WO2013065126A1 - Actionneur - Google Patents

Actionneur Download PDF

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Publication number
WO2013065126A1
WO2013065126A1 PCT/JP2011/075185 JP2011075185W WO2013065126A1 WO 2013065126 A1 WO2013065126 A1 WO 2013065126A1 JP 2011075185 W JP2011075185 W JP 2011075185W WO 2013065126 A1 WO2013065126 A1 WO 2013065126A1
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WO
WIPO (PCT)
Prior art keywords
drive coil
coil
magnetic field
power supply
actuator
Prior art date
Application number
PCT/JP2011/075185
Other languages
English (en)
Japanese (ja)
Inventor
友崇 矢部
Original Assignee
パイオニア株式会社
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by パイオニア株式会社 filed Critical パイオニア株式会社
Priority to JP2012503828A priority Critical patent/JP4968760B1/ja
Priority to PCT/JP2011/075185 priority patent/WO2013065126A1/fr
Publication of WO2013065126A1 publication Critical patent/WO2013065126A1/fr

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Classifications

    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
    • G02B26/0816—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements
    • G02B26/0833—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD
    • G02B26/085—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD the reflecting means being moved or deformed by electromagnetic means
    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02K—DYNAMO-ELECTRIC MACHINES
    • H02K41/00—Propulsion systems in which a rigid body is moved along a path due to dynamo-electric interaction between the body and a magnetic field travelling along the path
    • H02K41/02—Linear motors; Sectional motors
    • H02K41/03—Synchronous motors; Motors moving step by step; Reluctance motors
    • H02K41/031—Synchronous motors; Motors moving step by step; Reluctance motors of the permanent magnet type
    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02K—DYNAMO-ELECTRIC MACHINES
    • H02K21/00—Synchronous motors having permanent magnets; Synchronous generators having permanent magnets
    • H02K21/02—Details
    • H02K21/04—Windings on magnets for additional excitation ; Windings and magnets for additional excitation
    • H02K21/042—Windings on magnets for additional excitation ; Windings and magnets for additional excitation with permanent magnets and field winding both rotating

