WO2013000152A1 - 等离子体灭菌设备及其灭菌方法 - Google Patents

等离子体灭菌设备及其灭菌方法 Download PDF

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Publication number
WO2013000152A1
WO2013000152A1 PCT/CN2011/076663 CN2011076663W WO2013000152A1 WO 2013000152 A1 WO2013000152 A1 WO 2013000152A1 CN 2011076663 W CN2011076663 W CN 2011076663W WO 2013000152 A1 WO2013000152 A1 WO 2013000152A1
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Prior art keywords
vacuum
sterilization
control unit
plasma
computer control
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PCT/CN2011/076663
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English (en)
French (fr)
Inventor
刘光武
王吉东
王学锋
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深圳市仁能达科技有限公司
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Priority to PCT/CN2011/076663 priority Critical patent/WO2013000152A1/zh
Priority to CN2011800046067A priority patent/CN103037906A/zh
Publication of WO2013000152A1 publication Critical patent/WO2013000152A1/zh

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    • A—HUMAN NECESSITIES
    • A61—MEDICAL OR VETERINARY SCIENCE; HYGIENE
    • A61L—METHODS OR APPARATUS FOR STERILISING MATERIALS OR OBJECTS IN GENERAL; DISINFECTION, STERILISATION OR DEODORISATION OF AIR; CHEMICAL ASPECTS OF BANDAGES, DRESSINGS, ABSORBENT PADS OR SURGICAL ARTICLES; MATERIALS FOR BANDAGES, DRESSINGS, ABSORBENT PADS OR SURGICAL ARTICLES
    • A61L2/00—Methods or apparatus for disinfecting or sterilising materials or objects other than foodstuffs or contact lenses; Accessories therefor
    • A61L2/02—Methods or apparatus for disinfecting or sterilising materials or objects other than foodstuffs or contact lenses; Accessories therefor using physical phenomena
    • A61L2/14—Plasma, i.e. ionised gases
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/32431—Constructional details of the reactor
    • H01J37/32798—Further details of plasma apparatus not provided for in groups H01J37/3244 - H01J37/32788; special provisions for cleaning or maintenance of the apparatus
    • H01J37/32853—Hygiene

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  • the invention relates to a sterilization device, in particular to a plasma sterilization device and a sterilization method thereof.
  • Plasma sterilization technology is a new generation of high-tech sterilization technology.
  • a variety of microorganisms on medical devices are inactivated in a specific way to achieve sterilization purposes. With this technology, sterilization can be achieved at low temperatures. Bacterial treatment without causing damage to the items being processed.
  • the common sterilization equipment is provided with a sterilization chamber and its supporting devices.
  • the main supporting devices include: vacuuming vacuum device, sterilizing agent injection device, and plasma generating device for "exciting" the sterilizing agent into a plasma state.
  • each supporting device acts independently on one sterilization chamber. When one device works, the other devices are in a non-working state, which results in the use efficiency of the sterilization cabin supporting device, especially some expensive devices, is low. The efficiency of the sterilization equipment increases the cost of the sterilization equipment.
  • the present invention provides a plasma sterilization apparatus having at least two sterilization chambers.
  • the plasma sterilization apparatus of the present invention comprises a sterilization chamber, a plasma generating electrode disposed in the sterilization chamber, and a vacuum device, a sterilizing agent injection device and a plasma connected to the outside of the sterilization chamber Body generating device, characterized in that
  • the sterilization chamber is at least two, and the vacuum device, the sterilizing agent injection device and the plasma generating device are respectively one or less than the number of the sterilization chambers;
  • Each of said sterilization chambers is connected to a vacuum device for separate use or co-use by a respective vacuum conduit and a first control unit;
  • Each of said sterilization chambers is connected to a sterilant injection device for separate use or co-use by a respective sterilant conduit and a second control unit;
  • the plasma generating electrodes in each of the sterilization chambers are connected by a respective third control unit to one of the plasma generating devices for use alone or in combination.
  • At least one of the vacuum device, the sterilizing agent injection device, and the plasma generating device is commonly used by at least two of the sterilization chambers.
  • the plasma sterilization apparatus further includes a computer control unit connected to the first, second, and third control units, and configured to control the first, second, and third controls unit.
  • the first control unit comprises a vacuum solenoid valve and an intake solenoid valve
  • the intake solenoid valve is further connected with an intake filter
  • the second control unit comprises a solenoid valve
  • the third control unit comprises Relay.
  • the sterilization chamber is two, and the vacuum device, the sterilizing agent injection device and the plasma generating device are respectively one, and each of the sterilization chambers passes through a respective vacuum pipe and the first a control unit connected in parallel to the vacuum device; each of the sterilization chambers being connected in parallel to the sterilant injection device by a respective sterilant conduit and a second control unit; each of the sterilization chambers
  • the plasma generating electrodes are connected in parallel to the plasma generating device through respective third control units.
  • each of the sterilization chambers there are two sterilization chambers, one of the vacuum device and the sterilizing agent injection device, and two plasma generating devices, each of which passes through a respective vacuum pipe.
  • each of the sterilization chambers Connected to the vacuum device in parallel with the first control unit; each of the sterilization chambers being connected in parallel to the sterilant injection device through a respective sterilant conduit and a second control unit; two of the sterilization chambers
  • the plasma generating electrodes are respectively connected to one of the plasma generating devices through respective third control units.
  • the present invention also provides a sterilization method using the plasma sterilization apparatus of the present invention, comprising the following stages:
  • the start-up phase includes placing the items to be sterilized into a separate sterilization chamber and activating the sterilization chamber;
  • the first stage of sterilization for injecting a sterilizing agent into the sterilization chamber
  • the computer control unit determines whether the device to be used in the next step is idle, and determines the next operation according to the judgment result: if yes, proceeds to the next step; if not, waits for a predetermined time, and then judges again,
  • the device to be used in the next step is selected from the group consisting of a vacuum device, a sterilizing agent injection device, and a plasma generating device.
  • the sterilization preparation phase comprises the following steps:
  • the computer control unit determines that the vacuum device to be used is idle, the vacuum device is activated, the first control unit is opened, the vacuum chamber is pumped to a predetermined vacuum degree, and the vacuum device and the first control are turned off. unit;
  • the computer control unit determines that the plasma generating device to be used is idle, the plasma generating device is activated, the third control unit is turned on, the plasma is excited in the vacuum chamber, and after a period of time, the plasma is turned off. a body generating device and the third control unit;
  • the vacuum intake valve is opened, and after the vacuum chamber is maintained at a normal pressure for a predetermined time, the vacuum intake valve is closed.
  • the first stage of sterilization comprises the following steps:
  • the computer control unit determines that the vacuum device to be used is idle, the vacuum device is activated, the first control unit is opened, the vacuum chamber is pumped to a predetermined vacuum degree, and the vacuum device and the first control are turned off. unit;
  • the vacuum intake valve is opened, and after the vacuum chamber is maintained at a normal pressure for a predetermined time, the vacuum intake valve is closed.
