WO2013065398A1 - Système de mesure d'échantillon associé à une batterie solaire - Google Patents

Système de mesure d'échantillon associé à une batterie solaire Download PDF

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Publication number
WO2013065398A1
WO2013065398A1 PCT/JP2012/072763 JP2012072763W WO2013065398A1 WO 2013065398 A1 WO2013065398 A1 WO 2013065398A1 JP 2012072763 W JP2012072763 W JP 2012072763W WO 2013065398 A1 WO2013065398 A1 WO 2013065398A1
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WIPO (PCT)
Prior art keywords
measurement
sample
light
unit
solar simulator
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PCT/JP2012/072763
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English (en)
Japanese (ja)
Inventor
和也 井口
賢一郎 池村
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浜松ホトニクス株式会社
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Publication of WO2013065398A1 publication Critical patent/WO2013065398A1/fr

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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/62—Systems in which the material investigated is excited whereby it emits light or causes a change in wavelength of the incident light
    • G01N21/63—Systems in which the material investigated is excited whereby it emits light or causes a change in wavelength of the incident light optically excited
    • G01N21/64—Fluorescence; Phosphorescence
    • G01N21/6489—Photoluminescence of semiconductors
    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02S—GENERATION OF ELECTRIC POWER BY CONVERSION OF INFRARED RADIATION, VISIBLE LIGHT OR ULTRAVIOLET LIGHT, e.g. USING PHOTOVOLTAIC [PV] MODULES
    • H02S50/00—Monitoring or testing of PV systems, e.g. load balancing or fault identification
    • H02S50/10—Testing of PV devices, e.g. of PV modules or single PV cells
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02E—REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
    • Y02E10/00—Energy generation through renewable energy sources
    • Y02E10/50—Photovoltaic [PV] energy

Definitions

  • the present invention relates to a solar cell related sample measurement system for measuring the characteristics of a sample related to a solar cell by a photoluminescence method.
  • the solar cell-related sample is irradiated with white light that is simulated sunlight under a predetermined wavelength spectrum and predetermined irradiation conditions.
  • a solar simulator is used.
  • a sample such as a solar battery cell or a module is irradiated with white light by a solar simulator, and a probe or the like is applied to an electrode on the solar battery cell to measure its electrical characteristics.
  • the principle of photoluminescence measurement is that the target sample is irradiated with excitation light having an energy (short wavelength) higher than its band gap energy Eg, so that carriers (electrons or holes) are generated in the sample.
  • the generated light is detected when carriers are recombined in the vicinity of the PN junction.
  • the electronic state inside the material can be observed from the obtained two-dimensional image of PL emission or the wavelength spectrum of PL emission.
  • the solar cell is usually evaluated using a solar simulator, as described above, for example, conditions such as 1 SUN close to the intensity of sunlight by white light such as AM1.5G having a wavelength spectrum close to sunlight. It is done below.
  • a solar simulator for example, conditions such as 1 SUN close to the intensity of sunlight by white light such as AM1.5G having a wavelength spectrum close to sunlight. It is done below.
  • PL imaging, spectrum measurement, or the like such PL measurement is usually performed by irradiating a sample with laser light.
  • PL measurement by laser light excitation is excitation by light of a single wavelength, and therefore has an excitation light spectrum that is absolutely different from measurement of conversion efficiency using white light.
  • a practical excitation light wavelength is a specific wavelength such as 532 nm or 808 nm caused by a laser material or the like, and the excitation light wavelength in this case is not necessarily measured. Not optimized for the sample in question.
  • the present invention has been made to solve the above-described problems, and a solar cell related sample measurement system capable of suitably measuring the characteristics of a sample by a photoluminescence method for a sample related to a solar cell.
  • the purpose is to provide.
  • a sample measurement system for solar cell related samples comprises (1) a solar simulator for measuring characteristics of a sample related to solar cells, and (2) a solar simulator. And an additional measuring device used for measuring the sample by the photoluminescence method.
  • the solar simulator is a sample stage on which the sample is placed, and artificial sunlight is applied to the sample.
  • a white light supply unit that supplies white light
  • a housing unit that integrally holds the sample stage and the white light supply unit.
  • the additional measurement device is additionally provided at a predetermined position with respect to the solar simulator. Is installed on the measuring device main body, and is attached to the measuring device main body on the measuring optical path from the white light supply unit to the sample stage with respect to the solar simulator.
  • a photoluminescence measurement unit configured to be movable between the entered measurement position and a standby position off the measurement optical path.
  • the photoluminescence measurement unit arranges the photoluminescence measurement unit at the measurement position.