Definitions

  • the present invention relates to a technical field of an actuator such as a MEMS scanner that drives a movable part provided with, for example, a mirror.
  • a MEMS scanner used for scanning a laser beam As such a MEMS device, a MEMS scanner used for scanning a laser beam is known.
  • a two-axis drive type MEMS scanner includes a movable plate, a frame-like movable inner frame surrounding the movable plate, and an inner torsion that pivotally supports the movable plate with respect to the movable inner frame.
  • a mirror is formed at the center of the surface of the movable plate, and a drive coil is formed around the mirror.
  • a driving coil is also formed on the movable inner frame.
  • a pair of permanent magnets for generating a static magnetic field for each drive coil is disposed on the fixed outer frame.
  • an electromagnetic driving force (Lorentz force) is generated in the driving coil by supplying a control current to the two driving coils. Therefore, the movable inner frame and the movable plate on which the driving coil is formed are moved. As a result, the movable plate can be driven biaxially.
  • a driving control current is supplied to the driving coil formed on the movable plate from a power source formed outside the movable plate, for example, via a wiring formed on the inner torsion bar or the movable inner frame. It is common.
  • the drive coil formed on the movable inner frame receives a drive control current from a power source formed outside the movable inner frame, for example, via a wiring formed on the outer torsion bar or the fixed outer frame. It is common to be supplied.
  • the driving coil is formed on the movable plate and the wiring is formed on the inner torsion bar (or the driving coil is formed on the movable inner frame and the wiring is formed on the outer torsion bar).
  • a drive coil is formed only on one of the movable inner frame and the movable plate, and an alternating current including a high frequency component and a low frequency component is supplied to the drive coil.
  • a MEM scanner that realizes two-axis driving of the movable plate has been proposed.
  • the driving coil is formed only on the movable inner frame
  • the driving of the movable plate is controlled by the slight vibration generated in the movable inner frame. Therefore, compared with a MEMS scanner in which a driving coil is directly formed on a movable plate, the accuracy of driving the movable plate (and also the accuracy of driving a movable inner frame that controls the driving of the movable plate is also improved. ) A new technical problem will arise that will worsen.
  • the driving coil is formed only on the movable plate
  • the driving of the movable inner frame is controlled by the slight vibration generated on the movable plate.
  • the first torsion bar and the second torsion bar as described above. It becomes necessary to form wiring on both sides of the bar. However, as described above, it is preferable not to form the wiring on the inner torsion bar or the outer torsion bar from the viewpoint of design flexibility.
  • the movable plate (or any movable part) is not limited to the MEMS scanner that swings the movable plate (or any movable part) so as to rotate. The same can occur for a MSMS actuator that is swung.
  • the present invention has been made in view of the above-described conventional problems, for example, and provides an actuator capable of swinging a movable part with relatively high accuracy while improving the degree of freedom of design, for example. Is an issue.
  • the first actuator includes a movable part, a support part surrounding the movable part, and a torsion bar connecting the movable part and the support part so that the movable part can swing.
  • a drive coil that is formed on the movable part and does not extend outside the movable part, and a power supply coil that is formed on the support part and is supplied with a control current for swinging the movable part
  • a magnetic field application unit that applies a static magnetic field to the drive coil.
  • the second actuator has a movable part, an inner support part that surrounds the movable part, and an inner side that connects the movable part and the inner support part so that the movable part can swing.
  • a torsion bar, an outer support portion that surrounds the inner support portion, an outer torsion bar that connects the inner support portion and the outer support portion so that the inner support portion can swing, and the movable portion are formed.
  • a drive coil that does not extend to the outside of the movable part, and a power supply coil that is formed on the inner support part and is supplied with a control current for swinging the movable part and the inner support part.
  • a third actuator comprising a first magnetic field applying unit that applies a first static magnetic field to the drive coil and a second magnetic field applying unit that applies a second static magnetic field to the power supply coil.
  • a movable part an inner support part surrounding the movable part, an inner torsion bar connecting the movable part and the inner support part so that the movable part can swing, and an outer support part surrounding the inner support part
  • an outer torsion bar that connects the inner support portion and the outer support portion so that the inner support portion can swing, and is formed on the movable portion and does not extend outside the movable portion.
  • the actuator according to the first embodiment includes a movable part, a support part surrounding the movable part, a torsion bar that connects the movable part and the support part so that the movable part can swing, and a movable part.
  • a drive coil that is formed and does not extend outside the movable part; a power supply coil that is formed in the support part and that is supplied with a control current for swinging the movable part; and the drive coil And a magnetic field applying unit for applying a static magnetic field.
  • the movable part suspended by the torsion bar swings.
  • the movable portion may be swung so as to rotate about the direction in which the torsion bar extends as a central axis, or along the direction in which the torsion bar extends or in the direction intersecting with the direction in which the torsion bar extends. You may swing to move along.
  • the torsion bar may directly connect the movable part and the support part.
  • the torsion bar may indirectly connect the movable part and the support part (in other words, with an arbitrary member interposed therebetween).
  • a drive coil is formed on the movable part.
  • the drive coil may be formed on the surface of the movable part, or may be formed so as to be embedded in the movable part.
  • the drive coil does not extend to the outside of the movable part. In other words, the drive coil extends only on or within the movable part. In other words, the drive coil is not formed on the torsion bar or the support portion.
  • a power supply coil is formed in the support portion.
  • a control current for swinging the movable part is supplied to the power supply coil.
  • the control current is supplied to the power coil from a power source provided in the actuator or prepared outside the actuator.
  • the drive coil does not extend to the outside of the movable part. Therefore, the power supply coil is not electrically connected to the drive coil. For this reason, the control current is not supplied to the drive coil.
  • the power supply coil (or the wiring connected to the power supply coil) is not formed on the torsion bar as long as the necessity of extending the power supply coil toward the drive coil is small or not.
  • the movable part swings as follows. First, a control current is supplied to the power supply coil. As a result, a magnetic field (or lines of magnetic force) is generated from the power supply coil in accordance with Ampere's law. Part or all of the magnetic field generated from the power supply coil also reaches the movable part surrounded by the support part (in other words, surrounded by the power supply coil formed on the support part). That is, part or all of the magnetic field generated from the power supply coil also reaches the drive coil formed in the movable part.
  • an induced current due to the magnetic field generated from the power supply coil (that is, a current due to electromagnetic induction caused by the magnetic field generated from the power supply coil) is generated in the drive coil.
  • a static magnetic field is applied to the drive coil by a magnetic field application unit. Therefore, a force (that is, a Lorentz force) is generated in the drive coil due to electromagnetic interaction between the static magnetic field applied from the magnetic field application unit and the induced current generated in the drive coil.
  • the movable part in which the drive coil is formed swings due to the Lorentz force resulting from the electromagnetic interaction between the static magnetic field applied from the magnetic field application part and the induced current generated in the drive coil.
  • the drive coil can be formed on the movable part to be moved. Therefore, the movable part can be swung (that is, driven) with relatively high accuracy.
  • the movable part is swayed using the induced current generated in the drive coil (in other words, using the power or current wirelessly transmitted from the power coil as the power source). Therefore, the drive coil does not need to extend outside the movable part. Therefore, it is not necessary to form wiring connected to the drive coil on the torsion bar. Therefore, the structure of the actuator is simplified, and the manufacturing process of the actuator is also simplified. For this reason, it is possible to swing (i.e., drive) the movable portion with relatively high accuracy while relatively increasing the degree of freedom in designing the actuator.
  • an induced current is generated in the drive coil when the magnetic field generated from the power supply coil passes through the drive coil, and the movable part is applied from the magnetic field application part.
  • the magnetic field is oscillated by electromagnetic interaction between the static magnetic field generated and the induced current generated in the drive coil.
  • the movable part swings due to the Lorentz force resulting from the electromagnetic interaction between the static magnetic field applied from the magnetic field applying part and the induced current generated in the drive coil. Therefore, the various effects described above can be suitably enjoyed.
  • the drive coil and the power supply coil have a positional relationship in which a magnetic field generated from the power supply coil passes through the drive coil when the control current is supplied. It is formed.
  • part or all of the magnetic field generated from the power supply coil suitably reaches the drive coil formed in the movable part.
  • an induced current due to the magnetic field generated from the power supply coil is suitably generated in the drive coil.
  • the movable part is suitably swung by the Lorentz force resulting from the electromagnetic interaction between the static magnetic field applied from the magnetic field application part and the induced current generated in the drive coil. Therefore, the various effects described above can be suitably enjoyed.
  • the movable part includes a magnetic material.
  • an induced current caused by a magnetic field generated from the power supply coil is likely to be generated in the drive coil formed in the movable part.
  • a larger induced current is likely to be generated in the drive coil formed in the movable part.
  • a larger Lorentz force is likely to be generated in the drive coil. Therefore, the movable part can be moved far efficiently.
  • a plurality of the power supply coils are formed in the support portion.
  • the magnetic field generated from the plurality of power supply coils can easily pass through the drive coil.
  • one power supply coil includes a plurality of power supply coils.
  • a state including a coil portion is also assumed.
  • the actuator of the second embodiment includes a movable part, an inner support part that surrounds the movable part, an inner torsion bar that connects the movable part and the inner support part so that the movable part can swing, An outer support portion that surrounds the inner support portion, an outer torsion bar that connects the inner support portion and the outer support portion so that the inner support portion can swing, and a movable portion that is formed on the movable portion.