  • the second stage of sterilization comprises the following steps:
  • the computer control unit determines that the vacuum device to be used is idle, the vacuum device is activated, the first control unit is opened, the vacuum chamber is pumped to a predetermined vacuum degree, and the vacuum device and the first control are turned off. unit;
  • the computer control unit determines that the plasma generating device to be used is idle, the plasma generating device is activated, the third control unit is turned on, plasma is excited in the vacuum chamber, and maintained for a period of time, Closing the plasma generating device and the third control unit;
  • the vacuum intake valve is opened, and after the vacuum chamber is maintained at a normal pressure for a predetermined time, the vacuum intake valve is closed.
  • the sterilizing agent is hydrogen peroxide.
  • the predetermined time is 1 minute.
  • the sterilization method can also be accomplished by the following steps:
  • Step A Put the items to be sterilized into separate sterilization chambers
  • Step C Start the sterilization chamber
  • step E If yes, go to step E, if no, wait for 1 minute and execute step D;
  • Step E Enter the sterilization preparation stage
  • step G If yes, go to step G, if no, wait for 1 minute and execute step F;
  • Step G Enter the first stage of sterilization
  • step H If yes, go to step I, if no, wait for 1 minute and execute step H;
  • Step I Enter the second stage of sterilization
  • Step J End the sterilization procedure.
  • the step E enters the sterilization preparation stage, and includes the following steps:
  • step E6 If yes, go to step E6. If no, wait for 1 minute and go to step E5.
  • step G enters the first stage of sterilization, and includes the following steps:
  • G6 Close the injection solenoid valve and wait for the scheduled injection time
  • step I enters the second stage of sterilization, and comprises the following steps:
  • step I6 If yes, go to step I6, if no, wait for 1 minute, go to step I5;
  • the sterilization chamber has at least two sterilization chambers
  • the plurality of sterilization chambers are respectively connected in parallel with the vacuum device, the sterilizing agent injection device and the plasma generating device through the control unit, that is, the plurality of sterilization chambers and one set of sterilization
  • the cabin supporting system is connected, and through the control system of the sterilization equipment, the sterilization and disinfection of the contents of the plurality of sterilization cabins is completed by using a set of sterilization cabin supporting devices, thereby reducing the idle time of the sterilization cabin supporting device, thereby greatly improving the
  • the efficiency of the use of sterilization equipment reduces the cost of sterilization equipment.
  • different categories, or items to be sterilized that require different sterilization conditions can be sterilized in different compartments, which helps to improve sterilization efficiency.
  • FIG. 1 is a schematic view of a plasma sterilization apparatus in accordance with an embodiment of the present invention
  • FIG. 2 is a schematic view of a plasma sterilization apparatus in accordance with another embodiment of the present invention.
  • FIG. 3 is a structural view of a plasma sterilization apparatus according to an embodiment of the present invention.
  • FIG. 4 is a flow chart of a sterilization method in accordance with an embodiment of the present invention.
  • 502a, 502b intake solenoid valve
  • the plasma sterilization apparatus includes two sterilization chambers 1a and 1b; each sterilization chamber is provided with plasma generating electrodes 10a and 10b; a vacuum device 2, a sterilizing agent injection device 3, and a plasma generating device.
  • the sterilization chambers 1a and 1b are connected in parallel to the vacuum device 2 through respective vacuum pipes and first control units 5a and 5b; respectively
  • the sterilizing agent pipe and the second control unit 6a and 6b are connected in parallel to the sterilizing agent injection device 3;
  • the plasma generating electrodes 10a and 10 are connected in parallel to the plasma generating device 4 through the respective third control units 7a and 7b, respectively.
  • the plasma sterilization apparatus includes two sterilization chambers 1a and 1b; each sterilization chamber is provided with plasma generating electrodes 10a and 10b; a vacuum device 2, a sterilizing agent injection device 3, and two plasmas.
  • the generating devices 4a and 4b are mounted outside the sterilization chambers 1a and 1b; the sterilization chambers 1a and 1b are connected in parallel to the vacuum device 2 through respective vacuum pipes and first control units 5a and 5b; respectively
  • the plasma sterilization apparatus further includes a computer control unit connected to the first, second, and third control units for controlling the first, second, and third control units.
  • the first control unit 5a may include a first filter solenoid valve and a first vacuum solenoid valve connected to the sterilization chamber 1a, and the first filter solenoid valve is simultaneously connected to the first filter;
  • a control unit 5b may include a second filter solenoid valve and a second vacuum solenoid valve connected to the sterilization chamber 1b, and the second filter solenoid valve is simultaneously connected to the second filter, the first vacuum solenoid valve and the second vacuum electromagnetic valve The valve is connected in parallel to the vacuum device 2.
  • the second control unit 6a may comprise a first injection solenoid valve connected to the sterilization chamber 1a; the second control unit 6b may comprise a second injection solenoid valve connected to the sterilization chamber 1b, The first injection solenoid valve and the second injection solenoid valve are connected in parallel to the injection device 3.
  • the third control unit 7a may include a first relay connected to the sterilization chamber 1a, a first switch that communicates with the first relay; and a third control unit 7b may include a connection to the sterilization chamber 1b
  • the second relay, the second switch connected to the second relay, the first switch and the second switch are connected in parallel to the plasma generating device 4, or respectively connected to the plasma generating devices 4a and 4b.
  • the plasma sterilization apparatus in the figure includes two sterilization chambers 1a and 1b, and a vacuum device (vacuum pump) 2, a sterilizing agent (H 2 O 2 ) injection device 3, and a plasma generating device (plasma power source) 4 each There is one.
  • the sterilization chambers 1a and 1b are respectively provided with vacuum suction ports 504a and 504b for parallel connection to the vacuum device 2; H 2 O 2 injection ports 601a for parallel connection to the sterilizing agent (H 2 O 2 ) injection device 3 and 601b; electrode feeds 702a and 702b for parallel connection to the plasma generating device 4.
  • the sterilization chambers 1a and 1b include sterilization hatches 12a and 12b, respectively; and a plurality of heater chips 9a and 9b are provided on the cabin door and outside the cabin. Further, vacuum gauges 8a and 8b are also mounted on the sterilization chambers 1a and 1b, respectively.
  • the vacuum pump 2 is also connected to an exhaust filter 201 for filtering the air discharged during the evacuation.
  • the vacuum pump 2 is connected to the sterilization chamber 1a via a first control unit 5a (including a vacuum solenoid valve 501a, an intake solenoid valve 502a, a vacuum suction port 504a), and an intake filter 503a is also connected to the intake solenoid valve 502a;
  • a control unit 5b (including a vacuum solenoid valve 501b, an intake solenoid valve 502b, a vacuum suction port 504b) is connected to the sterilization chamber 1b, and an intake filter valve 503b is also connected to the intake solenoid valve 502b.
  • the sterilizing agent (H 2 O 2 ) injection device 2 is connected to the sterilization chamber 1a through a second control unit (H 2 O 2 solenoid valve) 6a; connected to the second control unit (H 2 O 2 solenoid valve) 6b Fungus compartment 1a.
  • the plasma generating device 4 includes a plasma power source, and is connected to the sterilization chamber 1a through a third control unit 7a (including the relay 701a); and is connected to the sterilization chamber 1b through a third control unit 7b (including the relay 701b).
