conventionally used or not adjustable.
  • the capillary supply and recovery unit 110 can supply or recover the capillary 11 to the correct position.
  • the controller 180 drives the y-axis and z-axis transfer units 130 and 140 to move the grip portion 112a toward the clamping portion 21, and then again as shown in FIG. 5A. Likewise, the grip unit 112a is moved on the x-axis to control the clamping of the capillary 11.
  • the controller 180 controls the driving of the clamping release unit 160, as shown in Figure 6, coupled to the release pin 161 to the loader clamping unit 21, as described above with reference to Figure 5b,
  • the cranking part 21 is expanded by rotating the release pin 161 at an angle of 90 degrees.
  • the grip portion 112a is moved in the z-axis direction and the x-axis direction, respectively, as shown in FIG. 7 while the grip portion 112a is gripped, and then moved in the y-axis direction, as shown in FIG. 8.
  • (11) is mounted on the rotating plate 153 of the capillary mounting unit 150.
  • the grip portion 112a is operated to operate the new capillary 11 as shown in FIG. Is separated from the rotating plate (153).
  • the grip portion 112a is moved again as shown in FIG. 10, and then the grip portion 112a is first moved upward in the z-axis direction as shown in FIG. 11A to attach the capillary 11 to the clamping portion 21. .
  • the controller 180 drives the clamping release unit 160 to rotate the release pin 161 as shown in FIG. 11B so that the capillary 11 is constrained to the clamping portion 21.
  • the controller 180 releases the grip portion 112a which has gripped the capillary 11 and lowers the capillary 11 in the z-axis direction as shown by the virtual line of FIG. 11C. Control to grip Then, while the capillary 11 is released from the clamping portion 21 by rotating the release pin 161 again to the release position, the grip portion 112a is raised in the z-axis direction as shown by the solid line.
  • the capillary 11 is mounted to the clamping portion 21 by a desired height.
  • the capillary stopping unit 170 since the mounting height of the upper end of the capillary 11 is limited by the capillary stopping unit 170, the capillary 11 can be prevented from being mounted in an excessively raised state. That is, by operating the grip portion 112a in two steps as described above, the capillary 11 is mounted on the clamping portion 21, so that the capillary 11 is too low to the clamping portion 21.
  • the capillary 11 is rotated by an angle of 90 degrees to the clamping unit 21.
  • the li 11 is constrained and the grip portion 112a is lowered to release the grip and detach from the capillary 11.
  • the controller 180 drives the clamping release unit 160 to lower the z-axis so that the release pin 161 is separated from the clamping portion 21, and then y Restore the initial position by moving in the axial direction.
  • the controller 180 controls the x-axis transfer unit 120 and the y-axis transfer unit 130 to return to the initial position, thereby automatically replacing the capillary 11.
  • the capillary can be unstablely fixed to the clamping part by attaching the capillary sequentially to the clamping part in two steps.
  • the capillary 11 is excessively raised by having a configuration in which the capillary stopping unit 170 is installed on the upper portion of the clamping unit 21. Can be prevented.

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  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Wire Bonding (AREA)

Abstract

Disclosed is an automatic capillary exchange system, comprising: a clamping loader which is provided on a base and has a loader clamping portion for clamping a capillary at a front end thereof; a capillary supply and collection unit which supplies or collects the capillary to or from a clamping loader side and has a grip portion for selectively gripping the capillary; an x-axis transfer unit for transferring the capillary supply and collection unit in the direction of the x-axis; a y-axis transfer unit for transferring the capillary supply and collection unit in the direction of the y-axis; a z-axis transfer unit for transferring the capillary supply and collection unit in the direction of the z-axis; a capillary stopping unit which prevents the capillary from being excessively raised towards an upper end of the clamping portion when a new capillary is supplied to the clamping portion by the capillary supply and collection unit; an unclamping unit which can load or unload the capillary by selectively locking or unlocking the clamping portion; a capillary holding unit for holding the capillary to be supplied to or collected from the clamping loader; and a control unit for controlling the capillary supply and collection unit and the unclamping unit.

Description

캐필러리 자동 교체시스템Capillary Auto Replacement System
본 발명은 캐필러리를 자동으로 교체할 수 있는 캐필러리 자동 교체시스템에 관한 것이다.The present invention relates to an automatic capillary replacement system capable of automatically replacing the capillary.
와이어 본드(wire bond) 공정이란 반도체 패키지(semiconductor package) 제작을 위해 거치는 공정 중의 하나이며, 반도체 칩(chip)과 기판(substrate)을 골드 와이어(gold wire)로 연결시킴으로써 전기적 신호가 흐를 수 있도록 하여 반도체가 전기적 특성을 갖도록 하는 공정을 말한다.The wire bond process is one of the processes to manufacture the semiconductor package. The wire bond process connects the semiconductor chip and the substrate with a gold wire to allow electrical signals to flow. It is the process of making a semiconductor have electrical characteristics.
상기 와이어 본드 공정에 사용되는 캐필러리(Capillary)는, 상기 골드 와이어를 직접 접합하고 와이어 궤적(wire loop)을 만드는데 사용되는 도구이다. 옷을 만드는데 사용되는 미싱을 예로 들면, 바늘과 같은 역할을 하는 것을 캐필러리이고, 실에 해당하는 것이 골드 와이어가 된다.Capillary used in the wire bond process is a tool used to directly bond the gold wire and create a wire loop. For example, the sewing machine used to make clothes is a capillary that acts like a needle, and a gold wire corresponds to a thread.
상기 캐필러리는 소모품으로서 사용량에는 한도가 있고, 사용량의 한도에 따라 교체될 필요가 있는 부품이다. 종래의 캐필러리 교체 과정을 살펴보면, 와이어 본드 장비에 캐필러리 사용량의 한도 값을 입력한 후 그 사용량의 한도 값에 도달하면 와이어 본드 장비가 경고(alarm)를 발생시켜 작업자를 호출한다. 이후 작업자는 경고가 발생한 와이어 본드 장비에서 캐필러리의 사용량을 초기화시키고, 캐필러리를 고정하고 있는 고정 나사를 제거한 뒤 새로운 캐필러리를 장착한다, 즉, 종래의 캐필러리 교체는 작업자의 수작업이 상당 부분 포함되어 있는 공정이었다.The capillary is a consumable item, which has a limit on the amount of use and needs to be replaced according to the limit of the amount of use. Looking at the conventional capillary replacement process, after entering the limit value of the capillary usage in the wire bond equipment, the wire bond equipment generates an alarm to call the worker when the limit value of the usage is reached. The operator then resets the capillary usage in the warned wire bond equipment, removes the captive screw that secures the capillary and installs the new capillary, ie replacing the conventional capillary is the manual This process was included a considerable part.
실제 반도체 패키징 공정 현장에서는 와이어 본드 공정의 특성상 와이어 본드 장비가 수백 대에 이르는 경우가 많기 때문에, 와이어 본드 과정에서 여러 장비의 캐필러리를 교체하여야 하므로 많은 작업자의 노력이 소요된다는 문제점이 있었다. 또한, 캐필러리의 고정용 고정 나사를 제거하고 재설치하는 과정에서도 많은 시간이 소요되기 때문에, 캐필러리 교체 공정에서 많은 시간과 비용의 손실이 있었다.In actual semiconductor packaging process, because of the nature of the wire bond process, the wire bond equipment is often hundreds of units, there is a problem that a lot of effort is required because the capillaries of the various equipment must be replaced during the wire bonding process. In addition, since the process of removing and reinstalling the captive fixing screws for fixing the capillary takes a lot of time, there was a loss of time and money in the capillary replacement process.
본 발명은 상기와 같은 점을 감안하여 창안된 것으로서, 캐필러리의 장착 및 해제를 자동공정을 통해 자동화할 수 있도록 개선된 캐필러리 자동 교체시스템을 제공하는데 그 목적이 있다.The present invention has been made in view of the above, and an object thereof is to provide an improved capillary automatic replacement system for automating the installation and release of capillary through an automatic process.
