WO2013042198A1

WO2013042198A1 - Probe

Info

Publication number: WO2013042198A1
Application number: PCT/JP2011/071372
Authority: WO
Inventors: 憲司安澤
Original assignee: 富士通株式会社
Priority date: 2011-09-20
Filing date: 2011-09-20
Publication date: 2013-03-28

Abstract

The purpose of the invention is to improve the electrical properties of a probe. In the probe (10), elastic bodies (30) are interposed between pairs of contact pins (26, 28). The elastic body (30) presses the pair of contact pins (26, 28) in a direction that separates the two. The pair of contact pins (26, 28) is connected by a conductor (32) that is provided separately from the elastic body (30). Thus, in the probe (10), the elastic bodies (30) that press the pair of contact pins (26, 28) and have an elastic function are separated from the conductors (32) that connect the pair of contact pins (26, 28) and have a conducting function.

Description

probe

One embodiment of the present invention relates to a probe.

Conventionally, a pair of holding plates, a pair of plungers slidably projecting from open ends of narrow holes formed in the pair of holding plates, and a conductive coil that slidably supports the pair of plungers Probes with springs are known. Some of these probes are filled with a gel-like or rubber-like insulating elastic body between a pair of holding plates.

Utility Model Registration No. 3059385 JP-A 63-257239

However, when the coil spring has an elastic function for slidably supporting the pair of plungers and a conductive function for conducting the pair of plungers like this probe, there are the following problems.

That is, in such a coil spring, it is necessary to increase the wire length in order to ensure an elastic function. However, when the wire length of the coil spring is increased, the conduction path between the pair of plungers is increased. For this reason, the electrical resistance between the pair of plungers is increased, and the electrical characteristics of the probe may be deteriorated.

In one aspect, the present invention aims to improve the electrical characteristics of a probe.

In order to achieve the above object, in the technology disclosed in the present application, an elastic body is interposed between a pair of contact pins. The elastic body presses the pair of contact pins in a direction away from each other. The pair of contact pins are electrically connected by a conductor provided separately from the elastic body.

According to the technique disclosed in the present application, the electrical characteristics of the probe can be improved.

It is a perspective view containing the partial cross section of the probe for a test | inspection. FIG. 2 is a cross-sectional view of the inspection probe shown in FIG. 1. It is a figure explaining the assembly method of the electrically-conductive mechanism shown by FIG. It is a figure which shows the 1st modification of the elastic body shown by FIG. It is a figure which shows the modification of the conductor shown by FIG. It is a figure which shows the 2nd modification of the elastic body shown by FIG. It is a figure which shows the 3rd modification of the elastic body shown by FIG. It is a figure which shows the 4th modification of the elastic body shown by FIG. It is a figure which shows the 5th modification of the elastic body shown by FIG. It is a figure which shows the 6th modification of the elastic body shown by FIG.

Hereinafter, an embodiment of the technology disclosed in the present application will be described in detail with reference to the drawings.

As shown in FIG. 1, an inspection probe 10 according to an embodiment of the technology disclosed in the present application is an example of a probe and includes a pair of

holding plates

12 and 14. The pair of

holding plates

12 and 14 are each formed in a flat plate shape and are overlapped with each other in the plate thickness direction.

A plurality of

holding holes

16 and 18 are formed in the pair of

holding plates

12 and 14, respectively. Each of the plurality of holding holes 16 communicates with the plurality of holding holes 18. The plurality of holding holes 16 together with the plurality of holding holes 18 form a plurality of holding spaces 20. The plurality of holding spaces 20 are formed side by side in the vertical direction and the horizontal direction when the pair of

holding plates

12 and 14 are viewed in plan.

The conductive mechanisms 22 are accommodated in the plurality of holding spaces 20, respectively. The plurality of conductive mechanisms 22 have the same configuration. As shown in FIG. 2, each conductive mechanism 22 includes a capsule 24, a pair of

contact pins

26 and 28, an elastic body 30, and a conductive body 32.