  • the sterilization chambers 11a, 11b are themselves metal, acting as a negative electrode of the plasma generating device; the plasma generating device 4 is connected to the positive electrode provided in the sterilization chamber as a positive electrode of the plasma generating device through electrode feeds 702a and 702b, respectively.
  • the electrode plates 10a and 10b; the electrode plates 10a and 10b are separated from the metal case by insulating pads 13a and 13b, respectively.
  • the sterilization operation of the two sterilization chambers can be realized by using a set of supporting devices (vacuum device, sterilizing agent injection device, plasma generating device).
  • a set of supporting devices vacuum device, sterilizing agent injection device, plasma generating device.
  • the function of the accessory device to the first sterilization chamber is completed, when it is idle, it can be used for the second sterilization chamber without affecting the sterilization operation of the first sterilization chamber.
  • the use efficiency of the supporting equipment is greatly improved, and at the same time, the sterilization operation time is reduced, and the sterilization efficiency is improved.
  • the articles to be sterilized can be classified into a plurality of sterilization chambers according to the type, the requirements for sterilization conditions, and the like, and are set for each sterilization chamber.
  • the respective parameters enable efficient sterilization, and can greatly save sterilization time and equipment cost.
  • the number of sterilization chambers can be two, three, and more.
  • the number of vacuum devices, sterilizing agent injection devices, and plasma generating devices can be adjusted as needed, each of which can have the same number as the sterilization chamber, respectively connected to each sterilization chamber to save equipment costs and improve equipment use. Seek an optimal balance between efficiency.
  • the two sterilization chambers can share a vacuum device and a plasma generating device, respectively, using a respective sterilizing agent injection device; or two sterilization chambers, sharing one a sterilizing agent injection device and a plasma generating device, respectively, using a respective one of the vacuum devices; or two sterilization chambers, sharing a vacuum device, and respectively using a respective sterilizing agent injection device, respectively using one of each a plasma generating device; or two sterilization chambers, sharing a plasma generating device, and respectively using a respective sterilizing agent injection device, respectively using a respective one of the vacuum devices; or, two sterilization chambers, sharing one
  • the microbial injecting device uses a respective one of the plasma generating devices, and each of the respective vacuum devices is used.
  • each control unit may also include other suitable components other than solenoid valves, relays, such as vacuum gauges, thermometers, and the like.
  • the computer control unit can be a separate part or integrated into the device.
  • FIG. 4 is a flow chart of a sterilization method in accordance with an exemplary embodiment of the present invention.
  • the first is the system preparation phase 4001, the device is activated, the system is warmed up, and the items to be sterilized are placed in a separate sterilization chamber 1a or 1b or both, and the sterilization chamber is activated. Thereafter, the computer control unit determines whether the vacuum pump is idle, and determines the next operation according to the determination result: if yes, enters the sterilization preparation stage 4002, and if not, waits for one minute and then judges again.
  • step 40021 the vacuum pump and the vacuum solenoid valve are activated, and the sterilization chamber is evacuated to ⁇ 50 Pa, and then the vacuum pump and the vacuum solenoid valve are closed.
  • This step is used to dry the sterilization chamber to remove excess water.
  • the computer control unit determines whether the plasma power source is idle, and determines the next operation according to the determination result: if yes, proceeds to step 40022, if not, waits for one minute, and then judges again; in step 40022, starts the plasma power source, the relay, After 2 minutes, turn off the plasma power supply and relay. This step is used to further dry the sterilization chamber and remove any sterilant that may remain in the sterilization chamber.
  • step 40023 the vacuum intake valve is opened, the filtered air is sucked, and the vacuum intake valve is closed after maintaining the normal pressure in the sterilization chamber for ⁇ 1 minute.
  • the incoming filtered air disturbs the gases and moisture produced in the sterilization chamber in step 40022 to facilitate extraction of the materials from the sterilization chamber in the next step.
  • the sterilization preparation phase is completed.
  • the computer control unit determines whether the vacuum pump is idle, and determines the next operation according to the judgment result: if yes, enters the first stage of sterilization 4003, and if not, waits for one minute and then judges again.
  • step 40031 the vacuum pump and the vacuum solenoid valve are activated, and the sterilization chamber is evacuated to ⁇ 50 Pa, and then the vacuum pump and the vacuum solenoid valve are closed.
  • step 40032 the H 2 O 2 injection device and the H 2 O 2 solenoid valve are opened, an appropriate amount of H 2 O 2 is injected into the sterilization chamber, the pressure is maintained at 800 to 1800 Pa, and the H 2 O is turned off after a sufficient time. 2 solenoid valve. Since the sterilization chamber is in a vacuum state, after the H 2 O 2 is injected, it will rapidly diffuse and adhere to the surface of the article to be sterilized, and the diffusion time is about 6 minutes.
  • step 40033 the vacuum intake valve is opened, the filtered air is sucked, and the vacuum intake valve is closed after maintaining the normal pressure in the sterilization chamber for ⁇ 1 minute.
  • the inhaled air disturbs the diffused atomized H 2 O 2 to more fully contact the surface of the item to be sterilized, in particular into the lumen of the elongated tubular article and attached to the inner wall of the lumen To achieve better sterilization results.
  • the computer control unit determines whether the vacuum pump is idle, and determines the next operation according to the judgment result: if yes, enters the second stage of sterilization 4004, and if not, waits for one minute and then judges again.
  • step 40041 the vacuum pump and the vacuum solenoid valve are activated, and the sterilization chamber is evacuated to ⁇ 50 Pa, after which the vacuum pump and the vacuum solenoid valve are closed. This step allows plasma excitation conditions to be reached within the sterilization chamber.
  • the computer control unit determines whether the plasma power source is idle, and determines the next operation according to the determination result: if yes, proceeds to step 40042, and if not, waits for one minute and then judges again.
  • step 40042 the plasma power source and the relay are activated, and after being held for 6 minutes, the plasma power source and the relay are turned off.
  • the vaporized H 2 O 2 generates a plasma under the action of RF, and kills the microorganism by the action of the active radical of the low temperature plasma.
  • the RF wave is stopped, the plasma state ends and it is converted into stable oxygen molecules and water molecules.
  • the vacuum intake valve is opened, and the filtered air is sucked in, and the vacuum intake valve is closed after maintaining the normal pressure in the sterilization chamber for ⁇ 1 minute. Sterilization is complete.
  • the sterilization method can also be accomplished by the following steps:
  • Step A Put the items to be sterilized into separate sterilization chambers
  • Step C Start the sterilization chamber
  • step E If yes, go to step E, if no, wait for 1 minute and execute step D;
  • Step E Enter the sterilization preparation stage
  • step G If yes, go to step G, if no, wait for 1 minute and execute step F;
  • Step G Enter the first stage of sterilization
  • step H If yes, go to step I, if no, wait for 1 minute and execute step H;
  • Step I Enter the second stage of sterilization
  • Step J End the sterilization procedure.
  • the step E enters the sterilization preparation stage, and includes the following steps:
  • step E6 If yes, go to step E6. If no, wait for 1 minute and go to step E5.
  • step G enters the first stage of sterilization, and includes the following steps:
  • G6 Close the injection solenoid valve and wait for the scheduled injection time
  • step I enters the second stage of sterilization, and comprises the following steps:
  • step I6 If yes, go to step I6, if no, wait for 1 minute, go to step I5;
  • the above sterilization method steps are merely exemplary, and specific parameters (such as vacuum degree, time, etc.) may be set according to actual conditions according to actual conditions to complete different sterilization processes.