  • a measurement light detector that detects the measurement light to be measured, and a unit frame portion that is attached to the measurement apparatus main body so as to be movable between the measurement position and the standby position while holding the optical filter and the measurement light detection unit integrally. It is characterized by having.
  • a solar simulator configured to supply white light that is simulated sunlight to samples such as solar cell-related materials, cells, panels, etc., for inspection.
  • An additional measuring device having a photoluminescence measuring unit (PL measuring unit) is additionally installed.
  • the PL measurement unit is configured by an optical filter (wavelength selection filter) that converts white light into excitation light, a measured light detection unit that detects light from a sample, and a unit frame that integrally holds them.
  • this PL measurement unit supplies the white light to the sample in the solar simulator, the measurement position including the measurement optical path defined by the irradiation range, and the measurement optical path. It is configured to be movable between the deviated standby position. According to such a configuration, in the state where the PL measurement unit is arranged at the standby position, it is possible to measure the electrical characteristics such as the IV characteristic measurement similar to the conventional one, and the PL measurement unit is located at the measurement position. In this state, it is possible to perform PL measurement on the sample using the light component of white light that has passed through the optical filter as excitation light. Thereby, about the sample relevant to a solar cell, it becomes possible to perform the measurement of the characteristic of the sample by a photo-luminescence method suitably.
  • an additional measurement device having a PL measurement unit is provided for a solar simulator that performs measurement by supplying white light to the sample, and the PL measurement unit is excited with white light.
  • the PL measurement unit is movable between a measurement position including the measurement optical path for the sample and a standby position outside the measurement optical path.
  • FIG. 1 is a front view showing a configuration of one embodiment of a solar cell related sample measurement system.
  • FIG. 2 is a front view showing the configuration of the sample measurement system shown in FIG.
  • FIG. 3 is a side view showing the configuration of the sample measurement system shown in FIG.
  • FIG. 4 is a perspective view showing the configuration of the sample measurement system shown in FIG.
  • FIG. 5 is a graph showing wavelength spectra of white light, excitation light, and light to be measured from the sample used for sample measurement.
  • FIG. 6 is a graph showing a wavelength spectrum of light to be measured from a sample.
  • FIG. 7 is a flowchart illustrating an example of a sample measurement method.
  • FIG. 8 is a flowchart showing another example of the sample measuring method.
  • FIG. 1 is a front view showing a configuration of an embodiment of a solar cell related sample measurement system.
  • FIG. 1 shows a state in which a later-described photoluminescence measurement unit (PL measurement unit) is arranged at the standby position.
  • FIG. 2 is a front view showing the configuration of the solar cell related sample measurement system shown in FIG.
  • FIG. 3 is a side view showing the configuration of the sample measurement system shown in FIG.
  • FIG. 4 is a perspective view showing the configuration of the sample measurement system shown in FIG. 2 to 4 show a state in which the PL measurement unit is arranged at the measurement position.
  • FIGS. 1 to 3 schematically show the configuration of the sample measurement system
  • FIG. 4 shows a specific example of the structure.
  • the sample measurement system 1A is for inspecting and evaluating the characteristics of a sample S (hereinafter referred to as a solar cell-related sample or simply a sample) S such as a material, a cell, or a panel related to a solar cell.
  • a sample S hereinafter referred to as a solar cell-related sample or simply a sample
  • This is a solar cell related sample measurement system that performs measurement, and includes a solar simulator 10, an electrical characteristic measurement device 19, an additional measurement device 20, and a control device 30.
  • the solar simulator 10 is for measuring the characteristics of the solar cell-related sample S, and includes a sample stage 11, a white light supply unit 13, and a housing unit 15. Further, the sample stage 11 on which the sample S to be measured is placed is moved in the x-axis direction, the y-axis direction (horizontal direction), and the z-axis direction (vertical direction) by the stage driving unit 12, and then on the stage 11. The measurement position and measurement range in the sample S can be adjusted and set.
  • the white light supply unit 13 applies white light having a wavelength spectrum close to sunlight to the sample S on the stage 11 according to predetermined irradiation conditions (irradiation range, irradiation angle, irradiation light intensity distribution, etc.). Supplied as simulated sunlight for measuring the characteristics of Specifically, the white light supply unit 13 includes, for example, one or more light sources and an optical system including one or more optical elements that adjust the optical path, wavelength spectrum, and the like of light from the light sources. Further, a shutter 14 for switching ON / OFF of white light supply from the white light supply unit 13 to the sample S is provided on the measurement optical axis Ax between the white light supply unit 13 and the stage 11. Yes.
  • the housing unit 15 integrally holds the sample stage 11 and the white light supply unit 13.
  • the housing portion 15 includes an upper housing portion 16 and a lower housing portion 17.
  • the upper housing portion 16 accommodates the white light supply portion 13 and the shutter 14 inside, and has a box shape having an opening facing the sample stage 11 below the upper housing portion 16.
