WO2013008704A1 - 紫外線照射装置、および、紫外線照射方法 - Google Patents
紫外線照射装置、および、紫外線照射方法 Download PDFInfo
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- WO2013008704A1 WO2013008704A1 PCT/JP2012/067148 JP2012067148W WO2013008704A1 WO 2013008704 A1 WO2013008704 A1 WO 2013008704A1 JP 2012067148 W JP2012067148 W JP 2012067148W WO 2013008704 A1 WO2013008704 A1 WO 2013008704A1
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- light guide
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- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on liquid crystals, e.g. single liquid crystal display cells
- G02F1/133—Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
- G02F1/1333—Constructional arrangements; Manufacturing methods
- G02F1/1339—Gaskets; Spacers; Sealing of cells
-
- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on liquid crystals, e.g. single liquid crystal display cells
- G02F1/133—Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
- G02F1/1333—Constructional arrangements; Manufacturing methods
- G02F1/1341—Filling or closing of cells
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
- B29C—SHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
- B29C35/00—Heating, cooling or curing, e.g. crosslinking or vulcanising; Apparatus therefor
- B29C35/02—Heating or curing, e.g. crosslinking or vulcanizing during moulding, e.g. in a mould
- B29C35/08—Heating or curing, e.g. crosslinking or vulcanizing during moulding, e.g. in a mould by wave energy or particle radiation
-
- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on liquid crystals, e.g. single liquid crystal display cells
-
- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on liquid crystals, e.g. single liquid crystal display cells
- G02F1/1303—Apparatus specially adapted to the manufacture of LCDs
Definitions
- the present invention relates to an ultraviolet irradiation device and an ultraviolet irradiation method.
- the liquid crystal display panel is configured by filling a liquid crystal between a color filter (CF) substrate and a thin film transistor (TFT) substrate.
- the CF substrate and the TFT substrate are arranged vertically in the chamber, and the chamber is evacuated. In this state, the two substrates are bonded together with a sealing material.
- ultraviolet curable resins are frequently used as such sealing materials.
- Document 1 Japanese Published Patent Application No. 2006-30933 discloses an ultraviolet irradiation device that irradiates ultraviolet rays to cure a sealing material made of an ultraviolet curable resin in a bonding process between a CF substrate and a TFT substrate.
- an ultraviolet light-emitting diode is movably disposed above the CF substrate and the TFT substrate disposed above and below, and follows the planar shape of the sealing material applied between the CF substrate and the TFT substrate. Ultraviolet light is irradiated from the ultraviolet light emitting diode scanned.
- the ultraviolet light emitting diode and its scanning mechanism are provided outside the chamber, the enlargement of the chamber can be suppressed to some extent.
- the light emitting unit ultraviolet light emitting diode
- the object shield material
- ultraviolet light ultraviolet light
- the object irradiated with ultraviolet light
- the object is arranged in different environments (in the atmosphere and in a vacuum). It is not easy to irradiate ultraviolet rays while maintaining a protected environment and not irradiating parts other than the object (sealant) with unnecessary ultraviolet rays.
- the present invention has been made in view of the above problems, and efficiently irradiates an object with ultraviolet rays while maintaining an environment in which the object is disposed and preventing unnecessary ultraviolet rays from being irradiated other than the object.
- An object is to provide an ultraviolet irradiation apparatus and an ultraviolet irradiation method.
- the ultraviolet irradiation device includes a light emitting unit that emits ultraviolet rays, and a light guide that guides the ultraviolet rays from the light emitting unit to an object.
- the light guide includes a light guide part that transmits ultraviolet light, an incident part that allows ultraviolet light from the light emitting part to enter the light guide part, and an output part that emits ultraviolet light that has passed through the light guide part. And having.
- the light emitting unit is disposed in a second environment different from the first environment in which the object is disposed.
- the light guide is arranged so that the emitting part is located in the first environment and the incident part is located in the second environment.
- the ultraviolet irradiation apparatus of the 2nd form which concerns on this invention is equipped with the incident side optical member arrange
- the said incident side optical member is comprised so that the ultraviolet-ray radiated
- the ultraviolet irradiation device of the 3rd form concerning the present invention is provided with the outgoing side optical member arranged between the outgoing part and the subject in the 1st or 2nd form.
- the emission side optical member is configured to collect ultraviolet rays emitted from the emission unit on the object.