  • the sterilization conditions of the two compartments may be the same or different depending on the type of articles to be sterilized in the sterilization chamber.
  • the conventional plasma sterilizing agent is hydrogen peroxide
  • the type, concentration, form and the like of the sterilizing agent may be changed as needed in practical use.
  • the order of use, time, number of times, etc. of the matching unit can also be adjusted as needed during the sterilization process.
  • the vacuum device, the sterilizing agent injection device, and the plasma generating device can be used in different stages, in different sequences, as needed, to improve the sterilization effect.

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Abstract

一种等离子体灭菌设备及一种使用所述等离子体灭菌设备灭菌的方法，所述等离子体灭菌设备包括至少两个灭菌舱（1a，1b）,每个灭菌舱内装有等离子体发生电极（10a，10b）；装于灭菌舱（1a，1b）外部的真空装置（2）、灭菌剂注入装置（3）和等离子体发生装置（4，4a，4b）分别为一个或小于等于所述灭菌舱的数量；各个所述灭菌舱（1a，1b）可独立使用或共用同一个真空装置（2），可独立使用或共用同一个灭菌剂注入装置（3）；每个灭菌舱中的等离子体发生电极可独立使用或共用同一个等离子体发生装置（4），其中所述真空装置（2）、所述灭菌剂注入装置（3）和所述等离子体发生装置（4，4a，4b）的至少一个由至少两个所述灭菌舱（1a，1b）共同使用。

Description

等离子体灭菌设备及其灭菌方法 技术领域
本发明涉及一种灭菌设备，尤其涉及一种等离子体灭菌设备及其灭菌方法。
背景技术
等离子体灭菌技术是新一代的高科技灭菌技术，消毒过程中通过特定方式使医疗器械上的多种微生物失去活性，从而达到灭菌目的；采用本技术，能在低温下达到消菌灭菌处理而不会对被处理物品造成损坏。目前常见的灭菌设备设有一个灭菌舱及其配套装置。主要的配套装置包括：抽真空的真空装置、灭菌剂注入装置、将灭菌剂“激励”成等离子体状态的等离子体发生装置。灭菌过程中，各配套装置依次独立作用于一个灭菌舱，当一个装置工作时，其它装置处于非工作状态，导致灭菌舱配套装置，特别是一些昂贵装置的使用效率较低，因此降低了灭菌设备的工作效率，同时增加了灭菌设备的成本。
发明内容
为了解决现有技术中的等离子体灭菌设备使用效率低、灭菌设备成本高的缺陷，本发明提供一种具有至少两个灭菌舱的等离子体灭菌设备。
本发明的等离子体灭菌设备包括灭菌舱，设在所述灭菌舱内的等离子体发生电极，以及在所述灭菌舱外部并与之连接的真空装置、灭菌剂注入装置和等离子体发生装置，其特征在于，
所述灭菌舱为至少两个，所述真空装置、灭菌剂注入装置和等离子体发生装置分别为一个或小于等于所述灭菌舱的数量；
每个所述灭菌舱通过各自的真空管道和第一控制单元连接到供单独使用或共同使用的一个所述真空装置；
每个所述灭菌舱通过各自的灭菌剂管道和第二控制单元连接到供单独使用或共同使用的一个所述灭菌剂注入装置；
每个所述灭菌舱中的等离子体发生电极通过各自的第三控制单元连接到供单独使用或共同使用的一个所述等离子体发生装置，
其中所述真空装置、所述灭菌剂注入装置和所述等离子体发生装置中的至少一个由至少两个所述灭菌舱共同使用。
优选地，所述等离子体灭菌设备还包括计算机控制单元，所述计算机控制单元连接到所述第一、第二、第三控制单元，并用于控制所述第一、第二、第三控制单元。
优选地，所述第一控制单元包括真空电磁阀和进气电磁阀，所述进气电磁阀还连接有进气过滤器；所述第二控制单元包括电磁阀；所述第三控制单元包括继电器。
优选地，所述灭菌舱为两个，所述真空装置、所述灭菌剂注入装置和所述等离子体发生装置分别为一个，每个所述灭菌舱通过各自的真空管道和第一控制单元并行连接到所述真空装置；每个所述灭菌舱通过各自的灭菌剂管道和第二控制单元并行连接到所述灭菌剂注入装置；每个所述灭菌舱中的所述等离子体发生电极通过各自的第三控制单元并行连接到所述等离子体发生装置。
优选地，所述灭菌舱为两个，所述真空装置、所述灭菌剂注入装置分别为一个，所述等离子体发生装置为两个，每个所述灭菌舱通过各自的真空管道和第一控制单元并行连接到所述真空装置；每个所述灭菌舱通过各自的灭菌剂管道和第二控制单元并行连接到所述灭菌剂注入装置；两个所述灭菌舱中的所述等离子体发生电极通过各自的第三控制单元分别连接到一个所述等离子体发生装置。
本发明还提供一种使用本发明的等离子体灭菌设备的灭菌方法，包括以下阶段：
启动阶段，包括将待灭菌物品放入独立的灭菌舱，以及启动灭菌舱；
灭菌预备阶段，用于真空干燥所述待灭菌物品；
灭菌第一阶段，用于将灭菌剂注入所述灭菌舱；以及
灭菌第二阶段，用于对所述待灭菌物品进行等离子体灭菌，其特征在于，
在所述灭菌预备阶段、灭菌第一阶段以及灭菌第二阶段之前以及期间，还包括如下步骤：
计算机控制单元判断下一步骤要使用的装置是否空闲，并根据判断结果确定下一步操作：若是，则进入下一步骤；若否，则等待一预定时间后，再次判断，
其中所述下一步骤要使用的装置选自真空装置、灭菌剂注入装置和等离子体发生装置。
优选地，所述灭菌预备阶段包括以下步骤：
当所述计算机控制单元判断要使用的真空装置空闲时，启动所述真空装置，打开第一控制单元，将所述真空舱抽至预定真空度后，关闭所述真空装置和所述第一控制单元；
当所述计算机控制单元判断要使用的等离子体发生装置空闲时，启动等离子体发生装置，打开第三控制单元，在所述真空舱内激发等离子体，并保持一时间段后，关闭所述等离子体发生装置和所述第三控制单元；以及