  • the white light from the white light supply unit 13 passes through the shutter 14 in the ON state (open state) and the opening below the upper housing unit 16, and is measured by the measurement optical path that extends in a predetermined range including the optical axis Ax. It is supplied to the upper sample S.
  • the lower housing portion 17 has a structure in which four columnar members are provided between the upper housing portion 16 and the housing bottom portion 18. In the space including the measurement optical path inside the lower housing portion 17. It is configured to be accessible from the outside.
  • the sample stage 11 and the stage drive unit 12 are installed on the housing bottom 18.
  • an additional measuring device 20 is installed at a predetermined position in the vicinity thereof.
  • the additional measuring device 20 is used for measuring the solar cell related sample S by the photoluminescence (PL) method using the solar simulator 10, and includes the measuring device main body 21 and the photoluminescence (PL). And a measurement unit 22.
  • the measuring device main body 21 is additionally and fixedly arranged at a predetermined position with respect to the solar simulator 10 (a position on the right side of the lower housing portion 17 of the solar simulator 10 in FIG. 1).
  • the PL measurement unit 22 is attached to the measurement apparatus main body 21 and is inserted into the measurement optical path from the white light supply unit 13 to the sample S on the sample stage 11 with respect to the solar simulator 10 (FIG. 2 to FIG. 2). 4) and a standby position (FIG. 1) off the measurement optical path.
  • the PL measurement unit 22 When the PL measurement unit 22 is arranged at a standby position off the measurement optical path, the PL measurement unit 22 is stored in the main body 21 as shown in FIG. Further, when the PL measurement unit 22 is disposed at a measurement position (insertion position) including the measurement optical path, as shown in FIGS. 2 to 4, the PL measurement unit 22 is disposed from the main body portion 21 to the inside of the lower housing portion 17 of the solar simulator 10. By being drawn out to a space including a certain measurement optical path, it is inserted into a measurement position between the shutter 14 and the sample stage 11 on the measurement optical path.
  • the PL measurement unit 22 includes an optical filter 23, a measured light detection unit 24, and a unit frame unit 25, as shown in FIGS.
  • the optical filter 23 has a predetermined wavelength in the white light supplied from the white light supply unit 13 to the sample stage 11 in the measurement optical path including the optical axis Ax when the PL measurement unit 22 is arranged at the measurement position. It is a wavelength selection filter that converts white light into excitation light having a predetermined wavelength spectrum by selectively passing light components within the range.
  • the optical filter 23 may be any filter that removes the wavelength region where photoluminescence is generated from the white light generated from the solar simulator 10 and transmits the excitation light wavelength region.
  • a short pass filter (SPF) that allows light components within a predetermined wavelength range to pass and cuts light components on the long wavelength side can be used.
  • a band pass filter (BPF) that allows light components within a predetermined wavelength range to pass therethrough and cuts light components on the shorter wavelength side and longer wavelength side thereof may be used.
  • the measured light detector 24 detects measured light including PL light emitted from the sample S irradiated with the excitation light when the sample S is irradiated with the excitation light generated through the optical filter 23. It is a detection part to do. As shown in FIGS. 3 and 4, the detection unit 24 is located at a predetermined position outside the measurement optical path (the range through which white light and excitation light pass) from the white light supply unit 13 and the optical filter 23 to the sample stage 11. is set up.
  • the detection unit 24 can be configured by an imaging device (imaging camera) that acquires a two-dimensional image of the measured light, for example. In such a configuration, the detection unit 24 can evaluate the characteristics of the sample S by PL imaging measurement. Alternatively, the detection unit 24 may be configured by a spectroscope that splits the measured light and a photodetector that detects the split measured light. In such a configuration, the detection unit 24 evaluates the characteristics of the sample S by PL spectrum measurement by detecting each wavelength component of the light to be measured dispersed by the spectrometer with one or more photodetectors. be able to.
  • an imaging device imaging camera
  • the detection unit 24 can evaluate the characteristics of the sample S by PL imaging measurement.
  • the detection unit 24 may be configured by a spectroscope that splits the measured light and a photodetector that detects the split measured light. In such a configuration, the detection unit 24 evaluates the characteristics of the sample S by PL spectrum measurement by detecting each wavelength component of the light to
  • a unit frame 25 is provided for the optical filter 23 and the measured light detector 24.
  • the unit frame 25 is attached to the measurement apparatus main body 21 so as to hold the optical filter 23 and the measured light detection unit 24 integrally and to be movable between the measurement position and the standby position described above.
  • a rail 25 a is provided on the side surface of the unit frame portion 25, and PL measurement including the unit frame portion 25 is performed by the rail 25 a and a rail provided inside the main body portion 21.