- the ultraviolet irradiation device of the fourth form according to the present invention comprises a plurality of ultraviolet irradiation units having the light emitting part and the light guide in any one of the first to third forms.
- the plurality of ultraviolet irradiation units are arranged such that an ultraviolet irradiation region equal to the shape of the object is formed.
- the light guide includes a reflective layer.
- the reflection layer is formed on the surface of the light guide unit, and is configured to reflect the ultraviolet rays so that the ultraviolet rays that have entered the light guide unit from the incident unit are emitted from the emission unit.
- the sixth aspect of the ultraviolet irradiation apparatus according to the present invention is provided with adjusting means in the third aspect.
- the adjusting means is configured to adjust a condensing position where the emitting side optical member collects ultraviolet rays from the emitting unit.
- the first environment is a vacuum environment.
- the second environment is an atmospheric environment.
- the light guide section is formed in a plate shape with a material that transmits ultraviolet light.
- the incident part is one end face of the light guide part.
- the said output part is the other end surface of the said light guide part.
- the light guide is arranged so that the emission part faces the object.
- the light emitting section is attached to the light guide.
- the light guide is attached to a wall that partitions the first environment from the second environment.
- the ultraviolet irradiation apparatus includes a chamber in any one of the first to ninth aspects.
- the chamber is maintained in the first environment and has a storage room for storing the object.
- the second environment is an environment outside the chamber.
- the light guide is attached to the chamber such that the emitting portion is located inside the chamber and the incident portion is located outside the chamber.
- An ultraviolet irradiation method includes a step of preparing a light emitting part that emits ultraviolet light, a light guide part that transmits ultraviolet light, and ultraviolet light from the light emitting part to enter the light guide part.
- the present invention relates to an ultraviolet irradiation device and an ultraviolet irradiation method, and more particularly to an ultraviolet irradiation device and an ultraviolet irradiation method for irradiating ultraviolet curable resin with ultraviolet rays.
- the bonding process of the liquid crystal display panel is performed in the vacuum chamber 300 (see FIG. 8).
- the chamber 300 has a storage chamber 500 for storing an object.
- the chamber 300 includes, for example, a box-shaped main body 400 whose one surface (upper surface in FIG. 8) is opened, and a top plate 200 attached to the main body 400 so as to cover one surface of the main body 400.
- the storage chamber 500 is maintained in a first environment (in this embodiment, a vacuum environment).
- a CF substrate 100 and a TFT substrate 101 are arranged side by side in the vertical direction, and an ultraviolet ray irradiation device applies ultraviolet rays to a sealing material (ultraviolet curable resin) 110 applied between the CF substrate 100 and the TFT substrate 101. Is irradiated.
- a sealing material ultraviolet curable resin
- the ultraviolet irradiation apparatus of the present embodiment includes a light emitting unit 1 that emits ultraviolet rays, a light guide 2, an emission side optical member 3, and the like.
- the light-emitting unit 1 includes a light-emitting diode 10 that emits ultraviolet light (ultraviolet light), and a strip-shaped mounting substrate 11 on which a plurality of light-emitting diodes 10 are mounted in a line on one surface (the lower surface in FIGS. 2 and 3). It is configured. However, a plurality of light emitting diodes 10 may be mounted on one surface of the mounting substrate 11 in a plurality of rows.
- the light guide 2 is formed of a light guide plate formed in a rectangular flat plate shape using a material having a relatively high ultraviolet transmittance (for example, quartz glass). And the ultraviolet-ray radiated
- a material having a relatively high ultraviolet transmittance for example, quartz glass.
- the light guide 2 is configured to guide the ultraviolet rays from the light emitting unit 1 to the target object (the seal material 110 in the present embodiment).
- the light guide 2 emits the ultraviolet light transmitted through the light guide 23, the light guide 23 that transmits the ultraviolet light, the incident unit 20 that causes the ultraviolet light from the light emitting unit 1 to enter the light guide 23.
- the light guide 23 is formed in a plate shape using a material that transmits ultraviolet rays (for example, quartz glass). In the present embodiment, the light guide unit 23 is formed in a rectangular plate shape.
- the incident part 20 is one end face of the light guide part 23 (upper end face in FIG. 2).
- the emission part 21 is the other end face of the light guide part 23 (lower end face in FIG. 2). That is, the incident part 20 is an incident end face of the light guide 2, and the emitting part 21 is an exit end face of the light guide 2.