  • a drive coil that does not extend outside the power supply unit, a power supply coil that is formed on the inner support part and that is supplied with a control current for swinging the movable part and the inner support part, and the drive coil.
  • a first magnetic field applying unit that applies a first static magnetic field
  • a second magnetic field applying unit that applies a second static magnetic field to the power supply coil.
  • the movable part suspended by the inner torsion bar swings.
  • the movable portion may be swung so as to rotate about the direction in which the inner torsion bar extends, or along the direction in which the inner torsion bar extends or in the direction in which the inner torsion bar extends. You may swing so that it may move along the crossing direction.
  • the inner torsion bar may directly connect the movable part and the inner support part.
  • the inner torsion bar may indirectly connect the movable portion and the inner support portion (in other words, with an arbitrary member interposed therebetween).
  • the inner support portion suspended by the outer torsion bar swings.
  • the inner support portion may be swung so as to rotate about the direction in which the outer torsion bar extends, or the direction in which the outer torsion bar extends or the direction in which the outer torsion bar extends. You may swing so that it may move along the direction which intersects.
  • the outer torsion bar may directly connect the inner support portion and the outer support portion.
  • an outer side torsion bar may connect an inner side support part and an outer side support part indirectly (in other words, interposing any member in between).
  • a drive coil is formed on the movable part.
  • the drive coil may be formed on the surface of the movable part, or may be formed so as to be embedded in the movable part.
  • the drive coil does not extend to the outside of the movable part. In other words, the drive coil extends only on or within the movable part. In other words, the drive coil is not formed on the inner torsion bar, the inner support part, the outer torsion bar, or the outer support part.
  • a power supply coil is formed on the inner support portion.
  • a control current for swinging both the movable part and the inner support part is supplied to the power supply coil.
  • the control current is supplied to the power coil from a power source provided in the actuator or prepared outside the actuator.
  • the drive coil does not extend to the outside of the movable part. Therefore, the power supply coil is not electrically connected to the drive coil. For this reason, the control current is not supplied to the drive coil.
  • the power supply coil (or the wiring connected to the power supply coil) is not formed on the inner torsion bar as long as the necessity of extending the power supply coil toward the drive coil is small or not.
  • the movable part swings as follows. First, a control current is supplied to the power supply coil. On the other hand, the second static magnetic field is applied to the power supply coil by the second magnetic field application unit. Therefore, a force (that is, a Lorentz force) is generated in the power supply coil due to electromagnetic interaction between the second static magnetic field applied from the second magnetic field application unit and the control current supplied to the power supply coil. As a result, the inner support portion on which the power supply coil is formed swings due to the Lorentz force resulting from the electromagnetic interaction between the second static magnetic field applied from the second magnetic field application portion and the control current supplied to the power supply coil. To do.
  • the movable part is connected to the inner support part via the inner torsion bar. For this reason, as the inner support portion swings, the movable portion also swings.
  • a magnetic field (lines of magnetic force) is generated from the power supply coil according to Ampere's law.
  • Part or all of the magnetic field generated from the power supply coil also reaches the movable part surrounded by the inner support part (in other words, surrounded by the power supply coil formed on the inner support part). That is, part or all of the magnetic field generated from the power supply coil also reaches the drive coil formed in the movable part.
  • an induced current due to the magnetic field generated from the power supply coil (that is, a current due to electromagnetic induction caused by the magnetic field generated from the power supply coil) is generated in the drive coil.
  • a first static magnetic field is applied to the drive coil by the first magnetic field application unit. Therefore, a force (that is, Lorentz force) resulting from electromagnetic interaction between the first static magnetic field applied from the first magnetic field application unit and the induced current generated in the drive coil is generated in the drive coil.
  • Lorentz force a force resulting from electromagnetic interaction between the first static magnetic field applied from the first magnetic field application unit and the induced current generated in the drive coil.
  • the drive coil is formed on the movable part to be swung, and the power supply coil (that is, substantially acts as the drive coil) on the inner support part to be swung.
  • Power supply coil can be formed. Therefore, both the movable part and the inner support part can be swung (that is, driven) with relatively high accuracy.
  • the movable part is swung using the induced current generated in the drive coil (in other words, using the power or current wirelessly transmitted from the power supply coil as the power source). Therefore, the drive coil does not need to extend outside the movable part. Therefore, it is not necessary to form the wiring connected to the drive coil on the inner torsion bar. Therefore, the structure of the actuator is simplified, and the manufacturing process of the actuator is also simplified. For this reason, it is possible to swing (i.e., drive) the movable portion with relatively high accuracy while relatively increasing the degree of freedom in designing the actuator.
  • a magnetic field generated from the power supply coil passes through the drive coil, so that an induced current is generated in the drive coil, and the movable part is configured to be the first magnetic field application part.
  • the inner support portion swings by an electromagnetic interaction between the first static magnetic field applied from the first induction magnetic field and the induced current generated in the drive coil, and the second static magnetic field applied from the second magnetic field application portion It swings due to electromagnetic interaction with the control current supplied to the power supply coil.
  • the movable portion swings due to the Lorentz force resulting from the electromagnetic interaction between the first static magnetic field applied from the first magnetic field application unit and the induced current generated in the drive coil.
  • the inner support portion swings due to the Lorentz force resulting from the electromagnetic interaction between the second static magnetic field applied from the second magnetic field application unit and the control current supplied to the power supply coil. Therefore, the various effects described above can be suitably enjoyed.
  • the drive coil and the power supply coil have a positional relationship in which a magnetic field generated from the power supply coil passes through the drive coil when the control current is supplied. It is formed.
  • part or all of the magnetic field generated from the power supply coil suitably reaches the drive coil formed in the movable part.
  • an induced current due to the magnetic field generated from the power supply coil is suitably generated in the drive coil.
  • the movable part suitably swings due to the Lorentz force resulting from the electromagnetic interaction between the first static magnetic field applied from the first magnetic field application part and the induced current generated in the drive coil. Therefore, the various effects described above can be suitably enjoyed.
  • control current is superimposed with a current component for swinging the movable portion and a current component for swinging the inner support portion.
  • the movable part includes a magnetic material.
  • an induced current caused by a magnetic field generated from the power supply coil is likely to be generated in the drive coil formed in the movable part.
  • a larger induced current is likely to be generated in the drive coil formed in the movable part.
  • a larger Lorentz force is likely to be generated in the drive coil. Therefore, the movable part can be moved far efficiently.
  • a plurality of the power supply coils are formed on the inner support portion.
  • the magnetic field generated from the plurality of power supply coils can easily pass through the drive coil.
  • one power supply coil includes a plurality of power supply coils.
  • a state including a coil portion is also assumed.
  • the actuator of the third embodiment includes a movable part, an inner support part that surrounds the movable part, an inner torsion bar that connects the movable part and the inner support part so that the movable part can swing, An outer support portion that surrounds the inner support portion, an outer torsion bar that connects the inner support portion and the outer support portion so that the inner support portion can swing, and a movable portion that is formed on the movable portion.
  • a first drive coil that does not extend outside the part
  • a second drive coil that is formed on the inner support part, and that does not extend outside the inner support part, and is formed on the outer support part.
  • a power supply coil to which a control current for swinging the movable part and the inner support part is supplied; a first magnetic field application part for applying a first static magnetic field to the first drive coil; and the second drive coil. 2nd Shizu And a second magnetic field application unit for applying the field.
  • the movable part suspended by the inner torsion bar swings.
  • the movable portion may be swung so as to rotate about the direction in which the inner torsion bar extends, or along the direction in which the inner torsion bar extends or in the direction in which the inner torsion bar extends. You may swing so that it may move along the crossing direction.
  • the inner torsion bar may directly connect the movable part and the inner support part.
  • the inner torsion bar may indirectly connect the movable portion and the inner support portion (in other words, with an arbitrary member interposed therebetween).
  • the inner support portion suspended by the outer torsion bar swings.
  • the inner support portion may be swung so as to rotate about the direction in which the outer torsion bar extends, or the direction in which the outer torsion bar extends or the direction in which the outer torsion bar extends. You may swing so that it may move along the direction which intersects.
  • the outer torsion bar may directly connect the inner support portion and the outer support portion.
  • an outer side torsion bar may connect an inner side support part and an outer side support part indirectly (in other words, interposing any member in between).
  • a first drive coil is formed on the movable part.
  • the 1st drive coil may be formed on the surface of a movable part, and may be formed so that it may be embedded inside a movable part.
  • the first drive coil does not extend to the outside of the movable part. In other words, the first drive coil extends only on or within the movable part. In other words, the first drive coil is not formed on the inner torsion bar, the inner support part, the outer torsion bar, or the outer support part.
  • a second drive coil is formed on the inner support portion.
  • the 2nd drive coil may be formed on the surface of an inner side support part, and may be formed so that it may be embedded inside an inner side support part.
  • the second drive coil does not extend to the outside of the inner support portion. In other words, the second drive coil extends only on or within the inner support. In other words, the second drive coil is not formed on the movable part, the inner torsion bar, the outer torsion bar, or the outer support part.
  • a power supply coil is formed on the outer support portion.
  • a control current for swinging both the movable part and the inner support part is supplied to the power supply coil.
  • the control current is supplied to the power coil from a power source provided in the actuator or prepared outside the actuator.
  • the first drive coil does not extend outside the movable part.
