WO2013053241A1 - 液体存储装置 - Google Patents

液体存储装置 Download PDF

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Publication number
WO2013053241A1
WO2013053241A1 PCT/CN2012/076828 CN2012076828W WO2013053241A1 WO 2013053241 A1 WO2013053241 A1 WO 2013053241A1 CN 2012076828 W CN2012076828 W CN 2012076828W WO 2013053241 A1 WO2013053241 A1 WO 2013053241A1
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WO
WIPO (PCT)
Prior art keywords
liquid
liquid storage
storage tank
line
gas
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PCT/CN2012/076828
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English (en)
French (fr)
Inventor
何金群
裴立坤
吴仪
昝威
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北京七星华创电子股份有限公司
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Application filed by 北京七星华创电子股份有限公司 filed Critical 北京七星华创电子股份有限公司
Priority to US13/701,903 priority Critical patent/US8794257B2/en
Publication of WO2013053241A1 publication Critical patent/WO2013053241A1/zh

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    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05D—SYSTEMS FOR CONTROLLING OR REGULATING NON-ELECTRIC VARIABLES
    • G05D16/00—Control of fluid pressure
    • G05D16/14—Control of fluid pressure with auxiliary non-electric power
    • G05D16/16—Control of fluid pressure with auxiliary non-electric power derived from the controlled fluid
    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05D—SYSTEMS FOR CONTROLLING OR REGULATING NON-ELECTRIC VARIABLES
    • G05D16/00—Control of fluid pressure
    • G05D16/04—Control of fluid pressure without auxiliary power
    • G05D16/10—Control of fluid pressure without auxiliary power the sensing element being a piston or plunger
    • G05D16/103—Control of fluid pressure without auxiliary power the sensing element being a piston or plunger the sensing element placed between the inlet and outlet
    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05D—SYSTEMS FOR CONTROLLING OR REGULATING NON-ELECTRIC VARIABLES
    • G05D16/00—Control of fluid pressure
    • G05D16/028—Controlling a pressure difference
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T137/00—Fluid handling
    • Y10T137/2931—Diverse fluid containing pressure systems
    • Y10T137/3115—Gas pressure storage over or displacement of liquid
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T137/00—Fluid handling
    • Y10T137/2931—Diverse fluid containing pressure systems
    • Y10T137/3115—Gas pressure storage over or displacement of liquid
    • Y10T137/3118—Surge suppression
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T137/00—Fluid handling
    • Y10T137/2931—Diverse fluid containing pressure systems
    • Y10T137/3115—Gas pressure storage over or displacement of liquid
    • Y10T137/3127—With gas maintenance or application
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T137/00—Fluid handling
    • Y10T137/2931—Diverse fluid containing pressure systems
    • Y10T137/3115—Gas pressure storage over or displacement of liquid
    • Y10T137/3127—With gas maintenance or application
    • Y10T137/313—Gas carried by or evolved from liquid
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T137/00—Fluid handling
    • Y10T137/8593—Systems
    • Y10T137/86292—System with plural openings, one a gas vent or access opening
    • Y10T137/86324—Tank with gas vent and inlet or outlet

Definitions

  • the present invention relates to the field of integrated circuit manufacturing technology, and in particular, to a liquid storage device.
  • various cleaning of the silicon wafer is required, and various chemical liquids are used in the cleaning process.
  • ST250 chemical liquid is generally used in copper interconnect cleaning equipment; in polishing sheet cleaning equipment, chemical liquids such as ammonia water, hydrogen peroxide, and hydrofluoric acid are generally used. At the same time, the purity of the chemical liquid is very high. These chemical fluids are typically delivered to the various machines of the equipment via chemical liquid storage.
  • the utility model generally includes: a liquid storage tank 110, an inlet liquid pipeline 120, an outlet liquid pipeline 130, and an intake pipeline 140. a pressure line 150, a pressure relief valve 151 disposed on the pressure relief line 150, a vacuum destruction line 160, and a vacuum break valve disposed on the vacuum destruction line 160, the inlet line 120 and the outlet tube Both the road 130 and the intake line 140 are connected to the liquid storage tank 110.