  • the unit 22 is configured to move in the horizontal direction (left-right direction).
  • a band pass filter (BPF) 26 is provided between the sample stage 11 of the solar simulator 10 and the measured light detector 24 of the PL measurement unit 22.
  • the band pass filter 26 receives light components within a predetermined wavelength range (for example, light components including PL light emission from the sample S due to excitation light irradiation) in the light to be measured from the sample S on the stage 11.
  • This is a second optical filter that selectively passes to the measurement light detection unit 24 and is fixed to the front side (sample stage 11 side) of the detection unit 24.
  • a wavelength selection filter other than the band pass filter may be used according to the wavelength range of the light component to be detected by the detection unit 24.
  • an illumination device 27 is provided on the sample stage 11 side of the optical filter 23 at a position off the measurement optical path.
  • the illumination device 27 is used when acquiring a normal image of the sample S in a state where the PL measurement unit 22 is arranged at the measurement position.
  • an infrared illumination device such as an infrared LED is used. .
  • an electrical characteristic measurement device 19 and a control device 30 are provided in addition to the solar simulator 10 and the additional measurement device 20, in addition to the solar simulator 10 and the additional measurement device 20, an electrical characteristic measurement device 19 and a control device 30 are provided.
  • the electrical property measuring device 19 is provided for the solar simulator 10 and is connected to the sample S on the sample stage 11 by a predetermined wiring as shown in FIG. Used when measuring IV characteristics. 2 to 4, the electrical characteristic measuring device 19 is not shown.
  • control device 30 is provided connected to the solar simulator 10 and the additional measuring device 20, and as shown in FIG. 2, the operation of each part of the solar simulator 10 and the additional measuring device 20 is controlled, thereby allowing a sample by them. Controls the execution of PL measurement for S. For example, the control device 30 controls the operation of the shutter 14 provided in the solar simulator 10 according to the execution state of the PL measurement. Thus, the configuration for controlling the shutter operation is effective when the solar simulator 10 has a shutter status output or the like.
  • a display device 31 and an input device 32 are connected to the control device 30.
  • the display device 31 displays information related to the measurement of the characteristics of the solar cell related sample S in the measurement system 1A to the operator.
  • the input device 32 is used for inputting information and instructions necessary for measurement. 1, 3, and 4, the control device 30, the display device 31, and the input device 32 are not shown.
  • the PL measurement is performed on the solar simulator 10 configured to supply the sample S with white light that is simulated sunlight and perform inspection.
  • An additional measuring device 20 having a unit 22 is additionally installed.
  • the PL measurement unit 22 includes an optical filter 23 that converts white light into excitation light, a measurement light detection unit 24 that detects measurement light from the sample S, and a unit frame 25 that integrally holds them. To do.
  • the PL measuring unit 22 includes a measuring position including a measuring optical path defined by the white light supply range for the sample S in the solar simulator 10. In this configuration, it is possible to move between the standby position off the measurement optical path. According to such a configuration, in the state where the PL measurement unit 22 is arranged at the standby position, it is possible to measure the electric characteristics such as the IV characteristic measurement similar to the conventional one using the electric characteristic measuring device 19. In addition, in a state where the PL measurement unit 22 is disposed at the measurement position, it is possible to perform PL measurement on the sample S using the light component of white light that has passed through the optical filter 23 as excitation light. Thereby, about the solar cell related sample S, it becomes possible to suitably perform various measurements and inspections including measurement of the characteristics of the sample S by the photoluminescence method.
  • the band-pass filter 26 that selectively passes light components within a predetermined wavelength range of the light to be measured between the sample stage 11 and the light to be measured detection unit 24.
  • the band-pass filter 26 that selectively passes light components within a predetermined wavelength range of the light to be measured between the sample stage 11 and the light to be measured detection unit 24.
  • the optical filter 26 is provided in this way. A configuration that cuts light components within the wavelength range of the excitation light is effective.
  • such a filter 26 may be configured not to be provided if unnecessary.
  • the PL measurement unit 22 has an illumination device 27 used for acquiring a normal image of the sample S.
  • the optical filter 23 is inserted on the measurement optical path, so that the light from the solar simulator is a camera or the like that constitutes the measured light detection unit. May not include light in the wavelength range detectable by.
  • a normal image such as a pattern image of the sample S is preferably obtained even when the PL measurement unit 22 is arranged at the measurement position. can do.
  • a lighting device 27 may be configured not to be provided if not necessary.
  • control device 30 for controlling the PL measurement is provided in the sample measurement system 1A.
  • a control device 30 may have a configuration attached to or built in the additional measurement device 20, for example.