  • the second drive coil does not extend to the outside of the inner support portion. Therefore, the power supply coil is not electrically connected to both the first drive coil and the second drive coil. For this reason, the control current is not supplied to each of the first drive coil and the second drive coil.
  • the power supply coil (or the wiring connected to the power supply coil) is also connected to the inner torsion bar and the outer torsion bar. It is preferably not formed on the bar.
  • the movable part swings as follows. First, a control current is supplied to the power supply coil. A magnetic field (or lines of magnetic force) is generated from the power supply coil in accordance with Ampere's law. Part or all of the magnetic field generated from the power supply coil also reaches the movable part surrounded by the outer support part (in other words, surrounded by the power supply coil formed on the outer support part). That is, part or all of the magnetic field generated from the power supply coil also reaches the first drive coil formed in the movable part. As a result, an induced current due to the magnetic field generated from the power supply coil (that is, a current due to electromagnetic induction caused by the magnetic field generated from the power supply coil) is generated in the first drive coil.
  • a force that is, a Lorentz force
  • the movable part in which the first drive coil is formed is caused by the Lorentz force resulting from the electromagnetic interaction between the first static magnetic field applied from the first magnetic field application part and the induced current generated in the first drive coil. Fluctuate.
  • a part or all of the magnetic field generated from the power supply coil reaches the inner support portion surrounded by the outer support portion (in other words, surrounded by the power supply coil formed on the outer support portion). That is, part or all of the magnetic field generated from the power supply coil also reaches the second drive coil formed on the inner support portion.
  • an induced current caused by the magnetic field generated from the power supply coil (that is, a current due to electromagnetic induction caused by the magnetic field generated from the power supply coil) is generated in the second drive coil.
  • a second static magnetic field is applied to the second drive coil by the second magnetic field application unit.
  • a force that is, a Lorentz force
  • the inner support portion on which the second drive coil is formed is far away by the Lorentz force due to the electromagnetic interaction between the second static magnetic field applied from the second magnetic field application portion and the induced current generated in the drive coil.
  • the movable part is connected to the inner support part via the inner torsion bar. For this reason, as the inner support portion swings, the movable portion also swings.
  • the first drive coil can be formed on the movable part to be swung, and the second drive coil can be formed on the inner support part to be swung. Therefore, both the movable part and the inner support part can be swung (that is, driven) with relatively high accuracy.
  • the movable part is moved far away using the induced current generated in the first drive coil (in other words, using the power or current wirelessly transmitted from the power coil as the power source). Since the first drive coil can be moved, the first drive coil does not have to extend outside the movable portion. Therefore, it is not necessary to form the wiring connected to the first drive coil on the inner torsion bar. Therefore, the structure of the actuator is simplified, and the manufacturing process of the actuator is also simplified. For this reason, it is possible to swing (i.e., drive) the movable portion with relatively high accuracy while relatively increasing the degree of freedom in designing the actuator.
  • the inner support portion is further disengaged using the induced current generated in the second drive coil (in other words, using the power or current wirelessly transmitted from the power coil as the power source). Since the second drive coil can be moved, the second drive coil need not extend to the outside of the inner support portion. Therefore, it is not necessary to form the wiring connected to the second drive coil in the inner torsion bar or the outer torsion bar. Therefore, the structure of the actuator is simplified, and the manufacturing process of the actuator is also simplified. For this reason, the inner support portion can be swung (that is, driven) with relatively high accuracy while relatively increasing the degree of freedom in designing the actuator.
  • a magnetic field generated from the power supply coil passes through the first drive coil and the second drive coil, so that the first drive coil and the second drive coil Inductive currents are generated respectively, and the movable part swings due to electromagnetic interaction between the first static magnetic field applied from the first magnetic field applying part and the induced current generated in the first drive coil, The inner support part swings due to electromagnetic interaction between the second static magnetic field applied from the second magnetic field application part and the induced current generated in the second drive coil.
  • the movable part is far away by the Lorentz force caused by the electromagnetic interaction between the first static magnetic field applied from the first magnetic field application part and the induced current generated in the first drive coil.
  • the inner support portion swings due to Lorentz force caused by electromagnetic interaction between the second static magnetic field applied from the second magnetic field application unit and the induced current generated in the second drive coil. Therefore, the various effects described above can be suitably enjoyed.
  • the first drive coil, the second drive coil, and the power supply coil are such that a magnetic field generated in the power supply coil when the control current is supplied is generated in the first drive coil. And a positional relationship passing through both the inside and the inside of the second drive coil.
  • part or all of the magnetic field generated from the power supply coil suitably reaches the first drive coil formed on the movable part and the second drive coil formed on the inner support part.
  • an induced current caused by the magnetic field generated from the power supply coil is suitably generated in the first drive coil and the second drive coil.
  • the movable part suitably swings by the Lorentz force resulting from the electromagnetic interaction between the first static magnetic field applied from the first magnetic field application part and the induced current generated in the first drive coil.
  • the inner support portion is suitably swung by a Lorentz force caused by electromagnetic interaction between the second static magnetic field applied from the second magnetic field application unit and the induced current generated in the second drive coil. Therefore, the various effects described above can be suitably enjoyed.
  • a current component for swinging the movable portion and a current component for swinging the inner support portion are superimposed on the control current.
  • At least one of the movable part and the inner support part includes a magnetic material.
  • the first drive coil formed in the movable part is connected to the power coil from the case where the movable part does not include the magnetic material.
  • An induced current due to the generated magnetic field is likely to be generated.
  • the movable part includes a magnetic material
  • a larger induced current is generated in the first drive coil formed in the movable part than when the movable part does not include a magnetic material. It becomes easy.
  • the movable part includes a magnetic material, a larger Lorentz force is more likely to be generated in the first drive coil than when the movable part does not include a magnetic material. Therefore, the movable part can be moved far efficiently.
  • the second drive coil formed on the inner support portion includes a power supply coil as compared with a case where the inner support portion does not include a magnetic material.
  • An induced current due to the generated magnetic field is likely to be generated.
  • the inner support portion includes a magnetic material
  • a larger induced current is generated in the second drive coil formed on the inner support portion than when the inner support portion does not include a magnetic material. Is likely to occur.
  • the inner support portion includes a magnetic material, a larger Lorentz force is more likely to be generated in the second drive coil than when the inner support portion does not include a magnetic material. Therefore, the inner support portion can be efficiently swung.
  • a plurality of the power supply coils are formed on the outer support portion.
  • the magnetic field generated from the plurality of power supply coils can easily pass through the first drive coil and the second drive coil.
  • one power supply coil includes a plurality of power supply coils.
  • a state including a coil portion is also assumed.
  • the movable part, the support part, the torsion bar, the drive coil, the power supply coil, and the magnetic field application part are provided.
  • the movable part, the inner support part, the inner torsion bar, the outer support part, the outer torsion bar, the drive coil, the power supply coil, the first magnetic field application part, Two magnetic field application units are provided.
  • the movable part, the inner support part, the inner torsion bar, the outer support part, the outer torsion bar, the first drive coil, the second drive coil, the power supply coil, A first magnetic field application unit and a second magnetic field application unit are provided. Therefore, it is possible to move the movable part with relatively high accuracy while improving the degree of freedom in design.
  • FIG. 1 is a plan view showing an example of the configuration of the actuator 100 of the first embodiment.
  • the actuator 100 is a planar electromagnetic drive actuator (that is, a MEMS scanner) used for scanning of laser light, for example.
  • the actuator 100 includes a support part 110, a movable part 120, a pair of torsion bars 130, and a pair of permanent magnets 160.
  • the support portion 110, the movable portion 120, and the pair of torsion bars 130 are integrally formed from a nonmagnetic substrate such as a silicon substrate, for example. That is, the support part 110, the movable part 120, and the pair of torsion bars 130 are formed by forming a gap by removing a part of a nonmagnetic substrate such as a silicon substrate. A MEMS process is preferably used as the formation process at this time. Instead of the silicon substrate, the support portion 110, the movable portion 120, and the pair of torsion bars 130 may be integrally formed from an arbitrary elastic material.
  • the support part 110 has a frame shape surrounding the movable part 120, and is connected to the movable part 120 by a pair of torsion bars 130.
  • a power supply coil 150 is formed on the surface of the support portion 110. However, the power supply coil 150 may be formed inside the support portion 110.
  • the power supply coil 150 is a coil that extends along the frame shape of the support portion 110.
  • the power supply coil 150 may be formed using, for example, a material having relatively high conductivity (for example, gold or copper).
  • the power supply coil 150 may be formed using a semiconductor manufacturing process such as a plating process or a sputtering method.
  • the power supply coil 150 may be embedded in a silicon substrate for forming the support part 110, the movable part 120, and the pair of torsion bars 130 using an implant method.
  • a control current is supplied to the power supply coil 150 from a power supply via a power supply terminal 151 formed on the support portion 110.
  • the control current is a control current for swinging the movable portion 120, and is typically an alternating current including a signal component having a frequency synchronized with the frequency at which the movable portion 120 swings.
  • the power source may be a power source provided in the actuator 100 itself, or may be a power source prepared outside the actuator 100.
  • the power supply coil 150 is not electrically or physically connected to the drive coil 140. Accordingly, the power coil 150 (or the wiring connected to the power coil 150) is not formed on the pair of torsion bars 130 as long as the necessity of the power coil 150 extending toward the movable portion 120 is small or not. Is preferred.