The capsule 24 has a pair of

containers

34 and 36 divided in the overlapping direction (A direction) of the pair of

holding plates

12 and 14. The pair of

containers

34 and 36 are each formed in a cup shape. A hole 38 is formed in the bottom of one container 34 so as to penetrate in the overlapping direction of the pair of

holding plates

12 and 14. Similarly, a hole 40 penetrating in the overlapping direction of the pair of

holding plates

12 and 14 is formed at the bottom of the other container 36.

Further, a flange 42 extending along the circumferential direction of the container 34 is formed at the opening side end of one container 34, and the opening side end of the other container 36 is provided with the container 36. A flange 44 extending along the circumferential direction is formed. One container 34 and the other container 36 are assembled in a state where the

flanges

42 and 44 are overlapped.

Further, a groove 46 is formed in the above-described one holding plate 12 along the inner peripheral surface of the holding hole 16, and

flanges

42 and 44 are engaged with the groove 46. The

flanges

42 and 44 are thus engaged with the grooves 46, whereby the capsule 24 is held by the pair of

holding plates

12 and 14.

The pair of

contact pins

26 and 28 are electrically conductive, and are arranged with the overlapping direction of the pair of

holding plates

12 and 14 as the axial direction. The pair of

contact pins

26 and 28 are spaced apart from each other in the axial direction.

One contact pin 26 has a pin main body portion 48 whose tip is formed in a tapered shape, and a retaining portion 50 formed at the base of the pin main body portion 48. The pin main body 48 is inserted into the hole 38 in a state having a gap with the inner peripheral surface of the hole 38, whereby one of the contact pins 26 is movable in the axial direction.

Further, the diameter of the retaining portion 50 is increased as the distance from the pin main body portion 48 is increased, thereby preventing the one contact pin 26 from coming off from the capsule 24. The retaining portion 50 is formed with a recess 52 that opens to the opposite side of the pin body portion 48.

Similarly, the other contact pin 28 has a pin body portion 58 having a tapered tip, and a retaining portion 60 formed at the base of the pin body portion 58. The pin main body 58 is inserted into the hole 40 with a gap from the inner peripheral surface of the hole 40, whereby the other contact pin 28 is movable in the axial direction.

Moreover, the diameter of the retaining portion 60 is increased as the distance from the pin main body portion 58 increases, thereby preventing the other contact pin 28 from coming off from the capsule 24. The retaining portion 60 is formed with a recess 62 that opens to the opposite side of the pin body portion 58.

The elastic body 30 is formed in a solid cylindrical shape extending along the axial direction (A direction) of the pair of

contact pins

26 and 28. The elastic body 30 is a non-conductor and is made of, for example, an insulating elastic material. The elastic body 30 is made of silicon rubber as an example of an insulating elastic material. It is preferable that the hardness (Shore A hardness) of this silicon rubber is set to about Shore A 30 °, for example.

The end 30A on one axial side of the elastic body 30 is press-fitted into the recess 52, and the end 30B on the other axial side of the elastic body 30 is press-fitted into the recess 62. The elastic body 30 is thus interposed between the pair of

contact pins

26 and 28 and presses the pair of

contact pins

26 and 28 in a direction away from each other. The elastic body 30 may be interposed between the pair of

contact pins

26 and 28 in a free state, or may be interposed between the pair of

contact pins

26 and 28 in a compressed state.

The conductor 32 is formed integrally with the pair of

contact pins

26, 28, and conducts the pair of

contact pins

26, 28. The conductor 32 is formed in a band shape and is wound around the elastic body 30 in a spiral shape. The conductor 32 has elasticity by being formed in a spiral shape, but the elastic modulus of the conductor 32 is set lower than that of the elastic body 30. For example, the conductor 32 may be a slice formed when the pair of

contact pins

26 and 28 are formed by cutting.

The above conductive mechanism 22 is assembled, for example, in the following manner. That is, as shown in the upper diagram of FIG. 3, first, the conductor 32 formed integrally with the pair of contact pins 26 and 28 is brought into a linearly extended state. Then, as shown in the lower diagram of FIG. 3, the end 30 A on the one axial side of the elastic body 30 is press-fitted into the recess 52 of one contact pin 26.