- the emission side optical member 3 is a cylindrical lens, and condenses the ultraviolet rays emitted from the emission part 21 of the light guide 2 in the thickness direction of the light guide 2 (left and right direction in FIG. 3). That is, the emission side optical member 3 is disposed between the emission part 21 and the object (seal material 110). The emission side optical member 3 is configured to collect the ultraviolet rays radiated from the emission part 21 on the object (seal material 110).
- the output side optical member 3 is also formed of a material (for example, quartz glass) having a relatively high transmittance of ultraviolet rays, like the light guide 2.
- each light guide 2 is arranged in a rectangular frame shape (b-shaped) so as to penetrate the top plate 200 of the chamber 300, and the incident portion 20 of each light guide 2. Is disposed on the top plate 200 (outside the chamber 300), and the emitting portion 21 is disposed below the top plate 200 (inside the chamber 300).
- the chamber 300 has a highly airtight box shape, and two substrates (CF substrate 100 and TFT substrate 101), which are coated with a sealing material 110 on the periphery and stacked in the vertical direction, are accommodated in the interior (storage chamber 500). And kept in a vacuum state.
- the inside of the chamber 300 (in a vacuum) in which the sealing material 110 as an object is present is the first environment, and the outside of the chamber (in the atmosphere) is the second environment.
- the chamber 300 is maintained in the first environment and has a storage chamber 500 for storing an object (sealant 110).
- the second environment is an environment outside the chamber 300.
- the light guide 2 is attached to the chamber 300 such that the emitting part 21 is located inside the chamber 300 and the incident part 20 is located outside the chamber 300.
- a slit 220 into which the light guide 23 of the light guide 2 is inserted is formed in the top plate 200 of the chamber 300.
- four slits 220 are formed in the top plate 200.
- the four slits 220 are arranged in a rectangular frame shape.
- the light guide part 23 is inserted into the slit 220 so that the emission part 21 is located inside the chamber 300 and the incident part 20 is located outside the chamber 300.
- the incident portion 20 of the light guide 2 is formed wider than other portions as shown in FIG. It is desirable that a packing 210 made of an elastic material is interposed therebetween.
- the light guide 2 may be attached to the top plate 200 using the attachment member 4 as shown in FIG.
- the attachment member 4 is provided with a flat outer casing 41 on the upper end side (opening side) of the main body 40 formed in a flat rectangular box shape whose upper surface is open, and the light guide 2 is attached to the bottom of the main body 40.
- a slit 42 for exposing the emitting portion 21 is formed.
- the mounting member 4 in which the light guide 2 is housed inside the main body 40 is inserted into the top plate 200, and the packing 210 is interposed between the outer casing 41 and the top plate 200, and the outer casing portion 41 is screwed to the top plate 200.
- each light guide 2 four light emitting units 1 are arranged in a rectangular frame shape (b-shaped) so as to face the incident unit 20 (see FIG. 1). Further, below the light guides 2, four emission-side optical members 3 are arranged so as to face the emission portions 21, respectively.
- the ultraviolet irradiation device of the present embodiment includes a plurality (four in the present embodiment) of ultraviolet irradiation units 6.
- the ultraviolet irradiation unit 6 includes a light emitting unit 1 and a light guide 2.
- the ultraviolet irradiation unit 6 further includes an emission side optical member 3.
- the ultraviolet irradiation unit 6 may include an incident side optical member 5 described later.
- the plurality of ultraviolet irradiation units 6 are arranged so that an ultraviolet irradiation region equal to the shape of the object is formed.
- the object is a rectangular frame-shaped sealing material 110. Therefore, the four ultraviolet irradiation units 6 are arranged so that a rectangular frame-shaped ultraviolet irradiation region is formed.
- the distance from the output side optical member 3 to the sealing material 110 coincides with the condensing distance (focal length).
- the strip-shaped mounting boards 11 are arranged side by side in a rectangular frame shape (b-shaped), but the mounting board 11 may be formed in a rectangular frame shape (b-shaped).
- the four light guides 2 are arranged in a rectangular frame shape, but one light guide 2 (ultraviolet irradiation unit 6) may be formed in a rectangular frame shape. .
- the ultraviolet rays radiated from the light emitting unit 1 enter the light guide 2 (light guide unit 23) from the incident unit 20, pass through the light guide 2 (light guide unit 23), and the output unit 21. Then, the light is further collected by the light-emitting side optical member 3 and applied to the sealing material 110 that is an object.
