WO2013039340A3 - 평판 패널 검사방법 - Google Patents

평판 패널 검사방법 Download PDF

Info

Publication number
WO2013039340A3
WO2013039340A3 PCT/KR2012/007352 KR2012007352W WO2013039340A3 WO 2013039340 A3 WO2013039340 A3 WO 2013039340A3 KR 2012007352 W KR2012007352 W KR 2012007352W WO 2013039340 A3 WO2013039340 A3 WO 2013039340A3
Authority
WO
WIPO (PCT)
Prior art keywords
flat panel
camera
measuring target
inspecting
measurement location
Prior art date
Application number
PCT/KR2012/007352
Other languages
English (en)
French (fr)
Other versions
WO2013039340A2 (ko
Inventor
손재호
이현민
강민구
이상윤
임쌍근
Original Assignee
(주)인텍플러스
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by (주)인텍플러스 filed Critical (주)인텍플러스
Priority to US14/343,345 priority Critical patent/US9412159B2/en
Priority to CN201280045201.2A priority patent/CN103858001B/zh
Publication of WO2013039340A2 publication Critical patent/WO2013039340A2/ko
Publication of WO2013039340A3 publication Critical patent/WO2013039340A3/ko

Links

Classifications

    • G—PHYSICS
    • G06—COMPUTING; CALCULATING OR COUNTING
    • G06T—IMAGE DATA PROCESSING OR GENERATION, IN GENERAL
    • G06T7/00—Image analysis
    • G06T7/0002—Inspection of images, e.g. flaw detection
    • G06T7/0004—Industrial image inspection
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/95—Investigating the presence of flaws or contamination characterised by the material or shape of the object to be examined
    • G01N21/956—Inspecting patterns on the surface of objects
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/30—Measuring arrangements characterised by the use of optical techniques for measuring roughness or irregularity of surfaces
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/95—Investigating the presence of flaws or contamination characterised by the material or shape of the object to be examined
    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on liquid crystals, e.g. single liquid crystal display cells
    • H—ELECTRICITY
    • H04—ELECTRIC COMMUNICATION TECHNIQUE
    • H04N—PICTORIAL COMMUNICATION, e.g. TELEVISION
    • H04N7/00—Television systems
    • H04N7/18—Closed-circuit television [CCTV] systems, i.e. systems in which the video signal is not broadcast
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/95—Investigating the presence of flaws or contamination characterised by the material or shape of the object to be examined
    • G01N2021/9513—Liquid crystal panels
    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on liquid crystals, e.g. single liquid crystal display cells
    • G02F1/1306—Details
    • G02F1/1309—Repairing; Testing
    • G—PHYSICS
    • G06—COMPUTING; CALCULATING OR COUNTING
    • G06T—IMAGE DATA PROCESSING OR GENERATION, IN GENERAL
    • G06T2207/00—Indexing scheme for image analysis or image enhancement
    • G06T2207/30—Subject of image; Context of image processing
    • G06T2207/30108—Industrial image inspection
    • G06T2207/30121—CRT, LCD or plasma display

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Chemical & Material Sciences (AREA)
  • Pathology (AREA)
  • General Health & Medical Sciences (AREA)
  • Immunology (AREA)
  • Biochemistry (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Nonlinear Science (AREA)
  • Computer Vision & Pattern Recognition (AREA)
  • Signal Processing (AREA)
  • Theoretical Computer Science (AREA)
  • Multimedia (AREA)
  • Quality & Reliability (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Optics & Photonics (AREA)
  • Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
  • Testing Of Optical Devices Or Fibers (AREA)
  • Length Measuring Devices By Optical Means (AREA)

Abstract

평판 패널을 검사하는 방법을 개시한다. 평판 패널 검사방법은, 평판 패널과 카메라 중 적어도 어느 하나를 수평 이동시켜 카메라를 평판 패널의 측정 위치에 배치하는 단계; 측정 위치에서 평판 패널의 피측정물에 대해 카메라의 초점을 자동으로 맞추는 단계; 카메라의 초점이 맞춰진 상태에서 카메라를 현재 위치를 중심으로 설정 구간 내에서 상하 이동시켜가며 피측정물에 대해 다수의 영상을 획득하는 단계; 및 획득된 다수의 영상 중 피측정물에 대한 선명도가 가장 높은 영상을 선택한 후, 선택된 영상을 처리하여 피측정물의 불량 여부를 판별하는 단계를 포함한다.
PCT/KR2012/007352 2011-09-15 2012-09-13 평판 패널 검사방법 WO2013039340A2 (ko)

Priority Applications (2)

Application Number Priority Date Filing Date Title
US14/343,345 US9412159B2 (en) 2011-09-15 2012-09-13 Method for inspecting flat panel
CN201280045201.2A CN103858001B (zh) 2011-09-15 2012-09-13 用于检查平板的方法

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
KR10-2011-0093102 2011-09-15
KR1020110093102A KR101306289B1 (ko) 2011-09-15 2011-09-15 평판 패널 검사방법

Publications (2)

