WO2012134147A1 - Appareil d'inspection visuelle utilisant une grille de partition de la lumière visible et une grille de partition de la lumière invisible - Google Patents

Appareil d'inspection visuelle utilisant une grille de partition de la lumière visible et une grille de partition de la lumière invisible Download PDF

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Publication number
WO2012134147A1
WO2012134147A1 PCT/KR2012/002220 KR2012002220W WO2012134147A1 WO 2012134147 A1 WO2012134147 A1 WO 2012134147A1 KR 2012002220 W KR2012002220 W KR 2012002220W WO 2012134147 A1 WO2012134147 A1 WO 2012134147A1
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WO
WIPO (PCT)
Prior art keywords
grid pattern
unit
light
grid
visible light
Prior art date
Application number
PCT/KR2012/002220
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English (en)
Korean (ko)
Inventor
박찬화
김성현
구자명
김태준
안보혁
Original Assignee
주식회사 미르기술
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Publication date
Application filed by 주식회사 미르기술 filed Critical 주식회사 미르기술
Publication of WO2012134147A1 publication Critical patent/WO2012134147A1/fr

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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/8806—Specially adapted optical and illumination features
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/24—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures
    • G01B11/245—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures using a plurality of fixed, simultaneously operating transducers
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/24—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures
    • G01B11/25—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures by projecting a pattern, e.g. one or more lines, moiré fringes on the object
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K13/00—Apparatus or processes specially adapted for manufacturing or adjusting assemblages of electric components
    • H05K13/08—Monitoring manufacture of assemblages
    • H05K13/081—Integration of optical monitoring devices in assembly lines; Processes using optical monitoring devices specially adapted for controlling devices or machines in assembly lines
    • H05K13/0815—Controlling of component placement on the substrate during or after manufacturing