상기 목적을 달성하기 위한 본 발명의 캐필러리 자동 교체시스템은, 베이스 상에 설치되며, 캐필러리를 선단에서 클램핑하는 로더 클램핑부를 가지는 클램핑로더; 상기 클램핑로더 측으로 캐필러리를 공급하거나 회수하며, 상기 캐필러리를 선택적으로 그립핑하는 그립부를 가지는 캐필러리 공급 및 회수유닛; 상기 캐필러리 공급 및 회수유닛을 x축 방향으로 이송하는 x축 이송유닛; 상기 캐필러리 공급 및 회수유닛을 y축 방향으로 이송하는 y축 이송유닛; 상기 캐필러리 공급 및 회수유닛을 z축 방향으로 이송하는 z축 이송유닛; 상기 캐필러리 공급 및 회수유닛에 의하여 새로운 캐필러리가 상기 클램핑부로 공급될 때 클램핑부의 상단으로 상기 캐필러리가 과상승되는 것을 방지하도록 하는 캐필러리 스토핑유닛; 상기 클램핑부를 선택적으로 잠금 또는 해제시켜서 캐필러리가 장착 또는 이탈가능하도록 하는 클램핑 해제유닛; 상기 클램핑 로더로 공급되거나 회수되는 캐필러리가 거치되는 캐필러리 거치유닛; 및 상기 캐필러리 공급 및 회수유닛 및 클램핑 해제유닛을 제어하는 제어부;를 포함하는 것을 특징으로 한다.Capillary automatic replacement system of the present invention for achieving the above object, the clamping loader is installed on the base, having a loader clamping portion for clamping the capillary at the tip; A capillary supply and recovery unit for supplying or recovering a capillary to the clamping loader side, the capillary supplying and recovering unit having a grip for selectively gripping the capillary; An x-axis transfer unit for transferring the capillary supply and recovery unit in the x-axis direction; A y-axis transfer unit for transferring the capillary supply and recovery unit in the y-axis direction; A z-axis transfer unit for transferring the capillary supply and recovery unit in a z-axis direction; A capillary stopper unit which prevents the capillary from rising to an upper end of the clamping portion when a new capillary is supplied to the clamping portion by the capillary supply and recovery unit; A clamping release unit for selectively locking or releasing the clamping portion to allow the capillary to be mounted or detached; A capillary mounting unit on which the capillary supplied or recovered to the clamping loader is mounted; And a control unit controlling the capillary supply and recovery unit and the clamping release unit.
여기서, 상기 제어부는, 상기 x축, y축 및 z축 이송유닛을 구동시켜 상기 캐필러리 공급 및 회수유닛을 상기 클램핑 로더의 로더 클램핑부의 하부로 이동시키면서 상기 클램핑 해제유닛을 회전구동시켜 로더 클램핑부가 확장되게 제어한 후, 상기 z축 이송유닛을 구동시켜 캐필러리가 로더 클램핑부로 삽입 공급된 후, 상기 클램핑 해제유닛을 반대방향으로 회전구동시켜 로더 클램핑부가 축소되게 제어하여 캐필러리가 지지되도록 한 후, 상기 그립부를 확장제어되게 한 후 z축 이송유닛을 제어하여 상기 그립부를 하방으로 이동시킨 후 다시 캐필러리를 그립하도록 제어한 후, x축 이송유닛을 제어하여 상기 캐필러리를 상방으로 가압하는 것이 바람직하다.Here, the control unit, by driving the x-axis, y-axis and z-axis transfer unit to move the capillary supply and recovery unit below the loader clamping portion of the clamping loader while rotating the clamping release unit to clamp the loader After controlling the expansion, the z-axis feed unit is driven to insert the capillary into the loader clamping portion, and then the clamping release unit is rotated in the opposite direction to control the loader clamping portion to be reduced so that the capillary is supported. Thereafter, the grip unit is extended and controlled, and then the z-axis transfer unit is controlled to move the grip portion downward, and then the gripper is controlled to be gripped again, and then the x-axis transfer unit is controlled to move the capillary upward. It is preferable to pressurize.
또한, 상기 제어부는, 상기 캐필러리가 상기 캐필러리 스토핑 유닛에 의하여 더 이상 상방으로 이동되지 않는 경우, 상기 z축 이송유닛의 상방 이동을 제한하도록 제어하는 것이 좋다.The control unit may control the capillary to limit upward movement of the z-axis transfer unit when the capillary stopper unit is no longer moved upward.
또한, 상기 캐필러리 거치유닛은, 스테핑모터와; 상기 스테핑모터에 의하여 일정한 회전각으로 회전되며, 캐필러리가 삽입되어 거치되는 거치홀이 형성되는 거치 회전판;을 포함하는 것이 좋다.In addition, the capillary mounting unit, Stepping motor; It is preferable that the stepping motor is rotated at a predetermined rotational angle, the mounting rotating plate is formed with a mounting hole in which the capillary is inserted and mounted.
또한, 상기 캐필러리 공급 및 회수 유닛, x축 이송유닛, y축 이송유닛, z축 이송유닛, 캐필러리 스토핑 유닛, 클램핑 해제유닛 및 캐필러리 거치유닛이 설치되는 스테이션; 및 상기 스테이션을 x축, y축, z축 이동 및 y축을 회전축으로 하는 회전각 θ로 회전되게 조정하는 조정유닛;을 더 포함하는 것이 좋다.In addition, the station is provided with the capillary supply and recovery unit, x-axis transfer unit, y-axis transfer unit, z-axis transfer unit, capillary stopping unit, clamping release unit and capillary mounting unit; And an adjusting unit for adjusting the station to be rotated at a rotation angle θ having the x-axis, the y-axis, the z-axis movement, and the y-axis as the rotation axis.
또한, 상기 조정유닛은, 상기 스테이션에 고정되는 고정 플레이트; 상기 고정 플레이트에 회동 가능하게 설치되는 θ회전 플레이트; 상기 θ회전 플레이트에 y축 방향으로 조정가능한 y축 플레이트; 및 상기 y축 플레이트에 x축 방향으로 조정 가능한 x축 플레이트;를 포함하는 것이 좋다.In addition, the adjustment unit, the stationary plate fixed to the station; A θ rotating plate rotatably installed on the fixing plate; A y-axis plate adjustable in the y-axis direction to the θ rotating plate; And an x-axis plate adjustable in the x-axis direction on the y-axis plate.
본 발명의 캐필러리 자동 교체시스템에 따르면, 캐필러리 스토핑유닛에 의해 교체 전이나 교체 후의 캐필러리의 위치가 일정하게 유지되도록 제어할 수 있게 되어, 캐필러리가 클램핑부를 초과해서 삽입되거나 덜 삽입됨으로써 정밀하게 가공되어야 하는 반도체의 특성상 불량률이 많아졌던 문제를 해결할 수 있게 된다.According to the automatic capillary replacement system of the present invention, the capillary stopping unit can be controlled to maintain the position of the capillary before or after the replacement, so that the capillary is inserted or less than the clamping portion By inserting, it is possible to solve the problem that the defect rate increases due to the characteristics of the semiconductor to be precisely processed.
또한, 보다 정밀하게 캐필러리의 클램핑부에서의 위치를 일정하게 유지시킬 수 있어 반도체를 정밀하게 가공할 수 있게 된다.In addition, the position in the clamping portion of the capillary can be maintained more precisely, and thus the semiconductor can be precisely processed.
또한, 고정되어 조정이 불가능한 클램핑 로더의 위치 및 상태에 맞게 조정유닛을 이용하여 스테이션을 x축, y축, z축으로 미세하게 조정할 수 있을 뿐만 아니라, y축을 회전축으로 하여 회동시킬 수 있게 됨으로써 캐필러리 공급 및 회수유닛을 정밀하게 제어할 수 있게 된다.In addition, the adjustment unit can be used to finely adjust the station to the x-axis, the y-axis, and the z-axis using the adjustment unit according to the position and state of the clamping loader, which is fixed and impossible to adjust. It is possible to precisely control the filler supply and recovery unit.
도 1은 본 발명의 실시예에 따른 캐필러리 자동 교체시스템을 나타내 보인 블록 구성도이다.1 is a block diagram showing a capillary automatic replacement system according to an embodiment of the present invention.
도 2a는 본 발명의 실시예에 따른 캐필러리 자동 교체시스템을 나타내 보인 사시도이다.Figure 2a is a perspective view showing an automatic capillary replacement system according to an embodiment of the present invention.
도 2b 및 도 2c 각각은 도 2a에 도시된 캐필러리 공급 및 회수유닛을 동작을 설명하기 위한 도면이다.2B and 2C are diagrams for explaining the operation of the capillary supply and recovery unit shown in FIG. 2A.
도 3은 도 2a에 도시된 클램핑 로더의 클램핑부에서 클램핑 해제유닛에 의한 동작상태를 설명하기 위한 도면이다.3 is a view for explaining an operation state by the clamping release unit in the clamping portion of the clamping loader shown in FIG.