Further, the other contact pin 28 is swung around the elastic body 30, and the conductor 32 is spirally wound around the elastic body 30, and the other contact pin 28 has a recess 62 on the other side in the axial direction of the elastic body 30. The end 30B is press-fitted. As shown in FIG. 2, the pin

main body portions

48 and 58 are inserted into the

hole portions

38 and 40, respectively, and the pair of

containers

34 and 36 are assembled to assemble the conductive mechanism 22.

Further, the inspection probe 10 including the plurality of conductive mechanisms 22 assembled in this way is used as follows. That is, as shown in FIG. 2, an inspection object 70 such as a CPU (Central Processing Unit) is disposed on one holding plate 12 side of the inspection probe 10. On the other hand, a test board 72 such as a system board is disposed on the other holding plate 14 side of the inspection probe 10.

Then, the plurality of contact pins 26 are pressed against the conductive pads 74 of the test object 70, and the plurality of contact pins 28 are pressed against the conductive pads 76 of the test substrate 72, respectively. When the pair of contact pins 26 and 28 are pressed against the

conductive pads

74 and 76, respectively, the pair of contact pins 26 and 28 are moved toward each other, and the elastic body 30 is elastically compressed. Therefore, the elastic force of the elastic body 30 acts on the pair of contact pins 26 and 28, thereby bringing the pair of contact pins 26 and 28 into stable contact with the

conductive pads

74 and 76, respectively.

Since the conductor 32 is spirally wound around the elastic body 30 as described above, even if the pair of contact pins 26 and 28 are moved toward and away from each other, this movement is not affected. It will be elastically deformed accordingly. Accordingly, the conductive state of the pair of contact pins 26 and 28 by the conductor 32 is thereby maintained.

Then, in a state where the pair of contact pins 26 and 28 are in contact with the

conductive pads

74 and 76, signals are transmitted and received between the inspection object 70 and the test substrate 72 via the inspection probe 10, thereby. The inspection object 70 is inspected. Further, whether or not the inspection object 70 operates normally is determined from the transmission / reception status of this signal.

Next, the operation and effect of the above-described inspection probe 10 will be described.

As described in detail above, in the above-described inspection probe 10, the elastic body 30 is interposed between the pair of contact pins 26 and 28. The elastic body 30 presses the pair of contact pins 26 and 28 in a direction away from each other. The pair of contact pins 26 and 28 are electrically connected by a conductor 32 provided separately from the elastic body 30.

As described above, in the inspection probe 10, the elastic body 30 having an elastic function for pressing the pair of contact pins 26 and 28 and the conductor 32 having a conductive function for conducting the pair of contact pins 26 and 28 are separated. Has been. Therefore, since the conductor 32 does not need to have an elastic function, the entire length (line length) of the conductor 32, that is, the conduction path between the pair of contact pins 26 and 28 can be shortened. Thereby, since the electrical resistance between a pair of contact pins 26 and 28 can be made low, the electrical characteristic of the probe 10 for a test | inspection can be improved.

Moreover, the conductor 32 is formed integrally with the pair of contact pins 26 and 28. Therefore, it is possible to suppress a contact failure between the pair of contact pins 26 and 28 and the conductor 32. The conductor 32 is formed in a strip shape having a larger cross-sectional area than a conventional compression coil formed in a linear shape. Therefore, the electrical resistance of the conductor 32, that is, the electrical resistance between the pair of contact pins 26 and 28 can be further reduced. As described above, the electrical characteristics of the inspection probe 10 can be further improved.

Further, as described above, since the elastic body 30 having an elastic function and the conductor 32 having a conductive function are separated, even if the elastic body 30 is deteriorated, it is avoided that the conductive function is affected. can do.

Further, since the conductor 32 is formed in a strip shape having a large cross-sectional area, a large current can be passed through the conductor 32. Thereby, this inspection probe 10 can be used for a test for a large current.

In addition, the elastic body 30 and the conductor 32 are separated, so that the conductor 32 can be made a specification with an emphasis on the conduction function. This makes it possible to use the inspection probe 10 for a test for measuring precise electrical characteristics.