Definitions

  • the present invention relates to a vision inspection apparatus, and more particularly, by performing a vision inspection using a grid pattern of visible light and a grid pattern of invisible light such as infrared rays or ultraviolet rays, the height of the inspection object can be measured quickly and accurately.
  • the present invention relates to a vision inspection apparatus using multiple grids of different colors.
  • SMT Surface Mounting Technology
  • PCB printed circuit board
  • SMD surface-mounting components
  • Surface mount lines consist of equipment such as surface mounters and vision inspection equipment.
  • the surface mounter is a device for mounting surface-mounted parts on a printed circuit board.
  • the surface mounter receives various surface-mounted parts supplied in the form of tape, stick, and tray from a feeder and places them on the mounting position on the printed circuit board. Perform.
  • the vision inspection apparatus inspects the mounting state of the surface mount component before or after the soldering process of the surface mount component is completed and transfers the printed circuit board to the next process according to the inspection result.
  • a typical vision inspection apparatus includes a lighting unit to which light is irradiated using a lamp or the like, a camera unit for photographing image information of various components mounted on an inspection unit and reflecting light from the lighting unit. It comprises a half mirror for transmitting the shape of the inspection object to the camera unit while being reflected on the inspection object.
  • the lighting unit is arranged in the housing by arranging a plurality of lamps in a plurality, when the illumination of the inspection object to supply power to the plurality of lamps to irradiate light.
  • All of the above inspection methods measure the two-dimensional shadow shape and calculate the three-dimensional height by using a trigonometric function.
  • the conventional vision inspection apparatus includes an illumination unit 110 to which light is irradiated using a lamp and the like, and an image of various components installed on the inspection object by being installed on the illumination unit 110. And a half mirror 130 for reflecting the light from the illumination unit 110 to capture information and transmitting the shape of the inspection object to the camera while reflecting light from the illumination unit 110.
  • the lighting unit 110 is arranged in the housing 140 by arranging a plurality of lamps, and, when irradiating the light to the inspection object to supply power to the plurality of lamps to irradiate light.
  • a half mirror provided for capturing an image while reflecting light is disposed in front of the central camera unit, thereby preventing a clearer image.
  • the present invention has been made to solve the above problems, to provide a vision inspection apparatus capable of measuring the height of the inspection object quickly and accurately.
  • Still another object of the present invention is to provide a vision inspection apparatus capable of improving the uniformity of light irradiated onto a surface of an inspection object.
  • Still another object of the present invention is to provide a vision inspection apparatus capable of capturing a clearer image by removing a half mirror disposed in front of a central camera unit.
  • Vision inspection apparatus for achieving the above object is to determine the good or bad of the inspection object by comparing the photographed image with the pre-input target image after taking the inspection object assembled or mounted during the assembly of the parts with the camera
  • An apparatus for vision inspection comprising: a stage unit for fixing or transferring an inspection object to an inspection position, an illumination unit positioned at an upper portion of the stage unit and providing illumination to the inspection object, and positioned at a center of the illumination unit
  • a central camera unit for acquiring a two-dimensional shape of the camera, a side camera unit disposed in a plurality of sides of the central camera unit, and a plurality of lattice pattern irradiation units disposed between the camera and the camera of the side camera unit at the side of the central camera unit; And, by reading the image taken by the central camera unit the inspection object And a control unit for controlling the stage unit, the grid pattern irradiation unit, and the camera unit.
  • the grid pattern irradiation unit of one of the grid pattern irradiation units includes a predetermined period (interval) size. Irradiating the grid pattern of visible light having a, and another grid pattern irradiation unit is characterized in that configured to irradiate the grid pattern of invisible light having another predetermined period (interval) size.
  • the invisible light may be infrared or ultraviolet light.
  • the grid pattern irradiation unit comprises any one of a liquid crystal panel or a micromirror module.
  • the grid pattern of the visible light and the grid pattern of the invisible light are configured to be irradiated at the same time.
  • a light diffusing unit may be disposed in front of the lighting unit.
  • the lighting unit may include a horizontal lighting unit for irradiating light in the vertical downward direction and an inclined lighting unit for irradiating light in the oblique direction.
  • the plurality of grid pattern irradiation units may be disposed to face each other with respect to the central camera unit.
  • the side camera parts may be disposed to face each other with respect to the center camera part.
  • the light diffusing unit is disposed in front of both the horizontal lighting unit and the inclined lighting unit.
  • the central camera unit may be a positioning camera unit for positioning the inspection object.
  • the positioning lighting unit and the half mirror may be disposed in front of the positioning camera unit.
  • the angle between the central camera portion and the grid pattern irradiation portion on the side view is 25 degrees to 45 degrees.
  • the height of the inspection object can be calculated quickly and accurately.
  • the uniformity of the light irradiated on the surface of the inspection object can be improved.
  • Fig. 1A is a perspective view showing a state in which a lattice pattern is irradiated to the part.