  • the invention includes: a liquid storage tank 210, an inlet liquid line 220, an outlet liquid line 230, an intake line 240, and a liquid pressure maintaining device, the liquid inlet pipe 220, the liquid outlet pipe 230, and the intake pipe 240 are connected to the liquid storage tank 210, and the liquid pressure maintaining device includes an overflow pipe 250 and a liquid sealing groove 260, A liquid is stored in the liquid sealing tank 260, and one end of the overflow pipe 250 is connected to the liquid storage tank 210, and the other end of the overflow pipe 250 is inserted into the liquid.
  • the liquid sealing tank 260 is an open container including a side wall 261 and a bottom wall 262 connected to the side wall 261.
  • the liquid pressure maintaining device includes a fluid replenishing line 270 and a liquid discharging line 280, and the liquid replenishing line 270 and the liquid discharging line 280 are both connected to the side wall 211 of the liquid sealing tank 210.
  • the inlet pipe 220 is provided with a first valve 221 for controlling the opening and closing of the liquid inlet pipe 220; the liquid outlet pipe 230 is provided with a second valve 231; There is a third valve 241.
  • Figure 1 uses the pressure relief valve and the vacuum break valve. However, since the pressure relief valve and the vacuum break valve are mechanical interlocking devices, the mechanical action is insensitive to the use after a period of use, resulting in unstable pressure in the storage tank. Damage to the storage tank, affecting the production process.
  • Figure 2 uses the overflow pipe and the liquid sealing tank to keep the pressure inside the storage tank constant, but it is necessary to adjust the depth of the liquid that the overflow pipe extends into the liquid sealing tank to ensure that the liquid in the liquid sealing tank will not be poured. There is a certain risk in the storage tank. Moreover, since the liquid used in the liquid sealing tank is usually deionized water and the water has the characteristics of long bacteria, it is necessary to control the deionized water in the liquid sealing tank, and it is necessary to consider this influence during use.
  • the technical problem to be solved by the present invention is how to avoid the chemical liquid in the liquid storage tank from being damaged and to ensure the smooth outflow of the chemical liquid.
  • the present invention provides a liquid storage device comprising: a liquid storage tank, an inlet liquid line, an outlet liquid line and an exhaust line, the liquid inlet line, the liquid outlet line and the row
  • Each of the gas pipelines is connected to the liquid storage tank, and further includes an emergency intake pipeline connected to the liquid storage tank, the emergency intake pipeline includes: a differential pressure mechanical device and a gas storage tank, the differential pressure mechanical machine One end of the device is connected to the liquid storage tank, and the other end is connected to the gas storage tank, and is used for automatically connecting or shutting off the gas storage tank and the liquid storage tank according to the difference of the air pressure between the gas storage tank and the liquid storage tank. the connection between.
  • the differential pressure type mechanical device comprises: an outer wall, a sealing member, a sealing partition plate and an elastic member, wherein one end of the outer wall is connected to the liquid storage tank, and the other end is connected to the gas storage tank, and the sealing member is fixed at Inside the outer wall, the sealing partition is fixed at one end of the elastic member, and the pipe between the liquid storage tank and the gas storage tank is closed or opened by cooperation with the sealing member, and the other end of the elastic member is fixed at On the outer wall.
  • the elastic member is a spring.
  • liquid inlet line, the exhaust line and the emergency exhaust line are connected to the top wall of the liquid storage tank, and the liquid discharge line is connected to the bottom wall of the liquid storage tank.
  • the liquid inlet pipeline is provided with a first valve
  • the liquid outlet pipeline is provided with a second valve
  • the exhaust pipeline is provided with a one-way valve
  • the liquid storage device further comprises: an inflation pipeline connected to the liquid storage tank.
  • the inflation line is connected to a top wall of the liquid storage tank.
  • the inflation pipeline is provided with a third valve.
  • the shape of the liquid storage tank is a barrel shape, a cone shape, a rectangular parallelepiped shape or a combination of a barrel shape and a cone shape.
  • the invention replaces the liquid sealing tank by the design of the emergency intake pipeline, and the emergency intake pipeline can quickly supplement the protective gas in the liquid storage tank, avoiding the chemical liquid in the liquid storage tank being destroyed, and ensuring smooth chemical liquid.
  • the ground flows out.