  • the control device 30 may be configured to control the operation of the shutter 14 provided between the white light supply unit 13 and the sample stage 11 in the solar simulator 10 as described above.
  • the electrical property measuring device 19 is provided in the sample measuring system 1A. Thereby, in addition to the PL measurement for the sample S, the measurement of electrical characteristics such as the IV characteristic measurement using the solar simulator 10 can be suitably performed. Further, such an electrical characteristic measuring device 19 may be configured to be attached to or built in the solar simulator 10, for example.
  • FIG. 5 is a graph showing wavelength spectra of white light, excitation light, and light to be measured from the sample used for sample measurement.
  • the horizontal axis indicates the wavelength (nm) of light
  • the vertical axis indicates the intensity of light.
  • the solar simulator 10 is used under the conditions of AM1.5G.
  • the graph (a) in FIG. 5 shows the wavelength spectrum of white light supplied from the white light supply unit 13 of the solar simulator 10.
  • graph A1 shows the wavelength spectrum of white light in the solar simulator 10
  • graph A2 shows the wavelength spectrum of actual sunlight.
  • white light also has a light component in a wavelength region where light of the target PL in PL measurement is generated.
  • the graph (b) in FIG. 5 shows the wavelength spectrum of the excitation light that passes through the optical filter 23 and is irradiated onto the sample S.
  • a graph B1 shows a wavelength spectrum when the optical filter 23 is applied to white light in the solar simulator 10
  • a graph B2 shows a wavelength spectrum when the optical filter 23 is applied to sunlight.
  • a short-pass filter (SPF) is used as the optical filter 23, and this filter 23 is installed as a filter having a size larger than the white light beam supplied by the solar simulator 10, and PL emission is also performed.
  • SPPF short-pass filter
  • the graph (c) in FIG. 5 shows the wavelength spectrum of the light to be measured by PL emission emitted from the sample S irradiated with the excitation light shown in the graph B1.
  • the detection unit 24 is an imaging device and a two-dimensional image of PL emission is acquired, a PL image reflecting the characteristics of the sample S is obtained.
  • the detection unit 24 is a spectroscope + photodetector, various information such as information on the wavelength spectrum of PL emission can be obtained. Note that, as described above, detection of the light to be measured by the detection unit 24 is performed via an optical filter such as a bandpass filter 26 as necessary.
  • FIG. 6 is a graph showing the wavelength spectrum of the light to be measured including PL emission from the sample S, where the horizontal axis shows the wavelength of light (nm) and the vertical axis shows the intensity of light (au). ing. Further, in this graph, graph C1 shows the wavelength spectrum of the measurement result of PL emission when excitation light generated from white light is used in the configuration of the solar simulator 10 + additional measurement device 20, and graph C2 is The wavelength spectrum of the measurement result of PL light emission when a laser beam having a wavelength of 810 nm is used as excitation light is shown.
  • the sample measurement system 1A is for the measurement of electrical characteristics such as IV characteristic measurement using the solar simulator 10, which is the most important measurement performed in the evaluation and inspection of solar cells.
  • the additional measurement apparatus 20 including the PL measurement unit 22 that can move between the measurement position and the standby position without destroying the environment of the electrical measurement is additionally installed.
  • the function of the measurement system 1A is immediately switched by the movement of the PL measurement unit 22, and an effective means for easily finding a defective portion in the sample S by PL imaging is provided.
  • an effective means for easily finding a defective portion in the sample S by PL imaging is provided.
  • the large-area sample S such as a solar cell panel
  • a solar simulator for a large area is already owned, it can be applied to the PL measurement.
  • the sample measurement system 1A can perform the PL imaging measurement of the solar battery cell by simply inserting the PL measurement unit 22 of the additional measurement device 20 into the measurement optical path of the solar simulator 10. According to this, for example, in the detection of the cracks described above, it is possible to perform very efficient defect analysis.
  • the excitation light is generated by applying the optical filter 23 to the white light of the solar simulator 10.
  • the excitation light intensity is generated by applying the optical filter 23 to the white light of the solar simulator 10.
  • the irradiation uniformity of the excitation light on the sample S in the PL measurement is also possible to solve the problem. That is, in the PL measurement, when the solar cell related sample S is irradiated with excitation light, extremely high light uniformity, irradiation angle conditions, strict conditions regarding light irradiation unevenness and parallelism, and the like are required.
  • the uniformity of the excitation light irradiation is the solar simulator 10 side that supplies white light that is the source of the excitation light.
  • the solar simulator 10 can be used as a light source for PL measurement without affecting.