- the ultraviolet irradiation method using the ultraviolet irradiation device of the present embodiment includes the step of preparing the light emitting unit 1 that emits ultraviolet rays (first step), the light guide unit 23 that transmits ultraviolet rays, and the light emitting unit 1.
- Preparing a light guide 2 having an incident portion 20 for causing the ultraviolet light to enter the light guide portion 23 and an emitting portion 21 for emitting the ultraviolet light transmitted through the light guide portion 23 (second step)
- a step (third step) of arranging the light emitting unit 1 in a second environment different from the first environment in which the object is arranged, and the emitting unit 21 is located in the first environment and the incident unit 20 is The step (4th step) arrange
- the ultraviolet irradiation device of the present embodiment is an ultraviolet irradiation device that irradiates an object (sealant 110) with ultraviolet light, and is a second environment different from the first environment in which the object is disposed.
- the light emitting unit 1 that radiates ultraviolet rays and the incident unit 20 that is installed across the first environment and the second environment and the ultraviolet rays emitted from the light emitting unit 1 are arranged in the second environment.
- the light guide 2 is composed of a plate-shaped light guide plate.
- the light guide 2 has an incident part 20 at an end located in the second environment and an emission part 21 at an end located in the first environment.
- the light guide 2 is arranged such that at least the emission part 21 faces the object.
- the ultraviolet irradiation device of the present embodiment includes a light emitting unit 1 that emits ultraviolet rays, and a light guide 2 that guides the ultraviolet rays from the light emitting unit 1 to an object (the sealing material 110).
- the light guide 2 emits the ultraviolet light transmitted through the light guide 23, the light guide 23 that transmits the ultraviolet light, the incident unit 20 that causes the ultraviolet light from the light emitting unit 1 to enter the light guide 23.
- the light emitting unit 1 is arranged in a second environment different from the first environment in which the object is arranged.
- the light guide 2 is arranged so that the emitting part 21 is located in the first environment and the incident part 20 is located in the second environment.
- the light guide portion 23 is formed in a plate shape by a material that transmits ultraviolet rays.
- the incident part 20 is one end face of the light guide part 23.
- the emission part 21 is the other end surface of the light guide part 23.
- the light guide 2 is arranged so that the emission part 21 faces the object (the sealing material 110).
- the light emitting unit 1 is attached to the light guide 2.
- the light guide 2 is attached to a wall (in this embodiment, the top plate 200 of the chamber) that partitions the first environment from the second environment.
- the first environment is in a vacuum and the second environment is in the atmosphere. That is, the first environment is a vacuum environment.
- the second environment is an atmospheric environment.
- the light guide 2 formed of the light guide plate has the incident portion 20 at the end located in the second environment (in the atmosphere) and the first environment (in vacuum). ) Is provided at the end located at the end, and the emission part 21 is arranged to face the object (the sealing material 110).
- the light guide 2 and the emission side optical member 3 are arranged in the first environment (in the chamber 300), and the remaining part of the light guide 2 and the light emitting unit 1 are in the second environment ( It may be disposed outside the chamber 300.
- the ultraviolet irradiation device of the present embodiment may include a chamber 300.
- the chamber 300 is maintained in a first environment and includes a storage chamber 500 that stores an object.
- the second environment is an environment outside the chamber 300.
- the light guide 2 is attached to the chamber 300 such that the emission portion 21 is located inside the chamber 300 (inside the storage chamber 500) and the incidence portion 20 is located outside the chamber 300.
- the incident-side optical member 5 that condenses the ultraviolet rays radiated from the light emitting unit 1 onto the incident unit 20 of the light guide 2 is disposed between the light emitting unit 1 and the light guide 2. It is preferable.
- the incident side optical member 5 is a cylindrical lens made of quartz glass like the emission side optical member 3, and can condense the ultraviolet rays emitted from the light emitting unit 1 and efficiently enter the incident unit 20. .
- the ultraviolet irradiation device has the optical member (incident side optical member) 5 for condensing the ultraviolet rays radiated from the light emitting portion 1 on the incident portion 20 of the light guide 2 or the emission of the light guide 2.
- the ultraviolet irradiation device of the present embodiment may include the incident side optical member 5 disposed between the light emitting unit 1 and the incident unit 20.
- the incident side optical member 5 is configured to collect the ultraviolet rays emitted from the light emitting unit 1 in the incident unit 20.