도 4a는 도 2a의 요부를 발췌하여 나타내 보인 사시도이다.4A is a perspective view showing the main portion of FIG.
도 4b는 도 2a에 도시된 클램핑 해제유닛을 설명하기 위한 개략적인 정면도이다.4B is a schematic front view for explaining the clamping release unit shown in FIG. 2A.
도 5a는 캐필러리를 분리하기 위해 캐필러리 공급 및 회수유닛이 클램핑부 쪽으로 이동되는 상태를 나타내 보인 도면이다.Figure 5a is a view showing a state in which the capillary supply and recovery unit is moved toward the clamping portion to separate the capillary.
도 5b 및 도 5c는 클램핑 해제유닛의 캐필러리 해제동작을 설명하기 위한 개략적인 도면이다.5B and 5C are schematic views for explaining a capillary release operation of the clamping release unit.
도 6 내지 도 13 각각은 본 발명의 캐필러리 자동 교체시스템을 이용하여 캐필러리를 교체하는 동작을 설명하기 위한 도면이다.6 to 13 are views for explaining the operation of replacing the capillary using the capillary automatic replacement system of the present invention.
이하 첨부된 도면을 참조하여 본 발명의 실시예에 따른 캐필러리 자동 교체시스템에 대해 자세히 설명하기로 한다.Hereinafter, an automatic capillary replacement system according to an embodiment of the present invention will be described in detail with reference to the accompanying drawings.
도 1 내지 도 13을 참조하면, 본 발명의 실시예에 따른 캐필러리 자동 교체시스템은, 베이스(10) 상에 설치되며 캐필러리(11)를 선단에서 클램핑하는 로더 클램핑부(21)를 가지는 클램핑로더(20), 캐필러리 공급 및 회수유닛(110), x축 이송유닛(120), y축 이송유닛(130), z축 이송유닛(140), 캐필러리 거치유닛(150), 클램핑 해제유닛(160), 캐필러리 스토핑 유닛(170) 및 제어부(180)를 구비한다.1 to 13, the capillary automatic replacement system according to an embodiment of the present invention includes a loader clamping part 21 installed on the base 10 and clamping the capillary 11 at its tip. Clamping loader 20, capillary supply and recovery unit 110, x-axis transfer unit 120, y-axis transfer unit 130, z-axis transfer unit 140, capillary mounting unit 150 And a clamping release unit 160, a capillary stopping unit 170, and a controller 180.
상기 베이스(10)에는 상기 클램핑로더(20)가 착탈 가능하게 지지되는 로더 장착부(12)가 설치된다. 상기 로더 장착부(12)에 클램핑로더(20)가 장착되며, 클램핑로더(20)는 그 선단에 캐필러리(11)의 외측을 감싸서 클램핑하기 위한 클램핑부(21)가 구비된다. 상기 클램핑부(21)는 도 3에 도시된 바와 같이, 집게 형태로서, 서로 벌려진 상태에서 캐필러리(11)가 끼워진 후 탄성력에 의해 복원되면서 압착되어 캐필러리(11)를 클램핑하는 캐필러리 장착부(21a)와, 캐필러리 장착부(21a)에 연통되게 형성되어 일정 공간을 가지는 해제핀 결합부(21b)를 가진다. 상기 해제핀 결합부(21b)로 클램핑 해제유닛(160)의 비원형의 단면구조를 가지는 해제핀(161)이 삽입된 뒤, 90도 각도 정도 회전되면, 상기 해제핀(161)에 의해 캐필러리 장착부(21a)가 강제로 벌어지면서 클램핑 상태로 있던 캐필러리(11)가 해제될 수 있다. 따라서 사용된 캐필러리(11)를 클램핑부(21)에서 분리할 수 있고, 새로운 캐필러리를 벌려진 캐필러리 장착부(21a)에 끼워 넣을 수 있게 된다.The base 10 is provided with a loader mounting portion 12 in which the clamping loader 20 is detachably supported. The clamping loader 20 is mounted to the loader mounting part 12, and the clamping loader 20 is provided with a clamping part 21 for clamping the outer side of the capillary 11 at its front end. As shown in FIG. 3, the clamping part 21 is in the form of a tong, and the capillary 11 is compressed while being restored by elastic force after being inserted into the capillary 11, thereby clamping the capillary 11. And a release pin coupling portion 21b formed in communication with the remounting portion 21a and the capillary mounting portion 21a and having a predetermined space. After the release pin 161 having the non-circular cross-sectional structure of the clamping release unit 160 is inserted into the release pin coupling portion 21b and rotates about 90 degrees, the capillary is released by the release pin 161. The capillary 11 in the clamping state may be released while the remounting unit 21a is forcibly opened. Therefore, the used capillary 11 can be separated from the clamping part 21, and a new capillary can be inserted into the opened capillary mounting part 21a.
도 2a 내지 도 2c를 참조하면, 상기 캐필러리 공급 및 회수유닛(110)은 상기 y축 이송유닛(130)에 움직임 가능하게 설치되는 그립부재(112) 및 그립부재(112)의 그립동작을 제어하는 그립구동부(114)를 구비한다. 그립부재(112)는 한 쌍이 구비되며, 작동시 캐필러리(11)를 선택적으로 그립하거나 해제하는 그립부(112a)가 하단부에 형성된다. 이러한 그립부재(112)는 상기 그립구동부(114)에 의해 그립동작 및 해제동작이 제어된다. 그립구동부(114)는 그립부재(112)에 연결되는 한 쌍의 척부재(114a) 및 척부재(114a)를 왕복 구동시키는 구동원(114b)을 구비하다. 한 쌍의 척부재(114a)에 그립부재(112)가 연결되어 회동중심부(115)를 기준으로 회동되면서 그립동작 및 해제동작이 이루어지게 된다. 구동원(114b)은 유압실린더, 리드스크류를 포함하는 모터 등 다양한 예가 가능하므로, 자세한 설명은 생략한다. 또한, 상기 구성의 캐필러리 공급 및 회수유닛(110)의 구성에 의해 본 발명이 한정되지 않으며, 다양한 실시예가 가능한 것으로 이해되어야 한다.2A to 2C, the capillary supply and recovery unit 110 may grip operations of the grip member 112 and the grip member 112 that are movably installed on the y-axis transfer unit 130. And a grip driving unit 114 for controlling. The grip member 112 is provided with a pair, and a grip portion 112a for selectively gripping or releasing the capillary 11 during operation is formed at the lower end thereof. The grip member 112 is controlled by the grip driving unit 114, the grip operation and the release operation. The grip driving unit 114 includes a pair of chuck members 114a connected to the grip member 112 and a driving source 114b for reciprocating driving the chuck members 114a. The grip member 112 is connected to the pair of chuck members 114a and rotates with respect to the pivot center 115 so that the grip operation and the release operation are performed. Since the driving source 114b may be various examples such as a hydraulic cylinder and a motor including a lead screw, detailed description thereof will be omitted. In addition, the present invention is not limited by the configuration of the capillary supply and recovery unit 110 of the above configuration, it should be understood that various embodiments are possible.
상기 y축 이송유닛(130)은 캐필러리 공급 및 회수유닛(110)을 지지한 채 상기 z축 이송유닛(140)에 y축 방향으로 왕복 이동 가능하게 설치된다. 구체적으로는 y축 이송유닛(130)은 y축 이송블록(131)과, y축 구동부(133) 및 가이드부(135)를 구비한다. y축 이송블록(131)은 캐필러리 공급 및 회수유닛(110)을 지지하고, y축 구동부(133)에 의해 y축 방향으로 왕복 슬라이딩 구동된다. y축 구동부(133)는 유압실린더, 리니어모터 등을 포함할 수 있으며, 다양한 예가 가능하다. 상기 가이드부(135)는 한 쌍이 구비되며, z축 이송유닛(140)에 대해 y축 이송블록(131)의 y축 방향으로의 이송을 가지드 하도록 설치된다.The y-axis transfer unit 130 is installed on the z-axis transfer unit 140 to reciprocate in the y-axis direction while supporting the capillary supply and recovery unit 110. Specifically, the y-axis transfer unit 130 includes a y-axis transfer block 131, a y-axis drive unit 133 and a guide unit 135. The y-axis feed block 131 supports the capillary supply and recovery unit 110 and is reciprocally slid in the y-axis direction by the y-axis driver 133. The y-axis drive unit 133 may include a hydraulic cylinder, a linear motor, and the like, and various examples are possible. The guide unit 135 is provided with a pair, and is installed to support the transfer in the y-axis direction of the y-axis transfer block 131 with respect to the z-axis transfer unit 140.