  • FIG. 1 is a schematic structural view of a liquid storage device in the prior art
  • FIG. 2 is a schematic structural view of another liquid storage device in the prior art
  • FIG. 3 is a schematic structural view of a liquid storage device according to Embodiment 1 of the present invention.
  • FIG. 4 is a schematic structural view of a liquid storage device according to Embodiment 2 of the present invention.
  • Figure 5 is a schematic view showing the structure of a differential pressure type mechanical device of the liquid storage device of Figure 3 or Figure 4.
  • the core idea of the present invention is to provide a liquid storage device that rapidly replenishes a liquid storage tank by using a gas storage tank and a differential pressure mechanical device, and the difference is when the pressure difference between the two storage tanks reaches a predetermined value.
  • the press mechanism can be turned on or off automatically.
  • FIG. 3 is a schematic diagram of a liquid storage device according to an embodiment of the present invention.
  • the liquid storage device 300 includes: a liquid storage tank 310, an inlet liquid line 320, a liquid outlet line 330 and an exhaust line 350, an emergency intake line 360, an inlet line 320, a liquid outlet line 330, and an exhaust line. Both the line 350 and the emergency intake line 360 are connected to the reservoir 310.
  • the shape of the liquid storage tank 310 is a barrel shape, a cone shape, a rectangular parallelepiped shape or the like. In this embodiment, the liquid storage tank 310 is a combination of a drum shape and a cone.
  • the inlet line 320, the exhaust line 350, and the emergency vent line 360 are all connected to the top wall of the reservoir 310, and the outlet line 330 is connected to the bottom wall of the reservoir.
  • the inlet pipe 320 is provided with a valve 321 for controlling the opening and closing of the pipeline.
  • the outlet conduit 330 is provided with a valve 331 for controlling the opening and closing of the pipeline, and the exhaust conduit 350 is provided with a check valve 351.
  • the structure of the emergency intake line 360 is as shown in FIG. 3, and includes a differential pressure type mechanical device 361 and a gas storage tank 362.
  • One end of the differential pressure type mechanical device 361 is connected to the liquid storage tank 310, and the other end is connected to the gas storage tank 362.
  • FIG. 5 it is a schematic structural view of the differential pressure type mechanical device 361.
  • the device adopts a spring sealing method, and includes an outer wall 1, a sealing member 2, a sealing partition 3 and a spring 4.
  • the two ends of the outer wall 1 are respectively connected to the liquid storage tank 310 and the gas storage tank 362, and the sealing member 2 is fixed to the outer wall 1.
  • the sealing partition 3 is fixed to one end of the spring 4, and the other end of the spring 4 is fixed to the outer wall 1.
  • the sealing partition 3 moves up and down with the deformation of the spring 4.
  • the amount of compression deformation of the spring 4 is increased to drive the sealing partition 3 to move downward, so that the gas in the gas storage tank 362 can enter the storage. In the tank 310.
  • the type of spring used in the differential pressure mechanism 361 is primarily related to the gas pressure within the gas reservoir 362, the inner diameter of the emergency intake line 360, and the gas pressure over the liquid in the reservoir 310.
  • FIG. 4 is a schematic diagram of a liquid storage device according to an embodiment of the present invention.
  • the liquid storage device 400 includes: a liquid storage tank 410, an inlet liquid line 420, an outlet liquid line 430, an inflation line 440, an exhaust line 450, and an emergency intake line 460, an inlet line 420, and a liquid outlet tube.
  • the road 430, the inflation line 440, the exhaust line 450, and the emergency intake line 460 are all connected to the reservoir 410.
  • the shape of the liquid storage tank 410 is a barrel shape, a cone shape, a rectangular parallelepiped shape or the like. In this embodiment, the liquid storage tank 410 is a combination of a barrel shape and a cone.
  • the inlet line 420, the inflation line 440, the exhaust line 450, and the emergency vent line 460 are all connected to the top wall of the reservoir 410, and the outlet line 430 is connected to the bottom wall of the reservoir.
  • the inlet pipe 420 is provided with a valve 421 for controlling the opening and closing of the pipeline
  • the outlet conduit 430 is provided with a valve 431 for controlling the opening and closing of the pipeline
  • the inflation pipeline 440 is provided with a valve 441 for controlling the opening and closing of the pipeline.