打开真空进气阀，使所述真空舱保持常压一预定时间后，关闭所述真空进气阀。
优选地，所述灭菌第一阶段包括以下步骤：
当所述计算机控制单元判断要使用的真空装置空闲时，启动所述真空装置，打开第一控制单元，将所述真空舱抽至预定真空度后，关闭所述真空装置和所述第一控制单元；
当所述计算机控制单元判断要使用的灭菌剂注入装置空闲时，打开第二控制单元，将灭菌剂注入所述灭菌舱，之后关闭所述第二控制单元；以及
打开真空进气阀，使所述真空舱保持常压一预定时间后，关闭所述真空进气阀。
优选地，所述灭菌第二阶段包括以下步骤：
当所述计算机控制单元判断要使用的真空装置空闲时，启动所述真空装置，打开第一控制单元，将所述真空舱抽至预定真空度后，关闭所述真空装置和所述第一控制单元；
当所述计算机控制单元判断要使用的等离子体发生装置空闲时，启动所述等离子体发生装置，打开所述第三控制单元，在所述真空舱内激发等离子体，并保持一时间段后，关闭所述等离子体发生装置和所述第三控制单元；以及
打开真空进气阀，使所述真空舱保持常压一预定时间后，关闭所述真空进气阀。
优选地，所述灭菌剂为过氧化氢。优选地，所述一预定时间为1分钟。
优选地，灭菌方法还可以通过以下步骤来完成：
步骤A. 将待灭菌物品分别放入独立的灭菌舱内；
步骤B. 计算机控制单元内输入系统变量，真空泵变量I=0， 等离子电源变量J=0；
步骤C. 启动灭菌舱；
步骤D. 计算机控制单元判断：真空泵变量I=0？
是，则执行步骤E，否，则等待1分钟，执行步骤D；
步骤E. 进入灭菌预备阶段；
步骤F. 计算机控制单元判断：真空泵变量I=0？
是，则执行步骤G，否，则等待1分钟，执行步骤F；
步骤G. 进入灭菌第一阶段；
步骤H. 计算机控制单元判断：真空泵变量I=0？
是，则执行步骤I，否，则等待1分钟，执行步骤H；
步骤I. 进入灭菌第二阶段；
步骤J. 结束灭菌程序。
其中所述步骤E进入灭菌预备阶段，包括以下步骤：
E1. 计算机控制单元设定：真空泵变量I=1；
E2. 打开真空阀，启动真空系统，抽真空至第一预定真空度；
E3. 关闭真空阀，关闭真空系统；
E4. 计算机控制单元设定：真空泵变量I=0；
E5. 计算机控制单元判断：等离子电源变量J=0？
是，则执行步骤E6，否，则等待1分钟，执行步骤E5；
E6. 计算机控制单元设定：等离子电源变量J=1；
E7. 打开电源继电器，启动等离子体系统，保持预定电离时间；
E8. 关闭电源继电器和等离子体系统；
E9. 计算机控制单元设定：等离子电源变量J=0；
E10. 打开进气阀，吸入过滤空气，保持常压至预定常压时间；
E11. 关闭进气阀。
其中，所述步骤G进入灭菌第一阶段，包括以下步骤：
G1. 计算机控制单元设定：真空泵变量I=1；
G2. 打开真空阀，启动真空系统，抽真空至第二预定真空度；
G3. 关闭真空阀，关闭真空系统；
G4. 计算机控制单元设定：真空泵变量I=0；
G5. 打开注入电磁阀，注入液体过氧化氢；
G6. 关闭注入电磁阀，等待预定注入时间；
G7. 打开进气阀，吸入过滤空气，保持常压至预定时间；
G8. 关闭进气阀。
其中，所述步骤I进入灭菌第二阶段，包括以下步骤：
I1. 计算机控制单元设定：真空泵变量I=1；
I2. 打开真空阀，启动真空系统，抽真空至第一预定真空度；
I3. 关闭真空阀，关闭真空系统；
I4. 计算机控制单元设定：真空泵变量I=0；
I5. 计算机控制单元判断：等离子电源变量J=0？
是，则执行步骤I6，否，则等待1分钟，执行步骤I5；
I6. 计算机控制单元设定：等离子电源变量J=1；
I7. 打开电源继电器，启动等离子体系统，保持预定电离时间；
I8. 关闭电源继电器和等离子体系统；
I9. 计算机控制单元设定：等离子电源变量J=0；
I10. 打开进气阀，吸入过滤空气，保持常压至预定常压时间；
I11. 关闭进气阀。
本发明与现有技术相比的有益效果是：
由于灭菌设备的灭菌舱至少为两个，多个灭菌舱通过控制单元分别与真空装置、灭菌剂注入装置和等离子体发生装置并行连接，即多个灭菌舱与一套灭菌舱配套系统连接，通过灭菌设备的控制系统，实现用一套灭菌舱配套装置完成多个灭菌舱内物品的灭菌消毒，减少了灭菌舱配套装置的空闲时间，从而大大提高了灭菌设备的使用效率，降低了灭菌设备的成本。另外，不同类别，或要求不同灭菌条件的待灭菌物品可以在不同的舱内消毒，有助于提高灭菌效率。
附图说明
下面将结合附图及实施例对本发明作进一步说明，附图中：
图1是根据本发明的一个实施方案的等离子体灭菌设备的示意图；
图2是根据本发明的另一实施方案的等离子体灭菌设备的示意图；
图3是根据本发明的一个实施方案的等离子体灭菌设备的结构图；
图4是根据本发明的实施方案的灭菌方法流程图。
附图标记：
1a、1b 第一、第二灭菌舱
2 真空装置
201 排气过滤器
3 灭菌剂注入装置
4、4a、4b 等离子体发生装置
5a、5b 第一控制单元
501a、501b 真空电磁阀
502a、502b 进气电磁阀
503a、503b 进气过滤阀
504a、504b 真空抽气口
6a、6b 第二控制单元
601a、601b 灭菌剂注入口
7a、7b 第三控制单元
701a、701b 继电器
702a、702b 电极馈入
8a、8b 真空计
9a、9b 加热片
10a、10b 电极板
11a、11b 金属舱体
12a、12b 灭菌舱门
13a、13b 绝缘垫
具体实施方式
以下将结合附图详细描述本发明的优选实施方案。
图1是根据本发明的一个实施方案的等离子体灭菌设备的示意图。如图所示，等离子体灭菌设备包括两个灭菌舱1a和1b；每个灭菌舱内装有等离子体发生电极10a和10b；真空装置2、灭菌剂注入装置3和等离子体发生装置4分别为一个，并且装于灭菌舱1a和1b的外部；所述灭菌舱1a和1b分别通过各自的真空管道和第一控制单元5a和5b并行连接到真空装置2；分别通过各自的灭菌剂管道和第二控制单元6a和6b并行连接到灭菌剂注入装置3；等离子体发生电极10a和10分别通过各自的第三控制单元7a和7b并行连接到等离子体发生装置4。
图2是根据本发明的另一实施方案的等离子体灭菌设备的示意图。如图所示，等离子体灭菌设备包括两个灭菌舱1a和1b；每个灭菌舱内装有等离子体发生电极10a和10b；真空装置2、灭菌剂注入装置3和两个等离子体发生装置4a和4b装于灭菌舱1a和1b的外部；所述灭菌舱1a和1b分别通过各自的真空管道和第一控制单元5a和5b并行连接到真空装置2；分别通过各自的灭菌剂管道和第二控制单元6a和6b并行连接到灭菌剂注入装置3；等离子体发生电极10a和10通过各自的第三控制单元7a和7b分别连接到等离子体发生装置4a和4b。