  • a multi-lens optical component called a fly-eye lens may be used inside the solar simulator in order to realize the conditions required for irradiation unevenness and parallelism. Even in the emitted part, if an optical filter smaller than the light beam is inserted, there is a possibility that uniform and parallel light cannot be obtained on the irradiation surface of the sample S. On the other hand, such a problem can be avoided by using the optical filter 23 having a size larger than the white light beam supplied from the solar simulator 10 in the PL measurement unit 22.
  • the measurement system 1A takes advantage of photoluminescence, that is, non-contact and non-destructive measurement, for example, from the stage before attaching the electrode to the final stage where the electrode is attached. It can be applied to the solar cell related sample S in various states. Thereby, in each manufacturing process, the factor causing the defect can be detected in advance, and it can greatly contribute to the improvement of the yield and quality. In addition, when there is a defect in the electrode, it is possible to confirm the defect by PL measurement.
  • the said structure using the white light of the solar simulator 10 by observing the electronic state inside the sample S in the wavelength spectrum and light intensity (1SUN) which are the operation conditions which evaluate conversion efficiency etc. as a solar cell. This is a measurement in a state close to actual operating conditions. Therefore, it can be expected that a measurement result that is more correlated with electrical conversion efficiency and the like can be obtained as a result of the PL measurement.
  • the reason for this is that, for example, a problem in the depth direction of the sample S occurs due to the penetration length of the sample S to be measured, and the sample S does not necessarily have a linear electrical output with respect to light. For example, there is no guarantee that it exists, and if the excitation light intensity is not appropriate for a sample having no linearity, the result may be reversed.
  • a long wavelength component in the white light supplied from the solar simulator 10 for example, a light component having an energy lower than the band gap energy Eg of the target solar cell material is an optical component such as SPF. It is cut by the filter 23 and the sample S is not irradiated. This means that, in principle, in PL measurement, light having energy lower than the band gap energy Eg only causes the temperature rise of the sample S which becomes an obstacle to PL measurement, and thus cuts the long wavelength component. This has little effect on PL measurement.
  • the above measurement system 1A is effective in terms of safety and cost.
  • a single cell of 12.5 cm square or the like obtains an output in a state such as 1 SUN that is uniformly close to the solar power with respect to the front surface of the cell.
  • a Class 4 laser having a laser output of several tens of watts.
  • a large amount of labor is required in the management and operation of the measuring device, such as using it in a device that is completely shielded from the laser, or assuming that it is used in a laser management area, and also limiting the number of users. Will be required.
  • the safety standard is not strict and the introduction of the device is easy.
  • damage to the sample S due to strong power at a specific wavelength due to laser light excitation is reduced by using excitation light generated from white light.
  • the running cost of the measuring device becomes a problem when the measuring device is fully operated at the solar cell manufacturing site, etc., but in the case of a lamp light source, it is possible to realize a lower running cost than a laser light source. It is.
  • a spare lamp light source can be easily prepared, loss due to downtime of the apparatus can be avoided.
  • the cost of the entire apparatus can be reduced as compared with a system using a laser.
  • FIG. 7 is a flowchart showing an example of a sample measurement method.
  • FIG. 7 shows an example in which the solar simulator 10 has a shutter status output.
  • the solar simulator 10 and the electrical characteristic measuring device 19 perform the IV measurement of the sample S with the PL measuring unit 22 placed at the standby position in the main body 21 of the additional measuring device 20. Electrical characteristics such as characteristics are measured (step S101).
  • the PL measurement unit 22 is moved to a measurement position including the optical axis Ax and the measurement optical path, and the optical filter 23 and the measured light detection unit 24 are set at predetermined positions (S102). Then, in this state, PL measurement for the sample S using the solar simulator 10 and the PL measurement unit 22 is started (S103).
  • the shutter 14 on the measurement optical path is closed (S104), and if it is open, the shutter 14 is closed (S105).
  • dark current is measured in the measured light detection unit 24 (S106).
  • the measurement result by the imaging device or the photodetector used in the detection unit 24 may include noise called dark current, and background light that is not a signal needs to be removed from the measurement result. There is. Dark current measurement is performed to remove unnecessary signals and data such as noise.
  • the shutter 14 is open (S107), and when it is closed, the shutter 14 is opened (S108). Then, the sample S is irradiated with excitation light from the white light supply unit 13 via the optical filter 23, and the measured light emission measurement data obtained is acquired by the measured light detection unit 24 (S109). When the PL measurement is completed, the shutter 14 is closed (S110), and necessary operations such as analysis and output are performed on the acquired PL measurement data (S111).
  • control device 30 performs a process of subtracting data obtained by dark current measurement from data obtained by PL measurement to generate measurement data from which noise is removed. Then, the obtained PL light emission two-dimensional image data, wavelength spectrum data, or the like is displayed to the operator by the display device 31.
  • an operation such as moving the PL measurement unit 22 to the standby position is performed as necessary (S112), and the measurement is terminated.