  • FIG.1 (b) is a top view which shows the state which irradiated the grid with a component.
  • FIG. 2 is a side cross-sectional view of a conventional vision inspection apparatus.
  • FIG. 3 is a schematic side view of a vision inspection apparatus according to the present invention.
  • FIG. 4 is a schematic plan view of a vision inspection apparatus according to the present invention.
  • 5 is a conceptual diagram showing the relationship between the period of the lattice pattern and the height of the parts.
  • FIG 3 is a schematic side view of a vision inspection apparatus according to the present invention
  • Figure 4 is a schematic plan view of the vision inspection apparatus according to the present invention.
  • the vision inspection apparatus is a good or bad object of the inspection object by comparing the photographed image with a pre-input target image after taking the inspection object assembled or mounted in the assembly process with the camera
  • a vision inspection apparatus with improved image clarity for discriminating an image comprising: a stage unit 10 for fixing or transferring the inspection object 5 to an inspection position, and an upper portion of the stage unit 10, wherein the inspection object A lighting unit 20 for providing illumination to the (5), a central camera unit 30 for obtaining a two-dimensional shape of the inspection object 5 is located in the center of the lighting unit 20, and the central camera unit (
  • the grid pattern irradiation unit 50-2, 50-4, 50-6, 50-8, which are arranged in a plurality of sides on the side, and the image photographed by the central camera unit 30 are read and the inspection object is good.
  • the vision processor 60 for determining a defect and And a control unit 70 for controlling a tab part 10, the grid pattern irradiation unit 50-2, 50-4, 50-6, 50-8, and the central camera unit 30.
  • One of the grid pattern irradiation units (50-2, 50-4, 50-6, 50-8) irradiates a grid pattern of visible light having a predetermined period (interval) size, and another grid pattern
  • the irradiator is configured to irradiate a grid pattern of invisible light rays having another predetermined period (interval) size.
  • Vision inspection apparatus of the present invention is installed to perform the vision inspection before moving to the next process through the conveyor of the preceding equipment, when inspecting the surface-mounted parts of the printed circuit board after the surface mounting work in the surface mounting line .
  • Such vision inspection apparatus can be installed in a manner that is arranged in the space formed between the conveyor of the line, trailing equipment and the conveyor, can also be used in the form of a single table without being connected to the line, trailing equipment.
  • the stage unit 10 is a component that provides a space in which the inspected object 5 to be inspected is seated, and a position adjusting unit (not shown) and a high position for adjusting and fixing the position of the inspected object 5. It may be configured to include a government (not shown).
  • the lighting unit 20 is installed on the upper portion of the stage unit 10 continuously or intermittently along the circumferential direction around the central camera unit 30.
  • the lighting unit 20 is a component that provides illumination to the inspection object 5 in order to secure accurate image information of the inspection object 5, by placing a plurality of lamps or LED bulbs to the inspection object (5) ) Can be arranged to illuminate from side to side.
  • the lighting unit 20 includes a horizontal lighting unit 22 and the inclined lighting unit 23.
  • the horizontal lighting unit 22 is installed on the upper portion of the stage 10 serves to provide the light incident to the inspection object (5) perpendicularly.
  • the inclined light unit 23 is disposed at the side of the vertical light unit 22 to provide light in the oblique direction.
  • the central camera unit 30 is a component for photographing the inspection object 5 in a planar manner, and preferably includes a CCD (charge coupled device) camera or a CMOS image sensor camera to have sensitivity even in an infrared or ultraviolet region. It is provided, but is configured to shoot the visible light and invisible light image at the same time.
  • CCD charge coupled device
  • CMOS image sensor camera to have sensitivity even in an infrared or ultraviolet region. It is provided, but is configured to shoot the visible light and invisible light image at the same time.
  • the degree of deformation of the pattern can be measured the height of the inspection object.
  • a half mirror is disposed in front of the center camera unit, and reflects the light from the lighting unit, and is configured to capture an image through the camera.
  • the center camera unit 30 No half mirror is placed in front.
  • a plurality of side camera units 40-2, 40-4, 40-6, and 40-8 are arranged symmetrically with respect to the center camera unit 30 on the side of the central camera unit 30, thereby providing an image. Eliminate blind spots and take pictures quickly.
  • the four side camera parts 40-2, 40-4, 40-6, and 40-8 are symmetrically arranged with respect to the center camera part 30, such as a substrate. Examine the lifting and uninsertion of the parts placed on the inspection object.
  • the grid pattern irradiation unit (50-2, 50-4, 50-6, 50-8) is a configuration for measuring the height by irradiating the grid pattern on the inspection object 5, a liquid crystal panel or a digital micromirror display ( DMD: Digital Micromirror Display and light source.
  • DMD Digital Micromirror Display and light source.
  • the shadow of the grid-shaped shadow is irradiated onto the inspection object 5 under the control of the control unit 70, and the degree of deformation of the grid-shaped shadow through the central camera unit 30, We can calculate the height of.
  • the grid pattern irradiation unit 50-2, 50-4, 50-6, 50-8 also has four grid pattern irradiation units 50-2, 50-4, 50-6, centered on the central camera unit 30. 50-8) are arranged symmetrically, and are configured to irradiate the grid 5 with the inspection object 5 simultaneously or sequentially.
  • any one of the grid pattern irradiation unit (50-2, 50-4, 50-6, 50-8) of the grid pattern irradiation unit irradiates a grid pattern of visible light having a predetermined period (interval) size