  • the movable part 120 is pivotally supported on the support part 110 by a pair of torsion bars 130 so as to be swingable.
  • a mirror (not shown) that reflects the laser light is formed on the surface of the movable portion 120.
  • a drive coil 140 is further formed on the surface of the movable portion 120. However, the drive coil 140 may be formed inside the movable part 120.
  • the drive coil 140 is, for example, a coil that extends so as to surround a mirror (not shown) formed on the surface of the movable part 120.
  • the drive coil 140 may be formed using, for example, a material having relatively high conductivity (for example, gold or copper).
  • the drive coil 140 may be formed using a semiconductor manufacturing process such as a plating process or a sputtering method.
  • the drive coil 140 may be embedded in a silicon substrate for forming the support part 110, the movable part 120, and the pair of torsion bars 130 using an implant method.
  • the drive coil 140 extends only within the movable part 120. In other words, the drive coil 140 does not extend toward the outside of the movable part 120. More specifically, the drive coil 140 is not formed on the pair of torsion bars 130 or the support portion 110. For this reason, the drive coil 140 is not electrically connected to the power supply coil 150. Alternatively, the drive coil 140 is not physically connected to the power supply coil 150. Accordingly, the control current is not directly supplied to the drive coil 140 via the power supply terminal 151.
  • the pair of torsion bars 130 connect the movable portion 120 and the support portion 110 so that the movable portion 120 can swing with respect to the support portion 110. Due to the elasticity of the pair of torsion bars 130, the movable portion 120 swings so as to rotate about an axis along the direction in which the pair of torsion bars 130 extends as a central axis (in other words, a rotation axis). That is, the movable unit 120 swings so as to rotate around the central axis with the axis along the left-right direction in FIG. 1 as the central axis.
  • the pair of permanent magnets 160 are attached to the outside of the support part 110.
  • the pair of permanent magnets 160 preferably have their magnetic poles appropriately set so that a predetermined static magnetic field can be applied to the drive coil 140.
  • a yoke may be added to the pair of permanent magnets 160 in order to increase the strength of the static magnetic field.
  • FIG. 2A is a plan view showing directions of currents and magnetic fields during the operation of the actuator 100 of the first embodiment
  • FIG. 2B is a cross-sectional view taken along the line II-II ′ of FIG. FIG.
  • a control current is supplied from the power supply to the power supply coil 150 via the power supply terminal 151. Is done.
  • a magnetic field (lines of magnetic force) is generated from the power supply coil 150 in accordance with Ampere's law (or right-handed screw law). Specifically, a magnetic field is generated around the power supply coil 150 along the clockwise direction with the power supply coil 150 as the central axis in the traveling direction of the control current.
  • a part or all of the magnetic field generated from the power supply coil 150 is surrounded by the support 110 on which the power supply coil 150 is formed. Part 120 is also reached. Then, a part or all of the magnetic field generated from the power supply coil 150 reaches the drive coil 140 formed in the movable portion 120 as shown in FIGS. 2 (a) and 2 (b).
  • the power supply coil 150 and the drive coil 140 allow part or all of the magnetic field generated from the power supply coil 150 to pass through the inside of the drive coil 140. It is preferable to be formed so as to have a positional relationship that can be achieved. In other words, the power supply coil 150 and the drive coil 140 preferably do not have a positional relationship in which the entire magnetic field generated from the power supply coil 150 cannot pass through the inside of the drive coil 140.
  • the range, strength, etc., to which the magnetic field generated from the power supply coil 150 reaches are (i) the size of the support unit 110, (ii) the size of the movable unit 120, and (iii) between the support unit 110 and the movable unit 120.
  • (Iv) Parameters of control current supplied to the power supply coil 150 for example, current value and voltage value
  • (v) Parameters of the power supply coil 150 itself for example, size and winding of the power supply coil 150)
  • the number of lines may vary. Further, it is preferable that the parameter of the control current supplied to the power supply coil 150 and the parameter of the power supply coil 150 itself are set to appropriate values that generate Lorentz force that appropriately swings the movable portion 120.
  • the intensity of the Lorentz force that appropriately swings the movable portion 120 is also affected by (vi) parameters of the drive coil 140 itself (for example, the size of the drive coil 140 and the number of windings).
  • parameters of the drive coil 140 itself for example, the size of the drive coil 140 and the number of windings.
  • the drive coil 140 and the power supply coil 150 are controlled in consideration of parameters of the control current supplied to the power supply coil 150, (v) parameters of the power supply coil 150 itself, (vi) parameters of the drive coil 140 itself, and the like. It is preferable that the magnetic field generated from the power supply coil 150 by supplying a current has a positional relationship of passing through the inside of the drive coil 140.
  • the drive coil 140 When a part or all of the magnetic field generated from the power supply coil 150 passes through the inside of the drive coil 140, the drive coil 140 has an induced current caused by the magnetic field generated from the power supply coil 150 (that is, a magnetic field generated from the power supply coil 150. Generated by the electromagnetic induction action). This is because, since the control current supplied to the power supply coil 150 is typically an alternating current, the strength and direction of the magnetic field generated from the power supply coil 150 also varies according to the alternating current.
  • a static magnetic field is applied to the drive coil 140 by a pair of permanent magnets 160.
  • a force (that is, Lorentz force) is generated in the drive coil 140 due to electromagnetic interaction between the static magnetic field applied from the pair of permanent magnets 160 and the induced current generated in the drive coil 140.
  • the movable part 120 in which the drive coil 140 is formed swings due to the Lorentz force resulting from the electromagnetic interaction between the static magnetic field applied from the pair of permanent magnets 160 and the induced current generated in the drive coil 140. . That is, the movable part 120 swings so as to rotate about the axis along the left and right direction in FIG.
  • the drive coil 140 can be formed on the movable portion 120 to be swayed. Therefore, the movable unit 120 is swung (that is, driven) with relatively high accuracy compared to the actuator of the comparative example that swings the movable unit 120 without forming the drive coil 140 in the movable unit 120. Can do.
  • the movable portion 120 is generated using the induced current generated in the drive coil 140 (in other words, using the power or current wirelessly transmitted from the power supply coil 150 as a power source). Can be swung. For this reason, the drive coil 140 does not have to extend outside the movable portion 120. Therefore, since the drive coil 140 does not extend to the outside of the movable part 120, it is not necessary to form a wire connected to the drive coil 140 in the pair of torsion bars 130 (and further the support part 110). In other words, according to the actuator 100 of the first embodiment, by supplying a control current to the power supply coil 150, the movable part 120 on which the drive coil 140 is formed can be moved far.
  • the control current need not be supplied.
  • the actuator 100 of the first embodiment it is not necessary to form the wiring connected to the drive coil 140 in the pair of torsion bars 130. Therefore, the structure of the actuator 100 is simplified and the manufacturing process of the actuator 100 is also simplified as compared with the actuator of the comparative example in which the wiring is formed on the pair of torsion bars 130. For this reason, it is the same as the actuator of the comparative example that relatively increases the degree of freedom in designing the actuator as compared with the actuator of the comparative example that moves the movable part 120 without forming the drive coil 140 in the movable part 120.
  • the movable part 120 can be swung (that is, driven) with relatively high accuracy while enjoying the effect accordingly.
  • the movable portion 120 is swung relatively accurately with respect to the actuator of the comparative example in which the wiring connected to the drive coil 140 is formed on the pair of torsion bars 130 while the drive coil 140 is formed on the movable portion 120.
  • the degree of freedom of design of the actuator 100 can be relatively increased while appropriately enjoying the same effect as that of the actuator of the comparative example that can be driven (that is, driven).
  • the durability (or failure resistance) of the actuator 100 can be improved as compared with the actuator of the comparative example in which the wiring connected to the drive coil 140 is formed on the pair of torsion bars 130.
  • the magnitude (for example, amplitude) of the induced current generated in the drive coil 140 is one of the important elements for causing the movable part 120 to move.
  • the movable portion 120 is made of a magnetic material (for example, a material including a ferromagnetic material or a relatively high permeability). High material).
  • a magnetic member made of a magnetic material may be embedded in the movable unit 120.
  • a magnetic film made of a magnetic material may be attached to the surface of the movable part 120.
  • an induced current due to a magnetic field generated from the power supply coil 150 is likely to be generated in the drive coil 140 formed in the movable portion 120.
  • an induced current having a larger amplitude is likely to be generated in the drive coil 140 formed in the movable part 120.
  • a larger Lorentz force is likely to be generated in the drive coil 140. Accordingly, the movable part 120 can be efficiently swung.
  • FIG. 3 is a modification showing an example of the configuration of the actuator 100a of the first modification. Note that the same reference numerals are assigned to the same components as those included in the actuator 100 of the first embodiment, and the detailed description thereof is omitted.
  • the actuator 100a according to the first modification is different from the actuator 100 according to the first embodiment in that the winding shape of the power supply coil 150a is different.
  • the power supply coil 150a includes one spiral winding.
  • the power supply coil 150 includes a plurality of single windings.
  • the power supply coil 150 has any shape other than the shape including one spiral winding shown in the first embodiment and the shape including a plurality of one winding shown in the first modification. Also good. More specifically, the power supply coil 150 has an arbitrary shape as long as the condition that part or all of the magnetic field generated from the power supply coil 150 can pass through the inside of the drive coil 140 is satisfied. Also good. Alternatively, the power supply coil 150 has a condition that part or all of the magnetic field generated from the power supply coil 150 can pass through the inside of the drive coil 140, and the power supply coil 150 itself and wiring connected to the power supply coil 150. May have an arbitrary shape so as not to be formed on the pair of torsion bars 130.
  • the drive coil 140 has an arbitrary shape (for example, a shape including one spiral winding or a shape including one or a plurality of windings). You may have.
  • the drive coil 140 has a condition that part or all of the magnetic field generated from the power supply coil 150 can pass through the inside of the drive coil 140 and that the drive coil 140 does not extend outside the movable portion 120. As long as the condition is satisfied, it may have an arbitrary shape.
  • FIG. 4 is a modification showing an example of the configuration of the actuator 100b of the second modification. Note that the same reference numerals are assigned to the same components as those included in the actuator 100 of the first embodiment, and the detailed description thereof is omitted.