  • the shutter 14 of the solar simulator 10 is closed and the infrared illumination device 27 is turned on. Lights up to acquire a pattern image.
  • FIG. 8 is a flowchart showing another example of the sample measuring method.
  • FIG. 8 shows an example in which the solar simulator 10 does not have a shutter status output.
  • the solar simulator 10 and the electrical characteristic measuring device 19 are used to test the IV of the sample S with the PL measuring unit 22 placed at the standby position in the main body 21 of the additional measuring device 20. Electrical characteristics such as characteristics are measured (step S201).
  • the PL measurement unit 22 is moved to a measurement position including the optical axis Ax and the measurement optical path, and the optical filter 23 and the measured light detection unit 24 are set at predetermined positions (S202). In this state, the PL measurement for the sample S using the solar simulator 10 and the PL measurement unit 22 is started (S203).
  • the solar simulator 10 performs an operation of closing the shutter 14 on the measurement optical path (S204), and waits until the shutter closing operation is completed (S205). Subsequently, dark current is measured in the measured light detector 24 (S206). Subsequently, the solar simulator 10 performs an operation of opening the shutter 14 (S207), and waits for completion of the shutter opening operation (S208). Then, the sample S is irradiated with excitation light, and the obtained PL emission measurement data is acquired by the measured light detection unit 24 (S209). When the PL measurement is completed, the shutter 14 is closed (S210), and necessary operations such as analysis and output are performed on the acquired PL measurement data (211). When these operations are finished, an operation such as moving the PL measurement unit 22 to the standby position is performed as necessary (S212), and the measurement is finished.
  • the solar cell related sample measurement system according to the present invention is not limited to the above-described embodiments and configuration examples, and various modifications are possible.
  • the configurations of the solar simulator 10 and the additional measurement apparatus 20 are not limited to the above-described configurations, and various configurations may be used specifically.
  • the electrical characteristic measuring device 19, the control device 30 and the like may be omitted if unnecessary.
  • a solar simulator for measuring characteristics of the sample related to the solar cell, and (2) a sample by a photoluminescence method using the solar simulator. And (3) a solar simulator that provides a sample stage on which the sample is placed, and white light that supplies white light that becomes pseudo sunlight to the sample.
  • a supply unit and a housing unit that integrally holds the sample stage and the white light supply unit, and (4) an additional measurement device is a measurement device main body unit that is additionally arranged at a predetermined position with respect to the solar simulator.
  • An optical filter that converts white light supplied from the unit to the sample stage into excitation light having a predetermined wavelength spectrum, and light to be measured emitted from the sample irradiated with the excitation light from the optical filter is detected Using a configuration having a measured light detection unit and a unit frame unit that is attached to the measurement apparatus main body unit so as to be movable between the measurement position and the standby position while holding the optical filter and the measured light detection unit integrally Yes.
  • the measurement light detection unit uses a configuration having an imaging device that acquires a two-dimensional image of the measurement light. be able to. In such a configuration, the characteristics of the sample can be evaluated by PL imaging measurement.
  • the measurement light detection unit can use a configuration having a spectroscope that divides the measurement light and a photodetector that detects the measurement light dispersed by the spectroscope.
  • the characteristics of the sample can be evaluated by PL spectrum measurement by detecting each wavelength component of the dispersed measured light with one or a plurality of photodetectors.
  • the photoluminescence measurement unit is disposed between the sample stage and the measured light detection unit, and selectively passes a light component within a predetermined wavelength range of the measured light to the measured light detection unit. It is preferable to have two optical filters. In this way, by providing the second optical filter in the previous stage of the measured light detector, only the light component in the wavelength range suitable for evaluating the characteristics of the sample is selectively detected from the light from the sample. be able to.
  • the photoluminescence measurement unit may include a lighting device used for acquiring a normal image of the sample.
  • the optical filter is inserted in the measurement optical path, so the light from the solar simulator is detected by a camera or the like that constitutes the measured light detection unit. It may not include light in the possible wavelength range.
  • a normal image such as a pattern image of the sample can be suitably acquired even when the PL measurement unit is arranged at the measurement position. .
  • the sample measurement system may include a control device that controls the photoluminescence measurement of the sample by the solar simulator and the additional measurement device.
  • a control device may be, for example, a configuration attached to or built in the additional measurement device.
  • the control device may be configured to control the operation of a shutter provided between the white light supply unit and the sample stage in the solar simulator.
  • the sample measurement system may be provided with respect to the solar simulator, and may further include an electrical property measurement device for measuring the electrical property of the sample.
  • an electrical property measurement device for measuring the electrical property of the sample.
  • an electrical characteristic measuring device may have a configuration attached to or built in a solar simulator, for example.