- the ultraviolet irradiation device of the present embodiment may include the emission-side optical member 3 disposed between the emission unit 21 and the object.
- the emission side optical member 3 is configured to collect the ultraviolet rays emitted from the emission unit 21 on the object.
- a reflection layer 22 that reflects ultraviolet rays is formed in a portion of the light guide 2 other than the entrance 20 and the exit 21 (see FIG. 6).
- the light guide 2 may be formed with the reflective layer 22 that reflects the ultraviolet rays at a portion other than the incident portion 20 and the emission portion 21.
- the light guide 2 may include the reflective layer 22.
- the reflection layer 22 is formed on the surface of the light guide 23 and is configured to reflect the ultraviolet light so that the ultraviolet light that has entered the light guide part 23 from the light incident part 20 is emitted from the light emission part 21.
- the reflective layer 22 is formed on each of both surfaces in the thickness direction of the light guide 23.
- the ultraviolet rays traveling in the light guide 2 are reflected by the reflection layer 22 and emitted outside the light guide 2 from a part other than the emission part 21 (for example, the surface in the thickness direction of the light guide 23). Therefore, the ultraviolet rays incident from the incident portion 20 can be efficiently taken out from the emission portion 21.
- the light emitting unit 1 and the light guide 2 are arranged in a rectangular frame shape (b-shaped) according to the shape of the sealing material 110, but many triangles or pentagons or more according to the shape of the object. It may be arranged in a square shape or a circular shape.
- the object may be circular or polygonal, and the light emitting unit 1 and the light guide 2 may be arranged in the same shape as the object.
- the ultraviolet irradiation device of the present embodiment may include a plurality of ultraviolet irradiation units 6 having the light emitting unit 1 and the light guide 2.
- the plurality of ultraviolet irradiation units 6 are arranged so that an ultraviolet irradiation region equal to the shape of the object (in the present embodiment, a rectangular frame shape) is formed.
- a triangular prism prism 31 is disposed at a position facing the light emitting portion 21 of the light guide 2, and ultraviolet light emitted from the light emitting portion 21 is incident on the prism 31 so that the optical path is approximately 90 degrees. It may be bent.
- the ultraviolet light emitted from the prism 31 is condensed by the cylindrical lens 30. That is, the cylindrical lens 30 and the prism 31 constitute the emission side optical member 3.
- a reflecting mirror may be used instead of the prism 31.
- the ultraviolet ray can be efficiently irradiated by adjusting the irradiation direction of the ultraviolet ray with respect to the object (the sealing material 110).
- the condensing distance of ultraviolet rays may be adjusted by moving the cylindrical lens 30 in parallel.
- the irradiation position (vertical position) of the ultraviolet rays can be adjusted by rotating the prism 31 or the reflecting mirror.
- the optical member (exit-side optical member) 3 that condenses the ultraviolet rays emitted from the emission portion 21 of the light guide 2 onto the object, and the ultraviolet rays generated by the optical member 3 are collected.
- adjusting means for adjusting at least one of the focusing distance and the focusing position may include an adjusting unit.
- the adjusting means is configured to adjust the condensing position where the emitting side optical member 3 collects the ultraviolet rays from the emitting unit 21.