Further, the conductor 32 is spirally wound around the elastic body 30 formed in a cylindrical shape. As shown in FIG. 3, such a structure is such that one end 30 A of the elastic body 30 in the axial direction is press-fitted into the recess 52 of one contact pin 26, and the other contact pin 28 is elastic body 30. It can be easily manufactured by swiveling around. Therefore, the manufacturing process can be simplified and the cost can be reduced.

Further, the elastic body 30 is made of silicon rubber, and is formed in a columnar shape extending along the axial direction of the pair of contact pins 26 and 28. Therefore, the elastic modulus of the elastic body 30 and thus the contact pressure of the pair of contact pins 26 and 28 can be changed only by changing the hardness of the silicon rubber without changing the shape of the elastic body 30.

By the way, if a compression spring is interposed between the pair of contact pins 26, 28 instead of the elastic body 30 described above, the pitch of the plurality of contact pins 26 (the plurality of contact pins 28) is to be reduced. Then, in order to ensure the elasticity of the compression spring, it is necessary to lengthen the compression spring in the axial direction. For this reason, when a compression spring is interposed between the pair of contact pins 26 and 28, it is difficult to downsize the inspection probe in the axial direction of the pair of contact pins 26 and 28.

In this regard, in the above-described inspection probe 10, the elastic body 30 formed in a cylindrical shape extending along the axial direction of the pair of contact pins 26 and 28 is used. Therefore, the elastic body 30 is elongated in the axial direction. Even if not, the elastic force of the elastic body 30 can be ensured. Thereby, the pitch of the plurality of contact pins 26 (the plurality of contact pins 28) can be reduced, and the inspection probe 10 can be downsized in the axial direction of the pair of contact pins 26 and 28.

Further, since the elastic body 30 is made of silicon rubber, it is possible to suppress the elastic function from being lowered and to suppress the elastic body 30 from being affected by the solution due to washing or the like. In addition, since silicon rubber has high heat resistance, the use of the silicon rubber for the elastic body 30 makes it possible to use the inspection probe 10 in a high temperature environment.

Next, a modified example of the above-described inspection probe 10 will be described.

In the inspection probe 10 described above, the conductor 32 is formed integrally with the pair of contact pins 26, 28, but may be formed integrally with one of the pair of contact pins 26, 28. In addition, when the contact pin separated from the conductor 32 among the pair of contact pins 26 and 28 is connected to the conductor 32 by any one of soldering, brazing, welding, and welding, for example. Is preferred.

Further, although the elastic body 30 is formed in a columnar shape, it may be formed in a prismatic shape, or may be formed in a columnar shape having another cross-sectional shape.

Further, although the plurality of elastic bodies 30 provided in the above-described inspection probe 10 have the same hardness, the hardness may be different between adjacent ones. If comprised in this way, about the some contact pins 26 and 28, contact pressure and a stroke can be varied by adjoining.

Further, as shown in FIG. 4, the elastic body 30 may have a through hole 80 penetrating along the axial direction of the pair of contact pins 26 and 28. When configured in this manner, the material can be reduced and the elastic body 30 can be softened (elasticity can be lowered) as compared with the case where the elastic body 30 is formed solid. .

Further, as shown in FIG. 5, the conductor 32 is not spiral, but may extend in the axial direction of the pair of contact pins 26 and 28. When the conductor 32 extends in the axial direction of the pair of contact pins 26, 28, an extra length portion 82 is formed on the conductor 32 so as to follow the contact / separation of the pair of contact pins 26, 28. It is desirable.

In addition, when the conductor 32 extends in the axial direction of the pair of contact pins 26 and 28 as described above, the conductor 32 may be inserted into the through hole 80 shown in FIG. 4 described above. If comprised in this way, it can avoid that the conductor 32 interferes and contacts with the member provided in the exterior of the elastic body 30, and it can suppress that this conductor 32 is damaged. it can.

Further, as shown in FIGS. 6 and 7, the elastic body 30 may be gradually expanded in diameter toward the axial intermediate portion 30C. In the modification shown in FIG. 6, the elastic body 30 is formed in an oval shape with the axial direction of the pair of contact pins 26 and 28 as the major axis direction. On the other hand, in the modification shown in FIG. 7, the elastic body 30 has a shape in which a pair of truncated cones are combined.