  • a check valve 451 is disposed on the exhaust line 450
  • the structure of the emergency intake line 460 is as shown in FIG. 4, and includes a differential pressure type mechanical device 461 and a gas storage tank 462.
  • One end of the differential pressure type mechanical device 461 is connected to the liquid storage tank 410, and the other end is connected to the gas storage tank 462.
  • FIG. 5 it is a schematic structural view of the differential pressure type mechanical device 461.
  • the device adopts a spring sealing method, and includes an outer wall 1, a sealing member 2, a sealing partition 3 and a spring 4.
  • the two ends of the outer wall 1 are respectively connected to the liquid storage tank 410 and the gas storage tank 462, and the sealing member 2 is fixed on the outer wall 1.
  • the sealing partition 3 is fixed to one end of the spring 4, and the other end of the spring 4 is fixed to the outer wall 1.
  • the sealing partition 3 moves up and down with the deformation of the spring 4.
  • the amount of compression deformation of the spring 4 is increased to drive the sealing partition 3 to move downward, so that the gas in the gas storage tank 462 can enter.
  • the liquid storage tank 410 In the liquid storage tank 410.
  • the liquid storage devices of the above two embodiments are basically the same.
  • the liquid storage device of the second embodiment is taken as an example, and the working principle thereof is as follows:
  • the aeration line 440 is used to input high purity N2 into the liquid storage tank (in Embodiment 1, the high purity N2 can be directly input into the liquid storage tank through the emergency intake line 360).
  • the liquid inlet pipe 420 rapidly supplies liquid (for example, various chemical reagents) into the liquid storage tank 410, the liquid level in the liquid storage tank 410 rises sharply, and the high-purity gas in the liquid storage tank 410 is compressed, and the liquid storage is performed.
  • the gas pressure in the tank 410 becomes large and exceeds the opening pressure of the check valve 451 on the exhaust line 450, the high purity gas in the liquid storage tank 410 is discharged from the exhaust line 450 through the check valve 451.
  • the differential pressure mechanical device 461 When the liquid in the liquid storage tank 410 is quickly discharged through the liquid discharge line 430, when the gas pressure difference in the gas storage tank 462 relative to the liquid storage tank 410 is higher than the first predetermined value, the differential pressure mechanical device 461 is automatically opened. (From FIG. 5, the gas pressure of the gas storage tank 462 is greater than the gas pressure of the liquid storage tank 410, and the gas pressure difference is sufficient to compress the spring 4), so that the high-purity gas in the gas storage tank 462 can quickly enter the storage. In the tank 410.
  • the differential pressure mechanical device 461 will automatically close (the air pressure difference can not overcome the spring force of the spring 4, the spring 4 bounces, The sealing partition 3 is pressed against the sealing member 2).
  • the gas pressure in the gas storage tank 462 is lowered, the gas needs to be replenished so that the gas pressure value returns to the initial pressure value (the pressure of the high purity N2 initially charged).
  • the liquid storage device of the present invention can be widely used in the technical field of integrated circuit manufacturing and the like for storing chemical reagents for cleaning a process machine.
  • the invention provides a liquid storage device, which replaces the liquid sealing tank by the design of the emergency intake pipeline, and the emergency intake pipeline can quickly supplement the protective gas in the liquid storage tank, thereby avoiding the destruction of the chemical liquid in the liquid storage tank. It also ensures that the chemical liquid flows smoothly and has industrial applicability.