상기 y축 이송유닛(130)은 z축 이송유닛(140)에 지지되어 z축 방향으로 왕복 이동된다. z축 이송유닛(130)은 z축 이송블록(141)과, z축 구동부(143)를 구비한다. z축 이송블록(141)에는 상기 y축 이송유닛(130)이 지지되며, z축 이송블록(141)은 z축 구동부(143)에 의해 x축 이송유닛(120)에 대해 z축 방향 즉, 상하 방향으로 왕복이동되도록 설치된다. 상기 z축 구동부(143)는 복수의 리니어모터를 구비하며, 이 리니어모터의 구동에 의해 z축 이송블록(141)을 z축 방향으로 승강 이동시킬 수 있게 된다. 여기서도 상기 z축 구동부(143)는 리니어모터 이외에도 다양한 공지의 구동수단이 적용될 수 있는 것은 당연하다.The y-axis transfer unit 130 is supported by the z-axis transfer unit 140 is reciprocated in the z-axis direction. The z-axis transfer unit 130 includes a z-axis transfer block 141 and a z-axis drive unit 143. The y-axis transfer unit 130 is supported on the z-axis transfer block 141, and the z-axis transfer block 141 is z-axis direction relative to the x-axis transfer unit 120 by the z-axis drive unit 143. It is installed to reciprocate in the vertical direction. The z-axis driving unit 143 includes a plurality of linear motors, and the z-axis feed block 141 can be moved up and down in the z-axis direction by driving the linear motor. Here, the z-axis driving unit 143 is naturally applicable to a variety of known driving means in addition to the linear motor.
상기 x축 이송유닛(120)은 x축 이송블록(121)과, x축 구동부(123) 및 x축 가이드부(125)를 구비한다. x축 이송블록(121)은 상기 베이스(10)에 설치되는 후술할 스테이션(210)에서 x축 방향으로 왕복 이동 가능하게 설치되며, x축 방향으로의 이동은 가이드부(125)에 의해 가이드 된다. x축 구동부(123)는 구동모터를 포함하며, 구동모터의 축에 설치된 구동기어(미도시)와, 스테이션(210)에 x축 방향으로 설치되는 x축 랙기어(미도시)의 연동 동작에 의해 구동모터의 구동시 x축 이송블록(121)을 x축으로 왕복 이동시킬 수 있다. 즉, x축 구동부(123)의 구동모터는 x축 이송블록(121)에 설치되고, 상기 x축 랙기어는 스테이션(210)에 설치됨으로써, 구동모터의 구동시 상기 x축 이송블록(121)이 x축 방향으로 왕복 이동될 수 있다. 여기서 상기 x축 구동부(123)도 유압실린더, 리니어모터 등을 포함하여 다양한 예가 가능한 것으로 이해되어야 한다.The x-axis conveying unit 120 includes an x-axis conveying block 121, an x-axis driving unit 123, and an x-axis guide unit 125. The x-axis transport block 121 is installed to be reciprocated in the x-axis direction in the station 210 to be described later installed in the base 10, the movement in the x-axis direction is guided by the guide portion 125 . The x-axis drive unit 123 includes a drive motor, and the drive gear (not shown) installed on the axis of the drive motor and the x-axis rack gear (not shown) installed in the x-axis direction in the station 210 in the As a result, the x-axis transfer block 121 may be reciprocated to the x-axis when the driving motor is driven. That is, the drive motor of the x-axis drive unit 123 is installed in the x-axis transfer block 121, the x-axis rack gear is installed in the station 210, the x-axis transfer block 121 when driving the drive motor. It can be reciprocated in the x-axis direction. Here, it should be understood that the x-axis driving unit 123 may be various examples including a hydraulic cylinder, a linear motor, and the like.
상기 캐필러리 거치유닛(150)은 상기 스테이션(210)에 고정 설치되는 거치 구동원(151)과, 거치 구동원(151)에 의해 일정한 회전각으로 회전되며, 캐필러리(11)가 삽입되어 거치되는 거치홀(153a)이 형성되는 거치 회전판(153)을 구비한다. 거치 구동원(151)으로는 일정 각도로 정밀한 구동이 가능한 스테핑모터를 포함하는 것이 바람직하다. 거치 회전판(153)은 거치 구동원(151) 즉, 스테핑모터의 회전축에 연결되며, 원주 방향으로 일정 간격으로 거치홀(153a)이 형성되어 캐필러리(11)가 끼워져 거치된다.The capillary mounting unit 150 is rotated at a predetermined rotational angle by a mounting drive source 151 fixed to the station 210 and the mounting drive source 151, the capillary 11 is inserted and mounted And a mounting rotating plate 153 in which the mounting holes 153a are formed. The mounting drive source 151 preferably includes a stepping motor capable of precise driving at a predetermined angle. The mounting rotating plate 153 is connected to the mounting drive source 151, that is, the rotating shaft of the stepping motor, and a mounting hole 153a is formed at a predetermined interval in the circumferential direction so that the capillary 11 is inserted and mounted.
상기 클램핑 해제유닛(160)은, 클램핑로더(20)의 클램핑부(21)에서 캐필러리(11)를 분리하고, 새로운 캐필러리(12)를 장착할 수 있도록 클램핑부(21)를 클램핑 해제시키기 위한 것이다. 이러한 클램핑 해제유닛(160)은 해제핀(161)과, 해제핀(161)을 지지하는 승강부재(162)와, 승강부재(162)를 승강시키기 위한 승강구동부(163)와, 상기 해제핀(161)을 회전시키기 위한 핀 구동부(164), 핀구동부(164) 및 승강구동부(163)를 지지한 채 y축 방향으로 이동 가능한 수평 구동유닛(165)을 구비한다.The clamping release unit 160 separates the capillary 11 from the clamping unit 21 of the clamping loader 20 and clamps the clamping unit 21 so that a new capillary 12 can be mounted. To release it. The clamping release unit 160 includes a release pin 161, a lifting member 162 for supporting the release pin 161, a lifting drive part 163 for lifting the lifting member 162, and the release pin ( A horizontal driving unit 165 which is movable in the y-axis direction while supporting the pin driver 164, the pin driver 164, and the lift driver 163 for rotating the 161 is provided.
도 3을 참조하면, 해제핀(161)은 그 단면형상이 비원형으로 형성되며, 승강부재(161)의 단부에 회전 가능하게 설치된다. 이 해제핀(161)은 클램핑로더(20)의 클램핑부(21)에 인접한 해제핀 결합부(21a)로 끼워지며, 끼워진 상태에서 대략 90도 각도 회전되면, 비원형의 해제핀 결합부(21b)를 벌려서 클램핑부(21)가 헐거워질 수 있도록 할 수 있다.Referring to Figure 3, the release pin 161 is formed in a non-circular cross-sectional shape, it is rotatably installed at the end of the elevating member 161. The release pin 161 is fitted into the release pin coupling portion 21a adjacent to the clamping portion 21 of the clamping loader 20. When the release pin 161 is rotated about 90 degrees in the fitted state, the non-circular release pin coupling portion 21b ), The clamping unit 21 may be loosened.
상기 승강부재(162)는 해제핀(161)이 클램핑로더(20)의 해제핀 결합부(21b)의 하부로 이동된 상태에서 상승하여 해제핀 결합부(21a)에 끼워지고, 하강시 분리될 수 있도록 하기 위해 상기 승강구동부(163)에 의해 승강 이동 가능하게 설치된다.The lifting member 162 is lifted in the state in which the release pin 161 is moved to the lower portion of the release pin coupling portion 21b of the clamping loader 20 to be fitted to the release pin coupling portion 21a, and to be separated when descending. In order to be able to be installed by the elevating drive unit 163 to move up and down.
승강구동부(163)는 승강부재(162)의 승강 이동을 가이드 하는 승강 가이더(163a)와, 승강가이더(163a)를 따라 승강부재(162)를 상하 이동시키는 승강 구동원(163c)을 구비한다. 승강구동원(163c)은 수평 구동유닛(165)에 설치되는 리니어모터(163b)를 구비한다. 따라서 리니어모터(163b)의 구동에 의해 승강부재(162)가 승강 이동될 수 있다.The elevating driver 163 includes an elevating guider 163a for guiding the elevating movement of the elevating member 162, and an elevating driving source 163c for vertically moving the elevating member 162 along the elevating guider 163a. The lifting drive source 163c includes a linear motor 163b installed in the horizontal drive unit 165. Therefore, the elevating member 162 may be moved up and down by driving the linear motor 163b.
