WO2013039340A3 - 평판 패널 검사방법 - Google Patents

평판 패널 검사방법 Download PDF

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Publication number
WO2013039340A3
WO2013039340A3 PCT/KR2012/007352 KR2012007352W WO2013039340A3 WO 2013039340 A3 WO2013039340 A3 WO 2013039340A3 KR 2012007352 W KR2012007352 W KR 2012007352W WO 2013039340 A3 WO2013039340 A3 WO 2013039340A3
Authority
WO
WIPO (PCT)
Prior art keywords
flat panel
camera
measuring target
inspecting
measurement location
Prior art date
Application number
PCT/KR2012/007352
Other languages
English (en)
French (fr)
Other versions
WO2013039340A2 (ko
Inventor
손재호
이현민
강민구
이상윤
임쌍근
Original Assignee
(주)인텍플러스
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by (주)인텍플러스 filed Critical (주)인텍플러스
Priority to US14/343,345 priority Critical patent/US9412159B2/en
Priority to CN201280045201.2A priority patent/CN103858001B/zh
Publication of WO2013039340A2 publication Critical patent/WO2013039340A2/ko
Publication of WO2013039340A3 publication Critical patent/WO2013039340A3/ko

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Classifications

    • G—PHYSICS
    • G06—COMPUTING; CALCULATING OR COUNTING
    • G06T—IMAGE DATA PROCESSING OR GENERATION, IN GENERAL
    • G06T7/00—Image analysis
    • G06T7/0002—Inspection of images, e.g. flaw detection
    • G06T7/0004—Industrial image inspection
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/95—Investigating the presence of flaws or contamination characterised by the material or shape of the object to be examined
    • G01N21/956—Inspecting patterns on the surface of objects
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/30—Measuring arrangements characterised by the use of optical techniques for measuring roughness or irregularity of surfaces
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/95—Investigating the presence of flaws or contamination characterised by the material or shape of the object to be examined
    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on liquid crystals, e.g. single liquid crystal display cells
    • H—ELECTRICITY
    • H04—ELECTRIC COMMUNICATION TECHNIQUE
    • H04N—PICTORIAL COMMUNICATION, e.g. TELEVISION
    • H04N7/00—Television systems
    • H04N7/18—Closed-circuit television [CCTV] systems, i.e. systems in which the video signal is not broadcast
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/95—Investigating the presence of flaws or contamination characterised by the material or shape of the object to be examined
    • G01N2021/9513—Liquid crystal panels
    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on liquid crystals, e.g. single liquid crystal display cells
    • G02F1/1306—Details
    • G02F1/1309—Repairing; Testing
    • G—PHYSICS
    • G06—COMPUTING; CALCULATING OR COUNTING
    • G06T—IMAGE DATA PROCESSING OR GENERATION, IN GENERAL
    • G06T2207/00—Indexing scheme for image analysis or image enhancement
    • G06T2207/30—Subject of image; Context of image processing
    • G06T2207/30108—Industrial image inspection
    • G06T2207/30121—CRT, LCD or plasma display

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Chemical & Material Sciences (AREA)
  • General Health & Medical Sciences (AREA)
  • Pathology (AREA)
  • Immunology (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • Nonlinear Science (AREA)
  • Theoretical Computer Science (AREA)
  • Computer Vision & Pattern Recognition (AREA)
  • Quality & Reliability (AREA)
  • Multimedia (AREA)
  • Signal Processing (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Optics & Photonics (AREA)
  • Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
  • Testing Of Optical Devices Or Fibers (AREA)
  • Length Measuring Devices By Optical Means (AREA)

Abstract

평판 패널을 검사하는 방법을 개시한다. 평판 패널 검사방법은, 평판 패널과 카메라 중 적어도 어느 하나를 수평 이동시켜 카메라를 평판 패널의 측정 위치에 배치하는 단계; 측정 위치에서 평판 패널의 피측정물에 대해 카메라의 초점을 자동으로 맞추는 단계; 카메라의 초점이 맞춰진 상태에서 카메라를 현재 위치를 중심으로 설정 구간 내에서 상하 이동시켜가며 피측정물에 대해 다수의 영상을 획득하는 단계; 및 획득된 다수의 영상 중 피측정물에 대한 선명도가 가장 높은 영상을 선택한 후, 선택된 영상을 처리하여 피측정물의 불량 여부를 판별하는 단계를 포함한다.
PCT/KR2012/007352 2011-09-15 2012-09-13 평판 패널 검사방법 WO2013039340A2 (ko)

Priority Applications (2)

Application Number Priority Date Filing Date Title
US14/343,345 US9412159B2 (en) 2011-09-15 2012-09-13 Method for inspecting flat panel
CN201280045201.2A CN103858001B (zh) 2011-09-15 2012-09-13 用于检查平板的方法