  • the actuator 100b according to the second modification is different from the actuator 100 according to the first embodiment in that the winding shape of the power supply coil 150b is different.
  • the second modification is different from the actuator 100 of the first embodiment in that the power supply coil 150b includes a plurality of coil portions 151b.
  • the constituent elements other than the winding shape of the power coil 150b provided in the actuator 100b of the second modification may be the same as the constituent elements provided in the actuator 100 of the first embodiment.
  • the actuator 100b of the second modified example by forming the plurality of coil portions 151b, the magnetic field generated from the plurality of coil portions 151b can easily pass through the inside of the drive coil 140. At this time, it is preferable that the arrangement positions, shapes, sizes, and the like of the plurality of coil portions 151b are appropriately adjusted so that the magnetic fields generated from the plurality of coil portions 151b appropriately pass through the inside of the drive coil 140.
  • a plurality of power supply coils 150 may be formed.
  • FIG. 5 is a plan view showing an example of the configuration of the actuator 200 of the second embodiment.
  • special description is abbreviate
  • the actuator 200 of the second embodiment is a planar electromagnetic drive actuator (that is, a MEMS scanner) used for, for example, laser beam scanning.
  • the actuator 200 includes an outer support portion 211, an inner support portion 212, a movable portion 120, a pair of outer torsion bars 231, a pair of inner torsion bars 232, a pair of permanent magnets 160, and a pair of permanent magnets 260. It has.
  • the outer support portion 211, the inner support portion 212, the movable portion 120, the pair of outer torsion bars 231 and the pair of inner torsion bars 232 are integrally formed from a nonmagnetic substrate such as a silicon substrate, for example. That is, the outer support portion 211, the inner support portion 212, the movable portion 120, the pair of outer torsion bars 231 and the pair of inner torsion bars 232 have a gap by removing a part of a nonmagnetic substrate such as a silicon substrate. It is formed by being formed. A MEMS process is preferably used as the formation process at this time. Instead of the silicon substrate, the outer support part 211, the inner support part 212, the movable part 120, the pair of outer torsion bars 231 and the pair of inner torsion bars 232 may be integrally formed from an arbitrary elastic material. .
  • the outer support portion 211 has a frame shape surrounding the inner support portion 212, and is connected to the inner support portion 212 by a pair of outer torsion bars 231.
  • the inner support portion 212 is pivotally supported on the outer support portion 212 by a pair of outer torsion bars 231 so as to be swingable.
  • the inner support portion 212 has a frame shape surrounding the movable portion 120, and is connected to the movable portion 120 by a pair of inner torsion bars 232.
  • a power coil 150 is formed on the surface of the inner support portion 212. However, the power supply coil 150 may be formed inside the inner support portion 212.
  • the power supply coil 150 is a coil that extends along the frame shape of the inner support portion 212.
  • a control current is supplied to the power supply coil 150 from a power supply via a power supply terminal 151 formed on the outer support 211 and wiring formed on the outer support 211 and the outer torsion bar 231.
  • the control current is a control current for swinging the movable part 120 and the inner support part 212.
  • Such a control current is typically an alternating current in which a signal component having a frequency synchronized with the frequency at which the movable portion 120 swings and a signal component having a frequency synchronized with the frequency at which the inner support portion 212 swings are superimposed. Current.
  • the power supply coil 150 is not electrically or physically connected to the drive coil 140 as in the first embodiment. Therefore, as long as the power supply coil 150 does not need to extend toward the movable portion 120, the power supply coil 150 (or the wiring connected to the power supply coil 150) is not formed on the pair of inner torsion bars 232. preferable.
  • the movable part 120 is pivotally supported on the inner support part 212 by a pair of inner torsion bars 232 so as to be swingable.
  • a drive coil 140 is formed on the surface of the movable portion 120. Also in the second embodiment, like the first embodiment, the drive coil 140 extends only within the movable portion 120. More specifically, the drive coil 140 is not formed on the pair of inner torsion bars 232, the inner support part 212, the pair of outer torsion bars 231, or the outer support part 211.
  • the pair of outer torsion bars 231 connect the inner support portion 212 and the outer support portion 211 so that the inner support portion 212 can swing with respect to the outer support portion 211. Due to the elasticity of the pair of outer torsion bars 231, the inner support section 212 swings so as to rotate about the axis along the direction in which the pair of outer torsion bars 231 extends as a central axis (in other words, a rotation axis). That is, the inner support portion 212 swings so as to rotate around the central axis with the axis along the vertical direction in FIG. 5 as the central axis. At this time, the movable portion 120 is connected to the inner support portion 212 via a pair of inner torsion bars 232. Therefore, as the inner support portion 212 swings, the movable portion 120 substantially swings around the central axis about the axis along the vertical direction in FIG. 5 as the central axis. To do.
  • the pair of inner torsion bars 232 connect the movable part 120 and the inner support part 212 so that the movable part 120 can swing relative to the inner support part 212. Due to the elasticity of the pair of inner torsion bars 232, the movable part 120 swings so as to rotate about the axis along the direction in which the pair of inner torsion bars 232 extends as a central axis (in other words, a rotation axis). That is, the movable unit 120 swings so as to rotate around the central axis with the axis along the left-right direction in FIG. 5 as the central axis.
  • the biaxial drive of the movable part 120 is realized (that is, the movable part 120 is rotated about the axis along the vertical direction in FIG. 5 as the central axis, and the axis along the horizontal direction in FIG. 5 is rotated. Therefore, the direction in which the pair of outer torsion bars 231 extends is preferably different from the direction in which the pair of inner torsion bars 232 extends. Typically, the direction in which the pair of outer torsion bars 231 extends is preferably orthogonal to the direction in which the pair of inner torsion bars 232 extends.
  • the pair of permanent magnets 160 are attached to the outside of the outer support portion 211.
  • the pair of permanent magnets 160 preferably have their magnetic poles appropriately set so that a predetermined static magnetic field can be applied to the drive coil 140.
  • a yoke may be added to the pair of permanent magnets 160 in order to increase the strength of the static magnetic field.
  • the pair of permanent magnets 260 are attached to the outside of the outer support portion 211.
  • the pair of permanent magnets 260 preferably have their magnetic poles appropriately set so that a predetermined static magnetic field can be applied to the power supply coil 150. Note that a yoke may be added to the pair of permanent magnets 260 in order to increase the strength of the static magnetic field.
  • a static magnetic field is applied to the power supply coil 150 by a pair of permanent magnets 260.
  • the power coil 150 generates a force (that is, Lorentz force) due to electromagnetic interaction between the static magnetic field applied from the pair of permanent magnets 260 and the control current supplied to the power coil 150.
  • the inner support part 212 on which the power supply coil 150 is formed is far away by Lorentz force due to electromagnetic interaction between the static magnetic field applied from the pair of permanent magnets 260 and the control current supplied to the power supply coil 150.
  • the movable portion 120 is connected to the inner support portion 212 via a pair of inner torsion bars 232. Therefore, as the inner support portion 212 swings, the movable portion 120 substantially swings around the central axis about the axis along the vertical direction in FIG. 5 as the central axis. To do.
  • a magnetic field (lines of magnetic force) is generated from the power supply coil 150. Part or all of the magnetic field generated from the power supply coil 150 reaches the drive coil 140 formed in the movable portion 120.
  • the power supply coil 150 and the drive coil 140 allow part or all of the magnetic field generated from the power supply coil 150 to pass through the inside of the drive coil 140. It is preferable that they are formed so as to have a positional relationship capable of The range, strength, etc., to which the magnetic field generated from the power supply coil 150 reaches are as follows: (i) the size of the inner support portion 212; (ii) the size of the movable portion 120; And (iv) a parameter of a control current supplied to the power supply coil 150, and (v) a parameter of the power supply coil 150 itself.
  • the size of the inner support portion 212 (i) the size of the movable portion 120, and (iii) the inner support portion 212 and the movable portion 120.
  • parameters of the control current supplied to the power supply coil 150 (v) parameters of the power supply coil 150 itself, (vi) parameters of the drive coil 140 itself, etc.
  • the drive coil 140 and the power supply coil 150 are preferably formed such that a magnetic field generated from the power supply coil 150 passes through the inside of the drive coil 140 when a control current is supplied.
  • the drive coil 140 is formed on the movable portion 120 to be swung, and the power supply coil 150 (that is, substantially the inner support portion 212 to be swung). Can form a power coil 150) that can also act as a drive coil 140. Therefore, compared with the actuator of the comparative example in which the movable part 120 is swayed (specifically, driven in two axes) without forming the drive coil 140 in either the movable part 120 or the inner support part 212, The movable part 120 and the inner support part 212 can be swung (that is, driven) with relatively high accuracy. As a result, the accuracy of the biaxial drive of the movable part 120 can be relatively improved.
  • the movable part 120 is used by using the induced current generated in the drive coil 140 (in other words, using power or current wirelessly transmitted from the power supply coil 150 as a power source). Can be swung. For this reason, the drive coil 140 does not have to extend outside the movable portion 120. Therefore, it is not necessary to form wiring connected to the drive coil 140 in the pair of inner torsion bars 232 (further, the inner support portion 212, the pair of outer torsion bars 231 and the outer support portion 211).
  • the movable portion 120 on which the drive coil 140 is formed can be moved by supplying a control current to the power supply coil 150, Therefore, the control current need not be supplied.
  • the wiring connected to the drive coil 140 need not be formed on the pair of inner torsion bars 232. Therefore, the structure of the actuator 200 is simplified and the manufacturing process of the actuator 200 is also simplified as compared with the actuator of the comparative example in which the wiring is formed on the pair of inner torsion bars 230.
  • the actuator of the comparative example that relatively increases the degree of freedom in designing the actuator as compared with the actuator of the comparative example that moves the movable part 120 without forming the drive coil 140 in the movable part 120.
  • the movable part 120 can be swung (that is, driven) with relatively high accuracy while enjoying the effect accordingly.
  • the movable portion 120 is relatively highly accurate.
  • the degree of freedom in designing the actuator 200 can be relatively enhanced while appropriately enjoying the same effect as the actuator of the comparative example that can be moved (that is, driven).
  • the durability (or failure resistance) of the actuator 200 can be improved as compared with the actuator of the comparative example in which the wiring connected to the drive coil 140 is formed on the pair of inner torsion bars 232.