상기 핀 구동부(164)는 구동모터(164a)와, 핀 구동모터(164a)의 구동축에 연결되는 구동기어(164b)와, 구동기어(164b)에 기어 연결되어 회전되도록 승강부재(162)에 회전 가능하게 설치되는 종동기어(164c)와, 구동기어(164b)의 회전력 및 회전방향으로 변환하여 종동기어(164c)로 전달하는 기어열(164d)과, 종동기어(164c)와 상기 종동기어(164c)와 동축적으로 회전되는 회전판(164e)과, 회전판(164e)과 상기 해제핀(161)을 연결하는 링크부재(165f)를 구비한다. 종동기어(164c)는 구동기어(164b)로부터 기어열(164d)을 통해 동력을 전달받아 회전되며, 그 회전축(164g)이 회전판(164e)에 연결되어 일체로 회전됨으로써, 연동시킬 수 있다. 상기 링크부재(165e)는 일단은 해제핀(161)의 회전중심에 연결되고, 타단은 종동기어(164c)와 함께 동죽적으로 회전되는 회전판(164d)의 회전중심에서 벗어나 편심된 위치에 연결되며, 양단부의 사이에 관절(164h)이 구비된다. 이러한 구성의 링크부재(165e)에 의해서 종동기어(164c)가 피동 회전시 승강부재(162)의 끝단에 설치된 해제핀(161)을 소정 각도, 바람직하게는 90도 각도로 회전시키고, 회전복귀 시킬 수 있게 되어, 해제핀(161)에 의한 클램핑로더(20)의 클램핑부(21)의 해제동작이 자동으로 이루어질 수 있게 제어할 수 있다.The pin driver 164 is rotated on the elevating member 162 so that the drive motor 164a, the drive gear 164b connected to the drive shaft of the pin drive motor 164a, and the gear connected to the drive gear 164b are rotated. A driven gear 164c which is installed as possible, a gear train 164d which is converted into a rotational force and a rotational direction of the drive gear 164b and transmitted to the driven gear 164c, a driven gear 164c and the driven gear 164c. ) And a rotating plate 164e which is rotated coaxially with the rotating plate, and a link member 165f connecting the rotating plate 164e and the release pin 161. The driven gear 164c is rotated by receiving power from the drive gear 164b through the gear train 164d, and the rotating shaft 164g is connected to the rotating plate 164e to rotate integrally, thereby interlocking. One end of the link member 165e is connected to the center of rotation of the release pin 161, and the other end of the link member 165e is connected to an eccentric position away from the center of rotation of the rotating plate 164d which is rotated together with the driven gear 164c. The joint 164h is provided between both ends. By the link member 165e of this configuration, the driven gear 164c rotates the release pin 161 provided at the end of the elevating member 162 at a predetermined angle, preferably at an angle of 90 degrees, when the driven gear rotates. It is possible to control, so that the release operation of the clamping portion 21 of the clamping loader 20 by the release pin 161 can be made automatically.
상기 수평 구동유닛(165) 승강부재(162)를 상하 이동 가능하게 지지하며 y축 방향으로 왕복이동 가능하게 스테이션(210)에 설치되는 가동블록(165a)과, 상기 가동블록(165a)에 결합되어 함께 이동되며 상기 구동모터(164a)를 지지하는 모터 지지블록(165b)과, 가동블록(165a) 및 모터 지지블록(165b)을 y축 방향으로 왕복 이동시키는 수평 구동부(165c)를 구비한다. 상기 수평 구동부(165c)는 스테이션(210)에 설치되어 가동블록(165a) 및 모터 지지블록(165b)을 y축 방향으로 왕복 이동되게 구동하는 리니어모터를 포함할 수 있다. 물론, 수평 구동부(165c)는 리니어모터 이외에도 유압실린더, 리드스크류를 포함하는 모터구동부 등 다양한 예가 가능하며, 본 발명의 한정하는 구성이 아니므로 더 이상의 자세한 설명은 생략한다.It is coupled to the movable block 165a and the movable block 165a which are installed at the station 210 so as to support the horizontal driving unit 165 to move up and down and move up and down in the y-axis direction. A motor support block 165b moving together and supporting the drive motor 164a, and a horizontal drive unit 165c for reciprocating the movable block 165a and the motor support block 165b in the y-axis direction. The horizontal driver 165c may include a linear motor installed in the station 210 to drive the movable block 165a and the motor support block 165b to reciprocate in the y-axis direction. Of course, the horizontal drive unit 165c may be various examples, such as a hydraulic cylinder, a motor driving unit including a lead screw, in addition to the linear motor, and thus, detailed description thereof will be omitted.
상기 캐필러리 스토핑유닛(170)은 클램핑부(21)의 캐필러리(11) 상부에 위치되는 스토퍼부재(171)와, 스토퍼부재(171)를 지지하며 상기 캐필러리 거치유닛(150)에 결합되는 유닛몸체(173)를 구비한다. 구체적으로 유닛몸체(173)는 캐필러리 거치유닛(150)의 거치 구동부(151)의 외부(모터하우징)에 결합되어 위치 고정되며, 그 하단에 상기 스토퍼부재(171)가 설치된다. 스토퍼부재(171)는 클램핑부(21)의 상부의 소정 높이에 위치된 상태로 유지되며, 새로운 캐필러리를 클램핑부(21)에 장착할 때, 캐필러리(11)가 상부로 과상승되는 것을 방지하는 역할을 하게 된다. 물론 상기 유닛몸체(173)는 상기 거치 구동부(151)의 외측 이외의 다른 부품에 위치 고정되게 설치될 수도 있다.The capillary stopping unit 170 supports the stopper member 171 and the stopper member 171 positioned above the capillary 11 of the clamping part 21 and supports the capillary mounting unit 150. It is provided with a unit body 173 coupled to. Specifically, the unit body 173 is coupled to the outside (motor housing) of the mounting drive unit 151 of the capillary mounting unit 150 is fixed in position, the stopper member 171 is installed at the lower end. The stopper member 171 is maintained at a predetermined height of the upper portion of the clamping portion 21, and when the new capillary is mounted on the clamping portion 21, the capillary 11 rises upwards. It is to prevent it from becoming. Of course, the unit body 173 may be installed to be fixed to other parts than the outside of the mounting drive unit 151.
상기 제어부(180)는 캐필러리 공급 및 회수유닛(110), 클램핑 해제유닛(160), x축 이송유닛(120), y축 이송유닛(130), z축 이송유닛(140)을 각각 독립적으로 구동제어한다.The controller 180 independently of the capillary supply and recovery unit 110, the clamping release unit 160, the x-axis transfer unit 120, the y-axis transfer unit 130, and the z-axis transfer unit 140, respectively Drive control.
보다 구체적으로 살펴보면, 제어부(180)는, x축, y축 및 z축 이송유닛(120)(130)(140)을 구동시켜 상기 캐필러리 공급 및 회수유닛(110)을 상기 클램핑 로더(20)의 로더 클램핑부(21)의 하부로 이동시키면서 클램핑 해제유닛(160)을 회전구동시켜 도 11a에 도시된 바와 같이, 해제핀(161)을 회전시켜 클램핑부(21)가 확장되게 제어한다. 그 후, 제어부(180)는 z축 이송유닛(140)을 구동시켜 캐필러리(11)가 로더 클램핑부(21)로 삽입 공급된 후, 클램핑 해제유닛(160)을 반대방향으로 회전구동시켜 로더 클램핑부(21)가 축소되게 제어하여 캐필러리(11)가 지지되도록 한 후(도 11b의 상태), 상기 그립부(112a)를 확장제어되게 한 후 z축 이송유닛(140)을 제어하여 상기 그립부(112a)를 하방으로 이동시킨 후 다시 캐필러리(11)를 그립하도록 클램핑 해제유닛(160)을 제어한 후, z축 이송유닛(160)을 제어하여 상기 캐필러리(11)를 상방으로 가압한다(도 11c 참조).In more detail, the controller 180 drives the x-axis, y-axis, and z- axis transfer units 120, 130, 140 to drive the capillary supply and recovery unit 110 to the clamping loader 20. As shown in FIG. 11A, the clamping release unit 160 is rotated while the lower portion of the loader clamping portion 21 is rotated, thereby controlling the clamping portion 21 to be expanded by rotating the release pin 161. Thereafter, the controller 180 drives the z-axis transfer unit 140 to insert the capillary 11 into the loader clamping portion 21 and then rotates the clamping release unit 160 in the opposite direction. After the loader clamping unit 21 is controlled to be reduced so that the capillary 11 is supported (state of FIG. 11B), the grip unit 112a is expanded and then controlled to control the z-axis transfer unit 140. After the grip part 112a is moved downward, the clamping release unit 160 is controlled to grip the capillary 11 again, and then the z-axis feed unit 160 is controlled to control the capillary 11. Pressurized upwards (see FIG. 11C).