  • Another grid pattern irradiation unit is configured to irradiate the grid pattern of invisible light beams having another predetermined period (interval) size.
  • the larger intervals of the grid are irradiated with visible light such as red, wave, green, etc., and the smaller intervals of the grid are simultaneously irradiated with infrared or ultraviolet rays, thereby reducing the time required for measuring the height of the component. This allows more accurate height measurements.
  • the arrangement angle a between the grid pattern irradiation unit 50-2, 50-4, 50-6, 50-8 and the central camera unit 30 is arranged in an angle range of 25 degrees to 45 degrees. .
  • the angle (a) When the angle (a) is smaller than 25 degrees, the degree of deformation of the grid pattern according to the height of the component is small, which may cause an error in the height calculation.
  • the angle (a) is larger than 45 degrees, the grid pattern irradiation unit ( 50-2, 50-4, 50-6, 50-8), the difference in the width of the grid pattern irradiated on the near and far sides is too large, which may cause errors in the height calculation.
  • the vision processing unit 60 calculates the image information of the inspection object 5 obtained from the camera unit through a mathematical process such as Fourier transform (Fourier Transform), and compares with the reference value input in advance The good or bad of the object 5 is determined.
  • a mathematical process such as Fourier transform (Fourier Transform)
  • control unit 70 is a component including a motion controller for controlling the driving and operation of the stage unit 10 and the camera unit, and may be provided to control driving of the entire vision inspection apparatus according to the present invention.
  • the controller 70 is responsible for physical control such as photographing position control of the vision inspection apparatus, processing of photographed images, and lighting unit control according to a system control program, as well as performing inspection task and data calculation task.
  • control unit 70 is in charge of the overall control of the vision inspection apparatus, such as output device control for outputting the work contents and inspection results to the monitor and input device control for the operator to input the settings and all the details.
  • the light diffusion unit 25 such as a light diffusion plate is disposed in front of the illumination unit 20, so that the light from the illumination unit 20 is evenly irradiated to the entire area of the inspection object.
  • the light diffusion unit 25 is configured to be bent in a side cross-section so that the light diffusion unit 25 can be disposed in front of both the horizontal light unit 22 and the inclined light unit 23.
  • a positioning camera unit 80 for checking the position of the inspection object.
  • the positioning lighting unit 84 and the half mirror 82 is disposed in front of the positioning camera unit 80.
  • the configuration for positioning is accommodated in the housing of the separate positioning camera unit 80, thereby reducing the housing diameter of the central camera unit 30 It can be reduced and management is easy even in case of accessory failure.
  • 5 is a conceptual diagram showing the relationship between the period of the lattice pattern and the height of the parts.
  • the straight lines connecting the points a, b, c and d conceptually show the height that can be measured by the lattice pattern having a large period.
  • a large periodic grid has a resolution of 500 micrometers, so all heights from 0 to 500 micrometers are recognized as the same height, and another height from 500 to 1000 micrometers.
  • the grid pattern irradiation unit 50-2, 50-4, 50-6, and 50-8 may first measure the approximate height of the component by irradiating the grid pattern with a large gap.
  • the height of the hexahedral shaped part illustrated in FIG. 5 is 1680 micrometers, the height of the part is primarily measured in the range of 1500 and 2000 micrometers through the lattice of a large period.
  • the grid pattern with a small period is examined to determine that the height from point d to point R is 180 micrometers.
  • the total height of the part is 1500 + 180, measured 1680 micrometers.
  • the lattice pattern corresponding to the first lattice pattern on the left in FIG. 1 Plaid, 2-1 Plaid, 3-1 Plaid that is, whether the plaid on the top of the part and the plaid on the bottom coincide after several cycles (lattice spacing) Cannot be judged.
  • the large cycle plaid and the small cycle plaid may be photographed by irradiating the large cycle plaid and the small cycle plaid once, or irradiating the large cycle plaid once according to the requirements of the height inspection device. Photographed by a small period, the grid may be configured to enable a more accurate height measurement by photographing while moving between the grid of a large period.
  • the grid pattern of the visible light and invisible light such as red, blue, green, etc. according to the period size of the grid irradiated by the grid pattern irradiation unit (50-2, 50-4, 50-6, 50-8) Investigating the grid pattern separately allows you to measure the height of components more clearly and quickly.
  • the lattice of large periods can be irradiated with visible light
  • the lattice of smaller periods can be irradiated with infrared rays or ultraviolet rays.
  • the grid pattern irradiated by the grid pattern irradiation units 50-2, 50-4, 50-6, and 50-8 may irradiate the grid pattern of a large period and the grid pattern of a small period simultaneously or sequentially.
  • each grid pattern irradiation unit (50-2, 50-4, 50-6, 50-8) through the first check the lattice of a large period, and then the lattice of the small period, or Smaller grids can be irradiated at the same time.
  • the larger plaid spacing is preferably comprised three to six times larger than the smaller plaid spacing.
  • the lattice spacing of a large period is less than three times, the difference in measurement resolution due to the difference of the period size is not large, which is not desirable for more accurate height measurement. If the lattice spacing of a large period exceeds six times, The difference between the spacing and the small spacing becomes so large that it has an undesirable effect on the sharpness of the grid shape finally reflected on the inspection object.