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
KR1020110093102A KR101306289B1 (ko) 2011-09-15 2011-09-15 평판 패널 검사방법
KR10-2011-0093102 2011-09-15

Publications (2)

Publication Number Publication Date
WO2013039340A2 WO2013039340A2 (ko) 2013-03-21
WO2013039340A3 true WO2013039340A3 (ko) 2013-05-10

Family

ID=47883887

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/KR2012/007352 WO2013039340A2 (ko) 2011-09-15 2012-09-13 평판 패널 검사방법

Country Status (5)

Country Link
US (1) US9412159B2 (ko)
KR (1) KR101306289B1 (ko)
CN (1) CN103858001B (ko)
TW (1) TWI477770B (ko)
WO (1) WO2013039340A2 (ko)

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US9790465B2 (en) 2013-04-30 2017-10-17 Corning Incorporated Spheroid cell culture well article and methods thereof
CN104345481B (zh) * 2013-07-30 2017-11-10 北京京东方光电科技有限公司 一种液晶屏的质量检测方法、装置及设备
US9652842B2 (en) 2013-07-30 2017-05-16 Boe Technology Group Co., Ltd. Method, apparatus and equipment of inspecting quality of LCD
EP3212759A1 (en) 2014-10-29 2017-09-06 Corning Incorporated Cell culture insert
CN104677314A (zh) 2015-03-02 2015-06-03 合肥京东方光电科技有限公司 检测显示面板表面平坦度的装置及方法
KR102640848B1 (ko) * 2016-03-03 2024-02-28 삼성전자주식회사 시료 검사 방법, 시료 검사 시스템, 및 이들을 이용한 반도체 소자의 검사 방법
US20200080838A1 (en) * 2017-01-20 2020-03-12 Intekplus Co.,Ltd. Apparatus and method for measuring three-dimensional shape
CN111051494B (zh) 2017-07-14 2024-03-29 康宁股份有限公司 用于手动或自动培养基交换的3d细胞培养容器
CN111094536B (zh) 2017-07-14 2024-03-29 康宁股份有限公司 用于3d培养的细胞培养容器及培养3d细胞的方法
US11857970B2 (en) 2017-07-14 2024-01-02 Corning Incorporated Cell culture vessel
JP6965693B2 (ja) * 2017-10-30 2021-11-10 オムロン株式会社 画像処理装置、画像処理方法、および画像処理プログラム
JP2019219357A (ja) * 2018-06-22 2019-12-26 名古屋電機工業株式会社 撮影装置、撮影方法および撮影プログラム
PL3649226T3 (pl) 2018-07-13 2022-05-16 Corning Incorporated Płytki mikrodołkowe z boczną ścianką zawierającą powierzchnię dostarczającą płynną pożywkę
US11661574B2 (en) 2018-07-13 2023-05-30 Corning Incorporated Fluidic devices including microplates with interconnected wells
WO2020013845A1 (en) 2018-07-13 2020-01-16 Corning Incorporated Cell culture vessels with stabilizer devices
CN110161729B (zh) * 2019-05-17 2021-08-03 深圳市华星光电半导体显示技术有限公司 显示面板测试方法及系统
CN111199536B (zh) * 2019-12-13 2023-11-14 深圳市瑞沃德生命科技有限公司 一种聚焦评价方法及其装置
CN111504221A (zh) * 2020-05-15 2020-08-07 苏州精濑光电有限公司 一种网板图像追焦装置及其方法
WO2022031644A1 (en) * 2020-08-04 2022-02-10 Corning Incorporated Methods and apparatus for inspecting a material

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Publication number Priority date Publication date Assignee Title
JPH0996513A (ja) * 1995-09-29 1997-04-08 Dainippon Printing Co Ltd 画像取得装置
JP2004061289A (ja) * 2002-07-29 2004-02-26 Toshiba Corp パターン検査装置
KR20100124742A (ko) * 2008-03-04 2010-11-29 유겐가이샤 교도 셋케이 기카쿠 전자부품 검사 방법과 이에 이용되는 장치
JP2011082506A (ja) * 2009-09-09 2011-04-21 Juki Corp 部品検査装置及び部品実装装置

Also Published As

Publication number Publication date
KR20130029682A (ko) 2013-03-25
TW201315995A (zh) 2013-04-16
CN103858001A (zh) 2014-06-11
KR101306289B1 (ko) 2013-09-09
US20140226004A1 (en) 2014-08-14
CN103858001B (zh) 2017-05-10
US9412159B2 (en) 2016-08-09
TWI477770B (zh) 2015-03-21
WO2013039340A2 (ko) 2013-03-21

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