이때, 캐필러리(11)를 상방으로 가압시, 캐필러리 스토핑유닛(170)에 의해 캐필러리(11)의 상단이 간섭됨으로써, 과상승되는 것이 근본적으로 방지되고, 정확한 높이로 캐필러리(11)를 로더 클램핑부(21)에 장착할 수 있게 된다. 즉, 제어부(180)는 캐필러리(11)가 상기 캐필러리 스토핑유닛(170)에 의하여 더 이상 상방으로 이동되지 않는 경우, 상기 z축 이송유닛(160)의 상방 이동을 제한하도록 제어하여 정지시킨다. 캐필러리(11)의 교환장착이 완료되면, 제어부(180)는 다시 캐필러리 해제유닛(160)을 제어하여 도 11d와 같이 캐필러리(11)가 클램핑부(21)에 클램핑된 상태가 되도록 한 다음에, 그립부(112a)를 해제하여 캐필러리(11)로부터 분리한다.At this time, when the capillary 11 is pressed upward, the upper end of the capillary 11 is interfered by the capillary stopping unit 170, thereby preventing the excessive rise, and at a precise height The filler 11 can be mounted to the loader clamping part 21. That is, the controller 180 controls to limit the upward movement of the z-axis transfer unit 160 when the capillary 11 is no longer moved upward by the capillary stopping unit 170. To stop it. When the replacement and mounting of the capillary 11 is completed, the controller 180 controls the capillary release unit 160 again so that the capillary 11 is clamped to the clamping unit 21 as shown in FIG. 11D. Then, the grip part 112a is released and separated from the capillary 11.
또한, 본 발명의 캐필러리 자동 교체시스템은, 도 14 내지 도 16을 참조하면, 상기 캐필러리 공급 및 회수 유닛(110), x축 이송유닛(120), y축 이송유닛(130), z축 이송유닛(140), 캐필러리 스토핑 유닛(170), 클램핑 해제유닛(160) 및 캐필러리 거치유닛(150)이 설치되는 스테이션(210)과, 조정유닛(220)을 더 구비할 수 있다.In addition, the capillary automatic replacement system of the present invention, referring to Figures 14 to 16, the capillary supply and recovery unit 110, x-axis transfer unit 120, y-axis transfer unit 130, It further comprises a station 210, the adjustment unit 220, the z-axis transfer unit 140, the capillary stopping unit 170, the clamping release unit 160 and the capillary mounting unit 150 is installed can do.
상기 스테이션(210)에는 상기 다수의 장치가 설치되어 지지되며, 스테이션(210)의 정밀한 자세 및 위치는 조정유닛(220)에 의해 정밀 제어될 수 있다. 조정유닛(220)은 스테이션을 x축, y축, z축 이동 및 y축을 회전축으로 하는 회전각 θ로 회전되게 조정한다.The station 210 is installed and supported by a plurality of devices, the precise posture and position of the station 210 can be precisely controlled by the adjustment unit 220. The adjusting unit 220 adjusts the station to be rotated at a rotation angle θ having the x-axis, the y-axis, the z-axis movement, and the y-axis as the rotation axis.
상기 조정유닛(220)은 스테이션(210)에 고정되는 고정 플레이트(221), 상기 고정 플레이트(221)에 회동 가능하게 설치되는 θ회전 플레이트(223), 상기 θ회전 플레이트(223)에 y축 방향으로 조정가능한 y축 플레이트(225) 및, 상기 y축 플레이트(225)에 x축 방향으로 조정 가능한 x축 플레이트(227)를 구비한다. 상기 각각의 플레이트들(221,223,225,227)의 조정은 플레이트들 사이에 설치되는 복수의 조정나사 등을 조절하여 조정 가능하며, 이외에도 다양한 방법의 조정수단이 가능하며, 그 조정방법은 공지의 기술로부터 쉽게 이해될 수 있다. The adjustment unit 220 is a fixed plate 221 fixed to the station 210, θ rotating plate 223 is rotatably installed on the fixing plate 221, y axis direction to the θ rotating plate 223 And a y-axis plate 225 that can be adjusted, and an x-axis plate 227 that can be adjusted in the x-axis direction. The adjustment of each of the plates 221, 223, 225, 227 can be adjusted by adjusting a plurality of adjustment screws, etc. installed between the plates, in addition to the various means of adjustment is possible, the adjustment method can be easily understood from known techniques Can be.
상기와 같은 구성의 조정유닛(220)을 이용하여 기존에 사용되거나 조정이 불가한 클램핑 로더(10)의 위치 및 상태에 맞게 스테이션(2210)을 x축, y축, z축으로 미세하게 조정할 수 있을 뿐만 아니라 y축을 회전축으로 하여 회동시킬 수 있게 됨으로써, 캐필러리 공급 및 회수유닛(110)이 캐필러리(11)를 정확한 위치로 공급하거나 회수할 수 있게 된다.By using the adjustment unit 220 of the above configuration, the station 2210 can be finely adjusted to the x-axis, the y-axis, and the z-axis according to the position and the state of the clamping loader 10 that is conventionally used or not adjustable. As well as being able to rotate the y-axis as the rotation axis, the capillary supply and recovery unit 110 can supply or recover the capillary 11 to the correct position.
이하에서는 상기 구성을 가지는 본 발명의 실시예에 따른 캐필러리 자동 교체시스템의 작용효과에 대해 자세히 설명하기로 한다.Hereinafter will be described in detail the effect of the capillary automatic replacement system according to an embodiment of the present invention having the above configuration.
먼저, 제어부(180)는 도 4a에 도시된 바와 같이, y축 및 z축 이송유닛(130,140)을 구동하여 그립부(112a)를 클램핑부(21) 쪽으로 이동시키고나서, 다시 도 5a에 도시된 바와 같이, 그립부(112a)를 x축으로 이동시켜서 캐필러리(11)를 클램핑하도록 제어한다.First, as shown in FIG. 4A, the controller 180 drives the y-axis and z- axis transfer units 130 and 140 to move the grip portion 112a toward the clamping portion 21, and then again as shown in FIG. 5A. Likewise, the grip unit 112a is moved on the x-axis to control the clamping of the capillary 11.
그리고 제어부(180)는 클램핑 해제유닛(160)을 구동제어하여, 도 6에 도시된 바와 같이, 해제핀(161)을 로더 클램핑부(21)에 결합하고, 앞서 도 5b를 통해 설명한 바와 같이, 해제핀(161)을 90도 각도 회전시켜서 클랭핑부(21)를 확장한다. 이 상태에서 그립부(112a)가 캐필러리(11)를 그립한 상태에서 도 7과 같이 z축 방향 및 x축 방향 각각으로 차례로 이동된 뒤, y축 방향으로 이동되어 도 8과 같이 캐필러리(11)를 캐필러리 거치유닛(150)의 회전판(153)에 거치시킨다.And the controller 180 controls the driving of the clamping release unit 160, as shown in Figure 6, coupled to the release pin 161 to the loader clamping unit 21, as described above with reference to Figure 5b, The cranking part 21 is expanded by rotating the release pin 161 at an angle of 90 degrees. In this state, the grip portion 112a is moved in the z-axis direction and the x-axis direction, respectively, as shown in FIG. 7 while the grip portion 112a is gripped, and then moved in the y-axis direction, as shown in FIG. 8. (11) is mounted on the rotating plate 153 of the capillary mounting unit 150.
그런 다음에, 회전판(153)을 회전시켜서 새로운 캐필러리(11)가 그립부(112a)의 그립위치에 위치되도록 한 후에, 그립부(112a)를 작동시켜서 도 9와 같이 새로운 캐필러리(11)를 회전판(153)에서 분리한다.Then, after rotating the rotating plate 153 so that the new capillary 11 is positioned at the grip position of the grip portion 112a, the grip portion 112a is operated to operate the new capillary 11 as shown in FIG. Is separated from the rotating plate (153).
