WO2012157871A3 - Appareil d'hydrogénation de plasma - Google Patents

Appareil d'hydrogénation de plasma Download PDF

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Publication number
WO2012157871A3
WO2012157871A3 PCT/KR2012/003476 KR2012003476W WO2012157871A3 WO 2012157871 A3 WO2012157871 A3 WO 2012157871A3 KR 2012003476 W KR2012003476 W KR 2012003476W WO 2012157871 A3 WO2012157871 A3 WO 2012157871A3
Authority
WO
WIPO (PCT)
Prior art keywords
plasma
based compound
supply portion
generated
hydrogenation apparatus
Prior art date
Application number
PCT/KR2012/003476
Other languages
English (en)
Korean (ko)
Other versions
WO2012157871A2 (fr
Inventor
홍용철
이봉주
신동훈
Original Assignee
(주)그린사이언스
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by (주)그린사이언스 filed Critical (주)그린사이언스
Publication of WO2012157871A2 publication Critical patent/WO2012157871A2/fr
Publication of WO2012157871A3 publication Critical patent/WO2012157871A3/fr

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
    • B01J19/00—Chemical, physical or physico-chemical processes in general; Their relevant apparatus
    • B01J19/08—Processes employing the direct application of electric or wave energy, or particle radiation; Apparatus therefor
    • B01J19/12—Processes employing the direct application of electric or wave energy, or particle radiation; Apparatus therefor employing electromagnetic waves
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
    • B01J19/00—Chemical, physical or physico-chemical processes in general; Their relevant apparatus
    • B01J19/08—Processes employing the direct application of electric or wave energy, or particle radiation; Apparatus therefor
    • B01J19/087—Processes employing the direct application of electric or wave energy, or particle radiation; Apparatus therefor employing electric or magnetic energy
    • B01J19/088—Processes employing the direct application of electric or wave energy, or particle radiation; Apparatus therefor employing electric or magnetic energy giving rise to electric discharges
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
    • B01J19/00—Chemical, physical or physico-chemical processes in general; Their relevant apparatus
    • B01J19/24—Stationary reactors without moving elements inside
    • B01J19/2405—Stationary reactors without moving elements inside provoking a turbulent flow of the reactants, such as in cyclones, or having a high Reynolds-number
    • C—CHEMISTRY; METALLURGY
    • C01—INORGANIC CHEMISTRY
    • C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
    • C01B33/00—Silicon; Compounds thereof
    • C01B33/08—Compounds containing halogen
    • C01B33/10—Compounds containing silicon, fluorine, and other elements
    • C—CHEMISTRY; METALLURGY
    • C01—INORGANIC CHEMISTRY
    • C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
    • C01B33/00—Silicon; Compounds thereof
    • C01B33/08—Compounds containing halogen
    • C01B33/107—Halogenated silanes
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
    • B01J2219/00—Chemical, physical or physico-chemical processes in general; Their relevant apparatus
    • B01J2219/08—Processes employing the direct application of electric or wave energy, or particle radiation; Apparatus therefor
    • B01J2219/0873—Materials to be treated
    • B01J2219/0881—Two or more materials
    • B01J2219/0883—Gas-gas

Landscapes

  • Chemical & Material Sciences (AREA)
  • Organic Chemistry (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Inorganic Chemistry (AREA)
  • Health & Medical Sciences (AREA)
  • General Health & Medical Sciences (AREA)
  • Toxicology (AREA)
  • Physics & Mathematics (AREA)
  • Electromagnetism (AREA)
  • Silicon Compounds (AREA)

Abstract

L'invention concerne un appareil d'hydrogénation de plasma. Selon un mode de réalisation de la présente invention, l'appareil d'hydrogénation de plasma comprend : une partie d'alimentation en ondes électromagnétiques permettant de faire osciller des ondes électromagnétiques de fréquence prédéfinie ; un tube à décharge permettant de générer un plasma à partir des ondes électromagnétiques produites par la partie d'alimentation en ondes électromagnétiques et de l'hydrogène gazeux ou un mélange gazeux contenant de l'hydrogène ; une partie d'alimentation en gaz permettant d'injecter en volute l'hydrogène gazeux ou le mélange gazeux contenant de l'hydrogène dans le tube à décharge ; une partie d'alimentation en réactif permettant d'alimenter en un composé à base de Si-Cl le plasma généré à l'intérieur du tube à décharge ; un réacteur dans lequel un composé à base de Si-H-Cl est généré par la réaction d'atomes d'hydrogène ou d'ions dissociés par le plasma généré et le composé à base de Si-Cl ; et une partie de décharge de produit permettant de décharger le composé à base de Si-H-Cl généré dans le réacteur.
PCT/KR2012/003476 2011-05-18 2012-05-03 Appareil d'hydrogénation de plasma WO2012157871A2 (fr)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
KR10-2011-0047020 2011-05-18
KR1020110047020A KR101329750B1 (ko) 2011-05-18 2011-05-18 플라즈마 수소화 반응 장치

Publications (2)

Publication Number Publication Date
WO2012157871A2 WO2012157871A2 (fr) 2012-11-22
WO2012157871A3 true WO2012157871A3 (fr) 2013-01-24

Family

ID=47177434

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/KR2012/003476 WO2012157871A2 (fr) 2011-05-18 2012-05-03 Appareil d'hydrogénation de plasma

Country Status (2)

Country Link
KR (1) KR101329750B1 (fr)
WO (1) WO2012157871A2 (fr)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102013207447A1 (de) 2013-04-24 2014-10-30 Evonik Degussa Gmbh Verfahren und Vorrichtung zur Herstellung von Octachlortrisilan
KR20210030040A (ko) * 2019-09-09 2021-03-17 엄환섭 일산화질소 발생장치
CN112479212B (zh) * 2020-12-16 2022-06-28 亚洲硅业(青海)股份有限公司 一种六氯乙硅烷提纯装置及方法

Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3933985A (en) * 1971-09-24 1976-01-20 Motorola, Inc. Process for production of polycrystalline silicon
US4102985A (en) * 1977-01-06 1978-07-25 Westinghouse Electric Corp. Arc heater production of silicon involving a hydrogen reduction
US4309259A (en) * 1980-05-09 1982-01-05 Motorola, Inc. High pressure plasma hydrogenation of silicon tetrachloride
JP2727728B2 (ja) * 1990-03-19 1998-03-18 三菱マテリアル株式会社 純物質の製造装置および純物質の製造方法
KR20070056965A (ko) * 2005-11-29 2007-06-04 칫소가부시키가이샤 고순도 다결정 실리콘의 제조 방법 및 제조 장치

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3933985A (en) * 1971-09-24 1976-01-20 Motorola, Inc. Process for production of polycrystalline silicon
US4102985A (en) * 1977-01-06 1978-07-25 Westinghouse Electric Corp. Arc heater production of silicon involving a hydrogen reduction
US4309259A (en) * 1980-05-09 1982-01-05 Motorola, Inc. High pressure plasma hydrogenation of silicon tetrachloride
JP2727728B2 (ja) * 1990-03-19 1998-03-18 三菱マテリアル株式会社 純物質の製造装置および純物質の製造方法
KR20070056965A (ko) * 2005-11-29 2007-06-04 칫소가부시키가이샤 고순도 다결정 실리콘의 제조 방법 및 제조 장치

Also Published As

Publication number Publication date
WO2012157871A2 (fr) 2012-11-22
KR101329750B1 (ko) 2013-11-14
KR20130027616A (ko) 2013-03-18

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