  • the movable part 120 may contain a magnetic material, the shape of the power supply coil 150 (or the drive coil 140) may be changed, or the power supply coil 150 may have a plurality of coil portions. 151b may be provided.
  • FIG. 6 is a modification showing an example of the configuration of the actuator 200a of the first modification. Note that the same reference numerals are assigned to the same components as those included in the actuator 200 of the second embodiment, and detailed description thereof is omitted.
  • the actuator 200a of the first modification is different from the actuator 200 of the second embodiment in that the arrangement positions of the pair of permanent magnets 160 are different.
  • the pair of permanent magnets 160 are disposed further inside the inner support portion 212 so as to be adjacent to the movable portion 120.
  • the arrangement positions of the pair of permanent magnets 160 may be positions other than the arrangements shown in FIGS. More specifically, the pair of permanent magnets 160 may be disposed at any position as long as a static magnetic field of an appropriate direction and an appropriate intensity can be applied to the drive coil 140. In the first embodiment, it goes without saying that the arrangement positions of the pair of permanent magnets 160 may be appropriately changed.
  • the pair of permanent magnets 160 may be arranged at arbitrary positions. More specifically, the pair of permanent magnets 260 may be disposed at any position as long as a static magnetic field having an appropriate direction and an appropriate strength can be applied to the power supply coil 150.
  • FIG. 7 is a plan view showing an example of the configuration of the actuator 300 of the third embodiment. Note that the description of the same components as those of the actuator 100 of the first embodiment and the actuator 200 of the second embodiment is omitted.
  • the actuator 300 of the third embodiment is a planar electromagnetic drive actuator (that is, a MEMS scanner) used for, for example, scanning of laser light.
  • the actuator 300 includes an outer support section 211, an inner support section 212, a movable section 120, a pair of outer torsion bars 231, a pair of inner torsion bars 232, a pair of permanent magnets 160, and a pair of permanent magnets 260. It has.
  • the power supply coil 150 is formed on the surface of the outer support portion 211.
  • the power supply coil 150 may be formed inside the outer support portion 211.
  • the power supply coil 150 is a coil that extends along the frame shape of the outer support portion 212.
  • a control current is supplied to the power supply coil 150 from a power supply via a power supply terminal 151 formed on the outer support portion 211.
  • the control current is a control current for swinging the movable part 120 and the inner support part 212, as in the second embodiment.
  • the power supply coil 150 is not electrically or physically connected to the drive coil 140 and the drive coil 340, which will be described later, as in the first and second embodiments. Therefore, as long as the power supply coil 150 does not need to extend toward the inner support portion 212 and the movable portion 120, the power supply coil 150 (or the wiring connected to the power supply coil 150) is placed on the pair of outer torsion bars 231. It is preferably not formed on the pair of inner torsion bars 232.
  • a drive coil 340 is formed on the surface of the inner support portion 212.
  • the drive coil 340 may be formed inside the inner support portion 212.
  • the drive coil 340 is, for example, a coil that extends along the frame shape of the inner support portion 212.
  • the drive coil 340 may be formed by the same process as the drive coil 140. Further, the drive coil 340 extends only within the inner support 212. In other words, the drive coil 340 does not extend toward the outside of the inner support portion 212.
  • the drive coil 340 is not formed on the pair of outer torsion bars 231, the pair of inner torsion bars 232, the outer support part 211, or the movable part 120. For this reason, the drive coil 340 is not electrically connected to the power supply coil 150 or the drive coil 140. Alternatively, the drive coil 340 is not physically connected to the power supply coil 150 or the drive coil 140. Accordingly, the control current is not directly supplied to the drive coil 340 via the power supply terminal 151.
  • a drive coil 140 is formed on the surface of the movable portion 120 as in the first and second embodiments. Also in the third embodiment, as in the first and second embodiments, the drive coil 140 extends only within the movable portion 120. More specifically, the drive coil 140 is not formed on the pair of inner torsion bars 232, the inner support part 212, the pair of outer torsion bars 231, or the outer support part 211. Furthermore, the drive coil 140 is not electrically and physically connected to the drive coil 340 as well as the power supply coil 150.
  • the power coil 150, the drive coil 140, and the drive coil 340 are driven by a part or all of the magnetic field generated from the power coil 150. It is preferably formed so as to have a positional relationship capable of passing through at least one of the inside of the coil 140 and the inside of the driving coil 340.
  • the range, strength, and the like that the magnetic field generated from the power supply coil 150 reaches include (i) the size of the outer support portion 211, (ii) the size of the inner support portion 212, (iii) the size of the movable portion 120, and ( iv) positional relationship between the outer support portion 211 and the inner support portion 212, (v) positional relationship between the inner support portion 212 and the movable portion 120, and (vi) a control current supplied to the power supply coil 150. And (vii) parameters of the power supply coil 150 itself.
  • the power supply coil 150 has a positional relationship in which a magnetic field generated from the power supply coil 150 by supplying a control current passes through at least one of the inside of the drive coil 140 and the inside of the drive coil 340. It is preferably formed so that.
  • the inner support portion 212 on which the drive coil 340 is formed swings due to Lorentz force due to electromagnetic interaction between the static magnetic field applied from the pair of permanent magnets 260 and the induced current generated in the drive coil 340.
  • the movable portion 120 is connected to the inner support portion 212 via a pair of inner torsion bars 232. Therefore, as the inner support portion 212 swings, the movable portion 120 substantially swings around the central axis about the axis along the vertical direction in FIG. To do.
  • the movable part 120 in which the drive coil 140 is formed swings due to the Lorentz force resulting from the electromagnetic interaction between the static magnetic field applied from the pair of permanent magnets 160 and the induced current generated in the drive coil 140. . That is, the movable unit 120 swings so as to rotate about the axis along the left-right direction in FIG. 7 as the central axis.
  • the drive coil 140 can be formed on the movable part 120 to be swung, and the drive coil 340 can be formed on the inner support part 212 to be swung. . Therefore, compared with the actuator of the comparative example in which the movable part 120 is swayed (specifically, driven in two axes) without forming the drive coil 140 in either the movable part 120 or the inner support part 212, The movable part 120 and the inner support part 212 can be swung (that is, driven) with relatively high accuracy. As a result, the accuracy of the biaxial drive of the movable part 120 can be relatively improved.
  • the movable part 120 is used by using the induced current generated in the drive coil 140 (in other words, using power or current wirelessly transmitted from the power supply coil 150 as a power source). Can be swung. For this reason, the drive coil 140 does not have to extend outside the movable portion 120. Therefore, it is not necessary to form wiring connected to the drive coil 140 in the pair of inner torsion bars 232 (further, the inner support portion 212, the pair of outer torsion bars 231 and the outer support portion 211). In other words, according to the actuator 300 of the third embodiment, by supplying the control current to the power supply coil 150, the movable part 120 on which the drive coil 140 is formed can be moved far.
  • the control current need not be supplied.
  • the actuator 300 of the third embodiment it is not necessary to form the wiring connected to the drive coil 140 in the pair of inner torsion bars 232 and the pair of outer torsion bars 231. Therefore, the structure of the actuator 300 is simplified and the manufacturing process of the actuator 300 is also simplified as compared with the actuator of the comparative example in which wiring is formed on the pair of inner torsion bars 230 and the pair of outer torsion bars 231. To do. For this reason, it is the same as the actuator of the comparative example that relatively increases the degree of freedom in designing the actuator as compared with the actuator of the comparative example that moves the movable part 120 without forming the drive coil 140 in the movable part 120.
  • the movable part 120 can be swung (that is, driven) with relatively high accuracy while enjoying the effect accordingly.
  • the degree of freedom in designing the actuator 300 can be relatively increased while appropriately enjoying the same effect as that of the actuator of the comparative example that can be swung (that is, driven) with relatively high accuracy.
  • the inner support 212 is used by using the induced current generated in the drive coil 340 (in other words, using power or current wirelessly transmitted from the power supply coil 150 as a power source).
  • the movable part 120 connected to the inner support part 212 can be swung.
  • the drive coil 340 does not need to extend outside the inner support portion 212. Therefore, it is not necessary to form wiring connected to the drive coil 340 on the pair of outer torsion bars 231 (moreover, the movable part 120, the pair of inner torsion bars 232, and the outer support part 211).
  • the actuator 300 of the third embodiment by supplying a control current to the power supply coil 150, the inner support portion 212 on which the drive coil 340 is formed can be swung, so the drive coil 340 On the other hand, it is not necessary to supply a control current.
  • the actuator 300 of the third embodiment it is not necessary to form the wiring connected to the drive coil 340 in the pair of inner torsion bars 232 and the pair of outer torsion bars 231. Therefore, the structure of the actuator 300 is simplified and the manufacturing process of the actuator 300 is also simplified as compared with the actuator of the comparative example in which wiring is formed on the pair of inner torsion bars 230 and the pair of outer torsion bars 231. To do.
  • the inner support 212 can be swung (that is, driven) with relatively high accuracy while enjoying the same effect accordingly.
  • the degree of freedom in designing the actuator 300 can be relatively increased. it can.
  • the durability (or failure resistance) of the actuator 300 can be improved as compared with the actuator of the comparative example in which the wiring connected to at least one of the drive coil 140 and the drive coil 340 is formed on the pair of inner torsion bars 232. it can.
  • the durability (or fault tolerance) of the actuator 300 can be improved as compared with the actuator of the comparative example in which the wiring connected to at least one of the drive coil 140 and the drive coil 340 is formed on the pair of outer torsion bars 231. it can.
  • the movable part 120 may contain a magnetic material, the shape of the power coil 150 (or the drive coil 140 or the drive coil 340) may be changed, and the power coil 150 A plurality of coil portions 151b may be provided, and the arrangement positions of the pair of permanent magnets 160 (or the pair of permanent magnets 260) may be changed.
  • the description is advanced focusing on the MEMS scanner in which the movable portion rotates about the axis along the direction in which the torsion bar extends.
  • the various configurations described above may be applied to any actuator, not limited to the MEMS scanner.
  • the various configurations described above may be applied to a MEMS actuator that moves so that the movable portion moves in parallel according to the movement of the torsion bar. Even in this case, the above-described various effects are favorably enjoyed.

