WO2013032218A3 - 동축 프로브 - Google Patents

동축 프로브 Download PDF

Info

Publication number
WO2013032218A3
WO2013032218A3 PCT/KR2012/006884 KR2012006884W WO2013032218A3 WO 2013032218 A3 WO2013032218 A3 WO 2013032218A3 KR 2012006884 W KR2012006884 W KR 2012006884W WO 2013032218 A3 WO2013032218 A3 WO 2013032218A3
Authority
WO
WIPO (PCT)
Prior art keywords
conductor
semiconductor device
coaxial probe
inner conductor
lower contact
Prior art date
Application number
PCT/KR2012/006884
Other languages
English (en)
French (fr)
Other versions
WO2013032218A2 (ko
Inventor
이채윤
Original Assignee
리노공업 주식회사
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from KR1020110088291A external-priority patent/KR101299087B1/ko
Priority claimed from KR1020120091138A external-priority patent/KR101299071B1/ko
Application filed by 리노공업 주식회사 filed Critical 리노공업 주식회사
Priority to US14/342,024 priority Critical patent/US9250264B2/en
Priority to JP2014522761A priority patent/JP5937208B2/ja
Priority to CN201280041462.7A priority patent/CN103765227B/zh
Publication of WO2013032218A2 publication Critical patent/WO2013032218A2/ko
Publication of WO2013032218A3 publication Critical patent/WO2013032218A3/ko

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R1/00—Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
    • G01R1/02—General constructional details
    • G01R1/06—Measuring leads; Measuring probes
    • G01R1/067—Measuring probes
    • G01R1/06772—High frequency probes
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R1/00—Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
    • G01R1/02—General constructional details
    • G01R1/06—Measuring leads; Measuring probes
    • G01R1/067—Measuring probes
    • G01R1/06711—Probe needles; Cantilever beams; "Bump" contacts; Replaceable probe pins
    • G01R1/06716—Elastic
    • G01R1/06722—Spring-loaded

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Measuring Leads Or Probes (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)

Abstract

내구성 및 생산성을 향상시킬 수 있는 동축 프로브를 개시한다. 개시된 동축 프로브는, 반도체 디바이스에 접촉 가능한 상부 콘택트와, 상기 반도체 디바이스를 테스트 하기 위한 테스터에 접촉 가능한 하부 콘택트와, 상기 상부 콘택트 및 상기 하부 콘택트가 서로 멀어지도록 상기 상부 콘택트 및 상기 하부 콘택트 중 적어도 하나를 탄성바이어스 시키는 내부탄성부재를 포함하는 내부도체와; 상기 내부도체를 둘러싸는 외부도체와; 상기 내부도체와 상기 외부도체 간의 소정의 에어갭이 존재하도록 상기 내부도체와 상기 외부도체 사이의 양단에 각각 삽입되는 복수의 갭부재와; 상기 반도체 디바이스 및 상기 테스터 중 적어도 어느 하나를 상기 외부도체로부터 멀어지는 방향으로 탄성바이어스 시키도록 상기 외부도체 외주면에 삽입된 적어도 하나의 외부탄성부재를 포함하는 것을 특징으로 한다.
PCT/KR2012/006884 2011-08-30 2012-08-29 동축 프로브 WO2013032218A2 (ko)

Priority Applications (3)

Application Number Priority Date Filing Date Title
US14/342,024 US9250264B2 (en) 2011-08-30 2012-08-29 Coaxial probe
JP2014522761A JP5937208B2 (ja) 2011-08-30 2012-08-29 同軸プローブ
CN201280041462.7A CN103765227B (zh) 2011-08-30 2012-08-29 同轴探针

Applications Claiming Priority (6)

Application Number Priority Date Filing Date Title
KR20110086950 2011-08-30
KR10-2011-0086950 2011-08-30
KR1020110088291A KR101299087B1 (ko) 2011-09-01 2011-09-01 동축 프로브
KR10-2011-0088291 2011-09-01
KR1020120091138A KR101299071B1 (ko) 2011-08-30 2012-08-21 동축 프로브
KR10-2012-0091138 2012-08-21

Publications (2)

Publication Number Publication Date
WO2013032218A2 WO2013032218A2 (ko) 2013-03-07
WO2013032218A3 true WO2013032218A3 (ko) 2013-04-25

Family

ID=47757046

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/KR2012/006884 WO2013032218A2 (ko) 2011-08-30 2012-08-29 동축 프로브

Country Status (1)

Country Link
WO (1) WO2013032218A2 (ko)

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH09152447A (ja) * 1995-12-01 1997-06-10 Yokowo Co Ltd 両端可動形同軸コンタクトプローブ
JP2002228682A (ja) * 2001-02-02 2002-08-14 Tokyo Electron Ltd プローブ
KR20040045620A (ko) * 2002-11-25 2004-06-02 리노공업주식회사 고주파용 프로브의 에어 인터페이스 장치
JP2010019797A (ja) * 2008-07-14 2010-01-28 Fujitsu Ltd 両側プローブピン用ソケット、両側プローブピン、及びプローブユニット

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH09152447A (ja) * 1995-12-01 1997-06-10 Yokowo Co Ltd 両端可動形同軸コンタクトプローブ
JP2002228682A (ja) * 2001-02-02 2002-08-14 Tokyo Electron Ltd プローブ
KR20040045620A (ko) * 2002-11-25 2004-06-02 리노공업주식회사 고주파용 프로브의 에어 인터페이스 장치
JP2010019797A (ja) * 2008-07-14 2010-01-28 Fujitsu Ltd 両側プローブピン用ソケット、両側プローブピン、及びプローブユニット

Also Published As

Publication number Publication date
WO2013032218A2 (ko) 2013-03-07

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