作为本发明的优选实施方案，所述等离子体灭菌设备还包括连接到第一、第二、第三控制单元的计算机控制单元，用于控制第一、第二、第三控制单元。
作为本发明的优选实施方案，第一控制单元5a可以包括与灭菌舱1a相连接的第一过滤电磁阀和第一真空电磁阀，第一过滤电磁阀同时与第一过滤器相连接；第一控制单元5b可以包括与灭菌舱1b相连接的第二过滤电磁阀和第二真空电磁阀，第二过滤电磁阀同时与第二过滤器相连接，第一真空电磁阀和第二真空电磁阀并行连接到真空装置2。
作为本发明的优选实施方案，第二控制单元6a可以包括与灭菌舱1a相连接的第一注入电磁阀；第二控制单元6b可以包括与灭菌舱1b相连接的第二注入电磁阀，第一注入电磁阀和第二注入电磁阀并行连接到注入装置3。
作为本发明的优选实施方案，第三控制单元7a可以包括与灭菌舱1a相连接的第一继电器、连通第一继电器的第一开关；第三控制单元7b可以包括与灭菌舱1b相连接的第二继电器、连通第二继电器的第二开关，第一开关和第二开关并行连接到等离子体发生装置4，或分别接连到等离子体发生装置4a和4b。
图3是根据本发明的一个实施方案的等离子体灭菌设备的结构图。图中的等离子体灭菌设备包括两个灭菌舱1a和1b，而真空装置（真空泵）2、灭菌剂（H2O2）注入装置3、等离子体发生装置（等离子电源）4则各有一个。
灭菌舱1a和1b分别设有用于并行连接到真空装置2的真空抽气口504a和504b；用于并行连接到灭菌剂（H2O2）注入装置3的H2O2注入口601a和601b；用于并行连接到等离子体发生装置4的电极馈入702a和702b。
灭菌舱1a和1b分别包括灭菌舱门12a和12b；在舱门上和舱体外设有多个加热片9a和9b。此外，灭菌舱1a和1b上还分别装有真空计8a和8b。
真空泵2还连接有排气过滤器201，用于过滤抽真空期间排出的空气。真空泵2通过第一控制单元5a（包括真空电磁阀501a、进气电磁阀502a、真空抽气口504a）连接到灭菌舱1a，进气电磁阀502a上还连接有进气过滤器503a；通过第一控制单元5b（包括真空电磁阀501b、进气电磁阀502b、真空抽气口504b）连接到灭菌舱1b，进气电磁阀502b上还连接有进气过滤阀503b。
灭菌剂（H2O2）注入装置2通过第二控制单元（H2O2电磁阀）6a连接到灭菌舱1a；通过第二控制单元（H2O2电磁阀）6b连接到灭菌舱1a。
等离子体发生装置4包括等离子电源，并且通过第三控制单元7a（包括继电器701a）连接到灭菌舱1a；通过第三控制单元7b（包括继电器701b）连接到灭菌舱1b。灭菌舱体11a、11b本身为金属，充当等离子体发生装置的负极；等离子体发生装置4分别通过电极馈入702a和702b连接到设在灭菌舱内、用作等离子体发生装置的正极的电极板10a和10b；电极板10a和10b分别通过绝缘垫13a和13b与金属舱体隔开。
按照以上的方法，使用一套配套装置（真空装置、灭菌剂注入装置、等离子体发生装置）可以实现对两个灭菌舱的灭菌操作。当配套装置对第一灭菌舱的作用完成后，处于空闲时，可以在不影响第一灭菌舱的灭菌操作的情况下，再被用于对第二灭菌舱作用。从而大大提高了配套设备的使用效率，同时还有利于减小灭菌操作时间，提高灭菌效率。特别是当需要对不同种类的待灭菌物品进行灭菌时，可以将待灭菌物品按照种类、对灭菌条件的要求等分类放入多个灭菌舱，并针对每个灭菌舱设置各自的参数，从而实现有效地灭菌处理，且能大大节约灭菌处理时间和设备成本。
所示出的等离子体灭菌设备仅为示例性的，可以根据实际需要，在本发明权利要求的精神和范围内作出调整和改动。例如，灭菌舱的个数可以有两个、三个以及更多个。真空装置、灭菌剂注入装置以及等离子体发生装置的数目可以根据需要调整，其分别可以具有与灭菌舱相同的数目，分别连接到每个灭菌舱，以在节省设备成本和提高设备使用效率之间寻求最优化平衡。例如，当使用两个灭菌舱时，这两个灭菌舱可以共用一个真空装置和一个等离子体发生装置，而分别使用各自的一个灭菌剂注入装置；或者两个灭菌舱，共用一个灭菌剂注入装置和一个等离子体发生装置，而分别使用各自的一个真空装置；或者两个灭菌舱，共用一个真空装置，而分别使用各自的一个灭菌剂注入装置，分别使用各自的一个等离子体发生装置；或者两个灭菌舱，共用一个等离子体发生装置，而分别使用各自的一个灭菌剂注入装置，分别使用各自的一个真空装置；或者，两个灭菌舱，共用一个灭菌剂注入装置，而分别使用各自的一个等离子体发生装置，分别使用各自的一个真空装置。第一、第二、第三控制单元，以及计算机控制单元也可以根据需要进行调整。例如，各个控制单元还可以包括除电磁阀、继电器以外的其他合适的元件，如真空计、温度计等。计算机控制单元可以是单独的部分，也可以集成在设备中。
图4是根据本发明的示例性实施方案的灭菌方法流程图。
首先是系统准备阶段4001，启动设备，系统预热，然后将待灭菌物品放入独立的灭菌舱1a或1b或两者内，并启动灭菌舱。之后，计算机控制单元判断真空泵是否空闲，并根据判断结果确定下一步操作：若是，则进入灭菌预备阶段4002，若否，则等待一分钟后，再次判断。
在灭菌预备阶段4002中：首先是步骤40021，启动真空泵、真空电磁阀，将所述灭菌舱抽真空至≤50Pa，之后关闭真空泵、真空电磁阀。该步骤用于干燥灭菌舱，除去多余水分。然后计算机控制单元判断等离子体电源是否空闲，并根据判断结果确定下一步操作：若是，则进入步骤40022，若否，则等待一分钟后，再次判断；在步骤40022，启动等离子体电源、继电器，并保持2分钟后，关闭等离子体电源、继电器。该步骤用于进一步干燥灭菌舱，并除去灭菌舱内可能残留的灭菌剂。随后进入步骤40023，打开真空进气阀，吸入过滤空气，使灭菌舱内保持常压≥1分钟后关闭真空进气阀。进入的过滤空气会扰动步骤40022中在灭菌舱内产生的气体和水分，以利于在下一步骤中将这些物质抽出灭菌舱。至此，灭菌预备阶段完成。灭菌预备阶段4002完成后，计算机控制单元判断真空泵是否空闲，并根据判断结果确定下一步操作：若是，则进入灭菌第一阶段4003，若否，则等待一分钟后，再次判断。