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  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Electromagnetism (AREA)
  • Chemical & Material Sciences (AREA)
  • Combustion & Propulsion (AREA)
  • Power Engineering (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Reciprocating, Oscillating Or Vibrating Motors (AREA)
  • Micromachines (AREA)

Abstract

L'invention concerne un actionneur (100) qui comporte une partie mobile (130), une partie de support (110) qui entoure la partie mobile, une barre de torsion (120) qui sert à accoupler la partie mobile à la partie de support pour permettre à la partie mobile de basculer, une bobine d'excitation (140) qui est formée dans la partie mobile et qui ne dépasse pas de l'extérieur de la partie mobile, une bobine source d'énergie (150) qui est formée dans la partie de support et par laquelle un courant de commande qui sert à faire basculer la partie mobile est alimenté, et un organe d'application de champ magnétique (160) servant à appliquer un champ magnétique statique à la bobine d'excitation.
PCT/JP2011/075185 2011-11-01 2011-11-01 Actionneur WO2013065126A1 (fr)

Priority Applications (2)

Application Number Priority Date Filing Date Title
JP2012503828A JP4968760B1 (ja) 2011-11-01 2011-11-01 アクチュエータ
PCT/JP2011/075185 WO2013065126A1 (fr) 2011-11-01 2011-11-01 Actionneur

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
PCT/JP2011/075185 WO2013065126A1 (fr) 2011-11-01 2011-11-01 Actionneur

Publications (1)

Publication Number Publication Date
WO2013065126A1 true WO2013065126A1 (fr) 2013-05-10

Family

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Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/JP2011/075185 WO2013065126A1 (fr) 2011-11-01 2011-11-01 Actionneur

Country Status (2)

Country Link
JP (1) JP4968760B1 (fr)
WO (1) WO2013065126A1 (fr)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP2990375A3 (fr) * 2014-09-01 2016-06-08 MEMS Technology Ltd. Dispositif micromécanique à actionnement électromagnétique
WO2018168349A1 (fr) * 2017-03-13 2018-09-20 パイオニア株式会社 Dispositif d'entraînement et dispositif de mesure de distance
CH715874A1 (fr) * 2019-02-26 2020-08-31 Sercalo Microtechnology Ltd Dispositif micromécanique à bobine.
CN112305750A (zh) * 2019-08-02 2021-02-02 上海汽车集团股份有限公司 一种mems振镜及光学系统

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH08322227A (ja) * 1995-05-26 1996-12-03 Nippon Signal Co Ltd:The プレーナ型電磁アクチュエータ
JP2003153518A (ja) * 2001-11-09 2003-05-23 Nippon Signal Co Ltd:The プレーナ型電磁アクチュエータ
JP2003153519A (ja) * 2001-11-09 2003-05-23 Nippon Signal Co Ltd:The プレーナ型電磁アクチュエータ

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH08322227A (ja) * 1995-05-26 1996-12-03 Nippon Signal Co Ltd:The プレーナ型電磁アクチュエータ
JP2003153518A (ja) * 2001-11-09 2003-05-23 Nippon Signal Co Ltd:The プレーナ型電磁アクチュエータ
JP2003153519A (ja) * 2001-11-09 2003-05-23 Nippon Signal Co Ltd:The プレーナ型電磁アクチュエータ

Cited By (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP2990375A3 (fr) * 2014-09-01 2016-06-08 MEMS Technology Ltd. Dispositif micromécanique à actionnement électromagnétique
WO2018168349A1 (fr) * 2017-03-13 2018-09-20 パイオニア株式会社 Dispositif d'entraînement et dispositif de mesure de distance
JPWO2018168349A1 (ja) * 2017-03-13 2020-01-16 パイオニア株式会社 駆動装置および距離測定装置
US11555892B2 (en) 2017-03-13 2023-01-17 Pioneer Corporation Drive device and distance measurement apparatus
CH715874A1 (fr) * 2019-02-26 2020-08-31 Sercalo Microtechnology Ltd Dispositif micromécanique à bobine.
EP3702321A1 (fr) * 2019-02-26 2020-09-02 Sercalo Microtechnology Ltd. Dispositif micromecanique a bobine
CN112305750A (zh) * 2019-08-02 2021-02-02 上海汽车集团股份有限公司 一种mems振镜及光学系统

Also Published As

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JP4968760B1 (ja) 2012-07-04
JPWO2013065126A1 (ja) 2015-04-02

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