In this way, when the elastic body 30 is gradually expanded in diameter toward the axial intermediate portion 30C, the elastic body 30 is formed in a cylindrical shape having a constant cross section in the axial direction as shown in FIG. As compared with the above, the elastic force can be increased.

Further, since the axial direction intermediate portion 30C of the elastic body 30 has a larger diameter than the

end portions

30A and 30B on both sides in the axial direction, when the elastic body 30 is compressed, the elastic body 30 becomes the axial direction intermediate portion. It is crushed starting from 30C. Therefore, the elastic body 30 can be prevented from being bent starting from a portion other than the axial intermediate portion 30C.

Further, as shown in FIGS. 6 and 7, the

recesses

52 and 62 may be shaped to match the shapes of the end portions 30 A and 30 B on both sides in the axial direction of the elastic body 30. In this case, since the

end portions

30A and 30B on both sides in the axial direction of the elastic body 30 are formed in a tapered shape that decreases in diameter toward the tip, the

end portions

30A and 30B on both sides in the axial direction of the elastic body 30 are Each of the

recesses

52 and 62 can be smoothly inserted.

Further, as shown in FIG. 6, the

recesses

52 and 62 may be formed shallowly in accordance with the shapes of the

end portions

30A and 30B on both sides in the axial direction of the elastic body 30 formed in an elliptical spherical shape. If constituted in this way, processing work of a pair of contact pins 26 and 28 can be decreased.

6 and 7, the axial intermediate portion 30 C, which is the portion having the largest outer diameter in the elastic body 30, is set at the axial central portion of the elastic body 30. However, as shown in FIG. 8, the axial intermediate portion 30 C may be set at a position shifted in the axial direction from the axial central portion of the elastic body 30.

In the present embodiment, the central portion in the axial direction of the elastic body 30 is the middle portion where the distances from the end faces on both sides in the axial direction of the elastic body 30 are equal. On the other hand, the axial intermediate portion 30C of the elastic body 30 may be the axial central portion of the elastic body 30, or may be a portion slightly shifted in the axial direction from the axial central portion.

With this configuration, the elastic forces acting on each of the pair of contact pins 26 and 28 can be made different from each other. In the modification shown in FIG. 8, as an example, the axial intermediate portion 30 C is set so as to be shifted to the other contact pin 28 side from the axial central portion of the elastic body 30. For this reason, the elastic force acting on the other contact pin 28 is larger than the elastic force acting on the one contact pin 26.

Further, as shown in FIGS. 6 to 8, the diameter of the elastic body 30 is gradually increased toward the intermediate portion 30C in the axial direction, and a through hole 80 is formed in the elastic body 30 as shown in FIG. May be. In this case, the conductor 32 may be inserted into the through hole 80.

In each of the above examples, the elastic body 30 is made of silicon rubber, but may be made of other rubber.

Further, as shown in FIG. 9, the elastic body 30 may have a plurality of rubber portions overlapping in the axial direction. That is, in this modified example, the elastic body 30 includes a pair of

first rubber portions

84 and 86 that are separated in the axial direction of the elastic body 30 and an example of the plurality of rubber portions, and the pair of

first rubber portions

84 and 86. And a second rubber portion 88 located between the two. The pair of

first rubber portions

84 and 86 are located on both axial sides of the elastic body 30. The second rubber portion 88 is formed longer in the axial direction of the elastic body 30 than each of the pair of

first rubber portions

84 and 86.

The second rubber portion 88 may have a hardness (Shore A hardness) different from that of the pair of

first rubber portions

84 and 86. In this way, when the plurality of rubber portions have different hardnesses in the axial direction, the necessary elasticity can be obtained without being caught by the characteristics when the elastic body 30 is formed of one material. Can do.

In the modification shown in FIG. 9, the second rubber portion 88 may have a hardness higher than that of each of the pair of

first rubber portions

84 and 86. For example, it is preferable that the pair of

first rubber portions

84 and 86 is set to about Shore A 10 ° and the second rubber portion 88 is set to about Shore A 30 °.