在灭菌第一阶段4003中：首先是步骤40031，启动真空泵、真空电磁阀，将所述灭菌舱抽真空至≤50Pa，之后关闭真空泵、真空电磁阀。接着是步骤40032，打开H2O2注入装置和H2O2电磁阀，将合适量的H2O2注入到灭菌舱内，将压力维持在800~1800 Pa，等待一足够时间之后关闭H2O2电磁阀。由于灭菌舱内处于真空状态，H2O2注入后，将迅速弥散开来，并附着在待灭菌物品表面上，弥漫时间约6分钟。在步骤40033，打开真空进气阀，吸入过滤空气，使灭菌舱内保持常压≥1分钟后关闭真空进气阀。吸入的空气扰动弥散雾化的H2O2，使其更充分地与待灭菌物品表面接触，特别是可以由此而进入到细长管状物品的管腔内，并附着到管腔内壁上，以达到更好的灭菌效果。至此，灭菌第一阶段完成。灭菌第一阶段4003完成后，计算机控制单元判断真空泵是否空闲，并根据判断结果确定下一步操作：若是，则进入灭菌第二阶段4004，若否，则等待一分钟后，再次判断。
在灭菌第二阶段4004中：首先是步骤40041，启动真空泵、真空电磁阀，将所述灭菌舱抽真空至≤50Pa，之后关闭真空泵、真空电磁阀。该步骤使得灭菌舱内达到等离子体激发条件。然后计算机控制单元判断等离子体电源是否空闲，并根据判断结果确定下一步操作：若是，则进入步骤40042，若否，则等待一分钟后，再次判断。在步骤40042，启动等离子体电源、继电器，并保持6分钟后，关闭等离子体电源、继电器。该步骤中，气化的H2O2在RF的作用下产生等离子体，通过低温等离子体的活性自由基作用，杀灭微生物。当RF波停止时，等离子体化状态结束，转变成稳定的氧分子及水分子。接着在步骤40043，打开真空进气阀，吸入过滤空气，使灭菌舱内保持常压≥1分钟后关闭真空进气阀。灭菌完成。
优选地，灭菌方法还可以通过以下步骤来完成：
步骤A. 将待灭菌物品分别放入独立的灭菌舱内；
步骤B. 计算机控制单元内输入系统变量，真空泵变量I=0，等离子电源变量J=0；
步骤C. 启动灭菌舱；
步骤D. 计算机控制单元判断：真空泵变量I=0？
是，则执行步骤E，否，则等待1分钟，执行步骤D；
步骤E. 进入灭菌预备阶段；
步骤F. 计算机控制单元判断：真空泵变量I=0？
是，则执行步骤G，否，则等待1分钟，执行步骤F；
步骤G. 进入灭菌第一阶段；
步骤H. 计算机控制单元判断：真空泵变量I=0？
是，则执行步骤I，否，则等待1分钟，执行步骤H；
步骤I. 进入灭菌第二阶段；
步骤J. 结束灭菌程序。
其中所述步骤E进入灭菌预备阶段，包括以下步骤：
E1. 计算机控制单元设定：真空泵变量I=1；
E2. 打开真空阀，启动真空系统，抽真空至第一预定真空度；
E3. 关闭真空阀，关闭真空系统；
E4. 计算机控制单元设定：真空泵变量I=0；
E5. 计算机控制单元判断：等离子电源变量J=0？
是，则执行步骤E6，否，则等待1分钟，执行步骤E5；
E6. 计算机控制单元设定：等离子电源变量J=1；
E7. 打开电源继电器，启动等离子体系统，保持预定电离时间；
E8. 关闭电源继电器和等离子体系统；
E9. 计算机控制单元设定：等离子电源变量J=0；
E10. 打开进气阀，吸入过滤空气，保持常压至预定常压时间；
E11. 关闭进气阀。
其中，所述步骤G进入灭菌第一阶段，包括以下步骤：
G1. 计算机控制单元设定：真空泵变量I=1；
G2. 打开真空阀，启动真空系统，抽真空至第二预定真空度；
G3. 关闭真空阀，关闭真空系统；
G4. 计算机控制单元设定：真空泵变量I=0；
G5. 打开注入电磁阀，注入液体过氧化氢；
G6. 关闭注入电磁阀，等待预定注入时间；
G7. 打开进气阀，吸入过滤空气，保持常压至预定时间；
G8. 关闭进气阀。
其中，所述步骤I进入灭菌第二阶段，包括以下步骤：
I1. 计算机控制单元设定：真空泵变量I=1；
I2. 打开真空阀，启动真空系统，抽真空至第一预定真空度；
I3. 关闭真空阀，关闭真空系统；
I4. 计算机控制单元设定：真空泵变量I=0；
I5. 计算机控制单元判断：等离子电源变量J=0？
是，则执行步骤I6，否，则等待1分钟，执行步骤I5；
I6. 计算机控制单元设定：等离子电源变量J=1；
I7. 打开电源继电器，启动等离子体系统，保持预定电离时间；
I8. 关闭电源继电器和等离子体系统；
I9. 计算机控制单元设定：等离子电源变量J=0；
I10. 打开进气阀，吸入过滤空气，保持常压至预定常压时间；
I11. 关闭进气阀。
上述灭菌方法步骤仅为示例性的，可以根据需要、根据实际条件来设置具体的参数（例如真空度、时间等等）以完成不同的灭菌过程。根据灭菌舱内待灭菌物品种类，两个舱的灭菌条件可以设为相同，也可以不同。尽管常用的等离子体灭菌剂为过氧化氢，实际应用中，灭菌剂的种类、浓度、形式等也可以根据需要而变化。此外，灭菌过程中，配套单元的使用顺序、时间、次数等等也都可以根据需要进行调整。例如可以根据需要在不同灭菌阶段，以不同顺序、多次使用真空装置、灭菌剂注入装置、等离子体发生装置，以改进灭菌效果。
以上内容是结合具体的优选实施方案对本发明所作的进一步详细说明，应理解在不脱离本发明构思的前提下，还可以做出若干简单推演，都应当视为属于本发明的保护范围。

Claims (13)

  1. 一种等离子体灭菌设备，包括灭菌舱（1），设在所述灭菌舱内的等离子体发生电极（10），以及在所述灭菌舱外部并与之连接的真空装置（2）、灭菌剂注入装置（3）和等离子体发生装置（4），其特征在于，
    所述灭菌舱为至少两个，所述真空装置、灭菌剂注入装置和等离子体发生装置分别为一个或小于等于所述灭菌舱的数量；
    每个所述灭菌舱通过各自的真空管道和第一控制单元（5）连接到供单独使用或共同使用的一个所述真空装置；
    每个所述灭菌舱通过各自的灭菌剂管道和第二控制单元（6）连接到供单独使用或共同使用的一个所述灭菌剂注入装置；
    每个所述灭菌舱中的等离子体发生电极通过各自的第三控制单元（7）连接到供单独使用或共同使用的一个所述等离子体发生装置，
    其中所述真空装置、所述灭菌剂注入装置和所述等离子体发生装置中的至少一个由至少两个所述灭菌舱共同使用 。
  2. 根据权利要求1所述的等离子体灭菌设备，其特征在于，所述等离子体灭菌设备还包括计算机控制单元，所述计算机控制单元连接到所述第一、第二、第三控制单元，并用于控制所述第一、第二、第三控制单元。
  3. 根据权利要求1或2所述的等离子体灭菌设备，其特征在于：
    所述第一控制单元包括真空电磁阀和进气电磁阀，所述进气电磁阀还连接有进气过滤器；
    所述第二控制单元包括电磁阀；
    所述第三控制单元包括继电器 。
  4. 根据权利要求1所述的等离子体灭菌设备，其特征在于，所述灭菌舱为两个，所述真空装置、所述灭菌剂注入装置和所述等离子体发生装置分别为一个，每个所述灭菌舱通过各自的真空管道和第一控制单元并行连接到所述真空装置；每个所述灭菌舱通过各自的灭菌剂管道和第二控制单元并行连接到所述灭菌剂注入装置；每个所述灭菌舱中的所述等离子体发生电极通过各自的第三控制单元并行连接到所述等离子体发生装置。