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  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Fluid Mechanics (AREA)
  • General Physics & Mathematics (AREA)
  • Automation & Control Theory (AREA)
  • Power Engineering (AREA)
  • Jet Pumps And Other Pumps (AREA)

Abstract

一种液体存储装置（300；400）包括储液罐（310；410）、进液管路（320；420）、出液管路（330；430）和排气管路（350；450），其中，进液管路、出液管路和排气管路均连接储液罐。该液体存储装置还包括与储液罐连接的紧急进气管路（360；460），该紧急进气管路包括差压式机械装置（361；461）及储气罐（362；462），该差压式机械装置一端连接储液罐，另一端连接储气罐，用于根据储气罐和储液罐之间的气压差大小自动连通或关断储气罐和储液罐之间的连接。该液体存储装置采用紧急进气管路来代替液封槽，而且紧急进气管路能够给储液罐中快速补充保护性气体，避免了储液罐中的化学液被破坏，还保证了化学液顺利地流出。

Description

液体存储装置
技术领域
本发明涉及集成电路制造技术领域，特别涉及一种液体存储装置。
背景技术
在集成电路制造过程中，需要对硅片进行各种清洗，在清洗的过程中会用到各种化学液。例如，在铜互连清洗设备中，一般会用到ST250化学液；在抛光片清洗设备中，一般会用到氨水、双氧水、氢氟酸等化学液。同时，对化学液的纯度要求很高。这些化学液通常通过化学液存储装置输送到设备的各个机台中。
在专利公告号为CN201857044U的专利中介绍了现有化学液存储装置情况，具体参照图1，通常包括：储液罐110、进液管路120、出液管路130、进气管路140，泄压管路150、设置在泄压管路150上的压力释放阀151、真空破坏管路160、以及设置在真空破坏管路160上的真空破坏阀，所述进液管路120、出液管路130以及进气管路140均与所述储液罐110连接。
同时，上述专利的液体存储装置中介绍了一种改进后的液体存储装置200，具体参照图2，包括：储液罐210、进液管路220、出液管路230、进气管路240以及液体保压装置，所述进液管路220、出液管路230以及进气管路240均与储液罐210连接，所述液体保压装置包括溢流管250以及液封槽260，所述液封槽260内存储有液体，所述溢流管250的一端与储液罐210连接，所述溢流管250的另一端伸入到所述液体内。所述液封槽260为开口容器，包括侧壁261以及与侧壁261连接的底壁262。所述液体保压装置包括补液管路270和排液管路280，所述补液管路270和排液管路280均与所述液封槽210的侧壁211连接。所述进液管220路设置有第一阀221，用于控制所述进液管路220的通断；所述出液管路230设置有第二阀231；所述进气管路240上设置有第三阀241。
以上两种装置的主要区别是对储液罐内保护气体在过压和低压时采用的处理方式不一样。图1采用的是压力释放阀和真空破坏阀，但由于压力释放阀和真空破坏阀是机械连锁装置，使用一段时间后易出现机械动作不灵敏的情况，导致存储罐内的压力不稳定，从而损坏存储罐，影响工艺生产的整出进行。图2采用的是溢流管及液封槽，可保持存储罐内的压力恒定，但需要调整溢流管伸入到液封槽内的液体深度，以确保液封槽内的液体不会倒灌到存储罐内，存在一定的风险性。并且，由于液封槽中使用的液体通常为去离子水，水具有长菌的特性，因此需对液封槽中的去离子水进行相关控制，在使用过程中需要考虑这方面的影响。
发明内容
（一）要解决的技术问题
本发明要解决的技术问题是：如何避免储液罐中的化学液受到破坏，且保证化学液顺利流出。
（二）技术方案
为解决上述技术问题，本发明提供了一种液体存储装置，包括：储液罐、进液管路、出液管路及排气管路，所述进液管路、出液管路和排气管路均连接所述储液罐，还包括与所述储液罐连接的紧急进气管路，所述紧急进气管路包括：差压式机械装置及储气罐，所述差压式机械装置一端连接所述储液罐，另一端连接所述储气罐，用于根据所述储气罐和储液罐之间的气压差大小自动连通或关断所述储气罐和储液罐之间的连接。