Publication Number Publication Date
WO2013039340A2 WO2013039340A2 (ko) 2013-03-21
WO2013039340A3 true WO2013039340A3 (ko) 2013-05-10

Family

ID=47883887

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/KR2012/007352 WO2013039340A2 (ko) 2011-09-15 2012-09-13 평판 패널 검사방법

Country Status (5)

Country Link
US (1) US9412159B2 (ko)
KR (1) KR101306289B1 (ko)
CN (1) CN103858001B (ko)
TW (1) TWI477770B (ko)
WO (1) WO2013039340A2 (ko)

Families Citing this family (19)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US9790465B2 (en) 2013-04-30 2017-10-17 Corning Incorporated Spheroid cell culture well article and methods thereof
US9652842B2 (en) 2013-07-30 2017-05-16 Boe Technology Group Co., Ltd. Method, apparatus and equipment of inspecting quality of LCD
CN104345481B (zh) * 2013-07-30 2017-11-10 北京京东方光电科技有限公司 一种液晶屏的质量检测方法、装置及设备
WO2016069895A1 (en) 2014-10-29 2016-05-06 Corning Incorporated Cell culture insert
CN104677314A (zh) 2015-03-02 2015-06-03 合肥京东方光电科技有限公司 检测显示面板表面平坦度的装置及方法
KR102640848B1 (ko) * 2016-03-03 2024-02-28 삼성전자주식회사 시료 검사 방법, 시료 검사 시스템, 및 이들을 이용한 반도체 소자의 검사 방법
CN110192079A (zh) * 2017-01-20 2019-08-30 英泰克普拉斯有限公司 三维形状测量装置和测量方法
JP7245222B2 (ja) 2017-07-14 2023-03-23 コーニング インコーポレイテッド 手動又は自動で培地を交換するための３ｄ細胞培養容器
US11857970B2 (en) 2017-07-14 2024-01-02 Corning Incorporated Cell culture vessel
US11584906B2 (en) 2017-07-14 2023-02-21 Corning Incorporated Cell culture vessel for 3D culture and methods of culturing 3D cells
JP6965693B2 (ja) * 2017-10-30 2021-11-10 オムロン株式会社 画像処理装置、画像処理方法、および画像処理プログラム
JP2019219357A (ja) * 2018-06-22 2019-12-26 名古屋電機工業株式会社 撮影装置、撮影方法および撮影プログラム
EP3649226B1 (en) 2018-07-13 2022-04-06 Corning Incorporated Microcavity dishes with sidewall including liquid medium delivery surface
US11732227B2 (en) 2018-07-13 2023-08-22 Corning Incorporated Cell culture vessels with stabilizer devices
EP3649227A1 (en) 2018-07-13 2020-05-13 Corning Incorporated Fluidic devices including microplates with interconnected wells
CN110161729B (zh) * 2019-05-17 2021-08-03 深圳市华星光电半导体显示技术有限公司 显示面板测试方法及系统
CN111199536B (zh) * 2019-12-13 2023-11-14 深圳市瑞沃德生命科技有限公司 一种聚焦评价方法及其装置
CN111504221A (zh) * 2020-05-15 2020-08-07 苏州精濑光电有限公司 一种网板图像追焦装置及其方法
US20230314337A1 (en) * 2020-08-04 2023-10-05 Corning Incorporated Methods and apparatus for inspecting a material

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0996513A (ja) * 1995-09-29 1997-04-08 Dainippon Printing Co Ltd 画像取得装置
JP2004061289A (ja) * 2002-07-29 2004-02-26 Toshiba Corp パターン検査装置
KR20100124742A (ko) * 2008-03-04 2010-11-29 유겐가이샤 교도 셋케이 기카쿠 전자부품 검사 방법과 이에 이용되는 장치
JP2011082506A (ja) * 2009-09-09 2011-04-21 Juki Corp 部品検査装置及び部品実装装置