With this configuration, even when the elastic body 30 is compressed, the elastic body 30 can be prevented from being bent starting from the second rubber portion 88.

Further, in the modification shown in FIG. 9, the pair of

first rubber portions

84 and 86 and the second rubber portion 88 may have different rubber materials. For example, silicon rubber, chlorobrene rubber, or the like is preferably used as the rubber material.

Further, as shown in FIG. 9, the elastic body 30 has a plurality of rubber portions overlapping in the axial direction, and gradually increases in diameter toward the axial intermediate portion 30C as shown in FIGS. May be. Further, in this case, as shown in FIG. 4, a through hole 80 may be formed in the elastic body 30, and the conductor 32 may be inserted into the through hole 80.

Further, the pair of

first rubber portions

84 and 86 and the second rubber portion 88 shown in FIG. 9 may be formed by integral molding, or after being formed separately, for example, by bonding or the like. It may be integrated.

In the modification shown in FIG. 9, the second rubber portion 88 may have a hardness lower than that of each of the pair of

first rubber portions

84 and 86.

Further, as shown in FIG. 10, the elastic body 30 may be formed in a spiral shape with the axial direction of the pair of contact pins 26 and 28 as the central axis.

Convex portions

90 and 92 are formed at both ends of the spirally formed elastic body 30, and the

convex portions

90 and 92 are press-fitted into the

concave portions

52 and 62, respectively.

In addition, when the elastic body 30 is formed in a spiral shape as described above, the conductor 32 (see FIG. 2) may be formed in a spiral shape as long as it is provided so as not to be entangled with the elastic body 30. . Further, the conductor 32 is formed so as to extend in the axial direction of the pair of contact pins 26 and 28 as shown in FIG. 5, and then inside the elastic body 30 formed in a spiral shape as shown in FIG. It may be inserted.

As mentioned above, although one embodiment of the technique disclosed in the present application has been described, the technique disclosed in the present application is not limited to the above, and various modifications may be made without departing from the spirit of the present invention. Of course, it is possible.

In the following, the description of the sign will be described.
DESCRIPTION OF SYMBOLS 10

Probe

26,28 Contact pin 30 Elastic body 30C Axis direction intermediate part (an example of a part with the largest outer diameter in an elastic body)
32 Conductor 80 Through-

hole

84, 86 First rubber part (an example of a part of a plurality of rubber parts)
88 Second rubber part (an example of part of multiple rubber parts)

Claims

A pair of contact pins that have electrical conductivity, are axially spaced from each other, and are movable in the axial direction;
An elastic body interposed between the pair of contact pins and pressing the pair of contact pins away from each other;
A conductor for conducting the pair of contact pins;
Probe with.
The conductor is formed integrally with at least one of the pair of contact pins.
The probe according to claim 1.
The elastic body is formed in a column shape extending along the axial direction of the pair of contact pins.
The probe according to claim 2.
The conductor is spirally wound around the elastic body,
The probe according to claim 3.
The elastic body is made of an insulating elastic material and is formed in a column shape extending along the axial direction of the pair of contact pins.
The probe according to claim 1 or claim 2.
The elastic body has a through-hole penetrating along the axial direction of the pair of contact pins.
The probe according to claim 5.
The conductor is inserted through the through hole,
The probe according to claim 6.
The elastic body is gradually expanded in diameter toward the axially intermediate portion,
The probe according to any one of claims 5 to 7.
The largest outer diameter portion of the elastic body is set at a position shifted in the axial direction from the axial central portion of the elastic body.
The probe according to claim 8.
The elastic body has a plurality of rubber portions overlapping in the axial direction,
The plurality of rubber portions have different hardnesses in adjacent axial directions,
The probe according to any one of claims 5 to 9.
The plurality of rubber portions are
A pair of first rubber portions spaced apart in the axial direction of the elastic body;
A second rubber part located between the pair of first rubber parts and having a higher hardness than each of the pair of first rubber parts;
have,
The probe according to claim 10.