其中，所述差压式机械装置包括：外壁、密封件、密封隔板以及弹性部件，所述外壁的一端连接所述储液罐，另一端连接所述储气罐，所述密封件固定在外壁内部，所述密封隔板固定在弹性部件的一端，通过和密封件的配合关闭或打开所述储液罐和所述储气罐之间的管路，所述弹性部件的另一端固定在所述外壁上。
其中，所述弹性部件为弹簧。
其中，所述进液管路、排气管路以及紧急排气管路均与储液罐的顶壁连接，所述出液管路与储液罐底壁连接。
其中，所述进液管路设置有第一阀，所述出液管路设置有第二阀，所述排气管路设置有单向阀。
其中，所述液体存储装置还包括：与所述储液罐连接的充气管路。
其中，所述充气管路连接在所述储液罐的顶壁。
其中，所述充气管路设置有第三阀。
其中，所述储液罐的形状为圆桶形、圆锥体、长方体形或圆桶形和圆锥体的组合体。
（三）有益效果
本发明通过紧急进气管路的设计来代替液封槽，且紧急进气管路能够给储液罐中快速补充保护性气体，避免了储液罐中的化学液被破坏，还保证了化学液顺利地流出。
附图说明
图1是现有技术中的一种液体存储装置的结构示意图；
图2是现有技术中的另一种液体存储装置的结构示意图；
图3是本发明实施例1的一种液体存储装置的结构示意图；
图4是本发明实施例2的一种液体存储装置的结构示意图；
图5是图3或图4中的液体存储装置的差压式机械装置结构示意图。
具体实施方式
下面结合附图和实施例，对本发明的具体实施方式作进一步详细描述。以下实施例用于说明本发明，但不用来限制本发明的范围。
本发明的核心思想在于，提供一种液体存储装置，液体存储装置利用储气罐及差压式机械装置对储液罐快速补充气体，当两存储罐之间的压力差到达预定值时该差压式机械装置可自动开启或关闭。
实施例1
如图3所示，为本发明实施例提供的液体存储装置的示意图。该液体存储装置300包括：储液罐310、进液管路320、出液管路330及排气管路350以及紧急进气管路360，进液管路320、出液管路330、排气管路350以及紧急进气管路360均与储液罐310连接。储液罐310的形状为圆桶形、圆锥体、长方体形或其它形状。本实施例中，储液罐310为圆桶形和圆锥体的组合体。进液管路320、排气管路350以及紧急排气管路360均连接在储液罐310的顶壁，出液管路330连接在储液罐的底壁。
进液管路320上设置有控制管路通断的阀门321，出液管路330上设置有控制管路通断的阀门331，排气管路350上设置有单向阀351。
紧急进气管路360的结构如图3所示，包括差压式机械装置361及储气罐362，差压式机械装置361一端与储液罐310连接，另一端与储气罐362连接。如图5所示，为差压式机械装置361的结构示意图。该装置采用的是弹簧密封方式，包括外壁1、密封件2、密封隔板3以及弹簧4，外壁1的两端分别连接储液罐310和储气罐362，密封件2固定在外壁1的内部，密封隔板3与弹簧4的一端相固定，弹簧4的另一端固定在外壁1上。密封隔板3随着弹簧4的变形而上下运动。当储气罐362与储液罐310之间的气体压力差大于预定值时，弹簧4压缩变形量增大，带动密封隔板3向下运动，于是储气罐362中的气体可以进入到储液罐310中。
差压式机械装置361中使用到的弹簧类型主要与储气罐362内的气体压力、紧急进气管路360的内径以及储液罐310内液体上空的气体压力相关。
实施例2
如图4所示，为本发明实施例提供的液体存储装置的示意图。该液体存储装置400包括：储液罐410、进液管路420、出液管路430、充气管路440、排气管路450以及紧急进气管路460，进液管路420、出液管路430、充气管路440、排气管路450以及紧急进气管路460均与储液罐410连接。储液罐410的形状为圆桶形、圆锥体、长方体形或其它形状。本实施例中，储液罐410为圆桶形和圆锥体的组合体。进液管路420、充气管路440、排气管路450以及紧急排气管路460均连接在储液罐410的顶壁，出液管路430连接在储液罐的底壁。
进液管路420上设置有控制管路通断的阀门421，出液管路430上设置有控制管路通断的阀门431，充气管路440上设置有控制管路通断的阀门441，排气管路450上设置有单向阀451