그리고 나서 다시 그립부(112a)를 도 10과 같이 이동시킨 후, 도 11a와 같이 1차로 그립부(112a)를 z축 방향으로 상향 이동시켜서 캐필러리(11)를 클램핑부(21)에 가장착한다.Then, the grip portion 112a is moved again as shown in FIG. 10, and then the grip portion 112a is first moved upward in the z-axis direction as shown in FIG. 11A to attach the capillary 11 to the clamping portion 21. .
그런 다음, 제어부(180)는 클램핑 해제유닛(160)을 구동하여 해제핀(161)을 도 11b와 같이 회전시켜서 캐필러리(11)가 클램핑부(21)에 구속되도록 한다.Then, the controller 180 drives the clamping release unit 160 to rotate the release pin 161 as shown in FIG. 11B so that the capillary 11 is constrained to the clamping portion 21.
그리고 나서 제어부(180)는 캐필러리(11)를 그립하고 있던 그립부(112a)를 해제시켜서 도 11c의 가상선으로 도시된 바와 같이 z축 방향으로 하강시킨 다음에 다시 캐필러리(11)를 그립하도록 제어한다. 그리고 해제핀(161)을 다시 해제위치로 회전시켜서 캐필러리(11)를 클램핑부(21)에서 구속해제시킨 상태에서, 그립부(112a)를 실선으로 도시한 바와 같이 z축 방향으로 상승시킨다.Then, the controller 180 releases the grip portion 112a which has gripped the capillary 11 and lowers the capillary 11 in the z-axis direction as shown by the virtual line of FIG. 11C. Control to grip Then, while the capillary 11 is released from the clamping portion 21 by rotating the release pin 161 again to the release position, the grip portion 112a is raised in the z-axis direction as shown by the solid line.
그러면, 캐필러리(11)가 원하는 높이만큼 클램핑부(21)에 장착된다. 이때 캐필러리(11)의 상단은 상기 캐필러리 스토핑유닛(170)에 의해 그 상방향으로의 장착높이가 제한되므로, 과도하게 상승된 상태로 장착되는 것을 근본적으로 방지할 수 있다. 즉, 상기와 같이 그립부(112a)를 2번에 걸쳐서 2단계로 동작시켜서 캐필러리(11)를 클램핑부(21)에 장착함으로써, 캐필러리(11)가 클램핑부(21)에 너무 낮은 높이로 불안정하게 장착되는 것을 방지함은 물론, 과도하게 상승된 상태로 장착되는 것도 방지하여 최상의 상태로 장착되도록 제어할 수 있게 된다.Then, the capillary 11 is mounted to the clamping portion 21 by a desired height. At this time, since the mounting height of the upper end of the capillary 11 is limited by the capillary stopping unit 170, the capillary 11 can be prevented from being mounted in an excessively raised state. That is, by operating the grip portion 112a in two steps as described above, the capillary 11 is mounted on the clamping portion 21, so that the capillary 11 is too low to the clamping portion 21. In addition to preventing the mounting unstable at a height, it is also possible to control to be mounted in the best state by preventing the mounting in an excessively elevated state.
한편, 상기와 같이 캐필러리(11)를 2단계에 걸쳐서 안정되게 장착한 후에는 다시 도 11d에 도시된 바와 같이, 해제핀(161)을 90도 각도 회전시켜서 클램핑부(21)에 캐필러리(11)가 구속되도록 하고, 그립부(112a)는 그립 해제하여 캐필러리(11)로부터 분리되도록 하강시킨다.On the other hand, after the capillary 11 is stably mounted in two steps as described above, as shown in FIG. 11D, the capillary 11 is rotated by an angle of 90 degrees to the clamping unit 21. The li 11 is constrained and the grip portion 112a is lowered to release the grip and detach from the capillary 11.
그리고 나서 도 12 및 도 13에 도시된 바와 같이, 제어부(180)는 클램핑 해제유닛(160)을 구동제어하여 해제핀(161)이 클램핑부(21)에서 분리되도록 z축으로 하강시킨 뒤, y축 방향으로 이동시켜서 초기위치로 복구시킨다. 그리고 제어부(180)는 x축 이송유닛(120), y축 이송유닛(130)을 구동제어하여 초기위치로 복귀시킴으로써, 캐필러리(11)를 자동으로 교체하는 작업이 종료된다.Then, as shown in FIGS. 12 and 13, the controller 180 drives the clamping release unit 160 to lower the z-axis so that the release pin 161 is separated from the clamping portion 21, and then y Restore the initial position by moving in the axial direction. In addition, the controller 180 controls the x-axis transfer unit 120 and the y-axis transfer unit 130 to return to the initial position, thereby automatically replacing the capillary 11.
이상에서 설명한 바와 같이, 본 발명의 캐필러리 자동 교체시스템에 의하면, 캐필러리를 2단계에 걸쳐서 순차적으로 클램핑부에 장착함으로써, 캐필러리가 클램핑부에 불안정하게 정착되는 것을 방지할 수 있다. 또한, 2단계에 걸쳐 캐필러리를 장착할 때, 클램핑부(21)의 상부에 캐필러리 스토핑유닛(170)을 설치한 구성을 가짐으로써, 캐필러리(11)가 과도하게 상승하는 것을 방지할 수 있게 된다.As described above, according to the capillary automatic replacement system of the present invention, the capillary can be unstablely fixed to the clamping part by attaching the capillary sequentially to the clamping part in two steps. In addition, when the capillary is mounted in two steps, the capillary 11 is excessively raised by having a configuration in which the capillary stopping unit 170 is installed on the upper portion of the clamping unit 21. Can be prevented.
또한, 종래와는 달리 캐필러리(11)를 자동으로 교체할 수 있게 됨으로써, 그에 따른 시간을 줄여서 비용을 절감하고 반도체의 생산성을 높일 수 있게 된다.In addition, unlike the prior art by being able to automatically replace the capillary 11, it is possible to reduce the time accordingly to reduce the cost and increase the productivity of the semiconductor.
이상, 본 발명을 본 발명의 원리를 예시하기 위한 바람직한 실시예와 관련하여 도시하고 설명하였으나, 본 발명은 그와 같이 도시되고 설명된 그대로의 구성 및 작용으로 한정되는 것이 아니다. 오히려 첨부된 특허청구범위의 사상 및 범위를 일탈함이 없이 본 발명에 대한 다수의 변경 및 수정이 가능함을 당업자들은 잘 이해할 수 있을 것이다.While the invention has been shown and described in connection with preferred embodiments for illustrating the principles of the invention, the invention is not limited to the construction and operation as shown and described. Rather, those skilled in the art will appreciate that many modifications and variations of the present invention are possible without departing from the spirit and scope of the appended claims.
[부호의 설명][Description of the code]
11..캐필러리 20..클램핑로더11..Capillary 20..Clamping Loader
21..클램핑부 110..캐필러러 공급 및 회수유닛21. Clamping unit 110. Capillary supply and recovery unit
120..x축 이송유닛 130..y축 이송유닛120..x-axis transfer unit 130..y-axis transfer unit
140..z축 이송유닛 150..캐필러리 거치유닛140..z-axis transfer unit 150..capillary mounting unit
160..클램핑 해제유닛 170..캐필러리 스토핑유닛160..Clamping release unit 170..Capillary stopping unit
180..제어부 180..Control

Claims (6)

  1. 베이스 상에 설치되며, 캐필러리를 선단에서 클램핑하는 로더 클램핑부를 가지는 클램핑로더;A clamping loader installed on the base and having a loader clamping portion for clamping the capillary at the tip;
    상기 클램핑로더 측으로 캐필러리를 공급하거나 회수하며, 상기 캐필러리를 선택적으로 그립핑하는 그립부를 가지는 캐필러리 공급 및 회수유닛;A capillary supply and recovery unit for supplying or recovering a capillary to the clamping loader side, the capillary supplying and recovering unit having a grip for selectively gripping the capillary;
    상기 캐필러리 공급 및 회수유닛을 x축 방향으로 이송하는 x축 이송유닛;An x-axis transfer unit for transferring the capillary supply and recovery unit in the x-axis direction;
    상기 캐필러리 공급 및 회수유닛을 y축 방향으로 이송하는 y축 이송유닛;A y-axis transfer unit for transferring the capillary supply and recovery unit in the y-axis direction;
    상기 캐필러리 공급 및 회수유닛을 z축 방향으로 이송하는 z축 이송유닛;A z-axis transfer unit for transferring the capillary supply and recovery unit in a z-axis direction;
    상기 캐필러리 공급 및 회수유닛에 의하여 새로운 캐필러리가 상기 클램핑부로 공급될 때 클램핑부의 상단으로 상기 캐필러리가 과상승되는 것을 방지하도록 하는 캐필러리 스토핑유닛;A capillary stopper unit which prevents the capillary from rising to an upper end of the clamping portion when a new capillary is supplied to the clamping portion by the capillary supply and recovery unit;
    상기 클램핑부를 선택적으로 잠금 또는 해제시켜서 캐필러리가 장착 또는 이탈가능하도록 하는 클램핑 해제유닛;A clamping release unit for selectively locking or releasing the clamping portion to allow the capillary to be mounted or detached;
    상기 클램핑 로더로 공급되거나 회수되는 캐필러리가 거치되는 캐필러리 거치유닛; 및 A capillary mounting unit on which the capillary supplied or recovered to the clamping loader is mounted; And
    상기 캐필러리 공급 및 회수유닛 및 클램핑 해제유닛을 제어하는 제어부;를 포함하는 것을 특징으로 하는 캐필러리 자동 교체시스템.And a control unit for controlling the capillary supply and recovery unit and the clamping release unit.