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  • General Physics & Mathematics (AREA)
  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
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  • General Health & Medical Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
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  • Analytical Chemistry (AREA)
  • Computer Vision & Pattern Recognition (AREA)
  • Operations Research (AREA)
  • Manufacturing & Machinery (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Length Measuring Devices By Optical Means (AREA)
  • Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)

Abstract

Selon la présente invention, un appareil d'inspection visuelle capture une image d'un objet à inspecter au moyen d'une caméra, ledit objet étant assemblé ou monté lors d'un processus d'assemblage d'éléments, et compare l'image capturée à une image entrée au préalable, afin de déterminer si l'objet à inspecter est accepté ou refusé. L'appareil d'inspection visuelle comprend : une unité d'échantillonnage, permettant de fixer l'objet à inspecter à un emplacement d'inspection ou à transférer l'objet à inspecter ; une unité d'éclairage, disposée au-dessus de l'unité d'échantillonnage afin d'éclairer l'objet à inspecter ; une unité de type caméra centrale disposée au centre de l'unité d'éclairage, de sorte à acquérir la forme bidimensionnelle de l'objet à inspecter ; une pluralité d'unités de type caméras latérales disposées à côté de l'unité de type caméra centrale ; une pluralité d'unités d'illumination de grille de partition, disposées parmi les caméras des unités de type caméras latérales à côté de l'unité de type caméra centrale ; une unité de traitement visuel qui lit l'image capturée par l'unité de type caméra centrale afin de déterminer si l'objet à inspecter est accepté ou refusé ; et une unité de commande destinée à contrôler l'unité d'échantillonnage, les unités d'illumination de grille de partition, et les unités de type caméra. L'une quelconque des unités d'illumination de grille de partition est configurée pour illuminer une grille de partition de la lumière visible présentant une période prédéterminée, tandis que l'autre unité d'illumination de grille de partition est configurée pour illuminer une grille de partition de la lumière invisible présentant une autre période prédéterminée.
PCT/KR2012/002220 2011-03-31 2012-03-27 Appareil d'inspection visuelle utilisant une grille de partition de la lumière visible et une grille de partition de la lumière invisible WO2012134147A1 (fr)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
KR10-2011-0029564 2011-03-31
KR1020110029564A KR101245623B1 (ko) 2011-03-31 2011-03-31 가시광선의 격자무늬와 자외선 또는 적외선 격자 무늬를 이용한 비전검사장치

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WO2012134147A1 true WO2012134147A1 (fr) 2012-10-04

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Cited By (2)

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CN107774738A (zh) * 2017-09-29 2018-03-09 东莞市联洲知识产权运营管理有限公司 一种钢板凸点高度检测装置
WO2020159513A1 (fr) * 2019-01-31 2020-08-06 Halliburton Energy Services, Inc. Détection de profondeur de fond de trou par éclairage structuré

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JP5780659B2 (ja) * 2013-06-13 2015-09-16 ヤマハ発動機株式会社 ３次元形状測定装置
CN112712149B (zh) * 2020-12-30 2022-12-02 盛泰光电科技股份有限公司 一种基于二维码识别的生产信息管理系统

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KR100406843B1 (ko) * 2001-04-06 2003-11-21 (주) 인텍플러스 색정보를 이용한 실시간 3차원 표면형상 측정방법 및 장치
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* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN107774738A (zh) * 2017-09-29 2018-03-09 东莞市联洲知识产权运营管理有限公司 一种钢板凸点高度检测装置
WO2020159513A1 (fr) * 2019-01-31 2020-08-06 Halliburton Energy Services, Inc. Détection de profondeur de fond de trou par éclairage structuré
US11187070B2 (en) 2019-01-31 2021-11-30 Halliburton Energy Services, Inc. Downhole depth extraction using structured illumination

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KR20120111198A (ko) 2012-10-10

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