Family Cites Families (18)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE19817824A1 (de) * 1998-04-21 1999-10-28 Focke & Co Vorrichtung zum Prüfen von Einheiten aus mehreren Einzelgegenständen, Materiallagen oder dergleichen
JP4008168B2 (ja) 1999-11-26 2007-11-14 アンリツ株式会社 プリント基板検査装置
US6571196B2 (en) * 1999-11-29 2003-05-27 Hitachi Kokusai Electric Inc. Size inspection/measurement method and size inspection/measurement apparatus
US6927847B2 (en) * 2001-09-13 2005-08-09 Hitachi High-Technologies Corporation Method and apparatus for inspecting pattern defects
KR100521016B1 (ko) * 2002-01-21 2005-10-11 가부시키가이샤 히다치 고쿠사이 덴키 선폭 측정 방법 및 선폭 측정 장치
US7538815B1 (en) * 2002-01-23 2009-05-26 Marena Systems Corporation Autofocus system and method using focus measure gradient
KR100724475B1 (ko) * 2002-11-13 2007-06-04 엘지.필립스 엘시디 주식회사 액정 표시패널의 실 디스펜서 및 이를 이용한 실 패턴의단선 검출방법
TWI236562B (en) * 2002-11-21 2005-07-21 Hitachi Int Electric Inc A method of detecting a pattern and an apparatus thereof
JP3872007B2 (ja) * 2002-12-16 2007-01-24 シーケーディ株式会社 計測装置及び検査装置
KR100955486B1 (ko) 2004-01-30 2010-04-30 삼성전자주식회사 디스플레이 패널의 검사장치 및 검사방법
US7084970B2 (en) * 2004-05-14 2006-08-01 Photon Dynamics, Inc. Inspection of TFT LCD panels using on-demand automated optical inspection sub-system
JP2005337957A (ja) * 2004-05-28 2005-12-08 Dainippon Screen Mfg Co Ltd 基板検査装置
US7636466B2 (en) * 2006-01-11 2009-12-22 Orbotech Ltd System and method for inspecting workpieces having microscopic features
JP5090041B2 (ja) * 2006-04-03 2012-12-05 ルネサスエレクトロニクス株式会社 フォーカス調整方法、その方法を用いた装置、およびその方法に用いられるウェハ
JP4102842B1 (ja) * 2006-12-04 2008-06-18 東京エレクトロン株式会社 欠陥検出装置、欠陥検出方法、情報処理装置、情報処理方法及びそのプログラム
JP2009156857A (ja) 2007-12-05 2009-07-16 Micronics Japan Co Ltd ディスプレイパネルの検査方法および検査装置
JP5178561B2 (ja) 2009-02-06 2013-04-10 Ｈｏｙａ株式会社 パターン検査方法、パターン検査装置、フォトマスク製造方法、およびパターン転写方法
JP5254270B2 (ja) * 2010-04-09 2013-08-07 株式会社ニューフレアテクノロジー 検査方法および検査装置

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0996513A (ja) * 1995-09-29 1997-04-08 Dainippon Printing Co Ltd 画像取得装置
JP2004061289A (ja) * 2002-07-29 2004-02-26 Toshiba Corp パターン検査装置
KR20100124742A (ko) * 2008-03-04 2010-11-29 유겐가이샤 교도 셋케이 기카쿠 전자부품 검사 방법과 이에 이용되는 장치
JP2011082506A (ja) * 2009-09-09 2011-04-21 Juki Corp 部品検査装置及び部品実装装置

Also Published As

Publication number Publication date
US9412159B2 (en) 2016-08-09
US20140226004A1 (en) 2014-08-14
KR20130029682A (ko) 2013-03-25
CN103858001A (zh) 2014-06-11
KR101306289B1 (ko) 2013-09-09
CN103858001B (zh) 2017-05-10
TWI477770B (zh) 2015-03-21
TW201315995A (zh) 2013-04-16
WO2013039340A2 (ko) 2013-03-21

Similar Documents

Publication Publication Date Title
WO2013039340A3 (ko) 평판 패널 검사방법
EP2584529A3 (en) Method of image processing and device therefore
WO2017009823A9 (en) A solar row onsite automatic inspection system
WO2014164550A3 (en) System and methods for calibration of an array camera
WO2016034428A3 (en) Method of measuring a property of a target structure, inspection apparatus, lithographic system and device manufacturing method
WO2012154320A8 (en) System and method for detecting and repairing defects in an electrochromic device using thermal imaging
WO2015070023A3 (en) Automated detection of eye alignment
WO2012091494A3 (ko) 기판 검사방법
WO2012100030A3 (en) Imaging and visualization systems, instruments, and methods using optical coherence tomography
GB201117905D0 (en) Method for processing an image and an image photographing apparatus applying the same
TW201614586A (en) Repeater detection
EP3565237A3 (en) Method and apparatus for capturing images
MX364011B (es) Aparato y metodo de medicion de soldadura.
WO2013003679A3 (en) Method and system for webpage regression testing
WO2015054194A3 (en) System and method for camera based position and orientation measurement
JP2012073953A5 (ko)
WO2016106852A1 (zh) 一种显示面板的缺陷的灰阶补偿方法及灰阶补偿系统
EP2569934A4 (en) IMAGING APPARATUS, IMAGE PROCESSING METHOD AND RECORDING MEDIUM FOR RECORDING A PROGRAM THEREFOR
WO2012012265A3 (en) 3d microscope and methods of measuring patterned substrates
MX2015004816A (es) Aparato y metodo para determinar la desviacion de posicion objetivo de dos cuerpos.
WO2011122007A3 (en) Imaging apparatus and imaging method
WO2014085798A3 (en) A method and apparatus of profile measurement
WO2014186476A3 (en) Integrated multi-pass inspection
WO2012072974A3 (en) An imaging technique and imaging system
WO2014153322A3 (en) Image quality assessment of microscopy images

Legal Events

Date Code Title Description
121 Ep: the epo has been informed by wipo that ep was designated in this application

Ref document number: 12831749

Country of ref document: EP

Kind code of ref document: A2

WWE Wipo information: entry into national phase

Ref document number: 14343345

Country of ref document: US

NENP Non-entry into the national phase

Ref country code: DE

122 Ep: pct application non-entry in european phase

Ref document number: 12831749

Country of ref document: EP

Kind code of ref document: A2