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Abstract
Description
Claims (12)
- 紫外線を放射する発光部と、
前記発光部からの紫外線を対象物まで導く導光体と、
を備え、
前記導光体は、
紫外線を透過させる導光部と、
前記発光部からの紫外線を前記導光部内に入射させるための入射部と、
前記導光部内を透過した紫外線を出射させるための出射部と、
を有し、
前記発光部は、前記対象物が配置される第1の環境とは異なる第2の環境に配置され、
前記導光体は、前記出射部が前記第1の環境に位置し且つ前記入射部が前記第2の環境に位置するように、配置される
ことを特徴とする紫外線照射装置。 - 前記発光部と前記入射部との間に配置される入射側光学部材を備え、
前記入射側光学部材は、前記発光部から放射された紫外線を前記入射部に集めるように構成される
ことを特徴とする請求項1記載の紫外線照射装置。 - 前記出射部と前記対象物との間に配置される出射側光学部材を備え、
前記出射側光学部材は、前記出射部から放射された紫外線を前記対象物に集めるように構成される
ことを特徴とする請求項1記載の紫外線照射装置。 - 前記発光部と前記導光体とを有する紫外線照射ユニットを複数備え、
前記複数の紫外線照射ユニットは、前記対象物の形状に等しい紫外線照射領域が形成されるように配置される
ことを特徴とする請求項1記載の紫外線照射装置。 - 前記導光体は、反射層を備え、
前記反射層は、前記導光部の表面に形成され、前記入射部から前記導光部内に入射した紫外線が前記出射部から出射されるように紫外線を反射するように構成される
ことを特徴とする請求項1記載の紫外線照射装置。 - 調整手段を備え、
前記調整手段は、前記出射側光学部材が前記出射部からの紫外線を集める集光位置を調整するように構成される
ことを特徴とする請求項3記載の紫外線照射装置。 - 前記第1の環境は、真空環境であり、
前記第2の環境は、大気環境である
ことを特徴とする請求項1記載の紫外線照射装置。 - 前記導光部は、紫外線を透過させる材料により板状に形成され、
前記入射部は、前記導光部の一端面であり、
前記出射部は、前記導光部の他端面である
ことを特徴とする請求項1記載の紫外線照射装置。 - 前記導光体は、前記出射部が前記対象物に対向するように配置される
ことを特徴とする請求項1記載の紫外線照射装置。 - 前記発光部は、前記導光体に取り付けられ、
前記導光体は、前記第1の環境を前記第2の環境から仕切る壁体に取り付けられる
ことを特徴とする請求項1記載の紫外線照射装置。 - チャンバを備え、
前記チャンバは、前記第1の環境に維持され、前記対象物を収納する収納室を有し、
前記第2の環境は、前記チャンバの外側の環境であり、
前記導光体は、前記出射部が前記チャンバの内側に位置し且つ前記入射部が前記チャンバの外側に位置するように、前記チャンバに取り付けられる
ことを特徴とする請求項1記載の紫外線照射装置。 - 紫外線を放射する発光部を準備するステップと、
紫外線を透過させる導光部と、前記発光部からの紫外線を前記導光部内に入射させるための入射部と、前記導光部内を透過した紫外線を出射させるための出射部と、を有する導光体を準備するステップと、
前記発光部を、前記対象物が配置される第1の環境とは異なる第2の環境に配置ステップと、
前記出射部が前記第1の環境に位置し且つ前記入射部が前記第2の環境に位置するように、前記導光体を配置するステップと、
前記発光部からの紫外線を前記対象物に照射するステップと、
を有することを特徴とする紫外線照射方法。
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JP2011151463 | 2011-07-08 | ||
JP2011-151463 | 2011-07-08 |
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WO2013008704A1 true WO2013008704A1 (ja) | 2013-01-17 |
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PCT/JP2012/067148 WO2013008704A1 (ja) | 2011-07-08 | 2012-07-05 | 紫外線照射装置、および、紫外線照射方法 |
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KR (1) | KR20130139362A (ja) |
WO (1) | WO2013008704A1 (ja) |
Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH08271909A (ja) * | 1995-03-29 | 1996-10-18 | Mitsubishi Electric Corp | 液晶表示素子の製法およびそれに用いる製造装置 |
JP2003207653A (ja) * | 2002-01-17 | 2003-07-25 | Mitsubishi Cable Ind Ltd | 光ファイバおよびレーザーガイド |
JP2004077594A (ja) * | 2002-08-12 | 2004-03-11 | Ushio Inc | ディスプレイパネルの貼り合わせ方法および装置 |
JP2006195128A (ja) * | 2005-01-13 | 2006-07-27 | Ushio Inc | パネルの貼り合せ装置 |
-
2012
- 2012-07-05 WO PCT/JP2012/067148 patent/WO2013008704A1/ja active Application Filing
- 2012-07-05 KR KR1020137029498A patent/KR20130139362A/ko not_active Application Discontinuation
Patent Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH08271909A (ja) * | 1995-03-29 | 1996-10-18 | Mitsubishi Electric Corp | 液晶表示素子の製法およびそれに用いる製造装置 |
JP2003207653A (ja) * | 2002-01-17 | 2003-07-25 | Mitsubishi Cable Ind Ltd | 光ファイバおよびレーザーガイド |
JP2004077594A (ja) * | 2002-08-12 | 2004-03-11 | Ushio Inc | ディスプレイパネルの貼り合わせ方法および装置 |
JP2006195128A (ja) * | 2005-01-13 | 2006-07-27 | Ushio Inc | パネルの貼り合せ装置 |
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