紧急进气管路460的结构如图4所示，包括差压式机械装置461及储气罐462，差压式机械装置461一端与储液罐410连接，另一端与储气罐462连接。如图5所示，为差压式机械装置461的结构示意图。该装置采用的是弹簧密封方式，包括外壁1、密封件2、密封隔板3以及弹簧4，外壁1的两端分别连接储液罐410和储气罐462，密封件2固定在外壁1的内部，密封隔板3与弹簧4的一端相固定，弹簧4的另一端固定在外壁1上。密封隔板3随着弹簧4的变形而上下运动。当储气罐462与储液罐410之间的气体压力差大于预定值时，弹簧4压缩变形量增大，带动密封隔板3向下运动，于是，储气罐462中的气体可以进入到储液罐410中。
以上两个实施例的液体存储装置基本相同，下面以实施例2的液体存储装置为例，对其工作原理说明如下：
充气管路440用于将高纯N2输入到储液罐中（在实施例1中可直接通过紧急进气管路360将高纯N2输入到储液罐中）。当进液管路420快速向储液罐410内供应液体（如：各种化学试剂）时，储液罐410内的液面急剧上升，储液罐410内的高纯气体被压缩，储液罐410内的气体压力变大，超过排气管路450上的单向阀451的开启压力时，储液罐410内的高纯气体会通过单向阀451从排气管路450中排出。
当储液罐410内的液体经出液管路430快速排放时，当储气罐462相对于储液罐410内的气体压力差高于第一预定值，差压式机械装置461会自动打开（从图5看，这时储气罐462的气体压力要大于储液罐410的气体压力，且气压差足够将弹簧4压缩），使得储气罐462内的高纯气体可快速进入到储液罐410中。当储气罐462相对于储液罐410内的气压差低于第二预定值（第一预定值和第二预定值分别与储气罐内的初始压力、储液罐内的化学液种类、以及储液罐内化学液上空的气体容积相关，用户需根据实际情况测试得到两者的数值），差压式机械装置461会自动关闭（气压差无法克服弹簧4的弹力，弹簧4弹起，将密封隔板3紧压在密封件2上）。当储气罐462内的气体压力降低时，需补充气体使得气体压力值回到初始压力值（一开始充入的高纯N2的压力）。
本发明的液体存储装置可广泛运用于集成电路制造等技术领域，用于存储用于清洗制程机台的化学试剂。
以上实施方式仅用于说明本发明，而并非对本发明的限制，有关技术领域的普通技术人员，在不脱离本发明的精神和范围的情况下，还可以做出各种变化和变型，因此所有等同的技术方案也属于本发明的范畴，本发明的专利保护范围应由权利要求限定。
工业实用性
本发明提供一种液体存储装置，通过紧急进气管路的设计来代替液封槽，且紧急进气管路能够给储液罐中快速补充保护性气体，避免了储液罐中的化学液被破坏，还保证了化学液顺利地流出，具有工业实用性。

Claims (1)

  1. 权利要求书：
    1、一种液体存储装置，包括：储液罐、进液管路、出液管路及排气管路，所述进液管路、出液管路和排气管路均连接所述储液罐，其特征在于，还包括与所述储液罐连接的紧急进气管路，所述紧急进气管路包括：差压式机械装置及储气罐，所述差压式机械装置一端连接所述储液罐，另一端连接所述储气罐，用于根据所述储气罐和储液罐之间的气压差自动连通或关断所述储气罐和储液罐之间的连接。
    2、如权利要求1所述的液体存储装置，其特征在于，所述差压式机械装置包括：外壁、密封件、密封隔板以及弹性部件，所述外壁的一端连接所述储液罐，另一端连接所述储气罐，所述密封件固定在外壁内部，所述密封隔板固定在弹性部件的一端，通过和密封件的配合关闭或打开所述储液罐和所述储气罐之间的管路，所述弹性部件的另一端固定在所述外壁上。
    3、如权利要求2所述的液体存储装置，其特征在于，所述弹性部件为弹簧。
    4、如权利要求1~3中任一项所述的液体存储装置，其特征在于，所述进液管路、排气管路以及紧急排气管路均与储液罐的顶壁连接，所述出液管路与储液罐底壁连接。
    5、如权利要求4所述的液体存储装置，其特征在于，所述进液管路设置有第一阀，所述出液管路设置有第二阀，所述排气管路设置有单向阀。
    6、如权利要求5所述的液体存储装置，其特征在于，所述储液罐的形状为圆桶形、圆锥体、长方体形或圆桶形和圆锥体的组合体。
    7、如权利要求1~3中任一项所述的液体存储装置，其特征在于，所述液体存储装置还包括：与所述储液罐连接的充气管路。
    8、如权利要求7所述的液体存储装置，其特征在于，所述充气管路连接在所述储液罐的顶壁。
    9、如权利要求8所述的液体存储装置，其特征在于，所述充气管路设置有第三阀。
    10、如权利要求9所述的液体存储装置，其特征在于，所述储液罐的形状为圆桶形、圆锥体、长方体形或圆桶形和圆锥体的组合体。
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