  5. 根据权利要求1所述的等离子体灭菌设备，其特征在于，所述灭菌舱为两个，所述真空装置、所述灭菌剂注入装置分别为一个，所述等离子体发生装置为两个，每个所述灭菌舱通过各自的真空管道和第一控制单元并行连接到所述真空装置；每个所述灭菌舱通过各自的灭菌剂管道和第二控制单元并行连接到所述灭菌剂注入装置；两个所述灭菌舱中的所述等离子体发生电极通过各自的第三控制单元分别连接到一个所述等离子体发生装置。
  6. 一种使用权利要求3所述的等离子体灭菌设备的灭菌方法，包括以下阶段：
    启动阶段，包括将待灭菌物品放入独立的灭菌舱，以及启动灭菌舱；
    灭菌预备阶段，用于真空干燥所述待灭菌物品；
    灭菌第一阶段，用于将灭菌剂注入所述灭菌舱；以及
    灭菌第二阶段，用于对所述待灭菌物品进行等离子体灭菌，其特征在于，
    在所述灭菌预备阶段、灭菌第一阶段以及灭菌第二阶段之前以及期间，还包括如下步骤：
    计算机控制单元判断下一步骤要使用的装置是否空闲，并根据判断结果确定下一步操作：若是，则进入下一步骤；若否，则等待一预定时间后，再次判断，
    其中所述下一步骤要使用的装置选自真空装置、灭菌剂注入装置和等离子体发生装置 。
  7. 据权利要求6所述的方法，其特征在于，所述灭菌预备阶段包括以下步骤：
    当所述计算机控制单元判断要使用的真空装置空闲时，启动所述真空装置，打开第一控制单元，将所述真空舱抽至预定真空度后，关闭所述真空装置和所述第一控制单元；
    当所述计算机控制单元判断要使用的等离子体发生装置空闲时，启动等离子体发生装置，打开第三控制单元，在所述真空舱内激发等离子体，并保持一时间段后，关闭所述等离子体发生装置和所述第三控制单元；以及
    打开真空进气阀，使所述真空舱保持常压一预定时间后，关闭所述真空进气阀。
  8. 据权利要求6所述的方法，其特征在于，所述灭菌第一阶段包括以下步骤：
    当所述计算机控制单元判断要使用的真空装置空闲时，启动所述真空装置，打开第一控制单元，将所述真空舱抽至预定真空度后，关闭所述真空装置和所述第一控制单元；
    当所述计算机控制单元判断要使用的灭菌剂注入装置空闲时，打开第二控制单元，将灭菌剂注入所述灭菌舱，之后关闭所述第二控制单元；以及
    打开真空进气阀，使所述真空舱保持常压一预定时间后，关闭所述真空进气阀。
  9. 据权利要求6所述的方法，其特征在于，所述灭菌第二阶段包括以下步骤：
    当所述计算机控制单元判断要使用的真空装置空闲时，启动所述真空装置，打开第一控制单元，将所述真空舱抽至预定真空度后，关闭所述真空装置和所述第一控制单元；
    当所述计算机控制单元判断要使用的等离子体发生装置空闲时，启动所述等离子体发生装置，打开所述第三控制单元，在所述真空舱内激发等离子体，并保持一时间段后，关闭所述等离子体发生装置和所述第三控制单元；以及
    打开真空进气阀，使所述真空舱保持常压一预定时间后，关闭所述真空进气阀。
  10. 据权利要求6所述的方法，其特征在于，包括以下步骤：
    步骤A. 将待灭菌物品分别放入独立的灭菌舱内；
    步骤B. 计算机控制单元内输入系统变量，
    真空泵变量I=0， 等离子电源变量J=0；
    步骤C. 启动灭菌舱；
    步骤D. 计算机控制单元判断：真空泵变量I=0？
    是，则执行步骤E，
    否，则等待1分钟，执行步骤D；
    步骤E. 进入灭菌预备阶段；
    步骤F. 计算机控制单元判断：真空泵变量I=0？
    是，则执行步骤G，
    否，则等待1分钟，执行步骤F；
    步骤G. 进入灭菌第一阶段；
    步骤H. 计算机控制单元判断：真空泵变量I=0？
    是，则执行步骤I，
    否，则等待1分钟，执行步骤H；
    步骤I. 进入灭菌第二阶段；
    步骤J. 结束灭菌程序。
  11. 据权利要求10所述的方法，其特征在于，所述步骤E进入灭菌预备阶段，包括以下步骤：
    E1. 计算机控制单元设定：真空泵变量I=1；
    E2. 打开真空阀，启动真空系统，抽真空至第一预定真空度；
    E3. 关闭真空阀，关闭真空系统；
    E4. 计算机控制单元设定：真空泵变量I=0；
    E5. 计算机控制单元判断：等离子电源变量J=0？
    是，则执行步骤E6，
    否，则等待1分钟，执行步骤E5；
    E6. 计算机控制单元设定：等离子电源变量J=1；
    E7. 打开电源继电器，启动等离子体系统，保持预定电离时间；
    E8. 关闭电源继电器和等离子体系统；
    E9. 计算机控制单元设定：等离子电源变量J=0；
    E10. 打开进气阀，吸入过滤空气，保持常压至预定常压时间；
    E11. 关闭进气阀。
  12. 据权利要求10所述的方法，其特征在于，所述步骤G进入灭菌第一阶段，包括以下步骤：
    G1. 计算机控制单元设定：真空泵变量I=1；
    G2. 打开真空阀，启动真空系统，抽真空至第二预定真空度；
    G3. 关闭真空阀，关闭真空系统；
    G4. 计算机控制单元设定：真空泵变量I=0；
    G5. 打开注入电磁阀，注入液体过氧化氢；
    G6. 关闭注入电磁阀，等待预定注入时间；
    G7. 打开进气阀，吸入过滤空气，保持常压至预定时间；
    G8. 关闭进气阀。
  13. 据权利要求10所述的方法，其特征在于，所述步骤I进入灭菌第二阶段，包括以下步骤：
    I1. 计算机控制单元设定：真空泵变量I=1；
    I2. 打开真空阀，启动真空系统，抽真空至第一预定真空度；
    I3. 关闭真空阀，关闭真空系统；
    I4. 计算机控制单元设定：真空泵变量I=0；
    I5. 计算机控制单元判断：等离子电源变量J=0？
    是，则执行步骤I6，
    否，则等待1分钟，执行步骤I5；
    I6. 计算机控制单元设定：等离子电源变量J=1；
    I7. 打开电源继电器，启动等离子体系统，保持预定电离时间；
    I8. 关闭电源继电器和等离子体系统；
    I9. 计算机控制单元设定：等离子电源变量J=0；
    I10. 打开进气阀，吸入过滤空气，保持常压至预定常压时间；
    I11. 关闭进气阀。
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