  • the present invention can be used as a sample measurement system capable of suitably measuring the characteristics of a sample by a photoluminescence method for a sample related to a solar cell.
  • SYMBOLS 1A Solar cell related sample measurement system, S ... Solar cell related sample, Ax ... Measurement optical axis, 10 ... Solar simulator, 11 ... Sample stage, 12 ... Stage drive part, 13 ... White light supply part, 14 ... Shutter, 15 ... Housing part, 16 ... Upper housing part, 17 ... Lower housing part, 18 ... Housing bottom part, 19 ... Electrical characteristic measuring device, DESCRIPTION OF SYMBOLS 20 ... Additional measuring apparatus, 21 ... Measuring apparatus main-body part, 22 ... Photoluminescence measuring unit (PL measuring unit), 23 ... Optical filter, 24 ... Measuring light detection part, 25 ... Unit frame part, 26 ... Band pass filter, 27 ... Illuminating device, 30 ... Control device, 31 ... Display device, 32 ... Input device.

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  • Health & Medical Sciences (AREA)
  • Nuclear Medicine, Radiotherapy & Molecular Imaging (AREA)
  • Physics & Mathematics (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Investigating, Analyzing Materials By Fluorescence Or Luminescence (AREA)
  • Photovoltaic Devices (AREA)

Abstract

La présente invention porte sur un système de mesure d'échantillon (1A) qui est constitué à partir d'un simulateur solaire (10) et d'un dispositif de mesure supplémentaire (20). Le simulateur solaire (10) comprend un étage (11) sur lequel un échantillon (S) est à placer, une section d'alimentation en lumière blanche (13) et une section de logement (15). Le dispositif de mesure supplémentaire (20) comprend une section de corps (21) et une unité de mesure de photoluminescence (22) qui est configurée pour permettre un déplacement entre une position de mesure sur un trajet optique de mesure et une position de veille non sur le trajet optique de mesure. De plus, l'unité de mesure de photoluminescence (22) comprend une fibre optique (23) qui convertit la lumière blanche provenant de la section d'alimentation (13) en une lumière d'excitation, une section de détection de lumière mesurée (24) qui détecte une lumière à mesurer qui est émise de l'échantillon (S) et une section de cadre unitaire (25) qui maintient d'un seul tenant le filtre et la section de détection. Cette structure crée un système de mesure d'échantillon associé à une batterie solaire qui est apte à une mesure appropriée d'une caractéristique d'échantillon.
PCT/JP2012/072763 2011-11-02 2012-09-06 Système de mesure d'échantillon associé à une batterie solaire WO2013065398A1 (fr)

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JP2011-241006 2011-11-02
JP2011241006A JP5848583B2 (ja) 2011-11-02 2011-11-02 太陽電池関連試料測定システム

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JP6104112B2 (ja) * 2013-09-18 2017-03-29 株式会社アイテス 太陽電池検査装置、及び太陽電池検査方法
JP6565112B2 (ja) * 2015-02-13 2019-08-28 国立研究開発法人産業技術総合研究所 太陽電池の評価方法及び評価装置
CN106198407B (zh) * 2016-07-07 2019-03-22 中国科学院半导体研究所 一种样品空间扫描及定位装置
JP6411683B1 (ja) * 2017-10-16 2018-10-24 株式会社デンケン 太陽電池検査装置及びカメラ付きソーラーシミュレータ

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2007088419A (ja) * 2005-06-17 2007-04-05 Nisshinbo Ind Inc ソーラシミュレータによる測定方法
WO2007129585A1 (fr) * 2006-05-02 2007-11-15 National University Corporation NARA Institute of Science and Technology Procédé et dispositif d'évaluation d'une cellule solaire et utilisation de la cellule solaire
JP2009512198A (ja) * 2005-10-11 2009-03-19 ビーティー イメージング ピーティーワイ リミテッド 間接バンドギャップ半導体構造を検査する方法およびシステム
JP2010278192A (ja) * 2009-05-28 2010-12-09 Lasertec Corp 太陽電池評価装置

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2007088419A (ja) * 2005-06-17 2007-04-05 Nisshinbo Ind Inc ソーラシミュレータによる測定方法
JP2009512198A (ja) * 2005-10-11 2009-03-19 ビーティー イメージング ピーティーワイ リミテッド 間接バンドギャップ半導体構造を検査する方法およびシステム
WO2007129585A1 (fr) * 2006-05-02 2007-11-15 National University Corporation NARA Institute of Science and Technology Procédé et dispositif d'évaluation d'une cellule solaire et utilisation de la cellule solaire
JP2010278192A (ja) * 2009-05-28 2010-12-09 Lasertec Corp 太陽電池評価装置

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