  2. 제1항에 있어서, 상기 제어부는,The method of claim 1, wherein the control unit,
    상기 x축, y축 및 z축 이송유닛을 구동시켜 상기 캐필러리 공급 및 회수유닛을 상기 클램핑 로더의 로더 클램핑부의 하부로 이동시키면서 상기 클램핑 해제유닛을 회전구동시켜 로더 클램핑부가 확장되게 제어한 후, 상기 z축 이송유닛을 구동시켜 캐필러리가 로더 클램핑부로 삽입 공급된 후, 상기 클램핑 해제유닛을 반대방향으로 회전구동시켜 로더 클램핑부가 축소되게 제어하여 캐필러리가 지지되도록 한 후, 상기 그립부를 확장제어되게 한 후 z축 이송유닛을 제어하여 상기 그립부를 하방으로 이동시킨 후 다시 캐필러리를 그립하도록 제어한 후, x축 이송유닛을 제어하여 상기 캐필러리를 상방으로 가압하는 것을 특징으로 하는 캐필러리 자동 교체시스템.After driving the x-axis, y-axis and z-axis transfer unit to move the capillary supply and recovery unit to the lower portion of the loader clamping portion of the clamping loader while controlling the expansion of the loader clamping portion by rotating the clamping release unit After the capillary is inserted into and supplied to the loader clamping part by driving the z-axis transport unit, the clamping release unit is rotated in the opposite direction to control the loader clamping part to be reduced so that the capillary is supported, and then the grip part is expanded. After controlling to control the z-axis transfer unit to move the grip downwards and to control the capillary again, and then to control the x-axis transfer unit to press the capillary upwards Capillary automatic replacement system.
  3. 제1항 또는 제2항에 있어서, 상기 제어부는,The method of claim 1 or 2, wherein the control unit,
    상기 캐필러리가 상기 캐필러리 스토핑 유닛에 의하여 더 이상 상방으로 이동되지 않는 경우, 상기 z축 이송유닛의 상방 이동을 제한하도록 제어하는 것을 특징으로 하는 캐필러리 자동 교체시스템.When the capillary is no longer moved upward by the capillary stopping unit, the capillary automatic replacement system, characterized in that the control to limit the upward movement of the z-axis transfer unit.
  4. 제3항에 있어서, 상기 캐필러리 거치유닛은,According to claim 3, The capillary mounting unit,
    스테핑모터와;Stepping motors;
    상기 스테핑모터에 의하여 일정한 회전각으로 회전되며, 캐필러리가 삽입되어 거치되는 거치홀이 형성되는 거치 회전판;을 포함하는 것을 특징으로 하는 캐필러리 자동 교체시스템.The capillary automatic replacement system, comprising: a mounting rotating plate is rotated by a stepping motor at a predetermined rotation angle, the mounting hole is formed is inserted into the capillary is mounted.
  5. 제1항 또는 제2항에 있어서,The method according to claim 1 or 2,
    상기 캐필러리 공급 및 회수 유닛, x축 이송유닛, y축 이송유닛, z축 이송유닛, 캐필러리 스토핑 유닛, 클램핑 해제유닛 및 캐필러리 거치유닛이 설치되는 스테이션; 및A station in which the capillary supply and recovery unit, the x-axis transfer unit, the y-axis transfer unit, the z-axis transfer unit, the capillary stopping unit, the clamping release unit, and the capillary mounting unit are installed; And
    상기 스테이션을 x축, y축, z축 이동 및 y축을 회전축으로 하는 회전각 θ로 회전되게 조정하는 조정유닛;을 더 포함하는 것을 특징으로 하는 캐필러리 자동 교체시스템.And an adjustment unit for adjusting the station to be rotated at a rotation angle θ having the x-axis, y-axis, z-axis movement, and y-axis as the rotation axis.
  6. 제6항에 있어서, 상기 조정유닛은,The method of claim 6, wherein the adjustment unit,
    상기 스테이션에 고정되는 고정 플레이트;A fixed plate fixed to the station;
    상기 고정 플레이트에 회동 가능하게 설치되는 θ회전 플레이트;A θ rotating plate rotatably installed on the fixing plate;
    상기 θ회전 플레이트에 y축 방향으로 조정가능한 y축 플레이트; 및A y-axis plate adjustable in the y-axis direction to the θ rotating plate; And
    상기 y축 플레이트에 x축 방향으로 조정 가능한 x축 플레이트;를 포함하는 것을 특징으로 하는 캐필러리 자동 교체시스템.Capillary automatic replacement system comprising a; x-axis plate adjustable in the x-axis direction on the y-axis plate.
PCT/KR2012/003190 2011-11-10 2012-04-25 Automatic capillary exchange system WO2013069857A1 (en)

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Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN108695181A (en) * 2017-04-05 2018-10-23 三星电子株式会社 The method for replacing capillary
CN110729612A (en) * 2018-07-16 2020-01-24 先进科技新加坡有限公司 Jointing equipment with replaceable jointing tool
US20220134468A1 (en) * 2019-03-18 2022-05-05 Shinkawa Ltd. Capillary guide device and wire bonding apparatus

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR101806147B1 (en) 2015-09-14 2017-12-11 연근영 A system for exchanging capillary automatically

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH08186146A (en) * 1994-12-28 1996-07-16 Kaijo Corp Wire bonding apparatus and bonding tool and bonding arm to be equipped with apparatus thereof
JPH1064939A (en) * 1996-08-22 1998-03-06 Matsushita Electric Ind Co Ltd Method for exchanging bonding tool in bonding device
KR20080050978A (en) * 2006-12-04 2008-06-10 가부시키가이샤 신가와 Wire bonding device, bonding tool exchange method thereof and computer readable medium having a program for the same

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR20090011422U (en) * 2008-05-06 2009-11-11 주식회사 하이닉스반도체 Transducer of semiconductor for replacing a capillary automatically and capillary auto replacing system using the same

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH08186146A (en) * 1994-12-28 1996-07-16 Kaijo Corp Wire bonding apparatus and bonding tool and bonding arm to be equipped with apparatus thereof
JPH1064939A (en) * 1996-08-22 1998-03-06 Matsushita Electric Ind Co Ltd Method for exchanging bonding tool in bonding device
KR20080050978A (en) * 2006-12-04 2008-06-10 가부시키가이샤 신가와 Wire bonding device, bonding tool exchange method thereof and computer readable medium having a program for the same

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN108695181A (en) * 2017-04-05 2018-10-23 三星电子株式会社 The method for replacing capillary
CN110729612A (en) * 2018-07-16 2020-01-24 先进科技新加坡有限公司 Jointing equipment with replaceable jointing tool
US11205634B2 (en) 2018-07-16 2021-12-21 Asm Technology Singapore Pte Ltd Bonding apparatus with replaceable bonding tool
US20220134468A1 (en) * 2019-03-18 2022-05-05 Shinkawa Ltd. Capillary guide device and wire bonding apparatus
US11717912B2 (en) * 2019-03-18 2023-08-08 Shinkawa Ltd. Capillary guide device and wire bonding apparatus

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